Single crystal quartz crucible spraying device

Abstract

The present invention provides a single crystal quartz crucible spraying device, comprising a base, a workbench, a crucible, and a top plate, wherein the workbench is arranged on the base, a clamping mechanism for clamping the crucible is arranged on the workbench, the top plate is connected to the base via a support column, the top plate is located above the workbench, the inner wall of the crucible comprises a crucible side wall, a crucible bottom wall, and a crucible bottom angle that connects the two, a spraying mechanism is arranged at the bottom of the top plate, a rotating motor that can drive the spraying mechanism to rotate is arranged on the top plate, and the spraying mechanism can spray uniformly in sequence along the arc direction of the crucible side wall, the crucible bottom angle, and the crucible bottom wall. The rotary motor is used to drive the spraying mechanism to rotate, and when the spraying mechanism drives the nozzle to descend, it can spray along the arc direction of the crucible side wall, the crucible bottom angle, and the crucible bottom wall, so that the inner wall of the crucible is sprayed more uniformly, effectively avoiding the occurrence of unfavorable factors affecting quality such as shedding and cracking caused by incomplete spraying or uneven thickness.

Description

Technical Field

[0001] The invention relates to the technical field of crucible spraying, in particular to a single crystal quartz crucible spraying device. Background Art

[0002] Crucible spraying is the first step in single crystal production. During the single crystal process, quartz crucibles are often used to hold silicon material. During the high-temperature melting process, the molten silicon will adhere to the crucible. At the same time, impurities in the crucible will also enter the silicon ingot, thereby reducing the quality of the silicon ingot. Therefore, before loading the material, a layer of silicon hydroxide coating must be applied to the crucible surface to isolate the crucible and silicon ingot, ensuring adhesion and preventing impurities in the crucible from entering the silicon ingot, thereby ensuring the quality of the silicon ingot.

[0003] Currently, silicon hydroxide coatings are mostly applied by automated thermal spraying with a robotic arm. However, because the inner wall of the crucible has side walls, a bottom wall, and bottom corner walls, and the crucible is round, the robotic arm cannot drive the nozzle to rotate along the inner wall of the crucible at high speeds for spraying. Spraying can only be done locally, point by point. This is not only inefficient, but also results in varying thicknesses at different locations on the side walls, bottom wall, and bottom corner walls of the crucible. This uneven coating can easily result in some areas not being sprayed, causing coating loss and shedding, leading to impurities and cracks in the silicon ingot, and affecting quality. Summary of the Invention

[0004] (1) Technical problems solved

[0005] In view of the deficiencies of the prior art, the present invention provides a single crystal quartz crucible spraying device, which solves the problems raised in the above background technology.

[0006] (2) Technical solution

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions: a single crystal quartz crucible spraying device, comprising a base, a workbench, a crucible, and a top plate, wherein the workbench is arranged on the base, and a clamping mechanism for clamping the crucible is provided on the workbench, the top plate is connected to the base through a support column, and the top plate is located above the workbench, the inner wall of the crucible includes a crucible side wall, a crucible bottom wall and a crucible bottom angle that connects the above two, a spraying mechanism is provided at the bottom of the top plate, and a rotating motor that can drive the spraying mechanism to rotate is provided on the top plate, and the spraying mechanism can spray evenly in sequence along the arc direction of the crucible side wall, the crucible bottom angle, and the crucible bottom wall.

[0008] Preferably, the spraying mechanism includes a turntable, a linear guide column, a trapezoidal guide column, a cylindrical guide column, a lifting ring, an electric push rod and at least one group of rotating frames, a rotating arm, and a nozzle frame with a nozzle, the turntable is rotatably connected to the bottom of the top plate and is coaxially connected to the rotating motor, the electric push rod is vertically arranged at the bottom of the turntable and is used to drive the lifting ring to move up and down, the rotating frame is arranged at the bottom of the lifting ring, the middle of the rotating arm is rotatably connected to the rotating frame, and the nozzle frame is arranged at the bottom end of the rotating frame, the linear guide column, trapezoidal guide column, and cylindrical guide column are connected in sequence from top to bottom, the trapezoidal guide column has a small diameter at the upper end and a large diameter at the lower end, the top end of the linear guide column is arranged at the center of the bottom of the top plate, the top end of the rotating arm is slidably adapted on the outer wall of the linear guide column, trapezoidal guide column, and cylindrical guide column, and a torsion spring is sleeved on the rotating arm and the rotating axis of the rotating frame.

[0009] Preferably, the top of the rotating arm is rotatably connected to a pulley that is slidably adapted to the linear guide column, the trapezoidal guide column, and the cylindrical guide column.

[0010] Preferably, a threaded sleeve is provided at the center of the bottom of the top plate, and a stud threadedly connected to the threaded sleeve is provided at the top of the linear guide column.

[0011] Preferably, the clamping mechanism includes a gear ring, a ring rail, a driving gear, a driving motor and several groups of clamping blocks, guide racks, guide slides and driven gears. The ring rail is provided on the workbench and is arranged concentrically with the turntable. The gear ring is slidably adapted on the ring rail. The driving gear is pivoted on the workbench and meshed with the gear ring. The driving motor is coaxially connected to the driving gear. Several guide slides are provided on the workbench along the radial direction of the ring rail. The guide rack is slidably adapted on the guide slides. The driven gear is pivoted on the workbench and the upper and lower ends are respectively meshed with the guide rack and the gear ring. The clamping block is provided at the end of the guide rack and corresponds to the outer wall of the crucible.

[0012] Preferably, an anti-overflow mechanism is further provided at the bottom of the top plate, and the anti-overflow mechanism can prevent the spraying liquid from overflowing from the top of the crucible side wall.

[0013] Preferably, the anti-overflow mechanism includes an annular sealing ring, a sleeve, a pressure column, and a spring. The sleeve is vertically arranged at the bottom of the top plate, the pressure column is vertically slidably adapted in the sleeve, and the bottom end is connected to the sealing ring. The spring is arranged between the pressure column and the top of the inner cavity of the sleeve, and the sealing ring corresponds to the top of the side wall of the crucible.

[0014] Preferably, a lifting hydraulic cylinder is vertically arranged on the base, and the workbench is arranged on the output end of the top of the lifting hydraulic cylinder.

[0015] (3) Beneficial effects

[0016] The present invention provides a single crystal quartz crucible spraying device. It has the following beneficial effects:

[0017] 1. The single crystal crucible spraying device uses a rotary motor to drive the spraying mechanism to rotate. When the spraying mechanism drives the nozzle to descend, it can spray along the arc direction of the crucible side wall, crucible bottom corner, and crucible bottom wall, so that the inner wall of the crucible is sprayed more evenly, effectively avoiding adverse factors affecting quality such as shedding and cracking caused by incomplete spraying or uneven thickness. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is an axonometric drawing of the present invention;

[0019] Figure 2 This is a schematic diagram of the bottom of the workbench of the present invention;

[0020] Figure 3 It is a schematic structural diagram of the spraying mechanism of the present invention;

[0021] Figure 4 Schematic diagram of the spraying mechanism of the present invention corresponding to the side wall of the crucible;

[0022] Figure 5 Schematic diagram of the spraying mechanism of the present invention corresponding to the bottom angle of the crucible;

[0023] Figure 6 It is a schematic diagram of the correspondence between the spraying mechanism of the present invention and the bottom wall of the crucible.

[0024] In the figure: 1 base, 2 workbench, 3 crucible, 4 spraying mechanism, 5 lifting hydraulic cylinder, 6 clamping mechanism, 7 top plate, 8 support column, 9 rotating motor, 10 sealing ring, 11 sleeve, 12 pressure column, 13 spring, 31 crucible side wall, 32 crucible bottom wall, 33 crucible bottom angle, 41 turntable, 42 linear guide column, 43 trapezoidal guide column, 44 lifting ring, 45 electric push rod, 46 rotating frame, 47 rotating arm, 48 nozzle frame, 49 nozzle, 50 pulley, 51 nut, 52 cylindrical guide column, 61 clamping block, 62 gear ring, 63 ring rail, 64 guide rack, 65 guide slide rail, 66 driven gear, 67 driving gear, 68 driving motor. DETAILED DESCRIPTION

[0025] The embodiment of the present invention provides a single crystal quartz crucible spraying device, such as Figure 1-6 As shown, it includes a base 1, a workbench 2, a crucible 3, and a top plate 7.

[0026] A lifting hydraulic cylinder 5 is vertically arranged on the base 1, and the workbench 2 is arranged on the output end of the top of the lifting hydraulic cylinder 5. The lifting hydraulic cylinder 5 can be a manual hydraulic cylinder or an electric hydraulic cylinder, which is an existing commercially available product and is used to lift the workbench 2.

[0027] A clamping mechanism 6 for clamping the crucible 3 is provided on the workbench 2 .

[0028] Specific examples Figure 1 As shown, the clamping mechanism 6 includes a gear ring 62, a ring rail 63, a drive gear 67, a drive motor 68, and four sets of clamping blocks 61, a guide rack 64, a guide slide 65, and a driven gear 66. The ring rail 63 is set on the workbench 2 and is arranged concentrically with the turntable 41. The gear ring 62 is slidably adapted on the ring rail 63 and can rotate on the ring rail 63. The drive gear 67 is pivoted on the workbench 2 and meshes with the gear ring 62. The drive gear 67 is used to drive the gear ring 62 to rotate. The drive motor 68 is coaxially connected to the drive gear 67 and is used to drive the drive gear 67 to rotate. Four guide slides 65 are set on the workbench 2 along the radial direction of the ring rail 63, and the four guide slides 65 are distributed at equal angles around the center of the gear ring 62. The guide rack 64 slides onto the guide rail 65, and the driven gear 66 is pivotally connected to the workbench 2, with its upper and lower ends meshing with the guide rack 64 and the gear ring 62, respectively. The clamping block 61 is located at the end of the guide rack 64 and corresponds to the outer wall of the crucible 3. When the gear ring 62 rotates, it drives the driven gear 66 to rotate, which in turn drives the meshed guide rack 64 to move radially, thereby driving the clamping block 61 to clamp the crucible 3. Because the clamping path and speed of the four clamping blocks 61 are synchronized, even if the position of the crucible 3 on the workbench 2 deviates slightly, the four clamping blocks 61 can automatically adjust the crucible 3 to the center position of the workbench 2 when clamping it.

[0029] like Figure 1 As shown, the top plate 7 is connected to the base 1 through the support column 8, and the top plate 7 is located above the workbench 2.

[0030] like Figure 4 As shown, the inner wall of the crucible 3 includes a crucible side wall 31, a crucible bottom wall 32, and a crucible bottom corner 33 that connects the two. The crucible bottom corner 33 has a certain curvature.

[0031] like Figure 3 As shown, a spraying mechanism 4 is provided at the bottom of the top plate 7, and a rotating motor 9 is provided on the top plate 7 to drive the spraying mechanism 4 to rotate. The spraying mechanism 4 can spray uniformly in sequence along the arc direction of the crucible side wall 31, the crucible bottom corner 33, and the crucible bottom wall 32.

[0032] The rotary motor 9 is used to drive the spraying mechanism 4 to rotate. When the spraying mechanism 4 drives the nozzle 49 to descend, it can spray along the arc direction of the crucible side wall 31, the crucible bottom corner 33, and the crucible bottom wall 32, so that the inner wall of the crucible 3 is sprayed more evenly, effectively avoiding the adverse factors affecting quality such as shedding and cracking caused by incomplete spraying or uneven thickness.

[0033] like Figure 3-4As shown, the spraying mechanism 4 includes a turntable 41, a linear guide column 42, a trapezoidal guide column 43, a cylindrical guide column 52, a lifting ring 44, an electric push rod 45 and at least one set of a rotating frame 46, a rotating arm 47, and a nozzle frame 48 with a nozzle 49.

[0034] The turntable 41 is rotatably connected to the bottom of the top plate 7 and coaxially connected to the rotary motor 9, which is used to drive the turntable 41 to rotate. An electric push rod 45 is vertically arranged at the bottom of the turntable 41. The output end of the electric push rod 45 is connected to the lifting ring 44, and the electric push rod 45 is used to drive the lifting ring 44 to rise and fall. The rotating frame 46 is arranged at the bottom of the lifting ring 44. The middle part of the rotating arm 47 is rotatably connected to the rotating frame 46. A torsion spring is installed on the rotating axis between the rotating arm 47 and the rotating frame 46. One end of the torsion spring is connected to the rotating axis, and the other end is connected to the rotating frame 46. Under normal conditions, the rotating arm 47 is in a horizontal position due to the action of the torsion spring, that is, it is perpendicular to the rotating frame 46. When the rotating arm 47 is applied by an external force, it can be rotated to a vertical position.

[0035] The nozzle rack 48 is arranged at the bottom end of the rotating rack 46. There are three nozzles 49 on the nozzle rack 48. When the two groups of nozzle racks 48 are in a vertical state, as shown in FIG. Figure 6 Two sets of nozzle racks 48 are shown side by side.

[0036] The linear guide column 42, the trapezoidal guide column 43, and the cylindrical guide column 52 are connected in sequence from top to bottom. The trapezoidal guide column 43 has a smaller diameter at the top and a larger diameter at the bottom. The slope angle of the trapezoidal guide column 43 is 45 degrees. The top end of the linear guide column 42 is set at the center of the bottom of the top plate 7.

[0037] The top of the rotating arm 47 is rotatably connected to a pulley 50. The rotating arm 47 is against the linear guide column 42, the trapezoidal guide column 43, and the cylindrical guide column 52 through the pulley 50, and can slide vertically on the outer wall of the linear guide column 42, the trapezoidal guide column 43, and the cylindrical guide column 52.

[0038] The principle of spraying mechanism 4: Figure 4 As shown, the nozzle 49 is normally located in correspondence with the crucible side wall 31 of the crucible 3. When the electric push rod 45 drives the nozzle 49 downward vertically, the pulley 50 at the end of the rotating arm 47 slides vertically along the linear guide column 42 to a position where it engages with the trapezoidal guide column 43. Figure 5 As shown, when the slide 50 slides downward along the slope of the trapezoidal guide column 43, the rotating arm 47 is forced to rotate and deflect along the arc direction of the crucible bottom angle 33. Figure 6 As shown, when the pulley 50 enters the cylindrical guide column 52, the rotating arm 47 is in a vertical position relative to the bottom wall 32 of the crucible.

[0039] like Figure 4As shown, a threaded sleeve 51 is provided at the center of the bottom of the top plate 7, and a stud is provided on the top of the linear guide post 42, which is threadedly connected to the threaded sleeve 51. The length of the linear guide post 42 extending from the threaded sleeve 51 can be adjusted by rotating the linear guide post 42. The length of the linear guide post 42 can be adjusted according to the depth of the crucible 3.

[0040] like Figure 1 As shown, an anti-overflow mechanism is further provided at the bottom of the top plate 7 , which can prevent the spraying liquid from overflowing from the top of the crucible side wall 31 of the crucible 3 .

[0041] The anti-overflow mechanism includes an annular sealing ring 10, a sleeve 11, a pressure column 12, and a spring 13. The sealing ring 10 is made of silicone. The sleeve 11 is vertically arranged at the bottom of the top plate 7. The pressure column 12 is vertically slidably adapted in the sleeve 11, and the bottom end is connected to the sealing ring 10. The spring 13 is arranged between the pressure column 12 and the top of the inner cavity of the sleeve 11. The sealing ring 10 corresponds to the top of the crucible side wall 31 of the crucible 3. In specific operation, after the crucible 3 is clamped on the workbench 2, the lifting hydraulic cylinder 5 is used to lift the crucible 3 upward until the top of the crucible 3 contacts the sealing ring 10, and then the spring 13 is compressed by continuing to lift it upward to a certain height so that the sealing ring 10 is firmly pressed against the top of the crucible 3.

[0042] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal quartz crucible spraying device, comprising a base (1), a workbench (2), a crucible (3), and a top plate (7), wherein the workbench (2) is arranged on the base (1), a clamping mechanism (6) for clamping the crucible (3) is provided on the workbench (2), the top plate (7) is connected to the base (1) via a support column (8), the top plate (7) is located above the workbench (2), the inner wall of the crucible (3) comprises a crucible side wall (31), a crucible bottom wall (32), and a crucible bottom angle (33) for connecting the two aforementioned sides, characterized in that: A spraying mechanism (4) is provided at the bottom of the top plate (7), and a rotating motor (9) is provided on the top plate (7) for driving the spraying mechanism (4) to rotate. The spraying mechanism (4) can spray uniformly in sequence along the arc direction of the crucible side wall (31), the crucible bottom angle (33), and the crucible bottom wall (32); the spraying mechanism (4) comprises a turntable (41), a linear guide column (42), a trapezoidal guide column (43), a cylindrical guide column (52), a lifting ring (44), an electric push rod (45), and at least one set of rotating frames (46), a rotating arm (47), and a nozzle frame (48) with a nozzle (49). The turntable (41) is rotatably connected to the bottom of the top plate (7) and is coaxially connected to the rotating motor (9). The electric push rod (45) is vertically arranged on the turntable (41). The bottom of the lifting ring (44) is used to drive the lifting ring (44) to move up and down. The rotating frame (46) is set at the bottom of the lifting ring (44). The middle part of the rotating arm (47) is rotatably connected to the rotating frame (46). The nozzle frame (48) is set at the bottom of the rotating frame (46). The linear guide column (42), the trapezoidal guide column (43), and the cylindrical guide column (52) are connected in sequence from top to bottom. The trapezoidal guide column (43) has a small diameter at the upper end and a large diameter at the lower end. The top end of the linear guide column (42) is set at the center of the bottom of the top plate (7). The top end of the rotating arm (47) is slidably adapted on the outer wall of the linear guide column (42), the trapezoidal guide column (43), and the cylindrical guide column (52). A torsion spring is provided on the rotating axis of the rotating arm (47) and the rotating frame (46).

2. The single crystal quartz crucible spraying device according to claim 1, characterized in that: The top of the rotating arm (47) is rotatably connected to a pulley (50) that is slidably adapted to the linear guide column (42), the trapezoidal guide column (43), and the cylindrical guide column (52).

3. The single crystal quartz crucible spraying device according to claim 1, characterized in that: A screw sleeve (51) is provided at the center of the bottom of the top plate (7), and a stud threadedly connected to the screw sleeve (51) is provided at the top of the linear guide column (42).

4. The single crystal quartz crucible spraying device according to claim 1, characterized in that: The clamping mechanism (6) comprises a gear ring (62), a ring rail (63), a driving gear (67), a driving motor (68), a plurality of clamping blocks (61), a guide rack (64), a guide slide rail (65), and a driven gear (66). The ring rail (63) is provided on the workbench (2) and is arranged concentrically with the turntable (41). The gear ring (62) is slidably fitted on the ring rail (63). The driving gear (67) is pivotally connected to the workbench (2) and meshes with the gear ring (62). The driving motor (68) is coaxially connected to the driving gear (67); a plurality of guide rails (65) are arranged on the workbench (2) along the radial direction of the ring rail (63); the guide rack (64) is slidably adapted on the guide rail (65); the driven gear (66) is pivotally connected to the workbench (2); and the upper and lower ends are respectively engaged with the guide rack (64) and the gear ring (62); the clamping block (61) is arranged at the end of the guide rack (64) and corresponds to the outer wall of the crucible (3).

5. The single crystal quartz crucible spraying device according to claim 1, characterized in that: The bottom of the top plate (7) is also provided with an anti-overflow mechanism, which can prevent the spraying liquid from overflowing from the top of the crucible side wall (31) of the crucible (3).

6. The single crystal quartz crucible spraying device according to claim 5, characterized in that: The anti-overflow mechanism includes an annular sealing ring (10), a sleeve (11), a pressure column (12), and a spring (13). The sleeve (11) is vertically arranged at the bottom of the top plate (7). The pressure column (12) is vertically slidably adapted in the sleeve (11), and the bottom end is connected to the sealing ring (10). The spring (13) is arranged between the pressure column (12) and the top of the inner cavity of the sleeve (11). The sealing ring (10) corresponds to the top of the crucible side wall (31) of the crucible (3).

7. The single crystal quartz crucible spraying device according to claim 1, characterized in that: A lifting hydraulic cylinder (5) is vertically arranged on the base (1), and the workbench (2) is arranged on the output end of the top of the lifting hydraulic cylinder (5).

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