Periscope optical path integration method

Abstract

The present application relates to the field of optical equipment assembly, adjustment, and testing technology, and in particular to a periscope optical path integration method. The periscope optical path integration method includes the following steps: installing a first optical component, installing a centering tool behind the first optical component along the optical path, and determining the x- and y-direction references; moving the centering tool until it is aligned with the predetermined installation position of the periscope assembly; installing and adjusting the periscope assembly at the predetermined installation position to align the first optical component with the centering tool around the x- and y-direction references; moving the centering tool to align it with the first optical component along the y-direction reference; installing and adjusting the second optical component to align the output optical axis of the second optical component with the centering tool along the y-direction; replacing the centering tool with a mirror locator, and translating the first optical component along the z-direction to align the first and second optical components along the z-direction reference. The periscope optical path integration method is capable of assembling a periscope optical path that integrates non-parallel optical paths.

Description

Technical Field

[0001] The present application relates to the technical field of optical equipment assembly, adjustment and testing, and in particular to a periscope optical path integration method. Background Art

[0002] As the semiconductor manufacturing industry develops towards intelligence, the alignment accuracy and reliability requirements of optical alignment systems, as core functional components of intelligent equipment, are constantly improving, and the integration accuracy of the optical path system directly affects the system alignment performance.

[0003] At present, one method for assembling and adjusting the optical path system is to use an optical axis adjustment component to adjust the optical path inside the instrument from the outside, and to add an optical adjustment frame to achieve the purpose of management stock adjustment. However, the operation is difficult and time-consuming during the assembly and adjustment process, and it is especially not easy to use in smart devices with high precision requirements.

[0004] Another method of adjusting the optical path system is to change the position of the optical path through a periscope. It is mainly used in the context of parallel light beams. It only involves the adjustment of the periscope optical path itself, and does not cover the adjustment of the optical path before and after the periscope. It is also not applicable to situations with non-parallel optical paths and axial spacing control. Summary of the Invention

[0005] The purpose of this application is to provide a periscope optical path integration method to solve, to a certain extent, the technical problem in the prior art that an optical path system with non-parallel optical paths and axial spacing control cannot be effectively assembled and adjusted.

[0006] The present application provides a periscope optical path integration method for assembling and integrating a periscope optical path, wherein the periscope optical path includes a first optical component, a second optical component, and a periscope lens group located between the first optical component and the second optical component along the propagation direction of the optical path;

[0007] The periscope optical path integration method comprises the following steps:

[0008] Installing the first optical assembly, installing a centering device behind the first optical assembly along the optical path, and aligning the centering device with the output optical axis of the first optical assembly to determine an x-direction reference and a y-direction reference of the first optical assembly;

[0009] Moving a centering tool so as to align the centering tool with a predetermined installation position of the periscope assembly, wherein the predetermined installation position is located between the first optical component and the centering tool;

[0010] Installing the periscope assembly at the predetermined installation position;

[0011] Adjusting the lens angle of the periscope assembly until the centering device is aligned with the output optical axis of the first optical component around the x-direction reference and the y-direction reference again;

[0012] Moving the centering device along the y-direction until the centering device is aligned with the output optical axis of the first optical component along the y-direction reference;

[0013] Installing the second optical assembly behind the periscope assembly along the optical path, and adjusting the second optical assembly until the output optical axis of the second optical assembly is coaxial with the centering instrument along the y-direction reference;

[0014] Replacing the centering device with a mirror locator, and fixing the second optical component to the mirror locator;

[0015] The first optical component is translated along the z-direction until the first optical component and the second optical component are aligned along the z-direction reference, and the first optical component is fixed.

[0016] In the above technical solution, further, the first optical component includes a spherical mirror group and a plane mirror group, and the spherical mirror group and the plane mirror group are located at the rear of the first optical component along the direction of the optical path;

[0017] The step of aligning the centering instrument with the output optical axis of the first optical component to determine the x-direction reference and the y-direction reference of the first optical component specifically includes the following steps:

[0018] The center of the spherical mirror group of the first optical component and the plane where the plane mirror group is located are detected by the centering instrument, and the axis passing through the center of the spherical mirror group and extending along the output optical axis of the first optical component is used as the x-direction reference, the axis passing through the center of the spherical mirror group and perpendicular to the x-direction reference is used as the y-direction reference, and the plane where the plane mirror group is located is used as the y-direction reference, and the plane passing through the center of the spherical mirror group and perpendicular to the plane where the plane mirror group is located is used as the x-direction reference.

[0019] In any of the above technical solutions, further, the step of moving the centering tool along the y-direction until the centering tool completes alignment with the output optical axis of the first optical component along the y-direction reference specifically includes the following steps:

[0020] In a state where the centering device maintains alignment around an x-direction reference and a y-direction reference, the centering device is moved along the y-direction until the centering device and the spherical center image of the spherical mirror assembly are cross-coincident.

[0021] In any of the above technical solutions, further, the step of moving the centering tool so that the centering tool is aligned with a predetermined installation position of the periscope assembly, wherein the predetermined installation position is located between the first optical component and the centering tool, specifically comprises the following steps:

[0022] Installing a plane reflector at a predetermined installation position of the periscope group, wherein the plane reflector can cover the periscope group along the y direction;

[0023] The centering device is moved along the x-direction and the y-direction until the centering device moves into the exit height range of the periscope assembly.

[0024] In any of the above technical solutions, further, the step of installing the periscope assembly at the predetermined installation position specifically includes the following steps:

[0025] Remove the plane reflector and find the predetermined installation position of the periscope assembly at the interval between the first optical component and the centering device along the optical path;

[0026] The periscope assembly is installed at a predetermined installation position of the periscope assembly.

[0027] In any of the above technical solutions, further, the step of installing the periscope assembly at the predetermined installation position specifically includes the following steps:

[0028] Remove the plane reflector and find the predetermined installation position of the periscope assembly at the interval between the first optical component and the centering device along the optical path;

[0029] The periscope assembly is installed at a predetermined installation position of the periscope assembly.

[0030] In any of the above technical solutions, further, the step of adjusting the second optical component until the output optical axis of the second optical component is coaxial with the centering instrument along the y-direction reference specifically includes the following steps:

[0031] The second optical component is rotated and translated until the output optical axis of the second optical component is coaxial with the centering device.

[0032] In any of the above technical solutions, further, the centering device is an internal focusing centering device.

[0033] In any of the above technical solutions, further, in the step of aligning the centering instrument with the output optical axis of the first optical component to determine the x-direction reference and the y-direction reference of the first optical component, the accuracy of the x-direction reference and the accuracy of the y-direction reference determined are both no more than 5".

[0034] In any of the above technical solutions, further, the lens angle of the periscope assembly is adjusted until the centering instrument re-aligns the output optical axis of the first optical component around the x-direction reference and the y-direction reference, and the accuracy around the x-direction reference and the accuracy around the y-direction reference determined are both no greater than 2".

[0035] Compared with the prior art, the present invention has the following advantages:

[0036] The periscope optical path integration method provided in the present application first fixes the first optical component, uses the first optical component as a reference, determines the x-direction reference and the y-direction reference through a locator, and then adjusts the periscope group relative to the first optical component until the posture of the periscope group meets the requirements of the x-direction reference and the y-direction reference. Based on the determined first optical component and periscope group, that is, on the premise of meeting the x-direction reference and the y-direction reference, the posture of the locator is adjusted to ensure that the centering instrument is aligned with the first optical component along the y-direction reference. Based on the adjusted locator, the position of the second optical component is adjusted until the second optical component is coaxial with the locator, that is, the second optical component simultaneously meets the y-direction reference, the x-direction reference and the y-direction reference. Finally, the position of the first optical component along the z-direction is adjusted until the periscope optical path simultaneously meets the accuracy requirements of the z-direction reference, the y-direction reference, the x-direction reference and the y-direction reference. The positions of the first optical component, the periscope group and the second optical component can be fixed to complete the assembly and integration of the periscope optical path.

[0037] This periscope optical path integration method can perform high-precision debugging on the z-direction reference, the y-direction reference, the x-direction reference, and the y-direction reference. It can effectively decouple the adjustment crosstalk of multiple degrees of freedom and achieve high-precision and high-efficiency optical path debugging. It is suitable for the assembly and integration of periscope optical paths, especially for the situation where the periscope group is used in a non-parallel optical path transmission path. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0039] Figure 1 A schematic diagram of a first assembly and adjustment state of the periscope optical path integration method provided in Example 1 of the present application;

[0040] Figure 2 A schematic diagram of a second assembly state of the periscope optical path integration method provided in Example 1 of the present application;

[0041] Figure 3 A schematic diagram of the third assembly and adjustment state of the periscope optical path integration method provided in Example 1 of the present application;

[0042] Figure 4 A schematic diagram of the fourth assembly and adjustment state of the periscope optical path integration method provided in Example 1 of the present application;

[0043] Figure 5 This is a schematic diagram of the fifth assembly and adjustment state of the periscope optical path integration method provided in Example 1 of the present application;

[0044] Figure 6 This is a schematic diagram of the sixth assembly and adjustment state of the periscope optical path integration method provided in Example 1 of the present application;

[0045] Figure 7 This is a schematic diagram of the seventh assembly and adjustment state of the periscope optical path integration method provided in Example 1 of the present application;

[0046] Figure 8 This is a schematic structural diagram of the periscope optical path assembled by the periscope optical path integration method provided in Example 1 of the present application.

[0047] Reference numerals:

[0048] 10-first optical component; 1-object plane; 2-first mirror group; 3-reflecting prism; 4-spherical mirror group; 5-plane mirror group; 6-periscope group; 20-second optical component; 7-third mirror group; 8-centering device; 9-plane reflector; 11-mirror positioner; 12-CCD camera. DETAILED DESCRIPTION

[0049] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0050] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0051] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0052] Example 1

[0053] See also Figures 1 to 8 As shown, an embodiment of the present application provides a periscope optical path integration method for assembling and integrating a periscope optical path. The periscope optical path includes a first optical component 10, a second optical component 20, and a periscope lens group 6 located between the first optical component 10 and the second optical component 20 along the propagation direction of the optical path. A non-parallel optical path exists in at least one of the first optical component 10, the periscope lens group 6, and the second optical component 20. Through the periscope optical path integration method, the periscope optical path can be integrated into the final output optical path, that is, the output optical path of the second optical component 20 meets the requirements of the z-axis reference, the y-axis reference, the x-direction reference, and the y-direction reference.

[0054] Optionally, the first optical component 10 includes an object plane 1, a first lens group 2, a reflecting prism 3, a spherical lens group 4 and a plane lens group 5 arranged in sequence along the y direction, wherein the light path formed from the object plane 1 to the first lens group 2 extends along the y direction, is reflected by the reflecting prism 3, is incident along the x direction toward the spherical lens group 4, and finally emits non-parallel light along the x direction from the plane lens group 5 to the periscope group 6.

[0055] The second optical assembly 20 includes a third lens group 7 and a CCD camera 12 . The periscope group 6 emits non-parallel light to the third lens group 7 , which is projected into the CCD camera 12 through the third lens group 7 , so that the object plane 1 is imaged in the CCD camera 12 .

[0056] The periscope optical path integration method provided in the embodiments of the present application includes the following steps:

[0057] Step S100: Install the first optical component 10, install a centering device 8 behind the first optical component 10 along the optical path, and align the centering device 8 with the output optical axis of the first optical component 10 to determine the x-direction reference and the y-direction reference of the first optical component 10;

[0058] Step S200, moving the centering tool 8 so as to align the centering tool 8 with a predetermined installation position of the periscope assembly 6, the predetermined installation position being located between the first optical component 10 and the centering tool 8;

[0059] Step S300, installing the periscope assembly 6 at a predetermined installation position;

[0060] Step S400, adjusting the lens angle of the periscope assembly 6 until the centering device 8 is aligned with the output optical axis of the first optical component 10 around the x-direction reference and the y-direction reference again;

[0061] Step S500, moving the centering tool 8 along the y-direction until the centering tool 8 completes alignment with the output optical axis of the first optical component 10 along the y-direction reference;

[0062] Step S600: Install the second optical assembly 20 behind the periscope assembly 6 along the optical path, and adjust the second optical assembly 20 until the output optical axis of the second optical assembly 20 is coaxial with the centering device 8 along the y-direction reference.

[0063] Step S700: Replace the centering device 8 with the mirror locator 11, and fix the second optical component 20 to the mirror locator 11;

[0064] Step S800 , the first optical component 10 is translated along the z direction until the first optical component 10 and the second optical component 20 are aligned along the z direction reference, and the first optical component 10 is fixed.

[0065] The centering device 8 is a high-precision, non-contact lens center deviation measuring instrument capable of detecting the mechanical coaxiality of the lens assembly. Based on this function, the centering device 8 is used during the integrated alignment process between the first optical assembly 10, the periscope assembly 6, and the second optical assembly 20 of the periscope optical path. Specifically, the centering device 8 can be an internal focusing centering device with a self-collimation function.

[0066] In step S100, Figure 1 As shown, the position of the centering device 8 can be adjusted for the first time so that the centering device 8 can receive the outgoing light path of the first optical component 10 and temporarily fix the first optical component 10 to determine the x-direction reference and the y-direction reference of the first optical component 10 through the centering device 8.

[0067] In step S200, by adjusting the position of the centering instrument 8 for the second time, it is ensured that the centering instrument 8 can receive the outgoing light path of the periscope assembly 6, so as to facilitate the installation and adjustment of the periscope assembly 6 in steps S300 and S400.

[0068] In step S400, Figure 3 and Figure 4As shown, since the addition of the periscope group 6 in step S300 will cause optical axis deviation, adjusting the lens angle of the periscope group 6 can eliminate the optical axis deviation caused by the heating of the periscope group 6, and ensure that after the periscope group 6 is installed, the centering device 8 can still maintain a self-aligned state around the x-direction reference and the y-direction reference with the output optical axis of the first optical component 10.

[0069] This ensures that before assembling the second optical component 20, the outgoing light path of the periscope group 6 meets the self-alignment requirements around the x-direction reference and the y-direction reference. By first self-aligning the first optical component 10 and then self-aligning the entirety of the first optical component 10 and the periscope group 6, the degrees of freedom of the first optical component 10 and the periscope group 6 are decoupled.

[0070] In step S500, Figure 5 As shown, by performing a third position adjustment on the centering device 8 , the adjusted centering device 8 is self-aligned with the output optical axis of the first optical component 10 along the y direction.

[0071] In step S600, Figure 6 As shown, the periscope group 6 and the first optical component 10 that have been fixed and debugged are directly debugged with the output optical axis of the periscope group 6 (that is, the optical axis of the locator) as the reference to only debug the second optical component 20 to ensure that the second optical component 20 can still meet the requirements of the y-direction reference, the x-direction reference and the y-direction reference after assembly.

[0072] In step S700, Figure 7 As shown, the centering device 8 is directly replaced with the mirror aligner 11, ensuring that all components of the periscope optical path are in place. The second optical assembly 20 and the mirror aligner 11 are connected as a whole. The mirror aligner 11 uses laser interferometry to measure the spacing between lenses. It is used in step S800 to ensure that the measured spacing between lenses is the same along the z-direction reference. The z-direction reference is perpendicular to the x-direction reference, and the z-direction reference is perpendicular to the y-direction reference.

[0073] In step S800, Figure 8 As shown, since the current periscope optical path does not meet the requirement of the z-direction reference, the first optical component 10 is translated along the z-direction until the optical axis distance between the plane mirror group 5 and the second optical component 20 along the z-direction reaches a set value. Only then is it considered that the first optical component 10 and the second optical component 20 have completed self-alignment along the z-direction reference. Therefore, by moving the first optical component 10, the periscope optical path simultaneously meets the requirements of the z-direction reference, the y-direction reference, the reference around the x-direction reference, and the reference around the y-direction reference.

[0074] The reason for adjusting only the first optical assembly 10 is that the z-axis distance can be adjusted while maintaining the periscope optical path, the second optical assembly 20, and the mirror aligner fixed. This ensures that z-axis adjustment does not affect the autocollimation state established in the previous step. Furthermore, the mirror aligner serves as a fixed measuring device in this step, which helps improve measurement accuracy.

[0075] It can be understood that during the integrated installation of the periscope optical path, the periscope optical path integration method mainly needs to control the z-direction reference, the y-direction reference, the alignment accuracy around the x-direction reference and around the y-direction reference, without the need to control the x-direction reference and the alignment accuracy around the z-direction reference.

[0076] In this embodiment, in step S100, it is determined that the alignment accuracy of the first optical component 10 and the centering device 8 around the x-direction reference and the alignment accuracy around the y-direction reference are both no more than 5", for example, 2", 3", 4" or 5", etc., to provide a more accurate reference reference for the adjustment of the centering device 8 and the periscope group 6 after step S100, thereby improving the adjustment accuracy of the centering device 8 and the periscope group 6, and further ensuring that the periscope integrated optical path integration method can achieve high-precision assembly and adjustment.

[0077] In this embodiment, the alignment accuracy of the first optical component 10 and the centering device 8 around the x-direction reference and the alignment accuracy around the y-direction reference determined in step S400 are both no more than 2", for example, 1" or 2", etc., which provides a more accurate reference reference for the installation of the second optical component 20 and the mirror locator 11 after step S400, thereby improving the assembly accuracy between the first optical component 10, the second optical component 20 and the mirror locator 11, and further ensuring that the periscope integrated optical path integration method can achieve high-precision assembly and adjustment.

[0078] In an alternative embodiment of the present invention, the first optical assembly 10 includes a spherical lens group 4 and a plane lens group 5. The spherical lens group 4 and the plane lens group 5 are located at the rear of the first optical assembly 10 along the optical path. Specifically, the principal axes of the spherical lens group 4 and the plane lens group 5 are both coaxially arranged with the output optical axis of the first optical assembly 10.

[0079] On this basis, the x-reference and y-reference determined in step S100 are: the axis passing through the center of the spherical mirror group 4 and extending along the output optical axis direction of the first optical component 10 is used as the x-reference, the axis passing through the center of the spherical mirror group 4 and perpendicular to the x-reference is used as the y-reference, the plane where the plane mirror group 5 is located is used as the y-reference, and the plane passing through the center of the spherical mirror group 4 and perpendicular to the plane where the plane mirror group 5 is located is used as the x-reference.

[0080] This makes it easy for the locator to determine the x-axis reference, the y-axis reference, the reference around the x-axis and the reference around the y-axis, reducing the difficulty of debugging.

[0081] In view of this, in this embodiment, while the centering device 8 maintains alignment around the x-direction reference and the y-direction reference, the centering device 8 is moved along the y-direction until the center image of the centering device 8 and the spherical mirror group 4 cross coincide with each other, thereby achieving the purpose of completing the alignment of the centering device 8 with the output optical axis of the first optical component 10 along the y-direction reference in step S500.

[0082] In an optional solution of this embodiment, step S200 specifically includes the following steps:

[0083] Step S210, installing a plane reflector 9 at a predetermined installation position of the periscope assembly 6, wherein the plane reflector 9 can cover the periscope assembly 6 along the y direction;

[0084] Step S211 : Move the centering device 8 along the x-direction and the y-direction until the centering device 8 moves to within the exit height range of the periscope assembly 6 .

[0085] Specifically, in step S210, if Figure 2 As shown, the plane reflector 9 needs to be installed at a predetermined installation position with its optical axis parallel to the light output axis of the first optical writing assembly and the optical axis of the centering device 8 .

[0086] In step S211 , it is necessary to first estimate the exit height range of the periscope assembly 6 , then keep the plane reflector 9 stationary, and then move and adjust the centering device 8 .

[0087] Therefore, by setting the plane reflector 9 and moving and adjusting the position of the centering instrument 8, not only can the positioning instrument be adjusted to a suitable y-direction height, but also the distance between the internal focusing centering instrument 8 and the first optical component 10 along the x-direction can be shortened.

[0088] In an optional solution of this embodiment, step S300 specifically includes the following steps:

[0089] Step S310: remove the plane reflector 9 and find the predetermined installation position of the periscope assembly 6 at the interval between the first optical component 10 and the centering device 8 along the optical path direction;

[0090] Step S311: Install the periscope assembly 6 at a predetermined installation position of the periscope assembly 6.

[0091] Removing the plane reflector 9 before assembling the periscope group 6 can prevent the plane reflector 9 from continuing to cut off the periscope group 6 from the first optical component 10, making it easier for the locator to detect the output light path after the first optical component 10 and the periscope group 6 are coupled.

[0092] In an optional solution of this embodiment, step S400 specifically includes the following steps: adjusting the upper lens of the periscope group 6 until the centering device 8 is re-aligned with the output optical axis of the first optical component 10 around the x-direction reference and the y-direction reference.

[0093] Specifically, the periscope group 6 includes an upper reflector and a lower reflector arranged side by side and spaced apart along the y-direction. Since there is an angular deviation between the verticality of the mechanical processing of the periscope group 6 and the mounting surface of the lower reflector and the mounting surface of the upper reflector, and there will be a large y-direction deviation, adjusting only one of the upper reflector and the lower reflector can reduce the influence of the above-mentioned deviation on the adjustment result, and the lower reflector is not conducive to debugging, so the lower reflector is fixed and only the upper reflector is adjusted to facilitate the adjustment operation of the lens of the periscope group 6.

[0094] In the optional scheme of this embodiment, step S600 is specifically to rotate and translate the second optical component 20. Specifically, the second optical component 20 is rotated at least around the x-axis reference and around the y-axis reference, and the second optical component 20 is moved along the y-axis until the output optical axis of the second optical component 20 is coaxial with the centering device 8.

[0095] In an optional solution of this embodiment, the following steps are further included after step S800:

[0096] Step S910, remove the mirror locator 11;

[0097] Step S911 , installing a CCD camera 12 at the position of the mirror locator 11 .

[0098] like Figure 8 As shown, the mirror locator 11 that plays the function of measuring the optical axis distance is disassembled, and a periscope optical path that also includes a CCD camera 12 is obtained through the periscope optical path integration method.

[0099] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments can still be modified, or some or all of the technical features therein can be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the various embodiments of the present invention. In addition, those skilled in the art will understand that although some embodiments described herein include certain features included in other embodiments but not other features, the combination of features of different embodiments is meant to be within the scope of the present invention and form different embodiments. For example, any of the claimed embodiments can be used in any combination. The information disclosed in this background technology section is intended only to deepen the understanding of the overall background technology of the present invention and should not be regarded as an admission or any form of implication that the information constitutes prior art already known to those skilled in the art.

Claims

1. A periscope optical path integration method, characterized in that: Used to assemble and integrate a periscope optical path, wherein the periscope optical path includes a first optical component, a second optical component, and a periscope lens group located between the first optical component and the second optical component along the propagation direction of the optical path; The periscope optical path integration method comprises the following steps: Installing the first optical assembly, installing a centering device behind the first optical assembly along the optical path, and aligning the centering device with the output optical axis of the first optical assembly to determine an x-direction reference and a y-direction reference of the first optical assembly; Moving a centering tool so as to align the centering tool with a predetermined installation position of the periscope assembly, wherein the predetermined installation position is located between the first optical component and the centering tool; Installing the periscope assembly at the predetermined installation position; Adjusting the lens angle of the periscope assembly until the centering device is aligned with the output optical axis of the first optical component around the x-direction reference and the y-direction reference again; Moving the centering device along the y-direction until the centering device is aligned with the output optical axis of the first optical component along the y-direction reference; Installing the second optical assembly behind the periscope assembly along the optical path, and adjusting the second optical assembly until the output optical axis of the second optical assembly is coaxial with the centering instrument along the y-direction reference; Replacing the centering device with a mirror locator, and fixing the second optical component to the mirror locator; The first optical component is translated along the z direction until the first optical component and the second optical component are aligned along the z direction reference, and the first optical component is fixed.

2. The periscope optical path integration method according to claim 1, characterized in that: The first optical component includes a spherical mirror group and a plane mirror group, and the spherical mirror group and the plane mirror group are located at the rear of the first optical component along the direction of the optical path; The step of aligning the centering instrument with the output optical axis of the first optical component to determine the x-direction reference and the y-direction reference of the first optical component specifically includes the following steps: The center of the spherical mirror group of the first optical component and the plane where the plane mirror group is located are detected by the centering instrument, and the axis passing through the center of the spherical mirror group and extending along the output optical axis of the first optical component is used as the x-direction reference, the axis passing through the center of the spherical mirror group and perpendicular to the x-direction reference is used as the y-direction reference, and the plane where the plane mirror group is located is used as the y-direction reference, and the plane passing through the center of the spherical mirror group and perpendicular to the plane where the plane mirror group is located is used as the x-direction reference.

3. The periscope optical path integration method according to claim 2, characterized in that: The step of moving the centering tool along the y-direction until the centering tool completes alignment with the output optical axis of the first optical component along the y-direction reference specifically comprises the following steps: In a state where the centering device maintains alignment around an x-direction reference and a y-direction reference, the centering device is moved along the y-direction until the centering device and the spherical center image of the spherical mirror assembly are cross-coincident.

4. The periscope optical path integration method according to claim 1, characterized in that: The step of moving the centering tool so as to align the centering tool with a predetermined installation position of the periscope assembly, wherein the predetermined installation position is located between the first optical component and the centering tool, specifically comprises the following steps: Installing a plane reflector at a predetermined installation position of the periscope group, wherein the plane reflector can cover the periscope group along the y direction; The centering device is moved along the x-direction and the y-direction until the centering device moves into the exit height range of the periscope assembly.

5. The periscope optical path integration method according to claim 4, characterized in that: The step of installing the periscope assembly at the predetermined installation position specifically includes the following steps: Remove the plane reflector and find the predetermined installation position of the periscope assembly at the interval between the first optical component and the centering device along the optical path; The periscope assembly is installed at a predetermined installation position of the periscope assembly.

6. The periscope optical path integration method according to claim 1, characterized in that: The step of adjusting the lens angle of the periscope assembly until the centering device completes the alignment with the output optical axis of the first optical component around the x-direction reference and the y-direction reference specifically includes the following steps: Adjust the upper lens of the periscope assembly until the centering device is aligned with the output optical axis of the first optical component around the x-direction reference and the y-direction reference again.

7. The periscope optical path integration method according to claim 1, characterized in that: The step of adjusting the second optical component until the output optical axis of the second optical component is coaxial with the centering device along the y-direction reference specifically includes the following steps: The second optical component is rotated and translated until the output optical axis of the second optical component is coaxial with the centering device.

8. The periscope optical path integration method according to claim 1, characterized in that: The centering device is an internal focusing centering device.

9. The periscope optical path integration method according to claim 1, characterized in that: The step of aligning the centering instrument with the output optical axis of the first optical component to determine the x-direction reference and the y-direction reference of the first optical component has an accuracy of no more than 5 inches for the x-direction reference and the y-direction reference.

10. The periscope optical path integration method according to claim 9, characterized in that: The lens angle of the periscope assembly is adjusted until the centering device re-aligns the output optical axis of the first optical component around the x-direction reference and the y-direction reference, and the accuracy around the x-direction reference and the accuracy around the y-direction reference determined by the step of no more than 2".

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