Low-dimensional material electrical properties variable temperature test bench and variable temperature test device

Abstract

The present invention relates to a variable temperature test bench and a variable temperature test device for electrical properties of low-dimensional materials, comprising a sample table, a groove being provided on the sample table, a gasket being provided in the groove, and a sample to be tested being provided on the gasket; an electrode mask being provided to cover the sample to be tested; a metal shielding ring having an outer diameter no greater than the outer diameter of the gasket, the outer diameter of the electrode mask being smaller than the inner diameter of the metal shielding ring, and the metal shielding ring being in contact with the gasket; at least four probes being provided, the at least four probes being all provided on the sample table along the circumference of the groove, the electrode mask being provided with at least four probe holes, the electrode end of the sample to be tested being provided in the probe hole, the needle tip of the probe passing through the probe hole being in contact with the electrode end of the sample to be tested, and the other end of the probe being fixedly provided on the sample table. The present invention is easy to accurately position, has accurate experimental test results, and has high test efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of material electrical property testing, in particular to a variable temperature testing platform and a variable temperature testing device for the electrical property of low-dimensional materials. Background Art

[0002] Different materials have different physical and chemical properties. Devices manufactured using materials with unknown physical and chemical properties can pose risks to both precision and user safety. Therefore, in scientific research, material characterization is necessary. This involves revealing and determining the structural characteristics of materials through various physical and chemical testing methods. Only after characterization can materials be safely and reliably applied in various fields. Measuring the electrical properties of materials is a crucial step in material characterization, guiding our exploration and understanding of the physical properties of materials. Electrical performance testing equipment is typically used to test materials' electrical properties, such as resistance and dielectric constant.

[0003] When dealing with low-dimensional materials such as nanowires and thin films, existing conventional electrical performance testing devices are unable to accurately locate the electrode position of low-dimensional material samples due to the special crystal structure of low-dimensional materials: small volume, large substrate influence, high surface conductivity, etc., and therefore cannot measure the electrical properties of low-dimensional materials efficiently and accurately. Summary of the Invention

[0004] To this end, the technical problem to be solved by the present invention is to overcome the existing technology and provide a variable temperature test bench and variable temperature test device for the electrical properties of low-dimensional materials. The precise positioning of the low-dimensional material electrodes is achieved through gaskets, electrode mask templates, and probes, and a metal shielding ring is set to ensure the accuracy of the experimental test results, and the testing efficiency of the entire device is high.

[0005] The present invention provides a variable-temperature test bench for the electrical properties of low-dimensional materials, comprising a sample table, wherein a groove is provided on the sample table, a gasket is provided in the groove, and the sample to be tested is provided on the gasket; an electrode mask plate, wherein the electrode mask plate is provided to cover the sample to be tested; a metal shielding ring, wherein the outer diameter of the metal shielding ring is not greater than the outer diameter of the gasket, the outer diameter of the electrode mask plate is smaller than the inner diameter of the metal shielding ring, and the metal shielding ring abuts against the gasket; and probes, wherein at least four probes are provided, and the at least four probes are all arranged on the sample table along the circumference of the groove, and at least four probe holes are provided on the electrode mask plate, the electrode end of the sample to be tested is arranged in the probe hole, the needle tip of the probe passes through the probe hole and abuts against the electrode end of the sample to be tested, and the other end of the probe is fixedly provided on the sample table.

[0006] In one embodiment of the present invention, a plurality of point electrodes are provided on the gasket, the electrode ends of the sample to be tested are fixedly provided on the point electrodes, and the probes are in contact with the point electrodes.

[0007] In one embodiment of the present invention, one end of the probe away from the needle tip is fixed on the sample stage by a screw.

[0008] In one embodiment of the present invention, a screw sliding hole is provided on the end of the probe away from the needle tip.

[0009] In one embodiment of the present invention, the probe is configured as a platinum probe or a platinum-plated probe.

[0010] The present invention also provides a low-dimensional material electrical property variable temperature test device, comprising a test instrument and any one of the above-mentioned low-dimensional material electrical property variable temperature test benches, wherein the test instrument is connected to the low-dimensional material electrical property variable temperature test bench.

[0011] In one embodiment of the present invention, a heating device is further included. The low-dimensional material electrical property variable temperature test bench is arranged in the heating device, and the heating device is connected to the temperature control device.

[0012] In one embodiment of the present invention, the test instrument is provided with a BNC connector, and the BNC connector is provided with a first wire and a second wire, the first wire is connected to the probe, and the second wire is connected to the metal shielding ring.

[0013] In one embodiment of the present invention, a shielding layer is provided on both the first conductive wire and the second conductive wire.

[0014] In one embodiment of the present invention, a vacuum isolation device is further included, which includes a quartz tube, a vacuum flange and a vacuum pump. The quartz tube is configured as a cylindrical structure, and the vacuum flange includes a first vacuum flange and a second vacuum flange. The first vacuum flange and the second vacuum flange are respectively arranged at both ends of the quartz tube. An air outlet is provided on the first vacuum flange, and the vacuum pump is arranged on the air outlet.

[0015] The above technical solution of the present invention has the following advantages over the prior art:

[0016] The variable-temperature test bench and variable-temperature test device for the electrical properties of low-dimensional materials described in the present invention fix the low-dimensional material to be tested by setting a gasket and an electrode mask, while reducing the influence of external factors on the test results of the low-dimensional material to be tested. The electrode mask is provided with a probe hole to facilitate precise positioning of the probe, thereby improving the accuracy of the experimental test results. A metal shielding ring is also provided to eliminate the influence of edge capacitance on the experimental test results. The entire test bench structure is small, allowing the experimenter to set the test bench under a microscope for operation, and the positioning is more precise. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to make the content of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments of the present invention in conjunction with the accompanying drawings, wherein

[0018] Figure 1 Schematic diagram of the structure of a variable temperature test bench for electrical properties of low-dimensional materials in a preferred embodiment of the present invention;

[0019] Figure 2 Schematic diagram of the structure of the low-dimensional material electrical property temperature-varying test device in the second preferred embodiment of the present invention;

[0020] Figure 3 yes Figure 2 A schematic diagram of the local enlargement of the middle A;

[0021] Figure 4 Schematic diagram of the structure of the low-dimensional material electrical property temperature-varying test device in the fourth preferred embodiment of the present invention;

[0022] Figure 5 yes Figure 4 A schematic diagram of the magnified part of point B in the middle;

[0023] Figure 6 This is a partial structural diagram of the connection between the gasket, the sample to be tested, and the probe in the third preferred embodiment of the present invention;

[0024] Figure 7 This is a current-voltage curve obtained by testing the resistance of a ceramic film at room temperature and in a vacuum state using the low-dimensional material electrical property variable temperature testing device in the fourth preferred embodiment of the present invention;

[0025] Figure 8 This is a current-voltage curve obtained by testing the resistance of a ceramic film at 1000° C. and in a vacuum state using the low-dimensional material electrical property variable temperature testing device in the fourth preferred embodiment of the present invention.

[0026] Explanation of the reference numerals in the specification: 01. Variable temperature test bench for electrical properties of low-dimensional materials; 10. Sample table; 11. Groove; 12. Gasket; 121. Point electrode; 13. Sample to be tested; 14. Electrode mask; 141. Probe hole; 15. Metal shielding ring; 16. Probe; 17. Screw; 18. Screw sliding hole; 19. Spare screw mounting hole; 21. Test instrument; 22. Heating device; 24. BNC connector; 25. First wire; 26. Second wire; 28. Quartz tube; 29. ​​First vacuum flange; 30. Air outlet; 31. Vacuum pump; 32. Second vacuum flange. DETAILED DESCRIPTION

[0027] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0028] Example 1

[0029] Reference Figure 1 and Figure 3 As shown, the present invention discloses a low-dimensional material electrical performance variable temperature test bench 01, comprising: a sample table 10, wherein the sample table 10 is provided with a groove 11, wherein a gasket 12 is provided in the groove 11, and a sample to be tested 13 is provided on the gasket 12; an electrode mask 14, wherein the electrode mask 14 is provided to cover the sample to be tested 13; a metal shielding ring 15, wherein the outer diameter of the metal shielding ring 15 is not greater than the outer diameter of the gasket 12, and the outer diameter of the electrode mask 14 is smaller than the inner diameter of the metal shielding ring 15, and ... The metal shielding ring 15 is in contact with the gasket 12; the probe 16, there are at least four probes 16, and the at least four probes 16 are all arranged on the sample stage 10 along the circumference of the groove 11, and at least four probe holes 141 are provided on the electrode mask 14, the electrode end of the sample to be tested 13 is arranged in the probe hole 141, the needle tip of the probe 16 passes through the probe hole 141 and is in contact with the electrode end of the sample to be tested 13, and the other end of the probe 16 is fixedly set on the sample stage 10.

[0030] The low-dimensional material electrical property variable temperature test bench 01 described in the present invention is provided with a sample table 10 for carrying other test components. Preferably, the sample table 10 is set to a cylindrical structure. Of course, it can also be set to a rectangular structure, a cube structure, etc. according to the specific needs of the experiment. A groove 11 is provided on the sample table 10, and a gasket 12 is provided in the groove 11. The sample 13 to be tested is set on the gasket 12. The gasket 12 is used as a consumable material. Using the gasket 12 to carry the sample 13 to be tested is convenient for the experimenter to clean up after the experiment. Preferably, the groove 11 is set to a cylindrical structure, the gasket 12 is set to a circular gasket, and the gasket 12 is provided. The diameter is consistent with the diameter of the groove 11. This structure is used to better fix the gasket 12 and reduce the experimental measurement error caused by the problem of loose fixation during the experiment. The size of the groove 11 is flexibly set according to the actual experimental test material requirements; an electrode mask 14 is provided, and the electrode mask 14 is covered on the sample to be tested 13 to reduce the influence of external factors on the experimental results. Preferably, the electrode mask 14 is made of insulating material to avoid the influence of the conductive material on the experimental results; a metal shielding ring 15, the outer diameter of the metal shielding ring 15 is not greater than the outer diameter of the gasket 12, and the outer diameter of the electrode mask 14 is less than The inner diameter of the metal shielding ring 15, and the metal shielding ring 15 is in contact with the gasket 12. Compared with the parallel plate electrode, this ring electrode can eliminate the influence of the edge capacitance on the experimental results and provide a stable signal to ensure the accuracy of the experimental results. A probe 16 is also provided for transmitting electrical signals. There are at least four probes 16. The purpose of limiting the number of probes 16 is to better cooperate with the existing test instrument 21. At least four probes 16 are arranged on the sample stage 10 along the circumference of the groove 11. At least four probe holes 141 are provided on the electrode mask 14. The electrode end of the sample 13 to be tested is arranged on the probe In the pinhole 141, the needle tip of the probe 16 passes through the probe hole 141 and abuts against the electrode end of the sample to be tested 13. The probe 16 can also play an auxiliary fixing role for the electrode mask 14. The other end of the probe 16 is fixed on the sample stage 10. The overall structure of the test bench is compact. The sample stage is set as a cylindrical structure with a diameter of 40 mm and a height of 50 mm. The experimenter can place the entire test bench under the microscope to fine-tune the sample to be tested 13 and the probe 16, realize the connection between the two, thereby transmitting electrical signals and performing electrical performance testing. It has high positioning accuracy and improves experimental efficiency.

[0031] Preferably, the probe 16 is configured as a triangular sheet-like structure, with the needle tip disposed at one end of the triangle's top corner, and the end where the two bottom corners are located is used to set a fastener connection. Preferably, the end where the needle tip of the probe 16 is located is bent into the groove 11 so as to abut against the electrode mask template 14. Compared with other structures, this structure can reduce the occupied space, improve the space utilization of the entire test bench, and enhance the auxiliary fixing effect on the electrode mask template 14.

[0032] The end of the probe 16 away from the needle tip is fixed on the sample stage 10 by a screw 17. Preferably, a plurality of spare screw mounting holes 19 are provided on the sample stage for installing the fixing screws 17 when more than four probes are required for testing. Of course, fasteners such as bolts can also be used for fastening, and it is not limited to the use of screws.

[0033] Preferably, the sample stage 10, gasket 12 and screw 17 are all made of high-temperature resistant materials, such as alumina. Alumina has the characteristics of high temperature resistance, high resistance, easy availability, and low thermal expansion coefficient. It can ensure that during the experiment, the components will not be damaged or melted due to overheating due to excessive temperature, such as reaching 1000°C, thereby affecting the experimental results. At the same time, the setting of the same material ensures that the structure of the components can remain relatively stable during thermal expansion and will not affect the experimental results.

[0034] A screw sliding hole 18 is provided on one end of the probe 16 away from the needle tip. Preferably, it is provided as a bar-shaped hole, so that the experimenter can fine-tune the probe 16 that is not fixed by the screw 17 before the experiment, thereby accurately positioning the electrode.

[0035] The probe 16 is configured as a platinum probe or a platinum-plated probe, which can transmit electrical signals well through platinum, making the experimental results more accurate.

[0036] Example 2

[0037] like Figure 2 and Figure 3 As shown, the present invention discloses a variable temperature test device for the electrical properties of low-dimensional materials, including a test instrument 21 and the variable temperature test platform 01 for the electrical properties of low-dimensional materials described in Example 1. The test instrument 21 is connected to the variable temperature test platform 01 for the electrical properties of low-dimensional materials. By using different test instruments, different electrical properties of low-dimensional materials such as resistance, dielectric, etc. can be measured.

[0038] The low-dimensional material electrical property variable temperature testing device described in the present invention includes the low-dimensional material electrical property variable temperature testing platform 01 described in the first embodiment. Therefore, the advantages of the first embodiment are all possessed by the present embodiment.

[0039] The variable temperature test device for the electrical properties of low-dimensional materials described in the present invention also includes a heating device 22. The variable temperature test bench for the electrical properties of low-dimensional materials is arranged in the heating device 22. Preferably, the heating device 22 is configured as a high-temperature furnace. The heating device 22 is connected to a temperature control device, which is not shown in the schematic diagram of the temperature control device. Since the electrical properties of different materials may change at room temperature and at high temperatures, taking this into account, the experimenter places the test bench in the effective constant temperature zone of the high-temperature furnace, and can control the temperature of the high-temperature furnace through the temperature control device, thereby measuring the electrical properties of the low-dimensional material at high temperatures.

[0040] The test instrument 21 is provided with a BNC connector 24, and the BNC connector 24 is provided with a first wire 25 and a second wire 26. The first wire 25 is connected to the probe 16, and the second wire 26 is connected to the metal shielding ring 15 to realize the transmission of electrical signals; at the same time, the various instruments and devices are connected through the wires to realize the flexibility of the spatial placement of the entire test device.

[0041] A shielding layer is provided on both the first wire 25 and the second wire 26 for shielding the interference of external static electricity and electromagnetic waves on the circuit, so that the test device can still perform high-precision variable-frequency electrical performance testing under variable temperature conditions when the heating device 22 is started.

[0042] The low-dimensional material electrical property variable temperature testing device described in the present invention also includes a vacuum isolation device, which includes a quartz tube 28, a vacuum flange and a vacuum pump 31. The quartz tube 28 is configured as a cylindrical structure, and the vacuum flange includes a first vacuum flange 29 and a second vacuum flange 32. The first vacuum flange 29 and the second vacuum flange 32 are respectively arranged at both ends of the quartz tube 28. An air outlet 30 is provided on the first vacuum flange 29, and a vacuum pump 31 is arranged on the air outlet 30. A vacuum testing environment is provided through the vacuum isolation device to reduce the interference of external factors on the test results. Preferably, a vacuum gauge is also provided to understand the air pressure conditions.

[0043] Working principle:

[0044] First, the experimenter places the sample 13 to be tested on the gasket 12, covers the sample 13 to be tested with the electrode mask 14, and aligns the probe hole 141 with the electrode end of the sample 13 to be tested; then, these three items are placed in the groove 11 of the sample stage 10, and the metal shielding ring 15 is set. Then, the position of the probe 16 is adjusted under a microscope, and its needle tip is aligned with the electrode of the electrode mask 14. After the adjustment is completed, the probe 16 is fixed with the screw 17. Finally, it is connected to the test instrument 21 to realize the electrical performance test of the low-dimensional material. It is simple, efficient and highly accurate. If the experimenter has special experimental needs, the test bench can also be set in a vacuum isolation device to eliminate the interference of external factors on the experimental results under non-vacuum conditions; at the same time, a heating device test is set to facilitate the experimental testing of the electrical properties of low-dimensional materials under high temperature conditions. Considering that high temperature affects the connection effect of each component and causes errors in the test results, high-temperature resistant materials are used to prepare each component; each instrument and equipment is connected by wires to realize the flexibility of the spatial layout of the test device and the miniaturization of the central test module.

[0045] Example 3

[0046] Reference Figure 1 、 Figure 5 、 Figure 6As shown, the present invention discloses a low-dimensional material electrical performance variable temperature test bench 01, comprising: a sample table 10, wherein the sample table 10 is provided with a groove 11, wherein a gasket 12 is provided in the groove 11, and a sample to be tested 13 is provided on the gasket 12; an electrode mask 14, wherein the electrode mask 14 is provided to cover the sample to be tested 13; a metal shielding ring 15, wherein the outer diameter of the metal shielding ring 15 is not greater than the outer diameter of the gasket 12, and the outer diameter of the electrode mask 14 is smaller than the inner diameter of the metal shielding ring 15, and ... The metal shielding ring 15 is in contact with the gasket 12; the probe 16, there are at least four probes 16, and the at least four probes 16 are all arranged on the sample stage 10 along the circumference of the groove 11, and at least four probe holes 141 are provided on the electrode mask 14, the electrode end of the sample to be tested 13 is arranged in the probe hole 141, the needle tip of the probe 16 passes through the probe hole 141 and is in contact with the electrode end of the sample to be tested 13, and the other end of the probe 16 is fixedly set on the sample stage 10.

[0047] The low-dimensional material electrical property variable temperature test bench 01 described in the present invention is provided with a sample table 10 for carrying other test components. Preferably, the sample table 10 is set to a cylindrical structure. Of course, it can also be set to a rectangular structure, a cube structure, etc. according to the specific needs of the experiment. A groove 11 is provided on the sample table 10, and a gasket 12 is provided in the groove 11. The sample 13 to be tested is set on the gasket 12. The gasket 12 is used as a consumable material. Using the gasket 12 to carry the sample 13 to be tested is convenient for the experimenter to clean up after the experiment. Preferably, the groove 11 is set to a cylindrical structure, the gasket 12 is set to a circular gasket, and the gasket 12 is provided. The diameter is consistent with the diameter of the groove 11. This structure is used to better fix the gasket 12 and reduce the experimental measurement error caused by the problem of loose fixation during the experiment. The size of the groove 11 is flexibly set according to the actual experimental test material requirements; an electrode mask 14 is provided, and the electrode mask 14 is covered on the sample to be tested 13 to reduce the influence of external factors on the experimental results. Preferably, the electrode mask 14 is made of insulating material to avoid the influence of the conductive material on the experimental results; a metal shielding ring 15, the outer diameter of the metal shielding ring 15 is not greater than the outer diameter of the gasket 12, and the outer diameter of the electrode mask 14 is less than The inner diameter of the metal shielding ring 15, and the metal shielding ring 15 is in contact with the gasket 12. Compared with the parallel plate electrode, this ring electrode can eliminate the influence of the edge capacitance on the experimental results and provide a stable signal to ensure the accuracy of the experimental results. A probe 16 is also provided for transmitting electrical signals. There are at least four probes 16. The purpose of limiting the number of probes 16 is to better cooperate with the existing test instrument 21. At least four probes 16 are arranged on the sample stage 10 along the circumference of the groove 11. At least four probe holes 141 are provided on the electrode mask 14. The electrode end of the sample 13 to be tested is arranged on the probe In the pinhole 141, the needle tip of the probe 16 passes through the probe hole 141 and abuts against the electrode end of the sample to be tested 13. The probe 16 can also play an auxiliary fixing role for the electrode mask 14. The other end of the probe 16 is fixed on the sample stage 10. The overall structure of the test bench is compact. The sample stage is set as a cylindrical structure with a diameter of 40 mm and a height of 50 mm. The experimenter can place the entire test bench under the microscope to fine-tune the sample to be tested 13 and the probe 16, realize the connection between the two, thereby transmitting electrical signals and performing electrical performance testing. It has high positioning accuracy and improves experimental efficiency.

[0048] Preferably, the probe 16 is configured as a triangular sheet-like structure, with the needle tip disposed at one end of the triangle's top corner, and the end where the two bottom corners are located is used to set a fastener connection. Preferably, the end where the needle tip of the probe 16 is located is bent into the groove 11 so as to abut against the electrode mask template 14. Compared with other structures, this structure can reduce the occupied space, improve the space utilization of the entire test bench, and enhance the auxiliary fixing effect on the electrode mask template 14.

[0049] A plurality of point electrodes 121 are provided on the gasket 12, and the electrode end of the sample to be tested 13 is fixedly provided on the point electrode 121, and the probe 16 is in contact with the point electrode 121. Through the gasket 12 provided with the point electrode 121, the experimenter can separate from the sample stage 10 and directly weld the point electrode 121, the electrode end of the sample to be tested 13 and the needle tip of the probe 16 under a microscope. After welding, they are directly fixed on the sample stage 10 to start the experiment, which further improves the positioning accuracy of the entire test platform, ensures the accuracy of the experimental results, and improves the test efficiency.

[0050] The end of the probe 16 away from the needle tip is fixed on the sample stage 10 by a screw 17. Preferably, a plurality of spare screw mounting holes 19 are provided on the sample stage for installing the fixing screws 17 when more than four probes are required for testing. Of course, fasteners such as bolts can also be used for fastening, and it is not limited to the use of screws.

[0051] Preferably, the sample stage 10, gasket 12 and screw 17 are all made of high-temperature resistant materials, such as alumina. Alumina has the characteristics of high temperature resistance, high resistance, easy availability, and low thermal expansion coefficient. It can ensure that during the experiment, the components will not be damaged or melted due to overheating due to excessive temperature, such as reaching 1000°C, thereby affecting the experimental results. At the same time, the setting of the same material ensures that the structure of the components can remain relatively stable during thermal expansion and will not affect the experimental results.

[0052] A screw sliding hole 18 is provided on one end of the probe 16 away from the needle tip. Preferably, it is provided as a bar-shaped hole, so that the experimenter can fine-tune the probe 16 that is not fixed by the screw 17 before the experiment, thereby accurately positioning the electrode.

[0053] The probe 16 is configured as a platinum probe or a platinum-plated probe, which can transmit electrical signals well through platinum, making the experimental results more accurate.

[0054] Example 4

[0055] like Figure 4-Figure 6 As shown, the present invention discloses a variable temperature test device for the electrical properties of low-dimensional materials, including a test instrument 21 and the variable temperature test bench 01 for the electrical properties of low-dimensional materials described in Example 3. The test instrument 21 is connected to the variable temperature test bench 01 for the electrical properties of low-dimensional materials. By using different test instruments, different electrical properties of low-dimensional materials such as resistance, dielectric, etc. can be measured.

[0056] The low-dimensional material electrical property variable temperature testing device described in the present invention includes the low-dimensional material electrical property variable temperature testing platform 01 described in the third embodiment. Therefore, the advantages of the third embodiment are all possessed by this embodiment.

[0057] The variable temperature test device for the electrical properties of low-dimensional materials described in the present invention also includes a heating device 22. The variable temperature test bench for the electrical properties of low-dimensional materials is arranged in the heating device 22. Preferably, the heating device 22 is configured as a high-temperature furnace. The heating device 22 is connected to a temperature control device, which is not shown in the schematic diagram of the temperature control device. Since the electrical properties of different materials may change at room temperature and at high temperatures, taking this into account, the experimenter places the test bench in the effective constant temperature zone of the high-temperature furnace, and can control the temperature of the high-temperature furnace through the temperature control device, thereby measuring the electrical properties of the low-dimensional material at high temperatures.

[0058] The test instrument 21 is provided with a BNC connector 24, and the BNC connector 24 is provided with a first wire 25 and a second wire 26. The first wire 25 is connected to the probe 16, and the second wire 26 is connected to the metal shielding ring 15 to realize the transmission of electrical signals; at the same time, the various instruments and devices are connected through the wires to realize the flexibility of the spatial placement of the entire test device.

[0059] A shielding layer is provided on both the first wire 25 and the second wire 26 for shielding the interference of external static electricity and electromagnetic waves on the circuit, so that the test device can still perform high-precision variable-frequency electrical performance testing under variable temperature conditions when the heating device 22 is started.

[0060] The low-dimensional material electrical property variable temperature testing device described in the present invention also includes a vacuum isolation device, which includes a quartz tube 28, a vacuum flange and a vacuum pump 31. The quartz tube 28 is configured as a cylindrical structure, and the vacuum flange includes a first vacuum flange 29 and a second vacuum flange 32. The first vacuum flange 29 and the second vacuum flange 32 are respectively arranged at both ends of the quartz tube 28. An air outlet 30 is provided on the first vacuum flange 29, and a vacuum pump 31 is arranged on the air outlet 30. A vacuum testing environment is provided through the vacuum isolation device to reduce the interference of external factors on the test results. Preferably, a vacuum gauge is also provided to understand the air pressure conditions.

[0061] like Figure 7 As shown, Figure 7 In order to use the low-dimensional material electrical property temperature test device in this embodiment to test the ceramic film (the actual ceramic film does not have to be as Figure 6 The resistance test was performed on the long strip shown in the figure, and the current-voltage curve was obtained. According to the image, it can be seen that the experimental results are consistent with the theory.

[0062] like Figure 8 As shown, Figure 8 In order to use the low-dimensional material electrical property variable temperature test device in this embodiment to test the ceramic film (the actual ceramic film does not necessarily need to be as Figure 6The resistance test was performed on the long strip shown in the figure, and the current-voltage curve was obtained. According to the image, it can be seen that the experimental results are consistent with the theory.

[0063] Working principle:

[0064] First, the experimenter places the sample 13 to be tested on the gasket 12, and welds the electrode end of the sample 13 to the point electrode 121 on the gasket 12 under a microscope. The sample 13 to be tested is covered with the electrode mask 14, and the probe hole 141 is aligned with the electrode end of the sample 13 to be tested. The tip of the probe 16 is then welded to the point electrode 121, thereby improving the overall test efficiency. The three items are then placed in the groove 11 of the sample stage 10, and the metal shielding ring 15 is set. The position of the probe 16 is then adjusted under a microscope, and its tip is aligned with the electrode of the electrode mask 14. After the adjustment is completed, the probe 16 is fixed with the screw 17. 6. Finally, it can be connected to the test instrument 21 to realize the electrical performance test of the low-dimensional material, which is simple, efficient and highly accurate. If the experimenter has special experimental needs, the test bench can also be set in a vacuum isolation device to eliminate the interference of external factors on the experimental results under non-vacuum conditions. At the same time, a heating device test is set up to facilitate the experimental test of the electrical properties of low-dimensional materials under high temperature conditions. Considering that high temperature affects the connection effect of each component and causes errors in the test results, high-temperature resistant materials are used to prepare each component. The various instruments and equipment are connected by wires to realize the flexibility of the spatial layout of the test device and the miniaturization of the central test module.

[0065] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A low-dimensional material electrical performance variable temperature test bench, characterized in that: include: A sample stage, wherein a groove is provided on the sample stage, a gasket is provided in the groove, and the sample to be tested is provided on the gasket; An electrode mask, the electrode mask being arranged to cover the sample to be tested; a metal shielding ring, wherein the outer diameter of the metal shielding ring is not greater than the outer diameter of the gasket, the outer diameter of the electrode mask is smaller than the inner diameter of the metal shielding ring, and the metal shielding ring abuts against the gasket; The probe is configured as a platinum probe or a platinum-plated probe; at least four probes are provided, and the at least four probes are arranged on the sample stage along the circumference of the groove, the electrode mask is provided with at least four probe holes, the electrode end of the sample to be tested is arranged in the probe hole, the needle tip of the probe passes through the probe hole and abuts against the electrode end of the sample to be tested, and the other end of the probe is fixedly provided on the sample stage; Wherein, a plurality of point electrodes are provided on the gasket, the electrode ends of the sample to be tested are fixedly provided on the point electrodes, and the probes are in contact with the point electrodes.

2. The low-dimensional material electrical property variable temperature test bench according to claim 1, characterized in that: One end of the probe away from the needle tip is fixed on the sample stage by a screw.

3. The low-dimensional material electrical performance variable temperature test bench according to claim 1, characterized in that: A screw sliding hole is provided on one end of the probe away from the needle tip.

4. A low-dimensional material electrical property temperature-variable testing device, characterized in that: It comprises a testing instrument and a low-dimensional material electrical property variable temperature testing platform as described in any one of claims 1 to 3, wherein the testing instrument is connected to the low-dimensional material electrical property variable temperature testing platform.

5. The low-dimensional material electrical property temperature-variable testing device according to claim 4, characterized in that: It also includes a heating device, the low-dimensional material electrical property variable temperature test bench is arranged in the heating device, and the heating device is connected to the temperature control device.

6. The low-dimensional material electrical property variable temperature testing device according to claim 5, characterized in that: The test instrument is provided with a BNC connector, and a first wire and a second wire are provided on the BNC connector. The first wire is connected to the probe, and the second wire is connected to the metal shielding ring.

7. The low-dimensional material electrical property variable temperature testing device according to claim 6, characterized in that: A shielding layer is provided on both the first conductive wire and the second conductive wire.

8. The low-dimensional material electrical property variable temperature testing device according to claim 5, characterized in that: It also includes a vacuum isolation device, which includes a quartz tube, a vacuum flange and a vacuum pump. The quartz tube is configured as a cylindrical structure. The vacuum flange includes a first vacuum flange and a second vacuum flange. The first vacuum flange and the second vacuum flange are respectively arranged at both ends of the quartz tube. The first vacuum flange is provided with an air outlet, and the vacuum pump is arranged on the air outlet.

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