A waterproof driving device for transporting wafers

Abstract

The present invention discloses a waterproof driving device for transporting wafers, which includes a housing and a driving module located inside the housing. The driving module includes a robotic arm driving component and a shaft driving component. One end of the robotic arm driving component is connected to the shaft driving component, and the other end is connected to the robotic arm. The shaft driving component drives the robotic arm to move through the robotic arm driving component. The shaft driving component is located inside the housing, and the robotic arm is located outside the housing. It further includes a telescopic tube. One end of the telescopic tube is fixedly connected to the end of the robotic arm driving component away from the housing, and the other end is fixedly connected to the housing. The waterproof driving device for transporting wafers provided by the present invention has the function of preventing splashing water and can be applied to different wafer handling occasions.

Description

Technical Field

[0001] The present invention relates to the field of robot driving devices, and particularly to a waterproof driving device for handling wafers. Background Art

[0002] In the semiconductor field, wafer handling robots are required to transfer wafers between various workstations. General atmospheric robots do not have waterproof functions and can only be used in general environments; in a water-dripping environment, a water receiving tray device needs to be installed on the wafer handling robot to endow it with partial waterproof functions, but the installation of the water receiving tray can only cope with low-speed situations; in a water-splashing environment, a simple water receiving tray device is not sufficient to meet the requirements.

[0003] The traditional servo drive method is a servo motor plus a reducer. Both components are separate individuals, resulting in problems such as excessive length or width when connected together, making the driving device too large in size. This can meet the requirements for general occasions, but it is difficult to meet the requirements when space is limited. Summary of the Invention

[0004] The present invention aims to solve at least one of the problems in the related art to some extent. For this purpose, the object of the present invention is to provide a waterproof driving device for handling wafers, which has the function of preventing water splash and can be applied to different wafer handling occasions.

[0005] To achieve the above object, the present application adopts the following technical solutions: A waterproof driving device for handling wafers includes a housing and a driving module located inside the housing. The driving module includes a robotic arm driving component and a shaft driving component. One end of the robotic arm driving component is connected to the shaft driving component, and the other end is connected to the robotic arm. The shaft driving component drives the robotic arm to move through the robotic arm driving component; the shaft driving component is located inside the housing, and the robotic arm is located outside the housing;

[0006] It further includes a telescopic tube. One end of the telescopic tube is fixedly connected to the end of the robotic arm driving component away from the housing, and the other end is fixedly connected to the housing.

[0007] Further, a lifting frame is further provided inside the housing. The shaft driving component includes a Z-axis driving member. The output end of the Z-axis driving member is connected to the lifting frame, and the Z-axis driving member is fixed to the bottom of the housing.

[0008] Further, a fixed frame is provided inside the housing. The lifting frame is located inside the fixed frame. Vertical sliding rails are provided on the inner side of the fixed frame. The lifting frame is connected to the guide rail slider through a lower adapter. The guide rail slider is located inside the sliding rail and can move along the sliding rail.

[0009] Further, a drag chain assembly is also provided inside the housing. An electrical interface is provided on the side wall of the housing. One end of the drag chain assembly is fixed to the lifting frame, and the other end is fixedly connected to the electrical interface. A drag chain wiring chamber is provided inside the drag chain assembly.

[0010] Further, an air circuit assembly is provided at the bottom of the lifting frame. The air circuit assembly includes a fixed sheet metal, an air pipe structure, a solenoid valve, and a speed control valve. One end of the drag chain assembly away from the electrical interface is adaptively connected to the air circuit assembly.

[0011] Further, a lifting wiring chamber is provided inside the lifting frame. The two ends of the cables in the lifting wiring chamber are respectively connected to the air circuit assembly and the robotic arm drive assembly.

[0012] Further, the shaft drive assembly includes an S-axis drive member. The output end of the S-axis drive member is connected to the robotic arm drive assembly, and the S-axis drive member is fixed in the lifting frame.

[0013] Further, a labyrinth member is provided at one end of the robotic arm drive assembly away from the housing. On the side of the labyrinth member away from the robotic arm drive assembly, there are snake-shaped grooves.

[0014] Further, a waterproof oil seal is provided inside the labyrinth member.

[0015] Further, the robotic arm drive assembly includes a frameless torque motor.

[0016] The above technical solutions provided by the embodiments of the present application have the following advantages compared with the prior art: One end of the robotic arm drive assembly of the present application is connected to the shaft drive assembly, and the other end is connected to the robotic arm. The shaft drive assembly drives the robotic arm to move through the robotic arm drive assembly. Since the shaft drive assembly is located inside the housing and the robotic arm is located outside the housing, a telescopic tube is provided between the robotic arm drive assembly and the housing. One end of the telescopic tube is fixedly connected to the end of the robotic arm drive assembly away from the housing, and the other end is fixedly connected to the housing. When the robotic arm drive assembly moves up and down relative to the housing, the telescopic tube can also move up and down accordingly. In this way, it can be ensured that no splashing water can enter the inside of the housing no matter which position the robotic arm drive assembly moves to. The drive device with a waterproof function of the present application can be applied to the wafer handling occasion containing splashing water, further expanding the application range of the drive device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings here are incorporated into the specification and form a part of this specification, showing embodiments that conform to the present invention and are used together with the specification to explain the principles of the present invention.

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] In the drawings:

[0020] Figure 1 is the front view of the waterproof drive device for transporting wafers in the present application;

[0021] Figure 2 is the side view of the waterproof drive device for transporting wafers in the present application;

[0022] Figure 3 is the top view of the waterproof drive device for transporting wafers in the present application;

[0023] Figure 4 is the external view schematic diagram of the fixing frame in the present application;

[0024] Figure 5 is the external view schematic diagram of the housing in the present application;

[0025] Reference numerals: 1. Drag chain assembly; 2. Electrical interface; 3. Pneumatic circuit assembly; 4. Lifting frame; 5. Housing; 6. Fixing frame; 7. S-axis drive member; 8. Manipulator drive assembly; 9. Telescopic tube; 10. Z-axis drive member; 11. Guide rail slider; 12. Housing sheet metal one; 13. Housing sheet metal two; 14. Waterproof oil seal; 15. Labyrinth part; 16. Lower adapter; 17. Crossed roller bearing; 18. Upper adapter. Detailed implementation manners

[0026] To have a clearer understanding of the technical features, objectives, and effects of the present invention, the following will describe the detailed implementation manners of the present invention with reference to the drawings. In the following description, it should be understood that the orientation or positional relationships indicated by "front", "rear", "upper", "lower", "left", "right", "longitudinal", "transverse", "vertical", "horizontal", "top", "bottom", "inner", "outer", "head", "tail", etc. are based on the orientation or positional relationships shown in the drawings and are constructed and operated in a specific orientation, only for the convenience of describing the present technical solution, rather than indicating that the indicated mechanism or component must have a specific orientation. Therefore, it should not be construed as a limitation to the present invention.

[0027] It should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "connection", "attachment", "fixation", "setting" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. When a component is referred to as "on" or "under" another component, the component can be "directly" or "indirectly" located above the other component, or there may also be one or more intermediate components. Terms such as "first", "second", "third", etc. are only for the convenience of describing the present technical solution, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second", "third", etc. may explicitly or implicitly include one or more of such features. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In the following description, specific details such as specific system structures and technologies are presented for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present invention. However, those skilled in the art should clearly understand that the present invention can also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, mechanisms, circuits, and methods are omitted to avoid unnecessary details from interfering with the description of the present invention.

[0029] Please refer to Figures 1 - 5 , a waterproof driving device for transporting wafers provided by the present application, includes a housing 5 and a driving module located inside the housing 5. The driving module includes a robotic arm driving component 8 and a shaft driving component. One end of the robotic arm driving component 8 is connected to the shaft driving component, and the other end is connected to the robotic arm. The shaft driving component drives the robotic arm to move through the robotic arm driving component 8; the shaft driving component is located inside the housing 5, and the robotic arm is located outside the housing 5; it also includes a telescopic tube 9. One end of the telescopic tube 9 is fixedly connected to the end of the robotic arm driving component 8 away from the housing 5, and the other end is fixedly connected to the housing 5.

[0030] One end of the robotic arm drive assembly 8 of the present application is connected to the shaft drive assembly, and the other end is connected to the robotic arm. The shaft drive assembly drives the robotic arm to move through the robotic arm drive assembly 8. Since the shaft drive assembly is located inside the housing 5 and the robotic arm is located outside the housing 5, the present application provides a telescopic tube 9 between the robotic arm drive assembly 8 and the housing 5. One end of the telescopic tube 9 is fixedly connected to the end of the robotic arm drive assembly 8 away from the housing 5, and the other end is fixedly connected to the housing 5. When the robotic arm drive assembly 8 moves up and down relative to the housing 5, the telescopic tube 9 can also move up and down accordingly, so that no splashing water can enter the inside of the housing 5 regardless of the position where the robotic arm drive assembly 8 moves. The drive device with a waterproof function of the present application can be applied to the wafer handling occasion containing splashing water, further expanding the application range of the drive device.

[0031] Embodiment 1

[0032] A waterproof drive device for wafer handling provided by the present application includes a housing 5 and a drive module located inside the housing 5. The drive module includes a robotic arm drive assembly 8 and a shaft drive assembly. One end of the robotic arm drive assembly 8 is connected to the shaft drive assembly, and the other end is connected to the robotic arm. The shaft drive assembly drives the robotic arm to move through the robotic arm drive assembly 8. The shaft drive assembly is located inside the housing 5, and the robotic arm is located outside the housing 5.

[0033] In the present application, the robotic arm drive assembly 8 can be implemented by a DD motor or a frameless torque motor. The traditional servo motor drive method has a large volume and certain difficulties in implementation. The robotic arm drive assembly 8 is connected to the robotic arm. Specifically, the robotic arm can include a first arm, a second arm, a third arm, and an end effector. The specific structure of the robotic arm can be set according to actual needs. In the present application, the robotic arm drive assembly 8 can be a single drive system for a single-arm robot or two drive systems for a two-arm robot.

[0034] Specifically, the housing 5 is assembled by housing 5 sheet metal and is the outermost protection of the entire drive device. A fixed frame 6 is also provided inside the housing 5. The fixed frame 6 is a support component of the entire drive device. During the assembly process, all components of the drive device are assembled inside the fixed frame 6. After assembly, the outside of the fixed frame 6 is enclosed by the housing 5 sheet metal. As Figure 5 shown, different sides of the support frame are enclosed by housing sheet metal one 12 and housing sheet metal two 13 respectively. It should be noted that an interface communicating with the outside is also provided on the side wall of the fixed frame 6, and corresponding copper blocks should also be provided on the housing 5 sheet metal to ensure that the interface communicates with the outside. In actual applications, the fixed frame 6 is a casting structure and plays a role of supporting and fixing the entire robot. The machine table is flange-connected to the fixed frame 6.

[0035] The shaft drive assembly in this application includes a Z-axis drive member 10 and an S-axis drive member 7. Among them, the Z-axis drive member 10 is used to drive the robotic arm drive assembly 8 to move vertically up and down, and the S-axis drive member 7 is used to drive the robotic arm drive member to rotate. The shaft drive assembly in this application may also include other shaft drive members. Only the Z-axis drive member 10 and the S-axis drive member 7 are taken as examples for description below.

[0036] Inside the fixed frame 6 in this application, there is also a lifting frame 4 arranged. The output end of the Z-axis drive member 10 is connected to the lifting frame 4, and the Z-axis drive member 10 is fixed to the bottom of the fixed frame 6. When the Z-axis drive member 10 drives the lifting frame 4 to move up and down, the position of the Z-axis drive member 10 remains fixed. The Z-axis drive member 10 mainly includes a servo motor, a synchronous belt system, a ball screw, and related fixing parts. The servo motor and related fixing parts are fixed on the fixed frame 6, and the nut of the ball screw is fixed on the lifting frame 4, providing lifting power for the entire robot.

[0037] The S-axis drive member 7 in this application is fixed in the lifting frame 4 and can move up and down with the lifting frame 4. At the same time, the output end of the S-axis drive member 7 is connected to the robotic arm drive assembly 8, used to drive the robotic arm drive assembly 8 to rotate. When the robotic arm drive assembly 8 rotates, the S-axis drive member 7 and the lifting frame 4 remain stationary. The S-axis drive group is implemented by a traditional servo drive method, that is, an assembly structure of a servo motor, a reducer, a synchronous belt, and a synchronous belt pulley.

[0038] To ensure the smooth lifting of the lifting frame 4, vertical guide rails are arranged on the inner side of the fixed frame 6 in this application. The lifting frame 4 is connected to the guide rail slider 11 through a lower adapter 16. The guide rail slider 11 is located inside the guide rail and can move along the guide rail. Preferably, both the lifting frame 4 and the fixed frame 6 in this application are rectangular structures. The specific number of guide rails can be one or more. To ensure the smooth lifting of the lifting frame 4, symmetrical guide rails can be arranged on the opposite sides of the lifting frame 4. Each guide rail corresponds to a guide rail slider 11, and each guide rail slider 11 is fixedly connected to the lifting frame 4, used to drive the lifting frame 4 to move up and down smoothly from both sides.

[0039] Inside the fixed frame 6 of this application, a drag chain assembly 1 is also provided, and an electrical interface 2 is provided on the side wall of the fixed frame 6. The electrical interface 2 can be connected to the power cord from the outside. The electrical interface 2 is connected to all power line interfaces, encoder line interfaces, air inlets, suction ports, and ground wire interfaces, including cables, air pipes, and some fixed sheet metal parts. One end of the drag chain assembly 1 is fixed to the lifting frame 4, and the other end is fixedly connected to the electrical interface 2; a drag chain wiring chamber is provided inside the drag chain assembly 1. One end of the wire located inside the drag chain wiring chamber is connected to the electrical interface 2, and the other end is connected to the lifting frame 4. When the lifting frame 4 is lifted or lowered, it can drive the drag chain assembly 1 to lift or lower synchronously, ensuring normal wiring inside the driving device.

[0040] Further, an air circuit assembly 3 is provided at the bottom of the lifting frame 4. The air circuit assembly 3 includes fixed sheet metal, air pipe structures, solenoid valves, speed control valves, etc., and is mainly used for air circuit control and distribution of the robotic arm; one end of the drag chain assembly 1 away from the electrical interface is adaptively connected to the air circuit assembly 3.

[0041] Further, a lifting wiring chamber is provided inside the lifting frame 4. The two ends of the cable in the lifting wiring chamber are respectively connected to the air circuit assembly 3 and the robotic arm drive assembly 8. That is to say, one end of the wire is connected to the external power supply through the electrical interface 2, and the other end passes through the inside of the drag chain wiring chamber and is connected to the air circuit interface; the wire connected to the air circuit interface then passes through the lifting wiring chamber and is connected to the robotic arm drive assembly 8. Through the electrical interface 2, the drag chain wiring chamber, the air circuit interface, and the lifting axis chamber, the circuit connection of the robotic arm drive assembly 8 is realized. When the S-axis drive 7 drives the robotic arm drive assembly 8 to rotate, the cable inside the lifting wiring chamber twists, which will not affect the normal transmission of the cable.

[0042] An upper adapter 18 is provided at the top of the lifting frame 4. The upper adapter in the lifting frame 4 and the robotic arm drive assembly 8 are connected together by a crossed roller bearing 17 to ensure that the robotic arm drive assembly 8 rotates while lifting. The middle of the robotic arm drive assembly 8 is a hollow part, which can be used for wiring. The wire in the lifting wiring chamber passes through the hollow part in the mechanical part drive assembly and is connected to the robotic arm.

[0043] This application also provides a telescopic tube 9. One end of the telescopic tube 9 is fixedly connected to the end of the robotic arm drive assembly 8 away from the housing 5, and the other end is fixedly connected to the housing 5. Please refer to Figure 1 and Figure 2, in this application, the robotic arm driving assembly 8 is located at the top of the housing 5, and the lower end of the robotic arm driving assembly 8 is connected to the lifting frame 4. That is, the lifting frame 4 can drive the robotic arm driving assembly 8 to move up and down. During the lifting process, the robotic arm driving assembly 8 may be partially located inside the housing 5 or completely outside the housing 5. When the lifting assembly drives the robotic arm driving assembly 8 to rise outside the housing 5, the lifting frame 4 extends outside the housing 5, exposing the internal structure of the housing 5. Splashing water will enter the housing 5 along the gap between the lifting frame 4 and the housing 5, affecting the normal operation of the driving device. Therefore, in this application, a telescopic tube 9 is provided between the robotic arm driving assembly 8 and the housing 5. Among them, one end of the telescopic tube 9 is fixed to the top of the robotic arm driving assembly 8, and the other end is fixed to the top of the fixed frame 6. Note: The telescopic tube 9 only moves up and down without rotating, so it needs to be arranged in a non-rotating fixing part in the robotic arm driving assembly 8.

[0044] It is worth noting that when the housing 5 only includes the housing 5 sheet metal surrounding the fixed frame 6 on all sides, the bottom of the telescopic tube 9 is fixed to the top of the fixed frame 6; when the housing 5 includes the housing 5 sheet metal surrounding the fixed frame 6 on all sides and at the top, the bottom of the telescopic tube 9 can be fixed to the top of the housing 5 sheet metal. In this way, no matter which position the robotic arm driving assembly 8 and the lifting frame 4 are lifted to, the telescopic tube 9 will expand and contract accordingly, preventing splashing water from entering the housing 5 through the gap between the lifting frame 4 and the housing 5.

[0045] Furthermore, in this application, a labyrinth member 15 is provided at one end of the robotic arm driving assembly 8 away from the housing 5, and a serpentine groove is provided on the side of the labyrinth member 15 away from the robotic arm driving assembly 8. As Figure 1 and Figure 2 shown, the labyrinth member 15 is arranged at the top of the robotic arm driving assembly 8. Since the labyrinth member 15 is provided with a serpentine groove inside, when splashing water enters the labyrinth member 15, it can be stored inside the groove, preventing splashing water from entering the robotic arm driving assembly 8. At the same time, in this application, a drainage tube can also be provided at the end of the groove of the labyrinth member 15 to drain the splashing water inside the groove in time.

[0046] To further enhance the waterproof effect, a waterproof oil seal 14 is also provided inside the labyrinth member 15 of this application to prevent splashing water from entering the robotic arm driving assembly 8 from the side of the labyrinth member 15.

[0047] In this application, the exposed screw washers are made of fluororubber material, which not only plays a sealing role but also plays a role in preventing weak acids and weak alkalis. The exposed parts in this application are coated with Teflon, which has corrosion resistance and can be applied to more severe environments.

[0048] It can be understood that the above embodiments only represent the preferred embodiments of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent for the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, the above technical features can be freely combined, and several deformations and improvements can also be made, which all fall within the protection scope of the present invention. Therefore, all equivalent transformations and modifications made to the scope of the claims of the present invention shall fall within the scope covered by the claims of the present invention.

Claims

1. A waterproof driving device for transporting wafers, comprising a housing and a driving module located inside the housing, characterized in that, The driving module includes a robotic arm driving component and a shaft driving component. One end of the robotic arm driving component is connected to the shaft driving component, and the other end is connected to the robotic arm. The shaft driving component drives the robotic arm to move through the robotic arm driving component. The shaft driving component is located inside the housing, and the robotic arm is located outside the housing. It further includes a telescopic tube. One end of the telescopic tube is fixedly connected to the end of the robotic arm driving component away from the housing, and the other end is fixedly connected to the housing. A labyrinth component is provided at the end of the robotic arm driving component away from the housing. A serpentine groove is provided on the side of the labyrinth component away from the robotic arm driving component. A waterproof oil seal is provided inside the labyrinth component. A lifting frame is further provided inside the housing. The shaft driving component includes a Z-axis driving member. The output end of the Z-axis driving member is connected to the lifting frame, and the Z-axis driving member is fixed to the bottom of the housing. The shaft driving component includes an S-axis driving member. The output end of the S-axis driving member is connected to the robotic arm driving component, and the S-axis driving member is fixed in the lifting frame. A fixed frame is provided inside the housing. The lifting frame is located inside the fixed frame. Vertical sliding rails are provided on the inner side of the fixed frame. The lifting frame is connected to the guide rail slider through a lower adapter. The guide rail slider is located inside the sliding rail and can move along the sliding rail.

2. The waterproof driving device for transporting wafers according to claim 1, characterized in that, A drag chain component is further provided inside the housing. An electrical interface is provided on the side wall of the housing. One end of the drag chain component is fixed to the lifting frame, and the other end is fixedly connected to the electrical interface. A drag chain wiring chamber is provided inside the drag chain component.

3. The waterproof driving device for transporting wafers according to claim 2, characterized in that, An air circuit component is provided at the bottom of the lifting frame. The air circuit component includes a fixed sheet metal, a tracheal structure, a solenoid valve, and a speed regulating valve. The end of the drag chain component away from the electrical interface is adaptively connected to the air circuit component.

4. A waterproof driving device for transporting wafers according to claim 3, characterized in that, A lifting wiring chamber is provided inside the lifting frame. The cables in the lifting wiring chamber are respectively connected to the air circuit component and the robotic arm driving component at both ends.

5. A waterproof driving device for transporting wafers according to claim 1, characterized in that, The robotic arm driving component includes a frameless torque motor.

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