Temperature regulation system, its control method and direct writing exposure equipment

Abstract

The present invention discloses a temperature regulation system, its control method, and a direct writing exposure device. The temperature regulation system includes: an air conditioning device installed on the machine body. The air conditioning device includes a housing and a compressor disposed inside the housing. The housing has an air outlet and an air return port. The air conditioning device is used to drive air to move from the air outlet through the exposure module to the air return port to adjust the working environment temperature of the exposure module; a first temperature acquisition device for acquiring the return air temperature of the air return port; a heating device installed inside the air conditioning device; a control device connected to the air conditioning device, the first temperature acquisition device, and the heating device, obtaining the return air temperature and the current rotational speed value of the compressor, and controlling the working state of the heating device according to the return air temperature and the current rotational speed value. Using this temperature regulation system can keep the temperature inside the direct writing exposure device stable, thereby solving the problem of the influence of temperature fluctuations on the performance of the direct writing exposure device.

Description

Technical Field

[0001] The present invention relates to the technical field of direct-write exposure equipment, and in particular to a temperature regulation system, a control method thereof, and a direct-write exposure equipment. Background Art

[0002] Compared with traditional exposure equipment, the direct-write exposure equipment saves the process of making a mask plate, can efficiently expose the required patterns with high alignment accuracy. Based on this, the direct-write exposure equipment has replaced the traditional exposure equipment in some industries.

[0003] In the related art, there are differences in the design of the temperature regulation system in the existing direct-write exposure equipment. In the design of the temperature regulation system, the entire interior of the equipment is cooled by an industrial air conditioner or a heat exchanger. For example, the industrial air conditioner is placed at the rear end of the equipment, and cold air is introduced into the equipment through an air duct to cool the ambient temperature inside the equipment, or the heat exchanger is installed inside the equipment in the design of the temperature regulation system to dissipate heat from the inside of the equipment. However, in the above design, since there is a very large difference in the heat generation between the non-exposure state and the exposure state of the existing direct-write exposure equipment, and during the exposure state, the aggregation time of the heat generation is very short, the means of using a heat exchanger or an industrial air conditioner cannot achieve a rapid matching of the refrigeration capacity and the heat generation, and there is a certain hysteresis, resulting in the inability to effectively neutralize the refrigeration capacity and the heat generation when a large amount of heat appears, so that there is a large temperature fluctuation inside the equipment, affecting the performance of the equipment. Summary of the Invention

[0004] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, an object of the present invention is to provide a temperature regulation system, and by using this temperature regulation system, the temperature inside the direct-write exposure equipment can be kept stable, thus solving the problem of the influence of temperature fluctuation on the performance of the direct-write exposure equipment.

[0005] A second object of the present invention is to provide a direct-write exposure equipment.

[0006] A third object of the present invention is to provide a control method for a temperature regulation system.

[0007] To solve the above problems, an embodiment of the first aspect of the present invention provides a temperature regulation system for a direct writing exposure device. The direct writing exposure device includes a machine body, an accommodation cavity is formed in the machine body, and an exposure module, an alignment module, and a motion platform module are arranged in the accommodation cavity. The temperature regulation system includes: an air conditioning device installed on the machine body, the air conditioning device includes a housing and a compressor arranged in the housing, the housing has an air outlet and an air return port, and the air conditioning device is used to drive air to move from the air outlet through the exposure module to the air return port to regulate the working environment temperature of the exposure module; a first temperature acquisition device for acquiring the return air temperature of the air return port; a heating device installed in the air conditioning device; a control device connected to the air conditioning device, the first temperature acquisition device, and the heating device, obtaining the return air temperature and the current rotation speed value of the compressor, and controlling the working state of the heating device according to the return air temperature and the current rotation speed value.

[0008] According to the temperature regulation system of the embodiment of the present invention, based on the settings of the air conditioning device and the heating device, the working state of the heating device is controlled by the return air temperature at the air return port and the current rotation speed value of the compressor. Thus, when there are large temperature fluctuations inside the direct writing exposure device, the temperature inside the direct writing exposure device can be stabilized by the working state of the heating device, solving the problem of the influence of temperature fluctuations on the performance of the direct writing exposure device. For example, when the heat generation inside the direct writing exposure device is small, the heating device is controlled to turn on the heating function, so that the compressor can be kept on, and the air conditioning device is always in the refrigeration mode. Thus, when the direct writing exposure device switches to the exposure state, the cooling capacity generated by the air conditioning device can quickly neutralize the heat generated by the exposure module, keeping the temperature inside the direct writing exposure device stable and reducing the hysteresis phenomenon caused by the inability of the air conditioner to cool down in time during temperature fluctuations. When the heat generation inside the direct writing exposure device is large, the heating device is controlled to stop the heating function, and the air conditioning device only cools the direct writing exposure device, ensuring that the direct writing exposure device can work continuously and stably.

[0009] In some embodiments, the exposure module includes a first gantry structure and an optical component arranged on the first gantry structure; a first compartment and a second compartment are formed in the accommodation cavity, the air conditioning device and the optical component are located in the first compartment, and the first gantry structure is located in the second compartment; the temperature regulation system further includes a partition for blocking the air outlet and the air return port, so that a first cooling circulation loop is formed between the air outlet and the air return port, and the optical component is arranged on the first cooling circulation loop.

[0010] In some embodiments, the alignment module and the motion platform module are located in the second compartment; the temperature regulation system further includes: a fan filter unit, which is installed on the body and located in the second compartment, and is used for sucking and filtering external air and sending the filtered external air into the second compartment; a first fan, which is installed on the body and located in the second compartment, and the first fan is used for sending the air in the second compartment to the outside of the body; wherein, the fan filter unit and the first fan jointly perform heat exchange between the air in the second compartment and the external air to cool and dissipate heat from the alignment module and the motion platform module.

[0011] In some embodiments, along the length direction of the body, the body has a front end and a rear end; the first fan is installed at the rear end of the body; the alignment module includes a second gantry structure and a alignment camera disposed on the second gantry structure; a base is further disposed in the accommodation cavity, both the first gantry structure and the second gantry structure are erected on the base, and the motion platform module is slidably connected to the base along the length direction; the temperature regulation system further includes: an air duct, which is installed on the body, and the first end of the air duct is disposed close to the fan filter unit, and the second end of the air duct extends to the front end of the body; a second fan, which is installed at the second end of the air duct and is used for diverting the air sent into the second compartment by the fan filter unit to the front end of the body; a third fan, which is installed along the length direction at the front end of the base and is used for diverting the air at the front end of the body to the rear end of the body; wherein, a second cooling circulation loop is formed by the fan filter unit and the first fan unit, and a third cooling circulation loop is formed by the fan filter unit, the second fan, the third fan and the first fan. The first gantry structure and the alignment camera are located on the second cooling circulation loop, and the second gantry structure is located on the third cooling circulation loop; when the direct writing exposure device is in the exposure state, the motion platform module slides past the second gantry structure and the first gantry structure in sequence.

[0012] In some embodiments, the exhaust air volume of the fan filter unit is controlled to be a first air volume, and the exhaust air volume of the first fan is controlled to be a second air volume, wherein the first air volume is greater than the second air volume.

[0013] In some embodiments, the temperature regulation system further includes a plurality of second temperature acquisition devices, which are dispersedly arranged in the first compartment, and the plurality of second temperature acquisition devices are all connected to the control device; the control device is further configured to obtain the temperature values acquired by each second temperature acquisition device, and based on the weighted average method, control the cooling capacity of the air conditioning device according to the temperature values.

[0014] The second aspect embodiment of the present invention provides a direct writing exposure device, including: a machine body, an accommodation cavity is formed in the machine body, and an exposure module, an alignment module and a motion platform module are arranged in the accommodation cavity; the temperature regulation system described in the above embodiment, the temperature regulation system is arranged in the accommodation cavity; an electric control device, the electric control device is connected to the exposure module, the alignment module, the motion platform module, and the temperature regulation system; a laser device, the laser device is connected to the exposure module and the electric control device.

[0015] According to the direct writing exposure device of the embodiment of the present invention, through the temperature regulation system of the above embodiment, the temperature inside the direct writing exposure device can be kept stable, thereby solving the problem of the influence of temperature fluctuation on the performance of the direct writing exposure device.

[0016] In some embodiments, a first cabinet is further included, and the first cabinet is used to place the electric control device; the electric control device is connected to the exposure module, the alignment module, the motion platform module, and the temperature regulation system through external wires; and / or, a second cabinet is further included, and the second cabinet is used to place the laser device; the laser device is connected to the exposure module through external wires.

[0017] The third aspect embodiment of the present invention provides a control method for a temperature regulation system, which is used for the temperature regulation system described in the above embodiment. The temperature regulation system includes an air conditioning device and a heating device. The air conditioning device includes a housing and a compressor arranged in the housing. The housing has an air outlet and an air return opening. The control method includes: obtaining the air return temperature at the air return opening and the current rotation speed value of the compressor; controlling the working state of the heating device according to the air return temperature and the current rotation speed value.

[0018] The control method of the temperature regulation system according to an embodiment of the present invention controls the working state of the heating device based on the return air temperature at the return air outlet and the current rotational speed value of the compressor. Thus, when there are large temperature fluctuations inside the direct writing exposure device, the temperature inside the direct writing exposure device can be stabilized by the working state of the heating device, solving the problem of the influence of temperature fluctuations on the performance of the direct writing exposure device. For example, when the heat generation inside the direct writing exposure device is small, the heating device is controlled to turn on the heating function. As a result, the compressor can be kept turned on, and the air conditioning device is always in the refrigeration mode. Therefore, when the direct writing exposure device switches to the exposure state, the cooling capacity generated by the air conditioning device can be quickly neutralized with the heat generation of the exposure module, keeping the temperature inside the direct writing exposure device stable and reducing the hysteresis phenomenon caused by the inability of the air conditioner to cool down in time during temperature fluctuations. When the heat generation inside the direct writing exposure device is large, the heating device is controlled to stop the heating function, and only the air conditioning device cools down the direct writing exposure device, ensuring that the direct writing exposure device can work continuously and stably.

[0019] In some embodiments, controlling the working state of the heating device according to the return air temperature and the current rotational speed value includes: if it is determined that the return air temperature is less than or equal to the set temperature and the current rotational speed value is less than or equal to the minimum allowable rotational speed, controlling the working state of the heating device to be the start heating state; if it is determined that the return air temperature is greater than the set temperature, controlling the working state of the heating device to be the stop heating state.

[0020] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and be readily understood from the description of the embodiments in conjunction with the following drawings, wherein:

[0022] Figure 1 is a schematic diagram of a direct writing exposure device according to an embodiment of the present invention;

[0023] Figure 2 is a block diagram of the structure of a temperature regulation system according to an embodiment of the present invention;

[0024] Figure 3 is a schematic diagram of a temperature regulation system according to an embodiment of the present invention;

[0025] Figure 4 is a block diagram of the structure of a temperature regulation system according to another embodiment of the present invention;

[0026] Figure 5 is a schematic diagram of a direct writing exposure device according to another embodiment of the present invention.

[0027] Reference numerals:

[0028] Direct writing exposure device 100; temperature regulation system 90;

[0029] Machine body 1; accommodation cavity 2; exposure module 3; alignment module 4; moving platform module 5; air conditioner 6; first temperature acquisition device 7; heating device 8; control device 9; partition 10; fan filter unit 11; first fan 12; air duct 13; second fan 14; third fan 15; second temperature acquisition device 16; electric control device 17; laser device 18; first cabinet 19; second cabinet 20; first compartment 21; second compartment 22; base 23; water chiller 24; blower 25; first gantry structure 31; optical component 32; second gantry structure 41; alignment camera 42; housing 61; air outlet 62; air return opening 63. Detailed implementation manners

[0030] Embodiments of the present invention will be described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. Embodiments of the present invention will be described in detail below.

[0031] To solve the above problems, an embodiment of the first aspect of the present invention provides a temperature regulation system 90 for a direct writing exposure device 100, as Figure 1 shown, the direct writing exposure device 100 includes a machine body 1, an accommodation cavity 2 is formed inside the machine body 1, and an exposure module 3, an alignment module 4 and a moving platform module 5 are arranged inside the accommodation cavity 2, as Figure 2 shown, the temperature regulation system 90 includes: an air conditioner 6, a first temperature acquisition device 7, a heating device 8 and a control device 9.

[0032] Among them, the air conditioner 6 is installed on the machine body 1. The air conditioner 6 includes a housing 61 and a compressor arranged inside the housing 61. The housing 61 is provided with an air outlet 62 and an air return opening 63. The air conditioner 6 is used to drive air to move from the air outlet 62 through the exposure module 3 to the air return opening 63 to adjust the working environment temperature of the exposure module 3; the first temperature acquisition device 7 is used to acquire the return air temperature of the air return opening 63; the heating device 8, the heating device 8 is installed inside the air conditioner 6; the control device 9, the control device 9 is connected to the air conditioner 6, the first temperature acquisition device 7 and the heating device 8, obtains the return air temperature and the current rotation speed value of the compressor, and controls the working state of the heating device 8 according to the return air temperature and the current rotation speed value.

[0033] In existing direct-writing exposure equipment, there is a very large difference in heat generation between the non-exposure state and the exposure state, and the heat accumulation time is very short. Therefore, by means of heat exchangers or industrial air conditioners, it is impossible to achieve a rapid match between the cooling capacity and the heat generation, and there is a certain hysteresis. When a large amount of heat is generated, it is impossible to effectively neutralize the cooling capacity and the heat generation, resulting in a large temperature fluctuation inside the equipment. When the existing direct-writing exposure equipment is in a cold machine state or a low-dose exposure state, the cold machine state means that the direct-writing exposure equipment is powered on but not exposed. At this time, the heat generation of the exposure module is small and the compressor cannot be started, but the heat generated will accumulate in the area where the exposure module is located. When the heat accumulates to a certain extent, the compressor is in the on state. At this time, the air conditioning device starts the cooling mode, causing the temperature in the area where the exposure module is located to drop. However, since the minimum cooling capacity of the air conditioning device is higher than the heat generation, when the temperature in the area where the exposure module is located reaches a certain temperature, the compressor of the air conditioning device is turned off again, and this cycle repeats, resulting in a temperature fluctuation in the area where the exposure module is located. To solve this problem, in this application, by setting the heating device 8 and the air conditioning device 6, when a large temperature fluctuation occurs inside the direct-writing exposure equipment 100, the control device 9 determines the amount of heat generation of the direct-writing exposure equipment 100 based on the return air temperature at the air outlet 62 and the current rotation speed value of the compressor, and then controls the working state of the heating device 8 to stabilize the temperature inside the direct-writing exposure equipment 100 and solve the problem of the influence of temperature fluctuation on the performance of the direct-writing exposure equipment 100. For example, when it is determined that the heat generation of the direct-writing exposure equipment 100 is small based on the return air temperature and the current rotation speed value, the working state of the heating device 8 is controlled to the start heating state to turn on the heating function. Thus, under the heating of the heating device 8, the heat around the air conditioning device 6 can be increased, which promotes the air conditioning device 6 to still meet the opening condition, that is, ensures that the compressor always remains in the on state, making the air conditioning device 6 always in the cooling mode. Then, when the direct-writing exposure equipment 100 switches to the exposure state, that is, the working environment temperature in the area where the exposure module 3 is located rises, that is, the heat generation of the exposure module 3 becomes larger, since the air conditioning device 6 is in the cooling mode, the air conditioning device 6 can quickly adjust the cooling capacity of the air conditioning device 6 according to the heat generation of the exposure module 3 to timely neutralize the cooling capacity generated by the air conditioning device 6 and the heat generation of the exposure module 3, so that the working environment temperature of the direct-writing exposure equipment 100 remains stable. Thus, not only the problem of temperature fluctuation caused by the repeated opening and closing of the air conditioning device 6 is avoided, but also the hysteresis phenomenon caused by the inability of the air conditioner to cool down in time during temperature fluctuation can be effectively reduced. When the heat generation inside the direct-writing exposure equipment 100 is large, the working state of the heating device 8 is controlled to the stop heating state to stop the heating function, and the air conditioning device 6 only cools down the direct-writing exposure equipment 100 to ensure that the direct-writing exposure equipment 100 can work continuously and stably.

[0034] Specifically, when the first temperature acquisition device 7 transmits the collected return air temperature to the control device 9 and transmits the current rotational speed value of the compressor detected by the rotational speed sensor to the control device 9, the control device 9 controls the working state of the heating device 8 according to the return air temperature and the current rotational speed value. When the return air temperature does not reach the set temperature and the current rotational speed value of the compressor is the lowest allowable rotational speed, it indicates that the direct write exposure device 100 has switched to the non-exposure state, or in the small-dose exposure state, the working environment temperature in the area where the exposure module 3 is located is relatively low, that is, the heat generation of the exposure module 3 becomes smaller. At this time, to avoid the problem of temperature fluctuations caused by the compressor being unable to work properly because the working environment temperature of the direct write exposure device 100 does not reach the starting condition of the air conditioning device 6, the control device 9 in this application controls the working state of the heating device 8 to the starting heating state to turn on the heating function. Thus, the compressor can be kept in the on state, and the air conditioning device 6 is always in the refrigeration mode. Even when the direct write exposure device 100 switches to the exposure state and the heat accumulation time is very short, since the air conditioning device 6 still maintains the running refrigeration mode and the compressor of the air conditioning device 6 is a variable-frequency compressor, the air conditioning device 6 can adjust the refrigeration capacity in real time according to the heat generation of the exposure module 3, realizing the rapid matching of the refrigeration capacity and the heat generation, quickly neutralizing the refrigeration capacity generated by the air conditioning device 6 and the heat generation of the exposure module 3, keeping the temperature in the direct write exposure device 100 stable, and reducing the hysteresis phenomenon caused by the inability of the air conditioner to cool down in time during temperature fluctuations; when the return air temperature reaches the set temperature, it indicates that in the exposure state, the working environment temperature in the area where the exposure module 3 is located has gradually increased, and the heat generation of the exposure module 3 has reached the starting condition of the air conditioning device 6. At this time, the compressor can work normally, so there is no need to turn on the heating device 8. Therefore, the control device 9 controls the working state of the heating device 8 to the stop heating state to stop the heating function, and the air conditioning device 6 adjusts the refrigeration capacity in real time according to the heat generation of the exposure module 3 in the refrigeration mode to cool down the direct write exposure device 100, avoiding the influence of the too high working environment temperature on the accuracy of the direct write exposure device 100 and ensuring that the direct write exposure device 100 can work continuously and stably. Thus, in this application, by setting the heating device 8 and the air conditioning device 6, the temperature in the direct write exposure device 100 is stabilized, and the problem of the influence of temperature fluctuations on the performance of the direct write exposure device 100 is solved.

[0035] Among them, the set temperature can be understood as the temperature value set according to the internal working environment temperature of the direct write exposure device 100. For example, the set temperature can be 22 °C.

[0036] The temperature regulation system 90 according to an embodiment of the present invention controls the operating state of the heating device 8 based on the settings of the air conditioning device 6 and the heating device 8, and by the return air temperature at the return air outlet and the current rotational speed value of the compressor. Thus, when there are large temperature fluctuations inside the direct writing exposure device 10, the temperature inside the direct writing exposure device 100 can be stabilized by the operating state of the heating device 8, solving the problem of the influence of temperature fluctuations on the performance of the direct writing exposure device 100. For example, when the heat generation inside the direct writing exposure device 100 is small, the heating device 8 is controlled to turn on the heating function, so that the compressor can be kept in the on state, and the air conditioning device 6 is always in the refrigeration mode. Therefore, when the direct writing exposure device 100 switches to the exposure state, the refrigerating capacity generated by the air conditioning device 6 can quickly neutralize the heat generated by the exposure module 3, keeping the temperature inside the direct writing exposure device stable and reducing the hysteresis phenomenon caused by the inability of the air conditioner to cool down in time during temperature fluctuations. When the heat generation inside the direct writing exposure device 100 is large, the heating device 8 is controlled to stop the heating function, and the air conditioning device 6 only cools down the direct writing exposure device 100, ensuring that the direct writing exposure device 100 can work continuously and stably.

[0037] In some embodiments, as Figure 1 shown, the exposure module 3 includes a first gantry structure 31 and an optical component 32 disposed on the first gantry structure 31. As Figure 3 shown, the temperature regulation system 90 further includes a partition 10.

[0038] Among them, a first compartment 21 and a second compartment 22 are formed in the accommodation cavity 2. The air conditioning device 6 and the optical component 32 are located in the first compartment 21, and the first gantry structure 31 is located in the second compartment 22; the partition 10 is used to block the air outlet 62 and the return air outlet 63, so as to form a first cooling circulation loop between the air outlet 62 and the return air outlet 63, and the optical component 32 is disposed on the first cooling circulation loop.

[0039] Specifically, a high-power laser forms an exposure pattern through the optical component 32. Since there is more than 50% energy loss in the laser, a large amount of heat is generated in the optical component 32 during exposure, and this amount of heat is an important factor causing temperature fluctuations inside the machine body 1. Therefore, in this application, the air-conditioning device 6 and the optical component 32 are located in the first compartment 21, and the air-conditioning device 6 independently controls the heat generated by the optical component 32. That is to say, when a large amount of heat is generated in the optical component 32 during exposure, since the partition 10 isolates the air outlet 62 and the air return port 63, the air return port 63 sucks the heat generated by the optical component 32 into the air-conditioning device 6. The air-conditioning device 6 can adjust the cooling capacity of the air-conditioning device 6 in real time according to the heat generated by the optical component 32. The air-conditioning device 6 discharges the cooling capacity through the air outlet 62 to neutralize the cooling capacity generated by the air-conditioning device 6 and the heat generated by the optical component 32, thereby balancing the heat generated by the optical component 32 during exposure and achieving the purpose of stabilizing the temperature. In addition, the exposure module 3 may further include a digital processing system. The first compartment 21 and the second compartment 22 are formed by sheet metal structural parts in the accommodation cavity 2.

[0040] In some embodiments, as Figure 3 shown, the temperature regulation system 90 further includes a fan filter unit 11 and a first fan 12.

[0041] Among them, the alignment module 4 and the motion platform module 5 are located in the second compartment 22; the fan filter unit 11 is installed on the machine body 1 and is located in the second compartment 22, and is used to suck and filter external air and send the filtered external air into the second compartment 22; the first fan 12 is installed on the machine body 1 and is located in the second compartment 22, and the first fan 12 is used to transport the air in the second compartment 22 to the outside of the machine body 1; among them, the fan filter unit 11 and the first fan 12 jointly perform heat exchange between the air in the second compartment 22 and the external air to cool and dissipate heat from the alignment module 4 and the motion platform module 5.

[0042] Specifically, since the alignment module 4 has high requirements for the heat dissipation of the temperature regulation system 90, and the temperature change within the machine body 1 will affect the stability of the alignment module 4, in this application, the fan filter unit 11 and the first fan 12 are used to cool and dissipate heat from the alignment module 4. That is to say, when the fan filter unit 11 sucks external air into the second compartment 22 and filters the external air, a part of the air sucked into the second compartment 22 exchanges heat with the heat generated by the alignment module 4 within the second compartment 22 to cool and dissipate heat from the alignment module 4, and a part of the air in the second compartment 22 further exchanges heat with the heat generated by the moving platform module 5 during movement within the second compartment 22, that is, to cool and dissipate heat from the motor of the moving platform module 5. The first fan 12 then extracts the air that has exchanged heat with the alignment module 4 and the moving platform module 5 from the machine body 1. Thus, the external air passes through the fan filter unit 11 and the first fan 12 to cool and dissipate heat from the alignment module 4 and the moving platform module 5. In addition, the fan filter unit 11 can be composed of a high-efficiency particulate air filter (HEPA) and an axial flow fan.

[0043] In some embodiments, such as Figure 1 and Figure 3 shown, along the length direction of the machine body 1, the machine body 1 has a front end and a rear end; the first fan 12 is installed at the rear end of the machine body 1; the alignment module 4 includes a second gantry structure 41 and a positioning camera 42 disposed on the second gantry structure 41; a base 23 is further provided in the accommodation cavity 2, and both the first gantry structure 31 and the second gantry structure 41 are erected on the base 23, and the moving platform module 5 is slidably connected to the base 23 along the length direction.

[0044] In some embodiments, such as Figure 3As shown in the figure, the temperature regulation system 90 further includes an air draft pipe 13, a second fan 14, and a third fan 15. Among them, the air draft pipe 13 is installed on the body 1, and the first end of the air draft pipe 13 is arranged close to the fan filter unit 11, and the second end of the air draft pipe 13 extends to the front end of the body 1; the second fan 14 is installed at the second end of the air draft pipe 13 and is used to divert the air sent by the fan filter unit 11 into the second compartment 22 to the front end of the body 1; the third fan 15 is installed along the length direction at the front end of the base 23 and is used to divert the air at the front end of the body 1 to the rear end of the body 1; among them, a second cooling circulation loop is formed by the fan filter unit 11 and the first fan 12 group, and a third cooling circulation loop is formed by the fan filter unit 11, the second fan 14, the third fan 15, and the first fan 12. The first gantry frame 31 and the alignment camera 42 are located on the second cooling circulation loop, and the second gantry frame 41 is located on the third cooling circulation loop; when the direct writing exposure device 100 is in the exposure state, the motion platform module 5 slides past the second gantry frame 41 and the first gantry frame 31 in sequence.

[0045] Specifically, after the filtered external air enters the second compartment 22, a part of the air in the second compartment 22 enters the air draft pipe 13 from the first end of the air draft pipe 13, and the air then flows from the air draft pipe 13 to the second fan 14. The second fan 14 diverts the air in the second compartment 22 in the air draft pipe 13 to the front end of the body 1, that is, the second fan 14 blows the air in the second compartment 22 to the front end of the body 1. The third fan 15 then diverts the air in the second compartment 22 to the rear end of the body 1, that is, the third fan 15 blows the air in the second compartment 22 to the rear end of the body 1. Thus, the air in the second compartment 22 forms a third cooling circulation loop through the fan filter unit 11, the second fan 14, the third fan 15, and the first fan 12. The third cooling circulation loop takes away the heat in the area where it is located, that is, the flowing air can continuously take away the heat generated by the motor of the motion platform module 5. The substrate to be exposed is placed on the suction cup assembly of the motor. When the direct writing exposure device 100 is in the exposure state, the motion platform module 5 slides past the second gantry frame 41 and the first gantry frame 31 in sequence. When the substrate is transported to the position below the exposure module 3 for exposure, when the exposure module 3 irradiates the laser on the motion platform module 5, the motion platform module 5 will generate a large amount of heat. Thus, the air flowing in the third cooling circulation loop can continuously take away the heat generated by the motion platform module 5, and the air flowing in the second cooling circulation loop can also dissipate the heat of the motion platform module 5, thereby reducing the temperature of the motion platform module 5. Then, the first fan 12 at the rear end of the body 1 extracts the air in the second compartment 22 after heat exchange from the inside of the body 1. In addition, by controlling the automatic door on the body 1 to open, the substrate is placed on the suction cup assembly of the motor. The alignment module 4 may include a linear motor, and the alignment camera 42 is installed on the linear motor.

[0046] Therefore, when a large amount of heat generated by the exposure module 3 during the exposure state causes temperature fluctuations, in this application, by arranging the exposure module 3 in the first compartment 21 and designing a first cooling circulation loop in the first compartment 21, the air with temperature fluctuations flows orderly along the first cooling circulation loop, and by arranging the alignment module 4 and the moving platform module 5 in the second compartment 22 of the machine body 1, the air with temperature fluctuations is prevented from having a serious impact on the modules with high precision such as the alignment module 4 and the moving platform module 5, thereby avoiding affecting the performance indicators of the direct writing exposure device 100. A second cooling circulation loop and a third cooling circulation loop are designed in the second compartment 22 to cool and dissipate heat from the alignment module 4 and the moving platform module 5.

[0047] In some embodiments, the exhaust air volume of the fan filter unit 11 is controlled to be a first air volume, and the exhaust air volume of the first fan 12 is controlled to be a second air volume. Among them, the first air volume is greater than the second air volume. Since the exhaust air volume of the fan filter unit 11 is greater than the exhaust air volume of the first fan 12, the inside of the machine body 1 of the direct writing exposure device 100 is in a positive pressure state, so that external dust cannot stay inside the machine body 1. That is to say, when external dust enters the machine body 1, due to the exhaust air volume of the fan filter unit 11 being greater than the exhaust air volume of the first fan 12, the external dust is blown out from the first fan 12, providing a dust-free space inside the machine body 1.

[0048] In some embodiments, as Figure 4 shown, the temperature regulation system 90 further includes a plurality of second temperature acquisition devices 16.

[0049] Among them, a plurality of second temperature acquisition devices 16 are dispersedly arranged in the first compartment 21, and a plurality of second temperature acquisition devices 16 are all connected to the control device 9; the control device 9 is further configured to obtain the temperature values acquired by each second temperature acquisition device 16 and control the cooling capacity of the air conditioning device 6 based on the weighted average method according to the temperature values.

[0050] Specifically, after multiple second temperature acquisition devices 16 collect the temperature values at corresponding positions in real time, the collected temperature values are transmitted to the control device 9. Since a large amount of heat is generated in the area where the exposure module 3 is located during the exposure state, and the distances between the positions of each second temperature acquisition device 16 and the exposure module 3 are different, the weight values corresponding to the temperature values collected by each second temperature acquisition device 16 are different. It can be understood that the weight value represents the degree of influence of the temperature values at different positions on the global temperature state of the first compartment 21. For example, for the second temperature acquisition device 16 set at the position of the exposure module 3, the weight value corresponding to the temperature value it collects is 40%. Therefore, the control device 9 calculates all the collected temperature values based on the weighted average method, and can obtain the temperature value that can accurately represent the global temperature state in the first compartment 21, and then controls the cooling capacity of the air conditioning device 6 according to this temperature value, that is, increases or decreases the cooling capacity of the air conditioning device 6 according to the temperature change situation in the first compartment 21, so that there will be no drastic fluctuation in the cooling capacity caused by the drastic change of the temperature value at one position, and further cause the temperature in the area of the first compartment 21 to be unstable. Among them, the weight value can be understood as a value tested according to the actual situation of the temperature regulation system 90, and there is no limitation on this.

[0051] An embodiment of the second aspect of the present invention provides a direct writing exposure device 100, which includes a machine body 1, the temperature regulation system 90 in the above embodiment, an electric control device 17, and a laser device 18.

[0052] Among them, a receiving cavity 2 is formed in the machine body 1, and an exposure module 3, an alignment module 4, and a motion platform module 5 are arranged in the receiving cavity 2; the temperature regulation system 90 is arranged in the receiving cavity 2; the electric control device 17 is connected to the exposure module 3, the alignment module 4, the motion platform module 5, and the temperature regulation system 90; the laser device 18 is connected to the exposure module 3 and the electric control device 17.

[0053] Specifically, the external wiring can be a power line and a control line. The electric control device 17 provides power for the exposure module 3, the alignment module 4, the motion platform module 5, the temperature regulation system 90, and the laser device 18 through the power line, and controls the exposure module 3, the alignment module 4, the motion platform module 5, the temperature regulation system 90, and the laser device 18 through the control line to achieve relevant control functions. The laser device 18 is connected to the exposure module 3 through an optical fiber. That is to say, when the direct writing exposure device 100 is in the exposure state, the electric control device 17 inputs electric energy to the laser device 18, the laser device 18 converts the electric energy into laser energy, and then the laser device 18 transports the laser energy to the exposure module 3 through the optical fiber, so as to provide the light source required for exposure for the direct writing exposure device 100. In addition, the electric control device 17 includes a controller, a power module, a driver, a server, and an industrial computer. As Figure 5As shown, the direct writing exposure device 100 may further include a water chiller 24 and a blower 25. The water chiller 24 provides water-cooled heat dissipation for some internal chips in the direct writing exposure device 100, and the blower 25 provides a vacuum environment for the direct writing exposure device 100.

[0054] For the direct writing exposure device 100 according to the embodiment of the present invention, through the temperature regulation system 90 of the above embodiment, the temperature inside the direct writing exposure device 100 can be kept stable, thereby solving the problem of the influence of temperature fluctuations on the performance of the direct writing exposure device 100.

[0055] In some embodiments, as Figure 5 shown, the direct writing exposure device 100 further includes a first cabinet 19 for placing the electric control device 17; the electric control device 17 is connected to the exposure module 3, the alignment module 4, the motion platform module 5, and the temperature regulation system 90 through external wires; and / or, it further includes a second cabinet 20 for placing the laser device 18; the laser device 18 is connected to the exposure module 3 through external wires.

[0056] Specifically, the electric control device 17 can be arranged inside the direct writing exposure device 100, such as arranging the electric control device 17 in the third compartment area divided inside the direct writing exposure device 100; or, it can also be independently arranged outside the direct writing exposure device 100, that is, placing the electric control device 17 in the first cabinet 19 outside the direct writing exposure device 100. Since the exposure power of the direct writing exposure device 100 is large, the heat generated by the electric control device 17 is relatively large, and the heat generated by the electric control device 17 accumulates inside the direct writing exposure device 100. Therefore, by setting the third compartment or independently arranging the first cabinet 19 to place the electric control device 17, the electric control device 17 can be isolated, thereby avoiding causing temperature fluctuations inside the direct writing exposure device 100.

[0057] And, the laser device 18 can be arranged inside the direct writing exposure device 100, such as arranging the laser device 18 in the fourth compartment area divided inside the direct writing exposure device 100; or, it can also be independently arranged outside the direct writing exposure device 100, that is, placing the laser device 18 in the second cabinet 20 outside the direct writing exposure device 100. Therefore, by setting the fourth compartment or independently arranging the second cabinet 20 to place the laser device 18, the laser device 18 can be isolated.

[0058] Since the electronic control device 17 and the laser device 18 can be placed by separately arranging a cabinet externally, there are no devices with large heat generation on the outside of the direct writing exposure device 100. Therefore, no cooling devices such as air conditioners are provided to dissipate heat from the electronic control device 17 and the laser device 18, and the electronic control device 17 and the laser device 18 are cooled by external air, thereby reducing costs. In addition, in the present application, the direct writing exposure device 100 is sorted out from the system architecture level. By moving some heat sources originally installed inside the device out of the device interior, the heat generation inside the device is easily controlled, which brings benefits to the design of the temperature regulation system 90 inside the device.

[0059] In addition, the laser device 18 provides the most core laser light source for the entire device. By inputting electrical energy to the laser, the laser can convert the electrical energy into laser energy. Due to the problem of photoelectric conversion efficiency, the laser itself generates a large amount of heat. Therefore, a heat dissipation flow channel can be designed inside the laser device 18, and thus the heat generated by the laser device 18 can be dissipated by means of water cooling.

[0060] An embodiment of the third aspect of the present invention provides a control method for a temperature regulation system, which is used for the temperature regulation system in the above embodiment. The temperature regulation system includes an air conditioning device and a heating device. The air conditioning device includes a housing and a compressor provided in the housing. The housing has an air outlet and an air return opening. The control method includes: obtaining the return air temperature at the air return opening and the current rotation speed value of the compressor; controlling the working state of the heating device according to the return air temperature and the current rotation speed value.

[0061] Specifically, there is a very large difference in heat generation between the non-exposure state and the exposure state of the existing direct writing exposure equipment, and the aggregation time of the heat generation is very short. The existing means such as heat exchangers and industrial air conditioners in the equipment cannot effectively neutralize the cooling capacity and the heat generation, resulting in a large temperature fluctuation inside the equipment. Therefore, when there is a large temperature fluctuation inside the direct writing exposure equipment, the amount of heat generation of the direct writing exposure equipment is judged by the return air temperature at the air outlet and the current rotational speed value of the compressor, and then the working state of the heating device is controlled to stabilize the temperature inside the direct writing exposure equipment and solve the problem of the influence of temperature fluctuation on the performance of the direct writing exposure equipment. For example, when it is determined that the heat generation of the direct writing exposure equipment is small according to the return air temperature and the current rotational speed value, the working state of the heating device is controlled to the start heating state to turn on the heating function. Thus, under the heating of the heating device, the heat around the air conditioning device can be increased, which can prompt the air conditioning device to still meet the start condition, that is, ensure that the compressor always remains in the on state, so that the air conditioning device is always in the refrigeration mode. Furthermore, when the direct writing exposure equipment switches to the exposure state, that is, the working environment temperature in the area where the exposure module is located increases, that is, the heat generation of the exposure module becomes larger, because the air conditioning device is in the refrigeration mode, the air conditioning device can quickly adjust the refrigeration capacity of the air conditioning device according to the heat generation of the exposure module to timely neutralize the refrigeration capacity generated by the air conditioning device and the heat generation of the exposure module, so that the working environment temperature of the direct writing exposure equipment remains stable. Thus, it not only avoids the problem of temperature fluctuation caused by the repeated opening and closing of the air conditioning device, but also effectively reduces the hysteresis phenomenon caused by the inability of the air conditioner to cool down in time during temperature fluctuation. When the heat generation inside the direct writing exposure equipment is large, the working state of the heating device is controlled to the stop heating state to stop the heating function, and the air conditioning device only cools down the direct writing exposure equipment to ensure that the direct writing exposure equipment can work continuously and stably.

[0062] The control method of the temperature regulation system according to an embodiment of the present invention controls the working state of the heating device based on the return air temperature at the return air outlet and the current rotational speed value of the compressor. Thus, when there are large temperature fluctuations inside the direct writing exposure device, the temperature inside the direct writing exposure device can be stabilized through the working state of the heating device, solving the problem of the influence of temperature fluctuations on the performance of the direct writing exposure device. For example, when the heat generation inside the direct writing exposure device is small, the heating device is controlled to turn on the heating function, so that the compressor can be kept turned on, and the air conditioning device is always in the refrigeration mode. Thus, when the direct writing exposure device switches to the exposure state, the cooling capacity generated by the air conditioning device can quickly neutralize the heat generation of the exposure module, keeping the temperature inside the direct writing exposure device stable and reducing the hysteresis phenomenon caused by the inability of the air conditioner to cool down in time during temperature fluctuations. When the heat generation inside the direct writing exposure device is large, the heating device is controlled to stop the heating function, and the air conditioning device only cools down the direct writing exposure device, ensuring that the direct writing exposure device can work continuously and stably.

[0063] In some embodiments, when the direct writing exposure device is in the cold start state or the low-dose exposure state, the working state of the heating device is controlled based on the obtained return air temperature and the current rotational speed value. If it is determined that the return air temperature is less than or equal to the set temperature and the current rotational speed value is less than or equal to the minimum allowable rotational speed, it means that the direct writing exposure device has switched to the non-exposure state, or in the low-dose exposure state, the temperature in the area where the exposure module is located is low, that is, the heat generation of the exposure module is small. At this time, to avoid the problem of temperature fluctuations caused by the inability of the compressor to work properly because the operating environment temperature of the direct writing exposure device does not reach the starting condition of the air conditioning device, the working state of the heating device is controlled to the start heating state to turn on the heating function, so that the compressor can be kept turned on, and the air conditioning device is always in the refrigeration mode. Thus, even when the direct writing exposure device switches to the exposure state and the heat generation aggregation time is very short, since the air conditioning device still maintains the running refrigeration mode, the air conditioning device can adjust the cooling capacity in real time according to the heat generation of the exposure module in the refrigeration mode, realizing the rapid matching of the cooling capacity and the heat generation, quickly neutralizing the cooling capacity generated by the air conditioning device and the heat generation of the exposure module, keeping the temperature inside the direct writing exposure device stable, and reducing the hysteresis phenomenon caused by the inability of the air conditioner to cool down in time during temperature fluctuations.

[0064] If it is determined that the return air temperature is greater than the set temperature, it indicates that during the exposure state, the working environment temperature in the area where the exposure module is located has gradually increased, and the heat generation of the exposure module has reached the activation condition of the air conditioning device. At this time, the compressor can operate normally. Therefore, there is no need to activate the heating device. Thus, the working state of the heating device is controlled to the stop heating state to stop the heating function, and the air conditioning device adjusts the cooling capacity in real time according to the heat generation of the exposure module in the cooling mode to cool down the direct writing exposure equipment, avoiding affecting the accuracy of the direct writing exposure equipment due to excessive working environment temperature and ensuring that the direct writing exposure equipment can work continuously and stably.

[0065] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0066] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and purposes of the present invention. The scope of the present invention is defined by the claims and their equivalents.

Claims

1. A temperature regulation system, characterized in that, for a direct writing exposure device, the direct writing exposure device includes a machine body, an accommodation cavity is formed in the machine body, an exposure module, an alignment module and a motion platform module are arranged in the accommodation cavity, and the temperature regulation system includes: An air conditioning device, the air conditioning device is installed on the machine body, the air conditioning device includes a housing and a compressor arranged in the housing, the housing has an air outlet and a return air inlet, and the air conditioning device is used to drive air to move from the air outlet through the exposure module to the return air inlet to adjust the working environment temperature of the exposure module; A first temperature acquisition device, used to acquire the return air temperature of the return air inlet; A heating device, the heating device is installed in the air conditioning device; A control device, the control device is connected to the air conditioning device, the first temperature acquisition device, and the heating device, obtains the return air temperature and the current rotation speed value of the compressor, and controls the working state of the heating device according to the return air temperature and the current rotation speed value.

2. The temperature regulation system according to claim 1, characterized in that, The exposure module includes a first gantry structure and an optical component arranged on the first gantry structure; A first compartment and a second compartment are formed in the accommodation cavity, the air conditioning device and the optical component are located in the first compartment, and the first gantry structure is located in the second compartment; The temperature regulation system further includes a partition, the partition is used to block the air outlet and the return air inlet, so that a first cooling circulation circuit is formed between the air outlet and the return air inlet, and the optical component is arranged on the first cooling circulation circuit.

3. The temperature regulation system according to claim 2, characterized in that, The alignment module and the motion platform module are located in the second compartment; The temperature regulation system further includes: A fan filter unit, the fan filter unit is installed on the machine body and is located in the second compartment, and is used to inhale and filter external air and send the filtered external air into the second compartment; A first fan, the first fan is installed on the machine body and is located in the second compartment, and the first fan is used to transport the air in the second compartment to the outside of the machine body; Wherein, the fan filter unit and the first fan jointly perform heat exchange between the air in the second compartment and the external air to cool and dissipate heat from the alignment module and the motion platform module.

4. The temperature regulation system according to claim 3, characterized in that, Along the length direction of the machine body, the machine body has a front end and a rear end; The first fan is installed at the rear end of the machine body; The alignment module includes a second gantry structure and a alignment camera arranged on the second gantry structure; A base is further arranged in the accommodation cavity, the first gantry structure and the second gantry structure are both erected on the base, and the motion platform module is slidably connected to the base along the length direction; The temperature regulation system further includes: An air intake pipe, the air intake pipe is installed on the machine body, and the first end of the air intake pipe is arranged close to the fan filter unit, and the second end of the air intake pipe extends to the front end of the machine body; A second fan, the second fan is installed at the second end of the air intake pipe, and is used for diverting the air sent into the second compartment by the fan filter unit to the front end of the machine body; A third fan, the third fan is installed at the front end of the base along the length direction, and is used for diverting the air at the front end of the machine body to the rear end of the machine body; Wherein, a second cooling circulation loop is formed by the fan filter unit and the first fan group, and a third cooling circulation loop is formed by the fan filter unit, the second fan, the third fan and the first fan. The first gantry frame and the alignment camera are located on the second cooling circulation loop, and the second gantry frame is located on the third cooling circulation loop; When the direct writing exposure device is in the exposure state, the motion platform module slides past the second gantry frame and the first gantry frame in sequence.

5. The temperature regulation system according to claim 3, characterized in that the control device is further configured to: control the exhaust air volume of the fan filter unit to be a first air volume, and control the exhaust air volume of the first fan to be a second air volume, wherein the first air volume is greater than the second air volume.

6. The temperature regulation system according to any one of claims 2-5, characterized in that the temperature regulation system further includes a plurality of second temperature acquisition devices, the plurality of second temperature acquisition devices are dispersedly arranged in the first compartment, and the plurality of second temperature acquisition devices are all connected to the control device; the control device is further configured to obtain the temperature values collected by each second temperature acquisition device, and based on the weighted average method, control the refrigerating capacity of the air conditioning device according to the temperature values.

7. A direct writing exposure device, characterized in that comprising: a machine body, an accommodation cavity is formed in the machine body, and an exposure module, an alignment module and a motion platform module are arranged in the accommodation cavity; the temperature regulation system according to any one of claims 1-6, the temperature regulation system is arranged in the accommodation cavity; an electric control device, the electric control device is connected to the exposure module, the alignment module, the motion platform module and the temperature regulation system; a laser device, the laser device is connected to the exposure module and the electric control device.

8. The direct writing exposure device according to claim 7, characterized in that further comprising a first cabinet for placing the electric control device; the electric control device is connected to the exposure module, the alignment module, the motion platform module and the temperature regulation system through external wires; and / or, further comprising a second cabinet for placing the laser device; the laser device is connected to the exposure module through an external wire.

9. A control method for a temperature regulation system, characterized in that For the temperature regulation system according to any one of claims 1-6, the temperature regulation system includes an air conditioning device and a heating device. The air conditioning device includes a housing and a compressor disposed within the housing. The housing has an air outlet and an air return opening. The control method includes: Obtaining the return air temperature at the air return opening and the current rotational speed value of the compressor; Controlling the operating state of the heating device according to the return air temperature and the current rotational speed value.

10. The control method of the temperature regulation system according to claim 9, characterized in that Controlling the operating state of the heating device according to the return air temperature and the current rotational speed value includes: If it is determined that the return air temperature is less than or equal to the set temperature and the current rotational speed value is less than or equal to the minimum allowable rotational speed, then controlling the operating state of the heating device to be the start heating state; If it is determined that the return air temperature is greater than the set temperature, then controlling the operating state of the heating device to be the stop heating state.

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