Microelectromechanical system electrode

Abstract

This application discloses a microelectromechanical system (MEMS) electrode, belonging to the field of micromechanical systems technology. The MEMS electrode includes a body having a accommodating space for a resonator in a MEMS system. The body also has at least one through-hole disposed around the accommodating space, and the through-hole extends in the same direction as the accommodating space. The MEMS electrode provided in this application, by providing a through-hole in the electrode body, can reduce the ground area of ​​the body surface, thereby reducing the ground capacitance at the body surface.

Description

Technical Field

[0001] This invention relates to the field of microelectromechanical systems (MEMS) technology, and particularly to a MEMS electrode. Background Technology

[0002] Micro-Electro-Mechanical Systems (MEMS) resonators are used in timing circuits of electronic devices. A typical MEMS resonator system includes multiple electrodes to drive the MEMS resonator.

[0003] As is well known, when a voltage is applied to the driving electrode, charge accumulates on the electrode, thereby generating an electrostatic force between the driving electrode and the MEMS resonator, which has accumulated opposite charges. By applying a time-varying voltage signal (usually combined with a DC voltage) to the driving electrode, a time-varying electrostatic force can be generated across the surfaces of the MEMS resonator and the driving electrode, causing the MEMS resonator to oscillate.

[0004] In MEMS resonators, the ring resonant structure is a commonly used megahertz (MHz) resonant structure. Utilizing its breathing mode, a large resonant Q value can be achieved, and the dynamic impedance of the resonator can be reduced through arraying, exhibiting strong scalability. This resonant structure can be called the moving element. To drive and detect the vibration of the moving element, driving electrodes and sensing electrodes are needed. The driving electrode applies an electrostatic force of a certain frequency to the moving element, driving it to vibrate. The sensing electrode obtains the vibration signal of the moving element by sensing the change in capacitance between the sensing electrode and the moving element caused by the vibration. The driving electrode and sensing electrode can be called the stationary elements. When the MEMS resonator is operating, it is generally desirable to maximize the vibration amplitude of the moving element and minimize the vibration of the stationary element to obtain a high signal-to-noise ratio.

[0005] like Figure 1 As shown, Figure 1 This is a partial structural diagram of an existing microelectromechanical resonator. The inner ring electrode 100 is fixed to the substrate (not shown) by the inner ring anchor point 101. The ring resonator 200 is arranged around the inner ring electrode 100. The outer ring electrode 300 surrounds the ring resonator 200 and is fixed to the substrate by the outer ring anchor point 301.

[0006] One of the inner ring electrode 100 and the outer ring electrode 300 is a driving electrode, and the other is a sensing electrode. For example, the inner ring electrode 100 is a sensing electrode and the outer ring electrode 300 is a driving electrode; or, the inner ring electrode 100 is a driving electrode and the outer ring electrode 300 is a sensing electrode.

[0007] Regarding the electrode layout of the aforementioned ring resonator 200, the inner ring electrode 100 has a relatively simple structure, and its capacitance to ground 102 is relatively stable. However, due to the irregular shape of the outer ring electrode 300, its layout is more complex. Because of its large span, the outer ring electrode 300 exhibits low stiffness in in-plane bending modes, resulting in large vibration deformation amplitudes and potential interference with vibration signals. Therefore, it is often necessary to increase the in-plane cross-sectional area of ​​the outer ring electrode 300 to improve its stiffness. Figure 2 As shown, Figure 2 It is by Figure 1 The diagram shows a cross-sectional view of a MEMS chip composed of a microelectromechanical system resonator. As the in-plane cross-sectional area of ​​the outer electrode 300 increases, the overlap area between the outer electrode 300 and the ground potential in the horizontal direction increases. When the outer electrode 300 is energized, the capacitance 302 of the outer electrode to ground increases, which affects the detection of the vibration frequency of the ring resonator 200. Summary of the Invention

[0008] This application provides a microelectromechanical system electrode that can reduce the ground area of ​​the electrode body, thereby reducing its ground capacitance.

[0009] To address the aforementioned technical problems, this application provides a microelectromechanical system (MEMS) electrode, comprising a body having a accommodating space for accommodating a resonator in the MEMS, and the body further having at least one through hole disposed around the accommodating space, with the through hole extending in the same direction as the accommodating space.

[0010] The microelectromechanical system electrode provided in this application reduces the ground area of ​​the electrode body by providing through holes, thereby reducing the ground capacitance at the surface of the body. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a partial structural diagram of an existing microelectromechanical resonator;

[0013] Figure 2 It is by Figure 1 The diagram shows a cross-sectional view of a MEMS chip composed of microelectromechanical system resonators from one perspective.

[0014] Figure 3This is a schematic diagram of the structure of an embodiment of the electrode body of a microelectromechanical system provided in this application;

[0015] Figure 4 This is a top view schematic diagram of an embodiment of the opening in the electrode body connection portion of a microelectromechanical system provided in this application;

[0016] Figure 5 This is a top view schematic diagram of an embodiment of the electrode body of a microelectromechanical system provided in this application;

[0017] Figure 6 This is a top view schematic diagram of another embodiment of the electrode body of the microelectromechanical system provided in this application;

[0018] Figure 7a This is a schematic diagram of the cross-sectional shape of a through hole according to an embodiment provided in this application;

[0019] Figure 7b This is a schematic diagram of another through-hole cross-sectional shape according to an embodiment provided in this application;

[0020] Figure 7c This is a schematic diagram of another through-hole cross-sectional shape according to an embodiment provided in this application;

[0021] Figure 8 This is a schematic diagram of a truss structure for the electrode body of the microelectromechanical system in another embodiment provided in this application;

[0022] Figure 9 This is a schematic diagram of a microelectromechanical system electrode body having two accommodating spaces in another embodiment provided in this application;

[0023] Figure 10a This is a simulation diagram of the static overall deformation of the electrode body in the non-perforated technology scheme used for comparative analysis;

[0024] Figure 10b This application Figure 6 A schematic diagram of the static overall deformation simulation of the electrode body in the embodiment;

[0025] Figure 11a This is a simulation diagram of the radial deformation of the electrode body in the non-perforated technology scheme used for comparative analysis;

[0026] Figure 11b This application Figure 6 A simulation diagram of the radial deformation of the electrode body in the embodiment;

[0027] Figure 12 This is a schematic diagram of a microelectromechanical oscillator according to an embodiment provided in this application. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be particularly noted that the following embodiments are for illustrative purposes only and do not limit the scope of the invention. Similarly, the following embodiments are only some, not all, embodiments of the present invention, and all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0030] It should be noted that the terms "first," "second," and "third" in the embodiments of this application are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0031] This application provides a microelectromechanical system (MEMS) electrode, which includes a body 10, and reduces the capacitance to ground of the body 10 while maintaining a substantially constant stiffness. Please refer to [link to previous application]. Figure 3 , Figure 3 This is a schematic diagram of the structure of an embodiment of the electrode body of the microelectromechanical system of this application.

[0032] The main body 10 has a certain thickness, which is determined to meet design requirements. Two surfaces of the main body 10, facing each other along the thickness direction, are the first surface 10a and the second surface 10b. A receiving space 12, which accommodates the first surface 10a and the second surface 10b, is provided through the main body 10 along the thickness direction. This receiving space 12 is used to accommodate a resonator (not shown in the figure).

[0033] The main body 10 has at least one through hole 15 penetrating the first surface 10a and the second surface 10b, and the at least one through hole 15 is distributed around the accommodating space 12. Because the first surface 10a has the opening of the through hole 15, the area of ​​the first surface 10a is reduced, thereby reducing the area of ​​the first surface 10a to ground and thus reducing the capacitance to ground of the first surface 10a. Similarly, because the through hole 15 penetrates the second surface 10b, the area of ​​the second surface 10b is reduced, thereby reducing the area of ​​the second surface 10b to ground and thus reducing the capacitance to ground of the second surface 10b.

[0034] Please continue reading. Figure 3 In this embodiment, the main body 10 includes a connecting portion 11 and a first extension portion 13 and a second extension portion 14 respectively connected to the connecting portion 11. The first extension portion 13 and the second extension portion 14 are spaced apart. The connecting portion 11, the first extension portion 13, and the second extension portion 14 enclose and form an accommodating space 12. The connecting portion 11, the first extension portion 13, and the second extension portion 14 have two corresponding surfaces connected together in the thickness direction to form the first surface 10a and the second surface 10b of the main body 10, respectively.

[0035] In this embodiment, the electrode body 10 is semi-circular, or more precisely, C-shaped. The connecting portion 11 is the part on the body 10 that constrains the electrode. The connecting portion 11 secures the body 10 to the substrate (not shown). In another embodiment, the connecting portion 11 is fixedly connected to the substrate by an anchor 11a, and subsequently, the body 10 is fixed to the substrate by the anchor 11a, as shown below. Figure 4 As shown.

[0036] At least one of the connecting portion 11, the first extension portion 13, and the second extension portion 14 is provided with a through hole 15. In this embodiment, the connecting portion 11, the first extension portion 13, and the second extension portion 14 are all provided with through holes 15.

[0037] Since the first extension 13 is constrained by the connecting portion 11, force analysis during operation shows that the force on the first extension 13 gradually decreases towards the direction away from the connecting portion 11. That is, the first extension 13 experiences the greatest force near the connecting portion 11 and the least force at its far end. To reduce the capacitance to ground of the electrode body 10, the area of ​​the first surface 10a and the second surface 10b needs to be reduced. Therefore, to match the magnitude of the force on the first extension 13, the far end of the first extension 13 away from the connecting portion 11 is contracted. That is, the cross-sectional width of the first extension 13 on the section parallel to the first surface 10a and the second surface 10b gradually decreases towards the direction away from the connecting portion 11.

[0038] The second extension 14 has the same shape and cross-sectional area as the first extension 13, and the second extension 14 is symmetrically arranged with the first extension 13.

[0039] The accommodating space 12 is formed by the space enclosed by the connecting part 11, the first extension part 13, and the second extension part 14. In this embodiment, the accommodating space 12 is cylindrical. Thus, the planar shape of the resonator (not shown in the figure) in the direction of the first surface 10a or the second surface 10b is a disk shape or an annular shape, or the outer surface is approximately circular.

[0040] Please seeFigure 5 , Figure 5 This is a top view schematic diagram of the electrode body of a microelectromechanical system according to an embodiment of this application. The through hole 15 may include a plurality of through holes 151 provided in the first extension 13 that penetrate the first surface 10a and the second surface 10b, and a plurality of through holes 152 provided in the second extension 14 that penetrate the first surface 10a and the second surface 10b.

[0041] In this embodiment, the first extension 13 is provided with a plurality of through holes 151 penetrating the first surface 10a and the second surface 10b. The plurality of through holes 151 can be sequentially numbered 1511, 1512, 1513, 1514, 1515 and 1516 in the direction from the connecting part 11 toward the end away from the connecting part 11. The number of through holes 151 is not limited, and is only for illustration here.

[0042] Please continue reading. Figure 5 Multiple through holes 151 are distributed around the accommodating space 12. In this embodiment, the multiple through holes 151 are arranged linearly from the connecting portion 11 of the main body 10 to the end of the first extension 13 away from the connecting portion 11. Of course, the multiple through holes 151 can also be arranged in an array or other ways from the connecting portion 11 of the main body 10 to the end of the first extension 13 away from the connecting portion 11, and there is no limitation here.

[0043] The second extension 14 is provided corresponding to the first extension 13. The far end of the second extension 14 away from the connecting part 11 is also tapered. The second extension 14 is provided with a plurality of through holes 152 penetrating the first surface 10a and the second surface 10b. The plurality of through holes 152 can be numbered sequentially as 1521, 1522, 1523, 1524, and 1525 in the direction from the connecting part 11 to the end away from the connecting part 11. The arrangement of the plurality of through holes 152 in the second extension 14 is the same as the arrangement of the plurality of through holes 151 in the first extension 13.

[0044] Furthermore, in one embodiment, the number of through holes 151 on the first extension 13 is the same as the number of through holes 152 on the second extension 14. This arrangement makes the areas of the first extension 13 and the second extension 14 in the horizontal direction similar after the holes are opened, so that their capacitance to ground is comparable and their in-plane bending stiffness relative to the connecting portion 11 is not much different.

[0045] Furthermore, please refer to Figure 6 , Figure 6This is another top view schematic diagram of the electrode body of the microelectromechanical system in this embodiment. In this embodiment, at least one through hole 151 on the first extension 13 and at least one through hole 152 on the second extension 14 are symmetrically arranged. The through holes 151 of the first extension 13 in the direction of extension of the first extension 13 away from the connecting portion 11 and the through holes 152 of the second extension 14 in the direction of extension of the second extension 14 away from the connecting portion 11 have a one-to-one correspondence, that is, for each through hole 151 of the first extension 13, there is a corresponding through hole 152 on the second extension 14, and the two have the same cross-sectional shape and equal area in the direction perpendicular to the extension direction of the through holes 151.

[0046] like Figure 6 As shown, the through hole 151 on the first extension 13 and the through hole 152 on the second extension 14 are symmetrically arranged, with their axis of symmetry being the straight line AA. The through hole 1511 on the first extension 13 corresponds to the through hole 1521 on the second extension 14; both have the same cross-sectional shape and equal area in the direction perpendicular to the extension direction of the through hole 15. Correspondingly, through holes 1512 and 1522 correspond, and through holes 1513 and 1523 correspond, which will not be elaborated further here. This arrangement of the through holes 15 ensures that the in-plane bending stiffness of the first extension 13 and the second extension 14 relative to the connecting portion 11 is as equal as possible after the holes are opened.

[0047] Topology optimization design is performed on the plurality of through holes 151 in the first extension 13, so that the plurality of through holes 151 have a geometric topological structure. Corresponding to the contraction shape of the extension away from the connecting part 11, the cross-sectional area of ​​each at least one through hole 151 in the first extension 13 in the direction perpendicular to the extension direction of the through hole 151 gradually decreases in the extension direction away from the connecting part 11. That is, the cross-sectional area of ​​through holes 1511, 1512, 1513, 1514, 1515, and 1516 in the direction perpendicular to the extension direction of the through hole 151 shows a gradual decreasing trend.

[0048] Accordingly, on the second extension 14, the cross-sectional area of ​​each at least one through hole 152 in the direction perpendicular to the extension direction of the through hole 152 gradually decreases in the second extension 14 toward the extension direction away from the connecting portion 11.

[0049] The cross-section of the through hole 15 in the direction perpendicular to its extension direction can be of any shape. See also... Figure 7a , 7b 7c Figures 7a to 7c This is a schematic diagram of the cross-sectional shape of a through hole in one embodiment of this application. In this embodiment, the cross-section of each at least one through hole 15 in the direction perpendicular to the extension direction of the through hole 15 is in the first direction ( Figure 7aThe cross-sectional width 153 in the second direction (in the X direction of the middle arrow) is... Figure 7a The middle arrow (in the Y direction) gradually increases, or in the first direction ( Figure 7b The cross-sectional width 153 in the second direction (arrow X direction) is... Figure 7b It gradually decreases in the direction of the middle arrow (Y direction), or in the first direction ( Figure 7c The cross-sectional width 153 in the second direction (in the X direction of the middle arrow) is... Figure 7c The direction of the middle arrow (Y direction) gradually increases to a first threshold and then decreases, with the first direction perpendicular to the second direction. In another embodiment, the cross-section of the through hole 15 in the direction perpendicular to the extension direction of the through hole 15 is triangular or elliptical. Furthermore, most of the through holes 15 are triangular, especially the through holes 15 near the connecting portion 11 are triangular, while the through holes 15 far from the connecting portion 11 are elliptical.

[0050] In another embodiment, the main body 10, after having multiple through holes 15, forms a truss structure; please refer to [reference needed]. Figure 8 The truss structure includes a first chord 131 and a second chord 132 spaced apart, and web members 133 connecting the first chord 131 and the second chord 132. The spacing between the web members 133 can be completely equal, partially equal, or completely unequal.

[0051] like Figure 8 As shown, the main body 10 is semi-circular, or rather, the main body 10 is closer to a C-shape. The web member 133 can extend radially, or it can extend at a certain angle to the radial direction. For example... Figure 8 As shown, the web member 133 is set at an angle.

[0052] The second chord 132 surrounds the first chord 131, and the first chord 131 encloses a space 12 for accommodating the resonator (not shown in the figure). Based on the stress characteristics of the truss structure, the web members 133 mainly bear axial tensile or compressive forces, thus fully utilizing the strength of the material, saving material, and increasing the stiffness of the electrode body 10. Simultaneously, since the web members 133 are all through holes 15, the ground-facing area of ​​the first surface 10a and the second surface 10b is reduced, thereby lowering the ground capacitance of the electrode body 10.

[0053] Please see Figure 9In another embodiment, the main body 10 is provided with two accommodating spaces 12 spaced apart, namely accommodating space 12a and accommodating space 12b. The main body 10 is provided with a plurality of through holes 15 penetrating the first surface 10a and the second surface 10b, and the through holes 15 are distributed around the accommodating spaces 12a and 12b. Because the through holes 15 are provided on the first surface 10a and the second surface 10b, the area of ​​the first surface 10a and the second surface 10b is reduced, the ground area of ​​the first surface 10a and the second surface 10b is reduced, and the ground capacitance of the first surface 10a and the second surface 10b is reduced.

[0054] The cross-section of the through hole 15 in the direction perpendicular to its extension direction can be of any shape. In one embodiment, such as... Figure 9 As shown, the main body 10 has a truss structure after multiple through holes 15 are opened. The web member 133a connects the first chord member 131a and the second chord member 132a that are spaced apart to form a truss structure. The second chord member 132a surrounds the first chord member 131a. The first chord member 131a encloses the space to form a accommodating space 12a for accommodating the resonator (not shown in the figure). Correspondingly, the web member 133b connects the first ring body 131b and the second ring body 132b that are spaced apart to form a truss structure. The second ring body 132b surrounds the first ring body 131b. The first ring body 131b encloses the space to form a accommodating space 12a for accommodating the resonator (not shown in the figure).

[0055] To evaluate the effect of opening holes in the electrode body in the embodiments of this application, simulation analysis was used to compare the deformation and in-plane modal frequencies of the electrode body in the two technical solutions. The two structural solutions are: the technical solution in the embodiments of this application and the technical solution without opening holes in the electrode body. The table below shows the material property parameters of the electrode.

[0056] Material Elastic modulus (GPa) Poisson's ratio Thermal expansion coefficient (1 / K) Si 162 0.27 2.6E-6

[0057] Simulation calculation conditions: 1. Apply a fixed constraint to the connection part 11 of the electrode body 10; 2. Apply a uniformly distributed force of 16.6 Pa to the electrode ring surface in the radial direction. This load is the excitation electrostatic force when the gap between the semi-annular electrode body 10 and the resonator (not shown in the figure) is 0.4 μm, in order to verify the stiffness of the electrode body 10.

[0058] Figure 10a A static overall deformation simulation diagram of the existing electrode body without opening holes. Figure 10b For this application Figure 6A simulation diagram of the static overall deformation of the electrode body in this embodiment shows that the static overall deformation of the electrode body in this embodiment is slightly larger than that of the non-perforated electrode body, with an increase of about 10%. The static overall deformation value of the electrode body in this embodiment is 2.66e-7μm, while the resonance amplitude of the resonator is 5nm. The static overall deformation value of the electrode body is less than one ten-millionth of the resonance amplitude of the resonator, which is relatively small and has a negligible impact on the operation of the resonator. The simulation analysis verifies that the stiffness of the electrode body 10 in this embodiment remains basically unchanged after the perforation.

[0059] Figure 11a This is a simulation diagram of radial deformation of the existing electrode body without openings. Figure 11b For this application Figure 6 The simulation diagram of the radial deformation of the electrode body 10 in the embodiment shows that the radial deformation of the electrode body 10 is slightly larger after the hole is opened compared with the electrode body without the hole. The increase is about 10%, but the value is very small and the impact on the operation of the resonator can be ignored. The simulation analysis further verifies that the stiffness of the electrode body 10 remains basically unchanged after the hole is opened.

[0060] The table below shows the simulation analysis results of the electrode body without holes in the embodiment of this application. The calculation results show:

[0061]

[0062] 1. In this embodiment, the ground area of ​​the electrode body 10 is reduced by 19%, and the thermoelastic damping is increased by 2.5 times. Since the electrode body 10 is provided with through holes 15, the local mass inside the electrode is removed, which can easily cause stress concentration, thereby improving the thermoelastic damping of the electrode. The electrode is more difficult to generate excitation and the risk of electrode vibration is reduced.

[0063] 2. In the embodiments of this application, the working frequency excitation amplitude of the electrode body 10 is slightly increased, but it is less than one ten-millionth of the resonance amplitude when the resonator is working. The relative value is very small and its impact on the operation of the resonator can be ignored.

[0064] 3. In this embodiment, the in-plane modal frequency of the electrode body 10 is increased by 19%, making it more difficult for the electrode to generate excitation. By removing local mass within the electrode through the through hole 15 provided on the electrode body 10, the mass distribution is changed, and the resonant frequency of the electrode is adjusted, thereby making it easier to avoid specific frequency bands.

[0065] This application also provides a microelectromechanical system oscillator 1000; please refer to [link to relevant documentation]. Figure 12The system includes a MEMS chip 1001 and a control chip 1002. The electrodes in the MEMS chip 1001 are configured as described above, and the control chip 1002 is electrically connected to the electrodes. The control chip 1002 applies a bias voltage to the electrodes to drive the resonator (not shown) in the MEMS chip 1001 to oscillate.

[0066] The microelectromechanical system electrode provided in this application, by providing a through hole penetrating the first and second surfaces of the electrode body, has at least the following beneficial effects:

[0067] 1. Reduce the ground area of ​​the electrode body to decrease the electrode capacitance to ground while ensuring a certain degree of electrode rigidity;

[0068] 2. The electrodes located on the outer ring, which have a larger cross-sectional width, tend to generate a large capacitance to ground, which is mismatched with the capacitance to ground of the electrodes located on the inner ring. However, the resonator with coupled vibration requires that the capacitance to ground of the electrodes located on the outer ring be equal to or close to that of the electrodes located on the inner ring. This application reduces the capacitance to ground of the electrodes by setting through holes in the electrode body, making it easier for the capacitance to ground of the electrodes located on the outer ring and the electrodes located on the inner ring to match each other.

[0069] 3. By removing local mass within the electrode through through holes set on the electrode body, the mass distribution is changed, and the resonant frequency of the electrode is adjusted, thus making it easier to avoid specific frequency ranges;

[0070] 4. Through holes are provided on the electrode body to remove local mass inside the electrode, which can easily cause stress concentration, thereby improving the thermoelastic damping of the electrode and reducing the risk of electrode vibration.

[0071] The above description is only a part of the embodiments of the present invention and does not limit the scope of protection of the present invention. Any equivalent device or equivalent process transformation made based on the content of the present invention specification and drawings, or direct or indirect application in other related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A microelectromechanical system (MEMS) electrode, comprising a body having a accommodating space for accommodating a resonator in the MEMS, characterized in that, The main body also has at least one through hole, which is disposed around the accommodating space, and the extending direction of the through hole is the same as the extending direction of the accommodating space. The main body includes a connecting portion and a first extension portion and a second extension portion respectively connected to the connecting portion. The first extension portion and the second extension portion are spaced apart and opposite to each other. The connecting portion, the first extension portion, and the second extension portion enclose the accommodating space. At least one of the connecting portion, the first extension portion, and the second extension portion is provided with the through hole.

2. The microelectromechanical system electrode according to claim 1, characterized in that, The through holes are configured in multiple ways, and the connecting part, the first extension part, and the second extension part are all provided with the through holes. The multiple through holes are arranged in a topological arrangement according to the shape of the main body.

3. The microelectromechanical system electrode according to claim 2, characterized in that, The multiple through holes are arranged linearly or in an array, following the shape of the body.

4. The microelectromechanical system electrode according to claim 3, characterized in that, Along the first extension portion in the direction of extension away from the connecting portion, the cross-sectional area of ​​each through hole on the first extension portion decreases; and / or Along the second extension portion toward the direction away from the connecting portion, the cross-sectional area of ​​each through hole on the second extension portion tends to decrease.

5. The microelectromechanical system electrode according to claim 4, characterized in that, The through holes on the first extension near the connecting portion are triangular, while the through holes away from the connecting portion are elliptical; and / or The through holes on the second extension near the connecting part are triangular, while the through holes away from the connecting part are elliptical.

6. The microelectromechanical system electrode according to claim 1, characterized in that, The main body has a plurality of the through holes, and the main body is configured as a truss structure.

7. The microelectromechanical system electrode according to claim 6, characterized in that, The main body includes a first chord and a second chord that are spaced apart and opposite each other. The first chord and the second chord are connected by a plurality of web members that are spaced apart. The web members are connected by a through hole. The internal space of the main body constitutes the accommodating space.

8. The microelectromechanical system electrode according to claim 7, characterized in that, The main body is arc-shaped, and the web members extend radially along the main body, or the web members extend at a certain angle to the radial direction of the main body.

9. The microelectromechanical system electrode according to any one of claims 1 to 8, characterized in that, It also includes anchors that are fixedly connected to the body, the anchors being used to fix the body to the substrate.

Images