Sealing Structure of a Component Leak Detection Device

Abstract

The present invention discloses a sealing structure of a component leak detection device, which relates to the field of vacuum leak detection equipment. It solves the problems that the sealing structure of the container of the existing leak detection device has poor sealing performance in vacuum environment and high-pressure environment, and it is easy to cause danger when the manual mechanical opening structure is forcibly opened manually during container pressurization. The sealing structure includes a tank cover and a tank body provided with a connecting flange. The tank cover and the tank body are provided with the same rotating structure. A rectangular groove is provided on the tank cover, and a spinning block is provided on the tank body. The connecting flange is sequentially provided with a special-shaped rubber ring and an O-ring from inside to outside. A buffer structure is provided on the tank cover. The present invention uses the special-shaped rubber ring and the O-ring to double-seal the tank body and the tank cover, which can greatly improve the sealing performance of the leak detection device in vacuum environment and high-pressure environment respectively. The high-pressure anti-fooling opening prevention valve formed by the buffer structure, the V-shaped sealing ring and the baffle flange will transfer the force to the spinning block once it is stressed, thereby preventing manual opening of the cover.

Description

Technical Field

[0001] The present invention relates to the field of vacuum leak detection equipment, and more specifically to the technical field of the sealing structure of component leak detection devices. Background Art

[0002] With the continuous rise of the market demand for electronic components in China and the complex international situation, various electronic components such as semiconductor devices, integrated circuits, and electronic products urgently need to develop. After the components are encapsulated, leak detection means must be used to ensure the quality of the components. Most of the existing leak detectors are used for the detailed inspection and rough inspection of components such as semiconductor devices, integrated circuits, and electronic products. Among them, a vacuum is obtained for the container through a vacuum pump, and at the same time, the leak detection is realized by pressurizing the container with gas or other media. However, most of the existing sealing structures of the containers adopt a simple O-ring and a manual mechanical structure to press tightly to control the sealing performance. Its sealing effect is greatly affected by the accuracy of the processed parts and human control factors. Secondly, due to the structure of manually opening the cover mechanically and without an anti-fooling design, forcibly opening the cover manually during the pressurization of the container will cause danger.

[0003] Therefore, in order to solve the above problems, we urgently need a sealing structure for the container of the leak detection device, so that the sealing performance of the leak detection device container is very good in both vacuum environment and high-pressure environment, and manual opening of the cover can be prevented. Summary of the Invention

[0004] The purpose of the present invention is to provide a sealing structure for a component leak detection device in order to solve the technical problems that the sealing structure of the existing leak detection device container has poor sealing performance in both vacuum environment and high-pressure environment, and it is easy to cause danger when forcibly opening the manual mechanical opening structure during the pressurization of the container.

[0005] The present invention specifically adopts the following technical solutions to achieve the above purpose:

[0006] A sealing structure for a component leak detection device includes a tank cover and a tank body provided with a connecting flange. The same rotating structure is provided on the tank cover and the tank body. A rectangular groove is provided on the tank cover, and a spinning block is provided on the tank body. The connecting flange is sequentially provided with a special-shaped rubber ring and an O-ring from the inside to the outside. A buffer structure is provided on the tank cover. A V-shaped sealing ring and a baffle flange connected to the surface of the tank cover are sequentially provided on the buffer structure from left to right. A vent hole is provided on the baffle flange, and a V-shaped sealing ring is attached to the vent hole.

[0007] A rectangular sealing groove is provided on the connecting flange, and a special-shaped rubber ring is provided in the rectangular groove.

[0008] The special-shaped rubber ring is a Y-shaped special-shaped rubber ring.

[0009] A trapezoidal sealing groove is provided on the connecting flange, and an O-ring is provided in the trapezoidal sealing groove.

[0010] The rotating structure includes a rotating support arm provided on the tank body. A rotating column is provided on the rotating support arm through a rotating shaft. A positioning hole is provided on the tank cover. A bearing is provided inside the rotating column, and a positioning shaft is provided on the inner ring of the bearing. The extended end of the positioning shaft is provided in the positioning hole. A pin hole consistent with the center line of the buffer structure is provided on the rotating column.

[0011] Two positioning blocks are provided on the tank cover, and a rotating column is provided between the two positioning blocks.

[0012] The buffer structure includes a convex hole provided on the tank cover. A positioning pin is provided inside the convex hole. The extended end of the positioning pin is successively provided with a push rod and a V-shaped sealing ring from left to right. A sealing strip is provided at the connection between the positioning pin and the push rod. The same spring is provided on the positioning pin, the sealing strip and the push rod. The spring is accommodated in the convex hole. The vertical center line of the convex hole is consistent with the vertical center line of the pin hole.

[0013] A handle is provided on the tank cover.

[0014] A sensor is provided on the tank cover.

[0015] The beneficial effects of the present invention are as follows:

[0016] 1. In the present invention, the tank body and the tank cover are double-sealed by the special-shaped rubber ring and the O-shaped sealing ring, which can greatly improve the sealing performance of the tank cover and the tank body in the vacuum environment and the high-pressure environment respectively. The high-pressure anti-fooling stop-opening valve formed by the buffer structure, the V-shaped sealing ring and the baffle flange will transfer the force to the spinning block once it is stressed, thus preventing manual opening of the cover.

[0017] 2. In the present invention, the V-shaped sealing ring can well position the buffer structure and play a sealing role for the tank cover.

[0018] 3. In the present invention, a rectangular sealing groove is provided on the connecting flange, and a special-shaped rubber ring is provided in the rectangular groove, which can fix the special-shaped rubber ring during the operation of the tank cover and the tank body, and avoid the special-shaped rubber ring in operation from detaching from the tank body under stress.

[0019] 4. In the present invention, the special-shaped rubber ring is a Y-shaped special-shaped rubber ring, which is not only convenient for workers to fix the special-shaped rubber ring, but also its Y-shaped opening can quickly expand and fit the tank cover and the tank body under stress, so as to achieve the purpose of sealing the tank body and the tank cover.

[0020] 5. In the present invention, a trapezoidal sealing groove is provided on the connecting flange, and an O-shaped sealing ring is provided in the trapezoidal sealing groove, which can not only reduce the role of the spinning friction force between the tank body and the tank cover, but also enable the tank body and the tank cover to have the performance of vacuum sealing.

[0021] 6. In the present invention, the connecting flange is successively provided with a special-shaped rubber ring and an O-ring from the inside to the outside. Among them, the special-shaped rubber ring can improve the sealing performance of the tank cover and the tank body in a vacuum environment and a high-pressure environment respectively, while the O-ring is arranged on the outer ring of the special-shaped rubber ring, which can further improve the sealing performance between the tank body and the tank cover.

[0022] 7. In the present invention, the rotating structure includes a rotating support arm arranged on the tank body. A rotating column is provided on the rotating support arm through a rotating shaft. A positioning hole is provided on the tank cover. A bearing is arranged inside the rotating column, and a positioning shaft is arranged on the inner ring of the bearing. The extending end of the positioning shaft is arranged in the positioning hole. A pin hole consistent with the center line of the buffer structure is provided on the rotating column. Among them, the hinge composed of the rotating column, the rotating support arm, and the rotating shaft can realize the up-and-down opening and closing of the tank body and the tank cover. And during the up-and-down opening and closing process, the rotating column drives the tank cover up and down through the positioning shaft. Because the positioning shaft is arranged inside the rotating column through a bearing, the user can rotate the tank cover.

[0023] 8. In the present invention, a rotating column is arranged between two positioning blocks, which can prevent the tank cover from rotating excessively.

[0024] 9. In the present invention, the convex hole, the positioning pin, the ejector rod, the sealing strip, and the V-shaped sealing ring constitute a high-pressure anti-fooling non-opening valve. When high-pressure gas is introduced into the tank body, the tank cover will be affected by positive pressure, that is, the gas enters the baffle flange through the ventilation hole. The V-shaped sealing ring is affected and sinks upward, so that the ejector rod and the positioning pin are pushed into the convex hole, and the upward part of the positioning pin is pushed into the pin hole. At this time, there is a fixed gap between the tank cover and the tank body, and the tank cover is stressed on the spinning block, and the high-pressure special-shaped rubber ring will fit the tank cover and the tank body under stress, thereby realizing the high-pressure seal between the tank cover and the tank body.

[0025] 10. In the present invention, a handle is provided on the tank cover, which can facilitate the user to open and close the tank body and the tank cover up and down, and realize the loading of the components to be inspected.

[0026] 11. In the present invention, a sensor is provided on the tank cover, which can detect the opening and closing signal of the tank cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a schematic structural diagram of the present invention;

[0028] Figure 2 is Figure 1 a partial enlarged view of A in

[0029] Figure 3 is Figure 1 a partial enlarged view of B in

[0030] Figure 4 is Figure 1 a partial enlarged view of C in

[0031] Figure 5It is an application diagram of the rectangular groove rotating out of the spinning block;

[0032] Figure 6 It is an application diagram of the rectangular groove rotating to the lower part of the spinning block;

[0033] Reference numerals: 11 tank body, 111 connecting flange, 112 spinning block, 113 trapezoidal sealing groove, 1131 O-ring, 114 rectangular sealing groove, 1141 special-shaped rubber ring, 115 rotating column, 1151 bearing, 1152 positioning shaft, 1153 pin hole, 116 rotating shaft, 117 rotating support arm, 12 tank cover, 121 convex hole, 122 positioning pin, 123 ejector rod, 1231 spring, 124 sealing strip, 125 V-ring, 126 positioning block, 127 sensor, 128 rectangular groove, 129 positioning hole, 13 baffle flange, 131 vent hole, 14 handle. Specific embodiments

[0034] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0036] Embodiment 1

[0037] As Figures 1 to 6 shown, this embodiment provides a sealing structure for a component leak detection device, including a tank cover 12 and a tank body 11 provided with a connecting flange 111. The tank cover 12 and the tank body 11 are provided with the same rotating structure. A rectangular groove 128 is provided on the tank cover 12, and a spinning block 112 is provided on the tank body 11. From inside to outside, the connecting flange 111 is sequentially provided with a special-shaped rubber ring 1141 and an O-ring 1131. A buffer structure is provided on the tank cover 12. From left to right, a V-ring 125 connected to the surface of the tank cover 12 and a baffle flange 13 are sequentially provided on the buffer structure. A vent hole 131 is provided on the baffle flange 13, and a V-ring 125 is attached to the vent hole 131.

[0038] In this embodiment, the special-shaped rubber ring 1141 and the O-ring 1131 are used to double-seal the tank body 11 and the tank cover 12, which can greatly improve the sealing performance of the leak detection device in a vacuum environment and a high-pressure environment. The high-pressure anti-fooling non-opening valve formed by the buffer structure, the V-shaped seal ring 125, and the baffle flange 13 will transfer the force to the spinning block 112 once it is stressed, thus preventing manual opening of the cover. Among them, after the tank cover 12 and the tank body 11 are closed by the rotating structure and the spinning block 112 is inserted into the rectangular groove 128, the tank cover 12 and the tank body 11 are closed. Then, the tank body 11 is evacuated, and the tank cover 12 is attached to the tank body 11 due to the negative pressure. The O-ring 1131 makes the sealing surfaces of the tank cover 12 and the connecting flange 111 fit under the action of force, realizing vacuum sealing. Because the buffer structure, the V-shaped seal ring 125, and the baffle flange 13 form a high-pressure anti-fooling non-opening valve, when high-pressure gas is introduced into the tank body 11, the V-shaped seal ring 125 will sink upward, causing the buffer structure to be pushed upward into the rotating structure, thus fixing the position of the buffer structure. Because the tank cover 12 leaves the sealing surface of the connecting flange 111 under the action of positive pressure, the spinning block 112 fits with the rectangular groove 128, and there is also a fixed gap between the tank cover 12 and the tank body 11. The high-pressure special-shaped rubber ring will also quickly expand and fit the sealing surface of the tank cover 12 and the connecting flange 111 under stress, filling the fixed gap between the tank cover 12 and the tank body 11, thus realizing the high-pressure sealing between the tank cover 12 and the tank body 11. Because the spinning block 112 is stressed and the buffer structure is pushed into the rotating structure, the position of the tank cover 12 is fixed, and it cannot be opened manually, thus preventing the danger caused by manual opening of the cover.

[0039] Embodiment 2

[0040] As Figures 1 to 6 shown, on the basis of Embodiment 1, a rectangular sealing groove 114 is provided on the connecting flange 111, and a special-shaped rubber ring 1141 is provided in the rectangular groove 128.

[0041] The special-shaped rubber ring 1141 is a Y-shaped special-shaped rubber ring 1141.

[0042] A trapezoidal sealing groove 113 is provided on the connecting flange 111, and an O-ring 1131 is provided in the trapezoidal sealing groove 113.

[0043] In this embodiment, the special-shaped rubber ring 1141 is a Y-shaped special-shaped rubber ring 1141, which is not only convenient for workers to fix the special-shaped rubber ring 1141, but also its Y-shaped opening can quickly expand and fit the can lid 12 and the can body 11 under stress, filling the fixed gap between the can lid 12 and the can body 11, so as to achieve high-pressure sealing between the can lid 12 and the can body 11. Since the connecting flange 111 is successively provided with a special-shaped rubber ring 1141 and an O-ring 1131 from inside to outside, the sealing performance of the can lid 12 and the can body 11 in a vacuum environment and a high-pressure environment can be greatly improved under the condition of double sealing.

[0044] Embodiment 3

[0045] As Figures 1 to 6 shown, on the basis of Embodiment 2, the rotating structure includes a rotating support arm 117 provided on the can body 11. A rotating column 115 is provided on the rotating support arm 117 through a rotating shaft 116. A positioning hole 129 is provided on the can lid 12. A bearing 1151 is provided inside the rotating column 115. A positioning shaft 1152 is provided on the inner ring of the bearing 1151. The extending end of the positioning shaft 1152 is provided inside the positioning hole 129. A pin hole 1153 consistent with the center line of the buffer structure is provided on the rotating column 115.

[0046] Two positioning blocks 126 are provided on the can lid 12, and the rotating column 115 is provided between the two positioning blocks 126.

[0047] The buffer structure includes a convex hole 121 provided on the can lid 12. A positioning pin 122 is provided inside the convex hole 121. The extending end of the positioning pin 122 is successively provided with a push rod 123 and a V-shaped sealing ring 125 from left to right. A sealing strip 124 is provided at the connection between the positioning pin 122 and the push rod 123. A same spring 1231 is provided on the positioning pin 122, the sealing strip 124 and the push rod 123. The spring 1231 is accommodated inside the convex hole 121. The vertical center line of the convex hole 121 is consistent with the vertical center line of the pin hole 1153.

[0048] A handle 14 is provided on the can lid 12.

[0049] A sensor 127 is provided on the can lid 12.

[0050] In this embodiment, since the rotating column 115, the rotating support arm 117, and the rotating shaft 116 form a hinge, the user can lift or pull down the can lid 12 by applying force to the handle 14 or the rotating column 115, thereby realizing the up and down opening and closing of the can body 11 and the can body 11. When the can lid 12 is closed with the can body 11, the user can rotate the can lid 12 through the handle 14 to make the spinning block 112 rotate to the rectangular groove 128, and then evacuate the can body 11 to vacuum, so that the can lid 12 fits with the can body 11 due to the negative pressure. Therefore, when high-pressure gas is introduced into the can body 11, the V-shaped sealing ring 125 will sink upward, causing the ejector rod 123 and the positioning pin 122 to be pushed into the convex hole 121, and the upward part of the positioning pin 122 is pushed into the pin hole 1153, thereby fixing the position of the can lid 12. Since the can lid 12 leaves the sealing surface of the connecting flange 111 under the action of positive pressure, the spinning block 112 fits with the rectangular groove 128, and there is also a fixed gap between the can lid 12 and the can body 11. Under the action of force, the Y-shaped high-pressure special-shaped rubber ring can quickly expand its Y-shaped opening to fit the can lid 12 and the can body 11, filling the gap between the can lid 12 and the can body 11; the sealing strip 124 can not only seal the can lid 12 and the positioning pin 122, but also play a role in silencing when the positioning pin 122 is pushed into the pin hole 1153, and the spring 1231 plays a buffering role. Since the spring 1231 has elasticity by itself, it can prevent the non-return valve from not falling back; the user can install two positioning blocks 126 according to specific conditions to form the required rotation angle. Since the rotating column 115 is arranged between the two positioning blocks 126, the can lid 12 can be prevented from rotating excessively. Once it rotates excessively, the rotating column 115 will block the positioning block 126 in time, so the user can only rotate the can lid 12 within a fixed angle.

[0051] Specifically, the sensor 127 can detect the opening and closing signal of the spinning of the can lid 12, that is, the fitting of the rectangular groove 128 and the spinning block 112, thereby preventing the misalignment of the can lid 12 and the can body 11 and further improving the intelligence and automation level of the entire device.

Claims

1. A sealing structure of a component leak detection device, comprising a tank cover (12) and a tank body (11) provided with a connecting flange (111), characterized in that, The lid (12) and the tank body (11) are provided with the same rotating structure. A rectangular groove (128) is provided on the lid (12), and a spinning block (112) is provided on the tank body (11). The connecting flange (111) is successively provided with a special-shaped rubber ring (1141) and an O-ring (1131) from inside to outside. A buffer structure is provided on the lid (12). On the buffer structure, a V-shaped sealing ring (125) connected to the surface of the lid (12) and a baffle flange (13) are successively provided from left to right. An air vent hole (131) is provided on the baffle flange (13), and a V-shaped sealing ring (125) is attached to the air vent hole (131). The rotating structure includes a rotating support arm (117) provided on the tank body (11). A rotating column (115) is provided on the rotating support arm (117) through a rotating shaft (116). A positioning hole (129) is provided on the lid (12). A bearing (1151) is provided inside the rotating column (115). A positioning shaft (1152) is provided on the inner ring of the bearing (1151). The extending end of the positioning shaft (1152) is provided in the positioning hole (129). A pin hole (1153) consistent with the center line of the buffer structure is provided on the rotating column (115).

2. The sealing structure of a component leak detection device according to claim 1, characterized in that, A rectangular sealing groove (114) is provided on the connecting flange (111), and a special-shaped rubber ring (1141) is provided in the rectangular groove (128).

3. The sealing structure of a component leak detection device according to claim 2, characterized in that The special-shaped rubber ring (1141) is a Y-shaped special-shaped rubber ring (1141).

4. The sealing structure of a component leak detection device according to claim 2, characterized in that, A trapezoidal sealing groove (113) is provided on the connecting flange (111), and an O-ring (1131) is provided in the trapezoidal sealing groove (113).

5. The sealing structure of a component leak detection device according to claim 1, characterized in that, Two positioning blocks (126) are provided on the lid (12), and a rotating column (115) is provided between the two positioning blocks (126).

6. The sealing structure of a component leak detection device according to claim 1, characterized in that, The buffer structure includes a convex hole (121) provided on the lid (12). A positioning pin (122) is provided in the convex hole (121). The extending end of the positioning pin (122) is successively provided with a push rod (123) and a V-shaped sealing ring (125) from left to right. A sealing strip (124) is provided at the connection between the positioning pin (122) and the push rod (123). The same spring (1231) is provided on the positioning pin (122), the sealing strip (124), and the push rod (123). The spring (1231) is accommodated in the convex hole (121). The vertical center line of the convex hole (121) is consistent with the vertical center line of the pin hole (1153).

7. The sealing structure of a component leak detection device according to claim 1, characterized in that, A handle (14) is provided on the lid (12).

8. The sealing structure of a component leak detection device according to claim 1, characterized in that, A sensor (127) is provided on the lid (12).

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