Ultra-precision Geometric Error Measuring Instrument with Dynamic Abbe Principle Compliance

Abstract

The present invention relates to an ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle, belonging to the technical field of precision measuring equipment; it includes a main machine base and vertical support columns, and shaft seats are arranged at the tops of the two vertical support columns; a moving mechanism is arranged on the upper side of the main machine base, and the sample fixing seat moves along with the moving mechanism. Mutually perpendicular laser reflectors are vertically arranged on the upper side surface of the sample fixing seat; a vertical shaft is slidably arranged in the vertical direction on the shaft seat, a hanging frame is installed at the lower end of the vertical shaft, and a probe and a laser interferometer are arranged at the lower end of the hanging frame. By adopting the above scheme, it can adapt to and meet the micro-nano level precision measurement of the dimensions and geometric errors of parts with complex shapes.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision measurement equipment, and particularly relates to an ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle. Background Art

[0002] In recent years, the progress of microelectronics technology has triggered a miniaturization revolution in many fields. Micro / nano technology aimed at microfabrication, nanostructures, and systems has emerged accordingly, and various micro / nano-scale micro-devices have appeared, such as MEMS products like microgears, microholes, micro-nozzles, and micro-steps.

[0003] When traditional coordinate measuring machines face the measurement scenarios of micro / nano-devices with geometric dimensions between dozens of micrometers and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, the measurement accuracy and measured dimensions cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolutions in the nanometer and picometer ranges have small measurement ranges and short probes, and cannot meet the three-dimensional measurement requirements of micro / nano-scale devices. Therefore, there is an urgent need in the existing industrial and academic fields for a measurement device that can measure the dimensions and geometric errors of three-dimensional devices and has a resolution in the micro / nano range to reliably evaluate the shape-complex micro / nano-scale micro-devices.

[0004] The invention patent "Small Micro / Nano-scale Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro / nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component, and a probe to design a small micro / nano-scale coordinate measuring machine. This micro / nano coordinate measuring machine has a relatively low cost, but it cannot measure the dimensions and geometric errors of parts with complex shapes. Summary of the Invention

[0005] Aiming at the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle, which can not only adapt to and meet the micro / nano-scale precision measurement of the dimensions and geometric errors of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed, and high efficiency.

[0006] To achieve the above-mentioned invention purpose, a technical solution provided by the present invention is as follows: An ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle, including a main base, vertical support columns are spaced and arranged on the upper side of the main base, and a shaft seat is provided at the top of the two vertical support columns;

[0007] Longitudinal guide rails are symmetrically arranged on the upper side of the main base and between the two vertical support columns, a longitudinal moving axis that can reciprocate longitudinally is installed on the longitudinal guide rails, and a transverse air bearing sleeve that can reciprocate transversely is sleeved on the longitudinal moving axis;

[0008] Above the horizontal air-bearing sleeve, there is a sample fixing seat, and the sample fixing seat is installed on the upper end face of the horizontal air-bearing sleeve. The left end and the right end of the sample fixing seat are respectively fixed with a first laser mirror and a second laser mirror by a mirror support frame. A longitudinal laser mirror is fixed at the rear of the sample fixing seat. The laser reflection surfaces of the first laser mirror, the second laser mirror and the longitudinal laser mirror are perpendicular to each other in space. On the upper end face of the sample fixing seat and between the two mirror support frames and the longitudinal laser mirror, there is a rotating shaft.

[0009] On the shaft seat, a vertical moving mechanism is slidably arranged in the vertical direction. The vertical moving mechanism includes a vertical shaft, a vertical shaft nano-motor, a buffer cylinder, a cylinder fixing block, a vertical connection hole, an installation groove and a fixing groove. On the shaft seat, there is a vertical shaft nano-motor for controlling the vertical movement of the vertical shaft, and a buffer cylinder is arranged to compensate the gravity of the vertical shaft.

[0010] The shaft seat is provided with a through vertical connection hole in the vertical direction. An installation groove is arranged on the inner wall of the vertical connection hole. The driving mechanism includes a vertical shaft nano-motor fixed in the installation groove. The output shaft of the vertical shaft nano-motor moves in a straight line and can drive the vertical shaft to slide in the vertical direction.

[0011] On both vertical sides of the vertical shaft, fixing grooves are respectively arranged at one end close to the probe. The buffer cylinder is fixedly installed on the inner wall of the vertical connection hole by a cylinder fixing block, and the telescopic end of the buffer cylinder is connected to the inner wall of the fixing groove. The probe is connected to the lower end face of the vertical shaft by a hanging bracket.

[0012] On the hanging bracket, a second laser interferometer, a first laser interferometer and a longitudinal laser interferometer are fixedly installed. The laser beams emitted by the first laser interferometer, the second laser interferometer and the longitudinal laser interferometer are respectively perpendicular to the first laser mirror, the second laser mirror and the longitudinal laser mirror in turn, and the ranging beams in the laser beams they emit orthogonally converge at the center of the probe tip.

[0013] Preferably, the laser beams emitted by the first laser interferometer, the second laser interferometer and the longitudinal laser interferometer include multiple laser beams.

[0014] Preferably, the first laser mirror, the second laser mirror and the longitudinal laser mirror are made of microcrystalline glass.

[0015] Preferably, the horizontal air-bearing sleeve drives the sample fixing seat to move longitudinally and horizontally, and the vertical shaft nano-motor controls the vertical movement of the vertical shaft to drive the probe.

[0016] The longitudinal laser interferometer obtains a displacement of x″ and a yaw angle of r y, obtain the pitch angle as r z ;

[0017] The first laser interferometer obtains the displacement as y″ and the rotation angle r x ;

[0018] The second laser interferometer obtains the vertical axis displacement as z″;

[0019] Calculate the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula;

[0020] The compensation formula is:

[0021]

[0022] Preferably, in the instrument coordinate system, when measuring the workpiece to be measured, the lateral air bearing sleeve drives the sample fixing seat to move longitudinally and laterally, and the vertical axis nano motor controls the vertical axis to move the probe in the vertical direction; obtain the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N;

[0023] The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N need to be converted to the standard coordinate system through the conversion formula to obtain the coordinates (a i , b i , c i ), i = 1,..., N

[0024] The conversion formula is:

[0025] where: θ = 135°

[0026] The rotating shaft drives the workpiece to be measured to rotate by an angle Rotation angle After that, the lateral air bearing sleeve drives the sample fixing seat to move longitudinally and laterally, and the vertical axis nano motor controls the vertical axis to move the probe in the vertical direction; obtain the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected in the instrument coordinate system, j = N + 1,..., N + K, where N and K are integers;

[0027] The surface coordinates (a2 j , b2 j , c2 j) are converted into the standard coordinate system through a conversion formula to obtain coordinates (a j , b j , c j ); where the conversion formula is:

[0028]

[0029] The coordinates (a j , b j , c j ) of a number of position points to be detected and the coordinate values (a i , b i , c i ) of a number of position points to be detected are combined to obtain a set of surface coordinate sets (a i , b i , c i ) of the workpiece to be measured, where i = 1,..., N + K.

[0030] The present invention provides a super-precision geometric error measuring instrument that dynamically conforms to the Abbe principle.

[0031] Through the provided moving mechanism and vertical axis, during its movement, the sample fixing seat, the first laser mirror, the second laser mirror, the longitudinal laser mirror, the second laser interferometer, the first laser interferometer, and the longitudinal laser interferometer can be driven to move respectively. The first laser mirror, the second laser mirror, and the longitudinal laser mirror are orthogonally arranged in space; a hanging bracket is installed at the lower end of the vertical axis, a probe is installed at the lower end of the hanging bracket, the second laser interferometer, the first laser interferometer, and the longitudinal laser interferometer are installed on the hanging bracket, the laser rays generated by the second laser interferometer, the first laser interferometer, and the longitudinal laser interferometer are perpendicular to the first laser mirror, the second laser mirror, and the longitudinal laser mirror respectively, and the ranging laser beams in the laser rays converge at the center of the probe sphere. Thus, a super-precision geometric error measuring instrument that dynamically conforms to the Abbe principle is formed.

[0032] Specifically, the technical innovation and good effects of the present invention are as follows:

[0033] 1) In the measuring structure proposed by the present invention, the probe displacement measurement and the probe touch point are on the same straight line, and this structure eliminates the first-order measurement error and realizes high measurement accuracy.

[0034] 2) When measuring the workpiece to be measured, the laser interferometer and the probe are relatively stationary, and the instrument dynamically conforms to the Abbe principle. This design effectively improves the measurement stability and repeatability, and greatly reduces the measurement uncertainty of the instrument.

[0035] 3) The present invention uses a laser interferometer to detect the relative displacement and relative rotation between the probe and the workpiece to be measured in real time, and compensates for the displacement error in real time, enabling ultra-high-precision measurement of the geometric and dimensional errors of the surface of the workpiece to be measured.

[0036] The present invention dynamically conforms to the Abbe principle in the X, Y, and Z measurement directions, with high measurement accuracy. It uses a laser interferometer to measure displacement and obtains sub-nanometer measurement accuracy in the XYZ three-axis directions. Its accuracy is much higher than that of traditional dimensional and geometric error measurement instruments, and it has the characteristics of a unique, reasonable structure, strong applicability, wide application range, high measurement accuracy, high speed, and good repeatability. Description of the Drawings

[0037] Figure 1 is a schematic structural diagram of the ultra-precision geometric error measuring instrument of the present invention that dynamically conforms to the Abbe principle;

[0038] Figure 2 is Figure 1 a schematic assembly structure diagram of the probe and the laser interferometer of the ultra-precision geometric error measuring instrument of the present invention that dynamically conforms to the Abbe principle;

[0039] Figure 3 is Figure 1 a schematic assembly structure diagram of the longitudinal and transverse movement mechanisms and the mirror of the ultra-precision geometric error measuring instrument of the present invention that dynamically conforms to the Abbe principle;

[0040] Figure 4 is a schematic diagram of the ultra-precision geometric error measuring instrument of the present invention that dynamically conforms to the Abbe principle, highlighting the vertical axis drive mechanism;

[0041] Description of the reference numerals in the drawings: 1-1, axle seat; 1-2, vertical support column; 1-3, main frame base; 2-1, hanging bracket; 2-2, probe; 2-3, second laser interferometer; 2-4, first laser interferometer; 2-5, longitudinal laser interferometer; 3-1, second laser mirror; 3-2, first laser mirror; 3-3, longitudinal laser mirror; 3-4, longitudinal movement axis; 3-5, transverse air bearing sleeve; 3-6, longitudinal guide rail; 3-7, rotating shaft; 3-8, mirror support frame; 3-9, sample fixing seat; 4, vertical movement mechanism; 4-1, vertical axis; 4-2, vertical axis nano-motor; 4-3, buffer cylinder; 4-4, cylinder fixing block; 4-5, vertical connection hole; 4-6, installation groove; 4-7, fixing groove; Detailed Embodiments

[0042] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts fall within the scope of protection of the present invention.

[0043] Embodiment

[0044] The present invention provides an ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle. Refer to Figures 1-4 , including a main base 1-3. Vertical support columns 1-2 are arranged at intervals on the upper side of the main base 1-3. A shaft seat 1-1 is provided at the top of the two vertical support columns 1-2;

[0045] Longitudinal guide rails 3-6 are symmetrically arranged on the upper side of the main base 1-3 and between the two vertical support columns 1-2. A longitudinally reciprocating movable longitudinal motion shaft 3-4 is installed on the longitudinal guide rails 3-6. A laterally air-bearing bushing 3-5 that can reciprocate laterally is sleeved on the longitudinal motion shaft 3-4;

[0046] Above the laterally air-bearing bushing 3-5 is a sample fixing seat 3-9. The sample fixing seat 3-9 is installed on the upper end face of the laterally air-bearing bushing 3-5. A first laser reflector 3-2 and a second laser reflector 3-1 are fixedly installed on the left and right end parts of the sample fixing seat 3-9 respectively using reflector support frames 3-8. A longitudinal laser reflector 3-3 is fixedly installed on the rear side of the sample fixing seat 3-9. The laser reflecting surfaces of the first laser reflector 3-2, the second laser reflector 3-1 and the longitudinal laser reflector 3-3 are perpendicular to each other in space; on the upper end face of the sample fixing seat 3-9 and between the two reflector support frames 3-8 and the longitudinal laser reflector 3-3 is a rotary shaft 3-7;

[0047] A vertical moving mechanism 4 is slidably arranged on the shaft seat 1-1 in the vertical direction; the vertical moving mechanism 4 includes a vertical shaft 4-1, a vertical shaft nano-motor 4-2, a buffer cylinder 4-3, a cylinder fixing block 4-4, a vertical connection hole 4-5, an installation groove 4-6, and a fixing groove 4-7; a vertical shaft nano-motor 4-2 for controlling the vertical movement of the vertical shaft 4-1 is provided on the shaft seat 1-1, and a buffer cylinder 4-3 is provided to compensate for the gravity of the vertical shaft 4-1;

[0048] The shaft seat 1-1 is provided with a through vertical connection hole 4-5 in the vertical direction; an installation groove 4-6 is provided on the inner wall of the vertical connection hole 4-5; the driving mechanism 700 includes a vertical shaft nano-motor 4-2 fixed in the installation groove 4-6, and the output shaft of the vertical shaft nano-motor 4-2 moves linearly and can drive the vertical shaft 4-1 to slide in the vertical direction.

[0049] On both vertical sides of the vertical shaft 4-1, fixing grooves 4-7 are respectively provided at one end close to the probe 2-2. The buffer cylinder 4-3 is fixedly installed on the inner wall of the vertical connection hole 750 by a cylinder fixing block 740, and the telescopic end of the buffer cylinder 4-3 is connected to the inner wall of the fixing groove 4-7; the probe 2-2 is connected to the lower end surface of the vertical shaft 4-1 by a hanging bracket 2-1.

[0050] A second laser interferometer 2-3, a first laser interferometer 2-4, and a longitudinal laser interferometer 2-5 are fixedly installed on the hanging bracket 2-1. The laser light rays emitted by the first laser interferometer 2-4, the second laser interferometer 2-3, and the longitudinal laser interferometer 2-5 are respectively perpendicular to the first laser reflector 2-2, the second laser reflector 2-3, and the longitudinal laser reflector 2-1 in sequence, and the ranging light beams in the laser light rays they emit orthogonally converge at the probe tip center of the probe 2-2.

[0051] Further, the laser light rays emitted by the first laser interferometer 2-4, the second laser interferometer 2-3, and the longitudinal laser interferometer 2-5 include multiple laser beams.

[0052] Further, the first laser reflector 2-2, the second laser reflector 2-3, and the longitudinal laser reflector 2-1 are made of microcrystalline glass.

[0053] Among them, the vertical shaft nano-motor 720 mentioned above is a prior art, which can be the linear motor in the paper "A Biped-Driven Piezoelectric Linear Motor", or other driving motors that can achieve linear movement, and is not limited here.

[0054] When the test piece fitted on the rotating shaft 560 moves horizontally or vertically, or when the vertical shaft moves vertically, three angular errors will be generated, namely the pitch angle, the yaw angle, and the rotation angle. The pitch angle refers to the angle value r generated by the sample fixing seat around the axis perpendicular to the first laser reflector. y The rotation angle refers to the angle value r generated by the sample fixing seat around the axis perpendicular to the longitudinal laser reflector. x The yaw angle refers to the angle value r generated by the sample fixing seat around the axis perpendicular to the second laser reflector. z Among them, during the measurement process of the instrument, it is necessary to compensate for the measurement errors of the three-axis displacement caused by the pitch angle, the yaw angle, and the rotation angle.

[0055] The compensation process is as follows. The lateral air-bearing sleeve 3-5 drives the sample fixing seat 3-9 to move longitudinally and laterally, and the vertical-axis nano motor 4-2 controls the vertical-axis 4-1 to move the probe 2-2 in the vertical direction; the longitudinal laser interferometer 2-5 obtains a displacement of x″ and a yaw angle of r y , and obtains a pitch angle of r z ; the first laser interferometer 2-4 obtains a displacement of y″ and a rotation angle of r x ; the second laser interferometer 2-3 obtains a vertical-axis displacement of z″ by; calculates the compensated lateral-axis displacement x′, longitudinal-axis displacement y′, and vertical-axis displacement z′ of the measured sample according to the compensation formula; the compensation formula is:

[0056]

[0057] Further, when measuring the workpiece to be measured, in the instrument coordinate system, the lateral air-bearing sleeve 3-5 drives the sample fixing seat 3-9 to move longitudinally and laterally, and the vertical-axis nano motor 4-2 controls the vertical-axis 4-1 to move the probe 2-2 in the vertical direction; when the probe 2-2 contacts the workpiece to be measured, after the feedback of the probe 2-2 reaches the set threshold, this contact position is the position point to be detected.

[0058] In the instrument coordinate system, when the probe 2-2 and the workpiece to be measured move relative to each other, the probe 2-2 and the workpiece to be measured are continuously moved into contact. When the probe 2-2 contacts the workpiece to be measured, this contact position is set as the i-th position point to be detected. According to the displacement values compensated by the first laser interferometer 1-3, the second laser interferometer 1-4, and the longitudinal laser interferometer 1-5, in the instrument coordinate system, the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected are obtained, where i = 1,..., N; the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1,..., N need to be converted to the standard coordinate system through transformation formula 1 to obtain the coordinates (a i , b i , c i ), where i = 1,..., N

[0059] The transformation formula 1 is:

[0060] In this embodiment, θ = -45°

[0061] If the rotary shaft 3-7 is used for cooperative measurement, the rotary shaft 3-7 drives the workpiece to be measured to rotate by an angle Rotation angle After that, the horizontal air floating bushing 3-5 drives the sample fixing seat 3-9 to move longitudinally and horizontally, and the vertical axis nano-motor 4-2 controls the vertical movement of the vertical axis 4-1 to move the probe 2-2; the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers;

[0062] Since the rotating shaft 3-7 drives the workpiece under test to rotate, when the probe 2-2 contacts the workpiece to be measured before rotation, this contact position is set as the i-th position point to be detected, and a set of coordinate values (a i , b i , c i ) are obtained, where i = 1,..., N; after rotation, when the probe 2-2 contacts the workpiece to be measured, this contact position is set as the j-th position point to be detected, and this set of new coordinate values (a2 j , b2 j , c2 j ) are obtained. The coordinate system where j = N + 1,…, N + K has also changed. It is necessary to process this set of new coordinate values (a2 j , b2 j , c2 j ), where j = N + 1,…, N + K through the conversion formula 2, and convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system to obtain the coordinates (a j , b j , c j ); among them, the conversion formula 2 is:

[0063]

[0064] Combining the coordinates (a j , b j , c j ) of several position points to be detected and the coordinate values (a i , b i , c i ) of several position points to be detected, a set of surface coordinate sets (a i , b i , c i ) of the workpiece under test are obtained, where i = 1,..., N + K.

[0065] If the rotary shaft 3-7 is not used, the displacements are measured according to the first laser interferometer 2-4, the second laser interferometer 2-3 and the longitudinal laser interferometer 2-5. After the probe determines a qualified contact once, based on the displacements measured by each laser interferometer, through error compensation and data processing, the coordinate of a measurement point on the surface of the workpiece to be measured can be obtained. By processing the coordinates of several measurement points on the surface of the workpiece to be measured, the high-precision measurement of the geometric error of the workpiece to be measured with a complex shape can be realized.

[0066] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0067] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0068] The above-described embodiments only represent the implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation of the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. A super-precision geometric error measuring instrument that dynamically conforms to the Abbe principle, characterized in that: It includes a main base (1-3), vertical support columns (1-2) are arranged at intervals on the upper side of the main base (1-3), and a shaft seat (1-1) is arranged at the top of the two vertical support columns (1-2); Longitudinal guide rails (3-6) are symmetrically arranged on the upper side of the main base (1-3) and between the two vertical support columns (1-2). A longitudinally reciprocating movable longitudinal motion shaft (3-4) is installed on the longitudinal guide rails (3-6). A laterally air-floating bushing (3-5) is sleeved on the longitudinal motion shaft (3-4) and can reciprocate laterally; Above the laterally air-floating bushing (3-5), there is a sample fixing base (3-9). The sample fixing base (3-9) is installed on the upper end face of the laterally air-floating bushing (3-5). A first laser reflector (3-2) and a second laser reflector (3-1) are fixedly installed on the left end and the right end of the sample fixing base (3-9) respectively by mirror support frames (3-8). A longitudinal laser reflector (3-3) is fixedly installed on the rear side of the sample fixing base (3-9). The laser reflection surfaces of the first laser reflector (3-2), the second laser reflector (3-1) and the longitudinal laser reflector (3-3) are perpendicular to each other in space; A rotating shaft (3-7) is arranged on the upper end face of the sample fixing base (3-9) and between the two mirror support frames (3-8) and the longitudinal laser reflector (3-3); A vertical moving mechanism (4) is slidably arranged on the shaft seat (1-1) in the vertical direction; The vertical moving mechanism (4) includes a vertical shaft (4-1), a vertical shaft nano-motor (4-2), a buffer cylinder (4-3), a cylinder fixing block (4-4), a vertical connection hole (4-5), a mounting groove (4-6), a fixing groove (4-7); A vertical shaft nano-motor (4-2) for controlling the vertical movement of the vertical shaft (4-1) is arranged on the shaft seat (1-1), and a buffer cylinder (4-3) is arranged to compensate the gravity of the vertical shaft (4-1); A through vertical connection hole (4-5) is opened in the shaft seat (1-1) in the vertical direction; An installation groove (4-6) is opened on the inner wall of the vertical connection hole (4-5); The driving mechanism (700) includes a vertical shaft nano-motor (4-2) fixed in the installation groove (4-6). The output shaft of the vertical shaft nano-motor (4-2) moves linearly and can drive the vertical shaft (4-1) to slide in the vertical direction; Fixing grooves (4-7) are respectively opened at one ends of the two vertical sides of the vertical shaft (4-1) close to the probe (2-2). The buffer cylinder (4-3) is fixedly installed on the inner wall of the vertical connection hole (4-5) by the cylinder fixing block (4-4), and the telescopic end of the buffer cylinder (4-3) is connected to the inner wall of the fixing groove (4-7); The probe (2-2) is connected to the lower end face of the vertical shaft (4-1) by a hanging bracket (2-1); The second laser interferometer (2-3), the first laser interferometer (2-4), and the longitudinal laser interferometer (2-5) are fixedly installed on the hanging bracket (2-1). The laser beams emitted by the first laser interferometer (2-4), the second laser interferometer (2-3), and the longitudinal laser interferometer (2-5) are respectively perpendicular to the first laser mirror (3-2), the second laser mirror (3-1), and the longitudinal laser mirror (3-3) in sequence, and the ranging beams in the laser beams they emit orthogonally converge at the probe center of the probe (2-2).

2. The ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle according to claim 1, characterized in that: The laser beams emitted by the first laser interferometer (2-4), the second laser interferometer (2-3), and the longitudinal laser interferometer (2-5) include multiple laser beams.

3. The ultra-precision geometric error measuring instrument with dynamic compliance with the Abbe principle according to claim 1, characterized in that: The first laser mirror (3-2), the second laser mirror (3-1), and the longitudinal laser mirror (3-3) are made of glass ceramics.

4. The ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle according to claim 1, wherein: The transverse air bearing sleeve (3-5) drives the sample fixing seat (3-9) to move longitudinally and transversely, and the vertical axis nano motor (4-2) controls the vertical axis (4-1) to move the probe (2-2) in the vertical direction; The longitudinal laser interferometer (2-5) obtains a displacement of x″ and a yaw angle of r y , and obtains a pitch angle of r z ; The first laser interferometer (2-4) obtains a displacement of y″ and obtains a rotation angle r x ; The second laser interferometer (2-3) obtains the vertical axis displacement as z″; Calculate the compensated transverse axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula; The compensation formula is:

5. The ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle according to claim 1, wherein: In the instrument coordinate system, when measuring the workpiece to be measured, the transverse air bearing sleeve (3-5) drives the sample fixing seat (3-9) to move longitudinally and transversely, and the vertical axis nano-motor (4-2) controls the vertical axis (4-1) to move the probe (2-2) in the vertical direction; the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected are obtained, where i = 1,..., N; The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1, ..., N, need to be transformed into the standard coordinate system through the transformation formula (1) to obtain the coordinates (a i , b i , c i ), where i = 1, ..., N The conversion formula (1) is as follows: where: θ = 135° The rotating shaft (3-7) drives the sample to be measured to rotate by an angle Rotation angle After that, the horizontal air bearing sleeve (3-5) drives the sample fixing seat (3-9) to move longitudinally and laterally, and the vertical shaft nano-motor (4-2) controls the vertical shaft (4-1) to move the probe (2-2) in the vertical direction; the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula to obtain the coordinates (a j , b j , c j ); among them, the conversion formula (2) is: Coordinates of several position points to be detected (a j , b j , c j ) and coordinate values of several position points to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinates of the workpiece to be measured (a i , b i , c i ), where i = 1,..., N + K.

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