actuator

Abstract

This invention provides an actuator comprising: a flexible electrode having flexibility; and a base electrode, wherein a facing surface opposite the flexible electrode is covered by an insulating layer. The actuator deforms the flexible electrode toward the facing surface by applying a voltage between the two electrodes. The flexible electrode is a rotating body disposed on the facing surface. The base electrode is divided into multiple mutually insulated electrode portions. The multiple electrode portions are arranged along a predetermined direction. When a voltage is sequentially applied to the multiple electrode portions in the predetermined direction, the flexible electrode rotates on the facing surface while moving relative to the base electrode in the predetermined direction.

Description

Technical Field

[0001] This invention relates to actuators. Background Technology

[0002] There are known soft actuators that use the deformation of a flexible component as a driving force to perform mechanical work (e.g., Japanese Patent No. 5714200). Summary of the Invention

[0003] The actuator described in Japanese Patent No. 5714200 is merely capable of performing a simple action of linear movement along the direction of the distance between electrodes or along the direction of the electrodes, and there is room for improvement in how it is used as an actuator.

[0004] The present invention provides an actuator that enables diverse uses as an actuator.

[0005] An actuator according to one aspect of the present invention includes: a flexible electrode having flexibility; and a base electrode, the opposing surface of which is covered by an insulating layer. The actuator is configured such that the flexible electrode deforms toward the opposing surface by applying a voltage between the flexible electrode and the base electrode. The flexible electrode is a rotating body disposed on the opposing surface. The base electrode is divided into a plurality of mutually insulated electrode portions, the plurality of electrode portions being arranged along a predetermined direction. The flexible electrode is configured such that, when the voltage is sequentially applied to the plurality of electrode portions in the predetermined direction, it rotates on the opposing surface while moving relative to the base electrode in the predetermined direction.

[0006] With this structure, the actuator can achieve the action of moving the flexible electrode relative to the base electrode. By appropriately setting the configuration of the multiple electrode portions constituting the base electrode, the movement path of the flexible electrode can be designed with considerable freedom. When an output member that outputs the actuator's power to the outside is mounted on the flexible electrode, the output member can move along various paths as the flexible electrode moves. Therefore, the actuator according to the above-described manner of the present invention can achieve a variety of usage methods.

[0007] In the aforementioned actuator, the base electrode may be formed in an annular shape and have an inner circumferential surface. Alternatively, the flexible electrode may be disposed on the inner circumferential surface, and the opposing surface may be the inner circumferential surface. Alternatively, the predetermined direction may be along the circumference of the inner circumferential surface.

[0008] In this manner, the flexible electrode rotates on its own inner circumferential surface while moving relative to it on the same surface. The base electrode can move along with the flexible electrode. The actuator can be used in various ways. Therefore, the actuator can be used in a variety of ways.

[0009] Alternatively, the actuator may further include an output member that outputs power to the outside as the flexible electrode moves. Alternatively, the output member may be disposed inside the base electrode and have a rotating body having an outer peripheral surface facing the inner peripheral surface of the base electrode. Alternatively, the flexible electrode may be disposed between the inner and outer peripheral surfaces in contact with the inner peripheral surface of the base electrode and the outer peripheral surface of the output member.

[0010] In this way, the output component can rotate as the flexible electrode moves. The actuator can be used in various ways. Therefore, the actuator can be used in a diverse range of applications.

[0011] In the aforementioned actuator, the length of each of the electrode portions in the predetermined direction may be shorter than the length of the flexible electrode in the predetermined direction.

[0012] This approach simplifies the shape of the base electrode and increases its design freedom. Furthermore, the actuator's drive circuitry can precisely control the movement of the flexible electrode, further enhancing the freedom of its movement. Therefore, the actuator can easily achieve greater versatility in its applications.

[0013] According to the present invention, it is possible to diversify the ways in which it is used as an actuator. Attached Figure Description

[0014] The features, advantages, and technical and industrial significance of exemplary embodiments of the present invention will now be described with reference to the accompanying drawings, in which like reference numerals denote like elements, and wherein:

[0015] Figure 1 This is a diagram schematically showing the structure of the actuator in Embodiment 1.

[0016] Figure 2 This is an explanation Figure 1 A diagram showing the output components of the actuator.

[0017] Figure 3 This is to explain the... Figure 1 The diagram shown is a diagram (Figure 1) illustrating the process of driving the actuator.

[0018] Figure 4 This is to explain the... Figure 1 The diagram shown is a diagram (Figure 2) illustrating the process of driving the actuator.

[0019] Figure 5 This is to explain the... Figure 1 The diagram (3) shows the process of the actuator being driven.

[0020] Figure 6 This is a diagram illustrating the actuator of Embodiment 2.

[0021] Figure 7 This is to explain the... Figure 6 The diagram shown is a diagram (Figure 1) illustrating the process of driving the actuator.

[0022] Figure 8 This is to explain the... Figure 6 The diagram shown is a diagram (Figure 2) illustrating the process of driving the actuator.

[0023] Figure 9 This is to explain the... Figure 6 The diagram (3) shows the process of the actuator being driven.

[0024] Figure 10 This is a diagram illustrating the actuator of embodiment 3.

[0025] Figure 11 This is a diagram illustrating the actuator of embodiment 4. Detailed Implementation

[0026] Hereinafter, embodiments of the present invention will be described using the accompanying drawings. Structures labeled with the same reference numerals in each embodiment have the same function in each embodiment unless specifically mentioned otherwise, and their descriptions will be omitted.

[0027] Implementation Method 1

[0028] use Figures 1-5 The actuator 1 of Embodiment 1 will be described.

[0029] Figure 1 This is a diagram schematically showing the structure of the actuator 1 in Embodiment 1. Figure 2 This is an explanation Figure 1 A diagram of the output component 40 of the actuator 1 is shown.

[0030] Actuator 1 is a soft actuator that performs mechanical work by means of the deformation of a flexible electrode 10. Unlike existing soft actuators that are powered by the deformation of a dielectric elastomer held between a pair of electrodes, actuator 1 is powered by the deformation of the flexible electrode 10 itself. Actuator 1 can be applied to various actuators used in various industrial machines or robots.

[0031] The actuator 1 in embodiment 1 utilizes the Coulomb force generated by applying a voltage between the flexible electrode 10 and the base electrode 20 to deform the flexible electrode 10 so that the flexible electrode 10 approaches the opposing surface 21 of the base electrode 20 (see reference). Figure 3At this point, actuator 1 applies a voltage between a portion of the base electrode 20 and the flexible electrode 10. Then, actuator 1 stops applying the voltage between the two electrodes, causing a portion of the flexible electrode 10 to return to its original position (see reference). Figure 4 Then, actuator 1 applies a voltage between another portion of base electrode 20 and flexible electrode 10 (see reference). Figure 5 By repeatedly applying and stopping such a voltage, actuator 1 can achieve the action of moving the flexible electrode 10 relative to the base electrode 20. In this embodiment, the direction in which the flexible electrode 10 moves relative to the base electrode 20 is also referred to as the "relative movement direction R". The relative movement direction R is an example of the "prescribed direction" described in the scope of the invention claim.

[0032] The actuator 1 includes: a flexible electrode 10, which is flexible; and a base electrode 20, which is used to apply a voltage to generate a Coulomb force that deforms the flexible electrode 10.

[0033] The flexible electrode 10 is formed of a flexible conductor. The flexibility of the flexible electrode 10 is such that it deforms due to the Coulomb force generated by applying a voltage between the flexible electrode 10 and the base electrode 20, and returns to its original shape (the shape before deformation, i.e., the shape before the voltage was applied) when the application of the voltage is stopped.

[0034] The flexible electrode 10 can also be formed using conductive rubber or conductive gel. Examples of conductive rubber include elastomers formed by mixing conductive materials. Examples of conductive materials include micropowders of carbon black, acetylene black, or carbon nanotubes, metallic micropowders of silver or copper, or core-shell conductive micropowders formed by coating an insulator such as silica or alumina with metal through sputtering. Examples of conductive gels include functional gel materials formed by retaining solvents such as water or humectants, electrolytes, and additives within a three-dimensional polymer matrix. Examples of functional gel materials include ST-gel (registered trademark) from Sekisui Chemicals Co., Ltd.

[0035] The flexible electrode 10 is a rotating body disposed on the opposing surface 21 of the base electrode 20, opposite to the flexible electrode 10. A rotating body is a three-dimensional object formed by rotating a plane, such as a rectangular plane, which lies in the same plane as an axis in the direction surrounding that axis. The rotational center axis of the flexible electrode 10, which is the rotating body, is an axis that intersects (e.g., orthogonal) the relative movement direction R and is along the opposing surface 21 of the base electrode 20 (e.g., parallel to the opposing surface 21). The cross-section of the outer surface of the flexible electrode 10, cut by a plane (including the plane in the vertical and horizontal directions) containing the normal direction of the opposing surface 21 of the base electrode 20 and the relative movement direction R, is formed into a closed shape with rounded corners. For example, this cross-section of the outer surface of the flexible electrode 10 is formed into a circle, ellipse, or oval shape. The flexible electrode 10 may also be formed into a sphere, cylinder, tube, or ring shape. In this embodiment, the flexible electrode 10 is formed into a spherical shape.

[0036] When a voltage is applied between the flexible electrode 10 and the base electrode 20, the flexible electrode 10 rotates on the opposing surface 21 of the base electrode 20 while moving relative to the base electrode 20. In this embodiment, the base electrode 20 does not move, and the flexible electrode 10 moves on the opposing surface 21. In this embodiment, the flexible electrode 10 is placed on the opposing surface 21 of the base electrode 20 and rolls on the opposing surface 21 when the voltage is applied. In this embodiment, the relative movement direction R of the flexible electrode 10 is the forward direction. Alternatively, multiple flexible electrodes 10 may be provided.

[0037] The base electrode 20 is formed of a rigid conductive material. Examples of materials used for forming the base electrode 20 include metallic materials such as iron, copper, or aluminum. Alternatively, the base electrode 20 can be formed by covering one side of a substrate made of a non-metallic material such as ceramic, which has heat resistance, rigidity, and insulation, with a conductive metal film. The side of the substrate covered with the metal film is the side opposite to the flexible electrode 10.

[0038] The opposing surface 21 of the base electrode 20, which faces the flexible electrode 10, is covered by an insulating layer 22. The insulating layer 22 is formed using a ferroelectric material made of ceramic to reliably maintain the charge accumulated on the base electrode 20 by applying a voltage between the base electrode 20 and the flexible electrode 10. Specifically, the insulating layer 22 is formed using a ferroelectric material with a perovskite structure. Examples of ferroelectric materials with a perovskite structure include barium titanate (BaTiO3), lead titanate (PbTiO3), lead zirconate titanate (Pb(Zr,Ti)O3), lanthanum lead zirconate titanate ((Pb,La)(Zr,Ti)O3), strontium titanate (SrTiO3), barium strontium titanate ((Ba,Sr)TiO3), or potassium sodium niobate ((NaK)NbO3). Substances such as CaZrO3 and BaSnO3 may also be dissolved in barium titanate.

[0039] Furthermore, the material used for forming the insulating layer 22 is preferably a material with a high relative permittivity, capable of generating a Coulomb force that deforms the flexible electrode 10. The relative permittivity of the insulating layer 22 can be, for example, 1000 or higher by using ceramics (fine ceramics). Barium titanate has a relative permittivity of approximately 1000 to 10000. Lead zirconate titanate has a relative permittivity of 500 to 5000. Strontium titanate has a relative permittivity of 200 to 500. These ferroelectric materials with perovskite structures are materials with high relative permittivity.

[0040] The base electrode 20 is formed as a plate extending in the relative movement direction R (front-to-back direction). The length of the base electrode 20 in the relative movement direction R is longer than the length of the flexible electrode 10 in the relative movement direction R. The opposing surface 21 of the base electrode 20 is inclined relative to the tangential plane of the flexible electrode 10, except for the contact portion of the flexible electrode 10 that contacts the base electrode 20. A space 23 is formed between the flexible electrode 10 and the base electrode 20. The space 23 is formed on the front and rear sides of the contact portion of the flexible electrode 10 that contacts the base electrode 20. The space 23 is a space for accommodating the flexible electrode 10, which deforms in a manner close to the opposing surface 21 of the base electrode 20, when a voltage is applied between the flexible electrode 10 and the base electrode 20.

[0041] The base electrode 20 is divided into multiple electrode portions 25a to 25d by dividing its opposing surface 21. The number of electrode portions is arbitrary. The multiple electrode portions 25a to 25d are insulated from each other by a plate-shaped insulating portion 26. Through the plate-shaped insulating portion 26, voltages are applied independently to the multiple electrode portions 25a to 25d between them and the flexible electrode 10. In this embodiment, each of the multiple electrode portions 25a to 25d is also collectively referred to as "electrode portion 25".

[0042] Multiple electrode portions 25a to 25d are arranged along the relative movement direction R of the flexible electrode 10. The relative movement direction R is not limited to, for example... Figure 1 The direction of the straight line shown can also be the direction of a curve or a loop. The relative movement direction R can be designed more freely by appropriately setting the arrangement of the multiple electrode sections 25a to 25d. That is, by appropriately setting the arrangement of the multiple electrode sections 25a to 25d, the actuator 1 can design the movement path of the flexible electrode 10 more freely. Voltage is sequentially applied to the multiple electrode sections 25a to 25d in the relative movement direction R. Voltage is sequentially applied to the multiple electrode sections 25a to 25d in this embodiment in the forward direction.

[0043] Each of the multiple electrode portions 25a to 25d has a length L1 in the relative movement direction R that is longer than the length L2 of the flexible electrode 10 in the relative movement direction R (L1 > L2). The opposing surfaces 21 of each of the multiple electrode portions 25a to 25d are gently inclined downward (in the direction of gravity) as they face forward.

[0044] A protrusion 24 is formed on the trailing edge (the edge in the direction opposite to the relative movement direction R of the flexible electrode 10) of each of the plurality of electrode portions 25a to 25d. The protrusion 24 protrudes rearward from the trailing edge of each of the plurality of electrode portions 25a to 25d. The length of the protrusion 24 in the relative movement direction R is longer than the length of the insulating portion 26 in the relative movement direction R. The length of the protrusion 24 in the relative movement direction R is such that when the flexible electrode 10 located on the opposing surface 21 of the electrode portion 25 adjacent to the electrode portion 25 on which the protrusion 24 is formed deformed in a manner close to the opposing surface 21 by the application of voltage, the length to which the flexible electrode 10 contacts the protrusion 24 (refer to...). Figure 3 ).

[0045] The actuator 1 has an output member 40 that outputs the power of the actuator 1 to the outside of the actuator 1. The output member 40 is a driven member that is displaced as the actuator 1 is operated. The output member 40 is appropriately designed according to the specifications of the object to which the power of the actuator 1 is output.

[0046] The output member 40 is mounted on the flexible electrode 10, which moves on the opposing surface 21 of the base electrode 20. For example, the output member 40 may be composed of a rod-shaped member extending laterally from the flexible electrode 10. In this case, the output member 40 moves with the flexible electrode 10, enabling the object contacting the output member 40 to move. When multiple flexible electrodes 10 are provided, such as... Figure 2 As shown, the output member 40 can be composed of a plate-shaped member 41 extending in the front-back direction and the left-right direction. The plate-shaped member 41 is mounted on the flexible electrode 10. In this case, an object can be mounted on the output member 40, and the output member 40 can be displaced as the flexible electrode 10 moves, enabling the object mounted on the output member 40 to move.

[0047] Actuator 1 is connected to drive circuit 50, which applies voltage between flexible electrode 10 and base electrode 20 to drive actuator 1.

[0048] The drive circuit 50 includes: a power supply 51, which is composed of a DC voltage source, etc.; wiring 52, which connects the various components of the drive circuit 50 to the flexible electrode 10 and the base electrode 20; switches 53a to 57b, which are composed of semiconductor elements, etc.; and a control unit 70, which is composed of integrated circuits, etc.

[0049] The flexible electrode 10 is connected to one of the positive and negative terminals of the power supply 51 via wiring 52, and is also connected to the frame grounding wire (or grounding wire). The plurality of electrode portions 25a-25d constituting the base electrode 20 are each connected to the other of the positive and negative terminals of the power supply 51 via wiring 52, and are also connected to the frame grounding wire. Switch 53a is connected between the flexible electrode 10 and the power supply 51. Switch 53b is connected between the flexible electrode 10 and the frame grounding wire. Switch 54a is connected between electrode portion 25a and the power supply 51. Switch 54b is connected between electrode portion 25a and the frame grounding wire. Switch 55a is connected between electrode portion 25b and the power supply 51. Switch 55b is connected between electrode portion 25b and the frame grounding wire. Switch 56a is connected between electrode portion 25c and the power supply 51. Switch 56b is connected between electrode portion 25c and the frame grounding wire. Switch 57a is connected between electrode portion 25d and the power supply 51. Switch 57b is connected between electrode section 25d and frame grounding wire.

[0050] The control unit 70 is a circuit that controls each component of the drive circuit 50. The control unit 70 switches the application and cessation of voltage between the flexible electrode 10 and each of the plurality of electrode portions 25a-25d constituting the base electrode 20 by controlling the on / off state of switches 53a-57b. Furthermore, the control unit 70 can control the magnitude of the applied voltage by controlling the output voltage of the power supply 51. Thus, the control unit 70 can control the magnitude of the Coulomb force acting on the flexible electrode 10, thereby controlling the amount of deformation of the flexible electrode 10. Moreover, the control unit 70 can control the deformation speed of the flexible electrode 10 by controlling the speed at which the voltage is applied and stopped. Furthermore, the control unit 70 can control the deformation timing of the flexible electrode 10 by controlling the timing of the voltage application and cessation.

[0051] Figure 3 This is to explain the... Figure 1 The diagram (1) shows the process of driving actuator 1. Figure 4 This is to explain the... Figure 1 The diagram (Figure 2) shows the process of driving actuator 1. Figure 5 This is to explain the... Figure 1 The diagram (3) shows the process of driving actuator 1. Additionally, in Figures 3-5 In the diagram, the double-dotted line represents the prototype of the flexible electrode 10 at its initial position before the voltage is applied.

[0052] like Figure 3As shown, the control unit 70 of the drive circuit 50 controls switches 53a and 54a to be in the ON state and switches 53b, 54b, and 55a to 57b to be in the OFF state. Therefore, a voltage is applied between the flexible electrode 10 and the electrode portion 25a corresponding to the position of the flexible electrode 10. In this case, the flexible electrode 10, connected to the positive terminal of the power supply 51, carries a positive charge, and the electrode portion 25a, connected to the negative terminal of the power supply 51, carries a negative charge. The insulating layer 22 covering the opposing surface 21 of the electrode portion 25a is dielectrically polarized. The insulating layer 22 of the electrode portion 25a carries a positive charge near the interface with the electrode portion 25a and a negative charge near the surface on the opposite side of the interface (space 23 side). A Coulomb force is generated between the insulating layer 22 of the electrode portion 25a and the flexible electrode 10. Through this Coulomb force, the flexible electrode 10 is attracted to the insulating layer 22 of the electrode portion 25a. That is, through this Coulomb force, the flexible electrode 10 located on the opposing surface 21 of the electrode portion 25a deforms in a manner close to the opposing surface 21 of the electrode portion 25a. Through this deformation of the flexible electrode 10, the flexible electrode 10 comes into contact with the protrusion 24 formed on the rear edge of the electrode portion 25b adjacent to the electrode portion 25a in the forward direction.

[0053] exist Figure 3 After the situation shown, as Figure 4 As shown, the control unit 70 of the drive circuit 50 controls switches 53b and 54b to be in the ON state, and controls switches 53a, 54a, and 55a to 57b to be in the OFF state. Thus, the voltage applied between the flexible electrode 10 and the electrode portion 25a stops. In this case, the charge accumulated in the electrode portion 25a of the flexible electrode 10 and the base electrode 20 is released to the frame grounding wire. The flexible electrode 10 deforms and returns to its original shape by separating from the opposing surface 21 of the electrode portion 25a through the restoring force of the flexible electrode 10. At this time, the flexible electrode 10 returns to a state in contact with the protrusion 24 of the electrode portion 25b.

[0054] exist Figure 4 After the situation shown, as Figure 5As shown, the control unit 70 of the drive circuit 50 controls switches 53a, 54b, and 55a to be in the ON state, and controls switches 53b, 54a, 55b, and 56a-57b to be in the OFF state. Therefore, a voltage is applied between the flexible electrode 10 and the electrode portion 25b having a protrusion 24 that contacts the flexible electrode 10. In this case, a Coulomb force is generated between the insulating layer 22 of the electrode portion 25b and the flexible electrode 10. Due to this Coulomb force, the flexible electrode 10, which contacts the protrusion 24 of the electrode portion 25b, deforms towards the opposing surface 21 of the electrode portion 25b. Through this deformation, the flexible electrode 10 rotates while passing over the protrusion 24 of the electrode portion 25b and moving onto the opposing surface 21 of the electrode portion 25b. The output member 40 mounted on the flexible electrode 10 is displaced in a manner that moves along with the movement of the flexible electrode 10. Furthermore, in Figure 4 When a voltage is applied between the flexible electrode 10 and the electrode portion 25b as shown, the switch 54b... Figure 5 It can be controlled to be in the on state, but it can also be controlled to be in the off state.

[0055] As described above, the control unit 70 of the drive circuit 50 sequentially and repeatedly applies and stops voltage to the plurality of electrode sections 25 in the relative movement direction R. The flexible electrode 10 is able to move in the relative movement direction R while rotating on the opposing surface 21 of the base electrode 20.

[0056] Therefore, the actuator 1 of Embodiment 1 can realize the action of moving the flexible electrode 10 relative to the base electrode 20. Moreover, the output member 40 can move along various paths as the flexible electrode 10 moves, and the object can be moved along various paths. Therefore, the actuator 1 of Embodiment 1 can realize the diversification of the ways in which it is used as an actuator.

[0057] In addition, Figure 1 In the actuator 1 shown, the base electrode 20 does not move, while the flexible electrode 10 moves on the opposing surface 21. However, the actuator 1 of Embodiment 1 can also be configured such that the flexible electrode 10 is supported in a rotatable manner without moving on the opposing surface 21, while the base electrode 20 moves. In this case, the output member 40 can also be mounted on the base electrode 20.

[0058] Implementation Method 2

[0059] use Figures 6-9 The actuator 1 of Embodiment 2 will be described. In the actuator 1 of Embodiment 2, the description of the same structure and operation as in the previous embodiment will be omitted.

[0060] Figure 6 This is a diagram illustrating actuator 1 in embodiment 2.

[0061] In the actuator 1 of Embodiment 2, the base electrode 20 is constructed by replacing the multiple electrode portions 25a to 25d with multiple electrode portions 28a to 28h. The length L1 of each of the multiple electrode portions 28a to 28h in the relative movement direction R is shorter than the length L2 of the flexible electrode 10 in the relative movement direction R (L1 < L2). No protrusion 24 is formed in each of the multiple electrode portions 28a to 28h. The opposing surfaces 21 of each of the multiple electrode portions 28a to 28h are arranged on the same plane and are flat. Furthermore, in this embodiment, each of the multiple electrode portions 28a to 28h is also collectively referred to as "electrode portion 28".

[0062] In embodiment 2, the drive circuit 50 includes switches 58a-65b corresponding to the plurality of electrode sections 28a-28h, replacing switches 54a-57b. Switch 58a is connected between electrode section 28a and power supply 51. Switch 58b is connected between electrode section 28a and frame grounding wire. Switch 59a is connected between electrode section 28b and power supply 51. Switch 59b is connected between electrode section 28b and frame grounding wire. Switch 60a is connected between electrode section 28c and power supply 51. Switch 60b is connected between electrode section 28c and frame grounding wire. Switch 61a is connected between electrode section 28d and power supply 51. Switch 61b is connected between electrode section 28d and frame grounding wire. Switch 62a is connected between electrode section 28e and power supply 51. Switch 62b is connected between electrode section 28e and frame grounding wire. Switch 63a is connected between electrode section 28f and power supply 51. Switch 63b is connected between electrode 28f and the frame grounding wire. Switch 64a is connected between electrode 28g and power supply 51. Switch 64b is connected between electrode 28g and the frame grounding wire. Switch 65a is connected between electrode 28h and power supply 51. Switch 65b is connected between electrode 28h and the frame grounding wire.

[0063] Figure 7 This is to explain the... Figure 6 The diagram (1) shows the process of driving actuator 1. Figure 8 This is to explain the... Figure 6 The diagram (Figure 2) shows the process of driving actuator 1. Figure 9 This is to explain the... Figure 6 The diagram (3) shows the process of driving actuator 1. Additionally, in Figures 7-9 In the diagram, the double-dotted line represents the prototype of the flexible electrode 10 at its initial position before the voltage is applied.

[0064] like Figure 7As shown, the control unit 70 of the drive circuit 50 controls switches 53a, 58a, 59a, 60a, 61a, and 62a to be in the ON state, and controls switches 53b, 58b, 59b, 60b, 61b, and 62b to be in the OFF state. Additionally, the control unit 70 controls switches 63a to 65b to be in the OFF state. Therefore, a voltage is applied between the flexible electrode 10 and the electrode portions 28a to 28e corresponding to the position of the flexible electrode 10. In this case, the flexible electrode 10 deforms in a manner close to the opposing surface 21 of the electrode portions 28a to 28e.

[0065] The control unit 70 of the drive circuit 50 can select in the following manner Figure 7 The electrode portion 28, which corresponds to the position of the flexible electrode 10, is where a voltage should be applied in the case shown.

[0066] That is, the control unit 70 selects the electrode portion 28c that is closest to the position where the flexible electrode 10 contacts the opposing surface 21, based on this position. Furthermore, the control unit 70 selects a predetermined number N of electrode portions 28d, 28e and 28a, 28b that are arranged adjacent to the reference electrode portion 28c in both the forward and backward directions, as... Figure 7 The electrode portion 28 to which voltage should be applied is shown. This predetermined quantity N is determined in advance based on the length L1 of the electrode portion 28 in the relative movement direction R, the length L2 of the flexible electrode 10 in the relative movement direction R, and the length L3 of the insulating portion 26 in the relative movement direction R. For example, the control unit 70 can determine the predetermined quantity N such that the length {N×L1+(N-1)×L3} from the selected electrode portion 28a to the electrode portion 28e in the relative movement direction R is at least 0.5 times and less than 1 times the length L2 of the flexible electrode 10 in the relative movement direction R.

[0067] exist Figure 7 After the situation shown, as Figure 8 As shown, the control unit 70 of the drive circuit 50 controls switches 53b, 58b, 59b, 60a, 61a, and 62a to the ON state, and controls switches 53a, 58a, 59a, 60b, 61b, and 62b to the OFF state. Additionally, the control unit 70 controls switches 63a to 65b to the OFF state. In this case, Figure 7In the illustrated case, electrode portions 28a and 28b corresponding to the rear end (the end opposite to the relative movement direction R) of the flexible electrode 10, and the flexible electrode 10 are connected to the frame grounding wire, and the voltage application is stopped. The charge accumulated in electrode portions 28a and 28b and the flexible electrode 10 is released to the frame grounding wire. As a result, the rear end of the flexible electrode 10 deforms by the restoring force of the flexible electrode 10 in a manner that separates from the opposing surface 21 of electrode portions 28a and 28b. On the other hand, electrode portions 28c and 28e corresponding to the front end (the end relative to the movement direction R) and the middle portion (the portion between the front end and the rear end) of the flexible electrode 10 remain connected to the power supply 51. The charge accumulated in electrode portions 28c and 28e is maintained. As a result, the front end and the middle portion of the flexible electrode 10 remain deformed in a manner close to the opposing surface 21 of electrode portions 28c and 28e. That is, only the rear end of the flexible electrode 10 is restored. A torque is applied to the flexible electrode 10, causing it to rotate in the forward direction. As a result, the flexible electrode 10 passes over the foremost electrode portion 28e in the forward direction of the voltage-applied electrode portions 28c to 28e, and comes into contact with the opposing surface 21 of the adjacent electrode portion 28f in the forward direction relative to that electrode portion 28e.

[0068] exist Figure 8 After the situation shown, as Figure 9 As shown, the control unit 70 of the drive circuit 50 controls switches 53a, 58b, 59b, 60a, 61a, 62a, 63a, and 64a to be in the ON state, and controls switches 53b, 58a, 59a, 60b, 61b, 62b, 63b, and 64b to be in the OFF state. Additionally, the control unit 70 controls switches 65a and 65b to be in the OFF state. Therefore, a voltage is applied between the flexible electrode 10 and the electrode portions 28c to 28g. In this case, with... Figure 7 Compared to the situation shown, a new Coulomb force is generated between the insulating layer 22 of the newly voltage-applied electrode portions 28f and 28g and the flexible electrode 10. This Coulomb force causes the front end of the flexible electrode 10, which contacts the opposing surface 21 of the electrode portion 28f, to deform close to the opposing surface 21 of the electrode portions 28f and 28g. A torque acts on the flexible electrode 10, causing it to rotate forward. As a result, the flexible electrode 10 can rotate while passing over the electrode portion 28f and moving to a point where it contacts the opposing surface 21 of the electrode portion 28g.

[0069] In addition, the control unit 70 of the drive circuit 50 can communicate with Figure 7 The situation shown is similarly selected in Figure 9 In the case shown, a new voltage should be applied to electrode section 28. That is, the control section 70 of the drive circuit 50 will... Figure 8 In the case shown, the electrode portions 28 that are the same number as the rear end of the flexible electrode 10 and are located at the front end in the relative movement direction R, where the voltage application has stopped, are selected as the electrode portions 28 to which a new voltage should be applied.

[0070] As described above, the control unit 70 of the drive circuit 50 applies voltage between the flexible electrode 10 and the electrode portions 28a to 28e corresponding to the position of the flexible electrode 10. Then, the control unit 70 stops applying voltage to the electrode portions 28a and 28b corresponding to the rear end of the flexible electrode 10. Next, the control unit 70 applies voltage again to the electrode portions 28f and 28g disposed at the front end of the flexible electrode 10 in the relative movement direction R. In this way, the control unit 70 of the drive circuit 50 repeatedly applies and stops voltage to the plurality of electrode portions 28 in the relative movement direction R. The flexible electrode 10 can move in the relative movement direction R while rotating on the opposing surface 21 of the base electrode 20.

[0071] In Embodiment 2, the actuator 1 has a shorter electrode portion 28 length L1 than the flexible electrode 10 length L2. Even without forming a protrusion 24 on the electrode portion 28, it is possible to move the flexible electrode 10 relative to the base electrode 20. Compared to Embodiment 1, the base electrode 20 of Embodiment 2 has a simpler shape and greater design freedom. Furthermore, the drive circuit 50 of Embodiment 2 can precisely control the voltage applied between the flexible electrode 10 and the base electrode 20, thus enabling precise control of the movement of the flexible electrode 10. This increases the freedom of movement of the flexible electrode 10. Therefore, the actuator 1 of Embodiment 2 can easily achieve further diversification of its applications.

[0072] Implementation Method 3

[0073] use Figure 10 The actuator 1 of Embodiment 3 will be described. In the actuator 1 of Embodiment 3, the description of the same structure and operation as in the previous embodiments will be omitted.

[0074] Figure 10 This is a diagram illustrating the actuator 1 of embodiment 3. Figure 10 This represents the cross-section of actuator 1 along the relative movement direction R. Figure 10 The diagrams of the multiple electrode portions 28 and insulating portions 26 constituting the base electrode 20, the insulating layer 22, and the driving circuit 50 are omitted. Figure 11 These illustrations are also omitted from the text.

[0075] In the actuator 1 of Embodiment 3, the base electrode 20 is formed in the shape of a ring or cylinder. The base electrode 20 is formed by connecting the electrode portions 28 disposed at both ends of the base electrode 20 of Embodiment 2 via an insulating portion 26. The base electrode 20 has an inner peripheral surface 31 and an outer peripheral surface 32. The opposing surface 21 of the base electrode 20 is the inner peripheral surface 31. The base electrode 20 is placed on the surface P outside the actuator 1. The outer peripheral surface 32 of the base electrode 20 is in contact with the surface P. The flexible electrode 10 of Embodiment 3 is disposed inside the base electrode 20. The flexible electrode 10 is disposed on the inner peripheral surface 31 of the base electrode 20. The relative movement direction R of the flexible electrode 10 is along the circumferential direction of the inner peripheral surface 31.

[0076] In Embodiment 3, the drive circuit 50, similar to that in Embodiment 2, sequentially and repeatedly applies and stops voltage to the plurality of electrode portions 28 in the relative movement direction R. The flexible electrode 10 rotates on its own axis on the inner peripheral surface 31 of the base electrode 20 while moving relative to it on the inner peripheral surface 31. The center of gravity of the base electrode 20, which contains the flexible electrode 10, moves along with the movement of the flexible electrode 10. Figure 10 As shown by the dashed arrow, the base electrode 20 rotates on surface P while moving on surface P.

[0077] The output member 40 in Embodiment 3 can also be mounted on the base electrode 20 that moves on the surface P, similar to Embodiment 1, and is composed of a rod-shaped member extending from the base electrode 20 in the left-right direction. Alternatively, when multiple sets of base electrodes 20 and flexible electrodes 10 are provided, the output member 40 can also be composed of a plate-shaped member 41 placed on the base electrode 20, similar to Embodiment 1.

[0078] Like in Embodiments 1 and 2, the actuator 1 of Embodiment 3 enables the flexible electrode 10 to move relative to the base electrode 20. However, in Embodiment 3, the flexible electrode 10 rotates on the inner peripheral surface 31 of the base electrode 20 while moving relative to it. The base electrode 20 of Embodiment 3 can move along with the flexible electrode 10. The actuator 1 of Embodiment 3 can be used as an actuator in various ways different from those in Embodiments 1 and 2. Therefore, the actuator 1 of Embodiment 3 allows for diverse applications.

[0079] Implementation Method 4

[0080] use Figure 11 The actuator 1 of Embodiment 4 will be described. In the actuator 1 of Embodiment 4, the description of the same structure and operation as in the previous embodiments will be omitted.

[0081] Figure 11 This is a diagram illustrating actuator 1 in embodiment 4.

[0082] In the actuator 1 of embodiment 4, unlike embodiment 3, the output member 40 that performs work externally as the flexible electrode 10 moves is composed of a rotating body 42 disposed inside the base electrode 20. The rotating body 42 is a three-dimensional object formed by rotating a plane such as a rectangular plane coplanar with an axis in the direction surrounding that axis. The rotating body 42 is formed in the shape of a ring, cylinder, or other similar structure. Figure 11 In this design, the output member 40, which serves as the rotating body 42, is formed in an annular shape and has an inner peripheral surface 43 and an outer peripheral surface 44. The outer peripheral surface 44 of the output member 40 faces the inner peripheral surface 31 of the base electrode 20. The rotation center axis of the output member 40 may coincide with the central axis C of the base electrode 20. A drive shaft or the like, extending along the rotation center axis of the output member 40, may also be integrally mounted on the inner peripheral surface 43 of the output member 40.

[0083] In Embodiment 4, multiple flexible electrodes 10 are provided. The multiple flexible electrodes 10 are respectively arranged between the inner peripheral surface 31 of the base electrode 20 and the outer peripheral surface 44 of the output member 40. The multiple flexible electrodes 10 support the output member 40 in a manner that allows it to rotate in the circumferential direction around the rotational center axis of the output member 40. In Embodiment 4, the base electrode 20 is fixed so that it does not rotate or move.

[0084] In Embodiment 4, the drive circuit 50, similar to that in Embodiment 3, sequentially and repeatedly applies and stops voltage to the plurality of electrode portions 28 in the relative movement direction R. Each of the plurality of flexible electrodes 10 rotates on one side of the inner peripheral surface 31 of the base electrode 20 while moving relative to it on the inner peripheral surface 31. The output member 40, which is in contact with each of the plurality of flexible electrodes 10, rotates as the flexible electrodes 10 move.

[0085] The actuator 1 in Embodiment 4, like those in Embodiments 1-3, enables the flexible electrode 10 to move relative to the base electrode 20. However, like in Embodiment 3, the flexible electrode 10 in Embodiment 4 rotates on its own axis on the inner peripheral surface 31 of the base electrode 20 while moving relative to it. The output member 40 in Embodiment 4 can rotate as the flexible electrode 10 moves. The actuator 1 in Embodiment 4 can be used as an actuator in various ways different from those in Embodiments 1-3. Therefore, the actuator 1 in Embodiment 4 allows for diverse applications.

[0086] In addition, Figure 11 In the actuator 1 shown, the rotating body 42 constitutes the output member 40. Furthermore, Figure 11In the actuator 1 shown, the base electrode 20 is fixed, and the rotating body 42 rotates. However, the actuator 1 of Embodiment 4 may also have an output member 40 that does not consist of the rotating body 42. Furthermore, the actuator 1 of Embodiment 4 may also be configured such that the rotating body 42 is fixed, and the base electrode 20 rotates. That is, the actuator 1 of Embodiment 4 can rotate either the rotating body 42 or the base electrode 20. When configured such that the base electrode 20 rotates, the output member 40 can be configured in the same way as in Embodiment 3 and mounted on the base electrode 20.

[0087] The embodiments of the present invention have been described in detail above. However, the present invention is not limited to the above embodiments, and various design changes can be made without departing from the spirit of the present invention as described in the claims. The present invention can add the structure of one embodiment to the structure of other embodiments, or replace the structure of one embodiment with that of other embodiments, or delete a part of the structure of one embodiment.

Claims

1. An actuator, comprising: Flexible electrodes, which are flexible; and The substrate electrode, whose opposing surface to the flexible electrode is covered by an insulating layer, The actuator is configured to deform the flexible electrode in a manner close to the opposing surface by applying a voltage between the flexible electrode and the base electrode. The flexible electrode is a rotating body disposed on the opposing surface. The base electrode is divided into multiple mutually insulated electrode portions. The plurality of electrode portions are arranged along a predetermined direction, and The flexible electrode is configured such that, when the voltage is sequentially applied to the plurality of electrode portions in the predetermined direction, it rotates on the opposing surface while moving relative to the base electrode in the predetermined direction.

2. The actuator according to claim 1, wherein, The base electrode is formed in a ring shape and has an inner circumferential surface. The flexible electrode is disposed on the inner circumferential surface. The opposing surface is the inner circumferential surface, and The specified direction is along the circumference of the inner circumferential surface.

3. The actuator according to claim 2 further includes an output component that outputs work to the outside as the flexible electrode moves, wherein, The output component is disposed inside the base electrode and has a rotating body with an outer peripheral surface facing the inner peripheral surface of the base electrode. The flexible electrode is disposed between the inner and outer peripheral surfaces in a state of contact with the inner peripheral surface of the base electrode and the outer peripheral surface of the output member.

4. The actuator according to any one of claims 1 to 3, wherein, The length of each electrode portion in the specified direction is shorter than the length of the flexible electrode in the specified direction.

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