Detection components, detection instruments and detection methods

Abstract

The present invention provides a detection assembly, a detection instrument, and a detection method. The detection assembly is connected to a frequency sweep assembly and is used to detect impedance changes of a power device at different frequencies. The detection assembly includes a clamping assembly, a grounding probe, and at least one detection probe. The clamping assembly includes a first clamping portion and a second clamping portion, one end of the first clamping portion being connected to one end of the second clamping portion. The grounding probe is inserted into the first clamping portion. At least one detection probe is inserted into the second clamping portion, arranged in parallel with the grounding probe, and capable of connecting to the power device. The first clamping portion and the second clamping portion are capable of relative sliding to allow the grounding probe and the at least one detection probe to move relatively away from or closer to each other.

Description

Technical Field

[0001] The present invention relates to the technical field of testing tooling, and in particular to a testing component, a testing instrument and a testing method. Background Art

[0002] At present, in the relevant technology, power semiconductors operate under harsh conditions for a long time and are constantly subjected to electrical, thermal and vibration shocks, which will cause serious aging and reliability problems. Therefore, it is necessary to test the reliability of power semiconductor discrete devices. In the relevant technology, the distance between the signal probe and the ground probe is fixed, and the distance between the signal probe and the ground probe cannot be adjusted, which cannot meet the different packaging forms of semiconductor discrete devices. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art or related art.

[0004] To this end, a first aspect of the present invention provides a detection component.

[0005] A second aspect of the present invention provides a detection instrument.

[0006] A third aspect of the present invention provides a detection method.

[0007] In view of this, a first aspect of the present invention provides a detection component, which is connected to a frequency sweeping component and is used to detect impedance changes of a power device at different frequencies. The detection component includes a clamping component, a grounding probe and at least one detection probe; the clamping component includes a first clamping part and a second clamping part, one end of the first clamping part is connected to one end of the second clamping part; the grounding probe is passed through the first clamping part; at least one detection probe is passed through the second clamping part, and is arranged in parallel with the grounding probe and can be connected to the power device; wherein the first clamping part and the second clamping part can slide relative to each other so that the grounding probe and the at least one detection probe are relatively far away from or close to each other.

[0008] In this technical solution, the detection component is connected to the frequency sweep component so that the frequency sweep component can transmit a detection signal to the detection component via a signal port. This allows the detection component to detect impedance changes of the power device at different frequencies, thereby quickly identifying the failure type and damage level of the power device by measuring frequency-domain reflected impedance. The detection component includes a clamping assembly, a grounding probe, and at least one detection probe. The clamping assembly includes a first clamping portion and a second clamping portion, one end of the first clamping portion being connected to one end of the second clamping portion to facilitate installation of the first and second clamping portions. The grounding probe is inserted into the first clamping portion so that the first clamping portion can secure the grounding probe, thereby facilitating installation of the grounding probe. At least one detection probe is inserted into the second clamping portion so that the second clamping portion can secure the at least one detection probe, thereby facilitating installation of the at least one detection probe. The at least one detection probe is arranged side by side with the grounding probe and can be connected to the power device, thereby facilitating contact between the grounding probe and the detection probe and the terminals of the power device, thereby facilitating testing of the power device. The first clamping part and the second clamping part can slide relative to each other. Since the grounding probe and the detection probe are respectively installed on the first clamping part and the second clamping part, the grounding probe and the detection probe can be driven to move when the first clamping part and the second clamping part move, so that the grounding probe and the detection probe can be relatively far away or close, that is, the distance between the grounding probe and the detection probe is adjustable. When detecting different types of power devices, the distance between the grounding probe and the detection probe can be adjusted according to the distance between the terminals of the power device, so as to adapt to power devices with different packaging structures, improve the versatility of the detection component for power device detection, and greatly improve the contact measurement accuracy of frequency domain measurement and the versatility requirements of the test.

[0009] In addition, the detection component in the above technical solution provided by the present invention may also have the following additional technical features:

[0010] In one technical solution of the present invention, the second clamping portion includes a first sub-clamping portion and a second sub-clamping portion; one end of the first sub-clamping portion is connected to one end of the first clamping portion; the second sub-clamping portion is connected to the other end of the first clamping portion or the other end of the first sub-clamping portion; at least one detection probe includes a first detection probe and a second detection probe, the first detection probe is passed through the first sub-clamping portion, and the second detection probe is passed through the second sub-clamping portion.

[0011] In this technical solution, the second clamping part includes a first sub-clamping part and a second sub-clamping part; one end of the first sub-clamping part is connected to one end of the first clamping part, so that the first sub-clamping part can slide relative to the first clamping part. The second sub-clamping part is connected to the other end of the first clamping part or the other end of the first sub-clamping part to achieve the installation of the second sub-clamping part. At least one detection probe includes a first detection probe and a second detection probe, that is, the number of detection probes is two, so that the two detection probes can detect the power device. The first detection probe is inserted into the first sub-clamping part so that the first sub-clamping part fixes the first detection probe, so that the first sub-clamping part can drive the first detection probe to move when sliding. The second detection probe is passed through the second sub-clamping part so that the second sub-clamping part fixes the second detection probe, so that the second sub-clamping part can drive the second detection probe to move when sliding. Therefore, when the power device has three terminals, the distance between the grounding probe, the first detection probe and the second detection probe is adjusted according to the different distances between the terminals, so as to detect the power device in accordance with the terminal adaptation, thereby realizing the adjustability of the spacing between the grounding probe, the first detection probe and the second detection probe structure.

[0012] In one technical solution of the present invention, a first strip hole is provided at one end of the first clamping portion, and a second strip hole is provided at the other end; a third strip hole is provided at one end of the first sub-clamping portion, and a fourth strip hole is provided at the other end; a fifth strip hole is provided at one end of the second sub-clamping portion; the detection component also includes a first connecting member and a second connecting member, the first connecting member being passed through the first strip hole and the third strip hole; when the second sub-clamping portion is connected to the other end of the first clamping portion, the second connecting member is passed through the fifth strip hole and the second strip hole; when the second sub-clamping portion is connected to the other end of the first sub-clamping portion, the second connecting member is passed through the fifth strip hole and the fourth strip hole.

[0013] In this technical solution, a first strip hole is provided at one end of the first clamping part, and a second strip hole is provided at the other end; a third strip hole is provided at one end of the first sub-clamping part, and a fourth strip hole is provided at the other end; a fifth strip hole is provided at one end of the second sub-clamping part; a first connecting member is passed through the first strip hole and the third strip hole, so that the first connecting member can fix the first clamping part and the first sub-clamping part, and is provided as a long strip hole to facilitate the movement of the first connecting member in the strip hole, so that when adjusting the distance between the grounding probe and the first detection probe, the first connecting member can be loosened first so that the first clamping part and the first sub-clamping part can slide relative to each other. After sliding the first clamping part and the first sub-clamping part to a preset distance, the first connecting member is tightened to fix the first clamping part and the first sub-clamping part. When the second sub-clamping portion is connected to the other end of the first clamping portion, the second connecting piece is passed through the fifth strip hole and the second strip hole, that is, the first clamping portion is located between the first sub-clamping portion and the second sub-clamping portion, that is, the grounding probe is located between the first detection probe and the second detection probe. Therefore, when adjusting the distance between the grounding probe and the second detection probe, the second connecting piece can be loosened first so that the first clamping portion and the second sub-clamping portion can slide relative to each other. After sliding the first clamping portion and the second sub-clamping portion to a preset distance, the second connecting piece is tightened to fix the first clamping portion and the second sub-clamping portion to achieve adjustment of the distance between the grounding probe and the second detection probe. When the second sub-clamping portion is connected to the other end of the first sub-clamping portion, the second connecting member is passed through the fifth strip hole and the fourth strip hole, that is, the first detection probe is located between the grounding probe and the second detection probe. Therefore, when adjusting the distance between the first detection probe and the second detection probe, the second connecting member can be loosened first so that the first sub-clamping portion and the second sub-clamping portion can slide relative to each other. After sliding the first sub-clamping portion and the second sub-clamping portion to a preset distance, the second connecting member is tightened to fix the first sub-clamping portion and the second sub-clamping portion to achieve adjustment of the distance between the first detection probe and the second detection probe, that is, adjustable fixation between the grounding probe, the first detection probe and the second detection probe is achieved through the movable first connecting member and the second connecting member.

[0014] In one technical solution of the present invention, at least one detection probe includes a first body and a first sleeve; the first sleeve is detachably connected to one end of the first body, and after the first sleeve is disassembled, one end of the first body is embedded in the calibration component so that the plane of frequency domain measurement is calibrated from the sweeping component to one end of the first body.

[0015] In this technical solution, at least one detection probe includes a first body and a first sleeve; the first sleeve is detachably connected to one end of the first body to enable installation between the first sleeve and the first body. Since the plane of frequency domain measurement is located on the frequency sweeping component when detecting the power device, there is a certain distance between the frequency sweeping component and the position where the at least one detection probe contacts the power device. This distance will cause errors in the detection. Therefore, the first body and the first sleeve are set to a detachable structure. After the frequency sweeping component is connected to the detection component, the first sleeve can be removed first, and one end of the first body can be embedded in the calibration component to calibrate the plane of frequency domain measurement from the frequency sweeping component to one end of the first body. After calibration, the first sleeve is installed on the first body, and then the power device is detected using at least one detection probe. In this way, most of the measurement errors introduced by the detection component can be eliminated, thereby improving the detection accuracy of the detection component and ensuring the accuracy of the detection.

[0016] In one technical solution of the present invention, the frequency sweeping component includes a cable and a connection port, one end of the cable is connected to the connection port; at least one detection probe is connected to the other end of the cable; one end of the grounding probe is grounded through the clamping component, the cable and the frequency sweeping component.

[0017] In this technical solution, the frequency sweeping assembly includes a cable and a connection port. One end of the cable is connected to the connection port, allowing the frequency sweeping assembly to input a detection signal into the cable. At least one detection probe is connected to the other end of the cable, allowing the detection signal to enter the detection probe through the cable. When the detection probe is connected to a terminal of a power device, the detection signal can enter the power device through the detection probe. One end of the grounding probe is grounded via a clamping assembly, a cable, and the frequency sweeping assembly. That is, the grounding probe can be connected to the frequency sweeping assembly via the clamping assembly, the detection probe housing, and the cable housing. This allows the detection signal to pass through the power device and then be output from the grounding probe, thus forming a detection loop to detect the power device.

[0018] In one technical solution of the present invention, the cable includes a first cable and a second cable, and the port includes an input port and an output port; one end of the first cable is connected to the input port, and the other end is connected to one end of the first detection probe; one end of the second cable is connected to the output port, and the other end is connected to one end of the second detection probe; one end of the grounding probe is grounded through the clamping component, the first cable, the second cable and the scanning component.

[0019] In this technical solution, the cable includes a first cable and a second cable, and the port includes an input port and an output port, so that the frequency sweeping component can output and recover the detection signal. One end of the second cable is connected to the output port, and the other end is connected to one end of the second detection probe, so that the detection signal can enter the power device from the frequency sweeping component when the power device is detected. One end of the grounding probe is grounded to the frequency sweeping component through the clamping component, the first cable, the second cable and the frequency sweeping component. One end of the first cable is connected to the input port, and the other end is connected to one end of the first detection probe, so that the detection signal can enter the frequency sweeping component from the output of the power device to complete the detection of the power device, thereby realizing the frequency domain measurement of the dual port.

[0020] In one technical solution of the present invention, a power device includes a first terminal, a second terminal, and a third terminal; a first probe is provided at the other end of a ground probe, and the first probe can make ohmic contact with the first terminal; a second probe is provided at the other end of the first detection probe, and the second probe can make ohmic contact with the second terminal; and a third probe is provided at the other end of the second detection probe, and the third probe can make ohmic contact with the third terminal.

[0021] In this technical solution, the power device includes a first terminal, a second terminal, and a third terminal. A first probe is provided at the other end of the ground probe, capable of making ohmic contact with the first terminal to transmit a detection signal. A second probe is provided at the other end of the first detection probe, capable of making ohmic contact with the second terminal to transmit a detection signal. A third probe is provided at the other end of the second detection probe, capable of making ohmic contact with the third terminal to transmit a detection signal.

[0022] The second aspect of the present invention provides a detection instrument, including the detection component in any of the above technical solutions. Therefore, the detection instrument includes all the beneficial effects of the detection component, which will not be repeated here.

[0023] The third aspect of the present invention provides a detection method for detecting a power device, the detection method comprising connecting a detection component to a frequency sweeping component; calibrating the detection component; adjusting the distance between the first clamping portion and the second clamping portion; contacting a grounding probe and at least one detection probe in the detection component with a terminal of the power device; the frequency sweeping component transmitting a detection signal to the power device through the detection component, and the detection signal is transmitted back to the frequency sweeping component after passing through the power device.

[0024] In this technical solution, a detection method is used to inspect power devices, enabling the detection component to detect impedance changes in the power device at different frequencies. Specifically, frequency-domain reflected impedance measurements can be used to quickly identify the failure type and damage level of the power device. The detection method includes connecting the detection component to a frequency sweeping component, thereby transmitting a detection signal to the detection component and calibrating the detection component to eliminate errors caused by the detection component, thereby improving detection precision and ensuring detection accuracy. A grounding probe and at least one detection probe in the detection component are brought into contact with terminals of the power device. The frequency sweeping component transmits the detection signal through the detection component to the power device, and the detection signal is then transmitted back to the frequency sweeping component, thereby forming a detection signal transmission loop to enable detection of the power device. Because the grounding probe is mounted on a first clamping component and the at least one detection probe is mounted on a second clamping component, the distance between the grounding probe and the detection probe can be adjusted by adjusting the distance between the first clamping portion and the second clamping portion, so that the distance between the grounding probe and the detection probe matches the distance between the power component terminals, thereby enabling detection of different types of power devices.

[0025] In one technical solution of the present invention, calibrating the detection component includes: embedding one end of at least one detection probe into the calibration component so that the plane of frequency domain measurement is calibrated from the sweep component to one end of the at least one detection probe.

[0026] In this technical solution, one end of at least one detection probe is embedded in the calibration component so that the plane of frequency domain measurement is calibrated from the sweep component to one end of at least one detection probe. In this way, most of the measurement errors introduced by the detection component can be eliminated, thereby improving the detection accuracy of the detection component and ensuring the accuracy of the detection.

[0027] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which:

[0029] Figure 1 One of the schematic diagrams showing a ground probe in an intermediate position according to an embodiment of the present invention;

[0030] Figure 2 A schematic diagram showing the connection between a frequency sweep component and a detection component according to an embodiment of the present invention is shown;

[0031] Figure 3A second schematic diagram showing a grounding probe located in a middle position according to an embodiment of the present invention;

[0032] Figure 4 A third schematic diagram showing a grounding probe located in a middle position according to an embodiment of the present invention;

[0033] Figure 5 One of the schematic diagrams showing a ground probe located at an edge position according to an embodiment of the present invention;

[0034] Figure 6 A second schematic diagram showing a grounding probe located at an edge position according to an embodiment of the present invention;

[0035] Figure 7 A third schematic diagram showing a ground probe located at an edge position according to an embodiment of the present invention;

[0036] Figure 8 One of the flow charts of a detection method according to an embodiment of the present invention is shown;

[0037] Figure 9 FIG2 shows a second flow chart of a detection method according to an embodiment of the present invention.

[0038] in, Figures 1 to 9 The corresponding relationship between the reference numerals and component names is as follows:

[0039] 100 detection assembly, 110 clamping assembly, 120 first clamping part, 130 second clamping part, 132 first sub-clamping part, 134 second sub-clamping part, 140 grounding probe, 150 first probe, 160 detection probe, 162 first detection probe, 1622 first body, 1624 first sleeve, 164 second detection probe, 166 second probe, 168 third probe, 170 first connecting piece, 180 second connecting piece, 200 frequency sweeping assembly, 210 cable, 212 first cable, 214 second cable, 220 connection port, 222 input port, 224 output port. DETAILED DESCRIPTION

[0040] In order to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, in the absence of conflict, the embodiments of the present application and the features therein can be combined with each other.

[0041] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present invention is not limited to the specific embodiments disclosed below.

[0042] Refer to the following Figures 1 to 9 The detection assembly 100 , the detection instrument and the detection method according to some embodiments of the present invention are described.

[0043] like Figure 1 and Figure 2 As shown, the first aspect of the present invention provides a detection component 100, which is connected to the sweeping component 200 and is used to detect the impedance changes of the power device at different frequencies. The detection component 100 includes a clamping component 110, a grounding probe 140 and at least one detection probe 160; the clamping component 110 includes a first clamping part 120 and a second clamping part 130, and one end of the first clamping part 120 is connected to one end of the second clamping part 130; the grounding probe 140 is inserted into the first clamping part 120; at least one detection probe 160 is inserted into the second clamping part 130, and is arranged in parallel with the grounding probe 140, and can be connected to the power device; wherein the first clamping part 120 and the second clamping part 130 can slide relative to each other so that the grounding probe 140 and the at least one detection probe 160 are relatively far away from or close to each other.

[0044] In this embodiment, Figure 1 、 Figure 3 and Figure 4As shown, the detection component 100 is connected to the sweeping component 200 so that the sweeping component 200 can transmit the detection signal to the detection component 100 through the signal port, thereby enabling the detection component 100 to detect the impedance changes of the power device at different frequencies, that is, to quickly identify the failure type and damage degree of the power device by measuring the frequency domain reflection impedance. The detection component 100 includes a clamping component 110, a grounding probe 140, and at least one detection probe 160. The clamping component 110 includes a first clamping portion 120 and a second clamping portion 130. One end of the first clamping portion 120 is connected to one end of the second clamping portion 130 to facilitate the installation of the first clamping portion 120 and the second clamping portion 130. The grounding probe 140 is inserted into the first clamping portion 120 so that the first clamping portion 120 can fix the grounding probe 140 to facilitate the installation of the grounding probe 140. At least one detection probe 160 is passed through the second clamping portion 130 so that the second clamping portion 130 can fix the at least one detection probe 160 to achieve the installation of the at least one detection probe 160. The at least one detection probe 160 is arranged in parallel with the grounding probe 140 and can be connected to the power device, thereby facilitating the contact between the grounding probe 140 and the detection probe 160 and the terminal of the power device, thereby facilitating the detection of the power device. The first clamping part 120 and the second clamping part 130 can slide relative to each other. Since the grounding probe 140 and the detection probe 160 are respectively installed on the first clamping part 120 and the second clamping part 130, when the first clamping part 120 and the second clamping part 130 move, the grounding probe 140 and the detection probe 160 can be driven to move, so that the grounding probe 140 and the detection probe 160 can be relatively far away from or close to each other, that is, the distance between the grounding probe 140 and the detection probe 160 is adjustable. When detecting different types of power devices, the distance between the grounding probe 140 and the detection probe 160 can be adjusted according to the distance between the terminals of the power device, so as to adapt to power devices with different packaging structures, improve the versatility of the detection component 100 for power device detection, and greatly improve the contact measurement accuracy of frequency domain measurement and the versatility requirements of the test.

[0045] Specifically, the frequency sweep component 200 can provide a system that can generate a continuous frequency sweep wave, such as a vector network analyzer or an impedance analyzer, so that the detection component 100 is applicable to a system that can generate a continuous frequency sweep wave.

[0046] Specifically, in related technologies, frequency-domain reflectometry requires a dedicated test fixture for signal interconnection between the device and the input and output ports of the swept-frequency source. The designed test fixture must include a 50Ω impedance-matched line, such as a microstrip or stripline transmission line, for direct soldering of the signal and device terminals. 50Ω SMA connectors are designed at both ends of the line for signal input and output between the swept-frequency source and the transmission line. Furthermore, to ensure grounding of the third terminal of power devices such as triodes and transistors, dedicated ground vias are required in the fixture for connecting the device terminal to the ground of the swept-frequency source. This method is considered offline testing and cannot meet the requirements of online testing. The power device to be tested needs to be installed on a special fixture for testing. The terminals of the device to be tested need to be interconnected with the input and output ports of the sweep source and the grounding through soldering. The remaining solder cannot meet the testing requirements of the new packaged device. Compared with this method, the present application installs the grounding probe 140 and the detection probe 160 on the supporting component, and the distance between the grounding probe 140 and the detection probe 160 can be adjusted, so there is no need to disassemble the power device. Therefore, the present application can realize online detection of power devices and improve the versatility of the detection component 100 for power device detection.

[0047] Specifically, in the related art, there are dedicated microwave probes for online measurement of wafer chips. Microwave probes can be divided into GS probes / GSG probes, which are used to test the RF parameters of CMOS wafer chips. However, they need to be on a dedicated probe disk, and the spacing between the GS probes / GSG probes is fixed and cannot be adjusted (the spacing is at the μm level), and can only monitor a single type of chip. It cannot meet the detection requirements of different packaging forms of discrete devices (such as: To-247, To-220, To-92 and other packaging structures). At the same time, the GS probe / GSG probe is designed for a single port and does not connect the sweep source port 1 and port 2 ports. This requires the design of two dedicated probe clamping stations, which not only makes the entire measurement system complicated, but also makes it more difficult to maintain the consistency of the pressure of the two measurement probes at port 1 and port 2 ports. It will cause changes in the contact resistance between the probe and the chip pad or device terminal, which is very important for the accuracy of the test results of the frequency domain measurement. In this application, the distance between the grounding probe 140 and the detection probe 160 can be adjusted by providing a clamping assembly 110, thereby meeting the detection requirements of different packaging forms of different power devices, and the clamping assembly 110 fixes the grounding probe 140 and the detection probe 160, thereby ensuring the consistency of the position level between the grounding probe 140 and the detection probe 160, thereby improving the detection accuracy.

[0048] Specifically, a ground probe 140 and a detection probe 160 are provided to be connected to the terminals of the power device, thereby achieving single-port frequency domain measurement.

[0049] Specifically, the frame structure formed by the first clamping portion 120 and the second clamping portion 130 achieves consistency in positional levelness between the grounding probe 140 and the at least one detection probe 160 structures.

[0050] This embodiment provides a detection component 100. In addition to the technical features of the above embodiments, this embodiment further includes the following technical features.

[0051] like Figure 1 and Figure 5 As shown, the second clamping portion 130 includes a first sub-clamping portion 132 and a second sub-clamping portion 134; one end of the first sub-clamping portion 132 is connected to one end of the first clamping portion 120; the second sub-clamping portion 134 is connected to the other end of the first clamping portion 120 or the other end of the first sub-clamping portion 132; at least one detection probe 160 includes a first detection probe 162 and a second detection probe 164, the first detection probe 162 is arranged in the first sub-clamping portion 132, and the second detection probe 164 is arranged in the second sub-clamping portion 134.

[0052] In this embodiment, the second clamping portion 130 includes a first sub-clamping portion 132 and a second sub-clamping portion 134. One end of the first sub-clamping portion 132 is connected to one end of the first clamping portion 120, allowing the first sub-clamping portion 132 to slide relative to the first clamping portion 120. The second sub-clamping portion 134 is connected to the other end of the first clamping portion 120 or the other end of the first sub-clamping portion 132 to facilitate installation of the second sub-clamping portion 134. At least one detection probe 160 includes a first detection probe 162 and a second detection probe 164, i.e., there are two detection probes 160, allowing two detection probes 160 to detect power devices. The first detection probe 162 is inserted into the first sub-clamping portion 132 so that the first sub-clamping portion 132 secures the first detection probe 162, allowing the first sub-clamping portion 132 to drive the first detection probe 162 to move when the first sub-clamping portion 132 slides. The second detection probe 164 is passed through the second sub-clamping portion 134 so that the second sub-clamping portion 134 fixes the second detection probe 164, so that the second sub-clamping portion 134 can drive the second detection probe 164 to move when sliding. Therefore, when the power device has three terminals, the distance between the grounding probe 140, the first detection probe 162 and the second detection probe 164 is adjusted according to the different distances between the terminals, so as to detect the power device in accordance with the terminal adaptation, thereby realizing the adjustability of the spacing between the grounding probe 140, the first detection probe 162 and the second detection probe 164 structures.

[0053] Specifically, if Figure 1 and Figure 5 As shown, a first mounting hole is provided on the first sub-clamping portion 132, and a second mounting hole is provided on the second sub-clamping portion 134. The first detection probe 162 is inserted into the first mounting hole, and the second detection probe 164 is inserted into the second mounting hole; and a first through hole is provided on the side wall of the first mounting hole and is connected to the first mounting hole; a second through hole is provided on the side wall of the second mounting hole and is connected to the second mounting hole. When testing the power detection component 100, under special circumstances, it is necessary to disassemble the power device to test the internal structure. At this time, the heights of the measuring points are inconsistent, that is, the position heights of the various terminals in the power device are inconsistent. It is necessary to adjust the lengths (heights) of the first detection probe 162 and the second detection probe 164 in the axial direction so that the probes can match the positions of the terminals. After the heights of the first detection probe 162 and the second detection probe 164 are adjusted, the first fixing member is inserted into the first mounting hole so that the first fixing member can press the first detection probe 162, thereby fixing the first detection probe 162. The second fixing member is passed through the second mounting hole so that the second fixing member can press the second detection probe 164 , thereby fixing the second detection probe 164 , thereby adjusting the vertical heights of the first detection probe 162 and the second detection probe 164 .

[0054] This embodiment provides a detection component 100. In addition to the technical features of the above embodiments, this embodiment further includes the following technical features.

[0055] The sliding distance of the first clamping portion 120 is greater than or equal to 0.5 mm and less than or equal to 10 mm; the sliding distance of the first sub-clamping portion 132 is greater than or equal to 0.5 mm and less than or equal to 10 mm; the sliding distance of the second sub-clamping portion 134 is greater than or equal to 0.5 mm and less than or equal to 10 mm.

[0056] In this embodiment, the sliding distance of the first clamping part 120, the first sub-clamping part 132 and the second sub-clamping part 134 is greater than or equal to 0.5 mm and less than or equal to 10 mm. By adjusting the sliding distance of the first clamping part 120, the first sub-clamping part 132 and the second sub-clamping part 134, the spacing between the ground probe 140, the first detection probe 162 and the second detection probe 164 is adjusted. By setting the sliding distance of the first clamping part 120, the first sub-clamping part 132 and the second sub-clamping part 134 to be greater than or equal to 0.5 mm and less than or equal to 10 mm, the ground probe, the first detection probe 162 and the second detection probe 164 are adapted to the position of the frequency device terminal, which facilitates the detection component 100 to detect the power device.

[0057] This embodiment provides a detection component 100. In addition to the technical features of the above embodiments, this embodiment further includes the following technical features.

[0058] The moving directions of the first clamping portion 120 , the first sub-clamping portion 132 , and the second sub-clamping portion 134 are the same or different.

[0059] In this embodiment, the moving directions of the first clamping portion 120, the first sub-clamping portion 132, and the second sub-clamping portion 134 are the same or different. After determining the spacing between the terminals in the power device, the distance between the grounding probe 140, the first detection probe 162, and the second detection probe 164 is adjusted according to the spacing. At this time, the first clamping portion 120, the first sub-clamping portion 132, and the second sub-clamping portion 134 can be moved to adapt the grounding probe 140, the first detection probe 162, and the second detection probe 164 to each terminal, thereby facilitating the detection component 100 to detect the power device. When adjusting the spacing, the moving directions of the first clamping portion 120, the first sub-clamping portion 132, and the second sub-clamping portion 134 can be controlled to be the same or different, thereby making the adjustment of the spacing more convenient.

[0060] This embodiment provides a detection component 100. In addition to the technical features of the above embodiments, this embodiment further includes the following technical features.

[0061] One end of the first clamping portion 120 is provided with a first strip hole, and the other end is provided with a second strip hole; one end of the first sub-clamping portion 132 is provided with a third strip hole, and the other end is provided with a fourth strip hole; one end of the second sub-clamping portion 134 is provided with a fifth strip hole; the detection component 100 also includes a first connecting member 170 and a second connecting member 180, the first connecting member 170 is passed through the first strip hole and the third strip hole; when the second sub-clamping portion 134 is connected to the other end of the first clamping portion 120, the second connecting member 180 is passed through the fifth strip hole and the second strip hole; when the second sub-clamping portion 134 is connected to the other end of the first sub-clamping portion 132, the second connecting member 180 is passed through the fifth strip hole and the fourth strip hole.

[0062] In this embodiment, a first strip hole is provided at one end of the first clamping portion 120, and a second strip hole is provided at the other end; a third strip hole is provided at one end of the first sub-clamping portion 132, and a fourth strip hole is provided at the other end; a fifth strip hole is provided at one end of the second sub-clamping portion 134; and a first connecting member 170 is passed through the first strip hole and the third strip hole, so that the first connecting member 170 can fix the first clamping portion 120 and the first sub-clamping portion 132. The first connecting member 170 is provided as a long strip hole to facilitate movement of the first connecting member 170 within the strip hole. Therefore, when adjusting the distance between the grounding probe 140 and the first detection probe 162, the first connecting member 170 can be loosened first to allow the first clamping portion 120 and the first sub-clamping portion 132 to slide relative to each other. After sliding the first clamping portion 120 and the first sub-clamping portion to a preset distance, the first connecting member 170 is tightened to fix the first clamping portion 120 and the first sub-clamping portion 132. like Figure 5 、 Figure 6 and Figure 7 As shown, when the second sub-clamping portion 134 is connected to the other end of the first clamping portion 120, the second connecting member 180 is passed through the fifth strip hole and the second strip hole, that is, the first clamping portion 120 is located between the first sub-clamping portion 132 and the second sub-clamping portion 134, that is, the grounding probe 140 is located between the first detection probe 162 and the second detection probe 164. Therefore, when adjusting the distance between the grounding probe 140 and the second detection probe 164, the second connecting member 180 can be loosened first to allow the first clamping portion 120 and the second sub-clamping portion 134 to slide relative to each other. After sliding the first clamping portion 120 and the second sub-clamping portion to a preset distance, the second connecting member 180 is tightened to fix the first clamping portion 120 and the second sub-clamping portion 134, so as to adjust the distance between the grounding probe 140 and the second detection probe 164. Figure 1 、 Figure 3 and Figure 4As shown, when the second sub-clamping portion 134 is connected to the other end of the first sub-clamping portion 132, the second connecting member 180 is passed through the fifth strip hole and the fourth strip hole, that is, the first detection probe 162 is located between the grounding probe 140 and the second detection probe 164. Therefore, when adjusting the distance between the first detection probe 162 and the second detection probe 164, the second connecting member 180 can be loosened first so that the first sub-clamping portion 132 and the second sub-clamping portion 134 can slide relative to each other. After sliding the first sub-clamping portion 132 and the second sub-clamping portion to a preset distance, the second connecting member 180 is tightened to fix the first sub-clamping portion 132 and the second sub-clamping portion 134 to achieve adjustment of the distance between the first detection probe 162 and the second detection probe 164, that is, the adjustable fixation between the grounding probe 140, the first detection probe 162 and the second detection probe 164 is achieved through the movable first connecting member 170 and the second connecting member 180.

[0063] Specifically, the first connecting member 170 is a first bolt and a first nut, and the first bolt can be tightened with the first nut.

[0064] Specifically, the second connecting member 180 is a second bolt and a second nut, and the second bolt can be tightened with the second nut.

[0065] Specifically, the clamping assembly 110 and the first connecting member 170 and the second connecting member 180 designed between the grounding probe 140, the first detection probe 162 and the second detection probe 164, that is, the movable bolt fixing structure, realizes the adjustable distance between the grounding probe 140, the first detection probe 162 and the second detection probe 164, thereby being able to adapt to the universal testing requirements of discrete devices with different packaging structures (such as: To-247, To-220, To-92 and other packaging structures with different spacing between terminals).

[0066] This embodiment provides a detection component 100. In addition to the technical features of the above embodiments, this embodiment further includes the following technical features.

[0067] like Figure 1 and Figure 5 As shown, at least one detection probe 160 includes a first body 1622 and a first sleeve 1624; the first sleeve 1624 is detachably connected to one end of the first body 1622. After the first sleeve 1624 is disassembled, one end of the first body 1622 is embedded in the calibration component so that the plane of frequency domain measurement is calibrated from the sweep component 200 to one end of the first body 1622.

[0068] In this embodiment, at least one detection probe 160 includes a first body 1622 and a first sleeve 1624 ; the first sleeve 1624 is detachably connected to one end of the first body 1622 to achieve installation between the first sleeve 1624 and the first body 1622 . Since when detecting the power device, the plane of frequency domain measurement is located on the sweeping component 200, there is a certain distance between the sweeping component 200 and the position where at least one detection probe 160 contacts the power device. This distance will cause errors in the detection. Therefore, the first body 1622 and the first sleeve 1624 are set to a detachable structure. After the sweeping component 200 is connected to the detection component 100, the first sleeve 1624 can be removed first, and one end of the first body 1622 can be embedded in the calibration component to calibrate the plane of frequency domain measurement from the sweeping component 200 to one end of the first body 1622. After calibration, the first sleeve 1624 is installed on the first body 1622, and then the power device is detected using at least one detection probe 160. In this way, most of the measurement errors introduced by the detection component 100 can be eliminated, thereby improving the detection accuracy of the detection component 100 and ensuring the accuracy of the detection.

[0069] Specifically, first body 1622 and first sleeve 1624 are screwed together to allow calibration, allowing the measurement plane to be aligned from frequency sweep assembly 200 to the position of first sleeve 1624 within detection assembly 100. This substantially eliminates measurement errors introduced by detection assembly 100. After calibration, first sleeve 1624 can be mounted on detection assembly 100 for further measurement. This separate design meets the specific needs of high-precision dual-port frequency domain measurements.

[0070] Specifically, the first body 1622 and the first sleeve 1624 are designed to be separated. This allows the measurement plane to be calibrated from the frequency sweeping assembly 200 to the position of the first sleeve 1624 of the detection assembly 100 during calibration. This substantially eliminates measurement errors introduced by the detection assembly 100. This innovative separation design meets the special needs of high-precision dual-port frequency domain measurements.

[0071] This embodiment provides a detection component 100. In addition to the technical features of the above embodiments, this embodiment further includes the following technical features.

[0072] like Figure 2 As shown, the scanning component 200 includes a cable 210 and a connection port 220, one end of the cable 210 is connected to the connection port 220; at least one detection probe 160 is connected to the other end of the cable 210; one end of the grounding probe 140 is grounded through the clamping component 110, the cable 210 and the scanning component 200.

[0073] In this embodiment, the frequency sweeping assembly 200 includes a cable 210 and a connection port 220. One end of the cable 210 is connected to the connection port 220, allowing the frequency sweeping assembly 200 to input a detection signal into the cable 210. At least one detection probe 160 is connected to the other end of the cable 210, allowing the detection signal to enter the detection probe 160 through the cable 210. When the detection probe 160 is connected to a terminal of a power device, the detection signal can enter the power device through the detection probe 160. One end of the grounding probe 140 is grounded via the clamping assembly 110, the cable 210, and the frequency sweeping assembly 200. That is, the grounding probe 140 can be connected to the frequency sweeping assembly 200 via the clamping assembly 110, the housing of the detection probe 160, and the housing of the cable 210. This allows the detection signal to pass through the power device and then be output from the grounding probe 140, thereby forming a detection loop to detect the power device.

[0074] Specifically, the number of the detection probe 160 is one, so that single-port frequency domain measurement can be implemented.

[0075] This embodiment provides a detection component 100. In addition to the technical features of the above embodiments, this embodiment further includes the following technical features.

[0076] like Figure 2 As shown, the cable 210 includes a first cable 212 and a second cable 214, and the ports include an input port 222 and an output port 224; one end of the first cable 212 is connected to the input port 222, and the other end is connected to one end of the first detection probe 162; one end of the second cable 214 is connected to the output port 224, and the other end is connected to one end of the second detection probe 164; one end of the grounding probe 140 is grounded to the frequency scanning component 200 through the clamping component 110, the first cable 212, and the second cable 214.

[0077] In this embodiment, the cable 210 includes a first cable 212 and a second cable 214, and the ports include an input port 222 and an output port 224, so that the frequency sweeping component 200 can output and recover the detection signal. One end of the second cable 214 is connected to the output port 224, and the other end is connected to one end of the second detection probe 164, so that when the power device is detected, the detection signal can enter the power device from the frequency sweeping component 200. One end of the grounding probe 140 is grounded to the frequency sweeping component 200 through the clamping component 110, the first cable 212, and the second cable 214. One end of the first cable 212 is connected to the input port 222, and the other end is connected to one end of the first detection probe 162, so that the detection signal can enter the frequency sweeping component 200 from the output of the power device to complete the detection of the power device, thereby realizing the frequency domain measurement of the dual port.

[0078] Specifically, one end of the first detection probe 162 connected to the first cable 212 is provided with a threaded structure to facilitate connection between the first detection probe 162 and the first cable 212. The other end of the second detection probe 164 connected to the second cable 214 is provided with a threaded structure to facilitate connection between the second detection probe 164 and the second cable 214. The one end of the first detection probe 162 connected to the first cable 212 is provided with a threaded structure to facilitate connection between the first detection probe 162 and the first cable 212. The threaded structure interconnects port 1 (input port 222) and port 2 (output port 224) of the adjustable detection component 100 and the frequency sweep component 200 (e.g., a vector network analyzer or impedance analyzer). The first detection probe 162 and the second detection probe 164 are designed according to a conventional 50Ω characteristic impedance (composed of 50Ω internal wiring, an insulation layer, and a metal housing).

[0079] Specifically, at least one detection probe 160 and the sweep assembly 200 are systematically connected via a threaded engagement. A 50Ω internal transmission line within the at least one detection probe 160 and a 50Ω cable 210 of the sweep assembly 200 are press-fitted together via an SMA adapter. Adjusting the probe spacing enables in-circuit frequency domain measurement of discrete devices with different terminal spacings in different packages. This ensures 50Ω impedance matching between the sweep assembly 200, the detection assembly 100, and the power device, while avoiding the need for an external test fixture and soldering.

[0080] This embodiment provides a detection component 100. In addition to the technical features of the above embodiments, this embodiment further includes the following technical features.

[0081] like Figure 1 and Figure 5 As shown, the power device includes a first terminal, a second terminal and a third terminal; the other end of the ground probe 140 is provided with a first probe 150, and the first probe 150 can make ohmic contact with the first terminal; the other end of the first detection probe 162 is provided with a second probe 166, and the second probe 166 can make ohmic contact with the second terminal; the other end of the second detection probe 164 is provided with a third probe 168, and the third probe 168 can make ohmic contact with the third terminal.

[0082] In this embodiment, the power device includes a first terminal, a second terminal, and a third terminal. A first probe 150 is provided at the other end of a ground probe 140. The first probe 150 can make ohmic contact with the first terminal to enable transmission of a test signal. A second probe 166 is provided at the other end of a first test probe 162. The second probe 166 can make ohmic contact with the second terminal to enable transmission of a test signal. A third probe 168 is provided at the other end of a second test probe 164. The third probe 168 can make ohmic contact with the third terminal to enable transmission of a test signal.

[0083] Specifically, the ground probe 140 is interconnected with the ground of the frequency sweep assembly 200 through the SMA housings of the first detection probe 162 and the second detection probe 164 , while the first probe 150 is interconnected with the remaining third terminal of the power device through an ohmic contact.

[0084] Specifically, one end of the first detection probe 160 and the second detection probe 164 connected to the sweep frequency component 200 is designed as an SMA structure for direct interconnection with the input and output ports 224 of the sweep frequency component 200 signal, and the second probe 166 and the third probe 168 are interconnected with any two terminals of the power device through ohmic contact (artificial pressure is applied, and the probe head is rigid and non-stretchable).

[0085] Specifically, the first probe 150 , the second probe 166 , and the third probe 168 are needle-tip structures.

[0086] In one embodiment of the present invention, a detection instrument is provided, including the detection component 100 in any of the above embodiments. Therefore, the detection instrument includes all the beneficial effects of the detection component 100, which will not be repeated here.

[0087] In one embodiment of the present invention, a detection method is provided for detecting a power device, such as Figure 8 As shown, the detection method includes:

[0088] Step 302: Connect the detection component to the frequency scanning component;

[0089] Step 304: calibrating the detection component;

[0090] Step 306: Adjust the distance between the first clamping portion and the second clamping portion;

[0091] Step 308: contacting the ground probe and at least one detection probe in the detection assembly with the terminals of the power device;

[0092] Step 310: The frequency sweeping component transmits the detection signal to the power device through the detection component, and the detection signal is transmitted back to the frequency sweeping component after passing through the power device.

[0093] In this embodiment, a detection method is used to test power devices, enabling the detection component to detect impedance changes in the power device at different frequencies. Specifically, frequency-domain reflected impedance measurements can be used to quickly identify the failure type and damage level of the power device. The detection method includes connecting the detection component to a frequency sweeping component, thereby transmitting a detection signal to the detection component and calibrating the detection component to eliminate errors caused by the detection component, thereby improving detection precision and ensuring detection accuracy. A grounding probe and at least one detection probe in the detection component are brought into contact with terminals of the power device. The frequency sweeping component transmits the detection signal through the detection component to the power device, and after passing through the power device, the detection signal is transmitted back to the frequency sweeping component, thereby forming a detection signal transmission loop to enable testing of the power device. Because the grounding probe is mounted on a first clamping component and the at least one detection probe is mounted on a second clamping component, the distance between the grounding probe and the detection probe can be adjusted by adjusting the distance between the first clamping portion and the second clamping portion, so that the distance between the grounding probe and the detection probe matches the distance between the power component terminals, thereby enabling testing of different types of power devices.

[0094] like Figure 9 As shown, the detection method further includes:

[0095] Step 402: Connect the detection component to the frequency scanning component;

[0096] Step 404: embedding one end of at least one detection probe into the calibration component so that the plane of frequency domain measurement is calibrated from the frequency sweep component to the one end of the at least one detection probe;

[0097] Step 406: Adjust the distance between the first clamping portion and the second clamping portion;

[0098] Step 408: contacting the ground probe and at least one detection probe in the detection assembly with the terminals of the power device;

[0099] Step 410: The frequency sweeping component transmits the detection signal to the power device through the detection component, and the detection signal is transmitted back to the frequency sweeping component after passing through the power device.

[0100] In this embodiment, one end of at least one detection probe is embedded in the calibration component so that the plane of frequency domain measurement is calibrated from the sweep component to one end of at least one detection probe. In this way, most of the measurement errors introduced by the detection component can be eliminated, thereby improving the detection accuracy of the detection component and ensuring the accuracy of the detection.

[0101] In the claims, specification and drawings of the present invention, the term "plurality" refers to two or more. Unless otherwise expressly defined, the orientation or positional relationship indicated by the terms "upper" and "lower" is based on the orientation or positional relationship shown in the drawings. It is only for the purpose of more conveniently describing the present invention and making the description process simpler. It is not intended to indicate or imply that the device or element referred to must have the specific orientation described, be constructed and operated in a specific orientation. Therefore, these descriptions cannot be understood as limiting the present invention. The terms "connect", "install", "fix" and the like should be understood in a broad sense. For example, "connection" can be a fixed connection between multiple objects, or a detachable connection between multiple objects, or an integral connection; it can be a direct connection between multiple objects, or an indirect connection between multiple objects through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood based on the specific circumstances of the above data.

[0102] In the claims, specification, and drawings of the present invention, the terms "one embodiment," "some embodiments," "a specific embodiment," and the like mean that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In the claims, specification, and drawings of the present invention, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0103] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A detection component, characterized in that: The detection component is connected to the frequency sweep component and is used to detect the impedance change of the power device at different frequencies. The frequency sweep component includes a cable and a connection port, one end of the cable is connected to the connection port, and the detection component includes: A clamping assembly, the clamping assembly comprising a first clamping portion and a second clamping portion, one end of the first clamping portion being connected to one end of the second clamping portion; a grounding probe, the grounding probe being inserted into the first clamping portion; at least one detection probe, the at least one detection probe being inserted into the second clamping portion, being arranged in parallel with the grounding probe, and being capable of connecting to the power device; Wherein, the first clamping portion and the second clamping portion are capable of sliding relative to each other, so that the grounding probe and the at least one detection probe are relatively far away from or close to each other; The at least one detection probe includes a first body and a first sleeve; The first sleeve is detachably connected to one end of the first body. After the first sleeve is detached, one end of the first body is embedded in the calibration assembly so that the plane of frequency domain measurement is calibrated from the frequency sweep assembly to the one end of the first body. The at least one detection probe is connected to the other end of the cable; One end of the grounding probe is grounded through the clamping assembly, the cable and the frequency sweeping assembly.

2. The detection component according to claim 1, characterized in that The second clamping portion includes: a first sub-clamping portion, one end of the first sub-clamping portion being connected to one end of the first clamping portion; a second sub-clamping portion connected to the other end of the first clamping portion or the other end of the first sub-clamping portion; The at least one detection probe includes a first detection probe and a second detection probe. The first detection probe is disposed through the first sub-clamping portion, and the second detection probe is disposed through the second sub-clamping portion.

3. The detection component according to claim 2, characterized in that One end of the first clamping portion is provided with a first strip hole, and the other end is provided with a second strip hole; one end of the first sub-clamping portion is provided with a third strip hole, and the other end is provided with a fourth strip hole; one end of the second sub-clamping portion is provided with a fifth strip hole; The detection assembly further includes a first connecting member and a second connecting member, wherein the first connecting member is inserted through the first strip hole and the third strip hole; When the second sub-clamping portion is connected to the other end of the first clamping portion, the second connecting member is passed through the fifth strip hole and the second strip hole; when the second sub-clamping portion is connected to the other end of the first sub-clamping portion, the second connecting member is passed through the fifth strip hole and the fourth strip hole.

4. The detection component according to claim 2, characterized in that The cables include a first cable and a second cable, and the ports include an input port and an output port; One end of the first cable is connected to the input port, and the other end is connected to one end of the first detection probe; One end of the second cable is connected to the output port, and the other end is connected to one end of the second detection probe; One end of the grounding probe is grounded to the frequency sweeping component through the clamping component, the first cable, the second cable, and the grounding component.

5. The detection component according to claim 2, characterized in that: The power device includes a first terminal, a second terminal and a third terminal; The other end of the ground probe is provided with a first probe, and the first probe can be in ohmic contact with the first terminal; The other end of the first detection probe is provided with a second probe, and the second probe is capable of making ohmic contact with the second terminal; The other end of the second detection probe is provided with a third probe, and the third probe can be in ohmic contact with the third terminal.

6. A detection instrument, characterized in that: Comprising the detection component according to any one of claims 1 to 5.

7. A detection method, characterized in that: Used to detect power devices, the detection method includes: Connect the detection component to the frequency sweep component; calibrating the detection component; adjusting the distance between the first clamping portion and the second clamping portion; placing a ground probe and at least one detection probe in the detection assembly in contact with a terminal of the power device; The frequency sweep component transmits the detection signal to the power device through the detection component, and the detection signal is transmitted back to the frequency sweep component after passing through the power device; Calibrating the detection component includes: One end of the at least one detection probe is embedded in the calibration component, so that the plane of frequency domain measurement is calibrated from the frequency sweep component to the one end of the at least one detection probe.

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