Cascade type high efficiency discharge device and method

Abstract

A cascade type high efficiency discharge device comprises an insulator (105), a discharge chamber (106), a common cathode (101), 1 to N level discharge anodes (102, 103, 104), 1 to N level energy storage capacitors (107, 108, 109), 1-2 level discharge isolation diodes (110), 2-3 level discharge isolation diodes (111) ... (N-1)-(N) level discharge isolation diodes. A cascade type high efficiency discharge method is also provided. The present invention can store energy in a hierarchical manner, and utilize the plasma jet generated by the discharge of the previous stage to trigger the high energy and long spacing discharge of the next stage. Through the arc-starting effect of the multi-stage jet, the discharge spacing can be increased step by step to realize cascade discharge, and the discharge spacing increases with the discharge energy to meet the high efficiency and low pressure plasma discharge requirements.

Description

Technical Field

[0001] The present invention is applied to plasma application fields such as plasma flow control, ignition and combustion support, and specifically relates to a cascade type high-efficiency discharge device and method. Background Art

[0002] As an energy carrier, plasma can quickly convert electrical energy into thermal energy and mechanical energy, thereby achieving many functions such as flow control, ignition and combustion support. However, under atmospheric pressure, the gas is in an insulator state, so other auxiliary means must be used to transform the gas from a gaseous state to a plasma state. At present, the commonly used method is the high-voltage breakdown method, that is, by applying a high voltage to the electrodes, the air between the electrodes reaches the breakdown condition, thereby achieving the transformation from gas to plasma.

[0003] How to produce efficient plasma under atmospheric pressure conditions has been a long-standing unsolved problem.

[0004] Under atmospheric conditions, the prerequisite for generating plasma is to achieve air breakdown, so that the air changes from an insulator to a conductor, thereby changing from a gaseous state to a plasma state. The commonly used breakdown method is to apply a high voltage at both ends of the discharge electrode. When the breakdown voltage is exceeded, the air will be broken down. According to Paschen's law, under atmospheric pressure conditions, the breakdown voltage increases with the increase of the discharge spacing. Since the electrode spacing has an important influence on the discharge efficiency, in order to increase the electrode spacing, the input voltage will continue to increase, which will bring a series of problems such as insulation difficulties. For this reason, by utilizing the flash characteristics of semiconductors, the discharge spacing can be further increased, but the increase is limited, and the electrode spacing is still limited to the millimeter level. Since the voltage required to maintain the discharge is much smaller than the voltage required to break down the air, when the air breaks down and the electrodes are pulled apart, the electrode spacing can be effectively increased to the centimeter level. However, there are problems such as safety and reliability when moving electrodes under high pressure. Especially for pulse discharge, the entire discharge time is less than milliseconds, and the breakdown process is less than microseconds. How to accurately control the movement of electrodes is a more complicated problem.

[0005] In summary, current plasma discharge has problems such as high breakdown voltage, small electrode spacing, and low discharge efficiency, which cannot meet the application requirements of high-efficiency and low-pressure plasma discharge. Summary of the invention

[0006] In order to solve the problems of high breakdown voltage, small electrode spacing, low discharge efficiency, etc. in current plasma discharge, the present invention proposes a cascade type high efficiency discharge device, including an insulator 105, a discharge chamber 106, a common cathode 101, 1st to Nth level discharge anodes (102, 103, 104), 1st to Nth level energy storage capacitors (107, 108, 109), 1-2nd level discharge isolation diodes 110, 2-3rd level discharge isolation diodes 111 ... (N-1)-(N)th level discharge isolation diodes; wherein

[0007] The insulator 105 is processed into a cavity structure with one end open and the other end closed, the closed end is arranged with a common cathode 101, and the open end is arranged with a last-stage discharge anode, and the interior of the cavity structure forms a discharge cavity 106;

[0008] The discharge cavity 106 is a hollow structure, and the depth of the discharge cavity 106 is determined according to the discharge level;

[0009] The common cathode 101 is in sheet shape and is arranged at one end of the discharge chamber 106. The common cathode 101 seals one end of the discharge chamber 106.

[0010] The 1st to Nth level discharge anodes (102, 103, 104) are all arranged on the inner wall surface of the discharge chamber 106, and it is sufficient as long as the discharge anodes are exposed to the inner wall of the discharge chamber 106; the 1st level discharge anode 102 is arranged adjacent to the common cathode 101, the Nth level discharge anode is located at the outlet of the discharge chamber 106, and the other discharge anodes are arranged in sequence inside the discharge chamber, with a spacing between them, forming a discharge spacing arranged in sequence;

[0011] After the two ends of the level 1 energy storage capacitor 107 are respectively connected to the positive and negative electrodes of the input pulse high voltage, the negative electrode is connected to the common cathode 101, and the positive electrode is connected to the level 1 discharge anode 102; the positive end of the 1-2 level discharge isolation diode 110 is connected to the positive electrode of the pulse high voltage, and the negative end is connected to the level 2 discharge anode 103; the positive electrode of the level 2 energy storage capacitor 108 is connected to the negative end of the 1-2 level discharge isolation diode 110, and the negative electrode of the capacitor is connected to the negative electrode of the pulse high voltage; the positive end of the 2-3 level discharge isolation diode 111 is connected to the negative end of the 1-2 level discharge isolation diode 110, and the negative end is connected to the level 3 discharge anode 104;…; the positive electrode of the N-level energy storage capacitor is connected to the negative end of the (N-1)-(N) level discharge isolation diode, and the negative electrode of the capacitor is connected to the negative electrode of the pulse high voltage.

[0012] In one embodiment of the present invention, when N=3, the device specifically includes an insulator 105, a discharge chamber 106, a common cathode 101, a first-level discharge anode 102, a second-level discharge anode 103, a third-level discharge anode 104, a first-level energy storage capacitor 107, a second-level energy storage capacitor 108, a third-level energy storage capacitor 109, a 1-2-level discharge isolation diode 110, and a 2-3-level discharge isolation diode 111;

[0013] A 3-stage discharge anode 104 is arranged at the open end of the insulator 105;

[0014] The discharge chamber 106 is a hollow cylindrical structure with a diameter of 0.5 to 6 mm and a depth of 50 to 200 mm;

[0015] The 1st to Nth level discharge anodes (102, 103, 104) are all arranged on the inner wall surface of the circular ring of the discharge chamber 106.

[0016] The distance between the common cathode 101 and the first-level discharge anode 102 is 0.5-4 mm; the distance between the first-level discharge anode 102 and the second-level discharge anode 103 is 10-50 mm; the distance between the second-level discharge anode 103 and the third-level discharge anode 104 is 50-200 mm; the positive electrode of the third-level energy storage capacitor 109 is connected to the negative end of the 2-3-level discharge isolation diode 111, and is connected to the positive electrode of the second-level energy storage capacitor 108 through the 2-3-level discharge isolation diode 111, and the negative electrode of the capacitor is connected to the negative electrode of the pulse high voltage.

[0017] In a specific embodiment of the present invention,

[0018] The diameter of the discharge chamber 106 is 2 mm, and the depth of the discharge chamber 106 is 132 mm;

[0019] The distance between the common cathode 101 and the first-level discharge anode 102 is 2 mm; the distance between the first-level discharge anode 102 and the second-level discharge anode 103 is 30 mm; the distance between the second-level discharge anode 103 and the third-level discharge anode 104 is 100 mm.

[0020] In another specific embodiment of the present invention, the discharge anode is a circular ring electrode embedded in the inner wall of the discharge chamber 106 .

[0021] In another embodiment of the present invention, the discharge anodes (102, 103, 104) of level 1 to level N are all high-voltage capacitors with a withstand voltage of 3 to 20 kV; the discharge isolation diodes (110, 111) are all high-voltage diodes with a withstand voltage of 5 to 30 kV.

[0022] In another specific embodiment of the present invention, the withstand voltage of the 1st to Nth level discharge anodes (102, 103, 104) is 10 kV; and the withstand voltage of the discharge isolation diodes (110, 111) is 15 kV.

[0023] A cascade high-efficiency discharge method is also provided, which is based on the above-mentioned cascade high-efficiency discharge device, and the working process of the ignition system is as follows:

[0024] When a high voltage signal is input into the pulse high voltage, the voltages at both ends of the level 1 energy storage capacitor 107, the level 2 energy storage capacitor 108, and the level 3 energy storage capacitor 109 increase synchronously to store pulse energy; as the voltage increases, due to the short distance between the common cathode 101 and the level 1 discharge anode 102, the air between the electrodes first reaches the breakdown condition, at which time the discharge channel formed by the breakdown of the air at both ends of the level 1 energy storage capacitor 107 is turned on, and energy is released rapidly; due to the action of the level 1-2 discharge isolation diode 110 and the level 2-3 discharge isolation diode 111, the current of the level 2 energy storage capacitor 108 and the level 3 energy storage capacitor 109 is limited and energy cannot be released; as the energy of the level 1 energy storage capacitor 107 is released, the air between the cathode 101 and the level 1 discharge anode 102 expands due to heat; at this time, the air is in a plasma state and has conductive properties; as the plasma The body jet is ejected toward the outlet in the discharge chamber 106, and the electric field between the second-level discharge anode 103 and the cathode 101 changes, and a breakdown condition is reached at a certain moment, so that the air between the second-level discharge anode 103 and the cathode 101 is broken down, and a conductive plasma state is also formed; at this time, the energy of the second-level energy storage capacitor 108 is released, but the current of the third-level energy storage capacitor 109 is limited due to the effect of the 2-3 level discharge isolation diode 111, and energy cannot be released; since the distance between the second-level discharge anode 103 and the cathode 101 is large, the discharge efficiency is improved; with the injection of energy, the plasma jet formed in the discharge chamber is further ejected toward the outlet, and at a certain moment, the air between the third-level discharge anode 104 and the cathode 101 is broken down, and a conductive plasma state is also formed. At this time, the third-level energy storage capacitor 109 releases energy at a larger distance.

[0025] The present invention utilizes the plasma jet generated by small-energy and small-distance discharge to assist the breakdown of large-distance electrode gaps, thereby achieving large-distance discharge under relatively low voltage conditions and improving large-energy discharge efficiency.

[0026] Compared with the traditional discharge method, the cascade high-efficiency discharge device and method proposed in the present invention stores energy in a hierarchical manner, and uses the plasma jet generated by the previous discharge to trigger the next level of high-energy long-distance discharge. The specific working principle is as follows. The first level is the initial discharge level, and the air breakdown of the electrode gap introduces semiconductor-assisted breakdown to achieve low-voltage breakdown. After the first level discharges, the discharge generates a plasma jet. During the propagation of the jet, the electric field between the second-level discharge electrodes changes, triggering the second-level discharge device to break down and discharge. Since the energy of the second-level energy storage is greater than that of the first-level energy storage, the discharge spacing is also greater than that of the first-level discharge device, so the plasma jet generated by the second level is stronger. Under the action of the second-level plasma jet, the third level can discharge at a larger spacing. By analogy, through the arc-starting effect of multi-stage jets, the discharge spacing can be increased step by step to achieve cascade discharge, and the discharge spacing increases with the discharge energy to meet the requirements of high-efficiency low-pressure plasma discharge. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the cascade type high efficiency discharge device of the present invention;

[0028] Figure 2 It is a schematic diagram of the working process of the cascade type high efficiency discharge device of the present invention.

[0029] Reference numerals:

[0030] 101 - Common cathode

[0031] 102——1st level discharge anode

[0032] 103——2-stage discharge anode

[0033] 104——3-level discharge anode

[0034] 105——Insulator

[0035] 106——Discharge chamber

[0036] 107——Level 1 energy storage capacitor

[0037] 108——2-level energy storage capacitor

[0038] 109——3-level energy storage capacitor

[0039] 110——1-2 level discharge isolation diode

[0040] 111——2-3 level discharge isolation diode DETAILED DESCRIPTION

[0041] To achieve the above-mentioned purpose, the present invention provides a cascade type high-efficiency discharge device and method, the technical feature of which is that the entire discharge device is composed of a discharge chamber composed of an insulator and a plurality of discharge electrodes. The discharge electrodes are arranged inside the discharge chamber at a certain interval, the common electrode at the bottom is connected to the negative electrode of the input voltage, and the other electrodes are anodes, which are respectively connected to the anode of a certain energy storage capacitor, and the energy storage capacitors are charged in parallel through diodes. In order to explain the composition and working method of the cascade type high-efficiency discharge device in detail, the present invention takes a three-stage high-efficiency discharge device as an example for explanation. According to the same working principle, it is easy to expand to multi-stage high-efficiency discharge.

[0042] The three-level high-efficiency discharge device includes a discharge end and a corresponding circuit, and is composed of an insulator 105, a discharge chamber 106, a common cathode 101, a first-level discharge anode 102, a second-level discharge anode 103, a third-level discharge anode 104, a first-level energy storage capacitor 107, a second-level energy storage capacitor 108, a third-level energy storage capacitor 109, a 1-2-level discharge isolation diode 110, and a 2-3-level discharge isolation diode 111.

[0043] The insulator 105 is processed from insulating material into a cavity structure with one end open and the other end closed, the closed end is arranged with a common cathode 101 (that is, the closed end of the insulator 105 is formed by using the common cathode 101), and the open end is arranged with the last-level discharge anode (in this embodiment, the three-level discharge anode 104), and the inside of the cavity structure is formed as a discharge cavity 106.

[0044] The discharge cavity 106 is a hollow structure, and the cross section is not limited to a circle, but preferably a circle, so that the discharge cavity 106 constitutes a hollow cylindrical structure, with a diameter of 0.5 to 6 mm, preferably 2 mm. The depth of the discharge cavity 106 (i.e., the internal length of the cavity from the open end to the closed section) is determined according to the discharge level. In this embodiment, the depth is 50 to 200 mm, preferably 132 mm.

[0045] The common cathode 101, the first-level discharge anode 102, the second-level discharge anode 103, and the third-level discharge anode 104 are made of conductive metal. The first-level discharge anode 102, the second-level discharge anode 103, and the third-level discharge anode 104 are all arranged on the annular wall surface of the discharge chamber 106. It is sufficient to ensure that the discharge anode is exposed to the inner wall of the discharge chamber 106. Therefore, the discharge anode can be a circular ring electrode embedded in the inner wall of the discharge chamber 106, or a "C"-shaped notched ring or semi-circular ring embedded in the inner wall of the discharge chamber 106, or even a point electrode embedded in the inner wall of the discharge chamber 106. However, from the perspective of discharge effect, it is preferred that the discharge anode is a circular ring electrode embedded in the inner wall of the discharge chamber 106. As described above, the common cathode 101 is located at the bottom of the discharge chamber 106 and is in the shape of a disc. The first-level discharge anode 102 is arranged adjacent to the common cathode 101, the third-level discharge anode 104 is located at the outlet of the discharge chamber 106, and the other discharge anodes are arranged in sequence inside the discharge chamber to form a discharge interval arranged in sequence. The distance between the common cathode 101 and the first-level discharge anode 102 is 0.5-4 mm, preferably 2 mm. The distance between the first-level discharge anode 102 and the second-level discharge anode 103 is 10-50 mm, preferably 30 mm. The distance between the second-level discharge anode 103 and the third-level discharge anode 104 is 50-200 mm, preferably 100 mm. After the two ends of the first-level energy storage capacitor 107 are respectively connected to the positive and negative electrodes of the input pulse high voltage, the negative electrode is connected to the common cathode 101, and the positive electrode is connected to the first-level discharge anode 102. The positive end of the 1-2 level discharge isolation diode 110 is connected to the positive electrode of the pulse high voltage, and the negative end is connected to the second-level discharge anode 103. The positive electrode of the second-level energy storage capacitor 108 is connected to the negative end of the 1-2 level discharge isolation diode 110, and is connected to the positive electrode of the input pulse high voltage through the negative end of the 1-2 level discharge isolation diode 110, and the negative electrode of the capacitor is connected to the negative electrode of the pulse high voltage. The positive end of the 2-3 level discharge isolation diode 111 is connected to the negative end of the 1-2 level discharge isolation diode 110, and the negative end is connected to the 3-level discharge anode 104. The positive pole of the 3-level energy storage capacitor 109 is connected to the negative end of the 2-3 level discharge isolation diode 111, and is connected to the positive pole of the 2-level energy storage capacitor 108 through the 2-3 level discharge isolation diode 111, and the negative pole of the capacitor is connected to the negative pole of the pulse high voltage. The 1-level discharge anode 102, the 2-level discharge anode 103, and the 3-level discharge anode 104 are all high-voltage capacitors with a withstand voltage of 3 to 20 kV, preferably 10 kV. The 1-2 level discharge isolation diode 110 and the 2-3 level discharge isolation diode 11 are all high-voltage diodes with a withstand voltage of 5 to 30 kV, preferably 15 kV.

[0046] The working process of the ignition system is as follows. When a high-voltage signal is input as a pulse high voltage, the voltages at both ends of the level 1 energy storage capacitor 107, the level 2 energy storage capacitor 108, and the level 3 energy storage capacitor 109 increase synchronously to store pulse energy. As the voltage increases, due to the short distance between the common cathode 101 and the level 1 discharge anode 102, the air between the electrodes first reaches the breakdown condition. At this time, the discharge channel formed by the breakdown of the air at both ends of the level 1 energy storage capacitor 107 is turned on, and energy is released rapidly. Due to the action of the level 1-2 discharge isolation diode 110 and the level 2-3 discharge isolation diode 111, the current of the level 2 energy storage capacitor 108 and the level 3 energy storage capacitor 109 is limited and energy cannot be released. As the energy of the level 1 energy storage capacitor 107 is released, the air between the cathode 101 and the level 1 discharge anode 102 expands due to heat ( Figure 2 a). At this time, the air is in a plasma state and has conductive properties. As the plasma jet is ejected toward the outlet in the discharge chamber 106, the electric field between the 2nd discharge anode 103 and the cathode 101 changes, and a breakdown condition is reached at a certain moment, causing the air between the 2nd discharge anode 103 and the cathode 101 to break down, also forming a conductive plasma state. At this time, the energy of the 2nd energy storage capacitor 108 is released, but the current of the 3rd energy storage capacitor 109 is limited due to the action of the 2-3rd discharge isolation diode 111, and energy cannot be released. Since the distance between the 2nd discharge anode 103 and the cathode 101 is large, the discharge efficiency is improved. With the injection of energy, the plasma jet formed in the discharge chamber is further ejected toward the outlet ( Figure 2 b), at a certain moment, the air between the 3-stage discharge anode 104 and the cathode 101 breaks down, and a conductive plasma state is also formed. At this time, the 3-stage energy storage capacitor 109 releases energy at a larger distance ( Figure 2 c). In summary, under this discharge device and working method, the discharge spacing can be increased exponentially, thereby meeting the requirements of high-efficiency low-pressure plasma discharge. Specific embodiments

[0048] See also Figure 1The cascade type high efficiency discharge device of the present invention is composed of an insulator 105, a discharge cavity 106, a common cathode 101, a first-level discharge anode 102, a second-level discharge anode 103, a third-level discharge anode 104, a first-level energy storage capacitor 107, a second-level energy storage capacitor 108, a third-level energy storage capacitor 109, a 1-2-level discharge isolation diode 110, and a 2-3-level discharge isolation diode 111. The insulator 105 is processed from ceramic into a cavity structure with one end open and the other end closed, the closed end is arranged with a common cathode 101, and the open end is arranged with the last-level discharge anode (the third-level discharge anode 104 in this example), and the cavity structure is the discharge cavity 106. The diameter of the discharge cavity 106 is 2 mm, and the depth of the discharge cavity is 132 mm. The common cathode 101, the first-level discharge anode 102, the second-level discharge anode 103, and the third-level discharge anode 104 are made of stainless steel, wherein the common cathode 101 is located at the bottom of the discharge chamber 106, the third-level discharge anode 104 is located at the outlet of the discharge chamber 106, and the other electrodes are arranged in sequence inside the discharge chamber to form a discharge distance that increases step by step. The distance between the common cathode 101 and the first-level discharge anode 102 is 2 mm. The distance between the first-level discharge anode 102 and the second-level discharge anode 103 is 30 mm. The distance between the second-level discharge anode 103 and the third-level discharge anode 104 is 100 mm. After the two ends of the first-level energy storage capacitor 107 are directly connected to the positive and negative electrodes of the input pulse high voltage, the negative electrode is connected to the common cathode 101, and the positive electrode is connected to the first-level discharge anode 102. The positive electrode of the second-level energy storage capacitor 108 is connected to the positive electrode of the input pulse high voltage through the 1-2-level discharge isolation diode 110, and is directly connected to the second-level discharge anode 103, and the negative electrode of the capacitor is directly connected to the negative electrode of the pulse high voltage. The positive electrode of the 3-level energy storage capacitor 109 is connected to the positive electrode of the 2-level energy storage capacitor 108 through the 2-3-level discharge isolation diode 111, and is directly connected to the 3-level discharge anode 104, and the negative electrode of the capacitor is directly connected to the negative electrode of the pulse high voltage. The 1-level discharge anode 102, the 2-level discharge anode 103, and the 3-level discharge anode 104 are all high-voltage capacitors with a withstand voltage of 10kV. The 1-2-level discharge isolation diode 110 and the discharge isolation diode 11 are both high-voltage diodes with a withstand voltage of 15kV.

Claims

1. A cascade high-efficiency discharge device, characterized in that: It comprises an insulator (105), a discharge chamber (106), a common cathode (101), 1st to Nth level discharge anodes (102, 103, 104), 1st to Nth level energy storage capacitors (107, 108, 109), 1-2nd level discharge isolation diodes (110), 2-3rd level discharge isolation diodes (111) ... (N-1)-(N)th level discharge isolation diodes; in The insulator (105) is processed into a cavity structure with one end open and the other end closed, a common cathode (101) is arranged at the closed end, and a last-stage discharge anode is arranged at the open end, and a discharge cavity (106) is formed inside the cavity structure; The discharge cavity (106) is a hollow structure, and the depth of the discharge cavity (106) is determined according to the discharge level; The common cathode (101) is in sheet shape and is arranged at one end of the discharge chamber (106). The common cathode (101) enables the end of the discharge chamber (106) to be sealed. The 1st to Nth level discharge anodes (102, 103, 104) are all arranged on the inner wall surface of the discharge chamber (106), and it is sufficient to ensure that the discharge anodes are exposed to the inner wall of the discharge chamber (106); the 1st level discharge anode (102) is arranged adjacent to the common cathode (101), the Nth level discharge anode is located at the outlet of the discharge chamber (106), and the other discharge anodes are arranged in sequence inside the discharge chamber, with spacings between them, so as to form discharge spacings arranged in sequence; After both ends of the 1st level energy storage capacitor (107) are respectively connected to the positive and negative electrodes of the input pulse high voltage, the negative electrode is connected to the common cathode (101), and the positive electrode is connected to the 1st level discharge anode (102); the positive end of the 1-2nd level discharge isolation diode (110) is connected to the positive electrode of the pulse high voltage, and the negative end is connected to the 2nd level discharge anode (103); the positive electrode of the 2nd level energy storage capacitor (108) is connected to the negative end of the 1-2nd level discharge isolation diode (110), and the negative electrode of the capacitor is connected to the negative electrode of the pulse high voltage; the positive end of the 2-3rd level discharge isolation diode (111) is connected to the negative end of the 1-2nd level discharge isolation diode (110), and the negative end is connected to the 3rd level discharge anode (104); ...; the positive electrode of the Nth level energy storage capacitor is connected to the negative end of the (N-1)-(N)th level discharge isolation diode, and the negative electrode of the capacitor is connected to the negative electrode of the pulse high voltage.

2. The cascade high-efficiency discharge device according to claim 1, characterized in that: When N=3, the device specifically comprises an insulator (105), a discharge chamber (106), a common cathode (101), a first-level discharge anode (102), a second-level discharge anode (103), a third-level discharge anode (104), a first-level energy storage capacitor (107), a second-level energy storage capacitor (108), a third-level energy storage capacitor (109), a first-level and a second-level discharge isolation diode (110), and a second-level and a third-level discharge isolation diode (111); A three-level discharge anode (104) is arranged at an open end of the insulator (105); The discharge chamber (106) is a hollow cylindrical structure with a diameter of 0.5 to 6 mm and a depth of 50 to 200 mm; The 1st to Nth level discharge anodes (102, 103, 104) are all arranged on the annular inner wall surface of the discharge chamber (106); The distance between the common cathode (101) and the first-level discharge anode (102) is 0.5-4 mm; the distance between the first-level discharge anode (102) and the second-level discharge anode (103) is 10-50 mm; the distance between the second-level discharge anode (103) and the third-level discharge anode (104) is 50-200 mm; the positive electrode of the third-level energy storage capacitor (109) is connected to the negative end of the second-level discharge isolation diode (111), and is connected to the positive electrode of the second-level energy storage capacitor (108) through the second-level discharge isolation diode (111), and the negative electrode of the capacitor is connected to the negative electrode of the pulse high voltage.

3. The cascade high-efficiency discharge device according to claim 2, characterized in that: The diameter of the discharge chamber (106) is 2 mm, and the depth of the discharge chamber (106) is 132 mm; The distance between the common cathode (101) and the first-level discharge anode (102) is 2 mm; the distance between the first-level discharge anode (102) and the second-level discharge anode (103) is 30 mm; and the distance between the second-level discharge anode (103) and the third-level discharge anode (104) is 100 mm.

4. The cascade high-efficiency discharge device according to claim 2, characterized in that: The discharge anode is a circular ring electrode embedded in the inner wall of the discharge chamber (106).

5. The cascade high-efficiency discharge device according to claim 1, characterized in that: The discharge anodes (102, 103, 104) of level 1 to level N are all high-voltage capacitors with a withstand voltage of 3 to 20 kV; the discharge isolation diodes (110, 111) are all high-voltage diodes with a withstand voltage of 5 to 30 kV.

6. The cascade high-efficiency discharge device according to claim 5, characterized in that: The withstand voltage of the discharge anodes (102, 103, 104) from level 1 to level N is 10 kV; the withstand voltage of the discharge isolation diodes (110, 111) is 15 kV.

7. A cascade high-efficiency discharge method, based on the cascade high-efficiency discharge device according to any one of claims 1 to 6, characterized in that: The ignition system works as follows: When a pulse high voltage signal is input, the voltages at both ends of the first-level energy storage capacitor (107), the second-level energy storage capacitor (108), and the third-level energy storage capacitor (109) increase synchronously to store pulse energy; As the voltage increases, due to the short distance between the common cathode (101) and the first-level discharge anode (102), the air between the electrodes first reaches the breakdown condition. At this time, the discharge channel formed by the breakdown of the air is connected at both ends of the first-level energy storage capacitor (107), and the energy is quickly released; due to the action of the 1-2-level discharge isolation diode (110) and the 2-3-level discharge isolation diode (111), the current of the second-level energy storage capacitor (108) and the third-level energy storage capacitor (109) is limited and energy cannot be released; as the energy of the first-level energy storage capacitor (107) is released, the air between the common cathode (101) and the first-level discharge anode (102) expands due to heat; at this time, the air is in a plasma state and has conductive properties; as the plasma jet is ejected toward the outlet in the discharge chamber (106), the second-level discharge anode (103) and the common cathode The electric field between the two discharge anodes (103) and the common cathode (101) changes, and at a certain moment, a breakdown condition is reached, so that the air between the two discharge anodes (103) and the common cathode (101) breaks down, and a conductive plasma state is also formed; at this time, the energy of the two-level energy storage capacitor (108) is released, but the current of the three-level energy storage capacitor (109) is limited due to the effect of the two-level discharge isolation diode (111), and it cannot release energy; since the distance between the two-level discharge anode (103) and the common cathode (101) is large, the discharge efficiency is improved; with the injection of energy, the plasma jet formed in the discharge chamber is further ejected toward the outlet, and at a certain moment, the air between the three-level discharge anode (104) and the common cathode (101) breaks down, and a conductive plasma state is also formed, and at this time, the three-level energy storage capacitor (109) releases energy at a larger distance.

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