Adjusting device, mobile vehicle and material handling system

Abstract

The present disclosure provides a kind of adjusting device, mobile vehicle and material handling system, it is related to material handling technical field, the adjusting device includes pedestal, swivel seat, drive assembly, wrench unit, positioning assembly and controller;Swivel seat is liftable and is set on pedestal;Wrench unit includes connecting seat, translation component and wrench, connecting seat is relative to swivel seat and is set around rotation;Translation component includes the translation piece that linearly slides relative to connecting seat, and wrench is rotationally arranged on translation piece;Drive assembly is configured to drive wrench unit movement, to make wrench unit move to different positions;Drive assembly and positioning assembly are electrically connected with controller, positioning assembly is used to determine the relative position of wrench unit and the part to be turned, and controller is used to control drive assembly according to relative position, to make drive assembly drive wrench unit adjust the part to be turned.The present disclosure can realize automatic adjustment of the part to be turned, and the adjustment efficiency is high, time-saving and labor-saving.

Description

Technical Field

[0001] This disclosure relates to the field of material handling technology, and in particular to an adjustment device, a mobile vehicle, and a material handling system. Background Technology

[0002] In semiconductor manufacturing, wafers need to be transferred between different processes. To avoid contamination or damage to the wafers, they are usually placed in wafer cassettes to carry them and facilitate the transfer.

[0003] Typically, wafer cassettes are transferred between different loading / unloading ports using an overhead hoist transfer (OHT) mechanism. In some embodiments, the OHT includes a track, a crane, and a gripping device. The crane moves along the track, and the gripping device is connected to the crane. When the crane moves above a loading / unloading port, the gripping device lowers the wafer cassette it has gripped to the port. However, due to vibrations generated by the track suspended from ceiling supports during prolonged operation, or due to factors such as uneven stress causing deviations in the track's level, the crane may shift, preventing the wafer cassette from being correctly placed at the loading / unloading port. This wafer cassette shift can affect subsequent manufacturing processes and negatively impact semiconductor yield.

[0004] However, in related technologies, the adjustment of the track mainly relies on manual adjustment, which is time-consuming and labor-intensive. Summary of the Invention

[0005] In view of the above problems, the present disclosure provides an adjustment device, a mobile vehicle and a material handling system, which can realize automatic track adjustment, improve track adjustment efficiency and save time and effort.

[0006] To achieve the above objectives, the present disclosure provides the following technical solutions:

[0007] A first aspect of this disclosure provides an adjustment device, comprising: a base, a rotary seat, a drive assembly, a wrench unit, a positioning assembly, and a controller; the rotary seat is vertically and elliptically mounted on the base; the wrench unit includes a connecting seat, a translation assembly, and a wrench, the connecting seat being rotatably mounted relative to the rotary seat; the translation assembly includes a translation member that slides linearly relative to the connecting seat, and the wrench is rotatably mounted on the translation member; the drive assembly is configured to drive the wrench unit to move to different positions; both the drive assembly and the positioning assembly are electrically connected to the controller, the positioning assembly is used to determine the relative position of the wrench unit and a workpiece to be adjusted, and the controller is used to control the drive assembly according to the relative position, so that the drive assembly drives the wrench unit to adjust the workpiece to be adjusted.

[0008] In some embodiments, the driving assembly includes a first driving unit, a second driving unit, and a third driving unit; the first driving unit is connected to the rotary seat and the connecting seat respectively, and is configured to drive the connecting seat to rotate about a vertical axis; the second driving unit is connected to the connecting seat and the translation member respectively, and is configured to drive the translation member to move linearly in the horizontal direction; the third driving unit is connected to the wrench and the translation member respectively, and is configured to drive the wrench to swing relative to the translation member about a vertical axis.

[0009] In some embodiments, a lifting assembly is further included, the lifting assembly including at least one set of support arms, the support arm set including at least two support arms arranged crosswise, the two ends of the support arms being hinged to the base and the swivel seat respectively.

[0010] In some embodiments, the drive assembly further includes a fourth drive unit connected to the support arm group, the fourth drive unit being configured to drive at least one of the support arms in the support arm group to move relative to the base, thereby causing the rotary seat to move up and down relative to the base.

[0011] In some embodiments, the translation assembly further includes a guide rod and a first slider slidably disposed on the guide rod, the guide rod being fixed to the connecting seat and extending in a horizontal direction, and the first slider being fixed to the translation member.

[0012] In some embodiments, the wrench includes a wrench body, a screw assembly, and a movable clamping body. The screw assembly is disposed on the wrench body and is rotatable relative to the wrench body about its own axis. The movable clamping body is connected to the screw assembly and moves relative to the wrench body as the screw assembly rotates. The movable clamping body and the wrench body together form an openable clamping arm.

[0013] In some embodiments, the drive assembly further includes a fifth drive unit disposed on the translation member, and the output end of the fifth drive unit is connected to the screw assembly to drive the clamp arm to open and close.

[0014] In some embodiments, the positioning component includes a first position sensor, a second position sensor, and a third position sensor. The first position sensor is configured to determine the position of the wrench unit relative to the member to be moved in the direction of movement of the translation member; the second position sensor is configured to determine the position of the wrench unit relative to the member to be moved in the vertical direction; and the third position sensor is configured to determine the position of the wrench unit relative to the member to be moved in the direction about a vertical axis of rotation.

[0015] In some embodiments, the positioning component further includes a fourth position sensor disposed on the movable clamp and configured to determine the position of the movable clamp relative to the member to be actuated.

[0016] A second aspect of this disclosure provides a mobile vehicle, including: a vehicle body and the aforementioned adjustment device, wherein the adjustment device is disposed on the vehicle body, and the vehicle body can drive the adjustment device to move along the extension direction of the track on the track, and the adjustment device is used to adjust a member to be moved that is fixed on the track.

[0017] In some embodiments, an automatic measurement component is also included, which is configured to detect the levelness of the current position of the track.

[0018] In some embodiments, the automatic measurement component includes a first level and a second level, which are respectively disposed on the vehicle body. The first level is used to detect the levelness of the track in a first direction, and the second level is used to detect the levelness of the track in a second direction. The first direction is the same as the extension direction of the track, and the second direction is perpendicular to the first direction in the horizontal plane.

[0019] In some embodiments, there are at least two of the first level and at least two of the second level. The at least two first level are respectively disposed at opposite ends of the vehicle body along a first direction and located in the middle region of the vehicle body along a second direction; the at least two second level are respectively disposed at opposite ends of the vehicle body along the second direction and located in the middle region of the vehicle body along the first direction.

[0020] A third aspect of this disclosure also includes a material handling system comprising a connecting rod, a track suspended below the connecting rod, an adjustment device as described above, or a moving vehicle as described above, wherein a member to be moved is screwed onto the connecting rod, and the suspension height of the track changes with the rotation of the member to be moved relative to the connecting rod; the adjustment device is configured to perform a moving operation on the member to be moved to cause the member to be moved to rotate relative to the connecting rod.

[0021] In some embodiments, the connecting rod is a screw, and the actuated component is a nut screwed onto the screw.

[0022] In some embodiments, the actuated component includes a first limiting nut and a second limiting nut, which are spaced apart on the screw and helically connected to the screw, so that when the first limiting nut and the second limiting nut rotate relative to the screw, they can move relative to the screw along the axial direction of the screw.

[0023] The adjustment device provided in this embodiment includes a base, a rotary seat, a drive assembly, a wrench unit, a positioning assembly, and a controller. The rotary seat is vertically and flexibly mounted on the base. The wrench unit includes a connecting seat, a translation assembly, and a wrench, with the connecting seat rotatably mounted relative to the rotary seat. The translation assembly includes a translation member that slides linearly relative to the connecting seat, and the wrench is rotatably mounted on the translation member. The drive assembly is configured to drive the wrench unit to move to different positions. Both the drive assembly and the positioning assembly are electrically connected to the controller. The positioning assembly determines the relative position of the wrench unit and the workpiece to be adjusted, and the controller controls the drive assembly based on the relative position to drive the wrench unit to adjust the workpiece. This solution improves the automation level of adjusting the workpiece, saves time and manpower, and is both time-saving and labor-saving.

[0024] In addition to the technical problems solved by the embodiments of this disclosure, the technical features constituting the technical solutions, and the beneficial effects brought about by the technical features of these technical solutions described above, other technical problems that can be solved by the adjustment device, mobile vehicle, and material handling system provided by the embodiments of this disclosure, other technical features included in the technical solutions, and the beneficial effects brought about by these technical features will be further described in detail in the specific embodiments. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of a material handling system provided in an embodiment of this disclosure;

[0027] Figure 2 This is a schematic diagram of the track structure in the material handling system provided in the embodiments of this disclosure;

[0028] Figure 3 for Figure 2 A magnified view of a section at point A in the middle;

[0029] Figure 4 This is a schematic diagram of the structure of the adjustment device provided in the embodiments of this disclosure;

[0030] Figure 5 This is a schematic diagram showing the connection between the base and the rotary seat in the adjustment device provided in the embodiments of this disclosure;

[0031] Figure 6A schematic diagram of the structure of the rotary seat and the first drive unit in the adjustment device provided in the embodiments of this disclosure;

[0032] Figure 7 This is a schematic diagram of the structure of the wrench unit in the adjustment device provided in the embodiments of this disclosure;

[0033] Figure 8 A schematic diagram of a state when the positioning component in the adjustment device provided in this embodiment is positioned;

[0034] Figure 9 A schematic diagram of another state of the positioning component in the adjustment device provided in the embodiments of this disclosure when it is positioned;

[0035] Figure 10 A schematic diagram of a state of the adjusting device provided in an embodiment of this disclosure when adjusting the part to be adjusted;

[0036] Figure 11 This is a top view of the structure of the mobile vehicle provided in Embodiment 2 of this disclosure;

[0037] Figure 12 This is a schematic flowchart of the adjustment method provided in Embodiment 4 of this disclosure.

[0038] Figure label:

[0039] 100 - Adjustment device; 110 - Base; 120 - Rotary seat; 121 - Third sensing element;

[0040] 130 - Drive assembly; 131 - First drive unit; 1311 - First drive motor;

[0041] 1312 - First bevel gear set; 1313 - First cylindrical gear set; 132 - Second drive unit;

[0042] 1321 - Second drive motor; 1322 - First lead screw; 133 - Third drive unit;

[0043] 1331 - Third drive motor; 1332 - Second bevel gear set; 1333 - Second cylindrical gear set;

[0044] 134-Fourth drive unit; 1341-Fourth drive motor; 1342-Second lead screw;

[0045] 135 - Fifth drive unit; 140 - Wrench unit; 141 - Connecting base; 142 - Translation assembly;

[0046] 1421-Translator; 1422-First slider; 1423-Guide rod; 143-Wrench;

[0047] 1431-Wrench body; 1432-Screw assembly; 1433-Moving clamp body; 1434-Fixed clamp body;

[0048] 150 - Lifting assembly; 151 - Support arm; 160 - Second slider; 170 - Guide rail; 180 - First pivot;

[0049] 190 - Positioning component; 191 - First position sensor; 192 - Second position sensor;

[0050] 193 - Third position sensor; 194 - Fourth position sensor;

[0051] 200 - Moving vehicle; 210 - Vehicle body; 220 - Automatic measuring component; 221 - First level;

[0052] 222 - Second level; 300 - Material handling system; 310 - Connecting rod; 311 - Second sensor;

[0053] 320- Track; 330- Part to be moved; 340- Machine base; 341- Loading / unloading port; 350- Clamping device. Detailed Implementation

[0054] This disclosure provides an adjustment device, a mobile vehicle, and a material handling system. The adjustment device can adjust the track according to the track offset, thereby improving the automation level of track offset adjustment and saving time and manpower when adjusting the track, thus saving time and effort.

[0055] To make the above-mentioned objects, features, and advantages of the embodiments of this disclosure more apparent and understandable, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this disclosure, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0056] Example 1

[0057] Figure 1 This is a schematic diagram of the structure of a material handling system provided in an embodiment of this disclosure; Figure 2 This is a schematic diagram of the track structure in the material handling system provided in the embodiments of this disclosure; Figure 3 for Figure 2 A magnified view of a section at point A in the middle; Figure 4 This is a schematic diagram of the structure of the adjustment device provided in the embodiments of this disclosure; Figure 5 This is a schematic diagram showing the connection between the base and the rotary seat in the adjustment device provided in the embodiments of this disclosure; Figure 6A schematic diagram of the structure of the rotary seat and the first drive unit in the adjustment device provided in the embodiments of this disclosure; Figure 7 This is a schematic diagram of the structure of the wrench unit in the adjustment device provided in the embodiments of this disclosure; Figure 8 A schematic diagram of a state when the positioning component in the adjustment device provided in this embodiment is positioned; Figure 9 A schematic diagram of another state of the positioning component in the adjustment device provided in the embodiments of this disclosure when it is positioned; Figure 10 This is a schematic diagram of one state of the adjustment device provided in the embodiments of this disclosure when adjusting the part to be moved.

[0058] Please refer to Figures 1 to 10 The adjustment device 100 provided in this embodiment includes: a base 110, a rotary base 120, a drive assembly 130, a wrench unit 140, a positioning assembly 190, and a controller (not shown in the figure).

[0059] Please refer to Figure 4 The rotary seat 120 is vertically mounted on the base 110. The rotary seat 120 can move up and down relative to the base 110 along the Z-axis direction so that the rotary seat 120 can be located at different heights relative to the base 110 in the Z-axis direction.

[0060] Please refer to Figure 4 and Figure 7 The wrench unit 140 includes a connecting seat 141, a translation component 142, and a wrench 143. The connecting seat 141 is rotatably disposed relative to the rotary seat 120 about a vertical axis. For example, the rotary seat 120 is horizontally disposed, and the vertical axis is vertically disposed on the rotary seat 120 and can rotate about its own axis. The connecting seat 141 can be disposed above the rotary seat 120 via the vertical axis (e.g., ...). Figure 4 As shown in the figure, when the vertical rotating shaft rotates around its own axis, it drives the connecting seat 141 to rotate together, so that the connecting seat 141 can rotate relative to the rotary seat 120 in the horizontal plane around the vertical rotating shaft, so that the wrench unit 140 can rotate to different positions relative to the rotary seat 120 in the horizontal plane.

[0061] Please continue to refer to Figure 4 and Figure 7 The translation assembly 142 includes a translation member 1421 that slides linearly relative to the connecting seat 141. A wrench 143 is rotatably mounted on the translation member 1421. For example, the connecting seat 141 is horizontally positioned above the rotary seat 120, and the translation member 1421 is mounted on the connecting seat 141 and can slide on it. For instance, the translation member 1421 can slide on the connecting seat 141 towards or away from the member to be moved 330, so that the wrench 143 located on the translation member 1421 is positioned at different locations along the direction of movement of the translation member 1421.

[0062] In some embodiments, the translation member 1421 may be a parallel plate horizontally disposed on the connecting seat 141 for supporting the wrench 143. The translation member 1421 may be a metal or non-metal component.

[0063] The drive assembly 130 is configured to drive the wrench unit 140 to move, thereby moving the wrench unit 140 to different positions; for example, such as Figure 4 As shown, the drive assembly 130 can drive the wrench unit 140 to move or rotate in the Z direction, the rotation direction around the Z axis, the X direction, etc., so that the wrench unit 140 is in different positions. Both the drive assembly 130 and the positioning assembly 190 are electrically connected to the controller. The positioning assembly is used to determine the relative position of the wrench unit 140 and the part to be turned 330. For example, the positioning assembly 190 can be used to determine the relative position of the wrench unit 140 and the part to be turned 330 in the Z direction, the rotation direction around the Z axis, the X direction, etc., so as to position the wrench unit 140 and the part to be turned 330. The controller is used to control the drive assembly 130 according to the relative position so that the drive assembly 130 drives the wrench unit 140 to adjust the part to be turned 330. In this way, the adjustment accuracy of the part to be turned 330 can be improved.

[0064] For example, such as Figure 1 and Figure 2 As shown, the track 320 is typically suspended from the ceiling by multiple screws. Each screw has a first limiting nut (e.g., an upper limiting nut) and a second limiting nut (e.g., a lower limiting nut) screwed onto it. The track 320 is connected to the screws via the first and second limiting nuts. When the first and second limiting nuts rotate relative to the screws, they can move relative to the screws along their axial direction to adjust the track 320 vertically. This ensures that the track 320 achieves a preset threshold level in both the X and Y directions, for example, a level of 0° ± 0.3° in both directions, thereby improving the accuracy of handling materials such as semiconductors.

[0065] Therefore, in this embodiment, the actuated component 330 can be a first limiting nut and a second limiting nut screwed onto the screw. By adjusting the positions of the first limiting nut and the second limiting nut on the screw, the levelness of the track 320 can be adjusted (e.g., Figure 2 and Figure 3 (as shown in the image).

[0066] Therefore, it can be seen that by using the above solution to adjust the part to be moved 330 through the adjustment device 100, adjustment time can be saved, adjustment efficiency can be improved, and labor costs during adjustment can be reduced, saving time and effort; at the same time, the accuracy of adjustment can also be improved.

[0067] Please continue to refer to Figure 4In some embodiments, the drive component 130 includes a first drive unit 131, a second drive unit 132, and a third drive unit 133.

[0068] Please continue to refer to Figure 4 The first drive unit 131 is connected to the rotary seat 120 and the connecting seat 141 respectively, so as to drive the connecting seat 141 to rotate around the vertical axis. It can be understood that the first drive unit 131 can provide power to the connecting seat 141 so that the connecting seat 141 can rotate relative to the rotary seat 120 around the vertical axis (e.g., the Z-axis).

[0069] Please continue to refer to Figure 4 and 6 In some embodiments, the first drive unit 131 includes a first drive motor 1311, a set of meshing first bevel gears 1312, and a set of meshing first cylindrical gears 1313. The output end of the first drive motor 1311 is connected to the input end of the first bevel gears 1312, and the output end of the first bevel gears 1312 is connected to the input end of the first cylindrical gears 1313. The first drive motor 1311 drives the first bevel gears 1312 to move, thereby driving the first cylindrical gears 1313 to move. This causes the output end of the first cylindrical gears 1313 to drive the vertical shaft (represented by the first shaft 180) connected between the connecting seat 141 and the rotary seat 120 to rotate, so that the first shaft 180 drives the connecting seat 141 to rotate relative to the rotary seat 120 around the axis of the first shaft 180.

[0070] It is understandable that by setting a set of meshing first bevel gears 1312 between the first drive motor 1311 and a set of meshing first cylindrical gears 1313, the motion of the first drive motor 1311 along the X-axis (or Y-axis) can be converted into the motion of rotation around the Z-axis, thereby achieving the purpose of the connecting seat 141 rotating relative to the vertical shaft of the rotary seat 120.

[0071] Please refer to Figure 2 and Figure 3 The second drive unit 132 is connected between the connecting seat 141 and the translation member 1421 to drive the translation member 1421 to move linearly in the horizontal direction. For example, the second drive unit 132 provides power to the translation member 1421 so that the translation member 1421 moves horizontally relative to the connecting seat 141 (e.g., ...). Figure 3 The X-axis shown in the figure moves linearly so that the wrench 143 can move closer to or away from the member to be wrenched 330.

[0072] Please refer to Figure 4 and Figure 7In some embodiments, the second drive unit 132 includes a second drive motor 1321 and a first lead screw 1322, with the output end of the second drive motor 1321 connected to the first lead screw 1322; the translation assembly 142 further includes a guide rod 1423 and a first slider 1422 slidably disposed on the guide rod 1423, the guide rod 1423 being fixed to the connecting seat 141 and extending horizontally, the first slider 1422 being fixed to the translation member 1421, and the first slider 1422 being provided with... The first slider 1422 has a threaded hole through which the first lead screw 1322 passes, and a through hole through which the guide rod 1423 passes, so that the first lead screw 1322 and the first slider 1422 are threadedly engaged. Thus, when the second drive motor 1321 drives the first lead screw 1322 to rotate around its own axis, the first slider 1422 can move along the extension direction of the first lead screw 1322 with the guide rod 1423 as a guide, thereby driving the translation member 1421 located above the first slider 1422 to move horizontally (e.g., ...). Figure 3 The wrench 143 moves linearly (in the X direction) to move closer to or further away from the part to be actuated 330. By mounting the first slider 1422 on the guide rod 1423 and allowing it to move along the guide rod 1423, the guiding nature of the first slider 1422 during movement is improved. This prevents the first slider 1422 from deviating during movement and getting stuck between itself and the first lead screw 1322, thus improving the reliability of the movement of the first slider 1422 relative to the first lead screw 1322.

[0073] Please continue to refer to Figure 4 and Figure 7 The third drive unit 133 is connected to the wrench 143 and the translation component 1421 respectively, and drives the wrench 143 to rotate around the vertical axis (e.g., Figure 3 The Z-axis of the device swings relative to the translation member 1421 so that the wrench 143 can drive the member to be turned 330 to rotate, thereby achieving the purpose of the adjustment device 100 to adjust the member to be turned 330.

[0074] Please continue to refer to Figure 4 and Figure 7In some embodiments, the third drive unit 133 includes a third drive motor 1331, a meshing second bevel gear set 1332, and a meshing second cylindrical gear set 1333. The output end of the third drive motor 1331 is connected to the input end of the second bevel gear set 1332, and the output end of the second bevel gear set 1332 is connected to the input end of the second cylindrical gear set 1333. The output wheel of the second cylindrical gear set 1333 is connected to a wrench 143 so that the third drive motor 1331 drives the second bevel gear set 1332 to move, and the second bevel gear set 1332 drives the second cylindrical gear set 1333 to move, thereby causing the second cylindrical gear set 1333 to drive the wrench 143 to rotate around the axis of the output wheel of the second cylindrical gear set 1333. When the wrench 143 clamps the part to be turned 330, the wrench 143 drives the part to be turned 330 to rotate, so as to achieve the purpose of adjusting the part to be turned 330.

[0075] In the above scheme, the automation of the regulating device during regulation can be achieved through the drive component, thereby improving the regulation efficiency.

[0076] Please return to the reference. Figure 4 and Figure 5 In some embodiments, the adjustment device 100 further includes a lifting assembly 150, which includes at least one set of support arms. The support arm set includes at least two support arms 151 arranged crosswise, and the two ends of the at least two support arms 151 are respectively hinged to the base 110 and the rotary seat 120.

[0077] For example, in Figure 4 and Figure 5 In the lifting assembly 150, there are two sets of support arm groups. The two sets of support arm groups are arranged opposite to each other and spaced apart between the base 110 and the rotary seat 120, so that the rotary seat 120 can be supported by the two sets of support arm groups. The two ends of one support arm 151 in the support arm group are hinged to the base 110 and the rotary seat 120 respectively, while one end of the other support arm 151 in the support arm group is hinged to the rotary seat 120, and the other end of the support arm 151 moves on the base 110. In this way, when the two intersecting support arms 151 rotate relative to the hinge point of the base 110 and the rotary seat 120, the end of the support arm 151 that is movably connected to the base 110 moves relative to the base 110 on the surface of the base 110, so that the intersecting support arms 151 can drive the rotary seat 120 to move vertically up and down relative to the base 110.

[0078] Please continue to refer to Figure 4 and Figure 5In some embodiments, the drive assembly 130 further includes a fourth drive unit 134, which is connected to the support arm assembly to drive at least one end of at least two cross-arranged support arms 151 to move relative to the base 110 in a horizontal plane, thereby causing the rotary seat 120 to move up and down relative to the base 110.

[0079] In some embodiments, such as in Figure 4 and Figure 5 In this configuration, the fourth drive unit 134 includes a fourth drive motor 1341 and a second lead screw 1342 connected to the fourth drive motor 1341. The second lead screw 1342 is connected to the output end of the fourth drive motor 1341 so that the fourth drive motor 1341 drives the second lead screw 1342 to rotate around its own axis. The second lead screw 1342 is axially horizontally arranged on the base 110. The base 110 is also provided with a second slider 160 and a guide rail 170 arranged parallel to the axis of the second lead screw 1342. The second lead screw 1342 passes through the second slider 160 and is threadedly engaged with the second slider 160. One end of the support arm 151 that moves relative to the base 110 in the horizontal plane is connected to the second slider 160. Thus, when the fourth drive motor 1341 drives the second lead screw 1342 to rotate around its own axis, the second slider 160 can drive the support arm 151 connected to it to move along the guide rail 170, thereby driving the rotary seat 120 to move up and down relative to the base 110 in the vertical direction.

[0080] It is understandable that by setting a guide rail 170 on the base 110, the second slider 160 can move along the guide rail 170 under the driving force of the fourth drive motor 1341. This can guide the movement of the second slider 160 on the base 110, avoid the problem of the second slider 160 deviating and getting stuck with the second lead screw 1342, and thus improve the reliability of the rotary seat 120 moving vertically relative to the base 110.

[0081] Please continue to refer to Figure 4 and Figure 7 In some embodiments, the wrench 143 includes a wrench body 1431, a screw assembly 1432, and a movable clamp body 1433. The screw assembly 1432 is disposed on the wrench body 1431 and can rotate relative to the wrench body 1431 about its own axis. The movable clamp body 1433 is fixedly connected to the screw assembly 1432 so as to move relative to the wrench body 1431 as the screw assembly 1432 rotates. The movable clamp body 1433 and the wrench body 1431 together form an openable and closable clamp arm.

[0082] It is understood that the wrench body 1431 has a fixed clamping body 1434 disposed opposite to the movable clamping body 1433, wherein, in Figure 4In the middle, the movable clamp 1433 can move along the Y-axis so that the movable clamp 1433 can move towards or away from the fixed clamp 1434, thereby forming an openable clamp arm between the fixed clamp 1434 and the movable clamp 1433.

[0083] For example, please refer to Figures 8 to 10 As shown, when the wrench 143 needs to adjust the part to be adjusted 330, the wrench 143 is moved so that the part to be adjusted 330 is located between the movable clamp 1433 and the fixed clamp 1434. When the movable clamp 1433 is driven to move closer to the fixed clamp 1434, the opening formed between the movable clamp 1433 and the fixed clamp 1434 gradually decreases until the part to be adjusted 330 is clamped between the movable clamp 1433 and the fixed clamp 1434 and the preset pressure is reached, the wrench 143 is driven relative to the center of the part to be adjusted 330. When the wrench 143 rotates to its maximum rotation angle, the movable clamp 1433 moves away from the fixed clamp 1434, and the movable clamp 1433 and the part to be moved 330 are repositioned. After the repositioning is completed, the movable clamp 1433 moves closer to the fixed clamp 1434, so that the part to be moved 330 is clamped between the movable clamp 1433 and the fixed clamp 1434, and the wrench 143 continues to rotate relative to the center of the part to be moved 330. The above actions are repeated until the part to be moved 330 is adjusted to the target position.

[0084] Please refer to Figure 4 In some embodiments, the drive assembly 130 further includes a fifth drive unit 135, which is disposed on the translation member 1421. The output end of the fifth drive unit 135 is connected to the input end of the screw assembly 1432. The output end of the screw assembly 1432 is connected to the movable clamp 1433 of the wrench 143, so that the movable clamp 1433 can be driven by the fifth drive unit 135 through the screw assembly 1432 to move in, for example, the Y direction, so that the clamp arm of the wrench 143 can open and close, thereby clamping or releasing the member 330 to be operated.

[0085] Among them, Figure 4 and Figure 7 In the process, the fifth drive unit 135 includes a fifth drive motor; the screw assembly 1432 may include at least one set of mutually meshing screws, for example, in Figure 3 In the screw assembly 1432, there are a first screw and a second screw. The first screw is connected to the output end of the fifth drive motor. The second screw meshes with the first screw and is connected to the movable clamp 1433. When the fifth drive motor drives the first screw to rotate around its own axis, the second screw moves along the axial direction of the first screw, so that the second screw drives the movable clamp 1433 to move, thereby forming an openable clamp arm.

[0086] Please refer to Figure 8 In some embodiments, the positioning component 190 includes a first position sensor 191, a second position sensor 192, and a third position sensor 193. The first position sensor 191 is used to determine the position of the wrench unit 140 relative to the member to be wrenched 330 in the direction of movement of the translation member 1421. The second position sensor 192 is configured to determine the position of the wrench unit 140 relative to the member to be wrenched 330 in the vertical direction. The third position sensor 193 is configured to determine the position of the wrench unit 140 relative to the member to be wrenched 330 in the direction about the vertical axis of rotation.

[0087] Please refer to Figure 9 In some embodiments, the positioning component 190 further includes a fourth position sensor 194 disposed on the wrench body. The fourth position sensor 194 is configured to determine the position of the movable clamp 1433 on the part to be manipulated 330, so as to determine whether the clamping surface of the movable clamp 1433 for clamping the part to be manipulated 330 is parallel to the clamped surface of the part to be manipulated 330 before the part to be manipulated is adjusted.

[0088] In the above scheme, by setting the first position sensor 191, the second position sensor 192, the third position sensor 193 and the fourth position sensor 194, the wrench 143 and the part to be moved 330 can be positioned to determine the relative position between the wrench 143 and the part to be moved 330 before adjustment, thus improving the adjustment accuracy.

[0089] Please continue to refer to Figure 8 and Figure 9For example, the first position sensor 191 can be disposed on the side of the adjusting device 100 facing the member to be moved 330. The member to be moved 330 is provided with a first sensing element (not shown in the figure) that senses the first position sensor 191. When the first position sensor 191 and the first sensing element sense each other, the relative position of the wrench 143 and the member to be moved 330 in, for example, the X direction can be determined. The second position sensor 192 is disposed on the side of the wrench unit 140 facing the member to be moved 330. The connecting rod 310 is provided with a second sensing element 311 that senses the second position sensor 192. When the wrench unit 140 moves up and down until the second position sensor 192 and the second sensing element 311 sense each other, the relative position of the wrench 143 and the member to be moved 330 in, for example, the Z-axis direction can be determined. The third position sensor 193 can be disposed on the side of the adjusting device 100 facing the member to be moved 330. On the output wheel of a cylindrical gear set 1313, a third sensing element 121 is provided on the rotary seat 120, which senses the third position sensor 193. When the wrench unit 140 rotates to the point where the third position sensor 193 and the third sensing element 121 sense each other, the relative position of the wrench 143 and the workpiece 330 to be moved can be determined in, for example, the rotation direction around the Z-axis. A fourth position sensor 194 can be provided on the side of the movable clamp 1433 facing the fixed clamp 1434 (i.e., the clamping surface used to clamp the workpiece 330 to be moved). It can be used to determine whether the clamping surface of the movable clamp 1433 and the clamped surface of the workpiece 330 to be moved are parallel to each other. There can be two fourth position sensors 194. When the side distance or pressure of the two fourth position sensors 194 to the workpiece 330 to be moved is equal, the positioning ends; otherwise, the positioning is re-positioned.

[0090] In some embodiments, at least one of the first position sensor 191, the second position sensor 192, and the third position sensor 193 is a proximity sensor.

[0091] For example, the first position sensor 191 can be a barcode reader, and the first sensing element can be a barcode that can be read by the barcode reader. When the barcode reader reads the barcode, it can determine the relative position of the wrench 143 and the part to be moved 330 in, for example, the X direction. The second position sensor 192 can be a magnetic sensor, and the second sensing element 311 can be a magnetic element with the opposite magnetic properties to the second position sensor 192. The third position sensor 193 can be a proximity sensor, and the third sensing element 121 can be a proximity sensing element that is sensed by the proximity sensor. The fourth position sensor 194 can be a pressure sensor. For example, the movable clamp 1433 has two pressure sensors. When the movable clamp 1433 abuts against the side of the part to be moved 330, the positioning ends when the pressure values ​​on the two pressure sensors are equal.

[0092] Example 2

[0093] Figure 11 This is a top view structural diagram of the mobile vehicle provided in Embodiment 2 of this disclosure. Please refer to... Figure 1 and Figure 11 This disclosure also provides a mobile vehicle 200, which can be mounted on a track 320, and the track 320 can be horizontally mounted. The mobile vehicle 200 includes a vehicle body 210 and an adjustment device 100 as described in the above embodiment. The adjustment device 100 is mounted on the vehicle body 210, and the vehicle body 210 can drive the adjustment device 100 to move along the extension direction of the track 320. The adjustment device 100 is used to automatically adjust the movable part 330 of the track 320 so that the horizontality of the track 320 reaches a preset threshold.

[0094] The structure and working principle of the regulating device 100 have been described in detail in the above embodiments, and will not be repeated here.

[0095] like Figure 11 As shown, the first position sensor 191 can also be set at the front end of the moving vehicle 200. It can be understood that the front end of the moving vehicle 200 refers to the end of the moving vehicle 200 that first approaches the part to be moved 330 when the moving vehicle 200 moves toward the part to be moved 330.

[0096] Please refer to Figure 1 and Figure 11 In some embodiments, the vehicle body 210 can be an overhead crane for transporting materials. It is understood that the overhead crane has a frame and wheels located at the bottom of the frame to drive the vehicle body 210 to move. The structure and working principle of the overhead crane can be referred to the structure and principle in related technologies, and will not be repeated here.

[0097] Please refer to Figure 11 As shown, in some embodiments, the mobile vehicle 200 further includes an automatic measurement component 220. The automatic measurement component 220 can be used to measure the levelness data of the track 320 to determine whether the track 320 is offset based on the measured levelness data. The automatic measurement component 220 is connected to the controller in the adjustment device 100. If the current levelness of the track 320 is offset, the adjustment data of the height that the track 320 needs to be adjusted and the angle that the movable part 330 needs to be rotated are obtained through the offset value. The controller can control the adjustment device 100 to adjust the movable part 330 of the fixed track 320 according to the adjustment data, so that the movable part 330 can move in the vertical direction relative to the screw of the suspended track 320, thereby achieving the purpose of adjusting the levelness of the track 320.

[0098] Please refer to Figure 11In some embodiments, the automatic measurement component 220 includes a first level 221 and a second level 222, which are respectively disposed on the vehicle body 210. The first level 221 is used to detect the levelness of the track 320 in a first direction (e.g., the X direction), and the second level 222 is used to detect the levelness of the track 320 in a second direction (e.g., the Y direction). The first direction is the same as the extension direction of the track 320, and the second direction is perpendicular to the first direction in the horizontal plane.

[0099] There are at least two first level instruments 221 and at least two second level instruments 222. The at least two first level instruments 221 are respectively disposed at opposite ends of the vehicle body 210 along a first direction and located in the middle region of the vehicle body 210 along a second direction; the at least two second level instruments 222 are respectively disposed at opposite ends of the vehicle body 210 along the second direction and located in the middle region of the vehicle body 210 along the first direction. It can be understood that by disposing of the first level instruments 221 and the second level instruments 222 in the middle region around the vehicle body 210, the levelness of the track 320 corresponding to the current position of the vehicle body 210 can be accurately detected when the vehicle body 210 moves along the track 320, thereby improving measurement accuracy.

[0100] After the automatic measuring component 220 detects the levelness data of the track 320, the controller can transmit the measured levelness data of the track 320 to a mobile terminal (such as a personal computer) via an APP. The mobile terminal calculates the height to be adjusted of the track 320 and the angle to be rotated of the lever 330, and feeds this data back to the adjusting device 100. The controller in the adjusting device 100 controls the adjusting device 100 to adjust the lever 330 according to the received adjustment data, so that the levelness of the track 320 reaches a preset threshold. For example, the preset threshold can be 0°±0.3°, thereby realizing automatic measurement and automatic adjustment of the levelness of the track 320, which can save time and labor costs and has high adjustment accuracy.

[0101] Example 3

[0102] Please return to the reference. Figures 1 to 3This disclosure also provides a material handling system 300, which can transport wafer materials between various processing machines for corresponding semiconductor processing production. The material handling system 300 includes a connecting rod 310 and a track 320 suspended below the connecting rod 310. The adjusting device 100 or the moving vehicle 200 provided in the above embodiments are also included. A member to be moved 330 is screwed onto the connecting rod 310. The suspension height of the track 320 changes with the rotation of the member to be moved 330 relative to the connecting rod 310. The adjusting device 100 is configured to perform a moving operation on the member to be moved 330 to rotate the member to be moved relative to the connecting rod 310.

[0103] In some embodiments, such as Figure 2 As shown, the track 320 is suspended from the ceiling by multiple connecting rods 310. For example, the track 320 is suspended from the ceiling by four or six connecting rods 310. Figure 7 In the middle, there are six connecting rods 310.

[0104] It should be noted that the number of connecting rods 310 can be adaptively designed according to the strength of the suspension rail 320, and no specific limit is imposed here.

[0105] In some embodiments, such as Figure 2 and Figure 3 As shown, the connecting rod 310 is a screw, and the actuated part 330 is a nut screwed onto the screw. When the nut rotates relative to the screw, the nut can move along the axial direction of the screw.

[0106] In some embodiments, please refer to Figure 3 The actuated part 330 includes a first limiting nut and a second limiting nut. The first limiting nut and the second limiting nut are spaced apart on the screw and are helically connected to the screw, so that when the first limiting nut and the second limiting nut rotate relative to the screw, they can move relative to the screw along the axial direction of the screw.

[0107] For example, such as Figure 3 As shown, each screw is screwed with a first limiting nut and a second limiting nut, with the first limiting nut located above the second limiting nut. When the track 320 needs to be adjusted upward, the first limiting nut can be adjusted upward to a preset position using the adjusting device 100, and then the second limiting nut can be adjusted using the adjusting device 100. When the track 320 needs to be adjusted downward, the second limiting nut can be adjusted downward to a preset position using the adjusting device 100, and then the first limiting nut can be adjusted using the adjusting device 100.

[0108] In some embodiments, such as Figure 1As shown, the material handling system 300 also includes a machine 340 for processing materials. The machine 340 is equipped with a loading / unloading port 341. The materials can be wafer cassettes containing wafers or other materials. A mobile vehicle 200, equipped with an adjustment device 100 and an automatic measurement component 220, can move above the machine 340. A clamping device 350 is located below the mobile vehicle 200 to grip the wafer cassettes, allowing it to lower the wafer cassettes gripped by the clamping device 350 to the loading / unloading port 341, or to grip the wafer cassettes in the loading / unloading port 341, thereby realizing the handling of the wafer cassettes. During the process of the mobile vehicle handling the wafer cassettes, automatic measurement... Component 220 can periodically measure whether the level of track 320 is deviated. If the level of track 320 is deviated, the controller will transmit the measured data to a mobile terminal (such as a personal computer) through the APP. The mobile terminal will calculate the height that track 320 needs to be adjusted and the angle that the lever 330 needs to be rotated, and feed this data back to the adjustment device 100. The controller in the adjustment device 100 will control the adjustment device 100 to adjust the lever 330 according to the received adjustment data, so that the level of track 320 reaches a preset threshold (e.g., the level reaches 0°±0.3°).

[0109] Example 4

[0110] Figure 12 This is a schematic flowchart of the adjustment method provided in Embodiment 4 of this disclosure. Please refer to... Figure 12 As shown, this embodiment of the disclosure provides an adjustment method applied to the above-mentioned adjustment device, the steps of which include:

[0111] Step S101: Determine the relative position of the adjustment device and the part to be moved by the positioning component in the adjustment device.

[0112] Step S102: When the adjusting device and the part to be moved are in a preset relative position, control the wrench in the adjusting device to translate in the horizontal plane and swing around the vertical axis so that the wrench can perform the operation on the part to be moved.

[0113] When the adjusting device and the part to be adjusted are in a preset relative position, the lever in the adjusting device is controlled to translate in the horizontal plane and swing around a vertical axis, specifically including at least one of the following operations (e.g., A, B, C, D):

[0114] A: The rotary seat in the control and adjustment device moves up and down relative to the base.

[0115] B: The connecting seat in the control and adjustment device rotates relative to the rotary seat about the vertical axis.

[0116] C: The translation component in the control and adjustment device slides linearly relative to the connecting seat.

[0117] D: The wrench in the control and adjustment device swings about the vertical axis relative to the translation component.

[0118] In some embodiments, after determining the relative position of the adjusting device and the part to be adjusted by the positioning component in the adjusting device, the method further includes: controlling the wrench in the adjusting device to move relative to the base in the adjusting device, so that the wrench and the part to be adjusted are in a preset relative position.

[0119] In practice, the levelness data of the track is measured. Based on this levelness data, the height to be adjusted on the track and the rotation angle of the part to be moved are determined. The adjusting device adjusts the part to be moved according to the determined height and rotation angle. Before adjustment, the relative position between the adjusting device and the part to be moved is first determined by the positioning component in the adjusting device. When the adjusting device and the part to be moved are in the preset relative position, the controller controls the wrench in the adjusting device to translate in the horizontal plane (e.g., ...). Figure 10 The wrench is used to clamp the workpiece in the Y direction, and the wrench is controlled to swing around the vertical axis to rotate the workpiece and move it vertically. When the wrench reaches its maximum position, it moves in the opposite direction along the translation direction to release the workpiece and reposition the wrench and workpiece. Then, the wrench in the adjustment device is controlled by the controller to translate in the horizontal plane to clamp the workpiece and swing around the vertical axis. The above steps are repeated until the workpiece is adjusted to the preset position and the levelness of the track reaches the preset threshold (e.g., 0°±0.3°), at which point the adjustment ends.

[0120] Therefore, the above solution can automatically adjust the lever, saving time and labor costs, and improving adjustment accuracy.

[0121] The various embodiments or implementation methods described in this specification are presented in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be referred to each other.

[0122] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with an embodiment or example is included in at least one embodiment or example of this disclosure. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0123] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this disclosure, and are not intended to limit them. Although this disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this disclosure.

Claims

1. An adjusting device, characterized in that, include: The system comprises a base, a rotary seat, a drive assembly, a wrench unit, a positioning assembly, and a controller; the rotary seat is vertically and flexibly mounted on the base; the wrench unit includes a connecting seat, a translation assembly, and a wrench, wherein the connecting seat is rotatably mounted relative to the rotary seat. The translation component includes a translation member that slides linearly relative to the connecting seat, and the wrench is rotatably mounted on the translation member; the drive component is configured to drive the wrench unit to move to different positions; both the drive component and the positioning component are electrically connected to the controller, the positioning component is used to determine the relative position of the wrench unit and the workpiece to be moved, and the controller is used to control the drive component according to the relative position, so that the drive component drives the wrench unit to adjust the workpiece to be moved; The drive assembly includes a first drive unit, a second drive unit, and a third drive unit, as well as a lifting assembly; The first drive unit is connected to the rotary seat and the connecting seat respectively, and is configured to drive the connecting seat to rotate about a vertical axis; the second drive unit is connected between the connecting seat and the translation member respectively, and is configured to drive the translation member to move linearly in the horizontal direction; the third drive unit is connected to the wrench and the translation member respectively, and is configured to drive the wrench to swing relative to the translation member about a vertical axis; the lifting assembly includes at least one set of support arm groups, the support arm groups include at least two support arms arranged crosswise, and the two ends of the support arms are respectively hinged to the base and the rotary seat; The wrench includes a wrench body, a screw assembly, and a movable clamping body. The screw assembly is disposed on the wrench body and can rotate relative to the wrench body about its own axis. The movable clamping body is connected to the screw assembly and moves relative to the wrench body as the screw assembly rotates. The movable clamping body and the wrench body together form an openable and closable clamping arm. The positioning component includes a first position sensor, a second position sensor, and a third position sensor. The first position sensor is configured to determine the position of the wrench unit relative to the part to be moved in the direction of movement of the translation member. The second position sensor is configured to determine the position of the wrench unit relative to the part to be moved in the vertical direction. The third position sensor is configured to determine the position of the wrench unit relative to the part to be moved in the direction about a vertical axis.

2. The adjusting device according to claim 1, characterized in that, The drive assembly further includes a fourth drive unit connected to the support arm group. The fourth drive unit is configured to drive at least one of the support arms in the support arm group to move relative to the base, thereby causing the rotary seat to move up and down relative to the base.

3. The adjusting device according to claim 1 or 2, characterized in that, The translation component further includes a guide rod and a first slider slidably disposed on the guide rod. The guide rod is fixed to the connecting seat and extends in the horizontal direction, and the first slider is fixed to the translation component.

4. The adjusting device according to claim 1, characterized in that, The drive assembly further includes a fifth drive unit, which is disposed on the translation member and its output end is connected to the screw assembly to drive the clamp arm to open and close.

5. The adjusting device according to claim 1, characterized in that, The positioning component further includes a fourth position sensor disposed on the movable clamp body, the fourth position sensor being configured to determine the position of the movable clamp body relative to the part to be manipulated.

6. A mobile vehicle, mounted on a track, characterized in that, include: The vehicle body and the adjustment device according to any one of claims 1-5, wherein the adjustment device is disposed on the vehicle body, the vehicle body can drive the adjustment device to move along the extension direction of the track, and the adjustment device is used to adjust the movable part that is fixed on the track.

7. The mobile vehicle according to claim 6, characterized in that, It also includes an automatic measurement component configured to measure the levelness of the current position of the track.

8. The mobile vehicle according to claim 7, characterized in that, The automatic measurement component includes a first level and a second level, which are respectively mounted on the vehicle body. The first level is used to detect the levelness of the track in a first direction, and the second level is used to detect the levelness of the track in a second direction. The first direction is the same as the extension direction of the track, and the second direction is perpendicular to the first direction in the horizontal plane.

9. The mobile vehicle according to claim 8, characterized in that, There are at least two of each of the first and second levels, with at least two of the first levels respectively located at opposite ends of the vehicle body along a first direction; and at least two of the second levels respectively located at opposite ends of the vehicle body along a second direction.

10. A material handling system, characterized in that, include: A connecting rod, a track suspended below the connecting rod, an adjusting device as described in any one of claims 1-5, or a moving vehicle as described in any one of claims 6-9, wherein a member to be turned is screwed onto the connecting rod, and the suspension height of the track changes with the rotation of the member to be turned relative to the connecting rod; The adjusting device is configured to perform a levering operation on the member to be levered, so that the member to be levered rotates relative to the connecting rod.

11. The material handling system according to claim 10, characterized in that, The connecting rod is a screw, and the part to be actuated is a nut screwed onto the screw.

12. The material handling system according to claim 11, characterized in that, The actuated component includes a first limiting nut and a second limiting nut. The first limiting nut and the second limiting nut are spaced apart on the screw and are helically connected to the screw, so that when the first limiting nut and the second limiting nut rotate relative to the screw, they can move relative to the screw along the axial direction of the screw.

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