Microsphere multi-mode manipulation device based on traveling wave sound field and working method thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
- Filing Date
- 2022-11-14
- Publication Date
- 2026-06-23
Smart Images
Figure CN115753564B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the fields of micromanipulation and rapid screening of microparticles, and in particular to a multi-mode microsphere manipulation device based on traveling wave sound field and its working method. Background Technology
[0002] Laser confinement fusion (ICF) uses high-power, high-energy-density lasers as a driving source and employs spherical implosion pressurization technology to ignite the nuclear fuel within a spherical target pellet, thereby forming a self-sustaining thermonuclear reaction. ICF holds the promise of providing humanity with clean, pollution-free energy. ICF experiments impose stringent requirements on the quality of the hollow microspheres (target pellets) used as nuclear fuel containers, particularly regarding geometric parameters and surface defects. The quality of the target pellets directly impacts the success or failure of the ICF target firing experiment. The target pellets are characterized by their tiny size (100-1000 μm in diameter), fragile structure, and high viscosity, posing significant challenges to their inspection. Currently, the equipment used to measure the geometric parameters of microspheres includes X-ray instruments, white light interferometers, and atomic force microscopes. These instruments offer very high measurement accuracy (reaching the micrometer or even nanometer level). Due to the spherical shape of the target pellets, achieving complete characterization of their morphology requires multiple movements and rotations. However, these testing devices all control the target ball's movement through a multi-degree-of-freedom moving platform. This hard-contact method easily causes secondary damage to the target ball's surface when adjusting its posture, resulting in low testing efficiency and pass rate. Micromanipulation technology, using sound waves as a driving source, offers advantages such as high biocompatibility and stable microscale manipulation. This means that micromanipulation technology can be applied to the non-destructive testing and screening of microspheres. Through multiple positioning operations, the complete morphological characterization of the target ball can be achieved. By coordinating and switching different vibration modes, target balls of different masses can be aggregated in different areas, thus meeting the requirements for non-destructive and high-precision manipulation in the target ball testing process. Summary of the Invention
[0003] The technical problem to be solved by the present invention is to address the deficiencies mentioned in the background art by providing a microsphere multi-mode manipulation device based on traveling wave sound field and its working method.
[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:
[0005] A microsphere multi-mode manipulation device based on traveling wave sound field includes a base, a vibrator, a first fixed seat, a second fixed seat, a first fixed nut, a second fixed nut, a PDMS module, and a piezoelectric drive module.
[0006] Both the first fixing seat and the second fixing seat are mounted on the base and have the same structure. Each includes a base and a stud. The base is a column with its lower end face fixed to the base. The lower end of the stud is perpendicularly fixed to the upper end face of the base.
[0007] The vibrating body is a cuboid, with a first through hole and a second through hole at both ends of its upper surface that match the studs of the first fixed seat and the second fixed seat, respectively, and the vibrating body is symmetrical about the line connecting the centers of the first through hole and the second through hole.
[0008] The studs of the first fixed seat and the second fixed seat pass through the first through hole and the second through hole respectively and are connected to the first fixed nut and the second fixed nut by corresponding threads, thereby fixing the vibrator on the base of the first fixed seat and the second fixed seat;
[0009] The base is fixed to the air flotation platform, making the vibrating body horizontal;
[0010] The upper end face of the vibrator is provided with a mounting groove for placing the PDMS module between the first through hole and the second through hole. The mounting groove is symmetrical about the line connecting the centers of the first through hole and the second through hole.
[0011] The PDMS module is a cuboid with the same shape as the mounting groove of the vibrator, made of PDMS material, and fixed in the mounting groove by PDMS glue.
[0012] The upper surface of the PDMS has a migration channel and a second outlet channel on the line connecting the centers of the first and second through holes, and a sorting channel is provided between the migration channel and the second outlet channel; the migration channel is located upstream of the sorting channel; the sorting channel is perpendicular to the migration channel, one side of which is connected to the migration channel, and the other side of which is connected to the second outlet channel; the upper surface of the PDMS also has a first outlet channel and a third outlet channel symmetrically provided on both sides of the second outlet channel, and the first outlet channel and the third outlet channel are respectively connected to the two ends of the sorting channel;
[0013] The lower surface of the vibrator is provided with first to fourth grooves along its length from upstream to downstream; the first to fourth grooves are all perpendicular to the migration channel and symmetrical about the line where the migration channel is located, dividing the mounting groove into five equal parts;
[0014] The lower surface of the vibrator is provided with a first through groove and a second through groove on both sides of the sorting channel; the bottom surface of the mounting groove is provided with a fifth groove and a sixth groove that are parallel to each other at both ends of the sorting channel; the two ends of the fifth groove and the sixth groove are perpendicularly connected to the first through groove and the second through groove, respectively, to form a flexible hinge;
[0015] The piezoelectric drive module includes first to fourth migration drive units and first to second sorting drive units;
[0016] The first to fourth migration driving units have the same structure, each containing 2n piezoelectric ceramic sheets stacked sequentially. The 2n piezoelectric ceramic sheets are all polarized along the thickness direction, and the polarization directions of adjacent piezoelectric ceramic sheets are opposite.
[0017] The first to fourth migration drive units are respectively arranged in the first to fourth grooves, and the piezoelectric ceramic sheets inside them are all perpendicular to the migration channel.
[0018] The first and second sorting drive units both use piezoelectric stacks, and the lines connecting the centers of the first and second through holes are symmetrically attached to the lower surface of the vibrator located in the sorting channel.
[0019] As a further optimization of the microsphere multi-mode control device based on traveling wave sound field of the present invention, the base adopts a rectangular plate, and each of its four corners is provided with through holes for fixing to the air flotation platform.
[0020] As a further optimization of the microsphere multi-mode manipulation device based on traveling wave sound field of the present invention, n is taken as 2.
[0021] The present invention also discloses a control method for the microsphere multi-mode manipulation device based on traveling wave sound field, comprising the following steps:
[0022] Step 1), inject carrier fluid and release microspheres in the upstream of the migration channel;
[0023] Step 2) Apply first to fourth harmonic voltage signals to the first to fourth migration drive units respectively. The first to fourth harmonic voltage signals have the same amplitude and frequency and the phase increases by π / 2 in sequence, which couples out the non-resonant traveling wave deformation of the vibrating body, so that the microsphere moves along the migration channel with the fluid under the action of acoustic radiation force and the drag force generated by acoustic flow.
[0024] Step 3) Power off the first to fourth migration drive units to position the microsphere, and use a microscope to inspect the morphology of the microsphere in the current posture.
[0025] Step 4), repeat steps 2) to 3) until the microsphere surface is fully characterized;
[0026] Step 5) Apply the first to fourth harmonic voltage signals to the first to fourth migration drive units respectively. After the microspheres enter the sorting channel, de-energize the first to fourth migration drive units.
[0027] Step 6), determine the quality of the microspheres and sort them according to their quality;
[0028] Step 6.1) If the microsphere is of inferior quality, apply a preset fifth harmonic voltage signal to the first sorting drive unit to excite the vibrator between the first through groove, the second through groove, the fifth groove, and the sixth groove to bend out of plane in the length direction of the sorting channel, so that the microsphere moves to the inlet of the first outlet channel.
[0029] Step 6.2): If the microsphere is of medium mass, apply a preset sixth harmonic voltage signal to the second sorting drive unit to excite the vibrator between the first through slot, the second through slot, the fifth groove, and the sixth groove to bend out of plane in the length direction of the sorting channel, so that the microsphere moves to the inlet of the third outlet channel.
[0030] Step 6.3): If the microspheres are high-quality microspheres, the first and second sorting drive units are not driven, and the microspheres are located at the inlet of the second outlet channel.
[0031] Step 7) Apply the first to fourth harmonic voltage signals to the first to fourth migration drive units respectively, so that the microspheres continue to move forward into the outlet flow channels corresponding to their sorting.
[0032] Compared with the prior art, the present invention, employing the above technical solution, has the following technical effects:
[0033] 1. The equipment is simple and inexpensive, which can reduce the cost of common screening systems;
[0034] 2. Micro-manipulation devices using piezoelectric excitation can achieve non-destructive and non-contact manipulation of microspheres. The manipulation methods include: positioning manipulation, migration manipulation, and sorting manipulation.
[0035] 3. While manipulating microspheres to achieve different movements, the advantages and disadvantages of their size, surface morphology and other parameters are analyzed by microscope. Then, microspheres with different surface qualities are controlled to aggregate in different areas to achieve efficient and high-precision screening of microspheres. Attached Figure Description
[0036] Figure 1 This is a schematic diagram of the structure of the present invention;
[0037] Figure 2 This is a schematic diagram of the structure in which the first and second fixing seats and the base cooperate in this invention;
[0038] Figure 3 This is a schematic diagram of the structure of the vibrating body, PDMS module, and piezoelectric drive module working together in this invention;
[0039] Figure 4 This is a top view of the PDMS module in this invention;
[0040] Figure 5 This is a schematic diagram of the structure of the vibrating body and the piezoelectric drive module in this invention.
[0041] Figure 6 This is a rear view of the vibrating body and the piezoelectric drive module working together in this invention;
[0042] Figure 7 This is a schematic diagram of the polarization direction of the linearly migrating piezoelectric element group in this invention;
[0043] Figure 8 This is a schematic diagram illustrating the excitation principle of the out-of-plane bending traveling wave of the oscillator in this invention;
[0044] Figure 9 This is the mode shape diagram of the out-of-plane bending traveling wave of the oscillator in this invention;
[0045] Figure 10 This is the acoustic field diagram of the out-of-plane bending traveling wave of the oscillator in this invention;
[0046] Figure 11 This is a schematic diagram of the out-of-plane bending deformation mode and the electrical signal application method of the vibrating body excited by the first sorting drive unit in this invention.
[0047] Figure 12 This is a schematic diagram of the out-of-plane bending deformation mode and the electrical signal application method of the vibrating body excited by the second sorting drive unit in this invention.
[0048] In the figure, 1-base, 2-vibrator, 3-first fixed seat, 4-second fixed seat, 5-first fixing nut, 6-second fixing nut, 7-PDMS module, 8-first migration drive unit, 9-migration channel, 10-sorting channel, 11-first outlet channel, 12-second outlet channel, 13-third outlet channel, 14-first through groove, 15-second through groove, 16-fifth groove, 17-second sorting drive unit, 18-first sorting drive unit. Detailed Implementation
[0049] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings:
[0050] This invention can be implemented in many different forms and should not be considered limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully express the scope of the invention to those skilled in the art. In the drawings, components are enlarged for clarity.
[0051] It should be understood that although the terms first, second, third, etc., may be used herein to describe various elements, components, and / or parts, these elements, components, and / or parts are not limited by these terms. These terms are merely used to distinguish elements, components, and / or parts from one another. Therefore, the first element, component, and / or part discussed below may be a second element, component, or part without departing from the teachings of this invention.
[0052] like Figure 1 As shown, the present invention discloses a microsphere multi-mode manipulation device based on traveling wave sound field, including a base, a vibrator, a first fixed seat, a second fixed seat, a first fixed nut, a second fixed nut, a PDMS module, and a piezoelectric drive module;
[0053] like Figure 2 The first fixing seat and the second fixing seat are both mounted on the base and have the same structure. They both include a base and a stud. The base is a column and its lower end is fixedly connected to the base. The lower end of the stud is perpendicularly fixedly connected to the upper end of the base.
[0054] like Figure 3 As shown, the vibrating body is a cuboid, with a first through hole and a second through hole at both ends of its upper surface that match the studs of the first fixed seat and the second fixed seat, respectively, and the vibrating body is symmetrical about the line connecting the centers of the first through hole and the second through hole;
[0055] The studs of the first fixed seat and the second fixed seat pass through the first through hole and the second through hole respectively and are connected to the first fixed nut and the second fixed nut by corresponding threads, thereby fixing the vibrator on the base of the first fixed seat and the second fixed seat;
[0056] The base is fixed to the air flotation platform, making the vibrating body horizontal;
[0057] The upper end face of the vibrator is provided with a mounting groove for placing the PDMS module between the first through hole and the second through hole. The mounting groove is symmetrical about the line connecting the centers of the first through hole and the second through hole.
[0058] The PDMS module is a cuboid with the same shape as the mounting groove of the vibrator, made of PDMS material, and fixed in the mounting groove by PDMS glue.
[0059] like Figure 4 As shown, the upper surface of the PDMS is provided with a migration channel and a second outlet channel on the line connecting the centers of the first and second through holes, and a sorting channel is provided between the migration channel and the second outlet channel; the migration channel is located upstream of the sorting channel; the sorting channel is perpendicular to the migration channel, one side of which is connected to the migration channel, and the other side of which is connected to the second outlet channel; the upper surface of the PDMS is also symmetrically provided with a first outlet channel and a third outlet channel on both sides of the second outlet channel, and the first outlet channel and the third outlet channel are respectively connected to the two ends of the sorting channel;
[0060] like Figure 5 , Figure 6As shown, the lower surface of the vibrator is provided with first to fourth grooves along its length from upstream to downstream; the first to fourth grooves are all perpendicular to the migration channel and symmetrical about the line where the migration channel is located, dividing the mounting groove into five equal parts;
[0061] The lower surface of the vibrator is provided with a first through groove and a second through groove on both sides of the sorting channel; the bottom surface of the mounting groove is provided with a fifth groove and a sixth groove that are parallel to each other at both ends of the sorting channel; the two ends of the fifth groove and the sixth groove are perpendicularly connected to the first through groove and the second through groove, respectively, to form a flexible hinge;
[0062] The piezoelectric drive module includes first to fourth migration drive units and first to second sorting drive units;
[0063] The first to fourth migration driving units have the same structure, each containing 2n sequentially stacked piezoelectric ceramic sheets. All 2n piezoelectric ceramic sheets are polarized along their thickness direction, and adjacent piezoelectric ceramic sheets have opposite polarization directions. Figure 7 As shown;
[0064] The first to fourth migration drive units are respectively arranged in the first to fourth grooves, and the piezoelectric ceramic sheets inside them are all perpendicular to the migration channel.
[0065] The first and second sorting drive units both use piezoelectric stacks, and the lines connecting the centers of the first and second through holes are symmetrically attached to the lower surface of the vibrator located in the sorting channel.
[0066] The base is preferably a rectangular plate, with through holes at each of its four corners for fixing to the air flotation platform; n is preferably 2.
[0067] Planning the microsphere motion path on the PDMS module avoids the problem of the required vibration mode not being able to be excited due to planning the flow channel directly on the oscillator. At the same time, it can also prevent the problem of liquid leakage caused by constructing a sorting excitation structure.
[0068] The first to fourth grooves not only allow for the positioning of the piezoelectric ceramic sheet during its attachment but also amplify the piezoelectric ceramic's properties in the d-axis through the constraint of the ceramic sheet. 33 The deformation effect during the vibration mode thus amplifies the amplitude.
[0069] The PDMS module and the vibrator form an oscillator. Applying harmonic voltage signals of different phases to the first to fourth migration drive units can excite out-of-plane bending deformation of the oscillator in the direction of the migration channel length, such as... Figure 8 As shown; modal simulation of the oscillator yields its out-of-plane bending deformation mode diagram along its length. The antinodes shift forward with time, as shown... Figure 9 As shown; sound field analysis of the oscillator yields its sound pressure map, and the nodal line shifts forward with time, as... Figure 10 As shown. Applying a harmonic voltage signal to the first and second sorting drive units can excite out-of-plane bending deformation of the oscillator between the first through slot, the second through slot, the fifth groove, and the sixth groove along the length of the sorting channel. The out-of-plane bending deformation excited by applying a harmonic voltage signal to the first sorting drive unit is as follows: Figure 11 As shown, the out-of-plane bending deformation excited by applying a simple harmonic voltage signal to the first sorting drive unit is as follows: Figure 12 As shown.
[0070] Microspheres with sizes ranging from micrometers to millimeters can be manipulated in a PDMS channel to achieve multiple power-off positioning, power-on long-distance migration, and classification. After each power-off positioning of the microspheres, their microscopic morphology is detected under a microscope. After the detection is completed, the voltage is turned on to move the microspheres further towards the channel outlet. At the sorting channel, high-quality, medium-quality, and low-quality microspheres are classified and manipulated according to the microscope detection results, thereby achieving the aggregation of microspheres of different qualities at different outlets.
[0071] The present invention also discloses a control method for the microsphere multi-mode manipulation device based on traveling wave sound field, comprising the following steps:
[0072] Step 1), inject carrier fluid and release microspheres in the upstream of the migration channel;
[0073] Step 2) Apply first to fourth harmonic voltage signals to the first to fourth migration drive units respectively. The first to fourth harmonic voltage signals have the same amplitude and frequency and the phase increases by π / 2 in sequence, which couples out the non-resonant traveling wave deformation of the vibrating body, so that the microsphere moves along the migration channel with the fluid under the action of acoustic radiation force and the drag force generated by acoustic flow.
[0074] Step 3) Power off the first to fourth migration drive units to position the microsphere, and use a microscope to inspect the morphology of the microsphere in the current posture.
[0075] Step 4), repeat steps 2) to 3) until the microsphere surface is fully characterized;
[0076] Step 5) Apply the first to fourth harmonic voltage signals to the first to fourth migration drive units respectively. After the microspheres enter the sorting channel, de-energize the first to fourth migration drive units.
[0077] Step 6), determine the quality of the microspheres and sort them according to their quality;
[0078] Step 6.1) If the microsphere is of inferior quality, apply a preset fifth harmonic voltage signal to the first sorting drive unit to excite the vibrator between the first through groove, the second through groove, the fifth groove, and the sixth groove to bend out of plane in the length direction of the sorting channel, so that the microsphere moves to the inlet of the first outlet channel.
[0079] Step 6.2): If the microsphere is of medium mass, apply a preset sixth harmonic voltage signal to the second sorting drive unit to excite the vibrator between the first through slot, the second through slot, the fifth groove, and the sixth groove to bend out of plane in the length direction of the sorting channel, so that the microsphere moves to the inlet of the third outlet channel.
[0080] Step 6.3): If the microspheres are high-quality microspheres, the first and second sorting drive units are not driven, and the microspheres are located at the inlet of the second outlet channel.
[0081] Step 7) Apply the first to fourth harmonic voltage signals to the first to fourth migration drive units respectively, so that the microspheres continue to move forward into the outlet flow channels corresponding to their sorting.
[0082] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless defined as herein.
[0083] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A multi-mode control device for microspheres based on traveling wave sound fields, characterized in that, It includes a base, a vibrator, a first fixed seat, a second fixed seat, a first fixed nut, a second fixed nut, a PDMS module, and a piezoelectric drive module; Both the first fixing seat and the second fixing seat are mounted on the base and have the same structure. Each includes a base and a stud. The base is a column with its lower end face fixed to the base. The lower end of the stud is perpendicularly fixed to the upper end face of the base. The vibrating body is a cuboid, with a first through hole and a second through hole at both ends of its upper surface that match the studs of the first fixed seat and the second fixed seat, respectively, and the vibrating body is symmetrical about the line connecting the centers of the first through hole and the second through hole. The studs of the first fixed seat and the second fixed seat pass through the first through hole and the second through hole respectively and are connected to the first fixed nut and the second fixed nut by corresponding threads, thereby fixing the vibrator on the base of the first fixed seat and the second fixed seat; The base is fixed to the air flotation platform, making the vibrating body horizontal; The upper end face of the vibrator is provided with a mounting groove for placing the PDMS module between the first through hole and the second through hole. The mounting groove is symmetrical about the line connecting the centers of the first through hole and the second through hole. The PDMS module is a cuboid with the same shape as the mounting groove of the vibrator, made of PDMS material, and fixed in the mounting groove by PDMS glue. The upper surface of the PDMS module has a migration channel and a second outlet channel on the line connecting the centers of the first and second through holes, and a sorting channel between the migration channel and the second outlet channel; the migration channel is located upstream of the sorting channel; the sorting channel is perpendicular to the migration channel, one side of which is connected to the migration channel, and the other side of which is connected to the second outlet channel; the upper surface of the PDMS module also has a first outlet channel and a third outlet channel symmetrically arranged on both sides of the second outlet channel, and the first outlet channel and the third outlet channel are respectively connected to the two ends of the sorting channel; The lower surface of the vibrator is provided with first to fourth grooves along its length from upstream to downstream; the first to fourth grooves are all perpendicular to the migration channel and symmetrical about the line where the migration channel is located, dividing the mounting groove into five equal parts; The lower surface of the vibrator is provided with a first through groove and a second through groove on both sides of the sorting channel; the bottom surface of the mounting groove is provided with a fifth groove and a sixth groove that are parallel to each other at both ends of the sorting channel; the two ends of the fifth groove and the sixth groove are perpendicularly connected to the first through groove and the second through groove, respectively, forming a flexible hinge; The piezoelectric drive module includes first to fourth migration drive units and first to second sorting drive units; The first to fourth migration driving units have the same structure, each containing 2n piezoelectric ceramic sheets stacked sequentially. The 2n piezoelectric ceramic sheets are all polarized along the thickness direction, and the polarization directions of adjacent piezoelectric ceramic sheets are opposite. The first to fourth migration drive units are respectively arranged in the first to fourth grooves, and the piezoelectric ceramic sheets inside them are all perpendicular to the migration channel. The first and second sorting drive units both use piezoelectric stacks, and the lines connecting the centers of the first and second through holes are symmetrically attached to the lower surface of the vibrator located in the sorting channel.
2. The microsphere multi-mode manipulation device based on traveling wave acoustic field according to claim 1, characterized in that, The base is a rectangular plate with through holes at each of its four corners for fixing to the air flotation platform.
3. The microsphere multi-mode manipulation device based on traveling wave acoustic field according to claim 1, characterized in that, The value of n is 2.
4. The control method of the microsphere multi-mode control device based on traveling wave sound field as described in claim 1, characterized in that, Includes the following steps: Step 1), inject carrier fluid and release microspheres in the upstream of the migration channel; Step 2) Apply first to fourth harmonic voltage signals to the first to fourth migration drive units respectively. The first to fourth harmonic voltage signals have the same amplitude and frequency and the phase increases by π / 2 in sequence, which couples out the non-resonant traveling wave deformation of the vibrating body, so that the microsphere moves along the migration channel with the fluid under the action of acoustic radiation force and the drag force generated by acoustic flow. Step 3) Power off the first to fourth migration drive units to position the microsphere, and use a microscope to inspect the morphology of the microsphere in the current posture. Step 4), repeat steps 2) to 3) until the microsphere surface is fully characterized; Step 5) Apply the first to fourth harmonic voltage signals to the first to fourth migration drive units respectively. After the microspheres enter the sorting channel, de-energize the first to fourth migration drive units. Step 6) Determine the quality of the microspheres and sort them according to their quality. Step 6.1) If the microsphere is of inferior quality, apply a preset fifth harmonic voltage signal to the first sorting drive unit to excite the vibrator between the first through groove, the second through groove, the fifth groove, and the sixth groove to bend out of plane in the length direction of the sorting channel, so that the microsphere moves to the inlet of the first outlet channel. Step 6.2): If the microsphere is of medium mass, apply a preset sixth harmonic voltage signal to the second sorting drive unit to excite the vibrator between the first through slot, the second through slot, the fifth groove, and the sixth groove to bend out of plane in the length direction of the sorting channel, so that the microsphere moves to the inlet of the third outlet channel. Step 6.3): If the microspheres are high-quality microspheres, the first and second sorting drive units are not driven, and the microspheres are located at the inlet of the second outlet channel. Step 7) Apply the first to fourth harmonic voltage signals to the first to fourth migration drive units respectively, so that the microspheres continue to move forward into the outlet flow channels corresponding to their sorting.