A nanoimprint method and apparatus

Abstract

The application relates to a nano-imprinting method and device, and belongs to the technical field of nano-imprinting, and solves the problems that the existing method can cause polymer overflow outside a glass base body or insufficient filling of micro-nano structures. The method comprises the following steps: (1) spraying a polymer glue layer on one side of a soft template provided with a micro-nano pattern, so that the polymer glue layer covers the micro-nano pattern, and the thickness of the polymer glue layer is greater than the thickness of the micro-nano pattern; (2) contacting the side of the soft template sprayed with the polymer glue layer with the glass base body, performing imprinting, irradiating by using an ultraviolet lamp, removing the soft film plate with the micro-nano pattern after the polymer glue layer is solidified, and leaving the polymer glue layer with the micro-nano pattern on the surface of the glass base body, so that the glass base body with the micro-nano pattern is obtained. The method can avoid polymer overflow and incomplete structure filling.

Description

Technical Field

[0001] The present invention relates to the field of nanoimprint technology, and in particular to a nanoimprint method and device. Background Art

[0002] With the rapid development of electronic information technology, AR (augmented reality) technology has also made substantial progress. Due to its inherent optical properties, AR technology can project virtual scenes onto real-world images, giving users a unique experience of combining the real and the virtual. AR technology has enormous commercial and educational value, with widespread application in education, healthcare, entertainment, and industry.

[0003] Nanoimprint technology is the mainstream technology for making AR diffraction waveguides. Nanoimprinting can be achieved through a variety of technical approaches. However, it is difficult to achieve a relatively ideal effect with existing imprinting. The existing nanoimprinting method is: polymer glue is applied on the glass substrate, and in an open environment, a soft template with micro-nano patterns is pressed on the glass substrate through an imprint roller. The polymer glue on the glass substrate is cured by UV exposure, and the micro-nano structure on the soft template can be transferred to the glass ( Figure 1 and Figure 2 As shown in the figure), the soft template with the micro-nano pattern and the glass substrate are then separated by external force, and the micro-nano structure on the soft template can be completely transferred to the glass substrate.

[0004] The existing nanoimprinting method will cause the polymer to overflow the glass substrate (such as Figure 2 The overflowed polymer glue 12 shown does not fill the micro-nano structure sufficiently, and the polymer glue reacts with oxygen and moisture in the air, causing the polymer itself to react insufficiently, thus failing to achieve a good imprinting effect. Summary of the Invention

[0005] In view of the above analysis, the embodiments of the present invention aim to provide a nanoimprinting method and apparatus to solve at least one of the following existing problems: 1. Existing nanoimprinting methods may cause the polymer to overflow outside the glass substrate; 2. The micro-nanostructure is not sufficiently filled; 3. The reaction between the polymer glue and oxygen and moisture in the air causes the polymer itself to react insufficiently.

[0006] In one aspect, an embodiment of the present invention provides a nanoimprinting method, comprising:

[0007] Spraying a polymer glue layer onto the side of the soft template provided with the micro-nano pattern, so that the polymer glue layer covers the micro-nano pattern and the thickness of the polymer glue layer is greater than the thickness of the micro-nano pattern;

[0008] The side of the soft template sprayed with the polymer glue layer is brought into contact with the glass substrate for imprinting;

[0009] Use ultraviolet light to cure the polymer glue layer;

[0010] The soft film plate with the micro-nano pattern is removed, and the polymer glue layer with the micro-nano pattern remains on the surface of the glass substrate, thereby obtaining a glass substrate with the micro-nano pattern.

[0011] Preferably, the spraying is ultrasonic spraying.

[0012] Preferably, the thickness of the polymer glue layer is 300-600 nm.

[0013] Preferably, the spraying speed is 1-3 mm / s, the spraying distance is 7-9 mm, and the spraying flow rate is 45-55 uL / min.

[0014] Preferably, the embossing and curing process is performed in an inert gas atmosphere.

[0015] Preferably, the irradiation with an ultraviolet lamp comprises: moving the ultraviolet lamp from one side of the glass substrate to the other side along the imprinting direction at a uniform speed.

[0016] Preferably, the step of bringing the side of the soft template sprayed with the polymer glue layer into relative contact with the glass substrate for imprinting comprises: placing the glass substrate on a carrier, bringing the side of the soft template sprayed with the polymer glue layer into relative contact with the glass substrate, and adsorbing both ends of the soft template on the carrier for imprinting.

[0017] On the other hand, an embodiment of the present invention provides a nanoimprinting device for implementing the above method, comprising a transparent box, a carrier, a control rod and an imprinting roller arranged in the transparent box, and an ultraviolet lamp device arranged above the outside of the transparent box; the transparent box is provided with an air inlet and an exhaust port.

[0018] Preferably, the ultraviolet lamp device includes a plurality of ultraviolet lamps of different wavelength bands, and each wavelength band of ultraviolet lamps includes a plurality of groups, each group of ultraviolet lamps is arranged in a row, and the groups of ultraviolet lamps of different wavelength bands are arranged at intervals.

[0019] Preferably, the carrier is provided with grooves at both ends of the soft template extension path, and the grooves are connected to the vacuum device.

[0020] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0021] 1. The method of the present invention first sprays polymer glue onto the side of the soft template bearing the micro-nano pattern. The soft film plate coated with the polymer glue is then embossed with a glass substrate and cured using ultraviolet light to transfer the adhesive layer bearing the micro-nano pattern to the glass substrate. When the polymer glue is sprayed onto the side of the soft template bearing the micro-nano pattern, the polymer glue is fully filled into the micro-nano pattern structure on the soft template. Furthermore, during the spraying process, an interpenetrating structure is formed between the micro-nano structure on the soft template and the glue layer. The glue layer structure does not change during the embossing process, thereby preventing glue overflow during the embossing process.

[0022] 2. In a preferred embodiment, the imprinting and curing process of the present invention is carried out in an inert gas, which can effectively avoid incomplete cross-linking reaction of the polymer glue itself caused by the reaction of substances in the polymer glue with oxygen, water molecules in the air, etc.

[0023] 3. In a preferred embodiment, during curing, the ultraviolet lamp is moved from one side of the glass substrate to the other side at a uniform speed to ensure uniform curing of the polymer glue layer.

[0024] 4. Before curing, the two ends of the soft template are adsorbed on the carrier to prevent the edges of the soft template from warping at the contact with the glass substrate, thereby further ensuring the consistency and uniformity of the micro-nano structure after curing.

[0025] In the present invention, the above-mentioned technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of the present invention will be described in the following description, and some advantages will become apparent from the description or be learned through practice of the present invention. The objectives and other advantages of the present invention can be realized and obtained through the contents particularly pointed out in the description and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings are only for the purpose of illustrating particular embodiments and are not to be considered limiting of the present invention. Like reference symbols denote like parts throughout the drawings.

[0027] Figure 1 For an existing nanoimprint device;

[0028] Figure 2 This is the existing nanoimprinting process flow chart;

[0029] Figure 3 is a nanoimprinting flow chart of the present invention;

[0030] Figure 4 This is a diagram of the spraying method of the present invention;

[0031] Figure 5 Schematic diagram of the spraying path of the present invention;

[0032] Figure 6 The nanoimprinting device of the present invention;

[0033] Figure 7 The ultraviolet lamp device of the present invention;

[0034] Figure 8 Schematic diagram of the carrier structure of the present invention;

[0035] Figure 9 This is a structural diagram of the nanopattern on the glass substrate obtained in Example 2;

[0036] Figure 10 This is a structural diagram of the nano-pattern on the glass substrate obtained in Example 3;

[0037] Figure 11 This is a structural diagram of the nanopattern on the glass substrate obtained in Comparative Example 1.

[0038] Reference numerals:

[0039] 1-Box; 2-Carrier; 21-Trough; 3-Control lever; 4-Air inlet; 5-Exhaust port; 6-Ultraviolet lamp device; 61-Ultraviolet lamp group with a wavelength of 365nm; 62-Ultraviolet lamp group with a wavelength of 395nm; 7-Imprinting roller; 8-Glass substrate; 9-Soft template; 10-Micro-nano pattern; 11-Polymer glue layer; 12-Overflowing polymer glue; 13-Gas inlet; 14-Drive motor; 15-Atomizing nozzle; 16-Oxygen concentration check table; 17-Inert gas pressure gauge; 18-Spraying path. DETAILED DESCRIPTION

[0040] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, and are not used to limit the scope of the present invention.

[0041] In existing nanoimprinting methods, when the micro-nano pattern on the soft template is imprinted with the polymer glue layer on the glass substrate, the glue layer will expand due to the insertion of the micro-nano pattern, causing the polymer to overflow from the glass substrate. In addition, the polymer glue is first spin-coated on the glass substrate. During the imprinting process, the soft template is rolled over by an imprinting roller so that the polymer glue layer on the glass substrate contacts the micro-nano pattern structure on the soft template and fills the structure. The entire imprinting process is short, and the glue has poor fluidity and cannot be completely filled into the structure, resulting in partial incompleteness of the structure after transfer. In addition, because the process is carried out in an open space, the polymer glue will react with oxygen and moisture in the air, resulting in insufficient reaction of the polymer itself, and a poor imprinting effect cannot be achieved.

[0042] Based on this, a specific embodiment of the present invention provides a nanoimprinting method, such as Figure 3 As shown, the method includes:

[0043] Spraying a polymer glue layer onto the side of the soft template provided with the micro-nano pattern, so that the polymer glue layer covers the micro-nano pattern and the thickness of the polymer glue layer is greater than the thickness of the micro-nano pattern;

[0044] The side of the soft template sprayed with the polymer glue layer is brought into contact with the glass substrate for imprinting;

[0045] Use ultraviolet light to cure the polymer glue layer;

[0046] The soft film plate with the micro-nano pattern is removed, and the polymer glue layer with the micro-nano pattern remains on the surface of the glass substrate, thereby obtaining a glass substrate with the micro-nano pattern.

[0047] Compared to existing technologies, the method of the present invention first sprays polymer glue onto the side of the soft template bearing the micro-nano pattern. The soft film plate coated with polymer glue is then embossed with a glass substrate and cured using ultraviolet light to transfer the adhesive layer bearing the micro-nano pattern to the glass substrate. When the polymer glue is sprayed onto the side of the soft template bearing the micro-nano pattern, the polymer glue is fully filled into the micro-nano pattern structure on the soft template. Furthermore, during the spraying process, an interpenetrating structure is formed between the micro-nano structure on the soft template and the glue layer. This prevents the glue layer from changing during the embossing process, thus preventing glue overflow during the embossing process.

[0048] In the present invention, the spraying method is ultrasonic spraying. Ultrasonic spraying of the polymer glue onto the soft template can achieve high thickness uniformity, a thinner coating, and high precision. Furthermore, ultrasonic spraying uses high-frequency sound waves to atomize the liquid. This allows the polymer glue to fully contact the structure on the soft template after spraying onto the soft film board, completely filling the structure with the polymer glue and avoiding incomplete filling.

[0049] Specifically, if Figure 4 As shown, the ultrasonic spraying device includes a gas inlet 13, a drive motor 14, and an atomizing nozzle 15. The ultrasonic spraying process includes: moving the soft template to the center of the spraying platform, aligning the center of the soft template with the center of the spraying platform; activating vacuum suction, completely flattening the soft template 9 and adsorbing it on the spraying platform; pointing the atomizing nozzle 15 of the ultrasonic spraying device vertically toward the soft film panel 9; activating the drive motor 14, and spraying the soft film panel 9. By controlling the spraying speed, spraying flow, spraying distance, and spraying path, uniform glue coverage within the required area is achieved.

[0050] Exemplarily, the thickness of the micro-nano pattern on the soft film board 9 is 100-250nm, such as 130nm, 150nm, 170nm, 200nm, 220nm, and 240nm; the thickness of the polymer glue layer is 300-600nm, such as 350nm, 400nm, 450nm, 500nm, and 550nm.

[0051] In the present invention, in order to meet the requirements of ultrasonic atomization spraying, the viscosity of the polymer glue layer is less than 100 cps.

[0052] In the present invention, the spraying path is preferably S-shaped, such as Figure 5 As shown, starting from one end of the soft template 9, spraying is carried out along an S-shaped path to the other end of the soft template 9. Spraying along this path can improve the uniformity of the polymer glue layer filling in the micro-nano structure and the uniformity of the thickness of the polymer glue layer.

[0053] Furthermore, the spraying speed is 1-3 mm / s, the spraying distance is 7-9 mm, and the spraying flow rate is 45-55 uL / min. This further improves the uniformity of the polymer glue layer thickness, achieving a thickness uniformity of ±2%. The thickness can be measured using a deflectometer. Thickness uniformity = [1 - (maximum value - minimum value) / average value] * 100%.

[0054] In the present invention, the embossing and curing processes are carried out in an inert gas, which can effectively avoid incomplete cross-linking of the polymer glue itself due to the reaction of substances in the polymer glue with oxygen, water molecules, etc. in the air.

[0055] In order to ensure the uniformity of curing of the polymer glue layer, the irradiation with an ultraviolet lamp includes: moving the ultraviolet lamp from one side of the glass substrate to the other side at a uniform speed along the imprinting direction.

[0056] Exemplarily, before curing, the ultraviolet lamp is moved above the position where the embossing roller starts to emboss. When curing starts, the ultraviolet lamp is moved at a constant speed from the position where the embossing roller starts to emboss to the position where the embossing roller ends.

[0057] During the imprinting process, the soft template at the front end of the glass substrate where imprinting begins will be in a suspended state. The edge where the soft template contacts the glass substrate will float due to a slight change in tension, resulting in edge warping of the soft template.

[0058] In order to prevent the edge of the soft template from warping, preferably, the step of bringing the side of the soft template sprayed with the polymer glue layer into relative contact with the glass substrate for imprinting comprises: placing the glass substrate on a carrier, bringing the side of the soft template sprayed with the polymer glue layer into relative contact with the glass substrate, and adsorbing both ends of the soft template on the carrier for imprinting.

[0059] On the other hand, the present invention also provides a nanoimprinting device for implementing the above method, such as Figure 6 As shown, it includes a transparent box 1, a carrier 2, a control rod 3 and an embossing roller 7 arranged in the transparent box 1, and an ultraviolet lamp device 6 arranged above the outside of the transparent box 1; the transparent box 1 is provided with an air inlet 4 and an exhaust port 5.

[0060] It should be noted that the control rod 3 is perpendicular to the platform 2 and is arranged at one end of the platform 2. The control rod 3 can rise and fall; the embossing roller 7 can move up and down and left and right in the transparent box 1; and the ultraviolet lamp device 6 is a movable device.

[0061] When using this device to implement nanoimprinting, the glass substrate 8 is placed at the center of the carrier 2, and the soft template 9 sprayed with polymer glue is moved into the transparent box 1, with the side sprayed with polymer glue facing the glass substrate 8. One end of the soft template 9 is connected to the upper end of the control rod 3, and the other end extends to the side of the carrier 2 opposite to the control rod 3 and contacts the edge of the glass substrate 8. The transparent box 1 is closed, the exhaust port 5 is opened, and the air in the transparent box 1 is slowly discharged. Then, the air inlet 4 is opened to allow inert gas to enter the transparent box 1, and the air inlet 4 and exhaust port 5 are closed. The embossing roller 7 descends until it is pressed against the position where the soft template 9 contacts the glass substrate 8, and embossing begins. The embossing roller 7 moves along the glass substrate 8 from the end away from the control rod 3 to the end close to the control rod 3 for embossing. At the same time, the control rod 3 descends synchronously. When embossing is completed, the top of the control rod 3 is lowered to the position of the carrier 2; the ultraviolet lamp in the ultraviolet lamp device 6 is turned on, and the ultraviolet lamp device 6 moves at a constant speed from above the starting position of embossing to above the ending position of embossing to complete curing; then the embossing roller 7 moves along the glass substrate 8 from the end close to the control rod 3 back to the end away from the control rod 3. At the same time, the control rod 3 rises synchronously to separate the soft template 9 from the glass substrate 8, and the cured polymer glue layer remains on the glass substrate 8.

[0062] In order to ensure the inert gas environment in the transparent box 1, an oxygen concentration check gauge 16 and an inert gas pressure gauge 17 are provided on the transparent box 1. The oxygen concentration check gauge 16 is used to monitor the oxygen concentration in the transparent box 1, and the inert gas pressure gauge 17 is used to monitor the pressure of the inert gas in the transparent box 1.

[0063] To prevent the polymer glue from reacting with oxygen, the oxygen concentration within the transparent box 1 is kept below 1%, and the pressure within the transparent box 1 is kept between 0.7 and 1.0 kPa. Oxygen, being heavier than nitrogen, sinks to the bottom of the box. Only under a certain pressure can nitrogen enter the bottom of the box and expel the oxygen. Too much pressure can trap the oxygen at the bottom, preventing it from escaping. Too little pressure can weaken the nitrogen's flow.

[0064] In order to meet the requirements of different polymer glues for ultraviolet light of different wavelengths to complete the photopolymerization reaction, the ultraviolet lamp device 6 includes a plurality of ultraviolet lamps of different wavelengths, and each ultraviolet lamp of each wavelength includes a plurality of groups, each group of ultraviolet lamps is arranged in a row, and the ultraviolet lamp groups of different wavelengths are arranged at intervals, such as Figure 7 As shown in the figure, the staggered arrangement of UV lamps of different wavelengths can further ensure the uniformity of curing.

[0065] For example, Figure 7 As shown, the ultraviolet lamp device 6 includes an ultraviolet lamp group 61 with a wavelength of 365 nm and an ultraviolet lamp group 62 with a wavelength of 395 nm, and the ultraviolet lamp groups with the two wavelengths are arranged alternately.

[0066] In order to prevent the soft template 9 from warping, the carrier 2 is provided with grooves 21 at both ends of the soft template extension path, and the grooves 21 are connected to the vacuum device. Figure 8 As shown, the grooves 21 are located on both sides of the position where the glass substrate 8 is placed. When the embossing roller 7 descends until it presses against the contact position between the soft template 9 and the glass substrate 8, before the start of embossing, the grooves 21 near the embossing start position are vacuumed, so that the soft template 9 covering the grooves 21 is adsorbed on the carrier 2. After the embossing is completed, when the top end of the control rod 3 is lowered to the position of the carrier 2, the grooves 21 near the embossing end position are vacuumed, so that the soft template 9 covering the grooves 21 is adsorbed on the carrier 2, and then curing begins.

[0067] For example, the groove body 21 includes a plurality of longitudinal grooves arranged in parallel and a transverse groove for connecting the plurality of longitudinal grooves. This structure enables the groove body 21 to generate a uniform adsorption force on the soft template 9, thereby avoiding damage to the soft template 9.

[0068] Furthermore, when evacuating the tank body 21, the vacuum degree is less than 1000 Pa, which can prevent the soft template 9 from being adsorbed and leaving a tank mark.

[0069] The nanoimprinting method and apparatus of the present invention are further described below through specific examples.

[0070] Example 1

[0071] A nanoimprinting device includes a transparent box 1, a carrier 2, a control rod 3 and an embossing roller 7 arranged in the transparent box 1, and an ultraviolet lamp device 6 arranged above the outside of the transparent box 1; the transparent box 1 is provided with an air inlet 4 and an exhaust port 5; the control rod 3 is perpendicular to the carrier 2 and is arranged at one end of the carrier 2, and the control rod 3 can rise and fall; the embossing roller 7 can move up and down and left and right in the transparent box 1; the ultraviolet lamp device 6 is a movable device; the transparent box 1 is provided with an oxygen concentration check meter 16 and an inert gas pressure gauge 17; the ultraviolet lamp device 6 includes multiple ultraviolet lamps of different bands, each band of ultraviolet lamps includes multiple groups, each group of ultraviolet lamps is arranged in a row, and the ultraviolet lamp groups of different bands are arranged at intervals; the carrier 2 is provided with grooves 21 at both ends of the soft template extension path, and the grooves 21 are connected to a vacuum device; the grooves 21 include multiple longitudinal grooves arranged in parallel and a transverse groove for connecting the multiple longitudinal grooves.

[0072] Example 2

[0073] A nanoimprinting method comprising:

[0074] (1) using ultrasonic spraying to spray a polymer glue layer onto the side of the soft template provided with the micro-nano pattern, so that the polymer glue layer covers the micro-nano pattern, and the thickness of the polymer glue layer is greater than the thickness of the micro-nano pattern, the thickness of the micro-nano pattern is 200 nm, the thickness of the polymer glue layer is 320 nm, the viscosity of the polymer glue layer is 84 cps, and the spraying path is S-shaped, starting from one end of the soft template 9 and spraying to the other end of the soft template 9 along the S-shaped path, the spraying speed is 2 mm / s, the spraying distance is 8 mm, and the spraying flow rate is 50 uL / min;

[0075] (2) Use the nanoimprinting device described in Example 1 to perform imprinting and curing: place the glass substrate 8 at the center of the carrier 2, move the soft template 9 sprayed with polymer glue into the transparent box 1, with the side sprayed with polymer glue facing the glass substrate 8, one end of the soft template 9 is connected to the upper end of the control rod 3, and the other end extends to the side of the carrier 2 opposite to the control rod 3 and contacts the edge of the glass substrate 8, close the transparent box 1, open the exhaust port 5, wait for the air in the transparent box 1 to be slowly discharged, and then open the air inlet 4 to allow nitrogen to enter the transparent box 1, monitor the oxygen concentration in the transparent box 1 through the oxygen concentration check meter 16 to be less than 1%, and the pressure in the transparent box 1 is 0.8KPa; close the air inlet 4 and the exhaust port 5. The embossing roller 7 is lowered until it is pressed against the position where the soft template 9 contacts the glass substrate 8. Before starting the embossing, the groove 21 near the embossing start position is vacuumed so that the soft template 9 covering the groove 21 is adsorbed on the carrier 2. Then the embossing roller 7 moves along the glass substrate 8 from the end away from the control rod 3 to the end close to the control rod 3. At the same time, the control rod 3 is synchronously lowered. When the embossing is finished, the top of the control rod 3 is lowered to the position of the carrier 2. The groove 21 near the embossing end position is vacuumed so that the soft template 9 covering the groove 21 is adsorbed on the carrier 2. On the top, the vacuum degree of the groove body 21 is less than 1000 Pa to prevent the soft template 9 from being adsorbed and leaving a groove mark; the ultraviolet lamp of the corresponding band in the ultraviolet lamp device 6 is turned on, and the ultraviolet lamp device 6 moves at a constant speed from above the imprinting start position to above the imprinting end position to complete the curing; then the embossing roller 7 moves along the glass substrate 8 from the end close to the control rod 3 to the end away from the control rod 3. At the same time, the control rod 3 rises synchronously to separate the soft template 9 from the glass substrate 8, and the cured polymer glue layer remains on the glass substrate 8 to obtain a glass substrate with nano-patterns.

[0076] In Example 2, the thickness uniformity of the polymer glue layer sprayed on the side of the soft template with the micro-nano pattern is 2%, and there is no glue overflow during the imprinting process. The structure of the nano-pattern on the glass substrate prepared in Example 2 is shown in FIG. Figure 9 As shown in the figure, it can be seen that the structure is uniform, complete and consistent.

[0077] Example 3

[0078] Nanoimprinting was performed according to the method of Example 2, except that two-fluid spraying was used instead of ultrasonic spraying.

[0079] The structure of the nano-pattern on the glass substrate obtained in Example 3 is shown in FIG. Figure 10 As shown, it can be seen that compared with Example 2, the integrity and uniformity of the structure are slightly worse.

[0080] Example 4

[0081] Nanoimprinting was performed according to the method of Example 2, except that the ultrasonic spraying path was not an S path, but after each row was sprayed, another row was sprayed.

[0082] The thickness uniformity of the polymer glue layer sprayed on the side of the soft template provided with the micro-nano pattern in Example 4 is 4%, which is slightly worse than that in Example 2.

[0083] Example 5

[0084] Nanoimprinting was performed according to the method of Example 2, except that the spraying speed was 5 mm / s.

[0085] The thickness uniformity of the polymer glue layer sprayed on the side of the soft template provided with the micro-nano pattern in Example 5 is 3.5%, which is slightly worse than that in Example 2.

[0086] Example 6

[0087] Nanoimprinting was performed according to the method of Example 2, except that the spraying distance was 5 mm.

[0088] The thickness uniformity of the polymer glue layer sprayed on the side of the soft template provided with the micro-nano pattern in Example 6 was 3.5%, which was slightly worse than that in Example 2.

[0089] Example 7

[0090] Nanoimprinting was performed according to the method of Example 2, except that the spraying flow rate was 70 uL / min.

[0091] The thickness uniformity of the polymer glue layer sprayed on the side of the soft template provided with the micro-nano pattern in Example 7 was 4%, which was slightly worse than that in Example 2.

[0092] Comparative Example 1

[0093] The existing nanoimprinting method is used: polymer glue is applied to a glass substrate. In an open environment, a soft template with micro-nano patterns is pressed onto the glass substrate through an imprinting roller. The polymer glue on the glass substrate is solidified by ultraviolet light exposure with a UV lamp, so that the micro-nano structure on the soft template can be transferred to the glass. Then, external force is used to separate the soft template with micro-nano patterns and the glass substrate, and the micro-nano structure on the soft template is completely transferred to the glass substrate.

[0094] In the comparative example 1, glue overflow occurred during the imprinting process. The structure of the nano-pattern on the glass substrate prepared in the comparative example 1 is as follows: Figure 11 As shown, the structural consistency is very poor and the structure is incomplete.

[0095] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with this technical field within the technical scope disclosed by the present invention should be covered by the scope of protection of the present invention.

Claims

1. A nanoimprinting method for fabricating AR diffraction waveguides, characterized in that: The method comprises: Ultrasonic spraying of a polymer glue layer onto a surface of a soft template having a micro-nano pattern, such that the polymer glue layer covers the micro-nano pattern and the thickness of the polymer glue layer is greater than the thickness of the micro-nano pattern; wherein the viscosity of the polymer glue layer is less than 100 cps; the spraying path is S-shaped, starting from one end of the soft template and spraying along the S-shaped path to the other end of the soft template; the spraying speed is 1-3 mm / s, the spraying distance is 7-9 mm, and the spraying flow rate is 45-55 uL / min; and the thickness uniformity of the polymer glue layer is ±2%; The side of the soft template sprayed with the polymer glue layer is brought into contact with the glass substrate for imprinting. The specific operation is as follows: before the imprinting starts, one end of the soft template near the imprinting start position is first adsorbed and fixed; after the imprinting ends, the other end of the soft template near the imprinting end position is adsorbed and fixed, and the vacuum degree of the adsorption is less than 1000 Pa; Use ultraviolet light to cure the polymer glue layer. The specific operation is as follows: move the ultraviolet light from one side of the glass substrate to the other side at a constant speed along the imprinting direction; The imprinting and curing processes are performed in an inert gas, wherein the concentration of oxygen in the inert gas is less than 1%; The soft film plate with the micro-nano pattern is removed, and the polymer glue layer with the micro-nano pattern remains on the surface of the glass substrate, thereby obtaining a glass substrate with the micro-nano pattern.

2. The method according to claim 1, characterized in that The thickness of the polymer glue layer is 300-600 nm.

3. The method according to claim 1, characterized in that The method of bringing the side of the soft template sprayed with the polymer glue layer into relative contact with the glass substrate for imprinting includes: placing the glass substrate on a carrier, bringing the side of the soft template sprayed with the polymer glue layer into relative contact with the glass substrate, and adsorbing both ends of the soft template on the carrier for imprinting.

4. A nanoimprinting device, characterized in that: The method for implementing any one of claims 1 to 3 comprises a transparent box (1), a carrier (2), a control rod (3) and an embossing roller (7) arranged in the transparent box (1), and an ultraviolet lamp device (6) arranged above the outside of the transparent box (1); the transparent box (1) is provided with an air inlet (4), an exhaust port (5), an oxygen concentration check gauge (16) and an inert gas pressure gauge (17); the carrier (2) is provided with a groove body (21) at both ends of the soft template extension path, and the groove body (21) is connected to the vacuum device; the groove body (21) includes a plurality of longitudinal grooves arranged in parallel and a transverse groove for connecting the plurality of longitudinal grooves; the control rod (3) can rise and fall; the ultraviolet lamp device (6) includes a plurality of ultraviolet lamps of different bands, each band of ultraviolet lamps includes a plurality of groups, each group of ultraviolet lamps is arranged in a row, and the ultraviolet lamp groups of different bands are arranged at intervals.

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