A vacuum isolation hatch

Abstract

The present invention relates to a vacuum isolation door, comprising a valve plate and a sealing door, the sealing door comprising a sealing ring and a sealing flange, the sealing flange being connected to the end of the sealing ring, a radial sealing ring and a guide ring being arranged on the outer ring surface of the sealing ring, a mounting hole being arranged on the valve plate, the outer ring surface of the sealing ring being slidably connected to the mounting hole, the radial sealing ring being close to the mounting hole, a first driving mechanism being arranged on the valve plate, the first driving mechanism comprising a plurality of cylinders or hydraulic cylinders, the cylinders or hydraulic cylinders being evenly arranged along the circumference of the sealing door, the cylinder bodies of the cylinders or hydraulic cylinders being connected to the valve plate, the piston rod ends of the cylinders or hydraulic cylinders being provided with a groove body, a pull rod being arranged in the groove body, the pull rod being hinged to the piston rod ends of the cylinders or hydraulic cylinders, the pull rod being connected to the sealing flange, a spring being connected to the outer sleeve of the pull rod, the two ends of the spring acting on the sealing flange and the end faces of the cylinders or hydraulic cylinders respectively, and an end face sealing ring being arranged on the other side of the sealing flange relative to the spring. The present invention has a simple structure, is easy to use, and has a good sealing effect.

Description

Technical Field

[0001] The invention relates to the field of vacuum magnetic suspension, in particular to a vacuum isolation cabin door. Background Art

[0002] Fluid conveying pipeline systems usually use gate valves, stop valves, butterfly valves, ball valves, plug valves, etc. to realize the opening and closing of fluid conveying pipeline systems. These valves are widely used in pipeline systems for conveying liquid water, liquid oil, gaseous materials, fluidized materials, etc.

[0003] At present, most of these valves are single-position switch valves, which are suitable for pipelines with smaller diameters. The pipeline system is unable to transport magnetic levitation vehicles or solid materials, and cannot perform on-off switching during the transportation process.

[0004] The on-off valve currently used for the passage of tangible objects is a gate cut-off valve. The gate valve is an opening and closing gate whose movement direction is perpendicular to the movement direction of the object. There are two types of gate valves: wedge gate valves and parallel gate valves.

[0005] The two sealing surfaces of the wedge gate form a wedge shape, and the sealing is achieved by the compression pressure between the wedge sealing surface and the valve body sealing surface ensured by the valve stem thrust. The processing requirements for the wedge gate and the wedge sealing surface of the valve body are high and easy to wear. The valve stem thrust needs to be kept constant for a long time. It is only suitable for gate shut-off valves with small and medium diameters and cannot meet the switching and sealing needs of vacuum magnetic levitation vacuum pipelines.

[0006] The sealing surface of the parallel gate valve is parallel to the moving direction of the gate. The parallel gate valve is mainly composed of the gate, sealing device, sealing actuator, gate moving mechanism, valve body, etc. The movement of the gate is achieved by the rotation of the trapezoidal thread screw nut pair. There are two types of drive: manual and electric. For large gate valves, electric drive is used to move the gate to the open position and the closed position. The sealing of the parallel gate valve is achieved by a plurality of parallel four-bar mechanisms composed of the top rod mechanism of the sealing actuator, the inclined rod mechanism and the sealing plate of the sealing device to push the sealing plate outward in parallel. The inclined rod mechanism changes from tilted to vertical until the sealing ring on the sealing plate abuts against the sealing end face of the valve body, meets and maintains the sealing force requirements, and achieves sealing and closing the gate valve; the driving of the sealing actuator is also achieved by the trapezoidal thread screw nut pair.

[0007] In order to ensure the reliable and stable operation of the sealing device, sealing actuator, gate plate and moving mechanism, it is also necessary to set up: (1) multiple sets of panel support wheels and side plate guide wheels to ensure that the valve plate moves smoothly in the valve body with the valve body or guide rail as a guide, (2) multiple sets of rollers are set on the valve plate. When the valve plate moves to the valve port, the valve plate rollers are in place and the valve plate stops moving forward, (3) multiple sets of sealing plate wheels for guiding the sealing plate, and (4) valve plate load-bearing wheels and guide wheel groups for bearing the weight of the entire valve plate and the various mechanisms installed thereon.

[0008] Therefore, the parallel gate valve has many mechanisms and complex structure, is difficult to manufacture, has high cost and high failure rate; its sealing device and sealing actuator are both arranged inside the gate, and after failure, they are inspected, maintained and replaced unchanged; the opening and closing of the sealing device are realized by multiple sets of parallel four-bar mechanisms and multiple sets of panel support wheels. Due to the inevitable errors in manufacturing and installation and the large number of conversion links, the flatness of the sealing surface of the sealing plate is low, the sealing effect is not ideal, and it is difficult to meet the sealing and switching requirements of such large magnetic levitation vacuum pipelines.

[0009] In view of the existing technologies of various switch shut-off valves, for special working conditions such as vacuum working environment, large tangible solid magnetic levitation trains passing through, large diameter of vacuum pipes (generally 3m to 8m), and high sealing requirements, the existing gate valve sealing structure technology has sealing problems and many shortcomings. In addition, in the existing technology, vacuum isolation is achieved by driving the sealing door to open and close through an actuator. For some mechanisms in which the sealing door has an axial matching relationship with other structures, the moving direction of the sealing door driven by the actuator needs to be consistent with the axial direction of the sealing door. For large sealing doors that magnetic levitation trains can pass through, it is very difficult to assemble them with the actuator. Summary of the invention

[0010] The purpose of the present invention is to address the structural characteristics and shortcomings of the existing gate valve technology, as well as the difficulty in scaling up and meeting the sealing and switching requirements of magnetic levitation vacuum pipelines, especially to achieve vacuum isolation by driving the opening and closing of a sealing door through an actuator. For some mechanisms in which a sealing door has an axial matching relationship with other structures, the moving direction of the sealing door driven by the actuator needs to be consistent with the axial direction of the sealing door. For large sealing doors that can be passed by magnetic levitation trains, it is very difficult to assemble them with an actuator, and a vacuum isolation cabin door is provided.

[0011] In order to achieve the above object, the technical solution adopted by the present invention is:

[0012] A vacuum isolation cabin door, comprising a valve plate and a sealing door arranged thereon, the sealing door comprising a sealing ring and a sealing flange, the sealing flange being connected to the end of the sealing ring, a radial sealing ring and a guide ring being arranged on the outer ring surface of the sealing ring, a mounting hole being arranged on the valve plate, the outer ring surface of the sealing ring being slidably connected to the mounting hole, the radial sealing ring being tightly attached to the mounting hole, a first driving mechanism being arranged on the valve plate, the first driving mechanism comprising a plurality of cylinders or hydraulic cylinders, the cylinders or hydraulic cylinders being evenly arranged along the circumference of the sealing door, the cylinder bodies of the cylinders or hydraulic cylinders being connected to the valve plate, the cylinders or hydraulic cylinders A groove body is provided at the end of the piston rod of the cylinder, and a pull rod is provided in the groove body. The pull rod is hinged to the end of the piston rod of the cylinder or hydraulic cylinder, and the pull rod is connected to the sealing flange. A spring is connected to the outer sleeve of the pull rod. An end face sealing ring is provided on the sealing flange. The end face sealing ring and the sealing end face form a sealing structure. The spring is pre-compressed and installed, and the two ends of the spring act on the sealing flange and the end face of the cylinder or hydraulic cylinder body respectively. The end face sealing ring is tightly attached to the sealing end face through the spring force of the spring. The first driving mechanism can drive the sealing door to compress the spring and move away from the sealing end face.

[0013] By using a vacuum isolation cabin door described in the present invention, a plurality of evenly distributed springs act on the circumference of the sealing door, and can provide even spring force for the sealing door; a plurality of evenly distributed cylinders or hydraulic cylinders are connected to the circumference of the sealing door, and can provide even thrust to the circumferentially pre-compressed spring, so that the sealing door moves smoothly; the spring is sleeved outside the pull rod, so that the pull rod can serve as a guide rod for the spring, avoiding changes in the direction of the spring force provided by the spring; the pull rod, the spring and the cylinder or hydraulic cylinder form a single actuator for moving the sealing door; the pull rod is driven by the cylinder or hydraulic cylinder, and at the same time limits the direction of elastic deformation of the spring; the spring pushes the sealing door toward the sealing end face under the action of the pre-compression force, so that the end face sealing ring fits and isolates the sealing end face for sealing; the cylinder or hydraulic cylinder can The pull rod pulls the sealing door toward the valve plate and abuts against the valve plate, so that the end face sealing ring moves away from the sealing end face and releases the seal. The force transmission of each individual actuator is consistent along the axis and direction of the sealing door. The sealing door is evenly subjected to force in the circumferential direction and the force is balanced, so that the sealing door is basically not deformed. Therefore, the stiffness requirement of the sealing door can be appropriately reduced, saving the cost; the sealing ring is supported by the guide ring in the mounting hole and protects the radial sealing ring, and can also reduce friction resistance; the pull rod has a certain deflection relative to the piston rod of the cylinder or hydraulic cylinder, so that the connection and cooperation of the sealing door is more convenient, and the bearing force of the sealing door can be adaptively and evenly distributed on the sealing end face, and can also fit the sealing ring to slide in the mounting hole to avoid the sealing ring from getting stuck in the mounting hole; the vacuum isolation cabin door has a simple structure, is easy to use and has a good effect.

[0014] Preferably, a groove body is provided at the end of the piston rod of the air cylinder or hydraulic cylinder, a through pin hole is provided on the groove body, the end of the pull rod is provided in the matching pin hole, a cylindrical pin is installed in the pin hole, and the cylindrical pin is provided with an axial positioning.

[0015] Preferably, the pull rod outer shell is connected with a spring guide sleeve, and the spring sleeve is arranged outside the spring guide sleeve.

[0016] With this structure, the pull rod serves as a guide for the spring guide sleeve, and the spring guide sleeve serves as a guide tube for the spring, thereby preventing the spring from undergoing large radial deformation and affecting the stability of the spring force and the service life of the spring.

[0017] Further preferably, the pull rod passes through the rear outer side of the sealing door and is connected to a locking nut and locked.

[0018] Preferably, the vacuum isolation cabin door also includes piping, which includes a circular tube and a hose, wherein the circular tube is connected to all the cylinders or hydraulic cylinders at the same time, and the hose is connected to the circular tube, and the hose is connected to the gas station or hydraulic station.

[0019] Preferably, the sealing flange on which the end face sealing ring is arranged is provided with a stepped positioning groove, and the end face sealing ring is arranged in the stepped positioning groove.

[0020] With this structure, the end face sealing ring is positioned and limited by the stepped positioning groove.

[0021] Further preferably, the inner ring of the end face sealing ring is sleeved on the step surface of the step positioning groove, and the outer ring of the end face sealing ring is matched with a sealing pressure ring.

[0022] With this structure, the sealing pressure ring is used to ensure that the end face sealing ring can work normally and will not be crushed by the sealing end face.

[0023] Further preferably, the end face sealing ring may be a trapezoidal sealing ring, an O-ring or other sealing ring.

[0024] Preferably, a limit sensor is provided on the adjacent surface of the sealing end surface, and the limit sensor is a proximity switch, a limit switch or other position detection sensor.

[0025] With this structure, the limit sensor is used to detect the approach degree of the sealing door, and also prevents the sealing end face and the sealing flange from crushing the end face sealing ring.

[0026] Preferably, at least one first through hole is provided on the sealing door, and the first through hole communicates with two sides of the sealing door.

[0027] With this structure, when the vacuum isolation cabin door is in the process of changing from closed to open or from open to closed, the sealing door is connected front to back, and the pressure difference between the two vacuum pipes directly acts on the valve plate instead of on the sealing door, so that the force for opening and closing the sealing door is smaller, that is, the spring with smaller spring force or the first driving mechanism with smaller driving force can push the sealing door, so that the end face sealing ring is close to or away from the sealing end face, which can reduce the cost of the spring and the first driving mechanism.

[0028] Further preferably, a grid structure is connected inside the sealing ring, and the first through hole is arranged on the grid structure.

[0029] With this structure, the grid structure enhances the rigidity of the sealing ring, making it difficult for the sealing door to deform, achieving a good sealing effect, and saving materials for manufacturing the sealing door.

[0030] Preferably, the guide rings are provided on both sides of the radial sealing ring.

[0031] Preferably, the guide ring is a slip-resistant wear plate.

[0032] Further preferably, the guide ring is a polytetrafluoroethylene plate.

[0033] Preferably, the sealing ring and the sealing flange form a component with an L-shaped cross-section.

[0034] Further preferably, a mounting groove is provided on the outer ring surface of the sealing ring, and the radial sealing ring and the guide ring are arranged in the mounting groove.

[0035] Further preferably, the sealing ring and the sealing flange are integrally formed components.

[0036] Preferably, the vacuum isolation cabin door also includes a box body, and end face flanges are provided on both sides of the box body, which are respectively sealed and connected to the vacuum pipes. The two vacuum pipes are coaxially arranged, and the top and bottom of the valve plate are respectively provided with protrusions. A slide groove is provided in the box body, and the protrusion is arranged in the slide groove to form a sliding guide pair. The plate surface of the valve plate can move to or away from between the two vacuum pipes. The sealing end face is arranged in the box body, and the sealing end face is connected to the end face of the vacuum pipe through the box body connecting station.

[0037] Further preferably, the slide groove is U-shaped.

[0038] Further preferably, the slide groove is arranged along the length direction of the box body.

[0039] Further preferably, the convex portion of the convex block has three working surfaces, each of the working surfaces is provided with a group of slide plates, each group of the slide plates includes a plurality of slide plates, and the slide plates are fitted in the slide grooves.

[0040] Further preferably, the slide plates are evenly arranged.

[0041] Further preferably, the slide plate is mounted on the protrusion via a fastener.

[0042] Further preferably, the slide plate is a wear-resistant lubricating lining.

[0043] Further preferably, the slide plate is a self-lubricating wear-resistant lining plate.

[0044] Further preferably, the vacuum isolation door further comprises a second driving mechanism, and the second driving mechanism drives the valve plate to slide in the box body.

[0045] Further preferably, the second driving mechanism is a screw system, an oil cylinder system, an air cylinder system, a pulley system, a gear rack system or a sprocket chain system, the fixed parts of the screw system, the oil cylinder system, the air cylinder system, the pulley system, the gear rack system or the sprocket chain system are connected to the box body, and the moving parts of the screw system, the oil cylinder system, the air cylinder system, the pulley system, the gear rack system or the sprocket chain system are connected to the valve plate.

[0046] Further preferably, the screw system includes a screw and a driver, the driver is located outside the box body and sealed and fixed on the box body, the screw is connected to the box body, the driver is connected to one end of the screw and can drive the screw to rotate, the screw is threadedly connected with a screw nut, the screw nut is connected to the valve plate, and the screw is arranged along the sliding direction of the valve plate.

[0047] With this structure, the driver rotates to drive the lead screw to rotate, and the lead screw rotation drives the lead screw nut to reciprocate along the lead screw in a straight line, thereby driving the valve plate to slide in the box.

[0048] Further preferably, the screw system further comprises a rotary encoder, wherein the rotary encoder is connected inside the housing and connected to the other end of the screw.

[0049] With this structure, the rotary encoder measures the angular displacement or angular velocity of the lead screw, and controls the moving distance of the lead screw nut in conjunction with the pitch of the lead screw, thereby being able to precisely control the moving distance and accurate positioning of the valve plate.

[0050] Further preferably, the driver is connected to one end of the lead screw via a coupling, and the other end of the lead screw is connected to the rotary encoder via a coupling.

[0051] Further preferably, the lead screw is installed in the housing through two lead screw bearing seats, and the lead screw bearing seats support the lead screw.

[0052] Further preferably, the screw nut is connected to the nut bearing seat, and the nut bearing seat is connected to the valve plate.

[0053] Further preferably, the driver is a motor.

[0054] Further preferably, the box body includes a front half box body, a rear half box body and an end cover, the front half box body and the rear half box body are sealingly connected, a box body seal is provided on the joint surface, the same end of the front half box body and the rear half box body is sealingly connected to the end cover, an end cover seal is provided on the joint surface, and the box body seal and the end cover seal are strip seals or plate seals.

[0055] Further preferably, stoppers are used for positioning between the mating surfaces of the front half box, the rear half box and the end cover.

[0056] Further preferably, the box body is provided with three independent workstations, the middle workstation is a box body connecting workstation connected to the vacuum pipe, both sides of the box body connecting workstation are stop workstations for accommodating the valve plate, the box body connecting workstations are distributed on the front and back sides of the box body and are coaxially arranged, the box body connecting workstations are round tubes with the same inner diameter as the vacuum pipe, and the sealing end face is arranged on the side of the box body connecting workstation facing the valve plate.

[0057] Further preferably, a box mounting platform is provided at the bottom of the circular tube of the box connecting station, and the box mounting platform is used to install the magnetic levitation motor bracket.

[0058] Further preferably, the valve plate is provided with two independent stations, one is a valve plate sealing station, and the other is a valve plate connecting station, the valve plate connecting station is a round tube having the same inner diameter as the box connecting station, and the valve plate sealing station is provided with the sealing door.

[0059] With this structure, the valve plate moves once in the box body, so that the valve plate sealing position is aligned with the box body connecting position, while the valve plate connecting position is away from the box body connecting position, thereby isolating the two vacuum pipes. Similarly, when resetting, the valve plate connecting position is aligned with the box body connecting position, while the valve plate sealing position is away from the box body connecting position, thereby connecting the two vacuum pipes.

[0060] Further preferably, a valve plate mounting platform is provided at the bottom of the circular tube of the valve plate connecting station, and the valve plate mounting platform is used for mounting the magnetic suspension motor bracket.

[0061] The present invention also provides a vacuum isolation cabin door, comprising a valve plate and a sealing door arranged thereon, the sealing door comprising a sealing ring and a sealing flange, the sealing flange being connected to the end of the sealing ring, a radial sealing ring and a guide ring being arranged on the outer ring surface of the sealing ring, a mounting hole and a pipe end flange being arranged on the valve plate, the outer ring surface of the sealing ring being slidably connected to the mounting hole, the radial sealing ring being tightly attached to the mounting hole, a first driving mechanism being arranged on the valve plate, the first driving mechanism comprising a plurality of cylinders or hydraulic cylinders, the cylinders or hydraulic cylinders being evenly arranged along the circumference of the sealing door, the cylinder bodies of the cylinders or hydraulic cylinders being connected to the valve plate, an end face sealing ring being arranged on the sealing flange, the end face sealing ring cooperating with the sealing end face to form a sealing structure, the pull rod comprising a spline keypad and a rod body, the spline keypad and the rod body forming an integrated structure, a spring guide sleeve being connected to the outer shell of the rod body, a spring being connected to the outer shell of the spring guide sleeve, a spline groove matching the spring guide sleeve being arranged on the spline keypad, and the spring guide sleeve being connected to the outer shell of the spring guide sleeve. One end of the sleeve is provided with spline teeth matching the spline groove of the spline keypad, the left end of the pull rod passes through the right end of the spring guide sleeve, and the left end passes through the sealing flange and is connected to the outer locking nut, the right end of the spring guide sleeve passes through the left end of the pull rod, the spline teeth pass through the spline groove of the spline keypad, abut against the piston rod end of the cylinder or hydraulic cylinder and are matched and connected with the piston rod end, the left end of the spring guide sleeve passes through and is slidably connected to the pipe end flange and abuts against the sealing door, one end of the spring abuts against the pipe end flange, and the other end abuts against the spline keypad, the spring is pre-compressed and installed, the two ends of the spring act on the end faces of the pipe end flange and the pull rod spline keypad respectively, and the sealing door pushes the pull rod under the action of the spring force of the spring to pull the sealing door toward the pipe end flange and away from the sealing end face to form a normally open structure, the piston rod of the cylinder or hydraulic cylinder can push the spring guide sleeve to move axially, and push the sealing door to move toward the sealing end face and abut against the sealing end face to achieve sealing isolation.

[0062] By adopting the vacuum isolation cabin door described in the present invention, the pull rod and the spring guide sleeve serve as intermediate force transmission parts and are not directly connected to the piston rod of the cylinder or hydraulic cylinder. The pre-compressed spring is cleverly used to keep the end of the pull rod and the end of the piston rod of the cylinder or hydraulic cylinder in abutment, thereby facilitating the installation of the entire device.

[0063] The present invention also provides a bidirectionally sealed vacuum isolation cabin door, including a vacuum isolation cabin door as described in any of the above items, wherein one sealing door is respectively arranged on both sides of the valve plate sealing station of the valve plate, and the two sealing doors are coaxially arranged and respectively connected to the sealing end faces of the box body connecting station to form a sealing structure to realize the opening and closing of the vacuum isolation cabin door.

[0064] By adopting a bidirectionally sealed vacuum isolation cabin door described in the present invention, the two vacuum pipes connected to the box body are sealed separately through two sets of sealing structures, and have better sealing performance. When a single set of the sealing structures has problems and causes sealing failure, the other set of the sealing structures can still effectively seal and separate the two adjacent vacuum pipes, providing a reliable vacuum environment for the vacuum pipeline system; in addition, the spring forces of the springs in the two sets of the sealing structures or the driving forces of the first driving mechanisms are in opposite directions, and the spring forces acting on the valve plate or the driving forces of the first driving mechanisms can offset each other well, so that the axial thrust of the sliding guide pair of the valve plate and the box body is greatly reduced or even eliminated. The vacuum isolation cabin door has a simple structure, is easy to use, and has a good effect.

[0065] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0066] 1. In the vacuum isolation cabin door described in the present invention, a plurality of evenly distributed springs act on the circumference of the sealing door to provide even spring force for the sealing door, a plurality of evenly distributed cylinders or hydraulic cylinders are connected to the circumference of the sealing door to provide even thrust to the circumferentially tightened springs to enable the sealing door to move smoothly, the spring is sleeved outside the pull rod so that the pull rod can serve as a guide rod for the spring to avoid changes in the direction of the spring force provided by the spring; the pull rod, the spring and the cylinder or hydraulic cylinder form a single actuator for moving the sealing door, the pull rod is driven by the cylinder or hydraulic cylinder and limits the direction of elastic deformation of the spring, the spring force of the single actuator and the The driving force of the air cylinder or the hydraulic cylinder is along the axis of the sealing door and the force transmission direction is consistent. The sealing door is evenly stressed along the circumference and the force is balanced, so that the sealing door is basically not deformed, and the stiffness requirement of the sealing door can be appropriately reduced, saving the cost; the sealing ring is supported by the guide ring in the mounting hole and protects the radial sealing ring, and can also reduce the friction resistance; the pull rod has a certain deflection relative to the piston rod of the air cylinder or the hydraulic cylinder, so that the connection and cooperation of the sealing door is more convenient, and the bearing force of the sealing door can be adaptively and evenly distributed on the sealing end face, and can also fit the sealing ring to slide in the mounting hole to avoid the sealing ring from getting stuck in the mounting hole; the vacuum isolation cabin door has a simple structure, is easy to use, and has a good effect;

[0067] 2. In the vacuum isolation cabin door described in the present invention, the pull rod and the spring guide sleeve serve as intermediate force transmission parts and are not directly connected to the piston rod of the air cylinder or the hydraulic cylinder. The pre-compressed spring is cleverly used to keep the end of the pull rod and the end of the piston rod of the air cylinder or the hydraulic cylinder in contact, which facilitates the installation of the entire device.

[0068] 3. The bidirectionally sealed vacuum isolation cabin door described in the present invention seals the two vacuum pipes connected to the box body respectively through two sets of sealing structures, and has better sealing performance. When a single set of the sealing structures has problems and causes the seal to fail, the other set of the sealing structures can still effectively seal and separate the two adjacent vacuum pipes, providing a reliable vacuum environment for the vacuum pipeline system; in addition, the spring forces of the springs in the two sets of the sealing structures or the driving forces of the first driving mechanisms are in opposite directions, and the spring forces acting on the valve plate or the driving forces of the first driving mechanisms can offset each other well, so that the axial thrust of the sliding guide pair of the valve plate and the box body is greatly reduced or even eliminated. The vacuum isolation cabin door has a simple structure, is easy to use, and has a good effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0069] Figure 1 It is a schematic diagram of the cross-sectional structure of a one-way normally closed vacuum isolation cabin door in a normally closed state;

[0070] Figure 2 It is a schematic diagram of the cross-sectional structure of a one-way normally closed vacuum isolation cabin door in an open state;

[0071] Figure 3 It is a schematic diagram of the top view of the structure of a one-way normally closed vacuum isolation cabin door;

[0072] Figure 4 for Figure 1 Schematic diagram of the cross-sectional structure of AA;

[0073] Figure 5 for Figure 4 The enlarged structural diagram of the middle D part;

[0074] Figure 6 for Figure 2 Schematic diagram of the cross-sectional structure of the middle BB;

[0075] Figure 7 for Figure 2 Schematic diagram of the cross-sectional structure of the CC;

[0076] Figure 8 It is a schematic diagram of the longitudinal section structure of the bidirectional normally closed vacuum isolation cabin door in the normally closed state;

[0077] Fig. 9 for Figure 8 The enlarged structural diagram of the middle E part;

[0078] Fig.10 It is a schematic diagram of the cross-sectional structure of a one-way normally open vacuum isolation cabin door in a normally open state;

[0079] Fig.11 It is a schematic diagram of the cross-sectional structure of the one-way normally open vacuum isolation cabin door in a closed state;

[0080] Fig.12 It is a schematic diagram of the top view of the structure of a one-way normally open vacuum isolation cabin door;

[0081] Fig.13 for Fig.10 A'-A' cross-sectional structural diagram;

[0082] Fig.14 for Fig.10 A schematic diagram of the cross-sectional structure along line B'-B';

[0083] Fig.15 for Fig.11 Schematic diagram of the cross-sectional structure of C'-C';

[0084] Fig.16 for Fig.15 The enlarged structural diagram of the D' portion in the middle;

[0085] Fig.17 for Fig.16 Schematic diagram of the cross-sectional structure of FF;

[0086] Fig.18 It is a schematic diagram of the longitudinal section structure of the bidirectional normally open vacuum isolation cabin door in the closed state;

[0087] Fig.19 for Fig.18 The enlarged structural diagram of the E' section in the middle;

[0088] Fig. 20 for Fig.19 Schematic diagram of the cross-sectional structure of GG.

[0089] Markings in the figure: 01-vacuum pipe, 1-box, 11-front half box, 12-rear half box, 13-end cover, 14-box seal, 15-end cover seal, 16-box connecting station, 17-box mounting table, 18-slide, 19-sealing end face, 191-limit sensor, 2-valve plate, 21-valve plate sealing station, 211-annular pipe, 212-pipe end flange, 22-valve plate connecting station, 23-sealing door, 231-first through hole, 232-radial sealing ring, 233-guide ring, 234-end face sealing ring, 235-sealing pressure ring, 24-bump, 241-slide plate, 25-cylinder or hydraulic cylinder, 26-pull rod, 261-locking nut, 262-cylindrical pin, 263-spline key, 264-rod body, 27-spring, 28-spring guide sleeve, 281-spline tooth, 29-valve plate mounting table, 3-second drive mechanism, 31-screw, 32-driver, 33-screw bearing seat, 34-nut bearing seat, 35-rotary encoder, 4-piping, 41-annular tube, 42-hose. DETAILED DESCRIPTION

[0090] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0091] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0092] Example 1

[0093] like Figures 1 to 7 As shown, a vacuum isolation cabin door described in the present invention includes a box body 1, a valve plate 2, a second driving mechanism 3 and a pipe 4, and is a normally closed door.

[0094] like Figures 1 to 3 As shown, the box body 1 includes a front half box body 11, a rear half box body 12 and an end cover 13. The front half box body 11 and the rear half box body 12 are combined to form a right box body through a stopper, a joint surface and bolts. A sealing groove is processed on the joint surface, and a box body seal 14 is installed therein. The left end surface of the right box body is processed with a stopper and a joint surface for positioning with the end cover 13. The right box body and the end cover 13 are connected by bolts. A sealing groove is processed on the joint surface, and an end cover seal 15 is installed therein. The front half box body 11 and the rear half box body 12 are respectively connected to a vacuum pipe 01, and the two vacuum pipes 01 are aligned. The box body seal 14 and the end cover seal 15 can be either a sealing strip, or other seals such as an "O"-shaped sealing ring, a plate-type sealing gasket, etc.

[0095] like Figures 1 to 3 As shown, the box body 1 is provided with three independent workstations, the middle workstation is a box body connecting workstation 16 connected to the vacuum pipe 01, the left and right workstations are stay workstations for accommodating the valve plate 2, and the box body connecting workstations 16 are distributed on the front and rear sides of the box body 1, that is, one box body connecting workstation 16 is provided on the front half box body 11 and the rear half box body 12 respectively, and the box body connecting workstation 16 is a round tube with the same inner diameter as the vacuum pipe 01, and the two box body connecting workstations 16 are oppositely and coaxially arranged.

[0096] like Figure 4As shown, both ends of the box connecting station 16 have flanges, the flange facing the outside of the box 1 is used for flange sealing connection to the corresponding vacuum pipe 01, the flanges facing the inside of the box 1 are used to set the installation space for the valve plate 2, and the flange surface of the flange facing the inside of the box 1 serves as a sealing end face 19, and a limit sensor 191 is provided on the adjacent surface of the sealing end face 19, the limit sensor 191 is a proximity switch, a limit switch or other position detection sensor, and the adjacent surface can be the inner ring surface of the flange or the outer ring surface of the flange.

[0097] like Figure 7 As shown, a box mounting platform 17 is provided at the bottom of the circular tube of the box connecting station 16, and the box mounting platform 17 is used to install the magnetic suspension motor bracket.

[0098] like Figure 1 , Figure 2 , Figures 4 to 7 As shown, the inner top surface and the inner bottom surface of the box body 1 are respectively provided with slide grooves 18 from left to right, that is, the slide grooves 18 are arranged along the length direction of the front half box body 11 and the rear half box body 12, and the slide grooves 18 are U-shaped.

[0099] like Figure 1 and Figure 2 As shown, the valve plate 2 is provided with two independent stations from left to right, one is a valve plate sealing station 21, and the other is a valve plate connecting station 22. The valve plate connecting station 22 is arranged on the right side of the valve plate 2. The valve plate connecting station 22 is a round tube with the same inner diameter as the box connecting station 16. A valve plate mounting platform 29 is arranged at the bottom of the round tube of the valve plate connecting station 22. The valve plate mounting platform 29 is used to install a magnetic levitation motor bracket. The valve plate sealing station 21 is arranged on the left side of the valve plate 2. A sealing door 23 is provided at the valve plate sealing station 21. The sealing door 23 on the valve plate 2 and the sealing end face 19 on the box 1 cooperate with each other to form a sealing structure.

[0100] like Figure 4 and Figure 5As shown, the sealing door 23 includes a sealing ring and a sealing flange, and the sealing flange is connected to the end of the sealing ring. Preferably, the sealing ring and the sealing flange are integrally formed components, and the sealing ring and the sealing flange form a component with an L-shaped cross-section. The valve plate sealing station 21 is formed by welding an annular tube 211 with an internal web and rib plate and an external web and rib plate, and is an integral structure with the valve plate 2. A mounting hole for mounting the sealing door 23 is provided in the annular tube 211, and the outer annular surface of the sealing ring is slidably connected to the mounting hole. The outer annular surface of the sealing ring is A mounting groove for a radial sealing ring 232 and a guide ring 233 is provided on the top, the radial sealing ring 232 is installed in the middle groove, and the two guide rings 233 are respectively installed in the mounting grooves on both sides of the radial sealing ring 232, the radial sealing ring 232 is tightly attached to the mounting hole, the guide ring 233 is an easy-to-slide and wear-resistant plate, and a polytetrafluoroethylene plate is used in this embodiment. The sealing isolation on both sides of the mounting hole is achieved through the radial sealing ring 232, and the sealing door is supported at the mounting hole through the guide ring 233 and the radial sealing ring 232 is protected.

[0101] like Figure 5 As shown, there is a grid structure inside the sealing ring, and the grid structure enhances the rigidity of the sealing ring, so that the sealing door 23 is not easily deformed and has a good sealing effect, and also saves materials for manufacturing the sealing door 23. At least one first through hole 231 is provided on the grid structure, and the first through hole 231 connects the front and rear sides of the sealing door 23, so that the sealing door 23 is connected front to back, avoiding the force generated by the pressure difference on both sides when the front and back are not connected directly acting on the sealing door 23, resulting in a greatly increased force required for opening and closing the sealing door 23, and an increase in manufacturing cost.

[0102] like Figure 4 and Figure 5 As shown, the sealing flange is located between the mounting hole and the sealing end face 19, and a stepped positioning groove is provided on the side of the sealing flange facing the sealing end face 19, and an end face sealing ring 234 and a sealing pressure ring 235 are provided in the stepped positioning groove, and the inner ring of the end face sealing ring 234 is sleeved on the stepped surface of the stepped positioning groove, and the sealing pressure ring 235 is pressed on the outer ring of the end face sealing ring 234, and the sealing pressure ring 235 is used to ensure that the end face sealing ring 234 can work normally and is not crushed by the sealing end face 19, and the limit sensor 191 is used to detect the proximity of the sealing door 23, and also to prevent the sealing end face 19 and the sealing flange from crushing the end face sealing ring 234.

[0103] like Figure 4 and Figure 5As shown, the valve plate 2 is provided with a first driving mechanism, which includes a plurality of cylinders or hydraulic cylinders 25, and the cylinders or hydraulic cylinders 25 are evenly arranged along the circumference of the sealing door 23, as shown in FIG. Figure 1 and Figure 2 As shown, in this embodiment, 12 cylinders or hydraulic cylinders 25 are evenly distributed, and a mounting stop is provided on the valve plate 2. The cylinder or hydraulic cylinder 25 is fixedly connected to the valve plate 2 through bolts and the mounting stop. The piston rod end of the cylinder or hydraulic cylinder 25 is processed with a groove body and a pin hole, and the end of the pull rod 26 is inserted into the groove body. The end of the pull rod 26 is provided with a head and a pin hole matching the piston rod end of the cylinder or hydraulic cylinder 25. A cylindrical pin 262 is inserted into the pin hole, and the cylindrical pin 262 passes through the head of the pull rod 26, so that the head of the pull rod 26 is hinged to the piston rod end of the cylinder or hydraulic cylinder 25, and the sealing flange is provided with a 5, the other end of the pull rod 26 passes through the corresponding second through hole and is connected with a locking nut 261, the cylinder or hydraulic cylinder 25 pulls the pull rod 26, and the pull rod 26 pulls the sealing door 23 through the locking nut 261, the pull rod 26 is connected with a spring guide sleeve 28, the spring guide sleeve 28 is connected with a spring 27, the spring 27 is pre-compressed and installed, the two ends of the spring 27 respectively abut against the sealing flange and the cylinder end of the cylinder or hydraulic cylinder 25, the sealing flange moves to the right under the action of the pull rod 26 to make the sealing door 23 abut against the end surface of the annular tube 211, and the spring guide sleeve 28 can move axially at this time.

[0104] like Figure 1 , Figure 2 , Figures 4 to 7 As shown, the top and bottom of the valve plate 2 are respectively provided with protrusions 24, and the protrusions 24 are installed in cooperation with the mounting grooves on the valve plate 2 through fasteners. The convex part of the protrusion 24 has three working surfaces, and each of the working surfaces is provided with a group of slide plates 241. Each group of the slide plates 241 includes a plurality of slide plates 241, and the slide plates 241 are evenly arranged and installed on the protrusions 24 through fasteners. The protrusions 24 are arranged in the slide grooves 18 to form a sliding guide pair. The slide plates 241 fit in the slide grooves 18. Through the cooperation of the protrusions 24 and the slide grooves 18, the valve plate 2 and the box body 1 are slidably connected. The slide plates 241 are wear-resistant and lubricating linings. In this embodiment, self-lubricating wear-resistant linings are used. When maintaining the valve plate 2, it is only necessary to open the end cover 13 and pull the valve plate 2 out from one side of the end cover 13 along the slide groove 18, which is very convenient.

[0105] like Figures 1 to 4 , Figure 6 , Figure 7As shown, the second driving mechanism 3 includes a lead screw 31, a driver 32, a lead screw bearing seat 33, a nut bearing seat 34, and a rotary encoder 35. The driver 32 is located outside the end cover 13 and is sealed and fixed on the box body 1. The driver 32 is connected to one end of the lead screw 31 through a coupling, and the other end of the lead screw 31 is connected to the rotary encoder 35 through a coupling. The lead screw 31 is installed in the box body 1 through two lead screw bearing seats 33. The lead screw 31 extends from the stop station of the box body 1 to the box body connecting station 16. The lead screw bearing seat 33 supports the lead screw 31. The lead screw 31 is threadedly connected with a lead screw nut, and the lead screw nut is connected to the nut bearing seat 34. The nut bearing seat 34 is connected to the valve plate 2, and the driver 32 is a motor. The rotation of the motor drives the lead screw 31 to rotate. The rotation of the lead screw 31 drives the lead screw nut to reciprocate along the lead screw 31 in a straight line, thereby driving the valve plate 2 to slide in the box body 1. The rotary encoder 35 measures the angular displacement or angular velocity of the rotation of the lead screw 31, and controls the moving distance of the lead screw nut in combination with the pitch of the lead screw 31, so as to accurately control the moving distance and accurate positioning of the valve plate 2, so as to realize that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box connecting station 16 respectively, so that the valve plate 2 closes or conducts the vacuum pipe 01.

[0106] In some specific embodiments, the second driving mechanism 3 is a cylinder system, which includes a driving cylinder, a cylinder body of the driving cylinder is hingedly connected to the box body 1, and a telescopic rod of the driving cylinder is hingedly connected to the valve plate 2. The driving cylinder is a servo cylinder or a cylinder with a built-in linear displacement sensor or a cylinder with a built-in pull-wire displacement sensor, etc., which can accurately control the stroke of the cylinder telescopic rod to achieve accurate control of the position of the valve plate 2 in the box body 1; a linear displacement sensor can also be directly arranged between the box body 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; ensuring that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box body connecting station 16 respectively.

[0107] In some specific embodiments, the second driving mechanism 3 is a cylinder system, which includes a driving cylinder, a cylinder body of the driving cylinder is hingedly connected to the box body 1, and a telescopic rod of the driving cylinder is hingedly connected to the valve plate 2. The driving cylinder is a servo cylinder or a cylinder with a built-in linear displacement sensor or a cylinder with a built-in pull-wire displacement sensor, etc., which can accurately control the stroke of the cylinder telescopic rod to achieve accurate control of the position of the valve plate 2 in the box body 1; a linear displacement sensor can also be directly arranged between the box body 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; ensuring that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box body connecting station 16 respectively.

[0108] In some specific embodiments, the second driving mechanism 3 is a pulley system, which includes a driving wheel, a driven wheel and a belt, the belt is connected to the driving wheel and the driven wheel, the driving wheel and the driven wheel are connected to the box body 1, the belt is connected to the valve plate 2, the shaft of the driving wheel is connected to the motor and the rotary encoder through a coupling, and the rotary encoder is used to detect and control the position of the valve plate 2; a linear displacement sensor can also be directly arranged between the box body 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; ensure that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box body connecting station 16 respectively.

[0109] In some specific embodiments, the second driving mechanism 3 is a gear rack system, which includes a gear and a rack meshing therewith, the gear is connected to the housing 1, the rack is connected to the valve plate 2, the shaft of the gear is connected to the motor and the rotary encoder through a coupling, and the rotary encoder is used to detect and control the position of the valve plate 2; a linear displacement sensor can also be directly arranged between the housing 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; and ensure that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the housing connecting station 16 respectively.

[0110] In some specific embodiments, the second driving mechanism 3 is a sprocket chain system, which includes a sprocket and a chain matching therewith, the sprocket is connected to the box body 1, the chain is connected to the valve plate 2, the shaft of the sprocket is connected to the motor and the rotary encoder through a coupling, and the rotary encoder is used to detect and control the position of the valve plate 2; a linear displacement sensor can also be directly arranged between the box body 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; to ensure that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box body connecting station 16 respectively.

[0111] like Figure 1 and Figure 6 As shown, the piping 4 includes a circular tube 41 and a hose 42. The circular tube 41 is connected to all the air cylinders or hydraulic cylinders 25 at the same time through a pipe joint. A through-box joint is provided on the box body 1. The through-box joint is connected to the hose 42 inside and to the pipe from the air station or hydraulic station outside. The hose 42 is connected to the circular tube 41.

[0112] The vacuum isolation hatch, such as Figure 1 , Figure 4 and Figure 5 As shown, under normal circumstances, the valve plate sealing station 21 is aligned with the box connecting station 16, and under the action of the spring force of the spring 27, the sealing door 23 is pushed away from the valve plate 2, and the end face sealing ring 234 is pressed against the sealing end face 19, so that the front and rear of the box 1 are sealed and isolated, that is, the front and rear vacuum pipes 01 are isolated and in a normally closed state; when it is necessary to connect the front and rear vacuum pipes 01, the cylinder or hydraulic cylinder 25 is actuated, and the sealing door 23 is pulled toward the valve plate 2 through the piston rod of the cylinder or hydraulic cylinder 25 and the pull rod 26, the spring 27 is compressed, the sealing door 23 abuts against the pipe end of the annular tube 211, and the end face sealing ring 234 is away from the sealing end face 19, so that the front and rear sealing of the box 1 is released, and then the second driving mechanism 3 drives the valve plate 2 to slide in the box 1, so that the valve plate sealing station 21 moves to the stop position in the box 1, as shown in FIG. Figure 2 and Figure 7 As shown, at the same time, the valve plate connecting station 22 moves toward the box connecting station 16 and is aligned, so that the front and rear vacuum pipes 01 are connected and in an open state.

[0113] A vacuum isolation hatch described in this embodiment is provided with three independent workstations in the box body 1 and two independent workstations on the valve plate 2, so that the valve plate 2 is arranged as a whole in the box body 1, and the end cover 13, the front half box body 11, and the rear half box body 12 of the box body 1 are positioned by stoppers, and the box body seal 14 and the end cover seal 15 are sealed, thereby ensuring the sealing performance of the vacuum isolation hatch and providing a reliable vacuum environment for the vacuum pipeline system; and when the valve plate 2 is maintained, it is only necessary to open the end cover 13 and pull the valve plate 2 out from one side of the end cover 13 along the slide groove 18, which is very convenient; 2 is provided with two independent stations, and the valve plate 2 is driven to move back and forth by the second driving mechanism 3, so as to realize the reliable switching of the valve plate sealing station 21 and the valve plate connecting station 22 at the box connecting station 16, and complete the connection and sealing closure with the box connecting station 16; the first driving mechanism is not required to work, and the end face sealing ring 234 is pressed onto the sealing end face 19 only by the spring force provided by the spring 27, so as to realize the normal closure of the vacuum isolation door, which can effectively save the use cost; the protrusion 24 on the valve plate 2 cooperates with the slide groove 18 in the box 1 to form a sliding guide pair, which has safe and reliable guidance, high axial positioning accuracy, and can bear all The axial sealing force of the spring 27 and the differential pressure thrust of the vacuum pipe 01 avoid the problems of small axial bearing capacity and low positioning accuracy of the wheel-type guide device used in the prior art; the first driving mechanism adopts a plurality of the cylinders or hydraulic cylinders 25, which are evenly arranged along the circumference of the sealing door 23, and the sealing force on the end face sealing ring 234 is uniform along the entire circumference, and the sealing is safe and reliable; the distribution circle diameter and configuration quantity of the cylinder or hydraulic cylinder 25 can be set according to the diameter of the vacuum pipe 01 and the needs, and is suitable for large and super-large vacuum pipe systems; the middle part of the sealing door 23 is designed as a grid structure, which firstly enhances the rigidity of the sealing door 23, is not easy to deform, and has a good sealing effect, and secondly The sealing door 23 is connected front to back through the first through hole 231, and the sealing door 23 to the box connecting station 16 can be sealed only by the spring force of the spring 27, which avoids the force generated by the pressure difference on both sides directly acting on the sealing door 23 when the front and back are not connected. It can avoid the increase of the force required for opening and closing the sealing door 23, which requires increasing the spring force provided by the spring 27 and the driving force of the cylinder or hydraulic cylinder 25, and increasing the manufacturing cost, and can also avoid the increase of the force on the end face sealing ring 234 and the sealing door 23 and other components, which requires improving or strengthening their rigidity and strength, and increasing the manufacturing cost. The vacuum isolation cabin door has a simple structure, is easy to use, and has a good effect.

[0114] Example 2

[0115] like Figure 8 and Fig. 9As shown, a bidirectional normally closed vacuum isolation cabin door according to the present invention is different from Example 1 in that, in this embodiment, the sealing structure is respectively provided on both sides of the valve plate sealing station 21, with two sealing doors 23, and the two sealing doors 23 are respectively used to seal the box connecting station 16 of the front half box 11 and the box connecting station 16 of the rear half box 12.

[0116] A vacuum isolation cabin door described in this embodiment respectively seals the two box connecting stations 16 of the box body 1 through two sets of the sealing structures, and has better sealing performance. When a single set of the sealing structures has problems and causes sealing failure, the other set of the sealing structures can still effectively seal and separate the two adjacent vacuum pipes 01, providing a reliable vacuum environment for the vacuum pipeline system; in addition, the spring forces of the springs 27 in the two sets of the sealing structures are opposite, and the spring forces acting on the valve plate 2 can offset each other well, so that the axial thrust of the sliding guide pair composed of the protrusion 24 and the slide groove 18 is greatly reduced or even eliminated. The vacuum isolation cabin door has a simple structure, is easy to use, and has a good effect.

[0117] Example 3

[0118] like Figures 1 to 9 As shown, a method for using a vacuum isolation cabin door according to the present invention uses a vacuum isolation cabin door as described in Example 1 or Example 2, the vacuum pipe 01 on one side of the vacuum isolation cabin door is in a vacuum state, and the vacuum pipe 01 on the other side is in a non-vacuum state, and there is a pressure difference on both sides. The method includes the following steps:

[0119] The action of the air cylinder or hydraulic cylinder 25 overcomes the spring force of the spring 27, and the sealing door 23 is pulled close to the annular tube 211 and away from the sealing end face 19 through the piston rod of the air cylinder or hydraulic cylinder 25 and the pull rod 26. The spring 27 is compressed, and the end face sealing ring 234 is released from contact with the sealing end face 19. The sealing ring slides in the mounting hole until the sealing flange abuts against the end face of the annular tube 211, so that the vacuum pipe 01 on both sides of the vacuum isolation cabin door is released from sealing until the pressure in the vacuum pipe 01 is consistent.

[0120] The driver 32 drives the lead screw 31 to rotate, and the rotation of the lead screw 31 drives the lead screw nut to move linearly from right to left, thereby driving the valve plate 2 to move from right to left along the slide groove 18 in the box body 1. Figure 1 and Figure 2As shown, the valve plate sealing station 21 enters the stop station of the box body 1, and the valve plate connecting station 22 is aligned with the box body connecting station 16, so that the vacuum pipes 01 on both sides of the vacuum isolation cabin door are connected to meet the passage of the maglev train.

[0121] The vacuum pipe connection method described in this embodiment overcomes the spring force of the spring 27 through the action of the air cylinder or hydraulic cylinder 25, so that the spring force of the end face sealing ring 234 pressing against the sealing end face 19 is released, the seal of the vacuum pipe 01 is released, and the internal pressure is consistent. Since the first through hole 231 is provided on the sealing door 23, there is no pressure difference on both sides of the sealing door 23. The pressure difference of the vacuum pipe 01 acts on the valve plate 2 and is then transmitted to the connection between the valve plate 2 and the box body 1, that is, the sliding guide pair. The sliding guide pair is composed of the protrusion 24 and the slide groove 18, and has high axial positioning accuracy. It can well bear the axial thrust and pressure difference thrust of the spring 27; then the valve plate 2 is driven by the driver 32 to slide in the box body 1, so that the valve plate sealing station 21 leaves the box body connection station 16, the valve plate connection station 22 is aligned with the box body connection station 16, and the vacuum pipe 01 is connected. The method has simple steps, convenient operation, few action steps, can respond quickly, and has good effect.

[0122] Example 4

[0123] like Figures 10 to 17 As shown, a one-way normally open vacuum isolation cabin door according to the present invention comprises a box body 1, a valve plate 2, a second driving mechanism 3 and a pipe 4, which is a normally open door.

[0124] like Figures 10 to 12 As shown, the box body 1 includes a front half box body 11, a rear half box body 12 and an end cover 13. The front half box body 11 and the rear half box body 12 are assembled into a right box body through a stopper, a joint surface and bolts. A sealing groove is processed on the joint surface, and a box body seal 14 is installed therein. The left end surface of the right box body is processed with a stopper and a joint surface for positioning with the end cover 13. The right box body and the end cover 13 are connected by bolts. A sealing groove is processed on the joint surface, and an end cover seal 15 is installed therein. The front half box body 11 and the rear half box body 12 are respectively connected with vacuum pipes 01, and the two vacuum pipes 01 are aligned.

[0125] like Figures 10 to 12As shown, the box body 1 is provided with three independent workstations, the middle workstation is the box body connecting workstation 16, the left and right workstations are the stop workstations for accommodating the valve plate 2, the box body connecting workstations 16 are distributed on the front and rear sides of the box body 1, that is, the front half box body 11 and the rear half box body 12 are respectively provided with a box body connecting workstation 16, the box body connecting workstation 16 is a circular tube with the same inner diameter as the vacuum pipe 01, and the two box body connecting workstations 16 are oppositely and coaxially arranged.

[0126] like Fig.15 As shown, both ends of the box connecting station 16 are provided with flanges, the flange facing the outside of the box 1 is sealed and connected to the corresponding vacuum pipe 01, the flange facing the inside of the box 1 is an installation space for the valve plate 2, and the flange surface of the flange facing the inside of the box 1 is a sealing end surface 19, and a limit sensor 191 is provided on the adjacent surface of the sealing end surface 19, and the adjacent surface can be the inner annular surface of the flange or the outer annular surface of the flange.

[0127] like Fig.13 As shown, a box mounting platform 17 is provided at the bottom of the circular tube of the box connecting station 16, and the box mounting platform 17 is used to install the magnetic suspension motor bracket.

[0128] like Fig.10 , Fig.11 , Figures 13 to 16 As shown, the inner top surface and the inner bottom surface of the box body 1 are respectively provided with slide grooves 18 from left to right, that is, the slide grooves 18 are arranged along the length direction of the front half box body 11 and the rear half box body 12, and the slide grooves 18 are U-shaped.

[0129] like Fig.10 and Fig.11 As shown, the valve plate 2 is provided with two independent stations, the left side is the valve plate sealing station 21, and the right side is the valve plate connecting station 22. The valve plate connecting station 22 is a round tube with the same inner diameter as the box connecting station 16. A valve plate mounting platform 29 is provided at the bottom of the round tube of the valve plate connecting station 22. The valve plate mounting platform 29 is used to install the motor bracket. A sealing door 23 is provided at the valve plate sealing station 21. The sealing door 23 on the valve plate 2 and the sealing end face 19 on the box 1 cooperate with each other to form a sealing structure.

[0130] like Fig.15 and Fig.16As shown, the valve plate sealing station 21 is welded by an annular tube 211, a tube end flange 212, an internal web and rib plate, and an external web and rib plate, and is an integral structure with the valve plate 2. The annular tube 211 is provided with a mounting hole for mounting the sealing door 23. The sealing door 23 includes a sealing ring and a sealing flange. The sealing flange is connected to the end of the sealing ring. Preferably, the sealing ring and the sealing flange are integrally formed components. The sealing ring and the sealing flange form a component with an L-shaped cross section. The outer ring surface of the sealing ring is slidably connected to the annular tube In the mounting hole 211, a mounting groove is provided on the outer ring surface of the sealing ring, in which a radial sealing ring 232 and a guide ring 233 are provided. The guide ring 233 is provided on both sides of the radial sealing ring 232. The radial sealing ring 232 is tightly attached to the mounting hole. The guide ring 233 is an easy-to-slide and wear-resistant plate. In this embodiment, a polytetrafluoroethylene plate is used. The radial sealing ring 232 is used to achieve sealing isolation on both sides of the mounting hole. The guide ring 233 is used to support the sealing ring on the mounting hole and protect the radial sealing ring 232.

[0131] like Fig.16 As shown, there is a grid structure inside the sealing ring, and the grid structure enhances the rigidity of the sealing ring, so that the sealing door 23 is not easily deformed and has a good sealing effect, and also saves materials for manufacturing the sealing door 23. At least one first through hole 231 is provided on the grid structure, and the first through hole 231 connects the front and rear sides of the sealing door 23, so that the sealing door 23 is connected front to back, avoiding the force generated by the pressure difference on both sides when the front and back are not connected directly acting on the sealing door 23, resulting in a greatly increased force required for opening and closing the sealing door 23, and an increase in manufacturing cost.

[0132] like Fig.15 and Fig.16 As shown, the sealing flange is located between the mounting hole and the sealing end face 19, and a stepped positioning groove is provided on the side of the sealing flange facing the sealing end face 19, and an end face sealing ring 234 and a sealing pressure ring 235 are provided in the stepped positioning groove, and the inner ring of the end face sealing ring 234 is sleeved on the stepped surface of the stepped positioning groove, and the sealing pressure ring 235 is pressed on the outer ring of the end face sealing ring 234, and the sealing pressure ring 235 is used to ensure that the end face sealing ring 234 can work normally and is not crushed by the sealing end face 19, and the limit sensor 191 is used to detect the proximity of the sealing door 23, and also to prevent the sealing end face 19 and the sealing flange from crushing the end face sealing ring 234.

[0133] like Figures 15 to 17 As shown, the valve plate 2 is provided with a first driving mechanism, which includes a plurality of cylinders or hydraulic cylinders 25, and the cylinders or hydraulic cylinders 25 are evenly arranged along the circumference of the sealing door 23, as shown in FIG. Fig.10 and Fig.11 As shown, in this embodiment, 12 cylinders or hydraulic cylinders 25 are evenly distributed, and a mounting stop is provided on the valve plate 2. The cylinder or hydraulic cylinder 25 is fixedly connected to the valve plate 2 through bolts and the mounting stop. The piston rod end of the cylinder or hydraulic cylinder 25 is processed with a cylindrical hole-shaped stop. The pull rod 26 is a combination of a spline keypad 263 and a rod body 264. A spline groove matching the spline teeth 281 is processed in the spline keypad 263, and a thread matching the locking nut 261 is processed on the left end of the rod body 264. The right end of the spring guide sleeve 28 is processed with the spline teeth 281 uniformly distributed in the radial direction and matching the spline groove of the spline keypad 263, and the front section of the spline teeth 281 is processed with a stepped cylindrical surface. The pull rod 26 penetrates from the inner hole of the right end of the spring guide sleeve 28 and passes out from the left end. The spline teeth 281 pass through the spline groove of the spline keypad 263. The stepped cylindrical surface of the spline teeth 281 is inserted into the cylindrical hole-shaped stopper at the end of the piston rod of the cylinder or hydraulic cylinder 25 and is tightly attached to the end face of the stopper. The pipe end flange 212 and the The sealing flange is provided with a second through hole and a third through hole corresponding to the cylinder or hydraulic cylinder 25. The other end of the spring guide sleeve 28 passes through the second through hole on the corresponding pipe end flange 212 and is tightly attached to the right side of the sealing flange. The other end of the pull rod 26 passes through the third through hole on the corresponding sealing flange and is connected and locked through the outer locking nut 261. The spring 27 is sleeved on the outer cylindrical surface of the spring guide sleeve 28, and one end of the spring 27 is tightly attached to the left side of the spline 263. The other end of the spring 27 is in close contact with the right side of the pipe end flange 212. The spring 27 is installed in a pre-compression manner. Under the pre-compression force of the spring 27, the pull rod 26 pulls the sealing door 23 to move rightward through the spline 263 and the locking nut 261 at the right end of the pull rod 26, so that the sealing door 23 abuts against the left end face of the pipe end flange 212, and pushes the spring guide sleeve 28 to move rightward and abut against the piston rod stop end face of the cylinder or hydraulic cylinder 25, so that the sealing door 23 is in an open state for a long time. When the cylinder or hydraulic cylinder 25 is working, it pushes the spring guide sleeve 28 to move leftward, and the spring guide sleeve 28 pushes the sealing door 23 to approach the sealing end face 19 until it abuts against the sealing end face 19. The end face sealing ring 234 on the sealing door 23 is in close contact with the sealing end face 19 to achieve a sealed partition between the front and rear two connecting stations 16 of the box body 1, so that the sealing door 23 is in a closed state.

[0134] like Fig.10 , Fig.11 , Figures 13 to 16As shown, the top and bottom of the valve plate 2 are respectively provided with protrusions 24, and the protrusions 24 are installed in cooperation with the mounting grooves on the valve plate 2 through fasteners. The convex part of the protrusion 24 has three working surfaces, and each of the working surfaces is provided with a group of slide plates 241. Each group of the slide plates 241 includes a plurality of slide plates 241, and the slide plates 241 are evenly arranged and installed on the protrusions 24 through fasteners. The protrusions 24 are arranged in the slide grooves 18 to form a sliding guide pair. The slide plates 241 fit in the slide grooves 18. Through the cooperation of the protrusions 24 and the slide grooves 18, the valve plate 2 and the box body 1 are slidably connected. The slide plates 241 are wear-resistant and lubricating linings. In this embodiment, self-lubricating wear-resistant linings are used. When maintaining the valve plate 2, it is only necessary to open the end cover 13 and pull the valve plate 2 out from one side of the end cover 13 along the slide groove 18, which is very convenient.

[0135] like Figures 10 to 12 , Fig.14 As shown, the second driving mechanism 3 includes a lead screw 31, a driver 32, a lead screw bearing seat 33, a nut bearing seat 34, and a rotary encoder 35. The driver 32 is located outside the end cover 13 and is sealed and fixed on the box body 1. The driver 32 is connected to one end of the lead screw 31 through a coupling, and the other end of the lead screw 31 is connected to the rotary encoder 35 through a coupling. The lead screw 31 is installed in the box body 1 through two lead screw bearing seats 33. The lead screw 31 extends from the stop station of the box body 1 to the box body connecting station 16. The lead screw bearing seat 33 supports the lead screw 31. The lead screw 31 is threadedly connected with a lead screw nut, and the lead screw nut is connected to the nut bearing seat 34. The nut bearing seat 34 is connected to the valve plate 2, and the driver 32 is a motor. The rotation of the motor drives the lead screw 31 to rotate. The rotation of the lead screw 31 drives the lead screw nut to reciprocate along the lead screw 31 in a straight line, thereby driving the valve plate 2 to slide in the box body 1. The rotary encoder 35 measures the angular displacement or angular velocity of the rotation of the lead screw 31, and controls the moving distance of the lead screw nut in combination with the pitch of the lead screw 31, so as to accurately control the moving distance and accurate positioning of the valve plate 2, so as to realize that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box connecting station 16 respectively, so that the valve plate 2 closes or conducts the vacuum pipe 01.

[0136] In some specific embodiments, the second driving mechanism 3 is a cylinder system, which includes a driving cylinder, a cylinder body of the driving cylinder is hingedly connected to the box body 1, and a telescopic rod of the driving cylinder is hingedly connected to the valve plate 2. The driving cylinder is a servo cylinder or a cylinder with a built-in linear displacement sensor or a cylinder with a built-in pull-wire displacement sensor, etc., which can accurately control the stroke of the cylinder telescopic rod to achieve accurate control of the position of the valve plate 2 in the box body 1; a linear displacement sensor can also be directly arranged between the box body 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; ensuring that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box body connecting station 16 respectively.

[0137] In some specific embodiments, the second driving mechanism 3 is a cylinder system, which includes a driving cylinder, a cylinder body of the driving cylinder is hingedly connected to the box body 1, and a telescopic rod of the driving cylinder is hingedly connected to the valve plate 2. The driving cylinder is a servo cylinder or a cylinder with a built-in linear displacement sensor or a cylinder with a built-in pull-wire displacement sensor, etc., which can accurately control the stroke of the cylinder telescopic rod to achieve accurate control of the position of the valve plate 2 in the box body 1; a linear displacement sensor can also be directly arranged between the box body 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; ensuring that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box body connecting station 16 respectively.

[0138] In some specific embodiments, the second driving mechanism 3 is a pulley system, which includes a driving wheel, a driven wheel and a belt, the belt is connected to the driving wheel and the driven wheel, the driving wheel and the driven wheel are connected to the box body 1, the belt is connected to the valve plate 2, the shaft of the driving wheel is connected to the motor and the rotary encoder through a coupling, and the rotary encoder is used to detect and control the position of the valve plate 2; a linear displacement sensor can also be directly arranged between the box body 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; ensure that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box body connecting station 16 respectively.

[0139] In some specific embodiments, the second driving mechanism 3 is a gear rack system, which includes a gear and a rack meshing therewith, the gear is connected to the housing 1, the rack is connected to the valve plate 2, the shaft of the gear is connected to the motor and the rotary encoder through a coupling, and the rotary encoder is used to detect and control the position of the valve plate 2; a linear displacement sensor can also be directly arranged between the housing 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; and ensure that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the housing connecting station 16 respectively.

[0140] In some specific embodiments, the second driving mechanism 3 is a sprocket chain system, which includes a sprocket and a chain matching therewith, the sprocket is connected to the box body 1, the chain is connected to the valve plate 2, the shaft of the sprocket is connected to the motor and the rotary encoder through a coupling, and the rotary encoder is used to detect and control the position of the valve plate 2; a linear displacement sensor can also be directly arranged between the box body 1 and the valve plate 2 to accurately detect and control the position of the valve plate 2; to ensure that the valve plate connecting station 22 and the valve plate sealing station 21 can be accurately aligned with the box body connecting station 16 respectively.

[0141] like Fig.10 and Fig.14 As shown, the piping 4 includes a circular tube 41 and a hose 42. The circular tube 41 is connected to all the air cylinders or hydraulic cylinders 25 at the same time through a pipe joint. A through-box joint is provided on the box body 1. The through-box joint is connected to the hose 42 inside and to the pipe from the air station or hydraulic station outside. The hose 42 is connected to the circular tube 41.

[0142] The vacuum isolation hatch, such as Fig.10 , Fig.13 and Fig.14 As shown, under normal circumstances, the valve plate connecting station 22 is aligned with the box connecting station 16, and the valve plate sealing station 21 is located at the stop station of the box 1, so that the front and rear vacuum pipes 01 are connected to the valve plate connecting station 22 through the box connecting station 16. The sealing door 23 of the valve plate sealing station 21 is pulled toward the pipe end flange 212 through the pull rod 26 and abuts against the left end face of the pipe end flange 212 under the thrust generated by the pre-compression force of the spring 27. The end face sealing ring 234 is away from the sealing end face 19, and the vacuum isolation door is in a normally open state. When it is necessary to seal and isolate the front and rear vacuum pipes 01, the second driving mechanism 3 drives the valve plate 2 to slide in the box 1, so that the valve plate sealing station 21 moves toward the box connecting station 16 and aligns, as shown in FIG. Fig.11As shown, at the same time, the valve plate connecting station 22 moves to the stop station of the box body 1, so that the front and rear vacuum pipes 01 are separated by the valve plate 2, and then the cylinder or hydraulic cylinder 25 is actuated, and the sealing door 23 is pushed to approach the sealing end face 19 through the piston rod of the cylinder or hydraulic cylinder 25 and the spring guide sleeve 28 until it abuts against the sealing end face 19, and the end face sealing ring 234 is attached to the sealing end face 19, so that the sealing door 23 is in a closed state, and at the same time, the sealing door 23 pushes the spring 27 to be compressed to the left through the flower key 263; whether the sealing door 23 is closed in place can be detected and controlled by the limit sensor 191 to avoid the sealing door 23 and the sealing end face 19 colliding and damaging the end face sealing ring 234. When sealing is not required, the air cylinder or hydraulic cylinder 25 stops working and releases pressure. The sealing door 23 pushes the pull rod 26 to move to the right under the thrust of the compression force released by the spring 27. The locking nut 261 pulls the sealing door 23 to move to the right until it abuts against the left end face of the pipe end flange 212. The sealing door 23 pushes the spring guide sleeve 28 to move to the right. The spring guide sleeve 28 pushes the piston rod of the air cylinder or hydraulic cylinder 25 to move to the right until it returns to the initial position of the piston rod. The sealing door 23 is in a normally open state. At the same time, the second driving mechanism 3 drives the valve plate 2 to slide in the box body 1, so that the valve plate connecting station 22 moves toward the box body connecting station 16 and aligns it, so that the vacuum isolation cabin door is in a normally open state.

[0143] The vacuum isolation hatch described in this embodiment is provided with three independent workstations in the box body 1 and two independent workstations on the valve plate 2, so that the valve plate 2 is arranged as a whole in the box body 1, and the end cover 13, the front half box body 11, and the rear half box body 12 of the box body 1 are positioned by stoppers, and the box body seal 14 and the end cover seal 15 are sealed, so as to ensure the sealing performance of the vacuum isolation hatch and provide a reliable vacuum environment for the vacuum pipeline system; and when the valve plate 2 is maintained, it is only necessary to open the end cover 13 and pull the valve plate 2 out from one side of the end cover 13 along the slide groove 18, which is very convenient; two An independent station, the valve plate 2 is driven to move back and forth by the second driving mechanism 3, so as to realize the reliable switching of the valve plate sealing station 21 and the valve plate connecting station 22 at the box connecting station, and complete the connection and sealing closure with the box connecting station 16; the first driving mechanism is not required to work, and the sealing door 23 is attached to the valve plate 2 only by the spring pre-compression force provided by the spring 27, so as to realize the normal opening of the vacuum isolation cabin door, which can effectively save the use cost; the protrusion 24 on the valve plate 2 cooperates with the slide groove 18 in the box 1 to form a sliding guide pair, which has safe and reliable guidance, high axial positioning accuracy, and bears the axial sealing force of the second driving mechanism and the vacuum The pressure difference thrust of the vacuum pipe 01 avoids the problems of small axial bearing capacity and low positioning accuracy of the wheel guide device used in the prior art; the first driving mechanism adopts multiple cylinders or hydraulic cylinders 25, which are evenly arranged along the circumference of the sealing door 23, and the sealing force on the end face sealing ring 234 is uniform along the entire circumference, and the sealing is safe and reliable; the distribution circle diameter and configuration quantity of the cylinder or hydraulic cylinder 25 can be set according to the diameter of the vacuum pipe 01 and the needs, and is suitable for large and super-large vacuum pipe systems; the middle part of the sealing door 23 is designed as a grid structure, which firstly enhances the rigidity of the sealing door 23, is not easy to deform, and has a good sealing effect, and secondly, the sealing door 23 is penetrated front and back through the first through hole 231 The sealing of the sealing door 23 to the box connecting station 16 can be achieved only by the driving force of the smaller air cylinder or hydraulic cylinder 25, which avoids the force generated by the pressure difference on both sides when the front and back are not connected directly to the sealing door 23, and can avoid the increase of the force required for opening and closing the sealing door 23. It is necessary to increase the spring pre-compression force provided by the spring 27 to open the sealing door 23 and the driving force of the cylinder or hydraulic cylinder 25 to close the sealing door 23, which increases the manufacturing cost. It can also avoid the increase of force on components such as the end face sealing ring 234 and the sealing door 23, which requires to improve or strengthen their stiffness and strength, and increase the manufacturing cost. The vacuum isolation cabin door has a simple structure, is easy to use, and has a good effect.

[0144] Example 5

[0145] like Figures 18 to 20 As shown, a bidirectional normally open vacuum isolation cabin door according to the present invention is different from Example 4 in that, in this embodiment, two sets of the sealing structures are provided on the sealing station 21 of the valve plate 2, and the two sealing doors 23 are respectively located on both sides of the valve plate sealing station 21, and the two sealing doors 23 are respectively used to seal the box connecting station 16 of the front half box 11 and the box connecting station 16 of the rear half box 12.

[0146] A vacuum isolation cabin door described in this embodiment, when it needs to be closed, is sealed separately on the two box connecting stations 16 of the box body 1 through two sets of the sealing structures, and has better sealing performance. When a single set of the sealing structures has problems and causes sealing failure, the other set of the sealing structures can still effectively seal and separate the two adjacent vacuum pipes 01, providing a reliable vacuum environment for the vacuum pipeline system; in addition, the driving forces of the second driving mechanisms in the two sets of the sealing structures are opposite, and the driving reaction forces acting on the valve plate 2 can offset each other well, so that the axial thrust of the sliding guide pair composed of the protrusion 24 and the slide groove 18 is greatly reduced or even eliminated. The vacuum isolation cabin door has a simple structure, is easy to use, and has a good effect.

[0147] Example 6

[0148] like Figures 10 to 20 As shown, a method for using a vacuum isolation cabin door according to the present invention uses a vacuum isolation cabin door as described in Example 4 or Example 5, and the two vacuum pipes 01 on both sides of the vacuum isolation cabin door are both in a vacuum state or in a non-vacuum state, and there is no pressure difference on both sides. The method includes the following steps:

[0149] The driver 32 drives the lead screw 31 to rotate, and the rotation of the lead screw 31 drives the lead screw nut to move linearly from left to right, thereby driving the valve plate 2 to move from left to right along the slide groove 18 in the box body 1. Fig.10 and Fig.11 As shown, the valve plate connecting station 22 enters the stop station of the box body 1, and the valve plate sealing station 21 is aligned with the box body connecting station 16, so that the vacuum pipe 01 on both sides of the vacuum isolation door is isolated by the valve plate 2;

[0150] The action of the air cylinder or hydraulic cylinder 25 overcomes the pre-compression force of the spring 27, and pushes the sealing door 23 outward close to the box sealing end face 19 and away from the pipe end flange 212 through the piston rod of the air cylinder or hydraulic cylinder 25, the spring guide sleeve 28 and the pull rod 26. The spring 27 is compressed, and the end face sealing ring 234 is tightly attached to the sealing end face 19. The sealing ring slides in the mounting hole of the pipe end flange 212 until the sealing flange triggers the limit sensor 191, so that the vacuum pipes 01 on both sides of the vacuum isolation cabin door are sealed and isolated, and the two vacuum pipes 01 can be pressure-regulated separately.

[0151] In the present embodiment, a vacuum pipeline closing method is described, wherein the driver 32 drives the valve plate 2 to slide in the box body 1, so that the valve plate sealing station 21 is aligned with the box body connecting station 16, the valve plate connecting station 22 leaves the box body connecting station 16, and the vacuum pipeline 01 is cut off; then, the cylinder or hydraulic cylinder 25 is actuated to overcome the pre-compression force of the spring 27, and the end face sealing ring 234 is pressed against the sealing end face 19 by the driving force of the cylinder or hydraulic cylinder 25, and the vacuum pipeline 01 is sealed. Sealed and isolated, since the sealing door 23 is provided with the first through hole 231, there is no pressure difference on both sides of the sealing door 23, and the pressure difference of the vacuum pipe 01 acts on the valve plate 2, and is then transmitted to the connection between the valve plate 2 and the box body 1, that is, the sliding guide pair. The sliding guide pair is composed of the protrusion 24 and the slide groove 18, and has high axial positioning accuracy. It can well bear the axial thrust and pressure difference thrust of the cylinder or hydraulic cylinder 25. The method has simple steps, convenient operation, few action steps, can respond quickly, and has good effect.

[0152] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum isolation cabin door, comprising a valve plate (2) and a sealing door (23) arranged thereon, characterized in that: The sealing door (23) comprises a sealing ring and a sealing flange, wherein the sealing flange is connected to the end of the sealing ring, a radial sealing ring (232) and a guide ring (233) are provided on the outer ring surface of the sealing ring, a mounting hole is provided on the valve plate (2), the outer ring surface of the sealing ring is slidably connected to the mounting hole, the radial sealing ring (232) is tightly attached to the mounting hole, a first driving mechanism is provided on the valve plate (2), the first driving mechanism comprises a plurality of cylinders or hydraulic cylinders (25), the cylinders or hydraulic cylinders (25) are evenly arranged along the circumference of the sealing door (23), the cylinder body of the cylinder or hydraulic cylinder (25) is connected to the valve plate (2), the piston rod end of the cylinder or hydraulic cylinder (25) is provided with a groove body, and a pull rod ( 26), the pull rod (26) is hinged to the piston rod end of the cylinder or hydraulic cylinder (25), the pull rod (26) is connected to the sealing flange, the pull rod (26) is outer-circuited with a spring (27), an end face sealing ring (234) is provided on the sealing flange, the end face sealing ring (234) is used to fit the sealing end face (19), the spring (27) is pre-compressed and installed, the two ends of the spring (27) act on the sealing flange and the end face of the cylinder body of the cylinder or hydraulic cylinder (25) respectively, the end face sealing ring (234) is pressed against the sealing end face (19) by the spring force of the spring (27), and the first driving mechanism can drive the sealing door (23) to compress the spring (27) and move away from the sealing end face (19).

2. The vacuum isolation door according to claim 1, characterized in that: The pull rod (26) is outer-connected with a spring guide sleeve (28), and the spring (27) is sleeved outside the spring guide sleeve (28).

3. The vacuum isolation door according to claim 1, characterized in that: It also includes a piping (4), the piping (4) including a circular pipe (41) and a hose (42), the circular pipe (41) is connected to all the air cylinders or hydraulic cylinders (25) at the same time, the hose (42) is connected to the circular pipe (41), and the hose (42) is connected to the air station or hydraulic station.

4. The vacuum isolation door according to claim 1, characterized in that: The sealing flange on which the end face sealing ring (234) is arranged is provided with a stepped positioning groove, and the end face sealing ring (234) is arranged in the stepped positioning groove.

5. The vacuum isolation door according to claim 4, characterized in that: The inner ring of the end face sealing ring (234) is sleeved on the step surface of the step positioning groove, and the outer ring of the end face sealing ring (234) is matched with a sealing pressure ring (235).

6. The vacuum isolation door according to claim 1, characterized in that: A limit sensor (191) is provided on the adjacent surface of the sealing end surface (19), and the limit sensor (191) is a proximity switch, a limit switch or other position detection sensor.

7. The vacuum isolation door according to claim 1, characterized in that: At least one first through hole (231) is provided on the sealing door (23), and the first through hole (231) is connected to two sides of the sealing door (23).

8. The vacuum isolation door according to claim 7, characterized in that: The sealing ring is internally connected to a grid structure, and the first through hole (231) is arranged on the grid structure.

9. The vacuum isolation door according to claim 1, characterized in that: The guide rings (233) are arranged on both sides of the radial sealing ring (232).

10. The vacuum isolation door according to claim 1, characterized in that: The guide ring (233) is a slip-resistant and wear-resistant plate.

11. The vacuum isolation door according to claim 10, characterized in that: The guide ring (233) is a polytetrafluoroethylene plate.

12. The vacuum isolation door according to claim 1, characterized in that: The sealing ring and the sealing flange form a component with an L-shaped cross section.

13. The vacuum isolation door according to claim 12, characterized in that: An installation groove is provided on the outer ring surface of the sealing ring, and the radial sealing ring (232) and the guide ring (233) are arranged in the installation groove.

14. The vacuum isolation door according to claim 13, characterized in that: The sealing ring and the sealing flange are integrally formed components.

15. The vacuum isolation door according to any one of claims 1 to 14, characterized in that: It also includes a box body (1), the box body (1) is provided with end face flanges on both sides, which are respectively sealed and connected to the vacuum pipes (01), the two vacuum pipes (01) are coaxially arranged, the top and bottom of the valve plate (2) are respectively provided with protrusions (24), the box body (1) is provided with a slide groove (18), the protrusion (24) is arranged in the slide groove (18), and cooperates to form a sliding guide pair, the plate surface of the valve plate (2) can move to or away from between the two vacuum pipes (01), the sealing end face (19) is provided in the box body (1), and the sealing end face (19) is connected to the end face of the vacuum pipe (01) through the box body connecting station (16).

16. The vacuum isolation hatch according to claim 15, characterized in that: The convex portion of the convex block (24) has three working surfaces, each of which is provided with a group of slide plates (241), each group of slide plates (241) includes a plurality of slide plates, and the slide plates (241) are fitted in the slide groove (18).

17. The vacuum isolation door according to claim 15, characterized in that: It also comprises a second driving mechanism (3), wherein the second driving mechanism (3) drives the valve plate (2) to slide in the box body (1).

18. The vacuum isolation door according to claim 17, characterized in that: The second driving mechanism (3) is a screw system, an oil cylinder system, an air cylinder system, a pulley system, a gear rack system or a sprocket chain system, wherein the fixed parts of the screw system, the oil cylinder system, the air cylinder system, the pulley system, the gear rack system or the sprocket chain system are connected to the box body (1), and the moving parts of the screw system, the oil cylinder system, the air cylinder system, the pulley system, the gear rack system or the sprocket chain system are connected to the valve plate (2).

19. The vacuum isolation door according to claim 18, characterized in that: The screw system comprises a screw (31) and a driver (32), wherein the driver (32) is located outside the housing (1) and is sealed and fixed on the housing (1), the screw (31) is connected to the housing (1), the driver (32) is connected to one end of the screw (31) and can drive the screw (31) to rotate, the screw (31) is threadedly connected to a screw nut, the screw nut is connected to the valve plate (2), and the screw (31) is arranged along the sliding direction of the valve plate (2).

20. The vacuum isolation door according to claim 19, characterized in that: The screw system further comprises a rotary encoder (35), wherein the rotary encoder (35) is connected inside the housing (1), and the rotary encoder (35) is connected to the other end of the screw (31).

21. The vacuum isolation door according to claim 15, characterized in that: The box body (1) comprises a front box body (11), a rear box body (12) and an end cover (13); the front box body (11) and the rear box body (12) are sealed and connected, and a box body seal (14) is provided on the joint surface; the same end of the front box body (11) and the rear box body (12) is sealed and connected to the end cover (13), and an end cover seal (15) is provided on the joint surface; the box body seal (14) and the end cover seal (15) are strip seals or plate seals.

22. The vacuum isolation door according to claim 15, characterized in that: The box body (1) is provided with three independent workstations in sequence, the workstation in the middle is a box body connecting workstation (16) connected to the vacuum pipe (01), and both sides of the box body connecting workstation (16) are respectively stay workstations for accommodating the valve plate (2). The box body connecting workstation (16) is distributed on the front and rear sides of the box body (1) and is coaxially arranged. The box body connecting workstation (16) is a circular tube with the same inner diameter as the vacuum pipe (01), and the sealing end surface (19) is arranged on the side of the box body connecting workstation (16) facing the valve plate (2).

23. The vacuum isolation door according to claim 22, characterized in that: The valve plate (2) is provided with two independent workstations in sequence, one being a valve plate sealing workstation (21) and the other being a valve plate connecting workstation (22). The valve plate connecting workstation (22) is a round tube having the same inner diameter as the box connecting workstation (16). The valve plate sealing workstation (21) is provided with the sealing door (23).

24. A vacuum isolation cabin door, comprising a valve plate (2) and a sealing door (23) arranged thereon, characterized in that: The sealing door (23) comprises a sealing ring and a sealing flange, wherein the sealing flange is connected to the end of the sealing ring, and a radial sealing ring (232) and a guide ring (233) are provided on the outer ring surface of the sealing ring. A mounting hole and a pipe end flange (212) are provided on the valve plate (2), and the outer ring surface of the sealing ring is slidably connected to the mounting hole, and the radial sealing ring (232) is tightly attached to the mounting hole. A first driving mechanism is provided on the valve plate (2), and the first driving mechanism comprises a plurality of cylinders or hydraulic cylinders (25), and the cylinders or hydraulic cylinders (25) are arranged along the periphery of the sealing door (23). The cylinder or hydraulic cylinder (25) is evenly arranged in a direction, the cylinder body of the air cylinder or hydraulic cylinder (25) is connected to the valve plate (2), the sealing flange is provided with an end face sealing ring (234) and a pull rod (26), the end face sealing ring (234) and the sealing end face (19) form a sealing structure, the pull rod (26) includes a flower keypad (263) and a rod body (264), the flower keypad (263) and the rod body (264) form an integrated structure, the rod body (264) is outer-circuited with a spring guide sleeve (28), the spring guide sleeve (28) is outer-circuited with a spring (27), the flower keypad (263) is provided with a spring sleeve (28) and a spring sleeve (27) connected to the spring guide sleeve (28), and the flower keypad (263) is provided with a spring sleeve (28) and a spring sleeve (27) connected to the spring guide sleeve (28). A spline groove matching the spring guide sleeve (28), one end of the spring guide sleeve (28) is provided with a spline tooth (281) matching the spline groove of the spline keypad (263), the spline tooth (281) passes through the spline groove of the spline keypad (263) and abuts against the piston rod end of the cylinder or hydraulic cylinder (25) and is matched and connected with the piston rod end, the other end of the spring guide sleeve (28) passes through and is slidably connected to the pipe end flange (212) and abuts against the sealing door (23), one end of the spring (27) abuts against the pipe end flange (212), and the other end abuts against the spline keypad ( 263), the spring (27) is pre-compressed and installed, and the two ends of the spring (27) act on the end faces of the pipe end flange (212) and the pull rod spline (263) respectively. Under the action of the spring force of the spring (27), the sealing door (23) pushes the pull rod (26) to pull the sealing door (23) toward the pipe end flange (212) and away from the sealing end face (19), forming a normally open structure. The piston rod of the cylinder or hydraulic cylinder (25) can push the spring guide sleeve (28) to move axially and push the sealing door (23) toward the sealing end face (19).

25. A two-way sealed vacuum isolation door, characterized in that: It comprises a vacuum isolation cabin door as described in any one of claims 1 to 24, wherein a sealing door (23) is coaxially arranged on both sides of the valve plate sealing station (21), and the two sealing doors (23) are respectively used to seal the corresponding vacuum pipes (01).

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