Composite film preparation equipment

Abstract

The present invention discloses a composite thin film preparation device, comprising a base, a support structure, a coating and scraping structure, a film-forming disk, and a driving device. The film-forming disk is arranged on the top of the driving device, and a translation structure is provided on the support structure. The coating and scraping structure is connected to the translation structure, and the translation structure is used to connect and drive the coating and scraping structure to move horizontally. The coating and scraping structure comprises a feed barrel, a diverter plate, and a scraping plate. The feed barrel is arranged on the top of the diverter plate, and the scraping plate is arranged on the bottom of the diverter plate. The feed barrel is provided with a feed port running through the top and bottom. The diverter plate is provided with a main channel and a diverter channel inside, and one end of the diverter channel is connected to the feed port. A diverter switch is provided in the feed barrel. The composite thin film preparation device of the present invention can realize spin coating and scraping coating simultaneously. When the coating and scraping structure is spin-coating, the diverter switch is closed, and the coating and scraping structure cooperates with the driving device to perform spin coating. When the coating and scraping structure is scraping, the diverter switch is opened, so that the solution to be coated is diverted in the diverter channel before being scraped.

Description

Technical Field

[0001] The present invention relates to the field of composite film preparation, and in particular to a composite film preparation device. Background Art

[0002] Composite films are generally prepared by spin coating and blade coating. For example, application number 201410504650.X discloses a "Silver Nanowire-M Phase Vanadium Dioxide Nanoparticle Composite Film and Preparation Method Thereof." The prepared solution is coated on a substrate, and three layers of solutions with different compound components are coated separately, and a composite film is formed after drying. In the prior art, spin coating and blade coating are performed separately. Each coating method has its own advantages and is suitable for the preparation of different types of films. Since the two coating methods need to be performed separately, the equipment or tools involved are also different. Therefore, there is a lack of separate equipment specifically for preparing composite films when preparing composite films. Summary of the Invention

[0003] The purpose of the present invention is to provide a composite thin film preparation device that can simultaneously realize spin coating and scraping coating. The diversion switch of the scraping structure is closed during spin coating, and the spin coating is carried out in conjunction with the driving device. The diversion switch of the scraping structure is opened during scraping coating, so that the solution to be coated is scraped after being diverted in the diversion channel. The solution after diversion is easier to scrape evenly.

[0004] The embodiments of the present invention are achieved through the following technical solutions:

[0005] A composite thin film preparation device, comprising a base, a support structure, a coating and scraping structure, a film-forming disk, and a driving device, wherein the support structure and the driving device are respectively arranged on the top of the base, the film-forming disk is arranged on the top of the driving device, the support structure is provided with a translation structure, the coating and scraping structure is connected to the translation structure, and the translation structure is used to connect and drive the coating and scraping structure to move horizontally;

[0006] The scraping structure includes a feed barrel, a diverter plate and a scraping plate. The feed barrel is arranged at the top of the diverter plate, and the scraping plate is arranged at the bottom of the diverter plate. The feed barrel is provided with a feed port running through the top and bottom. A main channel and multiple diverter channels are provided inside the diverter plate, and one end of the multiple diverter channels is connected to the feed port; a diverter switch for opening and closing the diverter channel is provided inside the feed barrel.

[0007] In one embodiment of the present invention, a heating device is provided at the bottom of the film forming disk.

[0008] In one embodiment of the present invention, the support structure includes a fixed support rod and a rotating support rod, the rotating support rod is rotatably connected relative to the fixed support rod, the rotating support rod is arranged at the top end of the fixed support rod, the bottom end of the fixed support rod is connected to the base, and the rotating support rod is connected to the translation structure; the scraping structure includes three, and the three scraping structures are arranged in a circular manner around the rotating support rod.

[0009] In one embodiment of the present invention, a funnel-shaped feeding hopper is provided on the top of the feeding cylinder.

[0010] In one embodiment of the present invention, a clamping ring is provided on the translation structure, and the clamping ring is sleeved on the outside of the feeding barrel of the coating structure. The side of the clamping ring is provided with an adjustment structure for adjusting the clamping tightness of the clamping ring.

[0011] In one embodiment of the present invention, the translation structure is a hydraulic telescopic rod.

[0012] In one embodiment of the present invention, a switch hole is opened on the outside of the feeding barrel, and the diverter switch includes a rotary handle and a diverter block. The diverter block is cylindrical, and the side wall of the diverter block is provided with a direct current channel running through both sides thereof and a plurality of branch channels arranged perpendicular to the direct current channel and running through the side wall of the diverter block.

[0013] The technical solutions of the embodiments of the present invention have at least the following advantages and beneficial effects:

[0014] The embodiment of the present invention has the functions of both scraping and spin coating, which solves the problem of lack of separate dedicated equipment in the preparation of composite films; when the scraping structure is spin-coated, the diversion switch is closed, and the feed barrel of the scraping structure concentrates the configured solution through the main channel of the diversion plate and falls to the middle of the substrate placed in advance on the film-forming disk. The driving device can drive the film-forming disk to rotate, and utilizes the centrifugal force generated by the rotation of the substrate when the film-forming disk rotates to evenly coat the solution on the substrate; when the scraping structure is scraped, the diversion switch is opened, and the feed port of the feed barrel is connected to the diversion channel, so that the solution to be coated is diverted in the diversion channel and distributed more evenly in the length direction of the scraping plate. The diverted solution is easier to scrape evenly, and the translation structure drives the scraping plate of the scraping structure to scrape on the substrate in a direction perpendicular to the scraping plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1A schematic side view of a composite film preparation device according to the present invention;

[0017] Figure 2 It is a structural schematic diagram of the scraping structure of the present invention;

[0018] Figure 3 It is a cross-sectional schematic diagram of the scraping structure of the present invention;

[0019] Figure 4 It is a bottom schematic diagram of the scraping structure of the present invention;

[0020] Figure 5 A schematic cross-sectional view of the film forming disk and the driving device portion of the present invention;

[0021] Figure 6 for Figure 3 Enlarged schematic diagram of point A in the middle.

[0022] Icon: 1-base, 21-fixed support rod, 22-rotating support rod, 3-scraping structure, 31-feed barrel, 32-diverter plate, 321-main channel, 322-diverter channel, 33-scraping plate, 34-feed hopper, 4-film forming disk, 41-baffle, 5-motor, 6-hydraulic telescopic rod, 61-clamping ring, 62-bolt, 7-heating plate, 81-direct current channel, 82-branch channel, 9-rotating handle. DETAILED DESCRIPTION

[0023] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0024] Please refer to Figures 1-6 A composite thin film preparation device includes a base 1, a supporting structure, a coating and scraping structure 3, a film-forming disk 4 and a motor 5. The supporting structure and the motor 5 are respectively arranged on the top of the base 1, wherein the driving shaft of the motor 5 is arranged vertically upward, and the film-forming disk 4 is arranged at the top of the machine shaft of the motor 5. A hydraulic telescopic rod 6 is provided on the supporting structure, and the coating and scraping structure 3 is connected to the hydraulic telescopic rod 6. The telescopic direction of the hydraulic telescopic rod 6 is horizontal, and the position of the coating and scraping structure 3 can be adjusted. Especially in the coating operation, the hydraulic telescopic rod 6 can be stably translated to improve the stability of the coating; the end of the hydraulic telescopic rod 6 is provided with a clamping ring 61 connected to the coating and scraping structure 3.

[0025] The coating and scraping structure 3 includes a feed barrel 31, a diverter plate 32 and a scraping plate 33. The feed barrel 31 is arranged at the top of the diverter plate 32, and the scraping plate 33 is arranged at the bottom of the diverter plate 32. The feed barrel 31 is provided with a feed port running through the top and bottom. The clamping ring 61 is clamped on the outside of the feed barrel 31. The inner diameter of the clamping ring 61 is larger than the outer diameter of the feed barrel 31. A screw hole is opened on the side of the clamping ring 61, and a bolt 62 is passed through the screw hole. The bolt 62 can loosen or tighten the clamping ring 61 to clamp the feed barrel 31, so as to adjust the height of the coating and scraping structure 3 to match the position of the substrate. The interior of the diverter plate 32 is provided with a main channel 321 and multiple diverter channels 322, one end of each of the multiple diverter channels 322 is connected to the feed port; a diverter switch for opening and closing the diverter channel 322 is provided in the feed barrel 31, and a switch hole is provided on the outside of the feed barrel 31. The diverter switch includes a rotary handle 9 and a diverter block. The diverter block is cylindrical, and the side wall of the diverter block is provided with a direct current channel 81 running through both sides thereof and multiple branch channels 82 arranged perpendicular to the direct current channel 81 and running through the side wall of the diverter block. During actual installation, the diverter switch is provided at the switch hole, and the rotary handle 9 is outside the feed barrel 31 for rotating the diverter block. The diverter block is inside the feed barrel 31, and a sealing ring is provided in the switch hole to prevent the solution from overflowing when flowing through the switch hole; during spin coating, the diverter block is rotated to a vertical position of the direct current channel 81 and connected to the main channel 321 of the diverter plate 32. During scraping, the diverter block is rotated to a vertical position of the branch channel 82 and connected to the diverter channel 322 to realize switching between the two coating methods.

[0026] It should be noted that: the embodiment of the present invention has the functions of both scraping and spin coating, which solves the problem of lack of separate dedicated equipment in the preparation of composite films; when the scraping structure 3 is spin-coated, the diversion switch is closed, and the feed barrel 31 of the scraping structure 3 concentrates the configured solution through the main channel 321 of the diversion plate 32 and falls to the middle of the substrate placed in advance on the film-forming disk 4. The motor 5 can drive the film-forming disk 4 to rotate, and the centrifugal force generated by the rotation of the substrate when the film-forming disk 4 rotates is used to evenly coat the solution on the substrate; when the scraping structure 3 is scraped, the diversion switch is opened, and the feed port of the feed barrel 31 is connected to the diversion channel 322, so that the solution to be coated is diverted in the diversion channel 322 and distributed more evenly in the length direction of the scraping plate 33. The diverted solution is easier to scrape evenly, and the hydraulic telescopic rod 6 drives the scraping plate 33 of the scraping structure 3 to scrape on the substrate in a direction perpendicular to the scraping plate 33.

[0027] In this embodiment, if Figure 1 and Figure 5 As shown, a heating plate 7 is provided at the bottom of the film forming disc 4. When the solution is dried after coating, the heating plate 7 can be used for heating and drying, thus saving drying time.

[0028] In this embodiment, if Figure 1As shown, the support structure includes a fixed support rod 21 and a rotating support rod 22. A hollow groove is provided at the bottom end of the rotating support rod 22. The bottom end of the rotating support rod 22 is sleeved on the top end of the fixed support rod 21 through the hollow groove. The bottom end of the fixed support rod 21 is connected to the base 1, and the rotating support rod 22 is connected to the translation structure. Preferably, there are three scraping structures, and the three scraping structures are arranged in a circular pattern around the rotating support rod 22 (not shown in the figure). When actually preparing a silver nanowire-M phase vanadium dioxide nanoparticle composite film, the composite film includes three layers, that is, three coating operations are required. The three scraping structures can separate the coated solutions to avoid other solutions remaining on the scraping structure after the previous layer of solution is coated, which affects the subsequent coating. After each coating, the rotating support rod 22 is rotated to rotate the corresponding scraping structure to the top of the film forming disk 4.

[0029] In this embodiment, if Figure 2-3 As shown, a funnel-shaped feed hopper 34 is provided on the top of the feed cylinder 31 to reduce the probability of splashing when pouring the solution.

[0030] In this embodiment, if Figure 5 As shown, baffles 41 are provided around the film-forming disk 4 to block the solution being thrown out during spin coating.

[0031] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A composite film preparation device, characterized in that: The device comprises a base, a supporting structure, a coating and scraping structure, a film-forming disk and a driving device, wherein the supporting structure and the driving device are respectively arranged on the top of the base, the film-forming disk is arranged on the top of the driving device, the supporting structure is provided with a translation structure, the coating and scraping structure is connected to the translation structure, and the translation structure is used to connect and drive the coating and scraping structure to move horizontally; The coating and scraping structure includes a feed cylinder, a diverter plate and a scraping plate. The feed cylinder is arranged at the top of the diverter plate, and the scraping plate is arranged at the bottom of the diverter plate. The feed cylinder is provided with a feed port running through the top and bottom. The diverter plate is provided with a main channel and multiple diverter channels inside. One end of the multiple diverter channels is connected to the feed port. A diverter switch for opening and closing the diverter channel is provided inside the feed cylinder. The shunt switch includes a rotary handle and a shunt block. The shunt block is cylindrical. The side wall of the shunt block is provided with a direct current channel running through both sides thereof and a plurality of branch channels arranged perpendicular to the direct current channel and running through the side wall of the shunt block. When spin coating, rotate the diverter block until the DC channel is vertical and connected to the main channel of the diverter plate. When scraping, rotate the diverter block until the branch channel is vertical and connected to the diverter channel.

2. A composite film preparation device according to claim 1, characterized in that: A heating device is provided at the bottom of the film forming disk.

3. The composite film preparation device according to claim 1, characterized in that: The support structure includes a fixed support rod and a rotating support rod. The rotating support rod is rotatably connected relative to the fixed support rod. The rotating support rod is arranged at the top end of the fixed support rod. The bottom end of the fixed support rod is connected to the base. The rotating support rod is connected to the translation structure. The scraping structure includes three, and the three scraping structures are arranged in a circle around the rotating support rod.

4. The composite film preparation device according to claim 1, characterized in that: A funnel-shaped feeding hopper is provided on the top of the feeding cylinder.

5. The composite film preparation device according to claim 3, characterized in that: A clamping ring is provided on the translation structure, and the clamping ring is sleeved on the outside of the feeding cylinder of the coating and scraping structure. An adjustment structure for adjusting the clamping tightness of the clamping ring is provided on the side of the clamping ring.

6. The composite film preparation device according to claim 5, characterized in that: The translation structure is a hydraulic telescopic rod.

7. The composite film preparation device according to claim 1, characterized in that: A switch hole is provided on the outer side of the feeding cylinder.

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