Dual-laser composite processing system and method for scanning and rotating surface treatment

Abstract

This invention discloses a dual-laser composite processing system and method for scanning and rotating surface treatment. The dual-laser composite processing system includes a rotating laser processing unit, a laser scanning processing unit, a machine vision inspection unit, a motion generation unit, a vibration generation unit, and a control unit. The control unit is connected to the rotating laser processing unit, the laser scanning processing unit, the motion generation unit, the vibration generation unit, and the machine vision inspection unit. The dual-laser composite processing system and method for scanning and rotating surface treatment provided by this invention utilizes a modulated light spot (such as a linear light spot) to achieve uniform energy intensity distribution within the light spot, while simultaneously performing high-speed scanning. This can be further combined with high-speed rotational motion to achieve high-speed scanning processing using a rotating galvanometer, allowing a large area to be covered in a single scan.

Description

Technical Field

[0001] This invention relates to a laser composite processing system, and more particularly to a dual-laser composite processing system and method for scanning and rotating surface treatment, belonging to the fields of laser processing, optical applications and advanced manufacturing technology. Background Technology

[0002] The scanning speed of a laser spot is limited. The coordination of scanning spacing and scanning speed, combined with a specific scanning trajectory strategy, allows for the machining of workpiece surfaces. Conventional Gaussian beams have focused spots on the micrometer scale. To ensure a certain spot overlap rate, the scanning spacing also needs to be set on the micrometer scale. Scanning a surface of a certain size requires multiple scanning paths. Furthermore, the uneven energy distribution of Gaussian laser beams results in microstructures, pits, and protrusions on the machined surface. Summary of the Invention

[0003] The main objective of this invention is to provide a dual-laser composite processing system and method for scanning and rotating surface treatment, which is mainly used for efficient and high-quality digital processing of metallic materials, alloy materials, and hard and brittle materials (engineering ceramics, ultra-high temperature ceramics, ceramic matrix composites, etc.), thereby overcoming the shortcomings of the prior art.

[0004] To achieve the aforementioned objectives, the technical solution adopted by this invention includes:

[0005] One embodiment of the present invention provides a dual-laser composite processing system for scanning and rotary surface treatment, comprising:

[0006] A rotary laser processing unit is used at least to provide a rotating spot formed by rotating multiple laser beams distributed in an array to perform the first laser processing on a workpiece;

[0007] The laser scanning processing unit is at least used to provide a shaping spot formed by modulating a laser beam to scan the workpiece in order to achieve a second laser processing;

[0008] A machine vision inspection unit is used to identify at least typical features of the workpiece's machining surface to generate driving data for instructing the laser scanning machining unit and / or the rotary laser machining unit to process the typical features.

[0009] The motion generating unit is at least used to drive the shaping spot and / or rotating spot to move relative to the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system;

[0010] The vibration generating unit is at least used to drive the workpiece and the shaping spot and / or rotating spot to vibrate relative to each other along the xy plane direction in the three-dimensional coordinate system;

[0011] The control unit is connected to at least the laser scanning processing unit, the rotary laser processing unit, the motion generating unit, the vibration generating unit, and the machine vision detection unit, and is at least used to regulate the working state of the laser scanning processing unit, the rotary laser processing unit, the motion generating unit, the vibration generating unit, and the machine vision detection unit.

[0012] Another embodiment of the present invention provides a dual-laser composite processing method for scanning and rotating surface treatment, comprising:

[0013] Provided is the aforementioned dual-laser composite processing system for scanning and rotary surface treatment;

[0014] Select a rotary laser processing unit and / or a laser scanning processing unit to perform the first laser processing and / or the second laser processing on the workpiece;

[0015] The machine vision inspection unit identifies typical features of the workpiece surface after the first laser processing or the second laser processing, thereby forming driving data to drive the laser scanning processing unit or the rotary laser processing unit to process the typical features.

[0016] Based on the driving data, the laser scanning processing unit and / or rotary laser processing unit perform second laser processing and / or first laser processing on the typical features until the desired workpiece processing quality is obtained.

[0017] Another aspect of this invention provides a dual-laser composite processing method for scanning and rotary surface treatment, characterized by comprising:

[0018] Provided is the aforementioned dual-laser composite processing system for scanning and rotary surface treatment; and,

[0019] The machine vision inspection unit identifies typical features of the workpiece's machining surface, thereby generating drive data to drive the laser scanning machining unit or rotary laser machining unit to process the typical features.

[0020] Based on the driving data, the rotary laser processing unit and / or the laser scanning processing unit perform first laser processing and / or second laser processing on the typical features;

[0021] Select a rotary laser processing unit and / or a laser scanning processing unit to perform second laser processing and / or first laser processing on the workpiece that has undergone the first or second laser processing, until the desired workpiece processing quality is obtained.

[0022] Compared with the prior art, the advantages of the present invention include:

[0023] The dual-laser composite processing system and method for scanning and rotating surface treatment provided in this invention uses a light spot (such as a line spot) that has been modulated by light field to achieve a uniform distribution of energy intensity within the light spot, while performing high-speed scanning. It can be further combined with high-speed rotational motion to achieve high-speed scanning processing with a rotating galvanometer, and a single scan can cover a large area.

[0024] The dual-laser composite processing system and method for scanning and rotating surface treatment provided in this invention, after machine vision detection of the overlapping area or typical feature area of ​​the surface to be processed, forms a digital code to locate and describe the corresponding area, thereby driving the rotating laser processing system to achieve secondary surface treatment of the typical area to be processed.

[0025] The dual-laser composite processing system and method for scanning and rotating surface treatment provided in this invention, supplemented by strategies such as airflow pressure and atmosphere protection, can further improve the surface quality of workpieces and make important innovative contributions to the fields of laser processing and optical applications. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of a multi-beam laser surface treatment composite processing system for high-speed scanning of galvanometer and rotational beam modulation provided in Embodiment 1 of the present invention;

[0027] Figure 2 This is a schematic diagram of a composite processing system for high-speed scanning of modulated laser beams and rotary beam shaping laser surface treatment provided in Embodiment 2 of the present invention;

[0028] Figure 3 This is a schematic diagram of the structure of a dual-rotation dual-laser head composite processing system for optical field modulation and dispersion beam provided in Embodiment 3 of the present invention;

[0029] Figure 4 This is a schematic diagram of the structure of a composite processing system for optical field modulation irregular beam dual rotation dual laser head provided in Embodiment 4 of the present invention;

[0030] Figure 5 This is a schematic flowchart of a composite digital machining method using a beam-modulated multi-beam laser and a high-speed scanning dual-rotary machining head provided in Embodiment 5 of the present invention.

[0031] Figure 6 This is a schematic flowchart of a composite digital processing method using a high-speed galvanometer scanning and beam modulation multi-beam laser dual-rotary processing head, as provided in Embodiment 6 of the present invention. Detailed Implementation

[0032] In view of the shortcomings of the prior art, the inventors of this invention, through long-term research and extensive practice, have proposed the technical solution of this invention. The following will further explain and illustrate this technical solution, its implementation process, and its principles.

[0033] One embodiment of the present invention provides a dual-laser composite processing system for scanning and rotary surface treatment, comprising:

[0034] A rotary laser processing unit is used at least to provide a rotating spot formed by rotating multiple laser beams distributed in an array to perform the first laser processing on a workpiece;

[0035] The laser scanning processing unit is at least used to provide a shaping spot formed by modulating a laser beam to scan the workpiece in order to achieve a second laser processing;

[0036] A machine vision inspection unit is used to identify at least typical features of the workpiece's machining surface to generate driving data for instructing the laser scanning machining unit and / or the rotary laser machining unit to process the typical features.

[0037] The motion generating unit is at least used to drive the shaping spot and / or rotating spot to move relative to the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system;

[0038] The vibration generating unit is at least used to drive the workpiece and the shaping spot and / or rotating spot to vibrate relative to each other along the xy plane direction in the three-dimensional coordinate system;

[0039] The control unit is connected to at least the laser scanning processing unit, the rotary laser processing unit, the motion generating unit, the vibration generating unit, and the machine vision detection unit, and is at least used to regulate the working state of the laser scanning processing unit, the rotary laser processing unit, the motion generating unit, the vibration generating unit, and the machine vision detection unit.

[0040] In one specific embodiment, the rotary laser processing unit includes a first laser source and a first laser beam expander, a light field modulator or beam splitter, and a first laser reflector sequentially disposed on the optical path of the first laser beam provided by the first laser source; and

[0041] A first driving mechanism is connected to the light field modulator or beam splitter and is capable of driving the light field modulator or beam splitter to rotate around its own axis to form the rotating light spot on the processing surface of the workpiece.

[0042] Specifically, the beam splitter is mainly used to process the laser beam after beam expansion into a light field with a certain shape. However, the beam splitter cannot handle the energy distribution of the light field. It can adjust the shape and distribution of the light field or spot and further use it for processing. The light field modulator can adjust the shape, energy, and other distribution of the beam and further use it for processing.

[0043] In one specific embodiment, the rotating light spot is capable of rotating around its own axis.

[0044] In one specific embodiment, the laser scanning processing unit includes a second laser source and a second laser beam expander, a beam shaper, a second laser reflector, a scanning galvanometer, and a focusing lens, which are sequentially arranged on the optical path of the second laser beam provided by the second laser source.

[0045] In one specific embodiment, the laser scanning processing unit further includes a second driving mechanism, which is connected to the beam shaper and can drive the beam shaper to rotate around its own axis to form a rotating shaping spot.

[0046] In one specific embodiment, the motion generating unit includes a third driving mechanism, which is in transmission cooperation with the rotary laser processing unit and / or the laser scanning processing unit or the workpiece, and is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to move along the x-axis of the three-dimensional coordinate system.

[0047] In one specific embodiment, the motion generating unit further includes a fourth driving mechanism, which is in transmission cooperation with the rotary laser processing unit and / or the laser scanning processing unit or the workpiece, and is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to move along the y-axis of the three-dimensional coordinate system.

[0048] In one specific embodiment, the motion generating unit further includes a fifth driving mechanism, which is in transmission cooperation with the rotary laser processing unit and / or the laser scanning processing unit or the workpiece, and is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to move along the z-axis of the three-dimensional coordinate system.

[0049] In one specific embodiment, the motion generating unit is also used to drive the workpiece to rotate about at least one rotation axis.

[0050] In one specific embodiment, the motion generating unit further includes a sixth driving mechanism, which is in transmission cooperation with the workpiece and is used to drive the workpiece to rotate around the z-axis of the three-dimensional coordinate system.

[0051] In one specific embodiment, the vibration generating unit includes a vibration generating mechanism, which is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to vibrate along the xy plane of the three-dimensional coordinate system.

[0052] In one specific embodiment, the machine vision inspection unit includes a CCD camera and / or a light field imaging camera.

[0053] In one specific embodiment, the dual-laser composite processing system for scanning and rotating surface treatment further includes a gas-assisted unit, which is at least used to provide a selected gas and to make the selected gas contact or cover the processing area of ​​the workpiece.

[0054] Another embodiment of the present invention provides a dual-laser composite processing method for scanning and rotating surface treatment, comprising:

[0055] Provided is the aforementioned dual-laser composite processing system for scanning and rotary surface treatment;

[0056] Select a rotary laser processing unit and / or a laser scanning processing unit to perform the first laser processing and / or the second laser processing on the workpiece;

[0057] The machine vision inspection unit identifies typical features of the workpiece surface after the first laser processing or the second laser processing, thereby forming driving data to drive the laser scanning processing unit or the rotary laser processing unit to process the typical features.

[0058] Based on the driving data, the laser scanning processing unit and / or rotary laser processing unit perform second laser processing and / or first laser processing on the typical features until the desired workpiece processing quality is obtained.

[0059] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: during the first laser processing of the workpiece surface by the rotating laser processing unit, the rotating spot provided by the rotating laser processing unit rotates around its own axis.

[0060] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: during the second laser processing of the workpiece surface by the laser scanning processing unit, the shaping spot provided by the laser scanning processing unit is rotated around its own axis.

[0061] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: using a motion generating unit to drive the shaping spot and / or rotating spot to generate relative motion with the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system.

[0062] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: driving the workpiece to rotate around the z-axis of the three-dimensional coordinate system using a motion generating unit.

[0063] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: using a vibration generating unit to drive the workpiece and the shaping spot and / or rotating spot to generate relative vibration along the xy plane direction in the three-dimensional coordinate system.

[0064] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: providing a selected gas with a gas-assisted unit, and making the selected gas contact or cover the processing area of ​​the workpiece.

[0065] Another aspect of this invention provides a dual-laser composite processing method for scanning and rotary surface treatment, characterized by comprising:

[0066] Provided is the aforementioned dual-laser composite processing system for scanning and rotary surface treatment; and,

[0067] The machine vision inspection unit identifies typical features of the workpiece's machining surface, thereby generating drive data to drive the laser scanning machining unit or rotary laser machining unit to process the typical features.

[0068] Based on the driving data, the rotary laser processing unit and / or the laser scanning processing unit perform first laser processing and / or second laser processing on the typical features;

[0069] Select a rotary laser processing unit and / or a laser scanning processing unit to perform a second laser processing or a first laser processing on the workpiece that has undergone the first laser processing and / or the second laser processing, until the desired workpiece processing quality is obtained.

[0070] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: during the first laser processing of the workpiece surface by the rotating laser processing unit, the rotating spot provided by the rotating laser processing unit rotates around its own axis.

[0071] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: during the second laser processing of the workpiece surface by the laser scanning processing unit, the shaping spot provided by the laser scanning processing unit is rotated around its own axis.

[0072] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: using a motion generating unit to drive the shaping spot and / or rotating spot to generate relative motion with the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system.

[0073] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: driving the workpiece to rotate around the z-axis of the three-dimensional coordinate system using a motion generating unit.

[0074] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: using a vibration generating unit to drive the workpiece and the shaping spot and / or rotating spot to generate relative vibration along the xy plane direction in the three-dimensional coordinate system.

[0075] In one specific embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: providing a selected gas with a gas-assisted unit, and making the selected gas contact or cover the processing area of ​​the workpiece.

[0076] In this embodiment, the control unit may be a control computer, etc., and the CNC program / control software used by the control unit can be obtained commercially. The specific structure of the control unit is not limited here.

[0077] The following will further explain the technical solution, its implementation process, and principles in conjunction with the accompanying drawings and specific implementation examples. Unless otherwise specified, the optical components used in the embodiments of the present invention, such as lasers, laser beam expanders, beam shapers, square modulators, beam splitters, laser reflectors, scanning galvanometers, and focusing lenses, as well as the drive motors, drive cylinders, vibration generating mechanisms, CCD cameras, light field imaging cameras, control computers, CNC programs, and software, can all be those known to those skilled in the art and can all be obtained commercially. Different models and sizes of the above components will not affect the implementation of the technical solution of the present invention or the acquisition of the corresponding results. Those skilled in the art can select different models or sizes of components according to specific needs. No specific limitation is made on the model of each functional component here.

[0078] Example 1

[0079] Please see Figure 1A composite processing system for high-speed scanning with galvanometer and rotating beam modulation multi-beam laser surface treatment includes a rotating laser processing unit, a laser scanning processing unit, a machine vision inspection unit, a motion generation unit, a vibration generation unit, a gas-assisted unit, and a control unit. The control unit is connected to the rotating laser processing unit, the laser scanning processing unit, the motion generation unit, the vibration generation unit, the machine vision inspection unit, and the gas-assisted unit, and is at least used to regulate the working state of the rotating laser processing unit, the laser scanning processing unit, the motion generation unit, the vibration generation unit, the machine vision inspection unit, and the gas-assisted unit.

[0080] In this embodiment, the rotary laser processing unit is at least used to provide a rotating spot formed by rotating multiple laser beams distributed in an array to perform a first laser processing on the workpiece; the laser scanning processing unit is at least used to provide a shaping spot formed by modulating laser beams to scan the workpiece to achieve a second laser processing; the machine vision inspection unit is at least used to identify typical features of the workpiece's processing surface to form driving data for driving the laser scanning processing unit and / or the rotary laser processing unit to process the typical features; the motion generating unit is at least used to drive the shaping spot and / or the rotating spot to move relative to the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system; the vibration generating unit is at least used to drive the workpiece to vibrate relative to the shaping spot and / or the rotating spot along the xy plane direction in the three-dimensional coordinate system; the gas assist unit is at least used to provide a selected gas and to make the selected gas contact or cover the processing area of ​​the workpiece.

[0081] In this embodiment, please refer again. Figure 1 The rotary laser processing unit includes a first laser source 2 and a first laser beam expander 3, a rotating component 4, and a first laser reflector 5 sequentially arranged on the optical path of the first laser beam provided by the first laser source 2. The first laser beam expander 3, the rotating component 4, and the first laser reflector 5 are used to form a rotating spot of the first laser beam and reflect the rotating spot to the processing surface of the workpiece to realize the first laser processing of the processing surface of the workpiece.

[0082] In this embodiment, the rotating component 4 includes a first driving mechanism 4-1 and a beam splitter 4-2. The beam splitter 4-2 is disposed in the optical path between the first laser beam expander 3 and the first laser reflector 5. The beam splitter 4-2 is used to form the first laser beam into multiple laser beams distributed in an array. The beam splitter 4-2 is also connected to the first driving mechanism 4-1 and can rotate around its own axis under the drive of the first driving mechanism 4-1, thereby causing the light spot formed on the first laser reflector 5 by the multiple laser beams to rotate. The rotating light spot can rotate around its own axis.

[0083] In this embodiment, the first laser source 2 can be a fiber laser, etc., and the first driving mechanism 4-1 can be a rotary drive motor or a rotary drive cylinder. The two optical fibers connected to the first laser source and used for transmitting laser can be connected by an optical fiber slip ring or an optoelectronic rotary connector, etc., which can realize laser transmission between the two optical fibers and allow relative rotation between the two optical fibers. The first laser source 2, the first laser beam expander 3, the rotating component 4, and the first laser reflector 5 can be jointly packaged to form a laser processing head for performing laser processing on the workpiece. The working end of the laser processing head faces the workpiece 9.

[0084] In this embodiment, the laser scanning processing unit includes a second laser source 12 and a second laser beam expander 11, a beam shaper (i.e., a flat-top beam shaper, the same below) 10, a second laser reflector 7, a scanning galvanometer 8, and a focusing lens 9, which are sequentially arranged on the optical path of the second laser beam provided by the second laser source 12. The second laser beam expander 11, the beam shaper (i.e., the flat-top beam shaper, the same below) 10, the second laser reflector 7, the scanning galvanometer 8, and the focusing lens 9 are used to form a shaped light spot focused on the processing surface of the workpiece by the second laser beam, thereby realizing high-speed scanning of the processing surface of the workpiece, and thus realizing the second laser processing of the workpiece.

[0085] In this embodiment, the second laser source 12 may be a fiber laser or the like. The second laser source 12, the second laser beam expander 11, the beam shaper (i.e., the flat-top beam shaper, the same below) 10, the second laser reflector 7, the scanning galvanometer 8 and the focusing lens 9 can be encapsulated together to form a laser processing head for performing laser processing on a workpiece. The working end of the laser processing head faces the workpiece 9.

[0086] In this embodiment, the first laser source 2 and the second laser source 12 are also connected to a laser controller 1. The laser controller 1 is used to control the working state of the first laser source 2 and the second laser source 12. It should be noted that the laser controller 1 can be independently installed in the laser control computer or it can be part of the control unit.

[0087] In this embodiment, please refer again. Figure 1 The motion generating unit includes a third driving mechanism, which is in transmission cooperation with the rotary laser processing unit and / or the laser scanning processing unit or the workpiece 9, and is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece 9 to move along the x-axis of the three-dimensional coordinate system.

[0088] As a preferred embodiment, the third driving mechanism is in transmission cooperation with the rotary laser processing unit and the laser scanning processing unit, and is able to drive the rotary laser processing unit and the laser scanning processing unit to move along the x-axis; specifically, the motion generating unit includes a first motion platform 6, the rotary laser processing unit and the laser scanning processing unit are mounted on the first motion platform 6 and are movably cooperated with the first motion platform 6, the rotary laser processing unit and the laser scanning processing unit are connected to the second driving mechanism, and are able to move along the x-axis of the three-dimensional coordinate system on the first motion platform 6 under the drive of the second driving mechanism, thereby realizing the movement of the rotary laser processing unit along the x-axis.

[0089] In this embodiment, the third driving mechanism may include a guide rail fixedly mounted on the first motion platform 6. The first motion platform 6 may be provided with a guide rail arranged along the x-axis. The rotary laser processing unit and the laser scanning processing unit are mounted on the guide rail and can move along the guide rail. The second driving mechanism is a linear driving mechanism, such as a linear drive motor or a linear drive cylinder.

[0090] In this embodiment, the third drive may include two independently configured linear drive motors, which are respectively connected to the rotary laser processing unit and the laser scanning processing unit, so that the rotary laser processing unit and the laser scanning processing unit can be driven independently.

[0091] In an embodiment, the motion generating unit further includes a fourth driving mechanism, which is in transmission cooperation with the rotary laser processing unit or the workpiece 14 and is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece 14 to move along the y-axis of the three-dimensional coordinate system.

[0092] As a preferred embodiment, the fourth driving mechanism is in transmission cooperation with the workpiece 14. Specifically, the motion generating unit includes a second motion platform 16, which is movable. The workpiece 14 is fixedly mounted on the second motion platform 16. The second motion platform 16 is transmissionally connected to the fourth driving mechanism and can move along the y-axis of the three-dimensional coordinate system under the drive of the fourth driving mechanism, thereby realizing the movement of the workpiece 14 along the y-axis. Alternatively, the second motion platform 16 can be fixed, and the workpiece 14 is movably mounted on the second motion platform 16. The fourth driving mechanism is in transmission cooperation with the workpiece 14 and is used to drive the workpiece 14 to move along the y-axis on the second motion platform 16.

[0093] In this embodiment, the fourth drive mechanism is a linear drive mechanism, such as a linear drive motor or a linear drive cylinder. Preferably, when the second motion platform 16 is fixed, the fourth drive mechanism can be set on the second motion platform 16.

[0094] In this embodiment, the motion generating unit further includes a fifth driving mechanism, which is in transmission cooperation with the rotary laser processing unit and / or the laser scanning processing unit or the workpiece 14, and is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to move along the z-axis of the three-dimensional coordinate system.

[0095] As a preferred embodiment, the fifth driving mechanism is in transmission cooperation with the rotary laser processing unit and the laser scanning processing unit. Specifically, the motion generating unit includes a third motion platform, which is movable. The rotary laser processing unit and the laser scanning processing unit are fixedly mounted on the third motion platform. The third motion platform is transmissionally connected to the fifth driving mechanism and can move along the z-axis of the three-dimensional coordinate system under the drive of the fifth driving mechanism, thereby realizing the movement of the rotary laser processing unit and the laser scanning processing unit along the z-axis. Alternatively, the third motion platform is fixed, and the rotary laser processing unit and the laser scanning processing unit are movably mounted on the third motion platform. The fifth driving mechanism is in transmission cooperation with the rotary laser processing unit and the laser scanning processing unit and is used to drive the rotary laser processing unit and the laser scanning processing unit to move along the z-axis on the third motion platform. For example, the third motion platform may be provided with a guide rail extending along the z-axis, and the rotary laser processing unit and the laser scanning processing unit are mounted on the guide rail and can move along the z-axis.

[0096] In this embodiment, the fifth driving mechanism is a linear driving mechanism, such as a linear drive motor or a linear drive cylinder.

[0097] As a more preferred embodiment, the third motion platform can be mounted on the first motion platform 6, and the rotary laser processing unit and the laser scanning processing unit can be mounted on the third motion platform. The third motion platform is movable with the first motion platform 6 in the x-axis direction, and the rotary laser processing unit and the laser scanning processing unit are movable with the third motion platform in the z-axis direction. The third drive mechanism is connected to the third motion platform. The rotary laser processing unit, the laser scanning processing unit, and the third motion platform as a whole can move along the first motion platform 6 in the x-axis direction first under the drive of the third drive mechanism, and the rotary laser processing unit and the laser scanning processing unit can move along the z-axis first under the drive of the fifth drive mechanism. For example, the third motion platform can be movable with the first motion platform 6 via a guide rail set along the x-axis, and the rotary laser processing unit and the laser scanning processing unit can be movable with the third motion platform via a guide rail set along the z-axis.

[0098] In this embodiment, the motion generating unit may include two third motion platforms, and the fifth drive mechanism may include two linear drive motors, which are independently connected to a third motion platform. The rotary laser processing unit and the laser scanning processing unit may be respectively mounted on a third motion platform.

[0099] In this embodiment, the motion generating unit further includes a sixth driving mechanism, which is in transmission cooperation with the workpiece 14 and is used to drive the workpiece 14 to rotate around the z-axis of the three-dimensional coordinate system. The sixth driving mechanism is a rotary driving mechanism, such as a rotary driving motor or a rotary driving cylinder.

[0100] In this embodiment, the motion generating unit further includes a motion system controller 17, which is connected to the third drive mechanism and / or the fourth drive mechanism and / or the fifth drive mechanism and / or the sixth drive mechanism, and is used to control / adjust the working state of the third drive mechanism and / or the fourth drive mechanism and / or the fifth drive mechanism and / or the sixth drive mechanism. The motion system controller may be a motion system control computer, which may be independently set up and connected to the control unit 13, or it may be part of the control unit 13.

[0101] In this embodiment, the vibration generating unit includes a vibration generating mechanism, which drives the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to vibrate along the xy plane of the three-dimensional coordinate system. The introduction of vibration can change the periodicity of the interaction mechanism between the workpiece and the laser, and achieve diversified control of energy distribution (dynamic spot overlap rate, energy homogenization). For example, the vibration generating mechanism includes a vibration platform 15, which can be fixedly mounted on a second motion platform 16. The workpiece 14 is placed on the vibration platform 15, and the vibration platform 15 can move along the y-axis together with the workpiece 14. For example, the vibration platform can be an electric vibration table, an ultrasonic vibration table, etc., which can realize conventional, ultrasonic, or ultra-high frequency vibration. The introduction of vibration (conventional, ultrasonic, ultra-high frequency, etc.) can change the periodicity of the interaction mechanism between the workpiece and the laser, and achieve diversified control of energy distribution (dynamic spot overlap rate, energy homogenization).

[0102] In this embodiment, the machine vision inspection unit includes a CCD camera and / or a light field imaging camera. The CCD camera can observe the processing process and images of the processed surface. The light field imaging camera can observe and acquire image information of the processed workpiece according to a predetermined motion path, and use a selected algorithm to identify typical features of the workpiece's processed surface (such as microcracks, pits, protrusions, grooves, scaly structures, etc.). The surface processed by line laser scanning will form new surface microstructures, reconstituted layers, and other geometric features. The CCD camera and the light field imaging camera observe the processed surface of the workpiece by line scanning according to a predetermined scanning path, detect, acquire, analyze, and identify surface features such as protrusions, pits, and cracks, and extract their adaptive coordinate data to form driving data for secondary rotational selective laser surface treatment of the workpiece surface. Then, the area to be processed by secondary processing detected by the machine vision inspection unit is formed into a digital code description, driving the rotary laser processing unit or laser scanning processing unit to the corresponding area to carry out secondary surface treatment, thereby improving the surface quality of the workpiece's processed surface.

[0103] In this embodiment, the gas-assisted unit is at least used to provide a selected gas and to make the selected gas contact or cover the processing area of ​​the workpiece. The gas-assisted unit can achieve a certain airflow pressure and a gas protection environment; it enables the restructuring and morphological reconstruction of the structure and properties of the workpiece interacting with the laser beam, thereby controlling the process strategy, controlling the heat-affected zone and the recast layer, and avoiding the formation of microcracks in the workpiece. For example, the gas-assisted unit can be a gas container with an adjustable airflow valve, etc., and the selected gas can be an inert gas, etc. The gas-assisted unit can achieve a certain airflow pressure and a gas protection environment, enabling the restructuring and morphological reconstruction of the structure and properties of the workpiece interacting with the laser, thereby controlling the process strategy, controlling the heat-affected zone and the recast layer, and avoiding the formation of microcracks in the workpiece.

[0104] Example 2

[0105] The structure of a composite laser surface treatment system combining high-speed scanning of modulated laser beams and rotary beam shaping is as follows: Figure 2 As shown, the structure of the high-speed scanning and rotating beam shaping laser surface treatment composite processing system in this embodiment is basically the same as that of the high-speed scanning and rotating beam modulation multi-beam laser surface treatment composite processing system in Embodiment 1. The similar parts will not be described again here. Compared with Embodiment 1, Embodiment 2 replaces the beam splitting element 4-2 in the rotating component of the rotating laser processing unit with a light field modulator.

[0106] Example 3

[0107] The structure of a composite processing system for optical field modulation dispersed beam dual-rotation dual-laser head is as follows: Figure 3 As shown, the structure of the high-speed scanning and rotating beam shaping laser surface treatment composite processing system in this embodiment is basically the same as that of the high-speed scanning and rotating beam modulation multi-beam laser surface treatment composite processing system in Embodiment 1. The similar parts will not be described again here. Compared with Embodiment 1, the laser scanning processing unit in Embodiment 3 also includes a second driving mechanism. The second driving mechanism is connected to the beam shaper 10 and is used to drive the beam shaper 10 to rotate around its own axis, so that the shaping spot provided by the laser scanning processing unit can rotate, thereby realizing the rotational high-speed scanning composite motion processing of the workpiece.

[0108] Example 4

[0109] The structure of a composite processing system for irregularly shaped beams with dual rotation and dual laser heads, characterized by optical field modulation, is as follows: Figure 4 As shown, the structure of the high-speed scanning and rotating beam shaping laser surface treatment composite processing system of the modulated laser beam in this embodiment is basically the same as that of the optical field modulation dispersed beam dual-rotation dual-laser head composite processing system in embodiment 3. The similar parts will not be described again here. Compared with embodiment 3, embodiment 4 replaces the beam splitting element 4-2 in the rotating component of the rotating laser processing unit with a beam splitting element that can generate irregularly shaped beams.

[0110] The present invention provides a dual-laser composite processing system for scanning and rotating surface treatment, which can generate line lasers by modulating the beam shaper. The line lasers include, but are not limited to, line spots. The line spots can include various shaping spots that are reflected by a scanning galvanometer and focused by a field lens to achieve high-speed scanning processing.

[0111] The present invention provides a dual-laser composite processing system for scanning and rotating surface treatment. The rotating laser processing unit can use fiber laser or light field modulation to achieve a multi-laser beam circular array distribution. Combined with high-speed rotation, it can achieve a microscale "light knife" effect with a certain coverage area.

[0112] The fiber laser in the dual-laser composite processing system for scanning and rotating surface treatment provided in this embodiment of the invention can be rotated using a fiber slip ring / optoelectronic rotary connector; the circular uniform intensity distribution of the light field formed by the light field modulator passes through the high-speed rotating element, which can realize the equivalent rotational motion of the light spot projected on the workpiece surface, and the relative motion between the laser and the workpiece can realize the dynamic coverage of the light field on the workpiece processing surface.

[0113] The present invention provides a dual-laser composite processing system for scanning and rotating surface treatment, in which a rotating component with light field modulation function drives the modulated light spot to rotate; the modulated light field itself has a multi-beam spatial distribution and can rotate at high speed and controllably.

[0114] This invention provides a dual-laser composite processing system for scanning and rotating surface treatment.

[0115] The Z-axis motion of the dual laser processing head in the dual-laser composite processing system for scanning and rotating surface treatment provided by this invention can perform initial processing on the workpiece using a galvanometer-reflective beam shaping spot, followed by secondary finishing using a composite rotating multi-laser beam, thereby achieving a composite high-efficiency and precision dual-laser surface forming. The galvanometer-reflective beam shaper can be equipped with a rotary motor to realize a high-speed rotating scanning composite motion processing path strategy.

[0116] Example 5

[0117] The flow chart of a composite digital machining method using beam-modulated multi-beam laser and high-speed scanning dual-rotary machining head with galvanometer is as follows: Figure 5 As shown, it can be implemented using any one of the scanning and rotating surface treatment dual-laser composite processing systems in Examples 1-4. It involves first performing beam-modulated rotating multi-beam laser processing on the workpiece, and then performing a second processing on the area of ​​the workpiece after beam-modulated rotating multi-beam laser processing using a modulated laser rotating galvanometer high-speed scanning system. Specifically, it includes:

[0118] 1) Select a rotary laser processing unit for beam modulation rotary multibeam laser processing;

[0119] 2) The machine vision inspection unit identifies typical features of the workpiece surface after the beam modulation rotary multibeam laser processing, thereby forming driving data for driving the laser scanning processing unit to process the typical features.

[0120] 3) Based on the driving data, the laser scanning processing unit performs high-speed scanning of the typical features using a modulated laser rotating galvanometer.

[0121] Repeat steps 1)-3) at least once until the desired workpiece machining quality is obtained.

[0122] In this embodiment, steps 1) and 3) can be repeated more than once each.

[0123] In this embodiment, the dual-laser composite processing method for scanning and rotating surface treatment further includes: during the first laser processing of the workpiece surface by the rotating laser processing unit, rotating the rotating spot provided by the rotating laser processing unit around its own axis; and / or rotating the shaping spot provided by the laser scanning processing unit around its own axis; and / or driving the shaping spot and / or rotating spot to generate relative motion with the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system by a motion generating unit; and / or driving the workpiece to rotate around the z axis of the three-dimensional coordinate system by a motion generating unit; and / or driving the workpiece to generate relative vibration with the shaping spot and / or rotating spot along the xy plane direction in the three-dimensional coordinate system by a vibration generating unit; and / or providing a selected gas by a gas assist unit, and causing the selected gas to contact or cover the processing area of ​​the workpiece.

[0124] Example 6

[0125] The flow chart of a composite digital machining method using a high-speed galvanometer scanning and beam modulation multi-beam laser dual-rotary machining head is as follows: Figure 6 As shown, it can be implemented using any one of the scanning and rotating surface treatment dual-laser composite processing systems in Examples 1-4. It involves first sequentially performing high-speed scanning with a modulated laser rotating galvanometer and then beam-modulated rotating multi-beam laser processing on the workpiece, followed by secondary processing of the area of ​​the workpiece after beam-modulated rotating multi-beam laser processing using either a modulated laser rotating galvanometer or a beam-modulated rotating multi-beam laser. Specifically, it includes:

[0126] 1) The typical features of the workpiece's processing surface are identified by the machine vision inspection unit, thereby generating driving data for secondary rotational selective laser surface treatment of the typical features;

[0127] 2) Based on the driving data, the typical features are first subjected to high-speed scanning with a modulated laser rotating galvanometer by the laser scanning processing unit, and then the area after high-speed scanning with a modulated laser rotating galvanometer is subjected to beam-modulated rotating multi-beam laser processing.

[0128] 3) Perform high-speed scanning with a modulated laser rotating galvanometer or secondary processing with a modulated laser rotating multibeam laser on the area after beam modulation rotating multibeam laser processing.

[0129] Repeat steps 1)-3) at least once until the desired workpiece machining quality is obtained.

[0130] The dual-laser composite processing system and method for scanning and rotating surface treatment provided in this invention uses a modulated light spot (such as a line spot) that has been treated with light field modulation to achieve a uniform distribution of energy intensity within the light spot, while performing high-speed scanning. It can be further combined with high-speed rotational motion to achieve high-speed scanning processing with a rotating galvanometer. A single scan can cover a large area, and the efficiency can be improved by tens of times or even more compared to a point spot.

[0131] The dual-laser composite processing system and method for scanning and rotating surface treatment provided in this invention, after machine vision detection of the overlapping area or typical feature area of ​​the surface to be processed, forms a digital code to locate the corresponding area, thereby driving the rotating laser processing system to achieve secondary surface treatment of the typical area to be processed.

[0132] The dual-laser composite processing system and method for scanning and rotating surface treatment provided in this invention, supplemented by strategies such as airflow pressure and atmosphere protection, can further improve the surface quality of workpieces and make important innovative contributions to the fields of laser processing and optical applications.

[0133] It should be understood that the above embodiments are merely illustrative of the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A dual-laser composite processing system for scanning and rotating surface treatment, characterized in that... include: A rotary laser processing unit is used at least to provide a rotating spot formed by rotating multiple laser beams distributed in an array to perform a first laser processing on a workpiece, the rotating spot being able to rotate about its own axis; The laser scanning processing unit is at least used to provide a rotating shaping spot formed by modulating a laser beam and rotating around its own axis to scan the workpiece in order to achieve a second laser processing. A machine vision inspection unit is used to identify at least typical features of the workpiece's machining surface to generate driving data for instructing the laser scanning machining unit and / or the rotary laser machining unit to process the typical features. The motion generating unit is at least used to drive the shaping spot and / or rotating spot to move relative to the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system; The vibration generating unit is at least used to drive the workpiece and the shaping spot and / or rotating spot to vibrate relative to each other along the xy plane direction in the three-dimensional coordinate system; The control unit is connected to at least the laser scanning processing unit, the rotary laser processing unit, the motion generating unit, the vibration generating unit, and the machine vision detection unit, and is at least used to regulate the working state of the laser scanning processing unit, the rotary laser processing unit, the motion generating unit, the vibration generating unit, and the machine vision detection unit.

2. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 1, characterized in that: The rotary laser processing unit includes a first laser source and a first laser beam expander, a light field modulator or beam splitter, and a first laser reflector sequentially disposed on the optical path of the first laser beam provided by the first laser source; and A first driving mechanism is connected to the light field modulator or beam splitter and is capable of driving the light field modulator or beam splitter to rotate around its own axis to form the rotating light spot on the processing surface of the workpiece.

3. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 1, characterized in that: The laser scanning processing unit includes a second laser source and a second laser beam expander, a beam shaper, a second laser reflector, a scanning galvanometer, and a focusing lens, which are sequentially arranged on the optical path of the second laser beam provided by the second laser source. And a second driving mechanism, which is connected to the beam shaper and can drive the beam shaper to rotate around its own axis to form a rotating shaped beam spot.

4. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 1, characterized in that: The motion generating unit includes a third driving mechanism, which is in transmission cooperation with the rotary laser processing unit and / or the laser scanning processing unit or the workpiece, and is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to move along the x-axis of the three-dimensional coordinate system.

5. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 4, characterized in that: The motion generating unit further includes a fourth driving mechanism, which is in cooperation with the rotary laser processing unit and / or the laser scanning processing unit or the workpiece, and is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to move along the y-axis of the three-dimensional coordinate system.

6. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 4 or 5, characterized in that: The motion generating unit further includes a fifth driving mechanism, which is in cooperation with the rotary laser processing unit and / or the laser scanning processing unit or the workpiece, and is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to move along the z-axis of the three-dimensional coordinate system.

7. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 4, characterized in that: The motion generating unit is also used to drive the workpiece to rotate about at least one rotation axis.

8. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 7, characterized in that: The motion generating unit further includes a sixth driving mechanism, which is in transmission cooperation with the workpiece and is used to drive the workpiece to rotate around the z-axis of the three-dimensional coordinate system.

9. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 1, characterized in that: The vibration generating unit includes a vibration generating mechanism, which is used to drive the rotary laser processing unit and / or the laser scanning processing unit or the workpiece to vibrate along the xy plane of the three-dimensional coordinate system.

10. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 1, characterized in that: The machine vision inspection unit includes a CCD camera and / or a light field imaging camera.

11. The dual-laser composite processing system for scanning and rotating surface treatment according to claim 1, characterized in that: The scanning and rotary surface treatment dual-laser composite processing system further includes a gas-assisted unit, which is at least used to provide a selected gas and to make the selected gas contact or cover the processing area of ​​the workpiece.

12. A dual-laser composite processing method for scanning and rotating surface treatment, characterized in that... include: Provides a dual-laser composite processing system for scanning and rotary surface treatment as described in any one of claims 1-11; Select a rotary laser processing unit and / or a laser scanning processing unit to perform first laser processing and / or second laser processing on the workpiece. During the first laser processing of the workpiece surface by the rotary laser processing unit, the rotating spot provided by the rotary laser processing unit rotates around its own axis. During the second laser processing of the workpiece surface by the laser scanning processing unit, the shaping spot provided by the laser scanning processing unit rotates around its own axis. The machine vision inspection unit identifies typical features of the workpiece surface after the first laser processing or the second laser processing, thereby forming driving data to drive the laser scanning processing unit or the rotary laser processing unit to process the typical features. Based on the driving data, the laser scanning processing unit and / or rotary laser processing unit perform second laser processing and / or first laser processing on the typical features until the desired workpiece processing quality is obtained.

13. The dual-laser composite processing method for scanning and rotating surface treatment according to claim 12, characterized in that, Also includes: The aforementioned dual-laser composite processing method for scanning and rotating surface treatment further includes: using a motion generating unit to drive the shaping spot and / or rotating spot to generate relative motion with the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system.

14. The dual-laser composite processing method for scanning and rotating surface treatment according to claim 13, characterized in that, The aforementioned dual-laser composite processing method for scanning and rotating surface treatment further includes: using a motion generating unit to drive the workpiece to rotate around the z-axis of the three-dimensional coordinate system.

15. The dual-laser composite processing method for scanning and rotating surface treatment according to claim 12, characterized in that, The aforementioned dual-laser composite processing method for scanning and rotating surface treatment further includes: using a vibration generating unit to drive the workpiece and the shaping spot and / or rotating spot to generate relative vibration along the xy plane direction in the three-dimensional coordinate system.

16. The dual-laser composite processing method for scanning and rotating surface treatment according to claim 12, characterized in that, The aforementioned dual-laser composite processing method for scanning and rotating surface treatment further includes: providing a selected gas with a gas-assisted unit, and making the selected gas contact or cover the processing area of ​​the workpiece.

17. A dual-laser composite processing method for scanning and rotating surface treatment, characterized in that... include: Provides a dual-laser composite processing system for scanning and rotary surface treatment as described in any one of claims 1-11; and, The machine vision inspection unit identifies typical features of the workpiece's machining surface, thereby generating drive data to drive the laser scanning machining unit or rotary laser machining unit to process the typical features. Based on the driving data, the rotary laser processing unit and / or the laser scanning processing unit perform first laser processing and / or second laser processing on the typical features. During the first laser processing of the workpiece surface by the rotary laser processing unit, the rotating spot provided by the rotary laser processing unit rotates around its own axis. During the second laser processing of the workpiece surface by the laser scanning processing unit, the shaping spot provided by the laser scanning processing unit rotates around its own axis. Select a rotary laser processing unit and / or a laser scanning processing unit to perform a second laser processing or a first laser processing on the workpiece that has undergone the first laser processing and / or the second laser processing, until the desired workpiece processing quality is obtained.

18. The dual-laser composite processing method for scanning and rotating surface treatment according to claim 17, characterized in that, Also includes: The aforementioned dual-laser composite processing method for scanning and rotating surface treatment further includes: using a motion generating unit to drive the shaping spot and / or rotating spot to generate relative motion with the workpiece along at least one of the x, y, and z axes of a three-dimensional coordinate system.

19. The dual-laser composite processing method for scanning and rotating surface treatment according to claim 18, characterized in that, The aforementioned dual-laser composite processing method for scanning and rotating surface treatment further includes: using a motion generating unit to drive the workpiece to rotate around the z-axis of the three-dimensional coordinate system.

20. The dual-laser composite processing method for scanning and rotating surface treatment according to claim 17, characterized in that, The aforementioned dual-laser composite processing method for scanning and rotating surface treatment further includes: using a vibration generating unit to drive the workpiece and the shaping spot and / or rotating spot to generate relative vibration along the xy plane direction in the three-dimensional coordinate system.

21. The dual-laser composite processing method for scanning and rotating surface treatment according to claim 17, characterized in that, The aforementioned dual-laser composite processing method for scanning and rotating surface treatment further includes: providing a selected gas with a gas-assisted unit, and making the selected gas contact or cover the processing area of ​​the workpiece.

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