Calibrable optical components
By combining ball joints and non-parallel calibration devices with guiding elements and airtight shielding devices, the problems of inaccurate orientation and jamming of optical components during calibration are solved, and the optical support achieves precise orientation and stable support in the maintenance structure.
CN115698809BActive Publication Date: 2026-05-26TRUMPF LASER SYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- TRUMPF LASER SYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
- Filing Date
- 2020-06-18
- Publication Date
- 2026-05-26
Smart Images
Figure CN115698809B_ABST
Abstract
The present invention relates to a calibrable optical assembly (10) comprising an optical support (12), an optical element (14) held on the optical support (12), and a retaining structure (16), wherein the optical support (12) is held in a ball joint (18) on the retaining structure (16), wherein a first calibration device (20) is provided for pivoting the optical support (12) relative to the retaining structure (16) about a first axis (24), wherein a second calibration device (22) is provided for pivoting the optical support (12) relative to the retaining structure (16) about a second axis (26), wherein the ball joint (18) is arranged between the optical element (14) and the first and second calibration devices (20, 22).
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