Core transfer device and method

Abstract

This disclosure provides a device and method for transferring chips, pertaining to the field of display panel manufacturing. The device comprises a base, a feed assembly, and an optical tweezers assembly. The base has a support surface for placing a driver panel and contains an electromagnetic coil. The feed assembly's feed port faces the base's support surface. The optical tweezers assembly and the feed assembly are located on the same side of the base and are configured to drive chips output by the feed assembly into corresponding holes in the driver panel. This disclosure enables efficient mass transfer.

Description

Technical Field

[0001] The present disclosure relates to the field of display panel manufacturing, and in particular to a chip transfer device and method. Background Art

[0002] Micro LED is a new type of display technology that uses self-luminous micron-sized LEDs as light-emitting pixel units and transfers them to a driving panel to form a high-density LED array.

[0003] Because the light-emitting diode chips used in this display technology are very small, a large number of them need to be transferred to the driver panel. This process of transferring chips is called mass transfer.

[0004] Since the amount of work required for mass transfer is very large, it will consume a lot of time and material costs. Summary of the Invention

[0005] The present disclosure provides a device and method for transferring core particles, which can efficiently complete mass transfer. The technical solution is as follows:

[0006] On the one hand, an embodiment of the present disclosure provides a core particle transfer device, comprising a base, a material feeding assembly, and an optical tweezers assembly;

[0007] The base has a supporting surface for placing the driving panel, and an electromagnetic coil is arranged in the base;

[0008] The feeding port of the feeding assembly faces the supporting surface of the base;

[0009] The optical tweezers assembly and the material feeding assembly are located on the same side of the base. The optical tweezers assembly is configured to drive the core particles output by the material feeding assembly into the corresponding holes of the driving panel.

[0010] In one implementation of the present disclosure, the base includes a pedestal, a tilting mechanism, and a base;

[0011] The pedestal and the base are spaced apart from each other;

[0012] The tilting mechanism is located between the pedestal and the base, and is connected to the pedestal and the base respectively. The tilting mechanism is used to drive the pedestal to tilt relative to the base.

[0013] In another implementation of the present disclosure, the tilting mechanism includes at least two sets of first telescopic cylinders;

[0014] At least two groups of the first telescopic cylinders are spaced apart from each other and close to the edge of the base.

[0015] In another implementation of the present disclosure, the support surface has at least two limiting members;

[0016] Each of the limiting members is connected to the supporting surface and is arranged to form a space for accommodating the driving panel. Each of the limiting members is used to abut against the driving panel.

[0017] In yet another implementation of the present disclosure, the orthographic projection of the space on the plane where the support surface is located is located within the orthographic projection of the electromagnetic coil on the plane where the support surface is located.

[0018] In yet another implementation of the present disclosure, the core particle transfer device further includes a vibration component;

[0019] The vibration component is located on a side of the base facing away from the support surface, and the vibration component is spaced apart from the support surface.

[0020] In yet another implementation of the present disclosure, the vibration assembly includes an oscillating device and a second telescopic cylinder;

[0021] The second telescopic cylinder is connected to the oscillating device to drive the oscillating device to move closer to or away from the supporting surface.

[0022] In yet another implementation of the present disclosure, the core particle transfer apparatus further comprises an automatic optical detection device;

[0023] The camera of the automatic optical inspection device faces the supporting surface of the base.

[0024] On the other hand, an embodiment of the present disclosure provides a core particle transfer method, based on the core particle transfer device described above, the core particle transfer method includes:

[0025] Providing a plurality of the core particles, wherein the plurality of the core particles include core particles of three colors, and the core particles of different colors have different sizes;

[0026] Providing the driving panel, wherein one side of the driving panel has holes of three sizes, and each hole size corresponds to each core particle size;

[0027] Placing the drive panel on the supporting surface of the base, with the side where the hole is located facing away from the base;

[0028] Immersing the core particle transfer device in a transfer solution;

[0029] The core particles output by the feeding component are driven into the corresponding holes by the optical tweezers component, and the core particles are adsorbed in the corresponding holes by the electromagnetic coil.

[0030] In one implementation of the present disclosure, the cross-sectional area of ​​one end of the core particle is smaller than that of the other end, and the end of the core particle with the smaller cross-sectional area is inserted into the corresponding hole.

[0031] The beneficial effects of the technical solutions provided by the embodiments of the present disclosure include at least:

[0032] The base's support surface is used to place the drive panel, with the panel's holes facing upward, that is, away from the support surface. The feed assembly's feed port delivers the core particles, allowing them to land on the side of the drive panel with holes. The optical tweezers assembly drives the core particles delivered by the feed assembly, allowing them to move across the drive panel and into the corresponding holes. The core particles are then attracted to the corresponding holes by electromagnetic coils, achieving efficient mass transfer. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0034] Figure 1 Schematic diagram of the structure of the core particle transfer device provided by the embodiment of the present disclosure;

[0035] Figure 2 is a top view of a core particle provided by an embodiment of the present disclosure;

[0036] Figure 3 is a front view of a core particle provided by an embodiment of the present disclosure;

[0037] Figure 4 This is a front view of a drive panel provided by an embodiment of the present disclosure;

[0038] Figure 5 Flowchart of the core particle transfer method provided by the embodiment of the present disclosure.

[0039] The symbols in the figure mean the following:

[0040] 10. Base;

[0041] 110, support surface; 120, electromagnetic coil; 130, pedestal; 140, tilting mechanism; 141, first telescopic cylinder; 150, base; 160, limiter;

[0042] 20. Feeding assembly;

[0043] 30. Optical tweezers assembly;

[0044] 40. Vibration component;

[0045] 410, oscillating device; 420, second telescopic cylinder;

[0046] 50. Automatic optical inspection equipment;

[0047] 100, driving panel; 1100, hole position; 200, core particle; 300, transfer liquid. DETAILED DESCRIPTION

[0048] In order to make the objectives, technical solutions and advantages of the present disclosure more clear, the embodiments of the present disclosure will be further described in detail below with reference to the accompanying drawings.

[0049] Liquid Crystal Displays (LCDs), currently the dominant force in the consumer electronics display market, are unable to effectively achieve high refresh rates and contrast ratios due to physical limitations such as the deflection rate of their liquid crystal molecules under voltage and the light resistance of the liquid crystal molecules after their arrangement. They also have inherent disadvantages in terms of size, energy consumption, and bending. In comparison, organic electroluminescence displays (OLEDs), currently the leading technology in the mobile display field, face bottlenecks such as heat resistance, brightness, light decay, and image size limitations. GaN-based Mini and Micro LEDs, particularly Micro LEDs, are considered the next generation of display devices. Due to their extremely small, independently driven LED self-luminous units, they enable displays to simultaneously possess advantages such as high brightness, high contrast, high refresh rates, high resolution, high reliability, heat resistance, long life, low energy consumption, thinness, and large-area display. They can also easily achieve partial and special-shaped displays, making them ideal display devices for the future.

[0050] The manufacturing of Micro LED mainly relies on the epitaxial growth of III-V compound semiconductors to form an epitaxial structure with functional layers such as a nucleation layer, a fill layer, an n-type layer, a U-AlGaN layer, an n-type contact layer, an electron storage layer, a strain buffer layer, a multi-quantum well active layer, an electron blocking layer, a p-type layer, and a p-layer contact layer. The subsequent chip process thins and lithography the epitaxial wafer, prepares DBR (distributed Bragg reflection), current expansion region and electrodes, and performs special-shaped cutting of the core particles. Compared with the traditional industrial manufacturing process of GaN-based LED chips, when the size of Micro LED chips is miniaturized and a large number of core particles are matrixed, especially when the size of the light-emitting unit is less than 100μm, it brings a series of problems to the current industrial manufacturing process.

[0051] From the basic structure, the structure of Micro LED can be simpler because the size of Micro LED core particles is small and the requirements for luminous brightness are lower than those of traditional LEDs. However, as the basic unit of micron-level display devices, Micro LED has extremely high requirements for wavelength and brightness uniformity. What is more challenging is that since the size of the core particles (200) is reduced to less than 100 μm, the difficulty of the core particle bonding technology originally suitable for conventional LEDs has increased exponentially. Among them, the core particle size of Micro LED can be less than 50 μm, and the spacing between pixel units is only less than 50 μm. The pixel density per square foot (Pixels Per Inch, PPI) has increased significantly, which has led to an exponential increase in the number of core particles used in Micro LEDs of the same size. For every 1 / 2 reduction in the size of the core particles, the number of core particles per unit area increases fourfold. Taking a 4K resolution display device as an example, the number of micron-level Micro LED chips easily exceeds 24 million. With the existing core particle transfer and bonding technology, the time cost and material cost of migrating and fixing such a number of core particles are unacceptable for consumer electronic products. In addition, traditional chip transfer equipment has a physical limit on the size of the chips that can be operated, and the size of Micro LED chips has now exceeded this limit.

[0052] In order to solve the problem of mass transfer of Micro LED chips, the present disclosure provides a chip transfer device. Figure 1 is a schematic diagram of the structure of the core particle transfer device, see Figure 1 In this embodiment, the core particle transfer device includes a base 10, a feed assembly 20, and an optical tweezers assembly 30. The base 10 has a support surface 110 for placing a drive panel 100. The base 10 has an electromagnetic coil 120 therein. The feed port of the feed assembly 20 faces the support surface 110 of the base 10. The optical tweezers assembly 30 and the feed assembly 20 are located on the same side of the base 10. The optical tweezers assembly 30 is configured to drive the core particles 200 output by the feed assembly 20 into the corresponding holes 1100 of the drive panel 100.

[0053] The support surface 110 of the base 10 is used to place the drive panel 100 so that the hole 1100 of the drive panel 100 faces upward, that is, away from the support surface 110. The core particle transfer device is immersed in the transfer liquid 300, and the transfer liquid 300 mixed with the core particles 200 is output from the feed port of the feed component 20, so that the core particles 200 fall onto the side of the drive panel 100 with the hole 1100. The core particles 200 output by the feed component 20 are driven by the optical tweezers component 30, so that the core particles 200 can move on the drive panel 100 and enter the corresponding hole 1100. Afterwards, the core particles 200 are adsorbed in the corresponding hole 1100 by the electromagnetic coil 120, thereby achieving efficient mass transfer.

[0054] In this embodiment, the electromagnetic coil 120 is used to adsorb the core particle 200 into the corresponding hole 1100. It is easy to understand that when the core particle 200 is adsorbed by the electromagnetic coil 120, the electrode of the electromagnetic coil 120 should be opposite to the electrode of the core particle 200. Exemplarily, the magnetic field range of the electromagnetic coil 120 is 0.0001 to 0.01T. The magnitude of the magnetic field generated by the electromagnetic coil 120 is selected according to actual needs.

[0055] In this embodiment, a feed assembly 20 and an optical tweezers assembly 30 form a set. The same set of feed assemblies 20 and optical tweezers assemblies 30 can move synchronously relative to the support surface 110, thereby enabling them to work in tandem. The chip transfer device can include multiple sets of feed assemblies 20 and optical tweezers assemblies 30, further improving the transfer efficiency of the chip 200.

[0056] Furthermore, to better achieve coordinated operation between the feed assembly 20 and the optical tweezers assembly 30, the feed rate of the feed assembly 20 should be proportional to the guiding range of the optical tweezers assembly 30. For example, the feed rate of a feed assembly 20 is approximately 20 particles per second, and the guiding range of an optical tweezers assembly 30 is 50 to 100 μm.

[0057] Figure 2 is a top view of the core particle 200. In this embodiment, the core particle 200 has three colors, namely red ( Figure 2 Leftmost), blue( Figure 2 middle) and green ( Figure 2 far right). Figure 3 This is the main view of the core particle 200, combined with Figure 3 , the size of each color is different, for example, the red core particle is 200 ( Figure 3 The leftmost one has the largest size, blue core particle 200 ( Figure 3 The size of the red core particle 200 is 75-85% of that of the green core particle 200 ( Figure 3 The rightmost core particle has the smallest size, which is 75-85% of the size of the blue core particle 200. Figure 4 The front view of the driving panel 100 is the same as Figure 3 The same perspective, combined Figure 4 Correspondingly, the driving panel 100 has three types of holes 1100 , and the size of each hole 1100 is different. The sizes of the three holes 1100 correspond to the sizes of the three core particles 200 .

[0058] Since the core particles 200 of each color fall into the holes 1100 of corresponding sizes, the positions of the core particles 200 of various colors can be arranged by arranging the positions of the holes 1100 of different sizes.

[0059] Of course, during the transfer of the core particles 200, in order to prevent small core particles 200 from falling into the large holes 1100, the core particles 200 of different sizes will be transferred in sequence. For example, the largest core particle 200 will be transferred first, followed by the next largest core particles 200, and finally the smallest core particle 200.

[0060] See again Figure 1 In this embodiment, the base 10 includes a pedestal 130, a tilting mechanism 140, and a base 150. The pedestal 130 and the base 150 are spaced apart from each other. The tilting mechanism 140 is located between the pedestal 130 and the base 150 and is connected to the pedestal 130 and the base 150 respectively. The tilting mechanism 140 is used to drive the pedestal 130 to tilt relative to the base 150.

[0061] In the above implementation, the base 150 serves as the support for the base 10, providing stable support for the tilt mechanism 140 and the pedestal 130. The pedestal 130 serves as the support for the drive panel 100, providing stable support for the drive panel 100. The tilt mechanism 140 is disposed between the base 150 and the pedestal 130, and is capable of driving the pedestal 130 to tilt relative to the base 150, thereby cooperating with the feed assembly 20 to feed materials.

[0062] Before the feed assembly 20 begins feeding, the tilting mechanism 140 drives the pedestal 130 to tilt relative to the base 150, so that the highest point of the pedestal 130 corresponds to the feed opening of the feed assembly 20. In this way, after being discharged from the feed assembly 20, the core particles 200 will first fall to the upper part of the drive panel 100 and, under the influence of gravity, gradually move toward the lower part of the drive panel 100. In other words, the gravitational potential energy of the core particles 200 can be utilized to gradually spread the core particles 200 from the highest point to the lowest point of the drive panel 100, further improving the transfer efficiency of the core particles 200.

[0063] Exemplarily, the tilting mechanism 140 includes at least two groups of first telescopic cylinders 141 . The at least two groups of first telescopic cylinders 141 are spaced apart from each other and close to the edge of the base 130 .

[0064] In the above implementation, one set of first telescopic cylinders 141 is located on one side of the pedestal 130, and another set of first telescopic cylinders 141 is located on the opposite side of the pedestal 130. By extending one set of telescopic cylinders, the pedestal 130 can be tilted.

[0065] In other embodiments, the tilt mechanism 140 includes a motor and a rotating shaft, wherein the output shaft of the motor is connected to the rotating shaft, which is connected to the base 130, and the rotating shaft is parallel to the support surface 110. In this way, when the motor drives the rotating shaft to rotate, the rotating shaft can drive the base 130 to rotate about the rotating shaft as the rotation axis, thereby achieving tilting movement of the base 130.

[0066] For example, driven by the tilt mechanism 140, the pedestal 130 can be tilted at an angle of 0 to 45 degrees relative to the base 150. Within this tilt angle range, the core 200 can be smoothly moved from a high position to a low position while preventing the core 200 from moving too fast and failing to fall into the hole 1100.

[0067] Continue to see Figure 1 In this embodiment, there are at least two limiting members 160 on the support surface 110. Each limiting member 160 is connected to the support surface 110 and is surrounded to form a space for accommodating the driving panel 100. Each limiting member 160 is used to abut against the driving panel 100.

[0068] In the above implementation, the stoppers 160 are sequentially spaced along the outer edge of the support surface 110, thereby forming a space for accommodating the drive panel 100. After the drive panel 100 is placed in the space, the stoppers 160 can abut against the outer edge of the drive panel 100, thereby locking the drive panel 100 in the space and preventing unnecessary shaking of the drive panel 100.

[0069] Exemplarily, the limiting member 160 has a certain elasticity, so that the driving panel 100 can be better clamped and fixed.

[0070] In other embodiments, the limiting member 160 can also be a buckle with a barb, and the buckle clamps the driving panel 100 in the space through the barb, thereby fixing the driving panel 100.

[0071] In this embodiment, the orthographic projection of the space on the plane where the support surface 110 is located is located within the orthographic projection of the electromagnetic coil 120 on the plane where the support surface 110 is located.

[0072] In the above implementation, by limiting the position of the space relative to the electromagnetic coil 120, it is ensured that when the driving panel 100 is snapped into the space, the entire driving panel 100 is within the range of action of the electromagnetic coil 120. In this way, each chip 200 that falls onto the driving panel 100 is affected by the electromagnetic coil 120 and is firmly adsorbed in the corresponding hole 1100.

[0073] In this embodiment, the core particle transfer device further includes a vibration component 40 . The vibration component 40 is located on a side of the base 10 facing away from the support surface 110 , and the vibration component 40 is spaced apart from the support surface 110 .

[0074] The vibration component 40 is used to output a transverse vibration wave of a certain frequency to the surroundings. After the core particle 200 is vibrated, the transverse movement of the core particle 200 can be accelerated, thereby further improving the transfer efficiency of the core particle 200.

[0075] Exemplarily, the vibration assembly 40 includes an oscillating device 410 and a second telescopic cylinder 420 . The second telescopic cylinder 420 is connected to the oscillating device 410 to drive the oscillating device 410 to move closer to or away from the supporting surface 110 .

[0076] The second telescopic cylinder 420 can drive the oscillating device 410 to move closer to or farther from the supporting surface 110 , that is, the vibration source can move closer to or farther from the driving panel 100 , thereby adjusting the vibration received by the chip 200 on the driving panel 100 .

[0077] After completing the transfer of one type of core particle 200, in order to facilitate the transfer of another type of core particle 200, it is necessary to remove the excess core particles 200 on the drive panel 100. In this embodiment, the tilting mechanism 140 drives the base 130 to tilt to the maximum tilt angle, and then the second telescopic cylinder 420 is used to move the oscillator 410 as close to the base 130 as possible. In this way, the gravitational potential energy of the core particle 200 itself and the vibration applied by the oscillator 410 are utilized to enable the core particle 200 to quickly slide off the drive panel 100. The core particles 200 that slide off can be uniformly recovered and reused. It is worth noting that in the process of removing excess core particles 200, it is necessary to ensure that the vibration applied by the oscillator 410 will not cause the core particles 200 that have been assembled in the hole 1100 to slide out.

[0078] Exemplarily, the first telescopic cylinder 141 and the second telescopic cylinder 420 are both hydraulic cylinders, thereby ensuring stable driving and support of the pedestal 130 and the oscillating device 410 .

[0079] Exemplarily, the oscillator device 410 is a MEMS (Micro-Electro-Mechanical System) oscillator, which has the characteristics of small size and precise control.

[0080] In this embodiment, the core particle transfer device further includes an automatic optical detection device 50 , and a camera of the automatic optical detection device 50 faces the support surface 110 of the base 10 .

[0081] In the above implementation, the automatic optical inspection device 50 is an AOI (Automated Optical Inspection) device, which is used to detect the drive panel 100 on the support surface 110. Before the transfer of the core particle 200 begins, the entire drive panel 100 is visually judged to determine the starting area and the transfer path to guide the movement starting point and movement path of the feed component 20 and the optical tweezers component 30. During the transfer of the core particle 200, the vacant hole positions 1100, that is, the hole positions 1100 that are not normally assembled with the corresponding core particles 200, are marked, and the vacant hole positions 1100 are included in the subsequent transfer path. After the transfer of the core particle 200 is completed, it is determined that all the hole positions 1100 are equipped with the corresponding core particles 200 to start the subsequent process.

[0082] The working process of the core particle transfer device is introduced below:

[0083] First, the core particle transfer device is immersed in the transfer liquid 300, and the entire drive panel 100 is visually judged by the automatic optical detection equipment 50 to determine the starting area and transfer path to guide the movement starting point and movement path of the feed component 20 and the optical tweezers component 30.

[0084] Next, the driving panel 100 is clamped on the supporting surface 110 of the pedestal 130 through the limiting member 160 , and the tilting mechanism 140 drives the pedestal 130 to tilt relative to the base 150 so that the higher side of the pedestal 130 faces the feed port of the feed assembly 20 .

[0085] Then, the feed assembly 20 outputs a transfer liquid 300 containing a color of core particles 200, causing the core particles 200 to fall onto the drive panel 100 and move toward the lower side of the platform 130 under the action of their own gravity. In addition, the oscillator 410 outputs a transverse vibration wave of a certain frequency, allowing the core particles 200 to move more quickly. At the same time, the optical tweezers assembly 30 and the feed assembly 20 move together, guiding the core particles 200 into the corresponding holes 1100, and the electromagnetic coil 120 adsorbs and fixes the core particles 200 entering the holes 1100 in the holes 1100. During the process of the optical tweezers assembly 30 and the feed assembly 20 moving together, the automatic optical detection device 50 marks the vacant holes 1100 and includes the vacant holes 1100 in the subsequent transfer path.

[0086] Finally, after the automatic optical inspection equipment 50 confirms that the holes 1100 corresponding to the core particles 200 of this color have all been correctly filled with the core particles 200, the tilting angle of the base 130 is increased through the tilting mechanism 140, and the oscillator device 410 is driven close to the base 130 through the second telescopic cylinder 420, so that the excess core particles 200 on the driving panel 100 slide off, thereby preparing for the transfer of the core particles 200 of the next color.

[0087] Figure 5 A flow chart of a core transfer method provided in an embodiment of the present disclosure, the core transfer method is based on Figure 1 The core transfer device shown. Figure 5 In this embodiment, the core particle transfer method includes:

[0088] Step 401 : providing a plurality of core particles 200 , wherein the plurality of core particles 200 include core particles 200 of three colors, and the sizes of the core particles 200 of different colors are different.

[0089] Figure 3 This is the main view of the core particle 200, combined with Figure 3 In this embodiment, the cross-sectional area of ​​one end of the core particle 200 is smaller than that of the other end. The end of the core particle 200 with the smaller cross-sectional area is inserted into the corresponding hole 1100. This design facilitates the insertion of the core particle 200 into the hole 1100 and prevents the core particle 200 from being stuck outside the hole 1100 and unable to enter the hole 1100.

[0090] Illustratively, the longitudinal section of the core particle 200 is a trapezoid, and the upper base of the trapezoid corresponds to the end with the smaller cross-sectional area of ​​the core particle 200. In other embodiments, the longitudinal section of the core particle 200 is a truncated cone, a cone, etc., which is not limited in the present disclosure.

[0091] Step 402 : providing a driving panel 100 , wherein one side of the driving panel 100 has holes 1100 of three sizes, and each hole 1100 of one size corresponds to a core particle 200 of one size.

[0092] See also Figure 4 In this embodiment, the longitudinal section of the hole 1100 is a trapezoid corresponding to the core particle 200, and the upper base of the trapezoid corresponds to the bottom of the hole 1100. In other embodiments, the longitudinal section of the hole 1100 can also be other shapes, as long as it corresponds to the core particle 200.

[0093] It should be noted that the inner contour of hole 1100 is substantially the same as the outer contour of core particle 200, except that the inner contour of hole 1100 is slightly larger than the outer contour of the corresponding core particle 200, so that the core particle 200 can enter the hole 1100 more easily. For example, the inner contour of hole 1100 is slightly larger than the outer contour of the corresponding core particle 200 by 6-9%.

[0094] Step 403 : Place the driving panel 100 on the supporting surface 110 of the base 10 , with the side where the hole 1100 is located facing away from the base 10 .

[0095] In the above implementation, the driving panel 100 is placed in the space enclosed by the limiting member 160 , and the driving panel 100 is locked on the supporting surface 110 by the limiting member 160 .

[0096] Step 404 : Immerse the core particle transfer device in the transfer liquid 300 .

[0097] In the above implementation, the transfer liquid 300 has the characteristics of low conductivity (σ<0.1mS / cm), non-corrosiveness, easy post-cleaning, and transparency.

[0098] Step 405: The optical tweezers assembly 30 drives the core particles 200 output by the feeding assembly 20 into the corresponding holes 1100 , and the electromagnetic coil 120 adsorbs the core particles 200 in the corresponding holes 1100 , thereby realizing a mass transfer of the core particles 200 .

[0099] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by persons of ordinary skill in the field to which the present disclosure belongs. The words “first”, “second”, “third” and similar terms used in the patent application specification and claims of the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as “a” or “an” do not indicate a quantity limitation, but rather indicate the presence of at least one. Words such as “include” or “comprise” mean that the elements or objects appearing before “include” or “comprises” include the elements or objects listed after “include” or “comprises” and their equivalents, and do not exclude other elements or objects. Words such as “connect” or “connected” are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. “Up”, “down”, “left”, “right” and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0100] The above description is merely an optional embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present disclosure shall be included in the scope of protection of the present disclosure.

Claims

1. A core particle transfer device, characterized in that: It comprises a base (10), a material feeding component (20) and an optical tweezers component (30); The base (10) has a support surface (110) for placing a drive panel (100), an electromagnetic coil (120) is provided in the base (10), and the base (10) includes a pedestal (130), a tilting mechanism (140) and a base (150), wherein the pedestal (130) and the base (150) are spaced apart from each other, and the tilting mechanism (140) is located between the pedestal (130) and the base (150) and is connected to the pedestal (130) and the base (150) respectively. The invention comprises at least two groups of first telescopic cylinders (141), one end of each of the first telescopic cylinders (141) is connected to the pedestal (130), and the other end of each of the first telescopic cylinders (141) is connected to the base (150); the at least two groups of the first telescopic cylinders (141) are spaced apart from each other and close to the edge of the pedestal (130); one of the at least two groups of the first telescopic cylinders (141) is located on one side of the pedestal (130), and the other of the at least two groups of the first telescopic cylinders (141) is located on the opposite side of the pedestal (130); The feeding port of the feeding component (20) faces the supporting surface (110) of the base (10); before the feeding component (20) feeds, the tilting mechanism (140) drives the pedestal (130) to tilt relative to the base (150), so that the highest point of the pedestal (130) corresponds to the feeding port of the feeding component (20); after the core particles are output by the feeding component (20), the core particles gradually cover the driving panel (100) from high to low; The optical tweezers assembly (30) and the feed assembly (20) are located on the same side of the base (10). The optical tweezers assembly (30) is configured to drive the core particles (200) output by the feed assembly (20) into corresponding holes (1100) of the drive panel (100) while the core particles gradually cover the drive panel (100) from high to low.

2. The core particle transfer device according to claim 1, characterized in that: The support surface (110) has at least two limiting members (160); Each of the limiting members (160) is connected to the supporting surface (110) and is arranged to form a space for accommodating the driving panel (100). Each of the limiting members (160) is used to abut against the driving panel (100).

3. The core particle transfer device according to claim 2, characterized in that: The orthographic projection of the space on the plane where the support surface (110) is located is located within the orthographic projection of the electromagnetic coil (120) on the plane where the support surface (110) is located.

4. The core particle transfer device according to claim 1, characterized in that: The core particle transfer device further includes a vibration component (40); The vibration component (40) is located on a side of the base (10) facing away from the support surface (110), and the vibration component (40) is spaced apart from the support surface (110).

5. The core particle transfer device according to claim 4, characterized in that: The vibration assembly (40) includes an oscillating device (410) and a second telescopic cylinder (420); The second telescopic cylinder (420) is connected to the oscillating device (410) to drive the oscillating device (410) to move closer to or away from the supporting surface (110).

6. The core particle transfer device according to claim 1, characterized in that: The core particle transfer device further includes an automatic optical detection device (50); The camera of the automatic optical inspection device (50) faces the supporting surface (110) of the base (10).

7. A core particle transfer method, characterized in that: Based on the core particle transfer device according to any one of claims 1 to 6, the core particle transfer method includes: Providing a plurality of the core particles (200), wherein the plurality of the core particles (200) include core particles (200) of three colors, and the core particles (200) of different colors have different sizes; Providing the driving panel (100), wherein one side of the driving panel (100) has the holes (1100) of three sizes, and each size of the hole (1100) corresponds to each size of the core particle (200); Placing the drive panel (100) on the supporting surface (110) of the base (10), with the side where the hole (1100) is located facing away from the base (10); The core particle transfer device is immersed in the transfer liquid (300), and the tilting mechanism (140) drives the pedestal (130) to tilt relative to the base (150), so that the higher side of the pedestal (130) faces the feed port of the feed assembly (20), and the feed assembly (20) outputs the transfer liquid with core particles of one color, so that the core particles fall onto the driving panel (100) and move toward the lower side of the pedestal (130) under the action of their own gravity; At the same time, the core particle (200) output by the feeding component (20) is driven to enter the corresponding hole position (1100) through the optical tweezers component (30), and the core particle (200) is adsorbed in the corresponding hole position (1100) through the electromagnetic coil (120).

8. The core particle transfer method according to claim 7, characterized in that: The cross-sectional area of ​​one end of the core particle (200) is smaller than the cross-sectional area of ​​the other end, and the end of the core particle (200) with the smaller cross-sectional area is inserted into the corresponding hole position (1100).

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