Torque sensor

Abstract

The torque sensor of the present invention comprises a first structure, a second structure, a strain body, a Y-axis connection portion of the first structure, an X-axis connection portion of the second structure, a detection element, and a detection circuit. The Y-axis connection portion of the first structure is arranged on the positive side and the negative side of the Y-axis relative to the strain body, and the X-axis connection portion of the second structure is arranged on the positive side and the negative side of the X-axis relative to the second structure. The strain body includes four deformable bodies, and the deformable bodies include displacement portions that are displaced in the Z-axis direction by elastic deformation. Deformable bodies are respectively arranged in the first quadrant, the second quadrant, the third quadrant, and the fourth quadrant. The detection element includes a capacitor element, and the capacitor element detects changes in capacitance value by the displacement of the displacement portions of each deformable body in the Z-axis direction.

Description

Technical Field

[0001] The present invention relates to a torque sensor. Background Art

[0002] Torque sensors that output the moment (torque) acting around a predetermined rotational axis as an electrical signal are known (see, for example, Patent Document 1). These torque sensors are widely used for torque control in various robots, including industrial robots, collaborative robots, life-assistance robots, medical robots, and service robots. Consequently, there is a demand for torque sensors that are both highly accurate and sensitive, yet inexpensive.

[0003] For example, a conventional torque sensor comprises a circular annular force-bearing body, a circular annular strain body, and a circular annular support body. A strain body is arranged on the inner side of the force-bearing body, and a support body is arranged on the inner side of the strain body. The force-bearing body, the strain body, and the support body are arranged on the XY plane, and the strain body is connected to the force-bearing body and the support body, respectively. If a torque around the Z axis acts on the force-bearing body, the strain body elastically deforms in the radial direction. The elastic deformation of the strain body is detected by a capacitive element having a fixed electrode and a displacement electrode. The displacement electrode is mounted on the outer circumference of the strain body, and the fixed electrode is mounted on the inner circumference of the force-bearing body in a manner opposite to the displacement electrode. The fixed electrode is sometimes also mounted on the outer circumference of the support body, in which case the displacement electrode is mounted on the inner circumference of the strain body.

[0004] In a torque sensor configured in this manner, the displaceable electrode and the fixed electrode are arranged so that their opposing surfaces are perpendicular to the XY plane. In this case, alignment between the displaceable electrode and the fixed electrode becomes difficult, reducing the production efficiency of the torque sensor.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: International Publication No. 2013-014803 Summary of the Invention

[0008] Technical problems to be solved by the present invention

[0009] The present invention has been made in consideration of the above-mentioned points, and an object of the present invention is to provide a torque sensor capable of improving production efficiency.

[0010] Technical means for solving technical problems

[0011] The present invention provides a torque sensor for detecting a torque around the Z axis in an XYZ three-dimensional coordinate system, comprising: a first structure formed with the Z axis as the center; a second structure formed with the Z axis as the center; a strain body arranged between the first structure and the second structure, and connecting the first structure and the second structure, and generating elastic deformation by the action of the torque; two Y-axis connecting parts of the first structure, connecting the first structure and the strain body; two X-axis connecting parts of the second structure, connecting the strain body and the second structure; a detection element; and a detection circuit, based on the detection The detection result of the element is output as an electrical signal representing the torque. The Y-axis connection part of the first structure is arranged on the positive side and the negative side of the Y-axis relative to the strain body, and the X-axis connection part of the second structure is arranged on the positive side and the negative side of the X-axis relative to the second structure. The strain body includes four deformable bodies, and the deformable body includes a displacement part that displaces in the Z-axis direction through elastic deformation. The deformable bodies are respectively arranged in the first quadrant, the second quadrant, the third quadrant and the fourth quadrant. The detection element includes a capacitor element, and the capacitor element detects the change in capacitance value through the displacement of the displacement part of each deformable body in the Z-axis direction.

[0012] Furthermore, in the above-described torque sensor, the second structure may be arranged inside the first structure when viewed along the Z axis.

[0013] In addition, it may also be that in the above-mentioned torque sensor, the Y-axis connecting portion of the first structure extends along the Y-axis and the Z-axis, the dimension of the Y-axis connecting portion of the first structure in the Z-axis direction is larger than the dimension of the Y-axis connecting portion of the first structure in the Y-axis direction, and the X-axis connecting portion of the second structure extends along the X-axis and the Z-axis, and the dimension of the X-axis connecting portion of the second structure in the Z-axis direction is larger than the dimension of the X-axis connecting portion of the second structure in the X-axis direction.

[0014] In addition, the above-mentioned torque sensor may also include: two first structure X-axis connecting parts connecting the first structure and the strain body; and two second structure Y-axis connecting parts connecting the strain body and the second structure, when viewed along the Z-axis, the first structure X-axis connecting parts are arranged on the positive side and the negative side of the X-axis relative to the strain body, and the second structure Y-axis connecting parts are arranged on the positive side and the negative side of the Y-axis relative to the second structure, the first structure X-axis connecting parts extend along the X-axis, and the second structure Y-axis connecting parts extend along the Y-axis.

[0015] In addition, it may also be that in the above-mentioned torque sensor, the X-axis connection portion of the first structure and the Y-axis connection portion of the second structure extend along the Z-axis, the dimension of the X-axis connection portion of the first structure in the Z-axis direction is larger than the dimension of the X-axis connection portion of the first structure in the X-axis direction, and the dimension of the Y-axis connection portion of the second structure in the Z-axis direction is larger than the dimension of the Y-axis connection portion of the second structure in the Y-axis direction.

[0016] In addition, in the above-mentioned torque sensor, the dimension of the first structure's X-axis connection portion in the Y-axis direction may be smaller than the dimension of the first structure's Y-axis connection portion in the X-axis direction, and the dimension of the second structure's Y-axis connection portion in the X-axis direction may be smaller than the dimension of the second structure's X-axis connection portion in the Y-axis direction.

[0017] Furthermore, in the torque sensor described above, the strain body may be formed in a circular ring shape when viewed along the Z axis.

[0018] In addition, in the above-mentioned torque sensor, the strain body is not connected to the second structure at a position in the strain body where the Y-axis connection portion of the first structure is connected, and the first structure is not connected to the strain body at a position in the strain body where the X-axis connection portion of the second structure is connected.

[0019] In addition, in the above-mentioned torque sensor, the dimension of the X-axis connection part of the first structure in the X-axis direction is larger than the dimension of the Y-axis connection part of the first structure in the Y-axis direction, and the dimension of the Y-axis connection part of the second structure in the Y-axis direction is larger than the dimension of the X-axis connection part of the second structure in the X-axis direction.

[0020] Furthermore, in the torque sensor described above, the strain body may be formed in an elliptical ring shape having a major axis along the Y axis and a minor axis along the X axis when viewed along the Z axis.

[0021] In the torque sensor, the first structure Y-axis connection portion may be formed at a connection position between the first structure and the strain body, and the second structure X-axis connection portion may be formed at a connection position between the strain body and the second structure.

[0022] Furthermore, in the torque sensor described above, an outer peripheral surface of the strain body may be formed in an elliptical shape having a major axis along the Y axis and a minor axis along the X axis when viewed along the Z axis.

[0023] Furthermore, in the torque sensor described above, the outer peripheral surface of the second structure may be formed in an elliptical shape having a major axis along the X axis and a minor axis along the Y axis when viewed along the Z axis.

[0024] In addition, the above-mentioned torque sensor may also include: two first structure X-axis connecting parts connecting the first structure and the strain body; and two second structure Y-axis connecting parts connecting the strain body and the second structure, when viewed along the Z-axis, the first structure X-axis connecting parts are arranged on the positive side and the negative side of the X-axis relative to the strain body, and the second structure Y-axis connecting parts are arranged on the positive side and the negative side of the Y-axis relative to the second structure, the first structure X-axis connecting parts extend along the X-axis, and the second structure Y-axis connecting parts extend along the Y-axis.

[0025] In addition, in the above-mentioned torque sensor, the dimension of the first structure's X-axis connection portion in the Y-axis direction may be smaller than the dimension of the first structure's Y-axis connection portion in the X-axis direction, and the dimension of the second structure's Y-axis connection portion in the X-axis direction may be smaller than the dimension of the second structure's X-axis connection portion in the Y-axis direction.

[0026] In addition, in the above-mentioned torque sensor, the strain body is not connected to the second structure at a position in the strain body where the Y-axis connection portion of the first structure is connected, and the first structure is not connected to the strain body at a position in the strain body where the X-axis connection portion of the second structure is connected.

[0027] Furthermore, in the above-described torque sensor, the second structure may be arranged on the negative side of the Z axis with respect to the strain body.

[0028] Furthermore, in the torque sensor described above, the strain body may be arranged on the negative side of the Z axis with respect to the first structure.

[0029] Effects of the Invention

[0030] According to the present invention, production efficiency can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 This is a perspective view showing an example of a robot to which the torque sensor according to the first embodiment is applied.

[0032] Figure 2 It is a plan view showing the torque sensor according to the first embodiment.

[0033] Figure 3 yes Figure 2 AA line section view.

[0034] Figure 4 Yes Figure 2 A perspective view of the torque sensor.

[0035] Figure 5 Yes Figure 2 Magnified top view of the deformed body.

[0036] Figure 6 Yes Figure 2 A cross-sectional view of the deformed body and the capacitor element.

[0037] Figure 7 Yes Figure 2 A three-dimensional diagram of each connection part.

[0038] Figure 8 Yes Figure 2 A top view of the torque sensor showing a moment about the Z-axis.

[0039] Figure 9 Yes Figure 6 A cross-sectional view showing a case where the capacitance value of a capacitor element is reduced.

[0040] Figure 10 Yes Figure 6 A cross-sectional view showing a state in which the capacitance value of a capacitor element increases.

[0041] Figure 11 Yes Figure 2 A top view of a modified example of a torque sensor.

[0042] Figure 12 Yes Figure 2 A top view of another modified example of the torque sensor.

[0043] Figure 13A Yes Figure 6 A cross-sectional view of a deformation example of a deformation body.

[0044] Figure 13B Yes Figure 6 Cross-sectional views of other deformation examples of the deformation body.

[0045] Figure 14 Yes Figure 3 sectional view of a modified example of the torque sensor.

[0046] Figure 15 It is a plan view showing a torque sensor according to a second embodiment.

[0047] Figure 16 Yes Figure 15 A top view of a modified example of the torque sensor.

[0048] Figure 17 It is a plan view showing a torque sensor according to a third embodiment.

[0049] Figure 18 Yes Figure 17 A top view of a modified example of the torque sensor.

[0050] Figure 19 It is a cross-sectional view showing a torque sensor according to a fourth embodiment.

[0051] Figure 20 Yes Figure 19 BB line cross-sectional view.

[0052] Figure 21 Yes Figure 19 CC line cross-sectional view.

[0053] Figure 22 Yes Figure 19 sectional view of a modified example of the torque sensor. DETAILED DESCRIPTION

[0054] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings attached to this specification, for the sake of convenience and understanding, the scales and aspect ratios are appropriately changed and exaggerated from the actual objects.

[0055] In addition, terms used in this specification that determine shapes, geometric conditions, physical properties and their degrees, such as "parallel", "orthogonal", "equal", etc., dimensions, values ​​of physical properties, etc., are not bound by strict meanings and are interpreted as including a range of degrees in which the same function can be expected.

[0056] (First embodiment)

[0057] First, use Figures 1 to 14 , a torque sensor according to a first embodiment of the present invention will be described.

[0058] Before describing the torque sensor according to this embodiment, Figure 1 An example of application of this torque sensor to a robot will be described. Figure 1 This is a perspective view showing an example of a robot to which the torque sensor according to the present embodiment is applied.

[0059] like Figure 1 As shown, the industrial robot 1000 includes a robot body 1100, an end effector 1200, a wire 1300, a control unit 1400, and a torque sensor 1. The robot body 1100 includes the robot arm. The torque sensor 1 is provided between the robot body 1100 and the end effector 1200.

[0060] The electric wire 1300 is extended inside the robot body 1100. The electric wire 1300 is connected to a connector (not shown) of the torque sensor 1.

[0061] also, Figure 1 In the embodiment, the control unit 1400 is arranged inside the robot body 1100, but it can also be arranged in other parts (such as a control panel outside the robot). In addition, the assembly method of the torque sensor 1 to the robot is not limited to Figure 1 The method shown.

[0062] The torque sensor 1 detects the torque acting on the end effector 1200, which functions as a gripper. An electrical signal representing the detected torque is transmitted via a wire 1300 to the control unit 1400 of the industrial robot 1000. The control unit 1400 controls the movements of the robot body 1100 and the end effector 1200 based on the received electrical signal. Alternatively, the torque sensor can be installed in a joint (not shown) of the robot body 1100. In this case, it can be placed in parallel with a reducer connected to the drive unit that drives the joint.

[0063] Furthermore, the torque sensor 1 is not limited to industrial robots, but can be applied to various robots such as collaborative robots, life-assisting robots, medical robots, and service robots.

[0064] Below, refer to Figures 2 to 7 A torque sensor according to an embodiment of the present invention will be described. Figure 2 It is a plan view showing the torque sensor according to the first embodiment. Figure 3 yes Figure 2 AA line section view. Figure 4 Yes Figure 2 A perspective view of the torque sensor. Figure 5 Yes Figure 2 The enlarged top view of the deformed body, Figure 6 Yes Figure 2 A cross-sectional view of the deformed body and the capacitor element. Figure 7 Yes Figure 2 A three-dimensional diagram of each connection part.

[0065] The torque sensor 1 has the function of detecting a moment (torque) acting about a predetermined rotational axis and outputting the detected torque as an electrical signal. However, the torque sensor 1 is not limited to this function; it may also output torque acting about other rotational axes as an additional electrical signal. Furthermore, the torque sensor 1 may be configured to additionally output a force in a predetermined direction as an electrical signal.

[0066] In this embodiment, a torque sensor 1 that detects moment about the Z-axis of an XYZ three-dimensional coordinate system is described. The following description assumes that the torque sensor 1 is arranged with the Z-axis direction as the vertical direction, and with the force-bearing body 10, support body 20, and strain body 30 arranged on the XY plane. The torque sensor 1 of this embodiment is not limited to use in an orientation with the Z-axis direction as the vertical direction.

[0067] like Figures 2 to 4 As shown, the torque sensor 1 includes a load-bearing body 10, a supporting body 20, a strain body 30, a load-bearing body Y-axis connection portion 41, a supporting body X-axis connection portion 51, a detection element 60, and a detection circuit 70. Each component is described in more detail below. The load-bearing body 10 is an example of a first structure, and the supporting body 20 is an example of a second structure. The load-bearing body Y-axis connection portion 41 is an example of a Y-axis connection portion of the first structure, and the supporting body X-axis connection portion 51 is an example of an X-axis connection portion of the second structure.

[0068] The force-bearing body 10 is formed with the Z axis as the center. Alternatively, the force-bearing body 10 is formed in a flat plate shape. Alternatively, the force-bearing body 10 is formed in a circular ring shape when viewed along the Z axis.

[0069] The force-bearing body 10 receives the action of the moment to be detected. By receiving this action, the force-bearing body 10 moves relative to the supporting body 20. Figure 1 In the example, the force-bearing body 10 is fixed to the end effector 1200 and receives the torque from the end effector 1200. Figure 3 As shown, the force-bearing body 10 includes a mating surface 10a fixed to the end effector 1200. The mating surface 10a is arranged on the positive side of the Z axis in the force-bearing body 10, which is equivalent to the upper surface of the force-bearing body 10 (the surface on the positive side of the Z axis). The mating surface 10a can also be arranged at a position closer to the positive side of the Z axis than the upper surface 30a of the strain body 30 (the strain body connection parts 32a to 32d described later) and the upper surface 20a of the support body 20. Therefore, when the torque sensor 1 is fixed to the end effector 1200, interference between the end effector 1200 and the torque sensor 1 can be prevented. The upper surface 30a of the strain body 30 and the upper surface 20a of the support body 20 can also be arranged at the same position in the Z axis direction. The upper surface 30a of the strain body 30 and the upper surfaces of the connection parts 41, 42, 51, and 52 described later can also be arranged at the same position in the Z axis direction.

[0070] like Figure 2 as well as Figure 4As shown, the support body 20 is formed with the Z-axis as the center. Alternatively, the support body 20 is formed in the shape of a flat plate. Alternatively, when viewed along the Z-axis, the support body 20 is formed in the shape of a circular ring. A sensor opening 2 for the torque sensor 1 is formed on the inner side of the support body 20. Sometimes cables and tubes used in the robot are passed through the sensor opening 2. When viewed along the Z-axis, the support body 20 is arranged on the inner side of the force-bearing body 10 and is separated from the force-bearing body 10. Alternatively, the support body 20 is arranged together with the force-bearing body 10 on the XY plane and is formed concentrically with the force-bearing body 10.

[0071] The supporting body 20 supports the force-bearing body 10. Figure 1 In the example of FIG, the support body 20 is fixed to the end of the robot body 1100 (arm) and supported by the robot body 1100. Figure 3 As shown, the support body 20 includes a mating surface 20b fixed to the robot body 1100. The mating surface 20b is arranged on the negative side of the Z axis in the support body 20 and corresponds to the lower surface of the support body 20 (the surface on the negative side of the Z axis). Alternatively, the mating surface 20b may be arranged at a position closer to the negative side of the Z axis than the lower surface 10b of the force-bearing body 10 and the lower surface 30b of the strain body 30 (the strain body connection portion 32a to 32d described later). In addition, as described later, when the electrode support body 80 described later is provided on the lower surface 10b of the force-bearing body 10, the mating surface 20b may be arranged at a position closer to the negative side of the Z axis than the lower surface 80a of the electrode support body 80. In this case, when the torque sensor 1 is fixed to the robot body 1100, interference between the robot body 1100 and the torque sensor 1 can be prevented.

[0072] like Figures 2 to 4 As shown, the strain body 30 is provided between the force-bearing body 10 and the supporting body 20. In the present embodiment, the strain body 30 may be formed in a circular ring shape when viewed along the Z axis. When viewed along the Z axis, the strain body 30 is arranged on the inner side of the force-bearing body 10 and on the outer side of the supporting body 20. The strain body 30 is separated from the force-bearing body 10 and from the supporting body 20. The strain body 30 may also be formed concentrically with the force-bearing body 10, or may be formed concentrically with the supporting body 20. The width (radial dimension) of the strain body 30 may also be constant throughout the entire circumference.

[0073] The strain body 30 connects the load-bearing body 10 and the support body 20. The load-bearing body 10 is supported by the support body 20 via the strain body 30. The strain body 30 is configured to elastically deform when the load-bearing body 10 receives the action of a moment.

[0074] like Figure 2 as well as Figure 4As shown, the strain body 30 includes four deformable bodies 31a through 31d. Each deformable body 31a through 31d is configured to elastically deform under the action of a moment. The four deformable bodies 31a through 31d include a first deformable body 31a positioned in the first quadrant, a second deformable body 31b positioned in the second quadrant, a third deformable body 31c positioned in the third quadrant, and a fourth deformable body 31d positioned in the fourth quadrant.

[0075] Alternatively, the first deformable body 31a and the third deformable body 31c may be arranged on a line L1 that passes through the first and third quadrants and is at a 45-degree angle relative to the X-axis and the Y-axis. The deformable portions 33, 34, and the displacement portion 35 of the first deformable body 31a and the third deformable body 31c, described below, may also be arranged parallel to this line L1. Alternatively, the second deformable body 31b and the fourth deformable body 31d may be arranged on a line L2 that passes through the second and fourth quadrants and is at a 45-degree angle relative to the X-axis and the Y-axis. The deformable portions 33, 34, and the displacement portion 35 of the second deformable body 31b and the fourth deformable body 31d, described below, may also be arranged parallel to this line L2. Alternatively, the first deformable body 31a and the second deformable body 31b may be arranged symmetrically with respect to the fourth deformable body 31d and the third deformable body 31c with respect to the X-axis. Alternatively, the first deformable body 31a and the fourth deformable body 31d may be arranged symmetrically with respect to the second deformable body 31b and the third deformable body 31c with respect to the Y-axis. The deformable bodies 31 a to 31 d may be arranged point-symmetrically with respect to the origin O when viewed along the Z axis.

[0076] The strain body 30 includes four strain body connection portions 32a to 32d. Each strain body connection portion 32a to 32d connects two corresponding deformable bodies 31a to 31d. The four strain body connection portions 32a to 32d include a first strain body connection portion 32a, a second strain body connection portion 32b, a third strain body connection portion 32c, and a fourth strain body connection portion 32d. The first strain body connection portion 32a connects the first deformable body 31a to the second deformable body 31b. The second strain body connection portion 32b connects the second deformable body 31b to the third deformable body 31c. The third strain body connection portion 32c connects the third deformable body 31c to the fourth deformable body 31d. The fourth strain body connection portion 32d connects the fourth deformable body 31d to the first deformable body 31a.

[0077] like Figure 5 as well as Figure 6As shown, in this embodiment, each deformable body 31a-31d includes a first deformable portion 33, a second deformable portion 34, and a displacement portion 35. The first deformable portion 33 is connected to the corresponding strain-forming connecting portion 32a-32d, and the second deformable portion 34 is connected to the corresponding other strain-forming connecting portions 32a-32d. The displacement portion 35 is disposed between the first deformable portion 33 and the second deformable portion 34, connecting the first deformable portion 33 and the second deformable portion 34 via the displacement portion 35.

[0078] The first deforming portion 33 and the second deforming portion 34 are formed in a plate shape and have a thickness thinner than the strain-forming connecting portions 32a to 32d when viewed in the radial direction. The first deforming portion 33 and the second deforming portion 34 function as leaf springs and can be easily elastically deformed. The displacement portion 35 is also formed in a plate shape and has a thickness thinner than the strain-forming connecting portions 32a to 32d. The thickness of the first deforming portion 33, the thickness of the second deforming portion 34, and the thickness of the displacement portion 35 may be equal. Alternatively, the thickness of the displacement portion 35 may be thicker than the thickness of the first deforming portion 33 and the thickness of the second deforming portion 34.

[0079] The first deformation portion 33 extends from the end surface 32e (see FIG. Figure 6 ) extends downward toward the displacement portion 35. For example, the first deformation portion 33 of the first deformation body 31a extends downward toward the displacement portion 35 from the upper end portion in the end face 32e of the fourth strain body connection portion 32d. When viewed in the radial direction, the first deformation portion 33 is inclined relative to the Z axis and extends in a straight line. The second deformation portion 34 extends downward toward the displacement portion 35 from the upper end portion in the end face 32e of the corresponding strain body connection portions 32a~32d. For example, the second deformation portion 34 of the first deformation body 31a extends downward toward the displacement portion 35 from the upper end portion in the end face 32e of the first strain body connection portion 32a. When viewed in the radial direction, the second deformation portion 34 is inclined relative to the Z axis and extends in a straight line.

[0080] The displacement portion 35 is perpendicular to the Z axis, that is, arranged along the XY plane. When viewed in the radial direction, the displacement portion 35 is formed in a straight line along the XY plane. Figure 6 As shown, the lower surface 35a of the displacement portion 35 may be arranged on the positive side of the Z axis relative to the lower surface 30b of the strain body connecting portions 32a to 32d (strain body 30). The displacement portion 35 is configured to be displaced in the Z axis direction by elastic deformation of the first deformation portion 33 and the second deformation portion 34.

[0081] like Figure 5As shown, when viewed along the Z-axis, the first deforming portion 33, the second deforming portion 34, and the displacement portion 35 are formed in a curved shape. More specifically, the first deforming portion 33, the second deforming portion 34, and the displacement portion 35 constitute a portion of the circular ring of the strain body 30 and are formed in an arc shape. Alternatively, the first deforming portion 33, the second deforming portion 34, and the displacement portion 35 may be formed concentrically with the load-bearing body 10 or the supporting body 20.

[0082] like Figures 2 to 4 As shown, the force-bearing body Y-axis connection portion 41 connects the force-bearing body 10 to the strain body 30. The force-bearing body 10 and the strain body 30 are connected by two force-bearing body Y-axis connection portions 41. When viewed along the Z-axis, the force-bearing body Y-axis connection portion 41 is arranged on the positive side of the Y-axis and the negative side of the Y-axis relative to the strain body 30. In this embodiment, a force-bearing body Y-axis connection portion 41 is arranged at a position on the positive side of the Y-axis relative to the strain body 30. The force-bearing body Y-axis connection portion 41 connects the force-bearing body 10 to the first strain body connection portion 32a. Another force-bearing body Y-axis connection portion 41 is arranged at a position on the negative side of the Y-axis. The force-bearing body Y-axis connection portion 41 connects the force-bearing body 10 to the third strain body connection portion 32c.

[0083] The Y-axis connecting portion 41 of the force-bearing body of this embodiment is arranged on the Y-axis and extends along the Y-axis. Figure 7 As shown, the Y-axis connecting portion 41 of the force-bearing body is formed in a rectangular shape along the X-axis, Y-axis and Z-axis. The size of the Y-axis connecting portion 41 of the force-bearing body in the Z-axis direction (equivalent to Figure 7 Lz) is larger than the Y-axis dimension of the Y-axis connection portion 41 of the force-bearing body ( Figure 2 of P1y).

[0084] like Figures 2 to 4 As shown, the support body X-axis connection portion 51 connects the strain body 30 to the support body 20. The strain body 30 and the support body 20 are connected by two support body X-axis connection portions 51. When viewed along the Z axis, the support body X-axis connection portion 51 is arranged on the positive side of the X axis and the negative side of the X axis relative to the support body 20. In this embodiment, a support body X-axis connection portion 51 is arranged at the positive side of the X axis. The support body X-axis connection portion 51 connects the support body 20 to the fourth strain body connection portion 32d. Another support body X-axis connection portion 51 is arranged at the negative side of the X axis. The support body X-axis connection portion 51 connects the support body 20 to the second strain body connection portion 32b.

[0085] The support body X-axis connection portion 51 of this embodiment is arranged on the X-axis and extends along the X-axis. In this embodiment, the support body X-axis connection portion 51 is formed in a rectangular shape along the X-axis, Y-axis and Z-axis, similar to the force-bearing body Y-axis connection portion 41. The size of the support body X-axis connection portion 51 in the Z-axis direction (equivalent to Figure 7 Lz) is larger than the size of the support body X-axis connection portion 51 in the X-axis direction ( Figure 2 Q1x).

[0086] like Figures 2 to 4 As shown, the torque sensor 1 of this embodiment includes a load-bearing body X-axis connection portion 42 and a support body Y-axis connection portion 52. The load-bearing body X-axis connection portion 42 is an example of a first structural body X-axis connection portion, and the support body Y-axis connection portion 52 is an example of a second structural body Y-axis connection portion.

[0087] The load-bearing body X-axis connection portion 42 connects the load-bearing body 10 and the strain body 30. The load-bearing body 10 and the strain body 30 are connected via the two load-bearing body X-axis connection portions 42. When viewed along the Z-axis, the load-bearing body X-axis connection portions 42 are arranged on the positive side of the X-axis and the negative side of the X-axis relative to the strain body 30.

[0088] In this embodiment, a force-bearing body X-axis connection portion 42 is disposed on the positive side of the X-axis relative to the strain body 30. This force-bearing body X-axis connection portion 42 connects the force-bearing body 10 to the fourth strain body connection portion 32d. Another force-bearing body X-axis connection portion 42 is disposed on the negative side of the X-axis. This force-bearing body X-axis connection portion 42 connects the force-bearing body 10 to the second strain body connection portion 32b.

[0089] The X-axis connecting portion 42 of the load-bearing body of this embodiment is arranged on the X-axis and extends along the X-axis. In this embodiment, the X-axis connecting portion 42 of the load-bearing body is formed in a rectangular shape along the X-axis, Y-axis and Z-axis, similar to the Y-axis connecting portion 41 of the load-bearing body. The size of the X-axis connecting portion 42 of the load-bearing body in the Z-axis direction (equivalent to Figure 7 Lz) is larger than the X-axis dimension of the X-axis connection portion 42 of the force-bearing body ( Figure 2 P2x).

[0090] like Figure 2 As shown, in this embodiment, the size of the X-axis connection portion 42 of the force-bearing body in the Y-axis direction ( Figure 2 P2y) is smaller than the X-axis dimension of the Y-axis connection portion 41 of the force-bearing body ( Figure 2 In other words, when viewed along the Z-axis, the width of the force-bearing body X-axis connection portion 42 is smaller than the width of the force-bearing body Y-axis connection portion 41. Furthermore, the X-axis dimension (P2x) of the force-bearing body X-axis connection portion 42 may be equal to the Y-axis dimension (P1y) of the force-bearing body Y-axis connection portion 41.

[0091] like Figures 2 to 4As shown, the support body Y-axis connection portion 52 connects the strain body 30 to the support body 20. The strain body 30 and the support body 20 are connected by two support body Y-axis connection portions 52. When viewed along the Z-axis, the support body Y-axis connection portion 52 is arranged on the positive side of the Y-axis and the negative side of the Y-axis relative to the support body 20. In the present embodiment, a support body Y-axis connection portion 52 is arranged at a position on the positive side of the Y-axis relative to the support body 20. The support body Y-axis connection portion 52 connects the support body 20 to the first strain body connection portion 32a. Another support body Y-axis connection portion 52 is arranged at a position on the negative side of the Y-axis. The support body Y-axis connection portion 52 connects the support body 20 to the third strain body connection portion 32c.

[0092] The Y-axis connecting portion 52 of the support body of this embodiment is arranged on the Y-axis and extends along the Y-axis. In this embodiment, the Y-axis connecting portion 52 of the support body is formed in a rectangular shape along the X-axis, Y-axis and Z-axis, similar to the Y-axis connecting portion 41 of the force-bearing body. The size of the Y-axis connecting portion 52 of the support body in the Z-axis direction (equivalent to Figure 7 Lz) is larger than the Y-axis dimension of the support body Y-axis connection portion 52 ( Figure 2 of Q2y).

[0093] In this embodiment, the dimension (Q2x) of the support body Y-axis connection portion 52 in the X-axis direction is smaller than the dimension (Q1y) of the support body X-axis connection portion 51 in the Y-axis direction. In other words, when viewed along the Z-axis, the width of the support body Y-axis connection portion 52 is smaller than the width of the support body X-axis connection portion 51. Alternatively, the dimension (Q2y) of the support body Y-axis connection portion 52 in the Y-axis direction may be equal to the dimension (Q1x) of the support body X-axis connection portion 51 in the X-axis direction.

[0094] like Figure 6 As shown in FIG. 1 , the detection element 60 is configured to detect the displacement of the displacement portion 35 of each of the above-mentioned deformable bodies 31a to 31d in the Z-axis direction. The detection element 60 detects the elastic deformation generated by the above-mentioned four deformable bodies 31a to 31d. The detection element 60 is configured as an element for detecting capacitance. More specifically, as Figure 2 As shown, the detection element 60 includes a first capacitor element 61a, a second capacitor element 61b, a third capacitor element 61c, and a fourth capacitor element 61d. The first capacitor element 61a detects the displacement of the displacement portion 35 in the Z-axis direction caused by the elastic deformation of the first deformable body 31a. The second capacitor element 61b detects the displacement of the displacement portion 35 in the Z-axis direction caused by the elastic deformation of the second deformable body 31b. The third capacitor element 61c detects the displacement of the displacement portion 35 in the Z-axis direction caused by the elastic deformation of the third deformable body 31c. The fourth capacitor element 61d detects the displacement of the displacement portion 35 in the Z-axis direction caused by the elastic deformation of the fourth deformable body 31d.

[0095] like Figure 6 As shown, each capacitive element 61a to 61d includes a displaceable electrode 62 and a fixed electrode 63. The displaceable electrode 62 is provided on the lower surface 35a of the displaceable portion 35. If the displaceable portion 35 is formed of a conductive material, an insulating layer 64 may be interposed between the displaceable portion 35 and the displaceable electrode 62. The fixed electrode 63 is provided on the upper surface 80b of the electrode support 80 (described later). If the electrode support 80 is formed of a conductive material, an insulating layer 65 may be interposed between the electrode support 80 and the fixed electrode 63. The displaceable electrode 62 and the fixed electrode 63 are separated from each other and face each other. This allows for detection of the capacitance between the displaceable electrode 62 and the fixed electrode 63. Even when the displaceable electrode 62 is displaced in the X-axis, Y-axis, or Z-axis direction, the displaceable electrode 62 as a whole may overlap with the fixed electrode 63 when viewed along the Z-axis. This prevents changes in the facing area between the displaceable electrode 62 and the fixed electrode 63 even when the displaceable electrode 62 is displaced. Therefore, it is possible to suppress the influence of the change in the facing area on the change in the capacitance value.

[0096] like Figure 3 as well as Figure 6 As shown, the fixed electrode 63 of each capacitor element 61a to 61d is supported by the electrode support body 80. More specifically, the fixed electrode 63 is provided on the upper surface 80b of the electrode support body 80. The electrode support body 80 can also be mounted on the support body 20 using bolts not shown in the figure. Thus, even when a moment Mz is applied to the force-bearing body 10, the displacement of the electrode support body 80 can be suppressed. Alternatively, when viewed along the Z axis, the electrode support body 80 is formed in a circular ring shape. In addition, Figure 3 In the embodiment, for convenience, the lower surface 10b of the force-bearing body 10 is in contact with the upper surface 80b of the electrode support 80. However, a gap may be formed between the force-bearing body 10 and the electrode support 80. Alternatively, a spacer 84 (see FIG. 1 ) to be described later may be interposed between the force-bearing body 10 and the electrode support 80. Figure 14 ).

[0097] like Figure 3 As shown in FIG. 1 , the detection circuit 70 is configured to output an electrical signal representing the torque based on the detection result of the detection element 60. The detection circuit 70 may also have a calculation function, for example, formed by a microprocessor. In addition, the detection circuit 70 may also have an A / D conversion function for converting the analog signal received from the detection element 60 into a digital signal, and a signal amplification function. The detection circuit 70 may also include a terminal for outputting an electrical signal, from which a signal is output via an electric wire 1300 (see FIG. 1 ). Figure 1 ) sends an electrical signal to the above-mentioned control unit 1400.

[0098] Next, use Figures 8 to 10 A method of detecting the torque acting on the torque sensor 1 of this embodiment having such a structure will be described. Figure 8 1 is a plan view showing how moment about the Z axis acts on the torque sensor 1 according to the present embodiment. Figure 9 Yes Figure 6 A cross-sectional view showing a state in which the capacitance value of a capacitor element decreases. Figure 10 Yes Figure 6 A cross-sectional view showing a state in which the capacitance value of a capacitor element increases.

[0099] like Figure 2 When the load-bearing body 10 of the torque sensor 1 shown is subjected to the action of the moment Mz around the Z axis, the first deformation portion 33 and the second deformation portion 34 of each deformation body 31a to 31d are elastically deformed, and a displacement in the Z axis direction is generated in the displacement portion 35. Therefore, the distance between each displacement electrode 62 of the detection element 60 and the corresponding fixed electrode 63 changes, and the capacitance value of each capacitor element 61a to 61d changes. This change in capacitance value is detected by the detection element 60 as the displacement generated in the strain body 30. The change in capacitance value of each capacitor element 61a to 61d may be different. Therefore, the detection circuit 70 can detect the magnitude of the moment Mz acting on the load-bearing body 10 based on the change in capacitance value of each capacitor element 61a to 61d detected by the detection element 60.

[0100] The moment Mz about the Z axis acts on Figure 2 The case of the force receiving body 10 of the torque sensor 1 will be described in more detail. Here, the case where the moment Mz in the clockwise direction acts toward the positive side in the Z-axis direction will be described.

[0101] like Figure 2 As shown, the dimension (P2y) of the X-axis connection part 42 of the force-bearing body in the Y-axis direction is smaller than the dimension (P1x) of the Y-axis connection part 41 of the force-bearing body in the X-axis direction. Therefore, when the moment Mz is applied, the spring constant of the X-axis connection part 42 of the force-bearing body is smaller than that of the Y-axis connection part 41 of the force-bearing body, and elastic deformation is easily generated. The spring constant of the Y-axis connection part 41 of the force-bearing body is large, and it essentially functions as a rigid body. In addition, the dimension (Q2x) of the Y-axis connection part 52 of the support body is smaller than the dimension (Q1y) of the X-axis connection part 51 of the support body. Therefore, when the moment Mz around the Z-axis is applied, the spring constant of the Y-axis connection part 52 of the support body is smaller than that of the X-axis connection part 51 of the support body, and elastic deformation is easily generated. The spring constant of the X-axis connection part 51 of the support body is large, and it essentially functions as a rigid body.

[0102] The change in capacitance of the first capacitor 61a is described. The first strain body connection portion 32a is connected to the load-bearing body 10 via the load-bearing body Y-axis connection portion 41, and is connected to the support body 20 via the support body Y-axis connection portion 52. Figure 8 As shown, the first strain body connection portion 32a is supported by the Y-axis connection portion 41 of the force-bearing body and displaces in the direction of the moment Mz. On the other hand, the fourth strain body connection portion 32d is connected to the support body 20 via the support body X-axis connection portion 51, and is connected to the force-bearing body 10 via the force-bearing body X-axis connection portion 42. As a result, the fourth strain body connection portion 32d is supported by the support body X-axis connection portion 51 and does not substantially displace. Therefore, a tensile force is applied to the first deformable body 31a, as shown in FIG. Figure 9 As shown, the displacement portion 35 of the first deformable body 31a is displaced toward the positive side of the Z axis. In this case, the inter-electrode distance between the displacement electrode 62 and the fixed electrode 63 constituting the first capacitive element 61a increases, and the capacitance value of the first capacitive element 61a decreases.

[0103] The change in the capacitance value of the second capacitor 61b will be described. Figure 8 As shown, the first strain body connection portion 32a is supported by the Y-axis connection portion 41 of the force-bearing body and is displaced in the direction of the action of the moment Mz. On the other hand, the second strain body connection portion 32b is connected to the support body 20 via the support body X-axis connection portion 51, and is connected to the force-bearing body 10 via the force-bearing body X-axis connection portion 42. As a result, the second strain body connection portion 32b is supported by the support body X-axis connection portion 51 and does not substantially displace. Therefore, a compressive force is applied to the second deformable body 31b, as shown in FIG. Figure 10 As shown, the displacement portion 35 of the second deformable body 31b is displaced toward the negative side of the Z axis. In this case, the inter-electrode distance between the displacement electrode 62 and the fixed electrode 63 constituting the second capacitive element 61b decreases, and the capacitance value of the second capacitive element 61b increases.

[0104] Likewise, Figure 8 As shown, a tensile force is applied to the third deformable body 31c, as shown in FIG. Figure 9 As shown in FIG. 3 , the displacement portion 35 of the third deformable body 31c is displaced toward the positive side of the Z axis. In this case, the distance between the displacement electrode 62 and the fixed electrode 63 constituting the third capacitor element 61c increases, and the capacitance value of the third capacitor element 61c decreases. Figure 8 As shown, a compressive force is applied to the fourth deformation body 31d, as shown in FIG. Figure 10 As shown, the displaceable portion 35 of the fourth deformable body 31d is displaced toward the negative side of the Z axis. In this case, the inter-electrode distance between the displaceable electrode 62 and the fixed electrode 63 constituting the fourth capacitive element 61d decreases, and the capacitance value of the fourth capacitive element 61d increases.

[0105] The moment Mz acting on the load-bearing body 10 is detected according to Mz=-ΔC1+ΔC2-ΔC3+ΔC4. In addition, in the following formula, for convenience, the torque and the change in capacitance value are connected by "=". However, the torque and the capacitance value are different physical quantities from each other, so in practice, the torque is calculated by converting the change in capacitance value. ΔC1 in the above formula represents the change in capacitance value of the first capacitor element 61a, and ΔC2 represents the change in capacitance value of the second capacitor element 61b. ΔC3 represents the change in capacitance value of the third capacitor element 61c, and ΔC4 represents the change in capacitance value of the fourth capacitor element 61d.

[0106] If the capacitance value of the first capacitance element 61a in the intermediate state is C01 and the capacitance value of the first capacitance element 61a when the moment Mz acts on the load-bearing body 10 is C1, then C1=C01+ΔC1.

[0107] C2=C02+ΔC2、

[0108] C3=C03+ΔC3、

[0109] C4 = C04 + ΔC4. If C01 to C04 are equal, the moment Mz can also be expressed as Mz = -C1 + C2 - C3 + C4. This is because C01 to C04 cancel each other out. The intermediate state refers to a state where neither force nor moment acts on the load-bearing body 10.

[0110] Thus, the torque sensor 1 of this embodiment can effectively detect the moment Mz about the Z axis. However, the torque sensor 1 of this embodiment is not suitable for detecting forces or moments other than the moment Mz. This situation will be described below.

[0111] (When Fx acts)

[0112] When the right Figure 2When a force Fx is applied to the load-bearing body 10 of the torque sensor 1 in the positive X-axis direction, a tensile force is applied to the load-bearing body's X-axis connection portion 42 on the positive X-axis side and the support body's X-axis connection portion 51 on the positive X-axis side. A compressive force is applied to the load-bearing body's X-axis connection portion 42 on the negative X-axis side and the support body's X-axis connection portion 51 on the negative X-axis side. However, since each load-bearing body's X-axis connection portion 42 and each support body's X-axis connection portion 51 extend along the X-axis, they have a large spring constant relative to the force in the X-axis direction and essentially function as a rigid body. Therefore, elastic deformation of the strain body 30 can be suppressed, and changes in the capacitance values ​​of each capacitor element 61a to 61d can be suppressed. Changes in the capacitance values ​​of each capacitor element 61a to 61d can also be suppressed when a force Fx is applied to the load-bearing body 10 in the negative X-axis direction. When the strain body 30 is formed in a circular ring shape as in this embodiment, elastic deformation of the strain body 30 in response to the force Fx can be further suppressed.

[0113] (When Fy acts)

[0114] Description Figure 2 The torque sensor 1 is subjected to a force Fy acting on the load-bearing body 10 in the positive Y-axis direction. Similar to the case where force Fx is applied, since the Y-axis connection portions 41 of each load-bearing body and the Y-axis connection portions 52 of each supporting body extend along the Y-axis, their spring constants are large relative to the Y-axis force Fy, effectively functioning as rigid bodies. Therefore, even when force Fy is applied, elastic deformation of the strain body 30 is suppressed, and changes in the capacitance values ​​of the capacitor elements 61a to 61d are suppressed.

[0115] (When Fz acts)

[0116] Description Figure 2The torque sensor 1 is subjected to a force Fz in the Z-axis direction on the load-bearing body 10. As described above, the dimension of each load-bearing body Y-axis connection part 41 in the Z-axis direction is larger than the dimension of the load-bearing body Y-axis connection part 41 in the Y-axis direction (P1y), and the dimension of each load-bearing body X-axis connection part 42 in the Z-axis direction is larger than the dimension of the load-bearing body X-axis connection part 42 in the X-axis direction (P2x). In addition, the dimension of each support body X-axis connection part 51 in the Z-axis direction is larger than the dimension of the support body X-axis connection part 51 in the X-axis direction (Q1x), and the dimension of each support body Y-axis connection part 52 in the Z-axis direction is larger than the dimension of the support body Y-axis connection part 52 in the Y-axis direction (Q2y). As a result, each connection part 41, 42, 51, 52 has a large spring constant relative to the force in the Z-axis direction and essentially functions as a rigid body. By connecting the support body X-axis connection part 51 and the support body Y-axis connection part 52 to the support body 20, displacement of the strain body 30 in the Z-axis direction relative to the support body 20 is suppressed. By connecting the force-bearing body Y-axis connection portion 41 and the force-bearing body X-axis connection portion 42 to the strain body 30, displacement of the force-bearing body 10 in the Z-axis direction relative to the strain body 30 can be suppressed. Therefore, even when a force Fz acts on the force-bearing body 10, elastic deformation of the strain body 30 can be suppressed, and changes in the capacitance values ​​of each capacitor element 61a to 61d can be suppressed. When the strain body 30 is formed in a circular ring shape as in the present embodiment, elastic deformation of the strain body 30 in response to the force Fz can be further suppressed.

[0117] (When Mx acts)

[0118] Description Figure 2 The torque sensor 1 is subjected to a situation where a moment Mx around the X-axis acts on the load-bearing body 10. In this case, a torsional force around the X-axis acts on each load-bearing body X-axis connection part 42 and each supporting body X-axis connection part 51. A bending moment in the Z-axis direction acts on each load-bearing body Y-axis connection part 41 and each supporting body Y-axis connection part 52. However, each load-bearing body Y-axis connection part 41 and each supporting body Y-axis connection part 52 has a large spring constant relative to the force in the Z-axis direction, and essentially functions as a rigid body. Therefore, even when the moment Mx acts on the load-bearing body 10, the elastic deformation of the strain body 30 can be suppressed, and the change in the capacitance value of each capacitor element 61a to 61d can be suppressed. When the strain body 30 is formed in a circular ring shape as in the present embodiment, the elastic deformation of the strain body 30 relative to the moment Mx can be further suppressed.

[0119] (My role)

[0120] Description Figure 2The torque sensor 1 is subjected to a torque My acting on the load-bearing body 10 around the Y-axis. Similar to the case where Mx acts, the X-axis connection parts 42 of each load-bearing body and the X-axis connection parts 51 of each supporting body have a large spring constant relative to the force in the Z-axis direction, and essentially function as a rigid body. Therefore, even when the torque My acts on the load-bearing body 10, the elastic deformation of the strain body 30 can be suppressed, and the change in the capacitance value of each capacitor element 61a to 61d can be suppressed. When the strain body 30 is formed in a circular ring shape as in the present embodiment, the elastic deformation of the strain body 30 relative to the torque My can be further suppressed.

[0121] As described above, the torque sensor 1 of this embodiment is not suitable for detecting forces or moments other than the moment Mz about the Z axis. Therefore, the moment Mz about the Z axis can be detected with high accuracy.

[0122] As described above, according to this embodiment, the Y-axis connection portion 41 of the force-bearing body connecting the force-bearing body 10 and the strain body 30 is arranged on the positive and negative sides of the Y-axis relative to the strain body 30, and the X-axis connection portion 51 of the support body connecting the strain body 30 and the support body 20 is arranged on the positive and negative sides of the X-axis relative to the support body 20. The strain body 30 includes: four deformable bodies 31a to 31d including a displacement portion 35 that displaces in the Z-axis direction due to elastic deformation, and the detection element 60 includes: capacitor elements 61a to 61d that detect changes in capacitance values ​​through the displacement of the displacement portion 35 of each deformable body 31a to 31d in the Z-axis direction. Thus, when a moment Mz about the Z-axis acts on the force-bearing body 10, a tensile force or a compressive force can be applied to each deformable body 31a to 31d of the strain body 30 arranged in the first to fourth quadrants. Therefore, the displaceable portion 35 of each deformable body 31a to 31d can be displaced in the Z-axis direction, allowing the displaceable electrodes 62 and fixed electrodes 63 constituting the capacitive elements 61a to 61d to be arranged so as to face each other in the Z-axis direction. In this case, the opposing surfaces of the displaceable electrodes 62 and fixed electrodes 63 can be arranged along the XY plane, facilitating alignment of the displaceable electrodes 62 and fixed electrodes 63. Alternatively, the four fixed electrodes 63 disposed on the electrode support 80 can be integrated with a common fixed electrode, facilitating alignment of the displaceable electrodes 62 and fixed electrodes 63. Consequently, the production efficiency of the torque sensor 1 can be improved.

[0123] Furthermore, according to this embodiment, the support body 20 is positioned inside the force-receiving body 10 when viewed along the Z-axis. This allows the force-receiving body 10, the strain body 30, and the support body 20 to be positioned along the XY plane. Consequently, the thickness (Z-axis dimension) of the torque sensor 1 can be reduced, allowing the torque sensor 1 to be made thinner.

[0124] In addition, according to the present embodiment, the dimension of the Y-axis connection portion 41 of the force-bearing body in the Z-axis direction is larger than the dimension (P1y) of the Y-axis connection portion 41 of the force-bearing body. In addition, the dimension of the X-axis connection portion 51 of the support body in the Z-axis direction is larger than the dimension (Q1x) of the X-axis connection portion 51 of the support body. Thus, the force-bearing body Y-axis connection portion 41 and the support body X-axis connection portion 51 can essentially function as a rigid body with respect to the force in the Z-axis direction. Therefore, even when a force Fz in the Z-axis direction is applied to the force-bearing body 10, the elastic deformation of each deformable body 31a to 31d of the strain body 30 can be suppressed. Similarly, even when a moment Mx around the X-axis and a moment My around the Y-axis are applied to the force-bearing body 10, the elastic deformation of each deformable body 31a to 31d of the strain body 30 can be suppressed. Therefore, even when the force Fz, moment Mx, or moment My acts, changes in the capacitance values ​​of the capacitive elements 61 a to 61 d can be suppressed, and detection of the force Fz, moment Mx, and moment My can be suppressed.

[0125] In addition, according to the present embodiment, the force-bearing body X-axis connection portion 42 connecting the force-bearing body 10 and the strain body 30 is arranged on the positive side and the negative side of the X-axis relative to the strain body 30. The support body X-axis connection portion 51 connecting the strain body 30 and the support body 20 is arranged on the positive side and the negative side of the X-axis relative to the support body 20. The force-bearing body X-axis connection portion 42 and the support body X-axis connection portion 51 extend along the X-axis respectively. Thus, even when a force Fx in the X-axis direction is applied to the force-bearing body 10, the force-bearing body X-axis connection portion 42 and the support body X-axis connection portion 51 can essentially function as a rigid body, and can suppress the elastic deformation of each deformable body 31a to 31d of the strain body 30. Therefore, even when a force Fx in the X-axis direction is applied, the change in the capacitance value of each capacitor element 61a to 61d can be suppressed, and the detection of the force Fx can be suppressed.

[0126] In addition, according to the present embodiment, the force-bearing body Y-axis connection portion 41 connecting the force-bearing body 10 and the strain body 30 is arranged on the positive side and the negative side of the Y-axis relative to the strain body 30. The supporting body Y-axis connection portion 52 connecting the strain body 30 and the supporting body 20 is arranged on the positive side and the negative side of the Y-axis relative to the supporting body 20. The force-bearing body Y-axis connection portion 41 and the supporting body Y-axis connection portion 52 extend along the Y-axis respectively. Thus, even when a force Fy in the Y-axis direction is applied to the force-bearing body 10, the force-bearing body Y-axis connection portion 41 and the supporting body Y-axis connection portion 52 can essentially function as a rigid body, and can suppress the elastic deformation of each deformable body 31a to 31d of the strain body 30. Therefore, even when a force Fy in the Y-axis direction is applied, the change in the capacitance value of each capacitor element 61a to 61d can be suppressed, and the detection of the force Fy can be suppressed.

[0127] In addition, according to the present embodiment, the dimension of the X-axis connection portion 42 of the force-bearing body in the Z-axis direction is larger than the dimension (P2x) of the X-axis connection portion 42 of the force-bearing body. In addition, the dimension of the Y-axis connection portion 52 of the support body in the Z-axis direction is larger than the dimension (Q2y) of the Y-axis connection portion 52 of the support body. Thus, the force-bearing body X-axis connection portion 42 and the support body Y-axis connection portion 52 can essentially function as a rigid body with respect to the force in the Z-axis direction. Therefore, even when a force Fz in the Z-axis direction is applied to the force-bearing body 10, the elastic deformation of each deformable body 31a to 31d of the strain body 30 can be further suppressed. Similarly, even when a moment Mx around the X-axis and a moment My around the Y-axis are applied to the force-bearing body 10, the elastic deformation of each deformable body 31a to 31d of the strain body 30 can be further suppressed. Therefore, even when the force Fz, moment Mx, or moment My acts, changes in the capacitance values ​​of the capacitive elements 61a to 61d can be further suppressed, and detection of the force Fz, moment Mx, and moment My can be further suppressed.

[0128] In addition, according to this embodiment, the dimension (P2y) of the load-bearing body X-axis connection portion 42 in the Y-axis direction is smaller than the dimension (P1x) of the load-bearing body Y-axis connection portion 41 in the X-axis direction, and the dimension (Q2x) of the support body Y-axis connection portion 52 in the X-axis direction is smaller than the dimension (Q1y) of the support body X-axis connection portion 51 in the Y-axis direction. As a result, when a moment Mz around the Z-axis acts, the load-bearing body Y-axis connection portion 41 and the support body X-axis connection portion 51 can essentially function as a rigid body, and the load-bearing body X-axis connection portion 42 and the support body Y-axis connection portion 52 can be easily elastically deformed. Therefore, it is easy to apply a tensile force or a compressive force to each deformable body 31a to 31d of the strain body 30 arranged in the first quadrant to the fourth quadrant. As a result, it is easy to displace each displacement portion 35 of each deformable body 31a to 31d in the Z-axis direction, and it is easy to detect changes in the capacitance values ​​of the capacitor elements 61a to 61d.

[0129] Furthermore, according to this embodiment, the strain body 30 is formed in a circular ring shape when viewed along the Z-axis. This allows the deformable bodies 31a to 31d to be connected to one another. Therefore, even when a force or moment other than the moment Mz about the Z-axis is applied, elastic deformation of the deformable bodies 31a to 31d of the strain body 30 can be suppressed. As a result, even when a force or moment other than the moment Mz is applied, changes in the capacitance values ​​of the capacitor elements 61a to 61d can be suppressed, and detection of forces or moments other than the moment Mz can be suppressed.

[0130] Furthermore, in the above embodiment, the load-bearing body 10 and the strain body 30 are connected via the load-bearing body X-axis connection portion 42, and the strain body 30 and the support body 20 are connected via the support body Y-axis connection portion 52. However, the present invention is not limited thereto.

[0131] For example, Figure 11 As shown, it is also possible that the strain body 30 is not connected to the support body 20 at the position where the force-bearing body Y-axis connection portion 41 is connected in the strain body 30. That is, it is also possible that the first strain body connection portion 32a and the third strain body connection portion 32c are not connected by Figure 2 The support body Y-axis connection portion 52 is connected to the support body 20 as shown. In addition, the force-bearing body 10 and the strain body 30 may not be connected at the position connected by the support body X-axis connection portion 51 in the strain body 30. That is, the second strain body connection portion 32b and the fourth strain body connection portion 32d may not be connected by Figure 2 The load-bearing body X-axis connection portion 42 as shown is connected to the load-bearing body 10. Figure 11 Yes Figure 2 A top view of a modified example of the torque sensor.

[0132] exist Figure 11 In the torque sensor 1 shown, the load-bearing body 10 and the strain body 30 are connected via the load-bearing body Y-axis connection portion 41, and the strain body 30 and the support body 20 are connected via the support body X-axis connection portion 51. Consequently, when a moment Mz about the Z-axis acts, a tensile or compressive force can be applied to each of the deformable bodies 31a to 31d of the strain body 30 arranged in the first to fourth quadrants. Consequently, the displaceable portion 35 of each deformable body 31a to 31d can be displaced in the Z-axis direction, and the displaceable electrodes 62 and fixed electrodes 63 constituting the capacitor elements 61a to 61d can be arranged so as to face each other in the Z-axis direction. In this case, the opposing surfaces of the displaceable electrodes 62 and fixed electrodes 63 can be arranged along the XY plane, facilitating alignment of the displaceable electrodes 62 and fixed electrodes 63. Consequently, the production efficiency of the torque sensor 1 can be improved.

[0133] Like this, according to Figure 11 In the illustrated modification, the straining body 30 is not connected to the support body 20 at the location where the Y-axis connection portion 41 of the straining body 30 is connected, and the force-bearing body 10 is not connected to the straining body 30 at the location where the X-axis connection portion 51 of the support is connected. This improves the production efficiency of the torque sensor 1 and simplifies the structure of the torque sensor 1, thereby achieving a lower price.

[0134] In the above embodiment, an example has been described in which one force-bearing body Y-axis connection portion 41 is disposed on each of the positive and negative sides of the Y-axis relative to the strain body 30 . However, the present invention is not limited thereto.

[0135] For example, Figure 12 As shown, each load-bearing body Y-axis connecting portion 41 may also include two load-bearing body Y-axis dividing portions 41 a. Figure 12 Yes Figure 2 A top view of another modified example of the torque sensor.

[0136] exist Figure 12 In the deformation example shown, two force-bearing body Y-axis divisions 41a are respectively arranged on the positive side of the Y-axis and the negative side of the Y-axis relative to the strain body 30. Alternatively, the force-bearing body Y-axis division 41a is formed in a rectangular shape along the X-axis, the Y-axis and the Z-axis. Alternatively, the dimension of the force-bearing body Y-axis division 41a in the X-axis direction is larger than the dimension (P2y) of the force-bearing body X-axis connection part 42 in the Y-axis direction. Alternatively, the two force-bearing body Y-axis divisions 41a constituting a force-bearing body Y-axis connection part 41 are separated from each other in the X-axis direction and parallel to each other. Alternatively, the two force-bearing body Y-axis divisions 41a constituting a force-bearing body Y-axis connection part 41 are symmetrically arranged relative to the Y-axis. That is, one of the two force-bearing body Y-axis divisions 41a is arranged on the positive side of the X-axis relative to the Y-axis, and the other is arranged on the negative side of the X-axis relative to the Y-axis. In addition, the two Y-axis split parts 41a of the force-bearing body constituting the Y-axis connecting part 41 of the force-bearing body may be arranged asymmetrically with respect to the Y-axis. Alternatively, the two Y-axis split parts 41a of the force-bearing body may be arranged on one of the positive side and the negative side of the X-axis relative to the Y-axis, but not on the other side. Figure 12 As shown, the size of the Y-axis connection portion 41 of the force-bearing body in the X-axis direction ( Figure 12 P1x) can also be the size of the two force-bearing body Y-axis division parts 41a in the X-axis direction.

[0137] Likewise, Figure 12 As shown, each support body X-axis connecting portion 51 may also include two support body X-axis divided portions 51 a.

[0138] exist Figure 12In the illustrated modification, two support body X-axis divisions 51a are disposed on the positive side and the negative side of the X-axis relative to the strain body 30. Alternatively, the support body X-axis divisions 51a may be formed in a rectangular shape along the X-axis, Y-axis, and Z-axis. Alternatively, the dimension of the support body X-axis division 51a in the Y-axis direction may be greater than the dimension (Q2x) of the support body Y-axis connection portion 52 in the X-axis direction. Alternatively, the two support body X-axis divisions 51a constituting a support body X-axis connection portion 51 may be separated from each other in the Y-axis direction and parallel to each other. Alternatively, the two support body X-axis divisions 51a constituting a support body X-axis connection portion 51 may be symmetrically disposed with respect to the X-axis. That is, one of the two support body X-axis divisions 51a may be disposed on the positive side of the Y-axis relative to the X-axis, and the other may be disposed on the negative side of the Y-axis relative to the X-axis. Furthermore, the two support body X-axis divisions 51a constituting a support body X-axis connection portion 51 may be asymmetrically disposed with respect to the X-axis. Alternatively, the two support body X-axis division portions 51a may be arranged on one of the positive side and the negative side of the Y axis relative to the X axis, but not on the other side. Figure 12 As shown, the size of the support body X-axis connection portion 51 in the Y-axis direction ( Figure 12 Q1y) may also be the size in the Y-axis direction of the two support body X-axis division portions 51a.

[0139] Thus, according to Figure 12 In the illustrated variation, the Y-axis connection portion 41 of the load-bearing body includes two Y-axis divisions 41a. This increases the rigidity of the Y-axis connection portion 41 when a moment Mz about the Z-axis acts on the load-bearing body 10. Consequently, the displacement portions 35 of the deformable bodies 31a to 31d of the strain body 30 can be easily displaced in the Z-axis direction, making it easier to detect changes in the capacitance values ​​of the capacitor elements 61a to 61d.

[0140] In addition, according to Figure 12 In the illustrated modification, the support body X-axis connection portion 51 includes two support body X-axis divisions 51a. This increases the rigidity of the support body X-axis connection portion 51 when a moment Mz about the Z-axis acts on the load-bearing body 10. Consequently, the displacement portions 35 of the deformable bodies 31a to 31d of the strain body 30 can be easily displaced in the Z-axis direction, making it easier to detect changes in the capacitance values ​​of the capacitor elements 61a to 61d.

[0141] In addition, Figure 12 In the illustrated variation, each load-bearing body Y-axis connection portion 41 may include three or more load-bearing body Y-axis division portions 41a. Similarly, each support body X-axis connection portion 51 may include three or more support body X-axis division portions 51a.

[0142] In addition, Figure 12In the deformation example shown, Figure 11 As shown in the modified example, the load-bearing body 10 and the strain body 30 may not be connected by the load-bearing body X-axis connection portion 42. The strain body 30 and the support body 20 may not be connected by the support body Y-axis connection portion 52.

[0143] In the above embodiment, the deformable bodies 31a to 31d include the first deformable portion 33, the second deformable portion 34, and the displacement portion 35. The first deformable portion 33 and the second deformable portion 34 are inclined relative to the Z-axis and extend linearly when viewed in the radial direction. However, this is not limiting.

[0144] For example, Figure 13A As shown, the deformable bodies 31a to 31d may be continuously curved so as to be convex toward the negative side of the Z axis when viewed in the radial direction. Figure 13A Yes Figure 6 A cross-sectional view of a deformation example of a deformation body.

[0145] exist Figure 13A In the modified example shown, when the moment Mz acts on the load-bearing body 10, a tensile force or a compressive force can be applied to each deformable body 31a to 31d. Therefore, the displacement portion 35 of each deformable body 31a to 31d can be displaced in the Z-axis direction, and the displacement electrodes 62 and the fixed electrodes 63 constituting the capacitor elements 61a to 61d can be arranged to face each other in the Z-axis direction. Figure 13A In the modified example shown, the first deformed portion 33 and the second deformed portion 34 are curved when viewed in the radial direction. Alternatively, the displacement portion 35 and the second deformed portion 34 may be curved when viewed in the radial direction. Figure 6 The displacement portion 35 shown is also formed in a straight line. Figure 13A As shown, the displacement portion 35 may be curved when viewed in the radial direction. In this case, the displacement portion 35 may be provided with a seat 36 for mounting the displacement electrode 62 .

[0146] according to Figure 13A The modified example shown can alleviate stress concentration in the first deforming portion 33 and stress concentration in the second deforming portion 34 , thereby improving the reliability of the torque sensor 1 .

[0147] Moreover, for example, Figure 13BAs shown, the lower surface 33a of the first deformable portion 33 and the end surfaces 32e of the strain-forming connecting portions 32a to 32d may be connected by a curved surface 37. When viewed in the radial direction, the curved surface 37 is curved so as to be convex toward the positive side of the Z axis. In this case, stress concentration on the first deformable portion 33 can be further alleviated. Similarly, the lower surface 34a of the second deformable portion 34 and the end surfaces 32e of the strain-forming connecting portions 32a to 32d may be connected by a curved surface 38. Figure 13B Yes Figure 6 Cross-sectional views of other deformation examples of the deformation body.

[0148] In addition, the torque sensor 1 of the present embodiment may further include a cover 81. For example, Figure 14 As shown, a cover 81 may be installed on the inner peripheral surface 10 c of the force-bearing body 10 . Figure 14 Yes Figure 3 A sectional view of a modified example of the torque sensor, which is equivalent to Figure 2 Figure 2 is a cross-section of the AA line.

[0149] The cover 81 may be attached to the load-bearing body 10 by bolts (not shown) or the like. The cover 81 may have a cover opening 81a. The cover 81 may be formed in a circular ring shape when viewed along the Z axis.

[0150] In this case, the sensor opening 2 of the torque sensor 1 can be prevented from being blocked, and cables and tubes used in the robot can be passed through the sensor opening 2 .

[0151] like Figure 14 As shown, a spacer 82 may be interposed between the cover 81 and the support body 20 .

[0152] In this case, foreign matter such as trash can be prevented from entering the space 83 between the load-bearing body 10 and the support body 20 through the gap between the cover 81 and the support body 20, thereby improving the reliability of the torque sensor 1. The gasket 82 can also be made of a material that is soft enough not to hinder the relative displacement between the load-bearing body 10 and the support body 20 when the moment Mz is applied. The gasket 82 can also be made of silicone rubber, for example. Alternatively, the gasket 82 can be formed into a circular ring shape similar to the support body 20 when viewed along the Z-axis.

[0153] In addition, if Figure 14As shown, a gasket 84 may be provided between the load-bearing body 10 and the electrode support 80. In this case, foreign matter such as garbage can be prevented from invading the space 83 between the load-bearing body 10 and the support 20 from the gap between the load-bearing body 10 and the electrode support 80, thereby improving the reliability of the torque sensor 1. The gasket 84 may be made of a material that is so soft that it does not hinder the relative displacement between the load-bearing body 10 and the support 20 when the moment Mz acts. The gasket 84 may be made of silicone rubber, for example. Alternatively, when viewed along the Z axis, the gasket 84 may be formed in a circular ring shape similar to the load-bearing body 10.

[0154] In addition, in the present embodiment described above, the following example is described: when viewed along the Z axis, the support body 20 is arranged on the inner side of the force-bearing body 10, the force-bearing body 10 is equivalent to the first structure, and the support body 20 is equivalent to the second structure. However, this is not limited to this. For example, when viewed along the Z axis, the force-bearing body 10 may be arranged on the inner side of the support body 20, the force-bearing body 10 is equivalent to the second structure, and the support body 20 is equivalent to the first structure. Alternatively, in this case, the strain body 30 may be arranged between the force-bearing body 10 and the support body 20.

[0155] (Second embodiment)

[0156] Next, use Figure 15 as well as Figure 16 A torque sensor according to a second embodiment of the present invention will be described.

[0157] exist Figure 15 as well as Figure 16 In the second embodiment shown in FIG. 1 , the main difference is that the dimension (P2X) of the X-axis connection portion 42 of the force-bearing body in the X-axis direction is larger than the dimension (P1Y) of the Y-axis connection portion 41 of the force-bearing body in the Y-axis direction, and the dimension (Q2Y) of the Y-axis connection portion 52 of the supporting body in the Y-axis direction is larger than the dimension (Q1X) of the X-axis connection portion 51 of the supporting body. Figures 1 to 14 The first embodiment shown is substantially the same. Figure 15 as well as Figure 16 In, with Figures 1 to 14 The same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0158] Reference Figure 15 The torque sensor 1 according to this embodiment will be described. Figure 15 It is a plan view showing a torque sensor according to a second embodiment.

[0159] In the torque sensor 1 of this embodiment, as Figure 15As shown, the X-axis dimension (P2x) of the load-bearing body X-axis connection portion 42 is greater than the Y-axis dimension (P1y) of the load-bearing body Y-axis connection portion 41. In other words, when viewed along the Z-axis, the length of the load-bearing body X-axis connection portion 42 is greater than the length of the load-bearing body Y-axis connection portion 41. Figure 15 In the embodiment, the dimension (P2y) of the X-axis connecting portion 42 of the force-bearing body in the Y-axis direction is equal to the dimension (P1x) of the Y-axis connecting portion 41 of the force-bearing body in the X-axis direction. Figure 2 As shown, the dimension (P2y) of the X-axis connection portion 42 of the force-bearing body in the Y-axis direction may be smaller than the dimension (P1x) of the Y-axis connection portion 41 of the force-bearing body in the X-axis direction.

[0160] Likewise, the Y-axis dimension (Q2y) of the support body Y-axis connection portion 52 is greater than the X-axis dimension (Q1x) of the support body X-axis connection portion 51. In other words, when viewed along the Z-axis, the length of the support body Y-axis connection portion 52 is greater than the length of the support body X-axis connection portion 51. Figure 15 In the embodiment, the dimension (Q2x) of the support body Y-axis connection portion 52 in the X-axis direction is equal to the dimension (Q1y) of the support body X-axis connection portion 51 in the Y-axis direction. Figure 2 As shown, the dimension (Q2x) of the support body Y-axis connection portion 52 in the X-axis direction may be smaller than the dimension (Q1y) of the support body X-axis connection portion 51 in the Y-axis direction.

[0161] like Figure 15 As shown, it is also possible that, when viewed along the Z-axis, the strain body 30 is formed in an elliptical ring shape with a major axis along the Y-axis and a minor axis along the X-axis. In this case, the force-bearing body 10, the strain body 30 and the supporting body 20 may also be formed concentrically. The width of the strain body 30 may also be constant throughout the entire circumference. In addition, in this embodiment, it is also possible that, when viewed along the Z-axis, each deformable body 31a to 31d is located at the midpoint between the corresponding force-bearing body Y-axis connection portion 41 (or the supporting body Y-axis connection portion 52) and the corresponding force-bearing body X-axis connection portion 42 (or the supporting body X-axis connection portion 51) in the direction along the strain body 30.

[0162] The position of the straining body 30 to which the Y-axis connection portion 41 of the load-bearing body is connected is arranged closer to the load-bearing body 10 than the support body 20. In addition, the position of the straining body 30 to which the X-axis connection portion 51 of the support body is connected is arranged closer to the support body 20 than the load-bearing body 10. In this way, the position of the straining body 30 to which the Y-axis connection portion 41 of the load-bearing body is connected is arranged closer to the load-bearing body 10 than the position to which the X-axis connection portion 42 of the load-bearing body is connected. As a result, the dimension (P2x) of the X-axis direction of the load-bearing body X-axis connection portion 42 can be made larger than the dimension (P1y) of the Y-axis direction of the load-bearing body Y-axis connection portion 41. In addition, the position of the straining body 30 to which the X-axis connection portion 51 of the support body is connected is arranged closer to the support body 20 than the position to which the Y-axis connection portion 52 of the support body is connected. As a result, the dimension (Q2y) of the Y-axis direction of the support body Y-axis connection portion 52 can be made larger than the dimension (Q1x) of the X-axis direction of the support body X-axis connection portion 51.

[0163] As mentioned above, the dimension (P2x) of the X-axis direction of the force-bearing body X-axis connection part 42 is greater than the dimension (P1y) of the Y-axis direction of the force-bearing body Y-axis connection part 41. Therefore, when the moment Mz around the Z-axis acts, the spring constant of the force-bearing body X-axis connection part 42 is smaller than that of the force-bearing body Y-axis connection part 41, and elastic deformation is easily generated. The force-bearing body Y-axis connection part 41 has a large spring constant and essentially functions as a rigid body. In addition, the dimension (Q2y) of the Y-axis direction of the support body Y-axis connection part 52 is greater than the dimension (Q1x) of the X-axis direction of the support body X-axis connection part 51. Therefore, when the moment Mz around the Z-axis acts, the spring constant of the support body Y-axis connection part 52 is smaller than that of the support body X-axis connection part 51, and elastic deformation is easily generated. The support body X-axis connection part 51 has a large spring constant and essentially functions as a rigid body.

[0164] When the moment Mz about the Z axis acts, the deformation bodies 31a to 31d of the deformation bodies 30 arranged in the first to fourth quadrants can be given Figure 8 As shown in the figure, the displacement portion 35 of each deformable body 31a to 31d can be displaced in the Z-axis direction, and the displaceable electrodes 62 and fixed electrodes 63 constituting the capacitive elements 61a to 61d can be arranged so as to face each other in the Z-axis direction. In this case, the facing surfaces of the displaceable electrodes 62 and fixed electrodes 63 can be arranged along the XY plane, making it easier to align the displaceable electrodes 62 and fixed electrodes 63. As a result, the production efficiency of the torque sensor 1 can be improved.

[0165] As described above, according to this embodiment, the dimension (P2x) of the load-bearing body X-axis connection portion 42 in the X-axis direction is greater than the dimension (P1y) of the load-bearing body Y-axis connection portion 41 in the Y-axis direction, and the dimension (Q2y) of the support body Y-axis connection portion 52 in the Y-axis direction is greater than the dimension (Q1x) of the support body X-axis connection portion 51 in the X-axis direction. Thus, when a moment Mz about the Z-axis acts, the load-bearing body Y-axis connection portion 41 and the support body X-axis connection portion 51 can essentially function as rigid bodies, and the load-bearing body X-axis connection portion 42 and the support body Y-axis connection portion 52 can be easily elastically deformed. Therefore, it is easy to apply a tensile force or a compressive force to each deformable body 31a to 31d of the strain body 30 arranged in the first to fourth quadrants. As a result, it is easy to displace each displacement portion 35 of each deformable body 31a to 31d in the Z-axis direction, and it is easy to detect changes in the capacitance values ​​of the capacitor elements 61a to 61d.

[0166] In addition, according to this embodiment, when viewed along the Z-axis, the strain body 30 is formed in an elliptical ring shape with a major axis along the Y-axis and a minor axis along the X-axis. Thus, the deformable bodies 31a to 31d can be connected to each other. Therefore, even when a force or moment other than the moment Mz about the Z-axis acts, the elastic deformation of the deformable bodies 31a to 31d of the strain body 30 can be suppressed. As a result, even when a force or moment other than the moment Mz acts, changes in the capacitance values ​​of the capacitor elements 61a to 61d can be suppressed, and detection of forces or moments other than the moment Mz can be suppressed. In addition, by forming the strain body 30 in an elliptical ring shape as described above, the dimension (P2x) of the X-axis connection portion 42 of the force-bearing body in the X-axis direction can be larger than the dimension (P1y) of the Y-axis connection portion 41 of the force-bearing body in the Y-axis direction, and the dimension (Q2y) of the Y-axis connection portion 52 of the supporting body in the Y-axis direction can be larger than the dimension (Q1x) of the X-axis connection portion 51 of the supporting body.

[0167] In the above embodiment, an example is described in which the strain body 30 is formed in an elliptical ring shape having a major axis along the Y axis and a minor axis along the X axis when viewed along the Z axis. However, the present invention is not limited thereto.

[0168] For example, Figure 16 As shown, the strain body 30 may be formed in a circular ring shape when viewed along the Z axis and may be formed concentrically with the load-bearing body 10 and the support body 20 . Figure 16 Yes Figure 15 A top view of a modified example of the torque sensor.

[0169] In this case, a root portion 85 may be sandwiched between the Y-axis connection portion 41 of the load-bearing body and the strain body 30. The root portion 85 may also be formed so that the spring constant is large relative to the force or torque acting on the load-bearing body 10, and it essentially functions as a rigid body. The X-axis connection portion 42 of the load-bearing body may also be directly connected to the strain body 30. Thus, the dimension (P2x) of the X-axis direction of the load-bearing body X-axis connection portion 42 can also be made larger than the dimension (P1y) of the Y-axis direction of the load-bearing body Y-axis connection portion 41. It is also possible that the root portion 85 is not sandwiched between the Y-axis connection portion 41 of the load-bearing body and the strain body 30, but is sandwiched between the load-bearing body 10 and the Y-axis connection portion 41 of the load-bearing body. Alternatively, it is also possible that the root portion 85 is sandwiched between both the load-bearing body 10 and the Y-axis connection portion 41 of the load-bearing body and between the Y-axis connection portion 41 of the load-bearing body and the strain body 30.

[0170] Similarly, a root portion 86 similar to the above-described root portion 85 may be interposed between the straining body 30 and the support body X-axis connection portion 51. The root portion 86 may be interposed between the support body X-axis connection portion 51 and the support body 20 rather than between the straining body 30 and the support body X-axis connection portion 51. Alternatively, the root portion 86 may be interposed between both the straining body 30 and the support body X-axis connection portion 51 and between the support body X-axis connection portion 51 and the support body 20.

[0171] (Third embodiment)

[0172] Next, use Figure 17 as well as Figure 18 A torque sensor according to a third embodiment of the present invention will be described.

[0173] exist Figure 17 as well as Figure 18 In the third embodiment shown, the main difference is that the Y-axis connection portion 41 of the force-bearing body is formed at the connection position between the force-bearing body 10 and the strain body 30, and the X-axis connection portion 51 of the support body is formed at the connection position between the strain body 30 and the support body 20. Figures 1 to 14 The first embodiment shown is substantially the same. Figure 17 as well as Figure 18 In, with Figures 1 to 14 The same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof will be omitted.

[0174] Reference Figure 17 The torque sensor 1 according to this embodiment will be described. Figure 17 It is a plan view showing a torque sensor according to a third embodiment.

[0175] In the torque sensor 1 of this embodiment, as Figure 17As shown, the Y-axis connection portion 41 of the force-bearing body is formed at the connection position between the force-bearing body 10 and the strain body 30. Alternatively, when viewed along the Z axis, the outer peripheral surface 30c of the strain body 30 is formed in an elliptical shape with a long axis along the Y axis and a short axis along the X axis. Alternatively, when viewed along the Z axis, the inner peripheral surface 30d of the strain body 30 is formed in an elliptical shape with a long axis along the Y axis and a short axis along the X axis. Figure 17 In the example shown, the width of the strain body 30 is constant throughout the entire circumference, but the present invention is not limited thereto. If it is possible to suppress the detection of forces or moments other than the moment Mz, the width of the strain body 30 may not be constant. Figure 17 The width of the strain body 30 shown is greater than Figure 15 The width of the strain body 30 shown in FIG. 1 is large, but the width of the strain body 30 can be any if the aforementioned load-bearing body Y-axis connection portion 41 and the supporting body X-axis connection portion 51 described later can be formed. The load-bearing body 10 and the strain body 30 are connected by the load-bearing body X-axis connection portion 42.

[0176] The first strain body connection portion 32a of the strain body 30 is connected to the inner circumferential surface 10c of the load-bearing body 10. The dimension (P2y) of the load-bearing body X-axis connection portion 42 in the Y-axis direction is smaller than the dimension (P1x) of the load-bearing body Y-axis connection portion 41 in the X-axis direction. As a result, the load-bearing body Y-axis connection portion 41 has a large spring constant relative to the moment Mz about the Z axis and essentially functions as a rigid body. The load-bearing body X-axis connection portion 42 is easily elastically deformed in response to the moment Mz about the Z axis.

[0177] The support body X-axis connection portion 51 is formed at the connection position between the strain body 30 and the support body 20. Alternatively, when viewed along the Z axis, the outer peripheral surface 20c of the support body 20 may be formed in an elliptical shape with a major axis along the X axis and a minor axis along the Y axis. Alternatively, when viewed along the Z axis, the inner peripheral surface 20d of the support body 20 may be formed in a circular shape. The inner peripheral surface 20d divides the sensor opening 2. Figure 17 In the embodiment, a circular sensor opening 2 of the torque sensor 1 is formed inside the support body 20 . The strain body 30 and the support body 20 are connected via a support body Y-axis connection portion 52 .

[0178] The support body 20 is connected to the inner circumferential surface 30d of the strain body 30 (the second strain body connection portion 32b and the fourth strain body connection portion 32d). The dimension (Q2x) of the support body Y-axis connection portion 52 in the X-axis direction is smaller than the dimension (Q1y) of the support body X-axis connection portion 51 in the Y-axis direction. As a result, the support body X-axis connection portion 51 has a large spring constant relative to the moment Mz about the Z-axis, essentially functioning as a rigid body. The support body Y-axis connection portion 52 is easily elastically deformed in response to the moment Mz about the Z-axis.

[0179] When the moment Mz about the Z axis acts, the deformation bodies 31a to 31d of the deformation bodies 30 arranged in the first to fourth quadrants can be given Figure 8 As shown in the figure, the displacement portion 35 of each deformable body 31a to 31d can be displaced in the Z-axis direction, and the displaceable electrodes 62 and fixed electrodes 63 constituting the capacitive elements 61a to 61d can be arranged so as to face each other in the Z-axis direction. In this case, the opposing surfaces of the displaceable electrodes 62 and fixed electrodes 63 can be arranged along the XY plane, making it easier to align the displaceable electrodes 62 and fixed electrodes 63. As a result, the production efficiency of the torque sensor 1 can be improved.

[0180] As described above, according to the present embodiment, the Y-axis connection portion 41 of the load-bearing body is formed at the connection position between the load-bearing body 10 and the strain body 30, and the X-axis connection portion 51 of the support body is formed at the connection position between the strain body 30 and the support body 20. Thus, when the moment Mz around the Z-axis acts, the Y-axis connection portion 41 of the load-bearing body and the X-axis connection portion 51 of the support body can essentially function as a rigid body, and the X-axis connection portion 42 of the load-bearing body and the Y-axis connection portion 52 of the support body can be easily elastically deformed. Therefore, it is easy to apply a tensile force or a compressive force to each deformable body 31a to 31d of the strain body 30 arranged in the first quadrant to the fourth quadrant. As a result, it is easy to displace each displacement portion 35 of each deformable body 31a to 31d in the Z-axis direction, and it is easy to detect the change in the capacitance value of the capacitor elements 61a to 61d.

[0181] Furthermore, according to this embodiment, the outer circumferential surface 30c of the straining body 30 is formed in an elliptical shape, having a major axis along the Y axis and a minor axis along the X axis, when viewed along the Z axis. This allows the straining body 30 to be connected to the inner circumferential surface 10c of the load-bearing body 10, and allows the load-bearing body Y-axis connection portion 41 to be formed at the connection between the load-bearing body 10 and the straining body 30. Consequently, the load-bearing body Y-axis connection portion 41 can function substantially as a rigid body with respect to the moment Mz about the Z axis.

[0182] Furthermore, according to this embodiment, the outer peripheral surface 20c of the support body 20 is formed in an elliptical shape, having a major axis along the X-axis and a minor axis along the Y-axis, when viewed along the Z-axis. This allows the support body 20 to be connected to the inner peripheral surface 30d of the straining body 30, and allows the support body X-axis connection portion 51 to be formed at the connection point between the straining body 30 and the support body 20. Consequently, the support body X-axis connection portion 51 can function substantially as a rigid body with respect to the moment Mz about the Z-axis.

[0183] In addition, according to this embodiment, the dimension (P2Y) of the load-bearing body X-axis connection portion 42 in the Y-axis direction is smaller than the dimension (P1x) of the load-bearing body Y-axis connection portion 41 in the X-axis direction, and the dimension (Q2x) of the support body Y-axis connection portion 52 in the X-axis direction is smaller than the dimension (Q1y) of the support body X-axis connection portion 51 in the Y-axis direction. As a result, when the moment Mz around the Z-axis acts, the load-bearing body Y-axis connection portion 41 and the support body X-axis connection portion 51 can essentially function as a rigid body, and the load-bearing body X-axis connection portion 42 and the support body Y-axis connection portion 52 can be easily elastically deformed. Therefore, it is easy to apply tensile force or compressive force to each deformable body 31a~31d of the strain body 30 arranged in the first quadrant to the fourth quadrant. As a result, it is easy to displace each displacement portion 35 of each deformable body 31a~31d in the Z-axis direction, and it is easy to detect changes in the capacitance values ​​of the capacitor elements 61a~61d.

[0184] In addition, in the above-mentioned embodiment, the following example is described: when viewed along the Z axis, the outer peripheral surface 20c of the support body 20 is formed in an elliptical shape so as to have a major axis along the X axis and a minor axis along the Y axis. However, this is not limited to this. For example, Figure 2 As shown in FIG. 2 , the outer peripheral surface 20 c of the support body 20 may be formed in a circular shape. Alternatively, the inner peripheral surface 20 d of the support body 20 may be formed in an elliptical shape having a major axis along the X axis and a minor axis along the Y axis when viewed along the Z axis.

[0185] In the above embodiment, the example in which the load-bearing body 10 and the strain body 30 are connected via the load-bearing body X-axis connection portion 42 and the strain body 30 and the support body 20 are connected via the support body Y-axis connection portion 52 is described. However, the present invention is not limited thereto.

[0186] For example, Figure 18 As shown, it is also possible that the strain body 30 is not connected to the support body 20 at the position where the force-bearing body Y-axis connection part 41 is connected in the strain body 30. That is, the first strain body connection part 32a and the third strain body connection part 32c may not be connected by Figure 17 The support body Y-axis connection portion 52 shown is connected to the support body 20. In addition, the force-bearing body 10 and the strain body 30 may not be connected at the position connected by the support body X-axis connection portion 51 in the strain body 30. That is, the second strain body connection portion 32b and the fourth strain body connection portion 32d may not be connected by Figure 17 The load-bearing body X-axis connection portion 42 as shown is connected to the load-bearing body 10. Figure 18 Yes Figure 17 A top view of a modified example of the torque sensor.

[0187] exist Figure 18 In the torque sensor shown, the load-bearing body 10 and the strain body 30 are connected via the load-bearing body Y-axis connection portion 41, and the strain body 30 and the support body 20 are connected via the support body X-axis connection portion 51. Consequently, when a moment Mz about the Z-axis acts, a tensile or compressive force can be applied to each of the deformable bodies 31a to 31d of the strain body 30 arranged in the first to fourth quadrants. Consequently, the displaceable portion 35 of each deformable body 31a to 31d can be displaced in the Z-axis direction, and the displaceable electrodes 62 and fixed electrodes 63 constituting the capacitor elements 61a to 61d can be arranged so as to face each other in the Z-axis direction. In this case, the opposing surfaces of the displaceable electrodes 62 and fixed electrodes 63 can be arranged along the XY plane, facilitating alignment of the displaceable electrodes 62 and fixed electrodes 63. Consequently, the production efficiency of the torque sensor 1 can be improved.

[0188] So according to Figure 18 In the illustrated modification, the straining body 30 is not connected to the support body 20 at the location where the Y-axis connection portion 41 of the straining body 30 is connected, and the force-bearing body 10 is not connected to the straining body 30 at the location where the X-axis connection portion 51 of the support is connected. This improves the production efficiency of the torque sensor 1 and simplifies the structure of the torque sensor 1, thereby achieving a lower price.

[0189] (Fourth embodiment)

[0190] Next, use Figures 19 to 22 A torque sensor according to a fourth embodiment of the present invention will be described.

[0191] exist Figures 19 to 22 In the fourth embodiment shown, the main difference is that the strain body 30 is arranged on the negative side of the Z axis relative to the load-bearing body 10, and the support body 20 is arranged on the negative side of the Z axis relative to the strain body 30. Figures 1 to 14 The first embodiment shown is substantially the same. Figures 19 to 22 In, with Figures 1 to 14 The same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0192] Reference Figures 19 to 21 The torque sensor 1 according to this embodiment will be described. Figure 19 It is a cross-sectional view showing a torque sensor according to a fourth embodiment. Figure 20 yes Figure 19 BB line cross-sectional view, Figure 21 yes Figure 19 CC line cross-sectional view.

[0193] In the torque sensor 1 of this embodiment, as Figure 19As shown, the strain body 30 is arranged on the negative side of the Z axis relative to the load-bearing body 10. The support body 20 is arranged on the negative side of the Z axis relative to the strain body 30. That is, the load-bearing body 10, the strain body 30 and the support body 20 are stacked in the Z axis direction. When viewed along the Z axis, the load-bearing body 10, the strain body 30 and the support body 20 can also be formed in a circular ring shape, or can be formed concentrically with each other. Figure 20 as well as Figure 21 As shown, the sensor opening 2 of the torque sensor 1 is formed on the inner side of the force-bearing body 10 , the inner side of the strain body 30 , and the inner side of the support body 20 .

[0194] like Figure 19 As shown, the Y-axis connection portion 41 of the load-bearing body of this embodiment is arranged between the load-bearing body 10 and the strain body 30 in the Z-axis direction. Figure 20 As shown, when viewed along the Z axis, the Y-axis connection portion 41 of the force-bearing body overlaps with the force-bearing body 10 and the strain body 30. The Y-axis connection portion 41 of the force-bearing body extends along the Y axis and extends along the Z axis. In this embodiment, the Y-axis connection portion 41 of the force-bearing body is formed in a rectangular shape along the X axis, the Y axis and the Z axis. The dimension of the Y-axis connection portion 41 of the force-bearing body in the Z axis direction may also be larger than the dimension (P1y) of the Y-axis connection portion 41 of the force-bearing body in the Y axis direction, but may not be larger than the dimension (P1y) of the Y-axis connection portion 41 of the force-bearing body in the Y axis direction.

[0195] like Figure 19 As shown, the X-axis connection portion 42 of the load-bearing body of this embodiment is arranged between the load-bearing body 10 and the strain body 30 in the Z-axis direction. Figure 20 As shown, when viewed along the Z axis, the X-axis connection portion 42 of the force-bearing body overlaps with the force-bearing body 10 and the strain body 30. The X-axis connection portion 42 of the force-bearing body extends along the X axis and extends along the Z axis. In this embodiment, the X-axis connection portion 42 of the force-bearing body is formed in a rectangular shape along the X axis, the Y axis and the Z axis. The dimension of the X-axis direction of the force-bearing body X-axis connection portion 42 may be larger than the dimension (P2x) of the X-axis direction of the force-bearing body X-axis connection portion 42, or may not be larger than the dimension (P2x) of the X-axis direction of the force-bearing body X-axis connection portion 42.

[0196] In this embodiment, the displacement portion 35 of the deformable bodies 31a to 31d of the strain body 30 may also be positioned opposite the upper surface 20a of the support body 20. In this case, the fixed electrodes 63 constituting the capacitor elements 61a to 61d may also be provided on the upper surface 20a of the support body 20. However, this is not limiting, and the displacement portion 35 may also be positioned opposite the lower surface 10b of the load-bearing body 10. In this case, the fixed electrode 63 may also be provided on the lower surface 10b of the load-bearing body 10.

[0197] like Figure 20As shown, in this embodiment, the dimension (P2y) of the X-axis connection portion 42 of the force-bearing body in the Y-axis direction is smaller than the dimension (P1x) of the Y-axis connection portion 41 of the force-bearing body in the X-axis direction.

[0198] like Figure 19 As shown, the support body X-axis connection portion 51 of this embodiment is arranged between the strain body 30 and the support body 20 in the Z-axis direction. Figure 21 As shown, when viewed along the Z-axis, the support body X-axis connection portion 51 overlaps with the straining body 30 and the support body 20. The support body X-axis connection portion 51 extends along the X-axis and also along the Z-axis. In this embodiment, the support body X-axis connection portion 51 is formed in a rectangular shape along the X-axis, Y-axis, and Z-axis. The dimension of the support body X-axis connection portion 51 in the Z-axis direction can be larger than the dimension (Q1x) of the support body X-axis connection portion 51 in the X-axis direction, but it does not need to be larger than the dimension (Q1x) of the support body X-axis connection portion 51 in the X-axis direction.

[0199] like Figure 19 As shown, the support body Y-axis connection portion 52 of this embodiment is arranged between the strain body 30 and the support body 20 in the Z-axis direction. Figure 21 As shown, when viewed along the Z-axis, the support body Y-axis connection portion 52 overlaps with the straining body 30 and the support body 20. The support body Y-axis connection portion 52 extends along the Y-axis and also extends along the Z-axis. In this embodiment, the support body Y-axis connection portion 52 is formed in a rectangular shape along the X-axis, Y-axis, and Z-axis. The dimension of the support body Y-axis connection portion 52 in the Z-axis direction may be larger than the dimension (Q2y) of the support body Y-axis connection portion 52 in the Y-axis direction, but it does not need to be larger than the dimension (Q2y) of the support body Y-axis connection portion 52 in the Y-axis direction.

[0200] like Figure 21 As shown, in this embodiment, the dimension (Q2x) of the support body Y-axis connection portion 52 in the X-axis direction is smaller than the dimension (Q1y) of the support body X-axis connection portion 51 in the Y-axis direction.

[0201] When the moment Mz around the Z axis acts, the Y-axis connection portion 41 of the load-bearing body functions substantially as a rigid body, and the X-axis connection portion 42 of the load-bearing body elastically deforms. In addition, the X-axis connection portion 51 of the support body functions substantially as a rigid body, and the Y-axis connection portion 52 of the support body elastically deforms. Thus, it is possible to impart a force to each of the deformable bodies 31a to 31d of the strain bodies 30 arranged in the first to fourth quadrants. Figure 8As shown in the figure, the displacement portion 35 of each deformable body 31a to 31d can be displaced in the Z-axis direction, and the displaceable electrodes 62 and fixed electrodes 63 constituting the capacitive elements 61a to 61d can be arranged so as to face each other in the Z-axis direction. In this case, the facing surfaces of the displaceable electrodes 62 and fixed electrodes 63 can be arranged along the XY plane, making it easier to align the displaceable electrodes 62 and fixed electrodes 63. As a result, the production efficiency of the torque sensor 1 can be improved.

[0202] Thus, according to this embodiment, the support body 20 is positioned on the negative side of the Z-axis relative to the strain body 30. This allows the sensor opening 2 of the torque sensor 1 to be enlarged. When the torque sensor 1 is used in a robot, cables and tubes used in the robot are often passed through the sensor opening 2 of the torque sensor 1. Therefore, by stacking the strain body 30 and the support body 20 in the Z-axis direction, as in this embodiment, the sensor opening 2 of the torque sensor 1 can be enlarged, making it easier to pass cables and tubes through. This improves the usability of the torque sensor 1.

[0203] Furthermore, according to this embodiment, the strain body 30 is positioned on the negative side of the Z axis relative to the load-bearing body 10. This allows the sensor opening 2 of the torque sensor 1 to be further enlarged. This makes it easier to pass cables and tubes used in the robot, further improving the usability of the torque sensor 1.

[0204] Furthermore, according to this embodiment, the load-bearing body X-axis connection portion 42 and the supporting body X-axis connection portion 51 each extend along the X-axis. Consequently, even when a force Fy in the X-axis direction acts on the load-bearing body 10, the load-bearing body X-axis connection portion 42 and the supporting body X-axis connection portion 51 can function as essentially rigid bodies, thereby suppressing elastic deformation of the deformable bodies 31a to 31d of the strain body 30. Consequently, even when a force Fx in the X-axis direction acts, changes in the capacitance values ​​of the capacitor elements 61a to 61d can be suppressed, thereby suppressing detection of the force Fx.

[0205] Furthermore, according to this embodiment, the Y-axis connection portion 41 of the force-bearing body and the Y-axis connection portion 52 of the supporting body each extend along the Y-axis. Thus, even when a force Fy in the Y-axis direction acts on the force-bearing body 10, the Y-axis connection portion 41 of the force-bearing body and the Y-axis connection portion 52 of the supporting body can function as a substantial rigid body, thereby suppressing elastic deformation of the deformable bodies 31a to 31d of the strain body 30. Therefore, even when a force Fy in the Y-axis direction acts, changes in the capacitance values ​​of the capacitor elements 61a to 61d can be suppressed, thereby suppressing detection of the force Fy.

[0206] In addition, according to the present embodiment, the Y-axis connection portion 41 of the force-bearing body, the X-axis connection portion 42 of the force-bearing body, the X-axis connection portion 51 of the support body, and the Y-axis connection portion 52 of the support body extend along the Z-axis, respectively. As a result, each connection portion 41, 42, 51, 52 can essentially function as a rigid body with respect to the force in the Z-axis direction. Therefore, even when a force Fz in the Z-axis direction acts on the force-bearing body 10, the elastic deformation of each deformable body 31a to 31d of the strain body 30 can be suppressed. Similarly, even when a moment Mx around the X-axis and a moment My around the Y-axis act on the force-bearing body 10, the elastic deformation of each deformable body 31a to 31d of the strain body 30 can be suppressed. Therefore, even when a force Fz, a moment Mx, or a moment My acts, the change in the capacitance value of each capacitor element 61a to 61d can be suppressed, and the detection of the force Fz, the moment Mx, and the moment My can be suppressed.

[0207] In addition, according to this embodiment, the dimension (P2y) of the load-bearing body X-axis connection portion 42 in the Y-axis direction is smaller than the dimension (P1x) of the load-bearing body Y-axis connection portion 41 in the X-axis direction, and the dimension (Q2x) of the support body Y-axis connection portion 52 in the X-axis direction is smaller than the dimension (Q1y) of the support body X-axis connection portion 51 in the Y-axis direction. As a result, when the moment Mz around the Z-axis acts, the load-bearing body Y-axis connection portion 41 and the support body X-axis connection portion 51 can essentially function as a rigid body, and the load-bearing body X-axis connection portion 42 and the support body Y-axis connection portion 52 can be easily elastically deformed. Therefore, it is easy to apply tensile force or compressive force to each deformable body 31a~31d of the strain body 30 arranged in the first quadrant to the fourth quadrant. As a result, it is easy to displace each displacement portion 35 of each deformable body 31a~31d in the Z-axis direction, and it is easy to detect changes in the capacitance value of the capacitor elements 61a~61d.

[0208] Furthermore, according to this embodiment, the strain body 30 is formed in a circular ring shape when viewed along the Z-axis. This allows the deformable bodies 31a to 31d to be interconnected. Therefore, even when a force or moment other than the moment Mz about the Z-axis is applied, elastic deformation of the deformable bodies 31a to 31d of the strain body 30 can be suppressed. As a result, even when a force or moment other than the moment Mz is applied, changes in the capacitance values ​​of the capacitor elements 61a to 61d can be suppressed, and detection of forces or moments other than the moment Mz can be suppressed.

[0209] In addition, in the above embodiment, the following example is described: the strain body 30 is arranged on the negative side of the Z axis relative to the force-bearing body 10, and the support body 20 is arranged on the negative side of the Z axis relative to the strain body 30. However, this is not limited to this. For example, Figure 22As shown, it is also possible to configure the force-bearing body 10 and the strain body 30 along the XY plane so that the support body 20 is arranged on the negative side of the Z axis relative to the strain body 30. In this case, it can also play the role of Figure 19 The same effects as those of the torque sensor 1 shown above can be achieved, and the height dimension of the torque sensor 1 can be reduced. In this case, the fixed electrode 63 of the detection element 60 can also be attached to the upper surface 20a of the support body 20. Figure 22 Yes Figure 19 A sectional view of a modified example of the torque sensor, which is equivalent to Figure 2 Figure 2 is a cross-section of the AA line.

[0210] The present invention is not limited to the above-mentioned embodiments and variations, and the constituent elements can be modified and concretized in the implementation stage without departing from the scope of the main purpose. In addition, various inventions can be formed by appropriately combining the multiple constituent elements disclosed in the above-mentioned embodiments and variations. It is also possible to delete some constituent elements from all the constituent elements shown in the embodiments and variations. Furthermore, it is also possible to appropriately combine constituent elements across different embodiments and variations.

Claims

1. A torque sensor for detecting torque about the Z axis in an XYZ three-dimensional coordinate system, the torque sensor comprising: A first structure is formed with the Z axis as the center; A second structure is formed with the Z axis as the center; a strain body, disposed between the first structure and the second structure, connecting the first structure and the second structure, and elastically deforming under the action of the moment; Two first structural body Y-axis connecting parts, connecting the first structural body and the strain body; Two second structural body X-axis connecting parts, connecting the strain body and the second structural body; Detection element; a detection circuit that outputs an electrical signal representing the torque based on a detection result of the detection element; Two first structural body X-axis connecting parts, connecting the first structural body and the strain body; as well as Two second structural body Y-axis connecting parts connect the strain body and the second structural body, The Y-axis connecting portion of the first structure is arranged on the positive side and the negative side of the Y-axis relative to the strain body. The second structural body X-axis connection portion is arranged on the positive side and the negative side of the X-axis relative to the second structural body. The strain body includes four deformable bodies, each of which includes a displacement portion that is displaced in the Z-axis direction by elastic deformation. The deformable bodies are respectively arranged in the first quadrant, the second quadrant, the third quadrant and the fourth quadrant. The detection element includes a capacitance element, and the capacitance element detects a change in capacitance value according to the displacement of the displacement portion of each of the deformable bodies in the Z-axis direction. When viewed along the Z axis, the second structure is arranged inside the first structure. The Y-axis connecting portion of the first structure extends along the Y-axis and the Z-axis. The dimension of the Y-axis connecting portion of the first structure in the Z-axis direction is greater than the dimension of the Y-axis connecting portion of the first structure in the Y-axis direction. The X-axis connecting portion of the second structure extends along the X-axis and the Z-axis. The dimension of the second structural body X-axis connecting portion in the Z-axis direction is greater than the dimension of the second structural body X-axis connecting portion in the X-axis direction. When viewed along the Z axis, the X-axis connection portion of the first structure is arranged on the positive side and the negative side of the X axis relative to the strain body, and the Y-axis connection portion of the second structure is arranged on the positive side and the negative side of the Y axis relative to the second structure. The X-axis connecting portion of the first structure extends along the X-axis. The second structure Y-axis connecting portion extends along the Y-axis.

2. The torque sensor according to claim 1, wherein: The first structural body X-axis connecting portion and the second structural body Y-axis connecting portion extend along the Z-axis. The dimension of the first structural body X-axis connecting portion in the Z-axis direction is greater than the dimension of the first structural body X-axis connecting portion in the X-axis direction. A dimension of the second structure Y-axis connecting portion in the Z-axis direction is greater than a dimension of the second structure Y-axis connecting portion in the Y-axis direction.

3. The torque sensor according to claim 1 or 2, wherein: The dimension of the first structural body X-axis connecting portion in the Y-axis direction is smaller than the dimension of the first structural body Y-axis connecting portion in the X-axis direction. The dimension of the second structure's Y-axis connecting portion in the X-axis direction is smaller than the dimension of the second structure's X-axis connecting portion in the Y-axis direction.

4. The torque sensor according to claim 1 or 2, wherein: When viewed along the Z axis, the strain body is formed in a circular ring shape.

5. The torque sensor according to claim 1 or 2, wherein: The dimension of the X-axis connection portion of the first structure in the X-axis direction is greater than the dimension of the Y-axis connection portion of the first structure in the Y-axis direction. The dimension of the second structure Y-axis connection portion in the Y-axis direction is greater than the dimension of the second structure X-axis connection portion in the X-axis direction.

6. The torque sensor according to claim 5, wherein: The strain body is formed in an elliptical ring shape having a major axis along the Y axis and a minor axis along the X axis when viewed along the Z axis.

7. A torque sensor for detecting torque about the Z axis in an XYZ three-dimensional coordinate system, the torque sensor comprising: A first structure is formed with the Z axis as the center; A second structure is formed with the Z axis as the center; a strain body, disposed between the first structure and the second structure, connecting the first structure and the second structure, and elastically deforming under the action of the moment; Two first structural body Y-axis connecting parts, connecting the first structural body and the strain body; Two second structural body X-axis connecting parts, connecting the strain body and the second structural body; Detection element; a detection circuit that outputs an electrical signal representing the torque based on a detection result of the detection element; Two first structural body X-axis connecting parts, connecting the first structural body and the strain body; as well as Two second structural body Y-axis connecting parts connect the strain body and the second structural body, The Y-axis connecting portion of the first structure is arranged on the positive side and the negative side of the Y-axis relative to the strain body. The second structural body X-axis connection portion is arranged on the positive side and the negative side of the X-axis relative to the second structural body. The strain body includes four deformable bodies, each of which includes a displacement portion that is displaced in the Z-axis direction by elastic deformation. The deformable bodies are respectively arranged in the first quadrant, the second quadrant, the third quadrant and the fourth quadrant. The detection element includes a capacitance element, and the capacitance element detects a change in capacitance value according to the displacement of the displacement portion of each of the deformable bodies in the Z-axis direction. When viewed along the Z axis, the second structure is arranged inside the first structure. The Y-axis connection portion of the first structure is formed at the connection position between the first structure and the strain body. The second structural body X-axis connection portion is formed at the connection position between the strain body and the second structural body. When viewed along the Z axis, the X-axis connection portion of the first structure is arranged on the positive side and the negative side of the X axis relative to the strain body, and the Y-axis connection portion of the second structure is arranged on the positive side and the negative side of the Y axis relative to the second structure. The X-axis connecting portion of the first structure extends along the X-axis and the Z-axis. The second structure Y-axis connecting portion extends along the Y-axis and the Z-axis.

8. The torque sensor according to claim 7, wherein: When viewed along the Z axis, the outer peripheral surface of the strain body is formed in an elliptical shape having a major axis along the Y axis and a minor axis along the X axis.

9. The torque sensor according to claim 7 or 8, wherein: When viewed along the Z axis, the outer peripheral surface of the second structure is formed in an elliptical shape having a major axis along the X axis and a minor axis along the Y axis.

10. The torque sensor according to claim 7, wherein: The dimension of the first structural body X-axis connecting portion in the Y-axis direction is smaller than the dimension of the first structural body Y-axis connecting portion in the X-axis direction. The dimension of the second structure's Y-axis connecting portion in the X-axis direction is smaller than the dimension of the second structure's X-axis connecting portion in the Y-axis direction.

11. A torque sensor for detecting torque about the Z axis in an XYZ three-dimensional coordinate system, the torque sensor comprising: A first structure is formed with the Z axis as the center; A second structure is formed with the Z axis as the center; a strain body, disposed between the first structure and the second structure, connecting the first structure and the second structure, and elastically deforming under the action of the moment; Two first structural body Y-axis connecting parts, connecting the first structural body and the strain body; Two second structural body X-axis connecting parts, connecting the strain body and the second structural body; Detection element; a detection circuit that outputs an electrical signal representing the torque based on a detection result of the detection element; Two first structural body X-axis connecting parts, connecting the first structural body and the strain body; as well as Two second structural body Y-axis connecting parts connect the strain body and the second structural body, The Y-axis connecting portion of the first structure is arranged on the positive side and the negative side of the Y-axis relative to the strain body. The second structural body X-axis connection portion is arranged on the positive side and the negative side of the X-axis relative to the second structural body. The strain body includes four deformable bodies, each of which includes a displacement portion that is displaced in the Z-axis direction by elastic deformation. The deformable bodies are respectively arranged in the first quadrant, the second quadrant, the third quadrant and the fourth quadrant. The detection element includes a capacitance element, and the capacitance element detects a change in capacitance value according to the displacement of the displacement portion of each of the deformable bodies in the Z-axis direction. The second structure is arranged on the negative side of the Z axis relative to the strain body. The Y-axis connecting portion of the first structure extends along the Y-axis and the Z-axis. The X-axis connecting portion of the second structure extends along the X-axis and the Z-axis. The X-axis connecting portion of the first structure extends along the X-axis and the Z-axis. The second structural body Y-axis connection portion extends along the Y-axis and the Z-axis.

12. The torque sensor according to claim 11, wherein: The strain body is arranged on the negative side of the Z axis with respect to the first structure.

Images