Focusing method, device, equipment and storage medium for surface dust detection equipment

By using the optical imaging characteristics of laser sources and scintillation components in surface dust detection equipment, the distance between the image sensor surface and the microscope is determined, solving the problem of low detection efficiency and accuracy in the prior art, and achieving more efficient and precise focus and detection effect.

CN115499582BActive Publication Date: 2025-02-18SHENZHEN HAIQING DIGITAL TECH CO LTD

Patent Information

Application Number
CN202211001382.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-08-19
Publication Date
2025-02-18
Estimated Expiration
2042-08-19

AI Technical Summary

Technical Problem

In the prior art, the surface dust or damage detection efficiency and accuracy of image sensor surfaces are low, especially due to the lack of texture on the surface of the image sensor, it is difficult for the electronic focusing method to judge the clarity.

Method used

By using a laser source in the surface dust detection device to determine the first distance between the surface of the object to be detected and the surface of the microscope objective lens, and using the optical imaging characteristics of the scintillation component to collect images, the second distance between the horizontal plane of the target scintillation component and the surface of the objective lens, and then, Focus the microscope with a focus motor.

Benefits of technology

Improves the focus efficiency and accuracy of surface dust detection equipment, and enables faster and more accurate detection of dust or damage on the surface of image sensors.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present application belongs to the field of equipment debugging, and specifically relates to a focusing method, device, equipment and storage medium for a surface dust detection device. The focusing method of the surface dust detection device of the present application includes: determining a first distance from the surface of the object to be detected to the surface of the objective lens of a microscope; controlling a camera to collect images of a plurality of scintillation components arranged according to a preset rule to obtain a preset number of images, wherein the preset number of images include images when any scintillation component flashes alone; determining a target scintillation component from a plurality of scintillation components according to the pixel value of each image in the preset number of images; determining a second distance between the horizontal plane of the target scintillation component and the surface of the objective lens; and controlling a focusing motor to focus the objective lens according to the first distance and the second distance, so as to detect dust on the surface of the object to be detected through the focused microscope. Thereby achieving the purpose of improving the efficiency and accuracy of surface dust detection.
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Description

Technical Field

[0001] The present application relates to the field of equipment debugging, and in particular to a focusing method, device, equipment and storage medium for surface dust detection equipment. Background Art

[0002] The image sensor is a core precision device in the camera, and it is necessary to keep the image sensor clean and intact. However, during the production process of the camera, the image sensor must go through multiple processes such as SMT, wave soldering, and manual inspection by quality inspectors. Therefore, during the production process of the camera, the image sensor is very easy to be dusty or damaged; and before the image sensor is SMT, the surface of the image sensor may also be dusty or damaged. Therefore, it is necessary to detect dust or damage on the surface of the image sensor.

[0003] In the related art, in order to detect dust or damage on the surface of the image sensor, an electronic focusing method is usually used. However, the electronic focusing method mainly judges the sharpness of the edge segmentation between textures to achieve focus, but there is basically no texture on the surface of the image sensor, so it is difficult to judge the clarity. In addition, the electronic focusing method needs to repeatedly measure the focal length in a certain area, so the efficiency and accuracy of the electronic focusing method are also low. Summary of the invention

[0004] Embodiments of the present application provide a focusing method, apparatus, device and storage medium for a surface dust detection device, which are used to improve the focusing efficiency and focusing accuracy of the surface dust detection device.

[0005] In a first aspect, an embodiment of the present application provides a focusing method for a surface dust detection device, which is applied to a camera in the surface dust detection device, wherein the surface dust detection device also includes a base, a bracket, a microscope and a focusing motor, wherein the bracket is arranged on the base, the camera and the microscope are arranged on the bracket, and the focusing motor is connected to the microscope for focusing the microscope. The focusing method includes: determining a first distance from the surface of the object to be detected to the surface of the objective lens of the microscope; controlling the camera to capture images of a plurality of scintillation components arranged according to a preset rule to obtain a preset number of images, wherein the preset number of images include images when any scintillation component flashes alone; determining a target scintillation component from a plurality of scintillation components according to a pixel value of each image in the preset number of images; determining a second distance between the horizontal plane of the target scintillation component and the surface of the objective lens; and controlling the focusing motor to focus the objective lens according to the first distance and the second distance, so as to detect dust on the surface of the object to be detected through the focused microscope.

[0006] In a possible implementation, a camera is controlled to capture images of a plurality of flashing components arranged according to a preset rule to obtain a preset number of images, including: controlling the plurality of flashing components to flash according to a target time interval and a preset order, and controlling the camera to capture images to obtain a preset number of images.

[0007] In a possible implementation, before controlling the multiple flashing components to flash according to the target time interval and the preset order, it also includes: determining an acquisition rate for capturing images of the multiple flashing components; determining the acquisition time of each image according to the acquisition rate; and determining the acquisition time as the target time interval.

[0008] In a possible implementation, a target flashing component is determined among multiple flashing components based on the pixel value of each image in a preset number of images, including: for each image in the preset number of images, binarizing the image to obtain the pixel value of the image; determining the image with the smallest corresponding pixel value among the preset number of images as the target image; and determining, among multiple flashing components, the flashing component that flashes when the target image is obtained as the target flashing component.

[0009] In a possible implementation, controlling a focusing motor to focus an objective lens according to a first distance and a second distance includes: determining an adjustment distance and an adjustment direction of a focal length of the objective lens according to the first distance and the second distance; and focusing the objective lens based on the adjustment distance and the adjustment direction.

[0010] In a possible implementation, determining the adjustment distance and adjustment direction of the focal length of the objective lens according to the first distance and the second distance includes: determining the adjustment distance based on the difference between the first distance and the second distance; and determining the adjustment direction based on the positive or negative sign of the difference.

[0011] In a possible embodiment, the surface dust detection device also includes a laser source and a grid unit, and determines a first distance from the surface of the object to be detected to the objective lens surface of the microscope, including: controlling the laser source to emit a first laser beam to the surface of the object to be detected; determining a target receiving position at which the grid unit receives a second laser beam, the second laser beam being a laser beam after the surface of the object to be detected reflects the first laser beam; and determining the first distance as the distance corresponding to the target receiving position based on a mapping relationship between the receiving position and the distance.

[0012] In a possible implementation, the surface dust detection device further includes a display screen, and further includes: transmitting the image to the display screen to display the image.

[0013] In a second aspect, an embodiment of the present application provides a focusing device for a surface dust detection device, which is applied to a camera in the surface dust detection device. The surface dust detection device also includes a base, a bracket, a microscope and a focusing motor, wherein the bracket is arranged on the base, the camera and the microscope are arranged on the bracket, and the focusing motor is connected to the microscope for focusing the microscope. The focusing device includes: a first determination module, which is used to determine a first distance from the surface of the object to be detected to the objective lens surface of the microscope; a control module, which is used to control the camera to collect images of multiple scintillation components arranged according to preset rules to obtain a preset number of images, and the preset number of images include images when any scintillation component flashes alone; a second determination module, which is used to determine a target scintillation component from multiple scintillation components according to the pixel value of each image in the preset number of images; a third determination module, which is used to determine a second distance between the horizontal plane of the target scintillation component and the objective lens surface; a focusing module, which is used to control the focusing motor to focus the objective lens according to the first distance and the second distance, so as to detect dust on the surface of the object to be detected through the focused microscope.

[0014] In the third aspect, an embodiment of the present application provides a surface dust detection device, including: a base, a bracket, a microscope, a focusing motor, a camera, a laser source, a grid unit, a flashing component and a display screen, wherein the bracket, the grid unit and the flashing component are all arranged on the base, the camera, the microscope and the display screen are arranged on the bracket, the laser source is arranged on the flashing component, and the focusing motor is connected to the microscope; the microscope is used to perform surface dust detection on the object to be detected; the focusing motor is used to focus the microscope; the laser source is used to emit a first laser beam to the surface of the object to be detected; the grid unit is used to receive a second laser beam after the surface of the object to be detected reflects the first laser beam; the display screen is used to display the collected image when the flashing component is flashing; the camera is used to execute the focusing method of the surface dust detection device of the first aspect.

[0015] In a fourth aspect, an embodiment of the present application provides a computer-readable storage medium, in which computer execution instructions are stored. When the computer execution instructions are executed by a processor, they are used to implement the focusing method of the surface dust detection device of the first aspect.

[0016] In a fifth aspect, an embodiment of the present application provides a computer program product, including a computer program, which, when executed by a processor, implements the focusing method of the surface dust detection device as in the first aspect.

[0017] The focusing method, device, equipment and storage medium of the surface dust detection device provided in the embodiments of the present application determine the first distance between the object to be detected and the surface of the objective lens of the microscope by reflecting the laser beam emitted by the laser source on the surface of the object to be detected, and then use the optical imaging characteristics of the lens to collect the image of the flashing component when it flashes, and determine the second distance corresponding to the current focal length of the objective lens of the microscope, so as to focus the objective lens of the microscope according to the difference between the first distance and the second distance, so as to detect dust on the surface of the object to be detected through the focused microscope, thereby improving the efficiency and accuracy of surface dust detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the related technologies, the following is a brief introduction to the drawings required for use in the embodiments or the related technical descriptions. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0019] Figure 1 A schematic diagram of the structure of a surface dust detection device provided in an embodiment of the present application;

[0020] Figure 2 A flow chart of a focusing method for a surface dust detection device provided in an embodiment of the present application;

[0021] Figure 3 A schematic diagram of a scintillation component provided in an embodiment of the present application;

[0022] Figure 4 A schematic diagram of lens focal imaging provided in an embodiment of the present application;

[0023] Figure 5 A schematic diagram of a laser beam reflected from the surface of an object to be detected provided in an embodiment of the present application;

[0024] Figure 6 A schematic diagram of a display screen displaying an image provided in an embodiment of the present application;

[0025] Figure 7 A schematic diagram of the structure of a focusing device for a surface dust detection device provided in an embodiment of the present application;

[0026] Figure 8 A schematic diagram of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments made by ordinary technicians in this field under the enlightenment of the embodiments belong to the scope of protection of the present application.

[0028] The terms "first", "second", "third", "fourth", etc. (if any) in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0029] The following first explains the terms involved in this application.

[0030] Focus: also called light alignment or focusing. It is the process of changing the distance and position of the object by focusing the object to make the image clear.

[0031] The related technologies provided in the background technology have at least the following technical problems:

[0032] The image sensor is a core precision device in the camera, and it is necessary to keep the image sensor clean and intact. However, during the production process of the camera, the image sensor must go through multiple processes such as SMT, wave soldering, and manual inspection by quality inspectors. Therefore, during the production process of the camera, the image sensor is very easy to be dusty or damaged; and before the image sensor is SMT, the surface of the image sensor may also be dusty or damaged. Therefore, it is necessary to detect dust or damage on the surface of the image sensor.

[0033] In the related art, in order to detect dust or damage on the surface of the image sensor, it is usually detected manually or by electronic focusing method. The manual detection method mainly places the image sensor under a microscope, manually adjusts the focus of the microscope to a clear imaging position, and then manually observes the amplified image of the image sensor surface to detect the quality of the image sensor. However, the manual detection method is inefficient, and many stains or damages that cannot be seen by the naked eye are easily overlooked, resulting in low manual detection accuracy; the electronic focusing method mainly judges the clarity of the edge segmentation sharpness between textures to achieve focus, but there is basically no texture on the surface of the image sensor, so it is difficult to judge the clarity, and the electronic focusing method needs to repeatedly measure the focal length in a certain area, so the efficiency and accuracy of the electronic focusing method are also low.

[0034] In response to the above-mentioned problems, the present application proposes a focusing method for a surface dust detection device, which determines a first distance between the object to be detected and the surface of the objective lens of a microscope by reflecting a laser beam emitted by a laser source on the surface of the object to be detected, and then uses the optical imaging characteristics of the lens to capture an image of the flashing component, and determines a second distance corresponding to the current focal length of the objective lens of the microscope. The objective lens of the microscope is focused according to the difference between the first distance and the second distance, so as to detect dust on the surface of the object to be detected through the focused microscope, thereby improving the efficiency and accuracy of surface dust detection.

[0035] In one embodiment, the focusing method of the surface dust detection device can be applied in an application scenario. Figure 1 A schematic diagram of the structure of a surface dust detection device provided in an embodiment of the present application is shown in FIG. Figure 1 As shown, the surface dust detection device 10 includes a base 11, a bracket 12, a microscope 13, a focusing motor 14, a camera 15, a laser source 16, a grid unit 17, a flashing component 18 and a display screen 19, wherein the bracket 12, the grid unit 17 and the flashing component 18 are all arranged on the base 11, the camera 15, the microscope 13 and the display screen 19 are arranged on the bracket 12, the laser source 16 is arranged on the flashing component 18, and the focusing motor 14 is connected to the microscope 13.

[0036] In the surface dust detection device 10, a microscope 13 is used to perform surface dust detection on an object to be detected 20; a focusing motor 14 is used to focus the microscope 13; a laser source 16 is used to emit a first laser beam to the surface of the object to be detected 20; a grid unit 17 is used to receive a second laser beam after the surface of the object to be detected 20 reflects the first laser beam; a display screen 19 is used to display the collected image of the flashing component 18 when it flashes; a camera 15 is used to determine a first distance from the surface of the object to be detected 20 to the objective lens surface of the microscope 13, and control the camera 15 to collect images of multiple flashing components 18 arranged according to a preset rule to obtain a preset number of images, and then determine a target flashing component from the multiple flashing components 18 according to the pixel value of each image in the preset number of images, and determine the second distance between the horizontal plane of the target flashing component and the objective lens surface, and finally control the focusing motor 14 to focus the objective lens according to the first distance and the second distance, so as to detect dust on the surface of the object to be detected 20 through the focused microscope 13.

[0037] Optionally, the grid unit 17 may also be referred to as an object distance unit, including a grid and a light sensor; and the scintillation component 18 may also be referred to as a microscope distance unit. The object 20 to be detected may be placed on the object placement table.

[0038] Since the first distance from the surface of the object to be detected to the surface of the objective lens of the microscope is determined, and the image of the flashing component collected is analyzed by utilizing the optical imaging characteristics of the lens, the second distance between the horizontal plane of the target flashing component and the surface of the objective lens, that is, the focal length of the objective lens of the microscope, is determined. In this way, the adjustment distance and adjustment direction of the objective lens of the microscope can be achieved through the data difference and direction difference between the first distance and the second distance, thereby achieving the purpose of quickly focusing the objective lens of the microscope.

[0039] In combination with the above scenarios, the technical solution of the focusing method of the surface dust detection device provided by the present application is described in detail through several specific embodiments below.

[0040] The present application provides a focusing method for a surface dust detection device, which is applied to Figure 1 Camera in a surface dust detection device. Figure 2 A flow chart of a focusing method for a surface dust detection device provided in an embodiment of the present application, such as Figure 2 As shown, the method comprises the following steps:

[0041] S201: Determine a first distance from the surface of the object to be detected to the surface of the objective lens of the microscope.

[0042] In this step, the object to be detected may be an object with a smooth surface, so the surface of the object to be detected can reflect the light beam, so that the light beam reflected by the surface of the object to be detected can be used to determine the first distance from the surface of the object to be detected to the objective lens surface of the microscope.

[0043] S202: Controlling a camera to collect images of a plurality of scintillation components arranged according to a preset rule to obtain a preset number of images.

[0044] In this step, the preset number of images include images when any flashing component flashes alone.

[0045] Specifically, the flashing component may be a flashing lamp, which may also be called a focal length measuring lamp, and the flashing light of the focal length measuring lamp may be white light. Figure 3 As shown, Figure 3 A schematic diagram of a flashing component provided in an embodiment of the present application, in Figure 3 In the embodiment, a plurality of flashing components can be sequentially arranged on a plane with a certain angle, so that a camera can capture images when the flashing components flash.

[0046] S203: determining a target scintillation component from among a plurality of scintillation components according to a pixel value of each image in a preset number of images.

[0047] In this step, after the image of the flashing component is captured, the optical imaging characteristics of the lens can be used to analyze multiple images to determine the image with the minimum pixel value, which is also the image captured when the target flashing component is flashing.

[0048] S204: Determine a second distance between the horizontal plane of the target scintillation component and the surface of the objective lens.

[0049] In this step, since the image collected when the target scintillation component is flashing is the smallest, it can be explained that the horizontal plane where the target scintillation component is located is the plane where the intersection of the objective lens of the microscope is located. Therefore, the second distance between the horizontal plane of the target scintillation component and the surface of the objective lens can be determined, and the second distance is also the focal length of the objective lens.

[0050] S205: Controlling a focusing motor to focus the objective lens according to the first distance and the second distance, so as to detect dust on the surface of the object to be detected through the focused microscope.

[0051] In this step, the first distance is the current distance between the surface of the object to be detected and the surface of the objective lens, and the second distance is the focal length of the objective lens. Therefore, the focusing motor can be controlled to focus the objective lens according to the difference between the first distance and the second distance. In this way, when the microscope is focused, it can clearly see whether there is dust on the surface of the object to be detected when detecting dust on the surface of the object to be detected.

[0052] The focusing method of the surface dust detection device provided in this embodiment determines a first distance between the object to be detected and the surface of the objective lens of the microscope, and then uses the optical imaging characteristics of the lens to capture an image of the flashing component, and determines the second distance corresponding to the current focal length of the objective lens of the microscope, and then focuses the objective lens of the microscope according to the difference between the first distance and the second distance, so as to detect dust on the surface of the object to be detected through the focused microscope, thereby improving the efficiency and accuracy of surface dust detection.

[0053] In one embodiment, a camera is controlled to capture images of a plurality of flashing components arranged according to a preset rule to obtain a preset number of images, including: controlling the plurality of flashing components to flash according to a target time interval and a preset order, and controlling the camera to capture images to obtain a preset number of images.

[0054] In this scheme, the target time interval can be determined according to the rate at which the camera collects images, and the preset sequence can be Figure 3 The sequence from top to bottom or from bottom to top can be used to more quickly determine the target flashing component through such a continuous sequence, and can also avoid the problem of incorrect determination of the target flashing component due to disordered sequence. Optionally, the preset sequence can also be other regular sequences.

[0055] In one embodiment, before controlling multiple flashing components to flash according to a target time interval and a preset order, it also includes: determining an acquisition rate for acquiring images of the multiple flashing components; determining an acquisition time for each image based on the acquisition rate; and determining the acquisition time as the target time interval.

[0056] In this scheme, the acquisition rate of the camera for capturing images of multiple flashing components can be determined in advance. Taking the acquisition rate of 25FPS as an example, the camera captures 25 frames of images per second, and the acquisition time of each frame is 40ms. In order to ensure that the image of each flashing component can be captured when it flashes, without missing any image or incomplete image capture when multiple flashing components flash, the target interval time can be determined as 40ms, and the number of captured images can be 10 frames. The total acquisition time of 10 frames of images is 400ms. The captured 10 frames of images and the total acquisition time can be recorded in the camera controller to ensure that the complete image can be captured. Therefore, the accuracy of determining the target flashing component can be guaranteed.

[0057] In one embodiment, a target flashing component is determined from among multiple flashing components based on the pixel value of each image in a preset number of images, including: for each image in the preset number of images, binarizing the image to obtain the pixel value of the image; determining the image with the smallest corresponding pixel value in the preset number of images as the target image; and determining, among multiple flashing components, the flashing component that flashes when the target image is obtained as the target flashing component.

[0058] In this scheme, according to the focal imaging characteristics of the lens, it can be determined that the image formed at the focal point of the lens is the smallest, such as Figure 4 As shown, Figure 4 A schematic diagram of lens focal imaging provided in an embodiment of the present application, in Figure 4 It can be seen from the figure that the principle of lens focus imaging is that, whether the image is before or after the focus, the size of the image is larger than the image at the focus, so the image at the focus of the lens is the smallest, that is, the image at the focus is the clearest image. Therefore, for each image in the preset number of images, the image can be binarized to obtain the pixel value of the white pixel of the image, so that the pixel value of each image is compared and sorted, and the image with the smallest pixel value can be determined as the target image, and the target image is the image formed at the focus of the objective lens, so that the flashing component that flashes when the target image is collected is the target flashing component, and the purpose of improving the accuracy of determining the focus of the objective lens can be achieved.

[0059] In one embodiment, controlling a focusing motor to focus an objective lens according to a first distance and a second distance includes: determining an adjustment distance and an adjustment direction of a focal length of the objective lens according to the first distance and the second distance; and focusing the objective lens based on the adjustment distance and the adjustment direction.

[0060] In this scheme, the first distance is the distance between the surface of the current object to be detected and the surface of the objective lens, and the second distance is the distance corresponding to the focal length of the objective lens. When the first distance and the second distance are known, the adjustment distance and adjustment direction of the focal length of the objective lens can be quickly determined, thereby achieving rapid focusing of the objective lens. In this way, dust or other impurities, damage, etc. on the surface of the object to be detected can be quickly detected through the focused microscope, thereby improving the efficiency and accuracy of surface dust detection.

[0061] In one embodiment, determining the adjustment distance and adjustment direction of the focal length of the objective lens according to the first distance and the second distance includes: determining the adjustment distance based on the difference between the first distance and the second distance; and determining the adjustment direction based on the positive or negative sign of the difference.

[0062] In this scheme, after the first distance and the second distance are known, the difference between the first distance and the second distance is the adjustment distance of the focal length. If the first distance is greater than the second distance, the adjustment direction is to adjust the objective lens downward; if the first distance is less than the second distance, the adjustment direction is to adjust the objective lens upward, so as to ensure that the first distance and the second distance can be equal, thereby improving the efficiency and accuracy of surface dust detection.

[0063] In one embodiment, the surface dust detection device also includes a laser source and a grid unit, and determines a first distance from the surface of the object to be detected to the objective lens surface of the microscope, including: controlling the laser source to emit a first laser beam to the surface of the object to be detected; determining a target receiving position where the grid unit receives a second laser beam, the second laser beam being a laser beam after the surface of the object to be detected reflects the first laser beam; and determining the first distance as the distance corresponding to the target receiving position based on a mapping relationship between the receiving position and the distance.

[0064] In this scheme, the grid unit may include a grid entrance and a light sensor. After the laser source emits a first laser beam to the surface of the object to be detected, since the surface of the object to be detected is smooth, the object to be detected can reflect the first laser beam to the grid entrance. The light sensor connected to the grid entrance can convert the optical signal of the second laser beam into an electrical signal after detecting that the grid entrance receives the second laser beam, and record the receiving position of the electrical signal at the grid entrance. Since the receiving position of the laser beam at the grid entrance can change with the incident angle of the laser beam emitted by the laser source, there can be a mapping relationship between the receiving position and the distance from the surface of the object to be detected to the objective lens, so that according to the mapping relationship, the purpose of quickly determining the distance from the surface of the object to be detected to the objective lens corresponding to the receiving position, that is, the first distance, can be achieved.

[0065] Specifically, the incident angles of the laser beams emitted by the laser source at different heights are different, and the receiving positions of the laser beams reflected by the surface of the object to be detected at the grid entrance are also different, such as Figure 5 As shown, Figure 5 A schematic diagram of a laser beam reflected from the surface of an object to be detected provided in an embodiment of the present application, Figure 5 In the figure, when the height of the laser source is lowered, the receiving position at the entrance of the grid also changes.

[0066] In one embodiment, the surface dust detection device further includes a display screen, and further includes: transmitting the image to the display screen to display the image.

[0067] In this embodiment, after the camera collects a preset number of images when multiple flashing components flash, the preset number of images can be transmitted to the display screen, and the display screen can display the corresponding image collected when each flashing component flashes, such as Figure 6As shown, therefore, it is possible to visually see through the display screen which image is the smallest, and therefore, the target scintillation component can be quickly determined, thereby improving the efficiency of determining the focal length of the objective lens, and further improving the efficiency and accuracy of detecting surface dust.

[0068] The focusing method of the surface dust detection device provided in the present application utilizes the fast focusing method of the scintillation component and the optical imaging characteristics of the lens to quickly calculate the focal length of the microscope objective and the distance of the object to be detected from the objective. Through the difference between the two distances, the adjustment distance and adjustment direction of the microscope objective can be quickly determined to achieve the purpose of fast focusing of the surface dust detection device.

[0069] Generally speaking, the technical solution provided by the present application is a technical implementation method that can ensure both the efficiency and accuracy of detecting surface dust.

[0070] The present application also provides a focusing device for a surface dust detection device, which is applied to a camera in the surface dust detection device. The surface dust detection device also includes a base, a bracket, a microscope and a focusing motor, wherein the bracket is arranged on the base, the camera and the microscope are arranged on the bracket, and the focusing motor is connected to the microscope for focusing the microscope. Figure 7 A schematic diagram of the structure of a focusing device for a surface dust detection device provided in an embodiment of the present application is shown in FIG. Figure 7 As shown, the focusing device 700 of the surface dust detection device includes:

[0071] A first determination module 701 is used to determine a first distance from the surface of the object to be detected to the surface of the objective lens of the microscope;

[0072] The control module 702 is used to control the camera to collect images of a plurality of flashing components arranged according to a preset rule to obtain a preset number of images, wherein the preset number of images include images when any flashing component flashes alone;

[0073] A second determination module 703, configured to determine a target scintillation component from among a plurality of scintillation components according to a pixel value of each image in a preset number of images;

[0074] A third determination module 704 is used to determine a second distance between the horizontal plane of the target scintillation component and the surface of the objective lens;

[0075] The focusing module 705 is used to control the focusing motor to focus the objective lens according to the first distance and the second distance, so as to detect dust on the surface of the object to be detected through the focused microscope.

[0076] Optionally, when the control module 702 controls the camera to capture images of multiple flashing components arranged according to preset rules to obtain a preset number of images, it is specifically used to: control the multiple flashing components to flash according to a target time interval and a preset order, and control the camera to capture images to obtain a preset number of images.

[0077] Optionally, the focusing device 700 of the surface dust detection device also includes a processing module (not shown), which is specifically used to: determine an acquisition rate for image acquisition of multiple flashing components before controlling the multiple flashing components to flash according to a target time interval and a preset order; determine an acquisition time for each image based on the acquisition rate; and determine the acquisition time as the target time interval.

[0078] Optionally, when determining a target flashing component among multiple flashing components based on the pixel value of each image in a preset number of images, the second determination module 703 is specifically used to: for each image in the preset number of images, perform binarization processing on the image to obtain the pixel value of the image; determine the image with the smallest corresponding pixel value among the preset number of images as the target image; and determine, among multiple flashing components, the flashing component that flashes when the target image is obtained as the target flashing component.

[0079] Optionally, when the focusing module 705 controls the focusing motor to focus the objective lens according to the first distance and the second distance, it is specifically used to: determine the adjustment distance and adjustment direction of the focal length of the objective lens according to the first distance and the second distance; and focus the objective lens based on the adjustment distance and the adjustment direction.

[0080] Optionally, when determining the adjustment distance and adjustment direction of the focal length of the objective lens according to the first distance and the second distance, the focusing module 705 is specifically used to: determine the adjustment distance based on the difference between the first distance and the second distance; and determine the adjustment direction based on the positive or negative sign of the difference.

[0081] Optionally, the surface dust detection device also includes a laser source and a grid unit. When determining the first distance from the surface of the object to be detected to the objective lens surface of the microscope, the first determination module 701 is specifically used to: control the laser source to emit a first laser beam to the surface of the object to be detected; determine a target receiving position where the grid unit receives a second laser beam, where the second laser beam is a laser beam after the surface of the object to be detected reflects the first laser beam; and determine, based on a mapping relationship between the receiving position and the distance, that the first distance is the distance corresponding to the target receiving position.

[0082] Optionally, the surface dust detection device further includes a display screen, and the focusing device 700 of the surface dust detection device further includes a display module (not shown), which is specifically used to transmit the image to the display screen to display the image.

[0083] The focusing device for the surface dust detection device provided in this embodiment is used to execute the technical solution of the focusing method for the surface dust detection device in the aforementioned method embodiment. Its implementation principle and technical effects are similar and will not be repeated here.

[0084] An embodiment of the present application also provides an electronic device. Figure 8 A schematic diagram of an electronic device provided in an embodiment of the present application. Figure 8 As shown, the electronic device 800 includes:

[0085] Processor 811, memory 812, and interactive interface 813;

[0086] The processor 811 is in communication with the memory 812; the memory 812 is used to store computer-executable instructions executable by the processor 811;

[0087] The processor 811 is configured to execute the technical solution in the focusing method of the surface dust detection device by executing computer executable instructions.

[0088] Optionally, the memory 812 may be independent or integrated with the processor 811 .

[0089] Optionally, when the memory 812 is a device independent of the processor 811, the electronic device 800 may further include:

[0090] A bus is used to connect the above devices.

[0091] Optionally, the memory may be, but is not limited to, a random access memory (RAM), a read only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable read-only memory (EEPROM), etc. The memory is used to store programs, and the processor executes the programs after receiving the execution instructions. Furthermore, the software programs and modules in the above-mentioned memory may also include an operating system, which may include various software components and / or drivers for managing system tasks (such as memory management, storage device control, power management, etc.), and may communicate with various hardware or software components to provide an operating environment for other software components.

[0092] Optionally, the processor may be an integrated circuit chip having signal processing capability. The above-mentioned processor may be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc. The disclosed methods, steps, and logic block diagrams in the embodiments of the present application may be implemented or executed. The general-purpose processor may be a microprocessor or the processor may be any conventional processor, etc.

[0093] An embodiment of the present application also provides a computer-readable storage medium, in which computer execution instructions are stored. When the computer execution instructions are executed by a processor, they are used to implement the technical solution of the focusing method of the surface dust detection device provided in the aforementioned method embodiment.

[0094] An embodiment of the present application also provides a computer program product, including a computer program, which, when executed by a processor, implements the technical solution of the focusing method of the surface dust detection device provided in the method embodiment.

[0095] Those skilled in the art can understand that all or part of the steps of implementing the above-mentioned method embodiments can be completed by hardware related to program instructions. The aforementioned program can be stored in a computer-readable storage medium. When the program is executed, the steps of the above-mentioned method embodiments are executed; and the aforementioned storage medium includes: ROM, RAM, disk or optical disk and other media that can store program codes.

[0096] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A focusing method for a surface dust detection device, characterized in that: The camera used in the surface dust detection device further comprises a base, a bracket, a microscope and a focusing motor, wherein the bracket is arranged on the base, the camera and the microscope are arranged on the bracket, the focusing motor is connected to the microscope and is used to focus the microscope, and the focusing method comprises: Determine a first distance from the surface of the object to be detected to the surface of the objective lens of the microscope; Controlling the camera to collect images of a plurality of flashing components arranged according to a preset rule to obtain a preset number of images, wherein the preset number of images includes images when any of the flashing components flashes alone; Determining a target scintillation component among a plurality of scintillation components according to a pixel value of each image in the preset number of images; determining a second distance between the horizontal plane of the target scintillation component and the surface of the objective lens; According to the first distance and the second distance, controlling the focusing motor to focus the objective lens, so as to detect dust on the surface of the object to be detected through the focused microscope; The step of determining a target scintillation component from among a plurality of scintillation components according to a pixel value of each image in the preset number of images comprises: For each image of the preset number of images, binarization processing is performed on the image to obtain a pixel value of the image; Determine the image with the smallest corresponding pixel value among the preset number of images as the target image; Among a plurality of flickering components, determining a flickering component that flickers when obtaining the target image as the target flickering component; The surface dust detection device further includes a laser source and a grid unit, and the determining of a first distance from the surface of the object to be detected to the objective lens surface of the microscope includes: Controlling the laser source to emit a first laser beam toward the surface of the object to be detected; Determine a target receiving position of the grid unit for receiving a second laser beam, where the second laser beam is a laser beam obtained after the first laser beam is reflected by the surface of the object to be detected; Based on a mapping relationship between a receiving position and a distance, it is determined that the first distance is a distance corresponding to the target receiving position.

2. The focusing method according to claim 1, characterized in that: The controlling the camera to collect images of a plurality of scintillation components arranged according to a preset rule to obtain a preset number of images includes: According to the target time interval and the preset sequence, the plurality of flashing components are controlled to flash, and the camera is controlled to collect images to obtain the preset number of images.

3. The focusing method according to claim 2, characterized in that: Before controlling the plurality of flashing components to flash according to the target time interval and the preset order, the method further comprises: Determining an acquisition rate for acquiring images of the plurality of scintillation components; Determining the acquisition time of each image according to the acquisition rate; The acquisition time is determined as the target time interval.

4. The focusing method according to any one of claims 1 to 3, characterized in that: The step of controlling the focusing motor to focus the objective lens according to the first distance and the second distance includes: Determining an adjustment distance and an adjustment direction of the focal length of the objective lens according to the first distance and the second distance; The objective lens is focused based on the adjustment distance and the adjustment direction.

5. The focusing method according to claim 4, characterized in that: Determining the adjustment distance and adjustment direction of the focal length of the objective lens according to the first distance and the second distance includes: Determining the adjustment distance based on a difference between the first distance and the second distance; The adjustment direction is determined based on whether the difference is positive or negative.

6. The focusing method according to any one of claims 1 to 3, characterized in that: The surface dust detection device also includes a display screen, and further includes: The image is transmitted to the display screen to display the image.

7. A focusing device for a surface dust detection device, characterized in that: The camera used in the surface dust detection device further comprises a base, a bracket, a microscope and a focusing motor, wherein the bracket is arranged on the base, the camera and the microscope are arranged on the bracket, the focusing motor is connected to the microscope and is used to focus the microscope, and the focusing device comprises: A first determination module, used to determine a first distance from the surface of the object to be detected to the surface of the objective lens of the microscope; A control module, used for controlling the camera to collect images of a plurality of flashing components arranged according to a preset rule, to obtain a preset number of images, wherein the preset number of images include images when any of the flashing components flashes alone; A second determination module, configured to determine a target scintillation component among a plurality of scintillation components according to a pixel value of each image in the preset number of images; A third determining module, used to determine a second distance between the horizontal plane of the target scintillation component and the surface of the objective lens; A focusing module, used for controlling the focusing motor to focus the objective lens according to the first distance and the second distance, so as to detect dust on the surface of the object to be detected through the focused microscope; The second determining module is specifically used to: For each image of the preset number of images, binarization processing is performed on the image to obtain a pixel value of the image; Determine the image with the smallest corresponding pixel value among the preset number of images as the target image; Among a plurality of flickering components, determining a flickering component that flickers when obtaining the target image as the target flickering component; The surface dust detection device further includes a laser source and a grid unit, and the first determination module is specifically used for: Controlling the laser source to emit a first laser beam toward the surface of the object to be detected; Determine a target receiving position of the grid unit for receiving a second laser beam, where the second laser beam is a laser beam obtained after the first laser beam is reflected by the surface of the object to be detected; Based on a mapping relationship between a receiving position and a distance, it is determined that the first distance is a distance corresponding to the target receiving position.

8. A surface dust detection device, characterized in that: include: A base, a bracket, a microscope, a focus motor, a camera, a laser source, a grid unit, a scintillation component and a display screen, wherein the bracket, the grid unit and the scintillation component are all arranged on the base, the camera, the microscope and the display screen are arranged on the bracket, the laser source is arranged on the scintillation component, and the focus motor is connected to the microscope; The microscope is used to detect dust on the surface of the object to be detected; The focusing motor is used to focus the microscope; The laser source is used to emit a first laser beam toward the surface of the object to be detected; The grid unit is used to receive a second laser beam after the first laser beam is reflected by the surface of the object to be detected; The display screen is used to display the collected image of the flashing component when it flashes; The camera is used to execute the focusing method of the surface dust detection device according to any one of claims 1 to 6.

9. A computer-readable storage medium storing computer-executable instructions, characterized in that: When the computer-executable instructions are executed by a processor, they are used to implement the focusing method of the surface dust detection device according to any one of claims 1 to 6.

Citation Information

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