A multifunctional large-rate attenuation module batch assembly and inspection device and assembly and inspection method

Abstract

The present invention provides a multifunctional large-magnification attenuation module batch assembly and inspection device and an assembly and inspection method, which mainly solves the existing method of using a system detector to directly observe the imaging quality and error angle. In the case of batch assembly and use of multifunctional large-magnification attenuation modules, not only the efficiency is low, but also the error is large, which seriously affects the production efficiency and quality of the multifunctional large-magnification attenuation modules. It includes an operating table, an optical platform, a computer placed on the operating table, four positioning bases installed on the optical platform, two fixed base plates, two translation stages, as well as a pentaprism, a standard angle block, a first plane reflector, a second plane reflector, four two-dimensional adjustment brackets, four autocollimation micro-light tubes and four CCD detectors.

Description

Technical Field

[0001] The invention relates to an attenuation module assembly and inspection device and an assembly and inspection method, and in particular to a multifunctional large-multiplier attenuation module batch assembly and inspection method. Background Art

[0002] In the design process of complex optical systems, it is usually necessary to attenuate the intensity of laser beams and fold and split them, so as to realize functions such as beam splitting and large-rate attenuation to meet different measurement and application requirements. The multifunctional large-rate attenuation module is the main module for attenuating the intensity of laser beams in the entire optical system. The posture adjustment error of each mirror group inside it determines the directivity accuracy of the optical path and the functional requirements of the measurement. Whether the output optical path of the large-rate attenuation module can meet the design index requirements will directly affect the measurement accuracy and quality of the optical system.

[0003] like Figure 1 As shown, the existing multifunctional large-rate attenuation module includes a reference base plate 01 and four groups of attenuation wedge plates 02; the incident light is incident parallel to the A reference surface of the reference base plate 01 in the multifunctional large-rate attenuation module, and after attenuation by the multifunctional large-rate attenuation module, a beam of light continues to be transmitted along the optical axis and is emitted in the unchanged propagation direction, and the remaining light beams are reflected by each splitting surface to realize other functions such as waveform measurement, energy measurement, and attenuation absorption; the attenuation wedge plate group 02 is used to attenuate and split the energy of the light beam, and can enter or exit the light path according to the requirements of energy intensity. In order to avoid interference, all the mirror groups use wedge-type optical elements. The light path will have a certain angle deflection when passing through a single attenuation wedge plate mirror group 02, so the angle error must be compensated by the attenuation wedge plate mirror group 02 with a matching wedge angle, so that the angle deviation between the exit optical axis and the incident optical axis along the optical axis is not greater than 40", and the angle between the right-angle surface of the attenuation wedge plate group 02 and the bottom surface of the reference base plate 01 is 90°±10″, and the angle between the right-angle surface of the attenuation wedge plate group 02 and the optical axis is 45°±10″.

[0004] The existing method of directly observing the imaging quality and error angle using the detector in the system is not only inefficient when the multifunctional large-magnification attenuation modules are assembled and used in batches, but also cannot locate the source of the problem when it is a system problem. In addition, the error is large, which seriously affects the production efficiency and quality of the multifunctional large-magnification attenuation modules. Summary of the invention

[0005] The purpose of the present invention is to solve the technical problem that the existing method of using system detectors to directly observe imaging quality and error angle is not only inefficient when multifunctional large-magnification attenuation modules are assembled and used in batches, but also the source of the problem cannot be located when the problem is a system problem, and the error is large, which seriously affects the production efficiency and quality of the multifunctional large-magnification attenuation modules. A multifunctional large-magnification attenuation module batch assembly and inspection device and method are provided.

[0006] To achieve the above purpose, the technical solution adopted by the present invention is:

[0007] A multifunctional large-rate attenuation module batch assembly and inspection device, which is special in that it includes:

[0008] An operating table, an optical platform, a computer placed on the operating table, and four positioning bases, two fixed base plates, and two translation stages installed on the optical platform;

[0009] Four two-dimensional adjustment brackets, four self-collimation micro-light tubes and four CCD detectors;

[0010] Pentaprism, standard angle block, first plane reflector, second plane reflector;

[0011] The four positioning bases are used to install the reference base plate of the large-magnification attenuation module to be installed and inspected; the two fixed base plates are relatively arranged on the incident light path of the large-magnification attenuation module to be installed and inspected; the two translation stages are relatively arranged on both sides of the reference base plate of the large-magnification attenuation module to be installed and inspected, and the translation direction thereof is parallel to the incident light path;

[0012] Four two-dimensional adjustment brackets are respectively installed on two fixed base plates and two translation stages; four self-collimation micro-light tubes are respectively installed on the four two-dimensional adjustment brackets, two of which are located on the incident light path of the large-magnification attenuation module to be installed and inspected, and the other two are arranged perpendicular to the incident light path of the large-magnification attenuation module to be installed and inspected; four CCD detectors are respectively installed on the four self-collimation micro-light tubes; the CCD detectors are electrically connected to the computer;

[0013] The pentaprism, the standard angle block, the first plane reflector and the second plane reflector are used for self-alignment and debugging of four self-collimation micro-light tubes.

[0014] Further, it also includes a pressure plate and a bolt;

[0015] The pressing plate is attached to the upper surface of the reference base plate, and the bolts pass through the pressing plate and are connected to the positioning base.

[0016] At the same time, the present invention also provides a multifunctional large-rate attenuation module batch assembly and inspection method, which is special in that it includes the following steps:

[0017] Step 1: Build the inspection device;

[0018] Step 2: Install the reference base plate in the large-rate attenuation module to be inspected onto the four positioning bases;

[0019] Step 3, according to the azimuth reference and elevation reference of the reference base plate, the azimuth and elevation angles of the four self-collimation micro-light tubes are adjusted in sequence;

[0020] Step 4: Screen and match the four attenuation wedge sets in the large-rate attenuation module through the self-collimation micro-light tube, so that the angle deviation between the incident optical axis and the output optical axis of the large-rate attenuation module is no more than 40".

[0021] Step 5: Adjust the attenuation wedge assembly;

[0022] Step 5.1, install one attenuation wedge set into its designed installation position in turn;

[0023] Step 5.2, after the attenuation wedge set is installed, the pitch angle error and azimuth angle error of the attenuation wedge set are measured by the autocollimation micro-light tube, and the attenuation wedge set is adjusted according to the pitch angle error and the azimuth angle error to ensure that the angle between the right-angle surface of the attenuation wedge set and the bottom surface of the reference base plate is 90°±10″, and the angle between the attenuation wedge set and the incident light axis is 45°±10″;

[0024] Step 5.3, sequentially assemble the remaining three attenuation wedges into their designed installation positions, and after each attenuation wedge set is installed, the same method as step 5.2 is used until the remaining three attenuation wedge sets are all installed into their designed installation positions and adjusted, thus completing the installation and inspection of the large-rate attenuation module;

[0025] Step 6: Disassemble the large-rate attenuation modules that have been installed and inspected, and return to step 2 until the installation and inspection of all large-rate attenuation modules are completed.

[0026] Furthermore, the step 3 is specifically as follows:

[0027] Four self-collimation micro-light tubes are defined as self-collimation micro-light tube A, self-collimation micro-light tube B, self-collimation micro-light tube C and self-collimation micro-light tube D; wherein self-collimation micro-light tube A and self-collimation micro-light tube B are two self-collimation micro-light tubes arranged perpendicular to the incident light path, and self-collimation micro-light tube C and self-collimation micro-light tube D are two self-collimation micro-light tubes located on the incident light axis;

[0028] Step 3.1, using the first plane reflector and the standard angle block, transfer the azimuth reference and elevation reference of the reference base plate to the autocollimation micrometer light tube A according to the autocollimation method;

[0029] Step 3.2, use the second plane reflector and the autocollimation micro-light tube A to establish a self-alignment relationship, control the movement of the corresponding translation stage, fine-tune the corresponding two-dimensional adjustment bracket, control the second plane reflector and the autocollimation micro-light tube A to move synchronously, so that the autocollimation micro-light tube A always maintains self-alignment with the second plane reflector within the moving range of the translation stage, and completes the azimuth angle adjustment and pitch angle adjustment of the autocollimation micro-light tube A;

[0030] Step 3.3, adjust the self-alignment of the autocollimation micro-light tube B and the autocollimation micro-light tube A, use the second plane reflector to establish a self-alignment relationship with the autocollimation micro-light tube B, control the movement of the corresponding translation stage, fine-tune the corresponding two-dimensional adjustment bracket, control the second plane reflector and the autocollimation micro-light tube B to move synchronously, so that the autocollimation micro-light tube B always maintains self-alignment with the second plane reflector within the moving range of the translation stage, and completes the azimuth adjustment and pitch angle adjustment of the autocollimation micro-light tube B;

[0031] Step 3.4, place the pentaprism on the reference bottom plate at the position where the outgoing light rays of the autocollimation micro-light tube A and the autocollimation micro-light tube C intersect, adjust the azimuth angle and the elevation angle of the autocollimation micro-light tube C, make the autocollimation micro-light tube C and the autocollimation micro-light tube A self-align, and complete the azimuth angle adjustment and the elevation angle adjustment of the autocollimation micro-light tube C;

[0032] Step 3.5, adjust the azimuth and elevation angles of the autocollimation micro-light tube D, and align it with the autocollimation micro-light tube C to complete the azimuth and elevation angle adjustment of the autocollimation micro-light tube D.

[0033] Furthermore, the step 4 specifically includes the following steps:

[0034] Define four attenuation wedge groups, namely group E, group F, group G and group H;

[0035] Step 4.1, at the corresponding theoretical positions of group E, group F, group G and group H, and attenuation wedge groups of three combinations of group E, group F, group G and group H are tested in sequence, representing three combinations of different magnifications;

[0036] Step 4.2, observe the corresponding crosshair image errors of the three combinations of autocollimation micro-light tube C and autocollimation micro-light tube D on the computer; before adding the four attenuation wedge sets, the autocollimation micro-light tube C and autocollimation micro-light tube D adjusted in step 3 are auto-collimated, and the two crosshair images on the computer overlap, representing the optical axis. After adding any one of the above three combinations of lens groups into the optical path, the two crosshair images will deviate due to the errors in the azimuth angle and pitch angle processing of different lens groups, which represents the error angle of the outgoing light after passing through the lens group deviating from the optical axis, and is used to screen and match the large-magnification attenuation module. The angle deviation between the incident optical axis and the outgoing optical axis after the lens group combination is not greater than 40";

[0037] Step 4.3, judging whether the angle deviations of the incident light axis and the exit light axis of the three combinations are all less than 40" according to the crosshair image errors formed in the three combination states; if the angle deviations of the incident light axis and the exit light axis of the three combinations are all less than 40", the screening and matching of the attenuation wedge plate group is completed; if the angle deviation of the incident light axis and the exit light axis of any combination is greater than 40", the attenuation wedge plate group of the combination is removed and replaced, and the process returns to step 4.1 until the angle deviations of the incident light axis and the exit light axis of the attenuation wedge plate group of the three combinations are all less than 40".

[0038] Furthermore, the step 5.2 is specifically implemented according to the following steps:

[0039] Step 5.2.1, use an external shading plate to cover the autocollimation micro-light tube C;

[0040] Step 5.2.2, after the attenuation wedge set is installed, the autocollimation micrometer light tube A or the autocollimation micrometer light tube B is adjusted to a position where the light path reflected by the attenuation wedge set can enter the autocollimation micrometer light tube D, and the cross-hair image error formed by the autocollimation micrometer light tube D passing through the attenuation wedge set is observed on a computer; when the attenuation wedge set is at an angle of 45° with the optical axis and at an angle of 90° in elevation, the two cross-hair images on the autocollimation light tube D overlap, and when the azimuth angle of the attenuation wedge set has an error with the above angle, it represents an installation angle error of the attenuation wedge set, and it is necessary to adjust and grind to ensure that the angle between the right-angle surface of the attenuation wedge set and the bottom surface of the reference bottom plate (01) is 90°±10″, and the angle between the attenuation wedge set and the incident light axis is 45°±10″;

[0041] Step 5.2.3, determine the azimuth error and the elevation error of the attenuation wedge set according to the cross-wire image error of the attenuation wedge set, and adjust the attenuation wedge set according to the elevation error and the azimuth error to ensure that the angle between the right-angle surface of the attenuation wedge set and the bottom surface of the reference base plate is 90°±10″, and the angle between the attenuation wedge set and the incident light axis is 45°±10″.

[0042] Furthermore, the step 5.2.3 is specifically implemented as follows:

[0043] The azimuth error and the pitch angle error of the attenuation wedge group are determined according to the cross-wire image error of the attenuation wedge group; the boss on the bottom surface of the lens frame in the attenuation wedge group is ground according to the pitch angle error to ensure that the angle between the right-angle surface of the attenuation wedge group and the bottom surface of the reference bottom plate is 90°±10″; the lens group in the attenuation wedge group is rotated according to the azimuth angle error of the attenuation wedge group to ensure that the angle between the attenuation wedge group and the incident optical axis is 45°±10″.

[0044] Compared with the prior art, the present invention has the following beneficial effects:

[0045] 1. The present invention ensures that the angle deviation between the input optical axis and the output optical axis caused by the wedge angle error is minimized by quickly screening and matching the wedge angle errors of the attenuation wedge plate groups under different combinations; then, each attenuation wedge plate group is sequentially assembled and adjusted to reduce the influence of the angle deviation between the input optical axis and the output optical axis caused by the actual installation error, thereby improving the efficiency and accuracy of assembly and inspection, avoiding higher requirements for the processing of single lenses, reducing costs, and meeting the needs of mass assembly and inspection.

[0046] 2. The present invention can assemble and inspect a single module without the system, and does not rely on the method of directly observing the imaging quality and error angle using the detector in the existing system. It can locate the problematic lens, and the debugging accuracy is direct and reliable, which can improve the production efficiency and quality of the multifunctional large-magnification attenuation module.

[0047] 3. The present invention can independently adjust the pitch angle and azimuth angle of the self-collimation micro-light tube according to the positioning reference of different attenuation modules, and can be applied to different attenuation modules of the same type such as the attenuation wedge plate group mirror module and the double mirror group attenuation wedge plate group, and has a wide range of applications.

[0048] 4. The present invention reduces the use of self-collimation micro-light tubes and reduces economic costs through the design of the moving platform and the plane reflector.

[0049] 5. The present invention replaces the human eye's interpretation of the crosshair image by transmitting the crosshair image to a computer for display, so that the interpretation and adjustment can be completed by a single person, which not only improves the interpretation accuracy but also reduces the labor cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1 It is a structural schematic diagram of an existing large-rate attenuation module;

[0051] Figure 2 It is a structural schematic diagram of an embodiment of a multifunctional large-rate attenuation module batch assembly and inspection device of the present invention;

[0052] Figure 3 It is a principle diagram of transferring the azimuth reference and elevation reference of the reference base plate to the self-collimation micro-light tube A in an embodiment of a multifunctional large-magnification attenuation module batch assembly and inspection method of the present invention;

[0053] Figure 4 It is a principle diagram of the azimuth and elevation adjustment of the micro-light tube A for self-collimation measurement in an embodiment of a multifunctional large-magnification attenuation module batch assembly and inspection method of the present invention;

[0054] Figure 5It is a principle diagram of adjusting the azimuth and elevation angles of the self-collimating micro-light tube B in an embodiment of a multifunctional large-magnification attenuation module batch assembly and inspection method of the present invention; wherein a is a principle diagram of the self-collimating micro-light tube A and the self-collimating micro-light tube B during self-alignment, and b is a principle diagram of the self-collimating micro-light tube B and the second plane mirror establishing a self-aligning relationship;

[0055] Figure 6 It is a principle diagram of the azimuth and elevation adjustment of the self-collimation micro-light tube C and the self-collimation micro-light tube D in an embodiment of a multifunctional large-magnification attenuation module batch assembly and inspection method of the present invention; wherein a is a principle diagram of the azimuth and elevation adjustment of the self-collimation micro-light tube C, and b is a principle diagram of the azimuth and elevation adjustment of the self-collimation micro-light tube D;

[0056] Figure 7 It is a schematic diagram of the adjustment of group E and a crosshair image result diagram in an embodiment of a multifunctional large-rate attenuation module batch assembly and inspection method of the present invention; wherein a is the schematic diagram of the adjustment of group E, and b is the crosshair image result diagram;

[0057] Figure 8 It is the assembly and adjustment principle diagram of group F, group G and group H in an embodiment of a multifunctional large-rate attenuation module batch assembly and inspection method of the present invention; wherein a is the assembly and adjustment principle diagram of group F, b is the assembly and adjustment principle diagram of group G, and c is the assembly and adjustment principle diagram of group H.

[0058] In the figure:

[0059] 01-reference base plate, 02-attenuation wedge set;

[0060] 1-operating table, 2-optical platform, 3-computer, 4-positioning base, 5-fixed base plate, 6-translation stage, 7-pentaprism, 8-standard angle block, 9-first plane reflector, 10-two-dimensional adjustment bracket, 11-autocollimation micro-light tube, 12-CCD detector, 13-pressing plate, 14-bolt, 15-second plane reflector, 16-light shielding plate. DETAILED DESCRIPTION

[0061] In order to make the purpose, advantages and features of the present invention clearer, the following is a further detailed description of a multifunctional large-rate attenuation module batch assembly and inspection device and an assembly and inspection method proposed by the present invention in combination with the accompanying drawings and specific embodiments. According to the following specific implementation methods, the advantages and features of the present invention will be clearer. It should be noted that: the drawings are all in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention; secondly, the structure shown in the drawings is often part of the actual structure.

[0062] like Figure 2As shown, a multifunctional large-magnification attenuation module batch assembly and inspection device of the present invention comprises: an operating table 1, an optical platform 2, a computer 3 placed on the operating table 1, and four positioning bases 4, two fixed base plates 5, and two translation stages 6 installed on the optical platform 2;

[0063] Four two-dimensional adjustment brackets 10, four self-collimation micro-light tubes 11 and four CCD detectors 12;

[0064] Pentaprism 7, standard angle block 8, first plane reflector 9, second plane reflector 15;

[0065] The four positioning bases 4 are used to install the reference base plate 01 of the large-rate attenuation module to be installed and inspected. The pressure plate 13 is attached to the upper surface of the reference base plate 01 of the large-rate attenuation module to be installed and inspected. The bolts 14 pass through the pressure plate 13 and the installation base in sequence to connect the reference base plate 01 with the installation base; the two fixed base plates 5 are respectively arranged on the optical path of the incident light of the large-rate attenuation module to be installed and inspected; the two translation stages 6 are relatively arranged on both sides of the reference base plate 01 of the large-rate attenuation module to be installed and inspected, and the translation direction thereof is parallel to the incident light path; the four two-dimensional adjustment brackets 10 are respectively installed on the two fixed base plates 5 and the two translation stages 6. On the moving stage 6, four self-collimating micro-light tubes 11 are respectively installed on four two-dimensional adjustment brackets 10, two of which are located on the incident light path of the large-magnification attenuation module to be installed and inspected, and the other two are arranged perpendicular to the incident light path of the large-magnification attenuation module to be installed and inspected; four CCD detectors 12 are respectively installed on the four self-collimating micro-light tubes 11; the CCD detectors 12 are electrically connected to the computer 3; the pentaprism 7, the standard angle block 8, the first plane reflector 9, and the second plane reflector 15 are used for self-alignment and debugging of the four self-collimating micro-light tubes 11.

[0066] like Figure 3-Figure 8 As shown, the present invention provides a multifunctional large-rate attenuation module batch assembly and inspection method, comprising the following steps:

[0067] Step 1: Build the above-mentioned installation and inspection device;

[0068] Step 2: Install the reference base plate 01 in the large-rate attenuation module to be inspected onto the four positioning bases 4;

[0069] Step 3, according to the azimuth reference and elevation reference of the reference base plate 01, the azimuth and elevation angles of the four self-collimation micro-light tubes 11 are adjusted in sequence;

[0070] Four self-collimation micro-light tubes 11 are defined as self-collimation micro-light tube A, self-collimation micro-light tube B, self-collimation micro-light tube C and self-collimation micro-light tube D; wherein self-collimation micro-light tube A and self-collimation micro-light tube B are two self-collimation micro-light tubes 11 arranged perpendicular to the incident light path, and self-collimation micro-light tube C and self-collimation micro-light tube D are two self-collimation micro-light tubes 11 located on the incident light path;

[0071] Step 3.1, using the first plane reflector 9 and the standard angle block 8, according to the autocollimation method, the azimuth reference and the pitch reference of the reference base plate 01 are transferred to the autocollimation micrometer light tube A; Figure 3 As shown;

[0072] Step 3.2, use the second plane reflector 15 and the autocollimation micro-light tube A to establish a self-alignment relationship, control the corresponding translation stage 6 to move, fine-tune the corresponding two-dimensional adjustment bracket 10, control the second plane reflector 15 and the autocollimation micro-light tube A to move synchronously, so that the autocollimation micro-light tube A always maintains self-alignment with the second plane reflector 15 within the moving range of the translation stage 6, and completes the azimuth adjustment and pitch angle adjustment of the autocollimation micro-light tube A; Figure 4 As shown;

[0073] Step 3.3, adjust the self-alignment micro-light tube B and the self-alignment micro-light tube A, such as Figure 5 As shown in the middle figure a; the second plane reflector 15 is used to establish a self-alignment relationship with the self-collimation micro-light tube B, the corresponding translation stage 6 is controlled to move, the corresponding two-dimensional adjustment bracket 10 is fine-tuned, and the second plane reflector 15 is controlled to move synchronously with the self-collimation micro-light tube B, so that the self-collimation micro-light tube B always maintains self-alignment with the second plane reflector 15 within the moving range of the translation stage 6, and the azimuth angle adjustment and pitch angle adjustment of the self-collimation micro-light tube B are completed, as shown in FIG. Figure 5 As shown in Figure b;

[0074] Step 3.4, place the pentaprism 7 at the position where the light emitted by the autocollimation micro-light tube A and the autocollimation micro-light tube C intersect on the reference base plate 01, adjust the azimuth angle and elevation angle of the autocollimation micro-light tube C, so that the autocollimation micro-light tube C and the autocollimation micro-light tube A are self-aligned, and the azimuth angle adjustment and elevation angle adjustment of the autocollimation micro-light tube C are completed; Figure 6 As shown in Figure a;

[0075] Step 3.5, adjust the azimuth and elevation angles of the autocollimation micro-light tube D, and align it with the autocollimation micro-light tube C to complete the azimuth and elevation angle adjustment of the autocollimation micro-light tube D; Figure 6 As shown in Figure b;

[0076] Step 4: Screen and match the four attenuation wedge sets 02 in the large-rate attenuation module through the self-collimation micro-light tube 11, so that the angle deviation between the incident light axis and the output light axis of the large-rate attenuation module is not greater than 40";

[0077] The significance of screening is as follows: 1. The angle error of the outgoing light after the incident light passes through the mirror group is related to the azimuth angle and pitch angle errors of the processing. The azimuth angle error can generally be guaranteed through processing, while the pitch angle error is generally not proposed in the processing technical requirements and is difficult to measure and guarantee. However, in actual use, both errors will affect the final collimation error; 2. The higher the accuracy of the angle error, the higher the processing cost. The screening method is fast and effective, which can effectively reduce the accuracy of processing indicators and reduce costs;

[0078] Define four attenuation wedge groups 02, namely group E, group F, group G and group H;

[0079] Step 4.1, at the corresponding theoretical positions of group E, group F, group G and group H, and attenuation wedge groups of three combinations of group E, group F, group G and group H are tested in sequence, representing three combinations of different magnifications;

[0080] Step 4.2, observe the corresponding crosshair image errors of the three combinations of the autocollimation micro-light tube C and the autocollimation micro-light tube D on the computer 3; before the four attenuation wedge plate groups 02 are added, the autocollimation micro-light tube C and the autocollimation micro-light tube D adjusted in step 3 are auto-collimated, and the two crosshair images on the computer overlap, representing the optical axis; after adding any one of the three combinations of lens groups into the optical path, due to the errors in the azimuth angle and pitch angle processing of different lens groups, the two crosshair images have deviations, representing the error angle of the outgoing light after passing through the lens group deviating from the optical axis, which is used to screen and match the large-magnification attenuation module. The angle deviation between the incident optical axis and the outgoing optical axis after the lens group combination is not greater than 40";

[0081] Step 4.3, judging whether the angle deviations of the incident light axis and the exit light axis of the three combinations are all less than 40" according to the crosshair image errors formed in the three combination states; if the angle deviations of the incident light axis and the exit light axis of the three combinations are all less than 40", the screening and matching of the attenuation wedge plate group 02 is completed; if the angle deviation of the incident light axis and the exit light axis of any combination is greater than 40", the attenuation wedge plate group of the combination is removed and replaced, and the process returns to step 4.1 until the angle deviations of the incident light axis and the exit light axis of the attenuation wedge plate groups of the three combinations are all less than 40";

[0082] Step 5: Adjustment of the attenuation wedge set 02;

[0083] Step 5.1, install an attenuation wedge set 02 into its designed installation position; Figure 7 As shown;

[0084] Step 5.2, after the attenuation wedge set 02 is installed, the pitch angle error and azimuth angle error of the attenuation wedge set 02 are measured by the self-collimation micro-light tube 11, and the attenuation wedge set 02 is adjusted according to the pitch angle error and the azimuth angle error to ensure that the angle between the right-angle surface of the attenuation wedge set 02 and the bottom surface of the reference base plate 01 is 90°±10″, and the angle between the attenuation wedge set 02 and the incident light axis is 45°±10″;

[0085] Specifically, step 5.2 is implemented according to the following steps:

[0086] Step 5.2.1, using the external light shielding plate 16 to shield the self-collimating micro-light tube C;

[0087] Step 5.2.2, after a certain attenuation wedge set 02 is installed, the autocollimation micro-light tube A or the autocollimation micro-light tube B is adjusted to a position where the light path reflected by the attenuation wedge set 02 can enter the autocollimation micro-light tube D, and the cross-hair image error formed by the autocollimation micro-light tube D passing through the attenuation wedge set 02 is observed on the computer 3; the attenuation wedge set 02 is the same as When the optical axis is at an angle of 45° and the pitch is at an angle of 90°, the two crosshair images on the autocollimation light tube D overlap. When the azimuth angle of the attenuation wedge set 02 is different from the above angle, it means that the installation angle of the attenuation wedge set 02 is wrong. It is necessary to adjust and grind to ensure that the angle between the right-angle surface of the attenuation wedge set 02 and the bottom surface of the reference bottom plate 01 is 90°±10″, and the angle between the attenuation wedge set 02 and the incident optical axis is 45°±10″;

[0088] Step 5.2.3, judging the azimuth error and the pitch error of the attenuation wedge set 02 according to the cross-hair image error of the attenuation wedge set 02; grinding the boss on the bottom surface of the lens frame in the attenuation wedge set 02 according to the pitch error, ensuring that the angle between the right-angle surface of the attenuation wedge set 02 and the bottom surface of the reference bottom plate 01 is 90°±10″; rotating the lens group in the attenuation wedge set 02 according to the azimuth error of the attenuation wedge set 02, ensuring that the angle between the attenuation wedge set 02 and the incident light axis is 45°±10″;

[0089] Step 5.3, sequentially install the remaining three attenuation wedge plate groups 02 into their designed installation positions, and after each attenuation wedge plate group 02 is installed, use the same method as step 5.2 until the remaining three attenuation wedge plate groups (02) are all installed into their designed installation positions and adjusted, thus completing the installation and inspection of the large-rate attenuation module;

[0090] Step 6: Disassemble the large-rate attenuation modules that have been installed and inspected, and return to step 2 until the installation and inspection of all large-rate attenuation modules are completed.

[0091] It should be noted that the above structure is only a preferred embodiment of the present invention. When implementing the present invention, those skilled in the art may also use a small-aperture fixed plane reflector group to locate one of the self-collimating micro-light tubes 11 on the perpendicular route of the incident light path to reduce the construction cost of the overall device. By grinding the bottom surface boss of the small-aperture fixed plane reflector group and adjusting its posture, the small-aperture fixed plane reflector group and its corresponding self-collimating micro-light tube 11 can maintain self-alignment.

[0092] It should be noted that the above specific steps are only a preferred embodiment of the present invention, and those skilled in the art can also assemble and adjust other attenuation modules with similar structures according to the steps provided by the present invention.

Claims

1. A multifunctional large-rate attenuation module batch assembly and inspection device, characterized in that: include: An operating table (1), an optical platform (2), a computer (3) placed on the operating table (1), and four positioning bases (4), two fixed base plates (5), and two translation stages (6) installed on the optical platform (2); A pentaprism (7), a standard angle block (8), a first plane reflecting mirror (9) and a second plane reflecting mirror (15); Four two-dimensional adjustment brackets (10), four self-collimation micro-light tubes (11) and four CCD detectors (12); Four positioning bases (4) are used to install a reference base plate (01) of a large-magnification attenuation module to be installed and inspected; the two fixed base plates (5) are relatively arranged on the optical path of the incident light of the large-magnification attenuation module to be installed and inspected; two translation platforms (6) are relatively arranged on both sides of the reference base plate (01) of the large-magnification attenuation module to be installed and inspected, and their translation directions are parallel to the incident light path; Four two-dimensional adjustment brackets (10) are respectively mounted on two fixed base plates (5) and two translation stages (6); four self-collimation micro-light tubes (11) are respectively mounted on the four two-dimensional adjustment brackets (10), two of which are located on the incident light path of the large-magnification attenuation module to be installed and inspected, and the other two are arranged perpendicular to the incident light path of the large-magnification attenuation module to be installed and inspected; the four CCD detectors (12) are respectively mounted on the four self-collimation micro-light tubes (11); and the CCD detectors (12) are electrically connected to the computer (3); The pentaprism (7), the standard angle block (8), the first plane reflector (9) and the second plane reflector (15) are used for self-alignment and debugging of four self-collimation micro-light tubes (11).

2. A multifunctional large-rate attenuation module batch assembly and inspection device according to claim 1, characterized in that: It also includes a pressing plate (13) and a bolt (14); The pressing plate (13) is attached to the upper surface of the reference base plate (01), and the bolts (14) pass through the pressing plate (13) and are connected to the positioning base (4).

3. A method for batch assembly and inspection of multifunctional large-rate attenuation modules, based on a device for batch assembly and inspection of multifunctional large-rate attenuation modules according to claim 1 or 2, characterized in that: The following steps are involved: Step 1: construct the assembly and inspection device according to claim 1; Step 2: Install a reference base plate (01) in a large-rate attenuation module to be inspected onto four positioning bases (4); Step 3, adjusting the azimuth and elevation angles of the four self-collimation micro-light tubes (11) in sequence according to the azimuth reference and elevation reference of the reference base plate (01); Step 4, screening and matching the four attenuation wedge plate groups (02) in the large-rate attenuation module by using the self-collimation micro-light tube (11), so that the angle deviation between the incident light axis and the output light axis of the large-rate attenuation module is not greater than 40"; Step 5, assembling and adjusting the four attenuation wedge plate groups (02) after screening and matching; Step 5.1, sequentially install an attenuation wedge plate set (02) into its designed installation position; Step 5.2, after the attenuation wedge set (02) is installed, the pitch angle error and azimuth angle error of the attenuation wedge set (02) are measured by the self-collimation micro-light tube (11), and the attenuation wedge set (02) is adjusted according to the pitch angle error and the azimuth angle error to ensure that the angle between the right-angle surface of the attenuation wedge set (02) and the bottom surface of the reference bottom plate (01) is 90°±10″, and the angle between the attenuation wedge set (02) and the incident light axis is 45°±10″; Step 5.3, sequentially install the remaining three attenuation wedge sets (02) into their designed installation positions, and after each attenuation wedge set (02) is installed, use the same method as step 5.2 until the remaining three attenuation wedge sets (02) are all installed into their designed installation positions and adjusted, thus completing the installation and inspection of the large-rate attenuation module; Step 6: Disassemble the large-rate attenuation modules that have been installed and inspected, and return to step 2 until the installation and inspection of all large-rate attenuation modules are completed.

4. A method for batch assembly and inspection of multifunctional large-rate attenuation modules according to claim 3, characterized in that: The step 3 is specifically as follows: Four self-collimation micro-light tubes (11) are defined as self-collimation micro-light tube A, self-collimation micro-light tube B, self-collimation micro-light tube C and self-collimation micro-light tube D; wherein self-collimation micro-light tube A and self-collimation micro-light tube B are two self-collimation micro-light tubes (11) arranged perpendicular to the incident light path, and self-collimation micro-light tube C and self-collimation micro-light tube D are two self-collimation micro-light tubes (11) located on the incident light path; Step 3.1, using the first plane reflector (9) and the standard angle block (8), the azimuth reference and elevation reference of the reference base plate (01) are transferred to the autocollimation micrometer light tube A according to the autocollimation method; Step 3.2, using the second plane reflector (15) and the autocollimation micro-light tube A to establish a self-alignment relationship, controlling the corresponding translation stage (6) to move, fine-tuning the corresponding two-dimensional adjustment bracket (10), controlling the second plane reflector (15) and the autocollimation micro-light tube A to move synchronously, so that the autocollimation micro-light tube A always maintains self-alignment with the second plane reflector (15) within the moving range of the translation stage (6), and completing the azimuth angle adjustment and pitch angle adjustment of the autocollimation micro-light tube A; Step 3.3, adjust the self-alignment of the autocollimation micro-light tube B and the autocollimation micro-light tube A, use the second plane reflector (15) to establish a self-alignment relationship with the autocollimation micro-light tube B, control the corresponding translation stage (6) to move, fine-tune the corresponding two-dimensional adjustment bracket (10), control the second plane reflector (15) and the autocollimation micro-light tube B to move synchronously, so that the autocollimation micro-light tube B always maintains self-alignment with the second plane reflector (15) within the moving range of the translation stage (6), and completes the azimuth angle adjustment and pitch angle adjustment of the autocollimation micro-light tube B; Step 3.4, placing the pentaprism (7) at the position where the light emitted by the autocollimation micro-light tube A and the autocollimation micro-light tube C intersect on the reference base plate (01), adjusting the azimuth angle and elevation angle of the autocollimation micro-light tube C, so that the autocollimation micro-light tube C and the autocollimation micro-light tube A are self-aligned, and completing the azimuth angle adjustment and elevation angle adjustment of the autocollimation micro-light tube C; Step 3.5, adjust the azimuth and elevation angles of the autocollimation micro-light tube D until it is aligned with the autocollimation micro-light tube C, and the azimuth and elevation angles of the autocollimation micro-light tube D are adjusted.

5. A method for batch assembly and inspection of multifunctional large-rate attenuation modules according to claim 4, characterized in that: The step 4 specifically comprises the following steps: Define four attenuation wedge groups (02) as group E, group F, group G and group H; Step 4.1, at the corresponding theoretical positions of group E, group F, group G and group H, and attenuation wedge groups of three combinations of group E, group F, group G and group H are tested in sequence; Step 4.2, observing the corresponding crosshair image errors under the three combination states of the self-collimation micro-light tube C and the self-collimation micro-light tube D on the computer (3); Step 4.3, judging whether the angle deviations of the incident light axis and the exit light axis of the three combinations are all less than 40" according to the crosshair image errors formed in the three combination states; if the angle deviations of the incident light axis and the exit light axis of the three combinations are all less than 40", the screening and matching of the attenuation wedge plate group (02) is completed; if the angle deviation of the incident light axis and the exit light axis of any combination is greater than 40", the attenuation wedge plate group of the combination is removed and replaced, and the process returns to step 4.1 until the angle deviations of the incident light axis and the exit light axis of the attenuation wedge plate group of the three combinations are all less than 40".

6. A method for batch assembly and inspection of multifunctional large-rate attenuation modules according to claim 5, characterized in that: The step 5.2 is specifically implemented according to the following steps: Step 5.2.1, using an external light shielding plate (16) to shield the self-collimating micro-light tube C; Step 5.2.2, after the attenuation wedge set (02) is installed, the autocollimation micro-light tube A or the autocollimation micro-light tube B is adjusted to a position where the light path reflected by the attenuation wedge set (02) can enter the autocollimation micro-light tube D through the translation stage (6) on the autocollimation micro-light tube A or the autocollimation micro-light tube B, and the cross-wire image error formed by the autocollimation micro-light tube D through the attenuation wedge set (02) is observed on the computer (3); Step 5.2.3, judging the azimuth error and the elevation error of the attenuation wedge set (02) according to the cross-wire image error of the attenuation wedge set (02), and adjusting the attenuation wedge set (02) according to the elevation error and the azimuth error, to ensure that the angle between the right-angle surface of the attenuation wedge set (02) and the bottom surface of the reference bottom plate (01) is 90°±10″, and the angle between the attenuation wedge set (02) and the incident light axis is 45°±10″.

7. A method for batch assembly and inspection of multifunctional large-rate attenuation modules according to claim 6, characterized in that: The step 5.2.3 is specifically implemented as follows: The azimuth error and the elevation error of the attenuation wedge group (02) are judged according to the cross-wire image error of the attenuation wedge group (02); the boss on the bottom surface of the lens frame in the attenuation wedge group (02) is ground according to the elevation error to ensure that the angle between the right-angle surface of the attenuation wedge group (02) and the bottom surface of the reference bottom plate (01) is 90°±10″; the lens group in the attenuation wedge group (02) is rotated according to the azimuth error of the attenuation wedge group (02) to ensure that the angle between the attenuation wedge group (02) and the incident light axis is 45°±10″.

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