Transfer system and fixture for performing horizontal calibration

Abstract

The present invention is a transfer system and its fixture for performing horizontal calibration. The transfer system for performing horizontal calibration includes a transfer head for picking up micro-devices, the transfer head having a plurality of pick-up heads protruding from the bottom surface of the transfer head; and a horizontal fixture for performing horizontal calibration of the transfer head, the horizontal fixture having a plurality of downwardly recessed holes for respectively accommodating the plurality of pick-up heads.

Description

Technical Field

[0001] The present invention relates to the transfer of micro-devices, and particularly to a horizontal jig for performing horizontal calibration. Background Art

[0002] A micro light-emitting diode (microLED, mLED or μLED) display panel is a type of flat panel display, which is composed of individual microscopic light-emitting diodes with a size range of 1 to 100 micrometers. Compared with traditional liquid crystal display panels, micro light-emitting diode display panels have higher contrast, faster response time, and consume less power. Although micro light-emitting diodes and organic light-emitting diodes (OLEDs) both have the characteristic of low power consumption, micro light-emitting diodes use III-V group diode technology (such as gallium nitride), so they have higher brightness, higher luminous efficacy, and longer lifespan compared with organic light-emitting diodes.

[0003] When manufacturing a micro light-emitting diode display panel, a pick-up module is used to pick up individual micro light-emitting diodes and then transfer them to the display panel. Before picking up the micro light-emitting diodes, a horizontal calibration (or profiling) stage needs to be performed to pre-adjust the pick-up module to a horizontal state so that the pick-up module can correctly pick up the micro light-emitting diodes in the subsequent transfer stage. However, during the horizontal calibration stage, the normal (vertical) force applied by the pick-up module to the horizontal jig often causes damage to the pick-up head of the pick-up module.

[0004] Therefore, there is an urgent need to propose a novel mechanism to overcome the deficiencies of traditional transfer systems and avoid damage to the pick-up module during the horizontal calibration stage. Summary of the Invention

[0005] In view of the above, one of the objectives of the embodiments of the present invention is to propose a transfer system for effectively transferring micro-devices without causing damage to the components of the transfer system.

[0006] According to an embodiment of the present invention, a transfer system for performing horizontal calibration includes a transfer head and a horizontal jig. The transfer head is used to pick up micro-devices, and the transfer head has a plurality of pick-up heads protruding from the bottom surface of the transfer head. The horizontal jig is used to perform horizontal calibration of the transfer head, and the horizontal jig has a plurality of concave holes recessed downward for respectively accommodating the plurality of pick-up heads.

[0007] Preferably, the size of the micro-device is less than 100 micrometers.

[0008] Preferably, the transfer head uses vacuum force, electromagnetic force, van der Waals force or adhesive force to pick up the micro-device.

[0009] Preferably, it further includes: an adapter disposed above the transfer head for supporting the transfer head.

[0010] Preferably, the horizontal fixture is made of a hard material.

[0011] Preferably, the concave holes of the horizontal fixture are formed by etching or laser drilling.

[0012] Preferably, the depth of the concave hole is greater than the height of the pickup head.

[0013] Preferably, the pitch of the concave holes is greater than the width of the concave holes, and is even greater than the width of the pickup head.

[0014] Preferably, the ratio of the width of the concave hole to the width of the pickup head is greater than 1 and less than or equal to 1.5.

[0015] Preferably, the ratio of the width of the concave hole to the width of the pickup head is greater than 1.5.

[0016] Preferably, the plurality of concave holes are connected to each other to form a single concave hole for accommodating all the pickup heads of the transfer head.

[0017] According to an embodiment of the present invention, a fixture for performing horizontal calibration includes: a horizontal fixture for performing horizontal calibration of a transfer head, the horizontal fixture having a plurality of downwardly concave holes for respectively accommodating a plurality of pickup heads of the transfer head.

[0018] Preferably, the horizontal fixture is made of a hard material.

[0019] Preferably, the concave holes of the horizontal fixture are formed by etching or laser drilling.

[0020] Preferably, the depth of the concave hole is greater than the height of the pickup head.

[0021] Preferably, the pitch of the concave holes is greater than the width of the concave holes, and is even greater than the width of the pickup head.

[0022] Preferably, the ratio of the width of the concave hole to the width of the pickup head is greater than 1 and less than or equal to 1.5.

[0023] Preferably, the ratio of the width of the concave hole to the width of the pickup head is greater than 1.5.

[0024] Preferably, the plurality of concave holes are connected to each other to form a single concave hole for accommodating all the pickup heads of the transfer head.

[0025] By the above technical solutions, the transfer system and its fixture for performing horizontal calibration according to the present invention have at least the following advantageous effects: The present invention overcomes the deficiencies of the traditional transfer system and avoids damage to the pickup module during the horizontal calibration stage. Brief Description of the Drawings

[0026] Figure 1 A cross-sectional view of the transfer system showing an embodiment of the present invention, used to perform horizontal calibration before transferring the micro-device.

[0027] Figure 2 Show Figure 1 A top view of the horizontal jig.

[0028] Figure 3A An enlarged cross-sectional view showing the transfer head aligned and placed above the horizontal jig.

[0029] Figure 3B An enlarged top view showing the concave hole and the pick-up head.

[0030] Figure 4A And Figure 4B A cross-sectional view of the transfer system showing the first embodiment of the present invention.

[0031] Figure 5A And Figure 5B A cross-sectional view of the transfer system showing the second embodiment of the present invention.

[0032] Figure 6A And Figure 6B A cross-sectional view of the transfer system showing the third embodiment of the present invention.

[0033] Figure 7 A cross-sectional view of the transfer system without using the horizontal jig of the present invention, which uses a horizontal jig with a flat top surface for horizontal calibration.

[0034]

Description of the Main Element Symbols

[0035] 100: Transfer system 11: Transfer head

[0036] 111: Pick-up head 12: Adapter

[0037] 13: Horizontal jig 131: Concave hole

[0038] 14: Horizontal jig H: Height

[0039] D: Depth S: Width

[0040] C: Width C1: Width

[0041] C2: Width P: Pitch Detailed Description of the Invention

[0042] Figure 1A cross-sectional view of the transfer system 100 according to an embodiment of the present invention is shown, which is used to perform horizontal calibration before transferring the micro-device. In this specification, a micro-device (such as a micro light-emitting diode, a micro semiconductor device, or a micro integrated circuit) refers to a micro-precision device with a size less than 100 micrometers.

[0043] In this embodiment, the transfer system 100 may include a transfer head 11 for picking up a micro-device (not shown). The transfer head 11 has a plurality of pick-up heads 111 protruding from the bottom surface of the transfer head 11. In this embodiment, the transfer system 100 is applicable to mass-transfer micro-devices, so the number of pick-up heads 111 is at least several hundred or more. The transfer head 11 can use vacuum force, electromagnetic force, Van der Waals force, or adhesive force to pick up the micro-device. In one embodiment, the size of the transfer head 11 is 5 x 5 cm.

[0044] The transfer system 100 of this embodiment may include an adapter 12 disposed above the transfer head 11 for supporting (holding) the top surface of the transfer head 11, such as using vacuum force or a fixture.

[0045] In this embodiment, the transfer system 100 may include a horizontal jig 13 that cooperates with the adapter 12 to perform horizontal calibration of the transfer head 11. The horizontal jig 13 of this embodiment may be made of a hard material, such as sapphire or granite. According to one of the features of this embodiment, the horizontal jig 13 has a plurality of cavities 131 that are recessed downward. The cavities 131 of the horizontal jig 13 are arranged to respectively accommodate the pick-up heads 111 of the transfer head 11. The cavities 131 of the horizontal jig 13 can be formed by etching or laser drilling.

[0046] Figure 2 Show Figure 1 A top view of the horizontal jig 13 is shown. As illustrated, the cavities 131 are arranged in a matrix form. Although the cavities 131 in this embodiment are square, the cavities 131 can also be other shapes.

[0047] Figure 3A An enlarged cross-sectional view showing the transfer head 11 aligned and placed above the horizontal jig 13, where the bottom surface of the transfer head 11 faces the top surface of the horizontal jig 13. Figure 3B Show an enlarged top view of the cavity 131 and the pick-up head 111. As Figure 3A shown, the depth D of the cavity 131 is greater than the height H of the pick-up head 111. As Figure 3B shown, the pitch P (e.g., 750 micrometers) of the cavities 131 is greater than the width C of the cavities 131, which is even greater than the width S of the pick-up heads 111 (e.g., 50 micrometers).

[0048] According to the transfer system 100 described above, since this embodiment has a downwardly recessed concave hole 131, a horizontal calibration phase is performed (before a large number of transfers) to calibrate the transfer head 11 to match the horizontal level of the horizontal jig 13. When the transfer head 11 contacts the horizontal jig 13, the pick-up head 111 of the transfer head 11 will not be damaged as a result.

[0049] Figure 4A and Figure 4B A cross-sectional view of the transfer system 100 showing the first embodiment of the present invention is shown. In this embodiment, the ratio of the width C1 of the concave hole 131 to the width S of the pick-up head 111 is greater than 1 and less than or equal to 1.5 (i.e., 1 < (C1 / S) <= 1.5).

[0050] Figure 5A and Figure 5B A cross-sectional view of the transfer system 100 showing the second embodiment of the present invention is shown. In this embodiment, the ratio of the width C2 of the concave hole 131 to the width S of the pick-up head 111 is greater than 1.5 (i.e., 1.5 < (C2 / S)).

[0051] Figure 6A and Figure 6B A cross-sectional view of the transfer system 100 showing the third embodiment of the present invention is shown. In this embodiment, the concave holes 131 are connected to each other to form a single concave hole for accommodating all the pick-up heads 111 of the transfer head 11.

[0052] Figure 7 A cross-sectional view of a transfer system that does not use the horizontal jig 13 of the present invention is shown. It uses a horizontal jig 14 with a flat top surface for horizontal calibration. The normal (vertical) force exerted by the transfer head 11 on the horizontal jig 14 will cause damage to the pick-up head 111 of the transfer head 11.

[0053] The above are only the preferred embodiments of the present invention, and do not impose any form of limitation on the present invention. Although the present invention has been disclosed above with the preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art, without departing from the scope of the technical solution of the present invention, can make some changes or modifications using the above-disclosed technical content to form equivalent embodiments of equivalent changes. However, as long as the content does not depart from the technical solution of the present invention, any simple modification, equivalent change, and modification made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A transfer system for performing horizontal calibration, characterized in that Comprising: A transfer head for picking up micro-devices, the transfer head having a plurality of picking heads protruding from the bottom surface thereof; And A horizontal fixture for performing horizontal calibration of the transfer head, the horizontal fixture having a plurality of recessed holes recessed downward for respectively accommodating the plurality of picking heads, the depth of the recessed holes being greater than the height of the picking heads.

2. The transfer system for performing horizontal calibration according to claim 1, characterized in that, The size of the micro-device is less than 100 microns.

3. The transfer system for performing horizontal calibration according to claim 1, wherein, The transfer head uses vacuum force, electromagnetic force, van der Waals force or adhesive force to pick up the micro-device.

4. The transfer system for performing horizontal calibration according to claim 1, wherein Further comprising: An adapter disposed above the transfer head for supporting the transfer head.

5. The transfer system for performing horizontal calibration according to claim 1, wherein, The horizontal fixture comprises a hard material.

6. The transfer system for performing horizontal calibration according to claim 1, wherein The recessed holes of the horizontal fixture are formed by etching or laser drilling.

7. The transfer system for performing horizontal calibration according to claim 1, wherein The pitch of the recessed holes is greater than the width of the recessed holes, and is even greater than the width of the picking heads.

8. The transfer system for performing horizontal calibration according to claim 7, wherein, The ratio of the width of the recessed holes to the width of the picking heads is greater than 1 and less than or equal to 1.

5.

9. The transfer system for performing horizontal calibration according to claim 7, wherein, The ratio of the width of the recessed holes to the width of the picking heads is greater than 1.

5.

10. The transfer system for performing horizontal calibration according to claim 1, wherein, The plurality of recessed holes are interconnected to form a single recessed hole for accommodating all the picking heads of the transfer head.

11. A jig for performing horizontal calibration, characterized in that, Comprising: A horizontal fixture for performing horizontal calibration of a transfer head for picking up micro-devices, the transfer head having a plurality of picking heads protruding from the bottom surface thereof, the horizontal fixture having a plurality of recessed holes recessed downward for respectively accommodating the plurality of picking heads of the transfer head, the depth of the recessed holes being greater than the height of the picking heads.

12. The jig for performing horizontal calibration according to claim 11, wherein, The horizontal fixture comprises a hard material.

13. The jig for performing horizontal calibration according to claim 11, wherein The recessed holes of the horizontal fixture are formed by etching or laser drilling.

14. The jig for performing horizontal calibration according to claim 11, wherein, The pitch of the recessed holes is greater than the width of the recessed holes, and is even greater than the width of the picking heads.

15. The jig for performing horizontal calibration according to claim 14, wherein The ratio of the width of the recessed holes to the width of the picking heads is greater than 1 and less than or equal to 1.

5.

16. The jig for performing horizontal calibration according to claim 14, wherein, The ratio of the width of the recessed holes to the width of the picking heads is greater than 1.

5.

17. The jig for performing horizontal calibration according to claim 11, wherein, The plurality of recessed holes are interconnected to form a single recessed hole for accommodating all the picking heads of the transfer head.

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