An OLED and its substrate drying machine after cleaning and its drying process

Abstract

The present invention discloses an OLED and its substrate cleaning and air-drying machine and its air-drying process, which includes an air-drying mechanism, an air-drying box body, a transfer manipulator, a transfer platform and a blanking manipulator. The air-drying box body includes two groups, which are respectively arranged on the rack in parallel at intervals along the material transmission direction to form a double air-drying channel; the air-drying mechanism includes two groups, and the two air-drying mechanisms are respectively arranged in the air-drying box body. The air-drying mechanism includes an air-drying carrier table, an air-drying manipulator and an air-drying component; the transfer platform is arranged at the rear end of the rack at intervals from the air-drying box body, and the transfer manipulator straddles between the air-drying box body and the transfer platform; the blanking manipulator is arranged on the side of the transfer platform and extends out of the rack. The present invention adopts a double air-drying channel and a single-time multi-piece air-drying method, effectively improving the air-drying efficiency. It adopts a hollow vacuum loading and transfer structure to synchronously complete the air-drying actions on the upper and lower surfaces during the loading and transfer processes, and adopts an adjustable independent adsorption structure for OLED and FPC, which is suitable for the stable transfer of various OLEDs and FPCs.

Description

Technical Field

[0001] The present invention relates to the field of automated equipment, and particularly to an air dryer for an OLED and its substrate after cleaning and an air drying process thereof. Background Art

[0002] In the field of flat panel display device production equipment, the components involved include glass substrates, cover plates, FPCs, and various optical films. When performing processes such as assembly and lamination of the components of flat panel display devices, pre-processing processes are required. For example, the cleaning process is an essential front-end process during the assembly and lamination of flat panel display devices, and its function is to clean the surface of the screen. During the production process of OLED screens, there is an intermediate layer of glue between the OLED and the upper substrate. This intermediate layer of glue needs to be removed by laser peeling. The laser irradiates the surface of the substrate, passes through the substrate, and then hits the intermediate glue layer to achieve the function of peeling off the glue layer. To ensure that the laser can effectively penetrate the substrate and reduce the blockage of debris on the substrate surface, it is necessary to clean the substrate surface before laser peeling. Since the sticky debris on the substrate surface is difficult to remove, the generally adopted process is grinding and cleaning, that is, by pressing a grinding disc against the surface of the substrate and rotating the grinding disc to grind the surface of the substrate, separating the debris from the substrate surface and then removing it.

[0003] Since the OLED substrate needs to be sprayed and rinsed with liquid or a two-fluid mixture of liquid and gas during the cleaning process to assist in improving the cleanliness; therefore, there will be liquid remaining on the surface of the substrate after grinding and cleaning, and the remaining liquid needs to be dried and removed before entering the next process. The generally adopted drying process is air drying. When drying, it is necessary to dry both the upper and lower surfaces simultaneously. Traditional air drying equipment cannot dry both the upper and lower surfaces of the OLED while transporting the sheet-shaped OLED; and because the strong wind during air drying will impact the OLED, if there is no fixing measure during the transportation of the OLED during air drying, it is extremely easy to be blown by the strong wind and the position will shift, affecting air drying and transportation. In addition, since the side of the OLED is connected to the FPC, the shape structure and material characteristics of the FPC are different from those of the OLED. Therefore, different carrier, adsorption / transport mechanisms need to be designed for the OLED and the FPC during transportation, air drying, and adsorption and transfer. In addition, traditional single-unit air dryers can only dry a single piece of material at a time, with low efficiency and unable to meet the air drying production capacity requirements in high-speed automated production lines. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide, in view of the deficiencies of the above-mentioned prior art, an air-drying machine and an air-drying process for an OLED and its substrate after cleaning, which adopt a double air-drying channel and a single-time multi-piece air-drying method, effectively improving the air-drying efficiency, adopt a hollow vacuum loading and moving structure, synchronously complete the air-drying actions on the upper and lower surfaces during the loading and moving processes, and adopt an adjustable OLED and FPC independent adsorption structure, which is suitable for the stable moving of various OLEDs and FPCs.

[0005] The technical solution adopted by the present invention is as follows: An air-drying machine for an OLED and its substrate after cleaning includes an air-drying mechanism, an air-drying box body, a transfer arm, a transfer platform, and a blanking arm. Among them, two groups of the above-mentioned air-drying box bodies are provided on the frame in parallel at intervals along the material transmission direction, forming a double air-drying channel; two groups of the above-mentioned air-drying mechanisms are respectively arranged in the air-drying box bodies. The air-drying mechanism includes an air-drying platform, an air-drying arm, and an air-drying component. The air-drying platform and the air-drying arm are hollow support structures. The OLED substrate to be air-dried is placed on the air-drying platform. The air-drying arm passes through the air-drying platform from below, holds the OLED substrate, rises above the air-drying platform, moves linearly through the air-drying component for air-drying, then the air-drying arm descends so that the OLED substrate is supported by the air-drying platform. The air-drying arm passes through the air-drying platform from top to bottom and returns linearly from below the air-drying platform to pick up the next group of OLED substrates; the above-mentioned transfer platform is arranged at the rear end of the frame at intervals from the air-drying box body. The transfer arm straddles between the air-drying box body and the transfer platform to suck and move the air-dried OLED substrate in the air-drying box body to the transfer platform; the above-mentioned blanking arm is arranged on the side of the transfer platform and extends out of the frame to take out the OLED substrate on the transfer platform and transfer it to the next workstation.

[0006] Preferably, the air-drying box body is a box-shaped structure with an inner opening. An air-drying station and a buffer station are arranged in the air-drying box body along the flowing direction of the OLED substrate. Air-drying platforms are respectively arranged in the air-drying station and the buffer station, and the front and rear ends of the air-drying station are open, and the front end and the top end of the buffer station are open.

[0007] Preferably, the air-drying platform includes a platform support, a platform bracket, an OLED bearing part, and an FPC bearing part. Among them, the above-mentioned platform support is vertically arranged in the air-drying box body; the above-mentioned platform bracket is horizontally arranged on the platform support. The platform bracket is a double-layer structure up and down, and a moving channel is formed in the middle of the platform bracket; the above-mentioned OLED bearing part is arranged on one side of the platform bracket, and the OLED and its substrate are supported and adsorbed and fixed by the OLED bearing part. The FPC bearing part is arranged on the other side of the platform bracket and is connected to the FPC on one side of the OLED and supported by the FPC bearing part. The OLED bearing part and the FPC bearing part are hollow structures up and down to facilitate the moving and upper and lower air-drying of the OLED substrate.

[0008] Preferably, the OLED carrier part includes an OLED carrier board, OLED support bars, a vacuum connector, and OLED suction nozzles. Among them, there are at least two OLED carrier boards. The OLED carrier boards are arranged inside the stage bracket. A through groove is provided in the middle of the OLED carrier boards. There are at least two OLED support bars. The OLED support bars are arranged on the OLED carrier support plate parallel to and spaced apart from each other on both sides of the through groove. Adjacent OLED support bars form a vertically penetrating strip-shaped gap. The OLED support bars form an OLED carrier area on the OLED carrier board. Air passages are respectively provided inside the OLED carrier boards and the OLED support bars, and the air passages of the OLED carrier boards and the OLED support bars are communicated. The vacuum connector is arranged on the side of the OLED carrier board and is communicated with the internal air passage of the OLED carrier board. There are at least two OLED suction nozzles. The OLED suction nozzles are arranged on the OLED support bars and are communicated with the internal air passage of the OLED support bars. A vacuum negative pressure is generated at the OLED suction nozzles to adsorb and fix the OLED substrate downward. The FPC carrier part includes an FPC carrier board. There are at least two FPC carrier boards. The FPC carrier boards are arranged horizontally corresponding to the OLED carrier boards on the outside of the carrier bracket. At least two strip-shaped gaps are provided on the FPC carrier board.

[0009] Preferably, the air-drying transfer arm includes a linear module, a sliding seat, a lifting motor, a support component, an OLED transfer component, and an FPC transfer component. Among them, the linear module is arranged inside the air-drying box body along the linear direction. The sliding seat is slidably connected to the linear module and is driven by the linear module. The lifting motor is arranged on one side of the sliding seat. The support component is arranged on the other side of the sliding seat and is slidable in the vertical direction and is connected to the output end of the lifting motor. The lifting motor drives the support component to move up and down. The OLED transfer component is arranged on one side of the support component, and the FPC transfer component is arranged on the other side of the support component. At the air-drying station of the air-drying box body, the OLED transfer component and the FPC transfer component pass upward through the through groove and the strip-shaped gap of the air-drying stage. The OLED transfer component holds and adsorbs the OLED, and the FPC transfer component holds the FPC, driving the OLED and the FPC to move linearly synchronously. After the upper and lower surfaces of the OLED and the FPC are air-dried by the air-drying component, the OLED and the FPC are placed on the air-drying stage at the buffer station. The OLED transfer component and the FPC transfer component pass through the through groove and the strip-shaped gap of the air-drying stage and move downward into the moving channel, and linearly return to the air-drying station in the moving channel.

[0010] Preferably, the support component includes a lifting seat and support rods. Among them, the lifting seat is slidably connected to the other side of the sliding seat in the vertical direction and is connected to the output end of the lifting motor. There are at least two support rods. The support rods are horizontally spaced and connected to the upper part of the lifting seat. An air passage is provided inside the support rods.

[0011] Preferably, the OLED transfer component includes OLED transfer bars, transfer vacuum connectors, and transfer suction nozzles. Among them, at least two OLED transfer bars are included. The OLED transfer bars are arranged on the support rod in parallel at intervals and horizontally extend to the left and right sides of the support rod to form an OLED support area. An air path is provided inside the OLED transfer bar, and this air path is communicated with the air path inside the support rod. The above-mentioned transfer vacuum connector is arranged on the support rod and connected to the air path of the support rod. The above-mentioned transfer suction nozzles include at least two. The transfer suction nozzles are arranged on the OLED transfer bar and connected to the air path of the OLED transfer bar. A vacuum negative pressure is generated at the transfer suction nozzles to adsorb the OLED substrate. The above-mentioned FPC transfer component includes FPC transfer bars and transfer suction nozzles. The FPC transfer bars include at least two. The FPC transfer bars are arranged on the support rod in parallel at intervals and horizontally extend to the left and right sides of the support rod to form an FPC support area. An air path is provided inside the FPC transfer bar, and this air path is communicated with the air path inside the support rod. A transfer suction nozzle is provided on the FPC transfer bar, and this transfer suction nozzle is communicated with the air path inside the FPC transfer bar.

[0012] Preferably, the air-drying component includes an upper air-drying component and an upper and lower air-drying component. Among them, the above-mentioned upper air-drying component is arranged at the opening at the front end of the air-drying station in the air-drying box. When the OLED substrate passes through the upper air-drying component and enters the air-drying station, the upper air-drying component dries the upper part of the OLED substrate. The above-mentioned upper and lower air-drying component is arranged between the air-drying station and the buffer station in the air-drying box. When the OLED substrate is supported by the air-drying transfer arm and passes through the upper and lower air-drying component from the air-drying station to the buffer station, the upper and lower air-drying component dries the upper and lower surfaces of the OLED substrate.

[0013] Preferably, the above-mentioned upper air-drying component includes a first support column, a first mounting seat, a first support rod, and a first air knife. Among them, the above-mentioned first support column is vertically arranged; the above-mentioned first mounting seat is detachably arranged on the first support column and can slide up and down along the first support column to adjust the installation position; the above-mentioned first support rod is horizontally connected to the first mounting seat; the above-mentioned first air knife is horizontally connected to the first support rod. A slit-shaped air outlet is provided at the bottom of the first air knife, and high-pressure gas is blown out from the air outlet to dry the surface of the OLED substrate. The above-mentioned upper and lower air-drying component includes a second support column, second mounting seats, second support rods, and second air knives. Among them, the above-mentioned second support column is vertically arranged; the above-mentioned second mounting seats include two. The two second mounting seats are arranged in the vertical direction and are detachably connected to the second support column; the above-mentioned second support rods include two. The two second support rods are respectively horizontally connected to the second mounting seats and horizontally extend; the above-mentioned second air knives include two. The two second air knives are respectively horizontally connected to the second support rods, and an air-drying space is formed between the two second air knives; a slit-shaped air outlet is provided on the side of the second air knife close to the air-drying space, and high-pressure gas is blown out from the air outlet to dry the OLED substrate passing through the air-drying space.

[0014] Preferably, the transfer arm includes a first transfer module, a first transfer slide, a second transfer module, a second transfer slide, a transfer rotation motor, a transfer bracket, a transfer lifting cylinder, and a transfer material taking component. Among them, the first transfer module straddles between two air-drying boxes; the first transfer slide is slidably connected to the first transfer module and is connected to the output end of the first transfer module; the second transfer module is connected to the first transfer slide in a direction perpendicular to the first transfer module; the second transfer slide is slidably connected to the second transfer module and is connected to the output end of the second transfer module; the transfer rotation motor is arranged on the second transfer slide with the output end facing downwards; the second transfer bracket is arranged below the second transfer slide and is connected to the output end of the transfer rotation motor, and the transfer rotation motor drives the second transfer bracket to rotate; the transfer lifting cylinder is vertically arranged on the second transfer bracket with the output end facing downwards; the transfer material taking component is horizontally arranged below the second transfer bracket and is connected to the output end of the transfer lifting cylinder, and is driven by the transfer lifting cylinder to move up and down.

[0015] Preferably, the transfer material taking component includes a transfer support, a transfer support plate, an OLED adsorption component, and an FPC adsorption component. Among them, the transfer support is horizontally connected to the output end of the transfer lifting cylinder; the transfer support plate is horizontally arranged below the transfer support and is connected to the transfer support through a support column; the OLED adsorption component is arranged on one side of the transfer support plate, and the FPC adsorption component is arranged on the other side of the transfer support plate. The OLED adsorption component and the FPC adsorption component form an adsorption area in the horizontal plane, and the shape and size of the adsorption area are adjustable; the OLED adsorption component includes a mounting groove and a first suction nozzle. Among them, the mounting groove includes at least two. The mounting groove includes a straight groove and an inclined groove. The straight groove is arranged along one side direction of the transfer support plate. The inclined groove includes at least two and is arranged on the side of the straight groove in different angles towards the straight groove; the first suction nozzle includes at least two. The first suction nozzle is detachably inserted into the mounting groove and slides in the mounting groove to adjust the mounting position; the FPC adsorption component includes a first strip, a second strip, a fixing nut, and a second suction nozzle. Among them, the first strip includes two. The two first strips are respectively connected in parallel at intervals on one side of the transfer support plate. A strip-shaped sliding groove is formed in the middle of the first strip; the second strip includes at least two. One end of the second strip is slidably connected to the strip-shaped sliding groove of the first strip and is fixed by a fixing nut. The other end of the second strip horizontally extends into the gap space between the two first strips. A strip-shaped sliding groove is formed in the second strip; the second suction nozzle includes at least two. The second suction nozzle is slidably installed in the strip-shaped sliding groove of the second strip and slides in the strip-shaped sliding groove of the second strip to adjust the strip mounting position.

[0016] An air-drying process for an OLED and its substrate after cleaning by an air-drying machine includes the following process steps:

[0017] S1. Upper air drying: After the OLED substrate to be air-dried undergoes upper air drying by the upper air-drying component, it enters the air-drying station through the front opening of the air-drying station in the air-drying box body;

[0018] S2. Material supporting and upper and lower air drying: The OLED substrate in step S1 is supported by the air-drying carrier in the air-drying station. After the air-drying transfer arm lifts the OLED substrate by passing through the through groove and strip-shaped gap of the air-drying carrier from the moving channel of the air-drying carrier, it moves linearly and passes through the upper and lower air-drying components, and the upper and lower surfaces of the OLED substrate are air-dried by the upper and lower air-drying components;

[0019] S3. Buffer transfer: After the upper and lower air drying of the OLED substrate in step S2 is completed, the air-drying transfer arm moves it to the buffer station of the air-drying box body and places it on the air-drying carrier at the buffer station for material buffering. After the transfer arm takes out the OLED substrate from the air-drying carrier, it moves it to the transfer platform;

[0020] S4. Unloading: The OLED substrate on the transfer platform in step S3 is taken out by the unloading transfer arm and moved to the next workstation to complete unloading.

[0021] The beneficial effects of the present invention are as follows:

[0022] The present invention innovates in view of the deficiencies and defects existing in the prior art, designs a double air-drying channel and single-time multi-piece air-drying method, effectively improves the air-drying efficiency, adopts a hollow vacuum loading and transfer structure, and synchronously completes the upper and lower surface air-drying actions during the loading and transfer processes. It adopts an adjustable independent adsorption structure for OLED and FPC, and is applicable to an air-drying machine for OLED and its substrate after cleaning and its air-drying process for stable transfer of various OLEDs and FPCs. The present invention mainly solves the problems of improving the air-drying efficiency after grinding and cleaning of OLED and its substrate, synchronously and stably realizing air-drying during the transfer and movement process of OLED and its substrate, synchronously completing the upper and lower surface air-drying during the support, loading, transfer and movement process of OLED and its substrate, synchronously and stably completing the transfer and transit of OLED and its FPC, and the adsorption and transfer of OLEDs with different sizes or shapes.

[0023] Regarding the problem of improving the air-drying efficiency, the present invention adopts a dual air-drying channel design. Two rows of air-drying boxes are arranged in parallel and at intervals on the rack. An air-drying carrier platform is arranged inside the air-drying box, and a single air-drying channel is formed along the linear setting direction of the air-drying carrier platform. An air-drying station and a buffer station are successively arranged in the single air-drying channel. An upper air-drying component is arranged on the front side of the air-drying station, and an upper and lower air-drying component is arranged between the air-drying station and the buffer station. At the same time, multiple OLEDs can be carried on the air-drying carrier platform of the present invention. The air-drying transfer arm arranged on the side of the air-drying carrier platform simultaneously picks up multiple OLEDs from the air-drying carrier platform for air-drying. The air-dried OLEDs are taken out to the transfer platform from the two air-drying channels respectively through the transfer and movement straddling the rear ends of the two air-drying channels. The blanking mechanism sucks the OLEDs from the transfer platform and transfers them to the next working station. The two air-drying channels independently perform air-drying and are combined with the design of synchronously lifting, adsorbing, and transferring multiple OLEDs for air-drying, greatly improving the air-drying efficiency and meeting the on-line air-drying production capacity requirements of high-speed automated production lines. In addition, to ensure the requirements for OLED transfer and extraction, two air-drying boxes are arranged in parallel in the single air-drying channel, which are respectively located at the air-drying station and the buffer station from front to back. Both sides of the two air-drying boxes located inside are open, so that the air-drying transfer arm can lift and transfer the OLEDs. The front and rear sides of the air-drying box at the air-drying station are open, so that the OLED can pass through the upper air-drying component from the front opening for upper surface air-drying and then enter the air-drying carrier platform inside the air-drying box, and the OLED can enter the air-drying carrier platform inside the air-drying box at the buffer station after passing through the upper and lower air-drying components from the rear opening. The front side and the top of the air-drying box at the buffer station are open. The front opening is convenient for the OLED to enter, and the top opening is convenient for the transfer arm to approach the air-drying carrier platform of the air-drying box from above to take out the OLED.

[0024] Regarding the problems of upper and lower surface air-drying, the stability of OLEDs during transfer and air-drying, and the independent loading and adsorption of OLEDs and FPCs, the present invention uniquely designs an air-drying carrier platform and an air-drying transfer arm, and is combined with the setting of an upper and lower air-drying component between the air-drying station and the buffer station. The air-drying carrier platform and the air-drying transfer arm of the present invention are integrally designed with an upper and lower hollow structure, and the air-drying carrier platform and the air-drying transfer move in a fork-and-cross manner in the vertical direction, so as to not only ensure unobstructed air-drying of the upper and lower surfaces of the OLED, but also realize the lifting, supporting, taking, and placing of the OLED. In addition, the OLED loading area or the FPC loading area of the air-drying carrier platform and the air-drying transfer arm also has a vacuum adsorption function. While the air-drying carrier platform or the air-drying transfer arm lifts and supports the OLED or FPC, a downward vacuum negative pressure adsorption force is generated, and the position of the OLED is fixed through the vacuum negative pressure adsorption force, ensuring the stability of transfer and air-drying.

[0025] Specifically, the air-drying stage of the present invention uses a stage support with an upper and lower double-layer structure design as the main bearing body. A moving channel is formed at the lower part of the stage support, and the upper part of the stage support is a bearing plane, which is provided with an OLED bearing component and an FPC bearing component. The OLED bearing component takes the OLED bearing plate as the main body, including two OLED bearing plates arranged in parallel. A through groove is opened in the middle of the OLED bearing plate to allow the air-drying transfer arm to pass through up and down. Multiple OLED support bars are arranged parallel and spaced apart on both sides of the OLED bearing plate near the through groove, and a gap space is formed between adjacent OLED support bars to allow the air-drying transfer arm to pass through up and down. An OLED bearing area is formed between the OLED bearing plate and the OLED support bars. In addition, the present invention also has an air path that is interconnected inside the OLED bearing plate and the OLED support bars. A vacuum joint is connected to the side of the OLED bearing plate for external connection to a vacuum generator. Multiple OLED suction nozzles are arranged on the OLED support bars. The vacuum joint and the OLED suction nozzles are respectively connected to the air paths inside the OLED bearing plate and the OLED support bars, so as to generate a vacuum negative pressure at the OLED suction nozzles to adsorb and fix the OLED placed on the OLED support bars downward. The FPC bearing part is close to one side of the OLED bearing part. The FPC bearing part is an FPC bearing plate with multiple strip-shaped slits, which is used to bear the FPC on one side of the OLED and ensure that the air-drying transfer moves up and down through it.

[0026] The air-drying transfer arm of the present invention is integrally arranged on the side of the air-drying stage along a straight line direction. The air-drying transfer arm uses a linear module and a sliding seat as a linear driving structure, and the linear module drives the sliding seat to move back and forth linearly between two air-drying boxes; a lifting seat is slidably arranged on the side wall of the sliding seat in the vertical direction, and the lifting seat is driven by a lifting motor to move up and down in the vertical direction; two support rods are arranged in parallel and at intervals on the side of the lifting seat, and the support rods serve as the bearing main body, on which an OLED transfer area and an FPC transfer area are respectively provided to realize the adsorption and transfer of the OLED and its FPC; in the present invention, OLED transfer strips are arranged in parallel and at intervals on the support rods, and the OLED transfer strips horizontally extend to the left and right sides of the support rods, and multiple OLED transfer strips form a horizontal support surface for supporting the OLED; multiple FPC transfer strips are arranged in parallel and at intervals on the side of the OLED transfer strip, and the FPC transfer strips horizontally extend to the left and right sides of the support rods to form a horizontal support surface for supporting the FPC. At the same time, air channels are arranged inside the support rods, OLED transfer strips and FPC transfer strips of the present invention, and the air channels of the three are interconnected. A transfer vacuum joint is arranged on the side of the support rod, and a plurality of transfer suction nozzles are arranged on the OLED transfer strips and FPC transfer strips. The transfer vacuum joint and the transfer suction nozzles are both connected to the air channel to generate a vacuum negative pressure at the transfer suction nozzles to downwardly adsorb the OLED and FPC lifted on the OLED transfer strips and FPC transfer strips. When the air-drying transfer arm works, the strips pass through the through groove of the air-drying stage up and down, and the OLED transfer strips and FPC transfer strips are crosswise and staggered with the OLED strips and FPC bearing plates of the air-drying stage, lift the OLED and FPC thereon from below the air-drying stage or place the lifted OLED and FPC on the air-drying stage and then pass through the through groove and move downwards.

[0027] The present invention designs a transfer arm for OLED and its FPC structure and characteristics, which is used to adsorb OLED and its FPC and carry out transfer. The transfer arm as a whole includes a motion driving part and a material taking part. The motion driving part uses the first transfer module and the second transfer module as power mechanisms in the horizontal plane to achieve linear driving in the longitudinal and transverse directions in the horizontal plane. The transfer rotation motor provides the power for rotational motion in the horizontal plane, and the transfer lifting cylinder provides the power for lifting motion in the vertical direction. Through the above motion driving part, the overall movement of the material taking part is driven in the 360° direction in the horizontal plane and in the vertical direction, and the angle position adjustment and conversion of the OLED can be completed while realizing the picking and placing of materials. The material taking part of the present invention is a transfer material taking component. The transfer material taking component uses a horizontally arranged transfer support plate as a carrier, on which an OLED adsorption component and an FPC adsorption component are independently provided. The OLED adsorption component uses a structure of a straight groove combined with multiple inclined grooves as an installation and adjustment component. The straight groove is arranged along one side of the transfer support plate, and the inclined grooves are arranged along different angles towards the straight groove direction on the side of the straight groove. A first suction nozzle is detachably installed in the straight groove and the inclined grooves, and multiple first suction nozzles form an OLED adsorption plane. The first suction nozzle slides linearly along the straight groove or the inclined groove to adjust the shape and size of the OLED adsorption platform so as to adapt to the adsorption of different OLEDs. The FPC adsorption component uses a first strip connected to the side of the transfer support plate and a second strip connected to the first strip in a direction perpendicular to the first strip as a bearing component. Strip-shaped sliding grooves are opened in the middle of the first strip and the second strip. The second strip is detachably installed in the strip-shaped sliding groove of the first strip, and a second suction nozzle is detachably installed in the strip-shaped sliding groove of the second strip. Multiple second suction nozzles form an FPC adsorption plane. By adjusting the installation position of the second strip and the installation position of the second suction nozzle on the second strip, the adjustment of the FPC adsorption plane can be realized to adapt to the adsorption of different types and positions of FPCs. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 FIG. 1 is one of the three-dimensional structure diagrams of the present invention.

[0029] Figure 2 FIG. 2 is the second three-dimensional structure diagram of the present invention.

[0030] Figure 3 FIG. 3 is one of the three-dimensional structure diagrams of the present invention with hidden components.

[0031] Figure 4 FIG. 4 is the second three-dimensional structure diagram of the present invention with hidden components.

[0032] Figure 5 FIG. 5 is the third three-dimensional structure diagram of the present invention with hidden components.

[0033] Figure 6 FIG. 6 is the fourth three-dimensional structure diagram of the present invention with hidden components.

[0034] Figure 7 One of the three-dimensional structure diagrams of the air-drying box body of the present invention.

[0035] Figure 8 Another one of the three-dimensional structure diagrams of the air-drying box body of the present invention.

[0036] Figure 9 One of the three-dimensional structure diagrams of the air-drying mechanism of the present invention.

[0037] Figure 10 Another one of the three-dimensional structure diagrams of the air-drying mechanism of the present invention.

[0038] Figure 11 Another one of the three-dimensional structure diagrams of the air-drying mechanism of the present invention.

[0039] Figure 12 One of the three-dimensional structure diagrams of the air-drying platform and the air-drying transfer arm of the present invention.

[0040] Figure 13 Another one of the three-dimensional structure diagrams of the air-drying platform and the air-drying transfer arm of the present invention.

[0041] Figure 14 Another one of the three-dimensional structure diagrams of the air-drying platform and the air-drying transfer arm of the present invention.

[0042] Figure 15 One of the three-dimensional structure diagrams of the air-drying platform of the present invention.

[0043] Figure 16 Another one of the three-dimensional structure diagrams of the air-drying platform of the present invention.

[0044] Figure 17 Another one of the three-dimensional structure diagrams of the air-drying platform of the present invention.

[0045] Figure 18 One of the three-dimensional structure diagrams of the air-drying transfer arm of the present invention.

[0046] Figure 19 Another one of the three-dimensional structure diagrams of the air-drying transfer arm of the present invention.

[0047] Figure 20 Another one of the three-dimensional structure diagrams of the air-drying transfer arm of the present invention.

[0048] Figure 21 One of the three-dimensional structure diagrams of the upper air-drying component of the present invention.

[0049] Figure 22 Another one of the three-dimensional structure diagrams of the upper air-drying component of the present invention.

[0050] Figure 23This is one of the three-dimensional structure diagrams of the upper and lower air duct components of the present invention.

[0051] Figure 24 This is the second three-dimensional structure diagram of the upper and lower air duct components of the present invention.

[0052] Figure 25 This is one of the three-dimensional structure diagrams of the transfer arm of the present invention.

[0053] Figure 26 This is the second three-dimensional structure diagram of the transfer arm of the present invention.

[0054] Figure 27 This is one of the three-dimensional structure diagrams of the material taking component of the present invention.

[0055] Figure 28 This is the second three-dimensional structure diagram of the material taking component of the present invention.

[0056] Figure 29 This is the third three-dimensional structure diagram of the material taking component of the present invention.

[0057] Figure 30 This is one of the three-dimensional structure diagrams of the blanking transfer arm of the present invention.

[0058] Figure 31 This is the second three-dimensional structure diagram of the blanking transfer arm of the present invention. Detailed implementation manners

[0059] The present invention will be further described below in conjunction with the accompanying drawings:

[0060] As Figures 1 to 31As shown in the figure, the technical solution adopted by the present invention is as follows: An air dryer for an OLED and its substrate after cleaning, comprising an air drying mechanism, an air drying box body 6, a transfer arm 7, a transfer platform 8 and a blanking arm 9. Among them, there are two groups of the above-mentioned air drying box bodies 6, which are respectively arranged on the rack 1 at parallel intervals along the material transmission direction to form a double air drying channel; there are two groups of the above-mentioned air drying mechanisms, and the two air drying mechanisms are respectively arranged in the air drying box body 6. The air drying mechanism includes an air drying stage 2, an air drying arm 3 and an air drying component. The air drying stage 2 and the air drying arm 3 are hollow support structures. The OLED substrate to be air dried is placed on the air drying stage 2. The air drying arm 3 passes through the air drying stage 2 from below, holds the OLED substrate and rises above the air drying stage 2, moves linearly through the air drying component for air drying, and then the air drying arm 3 descends so that the OLED substrate is supported by the air drying stage 2. The air drying arm 3 passes through the air drying stage 2 from top to bottom and returns linearly from below the air drying stage 2 to pick up the next group of OLED substrates; the above-mentioned transfer platform 8 is arranged at the rear end of the rack 1 at an interval from the air drying box body 6. The transfer arm 7 straddles between the air drying box body 6 and the transfer platform 8 to suck and move the air dried OLED substrate in the air drying box body 6 to the transfer platform 8; the above-mentioned blanking arm 9 is arranged on the side of the transfer platform 8 and extends out of the rack 1 to take out the OLED substrate on the transfer platform 8 and transfer it to the next working station.

[0061] The air drying box body 6 is a box-shaped structure with an inner opening. An air drying station and a buffer station are arranged in the air drying box body 6 along the flowing direction of the OLED substrate. Air drying stages 2 are respectively arranged in the air drying station and the buffer station, and the front and rear ends of the air drying station are open, and the front end and the top end of the buffer station are open.

[0062] The air drying stage 2 includes a stage support 21, a stage bracket 22, an OLED bearing part and an FPC bearing part. Among them, the above-mentioned stage support 21 is vertically arranged in the air drying box body 6; the above-mentioned stage bracket 22 is horizontally arranged on the stage support 21. The stage bracket 22 is a double-layer structure up and down, and a moving channel A is formed in the middle of the stage bracket 22; the above-mentioned OLED bearing part is arranged on one side of the stage bracket 22. The OLED and its substrate are supported and adsorbed and fixed by the OLED bearing part. The FPC bearing part is arranged on the other side of the stage bracket 22, and the FPC connected to one side of the OLED is supported by the FPC bearing part. The OLED bearing part and the FPC bearing part are hollow structures up and down to facilitate the handling and air drying of the OLED substrate from above and below.

[0063] The OLED carrier part includes an OLED carrier plate 23, OLED support bars 24, a vacuum connector 25, and OLED suction nozzles 26. Among them, the above-mentioned OLED carrier plate 23 includes at least two pieces. The OLED carrier plate 23 is arranged inside the stage bracket 22, and a through groove B is provided in the middle of the OLED carrier plate 23. The above-mentioned OLED support bars 24 include at least two pieces. The OLED support bars 24 are arranged on the OLED carrier support plate 23 in parallel at intervals along both sides of the through groove B. Adjacent OLED support bars 24 form a vertically penetrating strip-shaped gap, and the OLED support bars 24 form an OLED carrier area on the OLED carrier plate 23. The above-mentioned OLED carrier plate 23 and the OLED support bars 24 are respectively provided with air paths inside, and the air paths of the OLED carrier plate 23 and the OLED support bars 24 are communicated. The above-mentioned vacuum connector 25 is arranged on the side of the OLED carrier plate 23 and is communicated with the internal air path of the OLED carrier plate 23. The above-mentioned OLED suction nozzles 26 include at least two pieces. The OLED suction nozzles 26 are arranged on the OLED support bars 24 and are communicated with the internal air path of the OLED support bars 24. A vacuum negative pressure is generated at the OLED suction nozzles 26 to adsorb and fix the OLED substrate downward. The above-mentioned FPC carrier part includes an FPC carrier plate 27. The FPC carrier plate 27 includes at least two pieces. The FPC carrier plate 27 is horizontally arranged corresponding to the OLED carrier plate 23 on the outside of the carrier bracket 22, and at least two strip-shaped gaps are provided on the FPC carrier plate 27.

[0064] The air-drying transfer arm 3 includes a linear module 31, a sliding seat 32, a lifting motor 33, a supporting component, an OLED transfer component, and an FPC transfer component. Among them, the above-mentioned linear module 31 is arranged inside the air-drying box body 6 along a straight line direction. The above-mentioned sliding seat 32 is slidably connected to the linear module 31 and is driven by the linear module 31. The above-mentioned lifting motor 33 is arranged on one side of the sliding seat 32. The above-mentioned supporting component is slidably arranged on the other side of the sliding seat 32 in the vertical direction and is connected to the output end of the lifting motor 33. The lifting motor 33 drives the supporting component to move up and down. The above-mentioned OLED transfer component is arranged on one side of the supporting component, and the FPC transfer component is arranged on the other side of the supporting component. At the air-drying station of the air-drying box body 6, the OLED transfer component and the FPC transfer component pass upward through the through groove B and the strip-shaped gaps of the air-drying stage. The OLED transfer component holds and adsorbs the OLED, and the FPC transfer component holds the FPC, driving the OLED and the FPC to move linearly synchronously. After the upper and lower surfaces of the OLED and the FPC are air-dried by the air-drying component, the OLED and the FPC are placed on the air-drying stage 2 at the buffer station. The OLED transfer component and the FPC transfer component pass through the through groove B and the strip-shaped gaps of the air-drying stage 2 and move downward into the moving channel A, and linearly return to the air-drying station in the moving channel A.

[0065] The support component includes a lifting seat 34 and support rods 35. Among them, the above-mentioned lifting seat 34 is slidably connected to the other side of the sliding seat 32 in the vertical direction and is connected to the output end of the lifting motor 33; the above-mentioned support rods 35 include at least two, and the support rods 35 are horizontally and spacedly connected to the upper part of the lifting seat 34, and an air passage is provided inside the support rods 35.

[0066] The OLED transfer component includes OLED transfer strips 36, transfer vacuum connectors 37 and transfer suction nozzles 38. Among them, the above-mentioned OLED transfer strips 36 include at least two, and the OLED transfer strips 36 are arranged on the support rods 35 in parallel and at intervals, and horizontally extend to the left and right sides of the support rods 35 to form an OLED support area; an air passage is provided inside the OLED transfer strips 36, and this air passage is communicated with the air passage inside the support rods 35; the above-mentioned transfer vacuum connectors 37 are arranged on the support rods 35 and are connected to the air passage of the support rods 35; the above-mentioned transfer suction nozzles 38 include at least two, and the transfer suction nozzles 38 are arranged on the OLED transfer strips 36 and are connected to the air passage of the OLED transfer strips 36, and a vacuum negative pressure is generated at the transfer suction nozzles 38 to adsorb the OLED substrate; the above-mentioned FPC transfer component includes FPC transfer strips 39 and transfer suction nozzles 38, the FPC transfer strips 39 include at least two, the FPC transfer strips 39 are arranged on the support rods 35 in parallel and at intervals, and horizontally extend to the left and right sides of the support rods 35 to form an FPC support area; an air passage is provided inside the FPC transfer strips 39, and this air passage is communicated with the air passage inside the support rods 35, and transfer suction nozzles 38 are provided on the FPC transfer strips 39, and these transfer suction nozzles 38 are communicated with the air passage inside the FPC transfer strips 39.

[0067] The air-drying component includes an upper air-drying component 4 and an upper and lower air-drying component 5. Among them, the above-mentioned upper air-drying component 4 is arranged at the opening at the front end of the air-drying station of the air-drying box body 6. When the OLED substrate passes through the upper air-drying component 4 and enters the air-drying station, the upper air-drying component 4 dries the upper part of the OLED substrate; the above-mentioned upper and lower air-drying component 5 is arranged between the air-drying station and the buffer station of the air-drying box body 6. When the OLED substrate is supported by the air-drying transfer arm 3 and passes through the upper and lower air-drying component 5 from the air-drying station to the buffer station, the upper and lower air-drying component 5 dries the upper and lower surfaces of the OLED substrate.

[0068] The upper and lower air blowing component 4 includes a first support column 41, a first mounting seat 42, a first support rod 43 and a first air knife 44. Among them, the first support column 41 is vertically arranged; the first mounting seat 42 is detachably arranged on the first support column 41 and can slide up and down along the first support column 41 to adjust the mounting position; the first support rod 43 is horizontally connected to the first mounting seat 42; the first air knife 44 is horizontally connected to the first support rod 43. A slit-shaped air outlet is provided at the bottom of the first air knife 44, and high-pressure gas is blown out from the air outlet to dry the surface of the OLED substrate. The upper and lower air blowing component 5 includes a second support column 51, a second mounting seat 52, a second support rod 53 and a second air knife 54. Among them, the second support column 51 is vertically arranged; the second mounting seat 52 includes two parts, and the two second mounting seats 52 are arranged vertically and are detachably connected to the second support column 51; the second support rod 53 includes two parts, and the two second support rods 53 are respectively horizontally connected to the second mounting seat 52 and extend horizontally; the second air knife 54 includes two parts, and the two second air knives 54 are respectively horizontally connected to the second support rod 53, and a drying space is formed between the two second air knives 54; a slit-shaped air outlet is provided on one side of the second air knife 54 close to the drying space, and high-pressure gas is blown out from the air outlet to dry the OLED substrate passing through the drying space.

[0069] The transfer arm 7 includes a first transfer module 71, a first transfer slide 72, a second transfer module 73, a second transfer slide 74, a transfer rotating motor 75, a transfer support 76, a transfer lifting cylinder 77 and a transfer material taking component 78. Among them, the first transfer module 71 straddles between two groups of drying boxes 6; the first transfer slide 72 is slidably connected to the first transfer module 71 and is connected to the output end of the first transfer module 71; the second transfer module 73 is connected to the first transfer slide 72 along a direction perpendicular to the first transfer module 71; the second transfer slide 74 is slidably connected to the second transfer module 73 and is connected to the output end of the second transfer module 73; the transfer rotating motor 75 is arranged on the second transfer slide 74 and the output end faces downward; the second transfer support 76 is arranged below the second transfer slide 74 and is connected to the output end of the transfer rotating motor 75, and the transfer rotating motor 75 drives the second transfer support 76 to rotate; the transfer lifting cylinder 77 is vertically arranged on the second transfer support 76 and the output end faces downward; the transfer material taking component 78 is horizontally arranged below the second transfer support 76 and is connected to the output end of the transfer lifting cylinder 77, and is driven by the transfer lifting cylinder 77 to move up and down.

[0070] The transfer and material taking assembly 78 includes a transfer support 781, a transfer support plate 782, an OLED adsorption component and an FPC adsorption component. Among them, the transfer support 781 is horizontally connected to the output end of the transfer lifting cylinder 77; the transfer support plate 782 is horizontally arranged below the transfer support 781 and is connected to the transfer support 781 through a pillar; the OLED adsorption component is arranged on one side of the transfer support plate 782, and the FPC adsorption component is arranged on the other side of the transfer support plate 782. The OLED adsorption component and the FPC adsorption component form an adsorption area in the horizontal plane, and the shape and size of the adsorption area are adjustable; the OLED adsorption component includes a mounting groove 783 and a first suction nozzle 784. Among them, there are at least two mounting grooves 783. The mounting groove 783 includes a straight groove and an inclined groove. The straight groove is arranged along one side direction of the transfer support plate 782. There are at least two inclined grooves, which are arranged on the side of the straight groove in different angles towards the straight groove direction; the first suction nozzle 784 includes at least two. The first suction nozzle 784 is detachably inserted into the mounting groove 783, and the first suction nozzle 784 slides in the mounting groove 783 to adjust the mounting position; the FPC adsorption component includes a first strip 785, a second strip 786, a fixing nut 787 and a second suction nozzle 788. Among them, there are two first strips 785. The two first strips 785 are respectively connected to one side of the transfer support plate 782 in parallel at intervals. A strip-shaped sliding groove is provided in the middle of the first strip 785; there are at least two second strips 786. One end of the second strip 786 is slidably connected to the strip-shaped sliding groove of the first strip 785 and is fixed by a fixing nut 787. The other end of the second strip 786 horizontally extends into the gap space between the two first strips 785. A strip-shaped sliding groove is provided on the second strip 786; the second suction nozzle 788 includes at least two. The second suction nozzle 788 is slidably installed in the strip-shaped sliding groove of the second strip 786 and slides in the strip-shaped sliding groove of the second strip 786 to adjust the strip mounting position.

[0071] A drying process for an OLED and its substrate after cleaning and drying machine includes the following process steps:

[0072] S1. Upper drying: After the OLED substrate to be dried is subjected to upper drying by the upper drying component, it enters the drying station through the front opening of the drying box body drying station;

[0073] S2. Supporting the material and upper and lower drying: The OLED substrate in step S1 is supported by the drying carrier in the drying box body at the drying station. After the drying transfer arm lifts the OLED substrate through the through groove and the strip-shaped gap of the moving channel of the drying carrier and then moves linearly and passes through the upper and lower drying components, the upper and lower surfaces of the OLED substrate are dried by the upper and lower drying components;

[0074] S3, cache transfer: After the OLED substrate is air-dried up and down in step S2, the air-drying moving arm moves it to the cache station of the air-drying box, and places it on the air-drying carrier at the cache station for material cache. The transfer moving arm takes out the OLED substrate from the air-drying carrier and moves it to the transfer platform;

[0075] S4, unloading: In step S3, the OLED substrate on the transfer platform is taken out by the unloading arm and moved to the next workstation to complete unloading.

[0076] In addition, the material unloading arm 9 of the present invention includes a first material unloading linear module 91, a second material unloading linear module 92, a material unloading lifting module 93, a material unloading adjustment module 94, a material unloading support 95, a material unloading support plate 96 and a material unloading bracket 97, wherein the first material unloading linear module 91 is arranged on the frame along the flow direction of the OLED substrate, the second material unloading linear module 92 is perpendicular to the first material unloading linear module 91 and is connected to the output end of the first material unloading linear module 91, and is driven by the first material unloading linear module 91 to move linearly; the material unloading lifting module 93 is vertically connected to the output end of the second material unloading linear module 92, and is driven by the second material unloading linear module 92 to move linearly; the material unloading adjustment module 94 is horizontally connected to the output end of the second material unloading linear module 92, and is driven by the second material unloading linear module 92 to move linearly; It is horizontally connected to the output end of the material unloading lifting module 93, and is driven by the material unloading lifting module 93 to move up and down in the vertical direction; the material unloading supports 95 include two, which are respectively arranged at intervals below the material unloading adjustment module 94, and are connected to the output end of the material unloading adjustment module 94, and are driven by the material unloading adjustment module 94 to adjust the position; the material unloading support plate 96 is horizontally connected to the bottom of the material unloading support plate 95, and a strip mounting groove is provided on the material unloading support plate 96, and a material unloading suction nozzle can be slidably installed in the strip mounting groove to absorb the OLED substrate; the material unloading bracket 97 is connected to the side of the material unloading support plate 96, and a plurality of material unloading suction nozzles can be slidably provided on the material unloading bracket 97 to absorb the FPC on one side of the OLED substrate.

[0077] Furthermore, the present invention designs a method that uses dual air-drying channels and a single multi-piece air-drying method, which effectively improves the air-drying efficiency, adopts a hollow vacuum bearing and transporting structure, and synchronously completes the upper and lower surface air-drying during the bearing and transporting process, and adopts an adjustable OLED and FPC independent adsorption structure, which is suitable for a variety of OLEDs and FPCs. The OLED and its substrate post-cleaning air-drying machine and its air-drying process are suitable for stable transport of various OLEDs and FPCs. The present invention mainly solves the problem of improving the air-drying efficiency of OLEDs and their substrates after grinding and cleaning, the problem of synchronously and stably achieving air-drying during the transport and movement of OLEDs and their substrates, the problem of synchronously completing the upper and lower surface air-drying during the support, bearing and transport of OLEDs and their substrates, the problem of synchronously and stably completing the transport and transfer of OLEDs and their FPCs, and the problem of adsorption and transport of OLEDs of different sizes or shapes.

[0078] For the problem of improving the air-drying efficiency, the present invention adopts a double air-drying channel design. Two rows of air-drying boxes are arranged on the frame in parallel at intervals. An air-drying carrier platform is arranged inside the air-drying box. A single air-drying channel is formed along the linear setting direction of the air-drying carrier platform. An air-drying station and a buffer station are successively arranged in the single air-drying channel. An upper air-drying component is arranged on the front side of the air-drying station, and an upper and lower air-drying component is arranged between the air-drying station and the buffer station. At the same time, multiple OLEDs can be carried on the air-drying carrier platform of the present invention. The air-drying transfer arm arranged on the side of the air-drying carrier platform simultaneously picks up multiple OLEDs from the air-drying carrier platform for air-drying. The air-dried OLEDs are respectively taken out from the two air-drying channels to the transfer platform through the transfer and movement straddling the rear ends of the two air-drying channels. The blanking mechanism sucks the OLEDs from the transfer platform and moves them to the next working station. This kind of double air-drying channel independently conducts air-drying and is combined with the design of synchronously lifting, adsorbing and transferring and air-drying multiple OLEDs, greatly improving the air-drying efficiency and meeting the on-line air-drying production capacity requirements of high-speed automated production lines. In addition, to ensure the requirements of OLED transmission and extraction, two air-drying boxes are arranged in parallel in the single air-drying channel, which are respectively located at the air-drying station and the buffer station from front to back. Both sides of the two air-drying boxes located inside are open, so that the air-drying transfer arm can lift and transfer the OLEDs. The front and rear sides of the air-drying box at the air-drying station are open, so that the OLED can pass through the upper air-drying component from the front opening for upper surface air-drying and then enter the air-drying carrier platform inside the air-drying box, and the OLED can enter the air-drying carrier platform inside the air-drying box at the buffer station after passing through the upper and lower air-drying components from the rear opening. The front side and the top of the air-drying box at the buffer station are open. The front opening is convenient for the OLED to enter, and the top opening is convenient for the transfer arm to approach the air-drying carrier platform of the air-drying box from above to take out the OLED.

[0079] For the problems of upper and lower surface air-drying, the stability of OLEDs during transfer and air-drying, and the independent loading and adsorption of OLEDs and FPCs, the present invention uniquely designs an air-drying carrier platform and an air-drying transfer arm, and is combined with the setting of an upper and lower air-drying component between the air-drying station and the buffer station. The air-drying carrier platform and the air-drying transfer arm of the present invention are integrally designed with an upper and lower hollow structure, and the air-drying carrier platform and the air-drying transfer move in a fork-like and staggered manner in the vertical direction, so as to not only ensure unobstructed air-drying of the upper and lower surfaces of the OLED, but also realize the lifting, supporting, taking and placing of the OLED. In addition, the OLED loading area or the FPC loading area of the air-drying carrier platform and the air-drying transfer arm also has a vacuum adsorption function. While the air-drying carrier platform or the air-drying transfer arm lifts and supports the OLED or the FPC, a downward vacuum negative pressure adsorption force is generated. Through this vacuum negative pressure adsorption force, the position of the OLED is fixed, ensuring the stability of transmission and air-drying.

[0080] Specifically, the air-drying stage of the present invention uses a stage bracket with an upper and lower double-layer structure design as the load-bearing main body. A moving channel is formed at the lower part of the stage bracket, and the upper part of the stage bracket is a load-bearing plane, which is provided with an OLED load-bearing component and an FPC load-bearing component. The OLED load-bearing component takes the OLED load-bearing plate as the main body, including two OLED load-bearing plates arranged in parallel. A through groove is opened in the middle of the OLED load-bearing plate to allow the air-drying transfer arm to pass through up and down; multiple OLED support bars are arranged in parallel at intervals on both sides of the OLED load-bearing plate close to the through groove, and a gap space is formed between adjacent OLED support bars to allow the air-drying transfer arm to pass through up and down; an OLED load-bearing area is formed between the OLED load-bearing plate and the OLED support bars. In addition, the present invention also has an air path communicated with each other inside the OLED load-bearing plate and the OLED support bars. A vacuum joint is connected to the side of the OLED load-bearing plate for externally connecting a vacuum generator. Multiple OLED suction nozzles are arranged on the OLED support bars. The vacuum joint and the OLED suction nozzles are respectively communicated with the air paths inside the OLED load-bearing plate and the OLED support bars, so as to generate a vacuum negative pressure at the OLED suction nozzles to adsorb and fix the OLED placed on the OLED support bars downward; the FPC load-bearing part is close to one side of the OLED load-bearing part. The FPC load-bearing part is an FPC load-bearing plate provided with multiple strip-shaped gaps, which is used to carry the FPC on one side of the OLED and ensure that the air-drying transfer moves up and down through it.

[0081] The air-drying transfer arm of the present invention is integrally arranged on the side of the air-drying stage along a straight line direction. The air-drying transfer arm uses a linear module and a sliding seat as a linear driving structure, and the linear module drives the sliding seat to move linearly back and forth between two air-drying boxes; a lifting seat is slidably arranged on the side wall of the sliding seat in the vertical direction, and the lifting seat is driven by a lifting motor to move up and down in the vertical direction; two support rods are arranged in parallel and at intervals on the side of the lifting seat, and the support rods serve as the load-bearing main body, on which an OLED transfer area and an FPC transfer area are respectively provided to realize the adsorption and transfer of the OLED and its FPC; in the present invention, OLED transfer strips are arranged in parallel and at intervals on the support rods, and the OLED transfer strips horizontally extend to the left and right sides of the support rods, and multiple OLED transfer strips form a horizontal support surface for supporting the OLED; multiple FPC transfer strips are arranged in parallel and at intervals on the side of the OLED transfer strip, and the FPC transfer strips horizontally extend to the left and right sides of the support rods to form a horizontal support surface for supporting the FPC. At the same time, air paths are provided inside the support rods, OLED transfer strips and FPC transfer strips of the present invention, and the air paths of the three are interconnected. A transfer vacuum joint is arranged on the side of the support rod, and a plurality of transfer suction nozzles are arranged on the OLED transfer strip and the FPC transfer strip. The transfer vacuum joint and the transfer suction nozzles are both connected to the air path to generate a vacuum negative pressure at the transfer suction nozzles to adsorb downward the OLED and FPC lifted on the OLED transfer strip and the FPC transfer strip. When the air-drying transfer arm works, the strips pass through the through groove of the air-drying stage up and down, and the OLED transfer strip and the FPC transfer strip are alternately crossed with the OLED strip and the FPC bearing plate of the air-drying stage, to lift the OLED and FPC thereon from below the air-drying stage or place the lifted OLED and FPC on the air-drying stage and then pass through the through groove and move downwards.

[0082] In view of the structure and characteristics of OLED and its FPC, the present invention designs a transfer arm for adsorbing and transferring OLED and its FPC; the transfer arm as a whole includes a motion driving part and a material taking part. The motion driving part uses a first transfer module and a second transfer module as power mechanisms in the horizontal plane to achieve linear driving in the longitudinal and transverse directions in the horizontal plane. The transfer rotation motor provides the power for rotational motion in the horizontal plane, and the transfer lifting cylinder provides the power for lifting motion in the vertical direction; through the above motion driving part, the overall material taking part is driven to move in the 360° direction in the horizontal plane and in the vertical direction, and the angle position adjustment and conversion of the OLED can be completed while realizing material taking and placing; the material taking part of the present invention is a transfer material taking component. The transfer material taking component uses a horizontally arranged transfer support plate as a carrier, on which an OLED adsorption component and an FPC adsorption component are independently provided. The OLED adsorption component uses a structure of a straight groove combined with multiple inclined grooves as an installation and adjustment component. The straight groove is arranged along one side edge of the transfer support plate, and the inclined grooves are arranged along different angles towards the straight groove on the side of the straight groove. A first suction nozzle is detachably installed in the straight groove and the inclined grooves, and multiple first suction nozzles form an OLED adsorption plane. The first suction nozzle slides linearly along the straight groove or the inclined groove to adjust the shape and size of the OLED adsorption platform so as to adapt to the adsorption of different OLEDs; the FPC adsorption component uses a first strip connected to the side part of the transfer support plate and a second strip connected to the first strip in a direction perpendicular to the first strip as a bearing component. Strip-shaped sliding grooves are opened in the middle of the first strip and the second strip. The second strip is detachably installed in the strip-shaped sliding groove of the first strip, and a second suction nozzle is detachably installed in the strip-shaped sliding groove of the second strip. Multiple second suction nozzles form an FPC adsorption plane. By adjusting the installation position of the second strip and the installation position of the second suction nozzle on the second strip, the adjustment of the FPC adsorption plane can be realized to adapt to the adsorption of different types and positions of FPCs.

[0083] The embodiments of the present invention only introduce its specific implementation manners and do not limit its protection scope. Those skilled in the art of this industry can make certain modifications inspired by this embodiment. Therefore, all equivalent changes or modifications made in accordance with the scope of the present invention patent belong to the scope of the claims of the present invention patent.

Claims

1. An OLED and its air dryer after substrate cleaning, characterized in that: It includes an air-drying mechanism, an air-drying box body (6), a transfer manipulator (7), a transfer platform (8) and a blanking manipulator (9). Among them, there are two groups of the above-mentioned air-drying box bodies (6), which are arranged on the rack (1) in parallel at intervals along the material transmission direction to form a double air-drying channel; there are two groups of the above-mentioned air-drying mechanisms, and the two air-drying mechanisms are respectively arranged in the air-drying box body (6). The air-drying mechanism includes an air-drying carrier (2), an air-drying manipulator (3) and an air-drying component. The air-drying carrier (2) and the air-drying manipulator (3) are hollow support structures. The OLED substrate to be air-dried is placed on the air-drying carrier (2). The air-drying manipulator (3) passes through the air-drying carrier (2) from below, holds the OLED substrate and then rises above the air-drying carrier (2), moves linearly through the air-drying component for air-drying, and then the air-drying manipulator (3) descends so that the OLED substrate is supported by the air-drying carrier (2). The air-drying manipulator (3) passes through the air-drying carrier (2) from top to bottom and returns linearly from below the air-drying carrier (2) to pick up the next group of OLED substrates; the above-mentioned transfer platform (8) is arranged at the rear end of the rack (1) at an interval from the air-drying box body (6). The transfer manipulator (7) straddles between the air-drying box body (6) and the transfer platform (8) to suck and transfer the air-dried OLED substrate in the air-drying box body (6) to the transfer platform (8); the above-mentioned blanking manipulator (9) is arranged on the side of the transfer platform (8) and extends out of the rack (1) to take out the OLED substrate on the transfer platform (8) and transfer it to the next workstation; The above-mentioned air-drying box body (6) is a box-shaped structure with an inner opening. An air-drying station and a buffer station are arranged in the air-drying box body (6) along the flow direction of the OLED substrate. Air-drying carriers (2) are respectively arranged in the air-drying station and the buffer station, and the front and rear ends of the air-drying station are open, and the front end and the top end of the buffer station are open; The above-mentioned air-drying carrier (2) includes a carrier support (21), a carrier bracket (22), an OLED bearing part and an FPC bearing part. Among them, the above-mentioned carrier support (21) is vertically arranged in the air-drying box body (6); the above-mentioned carrier bracket (22) is horizontally arranged on the carrier support (21). The carrier bracket (22) is a double-layer structure up and down, and a moving channel (A) is formed in the middle of the carrier bracket (22); the above-mentioned OLED bearing part is arranged on one side of the carrier bracket (22). The OLED and its substrate are supported and adsorbed and fixed by the OLED bearing part. The FPC bearing part is arranged on the other side of the carrier bracket (22) and supports the FPC connected to one side of the OLED. The OLED bearing part and the FPC bearing part are hollow structures up and down to facilitate the handling and air-drying of the OLED substrate from above and below; The described OLED carrier part includes an OLED carrier plate (23), OLED support bars (24), a vacuum connector (25), and OLED suction nozzles (26). Among them, the above-mentioned OLED carrier plate (23) includes at least two pieces. The OLED carrier plate (23) is arranged inside the stage bracket (22). A through groove (B) is provided in the middle of the OLED carrier plate (23). The above-mentioned OLED support bars (24) include at least two. The OLED support bars (24) are arranged on the OLED carrier support plate (23) in parallel and at intervals along both sides of the through groove (B). Adjacent OLED support bars (24) form a strip-shaped gap that penetrates up and down. The OLED support bars (24) form an OLED carrier area on the OLED carrier plate (23). Air channels are respectively provided inside the above-mentioned OLED carrier plate (23) and OLED support bars (24), and the air channels of the OLED carrier plate (23) and the OLED support bars (24) are connected. The above-mentioned vacuum connector (25) is arranged on the side of the OLED carrier plate (23) and is connected to the internal air channel of the OLED carrier plate (23). The above-mentioned OLED suction nozzles (26) include at least two. The OLED suction nozzles (26) are arranged on the OLED support bars (24) and are connected to the internal air channel of the OLED support bars (24). A vacuum negative pressure is generated at the OLED suction nozzles (26) to adsorb and fix the OLED substrate downward. The above-mentioned FPC carrier part includes an FPC carrier plate (27). The FPC carrier plate (27) includes at least two pieces. The FPC carrier plate (27) is arranged horizontally outside the carrier bracket (22) corresponding to the OLED carrier plate (23). At least two strip-shaped slits are provided on the FPC carrier plate (27); The described air-drying transfer arm (3) includes a linear module (31), a sliding seat (32), a lifting motor (33), a support component, an OLED transfer component, and an FPC transfer component. Among them, the above-mentioned linear module (31) is arranged inside the air-drying box body (6) along a straight line direction; the above-mentioned sliding seat (32) is slidably connected to the linear module (31) and is driven by the linear module (31); the above-mentioned lifting motor (33) is arranged on one side of the sliding seat (32); the above-mentioned support component is slidably arranged on the other side of the sliding seat (32) along the vertical direction and is connected to the output end of the lifting motor (33), and the lifting motor (33) drives the support component to move up and down; the above-mentioned OLED transfer component is arranged on one side of the support component, and the FPC transfer component is arranged on the other side of the support component; at the air-drying station of the air-drying box body (6), the OLED transfer component and the FPC transfer component pass upward through the through groove (B) and the strip-shaped gap of the air-drying carrier table. The OLED transfer component holds and adsorbs the OLED, and the FPC transfer component holds the FPC, driving the OLED and the FPC to move linearly synchronously. After the upper and lower surfaces of the OLED and the FPC are air-dried by the air-drying component, the OLED and the FPC are placed on the air-drying carrier table (2) at the buffer station; the OLED transfer component and the FPC transfer component pass through the through groove (B) and the strip-shaped gap of the air-drying carrier table (2) and move down to the moving channel (A), and linearly return to the air-drying station in the moving channel (A); The described support component includes a lifting seat (34) and a support rod (35). Among them, the above-mentioned lifting seat (34) is slidably connected to the other side of the sliding seat (32) along the vertical direction and is connected to the output end of the lifting motor (33); the above-mentioned support rod (35) includes at least two, and the support rods (35) are horizontally and spacedly connected to the upper part of the lifting seat (34), and an air path is arranged inside the support rod (35); The described OLED transfer component includes OLED transfer bars (36), transfer vacuum connectors (37), and transfer suction nozzles (38). Among them, at least two OLED transfer bars (36) are included. The OLED transfer bars (36) are arranged on the support rod (35) in parallel at intervals and horizontally extend to the left and right sides of the support rod (35) to form an OLED support area. An air passage is provided inside the OLED transfer bar (36), and this air passage is communicated with the internal air passage of the support rod (35). The above-mentioned transfer vacuum connector (37) is arranged on the support rod (35) and is connected to the air passage of the support rod (35). The above-mentioned transfer suction nozzles (38) include at least two. The transfer suction nozzles (38) are arranged on the OLED transfer bars (36) and are connected to the air passage of the OLED transfer bars (36). A vacuum negative pressure is generated at the transfer suction nozzles (38) to adsorb the OLED substrate. The above-mentioned FPC transfer component includes FPC transfer bars (39) and transfer suction nozzles (38). At least two FPC transfer bars (39) are included. The FPC transfer bars (39) are arranged on the support rod (35) in parallel at intervals and horizontally extend to the left and right sides of the support rod (35) to form an FPC support area. An air passage is provided inside the FPC transfer bar (39), and this air passage is communicated with the internal air passage of the support rod (35). The transfer suction nozzle (38) is arranged on the FPC transfer bar (39), and this transfer suction nozzle (38) is communicated with the internal air passage of the FPC transfer bar (39). The described air-drying component includes an upper air-drying component (4) and an upper and lower air-drying component (5). Among them, the above-mentioned upper air-drying component (4) is arranged at the opening at the front end of the air-drying station of the air-drying box body (6). When the OLED substrate passes through the upper air-drying component (4) and enters the air-drying station, the upper air-drying component (4) air-dries and dries the upper part of the OLED substrate. The above-mentioned upper and lower air-drying component (5) is arranged between the air-drying station and the buffer station of the air-drying box body (6). When the OLED substrate is supported by the air-drying transfer arm (3) and passes through the upper and lower air-drying component (5) from the air-drying station to the buffer station, the upper and lower air-drying component (5) air-dries and dries the upper and lower surfaces of the OLED substrate. The above-mentioned upper air-drying component (4) includes a first support column (41), a first mounting seat (42), a first support rod (43), and a first air knife (44). Among them, the above-mentioned first support column (41) is arranged vertically. The above-mentioned first mounting seat (42) is detachably arranged on the first support column (41) and can slide up and down along the first support column (41) to adjust the installation position. The above-mentioned first support rod (43) is horizontally connected to the first mounting seat (42). The above-mentioned first air knife (44) is horizontally connected to the first support rod (43). A slit-shaped air outlet is provided at the bottom of the first air knife (44), and high-pressure gas is blown out from the air outlet to air-dry the surface of the OLED substrate. The above-mentioned upper and lower air-drying component (5) includes a second support column (51), a second mounting seat (52), a second support rod (53), and a second air knife (54). Among them, the above-mentioned second support column (51) is arranged vertically. The above-mentioned second mounting base (52) includes two, and the two second mounting bases (52) are arranged vertically, and are detachably connected to the second support column (51); the above-mentioned second support rods (53) include two, and the two second support rods (53) are respectively horizontally connected to the second mounting base (52) and extend horizontally; the above-mentioned second air knives (54) include two, and the two second air knives (54) are respectively horizontally connected to the second support rods (53), and an air drying space is formed between the two second air knives (54); a slit-shaped air outlet is provided on one side of the second air knife (54) close to the air drying space, and high-pressure gas is blown out from the air outlet to air-dry the OLED substrate passing through the air drying space.

2. The air dryer for an OLED and its substrate after cleaning according to claim 1, wherein: The transfer manipulator (7) described above includes a first transfer module (71), a first transfer slide (72), a second transfer module (73), a second transfer slide (74), a transfer rotation motor (75), a transfer bracket (76), a transfer lifting cylinder (77) and a transfer material taking component (78). Among them, the above-mentioned first transfer module (71) straddles between two groups of air drying boxes (6); the above-mentioned first transfer slide (72) is slidably connected to the first transfer module (71) and is connected to the output end of the first transfer module (71); the above-mentioned second transfer module (73) is connected to the first transfer slide (72) in a direction perpendicular to the first transfer module (71); the above-mentioned second transfer slide (74) is slidably connected to the second transfer module (73) and is connected to the output end of the second transfer module (73); the above-mentioned transfer rotation motor (75) is arranged on the second transfer slide (74), and the output end is arranged downward; the above-mentioned second transfer bracket (76) is arranged below the second transfer slide (74) and is connected to the output end of the transfer rotation motor (75), and the transfer rotation motor (75) drives the second transfer bracket (76) to rotate; The above-mentioned transfer lifting cylinder (77) is vertically arranged on the second transfer bracket (76), and the output end is arranged downward; the above-mentioned transfer material taking component (78) is horizontally arranged below the second transfer bracket (76) and is connected to the output end of the transfer lifting cylinder (77), and is driven by the transfer lifting cylinder (77) to move up and down.

3. The air dryer for an OLED and its substrate after cleaning according to claim 2, wherein: The described transfer and material taking component (78) includes a transfer support (781), a transfer support plate (782), an OLED adsorption component, and an FPC adsorption component. Among them, the above-mentioned transfer support (781) is horizontally connected to the output end of the transfer lifting cylinder (77); the above-mentioned transfer support plate (782) is horizontally arranged below the transfer support (781) and is connected to the transfer support (781) through a pillar; the above-mentioned OLED adsorption component is arranged on one side of the transfer support plate (782), and the FPC adsorption component is arranged on the other side of the transfer support plate (782). The OLED adsorption component and the FPC adsorption component form an adsorption area in the horizontal plane, and the shape and size of the adsorption area are adjustable; the OLED adsorption component includes a mounting groove (783) and a first suction nozzle (784). Among them, the mounting groove (783) includes at least two. The mounting groove (783) includes a straight groove and an inclined groove. The straight groove is arranged along one side direction of the transfer support plate (782), and the inclined groove includes at least two and is arranged on the side of the straight groove in different angles towards the straight groove direction; the above-mentioned first suction nozzle (784) includes at least two. The first suction nozzle (784) is detachably inserted into the mounting groove (783), and the first suction nozzle (784) slides in the mounting groove (783) to adjust the mounting position; the above-mentioned FPC adsorption component includes a first strip (785), a second strip (786), a fixing nut (787), and a second suction nozzle (788). Among them, the above-mentioned first strip (785) includes two. The two first strips (785) are respectively connected to one side of the transfer support plate (782) in parallel at intervals, and a strip-shaped sliding groove is opened in the middle of the first strip (785); the above-mentioned second strip (786) includes at least two. One end of the second strip (786) is slidably connected to the strip-shaped sliding groove of the first strip (785) and is fixed by a fixing nut (787). The other end of the second strip (786) horizontally extends into the gap space between the two first strips (785), and a strip-shaped sliding groove is opened on the second strip (786); the above-mentioned second suction nozzle (788) includes at least two. The second suction nozzle (788) is slidably installed in the strip-shaped sliding groove of the second strip (786) and slides in the strip-shaped sliding groove of the second strip (786) to adjust the strip mounting position.

4. A drying process for an OLED and a substrate dryer after cleaning as described in claim 1, characterized in that, It includes the following process steps: S1. Upper air drying: The OLED substrate to be air-dried is subjected to upper air drying by the upper air drying component and then enters the air drying station through the front opening of the air drying station in the air drying box. S2. Material supporting and upper and lower air drying: The OLED substrate in step S1 is supported by the air drying carrier in the air drying station. After the air drying transfer arm lifts the OLED substrate up through the through groove and strip-shaped gap of the moving channel of the air drying carrier and then moves linearly and passes through the upper and lower air drying components, the upper and lower surfaces of the OLED substrate are air-dried by the upper and lower air drying components. S3, cache transfer: After the OLED substrate is air-dried up and down in step S2, the air-drying moving arm moves it to the cache station of the air-drying box, and places it on the air-drying carrier at the cache station for material cache. The transfer moving arm takes out the OLED substrate from the air-drying carrier and moves it to the transfer platform; S4, unloading: In step S3, the OLED substrate on the transfer platform is taken out by the unloading arm and moved to the next workstation to complete unloading.

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