A dynamic closed-loop arbitrary electron beam generator

Abstract

The present invention relates to a dynamic closed-loop arbitrary electron beam current generating device, comprising a high-speed proportional closed-loop regulating circuit, an oscillating circuit, an amplitude regulating circuit, a high-speed adjustable inverter circuit, a bias transformer, a peak absorption circuit and a bias rectifier filter circuit; the high-speed proportional closed-loop regulating circuit is used to receive a beam setting signal and a beam sampling signal and output a positive and negative equal closed-loop regulating signal to the amplitude regulating circuit, the input end of the amplitude regulating circuit is respectively connected to the oscillating circuit and the high-speed proportional closed-loop regulating circuit, the output end of the amplitude regulating circuit is connected to the high-speed adjustable inverter circuit; the output end of the high-speed adjustable inverter circuit is connected to the input end of the bias transformer, the output end of the bias transformer is connected to the input end of the peak absorption circuit, and the output end of the peak absorption circuit is connected to the bias rectifier filter circuit. The purpose of the dynamic closed-loop arbitrary electron beam current generating device is to solve the problem that conventional bias power supplies cannot meet the requirements of rapid and controllable adjustment of electron beam currents.

Description

Technical Field

[0001] The invention relates to the technical field of electron beam welding equipment, and in particular to a dynamic closed-loop arbitrary electron beam flow generating device. Background Art

[0002] Electron beam welding device is a device that uses a converged high-energy electron beam as a heat source to achieve workpiece melting welding. It is widely used in aerospace, shipbuilding, nuclear industry and other fields. The electron beam is generated by the thermal emission of the tungsten wire (cathode), and then accelerated under the action of the accelerating electric field to obtain kinetic energy, and then converged into a high-energy particle flow through the electromagnetic focusing coil to finally bombard the workpiece to achieve welding. The working temperature of the tungsten wire determines the size of the beam, but due to the existence of thermal inertia, the electron beam size cannot be adjusted in real time and quickly by adjusting the heating current of the tungsten wire to change its surface working temperature, which is manifested as the adjustment of the beam size always has a lag. Therefore, bias is introduced in the current electron beam welding equipment to adjust the beam size; since the bias only generates an electrostatic field and has an inhibitory effect on the electron beam, its adjustment speed is very fast.

[0003] The bias voltage is generated by the bias power supply and acts on the electron gun grid to adjust the size of the electron beam. Common bias power supply implementation methods include: Method 1, the grid voltage is rectified and filtered, and then converted through DCDC to obtain an adjustable DC voltage, which is then inverted through an inverter circuit and boosted by a bias transformer and rectified and filtered to obtain an adjustable DC bias; Method 2, the grid voltage is stepped down by an industrial frequency transformer, rectified and filtered, and becomes a linear voltage-stabilized power supply through a linear adjustment circuit, which is then converted into an AC signal through an adjustable inverter circuit and boosted by a bias transformer and rectified and filtered to obtain a DC bias value. By adjusting the output bias value in real time, the purpose of electron beam regulation and stabilization is ultimately achieved.

[0004] Pulse beam welding, large thickness gear welding, variable thickness workpiece welding and other processes all involve rapid changes in electron beam current during the welding process. It is strictly required that the electron beam current output by the equipment can adapt to the requirements of the processing technology to achieve rapid and accurate adjustment. Therefore, the DC bias voltage obtained must be able to change rapidly and controllably. However, the DC bias voltage obtained by the above method has the following two shortcomings: First, the above circuits all involve multiple DCDC conversions, and the adjustment of the circuit state and the charging and discharging of the filter capacitor all require a certain amount of time, which seriously restricts the rapid adjustability of the output DC bias voltage; Second, the conventional closed-loop control circuit is used, from beam sampling to closed-loop adjustment output to PWM control chip, and finally through the drive circuit output to drive the main circuit to work. The loop is too long and the control is cumbersome. When realizing dynamic adjustment, it is easy to cause loop oscillation, resulting in overall instability of the system. Therefore, the conventional bias voltage implementation method cannot meet the welding process requirements of electron beam equipment for workpieces under variable beam current state.

[0005] Therefore, the inventor provides a dynamic closed-loop arbitrary electron beam generating device. Summary of the invention

[0006] (1) Technical issues to be solved

[0007] The embodiment of the present invention provides a dynamic closed-loop arbitrary electron beam current generating device, which solves the technical problem that a conventional bias power supply cannot satisfy the requirement of rapid and controllable adjustment of the electron beam current.

[0008] (2) Technical solution

[0009] The present invention provides a dynamic closed-loop arbitrary electron beam generating device, comprising a high-speed proportional closed-loop regulating circuit, an oscillating circuit, an amplitude regulating circuit, a high-speed adjustable inverter circuit, a bias transformer, a peak absorption circuit and a bias rectifier filter circuit; wherein,

[0010] The high-speed proportional closed-loop regulation circuit is used to receive a beam setting signal and a beam sampling signal and output a positive and negative equal closed-loop regulation signal to the amplitude regulation circuit, the input end of the amplitude regulation circuit is respectively connected to the oscillation circuit and the high-speed proportional closed-loop regulation circuit, and the output end of the amplitude regulation circuit is connected to the high-speed adjustable inverter circuit;

[0011] The output end of the high-speed adjustable inverter circuit is connected to the input end of the bias transformer, the output end of the bias transformer is connected to the input end of the peak absorption circuit, and the output end of the peak absorption circuit is connected to the bias rectifier filter circuit.

[0012] Furthermore, the high-speed proportional closed-loop regulation circuit includes four operational amplifiers, multiple resistors and a capacitor C6; wherein,

[0013] In the initial state, the beam current is set to zero, the potential of the first operational amplifier pin 1 is 0, and at this time -15V passes through the resistor R12 and is inversely proportional to the resistor R14;

[0014] An upper limit voltage of +15V is obtained at pin 8 of the third operational amplifier, and +15V is inversely proportional to resistor R18 and resistor R19 to obtain a lower limit voltage of -15V at pin 14 of the fourth operational amplifier.

[0015] Furthermore, the oscillation circuit includes NE555, a resistor and a capacitor, and outputs a square wave signal with a duty cycle of 50% at pin 3 of U1.

[0016] Furthermore, the amplitude control circuit includes a resistor R20, a resistor R21, a resistor R22, a capacitor C7, a transistor Q3 and a transistor Q4; the square wave signal output from the 3rd pin of U1 is loaded to the base of the transistor Q3 and the transistor Q4 through the capacitor C7 and the resistor R21; wherein,

[0017] When the square wave signal is positive, the transistor Q3 is turned on, the transistor Q4 is turned off, and the negative limit signal is connected to P2 through the resistor R22;

[0018] When the square wave signal is zero, the capacitor C7 works, the transistor Q4 is turned on, the transistor Q3 is turned off, and the positive limit signal is connected to P1 through the resistor R20.

[0019] Furthermore, the high-speed adjustable inverter circuit includes a power transistor Q1, a power transistor Q2, an electrolytic capacitor E1 and an electrolytic capacitor E2; wherein,

[0020] When the power transistor Q1 is turned on and the power transistor Q2 is turned off, the current flows from the positive end of the electrolytic capacitor E1 through the power transistor Q1 to AC2, the load, AC1 in sequence and flows back to the negative end of the electrolytic capacitor E1;

[0021] When the power transistor Q2 is turned on and the power transistor Q1 is turned off, the current flows from the positive end of the electrolytic capacitor E2 through AC1 to the load, AC2, the power transistor Q2 and back to the negative end of the electrolytic capacitor E2.

[0022] Furthermore, the primary winding of the bias transformer 202 is used to receive the output voltage of the high-speed adjustable inverter circuit 201 and boost it.

[0023] Furthermore, the peak absorption circuit includes a resistor R1, a resistor R2, a capacitor C1 and a capacitor C2; wherein,

[0024] When the peak voltage of the bias transformer increases significantly, the capacitor C1 and the capacitor C2 are charged through the peak absorption circuit.

[0025] Furthermore, the bias rectification and filtering circuit includes a rectification circuit, a current limiting resistor R3, a discharge resistor R4, a current limiting resistor R5, a varistor K1, a varistor K2 and a filtering capacitor C3; wherein,

[0026] The rectifier circuit is used to convert the output voltage of the bias transformer after being processed by the peak absorption circuit into direct current, and the filter capacitor C3 filters it into a smooth direct current voltage. The resistor R4 is used to release the charge accumulated on the filter capacitor C3. The current limiting resistor R3 and the current limiting resistor R5 are used to prevent the overcurrent caused by the short circuit at the output end of the circuit from burning out the device. The varistor K1 and the varistor K2 are used to realize overvoltage protection for the DC bias.

[0027] Furthermore, the high-speed proportional closed-loop regulation circuit is used to perform a 1:1 reverse proportionality on the beam setting signal from the control system.

[0028] Furthermore, the amplitude control circuit is used to receive the closed-loop modulation signal output by the high-speed proportional closed-loop regulation circuit, and convert it into a clamping signal with alternating positive and negative changes and a duty cycle of 50% after cooperating with the oscillation circuit.

[0029] (3) Beneficial effects

[0030] In summary, the present invention controls the increase or decrease of the beam sampling signal after inversely proportionalizing the beam setting signal from the control system through a high-speed proportional closed-loop regulation circuit, and outputs a closed-loop modulation signal to the amplitude control circuit. The amplitude control circuit receives the closed-loop modulation signal, and converts it into a positive and negative alternating clamping signal after cooperating with the oscillation circuit, and inputs it into the high-speed adjustable inverter circuit; the high-speed adjustable inverter circuit is driven by the clamping voltage to output an approximately equal waveform signal to the primary side of the bias transformer, thereby driving the bias transformer to work; the output voltage of the bias transformer is input into the bias rectifier filter circuit after passing through the peak absorption circuit to obtain a rapidly adjustable DC bias value; through the rapid adjustment of the DC bias, dynamic closed-loop regulation of the electron beam is finally achieved.

[0031] By combining a high-speed proportional closed-loop circuit with an oscillation circuit and an amplitude control circuit, a dynamic closed-loop control method is obtained, which simplifies the closed-loop control mode and improves the stability and controllability of the system. By adopting a high-speed adjustable inverter circuit, the output amplitude of the inverter circuit can respond and adjust quickly, and the secondary circuit of the bias transformer is optimized, so that the output DC bias can respond quickly to the control circuit and make corresponding adjustments. The electron beam welding system can be applied in environments with high requirements for dynamic changes in the beam, such as variable beam welding and pulse beam welding. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments of the present invention are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0033] Figure 1 It is a structural schematic diagram of a dynamic closed-loop arbitrary electron beam generating device provided by an embodiment of the present invention;

[0034] Figure 2 It is a structural schematic diagram of a high-speed proportional closed-loop regulation circuit in a dynamic closed-loop arbitrary electron beam generating device provided by an embodiment of the present invention;

[0035] Figure 3 It is a structural schematic diagram of an oscillating circuit in a dynamic closed-loop arbitrary electron beam generating device provided by an embodiment of the present invention;

[0036] Figure 4 It is a structural schematic diagram of an amplitude control circuit in a dynamic closed-loop arbitrary electron beam generating device provided by an embodiment of the present invention;

[0037] Figure 5 It is a structural schematic diagram of a high-speed adjustable inverter circuit in a dynamic closed-loop arbitrary electron beam generating device provided by an embodiment of the present invention;

[0038] Figure 6 It is a structural schematic diagram of a bias transformer in a dynamic closed-loop arbitrary electron beam generating device provided by an embodiment of the present invention;

[0039] Figure 7 It is a schematic structural diagram of a peak absorption circuit in a dynamic closed-loop arbitrary electron beam current generating device provided by an embodiment of the present invention;

[0040] Figure 8 It is a structural schematic diagram of a bias rectification and filtering circuit in a dynamic closed-loop arbitrary electron beam generating device provided by an embodiment of the present invention.

[0041] In the figure:

[0042] 101- high-speed proportional closed-loop regulation circuit; 102- oscillation circuit; 103- amplitude control circuit; 201- high-speed adjustable inverter circuit; 202- bias transformer; 203- peak absorption circuit; 204- bias rectifier filter circuit. DETAILED DESCRIPTION

[0043] The following is a further detailed description of the embodiments of the present invention in conjunction with the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to exemplarily illustrate the principles of the present invention, but cannot be used to limit the scope of the present invention, that is, the present invention is not limited to the described embodiments, and covers any modification, replacement and improvement of parts, components and connection modes without departing from the spirit of the present invention.

[0044] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0045] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the products of the present invention are conventionally placed when in use, or are the orientations or positional relationships conventionally understood by those skilled in the art. These are merely for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0046] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting" and "installation" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] Figure 1 1 is a schematic diagram of the structure of a dynamic closed-loop arbitrary electron beam generator provided by an embodiment of the present invention. The generator may include a high-speed proportional closed-loop regulation circuit 101, an oscillation circuit 102, an amplitude control circuit 103, a high-speed adjustable inverter circuit 201, a bias transformer 202, a peak absorption circuit 203 and a bias rectifier filter circuit 204; wherein,

[0048] The high-speed proportional closed-loop regulation circuit 101 is used to receive the beam setting signal and the beam sampling signal and output a positive and negative equal closed-loop regulation signal to the amplitude regulation circuit 103. The input end of the amplitude regulation circuit 103 is respectively connected to the oscillation circuit 102 and the high-speed proportional closed-loop regulation circuit 101. The output end of the amplitude regulation circuit 103 is connected to the high-speed adjustable inverter circuit 201.

[0049] The output end of the high-speed adjustable inverter circuit 201 is connected to the input end of the bias transformer 202 , the output end of the bias transformer 202 is connected to the input end of the peak absorption circuit 203 , and the output end of the peak absorption circuit 203 is connected to the bias rectifier filter circuit 204 .

[0050] In the above-mentioned embodiment, a high-speed proportional closed-loop regulation circuit 101 is combined with an oscillation circuit 102 and an amplitude control circuit to obtain a dynamic closed-loop control method, while simplifying the closed-loop control mode and improving the stability and controllability of the system; a high-speed adjustable inverter circuit 201 is adopted, so that the output amplitude of the inverter circuit can respond and adjust quickly, and at the same time, by adding a peak absorption circuit 203 on the secondary side of the transformer, the leakage inductance peak voltage will be charged and discharged through the RC in the peak absorption circuit 203, and the energy in the peak voltage will be released through the resistor R, thereby achieving the purpose of suppressing the peak voltage, making the output voltage of the secondary side of the transformer more regular and reliable.

[0051] The secondary circuit of the bias transformer is optimized so that the output DC bias can quickly respond to the control circuit and make corresponding adjustments.

[0052] As an optional implementation, the high-speed proportional closed-loop regulation circuit 101 includes four operational amplifiers, multiple resistors and a capacitor C6; wherein,

[0053] In the initial state, the beam current is set to zero, the potential of the first operational amplifier pin 1 is 0, and at this time -15V passes through the resistor R12 and is inversely proportional to the resistor R14;

[0054] An upper limit voltage of +15V is obtained at pin 8 of the third operational amplifier, and +15V is inversely proportional to resistor R18 and resistor R19 to obtain a lower limit voltage of -15V at pin 14 of the fourth operational amplifier.

[0055] Specifically, Figure 2 As shown, when the circuit receives the beam setting signal from the control system, and the setting signal is greater than the sampling signal, the potential of pin 1 of U2A rises, the voltage at pin 8 of U2C will be less than +15V, and the voltage at pin 14 of U2D will be greater than -15V, thereby reducing the output voltage amplitude of the high-speed adjustable inverter circuit 201. Since the specific structure of the high-speed proportional closed-loop regulation circuit 101 is a conventional structure design, it will not be described in detail here.

[0056] As an optional implementation, the oscillation circuit 102 includes NE555, a resistor and a capacitor, and outputs a square wave signal with a duty cycle of 50% at the pin 3 of U1.

[0057] Specifically, Figure 3 As shown, the oscillator circuit 102 is composed of NE555 (8-pin time base integrated circuit) and resistors and capacitors, and outputs a square wave with a duty cycle of about 50% at pin 3 of U1. Since the specific structure of the oscillator circuit 102 is a conventional structure design, it will not be described here.

[0058] As an optional implementation, the amplitude control circuit 103 includes a resistor R20, a resistor R21, a resistor R22, a capacitor C7, a transistor Q3 and a transistor Q4; the square wave signal output from the 3rd pin of U1 is loaded to the base of the transistor Q3 and the transistor Q4 through the capacitor C7 and the resistor R21; wherein,

[0059] When the square wave signal is positive, transistor Q3 is turned on, transistor Q4 is turned off, and the negative limit signal is connected to P2 through resistor R22;

[0060] When the square wave signal is zero, capacitor C7 works, transistor Q4 is turned on, transistor Q3 is turned off, and the positive limit signal is connected to P1 through resistor R20.

[0061] Specifically, Figure 4 As shown, the square wave signal output from the 3rd pin of U1 is loaded to the base of transistor Q3 and transistor Q4 through capacitor C7 and resistor R21, and a DC voltage drop of about 7.5V is formed at both ends of capacitor C7; when the square wave signal is positive, transistor Q3 is turned on, P1 is grounded, and the positive limit signal does not work at this time; transistor Q4 is turned off, and the negative limit signal is connected to P2 through resistor R22, and the output signal of the circuit is equal to the negative limit value; when the square wave signal is 0, capacitor C7 works, so that transistor Q4 is turned on, P2 is grounded, and the negative limit signal does not work at this time; transistor Q3 is turned off, and the positive limit signal is connected to P1 through resistor R20, and the output signal of the circuit is equal to the positive limit value. Among them, since the specific structure of the amplitude control circuit 103 is a conventional structure design, it will not be repeated here.

[0062] As an optional implementation, the high-speed adjustable inverter circuit 201 includes a power transistor Q1, a power transistor Q2, an electrolytic capacitor E1 and an electrolytic capacitor E2; wherein,

[0063] When the power transistor Q1 is turned on and the power transistor Q2 is turned off, the current flows from the positive end of the electrolytic capacitor E1 through the power transistor Q1 to AC2, the load, AC1 and back to the negative end of the electrolytic capacitor E1;

[0064] When the power transistor Q2 is turned on and the power transistor Q1 is turned off, the current flows from the positive terminal of the electrolytic capacitor E2 through AC1 to the load, AC2, the power transistor Q2 and back to the negative terminal of the electrolytic capacitor E2.

[0065] Specifically, Figure 5As shown, when Q1 is turned on and Q2 is turned off, the current flows from the positive end of E1 through Q1 to AC2, the load, AC1 and back to the negative end of E1. At this time, AC2 is positive relative to AC1; when Q2 is turned on and Q1 is turned off, the current flows from the positive end of E2 through AC1 to the load, AC2, Q2 and back to the negative end of E2. At this time, AC1 is positive relative to AC2; by quickly controlling the alternating switching of Q1 and Q2, the inverter output of the circuit is realized.

[0066] like Figure 4-5 As shown, when Q3 is turned off and Q4 is turned on in the amplitude control circuit 103, the positive limit signal is loaded to P1 through R20, and connected to AC2 by P1 through the BE pole of the power transistor Q1. Due to the clamping effect of BE in the power transistor Q1, the potential of AC2 is approximately equal to the positive limit signal value; when Q4 is turned off and Q3 is turned on in the amplitude control circuit 103, the negative limit signal is loaded to P2 through R22, and connected to AC2 by P2 through the BE pole of the power transistor Q2. Similarly, due to the clamping effect of BE in the power transistor Q2, the potential of AC2 is approximately equal to the negative limit signal value; by quickly adjusting the positive and negative limit signals, the output amplitude of the high-speed adjustable inverter circuit 201 can be quickly adjusted. Among them, since the specific structure of the high-speed adjustable inverter circuit 201 is a conventional structure design, it will not be repeated here.

[0067] As an optional implementation, the primary winding of the bias transformer 202 is used to receive the output voltage of the high-speed adjustable inverter circuit 201 and boost it.

[0068] Specifically, Figure 6 As shown, the bias transformer 202 boosts the input voltage to a sufficient voltage value to achieve beam current regulation.

[0069] As an optional implementation, the peak absorption circuit 203 includes a resistor R1, a resistor R2, a capacitor C1 and a capacitor C2; wherein,

[0070] When the peak voltage of the bias transformer 202 increases significantly, the capacitors C1 and C2 are charged through the peak absorption circuit 203 .

[0071] Specifically, Figure 7 As shown, the function of the peak absorption circuit 203 is to absorb the voltage spike generated by the leakage inductance of the secondary side of the bias transformer. When the peak voltage of the bias transformer increases significantly, the voltage charges the capacitor through the peak absorption circuit, and the energy of the peak voltage will be lost through the resistor during the charging process. Among them, since the specific structure of the peak absorption circuit 203 is a conventional structure design, it will not be repeated here.

[0072] As an optional implementation, the bias rectifier filter circuit 204 includes a rectifier circuit, a current limiting resistor R3, a discharge resistor R4, a current limiting resistor R5, a varistor K1, a varistor K2 and a filter capacitor C3; wherein,

[0073] The rectifier circuit is used to convert the output voltage of the bias transformer 202 processed by the peak absorption circuit 203 into direct current, and is filtered into a smooth direct current voltage by the filter capacitor C3. The resistor R4 is used to release the charge accumulated on the filter capacitor C3. The current limiting resistors R3 and R5 are used to prevent the overcurrent caused by the short circuit at the output end of the circuit from burning out the device. The varistors K1 and K2 are used to realize overvoltage protection for the DC bias.

[0074] Specifically, Figure 8 As shown, diodes D1 and D2 convert the output voltage of bias transformer 202 processed by peak absorption circuit 203 into DC, and C3 filters it into a stable DC voltage. R4 is used to quickly release the charge accumulated on C3 to ensure that the DC bias voltage is quickly reduced. R3 and R5 prevent overcurrent caused by short circuit at the output end of the circuit from burning out the device. Varistors K1 and K2 realize overvoltage protection for DC bias.

[0075] As an optional implementation, the high-speed proportional closed-loop regulation circuit 101 is used to perform a 1:1 reverse proportionality on the beam setting signal from the control system.

[0076] Specifically, since the beam feedback is a positive signal, according to the working principle of the closed-loop circuit, the beam setting signal must be a negative signal to achieve negative feedback closed-loop regulation. The setting signal is given by the PLC and can only give a positive signal, so the proportional inversion is performed.

[0077] As an optional implementation, the amplitude control circuit 103 is used to receive the closed-loop modulation signal output by the high-speed proportional closed-loop regulation circuit 101, and after working together with the oscillation circuit 102, convert it into a clamping signal with alternating positive and negative changes and a duty cycle of 50%.

[0078] Specifically, such a setting can ensure that the conduction time of the alternating positive and negative clamping signals is the same, so that the positive and negative waveforms of the primary input voltage of the bias transformer 202 have equal durations. Otherwise, the bias transformer 202 will be magnetized and cause magnetic saturation and fail to work.

[0079] The realization process of the dynamic closed-loop arbitrary electron beam current generating device is as follows: the high-speed proportional closed-loop regulating circuit 101 controls the increase and decrease of the beam current sampling signal after performing a 1:1 reverse proportional operation on the beam current setting signal from the control system, and outputs a closed-loop modulation signal to the amplitude control circuit 103; the amplitude control circuit 103 receives the pulse signal from the oscillation circuit 102, converts the closed-loop modulation signal from the high-speed proportional closed-loop regulating circuit 101 into a clamping signal with equal positive and negative values ​​and a duty cycle of 50% each, and inputs it into the high-speed adjustable inverter circuit 201; the high-speed adjustable inverter circuit 201 is driven by the clamping voltage and outputs a waveform approximately the same as the clamping signal to the primary side of the bias transformer 202, driving the bias transformer 202 to work; the output voltage of the bias transformer 202 is input into the bias rectifier filter circuit 204 after passing through the peak absorption circuit 203, and a fast and adjustable DC bias value is obtained. By quickly adjusting the DC bias value, the fast dynamic closed-loop adjustment of the electron beam is finally achieved.

[0080] It should be clear that the various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. The present invention is not limited to the specific steps and structures described above and shown in the figures. In addition, for the sake of brevity, a detailed description of known methods and technologies is omitted here.

[0081] The above are only embodiments of the present application and are not limited to the present application. For those skilled in the art, the present application may have various changes and variations without departing from the scope of the present invention. Any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims

1. A dynamic closed-loop arbitrary electron beam generator, characterized in that: It comprises a high-speed proportional closed-loop regulation circuit (101), an oscillation circuit (102), an amplitude regulation circuit (103), a high-speed adjustable inverter circuit (201), a bias transformer (202), a peak absorption circuit (203) and a bias rectifier filter circuit (204); wherein: The high-speed proportional closed-loop regulation circuit (101) is used to receive a beam setting signal and a beam sampling signal and output a positive and negative equal closed-loop regulation signal to the amplitude regulation circuit (103); the input end of the amplitude regulation circuit (103) is respectively connected to the oscillation circuit (102) and the high-speed proportional closed-loop regulation circuit (101); and the output end of the amplitude regulation circuit (103) is connected to the high-speed adjustable inverter circuit (201); The output end of the high-speed adjustable inverter circuit (201) is connected to the input end of the bias transformer (202), the output end of the bias transformer (202) is connected to the input end of the peak absorption circuit (203), and the output end of the peak absorption circuit (203) is connected to the bias rectifier filter circuit (204); The oscillator circuit (102) includes NE555, and outputs a square wave signal with a duty cycle of 50% at pin 3 of the NE555; The amplitude control circuit (103) comprises a resistor R20, a resistor R21, a resistor R22, a capacitor C7, a transistor Q3 and a transistor Q4, wherein the resistor R20 is connected to the collector of the transistor Q3, one end of the resistor R21 is connected to the capacitor C7, the other end of the resistor R21 is respectively connected to the base of the transistor Q3 and the base of the transistor Q4, the resistor R22 is connected to the collector of the transistor Q4, and the emitter of the transistor Q3 is connected to the emitter of the transistor Q4; the square wave signal output from the 3rd pin of the NE555 is sequentially loaded to the base of the transistor Q3 and the base of the transistor Q4 respectively through the capacitor C7 and the resistor R21; wherein, When the square wave signal is positive, the transistor Q3 is turned on, the transistor Q4 is turned off, and the negative limit signal is connected to P2 through the resistor R22; When the square wave signal is zero, the capacitor C7 works, the transistor Q4 is turned on, the transistor Q3 is turned off, and the positive limit signal is connected to P1 through the resistor R20.

2. The dynamic closed-loop arbitrary electron beam generator according to claim 1, characterized in that: When the high-speed proportional closed-loop regulation circuit (101) is in an initial state, the beam current is set to zero, the potential of the first operational amplifier pin 1 is 0, and at this time -15V is reversely proportional to the resistor R14 through the resistor R12; An upper limit voltage of +15V is obtained at pin 8 of the third operational amplifier, and +15V is inversely proportional to resistor R18 and resistor R19 to obtain a lower limit voltage of -15V at pin 14 of the fourth operational amplifier.

3. The dynamic closed-loop arbitrary electron beam generator according to claim 1, characterized in that: The high-speed adjustable inverter circuit (201) comprises a power transistor Q1, a power transistor Q2, an electrolytic capacitor E1 and an electrolytic capacitor E2, the positive ends of the power transistor Q1, the power transistor Q2 and the electrolytic capacitor E1 are connected to the collector of the power transistor Q1, the emitter of the power transistor Q1 is connected to the emitter of the power transistor Q2, the collector of the power transistor Q2 is connected to the negative end of the electrolytic capacitor E2, and the positive end of the electrolytic capacitor E2 is connected to the negative end of the electrolytic capacitor E1 and AC1 respectively; wherein, When the power transistor Q1 is turned on and the power transistor Q2 is turned off, the current flows from the positive end of the electrolytic capacitor E1 through the power transistor Q1 to AC2, the load, AC1 in sequence and flows back to the negative end of the electrolytic capacitor E1; When the power transistor Q2 is turned on and the power transistor Q1 is turned off, the current flows from the positive end of the electrolytic capacitor E2 through AC1 to the load, AC2, the power transistor Q2 and back to the negative end of the electrolytic capacitor E2.

4. The dynamic closed-loop arbitrary electron beam generator according to claim 1, characterized in that: The primary winding of the bias transformer (202) is used to receive the output voltage of the high-speed adjustable inverter circuit (201) and boost the output voltage.

5. The dynamic closed-loop arbitrary electron beam generator according to claim 1, characterized in that: The high-speed proportional closed-loop regulation circuit (101) is used to control the increase or decrease of the beam sampling signal after performing a 1:1 reverse proportional operation on the beam setting signal from the control system, and output a closed-loop modulation signal to the amplitude regulation circuit (103).

6. The dynamic closed-loop arbitrary electron beam generator according to claim 1, characterized in that: The amplitude control circuit (103) is used to receive the closed-loop modulation signal output by the high-speed proportional closed-loop regulation circuit (101), and convert it into a clamping signal with alternating positive and negative values ​​and a duty cycle of 50% after cooperating with the oscillation circuit (102).

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