A standing wave acoustic field-based microsphere multi-mode manipulation device and a working method thereof

Abstract

The application discloses a kind of based on standing wave acoustic field's microsphere multi-mode control device and its working method, device includes base, vibrating body, first fixed seat, second fixed seat, first fixed nut, second fixed nut, PDMS module, sorting copper sheet and piezoelectric drive module;Piezoelectric drive module includes seven migration piezoelectric ceramic sheet and sorting piezoelectric ceramic sheet.The application is switched to mode by exciting seven migration piezoelectric ceramic sheet to make microsphere long-distance migration, and in this process, microsphere morphology is detected by microscope, and according to the detection result, microsphere is sorted by sorting piezoelectric ceramic sheet.The application is simple, cheap, can be lossless, non-contact control microsphere, avoid secondary damage when positioning, moving and classifying microsphere under hard contact mode.

Description

Technical Field

[0001] This invention relates to the fields of micromanipulation and rapid screening of microparticles, and particularly to a multi-mode microsphere manipulation device based on standing wave acoustic fields and its working method. Background Technology

[0002] Laser confinement fusion (ICF) uses high-power, high-energy-density lasers as a driving source and employs spherical implosion pressurization technology to ignite the nuclear fuel within a spherical target pellet, thereby forming a self-sustaining thermonuclear reaction. ICF holds the promise of providing humanity with clean, pollution-free energy. ICF experiments impose stringent requirements on the quality of the hollow microspheres (target pellets) used as nuclear fuel containers, particularly regarding geometric parameters and surface defects. The quality of the target pellets directly impacts the success or failure of the ICF target firing experiment. The target pellets are characterized by their tiny size (100-1000 μm in diameter), fragile structure, and high viscosity, posing significant challenges to their inspection. Currently, the equipment used to measure the geometric parameters of microspheres includes X-ray instruments, white light interferometers, and atomic force microscopes. These instruments offer very high measurement accuracy (reaching the micrometer or even nanometer level). Due to the spherical shape of the target pellets, achieving complete characterization of their morphology requires multiple movements and rotations. However, these testing devices all control the target ball's movement through a multi-degree-of-freedom moving platform. This hard-contact method easily causes secondary damage to the target ball's surface when adjusting its posture, resulting in low testing efficiency and pass rate. Micromanipulation technology, using sound waves as a driving source, offers advantages such as high biocompatibility and stable microscale manipulation. This means that micromanipulation technology can be applied to the non-destructive testing and screening of microspheres. Through multiple positioning operations, the complete morphological characterization of the target ball can be achieved. By coordinating and switching different vibration modes, target balls of different masses can be aggregated in different areas, thus meeting the requirements for non-destructive and high-precision manipulation in the target ball testing process. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to address the deficiencies mentioned in the background art by providing a microsphere multi-mode manipulation device based on standing wave sound field and its working method.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A microsphere multi-mode manipulation device based on standing wave sound field includes a base, a vibrator, a first fixed seat, a second fixed seat, a first fixed nut, a second fixed nut, a PDMS module, a sorting copper sheet, and a piezoelectric drive module.

[0006] Both the first fixing seat and the second fixing seat are mounted on the base and have the same structure. Each includes a base and a stud. The base is a column with its lower end face fixed to the base. The lower end of the stud is perpendicularly fixed to the upper end face of the base.

[0007] The vibrating body is a cuboid with a first lug and a second lug at each end; the center of the first lug and the second lug are respectively provided with a first through hole and a second through hole that match the studs of the first fixed seat and the second fixed seat;

[0008] The studs of the first fixed seat and the second fixed seat pass through the first through hole and the second through hole respectively and are connected to the first fixed nut and the second fixed nut by corresponding threads, thereby fixing the vibrator on the base of the first fixed seat and the second fixed seat;

[0009] The base is fixed to the air flotation platform, making the vibrating body horizontal;

[0010] The upper end face of the vibrator is provided with a mounting groove for placing the PDMS module; the mounting groove is cuboid and symmetrical about the line connecting the centers of the first through hole and the second through hole; the vibrator is symmetrical about the line connecting the centers of the first through hole and the second through hole, but asymmetrical about its mid-section along its length.

[0011] The PDMS module is a cuboid with the same shape as the mounting groove, made of PDMS material, and fixed in the mounting groove by PDMS glue.

[0012] The upper surface of the PDMS has a migration channel and a second outlet channel on the line connecting the centers of the first and second through holes, and a sorting channel between the migration channel and the second outlet channel; the migration channel is located upstream of the second outlet channel; the sorting channel is perpendicular to the migration channel, connected to the migration channel on one side and connected to the second outlet channel on the other side; the upper surface of the PDMS also has a first outlet channel and a third outlet channel symmetrically arranged on both sides of the second outlet channel, and the first outlet channel and the third outlet channel are respectively connected to the two ends of the sorting channel;

[0013] The lower surface of the vibrator is provided with a first to a seventh piezoelectric groove along its length from upstream to downstream; the first to the seventh piezoelectric grooves are all perpendicular to the migration channel and symmetrical about the line where the migration channel is located;

[0014] The piezoelectric drive module includes first to seventh migrating piezoelectric ceramic sheets and sorting piezoelectric ceramic sheets;

[0015] The first to seventh migrating piezoelectric ceramic sheets have the same structure and are arranged in the first to seventh piezoelectric grooves in a one-to-one correspondence. They are all polarized along the thickness direction. The polarization directions of the first, third, fourth and seventh migrating piezoelectric ceramic sheets are the same, the polarization directions of the second, fifth and sixth migrating piezoelectric ceramic sheets are the same, and the polarization directions of the first and second migrating piezoelectric ceramic sheets are opposite.

[0016] The fourth migrating piezoelectric ceramic sheet is used alone to excite the first-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction, or in combination with the first, fifth, and seventh migrating piezoelectric ceramic sheets to excite the fifth-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction, or in combination with the second and sixth migrating piezoelectric ceramic sheets to excite the third-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction; the third and fifth migrating piezoelectric ceramic sheets are used in combination to excite the second-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction; the fourth migrating piezoelectric ceramic sheet is simultaneously located at the antinode of the first-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction, and at the point where the vibrating body is distorted in its length direction. The fifth migrating piezoelectric ceramic plate is located at the antinode of the third out-of-plane bending vibration mode and the antinode of the fifth out-of-plane bending vibration mode, which is distorted along the length of the vibrating body; the first and seventh migrating piezoelectric ceramic plates are both located at the antinode of the fifth out-of-plane bending vibration mode, which is distorted along the length of the vibrating body; the second and sixth migrating piezoelectric ceramic plates are both located at the antinode of the third out-of-plane bending vibration mode, which is distorted along the length of the vibrating body; the third migrating piezoelectric ceramic plate is located at the antinode of the second out-of-plane bending vibration mode, which is distorted along the length of the vibrating body.

[0017] The vibrator has a rectangular slot with the same width as the mounting groove below the sorting channel; the sorting copper sheet is attached to the lower end face of the PDMS module in the rectangular slot.

[0018] The sorting piezoelectric ceramic sheet is attached to the lower end face of the sorting copper sheet and is symmetrical about the line of the migration channel; the sorting piezoelectric ceramic sheet is polarized along its thickness direction to excite the sorting copper sheet to produce a first-order out-of-plane bending vibration mode in the width direction of the vibrating body.

[0019] As a further optimization of the patch-type mode-switching microsphere multi-mode control device based on standing waves of the present invention, the base adopts a rectangular plate, and each of its four corners is provided with through holes for fixing to the air-floating platform.

[0020] As a further optimization of the patch-type mode-switching microsphere multi-mode control device based on standing waves of the present invention, the first to fifth piezoelectric grooves have the same structure and their depths are all less than the thickness of the first migrating piezoelectric ceramic sheet.

[0021] The present invention also discloses a control method for the patch-type mode-switching microsphere multi-mode control device based on standing waves, comprising the following steps:

[0022] Step 1), inject carrier fluid and release microspheres in the upstream of the migration channel;

[0023] Step 2) Apply a preset second harmonic voltage signal to the second, fourth and sixth migration pressure ceramic sheets to excite the vibrator to distort the third out-of-plane bending vibration mode in its length direction. The microsphere moves with the fluid along the straight migration channel to the first node of the distorted third out-of-plane bending vibration. Under the action of acoustic radiation force and the drag force generated by acoustic flow, it is positioned on the node. At this time, the microsphere is inspected for the first time by microscopy.

[0024] Step 3) De-energize the second, fourth, and sixth migrating piezoelectric ceramic sheets, and apply a preset first simple harmonic voltage signal to the third and fifth migrating piezoelectric ceramic sheets to excite the vibrating body to produce a second-order out-of-plane bending vibration mode with distortion in its length direction. The microsphere moves with the fluid in the straight migration channel to the first node of the distorted second-order out-of-plane bending vibration. Under the action of acoustic radiation force and drag force generated by acoustic flow, it is positioned at the node. At this time, the microsphere is subjected to a second morphological inspection through a microscope.

[0025] Step 4) De-energize the third and fifth migrating piezoelectric ceramic sheets, and apply a preset third harmonic voltage signal to the first, fourth, fifth, and seventh migrating piezoelectric ceramic sheets to excite the vibrating body to distort the fifth out-of-plane bending vibration mode along its length. The microsphere moves with the fluid in the straight migration channel to the third node of the distorted fifth out-of-plane bending vibration. Under the action of acoustic radiation force and the drag force generated by acoustic flow, it is positioned on the node. At this time, the microsphere is inspected for the third time using a microscope.

[0026] Step 5) De-energize the first, fourth, fifth, and seventh migrating piezoelectric ceramic sheets, and apply a preset second harmonic voltage signal to the second, fourth, and sixth migrating piezoelectric ceramic sheets to excite the vibrating body to distort the third-order out-of-plane bending vibration mode in its length direction. When the microsphere moves with the fluid in the straight migration channel to the center position of the sorting channel, de-energize the second, fourth, and sixth migrating piezoelectric ceramic sheets to position the microsphere. At this time, the microsphere is inspected for the fourth time using a microscope.

[0027] Step 6) Based on the results of the four tests, the surface quality of the microparticles is judged and sorted according to their quality.

[0028] Step 6.1) If the microsphere is of inferior quality, apply a preset fifth harmonic voltage signal to the sorting piezoelectric ceramic sheet to excite the sorting copper sheet into a first out-of-plane bending vibration mode in the width direction of the vibrating body, so that the microsphere moves to the inlet of the first outlet channel.

[0029] Step 6.2): ​​If the microsphere is of medium mass, apply a preset sixth harmonic voltage signal to the sorting piezoelectric ceramic sheet to excite the sorting copper sheet into a first-order out-of-plane bending vibration mode in the width direction of the vibrating body, so that the microsphere moves to the inlet of the third outlet channel.

[0030] Step 6.3): If the microspheres are of high quality, the piezoelectric ceramic sheet is not driven for sorting, and the microspheres are located at the inlet of the second outlet channel.

[0031] Step 7) Apply a preset fourth harmonic voltage signal to the fourth migrating piezoelectric ceramic sheet, so that the microsphere continues to move forward to the outlet channel corresponding to its sorting.

[0032] Compared with the prior art, the present invention, employing the above technical solution, has the following technical effects:

[0033] 1. The equipment is simple and inexpensive, which can reduce the cost of common screening systems.

[0034] 2. Micro-manipulation devices using piezoelectric excitation can achieve non-destructive and non-contact manipulation of microspheres. The manipulation methods include: positioning manipulation, migration manipulation, and sorting manipulation.

[0035] 3. While manipulating microspheres to achieve different movements, the advantages and disadvantages of their size, surface morphology and other parameters are analyzed by microscope. Then, microspheres with different surface qualities are controlled to aggregate in different areas to achieve efficient and high-precision screening of microspheres. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the structure of the present invention;

[0037] Figure 2 This is a schematic diagram of the structure in which the base, the first fixing seat, and the second fixing seat cooperate in this invention;

[0038] Figure 3 This is a top view of the PDMS module in this invention;

[0039] Figure 4 This is a schematic diagram of the structure of the vibrating body in this invention;

[0040] Figure 5 This is a bottom view of the vibrating body in this invention;

[0041] Figure 6 This is a schematic diagram of the polarization directions of the first to fifth migrating piezoelectric ceramic sheets in this invention;

[0042] Figure 7 This is a schematic diagram of the vibration mode and electrical signal application method of the distorted second-order out-of-plane bending vibration of the left and right asymmetric vibrating bodies excited by the third and fifth piezoelectric ceramic sheets in this invention.

[0043] Figure 8 This is a schematic diagram of the vibration modes and electrical signal application methods of the distorted third-order out-of-plane bending vibrations of the left and right asymmetric vibrating bodies excited by the second, fourth, and sixth piezoelectric ceramic sheets in this invention.

[0044] Figure 9This is a schematic diagram of the vibration modes and electrical signal application methods of the fifth-order out-of-plane bending vibrations of the left and right asymmetric vibrating bodies excited by the first, fourth, fifth, and seventh piezoelectric ceramic sheets in this invention.

[0045] Figure 10 This is a schematic diagram of the mode shape and the method of applying electrical signals to the first-order out-of-plane bending vibration of the left and right asymmetric vibrating body excited by the fourth piezoelectric ceramic sheet in this invention.

[0046] Figure 11 This is a schematic diagram of the vibration mode and the electrical signal application method of the first-order out-of-plane bending vibration of the sorting copper sheet excited by the sorting piezoelectric ceramic in this invention;

[0047] Figure 12 This is a schematic diagram of the particle's motion position after switching between even and odd modes under standard bending vibration modes;

[0048] Figure 13 This is a schematic diagram of the particle motion position after switching between even-order and odd-order modes under the distorted bending vibration mode in this invention;

[0049] Figure 14 This is a schematic diagram illustrating the principle of the multi-mode microsphere manipulation device based on standing wave sound field in this invention, which enables multiple positioning, migration, and classification of microspheres.

[0050] In the figure, 1-base, 2-vibrator, 3-PDSM module, 4-first fixed seat, 5-second fixed seat, 6-first fixed nut, 7-second fixed nut, 8-migration channel, 9-sorting channel, 10-first outlet channel, 11-second outlet channel, 13-third outlet channel, 14-sorting copper sheet, 15-sorting piezoelectric ceramic sheet. Detailed Implementation

[0051] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings:

[0052] This invention can be implemented in many different forms and should not be considered limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully express the scope of the invention to those skilled in the art. In the drawings, components are enlarged for clarity.

[0053] It should be understood that although the terms first, second, third, etc., may be used herein to describe various elements, components, and / or parts, these elements, components, and / or parts are not limited by these terms. These terms are merely used to distinguish elements, components, and / or parts from one another. Therefore, the first element, component, and / or part discussed below may be a second element, component, or part without departing from the teachings of this invention.

[0054] like Figure 1As shown, the present invention discloses a microsphere multi-mode manipulation device based on standing wave sound field, including a base, a vibrator, a first fixed seat, a second fixed seat, a first fixed nut, a second fixed nut, a PDMS module, a sorting copper sheet, and a piezoelectric drive module.

[0055] like Figure 2 As shown, the first fixing seat and the second fixing seat are both mounted on the base and have the same structure. They both include a base and a stud. The base is a column with its lower end face fixed to the base. The lower end of the stud is perpendicularly fixed to the upper end face of the base.

[0056] The vibrating body is a cuboid with a first lug and a second lug at each end; the center of the first lug and the second lug are respectively provided with a first through hole and a second through hole that match the studs of the first fixed seat and the second fixed seat;

[0057] The studs of the first fixed seat and the second fixed seat pass through the first through hole and the second through hole respectively and are connected to the first fixed nut and the second fixed nut by corresponding threads, thereby fixing the vibrator on the base of the first fixed seat and the second fixed seat;

[0058] The base is fixed to the air flotation platform, making the vibrating body horizontal;

[0059] The upper end face of the vibrator is provided with a mounting groove for placing the PDMS module; the mounting groove is cuboid and symmetrical about the line connecting the centers of the first through hole and the second through hole; the vibrator is symmetrical about the line connecting the centers of the first through hole and the second through hole, but asymmetrical about its mid-section along its length.

[0060] The PDMS module is a cuboid with the same shape as the mounting groove, made of PDMS material, and fixed in the mounting groove by PDMS glue.

[0061] like Figure 3 As shown, the upper surface of the PDMS is provided with a migration channel and a second outlet channel on the line connecting the centers of the first and second through holes, and a sorting channel is provided between the migration channel and the second outlet channel; the migration channel is located upstream of the second outlet channel; the sorting channel is perpendicular to the migration channel, connected to the migration channel on one side and connected to the second outlet channel on the other side; the upper surface of the PDMS is also symmetrically provided with a first outlet channel and a third outlet channel on both sides of the second outlet channel, and the first outlet channel and the third outlet channel are respectively connected to the two ends of the sorting channel;

[0062] like Figure 4 , Figure 5As shown, the lower surface of the vibrator is provided with a first to a seventh piezoelectric groove along its length from upstream to downstream; the first to seventh piezoelectric grooves are all perpendicular to the migration channel and symmetrical about the line where the migration channel is located;

[0063] The piezoelectric drive module includes first to seventh migrating piezoelectric ceramic sheets and sorting piezoelectric ceramic sheets;

[0064] like Figure 6 As shown, the first to seventh migrating piezoelectric ceramic sheets have the same structure and are arranged in the first to seventh piezoelectric grooves in a one-to-one correspondence. They are all polarized along the thickness direction. The polarization directions of the first, third, fourth, and seventh migrating piezoelectric ceramic sheets are the same, the polarization directions of the second, fifth, and sixth migrating piezoelectric ceramic sheets are the same, and the polarization directions of the first and second migrating piezoelectric ceramic sheets are opposite.

[0065] The fourth migrating piezoelectric ceramic sheet is used to individually excite the first-order out-of-plane bending vibration mode of the vibrator, which is distorted along its length direction (e.g., ...). Figure 10 As shown), or in conjunction with the first, fifth, and seventh migrating piezoelectric ceramic sheets, to excite the fifth out-of-plane bending vibration mode of the vibrating body with distortion in its length direction (as shown). Figure 9 As shown), or in combination with the second and sixth migrating piezoelectric ceramic sheets, a third-order out-of-plane bending vibration mode with distortion in its length direction is excited out (as shown). Figure 8 As shown); the third and fifth migrating piezoelectric ceramic plates are used to excite the second-order out-of-plane bending vibration mode of the vibrator, which is distorted along its length (as shown). Figure 7 (As shown); the fourth migrating piezoelectric ceramic sheet is simultaneously located at the antinodes of the first-order out-of-plane bending vibration mode distorted along the length of the vibrating body, the third-order out-of-plane bending vibration mode distorted along the length of the vibrating body, and the fifth-order out-of-plane bending vibration mode distorted along the length of the vibrating body; the fifth migrating piezoelectric ceramic sheet is simultaneously located at the antinodes of the second-order out-of-plane bending vibration mode distorted along the length of the vibrating body, and the fifth-order out-of-plane bending vibration mode distorted along the length of the vibrating body; the first and seventh migrating piezoelectric ceramic sheets are both located at the antinodes of the fifth-order out-of-plane bending vibration mode distorted along the length of the vibrating body; the second and sixth migrating piezoelectric ceramic sheets are both located at the antinodes of the third-order out-of-plane bending vibration mode distorted along the length of the vibrating body; the third migrating piezoelectric ceramic sheet is located at the antinode of the second-order out-of-plane bending vibration mode distorted along the length of the vibrating body.

[0066] The vibrator has a rectangular slot with the same width as the mounting groove below the sorting channel; the sorting copper sheet is attached to the lower end face of the PDMS module in the rectangular slot.

[0067] The sorting piezoelectric ceramic sheet is attached to the lower end face of the sorting copper sheet and is symmetrical about the line of the migration channel; the sorting piezoelectric ceramic sheet is polarized along its thickness direction to excite the sorting copper sheet to produce a first-order out-of-plane bending vibration mode in the width direction of the vibrating body.

[0068] The base is preferably made of a rectangular plate, with through holes at each of its four corners for fixing to the air flotation platform.

[0069] The first to fifth piezoelectric grooves have the same structure, and their depth is all less than the thickness of the first migrating piezoelectric ceramic sheet. This allows for the positioning of the migrating piezoelectric ceramic sheet during the pasting process, and also amplifies the migrating piezoelectric ceramic sheet's position in d through the constraint effect of the grooves. 31 The deformation effect during the vibration mode thus amplifies the amplitude.

[0070] By setting migration channels, sorting channels, and first to third outlet channels on the upper surface of the PDSM module, the movement path of microparticles can be planned, and the problem of the required vibration mode being unable to be excited caused by directly planning channels on the vibrator can be avoided. At the same time, the bottom surface of the box is a closed structure to prevent leakage of liquid carried by microparticles due to the design of sorting channels.

[0071] The present invention also discloses a control method for the patch-type mode-switching microsphere multi-mode control device based on standing waves, comprising the following steps:

[0072] Step 1), inject carrier fluid and release microspheres in the upstream of the migration channel;

[0073] Step 2) Apply a preset second harmonic voltage signal to the second, fourth and sixth migration pressure ceramic sheets to excite the vibrator to distort the third out-of-plane bending vibration mode in its length direction. The microsphere moves with the fluid along the straight migration channel to the first node of the distorted third out-of-plane bending vibration. Under the action of acoustic radiation force and the drag force generated by acoustic flow, it is positioned on the node. At this time, the microsphere is inspected for the first time by microscopy.

[0074] Step 3) De-energize the second, fourth, and sixth migrating piezoelectric ceramic sheets, and apply a preset first simple harmonic voltage signal to the third and fifth migrating piezoelectric ceramic sheets to excite the vibrating body to produce a second-order out-of-plane bending vibration mode with distortion in its length direction. The microsphere moves with the fluid in the straight migration channel to the first node of the distorted second-order out-of-plane bending vibration. Under the action of acoustic radiation force and drag force generated by acoustic flow, it is positioned at the node. At this time, the microsphere is subjected to a second morphological inspection through a microscope.

[0075] Step 4) De-energize the third and fifth migrating piezoelectric ceramic sheets, and apply a preset third harmonic voltage signal to the first, fourth, fifth, and seventh migrating piezoelectric ceramic sheets to excite the vibrating body to distort the fifth out-of-plane bending vibration mode along its length. The microsphere moves with the fluid in the straight migration channel to the third node of the distorted fifth out-of-plane bending vibration. Under the action of acoustic radiation force and the drag force generated by acoustic flow, it is positioned on the node. At this time, the microsphere is inspected for the third time using a microscope.

[0076] Step 5) De-energize the first, fourth, fifth, and seventh migrating piezoelectric ceramic sheets, and apply a preset second harmonic voltage signal to the second, fourth, and sixth migrating piezoelectric ceramic sheets to excite the vibrating body to distort the third-order out-of-plane bending vibration mode in its length direction. When the microsphere moves with the fluid in the straight migration channel to the center position of the sorting channel, de-energize the second, fourth, and sixth migrating piezoelectric ceramic sheets to position the microsphere. At this time, the microsphere is inspected for the fourth time using a microscope.

[0077] Step 6) Based on the results of the four tests, the surface quality of the microparticles is judged and sorted according to their quality.

[0078] Step 6.1): If the microspheres are of inferior quality, apply a preset fifth harmonic voltage signal to the sorting piezoelectric ceramic sheet to excite the sorting copper sheet into a first-order out-of-plane bending vibration mode in the width direction of the vibrating body (e.g., ...). Figure 11 As shown), the microsphere moves to the inlet of the first outlet channel;

[0079] Step 6.2): ​​If the microsphere is of medium mass, apply a preset sixth harmonic voltage signal to the sorting piezoelectric ceramic sheet to excite the sorting copper sheet into a first-order out-of-plane bending vibration mode in the width direction of the vibrating body, so that the microsphere moves to the inlet of the third outlet channel.

[0080] Step 6.3): If the microspheres are of high quality, the piezoelectric ceramic sheet is not driven for sorting, and the microspheres are located at the inlet of the second outlet channel.

[0081] Step 7) Apply a preset fourth harmonic voltage signal to the fourth migrating piezoelectric ceramic sheet, so that the microsphere continues to move forward to the outlet channel corresponding to its sorting.

[0082] The particle motion positions after switching between even and odd modes in standard bending vibration modes are as follows: Figure 12 As shown, in this invention, the cross-section of the vibrating body is asymmetrical about its length. This asymmetrical structure can adjust the standard bending vibration mode of the vibrating body into a distorted bending vibration mode, achieving the misalignment of antinodes and nodes between vibration modes of different orders, such as... Figure 13 As shown.

[0083] This invention manipulates microspheres ranging in size from micrometers to millimeters within a PDMS flow channel, enabling multiple positioning, long-distance migration, and classification. After each positioning, the microscopic morphology of the microspheres is examined under a microscope. Following this examination, mode switching facilitates further movement of the microspheres towards the flow channel outlet. Upon reaching the final positioning node, high-quality and low-quality microspheres are classified and manipulated based on the microscope's findings, thereby allowing microspheres of different qualities to aggregate at different outlets. Figure 14 As shown.

[0084] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless defined as herein.

[0085] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A multi-mode manipulation device for microspheres based on standing wave acoustic fields, characterized in that, It includes a base, a vibrator, a first fixed seat, a second fixed seat, a first fixed nut, a second fixed nut, a PDMS module, sorting copper sheets, and a piezoelectric drive module; Both the first fixing seat and the second fixing seat are mounted on the base and have the same structure. Each includes a base and a stud. The base is a column with its lower end face fixed to the base. The lower end of the stud is perpendicularly fixed to the upper end face of the base. The vibrating body is a cuboid with a first lug and a second lug at each end; the center of the first lug and the second lug are respectively provided with a first through hole and a second through hole that match the studs of the first fixed seat and the second fixed seat; The studs of the first fixed seat and the second fixed seat pass through the first through hole and the second through hole respectively and are connected to the first fixed nut and the second fixed nut by corresponding threads, thereby fixing the vibrator on the base of the first fixed seat and the second fixed seat; The base is fixed to the air flotation platform, making the vibrating body horizontal; The upper end face of the vibrator is provided with a mounting groove for placing the PDMS module; the mounting groove is cuboid and symmetrical about the line connecting the centers of the first through hole and the second through hole; the vibrator is symmetrical about the line connecting the centers of the first through hole and the second through hole, but asymmetrical about its mid-section along its length. The PDMS module is a cuboid with the same shape as the mounting groove, made of PDMS material, and fixed in the mounting groove by PDMS glue. The upper surface of the PDMS module has a migration channel and a second outlet channel on the line connecting the centers of the first and second through holes, and a sorting channel between the migration channel and the second outlet channel; the migration channel is located upstream of the second outlet channel; the sorting channel is perpendicular to the migration channel, connected to the migration channel on one side and connected to the second outlet channel on the other side; the upper surface of the PDMS module also has a first outlet channel and a third outlet channel symmetrically arranged on both sides of the second outlet channel, and the first outlet channel and the third outlet channel are respectively connected to the two ends of the sorting channel; The lower surface of the vibrator is provided with a first to a seventh piezoelectric groove along its length from upstream to downstream; the first to the seventh piezoelectric grooves are all perpendicular to the migration channel and symmetrical about the line where the migration channel is located; The piezoelectric drive module includes first to seventh migrating piezoelectric ceramic sheets and sorting piezoelectric ceramic sheets; The first to seventh migrating piezoelectric ceramic sheets have the same structure and are arranged in the first to seventh piezoelectric grooves in a one-to-one correspondence. They are all polarized along the thickness direction. The polarization directions of the first, third, fourth and seventh migrating piezoelectric ceramic sheets are the same, the polarization directions of the second, fifth and sixth migrating piezoelectric ceramic sheets are the same, and the polarization directions of the first and second migrating piezoelectric ceramic sheets are opposite. The fourth migrating piezoelectric ceramic sheet is used alone to excite the first-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction, or in combination with the first, fifth, and seventh migrating piezoelectric ceramic sheets to excite the fifth-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction, or in combination with the second and sixth migrating piezoelectric ceramic sheets to excite the third-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction; the third and fifth migrating piezoelectric ceramic sheets are used in combination to excite the second-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction; the fourth migrating piezoelectric ceramic sheet is simultaneously located at the antinode of the first-order out-of-plane bending vibration mode of the vibrating body with distortion in its length direction, and at the point where the vibrating body is distorted in its length direction. The fifth migrating piezoelectric ceramic plate is located at the antinode of the third out-of-plane bending vibration mode and the antinode of the fifth out-of-plane bending vibration mode, which is distorted along the length of the vibrating body; the first and seventh migrating piezoelectric ceramic plates are both located at the antinode of the fifth out-of-plane bending vibration mode, which is distorted along the length of the vibrating body; the second and sixth migrating piezoelectric ceramic plates are both located at the antinode of the third out-of-plane bending vibration mode, which is distorted along the length of the vibrating body; the third migrating piezoelectric ceramic plate is located at the antinode of the second out-of-plane bending vibration mode, which is distorted along the length of the vibrating body. The vibrator has a rectangular slot with the same width as the mounting groove below the sorting channel; the sorting copper sheet is attached to the lower end face of the PDMS module in the rectangular slot. The sorting piezoelectric ceramic sheet is attached to the lower end face of the sorting copper sheet and is symmetrical about the line of the migration channel; the sorting piezoelectric ceramic sheet is polarized along its thickness direction to excite the sorting copper sheet to produce a first-order out-of-plane bending vibration mode in the width direction of the vibrating body.

2. The microsphere multi-mode manipulation device based on standing wave acoustic field according to claim 1, characterized in that, The base is a rectangular plate with through holes at each of its four corners for fixing to the air flotation platform.

3. The microsphere multi-mode manipulation device based on standing wave acoustic field according to claim 1, characterized in that, The first to fifth piezoelectric grooves have the same structure, and their depths are all less than the thickness of the first migrating piezoelectric ceramic sheet.

4. The control method of the microsphere multi-mode control device based on standing wave sound field as described in claim 1, characterized in that, Includes the following steps: Step 1), inject carrier fluid and release microspheres in the upstream of the migration channel; Step 2) Apply a preset second harmonic voltage signal to the second, fourth and sixth migrating piezoelectric ceramic sheets to excite the vibrating body to distort the third out-of-plane bending vibration mode in its length direction. The microsphere moves with the fluid along the straight migration channel to the first node of the distorted third out-of-plane bending vibration. Under the action of acoustic radiation force and the drag force generated by acoustic flow, it is positioned on the node. At this time, the microsphere is inspected for the first time by microscopy. Step 3) De-energize the second, fourth, and sixth migrating piezoelectric ceramic sheets, and apply a preset first simple harmonic voltage signal to the third and fifth migrating piezoelectric ceramic sheets to excite the vibrating body to produce a second-order out-of-plane bending vibration mode with distortion in its length direction. The microsphere moves with the fluid in the straight migration channel to the first node of the distorted second-order out-of-plane bending vibration. Under the action of acoustic radiation force and drag force generated by acoustic flow, it is positioned at the node. At this time, the microsphere is subjected to a second morphological inspection through a microscope. Step 4) De-energize the third and fifth migrating piezoelectric ceramic sheets, and apply a preset third harmonic voltage signal to the first, fourth, fifth, and seventh migrating piezoelectric ceramic sheets to excite the vibrating body to distort the fifth out-of-plane bending vibration mode along its length. The microsphere moves with the fluid in the straight migration channel to the third node of the distorted fifth out-of-plane bending vibration. Under the action of acoustic radiation force and the drag force generated by acoustic flow, it is positioned on the node. At this time, the microsphere is inspected for the third time using a microscope. Step 5) De-energize the first, fourth, fifth, and seventh migrating piezoelectric ceramic sheets, and apply a preset second harmonic voltage signal to the second, fourth, and sixth migrating piezoelectric ceramic sheets to excite the vibrating body to distort the third-order out-of-plane bending vibration mode in its length direction. When the microsphere moves with the fluid in the straight migration channel to the center position of the sorting channel, de-energize the second, fourth, and sixth migrating piezoelectric ceramic sheets to position the microsphere. At this time, the microsphere is inspected for the fourth time using a microscope. Step 6) Based on the results of the four tests, the surface quality of the microspheres is judged and sorted according to their quality. Step 6.1) If the microsphere is of inferior quality, apply a preset fifth harmonic voltage signal to the sorting piezoelectric ceramic sheet to excite the sorting copper sheet into a first out-of-plane bending vibration mode in the width direction of the vibrating body, so that the microsphere moves to the inlet of the first outlet channel. Step 6.2): ​​If the microsphere is of medium mass, apply a preset sixth harmonic voltage signal to the sorting piezoelectric ceramic sheet to excite the sorting copper sheet into a first-order out-of-plane bending vibration mode in the width direction of the vibrating body, so that the microsphere moves to the inlet of the third outlet channel. Step 6.3): If the microspheres are of high quality, the piezoelectric ceramic sheet is not driven for sorting, and the microspheres are located at the inlet of the second outlet channel. Step 7) Apply a preset fourth harmonic voltage signal to the fourth migrating piezoelectric ceramic sheet, so that the microsphere continues to move forward to the outlet channel corresponding to its sorting.

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