Switching device, light source assembly and testing equipment

Abstract

This application discloses a switching device. The switching device includes a first optical section, a second optical section, a first driving section, and a second driving section. The first optical section includes multiple sets of first optical elements. The second optical section includes multiple sets of second optical elements. The first optical section is connected to the first driving section, which drives the first optical section to move linearly to selectively switch a set of first optical elements in the optical path. The second optical section is connected to the second driving section, which drives the second optical section to rotate to selectively switch a set of second optical elements in the optical path. This application also discloses a light source assembly and a detection device. The first driving section can selectively switch a set of first optical elements into the optical path, and the second driving section can selectively switch a set of second optical elements into the optical path. Different combinations of first and second optical elements can achieve different light processing effects.

Description

Technical Field

[0001] This application relates to the field of industrial testing technology, and in particular to a switching device, a light source assembly, and a testing equipment. Background Technology

[0002] When inspecting samples, optical inspection equipment often needs to test different samples under varying illumination conditions based on their surface reflection or scattering characteristics. For example, semiconductor wafers exhibit significant differences in surface characteristics due to variations in processes and fabrications. Bare silicon wafers and those with fewer processes show obvious reflective properties, while wafers with multilayer processes and coatings exhibit more pronounced scattering characteristics. Based on these differences in wafer surface features, appropriate light source intensity and color must be selected for inspection and measurement to ensure clear visibility of these features and facilitate subsequent judgment. To obtain different illumination conditions, optical inspection equipment often requires multiple sets of different light source devices, resulting in a complex structure. Summary of the Invention

[0003] This application provides a switching device, a light source assembly, and a detection device.

[0004] The switching device in the embodiments of this application includes:

[0005] A first optical section, the first optical section comprising multiple sets of first optical elements;

[0006] The second optical section includes multiple sets of second optical elements;

[0007] A first driving unit, wherein the first optical unit is connected to the first driving unit, the first driving unit is used to drive the first optical unit to move in a straight line, so as to selectively switch a group of the first optical elements in the optical path; and

[0008] The second drive unit is connected to the second optical unit, and the second drive unit is used to drive the second optical unit to rotate so as to selectively switch a group of the second optical elements in the optical path.

[0009] In some embodiments, the switching device further includes a positioning unit, the positioning unit comprising:

[0010] A signal generator, wherein the signal generator is connected to the first optical unit and moves synchronously with the first optical unit; and

[0011] Multiple signal receivers are provided, and each of the multiple signal receivers corresponds to one of the multiple sets of the first optical elements. When a set of the first optical elements is switched to the optical path, the corresponding signal receiver is coupled to the signal generator, and the first driving unit stops driving.

[0012] In some embodiments, the positioning part further includes a mounting member having a plurality of grooves extending in a straight line, each groove having a signal receiver movably mounted therein.

[0013] In some embodiments, the signal generator includes a magnetic material, and the signal receiver includes a magnetic field sensor.

[0014] In some embodiments, the switching device further includes a fixing part, the fixing part comprising:

[0015] A first fixing member, the first fixing member being connected to the first driving part, the first fixing member abutting against a first side of the second optical part; and

[0016] The second fixing member is detachably connected to the first fixing member and abuts against the second side of the second optical part, wherein the first side and the second side are opposite sides of the second optical part.

[0017] In some embodiments, the second drive unit includes a motor, and the first fixing member includes:

[0018] A first sleeve is fitted onto and fixedly connected to the rotating shaft of the motor; the second optical component is fitted outside the first sleeve.

[0019] The first abutting edge is disposed on the outer wall of the first sleeve, and the first abutting edge abuts against the first side.

[0020] In some embodiments, the second fastener includes:

[0021] A second sleeve, which is fitted over the first sleeve and detachably connected to the first sleeve; and

[0022] The second abutting edge is disposed on the outer wall of the second sleeve, and the second abutting edge abuts against the second side.

[0023] In some embodiments, the second optical unit includes a turntable having a plurality of mounting positions distributed in a circular pattern, each mounting position being used to mount a set of the second optical elements.

[0024] In some embodiments, the number of the second optical element mounted in at least one of the mounting positions is one; and / or

[0025] The number of second optical elements installed in at least one of the mounting positions is multiple, and a spacer ring is provided between two adjacent second optical elements in the same mounting position.

[0026] In some embodiments, the first optical element is an attenuator or a filter; and / or

[0027] The second optical element is an attenuator or a filter.

[0028] The light source assembly of this application includes a light source, an optical transmission element, and a switching device as described in any embodiment of this application. The light inlet of the optical transmission element is aligned with the light source, and there is a transmission optical path between the light source and the light inlet. The switching device is used to selectively switch one set of the first optical elements and one set of the second optical elements to the transmission optical path.

[0029] The detection device of this application includes a light source assembly and a detection assembly. The light emitted from the light outlet of the light transmission component is projected onto the sample to be detected. The detection assembly is used to receive the light reflected or scattered by the sample.

[0030] In the switching device, light source assembly, and detection equipment of this application, a first driving unit can selectively switch a group of first optical elements into the optical path, and a second driving unit can selectively switch a group of second optical elements into the optical path. By using different combinations of first and second optical elements, different light processing effects can be obtained. That is, by using a switching device in conjunction with a light source, multiple illumination conditions can be provided for the sample to be detected to adapt to the properties of the sample, thus simplifying the structure of the detection equipment.

[0031] Additional aspects and advantages of the embodiments of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0032] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, wherein:

[0033] Figure 1 This is a schematic diagram of the planar structure of the detection device according to certain embodiments of this application;

[0034] Figure 2 This is a three-dimensional structural diagram of a light source assembly according to certain embodiments of this application;

[0035] Figure 3 This is a three-dimensional assembly diagram of the first optical part, the first driving part, and the positioning part according to certain embodiments of this application;

[0036] Figure 4 This is an exploded perspective view of the first optical section, the first driving section, and the positioning section according to certain embodiments of this application;

[0037] Figure 5 This is a three-dimensional assembly diagram of the second optical unit, the second driving unit, and the bracket according to certain embodiments of this application;

[0038] Figure 6 This is an exploded perspective view of the second optical unit, the second driving unit, and the bracket according to certain embodiments of this application;

[0039] Figure 7 This is an exploded perspective view of the second optical unit, the second driving unit, and the bracket according to certain embodiments of this application;

[0040] Figure 8 for Figure 5 The three-dimensional assembly schematic diagram shown is a cross-sectional schematic diagram along line VIII-VIII; and

[0041] Figure 9 for Figure 8 An enlarged diagram of section IX in the image.

[0042] Explanation of main components and symbols:

[0043] The device comprises: a testing device 1000, a sample A, a light source assembly 100, a testing assembly 200, a carrying device 300, a transfer device 400, a switching device 10, a first optical section 11, a first optical element 111, a second optical section 12, a second optical element 121, a first side 122, a second side 123, a turntable 124, a mounting position 1241, a spacer ring 125, a locking ring 126, a first driving section 13, a second driving section 14, a rotating shaft 141, a positioning section 15, a signal generator 151, a signal receiver 152, a mounting part 153, a groove 1531, a fixing part 16, a first fixing part 161, a first sleeve 1611, a first abutting edge 1612, a fixing hole 1613, a second fixing part 162, a second sleeve 1621, a second abutting edge 1622, a bracket 17, a light source 20, a light transmission component 30, and a light inlet 31. Detailed Implementation

[0044] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the embodiments of this application, and should not be construed as limiting the embodiments of this application.

[0045] Please see Figure 1 , Figure 1This is a schematic planar structure diagram of a detection device 1000 according to certain embodiments of this application. The detection device 1000 includes a light source assembly 100 and a detection assembly 200. The light source assembly 100 can be used to project light onto a sample A to be detected. The light reflected or scattered by the sample A to be detected is received by the detection assembly 200, and the detection assembly 200 detects the sample A based on the received light.

[0046] Specifically, the testing equipment 1000 can be a semiconductor testing equipment, semiconductor processing equipment, semiconductor manufacturing equipment, or a part thereof. The sample A to be tested can be any device or semi-finished product that needs to be tested. For example, sample A can be any device or semi-finished product such as a wafer, chip, display panel, glass, cover plate, substrate, shell, or thin film, without any limitation.

[0047] The light source assembly 100 is used to project light onto sample A. The light projected by the light source assembly 100 can enter sample A perpendicularly or obliquely, depending on the specific application requirements. In some examples, the incident angle of the light projected by the light source assembly 100 onto sample A can be adjusted.

[0048] The detection component 200 can perform bright-field or dark-field detection on sample A. Specifically, after the light source component 100 projects light onto sample A, the light can be reflected or scattered by sample A. The detection component 200 can detect whether there are defects on sample A (such as pits, bumps, scratches, cracks, etc.), measure the size of sample A (such as line width, roundness, parallelism, spacing, etc.), and detect the parameters of sample A (such as thickness, reflectivity, width, etc.) based on the received light. No limitations are imposed here.

[0049] Please continue reading. Figure 1 ,exist Figure 1 In the example shown, the detection device 1000 may further include a carrier device 300 and a transfer device 400. The carrier device 300 can be used to carry and fix the sample A to be tested. For example, the carrier device 300 can fix the sample A by adsorption, clamping, or other methods. In one example, the carrier device 300 can also be used to move the sample A relative to the light source assembly 100 and the detection assembly 200, so that the detection assembly 200 can detect different parts of the sample A. The transfer device 400 can be used to transport the sample A to be tested from the outside to the carrier device 300, or to remove the sample A that has already been tested from the carrier device 300.

[0050] The specific structure and working method of the light source assembly 100 will be described in detail below.

[0051] Please see Figure 2 , Figure 2This is a three-dimensional structural diagram of a light source assembly 100 according to certain embodiments of this application. The light source assembly 100 includes a light source 20, a light transmission element 30, and a switching device 10.

[0052] The light source 20 can be any device capable of emitting light, such as LED lights, laser emitters, halogen lamps, light boxes, etc. Depending on the needs of use, light sources 20 that emit light of different wavelengths can be selected, such as white light, ultraviolet light, infrared light, blue light, red light, etc., without any restrictions.

[0053] The optical transmission element 30 can be used to transmit light rays. For example, the optical transmission element 30 can be an optical fiber or an optical channel constructed from optical elements. The light inlet 31 of the optical transmission element 30 is aligned with the light source 20. A transmission optical path exists between the light source 20 and the light inlet 31, so that light rays emitted from the light source 20 pass through the transmission optical path and enter the optical transmission element 30 through the light inlet 31. Further, the light rays are transmitted within the optical transmission element 30 and emitted from the light outlet of the optical transmission element 30 to be projected onto the sample A to be tested.

[0054] The switching device 10 is located at least partially in the transmission optical path so that the switching device 10 can process the light in the transmission optical path, such as filtering and attenuation, in order to adjust the parameters of the light finally projected onto the sample A.

[0055] Please continue reading. Figure 2 The switching device 10 includes a first optical section 11, a second optical section 12, a first driving section 13, and a second driving section 14. The first optical section 11 includes multiple sets of first optical elements 111. The second optical section 12 includes multiple sets of second optical elements 121. The first optical section 11 is connected to the first driving section 13, which drives the first optical section 11 to move linearly, thereby selectively switching one set of first optical elements 111 in the optical path. The second optical section 12 is connected to the second driving section 14, which drives the second optical section 12 to rotate, thereby selectively switching one set of second optical elements 121 in the optical path.

[0056] The first driving unit 13 can selectively switch a set of first optical elements 111 into the optical path, and the second driving unit 14 can selectively switch a set of second optical elements 121 into the optical path. By using different combinations of the first optical elements 111 and the second optical elements 121, different light processing effects can be obtained. That is, by using a switching device 10 in conjunction with the light source 20, multiple illumination conditions can be provided for the sample A to be tested to adapt to the properties of the sample A to be tested, thus simplifying the structure of the detection device 1000.

[0057] Specifically, the first optical unit 11 includes multiple sets of first optical elements 111, such as two sets, three sets, four sets, or five sets of first optical elements 111. These multiple sets of first optical elements 111 can be arranged in a straight line to facilitate switching between different sets of first optical elements 111 in the transmission optical path when the first optical unit 11 moves in a straight line. Each set of first optical elements 111 may include one or more first optical elements 111, and the number of first optical elements 111 in different sets may be the same or different.

[0058] The second optical section 12 includes multiple sets of second optical elements 121, such as two sets, three sets, four sets, five sets, six sets, seven sets, or eight sets of second optical elements 121. These multiple sets of second optical elements 121 can be arranged in a circular pattern to facilitate switching between different sets of second optical elements 121 in the transmission optical path during the rotation of the second optical section 12. Each set of second optical elements 121 may include one or more second optical elements 121, and the number of second optical elements 121 in different sets may be the same or different.

[0059] The types of the first optical element 111 and the second optical element 121 can be selected according to actual needs. For example, the first optical element 111 (second optical element 121) can be any optical element such as an attenuator, filter, waveplate, or polarizer. The same group of first optical elements 111 (second optical element 121) can be any combination of any number of the above optical elements, without any limitation.

[0060] In one example, the second optical section 12 is closer to the light source 20 than the first optical section 11. The light emitted from the light source 20 passes through a set of second optical elements 121 before passing through a set of first optical elements 111. In another example, the first optical section 11 is closer to the light source 20 than the second optical section 12. The light emitted from the light source 20 passes through a set of first optical elements 111 before passing through a set of second optical elements 121.

[0061] Please continue reading. Figure 2The first driving unit 13 is connected to the first optical unit 11. The first driving unit 13 is used to drive the first optical unit 11 to move in a straight line, so as to selectively switch a group of first optical elements 111 located in the optical path. The first driving unit 13 can automatically drive the first optical unit 11 to move in a straight line under the action of control commands, without the need for manual operation, thereby improving the convenience of using the switching device 10. The first driving unit 13 can be a linear motor, a hydraulic mechanism, a pneumatic mechanism, etc., and is not limited here.

[0062] Since multiple sets of first optical elements 111 are arranged in a straight line, by driving the first optical unit 11 to move in a straight line, the positions of the multiple sets of first optical elements 111 relative to the transmission optical path can be switched. For example, one set of first optical elements 111 can be switched to be located in the transmission optical path, so that the set of first optical elements 111 processes the light in the transmission optical path. Therefore, by cooperating with the first optical unit 11 and the first driving unit 13, up to M processing methods for the light can be realized, where M is the number of sets of first optical elements 111.

[0063] The second driving unit 14 is connected to the second optical unit 12. The second driving unit 14 drives the second optical unit 12 to rotate, thereby selectively switching one set of second optical elements 121 in the optical path. Since multiple sets of second optical elements 121 are arranged in a circle, by driving the second optical unit 12 to rotate, the positions of multiple sets of second optical elements 121 relative to the transmission optical path can be switched. For example, one set of second optical elements 121 can be switched to be in the transmission optical path, so that the set of second optical elements 121 processes the light in the transmission optical path. Therefore, by cooperating with the second optical unit 12 and the second driving unit 14, up to N ways of processing light can be achieved, where N is the number of sets of second optical elements 121.

[0064] Therefore, through the cooperation of the first optical unit 11, the first driving unit 13, the second optical unit 12, and the second driving unit 14, the switching device 10 can realize up to M×N processing methods for light, where M is the number of groups of the first optical element 111 and N is the number of groups of the second optical element 121, so that a light source assembly 100 can provide up to M×N lighting conditions, greatly improving the applicability of the light source assembly 100.

[0065] Please see Figure 3 and Figure 4 ,in, Figure 3 This is a three-dimensional assembly diagram of the first optical unit 11, the first driving unit 13, and the positioning unit 15 according to certain embodiments of this application. Figure 4This is an exploded perspective view of the first optical unit 11, the first driving unit 13, and the positioning unit 15 according to certain embodiments of this application. In some embodiments, the switching device 10 further includes a positioning unit 15, which includes a signal generator 151 and multiple signal receivers 152. The signal generator 151 is connected to the first optical unit 11 and moves synchronously with it. The multiple signal receivers 152 correspond one-to-one with multiple sets of first optical elements 111. When a set of first optical elements 111 is switched into the optical path, the corresponding signal receiver 152 couples with the signal generator 151, and the first driving unit 13 stops driving.

[0066] By setting the positioning part 15, when the first driving part 13 drives the first optical part 11 to move, when a set of first optical elements 111 to be selected is just aligned with the transmission optical path, the first driving part 13 stops driving, so as to avoid the position of the first optical part 11 that is not the first optical element 111 blocking the transmission optical path.

[0067] Specifically, the signal generator 151 is connected to the first optical unit 11, for example, it can be detachably connected, or it can be connected to the moving part of the first driving unit 13. When the first driving unit 13 drives the first optical unit 11 to move, the signal generator 151 moves synchronously and continuously emits signals. The number of signal receivers 152 can be the same as the number of groups of first optical elements 111. Multiple signal receivers 152 correspond one-to-one with multiple groups of first optical elements 111. Multiple signal receivers 152 can be arranged in different positions, so that when a group of first optical elements 111 is located in the transmission optical path, the signal receiver 152 corresponding to that group of first optical elements 111 is exactly coupled to the signal generator 151.

[0068] After the signal receiver 152 is coupled to the signal generator 151, the signal receiver 152 can send a command to the first drive unit 13 to stop driving. The first drive unit 13 responds to the command and stops driving. At this time, the first optical unit 11 remains in a state where a set of first optical elements 111 are located in the transmission optical path. When driving needs to continue, the first drive unit 13 can be turned on again to drive the first optical unit 11 to move until another set of first optical elements 111 is switched into the transmission optical path.

[0069] In one example, the signal generator 151 includes a magnetic material, and the signal receiver 152 includes a magnetic field sensor. When the signal generator 151 moves close enough to one of the signal receivers 152, the signal generator 151 couples with that signal receiver 152, and the signal receiver 152 issues a command to stop the drive. In another example, the signal generator 151 can also be a light generator, and the signal receiver 152 can be a light receiver. When the light emitted by the signal generator 151 enters the signal receiver 152, it is considered that the signal generator 151 and the signal receiver 152 are coupled. Of course, the specific forms of the signal generator 151 and the signal receiver 152 can also be other, and are not limited here.

[0070] Please continue reading. Figure 3 and Figure 4 In some embodiments, the positioning part 15 further includes a mounting member 153, which has a plurality of grooves 1531 extending in a straight line, and a signal receiver 152 is movably mounted in each groove 1531.

[0071] The mounting member 153 can be stationary relative to the first optical unit 11. For example, the mounting member 153 can be mounted on the fixed part of the first driving unit 13 so that when the first optical unit 11 moves, the signal generator 151 moves relative to the mounting member 153 and the signal receiver 152. The groove 1531 opened on the mounting member 153 can be used to mount the signal receiver 152. In addition, the signal receiver 152 can slide in the groove 1531 to adjust the position of the signal receiver 152 in the groove 1531, so as to adjust the position where the first driving unit 13 stops driving, that is, to adjust the position where the first optical unit 11 stops moving, so that the first optical element 111 can stay in the position aligned with the transmission optical path.

[0072] Specifically, the groove 1531 can penetrate the mounting member 153 along the extension direction of the aforementioned straight line, so as to allow the signal receiver 152 to be inserted into the groove 1531 from the side of the mounting member 153, and the line connected to the signal receiver 152 can be at least partially accommodated in the groove 1531. The cross-sectional shape of the groove 1531 can be a shape with a larger bottom and a smaller top (e.g., an inverted pyramid). When the signal receiver 152 is installed in the groove 1531, the signal receiver 152 will not come out from the top of the groove 1531, but can only move along the straight extension direction of the groove 1531 under the action of external force.

[0073] Please see Figures 5 to 7 ,in, Figure 5 This is a three-dimensional assembly diagram of the second optical unit 12, the second driving unit 14, and the bracket 17 according to certain embodiments of this application. Figure 6 and Figure 7 This is an exploded perspective view of the second optical section 12, the second driving section 14, and the bracket 17 according to certain embodiments of this application. In some embodiments, the switching device 10 further includes a fixing section 16, which includes a first fixing member 161 and a second fixing member 162. The first fixing member 161 is connected to the first driving section 13 and abuts against the first side 122 of the second optical section 12. The second fixing member 162 is detachably connected to the first fixing member 161 and abuts against the second side 123 of the second optical section 12. The first side 122 and the second side 123 are opposite sides of the second optical section 12.

[0074] The first fixing member 161 and the second fixing member 162 respectively clamp the two sides (first side 122 and second side 123) of the second optical part 12, and the first fixing member 161 is connected to the first driving part 13, so that when the movable part of the first driving part 13 rotates, the fixing part 16 and the second optical part 12 rotate synchronously. In addition, the second fixing member 162 is detachably connected to the first fixing member 161, which facilitates the separation of the second fixing member 162 from the first fixing member 161 for the assembly and disassembly of the second optical part 12.

[0075] Please see Figures 6 to 9 ,in, Figure 8 for Figure 5 The schematic diagram of the three-dimensional assembly shown is a cross-sectional view along line VIII-VIII. Figure 9 for Figure 8 The enlarged schematic diagram of part IX shows that in some embodiments, the second drive unit 14 includes a motor, and the first fixing member 161 includes a first sleeve 1611 and a first abutting edge 1612. The first sleeve 1611 is sleeved on the rotating shaft 141 of the motor and is fixedly connected to the rotating shaft 141. The second optical unit 12 is sleeved outside the first sleeve 1611. The first abutting edge 1612 is provided on the outer wall of the first sleeve 1611 and abuts against the first side 122.

[0076] By setting the first sleeve 1611 and the first abutting edge 1612, the power of the second drive unit 14 can be transmitted to the second optical unit 12. Specifically, the second drive unit 14 includes a motor and can be mounted on the bracket 17 to support the second drive unit 14 and the second optical unit 12. The first sleeve 1611 is fixedly connected to the rotating shaft 141. For example, a fixing hole 1613 can be opened on the outer wall of the first sleeve 1611. When the first sleeve 1611 is sleeved on the outside of the rotating shaft 141, the first sleeve 1611 can be fixedly connected to the rotating shaft 141 by screws (not shown). When the rotating shaft 141 rotates, the first fixing member 161 rotates synchronously with the rotating shaft 141.

[0077] The first abutment edge 1612 is disposed on the outer wall of the first sleeve 1611. For example, the first abutment edge 1612 may be disposed at one end of the first sleeve 1611 and extend outward along the radial direction of the first sleeve 1611. The second optical part 12 is sleeved on the outside of the first sleeve 1611, and the first side 122 abuts against the first abutment edge 1612 to limit the travel of the second optical part 12 along one of the axial directions of the first sleeve 1611.

[0078] Please continue reading. Figures 6 to 9 In some embodiments, the second fastener 162 includes a second sleeve 1621 and a second abutting edge 1622. The second sleeve 1621 is sleeved outside the first sleeve 1611 and is detachably connected to the first sleeve 1611. The second abutting edge 1622 is disposed on the outer wall of the second sleeve 1621 and abuts against the second side 123.

[0079] By providing a second sleeve 1621 and a second abutment edge 1622, the power transmitted to the first sleeve 1611 can be transmitted to the second optical section 12 via the second sleeve 1621 and the second abutment edge 1622. Specifically, the second sleeve 1621 is detachably connected to the first sleeve 1611. For example, the inner wall of the second sleeve 1621 has an internal thread, and the outer wall of the first sleeve 1611 has an external thread. The first sleeve 1611 and the second sleeve 1621 can be detachably connected via the threads.

[0080] The second abutment edge 1622 is disposed on the outer wall of the second sleeve 1621. When the second sleeve 1621 and the first sleeve 1611 are connected in place, the second abutment edge 1622 abuts against the second side 123 of the second optical part 12. Thus, the first side 122 of the second optical part 12 is abutted by the first abutment edge 1612, and the second side 123 is abutted by the second abutment edge 1622. The second optical part 12 is clamped by the first abutment edge 1612 and the second abutment edge 1622. When the first abutment edge 1612 and the second abutment edge 1622 rotate, the second optical part 12 rotates synchronously.

[0081] When installing the second optical component 12, first, the second optical component 12 can be fitted over the first sleeve 1611, with the first side 122 abutting against the first abutting edge 1612. Then, the second sleeve 1621 can be fitted over the first sleeve 1611, and the depth of the first sleeve 1611 inside the second sleeve 1621 can be gradually increased until the second abutting edge 1622 abuts against the second side 123. The second optical component 12 is then installed. When it is necessary to disassemble the second optical component 12, first separate the second sleeve 1621 from the first sleeve 1611, and then remove the second optical component 12.

[0082] Please see Figure 6 and 7In some embodiments, the second optical unit 12 includes a turntable 124 with a plurality of mounting positions 1241 distributed in a circular pattern, each mounting position 1241 for mounting a set of second optical elements 121.

[0083] The second drive unit 14 is connected to the center of the turntable 124. When the second drive unit 14 drives the turntable 124 to rotate, multiple mounting positions 1241 are alternately located in the transmission optical path. By controlling the rotation angle of the turntable 124, a specified mounting position 1241 can be rotated to a position aligned with the transmission optical path. A set of second optical elements 121 mounted on the mounting position 1241 then processes the light.

[0084] Multiple mounting positions 1241 can be evenly distributed at equal angles. Each mounting position 1241 mounts a group of second optical elements 121. The number of second optical elements 121 in each group can be single or multiple, without limitation. In one example, at least one mounting position 1241 mounts one second optical element 121. In another example, please refer to [reference needed]. Figure 9 The number of second optical elements 121 installed in at least one mounting position 1241 is multiple. In the same mounting position 1241, a spacer ring 125 is provided between two adjacent second optical elements 121 to avoid scratching between two adjacent second optical elements 121.

[0085] Additionally, please see Figure 9 A locking ring 126 is also installed on each mounting position 1241. The locking ring 126 is used to hold the outermost second optical element 121 to prevent the second optical element 121 in the mounting position 1241 from falling out. The locking ring 126 can be detachably installed in the mounting position 1241, for example, by means of a threaded connection.

[0086] In summary, in the switching device 10, the light source assembly 100, and the detection device 1000 of this application embodiment, the first driving unit 13 can selectively switch a group of first optical elements 111 into the optical path, and the second driving unit 14 can selectively switch a group of second optical elements 121 into the optical path. By using different combinations of the first optical elements 111 and the second optical elements 121, different light processing effects can be obtained. That is, by using a switching device 10 in conjunction with the light source 20, multiple illumination conditions can be provided for the sample A to be detected to adapt to the properties of the sample A to be detected, thus simplifying the structure of the detection device 1000.

[0087] Of course, it should be noted that the switching device 10 and the light source assembly 100 of any embodiment of the present application described above can also be used in any device other than the detection device 1000, and are not limited to the detection device 1000 described above.

[0088] In the description of this specification, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with the described embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0089] Any process or method described in the flowchart or otherwise herein can be understood as representing a module, segment, or portion of code comprising one or more executable instructions for implementing a particular logical function or process, and the scope of the preferred embodiments of this application includes additional implementations in which functions may be performed not in the order shown or discussed, including substantially simultaneously or in reverse order depending on the function involved, as will be understood by those skilled in the art to which embodiments of this application pertain.

[0090] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A switching device, characterized in that, The switching device includes: A first optical section, the first optical section comprising multiple sets of first optical elements; The second optical section includes multiple sets of second optical elements; A first driving unit, wherein the first optical unit is connected to the first driving unit, the first driving unit is used to drive the first optical unit to move in a straight line, so as to selectively switch a group of the first optical elements in the optical path; and The second driving unit is connected to the second optical unit, and the second driving unit is used to drive the second optical unit to rotate so as to selectively switch a group of the second optical elements in the optical path; The switching device further includes a positioning unit, the positioning unit comprising: A signal generator, wherein the signal generator is connected to the first optical unit and moves synchronously with the first optical unit; and Multiple signal receivers are provided, and each of the multiple signal receivers corresponds to one of the multiple sets of the first optical elements. When a set of the first optical elements is switched to the optical path, the corresponding signal receiver is coupled to the signal generator, and the first driving unit stops driving. The positioning part further includes a mounting member, which has multiple grooves extending in a straight line. A signal receiver is movably mounted in each groove. The signal receiver can slide in the groove to adjust its position, thereby adjusting the position where the first driving part stops driving and the position where the first optical part stops moving, so that the first optical element can stay in a position aligned with the optical path. The groove has a cross-sectional shape that is larger at the bottom and smaller at the top. When the signal receiver is installed in the groove, it can prevent the signal receiver from coming out of the top of the groove and can only move along the straight extension direction of the groove under the action of external force.

2. The switching device according to claim 1, characterized in that, The signal generating device includes a magnetic material, and the signal receiving device includes a magnetic field sensor.

3. The switching device according to any one of claims 1 to 2, characterized in that, The switching device further includes a fixing part, the fixing part comprising: A first fixing member, the first fixing member being connected to the first driving part, the first fixing member abutting against a first side of the second optical part; and The second fixing member is detachably connected to the first fixing member and abuts against the second side of the second optical part, wherein the first side and the second side are opposite sides of the second optical part.

4. The switching device according to claim 3, characterized in that, The second drive unit includes a motor, and the first fixing member includes: A first sleeve is fitted onto and fixedly connected to the rotating shaft of the motor; the second optical component is fitted outside the first sleeve. The first abutting edge is disposed on the outer wall of the first sleeve, and the first abutting edge abuts against the first side.

5. The switching device according to claim 4, characterized in that, The second fastener includes: A second sleeve, which is fitted over the first sleeve and detachably connected to the first sleeve; and The second abutting edge is disposed on the outer wall of the second sleeve, and the second abutting edge abuts against the second side.

6. The switching device according to any one of claims 1 to 2, characterized in that, The second optical unit includes a turntable with a plurality of mounting positions distributed in a circular pattern, each mounting position being used to mount a set of the second optical elements.

7. The switching device according to claim 6, characterized in that, The number of the second optical element mounted in at least one of the mounting positions is one; and / or The number of second optical elements installed in at least one of the mounting positions is multiple, and a spacer ring is provided between two adjacent second optical elements in the same mounting position.

8. The switching device according to any one of claims 1 to 2, characterized in that, The first optical element is an attenuator or a filter; and / or The second optical element is an attenuator or a filter.

9. A light source assembly, characterized in that, The light source assembly includes: light source; An optical transmission device, wherein the light inlet of the optical transmission device is aligned with the light source, and a transmission optical path exists between the light source and the light inlet; and The switching device according to any one of claims 1 to 8, wherein the switching device is used to selectively switch one set of the first optical elements and one set of the second optical elements to the transmission optical path.

10. A testing device, characterized in that, The detection equipment includes: The light source assembly of claim 9, wherein the light emitted from the light outlet of the light transmission element is projected onto the sample to be tested; and A detection component for receiving light reflected or scattered by the sample.

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