Heater power supply connection device for heat treatment furnace

Abstract

A heater power supply connection device of a heat treatment furnace is disclosed. The present invention includes a heater unit including a busbar installed in a chamber of the heat treatment furnace and providing a low voltage and a large current by connection with an electrode to achieve heating or drying of a substrate by heat, and a heating plate having a heating element having an electrode energized with the busbar, and a power supply terminal portion installed in the heating plate to energize the heating element by a power supply line leading power supply from the busbar of the heater unit, and connected with the power supply line.

Description

Technical Field

[0001] This invention relates to a heater power connection device for a heat treatment furnace that improves the power supply performance of the heater unit installed in the heat treatment furnace chamber. Background Technology

[0002] Recently, the display market has been applying to various imaging devices such as TVs, mobile phones, and screens. Due to rapid technological advancements, continuous efforts are being made to improve product performance. Organic light-emitting display devices and LCD substrates (hereinafter referred to as "substrates" or "glass substrates") are among the next-generation displays and are used in various product fields. The glass substrates that make up the display device are manufactured through heat treatment. In order to meet the various process requirements during heat treatment, it is necessary to block the influence of external gases and minimize the heat flowing out of the chamber to avoid performance degradation and reduce product defect rates. In addition, to improve the yield of finished products, the smaller the in-plane deviation of the substrate during heat treatment, the better. Therefore, a high-performance heat treatment furnace is needed, and research on such a high-performance heat treatment furnace is ongoing.

[0003] Furthermore, temperature control and temperature uniformity are essential for ensuring high-quality substrates and yields during substrate manufacturing. For example, in furnace-based substrate manufacturing processes, the organic layer formed on the substrate surface may contain a certain amount of moisture, necessitating a drying process to evaporate this moisture. In glass substrate manufacturing processes, a cleaning process is performed before coating the photosensitive film onto the substrate surface, followed by a heating and drying process to remove moisture. Thus, most substrate manufacturing processes involve heating and drying. Moisture generated during substrate manufacturing can be removed by ultraviolet light or by heating and drying within a furnace containing a heat source such as a sheath heater to remove residual moisture from the substrate.

[0004] In this regard, the “LCD glass furnace chamber” has been proposed in Korean Patent Publication No. 10-1238560 and Korean Patent Publication No. 10-2013-0028322.

[0005] In addition, the heater unit installed in the heat treatment furnace chamber includes a conductive part, which is connected to multiple busbars for connecting the heating wire to conduct current. Although the design may vary, the heater unit of the heat treatment furnace usually has a built-in heating wire (heating coil) that uses resistance heating, and plate-shaped heating plates are provided at its upper and lower parts to perform the heating and drying process of the substrate in the heat treatment furnace chamber.

[0006] However, because existing heater units installed in the chambers of heat treatment furnaces directly connect the power supply to the plate-shaped heating plates, the electrical characteristics of the terminals directly affect the durability of the structure and shape based on the terminals. Typically, a rapid decrease in terminal durability can lead to problems such as short circuits and open circuits, thus reducing product reliability. For example, existing power supply terminals experience changes in contact resistance due to their electrical characteristics, and are exposed to the risk of arcing due to uneven contact resistance. The shape of the assembly can cause significant variations in insulation performance, thermal deformation due to high heat can weaken contact forces, and material oxidation at high temperatures can cause changes in resistance values.

[0007] Therefore, a completely new terminal structure design is needed, which provides sufficient electrical allowable capacity corresponding to the amount of electricity introduced into the heater unit, while minimizing obstruction or interference with the current flow from the busbar to the heater unit, thereby stably maintaining the current flow, and solving the problem caused by contact resistance by minimizing electrical contact.

[0008] Prior art literature

[0009] Patent documents

[0010] Patent Document 1. Korean Patent Publication No. 10-1238560 (Publication Date: February 28, 2013)

[0011] Patent Document 2. Korean Patent Publication No. 10-0722154 (Publication Date: May 28, 2007)

[0012] Patent Document 3. Korean Patent Publication No. 10-2013-0028322 (Publication Date: March 19, 2013) Summary of the Invention

[0013] The problem the invention aims to solve

[0014] One technical problem to be solved by the present invention is to improve the power supply performance of the heater unit installed in the heat treatment furnace chamber.

[0015] One technical problem to be solved by the present invention is to solve problems such as short circuits and open circuits, including decreased durability, that occur at the terminals of heater units installed in the heat treatment furnace chamber.

[0016] One technical problem to be solved by the present invention is to provide a power connection terminal portion that stably maintains current flow and minimizes electrical contact by minimizing obstruction or interference to the current flow from the busbar of the heater unit installed in the heat treatment furnace chamber to the heating plate.

[0017] means for solving problems

[0018] The above-mentioned objective of the present invention can be achieved by the heater power connection device of the heat treatment furnace of the present invention, which includes a heater unit comprising a busbar and a heating plate. The busbar is installed in the chamber of the heat treatment furnace and provides low voltage and high current through connection with electrodes to achieve heating or drying of the substrate by heat. The heating plate has a heating element having electrodes energized by the busbar. A power supply terminal is installed on the heating plate and connected to the power supply line for energizing the heating element through a power supply line guided from the busbar of the heater unit.

[0019] According to an embodiment of the present invention, the heating plate has an upper insulating layer at the top and a lower insulating layer at the bottom, with the heating element as the center, and may include a substrate layer made of stainless steel.

[0020] According to an embodiment of the present invention, the power supply terminal portion may include: a hole penetrating the heating plate; a power supply sleeve having a hole aligned with the hole in the heating plate, mounted on the upper surface of the heating plate, energized by a power supply introduced through a power supply line, and maintaining parallel contact; an insulating sleeve having a hole aligned with the terminal side holes of the power supply sleeve and the power supply line and used to suppress current leakage; and a fixing means continuously passing through the heating plate, the insulating sleeve, the terminal of the power supply line, and the holes penetrating the power supply sleeve and fixed to the heating plate.

[0021] According to an embodiment of the present invention, the insulating sleeve installed on the upper surface of the heating plate has a step difference between a larger upper diameter and a smaller lower diameter, the lower part being formed by a protrusion through a hole formed on the power supply terminal.

[0022] According to an embodiment of the present invention, the insulating sleeve installed on the upper surface of the heating plate may be selected and manufactured from a ceramic material that suppresses leakage of current on the power supply terminal side and enhances durability.

[0023] According to an embodiment of the present invention, the fixing means may consist of fixing bolts, which continuously pass through the insulating sleeve, the terminal of the power supply line, the power supply sleeve and the holes through the heating plate, and the insulating sleeve, the terminal of the power supply line and the power supply sleeve are fixed sequentially on the upper surface of the heating plate, and the heating plate is reinforced with nuts on the lower surface of the heating plate.

[0024] According to an embodiment of the present invention, a washer is sandwiched between the lower surface of the heating plate and the nut, with a flat washer at the top and a spring washer inserted in two overlapping layers at the bottom.

[0025] The present invention also provides a heater power connection device for a heat treatment furnace, comprising: a heater unit including a busbar and a heating plate, the busbar being installed in the chamber of the heat treatment furnace and providing low voltage and high current through connection with electrodes to achieve heating or drying of a substrate by heat; the heating plate having a heating element having electrodes energized by the busbar; and a power supply terminal portion, which is installed on the heating plate and connected to the power supply line for energizing the heating element through a power supply line guided from the busbar of the heater unit, the power supply terminal portion including a fixing means, wherein fixing bolts of the fixing means pass through in sequence through an insulating sleeve, a terminal of the power supply line, the power supply sleeve, and the heating plate. The insulating sleeve, the terminal of the power supply line, the power supply sleeve, and the holes through the heating plate are aligned in a central manner. The fixing bolts are reinforced with nuts on the lower surface of the heating plate, so that the upper and lower cross sections of the hollow portion of the insulating sleeve, the terminal of the power supply line, and the holes through the power supply sleeve are in close parallel contact in sequence. The insulating sleeve, the terminal of the power supply line, and the power supply sleeve are fixed on the upper surface of the heating plate. The heating plate is formed by continuously stacking an upper insulating layer on the upper part of the heating element with the heating element as the center, stacking a lower insulating layer on the lower part of the heating element, and stacking a substrate layer made of stainless steel on the lower part of the lower insulating layer.

[0026] The present invention also provides a heater power connection device for a heat treatment furnace, comprising: a heater unit including a busbar and a heating plate, the busbar being installed in the chamber of the heat treatment furnace and providing low voltage and high current through connection with electrodes to achieve heating or drying of a substrate by heat; the heating plate having a heating element having electrodes energized by the busbar; and a power supply terminal portion, which is installed on the heating plate and connected to the power supply line for energizing the heating element through a power supply line guided from the busbar of the heater unit, the power supply terminal portion including a fixing means, the fixing means having a fixing screw The bolt passes through the insulating sleeve, the terminal of the power supply line, the power supply sleeve, and the heating plate in sequence through the holes in the insulating sleeve, the terminal of the power supply line, the power supply sleeve, and the heating plate. The fixing bolt is reinforced with a nut on the lower surface of the heating plate. The power supply sleeve is installed on the upper surface of the heating plate and is energized by the power supply introduced through the power supply line, maintaining parallel contact. The heating plate is formed by continuously stacking an upper insulating layer on the upper part of the heating element with the heating element as the center, stacking a lower insulating layer on the lower part of the heating element, and stacking a substrate layer made of stainless steel on the lower part of the lower insulating layer.

[0027] Invention Effects

[0028] The present invention has the effect of improving the power supply performance of the heater unit installed in the heat treatment furnace chamber.

[0029] Furthermore, the present invention has the effect of solving problems such as short circuits and open circuits, including decreased durability, that occur at the terminal portion of the heater unit installed in the heat treatment furnace chamber.

[0030] Furthermore, the present invention can minimize the obstruction or interference with the current flow from the busbar of the heater unit installed in the heat treatment furnace chamber to the heating plate, thereby enabling stable current flow and achieving the effect of creating a highly reliable heat treatment furnace by minimizing electrical contact. Attached Figure Description

[0031] Figure 1 This is an example showing a heat treatment furnace.

[0032] Figure 2 This is an example showing the front of a heat treatment furnace.

[0033] Figure 3 This is an example of a heat treatment furnace viewed from above.

[0034] Figure 4 This is an example showing one side of a heat treatment furnace.

[0035] Figure 5 This is an example of a heater unit arranged in a heat treatment furnace.

[0036] Figure 6 This is an example showing the planar structure of a heater unit arranged in a heat treatment furnace.

[0037] Figure 7 As Figure 6 Part A is an example of a heater power connection device for a heat treatment furnace according to an embodiment of the present invention.

[0038] Figure 8 This is a schematic diagram showing an example of a heating plate constituting a heater power connection device for a heat treatment furnace according to an embodiment of the present invention.

[0039] Figure 9 This is an example of a heating plate constituting a power connection device for a heat treatment furnace heater according to an embodiment of the present invention.

[0040] Figure 10 This is an example showing the disassembled state of the heater power connection device of a heat treatment furnace according to an embodiment of the present invention.

[0041] Explanation of reference numerals in the attached figures

[0042] 100: Heat treatment furnace; 200: Chamber

[0043] 300: Heater unit; 301: Busbar

[0044] 310: Fever Element

[0045] 311: Thick Flim Heater

[0046] 311a: Hole 313: Upper insulating layer

[0047] 314: Lower insulating layer; 315: Substrate layer

[0048] 320: Power supply terminal section; 321: Power supply sleeve

[0049] 321a: Hole 330: Power supply line

[0050] 331: Terminal 331a: Hole

[0051] 340: Insulating sleeve; 341: Protrusion

[0052] 341a: Hole 350: Fixing bolt

[0053] 351: Nut; 352: Flat washer

[0054] 353: Spring pad Detailed Implementation

[0055] The heater power connection device of the heat treatment furnace according to a preferred embodiment of the present invention will now be described.

[0056] Figure 1 This is an example showing a heat treatment furnace. Figure 2 This is an example showing the front of a heat treatment furnace. Figure 3 This is an example of a heat treatment furnace viewed from above. Figure 4 This is an example showing one side of a heat treatment furnace.

[0057] Figures 1 to 4 The accompanying drawings show the overall structure of the heat treatment furnace 100, which is an example of a heat treatment furnace 100 including a chamber 200.

[0058] like Figures 1 to 4 As shown, in order to perform heat treatment on the substrate, the substrate to be heat treated is placed in the chamber 200 and each of the pre-set tables is placed in the chamber 200, or the substrate after the heat treatment process is completed is removed from the chamber 200. The rear side of the heat treatment furnace 100 may have a furnace door 110 and the front side may have a shield 120.

[0059] In addition, the heat treatment furnace 100 has a chamber 200 for accommodating a substrate to be heated or dried. Multiple heating element units 300 are installed in the chamber 200, so that the substrate can be heated by the heat generated by the heating element units 300 or dried by evaporating moisture.

[0060] Furthermore, the heat treatment furnace 100 has a gas inlet on one side of the chamber 200 for the inflow of fluid containing process gas and an exhaust port for the outflow of fluid from the chamber 200, and includes a conductive portion connected to a frame and a plurality of busbars 301, the frame having supports for supporting and lifting the chamber 200. The busbars 301 are connected to the heating wires of the heater unit 300 to conduct current.

[0061] Furthermore, although the configuration may vary, generally, the heating element 310 that makes up the heater unit 300 is provided with heating plates 311 that are in close contact with it at the top and bottom, so that the substrate heating process can be effectively performed in the chamber.

[0062] in addition, Figure 1 and Figure 4 Unspecified reference numerals 210 and 220 refer to the inner and outer casings of the chamber 200, respectively. Unspecified reference numeral 230 is a cooling jacket that cools the chamber 200 to a uniform temperature distribution by forming a cooling airflow within the chamber and through cooling airflow channels formed inside the chamber 200. Unspecified reference numeral 240 is a power supply unit that allows leads to protrude and supplies power to the chamber 200 via the leads.

[0063] For reference, such as Figure 1 and Figure 4 The basic components of the heat treatment furnace shown, such as the chamber structure, the process gas supply and exhaust system, the conductive portion including the busbar for supplying power to the heater unit, and the power supply portion, are not directly related to the present invention. Furthermore, the basic components of the heat treatment furnace are known components and are irrelevant to the subject of this invention; therefore, their description will be omitted.

[0064] like Figures 1 to 4 As shown, a heat treatment furnace is typically used to heat treat a substrate. The substrate to be heat treated is placed in a chamber equipped with heaters, and the substrate after the heat treatment process is completed is removed from the chamber. The heat treatment furnace may have a furnace door on the rear side and a shield on the front side.

[0065] In addition, the heat treatment furnace has a chamber for accommodating the substrate to be heated or dried, and a heater unit consisting of heating elements is installed in the chamber, so that the heat generated by the heater unit can be used to heat the substrate or to dry it by evaporating moisture.

[0066] Furthermore, the configuration may vary, but generally, the upper and lower parts of the heating element that makes up the heater are equipped with heating plates that are in close contact with it, thereby effectively performing the substrate heating process.

[0067] In addition, the heat treatment furnace has an air inlet on one side of the chamber for supplying fluid containing process gas and an exhaust port for discharging fluid from the chamber, and includes a frame with supports for supporting and lifting the chamber and conductive parts connected to a plurality of busbars connected to heating wires of a heater to conduct current.

[0068] In addition, in order to remove residual moisture on the substrate during the heat treatment process inside the chamber, the heat treatment furnace includes a heater, and in order to improve product quality, more efficient and high-performance process capabilities are required.

[0069] In addition, in order to mass-produce more products by shortening the heat treatment process time, the heater unit located inside the chamber needs to meet the requirements of high performance while structurally enhanced durability.

[0070] However, since the existing heater units installed in the heat treatment furnace chamber use a method of directly connecting the power supply to the plate-shaped heating plate and energizing it, the electrical characteristics of the terminal part will directly affect the durability of the structure and shape based on the terminal part. Under normal circumstances, due to the rapid decrease in the durability of the terminal part, problems such as short circuits and open circuits will occur, thereby reducing the reliability of the product.

[0071] For example, existing power supply terminals may experience changes in contact resistance due to their electrical characteristics, and are exposed to the danger of arcing caused by uneven contact resistance. The shape of the assembly can cause large variations in insulation performance, thermal deformation due to high heat can weaken contact force, and oxidation of materials at high temperatures can cause changes in resistance.

[0072] Therefore, the present invention proposes a heater power connection device for a heat treatment furnace, which includes a novel terminal structure design. This design provides sufficient electrical allowable capacity corresponding to the amount of electricity introduced into the heater unit, while minimizing obstruction or interference with the current flow from the busbar to the heater unit, thereby stably maintaining the current flow. Furthermore, it solves the problem caused by contact resistance by minimizing electrical contact.

[0073] Furthermore, the present invention proposes a heater power connection device for a heat treatment furnace, which can improve the power supply performance of the heater unit installed in the heat treatment furnace chamber.

[0074] Furthermore, this invention proposes a heater power connection device for a heat treatment furnace, which can solve problems such as short circuits and short circuits, including the decrease in durability of the terminals installed in the heater unit of the heat treatment furnace chamber.

[0075] Furthermore, this invention proposes a heater power connection device for a heat treatment furnace that minimizes obstruction or interference with the current flow from the busbar of the heater unit installed in the heat treatment furnace chamber to the heating plate, thereby stably maintaining the current flow. This allows for the manufacture of a highly reliable heat treatment furnace by minimizing electrical contact.

[0076] The heater power connection device of the heat treatment furnace involved in this invention, the main components of which will be referred to Figures 5 to 10 Please provide a detailed explanation.

[0077] Figure 5 This is an example of a heater unit arranged in a heat treatment furnace. Figure 6 This is an example of a planar structure of a heater unit arranged in a heat treatment furnace.

[0078] like Figures 7 to 10 As shown, the heater power connection device of the heat treatment furnace according to an embodiment of the present invention can be configured to effectively connect the current of the busbar 301 constituting the heater unit 300 to the heating plate 311.

[0079] Figure 7 As Figure 6 Part A is an example of a heater power connection device for a heat treatment furnace according to an embodiment of the present invention.

[0080] Figure 8 This is a schematic diagram showing an example of a heating plate constituting a heater power connection device for a heat treatment furnace according to an embodiment of the present invention.

[0081] Figure 9 This is an example of a heating plate constituting a power connection device for a heat treatment furnace heater according to an embodiment of the present invention.

[0082] Figure 10 This is an example showing the disassembled state of the heater power connection device of a heat treatment furnace according to an embodiment of the present invention.

[0083] A heater power connection device for a heat treatment furnace according to an embodiment of the present invention is as follows: Figures 7 to 10 As shown, the heater unit 300 includes a busbar 301 and a heating plate 311. The busbar 301 is installed in the chamber 200 of the heat treatment furnace 100 and provides low voltage and high current through connection with electrodes to achieve heating or drying of the substrate by heat. The heating plate 311 has a heating element 310, which has electrodes that are energized by the busbar 301.

[0084] In addition, a power supply terminal 320 may be included, which is mounted on the heating plate 311 and connected to the power supply line 330 in order to stably conduct current to the heating element 310 through the power supply line 330 that guides power to the busbar 301 of the heater unit 300.

[0085] In addition, such as Figure 8 As shown, the heating plate 311 is centered on the heating element 310, with the upper part consisting of an upper insulating layer 313 and the lower part consisting of a lower insulating layer 314.

[0086] In addition, the lower part of the insulating layer 314 may include a substrate layer 315 made of stainless steel.

[0087] Therefore, when the heating plate 311 is formed by stacking the upper insulating layer 313, the lower insulating layer 314 and the substrate layer 315 made of stainless steel (SUS403) with the heating element 310 as the center, it not only has excellent electrical properties and insulation, but also has small deformation and strong durability.

[0088] In addition, such as Figures 7 to 10 As shown, the power supply terminal 320 is formed by forming a hole 311 through the heating plate 311, and an electrode gold plating layer 342 can be provided around the hole 11a formed by the through the heating plate 311.

[0089] In addition, a power supply sleeve 321 may be included, which has a hole 321a that aligns with the hole 311a of the heating plate 311, is installed on the upper surface of the heating plate 311, is energized with the power supply introduced through the power supply line 330, and maintains parallel contact.

[0090] In addition, an insulating sleeve 340 may be included, having a hole 341a that aligns with the terminal 331 side hole 331a of the power supply sleeve 321 and the power supply line 330 and is used to suppress current leakage.

[0091] In addition, a fixing means may be included, which continuously passes through the heating plate 311, the insulating sleeve 340, the terminal 331 of the power supply line 330, and the holes 311a, 321a, 331a and 341a through the power supply sleeve 321 and fixes each component to the heating plate 311.

[0092] Furthermore, the insulating sleeve 340 installed on the upper surface of the heating plate 311 may have a step difference with a larger upper diameter and a smaller lower diameter compared to the upper part. The lower part is formed by a protrusion 341 through a hole 331 formed on the terminal 331 of the power supply line 330.

[0093] Thus, the protrusion 341 is inserted into the hole 331a formed on the terminal 331 of the power supply line 330, thereby preventing loosening caused by shaking and vibration of the terminal 331 of the power supply line 330 and minimizing the generation of electric arc due to gap separation.

[0094] Furthermore, the insulating sleeve 340 installed on the upper surface of the heating plate 311 can preferably be selected and manufactured from a ceramic material that suppresses current leakage from the terminal 331 side of the power supply line 330 and enhances durability.

[0095] Furthermore, the fixing means that continuously passes through the heating plate 311, the insulating sleeve 340, the terminal 331 of the power supply line 330, and the holes 311a, 321a, 331a, and 341a through the power supply sleeve 321 and fixes each component to the heating plate 311 can have the following characteristics: Figure 10 The structure shown.

[0096] like Figure 10 As shown, the fixing means can be composed of fixing bolts 350. The fixing bolts 350 continuously pass through the insulating sleeve 340, the terminal 331 of the power supply line 330, the power supply sleeve 321, and the holes 341a, 331a, 321a and 311a through the heating plate 311. The insulating sleeve 340, the terminal 331 of the power supply line 330 and the power supply sleeve 321 are fixed sequentially on the upper surface of the heating plate 311, and the lower surface of the heating plate 311 is reinforced with nuts 351.

[0097] The fixing bolt 350 can be replaced by other reinforcement components, but in order to allow the components to be joined together with a tightening wrench and considering service and maintenance, the bolt and nut reinforcement components can be used as the preferred reinforcement components.

[0098] In addition, a washer is preferably clamped between the lower surface of the heating plate 311 and the nut 351 to guide the long axis connection between the components and prevent deformation and loosening between the components.

[0099] Preferably, a flat washer 352 is provided near the heating plate 311, with a double-layered spring washer 353 at its lower part. This allows the components to be tightly reinforced by the tightening force of the fixing bolt 350, thereby minimizing the occurrence of electric arc when energized by reducing the gap between the components.

[0100] As described above, the heater power supply device of the heat treatment furnace according to the present invention has the advantage of effectively improving the power supply performance of the heater unit installed in the heat treatment furnace chamber.

[0101] In addition, it has the advantage of being able to solve problems such as short circuits and open circuits, including degradation of durability, that occur at the terminals of the heater unit installed in the heat treatment furnace chamber.

[0102] Furthermore, it has the advantage of minimizing obstruction or interference with the current flow from the busbars of the heater unit installed in the heat treatment furnace chamber to the heating plate, thereby maintaining a stable current flow and minimizing electrical contact to manufacture a high-quality, high-reliability heat treatment furnace.

[0103] Although the present invention has been described with reference to one embodiment illustrated in the accompanying drawings, the present invention is not limited to these embodiments. Modifications and variations can be made without departing from the spirit of the present invention, and such modifications and variations are within the scope of the technical concept of the present invention.

Claims

1. A heater power supply connecting device of a thermal treatment furnace, comprising: a heater unit including a busbar installed in a chamber of the thermal treatment furnace and supplying a low voltage and a large current by connection with an electrode to achieve heating or drying of a substrate by heat, and a heating plate having a heating element with an electrode energized with the busbar; and a power supply terminal portion installed in the heating plate for energizing the heating element by a power supply line leading a power supply from the busbar of the heater unit, and connected with the power supply line, the power supply terminal portion including a fixing means whose fixing bolt passes through holes of an insulating sleeve, a terminal of the power supply line, a power supply sleeve and the heating plate in order, fixing the insulating sleeve, the terminal of the power supply line and the power supply sleeve in order on an upper surface of the heating plate, and reinforcing the fixing bolt with a single nut on a lower surface of the heating plate, thereby reducing a gap between the insulating sleeve, the terminal of the power supply line and the power supply sleeve, minimizing arcing at the time of energization and improving the energization performance, the power supply sleeve installed on the upper surface of the heating plate maintaining parallel contact with the upper surface of the heating plate, the heating plate being formed by successively laminating an upper insulating layer on an upper portion of the heating element, a lower insulating layer on a lower portion of the heating element, and a substrate layer of stainless steel on a lower portion of the lower insulating layer with the heating element as a center.

2. The heater power supply connection apparatus of the heat treatment furnace according to claim 1, wherein the insulating sleeve having a step difference with a large upper diameter and a small lower diameter compared to the upper diameter, the lower portion being formed in a protruding shape by a protrusion passing through a hole formed on the terminal of the power supply line.

3. The heater power supply connection apparatus of the heat treatment furnace according to claim 1, wherein a washer is interposed between the lower surface of the heating plate and the nut, the upper portion being a flat washer and the lower portion being a spring washer inserted in a 2-layered state.

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