Workpiece suction device and method for manufacturing a workpiece suction device

Abstract

A workpiece chucking device that chucks a workpiece has a chucking head that is provided with a first electrode portion and a second electrode portion, and chucks the workpiece by an electric field formed between the first electrode portion and the second electrode portion. The first electrode portion is provided by spanning two surfaces of a chucking surface of the chucking head that chucks the workpiece and a first surface connected to the chucking surface, and thus has a first corner portion. The second electrode portion is provided by spanning the two surfaces of the chucking surface of the chucking head and a second surface connected to the chucking surface, and thus has a second corner portion. The first corner portion and the second corner portion are opposite to each other.

Description

TECHNICAL FIELD

[0001] The present application relates to a workpiece suction device and a manufacturing method of a workpiece suction device. BACKGROUND

[0002] Conventionally, a workpiece is picked up and carried by a robot hand. In picking up a workpiece by a robot hand, in addition to a method of physically clamping and holding a workpiece, a method of suctioning a workpiece by vacuum suction or electrostatic suction is known.

[0003] For example, a method of transferring an electronic component in which an electronic circuit element is housed in a component container and an external connection electrode is provided on the outside of the component container in a vacuum atmosphere by electrostatic suction is known (for example, refer to Patent Literature 1). In this method, an electrostatic suction electrode is brought close to the surface of the external connection electrode, and the external connection electrode is electrostatically suctioned by applying a voltage between the external connection electrode and the electrostatic suction electrode.

[0004] PRIOR ART DOCUMENTS

[0005] PATENT LITERATURE

[0006] Patent Literature 1: Japanese Published Patent Application No. 2017-168724 SUMMARY OF THE INVENTION

[0007] PROBLEMS TO BE SOLVED BY THE INVENTION

[0008] However, for example, in a case where a small workpiece is picked up for assembly, it is desirable to accurately reproduce the suction position of the workpiece by the electrode for electrostatic suction at a certain position. However, according to the research by the present inventor, it was found that depending on the method of forming the electrode pattern for electrostatic suction, the position of the suctioned workpiece can be deviated.

[0009] An object of the present application is to provide a technology capable of stabilizing the position of a workpiece suctioned by electrostatic suction in a method of suctioning a workpiece by electrostatic suction. Another object of the present application is to provide a manufacturing method of a workpiece suction device suitable for stabilizing the suction position of a workpiece.

[0010] TECHNICAL SOLUTION

[0011] The workpiece chucking device of the example of the present application is a workpiece chucking device that chucks a workpiece, and has a chucking head that is provided with a first electrode portion and a second electrode portion, and that electrostatically chucks a workpiece by an electric field formed between the first electrode portion and the second electrode portion. The first electrode portion is provided so as to span an electrode surface of the chucking head that chucks a workpiece and a first surface that is connected to the electrode surface, and thus has a first corner portion. The second electrode portion is provided so as to span the electrode surface of the chucking head and a second surface that is connected to the electrode surface, and thus has a second corner portion. The first corner portion and the second corner portion are opposed to each other.

[0012] The manufacturing method of the workpiece chucking device of the example of the present application that has a support body provided with an electrode portion formed so as to span two surfaces and thus has a corner portion, and that electrostatically chucks a workpiece using the electrode portion, includes: a first step of placing the support body and an electrode for electrodeposition in an electrodeposition liquid; and a second step of, after the first step, applying a voltage with one of the electrode portion and the electrode for electrodeposition as a positive electrode and the other as a negative electrode, and thus forming a dielectric layer on the electrode portion.

[0013] Effects of the Invention

[0014] The workpiece chucking device of the example of the present application can stabilize the position of a workpiece that is electrostatically chucked. In addition, the manufacturing method of the workpiece chucking device of the example of the present application can appropriately manufacture a workpiece chucking device that can stabilize the chucking position of a workpiece. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a schematic view of a workpiece chucking device according to an embodiment of the present application.

[0016] Figure 2 is a schematic perspective view of a chucking head according to an embodiment of the present application.

[0017] Figure 3 is a schematic exploded perspective view of a chucking head according to an embodiment of the present application.

[0018] Figure 4 is a view for explaining a method of forming a dielectric layer using an electrodeposition method.

[0019] Figure 5A is a view showing a state in which a workpiece is electrostatically chucked in a workpiece chucking device according to an embodiment of the present application.

[0020] Figure 5B is a view showing a state in which a workpiece is electrostatically chucked in a workpiece chucking device according to a comparative example.

[0021] Figure 6is a schematic view showing the structure of a workpiece suction device according to a modification.

[0022] Figure 7 is an exploded perspective view of a suction head possessed by a workpiece suction device according to a modification. DETAILED DESCRIPTION

[0023] Hereinafter, example embodiments of the present application will be described in detail with reference to the accompanying drawings. In the present specification, in mutually orthogonal X, Y, and Z directions shown in the drawings, the direction parallel to the X direction is described as the left-right direction, the direction parallel to the Y direction is described as the front-rear direction, and the direction parallel to the Z direction is described as the up-down direction. In addition, the +X direction is described as the right side, the -X direction is described as the left side, the +Y direction is described as the front side, the -Y direction is described as the rear side, the +Z direction is described as the upper side, and the -Z direction is described as the lower side. However, these directions are merely names used for explanation and are not intended to limit the actual positional relationship and direction.

[0024] In addition, in the positional relationship of any one of the orientation, line, and surface with any other one, "parallel" includes not only a state in which both extend completely without intersecting to any extent, but also a substantially parallel state. In addition, "perpendicular" and "orthogonal" each include not only a state in which both intersect each other at 90 degrees, but also a substantially perpendicular state and a substantially orthogonal state. That is, "parallel", "perpendicular", and "orthogonal" each include a state in which there is an angular deviation in the positional relationship of both to an extent that does not depart from the gist of the present application.

[0025] <1. Structure of Workpiece Suction Device>

[0026] Figure 1 is a schematic view of a workpiece suction device 100 according to an embodiment of the present application. The workpiece suction device 100 is applied to, for example, a robot. The workpiece suction device 100 suctions a workpiece. The workpiece is an object that becomes a target of processing such as machining, inspection, or assembly. The workpiece is, for example, resin or metal. As shown in Figure 1 , the workpiece suction device 100 has a suction head 1. The suction head 1 constitutes, for example, at least a part of an end effector of a robot. In addition, in Figure 1 , the suction head 1 is shown by a cross-sectional view taken at a D-D position of Figure 2

[0027] Figure 2 is a schematic perspective view of the suction head 1 according to an embodiment of the present application. In addition, in Figure 2 , a dielectric layer 6 described later is omitted. As shown in Figure 2 ​As shown, in the present embodiment, the adsorption head 1 is a cuboid shape. However, the shape of the adsorption head 1 can be a shape other than a cuboid shape. The shape of the adsorption head 1 can be formed in various shapes according to the shape of the workpiece to be adsorbed. The adsorption head 1 can be, for example, a shape other than a cuboid shape, such as a prism shape, a cylinder shape, a spherical shape, or a semi-spherical shape.

[0028] The adsorption head 1 is composed of at least one insulating member. Thereby, for example, the adsorption head 1 can be formed using a resin, and thus the manufacturing of the adsorption head 1 can be easily performed. Figure 3 is a perspective view of the adsorption head 1 of the present embodiment. As shown in Figure 3 As shown, in the present embodiment, the adsorption head 1 is composed of a first member 11 and a second member 12 made of resin. However, the adsorption head 1 can be composed of a single insulating member or three or more insulating members.

[0029] The first member 11 has a main body portion 11a of a cuboid shape, a first protrusion 11b of a cuboid shape protruding to the right from the right side surface of the main body portion 11a, and a second protrusion 11c. The first protrusion 11b is disposed in front of and below the right side surface of the main body portion 11a. The second protrusion 11c is disposed behind and below the right side surface of the main body portion 11a. The front side surface of the first protrusion 11b is located in the same plane as the front side surface of the main body portion 11a. The back side surface of the second protrusion 11c is located in the same plane as the back side surface of the main body portion 11a. The first protrusion 11b and the second protrusion 11c are disposed apart in the front-back direction. The lower surfaces of the first protrusion 11b and the second protrusion 11c are located in the same plane as the lower surface of the main body portion 11a. The first protrusion 11b and the second protrusion 11c extend from the lower end of the main body portion 11a to a position halfway between the lower end and the upper end of the main body portion 11a. The first protrusion 11b and the second protrusion 11c are symmetrical with respect to a bisector surface that bisects the main body portion 11a in the front and back directions.

[0030] The second member 12 is a cuboid shape. In the present embodiment, the second member 12 has the same shape as the main body portion 11a of the first member 11. The right side surfaces of the first protrusion 11b and the second protrusion 11c of the first member 11 are joined to the left side surfaces of the second member 12, and the entire adsorption head 1 is formed in a cuboid shape. The joining of the first member 11 and the second member 12 can be performed using, for example, an adhesive or double-sided tape.

[0031] As shown in detail, the adsorption head 1 has a groove portion 13 recessed downward in the central portion in the left-right direction of the upper surface la. The groove portion 13 extends in the front-back direction from the front end to the rear end of the adsorption head 1. In detail, the inner surface of the groove portion 13 is formed by a first surface lb and a second surface lc (refer to FIG. 2) that are opposite in the left-right direction. Figure 2 As shown in detail, the adsorption head 1 has a groove portion 13 recessed downward in the central portion in the left-right direction of the upper surface la. The groove portion 13 extends in the front-back direction from the front end to the rear end of the adsorption head 1. In detail, the inner surface of the groove portion 13 is formed by a first surface lb and a second surface lc (refer to FIG. 2) that are opposite in the left-right direction. Figure 1), and a third face 1d orthogonal to the first face 1b and the second face 1c. The first face 1b, which is one of the inner faces of the groove portion 13, is the right side face of the first member 11. The second face 1c, which is the other of the inner faces of the groove portion 13, is the left side face of the second member 12. The third face 1d, which is the inner bottom face of the groove portion 13, is the upper face of the first protrusion 11b and the second protrusion 11c.

[0032] In addition, as shown in FIG. 1, the upper end of a through-hole 14 that penetrates in the up-down direction is provided on the third face 1d. That is, the groove portion 13 is connected to the through-hole 14. The inner face of the through-hole 14 is constituted by the first face 1b, the second face 1c, the rear side face of the first protrusion 11b, and the front side face of the second protrusion 11c. Figure 1

[0033] The first electrode portion 2 and the second electrode portion 3 are provided on the suction head 1. That is, the suction head 1 has the first electrode portion 2 and the second electrode portion 3. The first electrode portion 2 and the second electrode portion 3 are constituted by, for example, a metal such as copper or aluminum. In addition, the first electrode portion 2 and the second electrode portion 3 can be constituted by an alloy or a conductor other than a metal such as conductive carbon.

[0034] The suction head 1 electrostatically suctions a work by an electric field formed between the first electrode portion 2 and the second electrode portion 3. In detail, an electric field is formed between the first electrode portion 2 and the second electrode portion 3 by applying a voltage between the first electrode portion 2 and the second electrode portion 3. The first electrode portion 2 and the second electrode portion 3 constitute a so-called bipolar electrostatic chuck. The electrostatic chuck constituted by the first electrode portion 2 and the second electrode portion 3 can be either of a Coulomb force type and a Johnson-Rahbek force type. The electrostatic chuck of the present embodiment is of the Coulomb force type.

[0035] In the present embodiment, a portion of each of the first electrode portion 2 and the second electrode portion 3 is provided on the upper face 1a of the suction head 1. When a voltage is applied to the first electrode portion 2 and the second electrode portion 3, a work is suctioned to the upper face 1a of the suction head 1 via the first electrode portion 2 and the second electrode portion 3. That is, in the present embodiment, the upper face 1a of the suction head 1 constitutes a suction face that suctions a work. Hereinafter, the upper face 1a of the suction head 1 is sometimes referred to as a suction face 1a.

[0036] In addition, in detail, the suction face 1a does not directly contact a work, and a substance including the first electrode portion 2 and the second electrode portion 3 is present between the suction face 1a and the up-down direction of the work. In addition, in the present embodiment, the suction face 1a is divided in the left-right direction by the presence of the groove portion 13. The first electrode portion 2 is provided on the divided left side, and the second electrode portion 3 is provided on the divided right side. In addition, the size of the electrode portion as a whole provided to the suction face 1a is preferably a size equivalent to a suctioned face of a work.

[0037] ​The first electrode portion 2 is arranged so as to have a first corner portion 2a by spanning the adsorption surface 1a of the adsorption head 1 and the first surface 1b connected to the adsorption surface 1a. In the present embodiment, the adsorption surface 1a and the first surface 1b are orthogonal to each other. However, since it is sufficient that the adsorption surface 1a and the first surface 1b are connected with the first corner portion 2a, the angle between the adsorption surface 1a and the first surface 1b can be an acute angle or an obtuse angle.

[0038] In the present embodiment, the adsorption surface portion 2b provided on the adsorption surface 1a of the first electrode portion 2 has a rectangular shape. Further, the first surface portion 2c provided on the first surface 1b of the first electrode portion 2 has a rectangular shape. In the first electrode portion 2, the first surface portion 2c extends from one end of the adsorption surface portion 2b with the same width as the adsorption surface portion 2b. That is, the width of the first electrode portion 2 is constant without changing with the first corner portion 2a as a boundary. The width referred to here is the width in the front-rear direction. Further, the first surface portion 2c extends downward from the right end of the adsorption surface portion 2b.

[0039] Further, the width of the first electrode portion 2 can change with the first corner portion 2a as a boundary. That is, the width in the front-rear direction of the adsorption surface portion 2b and the first surface portion 2c can be different. Further, the shapes of the adsorption surface portion 2b and the first surface portion 2c can be shapes other than a rectangular shape, such as a semicircular shape. The shapes of the adsorption surface portion 2b and the first surface portion 2c can be different from each other.

[0040] In the present embodiment, as shown in Figs. 1 and 2, the first electrode portion 2 is arranged so as to have a first corner portion 2a by spanning the adsorption surface 1a of the adsorption head 1 and the first surface 1b connected to the adsorption surface 1a. Figure 1 Figure 3 As shown in Figs. 1 and 2, a first wiring portion 4 having a width narrower than the first electrode portion 2 is provided on the first surface 1b. The first wiring portion 4 is preferably composed of the same material as the first electrode portion 2. The first wiring portion 4 extends from the first surface portion 2c of the first electrode portion 2 to the lower end of the first surface 1b. The first wiring portion 4 passes through the through-hole 14. Further, the first wiring portion 4 provided on the adsorption head 1 can be regarded as a part of the first electrode portion 2.

[0041] Further, the second electrode portion 3 has a second corner portion 3a by being arranged so as to span the adsorption surface 1a of the adsorption head 1 and the second surface 1c connected to the adsorption surface 1a. The adsorption surface 1a and the second surface 1c are different surfaces. In the present embodiment, the adsorption surface 1a and the second surface 1c are orthogonal to each other. However, since it is sufficient that the adsorption surface 1a and the second surface 1c are connected with the second corner portion 3a, the angle between the adsorption surface 1a and the second surface 1c can be an acute angle or an obtuse angle.

[0042] ​In this embodiment, the adsorption surface portion 3b provided on the adsorption surface 1a of the second electrode portion 3 is rectangular in shape. Similarly, the second surface portion 3c provided on the second surface 1c of the second electrode portion 3 is rectangular in shape. In the second electrode portion 3, the second surface portion 3c extends from one end of the adsorption surface portion 3b with the same width as the adsorption surface portion 3b. That is, the width of the second electrode portion 3 does not change with respect to the second corner portion 3a, but remains constant. Here, the width refers to the width in the front-to-back direction. Furthermore, the second surface portion 3c extends downward from the left end of the adsorption surface portion 3b.

[0043] Furthermore, the width of the second electrode portion 3 can vary with the second corner portion 3a as the boundary. That is, the widths of the adsorption surface portion 3b and the second surface portion 3c in the front-back direction can also be different. In addition, the shapes of the adsorption surface portion 3b and the second surface portion 3c can also be shapes other than rectangles, such as semicircles. The shapes of the adsorption surface portion 3b and the second surface portion 3c can also be different from each other.

[0044] In this embodiment, such as Figure 1 As shown, a second wiring portion 5, narrower than the second electrode portion 3, is provided on the second surface 1c. The second wiring portion 5 is preferably made of the same material as the second electrode portion 3. The second wiring portion 5 extends from the second surface portion 3c of the second electrode portion 3 to the lower end of the second surface 1c. The second wiring portion 5 passes through the through hole 14. Alternatively, the second wiring portion 5 provided on the adsorption head 1 can also be considered as part of the second electrode portion 3.

[0045] In this embodiment, the first electrode portion 2 and the second electrode portion 3 are symmetrical with respect to the bisecting plane that divides the adsorption head 1 into two equal parts to the left and right. However, the first electrode portion 2 and the second electrode portion 3 may also be asymmetrical with respect to the bisecting plane that divides the adsorption head 1 into two equal parts to the left and right. Similarly, the first wiring portion 4 and the second wiring portion 5 are symmetrical with respect to the bisecting plane that divides the adsorption head 1 into two equal parts to the left and right. However, the first wiring portion 4 and the second wiring portion 5 may also be asymmetrical with respect to the bisecting plane that divides the adsorption head 1 into two equal parts to the left and right.

[0046] The first face 1b and the second face 1c are faces provided inside the suction head 1. That is, the first face 1b can also be referred to as a first inner face, and the second face 1c can also be referred to as a second inner face. Therefore, the first face 1b and the second face 1c can be arranged opposite to each other. Also, a portion of the first electrode portion 2 arranged on the first face 1b and a portion of the second electrode portion 3 arranged on the second face 1c can be arranged opposite to each other. In the present embodiment, the first face 1b and the second face 1c are arranged opposite to each other in the left-right direction inside the suction head 1. As a result, the first corner portion 2a is opposite to the second corner portion 3a. In detail, the first corner portion 2a and the second corner portion 3a are opposite to each other in the left-right direction. The first corner portion 2a and the second corner portion 3a can be directly opposite to each other, or can be indirectly opposite to each other with a member interposed therebetween. In the present embodiment, the first electrode portion 2 and the second electrode portion 3 are covered with the dielectric layer 6 described later, and thus correspond to the latter.

[0047] According to the present structure, the first corner portion 2a and the second corner portion 3a, in which the electric field intensity is likely to become large, can be arranged at a position where the first electrode portion 2 and the second electrode portion 3 for electrostatic suction face each other. Therefore, the electric field intensity can be made strongest between the electrodes of the first electrode portion 2 and the second electrode portion 3, and the workpiece can be stably sucked at a position across both the pair of electrode portions 2, 3. According to the present structure, since the workpiece can be stably sucked at a certain position, the pickup work of the small workpiece can be efficiently performed.

[0048] In the present embodiment, a gap S that separates the first corner portion 2a and the second corner portion 3a is provided between the first face 1b and the second face 1c. In detail, the gap S is constituted by the groove portion 13 described above. By the groove portion 13, the first electrode portion 2 and the second electrode portion 3 including the first corner portion 2a and the second corner portion 3a are arranged opposite to each other with a space in the left-right direction.

[0049] If such a structure is employed, the dielectric constant inside the suction head 1 can be suppressed to be lower than in a case where the left-right direction between the first electrode portion 2 and the second electrode portion 3 is filled with an insulating member (see Figure 6 ).

[0050] In this embodiment, preferably, the adsorption head 1 has a dielectric layer 6 covering at least a portion of the first electrode portion 2 and the second electrode portion 3. In this embodiment, the first electrode portion 2 and the second electrode portion 3 are entirely covered by the dielectric layer 6. Furthermore, the first wiring portion 4 and the second wiring portion 5 are also covered by the dielectric layer 6. The dielectric layer 6 is preferably made of a material and has a thickness capable of withstanding the voltage applied to the first electrode portion 2 and the second electrode portion 3. The dielectric layer 6 may be, for example, a polyimide or polyurethane resin. Alternatively, the dielectric layer 6 may be a structure that covers only a portion of the first electrode portion 2 and the second electrode portion 3; for example, the dielectric layer 6 may also be a structure that covers the first electrode portion 2 and the second electrode portion 3 disposed on the adsorption surface 1a.

[0051] By providing the dielectric layer 6, the workpiece adsorption device 100 can be used not only when the workpiece is an insulating component, but also when the workpiece is a conductive component such as a metal. Furthermore, by providing the dielectric layer 6, a short circuit can be prevented between the first electrode portion 2 and the second electrode portion 3 when a high voltage is applied between them. Additionally, by providing the dielectric layer 6, for example, it is possible to prevent the workpiece from being directly placed on the first electrode portion 2 and the second electrode portion 3, thus suppressing deformation of the first electrode portion 2 and the second electrode portion 3.

[0052] In this embodiment, such as Figure 1 As shown, the workpiece adsorption device 100 also includes a power supply unit 7 electrically connected to the first electrode unit 2. The power supply unit 7 is electrically connected to the first electrode unit 2 via a first wiring unit 4. The power supply unit 7 can be provided on the adsorption head 1 or outside the adsorption head 1. If the power supply unit 7 is provided outside the adsorption head 1, an additional wiring is required to connect it to the first wiring unit 4. The power supply unit 7 is preferably a high-voltage power supply. The voltage applied by the power supply unit 7 is, for example, about 1kV to 10kV.

[0053] The second electrode section 3 is grounded. Specifically, the second electrode section 3 is grounded by connecting to a grounding wire via the second wiring section 5. According to this structure, a workpiece can be electrostatically adsorbed by the electric field formed between the first electrode section 2 and the second electrode section 3 through a high voltage applied by the power supply section 7. The power supply section 7 preferably has a switch for switching on and off, or an adjustment section for adjusting the applied voltage. Alternatively, a structure can be adopted in which one of the first electrode section 2 and the second electrode section 3 is connected to the positive terminal of the power supply section, and the other is connected to the negative terminal of the power supply section.

[0054] <2. Manufacturing method of workpiece adsorption device>

[0055] Next, a manufacturing method of the workpiece chucking device 100 that uses the electrode portions to electrostatically chuck a workpiece will be described. The electrode portions are formed so as to span two surfaces, and thus have a corner portion. The workpiece chucking device 100 has a support body 10 to which the electrode portions are attached. In detail, the first electrode portion 2 is formed so as to span two surfaces, and thus has a first corner portion 2a. The second electrode portion 3 is formed so as to span two surfaces, and thus has a second corner portion 3a. The workpiece chucking device 100 has a support body 10 to which the first electrode portion 2 and the second electrode portion 3 are attached. The support body 10 is the chucking head 1 or a component that constitutes the chucking head 1. In the present embodiment, the support body 10 is a first component 11 and a second component 12 that constitute the chucking head 1.

[0056] First, the first component 11 and the second component 12 that constitute the chucking head 1 are formed by an injection molding method. On the surfaces of the first component 11 and the second component 12, the first electrode portion 2 and the second electrode portion 3, and the first wiring portion 4 and the second wiring portion 5 are formed by a MID (Molded Interconnect Device) process. The MID process has various methods, and for example, in an LDS (Laser Direct Structuring) method, a special resin material containing a metal catalyst is used to perform injection molding to form a structure, and then the metal catalyst of the irradiated portion is activated by irradiating laser light. By performing electroless plating in this state, and then performing electrolytic plating, a metal film pattern can be formed on the portion of the resin structure on which laser light is irradiated.

[0057] In addition, in the case where the chucking head 1 to which the first electrode portion 2 and the second electrode portion 3, and the first wiring portion 4 and the second wiring portion 5 are attached is constituted by a single insulating component, instead of the MID process, a technique (AM-MID technique) that combines a MID process and an additive manufacturing method (AM) can also be used for the manufacturing of the chucking head 1.

[0058] In the AM-MID technology, instead of the injection molding method in the MID process, for example, a powder bed fusion bonding method in the additive manufacturing method is used. The powder bed fusion bonding method is a process in which powder material is layered one layer at a time, and a cross-sectional shape is fused using an energy source such as a laser or an electron beam, and then solidified to perform molding. In the powder bed fusion bonding method, molding can be performed using a laser to activate a metal complex added to the powder material, and formation of a conductor pattern can be performed at the same time as the molding. By performing plating treatment on the portion in which the metal complex is activated using a laser in the molding, the suction head 1 provided with the first electrode portion 2 and the second electrode portion 3, and the first wiring portion 4 and the second wiring portion 5 can be obtained. By manufacturing using the AM-MID technology, it is possible to freely form a conductor pattern not only on the surface of the suction head 1 but also inside.

[0059] The dielectric layer 6 that covers the first electrode portion 2 and the second electrode portion 3 can be formed, for example, by bonding a dielectric sheet such as a polyimide sheet on the surface of the suction head 1. In addition, the dielectric layer 6 can be formed by spraying. In addition, the dielectric layer 6 can be formed by an electrodeposition method. Figure 4 FIG. 8 is a view for explaining a method of forming the dielectric layer 6 using an electrodeposition method.

[0060] When the dielectric layer 6 is formed using the electrodeposition method, in addition to the first member 11 in which the first electrode portion 2 is formed and the second member 12 in which the second electrode portion 3 is formed, an electrodeposition bath 201 into which an electrodeposition solution 200 is put, an electrode for electrodeposition 202, and a direct current power source 203 for applying a voltage are prepared. The electrodeposition solution 200 contains a resin component that forms the dielectric layer 6. The method of forming the dielectric layer 6 in the workpiece suction device 100 has a first process and a second process. That is, the method of manufacturing the workpiece suction device 100 has a first process and a second process.

[0061] In the first process, the support 10 and the electrode for electrodeposition 202 are put into the electrodeposition solution 200. In other words, in the first process, at least a part of the suction head 1 and the electrode for electrodeposition 202 are put into the electrodeposition solution 200. In the present embodiment, the first electrode portion 2 and the second electrode portion 3 covered by the dielectric layer 6 are provided on different members. For this reason, the first member 11 in which the first electrode portion 2 is formed and the second member 12 in which the second electrode portion 3 is formed are put into the electrodeposition solution 200.

[0062] In addition, in the present embodiment, the adsorption head 1 is composed of the first member 11 and the second member 12, and since both of the members 11, 12 are placed in the electrodeposition solution 200, it can be said that the adsorption head 1 is placed in the electrodeposition solution 200. However, in the case where the member constituting the adsorption head 1 includes a member on which the first electrode portion 2 and the second electrode portion 3 are not arranged, the member can not be placed in the electrodeposition solution 200. That is, only a part of the adsorption head 1 can be placed in the electrodeposition solution 200. In addition, the first member 11 and the second member 12 placed in the electrodeposition solution 200 can be in a state where the entirety is immersed in the electrodeposition solution 200, or can be in a state where a part is immersed in the electrodeposition solution 200.

[0063] In addition, in the present embodiment, in correspondence with the placement of the two members of the first member 11 and the second member 12 in the electrodeposition solution 200, the two electrodeposition electrodes 202 are placed in the electrodeposition solution 200. Specifically, one of the two electrodeposition electrodes 202 is arranged opposite to the side of the first member 11 on which the first electrode portion 2 and the first wiring portion 4 are formed. The other of the two electrodeposition electrodes 202 is arranged opposite to the side of the second member 12 on which the second electrode portion 3 and the second wiring portion 5 are formed.

[0064] In the second process, after the first process, one of the electrode portions and the electrodeposition electrodes 202 is used as a positive electrode, and the other is used as a negative electrode, and a voltage is applied to form the dielectric layer 6 on the electrode portions. In other words, in the second process, after the first process, one of the first electrode portion 2 and the second electrode portion 3 and the electrodeposition electrodes 202 is used as a positive electrode, and the other is used as a negative electrode, and a voltage is applied to form the dielectric layer 6. The application of the voltage is performed using the direct current power source 203. By applying the voltage, the components of the electrodeposition solution 200 that become the dielectric layer 6 are electrophoresed, and the dielectric layer 6 is deposited on the surfaces of the first electrode portion 2 and the second electrode portion 3.

[0065] In the present embodiment, the first wiring portion 4 connected to the first electrode portion 2 is provided on the first member 11. In addition, the second wiring portion 5 connected to the second electrode portion 3 is provided on the second member 12. Therefore, specifically, the first electrode portion 2, the second electrode portion 3, the first wiring portion 4, the second wiring portion 5, and one of the two electrodeposition electrodes 202 are used as a positive electrode, and the other is used as a negative electrode.

[0066] For example, in the case where the first electrode portion 2, the second electrode portion 3, the first wiring portion 4, and the second wiring portion 5 are negative electrodes, the two electrodeposition electrodes 202 are positive electrodes, and a voltage is applied by the direct current power supply 203. Thus, not only the first electrode portion 2 and the second electrode portion 3, but also the first wiring portion 4 and the second wiring portion 5 are covered with the dielectric layer 6. Which of the first electrode portion 2, the second electrode portion 3, the first wiring portion 4, the second wiring portion 5, and the two electrodeposition electrodes 202 is made the positive electrode, and which is made the negative electrode is determined by the composition of the electrodeposition solution 200 used.

[0067] According to the structure in which the dielectric layer 6 is formed using the electrodeposition method, the dielectric layer 6 is preferentially formed from a portion where a strong electric field is generated when electrostatic chucking is performed using the workpiece chucking device 100, and the formation of the dielectric layer 6 in this portion can be inhibited. Thus, according to the present structure, the workpiece chucking device 100 in which the insulation during use can be appropriately ensured can be efficiently manufactured. The portion where a strong electric field is generated when electrostatic chucking is performed is, for example, the first corner portion 2a and the second corner portion 3a, and the dielectric layer 6 can be formed in the first corner portion 2a and the second corner portion 3a with an appropriate thickness.

[0068] In addition, in the above description, the first electrode portion 2 formed on the first member 11 and the second electrode portion 3 formed on the second member 12 are configured to be collectively processed in one electrodeposition bath 201, but can be configured to be processed using different electrodeposition baths for each member 11, 12.

[0069] The first member 11 and the second member 12 in which the dielectric layer 6 is formed are joined, for example, by an adhesive or the like. The first electrode portion 2 is electrically connected to the power supply portion 7, and the second electrode portion 3 is grounded, and thus the workpiece chucking device 100 is completed.

[0070] <3. Effects of the Workpiece Chucking Device>

[0071] Figure 5A is a view showing a state in which the workpiece 300 is electrostatically chucked in the workpiece chucking device 100 according to the embodiment of the present application. Figure 5B is a view showing a state in which the workpiece 300 is electrostatically chucked in the workpiece chucking device 400 according to the comparative example.

[0072] In Figure 5B In the workpiece chucking device 400 according to the comparative example shown in FIG. 8, the chucking head 401 is also a rectangular parallelepiped shape. Two electrode portions 402, 403 are provided on the chucking head 401. However, the third electrode portion 402 is provided so as to straddle the upper surface 401a and the left side surface 401b of the chucking head 401, and thus has a third corner portion 402a. In addition, the fourth electrode portion 403 is provided so as to straddle the upper surface 401a and the right side surface 401c of the chucking head 401, and thus has a fourth corner portion 403a.

[0073] The third electrode portion 402 and the fourth electrode portion 403 are each provided only on the outer surface of the chuck head 401. The third corner portion 402a of the third electrode portion 402 and the fourth corner portion 403a of the fourth electrode portion 403 are each a pointed shape toward the outside of the chuck head 401, and do not face each other. In addition, the third electrode portion 402 is connected to the power supply portion 406 via a third wiring portion 404 provided on the left side surface 401b of the chuck head 401. In addition, the fourth electrode portion 403 is grounded via a fourth wiring portion 405 provided on the right side surface 401c of the chuck head 401. In the comparative example, a dielectric layer covering the electrode portions 402, 403 is omitted.

[0074] In the structure of the comparative example, a voltage is applied by the power supply portion 406, and an electric field is generated between the third electrode portion 402 and the fourth electrode portion 403. In this case, as shown by the solid line in FIG. 9, the workpiece 300 is electrostatically attracted on the upper surface 401a of the chuck head 401 across both the third electrode portion 402 and the fourth electrode portion 403. However, in the structure of the comparative example, in addition to this, as shown by the dotted line in FIG. 9, the workpiece 300 is sometimes attracted to the third corner portion 402a or the fourth corner portion 403a. This is because the electric field intensity becomes large in the third corner portion 402a and the fourth corner portion 403a, and becomes the same size as the electric field intensity formed between the two electrode portions 402, 403. Figure 5B Figure 5B

[0075] As a result of the comparative example, it was found that the position at which the corner portion of the electrode portion is provided is related to stable electrostatic attraction, and in the present embodiment, the first corner portion 2a of the first electrode portion 2 and the second corner portion 3a of the second electrode portion 3 are arranged at positions facing each other. Thereby, the electric field intensity between the electrodes of the first electrode portion 2 and the second electrode portion 3 can be made largest around the chuck head 1. As a result, the workpiece 300 can be stably attracted at a position across both the first electrode portion 2 and the second electrode portion 3.

[0076] <4. Modified example>

[0077] Figure 6 is a schematic diagram showing the structure of a workpiece chucking device 100A of a modified example. In Figure 6 , the chuck head 1A possessed by the workpiece chucking device 100A is shown in a cross-sectional view. Figure 7 is an exploded perspective view of the chuck head 1A possessed by the workpiece chucking device 100A of the modified example. The chuck head 1A of the modified example is constituted by joining three members, a first member 11A, a second member 12A, and a third member 15.

[0078] ​​The three members 11A, 12A, 15 are each in the shape of a rectangular parallelepiped. A portion of the first electrode portion 2A and the first wiring portion 4A are formed on the right side surface of the first member 11A. A portion of the second electrode portion 3A and the second wiring portion 5A are formed on the left side surface of the second member 12A. In addition, the remaining portion of the first electrode portion 2A is formed on the upper surface of the first member 11A. The remaining portion of the second electrode portion 3A is formed on the upper surface of the second member 12A.

[0079] In the present embodiment, the first member 11A in which the first electrode portion 2A and the first wiring portion 4A are formed is symmetrical with respect to the second member 12A in which the second electrode portion 3A and the second wiring portion 5A are formed, with respect to a bisector that bisects the suction head 1A into left and right. Therefore, the first member 11A and the second member 12A can be shared.

[0080] The third member 15 is disposed between the first member 11A and the second member 12A in the left-right direction. In detail, the third member 15 has the same length in the up-down direction and the front-back direction as the first member 11A and the second member 12A. Therefore, the suction head 1A, which is configured with the first member 11A and the second member 12A sandwiching the third member 15 in the left-right direction, is in the shape of a rectangular parallelepiped.

[0081] In addition, in the present modification, it is also preferable to provide a dielectric layer that covers the first electrode portion 2A and the second electrode portion 3A. The first electrode portion 2A is electrically connected to the power supply portion 7A via the first wiring portion 4A. The second electrode portion 3A is grounded via the second wiring portion 5A.

[0082] In the suction head 1A, the first electrode portion 2A is disposed by straddling the suction surface 1Aa, which is the upper surface of the suction head 1A, and the first surface 1Ab, which is provided inside the suction head 1A, and thus has a first corner portion 2Aa. The first surface 1Ab is the right side surface of the first member 11A. In addition, the second electrode portion 3A is disposed by straddling the suction surface 1Aa, which is the upper surface of the suction head 1A, and the second surface 1Ac, which is provided inside the suction head 1A, and thus has a second corner portion 3Aa. The second surface 1Ac is the left side surface of the second member 12A.

[0083] In the present modification example, an insulating member that fills the gap formed between the first electrode portion 2A and the second electrode portion 3A is arranged between the first face 1Ab and the second face 1Ac. In detail, a third member 15 that fills the gap formed between the first electrode portion 2A and the second electrode portion 3A is arranged between the first face 1Ab and the second face 1Ac in the left-right direction. Thus, the first electrode portion 2A and the second electrode portion 3A oppose each other with the third member 15 interposed therebetween. In the present modification example, the first corner portion 2Aa and the second corner portion 3Aa also oppose each other. However, in the present modification example, the first corner portion 2Aa and the second corner portion 3Aa indirectly oppose each other in the left-right direction with the third member 15 interposed therebetween.

[0084] In the present modification example, the first corner portion 2Aa and the second corner portion 3Aa, in which the electric field strength easily increases, can also be arranged at positions at which the first electrode portion 2A and the second electrode portion 3A for electrostatic chucking face each other. Thus, the electric field strength can be increased between the electrodes of the first electrode portion 2A and the second electrode portion 3A, and the workpiece can be stably chucked at a position across both the pair of electrode portions 2A, 3A.

[0085] <5. Matters to be noted>

[0086] The various technical features disclosed in the present specification can be variously changed without departing from the gist of the technical creation. In addition, the plurality of embodiments and the modification examples shown in the present specification can be implemented in combination within a possible range.

[0087] The present application can be utilized in, for example, a robot that picks up a workpiece.

[0088] Explanation of symbols

[0089] 1, 1A … chuck head; 1a, 1Aa … chuck face; 1b, 1Ab … first face; 1c, 1Ac … second face; 2, 2A … first electrode portion; 2a, 2Aa … first corner portion; 3, 3A … second electrode portion; 3a, 3Aa … second corner portion; 6 … dielectric layer; 7 … power supply portion; 100, 100A … workpiece chucking device; 200 … electrodeposition liquid; 202 … electrode for electrodeposition; 300 … workpiece; S … gap.

Claims

1. A workpiece adsorption device, characterized in that, It has an adsorption head, which is equipped with a first electrode and a second electrode, and electrostatically adsorbs the workpiece by means of an electric field formed between the first electrode and the second electrode. The first electrode portion is configured to span two surfaces: the adsorption surface of the adsorption head that adsorbs the workpiece and a first surface connected to the adsorption surface, thereby having a first corner portion. The second electrode portion is configured to span both the adsorption surface of the adsorption head and a second surface connected to the adsorption surface, thereby having a second corner portion. The first corner is opposite to the second corner. The adsorption head has a dielectric layer covering the outer surface of the first adsorption surface portion of the first electrode portion and the outer surface of the second adsorption surface portion of the second electrode portion. The first adsorption surface portion and the second adsorption surface portion extend in a direction that moves away from each other. The distance between the first corner and the second corner is less than the distance between the first end of the first adsorption surface portion located on the side opposite to the first corner and the second end of the second adsorption surface portion located on the side opposite to the second corner.

2. The workpiece adsorption device as described in claim 1, characterized in that, The first surface and the second surface are surfaces disposed inside the adsorption head.

3. The workpiece adsorption device as described in claim 1 or 2, characterized in that, The adsorption head is composed of at least one insulating component.

4. The workpiece adsorption device as described in claim 1 or 2, characterized in that, A gap is provided between the first surface and the second surface to separate the first corner portion and the second corner portion.

5. The workpiece adsorption device as described in claim 1 or 2, characterized in that, An insulating component is disposed between the first surface and the second surface, the insulating component being embedded in the gap formed between the first electrode portion and the second electrode portion.

6. The workpiece adsorption device as described in claim 1 or 2, characterized in that, It also has a power supply unit that is electrically connected to the first electrode unit. The second electrode is grounded.

7. A method for manufacturing a workpiece adsorption device, which is the method for manufacturing a workpiece adsorption device according to any one of claims 1 to 6, characterized in that, have: The first step involves immersing at least a portion of the adsorption head and the electrode for electrodeposition into the electrodeposition solution. as well as In the second step, after the first step, one of the first electrode portion, the second electrode portion, and the electrode for electrodeposition is used as the positive electrode, and the other is used as the negative electrode. A voltage is applied to form the dielectric layer.

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