Platform feet and load bearing devices

Abstract

This invention discloses a platform support, including, for example: a support base, including a first end of the support base, the first end of the support base having a first through hole along a first direction; a ball joint, including opposing rod ends and a ball end, the ball end having a first ball head, the rod end passing through the first through hole, the ball end extending out of the first through hole along the first direction, and the first ball head located outside the first through hole; and a ball joint seat connected to the ball end, the ball joint seat including a first side surface, the first side surface having a first spherical groove, the first ball head of the ball end being embedded in and abutting against the first spherical groove, the first ball head being movable relative to the ball joint seat within the first spherical groove. This invention enables a tight connection between the platform support and the platform support when the platform tilts slightly due to different heights, thereby preventing the platform from twisting due to excessive constraint caused by tilting.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment, and more particularly to a platform support and a support device. Background Technology

[0002] In semiconductor equipment, common displacement or support devices are required. These devices are prone to issues where the height of the legs differs when the support surface is moved or changed. However, because the legs are fixedly connected to the support surface, when multiple legs are at different heights, the support surface can become distorted due to excessive tilting. Summary of the Invention

[0003] In view of at least some of the problems and deficiencies in the prior art, embodiments of the present invention disclose a platform support leg and a bearing device to solve the problem of the bearing platform twisting due to the different heights of the platform support legs.

[0004] On one hand, an embodiment of the present invention provides a platform support leg, for example including: a support base, including a first end of the support base, the first end of the support base being provided with a first through hole along a first direction; a ball joint, including opposing rod ends and a ball joint end, the ball joint end being provided with a first ball head, the rod end passing through the first through hole, the ball joint end extending out of the first through hole along the first direction, and the first ball head being located outside the first through hole; a ball joint seat, connected to the ball joint end, the ball joint seat including a first side surface, the first side surface being provided with a first spherical groove, the first ball head of the ball joint end being embedded in and abutting against the first spherical groove, the first ball head moving relative to the ball joint seat within the first spherical groove.

[0005] The embodiments of the present invention use a ball joint connection structure formed by a ball joint rod and a ball joint seat to ensure that the support platform and the platform support are tightly connected even when the support platform tilts slightly due to different heights, thus avoiding the twisting of the support platform due to excessive constraint caused by tilting.

[0006] In one embodiment of the present invention, the first spherical head includes an end face and a peripheral side face surrounding the end face, wherein the end face is a plane and the peripheral side face is a spherical surface; wherein the first spherical groove has the same arc radius as the peripheral side face.

[0007] In one embodiment of the present invention, the platform support leg further includes an adjustment ring, the adjustment ring including an adjustment ring first end and an adjustment ring second end disposed opposite to each other, the adjustment ring first end being sleeved on the outside of the first end of the support base and threadedly connected to the first end of the support base, and the adjustment ring second end being sleeved on the outside of the ball head rod and threadedly connected to the ball head rod.

[0008] In one embodiment of the present invention, the platform support leg further includes a locking member, and the first end of the support base is provided with a second through hole along the second direction, the second through hole communicating with the first through hole, the locking member being disposed in the second through hole and abutting against the ball joint; the first direction is perpendicular to the second direction.

[0009] In one embodiment of the present invention, the platform support leg further includes a movable component. The first end of the support base is provided with a third through hole along a third direction, and the ball joint is provided with a fourth through hole that matches the third through hole. The movable component passes through the third through hole and is fixedly connected to the fourth through hole. The diameter of the third through hole along the first direction is larger than the diameter of the third through hole along the third direction. The movable component can move in the third through hole along the first direction under the drive of the ball joint. The first direction is perpendicular to the third direction.

[0010] In one embodiment of the present invention, a first internal thread is provided on the inner wall of the first end of the adjusting ring, a second internal thread is provided on the inner wall of the second end of the adjusting ring, a first external thread is provided on the first end of the support base, and a second external thread is provided on the portion of the ball end extending out of the first through hole. The first internal thread and the first external thread are threadedly connected, and the second internal thread and the second external thread are threadedly connected; wherein a differential thread is formed between the first external thread and the second external thread.

[0011] On the other hand, an embodiment of the present invention provides a supporting device, for example including: a supporting platform and any of the aforementioned platform legs, the supporting platform including a supporting surface, the first side of the ball head seat also being provided with an extension surrounding the first spherical groove, the extension abutting against the side of the supporting platform away from the supporting surface.

[0012] In one embodiment of the present invention, the platform has at least three legs.

[0013] In one embodiment of the present invention, the platform support leg further includes a fixing member, the ball head seat is provided with a fifth through hole along the first direction, the ball head end is provided with a sixth through hole corresponding to the fifth through hole along the first direction, and the fixing member passes through the fifth through hole and is threadedly connected to the sixth through hole.

[0014] In one embodiment of the present invention, the platform support leg further includes a pressure plate and a ball joint washer. The pressure plate is disposed on the side of the support platform away from the ball joint seat, and the ball joint washer is disposed on the side of the pressure plate away from the ball joint seat. The pressure plate is provided with a seventh through hole corresponding to the fifth through hole along the first direction, and the ball joint washer is provided with an eighth through hole corresponding to the seventh through hole along the first direction. The support platform is provided with a first connecting hole corresponding to the seventh through hole along the first direction. The fixing member passes through the eighth through hole, the seventh through hole, the first connecting hole, the fifth through hole, and is connected to the sixth through hole in sequence.

[0015] In one embodiment of the present invention, the pressure plate is provided with a second spherical groove on the side near the ball head gasket, and the ball head gasket is provided with a second ball head on the side near the pressure plate. The second ball head is embedded in and abuts against the second spherical groove, and the second ball head can move relative to the pressure plate within the second spherical groove.

[0016] In one embodiment of the present invention, the bearing device further includes an auxiliary support leg. A second connecting hole is provided on the bearing platform. The auxiliary support leg includes a plurality of clamping blocks, a pressure block and an auxiliary base. The pressure block is connected to the auxiliary base. The plurality of clamping blocks and the pressure block are disposed in the connecting hole. The plurality of clamping blocks surround the pressure block and simultaneously abut against the pressure block and the inner wall of the second connecting hole.

[0017] As can be seen from the above, the technical features of the present invention can have one or more of the following beneficial effects: the ball joint connection structure formed by the ball joint rod and the ball joint seat ensures that even when the support platform tilts slightly due to different platform legs, the support platform and the platform legs can still be tightly connected, avoiding the twisting of the support platform due to excessive constraint due to tilt; the relative distance between the ball joint rod and the support base can be adjusted by setting an adjustment ring; the reciprocating movement of the ball joint rod in the first direction can be restricted by setting a movable part and a waist-shaped hole; the ball joint rod can be locked in the second direction by setting a locking part; and the ball joint connection structure between the ball joint washer and the pressure plate can further prevent the support platform from twisting due to excessive constraint due to tilt. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1This is a structural schematic diagram of a support device provided in an embodiment of the present invention.

[0020] Figure 2 This is a schematic diagram of the structure of a platform support provided in an embodiment of the present invention.

[0021] Figure 3 This is a cross-sectional structural diagram of a platform support provided in an embodiment of the present invention.

[0022] Figure 4 This is a cross-sectional structural diagram illustrating the relative positional relationship between the ball joint and the ball joint seat provided in an embodiment of the present invention.

[0023] Figure 5 This is a schematic diagram of another cross-sectional structure of a platform support provided in an embodiment of the present invention.

[0024] Figure 6 A cross-sectional structural schematic diagram of a bearing device provided in an embodiment of the present invention.

[0025] Figure 7 This is a cross-sectional structural diagram illustrating the relative positional relationship between the ball-head gasket and the pressure plate provided in an embodiment of the present invention.

[0026] Figure 8 for Figure 6 A magnified view of part A in the diagram.

[0027] Figure 9 This is a schematic diagram of an auxiliary support leg provided in an embodiment of the present invention.

[0028] Figure 10 for Figure 6 A magnified view of part B in the diagram.

[0029] Explanation of key component symbols:

[0030] 10-Bearing device;

[0031] 100 - Platform leg; 101 - Base plate; 110 - Support base; 111 - First end of support base; 112 - Cavity; 113 - Through hole; 114 - First through hole; 115 - Second through hole; 116 - Third through hole; 120 - Ball head; 121 - Rod end; 122 - Ball head end; 1221 - First ball head; 1222 - End face; 1223 - Peripheral side; 1224 - Sixth through hole; 123 - Fourth through hole; 124 - Placement part ; 130-Ball head seat; 131-First side surface; 132-First spherical groove; 133-Extension; 134-Fifth through hole; 140-Adjusting ring; 141-First end of adjusting ring; 142-Second end of adjusting ring; 150-Modible part; 160-Locking part; 170-Pressure plate; 171-Second spherical groove; 172-Seventh through hole; 180-Ball head washer; 181-Second ball head; 182-Eighth through hole; 190-Fixing part;

[0032] 200-Auxiliary support leg; 201-Base plate; 210-Auxiliary base; 211-First end of auxiliary base; 212-Through hole; 220-Clamping block; 230-Pressure block; 231-Through hole; 240-Shim; 241-Through hole; 250-Fixing component;

[0033] 300 - Support platform; 301 - Support surface; 302 - First connecting hole; 303 - Second connecting hole. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0035] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0036] It should also be noted that the division of multiple embodiments in this invention is only for the convenience of description and should not constitute a special limitation. Features in various embodiments can be combined and referenced in each other without contradiction.

[0037] See Figure 1 The support device 10 provided in this embodiment of the invention includes, for example, a platform support leg 100 and a support platform 300. The support platform 300 includes, for example, a support surface 301, which is used to support a device under test (DUT). The DUT can be, for example, a semiconductor or wafer under test; this invention does not limit this. The platform support leg 100 is fixedly connected to the support platform 300 and supports the support platform 300. The platform support leg 100 is provided with, for example, a ball joint 120 and a ball joint seat 130, which form, for example, a ball joint connection structure (i.e., a power transmission mechanical structure that uses a ball to connect different axes).

[0038] By setting up platform legs with ball joints and ball joints, it is possible to ensure a tight connection between the platform and the legs even when the platform tilts slightly due to different heights, thus preventing the platform from twisting due to excessive constraint caused by tilting.

[0039] As mentioned above, in terms of distance, the number of platform legs 100 is, for example, no less than three, so that the plane on which the support platform 300 is located can be determined by no less than three platform legs 100, thereby providing solid support for the support platform 300.

[0040] Further, see Figure 2 The diagram illustrates the structure of a platform support 100 provided in an embodiment of the present invention. The platform support 100 includes, for example, a support base 110, a ball joint rod 120, a ball joint seat 130, an adjusting ring 140, a movable component 150, a locking component 160, a pressure plate 170, a ball joint washer 180, and a fixing component 190. Specifically, the platform support 100 may also include a base plate 101, which may be connected to a horizontal surface such as the mounting platform of the testing equipment, or the base plate 101 may be directly mounted on the ground or other horizontal surface; this application does not limit this. The support base 110 is located, for example, at the end of the base plate 101 away from the horizontal surface, and the support base 110 serves, for example, to bear the weight of the support platform 300 and provide primary support.

[0041] Further, see Figure 2 and Figure 3The support base 110 includes, for example, a first end 111, which is located away from the base plate 101. The support base 110 has, for example, a cavity 112 located at the end of the support base 110 away from the first end 111, to reduce the weight of the support base 110. The support base 110 also has, for example, multiple through holes 113, which penetrate the support base 110 either along a second direction or a third direction; this application does not limit this. The multiple through holes 113 communicate with the cavity 112 to further reduce the weight of the support base 110.

[0042] It should be noted that the second direction is, for example, Figure 2 In the y-direction, the third direction is, for example, Figure 2 The first direction is, for example, the z-direction, and the second direction intersects with the third direction, preferably the second direction is perpendicular to the third direction. Figure 2 The x-direction in the plane is defined by, for example, the first direction, which is perpendicular to the second and third directions.

[0043] As stated above, see also Figure 3 The first end 111 of the support base is provided with a first through hole 114 along a first direction, for example, and the first through hole 114 is connected to the cavity 112. The ball head rod 120 is disposed within the first through hole 114. Specifically, the ball head rod 120 includes a rod end 121 and a ball end 122 disposed opposite to each other, and the ball end 122 includes a first ball head 1221. The rod end 121 passes through the first through hole 114, and the ball end 122 extends out of the first through hole 114 along the first direction, with the first ball head 1221 located outside the first through hole 114. Furthermore, the ball joint 130 connects to the ball end 122. The ball joint 130 includes a first side surface 131, which has a first spherical groove 132. The first ball head 1221 of the ball end 122 is embedded in and abuts against the first spherical groove 132, and the first ball head 1221 can move relative to the ball joint 130 within the first spherical groove 132. That is, the ball joint rod 120 and the ball joint 130 form a ball joint connection structure. As described above, the first side surface 131 of the ball joint 130 also has an extension 133 surrounding the first spherical groove 132. The extension 133 abuts against the side of the support platform 300 away from the support surface 301. Specifically, the extension 133 and the side of the support platform 300 away from the support surface 301 are fixedly connected, for example, by threads.

[0044] In this way, the ball joint connection structure formed by the ball joint and the ball joint seat ensures that even when the platform is slightly tilted due to different platform legs, the platform and the platform legs can still be tightly connected, thus preventing the platform from twisting due to excessive constraint caused by tilting.

[0045] Further, see Figure 4 The first spherical head 1221 includes an end face 1222 and a peripheral side face 1223 surrounding the end face. The end face 1221 is a plane, and the peripheral side face 1222 is a spherical surface. Preferably, the spherical groove 132 and the peripheral side face 1222 have the same arc radius, that is, the first spherical groove 132 and the peripheral side face 1222 can fit tightly together, thereby ensuring that the first spherical groove 132 and the first spherical head 1221 fit fully together.

[0046] In addition, see also Figure 3The adjusting ring 140 includes, for example, a first adjusting ring end 141 and a second adjusting ring end 142 disposed opposite to each other. The first adjusting ring end 141 is sleeved on the outside of the first supporting base end 111 and threadedly connected to the first supporting base end 111. The second adjusting ring end 142 is sleeved on the outside of the ball head rod 120 and threadedly connected to the ball head rod 120. Specifically, the inner wall of the first adjusting ring end 141 is provided with a first internal thread, the inner wall of the second adjusting ring end 142 is provided with a second internal thread, the first supporting base end 111 is provided with a first external thread, and the portion of the ball head end 122 extending out of the first through hole 114 is provided with a second external thread. The first internal thread and the first external thread are threadedly connected, and the second internal thread and the second external thread are threadedly connected. The first external thread and the second external thread form a differential thread, allowing the relative distance between the ball head rod 120 and the support base 110 to be adjusted by rotating the adjusting ring 140. That is, the ball head rod 120 can reciprocate in a first direction within the first through hole 114 of the support base 110 under the control of the adjusting ring 140. If the first and second external threads have the same direction of rotation, the relative distance between the ball head rod 120 and the support base 110 when the adjusting ring 140 rotates one revolution is, for example, the difference in pitch between the first and second external threads. For example, the first external thread and the first internal thread are, for example, M3 threads (0.5mm pitch), and the second external thread and the second internal thread are, for example, M2.5 threads (0.45mm pitch). At this point, assuming that both the first and second external threads are right-handed, when the adjusting ring 140 rotates one full turn to the right, according to the pitch of the first external thread, the adjusting ring 140 will, for example, cause the ball joint 120 to move upward relative to the support base 110 by 0.5 mm. And according to the pitch of the second external thread, the ball joint 120 will, for example, move downward relative to the adjusting ring 140 by 0.45 mm. That is, when the adjusting ring 140 rotates one full turn to the right, the ball joint 120 will move upward relative to the support base 110 by 0.05 mm. Furthermore, the outer wall of the adjusting ring 140 may have a frosted or serrated structure to increase friction.

[0047] As stated above, see also Figure 3 The first end 111 of the support base has a second through hole 115 along the second direction (y direction in the figure), which connects to the first through hole 114. The locking member 160 is disposed in the second through hole 115 and abuts against the ball joint 120. The locking member 160 is fixedly connected to the first end of the support base, for example, by a threaded connection. That is, the locking member 160 is pressed toward the ball joint 120 along the second direction to lock the ball joint 120 in the second direction.

[0048] Further, see Figure 5The first end 111 of the support base is provided with a third through hole 116 along a third direction (z direction in the figure). The ball joint 120 is provided with a fourth through hole 123 that matches the third through hole 116. The movable member 150 passes through both the third through hole 116 and the fourth through hole 123. The movable member 150 is fixedly connected to the ball joint 120, for example, through the fourth through hole 123. Further, the diameter of the third through hole 116 along the first direction is larger than the diameter of the third through hole 116 along the third direction, so that the movable member 150 can drive the ball joint 120 to move in the third through hole 116 along the first direction. For example, the third through hole 116 is, for example, an oblong hole, and the movable member 150 is, for example, a pin. In this way, by setting the movable part 150, the movable part 150 can be fixedly connected to the ball head 120 in the second direction, thereby restricting the ball head 120 from reciprocating in the first direction within the first through hole 114; and by setting the diameter of the third through hole 116, the distance that the movable part 150 moves in the first direction within the third through hole 116 can be restricted, thereby further restricting the distance that the ball head 120 moves in the first direction within the first through hole 114.

[0049] Furthermore, see Figure 6 and Figure 7 A pressure plate 170 is provided on the side of the support platform 300 away from the ball joint 130, and a ball joint washer 180 is also provided on the side of the pressure plate 170 away from the ball joint 130. That is, the support platform 300 is, for example, positioned between the pressure plate 170 and the ball joint 130, and the pressure plate 170 applies pressure to the support platform to prevent the connection between the support platform 300 and the ball joint 130 from detaching. Further, see... Figure 7 A second spherical groove 171 is provided on the side of the pressure plate 170 near the ball head gasket 180, and a second ball head 181 is provided on the side of the ball head gasket 180 near the pressure plate 170. The second ball head 181 is embedded in and abuts against the second spherical groove 171, and the second ball head 181 can move relative to the pressure plate 170 within the second spherical groove 171. That is, a ball head connection structure is formed between the ball head gasket 180 and the pressure plate 170 to eliminate the over-constraint of the inclined plane of the bearing platform 300 away from the ball head seat 130, thereby reducing the possibility of the bearing platform 300 twisting.

[0050] In addition, see Figure 2 , Figure 7 and Figure 8The platform support leg 100 also includes a fixing member 190, such as a fixing screw. The ball joint seat 130 has a fifth through hole 134 corresponding to the fixing member 190 along a first direction; the ball joint rod 120 has a sixth through hole 1224 corresponding to the fifth through hole 134; the pressure plate 170 has a seventh through hole 172 corresponding to the fifth through hole 134; the ball joint washer 180 has an eighth through hole 183 corresponding to the seventh through hole 172; and the support platform 300 has a first connecting hole 302 corresponding to the seventh through hole 172 along the first direction. The fixing member 190 passes sequentially through the eighth through hole 182, the seventh through hole 172, the first connecting hole 302, and the fifth through hole 134, and is threadedly connected to the sixth through hole 1224 for fixation. Furthermore, referring to the figure, the ball head rod 120 is provided with a placement part 124 inside. The fixing member 190 passes through multiple through holes in sequence and is locked in the sixth through hole 1224 before entering the placement part 124.

[0051] In summary, the embodiments of the present invention, through the ball joint connection structure formed by the ball joint rod and the ball joint seat, ensure a tight connection between the support platform and the platform legs even when the support platform tilts slightly due to different heights, thus preventing the support platform from twisting due to excessive constraint of tilt. An adjusting ring is provided to adjust the relative distance between the ball joint rod and the support base. A movable part and a slotted hole are provided to restrict the reciprocating movement of the ball joint rod in the first direction within the first through hole. A locking part is provided to lock the ball joint rod in the second direction. Furthermore, the ball joint connection structure between the ball joint washer and the pressure plate further prevents the support platform from twisting due to excessive constraint of tilt.

[0052] In addition, see Figure 1 and Figure 6 The supporting device 10 also includes, for example, auxiliary legs 200, which provide auxiliary support for the support platform 300 to improve support stability. The number of auxiliary legs 200 may be, for example, multiple. Specifically, see [link to documentation]. Figure 9 and Figure 10 The auxiliary support leg 200 includes an auxiliary base 210, a clamping block 220, a pressure block 230, a gasket 240, and a fixing member 250. The auxiliary support leg 200 may also include a base plate 201, which may be connected to a horizontal surface such as the mounting platform of the testing equipment, or the base plate 201 may be directly mounted on the ground or other horizontal surface; this application does not impose any limitations on this.

[0053] Further, the auxiliary base 210 includes a first end 211 with a through hole 212. A pressure block 230 is disposed at the first end 211, and a through hole 231 is provided on the pressure block 230 corresponding to the through hole 212. A gasket 240 is disposed at the end of the pressure block 230 away from the auxiliary base 210, and a through hole 241 is provided on the ball-head gasket 240 corresponding to the through hole 231. A fixing member 250 passes through the through holes 241, 231, and 212 in sequence to fix the gasket 240, pressure block 230, and auxiliary base 210 together. The fixing member 250 is, for example, a fixing screw, and the gasket 240 is used, for example, to increase the contact area, reduce the pressure on the pressure block 230, and prevent loosening between the pressure block 230 and the fixing member 250.

[0054] In addition, see Figure 10 The support platform 300 is provided with a second connecting hole 303, and the ball head gasket 240, the pressure block 230, and a plurality of clamping blocks 220 are all disposed within the second connecting hole 303. Specifically, the plurality of clamping blocks 220, for example, surround the pressure block 230 and simultaneously abut against the pressure block 230 and the inner wall of the connecting hole 302 within the connecting hole 302. For example, the number of the plurality of clamping blocks 220 is, for example, eight. When both the pressure block 230 and the clamping block 220 are located within the second connecting hole 302, and the fixing member 250 is threadedly locked to the pressure block 230, the pressure block 230 exerts a force on the multiple clamping blocks 220 surrounding the pressure block 230 in a direction away from the pressure block 230. The multiple clamping blocks 220 are simultaneously subjected to the force of the pressure block 230 and the inner wall of the second connecting hole 303, thus firmly fixing the multiple clamping blocks 220 in the second connecting hole 303, thereby ensuring a stable connection between the auxiliary support leg 200 and the support platform 300. In this way, by setting the clamping block and the pressure block, the auxiliary support leg and the support platform do not need to be connected by threads, thereby reducing the possibility of the support platform twisting due to excessive constraint.

[0055] It is understood that the foregoing embodiments are merely illustrative examples of the present invention. Provided that the technical features do not conflict, the structure is not contradictory, and the purpose of the invention is not violated, the technical solutions of the various embodiments can be arbitrarily combined and used.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A semiconductor device, characterized by comprising: The device includes a support structure, which comprises a support platform, platform legs, and auxiliary legs. The platform legs support the support platform, and the auxiliary legs provide auxiliary support to the support platform. The platform legs include: A support base for bearing the load of the support platform, including a first end of the support base, wherein the first end of the support base is provided with a first through hole along a first direction; A ball-head club includes opposing club ends and a ball-head end, wherein the ball-head end is provided with a first ball head, the club end passes through a first through hole, the ball-head end extends out of the first through hole along a first direction, and the first ball head is located outside the first through hole; A ball head seat is connected to a ball head end. The ball head seat includes a first side surface, and the first side surface is provided with a first spherical groove. The first ball head end is embedded in and abuts against the first spherical groove. The first ball head end can move relative to the ball head seat within the first spherical groove. An adjusting ring, comprising a first adjusting ring end and a second adjusting ring end disposed opposite to each other, the first adjusting ring end being sleeved on the outside of the first end of the support base and threadedly connected to the first end of the support base, and the second adjusting ring end being sleeved on the outside of the ball head rod and threadedly connected to the ball head rod; The adjusting ring has a first internal thread on its inner wall at the first end, a second internal thread on its inner wall at the second end, a first external thread at the first end of the support base, and a second external thread on the portion of the ball end extending out of the first through hole. The first internal thread and the first external thread are threaded together, and the second internal thread and the second external thread are threaded together. A differential thread is formed between the first external thread and the second external thread, and the ball head rod can reciprocate within the first through hole along the first direction under the control of the adjusting ring. The support platform is provided with a second connecting hole. The auxiliary support leg includes multiple clamping blocks, pressure blocks and an auxiliary base. The pressure block is connected to the auxiliary base. The auxiliary base includes a first end. The pressure block is disposed at the first end of the auxiliary base. The multiple clamping blocks and the pressure block are disposed in the second connecting hole. The multiple clamping blocks surround the pressure block and simultaneously abut against the pressure block and the inner wall of the second connecting hole.

2. The semiconductor device of claim 1, wherein, The first spherical head includes an end face and a peripheral side face surrounding the end face, wherein the end face is a plane and the peripheral side face is a spherical surface; wherein the first spherical groove has the same arc radius as the peripheral side face.

3. The semiconductor device of claim 1, wherein, It also includes a locking component. The first end of the support base is provided with a second through hole along the second direction. The second through hole communicates with the first through hole. The locking component is disposed in the second through hole and abuts against the ball head rod. The first direction is perpendicular to the second direction.

4. The semiconductor device of claim 1, wherein, It also includes a movable component. The first end of the support base is provided with a third through hole along a third direction. The ball head rod is provided with a fourth through hole that matches the third through hole. The movable component passes through the third through hole and is fixedly connected to the fourth through hole. The diameter of the third through hole along the first direction is larger than the diameter of the third through hole along the third direction. The movable member can move within the third through hole along the first direction under the drive of the ball head rod; wherein, the first direction is perpendicular to the third direction.

5. The semiconductor device of claim 1, wherein, The support platform includes a support surface, and the first side of the ball head seat is further provided with an extension portion surrounding the first spherical groove, the extension portion abutting against the side of the support platform away from the support surface.

6. The semiconductor device of claim 1, wherein, The platform has at least three legs.

7. The semiconductor device of claim 1, wherein, The platform support also includes a fixing member. The ball head seat is provided with a fifth through hole along the first direction, and the ball head end is provided with a sixth through hole corresponding to the fifth through hole along the first direction. The fixing member passes through the fifth through hole and is threadedly connected to the sixth through hole.

8. The semiconductor device of claim 7, wherein, The platform support leg also includes a pressure plate and a ball joint washer. The pressure plate is disposed on the side of the support platform away from the ball joint seat, and the ball joint washer is disposed on the side of the pressure plate away from the ball joint seat. The pressure plate is provided with a seventh through hole corresponding to the fifth through hole along the first direction. The ball joint washer is provided with an eighth through hole corresponding to the seventh through hole along the first direction. The support platform is provided with a first connecting hole corresponding to the seventh through hole along the first direction. The fixing member passes through the eighth through hole, the seventh through hole, the first connecting hole, the fifth through hole, and is connected to the sixth through hole in sequence.

9. The semiconductor device as claimed in claim 8, characterized in that, The pressure plate has a second spherical groove on the side near the ball head gasket, and the ball head gasket has a second ball head on the side near the pressure plate. The second ball head is embedded in and abuts against the second spherical groove, and the second ball head can move relative to the pressure plate within the second spherical groove.

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