Mask plate and display panel

Abstract

The application provides a mask plate and a display panel, and relates to the technical field of display, and is used for solving the technical problem that the display panel is prone to poor display effect. The mask plate comprises a mask plate body and a supporting column. The supporting column is arranged on a first surface of the mask plate body, and is configured to be accommodated in an accommodation groove of a to-be-masked layer when the to-be-masked layer is masked. The first surface is a surface facing the to-be-masked layer when the to-be-masked layer is masked. The mask plate provided by the application is used in the process of preparing the display panel, for example, the pixel definition layer of the display panel is masked when the light-emitting layer of the display panel is prepared.

Description

Technical Field

[0001] This application relates to the field of display technology, and more particularly to a mask and a display panel. Background Technology

[0002] In the field of display technology, organic light-emitting diode (OLED) display panels, also known as organic light-emitting display panels, have advantages such as self-illumination, wide viewing angle, high contrast, low power consumption, and high response speed. They are widely used in display devices such as televisions, mobile phones, and tablets.

[0003] In the manufacturing process of organic light-emitting display panels, the emitting layer (EML) needs to be deposited onto the array substrate using a fine metal mask (FMM). In related technologies, spacers (SPCs) are typically fabricated on the array substrate to support the mask. However, this method often results in poor display performance in organic light-emitting display panels. Summary of the Invention

[0004] In view of the above problems, this application provides a mask and a display panel to overcome the problem of poor display effect in related technologies.

[0005] To achieve the above objectives, the embodiments of this application provide the following technical solutions:

[0006] A first aspect of this application provides a mask plate, which includes: a mask plate body and a support column, the support column being disposed on a first surface of the mask plate body, the support column being configured to be received in a receiving groove of the masking layer when masking the masking layer; the first surface is the surface facing the masking layer when masking.

[0007] The mask provided in this application embodiment allows the mask's support pillars to be inserted into receiving grooves formed in the pixel-defining layer when the mask is bonded to the layer to be masked, such as the pixel-defining layer of a display panel. This reduces relative sliding between the mask and the pixel-defining layer, minimizes scratches and wear caused by the mask on the pixel-defining layer, and thus reduces or even eliminates the generation of debris. This also reduces or eliminates debris falling into the light-emitting area of ​​the display panel, ensuring the display effect of the display panel. Furthermore, it also reduces or even eliminates the problem of debris causing cracks in the encapsulation layer, leading to encapsulation failure.

[0008] In one possible implementation, at least a portion of the circumferential side of the support pillar has a gap with the inner side of the receiving groove. This way, when the mask layer is applied, even if the inner side or bottom of the receiving groove is scratched by the support pillar of the mask plate, the resulting debris will be collected within the receiving groove, thereby reducing or even preventing debris from falling into the light-emitting area of ​​the display panel and ensuring the display effect of the display panel. Furthermore, since the generated debris is also collected within the receiving groove, the encapsulation layer can also better cover the debris that falls into the receiving groove, thereby reducing or even preventing the problem of debris causing cracks in the encapsulation layer and leading to encapsulation failure.

[0009] In one possible implementation, all circumferential sides of the support column are spaced apart from the inner side of the receiving groove along its circumference. This creates an annular space between the support column and the receiving groove during masking, allowing debris generated along the circumference of the support column to fall into the receiving groove, thus improving debris containment.

[0010] In one possible implementation, the gap is greater than or equal to 5 micrometers. This allows the annular space defined between the circumferential side of the support post and the inner side of the receiving groove to accommodate more or larger debris when masking the layer to be masked, further improving the debris containment capacity.

[0011] In one possible implementation, the mask body has multiple first openings, which are configured to face a second opening of the layer to be masked when the layer is masked. The support post is disposed at the edge of the first opening. This simplifies the mask fabrication process and improves the mask fabrication efficiency. Specifically, when the layer to be masked is a pixel defining layer of a display panel, the second opening is a pixel opening.

[0012] In one possible implementation, the first opening has a polygonal cross-section, with the plane parallel to the mask plate body as the cross-section, and the support column is positioned at the apex of the polygon. This prevents the support column from interfering with the function of the first opening.

[0013] In one possible implementation, the cross-sectional area of ​​the support pillar gradually decreases along the direction away from the mask plate body. This reduces the area of ​​the layer to be masked (e.g., the pixel definition layer) that is scratched during masking, and also makes it easier for debris from scratches to fall into the receiving groove.

[0014] In one possible implementation, there are multiple support pillars, all of which are located on the first surface of the mask plate body. This improves the reliability of the support of the layer to be masked to the mask plate when masking the layer to be masked.

[0015] In one possible implementation, the multiple support pillars are spaced apart, with equal spacing between any two adjacent support pillars. This ensures uniform stress on the mask plate during masking of the layer to be masked, improving masking accuracy.

[0016] In one possible implementation, the number of support pillars is less than the number of the first openings. Thus, when the mask layer is applied, the sum of the contact areas between each support pillar and the pixel defining layer decreases as the number of support pillars in contact with the pixel defining layer decreases, thereby reducing the area of ​​the scratched region of the pixel defining layer and consequently reducing or even avoiding debris generated by scratches and wear.

[0017] In one possible implementation, the height of the support post relative to the mask body is greater than the depth of the receiving groove. This ensures that the mask body is separated from the layer to be masked, such as the pixel defining layer, during masking, reducing the contact area between the mask and the pixel defining layer.

[0018] In one possible implementation, the mask further includes a protective layer covering the support post and a region of the mask body near the support post. The protective layer covers the portion of the support post away from the mask body, and a smooth curved surface transitions between this protective layer and the portion covering the circumferential side of the support post. Similarly, the smooth curved surface transitions between the portion of the protective layer covering the region of the mask body near the support post and the portion covering the circumferential side of the support post. This reduces the risk of the mask scratching the layer being masked when using the mask, thereby reducing or even eliminating the generation of debris.

[0019] In one possible implementation, the protective layer comprises an inorganic film layer. This gives the mask good high-temperature resistance, chemical stability, and mechanical strength.

[0020] A second aspect of this application provides a display panel, including: a functional layer, the functional layer having a receiving groove, the receiving groove being configured to receive a support column of the mask when the functional layer is masked by any of the preceding claims.

[0021] In the manufacturing process of the display panel provided in this application embodiment, a mask is used to mask the layer to be masked, such as the pixel defining layer, of the display panel. The support pillars of the mask are inserted into the receiving groove of the pixel defining layer. This reduces the relative sliding between the mask and the pixel defining layer, reduces scratches and wear caused by the mask on the pixel defining layer, and thus reduces or even avoids the generation of debris. This reduces or even avoids the problem of debris causing cracks in the encapsulation layer, leading to encapsulation failure and affecting the display effect. Moreover, compared with the supporting pads provided in the pixel defining layer in related technologies, the receiving groove in this application embodiment is hidden in the pixel defining layer, making the morphology of the area where the receiving groove is located on the pixel defining layer relatively simple and flat, thereby improving the coverage effect of the encapsulation layer and reducing or even avoiding the problem of encapsulation failure.

[0022] In one possible implementation, a gap exists between the inner surface of the receiving groove and the circumferential side of the support pillar housed within the receiving groove. This way, when using a mask to mask the functional layer, even if the inner surface or bottom of the receiving groove is scratched by the support pillar of the mask, the resulting debris will be collected within the receiving groove, thereby reducing or even preventing debris from falling into the light-emitting area of ​​the display panel and affecting the display effect. Furthermore, even if larger debris is generated and falls into the receiving groove, the encapsulation layer can effectively cover the debris, thus reducing or even preventing the encapsulation layer from cracking due to debris, leading to encapsulation failure.

[0023] In one possible implementation, the number of receiving slots is multiple.

[0024] In one possible implementation, the plurality of accommodating slots are spaced apart, with the spacing between any two adjacent accommodating slots being equal.

[0025] In one possible implementation, the inner side of the receiving groove gradually moves away from its center along the direction from the bottom to the opening. This causes the opening of the receiving groove to gradually increase, and the inner side of the receiving groove is inclined, allowing the support pillars of the mask to be smoothly inserted into the receiving groove when the mask is used to mask the functional layer, reducing or even avoiding debris.

[0026] In one possible implementation, the accommodating groove has a trapezoidal cross-sectional shape, with the plane perpendicular to the functional layer as the cross-section.

[0027] In one possible implementation, the functional layer includes a pixel defining layer; the pixel defining layer has a pixel opening, and a light-emitting layer is disposed within the pixel opening; the receiving slot is spaced apart from the pixel opening. This reduces the difficulty of setting support pillars on the photomask.

[0028] In one possible implementation, the number of accommodating slots is less than the number of pixel openings. Thus, when masking the layer to be masked, the sum of the contact areas between each accommodating slot and the support pillar decreases as the number of accommodating slots and support pillars decreases, thereby reducing the area of ​​the pixel defining layer 13 that is scratched, and further reducing or even avoiding the generation of debris. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of an array substrate with a pixel limiting layer in related technologies;

[0031] Figure 2 A top view of a mask provided in an embodiment of this application;

[0032] Figure 3 This is a partial cross-sectional view of an array substrate and pixel defining layer provided in an embodiment of this application;

[0033] Figure 4 A partial cross-sectional view of a mask provided in an embodiment of this application;

[0034] Figure 5 This is a schematic diagram illustrating the alignment process between a mask and a pixel defining layer disposed on an array substrate, according to an embodiment of this application.

[0035] Figure 6 A top view of a mask provided in another embodiment of this application;

[0036] Figure 7 A partial cross-sectional view of a mask provided in another embodiment of this application;

[0037] Figure 8 A schematic diagram illustrating the alignment and engagement of a mask and a pixel defining layer disposed on the surface of an array substrate, provided in another embodiment of this application;

[0038] Figure 9 This is a top view of a pixel-defining layer provided in an embodiment of this application;

[0039] Figure 10 This is a top view of the mask and pixel definition layer aligned according to an embodiment of this application.

[0040] Explanation of reference numerals in the attached figures:

[0041] 1. Display panel; 11. Array substrate;

[0042] 12. Anode layer; 13. Pixel limiting layer;

[0043] 131, Pixel aperture; 131a, First sub-pixel aperture;

[0044] 131b, Second sub-pixel opening; 131c, Third sub-pixel opening;

[0045] 132. Receiving groove; 2. Mask plate;

[0046] 21. Mask body; 21a - First surface;

[0047] 21b - Second surface; 211 - First opening;

[0048] 211a, First virtual contour; 211b, Second virtual contour;

[0049] 211c, Third virtual contour; 22, Support column;

[0050] 23. Protective layer; 3. Debris. Detailed Implementation

[0051] As described in the background section, display panels in related technologies are prone to poor display quality. The inventors have discovered that the reason for this problem is as follows (see reference...). Figure 1 When the mask 2 is aligned with the array substrate 11, the mask 2 will rub against the support pad 15 on the array substrate 11, causing the support pad 15 to be scratched and generate debris. The generated debris is easy to fall into the light-emitting area and affect the display effect. In addition, if the generated debris is large in size, it may also cause cracks in the encapsulation layer, leading to encapsulation failure, which will also affect the display effect.

[0052] To address the aforementioned technical problems, this application provides a mask and a display panel. By providing a receiving groove in the layer to be masked and a support column in the mask, when the layer to be masked is masked by the mask, the support column of the mask is accommodated in the receiving groove of the layer to be masked. This reduces the relative sliding between the mask and the layer to be masked, reduces or even avoids the generation of debris, and ensures the display effect of the display panel when the layer to be masked is a functional layer of the display panel. At the same time, it can also reduce or even avoid the problem of encapsulation failure.

[0053] To make the above-mentioned objectives, features, and advantages of the embodiments of this application more apparent and understandable, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0054] Please refer to Figure 2 This embodiment provides a mask plate 2 for masking the layer to be masked during the fabrication of a display panel. Please refer to... Figure 3 The display panel 1 may include an array substrate 11, an anode layer 12, and a functional layer stacked sequentially. The functional layer may include a pixel defining layer 13 and a light-emitting layer. The pixel defining layer 13 is disposed on the surface of the array substrate 11 and has multiple pixel openings 131. At least a portion of the anode layer 12 is exposed in each pixel opening 131. A light-emitting layer is disposed in each pixel opening 131, and a cathode layer may be disposed on the surface of the light-emitting layer facing away from the anode layer 12. The masking layer may include one or more of the aforementioned functional layers. For ease of description, the following explanation will use the pixel defining layer 13 as an example.

[0055] Please refer to Figures 2 to 5 The mask 2 provided in this embodiment includes a mask body 21 and support posts 22. The mask body 21 is provided with a plurality of first openings 211, all of which are through holes penetrating the mask body 21. The plurality of first openings 211 are typically arranged in an array. When the plurality of first openings 211 are configured to mask the pixel limiting layer 13, they are aligned one-to-one with a plurality of pixel openings 131 in the pixel limiting layer 13. The size of the first opening 211 may be slightly larger than the size of the corresponding pixel opening 131.

[0056] The mask body 21 includes a first surface 21a and a second surface 21b opposite to each other. The first surface 21a is the surface facing the pixel defining layer 13 when masking the pixel defining layer 13, and the second surface 21b is the surface facing away from the pixel defining layer 13 when masking the pixel defining layer 13. A support post 22 is provided on the first surface 21a of the mask body 21. The support post 22 extends in a direction away from the first surface 21a of the mask body 21. In some embodiments, the support post 22 is perpendicular to the first surface 21a of the mask body 21.

[0057] Taking a plane parallel to the first surface 21a of the mask body 21 (i.e., perpendicular to the Z direction) as a cross-section, the shape of the cross-section of the support post 22 can be polygonal, such as rectangular, or circular, for ease of fabrication. The support post 22 is configured to be inserted into the receiving groove 132 of the pixel defining layer 13 when masking the pixel defining layer 13; that is, when masking the pixel defining layer 13 using the mask 2, the support post 22 is located in the receiving groove 132 of the pixel defining layer 13. The support post 22 has a circumferential side surface and an end face connected to the circumferential side surface. This end face of the support post 22 is typically parallel to and opposite to the first surface 21a of the mask body 21. The end face of the support post 22 is used to contact the bottom surface of the receiving groove 132 when masking the pixel defining layer 13.

[0058] During the fabrication of the mask 2, a support area and a half-etching area can be reserved on the mask blank (the incoming material plate used to form the mask 2). The portion of the mask blank located in the support area is masked, and the portion of the mask blank located in the half-etching area is half-etched using an etching solution. During the half-etching process, the etching solution will not etch the masked support area. After the half-etching is completed, the thickness of the portion of the mask blank located in the half-etching area decreases, while the thickness of the portion located in the support area remains unchanged. The portion of the support area higher than the half-etching area forms a support pillar 22, and the remaining portion forms the mask body 21.

[0059] When using the mask plate 2 provided in this embodiment to mask the pixel defining layer 13, the mask plate 2 and the pixel defining layer 13 are aligned along the Z direction, such that the first opening 211 is opposite to the pixel opening 131, and the support post 22 is inserted into the receiving groove 132. Then, the coating material is processed so that the coating material passes through the first opening 211 and is deposited on the surface of the anode layer 12 exposed in the pixel opening 131 to obtain the light-emitting layer.

[0060] The mask 2 provided in this embodiment has its support posts 22 inserted into the receiving grooves 132 of the pixel limiting layer 13 when the mask 2 is aligned with the pixel limiting layer 13. This not only allows the pixel limiting layer 13 to support the mask 2, but also reduces relative sliding between the mask 2 and the pixel limiting layer 13, reducing scratches and wear on the pixel limiting layer 13 caused by the mask 2. This reduces or even eliminates the generation of debris, minimizing or preventing debris from falling into the light-emitting area of ​​the display panel and ensuring the display effect. Furthermore, it also reduces or eliminates the problem of debris causing cracks in the encapsulation layer of the display panel, leading to encapsulation failure.

[0061] Please continue to refer to Figure 5In some embodiments, at least a portion of the circumferential side of the support post 22 has a gap b between it and the inner side of the receiving groove 132 to accommodate debris. The gap b between the circumferential side of the support post 22 and the corresponding inner side of the receiving groove 132 can be determined based on machining accuracy or based on the size of historical debris.

[0062] In this way, even if the inner side or bottom surface of the receiving groove 132 is scratched by the support post 22 of the mask plate 2 and debris is generated, the debris can be contained by the gap between the circumferential side of the support post 22 and the inner side of the receiving groove 132, thereby reducing or even preventing debris from falling into the light-emitting area of ​​the display panel 1 and ensuring the display effect of the display panel. Moreover, since the generated debris is contained in the receiving groove 132, the encapsulation layer can also better cover the debris in the receiving groove 132, thereby reducing or even preventing the problem of encapsulation failure caused by debris cracking the encapsulation layer.

[0063] In some examples, there is a gap b between all circumferential sides of the support column 22 and the inner side of the receiving groove 132. That is, there is a gap b between the circumferential sides of the support column 22 and the inner side of the receiving groove 132 within a 360° range. In this way, there is an annular gap between the circumferential sides of the support column 22 and the inner side of the receiving groove 132, and debris generated at various points along the circumference of the support column 22 can be collected in the receiving groove 132, thereby improving the debris collection capacity.

[0064] In other examples, a portion of the circumferential side of the support column 22 has a gap b between it and the inner side of the receiving groove 132, and another portion of the circumferential side of the support column 22 contacts the inner side of the receiving groove 132.

[0065] In some examples, the gap b between the circumferential side of the support post 22 and the corresponding inner side of the receiving groove 132 is greater than or equal to 5 micrometers. For example, the gap b between the circumferential side of the support post 22 and the corresponding inner side of the receiving groove 132 can be 5 micrometers, 6 micrometers, 7 micrometers, 8 micrometers, 9 micrometers, or any value between any two of the above. In this way, the gap between the circumferential side of the support post 22 and the inner side of the receiving groove 132 can accommodate more or larger debris, further improving the debris containment capacity.

[0066] Please continue to refer to Figures 2 to 5In some embodiments, the support post 22 is disposed at the edge of the first opening 211; that is, the end of the support post 22 near the mask body 21 can share a portion of the edge with the opening end of the first opening 211. This simplifies the mask 2 fabrication process, improves the mask 2 fabrication efficiency, and enhances the alignment accuracy between the mask 2 and the pixel defining layer 13. Of course, in other embodiments, the support post 22 can also be spaced apart from the first opening 211; that is, the end of the support post 22 near the mask body 21 is spaced apart from the opening end of the first opening 211.

[0067] For example, taking a plane parallel to the mask plate body 21 as a cross-section, the cross-sectional shape of the first opening 211 is polygonal, and the support column 22 is located at the apex of the polygon. Please continue to refer to Figure 2 The apex of the polygon can be rounded. Correspondingly, the left edge of the support column 22 on the first surface 21a of the mask body 21 is arc-shaped, and the edge of this arc coincides with the edge of the rounded corner on the right side of the opening end of the first opening 211 on the first surface 21a. In this way, the support column 22 is prevented from blocking the first opening 211, and it is also easier to manufacture.

[0068] It is understandable that different types of photomasks 2 are used when preparing light-emitting layers that emit different colors. If the types of photomasks 2 are different, the specific shape of the support pillars 22 of the photomasks 2 can vary. This variation includes at least the different orientations of the arcuate edges of the support pillars 22 in their orthographic projection onto the first surface 21a of the photomask body 21.

[0069] The following is combined Figure 2 and Figure 6 Let's illustrate with examples. Figure 2 The mask 2 shown is used to prepare a light-emitting layer that emits light of a first color, such as blue light. Figure 6 The mask 2 shown is used to prepare a light-emitting layer that emits a second color of light, such as green light. Figure 6 The upper edge of the central support column 22 projected onto the first surface 21a of the mask body 21 has an arc-shaped edge, which coincides with the rounded edge of the lower end of the opening 211 on the first surface 21a. Thus, when using... Figure 2 Mask 2 shown Figure 6 When the mask 2 shown applies the pixel definition layer 13 in sequence, Figure 2 The support column 22 shown Figure 6 The support pillars 22 shown can be located sequentially in the same receiving slot 132, thereby reducing the number of receiving slots 132 on the pixel limiting layer 13.

[0070] In some embodiments, the cross-sectional area of ​​the support post 22 gradually decreases along the direction away from the mask body 21. This reduces the contact area between the support post 22 and the receiving groove 132, minimizing scratches on the pixel defining layer 13 while ensuring the strength of the support post 22. For example, the support post 22 may be tapered. Alternatively, the support post 22 may have a stepped structure, with multiple steps of the support post 22 smoothly connected.

[0071] Please continue to refer to Figure 2 , Figure 4 and Figure 5 In some embodiments, there are multiple support pillars 22, all of which are located on the first surface 21a of the mask body 21. Thus, when the mask 2 is used to mask the pixel defining layer 13, the reliability of the pixel defining layer 13's support for the mask 2 can be improved.

[0072] For example, the multiple support pillars 22 can be spaced apart and evenly distributed. For instance, the multiple support pillars 22 can be arranged in an array, so that when the mask plate 2 is used to mask the pixel defining layer 13, the force on the mask plate 2 is uniform. Here, the multiple support pillars 22 are evenly distributed, which means that the spacing between each pair of adjacent support pillars 22 is equal.

[0073] In some examples, the number of support pillars 22 is less than the number of first openings 211. Thus, under the condition that the contact area between a single support pillar 22 and the pixel defining layer 13 remains unchanged, when the pixel defining layer 13 is masked using the mask plate 2, the sum of the contact areas between each support pillar 22 and the pixel defining layer 13 decreases as the number of support pillars 22 in contact with the pixel defining layer 13 decreases, thereby reducing the area of ​​the pixel defining layer 13 that is scratched, and thus reducing or even avoiding the generation of debris.

[0074] For example, the ratio of the number of support pillars 22 to the number of first openings 211 is greater than or equal to 1 / 16 and less than or equal to 1 / 8. This improves the reliability of the support for the mask plate 2 when masking the layer to be masked. While the contact area between a single support pillar 22 and the pixel defining layer 13 remains constant, the sum of the contact areas between all support pillars 22 and the pixel defining layer 13 decreases as the number of support pillars 22 in contact with the pixel defining layer 13 decreases. This reduces the area of ​​the scratched region of the pixel defining layer 13, thereby reducing or even avoiding debris generated by scratches and wear. For instance, the ratio of the number of support pillars 22 to the number of first openings 211 can be 1 / 8, 1 / 9, 1 / 10, 1 / 11, 1 / 12, 1 / 13, 1 / 14, 1 / 15, 1 / 16, or any value between these two.

[0075] In some embodiments, the height c of the support post 22 relative to the mask body 21, that is, the height c of the support post 22 along the thickness direction Z of the mask 2, is greater than the depth a of the receiving groove 132 along the thickness direction Z of the mask 2. In this way, the support post 22 of the mask 2 contacts the pixel defining layer 13 and can separate the mask body 21 from the pixel defining layer 13, reducing the contact area between the mask 2 and the pixel defining layer 13, reducing the area of ​​the pixel defining layer 13 that is scratched, thereby reducing or even avoiding the generation of debris.

[0076] For example, the difference between the height c of the support column 22 and the depth a of the receiving groove 132 is greater than or equal to 1.6 micrometers. For instance, the difference between the height c of the support column 22 and the depth a of the receiving groove 132 can be 1.6 micrometers, 1.7 micrometers, 1.8 micrometers, 1.9 micrometers, 2.0 micrometers, or any value between any two of the above.

[0077] Please refer to Figure 7 and Figure 8 In some embodiments, the mask 2 further includes a protective layer 23, which covers the support post 22 and the area of ​​the mask body 21 near the support post 22. The protective layer 23 covers the portion of the support post 22 away from the end face of the mask body 21, and transitions smoothly with the portion of the protective layer 23 covering the circumferential side face of the support post 22. Similarly, the protective layer 23 covers the portion of the mask body 21 near the support post 22, and transitions smoothly with the portion of the protective layer 23 covering the circumferential side face of the support post 22. This reduces the risk of the mask 2 scratching the pixel defining layer 13 when used to mask the pixel defining layer 13, thereby reducing or even eliminating debris generation. The protective layer 23 can be prepared using common processes such as coating. In other embodiments, the protective layer 23 may also cover all surfaces of the mask 2.

[0078] For example, the protective layer 23 can be an inorganic film layer. The inorganic film layer can include, but is not limited to, at least one of the following: an alumina film, a glass film. In this way, the mask 2 has good high-temperature resistance, chemical stability, and mechanical strength.

[0079] Please refer to Figure 9 And continue to refer to Figures 3 to 5 This application embodiment also provides a display panel 1, the structure of which is the same as the structure of the display panel 1 described in the foregoing embodiments, and will not be repeated here.

[0080] The display panel 1 includes an array substrate 11 and a pixel limiting layer 13 disposed on the surface of the array substrate 11. The pixel limiting layer 13 is provided with a pixel opening 131 and a receiving groove 132.

[0081] The pixel opening 131 can have multiple groups. Each group of pixel openings 131 can include three pixel openings 131, which can be a first sub-pixel opening 131a, a second sub-pixel opening 131b, and a third sub-pixel opening 131c. The light emitted by the light-emitting layer in the first sub-pixel opening 131a, the second sub-pixel opening 131b, and the third sub-pixel opening 131c is of a different color.

[0082] The receiving groove 132 is configured to accommodate the support pillar 22 of the mask plate 2 when the pixel limiting layer 13 is masked using the mask plate 2 in any of the aforementioned embodiments. The inner side surface of the receiving groove 132, i.e., the groove sidewall, is connected to the bottom surface of the receiving groove 132, i.e., the groove bottomwall, and the inner side surface and bottom surface of the receiving groove 132 form a receiving space that can accommodate the support pillar 22. The receiving space of the receiving groove 132 can accommodate the support pillar 22 when the pixel limiting layer 13 is masked using the mask plate 2. The groove opening of the receiving groove 132 is located on the surface of the pixel limiting layer 13 away from the array substrate 11. The receiving groove 132 extends in the direction toward the array substrate 11, that is, the receiving groove 132 extends along the thickness direction Z of the display panel 1.

[0083] Along the thickness direction Z of the display panel 1, the depth a of the receiving groove 132 is less than the thickness d of the pixel limiting layer 13, making the receiving groove 132 a blind hole and ensuring that it does not affect the insulating function of the pixel limiting layer 13. For example, the depth a of the receiving groove 132 can be 1 / 2 or 1 / 3 of the thickness d of the pixel limiting layer 13. Of course, the depth a of the receiving groove 132 is not limited to this; this embodiment does not specifically limit the depth a of the receiving groove 132, and it can be determined according to the actual situation.

[0084] Please refer to Figure 5 The shape of the receiving groove 132 needs to be able to accommodate the support post 22 inserted therein. In some examples, the shape of the receiving groove 132 can be the same as the shape of the support post 22. For example, taking a plane parallel to the mask body 21 as a cross-section, the cross-sectional shape of the support post 22 can be polygonal, and correspondingly, the cross-sectional shape of the receiving groove 132 along the same direction is also polygonal. In other examples, the shape of the receiving groove 132 can also be different from the shape of the support post 22. For example, taking a plane parallel to the mask body 21 as a cross-section, the cross-sectional shape of the support post 22 can be polygonal, and correspondingly, the cross-sectional shape of the receiving groove 132 can be circular or elliptical. Of course, the shape of the receiving groove 132 is not limited to these; this embodiment is only an example, and the shape of the receiving groove 132 can be determined according to the actual situation.

[0085] During the fabrication of the display panel 1, a half-etched area and a masking area can be defined on the pixel defining layer 13. The masking area of ​​the pixel defining layer 13 is blocked, and the part of the pixel defining layer 13 located in the half-etched area is half-etched using an etching solution. After the half-etching is completed, the thickness of the part of the pixel defining layer 13 located in the half-etched area is reduced, while the thickness of the part of the pixel defining layer 13 located in the masking area remains unchanged, thus obtaining the receiving groove 132.

[0086] In the fabrication process of the display panel 1 provided in this embodiment, a mask 2 masks the pixel defining layer 13 of the display panel 1. The support pillars 22 of the mask 2 are inserted into the receiving grooves 132 of the pixel defining layer 13. This reduces the relative sliding between the mask 2 and the pixel defining layer 13, reduces scratches and wear on the pixel defining layer 13 caused by the mask 2, and thus reduces or even avoids the generation of debris. This reduces or even avoids the problem of debris causing cracks in the encapsulation layer of the display panel 1, leading to encapsulation failure and affecting the display effect. Moreover, compared with the related technology in which the pixel defining layer 13 is provided with support pads 15, in this embodiment, the receiving grooves 132 are hidden in the pixel defining layer 13, making the morphology of the area where the receiving grooves 132 are located on the pixel defining layer 13 relatively simple and flat, thereby improving the coverage effect of the encapsulation layer of the display panel and thus reducing or even avoiding the problem of encapsulation failure.

[0087] In some embodiments, such as Figure 5 As shown, there is a gap b between the inner side of the receiving groove 132 and the circumferential side of the support column 22 located therein. This gap can be used to collect debris 3 when the pixel defining layer 13 is masked by the mask plate 2.

[0088] In some embodiments, a gap b is provided between the inner side of the receiving groove 132 and all circumferential sides of the support column 22. In this way, there is an annular gap between the inner side of the receiving groove 132 and the circumferential sides of the support column 22, and debris generated at various points along the circumference of the receiving groove 132 or the support column 22 can fall into the receiving groove 132, thereby improving the debris collection capacity.

[0089] For example, the gap b between the inner side of the receiving groove 132 and the circumferential side of the support column 22 is greater than or equal to 5 micrometers. For instance, the gap b between the inner side of the receiving groove 132 and the circumferential side of the support column 22 can be 5 micrometers, 6 micrometers, 7 micrometers, 8 micrometers, 9 micrometers, or any value between two of these. In this way, the gap between the circumferential side of the support column 22 and the inner side of the receiving groove 132 can accommodate more or larger debris.

[0090] Of course, the value of the gap b between the inner side of the receiving groove 132 and the circumferential side of the support column 22 is not limited to this; this embodiment is merely an example. The gap b between the inner side of the receiving groove 132 and the circumferential side of the support column 22 can be determined according to the actual situation. For example, the gap b between the inner side of the receiving groove 132 and the corresponding circumferential side of the support column 22 can be determined based on the machining accuracy or based on the size of historical debris.

[0091] In this embodiment, during the fabrication of the display panel 1, even if the inner side or bottom surface of the receiving groove 132 is scratched by the support pillar 22 of the mask plate 2, the resulting debris will be contained within the receiving groove 132, thereby reducing or even preventing debris from falling into the light-emitting area of ​​the display panel 1 and affecting the display effect. Moreover, even if larger debris is generated and falls into the receiving groove 132, the encapsulation layer can effectively cover the debris that falls into the receiving groove 132, thereby reducing or even preventing the problem of debris causing cracks in the encapsulation layer and leading to encapsulation failure.

[0092] In some embodiments, the number of receiving slots 132 is multiple, thereby improving the support reliability of the mask plate 2 when masking the pixel defining layer 13. In some examples, the multiple receiving slots 132 are spaced apart and evenly distributed, and the distribution of the receiving slots 132 is the same as the distribution of the support pillars 22 of the mask plate 2. For example, both the receiving slots 132 and the support pillars 22 are arranged in an array, and when masking the pixel defining layer 13, the receiving slots 132 and the support pillars 22 correspond one-to-one. In this way, the uniformity of force on the mask plate 2 can be improved when masking the pixel defining layer 13. For example, the spacing between any two adjacent receiving slots 132 is equal.

[0093] In some embodiments, please continue to refer to Figure 3 and Figure 5 Along the direction from the bottom to the opening of the receiving groove 132, the inner surface of the receiving groove 132 gradually moves away from the center of the receiving groove 132. In some examples, at least a portion of the inner surface of the receiving groove 132 can be an inclined straight surface; for example, taking a plane parallel to the thickness direction Z of the display panel 1 as a cross-section, the cross-sectional shape of the receiving groove 132 can be trapezoidal. In other examples, at least a portion of the inner surface of the receiving groove 132 can be a curved surface.

[0094] In this embodiment, the opening of the receiving groove 132 is gradually increased, and when the mask plate 2 is used to mask the pixel limiting layer 13, the support column 22 of the mask plate 2 can be smoothly inserted into the receiving groove 132, reducing or even avoiding the generation of debris.

[0095] Please continue to refer to Figure 9In some embodiments, the receiving slot 132 can be spaced apart from each pixel opening 131. The receiving slot 132 can be distributed spaced apart from the first sub-pixel opening 131a, the second sub-pixel opening 131b, and the third sub-pixel opening 131c. In this way, the difficulty of setting the support post 22 on the mask 2 can be reduced.

[0096] In some examples, the number of receiving slots 132 is less than the number of pixel openings 131. Thus, under the condition that the contact area between a single receiving slot 132 and the support post 22 of the mask plate 2 remains unchanged, when the pixel defining layer 13 is masked using the mask plate 2, the sum of the contact areas between each receiving slot 132 and the support post 22 decreases as the number of receiving slots 132 and support posts 22 decreases, thereby reducing the area of ​​the pixel defining layer 13 that is scratched, and thus reducing or even avoiding the generation of debris.

[0097] For example, taking pixel opening 131 as the first sub-pixel opening 131a, the ratio of the number of receiving slots 132 to the number of first sub-pixel openings 131a is greater than or equal to 1 / 16 and less than or equal to 1 / 8. This improves the reliability of the support for the mask 2 and reduces the area of ​​the pixel limiting layer 13 that is scratched, thus reducing or even avoiding the generation of debris. For example, the ratio of the number of receiving slots 132 to the number of first sub-pixel openings 131a can be 1 / 8, 1 / 9, 1 / 10, 1 / 11, 1 / 12, 1 / 13, 1 / 14, 1 / 15, 1 / 16, or any value between any two of the above.

[0098] Please refer to Figure 10 And continue to refer to Figure 5 In some embodiments, during the fabrication of the light-emitting layer in the first sub-pixel opening 131a using a mask 2, the projection of the edge of the first virtual contour 211a of the mask 2 onto the pixel limiting layer 13 is located outside the edge of the first sub-pixel opening 131a. During the fabrication of the light-emitting layer in the second sub-pixel opening 131b using another mask 2, the projection of the edge of the second virtual contour 211b of the mask 2 onto the pixel limiting layer 13 is located outside the edge of the second sub-pixel opening 131b. During the fabrication of the light-emitting layer in the third sub-pixel opening 131c using yet another mask 2, the projection of the edge of the third virtual contour 211c of the mask 2 onto the pixel limiting layer 13 is located outside the edge of the third sub-pixel opening 131c.

[0099] Taking the support pillar 22 located at the edge of the first sub-pixel opening 131a as an example, a portion of the support pillar 22 is located in the interval region between the edge of the first virtual contour 211a, the edge of the second virtual contour 211b, and the edge of the third virtual contour 211c; a portion of the support pillar 22 is located in the region enclosed by the edge of the second virtual contour 211b and the edge of the second sub-pixel opening 131b; and a portion of the support pillar 22 is located in the region enclosed by the edge of the third virtual contour 211c and the edge of the third sub-pixel opening 131c.

[0100] In this way, the receiving slots 132 located in the interval region between adjacent first sub-pixel openings 131a, second sub-pixel openings 131b and third sub-pixel openings 131c can cooperate with the support pillars 22 of different mask plates 2, thereby reducing the number of receiving slots 132 opened on the pixel limiting layer 13.

[0101] The various embodiments or implementation methods described in this specification are presented in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be referred to each other.

[0102] It should be noted that the terms "one embodiment," "embodiment," "exemplary embodiment," "some embodiments," etc., mentioned in the specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Moreover, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0103] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A photomask, characterized in that, include: The mask plate body and the support column are provided on the first surface of the mask plate body and the support column is configured to be received in the receiving groove of the mask layer when the mask layer is masked. The first surface is the surface facing the masking layer when the masking layer is masked; at least a portion of the circumferential side of the support post has a gap with the inner side of the receiving groove, the gap being greater than or equal to 5 micrometers; wherein, the gap is used to contain debris; the mask plate body is provided with a plurality of first openings, and the support post is disposed at the edge of the first opening.

2. The mask plate according to claim 1, characterized in that, All circumferential sides of the support column have gaps with the inner side of the receiving groove.

3. The mask plate according to claim 1, characterized in that, The first opening is configured to face the second opening of the layer to be masked when the layer is masked. With a plane parallel to the mask plate body as the cross-section, the cross-sectional shape of the first opening is a polygon, and the support column is located at the apex of the polygon; Along the direction away from the mask plate body, the cross-sectional area of ​​the support column gradually decreases.

4. The mask plate according to claim 3, characterized in that, The number of support columns is multiple, and all of the multiple support columns are located on the first surface of the mask plate body; The multiple support columns are spaced apart, and the distance between any two adjacent support columns is equal; The number of support columns is less than the number of the first openings.

5. The mask plate according to claim 1, characterized in that, The height of the support column relative to the mask plate body is greater than the depth of the receiving groove.

6. The mask plate according to any one of claims 1-5, characterized in that, It also includes a protective layer that covers the support column and the area of ​​the mask plate body near the support column; The protective layer covers the portion of the support column away from the mask plate body, and transitions to the portion of the protective layer covering the circumferential side of the support column through a smooth curved surface. The protective layer covers a portion of the mask plate body near the support column, and transitions to the portion covering the circumferential side of the support column via a smooth curved surface. The protective layer is an inorganic film layer.

7. A display panel, characterized in that, The device includes a functional layer, which is provided with a receiving groove, which is configured to receive a support column of the mask plate when the functional layer is masked using the mask plate according to any one of claims 1-6.

8. The display panel according to claim 7, characterized in that, There is a gap between the inner side of the receiving groove and the circumferential side of the support column housed in the receiving groove; The number of receiving slots is multiple, and the multiple receiving slots are distributed at intervals, with the distance between each pair of adjacent receiving slots being equal.

9. The display panel according to claim 7, characterized in that, Along the direction from the bottom to the opening of the receiving groove, the inner side of the receiving groove gradually moves away from the center of the receiving groove; With the plane perpendicular to the functional layer as the cross-section, the cross-sectional shape of the receiving groove is trapezoidal.

10. The display panel according to claim 7, characterized in that, The functional layer includes a pixel defining layer, the pixel defining layer having a pixel opening, and a light-emitting layer being disposed within the pixel opening; the receiving slot is spaced apart from the pixel opening; The number of accommodating slots is less than the number of pixel openings.

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