Light source adjusting device

Abstract

The light source adjusting device comprises a box body, a fiber connection module arranged on one side of the box body and fixedly connected with the box body, a fiber interface adapted to the fixation and connection of a fiber, a light source module arranged inside the box body and opposite to the fiber interface, a light source adapted to provide illumination, and a light reflection component arranged at the back side of the light source and adapted to focus the light emitted by the light source at the fiber interface. The light source adjusting device can improve the uniformity of light during wafer detection.

Description

Technical Field

[0001] This invention relates to the field of wafer inspection technology, and more particularly to a light source adjustment device. Background Technology

[0002] A vision inspection system mainly consists of an image acquisition module and an image processing module. The image acquisition module primarily comprises an industrial camera, a lens, and a light source. Image quality is the core of machine vision processing, and the light source is a crucial factor determining image quality. Currently, light source systems used in high-precision wafer inspection exhibit low light uniformity during inspection. Due to these limitations, they struggle to meet the image processing requirements of wafers, significantly hindering subsequent image processing and algorithmic processing.

[0003] Therefore, there is an urgent need for a light source adjustment device that can solve the problem of poor light uniformity during wafer inspection. Summary of the Invention

[0004] In view of this, embodiments of the present invention provide a light source adjustment device that can improve the uniformity of light during wafer inspection.

[0005] This invention provides a light source adjustment device, comprising: a housing; an optical fiber connection module disposed on one side of the housing and fixedly connected to the housing, comprising: an optical fiber interface adapted for fixing and connecting optical fibers; a light source module located inside the housing and disposed opposite to the optical fiber interface, comprising: a light source adapted for providing illumination; and a light reflection component disposed behind the light source, adapted to focus the light emitted by the light source at the optical fiber interface.

[0006] Optionally, the light-reflecting component has a conical structure.

[0007] Optionally, the center of the light reflecting component, the center of the light source, and the center of the optical fiber interface are arranged along the same axis.

[0008] Optionally, the light-reflecting component includes a reflector.

[0009] Optionally, the inner surface of the reflector is provided with a cold beam coating.

[0010] Optionally, the light source is a halogen light source.

[0011] Optionally, the light source module further includes a base, which is fixedly connected to the housing and adapted to fix the light source module.

[0012] Optionally, the light source module further includes a filter module adapted to filter light of a specific wavelength from the light source.

[0013] Optionally, the light source adjustment device further includes: a control module, located inside the housing, electrically connected to the light source, adapted to control the brightness of the light source by outputting a preset voltage to the light source.

[0014] Optionally, the light source adjustment device further includes: a communication module, adapted to establish a communication connection between the control module and an external host computer, so as to receive control commands from the host computer and perform control operations on the light source module.

[0015] Optionally, the light source adjustment device further includes a potential adjustment module, located on the outside of the housing and coupled to the control module, adapted to adjust the brightness of the light source in response to manual adjustment operations.

[0016] Optionally, the light source adjustment device further includes: a voltage control module, one end connected to an external AC power supply, and the other end coupled to the light source module, suitable for processing externally input power signals. The voltage control module includes: a filtering unit, a rectification unit, a transformer unit, a voltage output unit, a voltage control unit, and a switching unit.

[0017] The filtering unit is adapted to filter out the ripple signal in the input power signal;

[0018] The rectifier unit is coupled to the filter unit and the transformer unit respectively, and is adapted to rectify the power signal processed by the filter unit to obtain the corresponding DC voltage signal.

[0019] The transformer unit is coupled to the voltage output unit and is adapted to change the voltage value of the DC power supply signal and charge the voltage output unit.

[0020] The voltage output unit is coupled to the light source module and is adapted to output the voltage value to the light source module;

[0021] The voltage control unit is coupled to the voltage output unit and the switching unit respectively, and is adapted to output a voltage control signal based on the relationship between the voltage value output to the light source module and a preset voltage.

[0022] The switching unit is coupled to the transformer unit and is adapted to open and close according to the voltage control signal to control the charging speed of the transformer unit to the voltage output unit.

[0023] Optionally, the light source adjustment device further includes: a temperature monitoring module, disposed around the light source module and electrically connected to the control module, adapted to monitor the ambient temperature around the light source module and feed it back to the control module; the control module is also adapted to output a light source control signal to disconnect the power supply to the light source when the ambient temperature fed back by the temperature monitoring module exceeds a preset threshold.

[0024] Optionally, the light source adjustment device further includes a heat dissipation module, adapted to cool down the temperature inside the housing.

[0025] Optionally, the heat dissipation module includes at least one of the following: multiple heat dissipation holes, disposed on one or more sides of the housing; and a heat dissipation exhaust fan, disposed on the side of the housing opposite to the light source module, adapted to extract hot air from the housing.

[0026] The solution of this invention involves setting a light source adjustment device including a housing, an optical fiber connection module, and a light source module. The optical fiber connection module includes an optical fiber interface, and the light source module includes a light source and a light reflection component. The light reflection component can focus the light emitted by the light source at the optical fiber interface, so that the light from the light source can continuously and uniformly illuminate the optical fiber interface, thereby uniformly illuminating the optical fiber connected to the optical fiber interface, and thus making the light output of the light source uniform and improving the uniformity of light during detection.

[0027] Furthermore, by setting the light reflecting component to a conical structure, it is easier for the light reflecting component to focus the light from the light source, thereby improving the utilization efficiency of the light source.

[0028] Furthermore, by setting the center of the light reflecting component, the center of the light source, and the center of the optical fiber interface to be along the same axis, the accuracy of the light reflecting component in focusing the light from the light source at the optical fiber interface is further improved, thereby further improving the uniformity of light during detection.

[0029] Furthermore, by using a mirror with a mirror structure as a light reflection component, the received light can be reflected to the fiber optic interface as much as possible, thereby further improving the utilization efficiency of the light source.

[0030] Furthermore, by applying a cold beam coating to the inner surface of the reflector, a large amount of heat generated by the light source can be transferred to the outside of the light source adjustment device, reducing excessive heat from the light source that is transmitted along the optical fiber to the imaging device and affecting the normal operation of the imaging device.

[0031] Furthermore, by filtering light of a specific wavelength from the light source through the filter unit, the influence of stray light can be reduced, thereby further improving the uniformity of light during detection.

[0032] Furthermore, by setting up a communication module, a communication connection is established between the control module and an external host computer, enabling the control module to receive control commands from the host computer and perform control operations on the light source module. Thus, the intensity of the light source can be controlled by operating the external host computer.

[0033] Furthermore, by setting the voltage control module to include: a filtering unit, a rectification unit, a transformer unit, a voltage control unit, and a switching unit, the circuit can be further protected to operate under safe voltage or current. It can also monitor the voltage of the light source and output a circuit protection signal to perform protection action when the voltage of the light source exceeds a preset threshold. This can provide a stable and reliable power supply to the light source and improve the stability of the light output by the light source.

[0034] Furthermore, by setting a temperature monitoring module to monitor the ambient temperature around the light source module, the control module can output a light source control signal when the ambient temperature fed back by the temperature monitoring module exceeds a preset threshold, so as to disconnect the power supply to the light source, thereby enabling the light source to operate in a safe ambient temperature.

[0035] Furthermore, by setting up a heat dissipation module, the temperature inside the enclosure can be cooled and dissipated, thereby enabling the light source adjustment device to operate at a safe temperature. Attached Figure Description

[0036] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0037] Figure 1 A schematic diagram of a light source adjustment device provided in an embodiment of the present invention is shown;

[0038] Figure 2 A schematic diagram of another light source adjustment device provided in an embodiment of the present invention is shown;

[0039] Figure 3 A schematic diagram of a light source module provided in an embodiment of the present invention is shown;

[0040] Figure 4 A schematic diagram showing the positional relationship between the fiber optic interface and the optical reflector is provided.

[0041] Figure 5 A schematic diagram of a voltage control unit provided in an embodiment of the present invention is shown;

[0042] Figure 6 and Figure 7 A schematic diagram of wafer surface images at different detection stages is shown. Detailed Implementation

[0043] As described in the background section, uniformity refers to the degree of uniformity of the light emitted by the light source system during wafer inspection. The higher the uniformity of the light emitted by the light source system, the higher the inspection accuracy of the inspection system. Since the light uniformity of the existing light source systems is relatively low during inspection, there is an urgent need for a light source adjustment device that can improve the uniformity of light during wafer inspection.

[0044] To make the above-mentioned objects, features and advantages of the embodiments of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0045] Figure 1 A schematic diagram of a light source adjustment device according to an embodiment of the present invention is shown below. (Refer to...) Figure 1 The light source adjustment device may include: a housing 1; an optical fiber connection module 2, disposed on one side of the housing 1 and fixedly connected to the housing 1, including: an optical fiber interface 21, suitable for fixing and connecting optical fibers; a light source module 3, located inside the housing 1 and opposite to the optical fiber interface 21, including: a light source 31, suitable for providing illumination; and a light reflection component 32, disposed behind the light source 31, suitable for focusing the light emitted by the light source 31 at the optical fiber interface 21.

[0046] The following combination Figure 1 The working process of the light source adjustment device in the embodiments of the present invention will be briefly described.

[0047] When the wafer needs to be inspected, the light emitted by the light source 31 is reflected by the light reflection component 32, which can focus the light emitted by the light source 31 onto the fiber optic interface 21, so that the light emitted by the light source 31 can continuously and evenly illuminate the fiber optic interface 21, and thus the light source adjustment device can emit uniform light.

[0048] To enable those skilled in the art to better understand and implement the embodiments of the present invention, the concept, scheme, principle, and advantages of the embodiments of the present invention are described in detail below with reference to the accompanying drawings and specific examples.

[0049] In some embodiments of the present invention, the optical fiber connection module may be fixedly installed on one side of the housing.

[0050] As a specific embodiment, the fiber optic connection module and the housing are connected by a snap-fit ​​connection.

[0051] It is understood that the fiber optic connection module and the housing can also be fixedly connected to the housing in other ways, such as welding. This embodiment of the invention does not limit the connection method between the two.

[0052] In practical implementation, the fiber optic connection module establishes a connection between the light source and the external optical fiber through the fiber optic interface. To ensure that the light emitted by the light source can be stably transmitted to the external optical fiber, refer to... Figure 2 The fiber optic connection module 2 may also include a fiber optic fixing device 22, which is suitable for fixing to an external fiber optic cable.

[0053] The optical fiber fixing device can fix the external optical fiber at the optical fiber interface, making it easy to receive the light emitted by the light source module.

[0054] Combination Figure 2 , refer to Figure 3 The schematic diagram of a light source module provided in the embodiment of the present invention is shown. As mentioned above, the purpose of the light reflecting component 32 is to reflect the light emitted by the light source 31 so that the light can be focused at the optical fiber interface 21. For this purpose, the light reflecting component 32 may include a reflector.

[0055] By using a mirror with a mirror structure as a light-reflecting component, as much of the received light as possible can be reflected to the fiber optic interface, thereby improving the utilization efficiency of the light source.

[0056] In practical implementation, the light source 31 generates a significant amount of heat during the light emission process, which affects the accuracy and efficiency of light reflection. To address this issue, a cold beam coating can be applied to the inner surface of the reflector. This coating can transfer the substantial heat generated by the light source 31 to the outside of the light source adjustment device, reducing the heat transferred along the optical fiber to the external image acquisition device.

[0057] In one specific example, the light source may be a halogen light source.

[0058] In some embodiments of the present invention, such as Figure 3 As shown, light source 31 can be implemented using a halogen light source. In subsequent examples, halogen light sources will be used as examples.

[0059] In a specific implementation, the focal length of the light source 31 is related to its position inside the light reflecting component 32 and the structure of the light reflecting component 32. Therefore, in order to make the light from the light source 31 more accurately reflect and focus at the optical fiber interface 21, the position of the light source 31 in the light reflecting component 32 and the structure of the light reflecting component 32 can be adjusted.

[0060] Specifically, continue to refer to Figure 3The light reflecting component 32 can be a conical structure. When the conical light reflecting component 32 is fixedly mounted on the light source 31, by adjusting the position of the light source 31 inside the light reflecting component 32, the light reflecting component 32 can focus the light emitted by the light source 31 onto the optical fiber interface 21, thereby improving the utilization efficiency of the light source.

[0061] In some other examples, the light-reflecting component 32 can also be other shapes, such as a funnel-shaped structure. This embodiment of the invention does not limit this, as long as the light-reflecting component can focus the light source.

[0062] In some embodiments of the present invention, by adjusting the position of the light source 31 inside the light reflecting component 32, an infinite number of focal lengths can exist. However, in order to focus the light emitted by the light source 31 at the fiber optic interface 21, the focal length of the light source 31 needs to be limited within a reasonable range, thereby minimizing the energy loss of the light emitted by the light source 31 during transmission. Therefore, according to actual requirements, the distance between the light reflecting component 32 and the fiber optic interface 21 can be limited within a preset range, so that the light emitted by the light source 31 can be focused at the fiber optic interface 21.

[0063] As an optional example, the distance between the light reflecting component 32 and the optical fiber interface 21 can be 35mm to 55mm.

[0064] Continue to refer to Figure 3 The light source module 3 may further include a base 33, which is adapted to be fixedly connected to the housing 1 and to fix the light source module 3, thereby realizing the fixed connection between the light source module 3 and the housing.

[0065] In practice, to improve the flexibility of light source 31 selection, the light source 31 and the base 33 are detachably connected, so that different types of light sources 31 can be flexibly selected according to needs.

[0066] Furthermore, the base 33 enables the rapid replacement of damaged or long-used light sources.

[0067] Continue to refer to Figure 3 The base 33 may also include a power supply port, and correspondingly, one end of the light reflecting component 32 may be provided with a plug corresponding to the power supply port.

[0068] With a light source having the above structure, since the light reflecting component 32 can focus the light emitted by the light source 31 at the optical fiber interface 21, when the external optical fiber is connected to the optical fiber interface 21, the light focused at the optical fiber interface 21 can continuously illuminate the external optical fiber, thereby ensuring the uniformity of light output during detection.

[0069] It should be noted that the structure of the light source module described above is merely an illustrative example. In practical applications, those skilled in the art can adaptively select or modify the components in the light source module according to actual needs and application scenarios. For example, the light reflecting component can also be funnel-shaped; or, for example, different types of light sources can be selected; or, for example, the position of the light source inside the light reflecting component can be adjusted. The embodiments of the present invention do not limit these extended solutions.

[0070] In specific implementation, in order to further improve the accuracy of the light reflection component in focusing the light from the light source at the optical fiber interface, the relative positional relationship between the light reflection component, the light source and the optical fiber interface can be adjusted so that as much of the light emitted by the light source as possible is focused on the optical fiber connector.

[0071] Combination Figure 2 and Figure 3 , refer to Figure 4 The diagram shown illustrates the positional relationship between the fiber optic interface and the optical reflector. (Refer to...) Figure 4 The center of the light reflecting component 32, the center of the light source 31, and the center of the optical fiber interface 21 are arranged along the same axis L.

[0072] Specifically, since the center of the light reflecting component 32, the center of the light source 31, and the center of the optical fiber interface 21 are arranged along the same axis L, and since the light reflecting component 32 can focus the light emitted by the light source 31 at the optical fiber interface 21, the light emitted by the light source 31 can be reflected and focused more accurately at the optical fiber interface 21, so that the optical fiber connected to the optical fiber interface 21 can receive the light emitted by the light source 31 better and more continuously, thereby further improving the uniformity of light.

[0073] In practical implementation, when the external optical fiber is connected to the optical fiber connection module, the position of the external optical fiber can be adjusted in the optical fiber interface so that the center of the optical fiber is aligned with the center of the optical fiber interface. (Continue to refer to...) Figure 4 Multiple locking screws 211 can be provided on the fiber optic interface 21. By adjusting the tightness of the multiple locking screws 211, the position of the fiber optic cable in the fiber optic interface 21 can be adjusted.

[0074] For example, when the center of the optical fiber is below the center of the optical fiber interface, the locking screw 211 below the optical fiber interface 21 can be adjusted, or multiple locking screws 211 can be adjusted at the same time to move the outer optical fiber upward as a whole until the centers of the two are aligned.

[0075] As a specific example, such as Figure 4 The number of locking screws 211 shown is 3, and they are symmetrically arranged on the optical fiber interface 21.

[0076] In some other implementations, the number of locking screws 211 can be other values. This embodiment of the invention does not impose a specific limitation on this, and can be set according to actual needs.

[0077] Through the above implementation method, by fine-tuning the optical fiber, the center of the optical fiber, the center of the light reflecting component, and the center of the light source can be aligned on the same axis, thereby improving the accuracy of the light reflecting component in focusing the light from the light source at the optical fiber interface, and further improving the uniformity of light during detection.

[0078] In actual operation, if the light source module jitters or shifts, causing the center of the optical fiber, the center of the light reflecting component, and the center of the light source to be out of alignment, it will result in uneven light reception by the external optical fiber. (Continue to refer to...) Figure 2 The light source module 3 may also include a fixing unit 34, which is suitable for fixing the light reflecting component 32. The fixing unit 34 is fixedly connected to the housing 1 to prevent the light source module 3 from shifting during operation, thereby further ensuring the uniformity of light.

[0079] In this embodiment of the invention, the method of fixing is not limited. As a specific example, the fixing unit 34 and the housing 1 are connected by a snap-fit ​​connection.

[0080] In practical implementation, light source 31 can emit optical fibers including multiple wavelengths. However, in some application scenarios, specific wavelengths of light may be required to meet manufacturing needs. (Continue to refer to...) Figure 2 The light source module 3 may further include a filter unit 35, which is adapted to filter light of a specific wavelength from the light source 31.

[0081] By setting a filter unit 35 at the front end of the light source 31, the light emitted by the light source 31 can be filtered to obtain light of a specific wavelength, reduce the influence of stray light, and further improve the uniformity of light during detection.

[0082] It should be noted that the structure of the light source adjustment device described above is merely illustrative. In practical applications, those skilled in the art can adapt or modify the light source adjustment device according to actual needs and application scenarios. For example, the cuboid box can be replaced with a cylindrical box; the present invention does not specifically limit the appearance of the box. Another example is changing the shape of the light reflecting component; yet another example is adding a corresponding control module or protection module. Based on this, various extended solutions can be obtained, and the embodiments of the present invention do not limit these extended solutions.

[0083] As a specific example, continue to refer to Figure 2The light source adjustment device also includes a control module 4. The circuit board 4 is disposed inside the housing 1 and is electrically connected to the light source 31. It is adapted to control the voltage output to the light source 31 to control the brightness of the light source 31.

[0084] In some embodiments of the present invention, the control module may be implemented by a processing chip such as a central processing unit (CPU) or a field programmable gate array (FPGA), or by an application specific integrated circuit (ASIC) or one or more integrated circuits configured to implement embodiments of the present invention.

[0085] In practical implementation, the control module can use general-purpose computer equipment to communicate and perform data operations with the acquisition module and driver module. This specification does not involve any improvement to the specific working method of the computing device. The data acquisition and comparison processes of the computing device can be implemented using existing or conventional techniques in the field.

[0086] In actual operation, to facilitate operators in adjusting the intensity of the light source, continue to refer to... Figure 2 The light source adjustment device may further include: a potential adjustment module 5, located on the outside of the housing 1 and coupled to the control module 4, which is adapted to adjust the brightness of the light source 31 in response to manual adjustment operations.

[0087] Specifically, when it is necessary to change the luminous intensity of the light source 31, the operator can adjust the potential adjustment module 5, and the control module 4 can respond to the change of the potential adjustment module 5 and control the voltage output to the light source 31.

[0088] In some embodiments of the present invention, such as Figure 2 As shown, the potential adjustment module 5 can be a knob-type adjustment, and the operator can adjust the brightness of the light source by rotating the potential adjustment module.

[0089] In other embodiments, the potential adjustment module 5 can be a slider-type adjustment, and its specific form can be selected according to actual needs.

[0090] In specific implementation, the parameters of the potential adjustment module 5 can be selected according to specific needs, and no specific limitation is made here.

[0091] As a specific example, the housing 1 may be equipped with an independent linearity adjustment knob of 0.1% and 10K dimming. By manually operating the button, the output light smoothness can be made <= ±0.1%.

[0092] By using a dimming adjustment knob with the above parameters, coupled to the control module, and responding to manual adjustment operations to adjust the brightness of the light source, the linearity of dimming can be improved, achieving more precise and smooth dimming.

[0093] It should be noted that when the light source adjustment device starts working, the dimming adjustment knob can be set to the lowest dimming state first. After the light source emits light normally, the brightness of the light source can be adjusted by adjusting the dimming adjustment knob.

[0094] In this embodiment of the invention, the light intensity output by the light source can also be adjusted in other ways. For example, the light source adjustment device further includes a communication module, adapted to establish a communication connection between the control module and an external host computer, so as to receive control commands from the host computer and perform control operations on the light source module.

[0095] In practice, when the potential adjustment module is in the lowest adjustment level, it can be switched to the external host computer adjustment level, and the intensity of the light source can be adjusted through the external host computer.

[0096] Specifically, the host computer can output control commands to the control module through the communication module, and the control module can adjust the light source intensity accordingly based on the control commands.

[0097] In some embodiments, the control command of the host computer output value control module can be an analog signal. The control module outputs a control signal value corresponding to the analog signal and within a preset range on the light source, so as to cooperate with devices such as optical microscopes to detect surface defects and other problems of the object under test.

[0098] In some applications, the voltage output to the light source adjustment device needs to remain stable. Therefore, refer to... Figure 5 The light source adjustment device provided in this embodiment of the invention also includes a voltage control module 100, one end of which is connected to an external AC power supply and is suitable for processing externally input power signals.

[0099] As a specific example, the voltage control module 100 may include: a filtering unit 110, a rectifier unit 120, a transformer unit 130, a voltage output unit 140, a voltage control unit 150, and a switching unit 160, wherein:

[0100] The filtering unit 110 is adapted to filter out the ripple signal in the input power signal;

[0101] The rectifier unit 120 is coupled to the filter unit 110 and the transformer unit 130 respectively, and is adapted to rectify the power signal processed by the filter unit 100 to obtain the corresponding DC power signal.

[0102] The transformer unit 130 is coupled to the voltage output unit 140 and is adapted to change the voltage value of the DC power supply signal and charge the voltage output unit 140.

[0103] The voltage output unit 140, and the light source module ( Figure 5 (Not shown) Coupled, adapted to output the voltage value to the light source module;

[0104] The voltage control unit 150 is coupled to the voltage output unit 140 and the switching unit 160 respectively, and is adapted to output a voltage control signal according to the relationship between the monitored voltage value of the DC power supply signal and a preset voltage.

[0105] The switching unit 160 is adapted to open and close according to the voltage control signal to control the charging speed of the transformer unit to the voltage output unit 140.

[0106] Combination Figure 5 Briefly describe the working principle of the voltage control module 100.

[0107] First, the filter unit 110 filters out the ripple signal in the external AC voltage signal. Then, the rectifier unit 120 rectifies the AC voltage signal to obtain the corresponding DC voltage signal.

[0108] The transformer unit 130 can transform the voltage value in the DC voltage signal to obtain a corresponding transformed voltage value, and charge the voltage output unit 140, which can supply power to the light source module. For example, after transformation by the transformer unit 130, 330V can be converted to 24V and output through the output port.

[0109] As mentioned earlier, the light source module generates a lot of heat during the light emission process, which may cause the voltage value output to the light source module to change. At this time, the voltage detection unit 150 can compare the detected voltage value with the preset voltage value and output a corresponding voltage control signal to the switching unit 160. Under the action of the voltage control signal, the switching unit 150 can periodically open and close, thereby controlling the charging speed of the transformer unit 130 to the voltage output unit 140, so that the light source module can obtain a stable voltage.

[0110] In some embodiments of this specification, reference continues to be made to... Figure 5The filtering unit 110 may include a Π-type filter composed of a first capacitor C1, a second capacitor C2 and a first inductor L1, as well as a third capacitor C3 and a fourth capacitor C4 to filter out other interference signals.

[0111] The parameter values ​​of the first capacitor C1, the second capacitor C2, the third capacitor C3, the fourth capacitor C4, and the first inductor L1 can be set according to actual needs, and the present invention does not limit this.

[0112] The rectifier unit 120 may include a full-bridge rectifier circuit composed of a first diode D1 to a fourth diode D4. During the positive half-cycle of the AC voltage signal, the first diode D1 and the third diode D3 can conduct; during the negative half-cycle of the AC voltage signal, the second diode D2 and the fourth diode D4 can conduct. After rectification by the full-bridge rectifier circuit, a corresponding DC voltage signal can be obtained.

[0113] As a specific example, suppose the input AC voltage is 220V, which can be rectified into DC voltage of 330V by the rectifier unit 120.

[0114] Continue to refer to Figure 5 The rectifier unit 120 may further include a fifth capacitor C5 for eliminating interference signals during the rectification process.

[0115] The transformer unit 130 may include a first transformer T1, a second transformer T2, a first Zener diode D5 and a first tunnel diode D6 connected in parallel with the primary side of the first transformer T1, a second Zener diode D7 connected in series with the primary side of the second transformer T2, and a third Zener diode D8 connected in series with the primary side of the secondary side of the second transformer T2.

[0116] Specifically, the first transformer T1 and the second transformer T2 can change the output voltage value, thereby charging the voltage output unit and enabling the light source module to obtain a preset voltage value. Furthermore, the first Zener diode D5 and the third Zener diode D8 ensure that the voltage on the primary side of the first transformer T1 and the second transformer T2 remains stable. With the transformation ratio of the second transformer T2 remaining constant, the secondary side of the second transformer T2 can stably charge the voltage output unit 140.

[0117] It is understood that the voltage value output from the voltage control module 100 to the light source module can be changed by altering the transformation ratio of the first transformer T1 and / or the second transformer T2.

[0118] Continue to refer to Figure 5The voltage output unit 140 may include a second inductor L2, a sixth capacitor C6 and a seventh capacitor C7, wherein the first end of the second inductor L2 is coupled to the output end of the third Zener diode D8 and the first end of the sixth capacitor C6, and its second end is coupled to the first end of the seventh capacitor C7 and the first output end. The second ends of the sixth capacitor C6 and the seventh capacitor C7 are coupled to the second output end.

[0119] The transformer unit 130 can charge the sixth capacitor C6 and the seventh capacitor C7 of the voltage output unit 140 and directly power the light source module.

[0120] Continue to refer to Figure 5 The voltage control unit 150 may include a power supply port Ve, a reference voltage port Vref, an output port Output, a ground port GND, a voltage feedback port Vfb, a frequency control port RT / CT, and a current feedback port Insen.

[0121] Specifically, the power supply port Ve is coupled to the primary side of the second transformer T2 through the fourth Zener diode D9; the reference voltage port Vref is coupled to ground through the eighth capacitor C8; the output port Ootput is coupled to the switching unit 160 through the first resistor R1; the voltage feedback port Vfb is coupled to the primary side of the second transformer T2 through the fourth Zener diode D9; the current feedback port Insen is coupled to the switching unit 160 through the second resistor R2 and to ground through the ninth capacitor C9; and the frequency control port RT / CT is coupled to ground through the ninth capacitor C10.

[0122] When the voltage value received by the voltage feedback port Vfb is different from the voltage value preset by the reference voltage port Vref, a corresponding voltage control signal can be output to the switching unit 160 through the output port Output. The switching unit 160 can periodically open and close according to the voltage control signal.

[0123] In some embodiments of the present invention, the frequency of the output voltage control signal can be set by connecting a frequency control port RT / CT coupling resistor.

[0124] The switching unit 160 may include a switching device M, which can periodically open and close under the action of the voltage control signal. For example, when the voltage control signal is at a high level, the switching device M is turned on; when the voltage control signal is at a low level, the switching device M1 is turned off.

[0125] Furthermore, when the switching device M is in the on state, the sixth capacitor C6 and the seventh capacitor C7 in the transformer unit 130 can be charged to supply power to the light source module; when the switching device M is in the off state, the sixth capacitor C6 and the seventh capacitor C7 can be discharged to supply power to the light source module, thereby providing a continuous and stable voltage to the light source module within one cycle.

[0126] In practical implementation, the inventors discovered that the faster the switching device M switches on and off, the faster the charging speed of the sixth capacitor C6 and the seventh capacitor C7, but the larger the generated current value. Therefore, they continued to refer to... Figure 5 The switching unit 160 may further include a third resistor R3 that is coupled to the switching device M and the second resistor R2 respectively. When the switching device M is in the on state, a conducting branch is formed: first Zener diode D5 - first tunnel diode D6 - switching device M - third resistor R3 - ground, and a current is formed on the third resistor R3. The current feedback port Insen of the voltage control unit 150 can adjust the pulse width of the voltage control signal according to the current value of the third resistor R3, thereby reducing the current value generated by the voltage output unit 140.

[0127] Because a light source generates a significant amount of heat during the emission process, the ambient temperature around it will rise. If the ambient temperature consistently exceeds the temperature range required for the safe operation of the light source module, it may damage the module. Therefore, the light source adjustment device provided in this embodiment of the invention may further include: a temperature monitoring module, disposed around the light source module and electrically connected to the control module, adapted to monitor the ambient temperature around the light source module and feed it back to the control module; the control module is further adapted to output a light source control signal to disconnect the power supply to the light source when the ambient temperature fed back by the temperature monitoring module exceeds a preset threshold.

[0128] By setting a temperature monitoring module to monitor the ambient temperature around the light source module, the control module can output a light source control signal when the ambient temperature reported by the temperature monitoring module exceeds a preset threshold, thereby disconnecting the power supply to the light source and enabling the light source to operate in a safe ambient temperature.

[0129] In practical implementation, to ensure that the light source module can operate normally at high ambient temperatures, we continue to refer to... Figure 2 The light source adjustment device may further include a heat dissipation module, which is adapted to cool down the temperature inside the box.

[0130] In specific implementation, such as Figure 2As shown, the heat dissipation module includes at least one of the following: multiple heat dissipation holes 81a, 81b, 81c, disposed on one or more sides of the housing; and a heat dissipation exhaust fan 82, disposed on the side of the housing 1 opposite to the light source module 3, suitable for extracting hot air from the housing 1.

[0131] like Figure 2 As shown, multiple heat dissipation holes can be located at the bottom and side of the housing 1 respectively; since the light source 31 is the main heat source, the heat dissipation exhaust fan 82 is set on the side of the housing 1 opposite to the light source module 3, so as to better dissipate heat from the light source 31 and remove hot air from the housing 1.

[0132] The operation method of the above-mentioned light source adjustment device is described in detail below.

[0133] First, connect the inlet of the external optical fiber to the optical fiber interface of the light source adjustment device. The outlet of the external optical fiber can be connected to an external machine to be used with a microscope for visual illumination and other operations. Second, connect the light source adjustment device to mains power. Third, adjust the intensity of the light source to the lowest level through the voltage adjustment module. Finally, based on the image fed back by the host computer, adjust the luminous intensity of the light source through the voltage adjustment module or the host computer to obtain the luminous intensity of the light source that meets the expectations. Then, the host computer uses algorithms or image processing to observe the defects on the surface of the object being inspected.

[0134] The following section uses the inspection of an 8-inch wafer surface as an example to further explain the above inspection method with reference to the accompanying drawings.

[0135] Figure 6 and Figure 7 The diagram shows schematic images of the wafer at different stages of the inspection process.

[0136] refer to Figure 6 When the light source adjustment device is connected to the mains power, but the power switch is not turned on, the light source adjustment device is not powered. At this time, the light output by the light source module is unstable, and the image quality acquired by the image acquisition device is poor. The acquired image can be observed to be black through the image processing software of the host computer, making it difficult to observe defects on the wafer surface.

[0137] refer to Figure 7 When the light source adjustment device is turned on via the power switch, the light source module outputs a stable light source, which evenly illuminates the optical fiber connected to the optical fiber interface. This uniform light is then transmitted to the image acquisition device via an external optical fiber. The acquired image can then be observed through the host computer image processing software to be clear and free of surface ripples. Therefore, using the light source adjustment device provided in this embodiment of the invention can improve the uniformity of light during wafer inspection, thereby improving image quality.

[0138] While the embodiments of the present invention have been disclosed above, the present invention is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A light source adjusting apparatus characterized by comprising: The light source adjusting device is applied to wafer surface detection and comprises a box body, a fiber connection module, a light source module and a voltage control module. The fiber connection module is arranged on one side of the box body and fixedly connected with the box body. The light source module is arranged inside the box body and opposite to the fiber interface. The light source module comprises a light source and a light reflection component. The light reflection component comprises a reflector. The voltage control module is connected with an external AC power source and the light source module. The voltage control module comprises a filter unit, a rectifier unit, a voltage output unit, a voltage control unit and a switch unit. The filter unit is used to filter out ripple signals in the input power signal. The rectifier unit is coupled with the filter unit and the voltage output unit. The voltage output unit is coupled with the light source module. The voltage control unit is coupled with the voltage output unit and the switch unit. The voltage control unit comprises a reference voltage port, a voltage feedback port and a current feedback port.

2. The light source adjustment apparatus according to claim 1, wherein The voltage control unit outputs a corresponding voltage control signal to the switch unit when the voltage value received by the voltage feedback port is different from the voltage value set in the reference voltage port.

3. The light source adjustment apparatus according to claim 2, wherein The switch unit is coupled with the voltage output unit and comprises a switch device and a third resistor.

4. The light source adjustment apparatus according to claim 1, wherein The switch device is turned on and off periodically to control the charging speed of the voltage output unit.

5. The light source adjustment apparatus according to claim 1, wherein The voltage control unit adjusts the pulse width of the voltage control signal according to the current value of the third resistor when the switch device is in the on state. The light reflection component is a conical structure.

6. The light source adjustment apparatus according to claim 1, wherein The center of the light reflection component, the center of the light source and the center of the fiber interface are arranged along the same axis. The light source is a halogen light source.

7. The light source adjustment apparatus according to claim 1, wherein The light source module further comprises a base fixedly connected with the box body and used to fix the light source module. The light source module further comprises a light filtering unit used to filter light of a specific wavelength of the light source.

8. The light source adjustment apparatus according to claim 7, wherein A control module is arranged in the box body and electrically connected with the light source. The control module is used to control the voltage output to the light source to control the light brightness of the light source.

9. The light source adjustment apparatus according to claim 7, wherein A communication module is used to establish a communication connection between the control module and an external host computer to receive control instructions from the host computer and perform control operations on the light source module. A potential adjusting module is arranged outside the box and coupled with the control module, and is adapted to adjust the brightness of the light source in response to manual adjustment operation.

10. The light source adjustment apparatus of claim 7, wherein, Further comprising: A temperature monitoring module is arranged around the light source module and electrically connected with the control module, and is adapted to monitor the ambient temperature around the light source module and feed back to the control module; The control module is further adapted to output a light source control signal to disconnect the power supply of the light source when the ambient temperature fed back by the temperature monitoring module exceeds a preset threshold.

11. The light source adjustment apparatus according to claim 1, wherein Further comprising: A heat dissipation module is adapted to cool and dissipate heat in the box.

12. The light source adjustment device of claim 11, wherein, The heat dissipation module comprises at least one of: A plurality of heat dissipation holes are arranged on one side or more sides of the box; A heat dissipation exhaust fan is arranged on the side of the box opposite to the light source module, and is adapted to exhaust hot air in the box.

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