Article delivery vehicle and article delivery apparatus

Abstract

This invention discloses an article conveying vehicle and an article conveying device. The invention includes contact protrusions and contact pads. When the gripper unit, which clamps the article, rises to convey the article, it suppresses vibrations caused by the upper lifting drive unit and the lower gripper unit being in close contact with each other, thus preventing damage to the article. The contact protrusions are provided in the lifting drive unit, and the contact pads are provided in the gripper unit. The contact pads are made of a material whose own elasticity provides vibration damping to the contact surface that is in close contact with the contact protrusions. Such contact pads have an arrangement area for the contact ends of the contact protrusions and a guide surface that guides the contact ends toward the arrangement area.

Description

Technical Field

[0001] Embodiments of the present invention relate to a transport vehicle that moves and transfers items along a transport path, and a transport device having the same. Background Technology

[0002] To improve semiconductor manufacturing efficiency, technologies are being used to enhance various processes performed on semiconductor manufacturing equipment (exposure, evaporation, etching, ion implantation, cleaning, etc.), and equipment is being introduced to more efficiently transfer items between semiconductor manufacturing facilities. As an example, overhead hoist transport (OHT) systems are widely used, capable of moving and transferring items along a conveyor path provided on the ceiling side of a semiconductor manufacturing plant.

[0003] Typically, overhead gantry cranes (OHTs) consist of tracks providing a transport path, a vehicle traveling along the tracks, and a crane suspended beneath the vehicle. The vehicle and crane together constitute the transport vehicle. The crane includes gripper units that clamp items onto working supports or release the supports for items via ungrip operations, and a lifting drive unit that raises and lowers the gripper units.

[0004] In such a transport device, after the gripper unit descends to clamp the item, the transport vehicle moves along a track while the gripper unit is raised to transport the item to the target location. However, during the transport process, vibrations may occur due to various reasons, and these vibrations are transmitted to the item supported by the gripper unit, potentially damaging it. Additionally, slight movements of the gripper unit during transport may cause the item to sway and become damaged.

[0005] For related prior art documents, please refer to Korean Patent Publication No. 10-0643381 (November 10, 2006), Korean Patent Publication No. 10-1433911 (August 29, 2014), and Korean Patent Publication No. 10-2018-0002219 (January 8, 2018). Summary of the Invention

[0006] The purpose of embodiments of the invention is to prevent vibrations generated during article transport from being transmitted to the article. Additionally, the purpose of embodiments of the invention is to suppress article movement during article transport.

[0007] The technical problems to be solved are not limited to these. Technicians can usually understand other unmentioned technical problems from the following notes.

[0008] According to an embodiment of the present invention, an article transport vehicle may be provided, comprising: a transport vehicle capable of traveling along a travel track; and a crane device supporting articles on the underside of the transport vehicle, the crane device comprising: a gripper unit for clamping or releasing the articles; a lifting drive unit for raising and lowering the gripper unit above the gripper unit; and a restraining unit for restraining the gripper unit to the lifting drive unit when the gripper unit is raised.

[0009] Here, the restraint unit may include: a contact protrusion, provided in either the gripper unit or the lifting drive unit facing the other; and a contact pad, provided in the other of the gripper unit or the lifting drive unit facing the contact protrusion, and having a contact surface that abuts against the contact end of the contact protrusion to restrain the gripper unit when the gripper unit rises. In this case, the contact pad may have at least its contact surface made of a vibration-damping material, including rubber or a soft synthetic resin.

[0010] Alternatively, the restraint unit may be configured to dampen vibrations in both the vertical and horizontal directions. Specifically, the restraint unit may include: a contact protrusion, provided in either the gripper unit or the lifting drive unit facing the other; and a contact pad, provided in the other of the gripper unit or the lifting drive unit facing the contact protrusion, having a contact surface that abuts against the contact end of the contact protrusion when the gripper unit rises, and at least the contact surface is made of an elastic material, forming a recess in the contact surface through elastic deformation when the contact end and the contact surface are in contact. In this case, the elastic material may include rubber or a soft synthetic resin.

[0011] Alternatively, the contact protrusion may be provided in the lifting drive unit, and the contact pad may be provided in the gripper unit.

[0012] Alternatively, the contact surface may have an arrangement area for setting the contact end, and a guide surface for guiding the contact end into the arrangement area.

[0013] Alternatively, the guide surface may have two surfaces, arranged in either horizontal direction on both sides with the arrangement area as a reference, and each surface may be positioned downwards towards the arrangement area. Alternatively, the contact surface may have a shape with both sides open in a horizontal direction orthogonal to the arrangement direction of the guide surface with the arrangement area as a reference.

[0014] Alternatively, the guide surfaces may be formed as inclined surfaces. Alternatively, the contact end may be formed as a curved surface that contacts the inclined surface.

[0015] Alternatively, the restraint units may be multiple and spaced apart from each other. Alternatively, at least two of the multiple restraint units may be configured such that the guide surfaces are arranged in different directions. Specifically, at least two of the multiple restraint units may be configured such that the guide surfaces are arranged orthogonally to each other. Alternatively, the restraint units may be three, and the virtual lines connecting the various arrangement areas may form a triangle in the central region between the gripper unit and the lifting drive unit.

[0016] Alternatively, if the load acting on the gripper unit when it rises is above a set value, the lifting drive unit may stop lifting the gripper unit.

[0017] According to an embodiment of the present invention, a goods transport vehicle may be provided, comprising: a transport vehicle capable of traveling along a travel track; and a crane device supporting goods on the underside of the transport vehicle, the crane device comprising: a gripper unit having grippers for clamping and releasing the goods and a gripper base supporting the grippers on the upper side; a lifting drive unit having a lifting base disposed on the upper side of the gripper base and a lifting mechanism for raising and lowering the gripper unit relative to the lifting base by means of a strap wound or unwound relative to a rotating roller; and a plurality of restraint units for restraining the gripper unit when it rises. When the gripper base is secured to the lifting base, each of the securing units includes: a contact protrusion protruding from below the lifting base toward above the gripper base; and a contact pad provided above the gripper base facing the contact protrusion and having a contact surface that abuts against the contact end of the contact protrusion when the gripper unit is raised, and at least the contact surface is made of an elastic material, and when the contact end and the contact surface are in contact, the contact surface forms a recess having a bottom and a flange protruding from the periphery of the bottom by elastic deformation.

[0018] Alternatively, in each of the restraining units, the contact surface has an arrangement area for the contact end, and a guide surface for guiding the contact end into the arrangement area. Two guide surfaces are provided, arranged horizontally on either side of the arrangement area, and each is positioned laterally downwards towards the arrangement area. Alternatively, the restraining unit may have three units, arranged such that a virtual line connecting the arrangement areas forms a triangle in the central region between the gripper base and the lifting base. Alternatively, any one of the three restraining units and the remaining two may be configured such that the arrangement directions of the guide surfaces are orthogonal to each other.

[0019] According to an embodiment of the present invention, an item conveying device may be provided, comprising: a travel track providing a conveying path for conveying items on the ceiling side; and at least one item conveying vehicle having a transport vehicle capable of traveling along the travel track and a crane device supporting the items on the underside of the transport vehicle, the crane device comprising: a gripper unit for clamping or releasing the items; a lifting drive unit for lifting the gripper unit above the gripper unit; and a restraining unit for restraining the gripper unit to the lifting drive unit when the gripper unit is raised.

[0020] The solutions to the technical problems will become more specific and clear through the embodiments, accompanying drawings, etc., described below. Furthermore, various solutions other than those mentioned may be added below.

[0021] According to an embodiment of the present invention, when the gripper unit rises, the gripper unit is bound to the lifting drive unit. Therefore, by suppressing the movement of the gripper unit, it is possible to prevent the item clamped by the gripper unit from being damaged due to the movement (shaking, etc.) of the gripper unit.

[0022] According to an embodiment of the invention, the gripper unit is restrained by the contact protrusions and the contact pads, thus suppressing the movement of the gripper unit with a simple structure. Furthermore, the contact pads contain vibration-damping material, thereby preventing damage to the items gripped by the gripper unit due to vibration by cutting off the transmission of vibrations mainly generated during travel to the gripper unit.

[0023] According to an embodiment of the present invention, the vibration damping material constituting the contact pad is an elastically deformable material such as rubber. Thus, when the contact protrusion and the contact pad are pressed together, a recess is formed in the contact pad due to the pressure of the contact protrusion and the elastic deformation of the contact pad (providing an effect similar to the contact end of the contact protrusion being pinned in the contact pad). Therefore, it can effectively prevent not only vertical vibrations applied to the gripper unit, but also horizontal vibrations, and can actively respond to and constrain multi-directional shaking of the gripper unit.

[0024] The effects of the invention are not limited to these; a skilled technician can clearly understand other effects not mentioned from this specification and the accompanying drawings. Attached Figure Description

[0025] Figure 1 This is a schematic diagram showing the overall structure of an article conveying device according to an embodiment of the present invention.

[0026] Figure 2 as well as Figure 3 It is shown Figure 1 The diagram shows the front view and left view of the structure of the aerial unmanned transport vehicle.

[0027] Figure 4 as well as Figure 5 It is shown Figure 1 The image shows a front view of the aerial unmanned transport vehicle in operation.

[0028] Figure 6 It is shown Figures 2 to 5 A perspective view of the hand gripper unit and a portion of the restraint unit shown.

[0029] Figure 7 It is shown Figures 2 to 5 A perspective view of the lifting drive unit and a portion of the restraint unit shown.

[0030] Figure 8 It is shown Figure 6 as well as Figure 7 A three-dimensional view of the structure of the restraint unit shown.

[0031] Figure 9 as well as Figure 10 It is shown Figure 6 as well as Figure 7 The diagram shows the operation of the restraint unit.

[0032] (Explanation of reference numerals in the attached diagram)

[0033] 1: Semiconductor manufacturing equipment

[0034] 10: Travel Track

[0035] 20: Item Transport Vehicle

[0036] 100: Transport vehicle

[0037] 200: Crane equipment

[0038] 210: Crane shell

[0039] 220: Gripper Unit

[0040] 230: Lifting drive unit

[0041] 240: Rotary drive unit

[0042] 250: Horizontal drive unit

[0043] 260: Contact protrusion of the restraint unit

[0044] 270: Contact pad of the restraint unit Detailed Implementation

[0045] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art to which this invention pertains can readily implement it. However, the present invention can be implemented in various different ways and is not limited to the embodiments described herein.

[0046] In the description of embodiments of the present invention, when it is determined that a detailed description of a relevant known function or structure may unnecessarily obscure the main idea of ​​the present invention, such detailed description is omitted, and parts that perform similar functions and effects use the same reference numerals throughout the drawings.

[0047] At least some of the terms used in this specification are defined in consideration of the function of this invention, and therefore may vary depending on the user's or operator's intent, conventions, etc. Therefore, the terms should be interpreted based on the entire content of this specification. Furthermore, in this specification, when indicating the inclusion of a constituent element, it means that other constituent elements are also included, not excluded, unless specifically stated to the contrary. When indicating that a part is connected (or joined) to other parts, it includes not only direct connection (or joining) but also indirect connection (or joining) through other parts.

[0048] On the other hand, for ease of understanding, the size or shape of the constituent elements, the thickness of the lines, etc., may be exaggerated to some extent in the accompanying drawings.

[0049] This invention can be primarily used in factories manufacturing semiconductors or flat panel displays (FPDs) to transfer items from any location to a destination. For example, the invention can be configured to transfer items between semiconductor (or flat panel display) manufacturing equipment. Items may include substrates such as wafers. As an example, an item may be a container for holding the substrate. Furthermore, the container may be a hermetically sealed container capable of protecting the held substrate from external influences. The hermetically sealed container may be a front-opening unified pod (FOUP).

[0050] This invention can be used in various technical fields for transporting items. Embodiments of this invention are described primarily in the case of a front-opening wafer transfer box (hereinafter referred to as FOUP) that houses wafers within its internal space being transported between semiconductor manufacturing equipment in a semiconductor manufacturing plant.

[0051] A semiconductor manufacturing plant may consist of at least one clean room. Semiconductor manufacturing equipment that performs semiconductor manufacturing processes may be located within the clean room. Semiconductors can be manufactured by repeatedly performing semiconductor manufacturing processes on wafers. Wafers that have completed a process in a specific semiconductor manufacturing facility can be transferred to another semiconductor manufacturing facility for the next process. In this case, the wafers can be transferred while housed in a FOUP (Flexible Open-Pack) using a transport system equipped with overhead automated guided vehicles (OHTs).

[0052] The overall structure of the article conveying device according to an embodiment of the present invention is schematically shown in the figure. Figure 1 .exist Figure 1 In the accompanying drawings, reference numeral 1 indicates semiconductor manufacturing equipment installed in a semiconductor manufacturing plant, reference numeral 10 indicates a travel track providing a transport path 11 for transferring FOUPs between semiconductor manufacturing equipment 1. Reference numeral 20 indicates a transport vehicle moving along the transport path 11 and transporting FOUPs, and reference numeral 30 indicates a buffer providing temporary storage space for FOUPs. The travel track 10 is configured to provide the transport path 11 on the roof side of the semiconductor manufacturing plant. The transport path 11 may include at least one straight section 12 of a straight shape, at least one curved section 13 of a curved shape, and at least one connecting section 14 for branching and / or merging paths. Multiple transport vehicles 20 and buffers 30 may be provided. The transport vehicle 20 can directly transport FOUPs from a specific device in the semiconductor manufacturing plant 1 to other devices, or it can temporarily store FOUPs in the buffer 30 before transporting them to other devices. The buffer 30 may be a side track buffer (STB) located to the side of the transport path 11, or an under track buffer (UTB) located below the transport path 11.

[0053] An article conveying device according to an embodiment of the present invention includes an OHT (Outgoing Loading Device), which includes a travel track 10 and an article conveying vehicle 20. In the article conveying device according to an embodiment of the present invention, the article conveying vehicle 20 is configured to be powered by a power supply unit (see reference 1). Figure 2 (Ref. 40) and power receiving unit (see attached figure) Figure 2 The attached reference numeral 50) operates by receiving drive power from a power supply unit and may also include an integrated control unit, also known as an OCS (OHT control system), to automatically operate the goods transport vehicle 20.

[0054] The structure and operation of the OHT are shown in Figures 2 to 5 .

[0055] Reference Figure 2 The travel track 10 includes a pair of tracks spaced apart from each other in the left-right direction (referring to the Y-axis direction), and is mounted on the roof side of the semiconductor manufacturing plant via rail supports 15. Each rail support 15 may have its lower portion supporting the pair of tracks and its upper portion fixedly mounted to the roof of the semiconductor manufacturing plant. The pair of tracks may form a travel surface on its upper side. (Refer to...) Figure 2 as well as Figure 3The transport vehicle 20 includes a transport vehicle 100 that travels along a travel track 10 and a crane device 200 that supports the FOUP on the underside of the transport vehicle 100. The crane device 200 can move together with the transport vehicle 100 in a state of supporting the FOUP.

[0056] like Figure 2 As shown, the power supply unit 40 may have an electricity supply line 41 disposed below the travel track 10 along the conveying path 11. The power supply line 41 may be configured as a pair and disposed between a pair of tracks, supported and fixed in position by a wire seat 42 mounted on each of the tracks. Such a power supply line 41 can be electrically connected to a power supply device that provides driving power. The power receiving unit 50 may include a pickup coil positioned opposite the power supply line 41, located below the transport vehicle 100 or above the crane device 200, and a rectifier for converting AC to DC. An alternating current flows in the power supply line 41, so the direction and intensity of the magnetic flux generated near the power supply line 41 can constantly vary. The pickup coil can generate a voltage through electromagnetic induction based on such variations in the magnetic flux. The generated voltage can be supplied to the transport vehicle 20 as an AC voltage or after being converted to DC voltage by the rectifier.

[0057] The transport vehicle 100 includes a body 110 and a plurality of wheels 120. An axle extending rotatably in the body 110 in a left-right direction (referring to the Y-axis direction) is provided. The wheels 120 provide mobility to the body 110, enabling the body 110 to travel along a travel track 10. The wheels 120 can each contact the travel surfaces of a pair of tracks to perform the movement. The wheels 120 can each be mounted on both ends of the axle. The transport vehicle 100 also includes a wheel drive unit 130 that provides power for rotating the wheels 120. The wheel drive unit 130 can be configured to rotate the axle. Figure 3 The transport vehicle 100 is shown to have a body 110, which may also have a structure divided into unit bodies arranged in a forward-reverse direction (referring to the X-axis direction). For example, the body 110 may also be composed of a front body and a rear body respectively fitted with wheels 120 as unit bodies.

[0058] The crane assembly 200 includes a hoist housing 210. The hoist housing 210 is connected to the transport vehicle 100 below the travel track 10. The upper part of the hoist housing 210 can be connected to the lower part of the vehicle body 110 via one or more connectors. The hoist housing 210 is formed as an open structure having a receiving space 212 that provides for accommodating the FOUP and allows the FOUP to move inward and outward within the receiving space 212. The hoist housing 210 has a structure that is open on the left, right, and lower sides, allowing the FOUP housed in the receiving space 212 to move outward in the left-right direction (referring to the Y-axis direction) or downward in the up-down direction (referring to the Z-axis direction) and be located outside the receiving space 212.

[0059] The crane device 200 also includes a gripper unit 220 for clamping or releasing the FOUP and a unit drive component for changing the position and orientation of the gripper unit 220. The unit drive component includes a lifting drive unit 230, a rotation drive unit 240, and a horizontal drive unit 250. The gripper unit 220 can be moved by the lifting drive unit 230 or the horizontal drive unit 250 to change the position of the FOUP clamped by the gripper unit 220. Additionally, the gripper unit 220 can be rotated by the rotation drive unit 240 to change the orientation of the FOUP clamped by the gripper unit 220.

[0060] The gripper unit 220 includes a gripper base 221 and a gripper 222. The gripper base 221 is configured to support the gripper 222 on its upper side. The gripper base 221 may have an entirely flat upper surface. The gripper base 221 may be provided as a housing with an entirely flat upper surface to house the gripper drive mechanism. The gripper 222 is provided below the gripper base 221. The gripper 222 is configured to perform clamping and releasing on the FOUP via the gripper drive mechanism.

[0061] The lifting drive unit 230 moves the gripper unit 220 in a vertical direction (referring to the Z-axis direction), causing the FOUP gripped by the gripper unit 220 to rise or fall. This lifting drive unit 230 includes a lifting base 231 and lifting mechanisms 232 and 233. The lifting base 231 is disposed above the gripper base 221. The lifting base 231 has a downward side facing the upper side of the gripper base 221. The lower side of the lifting base 231 can be formed as a single flat surface. The lifting mechanisms 232 and 233 include a belt 232, a rotating roller 233, and a motor. One end of the belt 232 is connected to the upper side of the gripper base 221. The other side of the belt 232 winds or unwinds relative to the rotating roller 233 along the rotation direction of the rotating roller 233, which is driven by the motor, causing the gripper unit 220 to rise or fall relative to the lifting base 231. The lifting base 231 can be configured to have a flat, solid housing that internally houses the rotating roller 233 and the motor, and has an opening on the flat underside for the strap 232 to pass through. Multiple straps 232 and rotating rollers 233 can be provided and configured to be spaced apart from each other. For reference, the strap 232 does not simply refer to a strip-shaped component, but can be a concept including alternative components such as a rope that can be wound or unwound relative to the rotating roller 233 for the lifting and lowering of the gripper unit 220.

[0062] The rotary drive unit 240 rotates the gripper unit 220 around an axis in the vertical direction (referring to the Z-axis direction), changing the posture of the gripper unit 220 or the posture of the FOUP clamped by the gripper unit 220. The rotary drive unit 240 is connected above the lifting base 231, causing the lifting drive unit 230 to rotate around an axis in the vertical direction, thereby enabling the gripper unit 220 to rotate.

[0063] The horizontal drive unit 250 moves the gripper unit 220 in the left-right direction (with reference to the Y-axis direction). The horizontal drive unit 250 is connected above the rotary drive unit 240, and moving the rotary drive unit 240 in the left-right direction causes the lifting drive unit 230 to move in the same direction, thereby enabling the gripper unit 220 to move in the left-right direction. The horizontal drive unit 250 can be provided above the receiving space 212.

[0064] Figure 4 The gripper unit 220 that clamps the FOUP moves in the left-right direction (referring to the Y-axis direction) via the horizontal drive unit 250, and the position of the FOUP changes from inside the receiving space 212 to the outside. Figure 5 The gripper unit 220 that clamps the FOUP moves in the vertical direction (referring to the Z-axis direction) via the lifting drive unit 230, while the FOUP moves from... Figure 4 The position has dropped.

[0065] Depending on the implementation conditions, at least one of the rotary drive unit 240 and the horizontal drive unit 250 may be removed from the unit drive component.

[0066] In order to clamp the FOUP to be transferred via the gripper unit 220, the transport vehicle 20 can lower the gripper unit 220, moving it from inside the receiving space 212 to the outside. At this time, depending on the position and posture of the FOUP, the gripper unit 220 can be additionally moved either left-right (referring to the Y-axis direction) via the horizontal drive unit 250, or rotated around the vertical (referring to the Z-axis direction) axis via the rotation drive unit 240. Afterwards, if the gripper unit 220 clamps the FOUP, the transport vehicle 20 raises the gripper unit 220, accommodating the FOUP within the receiving space 212 (referring to...). Figure 2 as well as Figure 3 In order to transport the FOUP to the target location, it moves along the transport path 11. During the transport of the FOUP, various factors such as the movement of the wheels 120 on the travel track 10 and the acceleration or deceleration of the transport vehicle 100 may cause the gripper unit 220 to shake, which may damage the substrate stored in the FOUP held by the gripper unit 220.

[0067] To prevent damage to the substrate stored in the FOUP due to vibrations or other factors during the movement of the transport vehicle 100 and its transport of the FOUP, the article transport device according to an embodiment of the present invention further includes restraint units 260 and 270 for securing the raised gripper unit 220 to the lifting drive unit 230. These restraint units 260 and 270 constitute a crane device 200, which can prevent movement of the gripper unit 220 during the movement of the transport vehicle 100 through restraint.

[0068] The structure and operation of restraint units 260 and 270 are shown in Figures 6 to 10 .

[0069] Reference Figures 6 to 8The restraint units 260 and 270 include contact protrusions 260 and contact pads 270 that come into close contact with or disengage from each other as the gripper unit 220 rises and falls. The contact protrusions 260 are provided in either the gripper unit 220 or the lifting drive unit 230 and are formed facing the other side of the gripper unit 220 or the lifting drive unit 230. The contact pad 270 in the other of the gripper unit 220 or the lifting drive unit 230 is provided facing the front of the contact protrusion 260. The gripper unit 220 includes a contact surface 271 that contacts and abuts against a contact end 261 including the front end of the contact protrusion 260 to restrain the gripper unit 220 when it rises via the lifting drive unit 230. The contact pad 270 is configured to provide excellent vibration damping, at least for the contact surface 271. The contact pad 270 may provide vibration damping by being at least made of an elastically deformable material. For example, the elastic material may include natural rubber, synthetic rubber, or soft synthetic resin. Furthermore, as an elastic material, a material that can convert vibration energy into heat energy caused by friction (friction between contact protrusion 260 and contact pad 270) can be selected to suppress vibration.

[0070] Regarding the contact protrusions 260 and contact pads 270 of this structure, when the motor of the lifting drive unit 230 operates and the rotating roller 233 rotates in the winding direction, the belt 232 winds around the rotating roller 233 and clamps the gripper unit 220 of the FOUP as it rises. Then, the contact end 261 and the contact surface 271 come into contact with each other and adhere tightly, and the gripper unit 220 is bound to the lifting drive unit 230. Therefore, it is possible to prevent the gripper unit 220 from rising excessively and colliding with the lifting drive unit 230, to prevent the movement of the rising gripper unit 220, and to suppress the transmission of vibrations generated during the movement of the transport vehicle 100 to the gripper unit 220.

[0071] A contact protrusion 260 is provided below the lifting base 231. The contact protrusion 260 extends vertically (referring to the Z-axis direction) and protrudes from below the lifting base 231 towards above the gripper base 221. The contact protrusion 260 may also be integrally provided with the lifting base 231. A contact pad 270 is provided above the gripper base 221, facing the contact protrusion 260. The contact pad 270 may be detachably attached to the gripper base 221. Regarding the contact pad 270, the contact surface 271 that contacts the contact end 261 is made of an elastic material, thus minimizing damage to the contact surface 271. If the contact pad 270 is damaged, the gripper unit 220 is lowered, allowing the damaged contact pad 270 to be positioned at a height easily accessible for replacement.

[0072] If the gripper unit 220 rises and the contact end 261 and the contact face 271 are tightly pressed together, then as Figure 10As shown, in the contact surface 271, the recess 275 is formed in a shape corresponding to the contact end 261, due to the elastically deformable point of the contact surface 271 and the point where the contact end 261 presses the contact surface 271 through a pressing action. That is, the recess 275 is formed by the elastic deformation of the contact surface 271 based on the pressure of the contact end 261. If the gripper unit 220 descends and releases the pressure of the contact end 261 on the contact surface 271, the original shape of the contact end 261 is restored. The recess 275 can be formed with a bottom 276 and a flange 277 protruding from the periphery of the bottom 276. According to the recess 275, the restraint units 260 and 270 provide excellent vibration damping (vibration absorption) for both vertical (referring to the Z-axis direction) and horizontal vibrations, thereby actively cutting off the transmission of vibration through the gripper unit 220 to the FOUP and the substrate housed therein. Furthermore, the flange 277 of the recess 275 can actively prevent the movement of the rising gripper unit 220.

[0073] Reference Figure 9 The contact surface 271 has an arrangement area 272 for setting the contact end 261, and a guide surface 273 for guiding the contact end 261 into the arrangement area 272, so that the contact end 261 can be accurately set in the arrangement area 272.

[0074] Reference Figures 8 to 10 To simplify the structure, the contact pad 270 has two guide surfaces 273. The two guide surfaces 273 are arranged in either horizontal direction on both sides with respect to the arrangement area 272. Both guide surfaces 273 are configured to face downward toward the arrangement area 272. To simplify the contact pad 270, the contact surface 271 is formed with a structure that is open on both sides in a horizontal direction orthogonal to the arrangement direction of the guide surfaces 273 with respect to the arrangement area 272.

[0075] The guide surfaces 273 facing downward toward the arrangement area 272 can also be curved surfaces, but they are formed as inclined surfaces. The contact end 261 is formed with a curved surface 262 that contacts the guide surfaces 273 on both sides provided by the inclined surface. Based on the curved surface 262 of the contact end 261 and the inclined guide surfaces 273 of the contact surface 271, the entry guidance of the contact end 261 into the arrangement area 272 can be performed more naturally.

[0076] Reference Figure 6 , Figure 7 Multiple restraint units 260 and 270 are provided in a spaced-apart manner, which can effectively cut off the vibration transmission to the gripper unit 220 and more actively prevent the movement of the gripper unit 220.

[0077] At least two of the binding units 260 and 270 are configured such that the guide surfaces 273 are arranged in different directions. For example, at least two of the binding units 260 and 270 may have guide surfaces 273 arranged in directions that are orthogonal to each other. Specifically, such as Figure 6 As shown, some of the restraining units 260 and 270, whose guide surfaces 273 are arranged orthogonally to each other, are configured such that the guide surfaces 273 are arranged in the Y-axis direction while the remaining guide surfaces 273 are arranged in the X-axis direction. Thus, if at least any two restraining units 260 and 270 are configured with different guide surface 273 orientations, even if a relatively large external force (i.e., a horizontal force that is difficult to suppress the movement of the rising gripper unit 220 solely through the recess 275) acts on the gripper unit 220 from any direction, the movement of the gripper unit 220 can be reliably prevented by the guide surfaces 273 with different orientations.

[0078] Reference Figure 6 The restraint units 260 and 270 can be three in number, and are configured such that the virtual line L connecting their respective arrangement areas 272 forms a triangle in the central region between the gripper base 221 and the lifting base 231. With this triangular configuration, the movement of the rising gripper unit 220 can be stably suppressed by the smallest restraint units 260 and 270.

[0079] On the other hand, regarding the lifting drive unit 230, when the rotating roller 233 is rotated by the motor to raise the gripper unit 220, if the load acting on the motor is above a predetermined set value, the motor can be stopped. This can be achieved by the vehicle control unit that controls the operation of the transport vehicle 20. When the gripper unit 220 rises, if the load acting on the motor is above the set value, the vehicle control unit determines that the contact end 261 of the contact protrusion 260 and the contact surface 271 of the contact pad 270 are in a state of tight contact (the gripper unit 220 is fully raised), and stops the motor, thereby accurately preventing motor overload.

[0080] The present invention has been described above, but it is not limited to the disclosed embodiments and accompanying drawings. Those skilled in the art can make various modifications without departing from the scope of the inventive concept. Furthermore, the technical concepts described in the embodiments of the present invention can be implemented independently or in combination of two or more.

Claims

1. A vehicle for transporting goods, comprising: The transport vehicle is able to travel along a track. And a crane device that supports the items on the underside of the transport vehicle. The crane device includes: The gripper unit clamps or releases the item; A lifting drive unit, located above the gripper unit, causes the gripper unit to rise and fall; and The restraint unit, when the gripper unit rises, restrains the gripper unit to the lifting drive unit. The restraint unit includes: The contact protrusion is provided in either the gripper unit or the lifting drive unit, facing the other side; and A contact pad, provided in another of the gripper unit and the lifting drive unit, faces the contact protrusion and has a contact surface that abuts against the contact end of the contact protrusion to restrain the gripper unit when the gripper unit rises. The contact surface has an arrangement area for the contact end, and a guide surface for guiding the contact end into the arrangement area. The guide surfaces are two in number and arranged horizontally on either side of the arrangement area, with each surface facing downwards toward the arrangement area. The restraint units are multiple and spaced apart from each other. At least two of the plurality of restraint units are configured such that the guide surfaces are arranged in different directions.

2. The article transport vehicle according to claim 1, wherein, The contact pad, at least the contact surface, is made of a vibration-damping material.

3. The article transport vehicle according to claim 1, wherein, The restraint unit is configured to resist vibrations in both the vertical and horizontal directions.

4. The article transport vehicle according to claim 3, wherein, The contact pad is at least made of an elastic material on the contact surface, and when the contact end and the contact surface are in close contact, a recess is formed on the contact surface by elastic deformation.

5. The article transport vehicle according to claim 1, wherein, Each of the guide surfaces is formed as an inclined surface.

6. The article transport vehicle according to claim 1, wherein, The contact end is formed with a curved surface.

7. The article transport vehicle according to claim 1, wherein, The restraint unit comprises three units, and is configured such that the virtual lines connecting the various arrangement areas form a triangle in the central region between the gripper unit and the lifting drive unit.

8. The article transport vehicle according to claim 1, wherein, At least two of the plurality of binding units are configured such that the orientation of the guide surfaces is orthogonal to each other.

9. The article transport vehicle according to claim 1, wherein, In the contact face. The guide surfaces are two in number and arranged horizontally on either side of the arrangement area, with each surface facing downwards toward the arrangement area. Based on the arrangement area, the two sides in the horizontal direction orthogonal to the arrangement direction of the guide surface are respectively open.

10. The article transport vehicle according to claim 1 or 4, wherein, If the load acting on the gripper unit when it rises is above a set value, the lifting drive unit stops lifting the gripper unit.

11. The article transport vehicle according to claim 1 or 4, wherein, The contact protrusion is provided in the lifting drive unit. The contact pad is provided to the gripper unit.

12. The article transport vehicle according to claim 2 or 4, wherein, The material includes rubber or soft synthetic resin.

13. A vehicle for transporting goods, comprising: The transport vehicle is able to travel along a track. And a crane device that supports the items on the underside of the transport vehicle. The crane device includes: The gripper unit has a gripper that performs clamping and releasing on the article and a gripper base that supports the gripper on the upper side; A lifting drive unit includes a lifting base disposed on the upper side of the gripper base and a lifting mechanism for raising and lowering the gripper unit relative to the lifting base using a strap wound or unwound relative to a rotating roller; and Multiple restraint units, when the gripper unit rises, restrain the gripper base to the lifting base. Each of the restraint units includes: The contact protrusion protrudes from below the lifting base toward above the gripper base; and A contact pad is provided above the gripper base, facing the contact protrusion, and having a contact surface that abuts against the contact end of the contact protrusion when the gripper unit rises. At least the contact surface is made of an elastic material, and when the contact end and the contact surface are in contact, a recess is formed on the contact surface through elastic deformation. In each of the aforementioned restraint units, the contact surface has an arrangement area for the contact end, and a guide surface for guiding the contact end into the arrangement area. Two guide surfaces are provided, arranged horizontally on either side of the arrangement area, and each is positioned downwards towards the arrangement area. The restraint unit comprises three units, and is configured such that the virtual lines connecting the various arrangement areas form a triangle in the central region between the hand gripper base and the lifting base. Any one of the three binding units and the remaining two are configured such that the orientation of the guide surfaces is orthogonal to each other.

14. An article conveying device, comprising: The travel track provides a transport path for items on the side of the ceiling; as well as At least one article transport vehicle according to any one of claims 1 to 13.

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