Motion mechanism and motion system
By utilizing the elastic deformation of flexible components and the application of air-float decoupling parts, the problem of easy breakage of steel flexible parts was solved, achieving high-precision, high-speed, and high-real-time three-degree-of-freedom motion, ensuring equipment safety and processing efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
- Filing Date
- 2022-10-09
- Publication Date
- 2026-05-12
AI Technical Summary
In existing motion mechanisms, steel flexible components are prone to fracture due to fatigue, leading to safety hazards, and it is difficult to achieve high-precision, high-speed, and high-real-time three-degree-of-freedom motion.
The flexible components undergo elastic deformation during rotation, providing low stiffness and high damping. Frictionless guidance is achieved through air flotation decoupling and crossed roller bearings. Combined with the mechanical connection between the rotating shaft and the flexible components, the assembly machinery is kept at zero position and safe.
It improves the safety and lifespan of the motion mechanism, reduces friction, ensures high-precision and high-speed three-degree-of-freedom motion, reduces the risk of equipment damage, and increases control bandwidth and processing efficiency.
Smart Images
Figure CN115539598B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of precision motion, and in particular to a motion mechanism and motion system. Background Technology
[0002] In high-precision, high-speed, and high-real-time multi-degree-of-freedom motion tables, there is often a need for three-degree-of-freedom motion in the X, Y, and Rz directions. To meet the high real-time requirements, the motion mechanism needs to have low stiffness and high damping in the Rz direction. Currently, existing motion mechanisms generally use steel flexible components to achieve low stiffness and high damping through the deformation of the steel flexible components. However, due to the fatigue of the steel flexible components themselves, there is a risk of breakage, which can cause damage to personnel and equipment. Summary of the Invention
[0003] In view of this, this application provides a motion mechanism and motion system. By setting a flexible component, the flexible component undergoes elastic deformation during the rotation of the first support component relative to the second support component. This provides the first support component with low stiffness and high damping while ensuring that the first support component can be in the assembly mechanical zero position relative to the second support component. Furthermore, the flexible component can rotate relative to the second support component, which can prevent damage to the flexible component and ensure the safety of personnel and equipment.
[0004] According to one aspect of this application, a motion mechanism is provided, the motion mechanism including a first support component, a second support component, and a flexible component, the first support component being rotatable relative to the second support component, one end of the flexible component being fixed to the first support component, and the other end of the flexible component being rotatably connected to the second support component, wherein during the rotation, the flexible component is configured to undergo elastic deformation.
[0005] Preferably, the flexible component includes a first fixing part, a second fixing part, a pin, and a flexible element. The flexible element connects the first fixing part and the second fixing part. The first fixing part is fixedly connected to the first support component, and the second fixing part is connected to the second support component through the pin.
[0006] Preferably, the second fixing part includes a first fixing member, a second fixing member, and a connecting member. The first fixing member and the second fixing member are spaced apart. The connecting member connects the first fixing member and the second fixing member. The flexible member is connected to the connecting member. The pin passes through the first fixing member and the second fixing member. A rolling bearing is sleeved on the pin.
[0007] Preferably, the first support component includes a first fixing block and a rotating shaft. The first fixing block is connected to the first fixing part, and the rotating shaft passes through the first fixing block. The rotating shaft is rotatable to drive the first fixing block to rotate.
[0008] Preferably, the second support component includes a second fixing block, the first fixing block includes a recessed portion recessed into the interior of the first fixing block, the recessed portion enclosing a recessed space, the second fixing block includes a protruding portion disposed within the recessed space, and the rotation shaft passes through both the recessed portion and the protruding portion.
[0009] Preferably, the second support assembly further includes a crossed roller bearing, which is sleeved on the rotating shaft, and the side of the crossed roller bearing is connected to the protruding portion.
[0010] Preferably, the first support component includes a first air flotation mechanism and an air flotation decoupling part. The air flotation decoupling part includes a first end and a second end opposite to each other in a first direction. The first end is connected to the first air flotation mechanism, and the second end is connected to the air flotation decoupling part. The first air flotation mechanism is capable of forming an air film to support the air flotation decoupling part and the first fixing block.
[0011] Preferably, the air flotation decoupling unit includes a first plate, a second plate, and a connector. The connector connects the first plate and the second plate. The first plate is connected to the first air flotation mechanism, and the second plate is connected to the first fixing block. The connector is capable of elastic deformation.
[0012] Preferably, the second support assembly further includes a second air flotation mechanism, and the second fixing block further includes a main body portion, the main body portion including a first side portion and a second side portion opposite to each other in a second direction, the first side portion being connected to the protruding portion, the second side portion being connected to the second air flotation mechanism, the first direction being perpendicular to the second direction, and the second air flotation mechanism being able to form an air film to support the second fixing block.
[0013] Preferably, the second support assembly further includes a preloaded magnet connected to the second side portion, and the number of the second air buoyancy mechanisms is two, with the two second air buoyancy mechanisms respectively disposed on both sides of the preloaded magnet in the first direction.
[0014] According to another aspect of this application, a motion system is provided, the motion system including a drive mechanism and the aforementioned motion mechanism, the drive mechanism being connected to the first support component to drive the motion mechanism to move. Attached Figure Description
[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0016] Figure 1 A three-dimensional structural schematic diagram of a motion mechanism according to an embodiment of the present invention is shown from one perspective;
[0017] Figure 2 A three-dimensional structural schematic diagram of the motion mechanism according to an embodiment of the present invention is shown from another perspective;
[0018] Figure 3 A planar structural schematic diagram of a motion mechanism according to an embodiment of the present invention is shown from one perspective;
[0019] Figure 4 A planar structural schematic diagram of a motion mechanism according to an embodiment of the present invention is shown from another perspective;
[0020] Figure 5 Show Figure 4 A schematic diagram of the motion mechanism along the cross-section of AA;
[0021] Figure 6 A schematic diagram of the air flotation decoupling unit according to an embodiment of the present invention is shown from one perspective.
[0022] Figure 7 A schematic diagram of the air flotation decoupling unit according to an embodiment of the present invention is shown from another perspective;
[0023] Figure 8 A schematic diagram of the structure of a flexible component according to an embodiment of the present invention is shown.
[0024] Icons: 100-First support assembly; 110-First fixing block; 111-Recessed portion; 120-Rotating shaft; 130-First air flotation mechanism; 140-Air flotation decoupling part; 141-First plate; 142-Second plate; 143-Connector; 200-Second support assembly; 210-Second fixing block; 211-Protruding portion; 212-Main body; 220-Crossed roller bearing; 230-Crossed roller bearing lock nut; 240-Rotating shaft fixing part; 250-Second air flotation mechanism; 260-Preloaded magnet; 300-Flexible assembly; 310-First fixing part; 320-Second fixing part; 321-First fixing member; 322-Second fixing member; 323-Connector; 324-Rolling bearing; 325-Pin shaft; 330-Flexible part; 400-Support base; 410-First plate; 420-Second plate. Detailed Implementation
[0025] The following detailed embodiments are provided to help the reader gain a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent after understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein; changes that will be apparent after understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.
[0026] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many feasible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application.
[0027] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. In contrast, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between.
[0028] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.
[0029] Although terms such as “first,” “second,” and “third” may be used herein to describe individual components, assemblies, regions, layers, or parts, these components, assemblies, regions, layers, or parts are not limited by these terms. Rather, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as the second component, assembly, region, layer, or part may also be referred to as the second component, assembly, region, layer, or part.
[0030] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” are used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also different orientations of the device during use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element. Therefore, the term “above” includes both “above” and “below” orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relation terms used herein will be interpreted accordingly.
[0031] The terminology used herein is for the purpose of describing various examples only and is not intended to limit this disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.
[0032] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.
[0033] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.
[0034] According to one aspect of this application, a motion mechanism is provided, comprising a first support component, a second support component, and a flexible component. The first support component is rotatable relative to the second support component. A first end of the flexible component is fixed to the first support component, and a second end of the flexible component is rotatably connected to the second support component. During rotation, the flexible component is configured to undergo elastic deformation. By incorporating the flexible component, this motion mechanism provides low stiffness and high damping to the first support component during rotation relative to the second support component, while ensuring the first support component remains in a mechanical zero position relative to the second support component. Furthermore, the rotation of the flexible component relative to the second support component during rotation of the first support component prevents damage to the flexible component, thus ensuring the safety of personnel and equipment.
[0035] like Figures 1 to 5 As shown, the first support assembly 100 includes a first fixing block 110 and a rotating shaft 120. The first fixing block 110 includes a recessed portion 111 recessed into the interior of the first fixing block 110, which encloses a recessed space. The rotating shaft 120 passes through the recessed portion 111, and the middle part of the rotating shaft 120 is located in the recessed space. When the rotating shaft 120 rotates, it can drive the first fixing block 110 to rotate, so that the first fixing block 110 can move in the Rz direction (the Rz direction is the direction of torsion in the third direction z, and the first direction x, the second direction y and the third direction z are perpendicular to each other).
[0036] Furthermore, the materials to be transported can be placed on the first fixed block, and the first fixed block can be connected to an external drive mechanism to drive the motion mechanism to move along the third direction z, thereby driving the materials to move.
[0037] In the motion mechanism of this application, the first fixed block 110 and the second fixed block 210 are connected by a rotating shaft 120, which achieves high stiffness in the first direction x and the second direction y. This mechanical connection method through a rotating shaft can usually achieve a first-order natural frequency of over 1000Hz. Compared with the existing method of decoupling the three degrees of freedom in the first direction x, the second direction y and the Rz direction through flexible parts, the low stiffness of Rz will inevitably affect the stiffness in the first direction x and the second direction y. Its first-order natural frequency is usually around 300Hz, which is far lower than the structural stiffness of this invention.
[0038] like Figure 1 , Figure 2 and Figure 5 As shown, the second fixing block 210 includes a protruding portion 211, which is disposed within the recessed space enclosed by the recessed portion. The middle portion of the rotating shaft 120 is located within the second fixing block 210. A cross roller bearing 220 is sleeved on the rotating shaft 120 and is connected to the second fixing block 210.
[0039] In addition, such as Figure 5 As shown, a cross roller bearing lock nut 230 is also provided on the rotating shaft 120. The cross roller bearing lock nut 230 contacts the cross roller bearing 220 to lock the cross roller bearing 220, thereby ensuring the relative fixation of the cross roller bearing 220 and the rotating shaft 120.
[0040] Furthermore, such as Figure 5As shown, the first support part also includes a rotating shaft fixing member 240. The rotating shaft fixing member 240 is disposed at the end of the rotating shaft 120 to form a precise mechanical fit with the rotating shaft 120. The rotating shaft fixing member 240 is connected to the first fixing block 110 by screws. In this way, the rigidity of the rotating shaft 120 ensures the connection between the first fixing block 110 and the second fixing block 210 in the first direction x and the second direction y.
[0041] In the above, the first fixed block 110 and the second fixed block 210 are connected by the rotating shaft 120, so that the first fixed block 110 will not move relative to the second fixed block 210 in the first direction x and the second direction y. High rigidity in the first direction x and the second direction y is achieved by means of mechanical rotating shaft.
[0042] like Figures 1 to 3 As shown, the first support assembly 100 also includes a first air flotation mechanism 130 and an air flotation decoupling part 140. The air flotation decoupling part 140 includes a first end (lower end) fixedly connected to the first air flotation mechanism 130, and a second end (upper end) fixedly connected to the first fixing block 110. In the operating state of this motion mechanism, the motion mechanism cooperates with the support base 400 to achieve movement. The support base 400 includes a first plate portion 410 and a second plate portion 420. The first air flotation mechanism 130 faces the first plate portion 410. During the movement of the motion mechanism, the first air flotation mechanism 130 releases compressed air towards the first plate portion 410, forming an air film between the first air flotation mechanism 130 and the first plate portion 410 to support the first support assembly 100 and the second fixing block 210. During the movement of this motion mechanism, the motion mechanism does not contact the first plate portion 410, achieving frictionless movement.
[0043] Furthermore, such as Figure 6 and Figure 7 As shown, the air flotation decoupling unit 140 includes a first plate 141, a second plate 142, and a connector 143. One end of the connector 143 is connected to the first plate 141, and the other end is connected to the second plate 142, such that the first plate 141 and the second plate 142 are located on opposite sides of the connector 143, and the connector 143 can undergo elastic deformation. The first plate 141 is connected to the first air flotation mechanism 130, and the second plate 142 is connected to the second air flotation mechanism 250. Thus, when the verticality of the first plate 410 is poor, i.e., when the first plate 410 is uneven in the direction perpendicular to the first plate 410, the first air flotation mechanism 130 tilts. At this time, the connector 143 undergoes elastic deformation to ensure that the first fixing block 110 located above the second plate 142 is always in a horizontal state. In this way, the decoupling of the first air flotation mechanism 130 is ensured, and the stability of the motion mechanism is guaranteed.
[0044] In addition, the air flotation decoupling mechanism can also be a ball joint structure.
[0045] like Figure 1 and Figure 2 As shown, the second support assembly 200 includes a second air buoyancy mechanism 250, and the second fixed block includes a main body portion 212 and a protruding portion 211. The main body portion 212 includes a first side (left side) and a second side (right side) opposite each other in the second direction y. The first side is connected to the protruding portion 211, and the second side is connected to the second air buoyancy mechanism 250. In the operating state of this motion mechanism, the second air buoyancy mechanism 250 faces the second plate portion 420. During the movement of the motion mechanism, the second air buoyancy mechanism 250 releases compressed air towards the second plate portion 420, forming an air film between the second air buoyancy mechanism 250 and the second plate portion 420 to support the second fixed block 210. During the movement of this motion mechanism, the motion mechanism does not contact the second plate portion 420, achieving frictionless movement. With the second plate portion 420 having a perpendicularity and surface shape, the first fixed block can rotate relative to the second fixed block, thereby adjusting the position of the first fixed block.
[0046] In the prior art, conventional mechanical planar motion guiding mechanisms use mechanical guide rails, which generate frictional resistance during movement, interfering with the output of the drive motor and greatly limiting the running speed. The friction coefficient is usually around 0.015. The motion mechanism of this application guides the motion by setting a first air buoyancy mechanism 130 and a second air buoyancy mechanism 250, with a friction coefficient of basically 0. Therefore, it can effectively reduce friction and will not generate frictional heat or frictional dust.
[0047] In addition, such as Figure 4 As shown, the second support assembly 200 also includes a preload magnet 260, which is connected to the second fixing block 210. The preload magnet 260 provides magnetic preload to the second air levitation mechanism 250, thereby ensuring that a high-rigidity air film can be formed between the second air levitation mechanism 250 and the second plate portion 420, thus guaranteeing the stability of the moving platform. There are two second air levitation mechanisms 250, located on opposite sides of the preload magnet 260 in the second direction y.
[0048] like Figure 8As shown, the flexible component 300 includes a first fixing part 310, a second fixing part 320, and a flexible member 330. The first fixing part 310 has a first fixing hole, and a screw passes through the first fixing hole and the first fixing block, thereby connecting the flexible structure to the first support component 100. The second fixing part 320 includes a first fixing member 321, a second fixing member 322, and a connecting member 323. The first fixing member 321 and the second fixing member 322 are spaced apart, and the connecting member 323 connects the first fixing member 321 and the second fixing member 322. A pin 325 passes through the first fixing member 321 and the second fixing member 322, and a bearing is fitted on the portion of the pin 325 located between the first fixing member 321 and the second fixing member 322. One end of the flexible member 330 is connected to the connecting member 323, and the other end of the flexible member 330 is connected to the first fixing part 310. In addition, the flexible component 330 has an initial slight deformation, which can ensure that the first fixed block 110 and the second fixed block 210 have an assembly mechanical zero position. Through the deformation of the flexible component 330, the first fixed block 110 can automatically return to the zero position.
[0049] Preferably, the flexible element 330 can be a flexible spring.
[0050] In existing technologies, conventional three-degree-of-freedom rotational mechanisms are prone to fracture due to fatigue of flexible components, which could lead to serious damage to personnel or equipment. Typically, heat-treated flexible materials, such as 65Mn tempered at medium temperature, have a service life of 100,000 to 500,000 cycles. Furthermore, the flexibility of conventional flexible structures makes it difficult to guarantee consistent height tolerances, and fluctuations in heat treatment temperature can also affect the fatigue resistance consistency of the flexible component 330. In the motion mechanism of this application, the service life of the flexible component 300 is equivalent to that of the rolling bearing 324, reaching over 1 million cycles. By strictly ensuring the manufacturing precision of the rolling bearing 324, its rotational repeatability can be guaranteed to be within ±1 micrometer, significantly improving safety and consistency.
[0051] Meanwhile, conventional flexible components have complex structures and are typically processed using wire EDM, which usually takes several days or even weeks. The manufacturing cost of the flexible component in this application is primarily in the machining of the rotating shaft, which presents few challenges with current turning technology, thus reducing manufacturing costs and time.
[0052] It should be noted that although the first fixing member 321, the second fixing member 322 and the connecting member 323 have been described separately above, it is only for the purpose of explaining the shape of the second fixing part 320. The first fixing member 321, the second fixing member 322 and the connecting member 323 can be integrally formed.
[0053] When the rotating shaft 120 drives the first fixed block 110 to rotate, the flexible component 330 can undergo elastic deformation to provide damping for the first fixed block 110. During the rotation, the first fixed part 310 rotates relative to the rotating shaft 120, which can prevent damage to the flexible component 300.
[0054] According to the motion mechanism of this application, the mechanical stiffness in the first x-direction and the second y-direction can be greatly improved, thereby meeting the requirements of high control bandwidth in the first x-direction and the second y-direction. Furthermore, the motion platform utilizes frictionless air-bearing guidance technology, ensuring high-speed and high-acceleration motion in the first x-direction and the second y-direction; simultaneously, the rotating shaft 120 and flexible component 300 can achieve low-modal motion and automatic return to mechanical zero position in the Rz-direction. Thus, the motion mechanism can achieve three degrees of freedom motion in the first x-direction, the second y-direction, and the Rz-direction, while possessing directional high and low mechanical modes in these three degrees of freedom directions. Compared to traditional mechanical guide rails and complex flexible components, this motion mechanism overcomes the friction and high manufacturing costs associated with high-speed motion, while ensuring high efficiency and high control bandwidth within the motion system.
[0055] According to another aspect of this application, a motion system is provided, which includes a drive mechanism and a motion mechanism. The drive mechanism is connected to a second fixed block of the motion mechanism, and the platform is driven to move through the drive mechanism, thereby realizing the transportation of materials.
[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.
Claims
1. A motion mechanism, characterized in that, The motion mechanism includes a first support component, a second support component, and a flexible component. The first support component is rotatable relative to the second support component. One end of the flexible component is fixed to the first support component, and the other end of the flexible component is rotatably connected to the second support component. During the rotation, the flexible component is configured to undergo elastic deformation. The flexible component includes a first fixing part, a second fixing part, a pin, and a flexible element, wherein the flexible element connects the first fixing part and the second fixing part. The first fixing part is fixedly connected to the first support component, and the second fixing part is connected to the second support component through the pin. The first support assembly includes a first fixed block and a rotating shaft. The first fixed block is connected to the first fixed part, and the rotating shaft passes through the first fixed block. The rotating shaft is rotatable to drive the first fixed block to rotate. The second support component includes a second fixing block, and the first fixing block includes a recessed portion recessed into the interior of the first fixing block, the recessed portion enclosing a recessed space. The second fixing block includes a protruding portion disposed within the recessed space, and the rotation shaft passes through both the recessed portion and the protruding portion.
2. The motion mechanism according to claim 1, characterized in that, The second fixing part includes a first fixing member, a second fixing member, and a connecting member. The first fixing member and the second fixing member are spaced apart, and the connecting member connects the first fixing member and the second fixing member. The flexible member is connected to the connecting member. The pin passes through both the first fixing member and the second fixing member, and a rolling bearing is sleeved on the pin.
3. The motion mechanism according to claim 1, characterized in that, The second support assembly further includes a crossed roller bearing, which is sleeved on the rotating shaft, and the side of the crossed roller bearing is connected to the protruding portion.
4. The motion mechanism according to claim 1, characterized in that, The first support component includes a first air flotation mechanism and an air flotation decoupling part. The air flotation decoupling part includes a first end and a second end opposite to each other in a first direction. The first end is connected to the first air flotation mechanism, and the second end is connected to the air flotation decoupling part. The first air flotation mechanism is capable of forming an air film to support the air flotation decoupling part and the first fixing block.
5. The motion mechanism according to claim 4, characterized in that, The air flotation decoupling unit includes a first plate, a second plate, and a connector. The connector connects the first plate and the second plate. The first plate is connected to the first air flotation mechanism, and the second plate is connected to the first fixed block. The connector is capable of elastic deformation.
6. The motion mechanism according to claim 4, characterized in that, The second support assembly further includes a second air flotation mechanism, and the second fixing block further includes a main body portion, the main body portion including a first side portion and a second side portion opposite to each other in a second direction, the first side portion being connected to the protruding portion, the second side portion being connected to the second air flotation mechanism, the first direction being perpendicular to the second direction, and the second air flotation mechanism being capable of forming an air film to support the second fixing block.
7. The motion mechanism according to claim 6, characterized in that, The second support assembly also includes a preloaded magnet, which is connected to the second side portion. There are two second air buoyancy mechanisms, which are respectively arranged on both sides of the preloaded magnet in the first direction.
8. A motion system, characterized in that, The motion system includes a drive mechanism and a motion mechanism according to any one of claims 1-7, wherein the drive mechanism is connected to the first support component to drive the motion mechanism to move.