A medium metasurface type integrated spectral image sensor

Abstract

The application discloses a kind of medium super surface type integrated spectral image sensors, comprising: detection port and data processing unit;Detection port includes integrated photodetector, memory and signal processing circuit composition;The application is by using the integrated photodetector structure of spectroscopic detection, so that each image sensing unit has different spectral response characteristics, and then can discard the traditional filter structure, further reduce the inherent size of device, realize highly integrated spectral detection and imaging integrated device;The application utilizes the stack structure including integrated photodetector, memory and signal processing component, obtains the spectral data of incident light, and combines data processing unit, further realizes the presentation of hyperspectral image;The application utilizes the integrated photodetector of spectroscopic detection to prepare high-sensitivity image sensor, combined with spectral reconstruction algorithm processing, obtains spectral image.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of spectral image sensors, and in particular to a medium metasurface type integrated spectral image sensor. BACKGROUND

[0002] Spectral imaging is an image data technology based on a large amount of narrow-band spectral information, which is used to detect spatial information and spectral information of a target, and can realize the fusion of spatial dimensions and spectral dimensions. Spectral imaging has the characteristics of a large number of wavebands, high spectral resolution, narrow wavebands, wide spectral range, and integration of graphs and maps. A spectral imaging system mainly uses a spectral splitting system to realize spectral splitting, and then combines a photodetector array to realize spectral detection and imaging. In a conventional hyperspectral imaging system, a grating, a prism, a color filter film, an acousto-optic tunable filter, or the like is mainly used to realize spectral splitting. The conventional spectral imaging system mainly includes a scanning system (light signal receiving), a spectral splitting system, a photodetector (photoelectric conversion), and a signal processing system (data reading and transmission), and the like. Target radiation enters the spectral splitting optical system through the scanning system or the port, and is decomposed into a series of narrow-band radiation signals by using a filter or a dispersive element. The radiation signals are received by the photodetector system and output corresponding electrical signals, and the hyperspectral image is realized after signal processing. However, the spectral splitting and detection systems are separated from each other in the conventional spectral imaging system, the system is complex, the system cost is high, the maintenance is difficult, the system is difficult to integrate, and the anti-vibration performance is poor, which limits the application of the system in portable reconnaissance equipment, distributed field survey, unmanned platforms, medical spectroscopy, and consumer electronics. It can be seen that there is a great demand for miniaturization and integration of the spectral imaging system.

[0003] Therefore, the development of a small-sized / micro-sized chip-type integrated spectral image sensor will meet the needs of more application scenarios. SUMMARY

[0004] Therefore, the development of a small-sized / micro-sized chip-type integrated spectral image sensor will meet the needs of more application scenarios.

[0005] In order to achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0006] A medium metasurface type integrated spectral image sensor, the spectral image sensor comprising:

[0007] A detection port comprising: at least one set of integrated photodetectors, and a memory and a signal processing circuit matched with the integrated photodetectors; and being used for acquiring and transmitting incident spectral data;

[0008] a data processing unit for receiving the incident spectral data transmitted by the detection port and processing the incident spectral data, wherein a spectral reconstruction algorithm is configured in the data processing unit, and based on the spectral reconstruction algorithm, a spectral image is obtained;

[0009] The integrated photoelectric detector further comprises a plurality of photoelectric modulation units, the PIN structure or PN structure of the photoelectric modulation units has spectral wavelength sensitivity characteristics, and no additional color filter and light splitting unit is needed; and the spectral wavelength sensitivity characteristics are obtained by the following method.

[0010] The upper surface layer of the PIN structure or PN structure is changed by using etching technology and mask technology, so that the PIN structure or PN structure is constructed into an optical thin film layer with a metasurface structure.

[0011] Further, the detection port comprises a group of integrated photoelectric detectors, and the group of integrated photoelectric detectors comprises at least one integrated photoelectric modulation unit.

[0012] Further, the detection port further comprises a microlens system, and the microlens system adopts a lens assembly or a homogenizing assembly.

[0013] Further, the detection port comprises at least three groups of integrated photoelectric detectors arranged in parallel, and the three groups of integrated photoelectric detectors arranged in parallel are defined as spectral data units.

[0014] By changing the parameters of the metasurface structure of each photoelectric detector in the spectral data unit, photoelectric detectors with different responses are obtained, and the parameters of the metasurface structure include the size, period, material and depth of the metasurface.

[0015] The photoelectric detectors with different responses are used for spectral measurement of incident light to obtain spectral signal values with different response characteristics.

[0016] Further, the detection port further comprises an array map formed by a plurality of spectral data units, a row gating circuit, a column gating circuit, an analog signal processor, an analog-to-digital converter, a timing and control unit and a data transmission port.

[0017] The present application has the following advantages:

[0018] The present application uses a photoelectric detector structure with integrated spectral detection, so that each image sensing unit has different spectral response characteristics, thereby being able to abandon the traditional filter structure, further reducing the inherent size of the device, and realizing a highly integrated spectral detection and imaging integrated device.

[0019] The present application utilizes a stacked structure including an integrated photodetector, a memory and a signal processing component to obtain spectral data of incident light, and combines a data processing unit to further realize the presentation of hyperspectral images. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 A module block diagram of a medium metasurface type integrated spectral image sensor provided in Example 1;

[0021] Figure 2 A structure diagram of a detection port provided in Example 2 in the case of only having one set of integrated photodetectors;

[0022] Figure 3 A structure diagram of a detection port provided in Example 3 in the case of having multiple sets of integrated photodetectors;

[0023] Figure 4 A structure diagram of a detection port provided in Example 4 in the form of a pixel data unit structure;

[0024] IN THE DRAWINGS:

[0025] 1-detection port, 2-data processing unit, 11-integrated photodetector, 12-memory, 13-signal processing circuit, 21-row gate circuit, 22-column gate circuit, 23-analog signal processor, 24-analog-to-digital converter, 25-timing and control unit, 26-data transmission port, 27-array diagram, 3-spectral image sensor, 113-integrated photoelectric modulation unit, 114-microlens system. DETAILED DESCRIPTION

[0026] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described below in connection with the drawings of the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0027] Example 1

[0028] Referring to Figure 1 , the present embodiment provides a medium metasurface type integrated spectral image sensor, which is an integrated photoelectric detection device based on a narrow-band filter of a disc metasurface structure. A module block diagram of the spectral image sensor is shown in Figure 1 , and specifically, the spectral image sensor 3 includes:

[0029] a detection port 1 for obtaining and transmitting incident spectral data;

[0030] a data processing unit 2 for receiving the incident spectral data transmitted by the detection port 1 and processing the incident spectral data, wherein a spectral reconstruction algorithm is pre-configured in the data processing unit 2, and based on the spectral reconstruction algorithm, a spectral image is obtained;

[0031] wherein the detection port 1 comprises at least one set of integrated photodetectors 11, and the integrated photodetectors 11 are matched with a memory 12 and a signal processing circuit 13.

[0032] Specifically, in the embodiment, the integrated photodetector 11 is a minimum logic unit that simultaneously realizes light filtering modulation and photoelectric response by using a dielectric metasurface structure, and the integrated photodetector 11 further comprises different modulation units with different light modulation effects.

[0033] Specifically, in the embodiment, the spectral reconstruction algorithm is a prior art, and the specific algorithm is not limited in the embodiment.

[0034] Embodiment 2

[0035] Referring to Figure 2 , the embodiment is directed to the integrated spectral image sensor of the dielectric metasurface type provided in Embodiment 1, and on this basis, a specific structure diagram of a detection port is provided, in which the detection port specifically comprises:

[0036] a set of integrated photodetectors, wherein the set of integrated photodetectors comprises four integrated photoelectric modulation units 113, and the integrated photoelectric modulation unit 113 is a minimum unit structure of an array image sensor. The integrated photoelectric modulation unit 113 has a PIN structure or a PN structure itself with spectral wavelength sensitivity characteristics, without the need to additionally set other color filter and light splitting units such as a Bayer color filter, a grating filter module, and a light splitting stacked film structure.

[0037] More specifically, in the embodiment, the integrated photoelectric modulation unit 113 is changed by etching technology, mask technology, etc. to change the photosensitive film layer involved in the traditional array image sensor, so as to construct an optical film layer with dielectric metasurface structure characteristics.

[0038] The optical thin film layer is coupled with the incident light by using one or more modes of Mie resonance, electric dipole, and magnetic dipole, and then the PIN structure or the PN structure is used for photoelectric conversion to generate and store photo-generated carriers, so that the PIN structure or the PN structure has wavelength sensitivity characteristics, and a photoelectric modulation unit 113 is formed by integrating the light splitting and detection.

[0039] The traditional array image sensor includes a CMOS image sensor (CIS), a CCD, an array light detector, and the like.

[0040] Specifically, in the embodiment, the single detection port 1 further includes a signal processing circuit 13, a memory 12, and a microlens system 114 which are adapted to the integrated photoelectric detector 11, wherein

[0041] The signal processing circuit 13 is customized according to the change of the calculation model and the model of the integrated photoelectric modulation unit 113 in the embodiment, and satisfies the functions of logical operation and data transmission with the data processing unit.

[0042] The memory 12 is selected from RAM, such as DRAM, SRAM, and the like, and the specific type is not limited in the embodiment;

[0043] The microlens system 114 can be a lens assembly, a light homogenizing assembly, or other optical systems in the embodiment, or can not use a lens system in other cases according to the understanding of those skilled in the art, and the specific structure is not limited in the embodiment.

[0044] Embodiment 3

[0045] Referring to Figure 3 In the embodiment, the detection port has multiple groups of integrated photoelectric detectors 11 in parallel, wherein the multiple groups of integrated photoelectric detectors 11 in parallel are defined as spectral data units.

[0046] In the embodiment, there are three groups of integrated photoelectric detectors 11 in parallel, and the groups of integrated photoelectric detectors 11 are changed by changing the parameters of the metasurface structure of the integrated photoelectric detectors 11, so as to obtain groups of photoelectric detectors with different responses, wherein the parameters of the metasurface structure include the size, period, material, and depth of the metasurface.

[0047] The groups of photoelectric detectors with different responses are used for spectral measurement of the incident light to obtain spectral signal values with different response characteristics.

[0048] In the embodiment, the three groups of parallel integrated photodetectors 11 each have a memory 12 and a signal processing circuit 13 matched therewith.

[0049] Specifically, for the medium metasurface type integrated spectral image sensor adopting the embodiment, the corresponding data processing unit 2 is also configured with a calculation type spectral program to process and reconstruct the spectral signal values with different response characteristics to obtain spectral information data of the incident light.

[0050] Embodiment 4

[0051] Referring to Figure 4 Based on the medium metasurface type integrated spectral image sensor provided in Embodiment 1, the embodiment provides a structural diagram of a detection port with a specific structure, which is defined as a pixel data unit.

[0052] The pixel data unit includes:

[0053] an array diagram 27 composed of a plurality of spectral data units; a row gating circuit 21 connected to the array diagram 27;

[0054] and a column gating circuit 22; the column gating circuit 22 is also connected to an analog signal processor 23; the analog signal processor 23 is also connected to an analog-to-digital converter 24;

[0055] The pixel data unit further includes a timing and control unit 25 and a data transmission port 26.

[0056] The integrated spectral image sensor can obtain high-quality multispectral or hyperspectral image information.

[0057] In summary, the present application uses a split detection integrated photodetector structure, so that each image sensing unit has different spectral response characteristics, thereby being able to abandon the traditional filter structure, further reducing the inherent size of the device, and realizing a highly integrated spectral detection and imaging integrated device. The detection port of the present application uses a stacked structure including an integrated photodetector, a memory and a signal processing component to obtain spectral data of incident light, and further realizes the presentation of hyperspectral images in combination with a data processing unit. The present application uses a split detection integrated photodetector to prepare a high-sensitivity image sensor, and obtains a spectral image by combining a spectral reconstruction algorithm.

[0058] The details of the present application not described are well known to those skilled in the art.

[0059] The preferred embodiments of the present application have been described above in detail. It should be understood that modifications and variations to the present application can be affected by those skilled in the art without departing from the scope of the application. Accordingly, it is intended that all possible modifications and alterations be included within the scope of the present application as defined by the following claims.

Claims

1. A dielectric metasurface type integrated spectral image sensor, characterized by, The spectral image sensor comprises: a detection port comprising at least one set of integrated photodetectors, and memory and signal processing circuitry adapted to the integrated photodetectors, for acquiring and transmitting incident spectral data; a data processing unit for receiving the incident spectral data transmitted by the detection port and processing the incident spectral data, wherein the data processing unit is configured with a spectral reconstruction algorithm based on which a spectral image is obtained; wherein the integrated photodetectors further comprise a plurality of optoelectronic modulation units, the optoelectronic modulation units having PIN or PN structures with spectral wavelength sensitivity characteristics without the need for additional color filter and light splitting units; the spectral wavelength sensitivity characteristics are obtained by: changing the upper surface layer of the PIN or PN structure by etching technology and mask technology to construct an optical thin film layer with a dielectric metasurface structure; wherein the optical thin film layer utilizes one or more modes of coupling effects such as Mie resonance, electric dipole, and magnetic dipole to split the incident light.

2. The metasurface-type integrated spectral image sensor according to claim 1, wherein The detection port comprises a set of integrated photodetectors, and the set of integrated photodetectors comprises at least one integrated optoelectronic modulation unit.

3. The metasurface-type integrated spectral image sensor according to claim 2, wherein The detection port further comprises a microlens system, which uses a lens assembly or a homogenizing assembly.

4. The metasurface-type integrated spectral image sensor according to claim 1, wherein The detection port comprises at least three sets of parallel integrated photodetectors, which are defined as spectral data units; wherein the parameters of the dielectric metasurface structure of each photodetector in the spectral data unit are changed to obtain photodetectors with different responses; wherein the parameters of the dielectric metasurface structure include the size, period, material, and depth of the metasurface; The photodetectors with different responses are then used to measure the spectrum of the incident light to obtain spectral signal values with different response characteristics.

5. The metasurface-type integrated spectral image sensor according to claim 4, wherein The detection port further comprises an array map composed of a plurality of spectral data units, row gating circuitry, column gating circuitry, an analog signal processor, an analog-to-digital converter, a timing and control unit, and a data transmission port.

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