Micro-thrust measurement device and method

Abstract

This invention discloses a micro-thrust measurement device and method. The micro-thrust measurement device includes a working base plate, a pivot and fixing module, a three-axis displacement stage, a torsion beam, a linear guide rail, a displacement sensor, a micro-thrust generator, and a counterweight. The linear guide rail is mounted on the working base plate and consists of a long guide rail and a short guide rail. The torsion beam is positioned between the long and short guide rails. Slider blocks are installed at the ends of both the long and short guide rails furthest from the torsion beam. The slider of the long guide rail houses a micro-thrust motor for measuring the micro-thrust, while the slider of the short guide rail houses a counterweight. The displacement sensor and the micro-thrust generator are respectively located on both sides of the long guide rail. The three-axis displacement stage is mounted on the torsion beam via the pivot and fixing module. This invention enables sub-millinewton-level micro-thrust testing of micro- and nano-satellite micro-propulsion systems. It is easy to operate, improves measurement accuracy, increases the measurement range of the testing system, and reduces costs.

Description

Technical Field

[0001] This invention belongs to the field of micro-nano satellite technology, and in particular relates to a micro-thrust measurement device and method for measuring the micro-thrust of a micro-nano satellite micro-propulsion system. Background Technology

[0002] In recent years, with the increasing maturity of Micro-Electro-Mechanical Systems (MEMS) technology, the development of micro- and nano-satellites has been extremely rapid. Given the preciousness of near-Earth space, micro- and nano-satellites require extended on-orbit time and self-destruction capabilities in case of failure. Therefore, micro-thrusters capable of attitude and orbit adjustment within the micro- and nano-satellite structure are particularly important. However, due to the small mass of micro- and nano-satellites, the thrust of their micro-thrusters is also very small, typically on the order of micro-nano Newtons. To achieve precise orbit changes for micro- and nano-satellites, accurate measurement of the micro-thruster's thrust is necessary. Precisely measuring such a tiny force is quite difficult, making the development of high-precision micro-thrust measurement devices and methods essential.

[0003] Domestic and international researchers have developed micro-thrust measurement systems composed of various structures through direct or indirect measurement methods. The research on micro-thrust measurement systems aligns with the development trend of the output thrust range of micro-thrusters, and can be divided into the following stages: Micro-thrust measurement systems with balance structures and inverted pendulum structures can achieve thrust measurements in the mN to N range, and are the earliest developed measurement devices both domestically and internationally; micro-thrust measurement systems with single and double pendulum structures can achieve thrust measurements in the μN to mN range; and micro-thrust measurement systems with torsion wire suspension torsion pendulum structures and two-point support torsion pendulum structures can achieve micro-thrust measurements in the μN range.

[0004] However, most existing micro-thrust measurement systems are custom-designed based on the technical parameters of a specific propulsion system, which is inconvenient to operate, complex in structure, and has poor versatility. On the other hand, existing micro-thrust measurement systems that emphasize versatility generally suffer from problems such as difficulty in changing the measurement range, fixed swing arm length and counterweight position, difficulty in ensuring the verticality of the flexible pivot installation, insufficient installation space, and insufficient structural rigidity. Summary of the Invention

[0005] To at least partially solve the technical problems existing in the prior art, the present invention provides a micro-thrust measuring device and a micro-thrust measuring method for measuring the micro-thrust of a micro-nano satellite micro-propulsion system.

[0006] In one aspect of the invention, a micro-thrust measuring device is provided for measuring the micro-thrust of a micro-thrust engine in a micro-propulsion system. The micro-thrust measuring device includes a working base plate, a pivot and fixing module, a three-axis displacement stage, a torsion beam, a linear guide rail, a displacement sensor, a micro-thrust generator, and counterweights. The linear guide rail is mounted on the working base plate and consists of a long guide rail and a short guide rail. The torsion beam is disposed between the long guide rail and the short guide rail, connecting the long guide rail to the short guide rail. The guide rails are fixedly connected. Slider blocks are installed at the ends of both the long and short guide rails away from the torsion beam. A micro-thrust motor is installed on the slider of the long guide rail, and the counterweight is installed on the slider of the short guide rail. The displacement sensor and the micro-thrust generator are respectively located on both sides of the long guide rail. The three-axis displacement stage is mounted on the torsion beam via the pivot and fixing module. A displacement stage adjustment knob is installed on the side of the three-axis displacement stage, and a first right-angle fixing block is provided at the bottom of the three-axis displacement stage.

[0007] Furthermore, in the aforementioned micro-thrust measuring device, the pivot and fixing module includes four pivot fixing rings and two pivots. The first and second pivot fixing rings are installed on the upper and lower sides of the torsion beam, the third pivot fixing ring is installed on the working base plate, and the fourth pivot fixing ring is connected to the first right-angle fixing block. The first pivot is fixed between the first and fourth pivot fixing rings by a T-nut, and the second pivot is fixed between the second and third pivot fixing rings by a T-nut.

[0008] Furthermore, in the above-mentioned micro-thrust measuring device, the micro-thrust generator consists of a fixed base plate, a permanent magnet, an electromagnetic coil, and a first two-axis displacement stage. The fixed base plate is connected to the first two-axis displacement stage, and the electromagnetic coil is disposed on the first two-axis displacement stage.

[0009] Furthermore, in the above-mentioned micro-thrust measuring device, the displacement sensor consists of a laser displacement sensor and a second two-axis displacement stage, and the moving end of the second two-axis displacement stage is fixedly connected to the laser displacement sensor.

[0010] Furthermore, in the aforementioned micro-thrust measuring device, the working base plate is made of optical breadboard, and the working base plate is provided with multiple threaded holes. The linear guide rail, the micro-thrust generator, and the displacement sensor are all fixed to the working base plate by bolts.

[0011] Furthermore, in the aforementioned micro-thrust measuring device, the torsion beam is made of aluminum alloy profile.

[0012] In another aspect of the present invention, the provided micro-thrust measurement method is implemented by the aforementioned micro-thrust measurement device, and is used to measure the micro-thrust of a micro-thrust engine in a micro-propulsion system. The micro-thrust measurement method includes the following steps:

[0013] Step 1: Position calibration of displacement sensor. Adjust the second two-axis displacement stage so that the laser emitted by the laser displacement sensor of the displacement sensor illuminates the torsion beam.

[0014] Step 2: Calibration of the functional relationship between micro-thrust and displacement. The functional relationship between micro-thrust and displacement is calibrated using a micro-thrust generator.

[0015] Step 3: Measure the micro-thrust of the micro-thrust engine.

[0016] Step 2 includes:

[0017] Step 21: Fix the second right-angle fixing block on the working base plate, fix the micro-thrust generator to the second right-angle fixing block through the fixing base plate, place the permanent magnet on the high-precision analytical balance, adjust the electromagnetic coil and the permanent magnet to be concentric, select the gap between the electromagnetic coil and the permanent magnet and the corresponding required current, record the data of the high-precision analytical balance after powering on, and obtain the gravity change value of the permanent magnet through the balance data. The gravity change value is the micro-thrust generated by the micro-thrust generator.

[0018] Step 22: Remove the micro-thrust generator from the second right-angle fixing block, fix the permanent magnet on the torsion beam, adjust the first two-axis displacement stage so that the electromagnetic coil and the permanent magnet are placed opposite each other with the same pole, energize the electromagnetic coil according to the required current, and collect the linear displacement data generated by the electromagnetic coil pushing the permanent magnet to drive the torsion beam to swing by the displacement sensor.

[0019] Step 23: Following steps 21 and 22, obtain a set of micro-thrust and displacement data. Then repeat steps 21 and 22 to obtain multiple sets of micro-thrust and displacement data. Finally, use MATLAB to linearly fit the function between micro-thrust and displacement to complete the calibration.

[0020] Step 3 includes:

[0021] Step 31: Fix the micro-thrust engine to the slider of the long guide rail, and fix a counterweight of matching mass to the slider of the short guide rail according to the mass of the micro-thrust engine.

[0022] Step 32: Place the level on the torsion beam and adjust the adjustment knob on the three-axis displacement stage until the level is horizontal, so that the central axis of the first and second pivots of the pivot and the fixed module are perpendicular to the working base plate.

[0023] Step 33: Start the micro-thrust engine, use a displacement sensor to measure the displacement data generated by the force exerted by the micro-thrust engine on the torsion beam, and use the functional relationship between the micro-thrust and displacement obtained in step 2 to measure and calculate the micro-thrust of the micro-thrust engine.

[0024] The main advantages and technical effects of the present invention include:

[0025] It can measure the micro-thrust of micro-satellite micro-propulsion systems, and can select the appropriate pivot and pivot fixing ring according to the required micro-thrust. It is not limited to the technical parameters of a specific propulsion system, has a wider range of applications, high versatility, and is easy to operate, effectively reducing costs.

[0026] The three-axis displacement stage can effectively reduce the eccentricity error of the pivot installation, effectively ensure the verticality of the pivot installation, and improve the measurement accuracy of micro-thrust.

[0027] Linear guide rails can ensure the parallelism between the micro-thrust engine and the counterweight, and easily adjust the length of the swing arm between the micro-thrust application point and the pivot center, thereby achieving rapid adjustment of precision and quick balancing of the system.

[0028] The first two-axis displacement stage enables quick alignment of the electromagnetic coil and permanent magnet during calibration, as well as quick adjustment of the gap. By flexibly and quickly adjusting the gap between the electromagnetic coil and the permanent magnet, a wide range of micro-thrust can be calibrated for the micro-thrust generator. This increases the range of the micro-thrust measuring device, significantly improves the versatility of the micro-thrust measuring device and method, and expands their applicability. Attached Figure Description

[0029] The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and constitute a part of this invention, illustrate exemplary embodiments of the invention and, together with their description, serve to explain the invention and do not constitute an undue limitation thereof. In the drawings:

[0030] Figure 1 This is a schematic diagram of the micro-thrust measuring device of the present invention;

[0031] Figure 2 This is a schematic diagram of the installation structure of the pivot and fixing module in the micro-thrust measuring device of the present invention;

[0032] Figure 3 This is a schematic diagram of the micro-thrust generator in the micro-thrust measuring device of the present invention;

[0033] Figure 4 This is a schematic diagram of the displacement sensor in the micro-thrust measuring device of the present invention;

[0034] Figure 5 This is a schematic diagram of the calibration module in the micro-thrust measuring device of the present invention.

[0035] Explanation of reference numerals in the attached figures:

[0036] 1: Working base plate; 2: Pivot and fixing module; 3: Three-axis displacement stage

[0037] 4: Torsional beam; 5: Linear guide rail; 6: Displacement sensor

[0038] 7: Micro-thrust generator; 8: Micro-thrust engine; 9: Counterweight.

[0039] 201: First pivot retaining ring; 202: Second pivot retaining ring; 203: Third pivot retaining ring

[0040] 204: Fourth pivot retaining ring; 205: First pivot; 206: Second pivot

[0041] 301: Displacement stage adjustment knob; 302: First right-angle fixing block; 501: Long guide rail

[0042] 502: Short guide rail; 503: Slider; 601: Laser displacement sensor

[0043] 602: Second dual-axis displacement stage; 701: Fixed base plate; 702: Permanent magnet.

[0044] 703: Electromagnetic coil; 704: First two-axis displacement stage; 901: Second right-angle fixing block. Detailed Implementation

[0045] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0046] The micro-thrust measuring device provided by this invention can be used to measure the micro-thrust of a micro-nano satellite micro-propulsion system. More specifically, the micro-thrust measuring device of this invention is used to measure the micro-thrust of the micro-thrust engine 8 in a micro-propulsion system. For example... Figures 1 to 5As shown, the micro-thrust measuring device of the present invention includes a working base plate 1, a pivot and fixing module 2, a three-axis displacement stage 3, a torsion beam 4, a linear guide rail 5, a displacement sensor 6, a micro-thrust generator 7, and a counterweight 9. The linear guide rail 5 is mounted on the working base plate 1 and consists of a long guide rail 501 and a short guide rail 502. The torsion beam 4 is positioned between the long guide rail 501 and the short guide rail 502. The torsion beam 4 connects and fixes the long guide rail 501 and the short guide rail 502 with bolts. A slider 503 is installed at the end of both the long guide rail 501 and the short guide rail 502 away from the torsion beam 4. A micro-thrust generator 8 is mounted on the slider 503 of the long guide rail 501, and a counterweight 9 is mounted on the slider 503 of the short guide rail 502. The slider 503 is connected to the micro-thrust generator 8 and the counterweight 9 with bolts. The displacement sensor 6 and the micro-thrust generator 7 are respectively located on both sides of the long guide rail 501. The three-axis displacement stage 3 is mounted on the torsion beam 4 via a pivot and a fixing module 2. The side of the three-axis displacement stage 3 is equipped with a displacement stage adjustment knob 301, and the bottom of the three-axis displacement stage 3 is provided with a first right-angle fixing block 302.

[0047] The pivot and fixing module 2 includes four pivot fixing rings and two pivots. The first pivot fixing ring 201 and the second pivot fixing ring 202 are installed on the upper and lower sides of the torsion beam 4, the third pivot fixing ring 203 is installed on the working base plate 1, and the fourth pivot fixing ring 204 is connected to the first right-angle fixing block 302. The first pivot 205 is fixed between the first pivot fixing ring 201 and the fourth pivot fixing ring 204 by a T-nut, and the second pivot 206 is fixed between the second pivot fixing ring 202 and the third pivot fixing ring 203 by a T-nut.

[0048] The micro-thrust generator 7 consists of a fixed base plate 701, a permanent magnet 702, an electromagnetic coil 703, and a first two-axis displacement stage 704. The fixed base plate 701 is connected to the first two-axis displacement stage 704 by bolts, and the electromagnetic coil 703 is mounted on the first two-axis displacement stage 704.

[0049] The displacement sensor 6 consists of a laser displacement sensor 601 and a second two-axis displacement stage 602; the moving end of the second two-axis displacement stage 602 is fixedly connected to the laser displacement sensor 601 by bolts.

[0050] Preferably, the working base plate 1 of the micro-thrust measuring device of the present invention is made of optical breadboard; the torsion beam 4 is made of aluminum alloy profile; the working base plate 1 is provided with sufficient threaded holes; the working base plate 1 is fixed to the linear guide rail 5, the micro-thrust generator 7 and the displacement sensor 6 by bolts.

[0051] On the other hand, the micro-thrust measurement method implemented using the micro-thrust measurement device of the present invention is used to measure the micro-thrust of the micro-thrust engine 8 in a micro-propulsion system, and includes the following steps:

[0052] Step 1: Position calibration of displacement sensor. Adjust the second two-axis displacement stage 602 so that the laser emitted by the laser displacement sensor 601 of displacement sensor 6 can accurately illuminate the torsion beam 4.

[0053] Step 2: Calibrating the functional relationship between micro-thrust and displacement. The micro-thrust generator 7 is used to calibrate the functional relationship between micro-thrust and displacement, specifically including:

[0054] Step 21: Fix the second right-angle fixing block 901 to the working base plate 1 with bolts. Fix the micro-thrust generator 7 to the second right-angle fixing block 901 through the fixing base plate 701. Place the permanent magnet 702 on the high-precision analytical balance. Adjust the electromagnetic coil 703 to be concentric with the permanent magnet 702. According to the working principle of electromagnet, the magnitude of electromagnetic force is proportional to the gap between the electromagnetic coil and the permanent magnet and the magnitude of the current passing through the coil. Select the gap between the electromagnetic coil 703 and the permanent magnet 702 and the corresponding required current. After powering on, record the data of the high-precision analytical balance. The change in gravity of the permanent magnet 702 is obtained from the data of the balance. This change in gravity is the micro-thrust generated by the micro-thrust generator 7.

[0055] Step 22: Remove the micro-thrust generator 7 from the second right-angle fixing block 901, fix the permanent magnet 702 on the torsion beam 4, adjust the first two-axis displacement stage 704 so that the electromagnetic coil 703 and the permanent magnet 702 are placed opposite each other with the same pole, and energize the electromagnetic coil 703 according to the required current obtained earlier. The displacement sensor 6 collects the linear displacement data generated by the electromagnetic coil 703 pushing the permanent magnet 702 to drive the torsion beam 4 to swing.

[0056] Step 23: Through steps 21 and 22, a set of micro-thrust and displacement data is obtained. Then, steps 21 and 22 are repeated to obtain multiple sets of micro-thrust and displacement data. Finally, MATLAB is used to linearly fit the function between micro-thrust and displacement to complete the calibration.

[0057] Step 3: Measure the micro-thrust of the micro-thrust engine, specifically including:

[0058] Step 31: Fix the micro-thrust engine 8 to the slider 503 of the long guide rail 501, and fix a counterweight 9 with a matching mass on the slider 503 of the short guide rail 502 according to the mass of the micro-thrust engine 8.

[0059] Step 32: Place the level on the torsion beam 4, adjust the displacement stage adjustment knob 301 on the three-axis displacement stage 3 until the level is horizontal, and ensure that the central axis of the first pivot 205 and the second pivot 206 of the pivot and the fixed module 2 are perpendicular to the working base plate 1.

[0060] Step 33: Start the micro-thrust engine 8, use the displacement sensor 6 to measure the displacement data generated by the force exerted by the micro-thrust engine 8 on the torsion beam 4, and use the functional relationship between the micro-thrust and displacement obtained in step 2 to measure and calculate the micro-thrust of the micro-thrust engine 8.

[0061] In summary, compared with the prior art, the micro-thrust measurement device and method of the present invention have the following advantages and beneficial effects:

[0062] (1) It can measure the micro-thrust of micro-satellite micro-propulsion system, and can select the appropriate pivot and pivot fixing ring according to the required micro-thrust. It is not limited to the technical parameters of a specific propulsion system, has a wider range of applications, high versatility, and is easy to operate, effectively reducing costs.

[0063] (2) The three-axis displacement stage can effectively reduce the eccentricity error of the pivot installation, effectively ensure the verticality of the pivot installation, and improve the measurement accuracy of micro-thrust.

[0064] (3) The linear guide rail can ensure the parallelism between the micro-thrust engine and the counterweight, and it is easy to adjust the length of the swing arm between the micro-thrust point and the pivot center, thereby realizing the rapid adjustment of accuracy and the quick balancing of the system.

[0065] (4) The first two-axis displacement stage can realize the quick alignment of the electromagnetic coil and the permanent magnet and the quick adjustment of the gap during calibration. Since the smaller the gap between the electromagnetic coil and the permanent magnet, the greater the magnetic force between the electromagnetic coil and the permanent magnet, the greater the micro-thrust generated by the micro-thrust generator. Conversely, the larger the gap between the electromagnetic coil and the permanent magnet, the smaller the magnetic force between the electromagnetic coil and the permanent magnet, and the smaller the micro-thrust generated by the micro-thrust generator. Therefore, by flexibly and quickly adjusting the gap between the electromagnetic coil and the permanent magnet, the micro-thrust generator can be calibrated over a wide range, thereby increasing the range of the micro-thrust measuring device, significantly improving the versatility of the micro-thrust measuring device and the micro-thrust measuring method, and expanding the applicability of the micro-thrust measuring device and the micro-thrust measuring method.

[0066] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Additionally, the terms "front," "back," "left," "right," "upper," and "lower" in this document refer to the placement shown in the accompanying drawings.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A micro-thrust measuring device for measuring the micro-thrust of a micro-thrust engine in a micro-propulsion system, characterized in that, The micro-thrust measuring device includes a working base plate, a pivot and fixing module, a three-axis displacement stage, a torsion beam, a linear guide rail, a displacement sensor, a micro-thrust generator, and a counterweight. The linear guide rail is mounted on the working base plate and consists of a long guide rail and a short guide rail. The torsion beam is positioned between the long and short guide rails, connecting and fixing them. A slider is mounted on the end of both the long and short guide rails furthest from the torsion beam. A micro-thrust generator is mounted on the slider of the long guide rail, and the counterweight is mounted on the slider of the short guide rail. The displacement sensor and the micro-thrust generator are respectively located on both sides of the long guide rail. The three-axis displacement stage is mounted on the torsion beam via the pivot and fixing module. A displacement stage adjustment knob is mounted on the side of the three-axis displacement stage, and a first right-angle fixing block is provided at the bottom of the three-axis displacement stage. The micro-thrust generator consists of a fixed base plate, a permanent magnet, an electromagnetic coil, and a first two-axis displacement stage. The fixed base plate is connected to the first two-axis displacement stage, and the electromagnetic coil is disposed on the first two-axis displacement stage. The pivot and fixing module includes four pivot fixing rings and two pivots. The first and second pivot fixing rings are installed on the upper and lower sides of the torsion beam, the third pivot fixing ring is installed on the working base plate, and the fourth pivot fixing ring is connected to the first right-angle fixing block. The first pivot is fixed between the first and fourth pivot fixing rings by a T-nut, and the second pivot is fixed between the second and third pivot fixing rings by a T-nut. When measuring the micro-thrust of a micro-satellite micro-propulsion system, a suitable pivot and pivot fixing ring are selected according to the magnitude of the micro-thrust to be measured. The length of the swing arm between the micro-thrust application point and the pivot center is adjusted by the linear guide rail. The first two-axis displacement stage enables quick alignment and quick adjustment of the gap between the electromagnetic coil and the permanent magnet during calibration. Since the smaller the gap between the electromagnetic coil and the permanent magnet, the greater the magnetic force between them, and the greater the micro-thrust generated by the micro-thrust generator, the larger the gap between them, the smaller the magnetic force and the smaller the micro-thrust generated. By flexibly and quickly adjusting the gap between the electromagnetic coil and the permanent magnet, a wide range of calibration micro-thrust for the micro-thrust generator can be achieved, increasing the range of the micro-thrust measuring device.

2. The micro-thrust measuring device according to claim 1, characterized in that, The displacement sensor consists of a laser displacement sensor and a second two-axis displacement stage, with the moving end of the second two-axis displacement stage fixedly connected to the laser displacement sensor.

3. The micro-thrust measuring device according to any one of claims 1 to 2, characterized in that, The working base plate is made of optical breadboard and has multiple threaded holes. The linear guide rail, the micro-thrust generator and the displacement sensor are all fixed to the working base plate by bolts.

4. The micro-thrust measuring device according to claim 3, characterized in that, The torsion beam is made of aluminum alloy profile.

5. A micro-thrust measurement method implemented using the micro-thrust measurement device according to any one of claims 1 to 4, wherein the micro-thrust measurement method is used to measure the micro-thrust of a micro-thrust engine in a micro-propulsion system, characterized in that, The micro-thrust measurement method includes the following steps: Step 1: Position calibration of displacement sensor. Adjust the second two-axis displacement stage so that the laser emitted by the laser displacement sensor of the displacement sensor illuminates the torsion beam. Step 2: Calibration of the functional relationship between micro-thrust and displacement. The functional relationship between micro-thrust and displacement is calibrated using a micro-thrust generator. Step 3: Measure the micro-thrust of the micro-thrust engine. Step 2 includes: Step 21: Fix the second right-angle fixing block on the working base plate, fix the micro-thrust generator to the second right-angle fixing block through the fixing base plate, place the permanent magnet on the high-precision analytical balance, adjust the electromagnetic coil and the permanent magnet to be concentric, select the gap between the electromagnetic coil and the permanent magnet and the corresponding required current, record the data of the high-precision analytical balance after powering on, and obtain the gravity change value of the permanent magnet through the balance data. The gravity change value is the micro-thrust generated by the micro-thrust generator. Step 22: Remove the micro-thrust generator from the second right-angle fixing block, fix the permanent magnet on the torsion beam, adjust the first two-axis displacement stage so that the electromagnetic coil and the permanent magnet are placed opposite each other with the same pole, energize the electromagnetic coil according to the required current, and collect the linear displacement data generated by the electromagnetic coil pushing the permanent magnet to drive the torsion beam to swing by the displacement sensor. Step 23: Following steps 21 and 22, obtain a set of micro-thrust and displacement data. Then repeat steps 21 and 22 to obtain multiple sets of micro-thrust and displacement data. Finally, use MATLAB to linearly fit the function between micro-thrust and displacement to complete the calibration. Step 3 includes: Step 31: Fix the micro-thrust engine to the slider of the long guide rail, and fix a counterweight of matching mass to the slider of the short guide rail according to the mass of the micro-thrust engine. Step 32: Place the level on the torsion beam and adjust the adjustment knob on the three-axis displacement stage until the level is horizontal, so that the central axis of the first and second pivots of the pivot and the fixed module are perpendicular to the working base plate. Step 33: Start the micro-thrust engine, use a displacement sensor to measure the displacement data generated by the force exerted by the micro-thrust engine on the torsion beam, and use the functional relationship between the micro-thrust and displacement obtained in step 2 to measure and calculate the micro-thrust of the micro-thrust engine.

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