Process monitoring methods, devices, storage media and electronic equipment

Abstract

This disclosure provides a process monitoring method, apparatus, storage medium, and electronic device, relating to the field of semiconductor technology. The process monitoring method includes: acquiring script update information of a first script to be updated; determining the script execution status of the current production process based on the script update information and the execution information of a second script in the current production process; if the script execution status is an execution error, generating error information related to the script update information and sending the error information to a management terminal. The process monitoring method provided by this disclosure solves the technical problem of weak stability in current semiconductor manufacturing processes, achieving the technical effect of improving the stability of the manufacturing process.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and more particularly to a process monitoring method, apparatus, storage medium, and electronic device. Background Technology

[0002] Semiconductor manufacturing processes are complex and involve large volumes. To improve the efficiency of the manufacturing process, most steps are completed with the help of scripts.

[0003] As production processes are adjusted, scripts may need to be updated, such as adding new scripts or modifying existing ones. Scripts may coexist; for example, different scripts may operate on the same process node. If several scripts operating on the same process node interfere with each other, it can easily cause errors in the execution of that process node, thus affecting the normal operation of the entire process.

[0004] Therefore, the stability of current semiconductor manufacturing processes is relatively weak. Summary of the Invention

[0005] This disclosure provides a process monitoring method, apparatus, storage medium, and electronic device, thereby improving the stability of semiconductor manufacturing processes.

[0006] In a first aspect, one embodiment of this disclosure provides a process monitoring method, including:

[0007] Get the script update information for the first script to be updated;

[0008] The script execution status of the current production process is determined based on the script update information and the execution information of the second script in the current production process;

[0009] If the script execution status is "execution error", an error message for updating the script information will be generated and sent to the management terminal.

[0010] In one optional embodiment of this disclosure, several first process nodes corresponding to the execution of the first script in the current production process are determined based on script update information;

[0011] Based on the execution information, determine several second process nodes corresponding to the execution of the second script in the current production process;

[0012] The script execution status of the current production process is determined based on whether there are any overlapping nodes between several first process nodes and several second process nodes in the current production process.

[0013] In one optional embodiment of this disclosure, the script execution status of the current production process is determined based on whether there are overlapping nodes between a plurality of first process nodes and a plurality of second process nodes in the current production process, including:

[0014] If several first process nodes and several second process nodes overlap at least once in the current production process, then the script execution status of the current production process will be determined as an execution error.

[0015] In an optional embodiment of this disclosure, if at least one of the first process nodes and the second process nodes overlap in the current production process, the script execution status of the current production process is determined to be an execution error, including:

[0016] If several first process nodes and several second process nodes have at least one overlapping node in the current production process, then the script execution is simulated based on the script update information of the first script, the execution information of the second script, and the pre-configured script execution model to obtain the simulation results.

[0017] Based on the simulation results, determine whether the current production process script execution status is an execution error.

[0018] In one optional embodiment of this disclosure, script execution is simulated based on script update information of the first script, execution information of the second script, and a pre-configured script execution model to obtain simulation results, including:

[0019] The script update information is parsed to obtain the first execution target of the first script;

[0020] The execution information is parsed to obtain the second execution target of the second script;

[0021] The first and second execution targets are input into a pre-configured script execution model to obtain simulation results.

[0022] In one optional embodiment of this disclosure, determining whether the script execution status of the current production process is an execution error based on simulation results includes:

[0023] The simulation results are compared with the pre-configured error results to determine whether the current production process script execution status is an execution error.

[0024] In one optional embodiment of this disclosure, determining several first process nodes corresponding to the execution of the first script in the current production process based on script update information includes:

[0025] Based on the script update information, a query is performed from the pre-configured first script database to obtain several first process nodes corresponding to the script update information.

[0026] In one optional embodiment of this disclosure, the script execution status of the current production process is determined based on whether there are overlapping nodes between a plurality of first process nodes and a plurality of second process nodes in the current production process, including:

[0027] Query the node status identifier corresponding to each second process node from the pre-configured second script database;

[0028] The script execution status of the current production process is determined based on whether there are overlapping nodes between the second process node, which is marked as being in the execution state, and several first process nodes in the current production process.

[0029] In one optional embodiment of this disclosure, the script execution status of the current production process is determined based on whether there are overlapping nodes between a plurality of first process nodes and a plurality of second process nodes in the current production process, including:

[0030] If several first process nodes and several second process nodes do not overlap in the current production process, then the script execution status of the current production process is determined to be successful.

[0031] In an optional embodiment of this disclosure, the process monitoring method further includes:

[0032] If the script execution status is "execution error", an alert pop-up will be generated and displayed on the corresponding user interface.

[0033] In one optional embodiment of this disclosure, the execution priority of the second script is higher than that of the first script.

[0034] In one optional embodiment of this disclosure, obtaining script update information for the first script to be updated includes:

[0035] Retrieve the new script information for the first script to be added; and / or,

[0036] Get the script update information for the first script in the current production process.

[0037] Secondly, one embodiment of this disclosure provides a process monitoring device, the device comprising:

[0038] The acquisition module is used to obtain the script update information of the first script to be updated;

[0039] The determination module is used to determine the script execution status of the current production process based on the script update information and the execution information of the second script in the current production process;

[0040] The generation module is used to generate error messages for updating script information if the script execution status is "execution error" and send the error messages to the management terminal.

[0041] Thirdly, one embodiment of this disclosure provides a computer-readable storage medium having a computer program stored thereon that, when executed by a processor, implements the method described above.

[0042] Fourthly, one embodiment of this disclosure provides an electronic device, including: a processor; and a memory for storing executable instructions of the processor; wherein the processor is configured to perform the above-described method by executing the executable instructions.

[0043] The technical solution disclosed herein has the following beneficial effects:

[0044] The aforementioned process monitoring method first acquires the script update information of the first script to be updated. Then, based on the script update information and the execution information of the second script in the current production process, it performs simulations to determine the script execution status of the current production process. Finally, if the script execution status is an execution error, it generates an error message for the script update information and sends the error message to the management terminal to remind the relevant personnel to handle the first script in a timely manner, ensuring the stable operation of the entire process. This solves the technical problem of the weak stability of current semiconductor manufacturing processes and achieves the technical effect of improving the stability of production process operation. At the same time, it can also avoid production process errors caused by direct offline trial operation, thereby reducing actual production costs.

[0045] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0046] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this disclosure and, together with the description, serve to explain the principles of this disclosure. It is obvious that the drawings described below are merely some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0047] Figure 1 This diagram illustrates an application scenario of a process monitoring method according to this exemplary embodiment.

[0048] Figure 2 This illustrates a script execution route diagram in a process monitoring method according to this exemplary embodiment;

[0049] Figure 3 This illustrates a script execution route diagram in a process monitoring method according to this exemplary embodiment;

[0050] Figure 4This diagram illustrates a process monitoring method according to an exemplary embodiment.

[0051] Figure 5 This diagram illustrates a process monitoring method according to an exemplary embodiment.

[0052] Figure 6 This diagram illustrates a process monitoring method according to an exemplary embodiment.

[0053] Figure 7 This diagram illustrates a process monitoring method according to an exemplary embodiment.

[0054] Figure 8 This diagram illustrates a process monitoring method according to an exemplary embodiment.

[0055] Figure 9 This diagram illustrates the structure of a process monitoring device in this exemplary embodiment.

[0056] Figure 10 A schematic diagram of the structure of an electronic device in this exemplary embodiment is shown. Detailed Implementation

[0057] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided to make this disclosure more comprehensive and complete, and to fully convey the concept of exemplary embodiments to those skilled in the art. The described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a full understanding of embodiments of this disclosure. However, those skilled in the art will recognize that the technical solutions of this disclosure can be practiced with one or more specific details omitted, or other methods, components, apparatus, steps, etc., can be employed. In other instances, well-known technical solutions are not shown or described in detail to avoid obscuring various aspects of this disclosure.

[0058] Furthermore, the accompanying drawings are merely illustrative of this disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted. Some block diagrams shown in the drawings are functional entities and do not necessarily correspond to physically or logically independent entities. These functional entities may be implemented in software, in one or more hardware modules or integrated circuits, or in different network and / or processor devices and / or microcontroller devices.

[0059] The flowchart shown in the attached diagram is merely an illustrative example and does not necessarily include all steps. For example, some steps may be broken down, while others may be combined or partially combined; therefore, the actual execution order may change depending on the specific circumstances.

[0060] In related technologies, semiconductor manufacturing processes are complex and involve large-scale production. To improve efficiency, most processes rely on scripts for assistance. As manufacturing processes evolve, these scripts may be updated—for example, by adding new scripts or modifying existing ones. Scripts may also coexist; for instance, different scripts may operate on the same process node. If these scripts interfere with each other, it can easily lead to errors at that node, disrupting the entire process. Therefore, current semiconductor manufacturing processes are relatively unstable.

[0061] In view of the above problems, this disclosure provides a process monitoring method to improve the stability of semiconductor manufacturing processes. The following is a brief description of the application environment of the process monitoring method provided in this disclosure:

[0062] Please see Figure 1 The process monitoring method provided in this embodiment is applied to a production process control system 10. The hardware of the production process control system 10 includes at least several terminal devices 110 and a service terminal 120. The software system configured in the production process control system 10 includes at least an MM (Material Management) system and an SM (Specification Management) system. The terminal devices 110 serve as load nodes for the MM and SM systems. Workers input script files through their corresponding terminal devices 110 and upload the scripts to the corresponding systems such as the MM or SM systems to perform their respective functions. Of course, each terminal device 110 can also perform other functions, such as monitoring and adjusting the production process; this embodiment does not specifically limit these functions. It should be noted that the MM system and the SM system have different user groups, and operations such as adding and modifying scripts are performed on their respective terminal devices 110. The MM system is mainly used by the production department for managing materials, etc., and generally uses If then else scripts (a type of logical judgment statement script). Figure 1 The second script in the system controls execution without requiring complex review processes, offering high flexibility and timely logic modifications. The SM system is primarily used by the process department for management and control of various process nodes, typically employing Scripts (another type of script with logical judgment statements). Figure 1The first script in the process controls the execution and can perform logical judgments and processing on more complex processes.

[0063] A production process typically follows a fixed production path, which includes different designated production nodes—that is, different processing steps are performed at different stations. For example, please refer to [link to example]. Figure 2 A production process includes process nodes 1-8. The first script operates on nodes 1, 2, 5, 6, and 7 in that order; the second script operates on nodes 1, 2, 6, 7, and 8 in that order. This means there's a possibility that both scripts could operate on nodes 1, 2, 6, and 7 simultaneously, increasing the risk during actual production execution. Furthermore, if the first script is a `Script` and the second script is an `If then else` script, the `If then else` script has higher execution priority than the `Script` script. That is, nodes 1, 2, 6, 7, and 8 corresponding to the `If then else` script will be executed first, then the `Script` script will be executed. However, after executing the `If then else` script, the system has already jumped to node 8 and cannot return to nodes 1-7, causing the `Script` script to fail to execute correctly.

[0064] Please continue reading Figure 3 If the maximum number of times the same wafer can be acted upon in a node is 10, and the first script needs to act upon node 2 5 times, and the second script needs to act upon node 2 10 times: In the first case, if the first script and the second script act upon the second stage simultaneously, acting upon a total of 15 times, exceeding the maximum number of times node 2 can act upon, it is easy to cause the wafer in node 2 to be destroyed; In the second case, due to the constraint of the maximum number of times acting upon, if the first script acts upon node 2 5 times first, then the second script can only act upon node 2 5 more times, which will cause the second script to stay in node 2 and be unable to advance normally.

[0065] Furthermore, if the second script is a non-skipping operation script, meaning it continuously operates on a fixed process node, then the newly added first script cannot begin execution before the second script has completely finished, thus preventing the first script from executing normally. The following example illustrates how this process monitoring method can be applied to the aforementioned service terminal to monitor the current production process. Please refer to... Figure 4 The process monitoring method provided in this embodiment includes the following steps 401-403:

[0066] Step 401: The service terminal obtains the script update information of the first script to be updated.

[0067] The first script can be an existing script in the current production process that is currently being executed. The corresponding script update information includes details such as version upgrades, additions, or deletions of certain functions. Alternatively, the first script can be a script that is not currently needed in the production process; in this case, the script update information refers to the source file of the first script and the configuration parameters of its runtime environment. This embodiment of the disclosure does not impose any limitations on the specific content and form of the first script or its corresponding script update information; it can be configured according to actual circumstances. Developers upload the script update information to the server terminal from their user terminals by filling in data tables, sending data packets, or using other methods. The server terminal then receives the script update information, thus completing the upload of the script update information to the MM or SM system.

[0068] Step 402: The service terminal determines the script execution status of the current production process based on the script update information and the execution information of the second script in the current production process.

[0069] The second script refers to a script that already exists or is currently running in the current production process. This second script can be of the same type as the first script, for example, both can be Script scripts. In this embodiment, the running Script script is updated based on the script update information in step 401. The second script can also be of a different type than the first script; for example, the second script could be an If then else script, and the first script could be a Script script, adding a new Script script to the current production process. Execution information refers to the execution parameters of the second script in the current production process, such as the running process nodes, the number of times it acts in each process node, and the duration of its action. This embodiment does not impose specific limitations on these parameters. The script execution status refers to the comprehensive state result of the combined action of the first script, the second script, and other scripts in the current production process. It is used to characterize the execution status of the current production process and generally includes two situations: successful execution and execution error. Different levels can be specifically divided for each situation to more accurately determine the script execution status of the current production process, but this is not specifically limited here. It should be explained that the determination of the script execution status of the current production process is performed within the service terminal, rather than on the actual production line. That is, this embodiment obtains the script execution status through pre-simulation in the service terminal.

[0070] Step 403: If the script execution status is an execution error, the service terminal generates an error message for the script update information and sends the error message to the management terminal.

[0071] Once a script execution status indicates an error, it means that the update to the first script may severely impact the normal operation of the current production process. Therefore, the service terminal generates an error message regarding the script update information and sends it to the management terminal to alert the relevant personnel so they can take timely and appropriate measures. These measures could include reversing the update to the first script or modifying the script itself to ensure the normal operation of the current production process.

[0072] The process monitoring method provided in this embodiment first obtains the script update information of the first script to be updated, then performs simulations based on the script update information and the execution information of the second script in the current production process to determine the script execution status of the current production process. Finally, if the script execution status is an execution error, an error message for the script update information is generated and sent to the management terminal to remind the relevant personnel to handle the first script in a timely manner, so as to ensure the stable operation of the entire process. This solves the technical problem of the weak stability of current semiconductor manufacturing processes and achieves the technical effect of improving the stability of production process operation. At the same time, it can also avoid production process errors caused by direct offline trial operation, thereby reducing actual production costs.

[0073] Please see Figure 5 In an optional embodiment of this disclosure, step 402, where the service terminal determines the script execution status of the current production process based on the script update information and the execution information of the second script in the current production process, includes the following steps 501-503:

[0074] Step 501: The service terminal determines several first process nodes corresponding to the execution of the first script in the current production process based on the script update information.

[0075] Different scripts operate on different nodes. For example, if a script updates information to control polishing, its corresponding first process node might include: primary cleaning, polishing slurry immersion, brushing, and secondary cleaning. Staff can pre-build a mapping table between scripts and process nodes and store this table on the service terminal or corresponding terminal device. This allows the service terminal to promptly retrieve the corresponding process node based on script update information or script identifiers.

[0076] Step 502: The service terminal determines several second process nodes corresponding to the execution of the second script in the current production process based on the execution information.

[0077] For example, if the second script is a script that controls ion implantation, then its corresponding process nodes include: ion implantation, desizing, primary cleaning, and other second process nodes.

[0078] Step 503: The service terminal determines the script execution status of the current production process based on whether there are overlapping nodes between several first process nodes and several second process nodes in the current production process.

[0079] For example, if there is no overlap between the first and second process nodes, the script execution status of the current production process is determined to be a safe state; if there is one overlap between the first and second process nodes, the script execution status of the current production process is determined to be a level one risk; if there are two or three overlap between the first and second process nodes, the script execution status of the current production process is determined to be a level two risk; and so on, the specific level of the script execution status of the current production process is determined according to the number of overlap nodes.

[0080] This embodiment first determines several first process nodes and several second process nodes corresponding to the execution of the first script and the second script in the current production process. Then, it determines the script execution status of the current production process by comparing whether there are overlapping nodes between the first process nodes and the second process nodes. No complex algorithm is required; only a simple comparison is needed to determine the script execution status of the current production process. This is simple and fast, which can greatly improve the efficiency of determining the script execution status of the current production process and further improve the efficiency of process monitoring in this embodiment.

[0081] In an optional embodiment of this disclosure, step 503, where the service terminal determines the script execution status of the current production process based on whether there are overlapping nodes between the several first process nodes and the several second process nodes in the current production process, includes the following two cases:

[0082] In the first scenario, if several first process nodes and several second process nodes overlap at least once in the current production process, the service terminal will determine the script execution status of the current production process as an execution error.

[0083] In the example above, both the first process node of the first script and the second process node of the second script contain a first-level cleaning process node. This means that once the first script is updated, it is easy for the first script and the second script to work together on the first-level cleaning node at the same time, which can easily lead to process errors. The service terminal will then determine the current script execution status of the production process as an execution error.

[0084] In the second scenario, if several first process nodes and several second process nodes do not overlap in the current production process, the service terminal will determine the script execution status of the current production process as successful.

[0085] Conversely, if the first process node and the second process node do not overlap in the current production process, meaning there is no risk of conflict between the first script and the second script, the service terminal will determine the script execution status of the current production process script as successful.

[0086] This disclosure divides the script execution status of the current production process into two cases: execution error and execution success, based on the number of overlapping nodes between the first process node and several second process nodes in the current production process. While ensuring the monitoring purpose, this saves computing resources and improves the efficiency of determining the script execution status of the current production process, thereby further improving the efficiency of process monitoring in the embodiments of this disclosure.

[0087] Please see Figure 6 In an optional embodiment of this disclosure, for the first situation described above, if several first process nodes and several second process nodes have at least one overlapping node in the current production process, the service terminal determines the script execution status of the current production process as an execution error, including the following steps 601-602:

[0088] Step 601: If there is at least one overlapping node between several first process nodes and several second process nodes in the current production process, the service terminal simulates script execution based on the script update information of the first script, the execution information of the second script, and the pre-configured script execution model to obtain the simulation results.

[0089] The script execution model is a virtual production process line fitted by workers based on the actual production process flow and parameters, used to represent the actual production status of the current production process. After receiving the script update information of the first script and the execution information of the second script obtained from the actual production system, the service terminal inputs these two pieces of information into the script execution model to conduct an online simulation of actual production. This allows the server to obtain the actual production status of the current production process after updating the first script, which in turn yields the simulation results of the actual production process.

[0090] Step 602: The service terminal determines whether the current production process script execution status is an execution error based on the simulation results.

[0091] The simulation result may be a set of parameters. The service terminal can compare the obtained result parameters with the preset parameters. If the obtained result parameters exceed the preset parameter range, the script execution status of the current production process will be determined as an execution error; if the obtained result parameters are within the preset parameter range, the script execution status of the current production process will be determined as successful.

[0092] In this embodiment, after obtaining the first process node and the second process node corresponding to the first script and the second script when they are executed in the current production process, an online simulation is performed on the production process state after updating the first script using a pre-trained script execution model to obtain the updated simulation results. Then, the simulation results are used to determine whether the script execution state of the current production process is an execution error. This eliminates the need for a large number of complex algorithms, resulting in higher efficiency. At the same time, it can also avoid actual trial runs, greatly saving production costs.

[0093] Please see Figure 7 In an optional embodiment of this disclosure, step 601, in which the service terminal simulates script execution based on the script update information of the first script, the execution information of the second script, and a pre-configured script execution model to obtain the simulation result, includes the following steps 701-703:

[0094] Step 701: The service terminal parses the script update information to obtain the first execution target of the first script.

[0095] The script update information contains the script identifier of the first script. The service terminal can quickly determine the execution function of the first script through the script identifier, such as polishing, deionization, and encapsulation, and thus obtain the first execution target of the first script.

[0096] Step 702: The service terminal parses the execution information to obtain the second execution target of the second script.

[0097] The execution information refers to the status parameter information of the second script in the current production process. The execution information includes at least one of the script identifier of the second script and the execution process node identifier. The service terminal can determine the second execution target of the second script by parsing the execution information, such as polishing, deionization, and packaging.

[0098] Step 703: The service terminal inputs the first execution target and the second execution target into the pre-configured script execution model to obtain the simulation results.

[0099] Unlike the examples above, this embodiment of the disclosure only requires inputting the first execution purpose of the first script and the second execution target of the second execution target into a pre-configured script execution model. There is no need to pre-determine the process nodes. The script execution model can quickly determine the execution process nodes corresponding to each execution purpose and the simulation results such as whether there are overlapping nodes between each process node through the execution purpose of each script.

[0100] In this embodiment, the script update information and execution information are first parsed to obtain the first execution target of the first script and the second execution target of the second script. Then, the first execution target and the second execution target are input into the pre-configured script execution model to obtain the simulation results. There is no need to pre-determine the process nodes, which saves the calculation process and improves the process monitoring efficiency provided by this embodiment.

[0101] In an optional embodiment of this disclosure, step 602, where the service terminal determines whether the script execution status of the current production process is an execution error based on the simulation results, includes the following step A:

[0102] Step A: The service terminal compares the simulation results with the pre-configured error results to determine whether the current production process script execution status is an execution error.

[0103] For example, the pre-configured error message is: Node 1 will encounter an error when simultaneously acted upon by the first script and the second script; the maximum number of times Node 2 can be acted upon is 10. If the simulation result output by the script execution model is: both the first script and the second script act upon Node 1 at 5:20, the first script acts upon Node 2 a total of 10 times, and the second script acts upon Node 2 a total of 5 times, then the cumulative number of acts (15 times) exceeds the maximum number of acts of Node 2 (10 times). Therefore, by comparing the simulation result with the pre-configured error message, it can be determined whether the current production process script execution status is an execution error. The determination method is simple and quick, and can greatly improve the process monitoring efficiency provided by the embodiments of this disclosure.

[0104] In an optional embodiment of this disclosure, step 501, where the service terminal determines several first process nodes corresponding to the execution of the first script in the current production process based on script update information, includes the following step B:

[0105] Step B: The service terminal queries the pre-configured first script database based on the script update information to obtain several first process nodes corresponding to the script update information.

[0106] Each script corresponds to a database, which stores the process nodes in which the script is used in the actual production process. The database is updated regularly by staff. After receiving the script update information, the service terminal can quickly query the pre-configured first script database to obtain several first process nodes corresponding to the script update information. This is simple and fast, and can greatly improve the process monitoring efficiency provided by the embodiments of this disclosure.

[0107] Please see Figure 8In an optional embodiment of this disclosure, step 503, where the service terminal determines the script execution status of the current production process based on whether there are overlapping nodes between the several first process nodes and the several second process nodes in the current production process, includes the following steps 801-802:

[0108] Step 801: The service terminal queries the node status identifier corresponding to each second process node from the pre-configured second script database.

[0109] The second script database stores the second process nodes that the second scripts are to be executed in actual production, such as node 1, node 5, node 6, node 7, and node 8.

[0110] The node status flag is used to indicate whether the second script will be applied to the process node in the current process or at the current time. For example, "flag" can be used to indicate that it will be applied to the node, while no "flag" indicates that it will not be applied to the node. For example, the second process nodes and their corresponding node status flags are: Node 1 (flag), Node 5, Node 6 (flag), Node 7 (flag), Node 8 (flag).

[0111] Step 802: The service terminal determines the script execution status of the current production process based on whether there are overlapping nodes between the second process node with the node status identifier in the execution state and several first process nodes in the current production process.

[0112] For example, in the example above, node 5 in each of the second process nodes has no flag, meaning that the status of node 5 is marked as not executing. The status of the remaining nodes 1, 6, 7, and 8 is marked as executing. Then, the service terminal compares the nodes 1, 6, 7, and 8 with the corresponding first process nodes in the same way as in step 503 above to determine whether there are any overlapping nodes, thereby determining the script execution status of the current production process.

[0113] This embodiment first queries the pre-configured second script database for the node status identifier corresponding to each second process node. Then, based on whether there are overlapping nodes between the second process node with the node status identifier in the execution state and several first process nodes in the current production process, it determines the script execution state of the current production process, which is closer to the actual production scenario and has stronger reliability.

[0114] In an optional embodiment of this disclosure, the above process monitoring method further includes the following step C:

[0115] Step C: If the script execution status is "execution error", the service terminal will generate an alert pop-up and display it on the corresponding user interface.

[0116] The user interface can be the service terminal's user interface or the user interface of the terminal device of the staff submitting script update information. When the script execution status is an execution error, the service terminal generates an alarm pop-up and displays it on the corresponding user interface to promptly remind staff that the first script corresponding to the script update information may pose a risk to the current production process once it goes online, and the reminder method is more intuitive. The alarm pop-up may contain some alarm information, such as text, images, etc., or it may be a control. Staff can click on the alarm pop-up to obtain specific alarm information. This embodiment does not impose specific limitations and can be set according to the actual situation.

[0117] In one optional embodiment of this disclosure, the execution priority of the second script is higher than that of the first script.

[0118] Scripts with higher priority are executed first in actual production. The execution result of an earlier-executed script may affect the execution of later-executed scripts. In other words, the execution result of the second script in the current production process may have a certain impact on the normal execution of the first script that is executed later. In this embodiment, the execution priority of the second script in the current production process is configured to be higher than that of the first script corresponding to the script update information. Then, the above-mentioned process monitoring method is used to assess the risks after the first script goes online, so as to ensure the stable operation of the first script after it goes online, thereby improving the reliability of the production process and further improving the reliability of the process monitoring method provided by this embodiment.

[0119] In an optional embodiment of this disclosure, step 401, where the service terminal obtains the script update information of the first script to be updated, includes the following steps:

[0120] The service terminal obtains the new script information of the first script to be added; and / or, the service terminal obtains the script update information for the first script in the current production process.

[0121] In the first scenario, the first script can be one that doesn't need to be added in the current production process. The corresponding update information for this script includes its source file and the configuration parameters of its runtime environment. In the second scenario, the first script can be an existing script in the current production process that is currently being executed. The corresponding update information includes updates to this first script, such as version upgrades, additions, or deletions of features. In the third scenario, there are multiple first scripts, and the addition and modification of first scripts are performed simultaneously.

[0122] The first script in this embodiment can be of various types, such as a newly added script or an update to an existing script, which can greatly improve the monitoring dimensions of the process monitoring method in this embodiment.

[0123] To implement the above-mentioned process monitoring method, one embodiment of this disclosure provides a process monitoring device 900. Figure 9 A schematic architecture diagram of a process monitoring device 900 is shown, including: an acquisition module 910, a determination module 920, and a generation module 930, wherein:

[0124] The acquisition module 910 is used to acquire the script update information of the first script to be updated;

[0125] The determining module 920 is used to determine the script execution status of the current production process based on the script update information and the execution information of the second script in the current production process;

[0126] The generation module 930 is used to generate error information for script update information if the script execution status is an execution error, and send the error information to the management terminal.

[0127] In an optional embodiment, the determining module 920 is specifically used to: determine several first process nodes corresponding to the execution of the first script in the current production process based on script update information; determine several second process nodes corresponding to the execution of the second script in the current production process based on execution information; and determine the script execution status of the current production process based on whether there are overlapping nodes between the several first process nodes and the several second process nodes in the current production process.

[0128] In an optional embodiment, the determining module 920 is specifically used to determine the script execution status of the current production process as an execution error if there is at least one overlapping node between a plurality of first process nodes and a plurality of second process nodes in the current production process.

[0129] In an optional embodiment, the determining module 920 is specifically used to: if there is at least one overlapping node between a plurality of first process nodes and a plurality of second process nodes in the current production process, then simulate script execution based on the script update information of the first script, the execution information of the second script and the pre-configured script execution model to obtain simulation results; and determine whether the script execution status of the current production process is an execution error based on the simulation results.

[0130] In an optional embodiment, the determining module 920 is specifically used to: parse the script update information to obtain the first execution target of the first script; parse the execution information to obtain the second execution target of the second script; and input the first execution target and the second execution target into a pre-configured script execution model to obtain simulation results.

[0131] In an optional embodiment, the determining module 920 is specifically used to compare the simulation results with pre-configured error results to determine whether the current production process script execution status is an execution error.

[0132] In an optional embodiment, the determining module 920 is specifically used to query a pre-configured first script database based on script update information to obtain a number of first process nodes corresponding to the script update information.

[0133] In an optional embodiment, the determining module 920 is specifically used to query the node status identifier corresponding to each second process node from a pre-configured second script database; and determine the script execution status of the current production process based on whether there are overlapping nodes between the second process node with the node status identifier in the execution state and several first process nodes in the current production process.

[0134] In an optional embodiment, the determining module 920 is specifically used to determine the script execution status of the current production process as successful if there are no overlapping nodes between the several first process nodes and the several second process nodes in the current production process.

[0135] In an optional embodiment, the generation module 930 is further configured to generate an alert pop-up and display it on the corresponding user interface if the script execution status is an execution error.

[0136] In an optional embodiment, the execution priority of the second script is higher than that of the first script.

[0137] In an optional embodiment, the acquisition module 910 is specifically used to acquire new script information of the first script to be added; and / or acquire script update information for the first script in the current production process.

[0138] Exemplary embodiments of this disclosure also provide a computer-readable storage medium that can be implemented as a program product including program code, which, when run on an electronic device, causes the electronic device to perform the steps described in the "Exemplary Methods" section of this specification according to various exemplary embodiments of this disclosure. In one embodiment, the program product can be implemented as a portable compact disc read-only memory (CD-ROM) including program code and can run on an electronic device, such as a personal computer. However, the program product of this disclosure is not limited thereto. In this document, the readable storage medium can be any tangible medium that contains or stores a program that can be used by or in conjunction with an instruction execution system, apparatus, or device.

[0139] The program product may employ any combination of one or more readable media. A readable medium may be a readable signal medium or a readable storage medium. A readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination thereof. More specific examples (a non-exhaustive list) of readable storage media include: electrical connections having one or more wires, portable disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0140] Computer-readable signal media may include data signals propagated in baseband or as part of a carrier wave, carrying readable program code. Such propagated data signals may take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination thereof. A readable signal medium may also be any readable medium other than a readable storage medium, capable of sending, propagating, or transmitting programs for use by or in conjunction with an instruction execution system, apparatus, or device.

[0141] The program code contained on the readable medium may be transmitted using any suitable medium, including but not limited to wireless, wired, optical fiber, RF, etc., or any suitable combination thereof.

[0142] Program code for performing the operations of this disclosure can be written in any combination of one or more programming languages, including object-oriented programming languages ​​such as Java and C++, and conventional procedural programming languages ​​such as C or similar languages. The program code can execute entirely on a user's computing device, partially on a user's computing device, as a standalone software package, partially on a user's computing device and partially on a remote computing device, or entirely on a remote computing device or server. In cases involving remote computing devices, the remote computing device can be connected to the user's computing device via any type of network, including a local area network (LAN) or a wide area network (WAN), or it can be connected to an external computing device (e.g., via the Internet using an Internet service provider). In embodiments of this disclosure, the program code stored in a computer-readable storage medium, when executed, can implement any step of the above-described process monitoring method.

[0143] Please see Figure 10 Exemplary embodiments of this disclosure also provide an electronic device 1000, which can be a backend server of an information platform. References are provided below. Figure 10 This electronic device 1000 will be described. It should be understood that... Figure 10 The electronic device 1000 shown is merely an example and should not impose any limitation on the functionality and scope of use of the embodiments disclosed herein.

[0144] like Figure 10 As shown, the electronic device 1000 is presented in the form of a general-purpose computing device. The components of the electronic device 1000 may include, but are not limited to: at least one processing unit 1010, at least one storage unit 1020, and a bus 1030 connecting different system components (including storage unit 1020 and processing unit 1010).

[0145] The storage unit stores program code, which can be executed by the processing unit 1010 to perform the steps described in the "Exemplary Methods" section of this specification according to various exemplary embodiments of the present invention. For example, the processing unit 1010 can perform, as follows: Figure 2 The methods and steps shown are as follows.

[0146] Storage unit 1020 may include volatile storage units, such as random access memory (RAM) 1021 and / or cache memory 1022, and may further include read-only memory (ROM) 1023.

[0147] Storage unit 1020 may also include a program / utility 1024 having a set (at least one) program module 1025, such program module 1025 including but not limited to: operating system, one or more application programs, other program modules and program data, each or some combination of these examples may include an implementation of a network environment.

[0148] Bus 1030 may include a data bus, an address bus, and a control bus.

[0149] Electronic device 1000 can also communicate with one or more external devices 2000 (e.g., keyboards, pointing devices, Bluetooth devices, etc.) via input / output (I / O) interface 1040. Electronic device 1000 can also communicate with one or more networks (e.g., local area networks (LANs), wide area networks (WANs), and / or public networks, such as the Internet) via network adapter 1050. As shown, network adapter 1050 communicates with other modules of electronic device 1000 via bus 1030. It should be understood that, although not shown in the figures, other hardware and / or software modules can be used in conjunction with electronic device 1000, including but not limited to: microcode, device drivers, redundant processing units, external disk drive arrays, RAID systems, tape drives, and data backup storage systems.

[0150] In this embodiment of the disclosure, the program code stored in the electronic device can be executed to perform any step of the process monitoring method described above.

[0151] It should be noted that although several modules or units for the device used to perform actions have been mentioned in the detailed description above, this division is not mandatory. In fact, according to exemplary embodiments of this disclosure, the features and functions of two or more modules or units described above can be embodied in one module or unit. Conversely, the features and functions of one module or unit described above can be further divided and embodied by multiple modules or units.

[0152] Those skilled in the art will understand that various aspects of this disclosure can be implemented as systems, methods, or program products. Therefore, various aspects of this disclosure can be embodied in entirely hardware implementations, entirely software implementations (including firmware, microcode, etc.), or implementations combining hardware and software aspects, collectively referred to herein as “circuit,” “module,” or “system.” Other embodiments of this disclosure will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This disclosure is intended to cover any variations, uses, or adaptations of this disclosure that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this disclosure are indicated by the claims.

[0153] It should be understood that this disclosure is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this disclosure is defined only by the appended claims.

Claims

1. A process monitoring method, characterized in that, include: Obtain the script update information for the first script to be updated in the current production process; The script execution status of the current production process is determined based on the script update information and the execution information of the second script in the current production process; If the script execution status is an execution error, then an error message for updating the script information is generated and sent to the management terminal; The step of determining the script execution status of the current production process based on the script update information and the execution information of the second script in the current production process includes: Based on the script update information, determine several first process nodes corresponding to the execution of the first script in the current production process; Based on the execution information, determine several second process nodes corresponding to the execution of the second script in the current production process; The script execution status of the current production process is determined based on whether there are any overlapping nodes between the plurality of first process nodes and the plurality of second process nodes in the current production process.

2. The process monitoring method according to claim 1, characterized in that, The step of determining the script execution status of the current production process based on whether there are overlapping nodes between the plurality of first process nodes and the plurality of second process nodes in the current production process includes: If at least one of the plurality of first process nodes and the plurality of second process nodes overlaps in the current production process, then the script execution status of the current production process is determined to be an execution error.

3. The process monitoring method according to claim 2, characterized in that, If at least one of the plurality of first process nodes and the plurality of second process nodes overlaps in the current production process, then the script execution status of the current production process is determined to be an execution error, including: If at least one of the plurality of first process nodes and the plurality of second process nodes overlap in the current production process, then a script execution simulation is performed based on the script update information of the first script, the execution information of the second script, and a pre-configured script execution model to obtain the simulation result; Based on the simulation results, determine whether the script execution status of the current production process is an execution error.

4. The process monitoring method according to claim 3, characterized in that, The simulation of script execution based on the script update information of the first script, the execution information of the second script, and a pre-configured script execution model yields simulation results, including: The script update information is parsed to obtain the first execution target of the first script; The execution information is parsed to obtain the second execution target of the second script; The first execution target and the second execution target are input into the pre-configured script execution model to obtain the simulation results.

5. The process monitoring method according to claim 3, characterized in that, The step of determining whether the script execution status of the current production process is an execution error based on the simulation results includes: The simulation results are compared with the pre-configured error results to determine whether the script execution status of the current production process is an execution error.

6. The process monitoring method according to claim 1, characterized in that, The step of determining several first process nodes corresponding to the execution of the first script in the current production process based on the script update information includes: Based on the script update information, a query is performed from a pre-configured first script database to obtain the plurality of first process nodes corresponding to the script update information.

7. The process monitoring method according to claim 1, characterized in that, The step of determining the script execution status of the current production process based on whether there are overlapping nodes between the plurality of first process nodes and the plurality of second process nodes in the current production process includes: Query the node status identifier corresponding to each of the second process nodes from the pre-configured second script database; The script execution status of the current production process is determined based on whether there are any overlapping nodes between the second process node whose node status is marked as being in execution and the plurality of first process nodes in the current production process.

8. The process monitoring method according to claim 1, characterized in that, The step of determining the script execution status of the current production process based on whether there are overlapping nodes between the plurality of first process nodes and the plurality of second process nodes in the current production process includes: If the plurality of first process nodes and the plurality of second process nodes do not overlap in the current production process, then the execution status of the script in the current production process is determined to be successful.

9. The process monitoring method according to claim 1, characterized in that, The method further includes: If the script execution status is an execution error, an alert pop-up will be generated and displayed on the corresponding user interface.

10. The process monitoring method according to claim 1, characterized in that, The second script has a higher execution priority than the first script.

11. The process monitoring method according to claim 1, characterized in that, The script update information for the first script to be updated in the current production process includes: Obtain the new script information for the first script to be added; and / or, Obtain script update information for the first script in the current production process.

12. A process monitoring device, characterized in that, The device includes: The acquisition module is used to obtain the script update information of the first script to be updated; The determining module is configured to determine the script execution status of the current production process based on the script update information and the execution information of the second script in the current production process; the determining module is further configured to determine, based on the script update information, several first process nodes corresponding to the execution of the first script in the current production process; determine, based on the execution information, several second process nodes corresponding to the execution of the second script in the current production process; and determine the script execution status of the current production process based on whether there are overlapping nodes between the several first process nodes and the several second process nodes in the current production process. The generation module is used to generate error information for updating the script if the script execution status is an execution error, and send the error information to the management terminal.

13. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the method according to any one of claims 1 to 11.

14. An electronic device, characterized in that, include: processor; as well as Memory for storing the executable instructions of the processor; The processor is configured to execute the method of any one of claims 1 to 11 by executing the executable instructions.

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