Method, apparatus and electronic device for correcting energy resolution of an image sensor

Abstract

The application provides a method, device and electronic equipment for correcting energy resolution of an image sensor, the method comprising: establishing an energy correction formula for each pixel in the image sensor to be corrected according to a gray value and an energy value corresponding to each of a plurality of specific electron groups received by the pixel; wherein the specific electron group has a predetermined number of electrons; correcting the energy value of the plurality of specific electron groups received by each pixel according to the energy correction formula of the pixel; and determining a corrected energy resolution of the image sensor according to the corrected energy value of the plurality of specific electron groups received by each pixel in the image sensor. The application effectively overcomes the deviation of the image sensor caused by various reasons and improves the energy resolution of the image sensor.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of image sensor testing, and in particular to a method and device for correcting energy resolution of an image sensor and an electronic device. BACKGROUND

[0002] An image sensor is an imaging device, including a Charge-Coupled Device (CCD) type image sensor, a Complementary Metal Oxide Semiconductor (CMOS) type image sensor, and a SciTech Display Doctor (SDD) type image sensor, etc. The image sensor can perform imaging energy spectrum analysis on electromagnetic waves such as infrared, visible light, ultraviolet, X-rays, and gamma rays, and charged particles such as protons and electrons. Commonly used image sensors are mostly made of silicon semiconductor materials.

[0003] Energy resolution refers to the minimum energy interval that can be determined by the image sensor for two different energy incident particles. The energy resolution is defined as the ratio of the Full Width at Half Maxima (FWHM) to the peak energy, which represents the resolution capability of the image sensor for different energy X-rays or gamma rays, and thus is one of the most important performance indicators of the image sensor.

[0004] In the prior art, for an image sensor with position resolution, the energy resolution detection method is to perform non-discriminatory energy spectrum analysis on all X-ray photons or gamma ray photons on all pixels on the entire detection area, so as to obtain the energy resolution by fitting the characteristic peak half width.

[0005] However, the energy resolution of the image sensor is affected by various factors such as random fluctuations of electron distribution, electronic noise, and dark current. Therefore, the energy resolution detection result obtained by the energy resolution detection method of the prior art has a certain deviation, which is not conducive to improving the energy resolution of the image sensor. SUMMARY

[0006] The present application provides a method and device for correcting energy resolution of an image sensor and an electronic device, to solve the defect that the detection result obtained by the energy resolution detection method of the prior art has a deviation, thereby improving the performance of the energy resolution of the image sensor.

[0007] The present application provides a method for correcting energy resolution of an image sensor, comprising:

[0008] According to the gray value and the energy value corresponding to the plurality of specific electron groups received by each pixel in the image sensor to be corrected, an energy correction formula is established for each pixel respectively; wherein the specific electron group has a predetermined number of electrons;

[0009] According to the energy correction formula of each pixel, the energy value of the plurality of specific electron groups received by each pixel is corrected respectively;

[0010] According to the corrected energy value of the plurality of specific electron groups received by each pixel in the image sensor, the corrected energy resolution of the image sensor is determined.

[0011] According to the method for correcting the energy resolution of the image sensor provided by the application, the gray value and the energy value corresponding to the plurality of specific electron groups received by each pixel in the image sensor to be corrected are determined, and an energy correction formula is established for each pixel respectively, which includes:

[0012] The gray value and the energy value corresponding to the plurality of specific electron groups received by each pixel in the image sensor to be corrected are determined;

[0013] According to the gray value and the energy value corresponding to the plurality of specific electron groups received by each pixel in the image sensor, fitting is performed for each pixel respectively, and the gain value of each pixel is obtained;

[0014] According to the gain value of each pixel and the energy value of the plurality of specific electron groups received by each pixel, an energy correction formula is established for each pixel respectively.

[0015] According to the method for correcting the energy resolution of the image sensor provided by the application, the gray value and the energy value corresponding to the plurality of specific electron groups received by each pixel in the image sensor to be corrected are determined, which includes:

[0016] A radioactive light source irradiates a pre-set target material to generate characteristic X-rays of corresponding elements;

[0017] The positions, gray values and energy values of all electron groups received by the image sensor to be corrected are recorded;

[0018] After the irradiation process is completed, according to the recorded positions and corresponding gray values of all electron groups, the gray value corresponding to the plurality of specific electron groups received by each pixel in the image sensor is determined; wherein the plurality of electron groups are generated by the characteristic X-rays;

[0019] The energy value of the plurality of specific electron groups received by each pixel in the image sensor is determined.

[0020] A method for correcting energy resolution of an image sensor according to the present application, the method comprising:

[0021] determining the gray scale values and the energy values corresponding to the multiple specific electron groups received by a first pixel, wherein the first pixel is any one of the pixels in the image sensor;

[0022] performing linear fitting according to the gray scale values and the energy values corresponding to the multiple specific electron groups received by the first pixel to obtain a gain value of the first pixel.

[0023] A method for correcting energy resolution of an image sensor according to the present application, the method comprising:

[0024] establishing a linear relationship between the energy values and the gray scale values of the multiple specific electron groups received by a second pixel according to the gain value of the second pixel, the gray scale values and the energy values of the multiple specific electron groups received by the second pixel, wherein the second pixel is any one of the pixels in the image sensor;

[0025] determining an energy correction formula of the second pixel according to the obtained linear relationship.

[0026] A method for correcting energy resolution of an image sensor according to the present application, the method further comprising:

[0027] ending the process of irradiating the pre-set target material by the radioactive light source after the pre-set condition is met.

[0028] A method for correcting energy resolution of an image sensor according to the present application, the method comprising:

[0029] superimposing the corrected energy values of the multiple specific electron groups received by all the pixels in the image sensor;

[0030] performing Gaussian fitting on the superimposed result to obtain the corrected energy resolution of the image sensor.

[0031] The application further provides a device for correcting energy resolution of an image sensor, comprising:

[0032] An energy correction formula establishing module is configured to establish an energy correction formula for each pixel in the image sensor to be corrected according to a plurality of corresponding gray scale values and energy values of specific electron groups received by the pixel;

[0033] An energy value correction module is configured to correct the energy values of the specific electron groups received by each pixel according to the energy correction formula of the pixel;

[0034] An energy resolution correction module is configured to determine the corrected energy resolution of the image sensor according to the corrected energy values of the specific electron groups received by each pixel in the image sensor.

[0035] The application further provides an electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the method for correcting the energy resolution of the image sensor when executing the program.

[0036] The application further provides a non-transitory computer readable storage medium having a computer program stored thereon, wherein the computer program is executable on a processor to implement the method for correcting the energy resolution of the image sensor.

[0037] The method, device and electronic device for correcting the energy resolution of the image sensor are configured to establish an energy correction formula based on the gray scale values and energy values of specific electron groups received by a pixel, correct the energy values of the specific electron groups according to the energy correction formula, and finally obtain the corrected energy resolution of the image sensor, thereby effectively overcoming the deviation caused by the inconsistency between pixels and improving the energy resolution of the image sensor. BRIEF DESCRIPTION OF DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the application or prior art, the following will briefly introduce the drawings needed in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative effort.

[0039] Figure 1 FIG. 1 is a structural schematic diagram of an image acquisition device based on the method for correcting the energy resolution of the image sensor according to the application;

[0040] Figure 2This is a flowchart of the method for correcting the energy resolution of an image sensor provided by the present invention;

[0041] Figure 3 This is the energy spectrum obtained by performing energy spectrum analysis on two pixels in the energy sensor;

[0042] Figure 4 Yes Figure 3 The energy spectrum of the specific electron clusters received by the two pixels involved, after energy correction;

[0043] Figure 5 These are the energy spectra of a 100×100 pixel array before and after correction;

[0044] Figure 6 This is a schematic diagram of the gain value fitting of a certain pixel in an image sensor;

[0045] Figure 7 This is a schematic diagram of the device for correcting the energy resolution of an image sensor provided by the present invention;

[0046] Figure 8 This is a schematic diagram of the structure of the electronic device provided by the present invention. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0048] Before describing the method for correcting the energy resolution of an image sensor according to the present invention, the image acquisition device on which this method is based will be described first.

[0049] Figure 1 This is a schematic diagram of the image acquisition device on which the method for correcting the energy resolution of an image sensor of the present invention is based, as shown below. Figure 1 As shown, the device includes a radioactive light source 101, a target material 102, and an image sensor 103; wherein the radioactive light source 101, the target material 102, and the image sensor 103 are all located in the same sealed container; the rays (or electron or proton beams) emitted by the radioactive light source 101 irradiate the target material 102, generating multiple characteristic rays, which are then transmitted to the image sensor 103, and after interacting with the material (such as silicon) in the image sensor 103, electron clusters are generated through the photoelectric effect, and the generated electron clusters randomly irradiate each pixel of the image sensor.

[0050] The radioactive light source 101 is an X-ray or gamma-ray source, such as a commercial X-ray tube.

[0051] The target material 102 can be made by doping with a variety of metal elements. In this embodiment, the target material 102 can be made by doping with three metal elements: titanium (Ti), iron (Fe), and chromium (Cr).

[0052] Image sensor 103 is the image sensor whose energy resolution needs to be corrected. In this embodiment, image sensor 103 is an X-ray image sensor capable of imaging X-rays, or a gamma-ray image sensor capable of imaging gamma rays. For example, a CMOS array type X-ray image sensor. It should be noted that the image sensor involved in this application refers to an X-ray image sensor capable of imaging X-rays, or a gamma-ray image sensor capable of imaging gamma rays, and does not involve visible light image sensors.

[0053] The entire device is a sealed container, and the system vacuum can be maintained during use by a vacuum pump, such as when the vacuum level is required to be below 0.1 Pa.

[0054] based on Figure 1 The image acquisition device shown can implement the method of correcting the energy resolution of the image sensor of the present invention.

[0055] Figure 2 A flowchart illustrating the method for correcting the energy resolution of an image sensor provided by this invention. Figure 2 As shown, the method for correcting the energy resolution of an image sensor provided by the present invention includes:

[0056] Step 201: Based on the grayscale value and energy value corresponding to multiple specific electron clusters received by each pixel in the image sensor to be corrected, establish an energy correction formula for each pixel.

[0057] As is common knowledge to those skilled in the art, an image sensor contains multiple pixels, and the resolution of an image sensor reflects the number of pixels it contains. For example, a 100×100 image sensor contains 10,000 pixels.

[0058] In the case that the type of the metal contained in the target material 102 is determined, the characteristic X-rays excited by the irradiation of the rays (or electron, proton beams) emitted by the radioactive light source 101 onto the target material 102 are determined. For example, when X-rays are irradiated onto a mixed target material composed of Ti, Fe and Cr elements, six obvious characteristic X-rays with energy values of 4.51 keV, 4.93 keV, 5.41 keV, 5.95 keV, 6.40 keV and 7.06 keV are generated. In the case that the energy values of the characteristic X-rays are determined, the number of electrons in the electron group generated by the photoelectric effect is also determined, and the number of electrons in the electron group generated by the aforementioned six characteristic X-rays is 1236, 1351, 1482, 1630, 1753 and 1934, respectively. In the present embodiment, the electron group with the number of electrons determined is referred to as a specific electron group. There are generally a plurality of specific electron groups.

[0059] After the individual pixels in the image sensor receive the electron groups, the energy spectrum analysis can be performed on the individual pixels respectively to obtain the corresponding energy spectrum graphs. Since the electron groups are transmitted to the individual pixels in the image sensor in a random manner, the energy spectrum graphs of the individual pixels should be consistent in theory. However, in practice, due to the influence of various factors such as random fluctuation of electron distribution, electronic noise, dark current and the like, there is a certain difference between the energy spectrum graphs of the individual pixels in the image sensor. Figure 3 As shown in FIG. 6, the energy spectrum graphs of the two pixels are different. Figure 3 As shown in FIG. 6, the energy spectrum graphs of the two pixels are different.

[0060] In the present step, the gain value of each pixel is obtained by fitting the gray value and the energy value of the plurality of specific electron groups received by each pixel respectively. On the basis of the gain value of each pixel, the energy correction formula is established for the individual pixels according to the energy value and the gray value of the plurality of specific electron groups received by each pixel. In subsequent embodiments, the creation process of the energy correction formula will be further described.

[0061] The created energy correction formula can be expressed as:

[0062] E = a x,y + ain x,y × DN;

[0063] wherein E represents the energy value of a certain specific electron group received by the pixel (x, y); a x,y is the intercept when the pixel (x, y) is linearly fitted based on the gain value and the energy value of the electron group; Gain x,y is the gain value of the pixel (x, y); and DN is the gray value corresponding to the aforementioned certain specific electron group.

[0064] Step 202: Correct the energy values ​​of the multiple specific electron clusters received by each pixel according to the energy correction formula of each pixel.

[0065] In the previous step, the energy correction formula for each pixel was obtained. In this step, the energy values ​​of the multiple specific electron clusters received by each pixel can be corrected according to the energy correction formula.

[0066] For example, suppose the intercept 'a' corresponds to a certain pixel. x,y The gain value of this pixel is 6.69, and the grayscale value of a specific electron cluster is 600. Therefore, the energy value of this specific electron cluster can be calculated using the energy correction formula:

[0067] E=20.16+6.69*600=4034eV.

[0068] Figure 4 To Figure 3 The energy spectrum of the specific electron clusters received by the two pixels involved, after energy correction. Figure 4 and Figure 3 A comparison reveals that, Figure 4 In the middle, the energy spectrum curves of the two pixels have basically overlapped, effectively overcoming the problem. Figure 3 There is a problem that the energy spectrum curves of the two pixels are different.

[0069] It should be noted that the multiple specific electron clusters received by each pixel in this step can be the multiple specific electron clusters received by the pixel during the process of creating the energy correction formula for the pixel in step 201, or multiple specific electron clusters received by the pixel separately after the process of creating the energy correction formula for the pixel in step 201 is completed. This embodiment does not limit them.

[0070] Step 203: Determine the corrected energy resolution of the image sensor based on the corrected energy values ​​of the plurality of specific electron clusters received by each pixel in the image sensor.

[0071] In previous steps, the energy values ​​of multiple specific electron clusters received by each pixel have been corrected. In this step, the corrected energy values ​​are used to obtain the corrected energy resolution of the image sensor.

[0072] Specifically, the corrected energy values ​​of the multiple specific electron clusters received by all pixels in the image sensor are first superimposed; then, Gaussian fitting is performed on the superposition result to obtain the corrected energy resolution of the image sensor.

[0073] Figure 5The energy spectrum diagram before and after correction is a 100*100 pixel array. The energy resolution under the Fe element K_a characteristic line at 6.4 keV is 163 eV before correction and 140 eV after correction. After correction, the energy resolution is obviously improved.

[0074] The method for correcting the energy resolution of the image sensor provided by the application establishes an energy correction formula based on the gray value and energy value of the specific electron group received by each pixel, corrects the energy value of the specific electron group according to the energy correction formula, and finally obtains the corrected energy resolution of the image sensor, effectively overcoming the deviation of the image sensor caused by various reasons and improving the energy resolution of the image sensor. The method of the application is suitable for use scenarios that require high energy resolution.

[0075] Based on any of the above embodiments, in this embodiment, an energy correction formula is established for each pixel in the image sensor to be corrected based on the gray value and energy value of the specific electron group received by each pixel.

[0076] The gray value and energy value of the specific electron group received by each pixel in the image sensor to be corrected are determined.

[0077] The gray value and energy value of the specific electron group received by each pixel in the image sensor to be corrected are determined.

[0078] An energy correction formula is established for each pixel based on the gain value of each pixel and the energy value of the specific electron group received by each pixel.

[0079] In this embodiment, the specific creation process of the energy correction formula is described.

[0080] As mentioned in the previous embodiments, the rays (or electron, proton beams) emitted by the radioactive light source 101 irradiate the target material 102 to generate a plurality of characteristic rays, which are then transmitted to the image sensor 103. After interacting with the material (such as silicon) in the image sensor 103, the electron group is generated through the photoelectric effect, and the generated electron group will randomly irradiate each pixel of the image sensor. Using the functions of the image sensor itself, the position, gray value and energy value of each electron group received by the image sensor during the irradiation process can be recorded. For example, the position of a certain electron group recorded is (10, 15), and the gray value is 400.

[0081] After the length of time that the image sensor receives the electron cluster reaches a certain value, the number of recorded electron clusters can satisfy the need to correct the energy resolution of the image sensor, at which time the gray scale value and the energy value corresponding to the plurality of specific electron clusters received by each pixel in the image sensor can be determined based on the number, the gray scale value and the energy value of all recorded electron clusters.

[0082] Specifically, based on the position of the recorded electron cluster, it can be determined which electron clusters are received by each pixel in the image sensor. For example, the electron cluster numbered 0000001 has a position value of (10, 15), which means that the pixel (10, 15) in the image sensor receives the electron cluster; similarly, the electron cluster numbered 0000002 has a position value of (15, 20), which means that the pixel (15, 20) in the image sensor receives the electron cluster; the electron cluster numbered 0000003 has a position value of (30, 34), which means that the pixel (30, 34) in the image sensor receives the electron cluster.

[0083] Based on the gray scale value of the recorded electron cluster, the gray scale value of the electron cluster received by each pixel in the image sensor can be determined. For example, the gray scale value of the electron cluster numbered 0000001 is 354, so the gray scale value of an electron cluster received by the pixel (10, 15) in the image sensor is 354.

[0084] According to the gray scale value of each electron cluster recorded by a certain pixel, the gray scale value corresponding to the plurality of specific electron clusters received by the pixel can be determined. For example, the gray scale values of all electron clusters received by the pixel (15, 20) in the image sensor are counted, and according to the counting result, it is determined that the gray scale values corresponding to the six types of electron clusters with electron numbers of 1236, 1351, 1482, 1630, 1753 and 1934 received are 672, 734, 807, 884, 955 and 1052 respectively.

[0085] According to the energy value of each electron cluster recorded by a certain pixel, the energy value corresponding to the plurality of specific electron clusters received by the pixel can be determined. For example, the energy values of all electron clusters received by the pixel (15, 20) in the image sensor are counted, and according to the counting result, it is determined that the energy values corresponding to the six types of electron clusters with electron numbers of 1236, 1351, 1482, 1630, 1753 and 1934 received are 4.51keV, 4.93keV, 5.41keV, 5.95keV, 6.40keV, 7.06keV respectively.

[0086] After determining the grayscale and energy values ​​of the multiple specific electron clusters received by each pixel, the gain value of that pixel can be fitted based on the grayscale and energy values ​​of the multiple specific electron clusters received by that pixel.

[0087] Specifically, assuming the first pixel is any pixel in the image sensor, after determining the grayscale and energy values ​​corresponding to multiple specific electron clusters received by the first pixel, a linear fit is performed on the grayscale and energy values ​​corresponding to each of the multiple specific electron clusters received by the first pixel to obtain the gain value of the first pixel. Repeating the above operation for all pixels in the image sensor yields the gain value of each pixel in the image sensor.

[0088] Figure 6 This is a schematic diagram of the gain value fitting for a specific pixel in an image sensor, as shown below. Figure 6 As shown, the horizontal axis represents the energy value, and the vertical axis represents the grayscale value. Figure 6 The six peak positions represent electron clusters generated by the K_a, K_b, K_a, K_b, K_a, K_b, K_a, and K_b characteristic rays of Ti, respectively. Using these points to fit a straight line, the slope obtained is the gain value of that pixel.

[0089] The formula for calculating pixel gain can be expressed as:

[0090] E = a x,y +Gain x,y ×DN;

[0091] Where E represents the energy value of a specific electron cluster received by pixel (x, y); a x,y Gain is the intercept when a straight line is fitted between the gain value and the energy value of the electron cluster for pixel (x, y). x,y DN is the gain value of pixel (x, y); DN is the gray value corresponding to a specific electron cluster mentioned above.

[0092] By combining the energy and grayscale values ​​of multiple specific electron clusters with the above calculation formulas, the gain value (Gain) of pixel (x, y) can be calculated. x,y .

[0093] The formula for calculating the pixel gain value in this embodiment is actually the energy correction formula mentioned in the previous embodiment. Given a fixed pixel gain value, the corrected energy value of the electron cluster can be calculated accordingly.

[0094] Specifically, assuming that the second pixel is any one pixel in the image sensor; according to the gain value of the second pixel, the gray value and the energy value of the plurality of specific electron groups received by the second pixel, a linear relationship between the energy value of the plurality of specific electron groups received by the second pixel and the gray value of the plurality of specific electron groups received by the second pixel can be established; and the energy correction formula of the second pixel is determined according to the obtained linear relationship. The above operation is repeated for all pixels in the image sensor, and the energy correction formula of each pixel in the image sensor can be obtained.

[0095] The expression of the energy correction formula has been described in the previous embodiments, and thus is not repeated in the present embodiment.

[0096] The method for correcting the energy resolution of the image sensor provided by the present application establishes the energy correction formula for each pixel in the image sensor to be corrected according to the corresponding gray value and energy value of the plurality of specific electron groups received by each pixel, thereby providing a basis for the subsequent step of energy correction of the electron groups.

[0097] Based on any one of the above embodiments, in the present embodiment, the determination of the corresponding gray value and energy value of the plurality of specific electron groups received by each pixel in the image sensor to be corrected comprises:

[0098] The radioactive light source irradiates the pre-set target material to generate characteristic X-rays of corresponding elements;

[0099] The positions, gray values and energy values of all electron groups received by the image sensor to be corrected are recorded;

[0100] After the end of the irradiation process, the corresponding gray values of the plurality of specific electron groups received by each pixel in the image sensor are determined according to the recorded positions and corresponding gray values of all electron groups; wherein the plurality of electron groups are generated by the characteristic X-rays;

[0101] The energy values of the plurality of specific electron groups received by each pixel in the image sensor are determined.

[0102] The method for correcting the energy resolution of the image sensor provided by the present application establishes the energy correction formula based on the gray value and energy value of the specific electron groups received by the pixel, corrects the energy value of the specific electron groups according to the energy correction formula, and finally obtains the corrected energy resolution of the image sensor, effectively overcoming the deviation caused by the inconsistent gain of the image sensor, and improving the energy resolution of the image sensor.

[0103] Based on any one of the above embodiments, in the present embodiment, the method further comprises:

[0104] After the preset condition is met, the process of irradiating the target material by the radioactive light source is ended.

[0105] Since the position of the electron group irradiated on each pixel of the image sensor has randomness, in order to ensure that each pixel has received a sufficient number of electron groups, thereby ensuring the accuracy of subsequent correction of the energy resolution, in the embodiment, a termination condition is set for the irradiation process, and only when the preset termination condition is met, the irradiation process of the radioactive light source is ended.

[0106] In the embodiment, the termination condition can be that the number of electron groups measured on each pixel of the image sensor is more than 10,000. In other embodiments, the specific content of the condition can also be adjusted according to actual conditions.

[0107] The method for correcting the energy resolution of the image sensor provided by the application can ensure that each pixel in the image sensor has received a sufficient number of electron groups, thereby ensuring the accuracy of subsequent correction of the energy resolution, by setting a termination condition for the irradiation process of the radioactive light source.

[0108] The device for correcting the energy resolution of the image sensor provided by the application is described below, and the device for correcting the energy resolution of the image sensor described below can be referred to in correspondence with the method for correcting the energy resolution of the image sensor described above.

[0109] Figure 7 A schematic diagram of the device for correcting the energy resolution of the image sensor provided by the application is shown in FIG. 1, and the device for correcting the energy resolution of the image sensor provided by the application comprises: Figure 7

[0110] The energy correction formula establishing module 701 is configured to establish an energy correction formula for each pixel in the image sensor to be corrected according to the gray value and the energy value corresponding to each specific electron group received by the pixel; wherein the specific electron group has a predetermined number of electrons.

[0111] The energy value correction module 702 is configured to correct the energy value of each specific electron group received by each pixel according to the energy correction formula of the pixel.

[0112] The energy resolution correction module 703 is configured to determine the corrected energy resolution of the image sensor according to the corrected energy value of the plurality of specific electron groups received by each pixel in the image sensor.

[0113] ​The device for correcting the energy resolution of an image sensor provided by the application corrects the energy values of specific electron groups received by each pixel based on the gray values and energy values of the specific electron groups received by the pixel, and finally obtains the corrected energy resolution of the image sensor, effectively overcoming the deviation of the image sensor caused by various reasons and improving the energy resolution of the image sensor.

[0114] Figure 8 An example of a schematic diagram of the physical structure of an electronic device is shown in Figure 8 The electronic device can include a processor 810, a communications interface 820, a memory 830 and a communications bus 840, wherein the processor 810, the communications interface 820 and the memory 830 complete mutual communication through the communications bus 840. The processor 810 can call the logic instructions in the memory 830 to execute the method for correcting the energy resolution of an image sensor, which includes:

[0115] According to the gray values and energy values of a plurality of specific electron groups received by each pixel in the image sensor to be corrected, an energy correction formula is established for each pixel; wherein the specific electron group has a predetermined number of electrons;

[0116] According to the energy correction formula of each pixel, the energy values of a plurality of specific electron groups received by each pixel are respectively corrected;

[0117] According to the corrected energy values of the plurality of specific electron groups received by each pixel in the image sensor, the corrected energy resolution of the image sensor is determined.

[0118] In addition, the logic instructions in the memory 830 described above can be implemented in the form of a software function unit and sold or used as an independent product, which can be stored in a computer readable storage medium. Based on this understanding, the technical solutions of the application essentially or the part that contributes to the prior art or part of the technical solutions can be embodied in the form of a software product, which is stored in a storage medium and includes a plurality of instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the method described in the various embodiments of the application. The aforementioned storage medium includes: a U disk, a mobile hard disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a magnetic disk or an optical disk and various program code storage media.

[0119] In another aspect, the present application also provides a computer program product, which comprises a computer program, the computer program being stored in a non-transitory computer readable storage medium, and the computer program being executable by a processor to enable the computer to perform the method for correcting the energy resolution of an image sensor, comprising:

[0120] establishing an energy correction formula for each of the pixels in the image sensor to be corrected according to the corresponding gray value and energy value of each of the plurality of specific electron groups received by the pixel;

[0121] correcting the energy value of each of the plurality of specific electron groups received by each of the pixels according to the energy correction formula of the pixel;

[0122] determining the corrected energy resolution of the image sensor according to the corrected energy value of each of the plurality of specific electron groups received by each of the pixels in the image sensor.

[0123] In yet another aspect, the present application also provides a non-transitory computer readable storage medium, which stores a computer program, the computer program being executable by a processor to implement the method for correcting the energy resolution of an image sensor, comprising:

[0124] establishing an energy correction formula for each of the pixels in the image sensor to be corrected according to the corresponding gray value and energy value of each of the plurality of specific electron groups received by the pixel;

[0125] correcting the energy value of each of the plurality of specific electron groups received by each of the pixels according to the energy correction formula of the pixel;

[0126] determining the corrected energy resolution of the image sensor according to the corrected energy value of each of the plurality of specific electron groups received by each of the pixels in the image sensor.

[0127] The apparatus embodiments described above are merely illustrative, and the units described as separate components can or can not be physically separate, and the components shown as units can or can not be physical units, i.e., they can be located in one place or distributed on multiple network units. Some or all of the modules can be selected to achieve the purpose of the present embodiment scheme according to actual needs. Those skilled in the art can understand and implement it without creative labor.

[0128] Those skilled in the art can clearly understand the technical solutions of the various embodiments from the above description of the embodiments, and the various embodiments can be implemented by means of software with the necessary general hardware platforms, and of course, can also be implemented by hardware. Based on such understanding, the above technical solutions, essentially or in other words, the part of the prior art that makes a contribution, can be embodied in the form of a software product, which can be stored in a computer readable storage medium, such as a ROM / RAM, a magnetic disk, an optical disk, and the like, and includes a number of instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0129] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, rather than limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for some technical features therein; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A method for correcting the energy resolution of an image sensor, applied in an image acquisition device including a radioactive light source, a target material, and an image sensor; wherein, The radioactive light source, target material, and image sensor are all housed in the same vacuum-sealed container, characterized by comprising: Based on the grayscale values ​​and energy values ​​corresponding to multiple different specific electron clusters received by each pixel in the image sensor to be corrected, an energy correction formula is established for each pixel; wherein, the specific electron cluster has a predetermined number of electrons; this step specifically includes: determining the grayscale values ​​and energy values ​​corresponding to multiple different specific electron clusters received by each pixel in the image sensor to be corrected; performing linear fitting on each pixel based on the grayscale values ​​and energy values ​​corresponding to multiple different specific electron clusters received by each pixel in the image sensor to obtain the gain value of each pixel; and establishing an energy correction formula for each pixel based on the gain value of each pixel and the energy values ​​of multiple different specific electron clusters received by each pixel. According to the energy correction formula of each pixel, the energy values ​​of multiple different specific electron clusters received by each pixel are corrected respectively; The corrected energy resolution of the image sensor is determined based on the corrected energy values ​​of the plurality of different specific electron clusters received by each pixel in the image sensor.

2. The method for correcting the energy resolution of an image sensor according to claim 1, characterized in that, The process of determining the grayscale value and energy value corresponding to multiple different specific electron clusters received by each pixel in the image sensor to be corrected includes: A radioactive light source irradiates a pre-set target material, producing characteristic rays of the corresponding element. Record the position, grayscale value, and energy value of all electron clusters received by the image sensor to be corrected; After the irradiation process is completed, based on the recorded positions of all electron clusters and their corresponding gray values, the gray values ​​corresponding to multiple different specific electron clusters received by each pixel in the image sensor are determined; wherein, the multiple different specific electron clusters are generated by the feature rays; Determine the energy values ​​of multiple different specific electron clusters received by each pixel in the image sensor.

3. The method for correcting the energy resolution of an image sensor according to claim 1, characterized in that, The step of performing linear fitting on each pixel based on the grayscale values ​​and energy values ​​corresponding to multiple different specific electron clusters received by each pixel in the image sensor to obtain the gain value of each pixel includes: Determine the grayscale value and energy value corresponding to multiple different specific electron clusters received by the first pixel; wherein, the first pixel is any pixel in the image sensor; Based on the grayscale values ​​and energy values ​​corresponding to the multiple different specific electron clusters received by the first pixel, a straight line fit is performed to obtain the gain value of the first pixel.

4. The method for correcting the energy resolution of an image sensor according to claim 1, characterized in that, The step of establishing an energy correction formula for each pixel based on its gain value and the energy values ​​of multiple different specific electron clusters received by each pixel includes: Based on the gain value of the second pixel, the grayscale values ​​and energy values ​​of multiple different specific electron clusters received by the second pixel, a linear relationship is established between the energy values ​​of multiple different specific electron clusters received by the second pixel and the grayscale values ​​of multiple different specific electron clusters received by the second pixel; wherein, the second pixel is any pixel in the image sensor; The energy correction formula for the second pixel is determined based on the obtained linear relationship.

5. The method for correcting the energy resolution of an image sensor according to claim 2, characterized in that, The method also includes: Once the preset conditions are met, the process of irradiating the pre-set target material with the radioactive light source ends.

6. The method for correcting the energy resolution of an image sensor according to claim 1, characterized in that, Determining the corrected energy resolution of the image sensor based on the corrected energy values ​​of the plurality of different specific electron clusters received by each pixel in the image sensor includes: The corrected energy values ​​of multiple specific electron clusters received by all pixels in the image sensor are superimposed; Gaussian fitting is performed on the superposition results to obtain the corrected energy resolution of the image sensor.

7. A device for correcting the energy resolution of an image sensor, applied in an image acquisition device including a radioactive light source, a target material, and an image sensor; wherein, The radioactive light source, target material, and image sensor are all housed in the same vacuum-sealed container, characterized by comprising: An energy correction formula establishment module is used to establish an energy correction formula for each pixel based on the grayscale values ​​and energy values ​​corresponding to multiple different specific electron clusters received by each pixel in the image sensor to be corrected; wherein, the specific electron cluster has a predetermined number of electrons; the module includes: a grayscale value and energy value determination unit, used to determine the grayscale values ​​and energy values ​​corresponding to multiple different specific electron clusters received by each pixel in the image sensor to be corrected; a gain value calculation unit, used to perform linear fitting for each pixel based on the grayscale values ​​and energy values ​​corresponding to multiple different specific electron clusters received by each pixel in the image sensor to obtain the gain value of each pixel; and an energy correction formula generation unit, used to establish an energy correction formula for each pixel based on the gain value of each pixel and the energy values ​​of multiple different specific electron clusters received by each pixel. The energy value correction module is used to correct the energy values ​​of multiple different specific electron clusters received by each pixel according to the energy correction formula of each pixel. An energy resolution correction module is used to determine the corrected energy resolution of the image sensor based on the corrected energy values ​​of the plurality of different specific electron clusters received by each pixel in the image sensor.

8. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the program, it implements the method for correcting the energy resolution of an image sensor as described in any one of claims 1 to 6.

9. A non-transitory computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the method for correcting the energy resolution of an image sensor as described in any one of claims 1 to 6.

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