Hash overhead suspended transport equipment track system and operation method thereof

Abstract

Embodiments of the present invention relate to a hashed overhead suspended transport tool track system and a method for operating the same. An automated material handling system (AMHS) and a method for operating the AMHS are disclosed herein. On the one hand, the AMHS comprises a track network and a carrier configured to hold a sample carrier storing one or more samples, wherein the carrier is configured to move within a semiconductor manufacturing facility (FAB) via the track network. The AMHS also comprises a turntable connected to the track network and configured to rotate around an axis substantially perpendicular to the surface of the turntable. The AMHS also comprises a hashed track connected to the turntable and overlapping the turntable. The hashed track is configured to rotate around the axis together with the turntable.

Description

Technical Field

[0001] The embodiment of the present invention relates to a track system of a scattered overhead suspended transport tool and an operation method thereof. Background Art

[0002] Currently, Automated Material Handling Systems (AMHS) have been widely used in semiconductor fabrication facilities (FABs) to automatically process and transport wafers and other samples between various processing machines ("tools") used in wafer manufacturing. A typical FAB may include one or more floors, each floor having multiple process bays, wherein the process bays include processing tools (e.g., process tools) and wafer staging equipment interconnected by AMHSs. A semiconductor FAB may include various types of automated and manually operated vehicles, which are used to move and transport sample carriers throughout the FAB during the manufacturing process. These vehicles may include, for example, Automatic Guided Vehicle (AGV), Personal Guided Vehicle (PGV), Rail Guided Vehicle (RGV), Overhead Shuttle (OHS) and Overhead Hoist Transport (OHT). Summary of the invention

[0003] According to one embodiment of the present invention, an automated material handling system (AMHS) for a semiconductor manufacturing facility (FAB) comprises: a track network; a carrier configured to hold a sample carrier for storing one or more samples, wherein the carrier is configured to move within the semiconductor manufacturing facility via the track network; a turntable connected to the track network and configured to rotate around an axis substantially perpendicular to a surface of the turntable; and a hash track connected to and overlapping the turntable, wherein the hash track is configured to rotate around the axis together with the turntable.

[0004] According to one embodiment of the present invention, a method for operating an automated material handling system (AMHS) includes: moving a carrier along a first fixed track toward a first hash track fixed to a first turntable, the carrier being configured to hold a sample carrier, the sample carrier storing one or more samples; rotating the first hash track around an axis extending substantially perpendicular to a surface of the first turntable; and moving the carrier through the first hash track from a first end of the first hash track toward a second end of the first hash track, the first end and the second end of the first hash track being opposite to each other.

[0005] According to one embodiment of the present invention, a method for operating an automated material handling system (AMHS) includes: moving a carrier along a first fixed track toward a first scatter track fixed to a first turntable, the carrier being configured to hold a sample carrier storing one or more samples; rotating the first scatter track around an axis extending substantially perpendicular to a surface of the first turntable; moving the carrier along a curved portion of the scatter track; and moving the carrier along a second fixed track extending along a second direction different from the first fixed track. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] Aspects of the present disclosure are best understood from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that, in accordance with standard industry practice, various devices are not drawn to scale. In fact, the dimensions of the various devices may be arbitrarily increased or reduced for clarity of discussion.

[0007] Figure 1 A block diagram of an AMHS vehicle is depicted, according to some embodiments.

[0008] Figure 2 A schematic layout of an example FAB including an AMHS is depicted in accordance with some embodiments.

[0009] Figure 3A A top view of an example hash rail is depicted in accordance with some embodiments.

[0010] Figure 3B According to some embodiments, Figure 3A A top-down view of the hash track in Figure 1, rotated about 90 degrees.

[0011] Figure 4A Depicted is a top view of an example hashed track and surrounding fixed tracks, in accordance with some embodiments.

[0012] Figure 4B According to some embodiments, Figure 4A A top-down view of the hash track in Figure 1, rotated about 90 degrees.

[0013] Figure 5A Depicted is a top view of an example AMHS including an example hash track, according to some embodiments.

[0014] Figure 5B An AMHS according to some embodiments and Figure 5A A top-down view of the hash track in Figure 1, rotated about 90 degrees.

[0015] Fig. 6A Depicted is a top view of an example AMHS including an example hash track, according to some embodiments.

[0016] Figure 6B An AMHS according to some embodiments and Fig. 6A A top-down view of the hash track in Figure 1, rotated about 90 degrees.

[0017] Fig. 7A Depicted is a perspective view of an example power supply for hash rails, in accordance with some embodiments.

[0018] Figure 7B A schematic diagram of an example panel system for powering a vehicle is depicted in accordance with some embodiments.

[0019] Figure 8 Depicted is a schematic design diagram of an example hash track in accordance with some embodiments.

[0020] Fig. 9 A flow chart is depicted illustrating an example method of operating an AMHS according to some embodiments.

[0021] Fig.10 A flow chart is depicted illustrating another example method of operating an AMHS in accordance with some embodiments. DETAILED DESCRIPTION

[0022] The following disclosure provides many different embodiments or examples for implementing the different features of the provided target. Specific examples of components and arrangements will be described below to simplify the disclosure. Of course, these are only examples and are not intended to be limiting. For example, in the following description, forming a first device above or on a second device may include an embodiment in which a first device and a second device in direct contact are formed, and may also include an embodiment in which an additional device may be formed between the first device and the second device so that the first device and the second device may not be in direct contact. In addition, the disclosure may repeat reference component symbols and / or letters in various examples. This repetition is for simplicity and clarity and does not itself indicate the relationship between the various embodiments and / or configurations discussed.

[0023] Additionally, for ease of description, spatially relative terms such as "below," "beneath," "lower," "above," "upper," "top," "bottom," and the like may be used herein to describe the relationship of one component or device to another component or devices as depicted in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may be interpreted accordingly.

[0024] The OHT system automatically moves an OHT carrier (hereinafter also referred to as a "carrier" or "transport carrier") that loads and transports a sample carrier, such as a Standard Mechanical Interface (SMIF) wafer box or a Front Opening Unified Pod (FOUP) that holds multiple wafers or other samples (e.g., masks), from a processing or metrology tool or storage device to a loading port of another tool or other equipment in the FAB. The OHT system can be used to transport carriers within each processing area (intra-bay) or between processing areas (inter-bay). The OHT system also moves empty (e.g., without a carrier) carrier to a tool loading port or other equipment, and uses the empty carrier to receive and unload empty or full SMIF wafer boxes or FOUPs that may contain wafers, so that the aforementioned empty carrier can be further transported and / or the wafers can be processed in other tools.

[0025] A typical FAB has a large network of tracks that allow vehicles to travel in the same direction. Unless there is a dedicated fixed track that allows the vehicle to change direction, the vehicle is usually unable to change direction, such as turning or turning (e.g., U-turn). This will cause the vehicle to spend a long time traveling, which will make the processing time of semiconductor components longer. In addition, a typical AMHS is prone to traffic jams because there are many vehicles traveling around the FAB on the AMHS and the number of routes that the vehicles can take is limited.

[0026] In the present disclosure, embodiments of the AMHS allow vehicles to change direction. The hash track installed in the AMHS can rotate around an axis so that incoming vehicles can turn or pass through the hash track. The hash track can have a π (pi) shape that assists the vehicle to change direction. The hash track can also be powered by an independent power supply, rather than by the power supply of the rest of the track network, to help prevent dangerous collisions and failures when accidents occur. The hash track can also include multiple sensors (e.g., geospatial sensors and / or alignment sensors), which detect the position of the hash track, the position of the vehicle, and the alignment of the vehicle relative to the hash track, and automatically rotate as needed so that the vehicle can move to a specified destination. Therefore, the embodiments in the present disclosure can help reduce the travel time of the vehicle, thereby making it possible to manufacture semiconductor components more quickly and increase the yield of the FAB. In addition, the AMHS disclosed herein can reduce the possibility of traffic jams by providing more options for vehicles to move around the AMHS. For example, the disclosed embodiments can increase inter-bay transfer capacity by 20% and reduce traffic jams by 15%. In addition, the embodiments can improve the average delivery time (DTA) by 10%. In addition, these embodiments can be applied to current and future technology nodes.

[0027] Figure 1 A block diagram of an OHT vehicle (referred to as “vehicle”) 100 of an AMHS is shown in accordance with some embodiments. The vehicle 100 may include a vehicle 102, wheels 104a and 104b, and an axle 108. Figure 1 The vehicle 100 can run on a 4-track AMHS, but the embodiments of the present disclosure are not limited thereto, and vehicles that can run on a 2-track AMHS are also within the scope of the present disclosure.

[0028] The carrier 102 may include a sample carrier, which is a sample carrier used to store one or more samples (e.g., wafers, masks, photoresists, deposition materials, etching materials, etc., and any other materials that can be assembled in the carrier 100), and the aforementioned sample carrier is transported throughout the FAB. When the carrier 102 holds a wafer, the carrier 102 can store one or more wafers with a radius of about 300 millimeters (mm), about 390 millimeters, about 400 millimeters, or about 500 millimeters, but the disclosed embodiments are not limited thereto. The wheels 104a and 104b can rotate on the first track 106a and the second track 106b, respectively, and move the carrier 102 around the AMHS in the FAB. The axle 108 connects the carrier 102 to the wheels 104a and 104b via the axis. Although clear components of the carrier 100 have been shown herein, the disclosed embodiments are not limited thereto, and the carrier 100 may have more or fewer components. For example, the vehicle 100 may include a power receiver that receives power wirelessly (e.g., without contact) via an electromagnetic induction coil. Although not shown herein, the vehicle 100 may be connected to a controller that can control the movement of the vehicle 100. The aforementioned controller can track the types of samples in the vehicle 102 and the location of the vehicle 100 within the FAB so that the controller knows where the vehicle 102 needs to go. In addition, although the present disclosure is about a 4-track AMHS and a 2-track AMHS, the embodiments of the present disclosure are not limited to this, and a portion of the AMHS may be 4-track and a portion of the AMHS may be 2-track. In the present disclosure, a 2-track AMHS refers to an AMHS that includes a track network having a one-way travel mode (or path) and another reverse travel mode. For example, referring to Figures 6A to 6B In the AMHS 600, vehicles moving along the fixed and scattered tracks in the AMHS 600 can only travel in one direction in a specific direction. Each track still includes a pair of tracks (such as tracks 106a and 106b), and a vehicle (such as vehicle 100) can place the vehicle's wheels 104a and 104b on the tracks. A 4-track AMHS refers to an AMHS that includes a track network that has two one-way travel modes and two other reverse travel modes. For example, referring to Figures 5A to 5B The AMHS 500 is shown with two ways of traveling in each direction. More details about the AMHS 500 and AMHS 600 are described below.

[0029] Figure 2A schematic design diagram of an example FAB including an AMHS 200 according to some embodiments is depicted. The AMHS 200 includes an interconnected OHT track network (hereinafter referred to as "track"), including an outer ring (or outer track) 204 and an inner ring (or inner track) 202. A vehicle (e.g., vehicle 100) can use the track to move to various tools 206 throughout the FAB.

[0030] The inner ring 202 includes a loop around the processing area (intra-bay). The inner ring 202 allows the vehicle to move within the processing area (intra-bay) without having to move to or transfer to the track between the processing areas (inter-bay). The outer ring 204 includes tracks 204a, 204b, 204c and 204d. Tracks 204a and 204c extend in a first direction (e.g., horizontal direction), and tracks 204b and 204d extend in a second direction (e.g., vertical direction) that is substantially perpendicular to the first direction. The inner ring 202 can be used when multiple machines need to be used or even reused along the inner ring 202. For example, if a user wants to deposit multiple layers with different patterns on a wafer, the vehicle can move the wafer along the inner ring 202 to various machines so that the wafer can go through various process steps. Once the deposition and patterning process is completed, the vehicle can transport the wafer out of the inner ring 202 and into another processing area for further processing.

[0031] The connecting tracks 220a and 220b may be disposed between the inner ring 202 and the outer ring 204. The connecting tracks 220a and 220b may allow vehicles to be transferred between the inner ring 202 and the outer ring 204. The connecting tracks 220a and 220b may be disposed at diagonal locations relative to the inner ring 202 and the outer ring 204, so that vehicles may transfer tracks between the outer ring 204 and the inner ring 202 more smoothly.

[0032] The tool 206 may include a wafer processing tool (e.g., a photolithography tool, an etching tool, a deposition tool, etc.), a die preparation tool (e.g., a die cutting tool, a wafer bonding and stacking tool, etc.), an integrated circuit (IC) packaging tool (e.g., a wire bonding tool, an IC packaging tool, etc.), etc. The carrier may use the AMHS 200 to travel around the FAB to each tool 206.

[0033] Arrow indication 208 shows the direction in which the vehicle can move along the AMHS 200. However, the disclosed embodiment is not limited thereto, and the vehicle can move along different directions in the AMHS 200. In addition, even if the arrow indicates various ways in which the vehicle can move in the AMHS 200, as long as the AMHS 200 allows the vehicle to travel, the vehicle can still move along another direction. For example, if the vehicle drives from the first processing area to the second processing area, and one or more intermediate processing areas are set in between, the vehicle does not need to move through the intermediate processing area. For example, according to an embodiment, the vehicle can pass through the intermediate processing area.

[0034] Figure 3A A top view of a hash track 300 is depicted according to some embodiments. The hash track 300 may be disposed (or fixed) on a turntable 350 and include a first portion 310 (eg, a π-shaped track) and a second portion 320. A plurality of sensors 302 may be disposed along the hash track 300.

[0035] The turntable 350 may have a circular shape and rotate about an axis that is perpendicular (or substantially perpendicular, or orthogonal, or substantially orthogonal) to a main surface of the turntable 350. For example, the turntable 350 may rotate in a clockwise 352b and / or counterclockwise 352a direction as appropriate. Figure 3A When the position shown is rotated about 90 degrees clockwise 352b or counterclockwise 352a, the resulting hash track 300 may be as shown in FIG. Figure 3B shown.

[0036] Each of the first portion 310 and the second portion 320 may include a track arranged in the shape of the Greek letter π (pi-shape). For example, the first portion 310 may include a straight portion 310a, a first curved portion 310b, a second curved portion 310c, and a central portion 310d, the foregoing portions together forming a π shape. Similarly, the second portion 320 may include a straight portion 320a, a first curved portion 320b, a second curved portion 320c, and a central portion 320d, the foregoing portions together forming a π shape.

[0037] The first portion 310 and the second portion 320 may be aligned with fixed rails 360a, 360b, 360c, 360d, 360e, 360f, 360g, and 360h (hereinafter collectively referred to as 360a to 360h). For example, the fixed rail 360a may be aligned with the first curved portion 310b and the central portion 310d, the fixed rail 360b may be aligned with the central portion 310d and the second curved portion 310c, the fixed rail 360c may be aligned with the second curved portion 310c and the straight portion 310a, the fixed rail 360d may be aligned with the straight portion 320a and the second curved portion 320c, the fixed rail 360e may be aligned with the second curved portion 320c and the central portion 320d, the fixed rail 360f may be aligned with the central portion 320d and the first curved portion 320b, the fixed rail 360g may be aligned with the first curved portion 320b and the straight portion 320a, and the fixed rail 360h may be aligned with the straight portion 310a and the first curved portion 310b. Therefore, a vehicle moving from any one of the fixed rails 360a to 360h toward the shuffle track 300 may move to any one of the other rails 360a to 360h through the shuffle track 300.

[0038] The controller may control the vehicle and / or the shaded track 300 so that the vehicle moves through the shaded track 300 in various directions. For example, a vehicle approaching the shaded track 300 from the fixed track 360a may change direction (or turn) by moving through the first curved portion 310b and the central portion 310d and moving toward the fixed track 360h (direction 330f). A vehicle approaching the shaded track 300 from the fixed track 360c may change direction by moving through the second curved portion 310c and the central portion 310d and moving toward the fixed track 360b (direction 330b). A vehicle approaching the shaded track 300 from the fixed track 360e may change direction by moving through the second curved portion 320c and the central portion 320d and moving toward the fixed track 360d (direction 330c). The vehicle approaching the hash track 300 from the fixed track 360g can change direction by moving via the first curved portion 320b and the central portion 320d and moving toward the fixed track 360f (direction 330e) to change direction (turn). Although not shown herein, in some embodiments, the central portion 310d can be extended to align with the fixed track 360c and the fixed track 360h, and the central portion 320d can be extended to align with the fixed track 360d and the fixed track 360g, and the aforementioned alignment enables the vehicle to smoothly pass through the hash track 300.

[0039] In some embodiments, the controller may determine to direct the vehicle to pass straight through the hash track 300, and the vehicle approaching the hash 300 from the fixed track 360c may pass straight through the hash track 300 by moving along the straight portion 310a toward the fixed track 360h. In some embodiments, the controller may determine to direct the vehicle to pass straight through the hash track 300, and the vehicle approaching the hash 300 from the fixed track 360g may pass straight through the hash track 300 by moving along the straight portion 320a toward the fixed track 360d. In some embodiments, the extension of the center portion 310d and the center portion 320d may be retracted, moved, or disconnected so that the vehicle can move through the straight portion 310a and the straight portion 320a.

[0040] As a result, the vehicle can switch directions and reach its destination faster than a typical system because the vehicle does not need to make additional detours (intra-bay and inter-bay) to reach its destination. Therefore, the vehicle does not need to travel unnecessary detours around the intra-bay or inter-bay to reach its destination. This helps save time within the FAB and improve the yield of semiconductor components.

[0041] Sensors 302a and 302b are examples of sensors 302, which are arranged along the hash track 300 and the fixed tracks 360a to 360h. For example, each of the hash track sections 310a to 310c, 320a to 320c and the fixed tracks 360a to 360h is shown to contain 2 or 4 alignment sensors similar to the alignment sensors 302a and 302b. In some embodiments, there may be additional sensors (e.g., geospatial sensors) to track the movement and position of the vehicle within the AMHS. In some embodiments, a counting sensor may be installed on the hash track 300 so that the counting sensor can track the number of vehicles that have passed through the hash track 300. The sensed data may be transmitted back to the controller so that the controller can monitor the movement of the vehicle operating within the FAB, and control the movement and operation of the vehicle and control the hash track (e.g., hash track 300) within the FAB. However, the disclosed embodiments are not limited thereto, and there may be more or fewer alignment, geospatial, or counting sensors on the hash track 300 and / or the fixed tracks 360a to 360h.

[0042] The sensors 302a and 302b may include alignment sensors that assist in aligning the turntable 350 with the fixed rails 360a to 360h so that a vehicle passing through the hash rail 300 does not collide with the fixed rails 360a to 360 and other hash rails, or fall off the hash rail 300 or the fixed rails 360a to 360h. For example, the alignment sensor 302a may be fixed to the fixed rail 360h, and the alignment sensor 302b may be fixed to the curved portion 310b. Similar alignment sensors may be fixed to the fixed rails 360a to 360h and the first portion 310 and the second portion 320, as shown in FIG. Figure 3A As shown. When the turntable 350 rotates about the axis, the shuffle track 300 can rotate with the turntable 350. In order to stop the turntable 350 at the correct angle, the alignment sensors 302a and 302b can sense (or detect) the distance between the alignment sensors 302a and 302b. If the distance is equal to or less than a predetermined threshold, the controller can stop the rotation of the turntable 350 and safely allow the vehicle to continue to pass through the shuffle track 300 without worrying about the shuffle track 300 being hit or damaged. If the controller determines that the distance between the alignment sensors 302a and 302b is higher than the predetermined threshold, the turntable 350 can continue to rotate until the distance is equal to or less than the predetermined threshold.

[0043] In addition to sensing or measuring the aforementioned distances, the alignment sensors 302a and 302b may also use any suitable sensing mechanism to determine that the turntable 350 has rotated the correct amount. For example, the alignment sensors 302a and 302b may detect whether there is any offset between them along a reference axis. For example, the alignment sensor 302a may have an imaginary reference axis extending in the same direction as the fixed track 360h. If the alignment sensor 302b is not within the reference axis, the controller may determine that the turntable 350 has not rotated enough and needs to continue rotating.

[0044] The aforementioned controller (not shown) can receive sensing data, which comes from alignment sensors 302a and 302b, geospatial sensors, counting sensors and other suitable sensors. The controller can be a server comprising one or more processors, which are configured to receive sensing data. In addition, the controller and / or server can receive sensing data and process the aforementioned collected sensing data to be used as training data for a machine learning algorithm (for example, in an AMHS using artificial intelligence). The machine learning algorithm can use data to predict when the turntable must rotate and how many degrees to rotate. Once a prediction is made, before the vehicle arrives at a specific turntable and a hash track, the controller and / or server can control the specific turntable to smoothly rotate the predicted angle so that the vehicle can continue to move along the fixed and hash tracks at the best speed. If the controller and / or server (through sensors) detects other improper performances in the vehicle deceleration, traffic congestion and / or AMHS, the controller and / or server can further train the machine learning algorithm using the newly detected data, and further optimize the machine learning algorithm.

[0045] Figure 3B According to some embodiments, Figure 3A 300 is a top view of the hash track 300 rotated approximately 90 degrees. For simplicity and clarity, repeated discussion about the hash track 300 is omitted. The hash track 300 can be rotated (e.g., approximately 90 degrees) so that a vehicle approaching the hash track 300 from the fixed track 360e can move through the hash track 300 toward the fixed track 360b (direction 330g), and a vehicle approaching the hash track 300 from the fixed track 360a can move through the hash track 300 toward the fixed track 360f (direction 330h). Therefore, a vehicle can move through the hash track 300 without having to travel through loops and different processing areas around the FAB to reach its next tool / destination.

[0046] Figure 4A A top view of a hash track 400 and surrounding fixed tracks 412a, 412b, 414a, 414b, 416a, 416b, 418a, and 418b is depicted in accordance with some embodiments. The hash track 400 is similar to Figure 3A and 3BThe hash track 300 includes inner track portions 402, 404, 406, and 408 in addition to the track network. For example, the hash track 400 includes a plurality of tracks forming a π shape, or a first portion (e.g., the first portion 310) and a second portion (e.g., the second portion 320) forming a π shape. In addition, the hash track 400 allows a vehicle to approach the hash track 400 from one of the fixed tracks to change direction or directly pass through the hash track 400. In addition, the hash track 400 and the surrounding fixed tracks may include a plurality of alignment sensors, which may detect whether the hash track 400 is aligned with the fixed tracks around the turntable to which the hash track 400 is fixed. Therefore, for simplicity and clarity, similar descriptions are omitted.

[0047] The inner track sections 402 to 408 may be portions of an inner loop (e.g., inner loop 202). The inner track section 402 may be connected to fixed rails 412a and 412b, such that a vehicle traveling on the fixed rail 412a and moving toward the shading track 400 may turn through the inner track section 402, and move toward the fixed rail 412b and away from the shading track 400. Similarly, the inner track section 404 may be connected to fixed rails 414a and 414b, such that a vehicle traveling on the fixed rail 414a and moving toward the shading track 400 may turn through the inner track section 404, and move toward the fixed rail 414b and away from the shading track 400. The inner track section 406 may be connected to fixed rails 416a and 416b, such that a vehicle traveling on the fixed rail 416a and moving toward the shading track 400 may turn through the inner track section 406, and move toward the fixed rail 416b and away from the shading track 400. The inner track portion 408 may be connected to the fixed tracks 418a and 418b so that a vehicle traveling on the fixed track 418a and moving toward the hash track 400 may turn through the inner track portion 408 and move toward the fixed track 418b and away from the hash track 400 .

[0048] For example, the inner track sections 402 and 406 may allow a vehicle approaching the hash track 400 to turn around (e.g., make a U-turn) before reaching the hash track 400. Thus, the vehicle may be prevented from being damaged or colliding with the hash track 400. On the other hand, when a vehicle approaches the hash track 400 from the fixed track 414a or 418b, the vehicle may turn around or directly pass through the hash track 400 to reach the opposite end of the hash track 400. For example, if a vehicle approaches the hash track 400 from the fixed track 414a, the vehicle may turn around or pass through the hash track 400 toward the fixed track 418a via the inner track section 404, depending on where the vehicle is supposed to go. Thus, depending on where the vehicle's destination is, the inner track sections 402, 404, 406, and 408 may allow the vehicle to turn around or directly pass through the hash track 400 to reach the opposite end before reaching the hash track 400.

[0049] Figure 4B According to some embodiments, Figure 4A A top view of the hash track 400 rotated about 90 degrees. Figure 4B 406, and 408 may allow a vehicle approaching the hash track 400 to turn around (e.g., make a U-turn) before reaching the hash track 400. On the other hand, when a vehicle approaches the hash track 400 from the fixed track 412a or 416b, the vehicle may turn around or directly cross the hash track 400 to reach the opposite end of the hash track 400. For example, if a vehicle approaches the hash track 400 from the fixed track 412a, then depending on where the vehicle is supposed to go, the vehicle may turn around or cross the hash track 400 toward the fixed track 416a via the inner track section 402. Thus, depending on where the vehicle's destination is, the inner track sections 402, 404, 406, and 408 may allow the vehicle to turn around or directly cross the hash track 400 before reaching the hash track 400 to reach the opposite end.

[0050] Figure 5AA top view of an AMHS 500 including a shuffle track 502 is depicted according to some embodiments. The AMHS 500 includes a plurality of fixed tracks 512, 514, 516, and 518 (similar to fixed tracks 360a to 360h, 412a to 418b) and a shuffle track 502 (similar to shuffle tracks 300 and 400) fixed to a turntable (similar to turntable 350). The AMHS 500 also includes inner track portions 522, 524, 526, and 528 (similar to inner track portions 402 to 408). The AHMS 500 may also include connecting (e.g., diagonally connecting) portions 532a, 532b, 534a, 534b, 536a, 536b, 538a, and 538b, the aforementioned connecting portions connecting a portion of a fixed track to another portion of the same fixed track, such as Figure 5A Each of the fixed rails 512 to 518, the inner rail sections 522 to 528, and the connecting sections 532a to 538b may include one rail or two parallel rails, depending on the type of vehicle used in the AMHS 500.

[0051] In some embodiments, if the vehicle is traveling from the leftmost fixed track portion of the fixed track 512 toward the hash track 502, the vehicle can move to the second left fixed track of the fixed track 512 by traveling the connecting portion 532a. The arrow indicates the direction in which the vehicle can move. Although a clear simplified diagram is shown for the hash track 502, this is only for illustrative purposes, and the hash track 502 can be similar to the hash track 300 or 400. For example, in some embodiments, a vehicle approaching the hash track 502 along the fixed track 512 can turn to the fixed track 518 via the hash track 502. Therefore, the hash track 502 can be implemented in the 4-track AMHS 500.

[0052] As discussed above with respect to the shuffled tracks 300 and 400, the shuffled track 502 can similarly rotate about an axis that is generally perpendicular (or orthogonal) to the major surface of the turntable to which the shuffled track 502 is fixed. While rotating about the axis, a vehicle moving along the fixed track 514 can move through the shuffled track 502 and onto the fixed track 518. Alternatively, the vehicle can also turn a corner so that the vehicle moves along the fixed track 512.

[0053] In some embodiments, the user may want the vehicle to move along the fixed track 514 toward the hashed track 502 to reach the fixed track 516. In this case, the vehicle can move to the hashed track 512 and stop. The hashed track 502 is then rotated so that the vehicle can face the fixed track 516. Once the hashed track 502 is properly aligned, the vehicle can resume movement and move along the fixed track 516.

[0054] Figure 5B The AMHS 500 and the Figure 5A 502 is rotated approximately 90 degrees. As discussed above with respect to the hashed tracks 300 and 400, the hashed track 502 can similarly rotate about an axis that is substantially perpendicular (or orthogonal) to the major surface of the turntable to which the hashed track 502 is fixed. When rotating about the axis, a vehicle moving along the fixed track 514 can move through the hashed track 502 and reach the fixed track 518.

[0055] Fig. 6A A top view of an AMHS 600 including a shuffle track 602 is depicted according to some embodiments. AMHS 600 and shuffle track 602 are similar to AMHS 500 and shuffle track 502, except that AMHS 600 includes a 2-track system instead of a 4-track system. For example, AMHS 600 includes a plurality of fixed tracks 612, 614, 616 and 618 (similar to fixed tracks 360a to 360h, 412a to 418b) and a shuffle track 602 (similar to shuffle tracks 300 and 400) fixed on a turntable (similar to turntable 350). AMHS 600 also includes inner track portions 622, 624, 626 and 628 (similar to inner track portions 402 to 408). Arrows indicate directions in which vehicles can move. However, the 2-track system does not have a connecting portion like the connecting portion 532a to 538b of the 4-track system. Although an explicitly simplified diagram is shown for the hashed track 602, this is for illustration purposes only, and the hashed track 602 can be similar to the hashed track 300 or 400. For example, in some embodiments, a vehicle approaching the hashed track 602 along the fixed track 612 can turn to the fixed track 618 via the hashed track 602. Thus, the hashed track 602 can be implemented in a 2-track AMHS 600. Each of the fixed tracks 612 to 618 and the inner track portions 622 to 628 can contain one track or two parallel tracks, depending on the type of vehicle used in the AMHS 600.

[0056] Figure 6B The AMHS 600 and the Fig. 6A602 is rotated approximately 90 degrees. As discussed above with respect to the hashed tracks 300 and 400, the hashed track 602 can similarly rotate about an axis that is substantially perpendicular (or orthogonal) to the major surface of the turntable on which the hashed track 602 is fixed. When rotating about the axis, a vehicle moving along the fixed track 614 can move through the hashed track 602 and reach the fixed track 618.

[0057] Fig. 7A A perspective view of a power supply 700 for a hash track is depicted in accordance with some embodiments. The power supply 700 may be an independent contactless power supply separate from a power supply for powering a vehicle moving through a fixed track. The power supply 700 includes a power panel 702 capable of providing power via electromagnetic induction (710) through induction cables 704 and 706. A magnetic field is generated around the induction cables 704 and 706 to efficiently transfer power to the vehicle (720). A pickup coil 730 is mounted on the side of the vehicle and opposite the induction cables 704 and 706, and the pickup coil 730 may receive power from the magnetic field. The pickup coil 730 is connected to a power receiver that provides power to the vehicle itself. Thus, the disclosed hash track may be independently powered by a power supply different from the fixed track, thereby making the operation of the hash track safe and reliable.

[0058] Figure 7B A schematic diagram of a panel system 750 for providing power to vehicles according to some embodiments is depicted. The panel system 750 can include a power panel 752 connected to a central power source of a plant. The power panel 752 can then provide power to a first power panel 754 that can provide power to vehicles in a fixed track and a second power panel 702 that can provide power to vehicles in a shuffle track. Thus, the safety of vehicles moving along fixed tracks and shuffle tracks can be increased by using separate power panels to provide power to the shuffle track.

[0059] Figure 8 A schematic design diagram of a hash track 800 according to some embodiments is shown. The hash track 800 is similar to the hash track 300, 400, or 502, and repeated descriptions are omitted here. Therefore, even though the hash track 800 has a clear shape and design, the disclosed embodiments are not limited thereto, and the following description can be applied to a 2-track hash track or a 4-track hash track, etc.

[0060] A set of induction cables 802 (e.g., induction cables 704 and 706) may be connected to the fixed rail and powered, and a set of power coils 804 may be connected to the shuffle rail 800 and powered. The induction cables 802 may overlap with a turntable 810 that rotates around an axis, and the shuffle rail 800 is fixed to the turntable 810. The fixed rail may be connected to a power source through the induction cables 802, and the shuffle rail 800 may be connected to another power source through the induction cables 804. For example, any portion of the shuffle rail 800 that rotates with the turntable 810 may be connected to a power source through the power coils 804, so that the turntable 810 can rotate freely. Therefore, when the turntable 810 rotates around an axis, there is no risk that the induction cables 804 and the induction cables 802 become entangled to cause any concerns about the safety or functionality of the shuffle rail 800.

[0061] Fig. 9 A flow chart of an example method 900 for operating an AMHS according to some embodiments is depicted. The method 900 may be used to operate an AMHS in a FAB that manufactures semiconductor components. For example, at least some of the operations described in the method 900 may be used to operate a hash track 300 ( Figure 3A , 3B ) or hash track 400 ( Figure 4A , 4B ). It should be noted that method 900 is only an example and is not intended to limit the present disclosure. Therefore, it can be understood that Fig. 9 Additional operations are provided before, between, and after method 900, and some other operations may be only briefly described herein.

[0062] Briefly, method 900 begins at operation 902 by moving a vehicle along a first fixed track toward a first shuffled track fixed to a first turntable. Method 900 proceeds to operation 904 by rotating the first shuffled track about an axis extending substantially perpendicular to a surface of the first turntable. Method 900 proceeds to operation 906 by moving the vehicle from a first end of the first shuffled track toward a second end of the first shuffled track to pass through the first shuffled track, the first end and the second end of the first shuffled track being opposite to each other.

[0063] Referring to operation 902, a vehicle (e.g., vehicle 100) may move along a fixed track (e.g., fixed tracks 360a to 360h, 412a to 418b, etc.) toward a first shading track (e.g., shading tracks 300, 400, 502). A controller may sense the movement of the vehicle and control the direction of travel of the vehicle based on a sample in the vehicle carrier.

[0064] Referring to operation 904, the hash track can be rotated about an axis extending substantially perpendicular to a major surface of a turntable to which the hash track is fixed. The hash track can be rotated according to the next destination of the next vehicle. For example, if the vehicle is on its way to a specific platform station to deliver a sample, the controller can control the turntable to rotate to a predetermined degree so that the vehicle will effectively (or most effectively) move to the aforementioned specific platform station. The rotation is completed before the vehicle reaches the hash track so that no collision occurs.

[0065] Referring to operation 906, because the controller has determined that the most efficient way for the vehicle to reach a particular platform station is for it to move through the hash track, the vehicle can move onto the hash track and continue to move forward. Once the vehicle has passed the hash track (e.g., has moved through the hash track and is now on the fixed track passing through the hash track), the controller can control the turntable to rotate so that the next vehicle heading to the hash track can move to the destination in the most efficient manner.

[0066] Fig.10 A flow chart of an example method 1000 for operating an AMHS according to some embodiments is depicted. The method 1000 may be used to operate an AMHS in a FAB that manufactures semiconductor components. For example, at least some of the operations described in the method 1000 may be used to operate a hash track 300 ( Figure 3A , 3B ) or hash track 400 ( Figure 4A , 4B ). It should be noted that the method 1000 is only an example and is not intended to limit the present disclosure. Therefore, it can be understood that Fig.10 Additional operations are provided before, between, and after method 1000, and some other operations are only briefly described here.

[0067] Briefly, method 1000 begins at operation 1002 by moving a vehicle along a first fixed track toward a first shuffled track fixed to a first turntable. Method 1000 proceeds to operation 1004 by rotating the first shuffled track about an axis extending substantially perpendicular to a surface of the first turntable. Method 1000 proceeds to operation 1006 by moving the vehicle along a curved portion of the shuffled track. Method 1000 proceeds to operation 1008 by moving the vehicle along a second fixed track extending in a second direction different from the first fixed track.

[0068] Referring to operation 1002, a vehicle (e.g., vehicle 100) may move along a first fixed track (e.g., fixed tracks 360a to 360h, 412a to 418b, etc.) toward a first scattered track (e.g., scattered tracks 300, 400, 502). A controller may sense the movement of the vehicle and control the direction of travel of the vehicle based on a sample in the vehicle carrier.

[0069] Referring to operation 1004, the hash track can be rotated about an axis extending substantially perpendicular to a major surface of a turntable to which the hash track is fixed. The hash track can be rotated according to the next destination of the next vehicle. For example, if the vehicle is on its way to a specific platform station to deliver a sample, the controller can control the turntable to rotate to a predetermined degree so that the vehicle will effectively (or most effectively) move to the aforementioned specific platform station. The rotation is completed before the vehicle reaches the hash track so that no collision occurs.

[0070] Referring to operation 1006, because the controller has determined that the most efficient way for the vehicle to reach a particular platform station is to change direction via the hash track, the vehicle may move onto a curved portion of the hash track (e.g., curved portions 310b, 310c, 320b, 320c) and change direction.

[0071] Referring to operation 1008, the vehicle may leave the hash track and move onto a second fixed track that extends in a different direction than the first fixed track. The vehicle may continue to move along the second fixed track toward its destination. Once the vehicle has passed the hash track (e.g., has moved through the hash track and is now on the fixed track past the hash track), the controller may control the turntable to rotate so that the next vehicle heading to the hash track can move to the destination in the most efficient manner.

[0072] In one aspect of the present disclosure, an AMHS for a FAB is disclosed. The AMHS includes a track network and a carrier configured to hold a sample carrier storing one or more samples, wherein the carrier is configured to move within the FAB via the aforementioned track network. The AMHS also includes a turntable connected to the aforementioned track network and configured to rotate around an axis substantially perpendicular to the turntable surface, and a hash track connected to the turntable and overlapping the turntable, wherein the hash track is configured to rotate around the axis with the turntable.

[0073] In another aspect of the present disclosure, a method of operating an AMHS is disclosed. The method includes moving a vehicle along a first fixed track toward a first scattering track fixed to a first turntable, the vehicle being configured to hold a sample carrier for storing one or more samples, rotating the first scattering track about an axis extending substantially perpendicular to a surface of the first turntable; and moving the vehicle through the first scattering track from a first end of the first scattering track toward a second end of the first scattering track, the first end and the second end of the first scattering track being opposite to each other.

[0074] In another aspect of the present disclosure, a method of operating an AMHS is disclosed. The method includes moving a vehicle along a first fixed track toward a first shuffle track fixed to a first turntable, the vehicle being configured to hold a sample carrier for storing one or more samples. The method also includes rotating the first shuffle track about an axis extending substantially perpendicular to a surface of the first turntable, moving the vehicle along a curved portion of the shuffle track, and moving the vehicle along a second fixed track, the second fixed track extending in a second direction different from the first fixed track.

[0075] As used herein, the terms "about" and "approximately" generally refer to plus or minus 10% of the numerical value being described. For example, about 0.5 includes 0.45 and 0.55, about 10 includes 9 to 11, and about 1000 includes 900 to 1100.

[0076] The features of several embodiments have been summarized above so that those skilled in the art can better understand the aspects of the present disclosure. Those skilled in the art will appreciate that they can easily use the present disclosure as a basis for designing or modifying other programs and structures to implement the same purposes and / or achieve the same advantages of the embodiments introduced herein. Those skilled in the art will also recognize that these equivalent constructions should not depart from the spirit and scope of the present disclosure, and that they can make various changes, substitutions, and modifications to the present disclosure without departing from the spirit and scope of the present disclosure.

[0077] Explanation of symbols

[0078] 100: Vehicle

[0079] 102: Vehicles

[0080] 104a: Wheel

[0081] 104b: Wheel

[0082] 106a: First track

[0083] 106b: Second track

[0084] 108: Axle

[0085] 200: Automated Material Handling System (AMHS)

[0086] 202: Inner Ring

[0087] 204: Outer Ring

[0088] 204a: Track

[0089] 204b: Track

[0090] 204c: Track

[0091] 204d: Orbit

[0092] 206: Machine

[0093] 208: Arrow indication

[0094] 220a: Connecting tracks

[0095] 220b: Connecting tracks

[0096] 300: Hash Track

[0097] 302a: Alignment sensor

[0098] 302b: Alignment sensor

[0099] 310: Part 1

[0100] 310a: Straight section

[0101] 310b: curved part

[0102] 310c: curved part

[0103] 310d: Center section

[0104] 320: Part 2

[0105] 320a: Straight section

[0106] 320b: curved part

[0107] 320c: curved part

[0108] 320d: Center section

[0109] 330a: Direction Indicator

[0110] 330b: Direction Indicator

[0111] 330c: Direction Indicator

[0112] 330d: Direction Indicator

[0113] 330e: Direction Indicator

[0114] 330f: Direction Indicator

[0115] 330g: Direction Indicator

[0116] 330h: Direction indication

[0117] 350: Turntable

[0118] 352a: Counterclockwise

[0119] 352b: Clockwise

[0120] 360a: Fixed track

[0121] 360b: Fixed track

[0122] 360c: Fixed track

[0123] 360d: Fixed track

[0124] 360e: Fixed track

[0125] 360f: Fixed track

[0126] 360g: Fixed track

[0127] 360h: Fixed track

[0128] 400: Hash Track

[0129] 402: Inner track part

[0130] 404: Inner track part

[0131] 406: Inner track section

[0132] 408: Inner track section

[0133] 412a: Fixed track

[0134] 412b: Fixed track

[0135] 414a: Fixed track

[0136] 414b: Fixed track

[0137] 416a: Fixed track

[0138] 416b: Fixed track

[0139] 418a: Fixed track

[0140] 418b: Fixed track

[0141] 500: Automated material handling system

[0142] 502: Hash Track

[0143] 512: Fixed track

[0144] 514: Fixed track

[0145] 516: Fixed track

[0146] 518: Fixed track

[0147] 522: Inner track part

[0148] 524: Inner track section

[0149] 526: Inner track section

[0150] 528: Inner track part

[0151] 532a: Connection part

[0152] 532b: Connection part

[0153] 534a: Connection part

[0154] 534b: Connection part

[0155] 536a: Connection part

[0156] 536b: Connection part

[0157] 538a: Connection part

[0158] 538b: Connection part

[0159] 600: Automated material handling system

[0160] 602: Hash Track

[0161] 612: Fixed track

[0162] 614: Fixed track

[0163] 616: Fixed track

[0164] 618: Fixed track

[0165] 622: Inner track part

[0166] 624: Inner track section

[0167] 626: Inner track section

[0168] 628: Inner track section

[0169] 700: Power supply

[0170] 702: Second power panel

[0171] 704: Induction cable

[0172] 706: Induction cable

[0173] 710: Electromagnetic Induction

[0174] 720: Vehicle

[0175] 730: Pickup coil

[0176] 750: Panel System

[0177] 752: Power panel for central power supply

[0178] 754: First Power Panel

[0179] 800: Hash Track

[0180] 802: Induction cable

[0181] 804: Induction cable

[0182] 810: Turntable

[0183] 900: Example Method

[0184] 902: Operation steps

[0185] 904: Operation steps

[0186] 906: Operation steps

[0187] 1000: Example Method

[0188] 1002: Operation steps

[0189] 1004: Operation steps

[0190] 1006: Operation steps

[0191] 1008:Operation steps.

Claims

1. An automated material handling system AMHS for a semiconductor manufacturing facility FAB, comprising: Rail network; a vehicle configured to hold a sample carrier for storing one or more samples, wherein the vehicle is configured to move within the semiconductor manufacturing facility via the track network; a turntable connected to the track network and configured to rotate about an axis generally perpendicular to a surface of the turntable; as well as A hash track is connected to and overlaps the turntable, wherein the hash track is configured to rotate around the axis together with the turntable, wherein the hash track includes a first portion and a second portion each having a π shape.

2. The automated material handling system AMHS according to claim 1, further comprising: a first power source connected to the track network; and A second power source is connected to the hash rail, wherein the first power source and the second power source are electrically disconnected from each other.

3. The automated material handling system AMHS according to claim 1, wherein the hash track rotates together with the turntable.

4. The automated material handling system AMHS according to claim 1, wherein each of the first portion and the second portion of the hash track includes a first curved portion, a second curved portion, and a straight portion connected to ends of the first curved portion and the second curved portion.

5. The automated material handling system (AMHS) of claim 1, further comprising a plurality of sensors disposed along at least a portion of the hash track, wherein the plurality of sensors are configured to sense an alignment of the turntable.

6. The automated material handling system AMHS according to claim 1, wherein the track network comprises: a plurality of first tracks extending along a first direction; and a plurality of second rails extending along a second direction substantially perpendicular to the first direction, The hash track is located between the plurality of first tracks and the plurality of second tracks.

7. The automated material handling system AMHS according to claim 6, wherein the track network comprises a first inner ring track located between two adjacent first tracks of the plurality of first tracks, and a second inner ring track located between two adjacent second tracks of the plurality of second tracks.

8. The automated material handling system AMHS according to claim 6, wherein the first track comprises first, second, third and fourth sections arranged parallel to each other, wherein the carrier is configured to move along the first section and the second section in the first direction, and the carrier is configured to move along the third section and the fourth section in a third direction opposite to the first direction, The first part and the second part are connected to each other via a first diagonal part, and the third part and the fourth part are connected to each other via a second diagonal part.

9. The automated material handling system (AMHS) of claim 1, wherein the sample carrier is configured to store one or more wafers having a radius of 300 mm, 390 mm, 400 mm, or 500 mm.

10. A method of operating an automated material handling system (AMHS), comprising: Move a carrier along a first fixed track toward a first scattering track fixed to a first turntable, the carrier being configured to hold a sample carrier storing one or more samples; rotating the first hash track about an axis extending generally perpendicular to a surface of the first turntable; as well as The vehicle is moved through the first hashed track from a first end of the first hashed track toward a second end of the first hashed track, the first end and the second end of the first hashed track being opposite to each other, wherein the hashed track includes a first portion and a second portion each having a π shape.

11. The method according to claim 10, further comprising: After moving the vehicle through the first shuffled track, moving the vehicle from the second end of the first shuffled track to a second fixed track extending along a first direction; moving the vehicle to a second hash track fixed to a second turntable; as well as The vehicle is moved via the second hashed track to a third fixed track extending in a second direction different from the first direction.

12. The method of claim 10, wherein the first fixed track comprises a first portion and a second portion disposed parallel to each other, and wherein the method further comprises, before the vehicle moves to the first hashed track, moving the vehicle from the first portion of the first fixed track to the second portion of the first fixed track.

13. The method according to claim 10, further comprising: supplying power to the first turntable and the first hash track using a first power source; and A second power source is used to supply power to the first fixed rail, and the first power source and the second power source are electrically disconnected from each other.

14. The method according to claim 10, further comprising: Alignment of the first turntable relative to the first fixed track is sensed using one or more sensors disposed along at least a portion of the first hash track.

15. The method of claim 14, further comprising using artificial intelligence (AI) to control the turntable and the hash track based on the sensed alignment.

16. The method according to claim 15, further comprising: The first turntable is controlled according to the artificial intelligence to rotate the first turntable.

17. A method of operating an automated material handling system (AMHS), comprising: Move a carrier along a first fixed track toward a first scattering track fixed to a first turntable, the carrier being configured to hold a sample carrier storing one or more samples; rotating the first hash track about an axis extending generally perpendicular to a surface of the first turntable; moving the vehicle along a curved portion of the scatter track; as well as The vehicle is moved along a second fixed track extending along a second direction different from the first fixed track, wherein the hashed track includes a first portion and a second portion each having a π shape.

18. The method according to claim 17, further comprising: supplying power to the first turntable and the first hash track using a first power source; and A second power source is used to supply power to the first fixed rail, and the first power source and the second power source are electrically disconnected from each other.

19. The method according to claim 17, further comprising: sensing alignment of the first turntable relative to the first fixed track and the second fixed track using one or more sensors disposed along at least a portion of the first hashed track; and Artificial intelligence (AI) is used to control the turntable and the hash track according to the sensed alignment.

20. The method of claim 17, wherein the sample carrier is configured to store one or more wafers having a radius of 300 mm, 390 mm, 400 mm, or 500 mm.

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