Atomic Force Microscope Cryogenic Probe

Abstract

The present invention discloses an atomic force microscope low-temperature probe, which is used to be placed in a low-temperature dewar and includes: a low-temperature objective lens barrel; a sample stage, which is located below the low-temperature objective lens barrel and is provided with a sample placement groove, which is used to place the sample, and the sample placement groove is suitable for moving relative to the low-temperature objective lens barrel; a sample displacement assembly, which is used to install the sample stage and to drive the sample stage to move in space; a probe displacement assembly, which is equipped with an NV probe, which is used to drive the NV probe to move in space, and the NV probe is suitable for moving above the sample placement groove, and the probe displacement assembly and the sample displacement assembly are arranged side by side. The atomic force microscope low-temperature probe of the present invention can ensure that the probe is completely placed in a low temperature, improve the accuracy of sample observation, and the sample placement groove can quickly disassemble and replace the sample during the movement of the low-temperature objective lens barrel.

Description

Technical Field

[0001] The present invention relates to the technical field of microscope manufacturing, in particular to a low-temperature probe for an atomic force microscope. Background Art

[0002] The Cryogenic Atomic Force Microscope (CQDAFM) can achieve nanoscale magnetic imaging, which is currently unattainable in condensed matter systems. This is very helpful for studying the magnetic phase transition of solid-state materials at low temperatures, and is also compatible with the study of the mechanisms of superconductors. The cryogenic dewar is an important component for achieving low-temperature working conditions. When applying the cryogenic dewar to the CQDAFM, it is necessary to determine which components on the CQDAFM are more suitable for placement in the cryogenic dewar: first, the sample stage must be placed in the cryogenic dewar according to the needs of the application. Whether other components are placed in the cryogenic dewar depends on the relevance of each component to the sample stage and the ease of operation; the volume of the cryogenic dewar also needs to be considered. If the volume of the components placed in the cryogenic dewar is too large, it will make the realization of low-temperature conditions difficult and costly, and there is room for improvement. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide an atomic force microscope cryogenic probe that can flexibly adjust the relative positions of the sample stage, NV probe, and cryogenic objective lens barrel, thereby ensuring that the probe is completely placed in the cryogenic environment, improving the accuracy of sample observation, facilitating sample observation and replacement, and being easy to use.

[0004] According to an embodiment of the present invention, the atomic force microscope low-temperature probe is used to be placed in a low-temperature Dewar, and includes: a low-temperature objective lens barrel; a sample stage, the sample stage is located below the low-temperature objective lens barrel, and the sample stage is provided with a sample placement groove, the sample placement groove is used to place the sample, and the sample placement groove is suitable for moving relative to the low-temperature objective lens barrel; a sample displacement assembly, the sample displacement assembly is used to install the sample stage and to drive the sample stage to move in space; a probe displacement assembly, the probe displacement assembly is installed with an NV probe, the probe displacement assembly is used to drive the NV probe to move in space, the NV probe is suitable for moving to above the sample placement groove, and the probe displacement assembly and the sample displacement assembly are arranged side by side.

[0005] According to the atomic force microscope low-temperature probe of the embodiment of the present invention, the relative position of the sample stage, the NV probe and the low-temperature objective lens barrel can be flexibly adjusted to ensure that the probe is completely placed in the low temperature, thereby improving the accuracy of sample observation, and the sample stage can move flexibly relative to the low-temperature objective lens barrel and the NV probe, which is conducive to accurate observation, and the sample placement slot on the sample stage can move flexibly relative to the low-temperature objective lens barrel, and then during the movement of the sample placement slot, the sample placed on the sample placement slot can be flexibly replaced, which facilitates the rapid disassembly and replacement of the sample and is conducive to observation and replacement of the sample.

[0006] According to some embodiments of the atomic force microscope low-temperature probe of the present invention, the sample stage includes a fixed base, a detachable seat and a platform panel, the fixed base is connected to the upper end of the sample displacement assembly, the detachable seat can be movably mounted on the fixed base and can be selectively fixed relative to the fixed base, and the platform panel is mounted on the detachable seat and is provided with the sample placement groove.

[0007] According to some embodiments of the atomic force microscope low-temperature probe of the present invention, the detachable seat includes a front-end fixing portion, an intermediate connecting portion and a rear-end connecting portion, the front-end fixing portion is slidably matched with the fixed base and is suitable for relative fixation through a connecting piece, the intermediate connecting portion is connected between the front-end fixing portion and the rear-end connecting portion, and the platform panel support is installed above the rear-end connecting portion.

[0008] According to some embodiments of the atomic force microscope low-temperature probe of the present invention, the width of the front fixing part and the width of the rear end connecting part are both greater than the width of the middle connecting part, so as to form a limiting space on both sides of the middle connecting part; the fixed base is provided with a limiting boss, and the limiting boss is located in the limiting space, and when the detachable seat slides to the maximum position relative to the fixed base, the limiting boss and the front fixing part or the rear end connecting part are limited and offset.

[0009] According to some embodiments of the atomic force microscope cryogenic probe of the present invention, an escape opening is formed at the upper end of the probe displacement assembly on a side facing the sample displacement assembly, and the escape opening is used to avoid the platform panel.

[0010] According to some embodiments of the atomic force microscope cryogenic probe of the present invention, the platform panel is provided with circuit connectors at positions located on both sides of the middle connecting portion.

[0011] According to some embodiments of the present invention, the atomic force microscope low-temperature probe further includes: a probe exoskeleton and a skeleton base, the probe exoskeleton is installed above the skeleton base and defines an installation space with the skeleton base, the sample displacement assembly, the probe displacement assembly and the low-temperature objective lens barrel are all installed in the installation space, and the sample displacement assembly and the probe displacement assembly are distributed in sequence along the horizontal direction and are both located below the low-temperature objective lens barrel.

[0012] According to some embodiments of the atomic force microscope cryogenic probe of the present invention, two opposite sides of the probe exoskeleton along a first direction are formed as hollow open sides, and two opposite sides of the probe exoskeleton along a second direction are formed with hollow observation windows.

[0013] According to some embodiments of the atomic force microscope cryogenic probe of the present invention, wiring grooves are provided on two opposite side surfaces along the second direction, the wiring grooves are connected to the observation window, and wiring cards are provided in the wiring grooves.

[0014] According to some embodiments of the atomic force microscope cryogenic probe of the present invention, the sample placement slot is constructed in the shape of a circular hole and is open upward, and the NV probe extends relative to the probe displacement assembly in a direction close to the sample displacement assembly to extend directly above the sample placement slot.

[0015] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which:

[0017] Figure 1 1 is a side view of a cryogenic probe for an atomic force microscope according to an embodiment of the present invention (without the probe exoskeleton);

[0018] Figure 2 is a side view of a cryogenic probe for an atomic force microscope according to an embodiment of the present invention;

[0019] Figure 3 is a front schematic diagram of an atomic force microscope cryogenic probe according to an embodiment of the present invention;

[0020] Figure 4 is a schematic structural diagram of a cryogenic probe for an atomic force microscope according to an embodiment of the present invention;

[0021] Figure 5 2 is a schematic diagram of the installation of a low-temperature objective lens barrel, a sample stage, and an NV probe of a low-temperature probe of an atomic force microscope according to an embodiment of the present invention;

[0022] Figure 6 Schematic diagram of the installation of a sample stage and an NV probe of an atomic force microscope cryogenic probe according to an embodiment of the present invention.

[0023] Reference numerals:

[0024] AFM cryogenic probe 100,

[0025] Sample displacement assembly 1, first Z-axis displacement stage 11, first X-axis displacement stage 12, first Y-axis displacement stage 13, P-viewing stage 14, T-viewing stage 15, XYZ scanning stage 16, sample stage 17, fixed base 171, limiting boss 1711, detachable seat 172, front fixing portion 1721, middle connecting portion 1722, rear connecting portion 1723, platform panel 173, sample placement slot 1731,

[0026] Probe displacement assembly 2, second Z-axis displacement stage 21, second X-axis displacement stage 22, second Y-axis displacement stage 23, Z scanning stage 24, XY scanning stage 25, NV probe 26, avoidance port 27,

[0027] Low-temperature objective lens tube 3, probe outer frame 4, observation window 41, wiring groove 42, wiring card 43, frame base 5, line connector 6. DETAILED DESCRIPTION

[0028] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0029] Reference below Figures 1-6 The atomic force microscope low-temperature probe 100 according to an embodiment of the present invention can flexibly adjust the relative positions of the sample stage 17, the NV probe 26 and the low-temperature objective lens barrel 3, thereby ensuring that the probe is completely placed in the low temperature, improving the accuracy of sample observation, facilitating the observation and replacement of samples, and being easy to use.

[0030] like Figures 1-6 As shown, the atomic force microscope cryogenic probe 100 according to an embodiment of the present invention includes: a sample displacement assembly 1 , a probe displacement assembly 2 , a sample stage 17 and a cryogenic objective lens barrel 3 .

[0031] Among them, the sample stage 17 is located below the low-temperature objective lens barrel 3, and the sample stage 17 is installed on the sample displacement assembly 1. The sample displacement assembly 1 is used to drive the sample stage 17 to move in space, such as driving the sample stage 17 to move in the X direction, or driving the sample stage 17 to move in the Z direction, or driving the sample stage 17 to move in the Y direction, or driving the sample stage 17 to achieve pitch adjustment in different directions or angles, thereby facilitating the adjustment of the position and angle of the sample stage 17 in space.

[0032] The sample stage 17 is used to carry the sample and is provided with a sample placement groove 1731, into which the sample can be placed. It should be noted that the sample placement groove 1731 extends through the thickness of the sample stage 17, so that after the sample is placed in the placement groove, both sides of the sample are in a light-transmitting state, thereby ensuring the accuracy and reliability of sample detection. The sample placement groove 1731 is adapted to move relative to the cryogenic objective lens barrel 3, such as when the sample placement groove 1731 moves horizontally relative to the cryogenic objective lens barrel 3. Furthermore, during the movement of the sample placement groove 1731, the sample placed in the sample placement groove 1731 can be flexibly replaced, facilitating the removal and replacement of the sample.

[0033] The probe displacement assembly 2 is equipped with an NV probe 26, and the probe displacement assembly 2 is used to drive the NV probe 26 to move in space, such as driving the sample stage 17 to move in the X direction by the sample displacement assembly 1, or driving the sample stage 17 to move in the Z direction, or driving the sample stage 17 to move in the Y direction, so as to facilitate the adjustment of the position of the sample stage 17 in space. Among them, the NV probe 26 is suitable for moving to the top of the sample placement slot 1731. In other words, when the observation position is actually adjusted, the position of the NV probe 26 can be adjusted by the probe displacement assembly 2. At the same time, the position of the sample stage 17 can be adjusted by the sample displacement assembly 1, so that the relative position of the NV probe 26 and the sample stage 17 can be effectively adjusted, and there will be no limitations on the position adjustment of a single component, which increases the possibility of adjustment and meets more detection position requirements. Specifically, if Figure 1 As shown, the probe displacement assembly 1 and the sample displacement assembly 2 are arranged side by side, that is, the probe displacement assembly 1 and the sample displacement assembly 2 are distributed in sequence in the horizontal direction, so as to reasonably utilize the space in the horizontal direction.

[0034] The low-temperature objective lens barrel 3 is located above the sample placement groove 1731, and when the NV probe 26 moves to the top of the sample placement groove 1731, the laser is suitable for irradiating the NV probe 26 through the low-temperature objective lens barrel 3. Among them, the low-temperature objective lens barrel 3 can provide a low-temperature environment, and the low-temperature effect generated by the low-temperature objective lens barrel 3 can affect the detection effect at the NV probe 26. In the present invention, by providing a sample stage 17 and an NV probe 26 that can move relative to the low-temperature objective lens barrel 3, it is beneficial to flexibly adjust the relative positions of the sample stage 17 and the NV probe 26 and the low-temperature objective lens barrel 3, and the relative position between the sample stage 17 and the NV probe 26 can be flexibly adjusted, thereby flexibly adjusting the size of the space between the low-temperature objective lens barrel 3 and the sample, ensuring that the sample and the NV probe 26 are in a low-temperature environment, and ensuring that the actual detection conditions meet the detection requirements, so as to improve the accuracy and reliability of the detection.

[0035] Furthermore, the sample stage 17 is configured to be movable relative to the low-temperature objective lens barrel 3 and the NV probe 26, which facilitates the sample to enter the low-temperature environment for observation and facilitates the user to replace and remove the sample, making the operation convenient.

[0036] Thus, the sample displacement assembly 1, the probe displacement assembly 2, the sample stage 17, the cryogenic objective lens barrel 3, and the NV probe 26 are integrally formed into an atomic force microscope cryogenic probe 100, which is convenient for being placed in a cryogenic dewar for low-temperature observation experiments and is also convenient for being removed from the cryogenic dewar as a whole. This is the optimal combination:

[0037] First, the sample stage 17 is an indispensable low-temperature probe component, because the low-temperature test requires that the sample on the sample stage 17 be kept in a low-temperature environment. On this basis, the low-temperature objective lens barrel 3 is also an indispensable low-temperature probe component, because the low-temperature objective lens barrel 3 is arranged above the sample stage 17, which can increase the depth of the sample stage 17 in the low-temperature Dewar, thereby improving the temperature stability of the low-temperature environment in which the sample stage 17 is located;

[0038] Second, the sample displacement assembly 1, the probe displacement assembly 2, and the NV probe 26 are also essential cryogenic probe assemblies. Due to the application requirements of the cryogenic Dewar, the cryogenic probe can only be placed in the cryogenic Dewar in a suspended manner by connecting it to other main components of the atomic force microscope through its upper part. In this case, the sample displacement assembly 1, the probe displacement assembly 2, and the NV probe 26 are integrated into the cryogenic probe, forming the most streamlined structure for matching with the sample stage 17.

[0039] Third, the components of the cryogenic probe other than the sample stage 17 can increase the overall counterweight of the cryogenic probe, thereby ensuring the overall stability of the cryogenic probe after suspension and preventing the micro-movement of the sample stage 17 from affecting the observation;

[0040] Fourth, the arrangement of the components ensures that the overall structure of the cryogenic probe is long and narrow, making it suitable for placement and removal in the cryogenic Dewar. This also helps reduce the aperture of the cryogenic Dewar, thereby minimizing the loss of refrigerants such as liquid nitrogen or liquid helium.

[0041] Fifth, the optimized setting makes the sample stage 17 located in the middle of the cryogenic probe. The micro-movement caused by the operation of the sample displacement assembly 1, the probe displacement assembly 2, the cryogenic objective tube 3 and the connection part above the Dewar has the least impact on the sample stage 17, thereby further improving the stability of the sample stage 17 and helping to improve the quality of the observation test.

[0042] According to the atomic force microscope low-temperature probe 100 of the embodiment of the present invention, the installation of each component is achieved in the optimal manner, and the relative positions of the sample stage 17, the NV probe 26 and the low-temperature objective lens barrel 3 can be flexibly adjusted to ensure that the probe is completely placed in the low temperature, thereby improving the accuracy of sample observation. It can move flexibly relative to the low-temperature objective lens barrel 3 and the NV probe 26, which is conducive to accurate observation, and the sample placement groove 1731 on the sample stage 17 can move flexibly relative to the low-temperature objective lens barrel 3, and then during the movement of the sample placement groove 1731, the sample placed on the sample placement groove 1731 can be flexibly replaced, which facilitates the rapid disassembly and replacement of the sample.

[0043] In some embodiments, the sample stage 17 includes a fixed base 171 , a detachable seat 172 , and a platform panel 173 .

[0044] Among them, the fixed base 171 is fixedly connected to the upper end of the sample displacement assembly 1, such as by connecting and fixing the fixed base 171 and the upper end of the sample displacement assembly 1 through bolts or screws to ensure that the position of the sample stage 17 at the upper end of the sample displacement assembly 1 is relatively stable.

[0045] The detachable seat 172 is movably mounted on the fixed base 171, and the detachable seat 172 and the fixed base 171 can be selectively fixed relative to each other. That is, when the detachable seat 172 and the fixed base 171 are not fixed relative to each other, the relative position of the detachable seat 172 and the fixed base 171 can be adjusted so that the detachable seat 172 moves relative to the fixed base 171 into or outside the detection area. After the detachable seat 172 moves relative to the fixed base 171 into the detection area, the detachable seat 172 and the fixed base 171 can be fixed relative to each other.

[0046] The platform panel 173 is installed on the detachable seat 172 and is provided with a sample placement groove 1731. Thus, the platform panel 173 can move relative to the fixed base 171 along with the detachable seat 172, so as to move the platform panel 173 from the detection area to outside the detection area to replace the sample, and after the sample is replaced, it can enter the detection area for low-temperature observation. The structure is simple, which is conducive to the detection of different samples.

[0047] In some embodiments, the detachable seat 172 includes a front fixing portion 1721, a middle connecting portion 1722, and a rear connecting portion 1723. The front fixing portion 1721, the middle connecting portion 1722, and the rear connecting portion 1723 are integrally formed, meaning that no separate connector is required to connect two adjacent portions. This results in a simple structure, fewer installation steps, and a strong connection between the two portions, making it less prone to breakage.

[0048] The front fixing portion 1721 is slidably matched with the fixed base 171 and is suitable for being relatively fixed by a connecting piece, such as a sliding guide post is provided at the bottom of the front fixing portion 1721, and a sliding guide groove is formed on the upper surface of the fixed base 171, so that after the front fixing portion 1721 is installed on the upper side of the fixed base 171, the sliding guide post extends into the sliding guide groove, so that the front fixing portion 1721 can slide stably relative to the fixed base 171, thereby achieving position adjustment of the platform panel 173 relative to the fixed base 171 and the NV probe 26. The connecting piece can be a bolt or a screw to detachably connect the front fixing portion 1721 to the fixed base 171.

[0049] The intermediate connecting portion 1722 is connected between the front fixing portion 1721 and the rear connecting portion 1723. That is, the front fixing portion 1721, the intermediate connecting portion 1722, and the rear connecting portion 1723 are sequentially connected in the front-to-back direction, and the three are formed as a whole and fixedly mounted above the fixed base 171. The platform panel 173 is supported and mounted above the rear connecting portion 1723. Therefore, when the front fixing portion 1721 slides relative to the fixed base 171, the front fixing portion 1721 drives the rear connecting portion 1723 to move relative to the fixed base 171 through the intermediate connecting portion 1722, thereby achieving adjustment of the sample position.

[0050] The thicknesses of the front fixing portion 1721 , the middle connecting portion 1722 and the rear connecting portion 1723 can be set to be the same, and they can be integrally formed through a mold, which helps to reduce the difficulty of forming.

[0051] In some embodiments, the width of the front fixing portion 1721 and the width of the rear connecting portion 1723 are both greater than the width of the middle connecting portion 1722, so as to form a limiting space on both sides of the middle connecting portion 1722. Thus, the overall structure of the detachable seat 172 is an "I"-shaped structure, and in actual design, the limiting spaces on both sides can be symmetrically distributed.

[0052] The fixed base 171 is provided with a limiting boss 1711, which is located in the limiting space. Two limiting bosses 1711 can be provided, and the two limiting bosses 1711 can extend into the two limiting spaces respectively to perform limiting functions in the two limiting spaces. Specifically, when the detachable seat 172 slides to the maximum position relative to the fixed base 171, the limiting boss 1711 and the front fixing portion 1721 or the rear connecting portion 1723 are limited and abutted. For example, when the detachable seat 172 slides forward to the maximum position relative to the fixed base 171, the limiting boss 1711 abuts against the front fixing portion 1721, or when the detachable seat 172 slides backward to the maximum position relative to the fixed base 171, the limiting boss 1711 abuts against the rear connecting portion 1723, thereby limiting the detachable seat 172 in the front-to-back direction.

[0053] Thus, the detachable seat 172 can move relative to the fixed base 171 within a reasonable range of travel, thereby preventing the detachable seat 172 from being separated from the fixed base 171, thereby ensuring fast and reliable sample replacement.

[0054] In some embodiments, the upper end of the probe displacement assembly 2 is formed with an escape opening 27 on the side facing the sample displacement assembly 1. The escape opening 27 is used to avoid the platform panel 173, and the escape opening 27 is formed below the NV probe 26. Figure 6 As shown, the avoidance opening 27 is formed on the right side of the upper end of the probe displacement assembly 2, and the opening width of the avoidance opening 27 is greater than the thickness of the platform panel 173. Thus, when the detachable seat 172 moves relative to the fixed base 171, at least part of the platform panel 173 can be set in the avoidance opening 27 to make the distance between the sample placement groove 1731 and the NV probe 26 smaller, thereby facilitating the NV probe 26 to accurately detect the sample and improve the detection accuracy.

[0055] In some embodiments, the platform panel 173 is provided with line connectors 6 at positions on both sides of the middle connecting portion 1722 . The line connectors 6 are used to electrically connect to an external wiring harness, thereby meeting the observed wiring harness connection requirements.

[0056] In some embodiments, as Figure 2-Figure 4 As shown, the atomic force microscope low-temperature probe 100 further includes: a probe outer frame 4 and a frame base 5.

[0057] The probe outer frame 4 is installed above the frame base 5, and the probe outer frame 4 and the frame base 5 define an installation space, such as Figure 2-Figure 4As shown in the figure, the skeleton base is constructed as a plate-like member, the probe exoskeleton 4 is constructed as a hollow frame structure, and the bottom of the probe exoskeleton 4 is open. After the probe exoskeleton 4 is supported on the skeleton base, the lower end of the probe exoskeleton 4 is relatively fixed to the skeleton base to realize the installation of the external mirror body of the atomic force microscope low-temperature probe 100.

[0058] The sample displacement assembly 1, the probe displacement assembly 2 and the cryogenic objective lens barrel 3 are all installed in the installation space, such as Figure 1 As shown, the bottoms of the sample displacement assembly 1 and the probe displacement assembly 2 are both supported on the skeleton base 5, and the probe exoskeleton 4 is sleeved outside the sample displacement assembly 1 and the probe displacement assembly 2 to protect the sample displacement assembly 1 and the probe displacement assembly 2. The sample displacement assembly 1 and the probe displacement assembly 2 are distributed in sequence along the horizontal direction and are both located below the low-temperature objective lens barrel 3, thereby rationally utilizing the installation space and achieving a reasonable distribution of structural parts.

[0059] In some embodiments, two opposite sides of the probe outer frame 4 along the first direction are formed as hollow open sides, such as Figure 2 As shown, the left and right sides of the probe outer frame 4 are both open sides, and as shown in FIG. Figure 3 As shown in FIG, the front and rear sides of the probe outer frame 4 are both open sides, that is, the first direction is as shown in FIG. Figure 2 The left and right directions and the attached Figure 3 The front-to-back direction is set so that the sample displacement assembly 1 and the probe displacement assembly 2 can be directly seen from the two open sides, which is conducive to the position adjustment of the sample and the NV probe 26.

[0060] At the same time, hollow observation windows 41 are formed on two opposite sides of the probe outer frame 4 along the second direction, and the observation windows 41 are arranged opposite to the NV probe 26. Figure 2 and Figure 4 As shown in FIG, the front side of the probe outer frame 4 is provided with an observation window 41 so that the operator can observe the interior from the observation window 41, that is, the second direction is as shown in FIG. Figure 2 and Figure 4 The front-to-back direction.

[0061] In some embodiments, wiring grooves 42 are provided on the two side surfaces opposite to each other along the second direction, and the wiring grooves 42 are connected to the observation window 41. A wiring card 43 is provided in the wiring grooves 42 so that the wiring harness at the observation window 41 can be arranged and extended from the wiring grooves 42 and fixed by the wiring card 43.

[0062] like Figure 4As shown, the wiring groove 42 is provided on the outer peripheral wall of the probe exoskeleton 4 and is located on the upper side of the observation window 41. Two wiring cards 43 are provided at the wiring groove 42. When the wiring harness is passed through the wiring groove 42, the wiring harness is fixed by the two wiring cards 43 to ensure that the state of the wiring harness is stable.

[0063] In some embodiments, as Figure 1 As shown, the sample displacement assembly 1 includes a first Z-axis translation stage 11, a first X-axis translation stage 12, a first Y-axis translation stage 13, a P-viewing stage 14, a T-viewing stage 15 and an XYZ scanning stage 16. The sample stage 17 is installed on the upper end of the XYZ scanning stage 16. The first Z-axis translation stage 11, the first X-axis translation stage 12, the first Y-axis translation stage 13, the P-viewing stage 14, the T-viewing stage 15 and the XYZ scanning stage 16 are distributed in sequence from bottom to top along the vertical direction. Among them, the first Z-axis translation stage 11, the first X-axis translation stage 12, and the first Y-axis translation stage 13 can respectively adjust the position of the sample in the Z, X and Y directions. The P-viewing stage 14 and the T-viewing stage 15 are used to adjust the pitch angles of the sample in different directions. The XYZ scanning stage 16 cooperates with the above-mentioned stages to adjust the position of the sample.

[0064] As well as Figure 1 As shown, the probe displacement assembly 2 includes a second Z-axis displacement stage 21, a second X-axis displacement stage 22, a second Y-axis displacement stage 23, a Z scanning stage 24 and an XY scanning stage 25. The NV probe 26 is installed at the upper end of the XY scanning stage 25. The second Z-axis displacement stage 21, the second X-axis displacement stage 22, the second Y-axis displacement stage 23, the Z scanning stage 24 and the XY scanning stage 25 are distributed in sequence from bottom to top in the vertical direction. Among them, the second Z-axis displacement stage 21, the second X-axis displacement stage 22, and the second Y-axis displacement stage 23 can respectively realize the position adjustment of the NV probe 26 in the Z direction, X direction and Y direction. The Z scanning stage 24 and the XY scanning stage 25 cooperate with the above-mentioned stages to realize the position adjustment of the NV probe 26.

[0065] Thus, the position and angle of the NV probe 26 and the sample in space can be flexibly adjusted, thereby facilitating adjustment of the distance between the NV probe 26 and the cryogenic objective lens barrel 3 and facilitating the placement of the sample.

[0066] In some embodiments, sample placement slot 1731 is constructed as a circular hole and is open upward. Sample placement slot 1731 extends through the thickness of sample stage 17. When a sample is placed above the circular hole, both sides of the sample are transparent, thereby ensuring accurate and reliable sample detection. NV probe 26 extends relative to probe displacement assembly 2 toward sample displacement assembly 1 to directly above sample placement slot 1731, which helps to reduce the distance between NV probe 26 and the sample, enabling closer detection and improving detection accuracy.

[0067] The following describes the specific steps of the atomic force microscope cryogenic probe 100 in the present invention when performing detection:

[0068] When it is necessary to place a sample, the bolts of the front fixing part 1721 are loosened, and the detachable seat 172 can be pulled out with tweezers to facilitate the placement or replacement of the sample in the sample placement groove 1731. The limiting boss 1711 can play a limiting role when pulling it out; if necessary, the line connector 6 on the platform panel 173 can be pulled out to take out the entire sample stage 17: after placing the sample, the detachable seat 172 is reset and fixed to the fixed base 171 by bolts, which can well ensure the connection rigidity, and the detachable seat 172 is in the shape of an "I" character, which is convenient for operation with tweezers (since the overall diameter of the rod probe of the atomic force microscope low-temperature probe 100 is only 50 mm, the internal components are relatively small), and can effectively reduce the overall mass of the sample stage 17 (since the nano-piezoelectric displacement stage can withstand a limited load), and can ensure the overall rigidity of the sample stage 17.

[0069] During operation, the excitation laser is irradiated onto the diamond NV color center system on the atomic force probe through the low-temperature objective tube 3. The diamond NV color center system senses the magnetic field on the sample surface and emits fluorescence. The fluorescence is collected into the light detection system through the low-temperature objective tube 3. Based on the principle of ODMR (light detection magnetic resonance), the current distance between the atomic force probe and the atoms on the sample surface can be known; the relative position between the atomic force probe and the sample is changed by the sample displacement component 1 and the probe displacement component 2. Based on the principle of AFM (atomic force microscope), the high-resolution microscopic surface features of the sample can be obtained.

[0070] 1. In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operate in a specific direction. Therefore, they should not be understood as limiting the present invention.

[0071] 2. In the description of the present invention, "first feature" and "second feature" may include one or more of these features.

[0072] 3. In the description of the present invention, “plurality” means two or more.

[0073] 4. In the description of the present invention, a first feature being “above” or “below” a second feature may include the first and second features being in direct contact, or the first and second features being in contact not directly but via another feature therebetween.

[0074] 5. In the description of the present invention, the phrases “above”, “above” and “above” a first feature to a second feature include the first feature being directly above and obliquely above the second feature, or simply indicate that the first feature is horizontally higher than the second feature.

[0075] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative uses of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0076] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A low-temperature probe for an atomic force microscope, characterized in that: The atomic force microscope cryogenic probe is used to be placed in a cryogenic Dewar, and includes: Low temperature objective lens barrel (3); A sample stage (17), the sample stage (17) is located below the low-temperature objective lens barrel (3), and the sample stage (17) is provided with a sample placement groove (1731), the sample placement groove (1731) is used to place a sample, and the sample placement groove (1731) is suitable for moving relative to the low-temperature objective lens barrel (3); A sample displacement assembly (1), the sample displacement assembly (1) is used to install the sample stage (17) on the top and to drive the sample stage (17) to move in the space; A probe displacement assembly (2), wherein the probe displacement assembly (2) is equipped with an NV probe (26), and the probe displacement assembly (2) is used to drive the NV probe (26) to move in a space, wherein the NV probe (26) is adapted to move above the sample placement slot (1731), and the probe displacement assembly (2) and the sample displacement assembly (1) are arranged side by side; The sample stage (17) comprises a fixed base (171), a detachable seat (172) and a platform panel (173); the fixed base (171) is connected to the upper end of the sample displacement assembly (1); the detachable seat (172) is movably mounted on the fixed base (171) and can be selectively fixed relative to the fixed base (171); the platform panel (173) is mounted on the detachable seat (172) and is provided with the sample placement slot (1731); The detachable seat (172) comprises a front fixing portion (1721), an intermediate connecting portion (1722) and a rear connecting portion (1723); the front fixing portion (1721) is slidably matched with the fixed base (171) and is adapted to be relatively fixed via a connecting member; the intermediate connecting portion (1722) is connected between the front fixing portion (1721) and the rear connecting portion (1723); and the platform panel (173) is supported and installed above the rear connecting portion (1723); The width of the front fixing portion (1721) and the width of the rear connecting portion (1723) are both greater than the width of the middle connecting portion (1722), so as to form a limiting space on both sides of the middle connecting portion (1722); The fixed base (171) is provided with a limiting boss (1711), the limiting boss (1711) is located in the limiting space, and when the detachable seat (172) slides to the maximum position relative to the fixed base (171), the limiting boss (1711) and the front end fixing portion (1721) or the rear end connecting portion (1723) are limited and abutted against each other.

2. The atomic force microscope cryogenic probe according to claim 1, characterized in that: An escape opening (27) is formed at the upper end of the probe displacement assembly (2) on a side facing the sample displacement assembly (1), and the escape opening (27) is used to escape the platform panel (173).

3. The atomic force microscope cryogenic probe according to claim 1, characterized in that: The platform panel (173) is provided with line connectors (6) at positions located on both sides of the middle connecting portion (1722).

4. The atomic force microscope cryogenic probe according to claim 1, characterized in that Also includes: A probe exoskeleton (4) and a skeleton base (5), wherein the probe exoskeleton (4) is installed above the skeleton base (5) and defines an installation space with the skeleton base (5), the sample displacement assembly (1), the probe displacement assembly (2) and the low-temperature objective lens barrel (3) are all installed in the installation space, and the sample displacement assembly (1) and the probe displacement assembly (2) are sequentially distributed in a horizontal direction and are both located below the low-temperature objective lens barrel (3).

5. The atomic force microscope cryogenic probe according to claim 4, characterized in that: Two opposite side surfaces of the probe exoskeleton (4) along a first direction are both formed as hollowed-out open sides, and two opposite side surfaces of the probe exoskeleton (4) along a second direction are both formed with hollowed-out observation windows (41).

6. The atomic force microscope cryogenic probe according to claim 5, characterized in that: Two side surfaces that are opposite to each other along the second direction are provided with wiring grooves (42), the wiring grooves (42) are connected to the observation window (41), and a wiring card (43) is provided in the wiring grooves (42).

7. The atomic force microscope cryogenic probe according to claim 1, characterized in that: The sample placement groove (1731) is constructed in the shape of a circular hole and is open upward. The NV probe (26) extends relative to the probe displacement component (2) in a direction close to the sample displacement component (1) to extend directly above the sample placement groove (1731).

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