Actuator device and method for operating such an actuator device

Abstract

The present invention relates to an actuator device (10) having at least one driven element (12) capable of being fluid-loaded and thus movable to at least one holding position. An actuator (34) is provided, which is operable in a pumping operation by manipulation of the actuator (34), in which at least a component (T) of the actuator (34) is alternately movable along a first direction (36) and along a second direction (38) opposite to the first direction (36) by manipulation of the actuator (34), thereby allowing fluid to be delivered to the driven element (12) for fluid loading. A discharge passage (32) is provided through which fluid is discharged from the driven element (12).

Description

Technical Field

[0001] The present invention relates to an actuator device and a method for operating such an actuator device. Background Technology

[0002] Actuator devices and methods for operating such actuator devices have long been known in the general prior art. Such actuator devices may include a driving element and a driven element. Movement of the driving element can, for example, cause movement of the driven element, thereby causing at least one additional structural element attached to both the driving and driven elements to move. A transmission ratio, particularly fluid and entirely hydraulic, can be established between the driving and driven elements. Through this transmission ratio, it is possible, for example, to apply a first force to the driving element to move it, wherein the driven element subsequently provides a second force, smaller or larger than the first force, to move the structural element. Alternatively or additionally, it is conceivable that when the driving element moves to move the driven element, the driven element moves faster or slower than the driving element. Thus, the actuator device can be used for different applications as needed.

[0003] By the movement of the driven element and the resulting movement of the structural element, the driven element or the structural element can be moved from a first position to a second position different from the first position, and in particular, held in the second position. To hold the driven element or the structural element in the second position, for example, a holding force is applied to the driven element, or the driven element applies a holding force to the structural element. Here, it is desirable to allow the structural element or the driven element to move rapidly from the second position to the first position or rapidly in the direction of the first position. For this purpose, it is desirable to terminate the application or provision of the holding force as quickly as possible, that is, in a short period of time. Summary of the Invention

[0004] Therefore, the object of the present invention is to provide an actuator device and a method for operating such an actuator device, so that at least one structural element can be moved particularly advantageously by means of the actuator device.

[0005] This task is accomplished by an actuator having the features of claim 1 and by a method having the features of claim 15. Advantageous designs with suitable improvements to the invention are described in the remaining claims.

[0006] A first aspect of the invention relates to an actuator device having at least one driven element. The driven element is loadable with a fluid, particularly a gas or liquid, especially a liquid that is as incompressible as possible or at least substantially incompressible, and thereby can move to at least one holding position. In other words, the driven element can, for example, be moved from an initial position to a holding position different from the initial position by fluid loading, particularly translationally and / or in the direction of movement. The driven element can be, for example, a driven piston, which is, for example, translatably housed in a driven housing, particularly in a driven cylinder. By fluid loading the driven piston, the driven piston can be moved, particularly translationally and / or in the direction of movement, relative to the driven cylinder, particularly from an initial position to a holding position. For this purpose, fluid is introduced, for example, into the driven cylinder, particularly into a driven cavity partially defined by the driven cylinder and partially by the driven piston. Furthermore, it is conceivable that the driven element is the wall of a bellows or diaphragm, particularly the bottom. For example, fluid is introduced into the bellows, thereby causing the driven element to move, particularly translationally and / or along the direction of motion, especially relative to the other wall, particularly the other sidewall, of the bellows. Thus, the bellows is, for example, deflected.

[0007] Furthermore, the actuator device has at least one actuator, which is preferably electrically operable. The actuator can be operated during pumping operation by manipulating the actuator. When the actuator is electrically operable, manipulation of the actuator can be understood in particular as applying electrical energy, especially current or voltage, to the actuator. This can be understood in particular as the actuator being supplied with electrical energy or voltage. The actuator is, for example, a linear actuator. The actuator can be, in particular, a solid-state actuator, such as a piezoelectric actuator. It is also conceivable that the actuator can be constructed as another solid-state actuator, such as a solenoid or polymer actuator. During pumping operation, at least the components of the actuator can be moved alternately, particularly translationally, along a first direction and along a second direction opposite to the first direction, by manipulating the actuator, thereby allowing fluid to be delivered to the driven element, particularly to the driven cavity, in order to fluid-load the driven element. The components of the actuator can be, for example, an armature also called a rotor, which, for example, reciprocates by manipulating the actuator. If the actuator is, for example, a solid-state actuator, especially a piezoelectric actuator, then, for example, by manipulating the actuator, the actuator is caused to alternately extend or elongate and contract or shorten its length. When the actuator extends or elongates, for example, at least a component of the actuator moves in a first direction, and when the actuator shortens its length, for example, at least a component of the actuator moves in a second direction.

[0008] Furthermore, the actuator device has at least one discharge channel through which fluid can be discharged from the driven element, particularly after the driven element has been loaded with fluid. For example, fluid, especially after it has been introduced into the driven chamber and thus after the driven element has been loaded with fluid, can be discharged from the driven chamber by means of the discharge channel and thus from the driven element. For this purpose, the discharge channel is, for example, fluidly connected to the driven chamber.

[0009] Furthermore, the actuator device has a valve device comprising two valve elements movable relative to each other, thereby allowing the valve device to be adjusted or switched between at least one closed state and at least one open state. In particular, the valve elements can be translated relative to each other to adjust or switch the valve device between the closed and open states. In the closed state, the discharge passage is fluidly blocked by the valve device, so that no fluid can flow through the discharge line, or in other words, no fluid can be discharged from the driven chamber or from the driven element, especially by means of the discharge passage, in the closed state. Therefore, in the closed state with the discharge passage blocked, the driven element is held in a holding position by fluid. In other words, for example, during pumping operation, while the valve device is in its closed state, fluid is pumped into the driven chamber by means of the actuator, so that the driven element is loaded with fluid during the closed state, and thus, with continued pumping of fluid caused by the actuator, the driven element gradually moves to the holding position. If, for example, pumping is subsequently stopped while the valve remains closed, the driven element is held in a holding position by means of the fluid previously pumped by the actuator, which is in or loaded onto the driven element in the driven chamber, because, for example, the discharge passage is blocked by the valve and thus prevents fluid from being discharged from the driven chamber or the driven element. In other words, the fluid applies a driving force to the driven element, for example, by means of the actuator, such that the fluid is pumped to load the driven element with fluid, and the driven element is movable to or from the holding position by means of the driving force, in particular overcoming, for example, a reaction force acting on the driven element and opposite to the moving force. Because the discharge passage is closed by means of the valve, the driven element remains in the holding position by means of the fluid overcoming the reaction force during the period when pumping is stopped and not pumping. In other words, the reaction force does not cause the driven element to move from the holding position back to the initial position or in the direction of the initial position, and the reaction force does not cause fluid to flow out of the driven chamber or be discharged from the driven element through the discharge passage.

[0010] However, in the open state, the valve device releases the discharge passage, thus exposing the discharge passage in the open state. Therefore, the valve element, and thus the valve device thereby, allows fluid to be discharged from the driven element, or from the driven chamber, through the discharge passage in the open state, thereby allowing the driven element to move from the holding position to at least one avoidance position different from the holding position. During the movement of the driven element from the holding position to the avoidance position, the driven element moves, for example, to the initial position or in the direction of the initial position, such that, for example, the avoidance position is the initial position, or thus the avoidance position is between the holding position and the initial position.

[0011] Therefore, if, for example, pumping is stopped and the valve remains closed, especially during a certain period, no movement of the driven element occurs during that period, or the driven element is held in a holding position by means of the fluid. If, for example, the valve is adjusted from closed to open after the period, a reaction force causes the driven element to move from the holding position to the avoidance position, as fluid can be discharged from the driven element through the discharge channel. For example, at least a portion of the fluid initially contained in the driven chamber is moved out of the working chamber via the discharge channel by means of the driven element moving from the holding position to the avoidance position, particularly by being forced out.

[0012] Therefore, by setting the closed state, the driven element can move to and remain in the holding position. By setting the open state, the driven element can be allowed to move from the holding position to the avoidance position, because thus, for example, fluid is discharged from the driven chamber or from the driven element through the discharge channel, and the driven element is no longer able to overcome the reaction force to remain in the holding position.

[0013] The actuator device described herein is configured such that movement of the actuator components along a first direction enables a first valve element to move along a first operating direction, particularly in a translational manner, and thereby to move toward a second valve element, thereby allowing the valve device to be adjusted, in particular, from an open state to a closed state. For example, the first operating direction may coincide with or extend parallel to the first direction. Furthermore, it is conceivable that the first operating direction may extend obliquely to or perpendicular to the first direction, or that the first operating direction may be opposite to the first direction.

[0014] For example, the actuator components are kinematically coupled to the first valve element at least indirectly, especially directly, and at least temporarily, especially permanently, such that when the actuator components move along the first direction, the first valve element moves along the first operating direction. Furthermore, it is conceivable that the actuator components, during their movement along the first direction, are at least temporarily supported or can be supported on the first valve element at least indirectly along the first direction, so that when the components move along the first direction, the first valve element moves along the first operating direction, especially along the first direction. Thus, for example, the first valve element can be moved from an open state to a second valve element, thereby the valve device can be adjusted from the open state to or be adjusted to a closed state. For example, in the open state, the valve elements are spaced apart from each other, so that fluid can then flow between the valve elements, or thus, for example, a discharge passage in which valve devices or valve elements may be arranged is released. In the closed state, the valve elements are, for example, particularly directly abutted against each other, so that the valve elements seal relative to each other and subsequently close the discharge passage. In other words, for example, in the closed state, no fluid can flow between the valve elements, thus, for example, in the closed state, the discharge passage is fluidly closed by means of the valve elements.

[0015] Furthermore, the actuator device is configured such that movement of the component along the second direction can cause the first valve element to move away from the second valve element along a second operating direction opposite to the first operating direction, thereby allowing the valve device to be adjusted, in particular, from the closed state to the open state. The second operating direction extends, for example, coincident with or parallel to the second direction. It is also conceivable that the second operating direction extends obliquely to or perpendicular to the second direction, or extends opposite to the second reset device. In particular, the operating directions extend parallel to each other and are opposite to each other. In other words, movement of the actuator component along the second direction causes or allows movement of the second valve element along the second operating direction, thereby moving the second valve element away from the first valve element. The valve device is thus opened. The feature that movement of the actuator component along the second direction can cause movement of the first valve element away from the second valve element along the second operating direction can be understood, for example, by the movement of the component along the second direction allowing movement of the first valve element along the second operating direction and movement away from the second valve element, or actively causing movement of the first valve element away from the first valve element along the second operating direction, in particular enabling the first valve element to move together with the component, particularly along the first operating direction and / or along the second operating direction. In particular, an actuating device, such as a spring, can be provided, by means of which the first valve element can move in a second direction of motion, for example, due to the movement of the component in a second direction. For example, it is conceivable that the first valve element is rigidly coupled to the component of the actuator, so that, for example, when the component of the actuator moves in a first or second direction at a first speed and / or a first stroke, the first valve element moves together in a first or second actuating direction at a second speed and / or a second stroke, wherein the second speed corresponds to the first speed, and / or wherein the second stroke corresponds to the first stroke.

[0016] The actuator device is configured to cause the actuator components to move alternately along a first direction and a second direction during pumping operation, such that after the valve device has been initially adjusted to a closed state during pumping operation, the valve device remains closed despite the alternating movement of the first component along the first and second directions during pumping operation, thereby allowing fluid to be delivered to or delivered to the driven element during pumping operation. In other words, at least the actuator components move alternately along the first and second directions during pumping operation such that after the valve device has begun to be adjusted, especially from the open state to the closed state, the valve device remains closed despite the alternating movement of the first component during pumping operation, even though, for example, the first valve element is coupled to the movement of the components as described above. Although the first valve element and the actuator components reciprocate alternately in the first and second directions, the valve device remains closed, or rather, the valve elements remain in contact with each other, thereby blocking and maintaining the discharge passage, and thus allowing fluid to be delivered to the driven element and, in particular, to the driven chamber during pumping operation, and especially allowing the driven element to be movable from the initial position to, or rather, to the holding position during and by means of the pumping operation.

[0017] The actuator device here can operate in an opening operation, different from and immediately following the pumping operation, in which the movement of the actuator components in a second direction causes the first valve element to move in a second operating direction and away from the second valve element, thereby causing the valve device to adjust from a closed state to an open state. In other words, the opening operation causes the valve device to open and thus causes the driven element, for example, to avoid a reaction force and subsequently move from a holding position to or from an avoiding position. In particular, it is specified that no relative movement occurs between the valve elements during the pumping operation, so that the valve device remains closed during the pumping operation.

[0018] By means of an actuator device, it is possible, in particular, to move the driven element from its initial position to its holding position during pumping operation, especially through a transmission ratio between the component and the driven element, for example, via a fluid. If pumping or pumping operation is subsequently terminated, and the valve device remains closed, the driven element can be held in the holding position by means of the fluid. On the other hand, the actuator device enables, particularly alone and solely by the corresponding operation of the actuator or by a change in the operation of the actuator, to adjust the valve device from a closed state to an open state very quickly. Thus, if the actuator is operated, for example, in a first manner, pumping operation is initiated. If the actuator is operated, for example, in a second manner different from the first, the transition from pumping operation to opening operation can be initiated very quickly, and the opening of the valve device can be initiated very quickly. Thus, for example, if the valve device is closed first, thus the driven element is held in the holding position by means of the fluid, and if then, for example, the situation arises such that the movement of the actuator from the holding position to the avoidance position should be particularly rapid, the adjustment of the valve device from the closed state to the open state can be initiated very quickly. For example, a valve device is held in a closed state by applying at least a substantially constant voltage to the actuator, or by supplying the actuator with a particularly high voltage, at least substantially constant or continuously. Pumping operation is induced, for example, by manipulating the actuator to alternately apply a first voltage and a second voltage (which may also be zero) that is smaller than the first voltage. If the alternation between the first and second voltages is sufficiently rapid, pumping operation can be induced, while the valve device remains in a closed state. If, for example, the voltage applied to the actuator at least substantially continuously to hold the driven element in the holding position is reduced, without immediately manipulating the actuator to induce pumping operation, then the valve device can be opened particularly quickly.

[0019] To enable, for example, particularly advantageous pumping and opening operations, in an advantageous design, the actuator device includes, for example, a damping device coupled at least to a first valve element, which is preferably configured as a nonlinear damper. A nonlinear damper can be understood, for example, as follows: if, for example, a first operating force is applied to the damper, the damper is thereby shortened or compressed. If, for example, a second operating force opposite to the first operating force is applied to the damper, the damper is thereby extended, that is, lengthened or expanded. The damping device, especially a nonlinear damper, is characterized in particular by the fact that, for example, when the first operating force corresponds numerically to the second operating force, the damper shortens at a first speed and expands at a second speed different from the first speed. In other words, although the operating forces are numerically equal, the operating forces result in different speeds at which the damper shortens or expands. Conversely, for example, when the damper expands and shortens at the same speed, the second operating force must be different from the first operating force and therefore greater than or less than the first operating force. It can be seen that the damper is subjected to tension when it expands, i.e., loaded with tensile force, while the damper is loaded with compression or pressure when it shortens its length. The damper induces damping not only during expansion but also during shortening, where the damping during expansion is called the tensile stage and the damping during shortening is called the compressive stage. Because the damper is, for example, a nonlinear damper, the tensile stage is stiffer or softer than the compressive stage. In other words, the damping during expansion is stronger or weaker than the shortened length of the damper. In other words, the damper provides a first damping or first damping effect during expansion due to its nonlinearity and a second damping or second damping effect different from the first damping during shortening. To put it another way: for example, if the nonlinear damper expands at a first velocity, this results in a first damping force. If the damper shortens its length at a second velocity, i.e., compresses, this results in, for example, a second damping force. Because the damper is now nonlinear, if the first velocity corresponds to the second velocity or vice versa, then the first damping force is greater than or less than the second damping force, especially with well-known formulas:

[0020] F d =dv

[0021] Here F d Let v represent the corresponding damping force, v represent the corresponding velocity of the damper's expansion or compression, and d represent the damping constant of the damper. Therefore, the damper has, for example, a first damping constant for its tension stage and a second damping constant for its compression stage that is different from the first damping constant, for example, greater than or less than the first damping constant.

[0022] During the initial first movement of the component, particularly the actuator, set up to initiate pumping operation in a first direction, a damping device allows the first valve element to move toward the second valve element in a first operating direction, thereby allowing the valve device to be adjusted from an open state to a closed state. As the component subsequently moves in a second direction, the damping device prevents, at least temporarily, movement of the first valve element away from the second valve element in the second operating direction that would cause the valve device to be adjusted to an open state, thereby holding the valve device in a closed state. Thus, during pumping operation, the actuator component can move alternately in the first and second directions while the valve device remains in a closed state. With this embodiment, the valve device can be opened and closed particularly simply and especially solely by corresponding manipulation of the actuator or by corresponding changes in the manipulation of the actuator, that is, switching between an open and closed state.

[0023] It has been shown that, by means of a damping device, during pumping operation, the first valve element is prevented from moving away from the second valve element along the second operating direction (which causes the valve element to be adjusted to the open state) and thus the valve element is held in the closed state. The actuator components and thus the valve element are particularly movable together and alternately along the first operating direction and along the second operating direction, while the valve element is held in the closed state and preferably no relative movement occurs between the valve elements at the same time.

[0024] In other words, the damping device, especially in the form of a nonlinear damper, is more rigid in the tensile stage than in the compressive stage, such that, for example, during pumping operation, the damping device and valve elements reciprocate together as blocks with the actuator components, without relative movement between the valve elements, that is, the valve elements do not adjust from the closed state to the open state.

[0025] Another embodiment is characterized in that the damping device is configured to allow relative movement between valve elements along a first actuation direction and / or along a second actuation direction during opening operation, causing adjustment of the valve elements from a closed state to an open state. If, for example, the voltage applied to the actuator to hold the driven element in a holding position is reduced sufficiently slowly, or reduced to such a extent that no operation causing pumping operation of the actuator occurs, then, for example, sufficient time is given to the nonlinear damper so that, although its stiff or rigid tension stage also relaxes and thus causes such relative movement between the valve elements, the valve elements move away from each other, or in other words, open the valve device. This is achieved, for example, by ensuring that the operation of the actuator or the supply of electrical energy, especially voltage or current, to the actuator does not occur or does not occur for a long time.

[0026] In another particularly advantageous embodiment of the invention, the actuator device has a stop, wherein the valve element and the actuator components are movable relative to the stop along the first and second directions. The stop allows for particularly rapid opening of the valve device in a particularly simple manner.

[0027] Another embodiment is characterized in that the damping device has a first damper element that is movable together with the first valve element, and is rigidly coupled to the valve element, and a second damper element that can move relative to the first damper element, particularly in a translating manner. During expansion and compression of the damper, the damper elements move relative to each other, particularly in a translating manner, especially causing one damper element to move into the other, or vice versa. The damper elements are preferably movable relative to each other, particularly into each other, during the movement of the first valve element toward the second valve element in the first operating direction, caused by the movement of the actuator components in a first direction to adjust the valve device from an open state to a closed state and during the start of pumping operation.

[0028] Another embodiment is characterized in that the damper element is capable of translational movement relative to a stop in both a first and a second direction, wherein the stop limits the movement of the second damper element in the second direction. This allows the first damper element to translate relative to the second damper element in the first direction during the movement of the first valve element toward the second valve element in the first operating direction, caused by the movement of the actuator components in the first direction and used to adjust the valve device from an open to a closed state and set at the start of pumping operation, without any movement of the second damper element in the first direction. This advantageously influences the movement of the damper element, enabling particularly simple, advantageous, and rapid switching between pumping and open operations.

[0029] In another particularly advantageous embodiment of the invention, the actuator device has a reset element, which is coupled, at least indirectly, to the damper element, and this reset element may be constructed, for example, particularly as a mechanical spring. By means of the reset element, the damper elements can move relative to each other along a first direction and / or along a second direction, thereby enabling relative movement between one or more of the previously described valve elements extending along the first and / or second operating directions and causing adjustment of the valve device from a closed state to an open state.

[0030] It has been shown that it is particularly advantageous that the reset element is coupled, in particular rigidly and / or directly, to the first damper element on the one hand and to the second damper element on the other hand.

[0031] In another embodiment of the invention, the damper element defines two, in particular, opposing damping cavities, each containing a damping medium, in particular a damping fluid, which can be introduced into and drained from the cavities. Specifically, the damping fluid can overflow between the cavities and thus flow from one to the other and vice versa.

[0032] In order to enable a particularly advantageous switching between open operation and pumping operation, in another embodiment of the invention, the damper medium is specified to be fluid.

[0033] Another embodiment is characterized by a drive element having a first drive portion, a second drive portion, and a drive cavity defined by the drive portions. The embodiments for the driven element described earlier and later can also be readily adapted to the drive element. Thus, the drive portion can be, for example, a drive piston or wall of a bellows or diaphragm, particularly the bottom, wherein, for example, the second drive portion is a drive housing of a bellows or diaphragm, particularly a drive cylinder, or another wall, particularly a side wall. During pumping operation, the first drive portion alternately moves relative to the second drive portion and the second valve element along a first direction and along a second direction, thereby allowing the fluid to exit from the drive cavity and be delivered to the driven element and into the drive cavity.

[0034] Another embodiment is characterized by a reset device, which can be configured, for example, as a mechanical spring. By means of the reset device, the first drive portion and the second valve element can move relative to the second drive portion along a second direction.

[0035] Furthermore, it has been shown to be particularly advantageous that the reset device is coupled with a stop element that can move together with the first drive portion and the second valve element, wherein the stop element can be supported at least indirectly on the second damper element and the reset element in the second direction, in particular making it possible to limit or prohibit the movement of the second valve element and the first drive portion relative to the second damper element and relative to the reset element in the second direction by means of the stop element.

[0036] Furthermore, it has been shown to be particularly advantageous that the actuator device has a channel through which the damping medium can flow and a check valve arranged in the channel, the check valve allowing the damping medium to flow through the channel in a first flow direction and into one of the damping chambers for flow, and blocking the channel for flow of the damping medium in a second flow direction opposite to the first flow direction and out of the one damping chamber.

[0037] The second aspect of the invention relates to a method for operating an actuator device, particularly an actuator device according to the first aspect of the invention. The advantages and advantageous designs of the first aspect of the invention can be considered as advantages and advantageous designs of the second aspect of the invention, and vice versa. In the second aspect of the invention, the actuator device has at least one driven element capable of being fluidly loaded and thereby movable to at least one holding position.

[0038] The actuator device also includes an actuator that is manipulated and thus operates in a pumping operation, in which at least the components of the actuator move alternately in a first direction and in a second direction opposite to the first direction by manipulation of the actuator, thereby supplying fluid to the driven element in order to load the driven element with fluid.

[0039] In addition, the actuator device has at least one discharge channel through which fluid can be discharged from the driven element.

[0040] Furthermore, the actuator device has a valve device comprising two valve elements movable relative to each other, thereby allowing the valve device to be adjusted between at least one closed state that blocks the discharge passage and at least one open state that releases the discharge passage. In the closed state, when the discharge passage is blocked, the driven element is held in the holding position by the fluid. In the open state, the valve elements allow the fluid to drain from the driven element through the discharge passage and thereby allow the driven element to move from the holding position to at least one avoidance position different from the holding position.

[0041] By moving the actuator components along the first direction, the first valve element of the valve element can move along the first operating direction and thereby towards the second valve element, thus adjusting the valve device to the closed state. By moving the actuator components along the second direction, the first valve element can be moved away from the second valve element along the second operating direction opposite to the first operating direction, thus adjusting the valve device to the open state. During pumping operation, the actuator device causes the actuator components to move alternately along the first and second directions, such that after the valve device is initially adjusted to the closed state during pumping operation, the valve device remains in the closed state despite the alternating movements of the actuator components along the first and second directions during pumping operation, thereby allowing fluid to be delivered to the driven element during pumping operation. Furthermore, the actuator operates in an opening operation that is different from and immediately follows the pumping operation, in which the movement of the actuator components along the second direction causes the first valve element to move along the second operating direction and away from the second valve element, thereby causing the valve device to be adjusted from a closed state to an open state. Attached Figure Description

[0042] Further advantages, features, and details of the invention will become apparent from the following description of preferred embodiments and from the accompanying drawings. The features and combinations thereof mentioned above in the specification, as well as those mentioned below in the description of the drawings and / or shown separately in the drawings, may be used not only in the combinations given separately, but also in other combinations or individually, without departing from the scope of the invention.

[0043] The attached figure shows:

[0044] Figure 1 A schematic diagram of a first embodiment of the actuator device according to the present invention is shown. Figure 2 Showing a partial screenshot based on Figure 1 A schematic diagram of the actuator device;

[0045] Figure 3 Showing according to Figure 1 Another schematic diagram of the actuator device;

[0046] Figure 4 Showing according to Figure 1 Another schematic diagram of the actuator device;

[0047] Figure 5 Showing according to Figure 1 Another schematic diagram of the actuator device;

[0048] Figure 6 Showing according to Figure 1 Another schematic diagram of the actuator device;

[0049] Figure 7 Showing according to Figure 1 Another schematic diagram of the actuator device;

[0050] Figure 8 A schematic cross-sectional view of a second embodiment of the actuator device is shown in partial view;

[0051] Figure 9 A schematic cross-sectional view showing a third embodiment of the actuator device;

[0052] Figure 10 A further schematic diagram showing a third embodiment of the actuator device;

[0053] Figure 11 A further schematic diagram showing a third embodiment of the actuator device;

[0054] Figure 12 A further schematic diagram showing a third embodiment of the actuator device;

[0055] Figure 13 A further schematic diagram showing a third embodiment of the actuator device;

[0056] Figure 14 A schematic cross-sectional view of the fourth embodiment of the actuator device is shown in partial view;

[0057] Figure 15 A diagram illustrating the operation of the actuator in the actuator device is shown;

[0058] Figure 16 A schematic diagram showing a fifth embodiment of the actuator device;

[0059] Figure 17 A diagram is shown to illustrate additional operations of the actuator;

[0060] Figure 18 A diagram is shown to illustrate additional operations of the actuator;

[0061] Figure 19 Diagrams illustrating additional operations of the actuator are shown; and

[0062] Figure 20 A schematic diagram showing a sixth embodiment of the actuator device is provided. Detailed Implementation

[0063] In the accompanying drawings, the same or functionally identical elements are given the same reference numerals.

[0064] Figure 1A schematic diagram illustrates a first embodiment of an actuator device 10, configured as a hydraulic actuator, particularly a piezoelectric hydraulic actuator. The actuator device 10 has a driven element 12, which in the first embodiment is configured as a first piston. The first piston is also referred to as a driven piston. The driven element 12 is movably housed in a housing 14, for example, configured as a cylinder, wherein the housing 14 is also referred to as a driven housing and thus can be configured as a driven cylinder. The driven element 12, for example configured as the bottom of a piston, diaphragm, or bellows, can move along... Figure 1 The direction of motion, indicated by double arrow 16, is a translational movement relative to the housing 14. Here, the driven element 12 and the housing 14 each partially define the driven cavity 18, which is directly defined by the driven element 12. If a fluid, for example configured as a gas or liquid, is now introduced into the driven cavity 18, especially through channel 20, then the driven element 12 is thus directly loaded with the fluid introduced into the driven cavity 18.

[0065] Driven element 12 is connected to piston rod 22 such that piston rod 22 and driven element 12 can move together relative to housing 14 along the direction of motion. For example, if driven element 12 extends in a direction coinciding with or parallel to the direction of motion and... Figure 1 If the driven element 12 moves in the first driven direction indicated by arrow 24, then the piston rod 22 moves relative to the housing 14 in the first driven direction and at least partially moves out of the housing 14. If the driven element 12 moves along the first driven direction... Figure 1 If the second driven direction, as indicated by arrow 26, moves in a translational manner relative to the housing 14, which is opposite to the first driven direction and coincides with or extends parallel to the direction of motion, then the piston rod 22 moves in a translational manner relative to the housing 14 along the second driven direction, wherein the piston rod 22 moves at least partially into the housing 14.

[0066] The actuator device 10 here has a spring element 28, which is configured as a mechanical spring. The spring element 28 is supported, at least indirectly and especially directly, on the housing 14 and, on the other hand, at least indirectly and especially directly, on the driven element 12, particularly along the direction of motion. In this first embodiment, the spring element 28 is arranged in a spring cavity 30 opposite the driven cavity 18, which is partially defined by the housing 14 and by the driven element 12. If the driven element 12 moves in the first driven direction, the spring element 28 is thus tensioned. Therefore, the spring element 28 provides a spring force, also called a reaction force, which enables the driven element 12 to move or move in the second driven direction, particularly when fluid is allowed to flow out of the driven cavity 18, especially through the discharge channel 32.

[0067] The driven element 12 is coupled, at least indirectly, particularly via the piston rod 22, to a structural element (not shown in the figure), and particularly kinematically. For example, the movement of the driven element 12 can cause the structural element to move. The driven element 12 is loaded, particularly directly, to be pumped or delivered into the driven chamber 18 by pumping or delivering fluid into it. Thus, the driven element 12 is, for example, driven by… Figure 1 The initial position shown can be moved or moved to a holding position different from the initial position. If, for example, no further fluid is supplied to the driven cavity 18 after the driven element 12 moves to the holding position, or if no further fluid continues to be supplied to the driven cavity 18 after the driven element 12 moves to the holding position and the outflow of fluid contained in the driven cavity 18 is interrupted after the driven element 12 moves to the holding position, especially by means of the fluid contained in the driven cavity 18, particularly overcoming the spring force or reaction force provided by the spring element 28. In the holding position, for example, the spring element 28 is tensioned, thereby providing the aforementioned spring force or reaction force in the holding position.

[0068] However, if, for example, the discharge channel 32 is released so that at least a portion of the fluid initially contained in the driven chamber 18 can flow out of the driven chamber 18 and into the discharge channel 32, then the driven element 12 can avoid the spring force, thereby enabling the driven element 12 to move from the holding position to or to an avoidance position different from the holding position by means of the spring force. The avoidance position is, for example, the initial position or, particularly, an avoidance position arranged between the initial position and the holding position along the direction of movement, such that, for example, when the discharge channel 32 is opened, the driven element 12 can move from the holding position to or to the initial position or in the direction of the initial position by means of a reaction force, and here, for example, to the avoidance position.

[0069] The actuator device 10 has an actuator 34, which can be configured as a solid-state actuator, particularly a piezoelectric actuator. The actuator 34 is particularly electrically controllable. In other words, the actuator 34 is capable of electrical operation. Electrical operation or control of the actuator 34 should be understood as the actuator 34 being supplied with or being supplied with a voltage U. piezo In other words, a voltage is applied to actuator 34 in order to control actuator 34. Specifically, the control of actuator 34 can be understood as changing the applied voltage on actuator 34. Here, it can be understood in particular that the voltage U... piezoThe value varies between a first value and a second value. The first value is preferably a value different from zero, and the second value is preferably a value different from the first value. The second value can be a value different from zero or the second value can be zero. Terminating control of the actuator 34 can be understood in particular as not applying voltage to the actuator 34, that is, not supplying electrical energy or voltage to the actuator 34.

[0070] Actuator 34 can be operated in a pumping operation, in which at least component T of actuator 34 can be alternately translated in a first direction indicated by arrow 36 and in a second direction opposite to the first direction and indicated by arrow 38, thereby allowing fluid to be delivered to the driven element 12 and, in particular, to the driven cavity 18 for fluid loading. By applying the voltage or a voltage that causes, for example, an increase in the length of actuator 34, component T moves, for example, in the first direction, particularly by a stroke s. Piezo If, for example, the voltage applied to actuator 34 is stopped, or if the voltage is reduced, this causes the length of actuator 34 to shorten, such that at least component T moves back in the second direction, specifically the aforementioned stroke. Through the movement of component T in the first direction, fluid can be delivered into the driven chamber 18. Furthermore, actuator device 10 has a discharge passage 32 through which fluid initially contained in the driven chamber 18 can be discharged at least partially from the driven chamber 18 and thus from the driven element 12.

[0071] from Figure 1 As can be seen, in the first embodiment of the actuator device 10, there is a drive element 41, also referred to as a conveying device, which has a first drive portion, also referred to as a conveying element 40, and a conveying housing 42, also referred to as a second drive portion. The conveying element 40 is capable of moving along... Figure 1 The second direction of motion, indicated by arrow 44, is a translational movement relative to the delivery housing 42. In the first embodiment, the delivery element 40 is a piston, wherein the delivery housing 42 is a housing, particularly a cylinder. Furthermore, it is conceivable that the driven element 12, or delivery element 40, is the first wall of a bellows, particularly the bottom, wherein, for example, the housing 14, or delivery housing 42, is the second wall of the bellows, particularly the sidewall. If, for example, fluid is delivered into the bellows, this causes, for example, the bottom to translate relative to the sidewall, particularly along the first driven direction. If, for example, fluid is discharged from the bellows, particularly from the driven cavity 18, this causes the bottom to move relative to the sidewall along the second driven direction. The corresponding situation can be applied to the delivery element 40 and the delivery housing 42, especially when the delivery element 40 is constructed as the first wall of a bellows and the delivery housing 42 is constructed as the second wall of a bellows.

[0072] The conveying element 40 and the conveying housing 42 each partially define a conveying cavity 46, also referred to as a drive cavity, which is directly defined by the conveying element 40. The volume of the conveying cavity 46 changes due to the movement of the conveying element 40 relative to the conveying housing 42. For example, if the conveying element 40 moves relative to the conveying housing 42 along... Figure 1 If the first conveying direction, indicated by arrow 48 and extending in conjunction with or parallel to the second direction of motion, is translated, the volume of the conveying cavity 46 is reduced. If, for example, the conveying element 40 moves in a direction opposite to the first conveying direction... Figure 2 The second conveying direction, indicated by arrow 50 and extending in conjunction with or parallel to the second direction of motion, moves in a particularly translating manner relative to the conveying housing 42, thereby increasing the volume of the conveying cavity 46.

[0073] In addition, the actuator device 10 has a reservoir 52, which includes a reservoir cavity 54.

[0074] Here, fluid, or at least a portion of fluid, is arranged in the reservoir cavity 54. If the conveying element 40 moves, in particular translational, relative to the conveying housing 42 along the second conveying direction, at least a portion of the fluid initially contained in the reservoir cavity 54 and thus in the reservoir 52 will be drawn out or discharged from the reservoir cavity 54 through the channel 56, also referred to as the supply channel, drawn out or conveyed through the channel 56, and drawn in or input into the conveying cavity 46. Here, a check valve 58 is arranged in the channel 56, which is closed in the direction of the reservoir cavity 54 and open in the opposite direction and thus in the direction of the conveying cavity 46, also referred to as the supply cavity. Thus, by means of the check valve 58, fluid can be prevented from flowing undesirably in the channel 56 toward the reservoir cavity 54 and thus, for example, from the conveying cavity 46 into the reservoir cavity 54.

[0075] In the first embodiment, the reservoir 52 is constructed as a fluid cylinder or a hydraulic cylinder. Alternatively, the reservoir 52 may be constructed as a diaphragm or a bellows. In the first embodiment, the reservoir 52 has a reservoir housing 60 and a reservoir piston 62, each partially defining a reservoir cavity 54. The reservoir piston 62 can move along... Figure 1The reservoir 52 moves relative to the reservoir housing 60 in the direction indicated by the double arrow 64. The reservoir 52 has a spring element 66, which is constructed, for example, as a mechanical spring. The spring element 66 is arranged, for example, in a receiving cavity 68, which is opposed to the reservoir cavity 54, particularly along the reservoir direction. Here, the receiving cavity 68 is also partially defined by the reservoir piston 62 and the reservoir housing 60, respectively. The spring element 66 is supported, at least indirectly and particularly directly, on the reservoir housing 60 and, on the other hand, at least indirectly and particularly directly, on the reservoir piston 62 along the reservoir direction. If the spring element 66 is tensioned, it applies a spring force to the reservoir piston 62, thereby allowing fluid to be stored under pressure in the reservoir cavity 54. Therefore, the reservoir 52 is, for example, an accumulator, by means of or within which fluid can be stored under pressure.

[0076] If fluid is discharged from reservoir cavity 54, spring element 66 may, for example, at least partially relax and cause the volume of reservoir cavity 54 to decrease. If fluid is introduced into reservoir cavity 54, this causes the volume of reservoir cavity 54 to increase and thus causes spring element 66 to tighten.

[0077] If the conveying element 40 moves, in particular, translationally relative to the conveying housing 42 along the first conveying direction, this results in a reduction in the volume of the conveying chamber 46 and at least a portion of the fluid disposed in the conveying chamber 46 is output from the conveying chamber 46 by means of the conveying element 40. Because the check valve 58 prevents fluid from flowing from the conveying chamber 46 into the reservoir chamber 54, the fluid output from the conveying chamber 46 by means of the conveying element 40 flows through the channel 20 and is guided and introduced into the driven chamber 18 by means of the channel 20. Here, a check valve 70 is arranged in the channel 20, which is closed in the direction of the conveying chamber 46 and opened in the opposite direction and thus in the direction of the driven chamber 18. Generally, it can be seen that, for example, the channel 56 is fluidly connected to the conveying chamber 46 on one side and to the reservoir chamber 54 on the other. The channel 20, for example, is fluidly connected to the driven chamber 18 on one side and to the conveying chamber 46 on the other. The check valve 70 prevents fluid from being output from the driven chamber 18 through the channel 20, especially from being drawn out, when the conveying element 40 moves in the second conveying direction, so that at least a portion of the fluid is output from the reservoir chamber 54 and conveyed to the conveying chamber 46 when the conveying element 40 moves in the second conveying direction.

[0078] As will be explained in more detail below, the movement of the conveying element 40 along the first conveying direction is caused by the movement of the component T of the actuator 34 along the first direction, and the movement of the conveying element 40 along the second conveying direction is caused by the movement of the component T of the actuator 34 along the second direction. The conveying housing 42 is fixed to the base element 72, for example, at least along the conveying direction, so that relative movement between the conveying housing 42 and the base element 72, at least along the conveying direction, is prohibited or does not occur. The base element is, for example, a stop, by means of which the movement of other components of the actuator device, especially movement in the first and / or second directions, is limited or prevented. In particular, the base element can be a housing in which, for example, components of the actuator device 10 that are particularly movable relative to the housing, such as the conveying element 40, can be arranged.

[0079] Here, a spring element 74 is provided, which is supported on one side of the base element 72 and on the other side of the conveying element 40 along the conveying direction. In other words, the spring element 74, preferably a mechanical spring, is coupled on one side to the base element 72 and, for example, to the conveying housing 42, and on the other side to the conveying element 40. In particular, the first position S1 of the spring element 74 is fixed to the base element 72, and the second position S2 of the spring element 74 is coupled to the conveying element 40, and thus can move together with the conveying element 40 along the conveying direction, particularly translationally, relative to the base element 72 and relative to the conveying housing 42. Positions S1 and S2 are, for example, the corresponding ends of the spring element 74. If the conveying element 40 moves, for example, relative to the conveying housing 42 along the first conveying direction, the spring element 74 is tensioned, particularly compressed. If, for example, the conveying element 40 moves along the second conveying direction relative to the conveying housing 42 and relative to the base element 72, the spring element 74 is at least partially relaxed, particularly lengthened. By means of the tension spring element 74, the spring element provides a spring force, by which the conveying element 40 can move relative to the conveying housing 42 and thus relative to the basic element 72 in the second conveying direction.

[0080] The actuator device 10 has a valve device 76, which includes two valve elements 78 and 80.

[0081] Valve elements 78 and 80 are capable of moving along the path of... Figure 1 The valve directions, indicated by double arrows 82, move in a translational manner relative to each other. In the first embodiment, the valve directions coincide with or extend parallel to the first and second directions, which in turn extend parallel to the second direction and in the opposite direction to the first direction.

[0082] Through the relative movement of valve elements 78 and 80, valve device 76 can... Figure 1 The open state 0 shown in the figure and for example Figure 4 The closed state S shown in the diagram can be adjusted or switched. Furthermore, from... Figure 1 As can be seen, the discharge channel 32 is fluidly connected to the driven chamber 18 on the one hand, particularly through at least a portion of the channel 20, and on the other hand, to the reservoir chamber 54. Therefore, if at least a portion of the fluid initially disposed in the driven chamber 18 is discharged from the driven chamber 18 through the discharge channel 32, causing the fluid discharged from the driven chamber 18 to flow through the discharge channel 32, then the fluid discharged from the driven chamber 18 and from the driven element 12 is guided from the driven chamber 18 to the reservoir chamber 54 by means of the discharge channel 32, and particularly introduced into the reservoir chamber. Here, the valve device 76 is arranged in the discharge channel 32, so that the valve device 76 fluidly blocks the discharge channel 32 in the closed state S. Thus, the driven element 12, after moving to the holding position in the aforementioned manner, is held in the holding position, particularly against reaction forces. In other words, in state S, the discharge of fluid from the driven chamber 18 is prohibited. However, in the open state O, valve device 76 releases the discharge passage 32, such that the discharge passage 32 is open in the open position O and can be traversed by at least a portion of the fluid from the driven chamber 18. In other words, in the open state O, valve elements 78 and 80, and therefore valve device 76, allow fluid to be discharged from the driven chamber 18 and therefore from the driven element 12 via the discharge passage 32, thereby allowing the previously described movement of the driven element 12 from the holding position to the avoidance position.

[0083] Furthermore, the driven device 10 is configured such that movement of the component T via the actuator 34 in a first direction (arrow 36), for example, starting from the open state 0, allows the first valve element 78 to move in the first operating direction indicated by arrow 36 and thus towards the second valve element 80, thereby enabling the valve device 76 to be adjusted from the open state 0 to the closed state S. In other words, in the first embodiment, the first direction coincides with or is opposite to the first operating direction. If, for example, the valve device 76 is initially in the open state 0, and then the component T moves along the first direction by the corresponding operation of the actuator 34, then the valve element 78 is thus moved relative to the valve element 80 along the first direction and towards the valve element 80, in particular, causing the valve element 78 to contact the valve element 80 and thus closing the valve device 76, that is, transitioning to the closed state S.

[0084] Depend on Figure 1It can be seen that, for example, valve element 80 forms a valve seat for valve element 78, which is configured as, for example, a valve ball. In the open state 0, valve elements 78 and 80 are spaced apart from each other, such that valve element 78 is spaced apart from the valve seat and is thus not on the valve seat. However, in the closed state S, valve elements 78 and 80 abut against each other at least indirectly, and especially directly, such that valve element 78 is then, for example, on its respective valve seat. In the first embodiment, valve element 78 is, for example, rigidly coupled to component T, such that when component T moves a first stroke and / or moves at a first speed by correspondingly manipulating actuator 34, this causes valve element 78 to move a second stroke and / or move at a second speed, wherein the second stroke corresponds to the first stroke and the second speed corresponds to the first speed. Furthermore, it is specified that the second valve element 80 is, for example, rigidly coupled or kinematically coupled to the conveying element 40, such that, for example, valve element 80 can move together with the conveying element 40 along the conveying direction. Thus, for example, the first direction coincides with the first conveying direction and the second direction coincides with the second conveying direction. In particular, the valve element 80 and the conveying element 40 are coupled to each other, especially kinematically coupled, such that, for example, when the conveying element 40 moves a third stroke and / or moves at a third speed, the valve element 80 thereby moves a fourth stroke and / or moves at a fourth speed, especially moving together with the conveying element 40, wherein the third speed corresponds to the fourth speed and the third stroke corresponds to the fourth stroke. Furthermore, from... Figure 1 As can be seen, the storage housing 60 and housing 14 are also fixed to the base element 72. The component T can move, in particular, translationally relative to the base element 72 along the first direction and along the second direction. Furthermore, from... Figure 1 As can be seen, the spring element 74, especially position S2, is rigidly coupled to the valve element 80, such that position S2, the conveying element 40, and the valve element 80 can move or be moved together at the same speed and with the same stroke, especially when the conveying element 40 moves. Movement of component T of actuator 34 along the second direction causes the first valve element 78 to move away from the second valve element 80 along a second operating direction opposite to the first operating direction and therefore opposite to the first direction, thereby allowing the valve device 76 to be adjusted from the closed state S to the open state O.

[0085] Therefore, the second operating direction coincides with the second direction. In other words, the actuator 34 is manipulated to shorten its length, causing the component T to move relative to the basic element 72 in the second direction. This causes the valve element 78 to move relative to the valve element 80 in the second direction and thus away from the valve element 80. As a result, for example, the valve device 76 can be opened from the closed state S, that is, it can be changed from its closed state S to the open state O.

[0086] The actuator device 10 is now configured to move the component T of the actuator 34 alternately in a first direction (arrow 36) and a second direction (arrow 38) during pumping operation, such that after the valve device 76 is initially adjusted to the closed state S during pumping operation, the valve device 76 remains in the closed state S despite the alternating movement of the component T in the first and second directions during pumping operation, thereby allowing fluid to be delivered to or to the driven chamber 18 and thus to the driven element 12 during pumping operation. In other words, during pumping operation, components T, valve elements 78 and 80, and the conveying element 40 move together or simultaneously and alternately in the first and second directions relative to the base element 72 and therefore relative to the conveying housing 42, while valve device 76 is in and remains in the closed state S, and in particular, relative movement between valve elements 78 and 80 does not occur. This allows fluid to alternately enter from the reservoir chamber 54 through channel 56 into the conveying chamber 46 and then exit from the conveying chamber 46, and from there through channel 20 into the driven chamber 18 and thus to the driven element 12. No fluid is discharged from the driven chamber 18 via the discharge channel 32 (because valve device 76 in the discharge channel 32 is closed). Especially from… Figure 1 As can be seen, in the direction of fluid flow, for example, from the driven chamber 18 through the discharge channel 32 into the reservoir chamber 54, the valve device 76 is arranged in the discharge channel 32 and here is arranged between the driven chamber 18 and the reservoir chamber 54.

[0087] Furthermore, the actuator device 10 can operate in an opening operation, different from and immediately following the pumping operation. In the opening operation, or to achieve the opening operation, the actuator 34 is manipulated such that the movement of the component T of the actuator 34 in the second direction relative to the base element 72 causes the first valve element 78 to move in the second direction away from the second valve element 80, thereby causing the valve device 76 to be adjusted from the closed state S to the open state O. Thus, in the pumping operation, or by means of the pumping operation, the valve device 76 is opened, thereby, for example, fluid is discharged from the driven chamber 18, and thus the driven element 12 can avoid the reaction force.

[0088] The actuator device 10 is capable of operating, for example, in a holding operation, in which no fluid is supplied to the driven chamber 18 and the valve device 76 is closed, thereby holding the driven element 12 in a holding position by means of the fluid contained in the driven chamber 18. Particularly in the holding operation, the actuator 34 is supplied with a voltage that is at least substantially continuous, and the valve device 76 is held closed, particularly by means of the actuator 34 via its component T or by energizing the actuator 34. Here, the actuator device 10 is particularly capable of switching from the holding operation to the opening operation, also known as the release operation, very quickly, i.e., in a very short time, so that the valve device 76 opens very quickly and thus the driven element 12 can avoid the reaction force very quickly. For this purpose, for example, the voltage applied to or applied to the actuator 34 is reduced to zero. Thus, for example, the holding of the aforementioned structural element in the holding operation, achieved by means of the driven element 12, can be cancelled, thereby, for example, the structural element can avoid the corresponding force. In the first embodiment, the actuator device 10 has a stop unit 84, which is also referred to as a hard stop unit and Figure 2 The image is enlarged in size. The stop unit 84 has a first stop 86, which can move together with the conveying element 40, with position S2, and especially with the valve element 80, particularly along the first and second directions, particularly directly, i.e., preferably without a transmission ratio. Therefore, if the valve element 80 moves relative to the base element 72 along the first or second direction, for example, at a fifth speed and / or a fifth stroke, then the stop 86 moves relative to the base element 72 or moves together with the valve element 80 along the first or second direction, for example, at a sixth speed and / or a sixth stroke, wherein the fifth speed corresponds to the sixth speed and / or the fifth stroke corresponds to the sixth stroke. Furthermore, the stop unit 84 also has a second stop 88 and a third stop 90, which (like the stop 86) can move relative to the base element 72, particularly translationally, along the first and second directions. The stops 86, 88, and 90 are also referred to as stop elements.

[0089] Furthermore, the actuator device 10 according to the first embodiment has a damping device in the form of a nonlinear damper 92. The nonlinear damper 92 has a first damper element in the form of a damper piston 94 and a second damper element in the form of a damper housing 96, the damper housing being constructed, for example, as a cylinder. The damper piston 94 is capable of translational movement relative to the damper housing 96 along a first direction and a second direction. The damper elements here partially define two damping cavities 98 and 100 of the damper 92, which are particularly opposite to each other, wherein the damping cavities 98 and 100 are fluidly connected or connectable to each other via two connection paths 102 and 104. The connection paths 102 and 104 are, for example, at least partially separated from each other.

[0090] The damper piston 94 is kinetically coupled to the first valve element 78 and thus can move together with the valve element 78, particularly in a translational manner relative to the base element 72, along a first direction and a second direction. The damper housing 96, for example, can move together with the base element 72, particularly in a translational manner, along the first and second directions. Furthermore, the damper housing 96 is coupled to stops 88 and 90, such that the damper housing 96, stops 88, and stops 90 can move together or simultaneously relative to the base element 72 along the first and second directions. The embodiments concerning the common mobility of the valve element 78 and component T, as described above and below, can also be readily applied to the damper piston 94 and valve element 78, or to the damper housing 96 and stops 88 and 90, and vice versa. If, for example, the damper piston 94 translates relative to the damper housing 96 in a first direction, the volume of the damping cavity 100 decreases and the volume of the damping cavity 98 increases, particularly increasing the amount by which the damping cavity 100 decreases. If the damper piston 94 translates relative to the damper housing 96 in a second direction, the volume of the damping cavity 100 increases and the volume of the damping cavity 98 decreases, particularly decreasing the amount by which the volume of the damping cavity 100 increases.

[0091] A throttle valve 106 is arranged in connection path 102, which can be configured as, for example, an adjustable or rigid throttle valve. A check valve 108 is arranged in connection path 104, which is blocked in the direction of damping chamber 100 and open in the direction of damping chamber 98. Therefore, check valve 108 allows the damping medium to flow from damping chamber 100 to damping chamber 98 via connection path 104 and check valve 108. However, the check valve 108 prevents the opposite flow of the damping medium from damping chamber 98 to damping chamber 100 via connection path 104 and check valve 108. The damping medium, also referred to as the damper medium, is, for example, a gas or preferably a liquid, especially oil. Therefore, if, for example, the damper piston 94 moves relative to the damper housing 96 in a first direction, the damper fluid initially contained in the damping cavity 100 is output from the damping cavity 100 by means of the damper piston 94 such that the damping medium flows from the damping cavity 100 at least largely or completely through the connecting path 104 and the check valve 108 into the damping cavity 98, for example, in such a way that the check valve 108 opens and thereby releases a flow cross-section that causes a smaller flow resistance for the damping medium relative to the throttle valve 106. Thus, for example, a first amount of damping medium flows into the damping cavity 98 via the connecting path 104, while for example, no damping medium flows into the damping cavity 98 via the connecting path 102, or simultaneously, a second amount of damping medium, less than the first amount, flows into the damping cavity 98 via the connecting path 102 and thus via the throttle valve 106.

[0092] If, for example, the damper piston 94 moves, particularly in a translational manner, relative to the damper housing 96 in the second direction, then the damping medium, which is thus initially contained in the damping cavity 98, is output from the damping cavity 98 by means of the damper piston 94. The damping medium output from the damping cavity 98 flows, in particular, entirely into the damping cavity 100 via the connecting path 102 and therefore via the throttle valve 106, especially since the check valve 108 blocks the connecting path 104 for the flow of the damping medium from the damping cavity 98 into the damping cavity 100. By the movement of the damper piston 94 relative to the damper housing 96 in the first direction, the nonlinear damper 92 is compressed, that is, shortened in length. By the movement of the damper piston 94 relative to the damper housing 96 in the second direction, the nonlinear damper 92 is lengthened, that is, extended. Because the damping medium can overflow between damping cavities 98 and 100 during the compression and expansion of damper 92, the corresponding relative motion between damper elements during the expansion or compression of damper 92 is damped, in particular, by means of the damping medium. The damping during the expansion of damper 92 is also called the "tension stage," while the damping during the compression of damper 92 is also called the "compression stage." It is specified here that the compression stage is softer or less rigid than the tension stage. The compression stage therefore has a first damping constant, while the tension stage has a second damping constant. Here, the first damping constant is smaller than the second damping constant. Therefore, when the relative velocities between damper elements are the same, the compression stage provides a lower damping force than the tension stage. Thus, if, for example, a first force, especially a first pressure, is applied to damper 92 to compress damper 92 by means of the first force, a first relative velocity is generated, at which the damper elements translate relative to each other during the compression of damper 92. If, for example, a second force, particularly a second tension, is then applied to the damper 92 to expand it by means of the second force, a second relative velocity is generated, at which the damper elements move relative to each other as the damper 92 expands. Because the compression stage is now weaker, less rigid, or softer than the tension stage of the damper 92, that is, because the damping constant of the compression stage is smaller than that of the tension stage, the first relative velocity is greater than the second relative velocity when the second force corresponds to the first force in its mathematical sense. Therefore, the compression of the damper 92 is damped less than the expansion of the damper 92. The movement of component T relative to the basic element 72 in the first direction is also referred to, for example, as a positive offset of component T. The movement of component T relative to the basic element 72 in the second direction is also referred to, for example, as a negative offset of actuator 34 or component T. Figure 1As can be seen, the damper piston 94 is kinetically coupled to the valve element 78 and the component T, such that, for example, when the component T and the valve element 78 move relative to the basic element 72 in a first direction at a seventh speed and / or a seventh stroke, in particular translation, the damper piston 94 moves relative to the basic element 72 in a first direction or in a second direction at an eighth speed and / or an eighth stroke, wherein the seventh speed corresponds to the eighth speed and the seventh stroke corresponds to the eighth stroke.

[0093] A spring element 110 is provided to the damper 92, the spring element being coupled on one hand to the damper piston 94 and on the other hand to the damper housing 96. The spring element 110 is constructed, for example, as a mechanical spring. If, for example, the damper piston 94 moves relative to the damper housing 96 in a first direction, thereby compressing the damper 92, the spring element 110 is tensioned, in particular compressed. If the damper piston 94 moves relative to the damper housing 96 in a second direction, thereby expanding the damper 92, the spring element 110 is thus relaxed, in particular expanded. Especially when the spring element 110 is tensioned, it can provide a spring force by which the damper 92 can expand, especially given a sufficiently long time.

[0094] exist Figure 2Three distances s1, s2, and s3 are shown. Distance s1 extends parallel to the first or second direction and is the distance between stops 86 and 88. Distance s2 also extends parallel to the first or second direction and therefore parallel to distance s1, and is the distance between stops 86 and 90. Distance s3 also extends parallel to the first or second direction and therefore parallel to distances s1 and s2, and is the distance between stop 90 and basic element 72. If distance s1 is greater than 0, stops 86 and 88 are spaced apart from each other along the first or second direction, that is, open. However, if distance s1 is 0, stops 86 and 88 are in contact with each other, such that stops 86 and 88 are closed. The corresponding situation applies to distance s2. If distance s2 is greater than 0, stops 86 and 90 are spaced apart from each other and therefore open. If distance s2 is 0, stops 86 and 88 are in contact with each other, such that these stops are closed. If distance s3 is greater than 0, stop 90 is spaced apart from the basic element 72, which serves as the fourth stop, thus both stop 90 and the basic element 72 are open. However, if distance s3 is 0, stop 90 is in contact with the basic element 72, and both stop 90 and the basic element 72 are closed. Stops 88 and 90 can move together or simultaneously along the first or second direction relative to the basic element 72 and, for example, together with the damper housing 96. Furthermore, stop 86 can move along the first or second direction relative to the basic element 72 and relative to stops 88 and 90, especially with position S2, valve element 80, and / or delivery element 40. Thus, distances s1, s2, and s3 can vary, and thus distances s1, s2, and s3 can respectively take values ​​of 0 and values ​​greater than 0. Preferably, spring element 110 is stronger than spring element 74, such that, for example, spring element 110 has a first spring constant and spring element 74 has a second spring constant, wherein the first spring constant is greater than the second spring constant.

[0095] Figure 3 This illustrates the actuator device 10, or boundary conditions, prior to the actuation of actuator 34. According to... Figure 3 For example, no operation or voltage supply to actuator 34 occurs and valve device 76, for example, opens. Furthermore, it is preferably specified that distances s1 and s3 are 0, so that the stops 86 and 88 are in contact with each other, and so that the stop 90 and the basic element 72 are in contact with each other. Figure 3 An actuator device 10 is shown, for example, at a first time point t0, at which time, for example, spring element 110 and / or damper 92 have... Figure 3 China and Israel f2_t0The first length or first offset is indicated by this. At time t0, spring element 74 presses stop 86 against stop 88, so that stops 86 and 88 are in contact with each other, and spring element 110 presses stop 90 against base element 72, such that distance s3 is 0. Since spring element 110 is stronger than spring element 74, stop 90 remains in contact with base element 72 or distance s3 remains 0. At time t0, valve device 76, for example configured as a mechanical control valve, opens, and component T, for example, offsets by half of its maximum stroke, thereby allowing component T to offset to its maximum extent by supplying voltage to actuator 34. Therefore, for example, at time t0, it is specified that voltage is supplied to actuator 34, specifically causing component T to offset by half of its maximum stroke. For example, actuator 34 requires or completes offset or causes such offset of actuator 34, the offset being at least greater than the opening of valve device 76 or at least greater than the offset required for the opening of valve device, i.e., at least greater than the distance between valve elements 78 and 80, especially when viewed along the respective direction of movement. Therefore, the required offset of actuator 34 can theoretically be at least 40% or 60% of the maximum stroke, especially. This depends only on the set distance of valve device 76 in the open state. However, it is advantageous that the required opening of valve device 76 is at least 50% of the maximum offset or maximum stroke of actuator 34, because otherwise the opening cross-section of valve device 76 would be small when fluid is discharged from driven chamber 18 and the outflow would continue for a longer period of time.

[0096] This means, for example, that component T can move between a minimum offset and a maximum offset, where the maximum offset is also referred to as the maximum stroke. By supplying electrical energy or voltage to actuator 34, component T can, for example, move from the minimum offset to the maximum offset and thus offset its maximum offset. If, for example, the supply of voltage to actuator 34 is interrupted, component T can occupy its minimum offset, which is also referred to as the zero position or initial position. If component T offsets the maximum offset from the minimum offset, component T traverses a segment that, for example, begins at the minimum offset and ends at the maximum offset. If component T offsets by 50% of the maximum offset, component T is at the halfway point of the aforementioned segment. This is, for example, the case at time point t0. For example, the greater the voltage supplied to actuator 34, the greater the offset of component T, especially from the minimum offset. For example, to set the minimum offset of component T, the voltage supplied to actuator 34 is 0. For example, to induce the maximum offset of component T, the voltage has a maximum value, the maximum value of the voltage, or the maximum value. To maintain the maximum offset of component T, actuator 34 is supplied with a voltage having the offset value at least substantially continuously. In order to offset component T by, for example, 50% of the maximum offset, an additional offset value is set for the voltage supplied to actuator 34, wherein the additional offset value is, for example, 50% of the first offset value which is larger than 0.

[0097] Figure 3 The actuator device 10 is shown at a second time point t1, which follows the first time point t0 in time. The voltage supplied to the actuator 34 is, for example, a direct current voltage, also referred to as DC or DC voltage. If, for example, the value or offset of the voltage supplied to the actuator 34 at time point t0 increases, the component T thereby shifts further from the first time point t0, thereby causing the length of the actuator 34 to increase. In other words, the component T thereby moves relative to the basic element 72 in a first direction. Thus, as from Figure 3 and Figure 4 As can be seen from the overview, valve device 76 is closed, thus valve device 76 is in its closed state S at the second time point t1. Here, spring element 110 or damper 92 has a second offset or a second length s. F2_t1 The second offset or second length is less than the length or offset s at time point t0. F2_t0 In other words, it applies to: s F2_t1 F2_t0 The compression stage of damper 92 is softer or less stiff or less rigid than the tension stage. In other words, the tension stage of damper 92 is stiffer or more rigid than the compression stage because check valve 108 opens when damper 92 is compressed and closes when damper 92 expands. Starting from time point t0, damper 92 can be compressed by the movement of component T relative to base element 72 in a first direction, thereby causing valve element 78 to move relative to base element 72 in the first direction and toward valve element 80, thereby closing valve device 76, while distances s1 and s3 remain zero because damper 92 is sufficiently soft during its compression and especially softer than during its expansion.

[0098] Figure 5 and Figure 6 ​The diagram shows that fluid is pumped into the driven chamber 18 when valve device 76 is closed and remains closed. After valve device 76 closes at the second time point t1, as described above, and especially after a DC voltage is applied to actuator 34, for example, an AC voltage is applied to actuator 34 to initiate, i.e., to cause, pumping operation, also known as the pumping process. If, from time point t1, the voltage supplied to actuator 34 is further increased, especially within the previously mentioned AC voltage range, component T further deflects, i.e., moves relative to the base element 72 in the first direction. Because valve device 76 is closed at this point, the movement of component T and valve element 78 relative to the base element 72 in the first direction, along with the movement of the delivery element 40 and, for example, the second position S2, also relative to the base element 72 in the first direction, causes the delivery chamber 46 to decrease in volume, or fluid to be output from the delivery chamber 46 and pumped into the driven chamber 18 by means of the delivery element 40. The volume of delivery chamber 46, also referred to as the drive volume or delivery volume, is reduced by the deflection described by component T via valve device 76. During this movement of component T and valve element 78 relative to base element 72 along the first direction, the nonlinear damper 92 is further compressed, especially because its compression stage is soft and because the movement of damper housing 96 relative to base element 72 along the first direction is prevented or avoided by the stop 90 contacting or being supported on base element 72 along the first direction. Therefore, in time it follows time point t1 and... Figure 5 The third time point t2 shown in the figure occurs when the spring element 110, or damper 92, exhibits this characteristic. F2_t2 The offset or length indicated is represented by: s F2_t2 F2_t1 Since the conveying element 40 moves, in particular translational motion, in the first direction relative to the base element 72 and relative to the damper housing 96, the stop 86 moves away from the stop 88, thereby the distance s1 is greater than 0, or in other words, the distance at time point t2 is greater than 0. In other words, the stops 86 and 88 are spaced apart from each other at time point t2.

[0099] ​Because the actuator 34 operates during pumping operation, or to achieve pumping operation, with the previously described and preferably configured AC voltage, thereby, for example, alternately setting different values ​​of the voltage to power the actuator 34, wherein, preferably, at least one of the values ​​is greater than 0 and the others are greater than 0 and different from the first value, wherein the other value may also be 0, the component T moves alternately relative to the base element 72 in a first and a second direction during pumping operation. Therefore, in order for the delivery element 40 for delivering fluid to the driven chamber 18 to move relative to the base element 72 and, in particular, relative to the delivery housing 42 in the second direction or along the second delivery direction, so that new fluid can be delivered, in particular drawn into the delivery chamber 46, the voltage supplied to the actuator 34 is reduced. This causes the component T to move relative to the base element 72 in the second direction. This is also referred to as the pull-back or shortening of the actuator 34. Since the actuator 34 is operated with AC voltage, there is only a brief phase during which the actuator 34, or the component T, can pull back until the subsequent voltage increase. Because the nonlinear damper is very rigid during its expansion and therefore very rigid when the actuator 34 is pulled back for a short period of time, the conveying element 110 does not cause the damper 92 to expand or only causes a very small expansion of the damper for a short period of time. Thus, as... Figure 6 As shown in the diagram, following time point t2, valve device 76 remains closed and stop 90 moves away from basic element 72, particularly in the second direction, so distance s3 is greater than or equal to 0. Here, distance s1 is also greater than or equal to 0, or stop 86 is spaced apart from stop 88, thereby releasing spring element 74, or its spring force, and thus, on the one hand, fluid is drawn into delivery chamber 46 through check valve 58, which is constructed as or functions as a suction valve, and on the other hand, valve device 76 remains closed during this period. In particular, Figure 4 and Figure 5 The various states or positions of the actuator device 10 are shown, wherein, during pumping operation, Figure 5 and Figure 6 The states or positions shown alternately multiple times. Thus, fluid can be alternately transported from the delivery chamber 46 to the driven chamber 18 and from the reservoir chamber 54 to the delivery chamber 46. In other words, during pumping operation, the actuator 34 is operated using a voltage configured as an alternating current voltage, in the actuator device 10... Figure 5 and Figure 6The states shown alternately and successively change, thereby conveying fluid to the driven chamber 18. For this purpose, valve elements 78 and 80, and the conveying element 40 together with these valve elements, move alternately and thus reciprocally in the first and second directions, wherein the damper 92, and therefore the damper elements and stops 86, 88, and 90, move at least substantially as blocks relative to the basic element 72 in the first and second directions. Since the tension stage of the nonlinear damper 92 is stronger or more rigid than the compression stage, the damper 92 does not expand or only expands very slightly during the pull-back of the actuator 34, so that valve elements 78 and 80 do not move away from each other or move away from each other to the point that valve device 76 is opened. Therefore, valve device 76 remains closed during the reciprocating motion of the conveying element 40 and valve elements 78 and 80. Here, the spring element 110 or damper 92 has a time point t3 with s F2_t3 The indicated length or offset. Because the tension stage of damper 92 is more rigid or stiffer than the compression stage, there is no significant expansion of damper 92 when actuator 34 pulls back, thus applying at the third time point t3: s F2_t2 =s F2_t3 Or s F2_t2 ≈s F2_t3 By delivering fluid into the driven chamber 18, the driven element 12 moves to the holding position. For example, if no further movement of the driven element 12 is made and the driven element 12 remains in the holding position, the actuator 34 is again operated with a DC voltage, thereby keeping the valve device 76 closed.

[0100] In order to allow the driven element 12 to move from the holding position to the avoidance position and to open the valve device 76 for this purpose, the voltage, for example, previously set and particularly configured as a DC voltage, decreases particularly slowly, especially to 0. Then the spring element 110 or its spring force causes the nonlinear damper 92 to be withdrawn, thereby the damper 92 or the spring element 110 in Figure 7 The fifth time point t4 shown, following time point t3, has a length or offset s. F2_t4 Then, for example, apply: s F2_t4 >s F2_t3 As a result, fluid can flow from the driven chamber 18 to the reservoir chamber 54. Alternatively, the voltage reduction can be performed rapidly. Then the stop 90 will lift from the base element 72; however, the spring element 110 must first pull the damper (for a "slight" longer than the pumping frequency) to open the valve device.

[0101] The opening time characteristic of this valve device 76 depends on the time characteristic or damping characteristic of the nonlinear damper 92, especially in the traction direction or in the tensile stage. This time characteristic or damping characteristic should be coordinated with the frequency by which the conveying element 40 moves alternately in the first direction and in the second direction during pumping operation, i.e., reciprocating motion, by means of the conveying element, such as valve elements 78 and 80. Because fluid is pumped in this way, this frequency is also called the pumping frequency. The time characteristic should be coordinated with the pumping frequency because if pumping is too slow (that is, when there is too long a time between a voltage drop and the immediate voltage rise during pumping operation), the damper 92 will pull open or expand too quickly, causing the valve device 76 to open. Figure 8 A second embodiment of the actuator device 10 is shown. Especially from... Figure 8 The mechanical implementation of the actuator device 10 can be seen from this.

[0102] Figures 9 to 13 A third embodiment of the actuator device 10 is described. In this third embodiment, the delivery element 40, also referred to as the drive piston or delivery piston, is kinematically coupled to the component T of the actuator 34, bypassing the valve device 76, particularly directly or in such a way that when the component T moves relative to the base element 72 along a first or second direction at a ninth speed and / or a ninth stroke, this causes the delivery element 40 to move relative to the base element 72 along the first or second direction at a tenth speed and / or a tenth stroke, wherein the ninth stroke corresponds to the tenth stroke, or the ninth speed corresponds to the tenth speed. To move the delivery element 40 by means of the component T, for example in the first and second embodiments, the component T provides an actuating force transmitted from the component T to the delivery element 40 via a transmission path, particularly to thereby move the delivery element 40, in particular, translatively relative to the base element 72 along a first delivery direction or along the first direction. In the first and second embodiments, the valve device 76 is arranged in the transmission path. In the third embodiment, the valve device 76 is arranged outside the transmission path such that the actuating force provided by the component T for moving the conveying element 40 bypasses the valve device 76, that is, the valve elements 78 and 80, and therefore does not extend through or through the valve elements during its journey from the component T to the conveying element 40.

[0103] Furthermore, in the third embodiment, a check valve 58, configured or functioning as an intake valve, is housed within and integrated into the delivery element 40, which is configured as a delivery piston. Thus, for example, the check valve 58 can move together with the delivery element 40 along the first or second delivery direction, particularly relative to the base element 72, and / or translationally. Furthermore, at least a portion of the passage 56 extends through the delivery element 40, particularly through another chamber 112 opposite the delivery chamber 46, and / or is partially defined by the delivery element 40 and the delivery housing 42, respectively. Therefore, fluid flows through the chamber 112 and through the delivery element 40 on its journey from the reservoir chamber 54 to the delivery chamber 46 or to the delivery chamber, in which the check valve 58 is arranged in the passage 56. Furthermore, in the third embodiment, the valve element 80 is fixed to the base element 72 at least in the first and second directions, such that relative movement, particularly translational movement, between the valve element 80 and the base element 72 in the first and second directions is prevented. Furthermore, connecting paths 102 and 104, and thus throttle valve 106 and check valve 108 are arranged in damper piston 94 and thus can move together with damper piston 94, especially relative to damper housing 96, in a translational manner.

[0104] In the first embodiment, for example, stops 86 and 88 form a first stop pair 114, which is also referred to as a first contact. This feature (stops 86 and 88 are spaced apart, or the distance s1 is greater than 0) is understood to mean that the stop pair 114, or the first contact, is open. In the third embodiment, the stop pair 114 also includes stops 86 and 88. Furthermore, in the first embodiment, stop 90 and basic element 72 form a second stop pair 116, which is also referred to as a second contact. The feature (distance s3 is greater than 0, or stop 90 and basic element 72 are spaced apart) can be particularly understood to mean that the stop pair 116, or the second contact, is open. In the third embodiment, the stop pair 116 includes stop 90 and stop 118, which are also referred to as stop elements. Stops 88 and 118 are particularly capable of moving together or simultaneously with the base element 72 along the first and second directions, especially with the damper piston 94, and thus, for example, with respect to the damper housing 96, particularly in a translational manner. In the third embodiment, the damper housing 96 is fixed to the base element 72 at least in the first and second directions. Stop 90 is coupled to the valve element 78 and here, for example, can move together or simultaneously with the valve element 78 with respect to the base element 72 along the first and second directions. Stop 86 is coupled to the component T and the conveying element 40, particularly in a kinetic coupling, such that, for example, the component T, the conveying element 40, and the stop 86 are capable of moving, particularly in a translational manner, with respect to the base element 72 along the first and second directions. In the first embodiment, for example, stops 86 and 90 form a third pair of stops, which is omitted in the third embodiment. In particular, the stop 88 is formed by a push rod, which is used to operate the valve device 76 and the nonlinear damper 92, especially in terms of their compression, and for this purpose, the stop 88 is movable or movable in a first direction, especially relative to the basic element 72 and / or translated, by means of the component T.

[0105] Figure 10 The actuator device 10 is shown in the open state, thereby, for example, in Figure 10 The corresponding to Figure 1 or Figure 3 .exist Figure 10For example, actuator 34 is de-energized, so component T does not deflect or deflects only minimally. Furthermore, not only the first contact (stop pair 114) but also the second contact (stop pair 116) are closed, and valve device 76, also referred to as or acting as a discharge valve, is open, especially because spring element 110 is stronger than spring element 74. Thus, spring element 110 presses stop 118 against stop 90, and furthermore, spring element 110 presses stop 88 against stop 86. Therefore, valve element 78 moves away from valve element 80 via stops 90 and 118, thereby keeping valve device 76 open with spring element 110.

[0106] Figure 11 This is also known as the state-keeping operation, which makes it possible to maintain the state in the process of maintaining the state. Figure 11 For example, the valve device 76 is closed and held closed by means of the actuator 34, particularly by means of a DC voltage supplied to the actuator 34 such that the component T occupies at least substantially 50% of its maximum stroke or its maximum offset, or causes the valve device to close or remain closed. In the holding state or holding operation, the first and second contacts are also closed, wherein, for example by the offset of component T, the spring element 110 relative to... Figure 10 Slightly compressed, such that when the valve device 76 is closed, the spring element 110 keeps the second contact closed.

[0107] Figure 12 The diagram illustrates the pumping of fluid from delivery chamber 46 to driven chamber 18, wherein, for this purpose, the actuator 34 is dynamically operated with a voltage configured as an alternating voltage, particularly in such a way that the voltage used to operate the actuator 34 is alternately and successively increased and decreased. During or for the delivery of fluid from delivery chamber 46 to driven chamber 18, the first contact closes and the second contact opens because the spring element 110, due to the nonlinear damper 92 or because the tension stage of the nonlinear damper 92 is very stiff, especially stiffer than the compression stage, cannot close in dynamic operation in the second contact, or the time interval between the voltage starting to decrease or diminish and the subsequent voltage increase is too short, causing the spring element 110 to expand the damper 92 and thus close the second contact, causing the valve device 76 to open.

[0108] at last Figure 13The diagram illustrates the transfer of fluid from reservoir 52 to delivery chamber 46. For this purpose, during dynamic pumping operation, a voltage configured as AC is reduced and increased to transfer fluid to driven chamber 18, thereby causing component T and the delivery element 40, along with the component, to move relative to delivery housing 42 in a second direction. This movement occurs more rapidly than the expansion of damper 92, caused or potentially caused by spring element 110 and required to close or maintain the second contact, thus damper 92 keeps valve device 76 closed, the first contact either open or closed, and the second contact also either open or closed. Therefore, during pumping operation, delivery element 40 and stop 86 move rapidly and alternately along the first and second directions by means of component T, and thus reciprocate, preventing valve device 76 from opening. When fluid is transferred to driven chamber 18, the first contact closes while the second contact remains open, and when fluid is transferred to delivery chamber 46, both the first and second contacts open simultaneously. The nonlinear damper 92, especially its nonlinear or low-pass characteristics, prevents excessive offset of the spring elements 74 and 110, causing the discharge valve to close and remain closed.

[0109] Figure 14 A fourth embodiment of the actuator device 10 is shown. In particular... Figure 14 The mechanical implementation of the actuator device 10 is shown. Figure 14 In the diagram, the connector that is fluidly connected to the reservoir 52 is indicated by 120, and the connector that is fluidly connected to the driven cavity 18 is... Figure 14 It is represented by 122.

[0110] Figure 15 The chart is shown, with time marked on the horizontal axis at 124. Figure 15 The voltage applied to the actuator 34 is marked on the vertical axis 126 of the graph shown. Figure 15 The graph shown illustrates curve 128, which depicts the voltage supplied to actuator 34 over time. Therefore, curve 128 is a time-varying curve of the voltage applied to actuator 34. Figure 15 P1 represents the first time period, during which pumping operation takes place. Furthermore, in... Figure 15 The diagram shows a second time period P2 immediately following the first time period P1, during which the actuator device 10 is in its holding operation or holding state. Furthermore, in... Figure 15 The diagram shows a third time period P3 immediately following the second time period P2, during which the actuator device 10 is in its open operation. Figure 15As can be seen, in order to pump fluid into the driven chamber 18, the voltage, as an alternating voltage, is rapidly and successively increased and decreased alternately. The voltage is then kept at least substantially constant to hold the driven element 12 in the holding position. In order to allow or cause the driven element 12 to move from the holding position to the avoidance position, the voltage supplied to the actuator 34 decreases particularly slowly during the time period P3, so as to cause the valve device 76 to open.

[0111] Figure 16 A schematic diagram of a fifth embodiment of the actuator device 10 is shown. In the fifth embodiment, the damping device is not constructed as, for example, a nonlinear damper, but as a linear damper 93. This means that the compression stage and the tension stage of the damper 93 are of equal strength or equal stiffness, and thus, for example, the compression stage and the tension stage of the damper 93 have the same damping constant. Furthermore, the fifth embodiment corresponds to the fourth embodiment.

[0112] Figure 17 Showing according to Figure 15 The chart, in which, however, is now relative to Figure 15 Alternatively, the actuator 34 can be manipulated in a different manner relative to the fourth embodiment, as can be seen from variation curve 128. Figure 17 The control of actuator 34 shown, including pumping operation, holding operation, and start-up operation, can be achieved without using nonlinear damper 92, and especially with linear damper 93. For this purpose, as by means of... Figure 17 As can be seen from the variation curve 128, during dynamic pumping operation, the increase is slower than the decrease, or the decrease is significantly faster than the increase. Thus, the spring element 110 does not have enough time to cause the valve device 76 to open. Therefore, in the fifth embodiment, the valve device 76 is held closed, especially solely and only by means of actuation, particularly by means of a linear damper 93, while during the pumping operation, the voltage supplied to the actuator 34 decreases in order to deliver new fluid, especially to draw it into the delivery chamber 46. It can be seen that, especially in the first embodiment, the actuation is at least substantially sinusoidal. Especially in the fifth embodiment, the actuation is performed, for example, in a sawtooth pattern, but alternatively, it can be performed in a pulse-width modulation manner or sinusoidally.

[0113] Figure 18 and Figure 19 Similarly, it is shown that according to Figure 17The diagram, however, now illustrates further manipulation of actuator 34 through variation curve 128. During the first time period Z1, valve device 76 is open, and actuator 34 is not supplied with voltage, such that component T, for example, occupies its minimum offset. During the second time period Z2 immediately following the first time period Z1, the voltage supplied to actuator 34 first increases particularly slowly and then remains at least substantially constant, thereby causing component T to move relative to base element 72 in a first direction, particularly to a position, and valve device 76 is closed and component T is held in said position, and valve device 76 remains closed. During the third time period Z3 immediately following time period Z2, the previously described pumping operation is performed, within which component T and the conveying element 40 together with component T move relative to base element 72 in the first and second directions. During the time period Z4 immediately following time period Z3, a holding operation is performed, during which actuator 34 is supplied with at least substantially constant voltage. Thus, valve device 76 remains closed and driven element 12 remains in the holding position. The valve 76 is opened during time period Z5, which immediately follows time period Z4. During or during time period Z5, the voltage supplied to actuator 34 is reduced or decreased sufficiently to allow or cause the valve device 76 to open, particularly by means of spring element 110. Time period Z6 is connected to time period Z5, during which time period Z6, for example, is reopened during time period Z1. The corresponding situation applies to... Figure 19 .

[0114] at last Figure 20 A sixth embodiment of the actuator device 10 is shown. In particular, this actuator device 10 has a servo valve 130 attached to the valve device 76, also referred to as a servo discharge valve, and is, for example, electrically operable. For example, the servo valve 130 is arranged or connected in series with the valve device 76 in the discharge passage 32, wherein, for example, the servo valve 130 is arranged upstream of the valve device 76 along the flow direction of fluid flowing from the driven chamber 18 through the servo valve 130 and through the valve device 76 into the reservoir chamber 54. The servo valve 130 can also be electrically switched between a second open state and a second closed state, for example. In particular, for example, the servo valve 130 can be switched from at least the second closed state to the second open state. This allows, for example, the discharge passage 32 to be released particularly quickly. In particular, this allows for the particularly rapid opening or release of, for example, the front chamber 132 of the servo valve 130, thereby causing at least a portion of the fluid contained in the driven chamber 18 to be discharged into the front chamber 132 by switching the servo valve 130 to the second open position, and thus output from the driven chamber 18 or from the driven element 12. The valve device 76, in the sixth embodiment and in all other embodiments, is operated, and in particular controlled or regulated, by means of the actuator 34.

[0115] Servo valve 130 has a valve element 134 and a valve spring 136, the valve spring having a small opening pressure, for example, 1 bar. If, for example, the fluid acting on valve element 134 through discharge passage 32 has a pressure less than the opening pressure, valve element 134 remains closed by means of valve spring 136. If the pressure of the fluid acting on valve element 134 corresponds to the opening pressure, or if the pressure of the fluid acting on valve element 134 is greater than the opening pressure, then valve element 134 opens against valve spring 136, thereby releasing discharge passage 32, or pre-chamber 132, from servo valve 130. In other words, discharge passage 32 has a passage portion T2 arranged downstream of driven chamber 18 and upstream of pre-chamber 132 in the direction of fluid flow from driven chamber 18 to valve device 76 or to servo valve 130. In the second closed state, the passage portion T2 is fluidly separated from pre-chamber 132 by means of valve element 134, so that fluid from driven chamber 18 cannot flow into pre-chamber 132. By adjusting the servo valve 130 from the second closed state to the second open state, the valve element 134 releases the fluid connection between the passage portion T2 and the front chamber 132. In other words, the front chamber 132 is released, or fluidly connected to the passage portion T2, so that at least a portion of the fluid initially contained in the driven chamber 18 can flow out of the driven chamber 18 and into the front chamber 132. This is especially true when the pressure of the fluid contained in the passage portion T2 and acting directly on the valve element 134 corresponds to or is greater than the opening pressure.

[0116] A throttle valve 138 is provided for the servo valve 130, which is arranged in parallel or connected with the servo valve 130, particularly with the front chamber 132 and the valve element 134. The throttle valve 138 is arranged in a short-circuit channel 140, which is fluidly connected to channel portion T2 at a corresponding connection position V1 and to another channel portion T3 of the discharge channel 32 at a connection position V2. Here, for example, the short-circuit channel 140 may be a component of the discharge channel 32. Connection position V1 is arranged upstream of the valve element 134 along the flow direction of fluid flowing from the driven chamber 18 or from the driven chamber through channel portion T2 to the servo valve 130 and through the servo valve 130 to the valve device 76. Connection position V2 is arranged downstream of the servo valve 130, particularly the valve element 134, and upstream of the valve device 76, with reference to the aforementioned flow direction. Fluid flowing through the short-circuit channel 140 bypasses the servo valve 130 and therefore does not flow through the servo valve 130, but instead flows to the valve device 76 through the short-circuit channel 140 while bypassing the servo valve 130. In the flow direction of the fluid flowing from the driven chamber 18 to the reservoir chamber 54, a third channel portion T4 of the discharge channel 32 is arranged downstream of the valve device 76, so that the fluid from the valve device 76 is guided to the reservoir chamber 54 by means of the channel portion T4.

[0117] The servo valve 130 here has a valve housing 142, in which the valve piston 144 of the servo valve 130 is movably accommodated. Figure 20 The piston direction, indicated by double arrow 146, translates relative to the valve housing 142. Here, the valve spring 136 is supported along the piston direction on the valve piston 144 at least indirectly, and especially directly, and on the valve element 134 at least indirectly, and especially directly, on the valve element 134. The front chamber 132 is formed or limited partially by the valve housing 142 and partially by the valve piston 144. Furthermore, the servo valve 130 has an additional valve chamber 148, which is opposed to the front chamber 132, for example, especially along the piston direction. Here, the channel portion T4, which is fluidly connected to the valve device 76 on one hand and to the reservoir cavity 54 on the other, is fluidly connected to the front chamber 132 at connection position V3, wherein the connection position V3 is arranged downstream of the valve device 76 and upstream of the reservoir cavity 54 in the flow direction of the fluid from the valve device 76 and flowing to the reservoir cavity 54. If the valve piston 144 moves accordingly relative to the valve housing 142, causing the volume of the pre-chamber 132 to decrease, then the volume of the valve chamber 148 will also increase, and vice versa.

[0118] Generally, it can be seen that valve device 76, in the sixth embodiment and in other embodiments, is operated, especially controlled or regulated, by means of actuator 34, particularly in terms of the opening and closing of valve device 76. Valve element 134 is kept slightly closed, especially when the pressure of the fluid acting on valve element 134, particularly in passage portion T2, is less than the opening pressure. If valve device 76 is closed by means of actuator 34, or by correspondingly manipulating actuator 34, as previously described, and subsequently pumping operation is performed, then valve element 134 remains closed due to the small pressure differential established on the driven side, for example, between the throttle valve, for example, between the front chamber 130 and the valve chamber 148, however, due to the valve spring 136, and especially due to the spring force provided by and acting on valve element 134. This can also be achieved through different hydraulic cross-sections.

[0119] If valve device 76 is opened by the corresponding operation of actuator 34, the pressure in valve chamber 148 decreases faster through valve device 76 than in channel portion T2, especially since throttle valve 138 is arranged in short-circuit channel 140. Valve element 134 is then opened, or servo valve 130 is adjusted from the second closed state to the second open state. In contrast to or compared to valve device 76 itself, servo valve 130, or valve element 134, can achieve a significantly greater offset, allowing highly viscous fluids to flow out particularly quickly, i.e., to be discharged from the driven chamber 18.

Claims

1. An actuator device (10) comprising: - At least one driven element (12), said driven element being fluid-loadable and thereby movable to at least one holding position. - Actuator (34) capable of operating in pumping operation by means of manipulation of the actuator (34), in which at least the component (T) of the actuator (34) can be moved alternately along a first direction (36) and along a second direction (38) opposite to the first direction (36) by means of manipulation of the actuator (34), thereby allowing fluid to be delivered to the driven element (12) in order to load the driven element (12) with fluid. - At least one discharge channel (32) through which the fluid can be discharged from the driven element (12), - A valve device (76) having two valve elements (78, 80), the two valve elements (78, 80) comprising a first valve element (78) and a second valve element (80), the two valve elements being movable relative to each other, thereby allowing the valve device (76) to be adjustable between at least one closed state (S) of blocking the discharge passage (32) and at least one open state (O) of releasing the discharge passage (32), in the closed state, whereby the driven element (12) is held in the holding position by the fluid, and in the open state, the valve elements (78, 80) allow the fluid to drain from the driven element (12) through the discharge passage (32) and thereby allow the driven element (12) to move from the holding position to at least one avoidance position, wherein: o By moving the component (T) of the actuator (34) along the first direction (36), the first valve element of the two valve elements (78, 80) can move along the first operating direction (36) and thereby move toward the second valve element (80), thereby allowing the valve device (76) to be adjusted into the closed state (S). o The movement of the component (T) along the second direction (38) can cause the first valve element (78) to move away from the second valve element (80) along the second operating direction (38) opposite to the first operating direction (36), thereby allowing the valve device (76) to be adjusted to the open state (O). The actuator device (10) is configured to move the component (T) of the actuator (34) alternately along the first direction (36) and the second direction (38) during pumping operation, such that after the valve device (76) is adjusted to the closed state (S) during pumping operation, the valve device (76) remains in the closed state (S) despite the alternating movement of the component (T) along the first direction (36) and the second direction (38) during pumping operation, thereby allowing the fluid to be delivered to the driven element (12) during pumping operation, and o The actuator device (10) is capable of operating in an open operation that is different from and immediately following the pumping operation, in which the movement of the component (T) of the actuator (34) along the second direction (38) causes the first valve element (78) to move along the second operating direction (38) and away from the second valve element (80), thereby causing the valve device (76) to be adjusted from the closed state (S) to the open state (0).

2. The actuator device (10) according to claim 1, characterized in that... Damping devices (92, 93) allow the first valve element (78) to move toward the second valve element (80) along the first operating direction (36) during the movement of the component (T) in the first direction (36) at the start of the pumping operation, thereby allowing the valve device (76) to adjust from the open state (O) to the closed state (S) and preventing the movement of the first valve element (80) away from the second valve element (80) along the second operating direction (38) when the component (T) subsequently moves along the second direction (38), causing the valve device (76) to adjust to the open state (O) and thereby holding the valve device (76) in the closed state (S), thereby allowing the component (T) of the actuator (34) to move alternately along the first direction (36) and the second direction (38) during the pumping operation, while the valve device (76) remains in the closed state (S).

3. The actuator device (10) according to claim 2. Its features are, Since the damping devices (92, 93) prevent the first valve element (78) from moving away from the second valve element (80) along the second operating direction (38) during the pumping operation, causing the valve device (76) to adjust to the open state (0) and thereby holding the valve device (76) in the closed state (S), the component (T) of the actuator (34) and the valve element (78, 80) are able to move alternately along the first operating direction (36) and along the second operating direction (38), while the valve device (76) remains in the closed state (S).

4. The actuator device (10) according to claim 2 or 3. Its features are, The damping devices (92, 93) are configured to allow relative movement between the valve elements (78, 80) along the first operating direction (36) and / or along the second operating direction (38) during the open operation, and to cause the valve element (76) to adjust from the closed state (S) to the open state (O).

5. The actuator device (10) according to claim 2 or 3, characterized in that... At least one stop (72), wherein the valve element (78, 80) and the component (T) of the actuator (34) are movable relative to the stop (72) along the first direction (36) and along the second direction (38).

6. The actuator device (10) according to claim 5, characterized in that, The damping devices (92, 93) have a first damper element (94) capable of moving together with the first valve element (78) and a second damper element (96) capable of translating relative to the first damper element (94); wherein the damper elements (94, 96) are capable of moving relative to each other in order to adjust the valve device (76) from the open state (0) to the closed state (S) caused by the movement of the component (T) along the first direction (36), and in the movement of the first valve element (78) set at the start of the pumping operation toward the second valve element (80) along the first operating direction (36).

7. The actuator device (10) according to claim 6. Its features are, The first damper element (94, 96) is movable relative to the stop (72) along the first direction (36) and the second direction (38), wherein the stop (72) limits the movement of the second damper element (96) along the second direction (38), so that in the movement of the first valve element (78) along the first operating direction (36) toward the second valve element (80) caused by the movement of the component (T) along the first direction (36) and used to adjust the valve device (76) from the open state (0) to the closed state (S) and set at the start of the pumping operation, the first damper element (94) is movable relative to the second damper element (96) along the first direction (36) without the movement of the second damper element (96) along the first direction (36).

8. The actuator device (10) according to claim 6, characterized in that... The reset element (110) enables the damper elements (94, 96) to move relative to each other along the first direction (36) and / or along the second direction (38), thereby enabling relative movement between the valve elements (78, 80) extending along the first operating direction (36) and / or the second operating direction (38) and causing the valve device (76) to adjust from the closed state (S) to the open state (O).

9. The actuator device (10) according to claim 8. Its features are, The reset element (110) is coupled to the first damper element (94) on one side and to the second damper element (96) on the other side.

10. The actuator device (10) according to claim 6, characterized in that, The damper elements (94, 96) define two damping cavities (98, 100), each containing a damping medium that can be introduced into and out of the damping cavities (98, 100).

11. The actuator device (10) according to claim 10, characterized in that, The damping medium is a fluid.

12. The actuator device (10) according to any one of claims 2 to 3, characterized in that... The drive element (41) has a first drive portion (40), a second drive portion (42) and at least one drive chamber (46) defined by the drive portions (40, 42), wherein, during the pumping operation, the first drive portion (40) can be moved alternately relative to the second drive portion (42) along the first direction (36) and the second direction (38) by means of the component (T) of the actuator (34) together with the second valve element (80), thereby allowing the fluid of the driven element to exit from the drive chamber (46) and be delivered to the driven element (12) and to the drive chamber (46).

13. The actuator device (10) according to claim 12, characterized in that... A check valve (58) allows the fluid from the driven element to be introduced into the drive chamber (46).

14. The actuator device (10) according to claim 12, characterized in that... The reset device (74) is able to move relative to the second drive portion (42) along the second direction (38) by means of the first drive portion (40) and the second valve element (80).

15. A method for operating an actuator device (10), the actuator device comprising: - At least one driven element (12), said driven element being fluid-loadable and thereby movable to at least one holding position. - Actuator (34), which is manipulated and thus operates in a pumping operation, in which at least the components (T) of the actuator (34) move alternately along a first direction (36) and along a second direction (38) opposite to the first direction (36) by manipulation of the actuator (34), thereby supplying fluid to the driven element (12) in order to load the driven element (12) with fluid. - At least one discharge channel (32) through which the fluid can be discharged from the driven element (12), - A valve device (76) having two valve elements (78, 80), the two valve elements (78, 80) comprising a first valve element (78) and a second valve element (80) the two valve elements being movable relative to each other, thereby allowing the valve device (76) to be adjustable between at least one closed state (S) of blocking the discharge passage (32) and at least one open state (O) of releasing the discharge passage (32), in the closed state, whereby the driven element (12) is held in the holding position by the fluid, and in the open state, the valve elements (78, 80) allow the fluid to drain from the driven element (12) through the discharge passage (32) and thereby allow the driven element (12) to move from the holding position to at least one avoidance position, wherein: o By moving the component (T) of the actuator (34) along the first direction (36), the first valve element of the valve elements (78, 80) can move along the first operating direction (36) and thereby move toward the second valve element (80), thereby allowing the valve device (76) to be adjusted into the closed state (S). o The movement of the component (T) along the second direction (38) can cause the first valve element (78) to move away from the second valve element (80) along the second operating direction (38) opposite to the first operating direction (36), thereby allowing the valve device (76) to be adjusted to the open state (O). During pumping operation, the actuator device (10) causes the component (T) of the actuator (34) to move alternately along the first direction (36) and the second direction (38), such that after the valve device (76) is adjusted to the closed state (S) during pumping operation, the valve device (76) remains in the closed state (S) despite the alternating movement of the component (T) along the first direction (36) and the second direction (38) during pumping operation, thereby allowing the fluid to be delivered to the driven element (12) during pumping operation, and o The actuator device (10) operates in an open operation that is different from and immediately following the pumping operation, in which the movement of the component (T) of the actuator (34) along the second direction (38) causes the first valve element (78) to move along the second operating direction (38) and away from the second valve element (80), thereby causing the valve device (76) to be adjusted from the closed state (S) to the open state (0).

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