A hinge-driven movable lens fine-tuning device

Abstract

The present invention relates to a hinge-driven movable lens fine-tuning device, comprising: a hinge (1), an outer lens barrel (2), a lens seat (3), a lens (4), a motor mounting seat (5), a motor (6) and a ball head rod (7). The hinge (1) is mounted on the outer lens barrel (2), and its upper end is connected to the lens seat (3), and the lens (4) is mounted on the lens seat (3). The motor mounting seat (5) is fixed on the outer lens barrel (2), and the motor (6) is mounted on the motor mounting seat (5), and its front end is connected to the ball head rod (7). The motor (6) drives the ball head rod (7) to move, and the driving force generated is transmitted to the lens seat (3) through the hinge (1), thereby driving the lens (4) to move. When the three motors move synchronously, the Z-direction displacement adjustment of the lens is realized; when the three motors move differentially, the θx and θy adjustments of the lens are realized. The hinge-driven movable lens fine-tuning device provided by the present invention has high adjustment accuracy, good repeatability, and compact structure, and can realize three-degree-of-freedom adjustment of the lens in a limited space in the axial and radial directions.

Description

Technical Field

[0001] The present invention is used in the technical field of projection lithography machines, and in particular relates to a hinge-driven movable lens fine-tuning device, which can be used for three-degree-of-freedom adjustment of a special lens in a projection objective lens. Background Art

[0002] With the rapid development of large-scale integrated circuits, the demand for high-precision projection lithography machines is increasing. Due to the limitations of optical and mechanical processing levels, the manufacturing and assembly errors of the lenses and changes in the use environment (temperature, pressure, etc.) will lead to a decrease in the image quality of the projection lens. In order to improve the image quality in real time during the service of the projection lens, it is necessary to adjust the three degrees of freedom (Z direction, θx direction and θy direction) of the specific lenses in the lens. Summary of the invention

[0003] The purpose of the present invention is to provide a hinge-driven movable lens fine-tuning device, which has high precision and compact structure, good adaptability to the installation environment, can compensate in real time for image quality changes caused by lens processing and assembly errors and environmental changes, and ensure the imaging quality of the objective lens.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a hinge-driven movable lens fine-tuning device, which includes: a hinge 1, an outer lens barrel 2, a lens seat 3, a lens 4, a motor mounting seat 5, a motor and a ball head rod. The hinge includes a first hinge 11, a second hinge 12, and a third hinge 13; the motor includes a first motor 61, a second motor 62, and a third motor 63; the ball head rod includes a first ball head rod 71, a second ball head rod 72, and a third ball head rod 73; the lens 4 is provided with three steps, namely, a first step A, a second step B, and a third step C. The first hinge 11, the second hinge 12, and the third hinge 13 have the same structure and are all installed on the outer lens barrel 2. The upper end surface 11a of the first hinge 11, the upper end surface 12a of the second hinge 12, and the upper end surface 13a of the third hinge 13 are connected to the lower end surface 3a of the lens seat 3, and the lens 4 is installed on the upper end surface 3b of the lens seat 3 through the first step A, the second step B, and the third step C. The motor mounting seat 5 is fixed on the outer lens barrel 2. The first motor 61, the second motor 62 and the third motor 63 are all mounted on the motor mounting seat 5 and connected to the first ball head rod 71, the second ball head rod 72 and the third ball head rod 73 at the front end. The spherical surface 71a of the first ball head rod 71, the spherical surface 72a of the second ball head rod 72 and the spherical surface 73a of the third ball head rod 73 are in contact with the middle surface 11b of the first hinge 11, the middle surface 12b of the second hinge 12 and the middle surface 13b of the third hinge 13 respectively. The motor 6 drives the ball head rod 7 to move, and the driving force generated is transmitted to the lens seat 3 through the hinge 1, driving the lens seat 3 to move, thereby driving the lens 4 to move. When the three motors drive the corresponding hinges to move synchronously, the Z-direction displacement adjustment of the lens is realized; when the three motors drive the corresponding hinges to move differentially, the lens θx and θy adjustment is realized. The hinge-driven movable lens fine-tuning device provided by the present invention has high adjustment accuracy, good repeatability and compact structure, and can realize three-degree-of-freedom adjustment of the lens within a limited space in the axial and radial directions.

[0005] The three motors are evenly distributed along the circumference, and the driving direction of the motors is vertically downward.

[0006] The structures of the three hinges are completely the same and are evenly distributed along the circumferential direction.

[0007] The hinge side includes seven pivot points: the first pivot point H1, the second pivot point H2, the third pivot point H3, the fourth pivot point H4, the fifth pivot point H5, the sixth pivot point H6, and the seventh pivot point H7. The hinge middle surface is located between the second pivot point H2 and the third pivot point H3. The first pivot point H1, the second pivot point H2, and the third pivot point H3 together form a labor-saving mechanism to amplify the driving force and reduce the driving displacement. The fourth pivot point H4, the fifth pivot point H5, the sixth pivot point H6, and the seventh pivot point H7 form a parallelogram mechanism to guide the up and down movement of the upper end surface of the hinge.

[0008] The eighth fulcrum H8 is arranged on the front side of the hinge, so that the hinge has an automatic leveling function and reduces the angular disturbance caused by asynchronous driving during the adjustment process.

[0009] A positioning pin hole is provided at the installation position of the hinge and the outer lens barrel to ensure that the hinge is installed at a determined position on the outer lens barrel.

[0010] The hinge is made of 9Cr18 metal material and is quenched.

[0011] A step surface is arranged above the lens seat and is connected with three steps of the lens.

[0012] The beneficial effects of the present invention are:

[0013] The hinge is made of elastic metal material 9Cr18 and is quenched to have good elasticity and hardness; the hinge fulcrum constitutes a labor-saving mechanism to amplify the driving force and reduce the driving displacement, making the device more precise; the hinge fulcrum constitutes a parallelogram mechanism for guidance to ensure high rigidity and good stability in non-main movement directions; the hinge has an automatic leveling function, good adaptability, and lower assembly requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The specific structural form and image quality characteristics of the hinge-driven movable lens fine-tuning device of the present invention are further described in the form of the accompanying drawings:

[0015] Figure 1 The figure is a top view of a hinge-driven movable lens fine-tuning device according to the present invention.

[0016] Figure 2 The present invention is a cross-sectional view of a hinge-driven movable lens fine-tuning device.

[0017] Figure 3 It is a side view of the first hinge 11 of the present invention.

[0018] Figure 4 This is a top view of the hinge described in the present invention.

[0019] Figure 5 It is a top view of the outer lens barrel described in the present invention.

[0020] Figure 6 This is a top view of the lens holder of the present invention.

[0021] Figure 7 It is a side view of the hinge described in the present invention.

[0022] Figure 8 The figure is a simplified diagram of the hinge mechanism movement of the present invention.

[0023] Fig. 9 This is a front view of the hinge of the present invention. DETAILED DESCRIPTION

[0024] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is described in detail with reference to the accompanying drawings and specific embodiments.

[0025] like Figure 1 , Figure 2 and Figure 3 As shown, a hinge-driven movable lens fine-tuning device of the present invention comprises a hinge 1, an outer lens barrel 2, a lens seat 3, a lens 4, a motor mounting seat 5, a motor and a ball head rod. The hinge comprises a first hinge 11, a second hinge 12 and a third hinge 13; the motor comprises a first motor 61, a second motor 62 and a third motor 63; the ball head rod comprises a first ball head rod 71, a second ball head rod 72 and a third ball head rod 73; the lens 4 is provided with three steps, namely, a first step A, a second step B and a third step C. The first hinge 11, the second hinge 12 and the third hinge 13 have the same structure and are all mounted on the outer lens barrel 2. The upper end surface 11a of the first hinge 11, the upper end surface 12a of the second hinge 12 and the upper end surface 13a of the third hinge 13 are connected to the lower end surface 3a of the lens seat 3, and the lens 4 is mounted on the upper end surface 3b of the lens seat 3 through the first step A, the second step B and the third step C. The motor mounting seat 5 is fixed on the outer lens barrel 2. The first motor 61, the second motor 62 and the third motor 63 are all mounted on the motor mounting seat 5 and connected to the first ball head rod 71, the second ball head rod 72 and the third ball head rod 73 at the front end. The spherical surface 71a of the first ball head rod 71, the spherical surface 72a of the second ball head rod 72 and the spherical surface 73a of the third ball head rod 73 are in contact with the middle surface 11b of the first hinge 11, the middle surface 12b of the second hinge 12 and the middle surface 13b of the third hinge 13 respectively. The motor 6 drives the ball head rod 7 to move, and the driving force generated is transmitted to the lens seat 3 through the hinge 1, driving the lens seat 3 to move, thereby driving the lens 4 to move. When the three motors drive the corresponding hinges to move synchronously, the Z-direction displacement adjustment of the lens is realized; when the three motors drive the corresponding hinges to move differentially, the lens θx and θy adjustment is realized. The hinge-driven movable lens fine-tuning device provided by the present invention has high adjustment accuracy, good repeatability and compact structure, and can realize three-degree-of-freedom adjustment of the lens within a limited space in the axial and radial directions.

[0026] like Figure 4 , Figure 5 and Figure 6As shown, since the structures and working principles of the three hinges are the same, the first hinge is used as an example for explanation. The first hinge is provided with a first through hole 1101a and a second through hole 1102a, which are respectively connected to the first threaded hole 201a and the second threaded hole 202a on the outer lens barrel by screws. The first hinge is provided with a first pin hole 1101b and a second pin hole 1102b, which correspond to the first dowel hole 201b and the second dowel hole 202b on the outer lens barrel, respectively, and two pins are used for positioning during installation. The first hinge is provided with a third threaded hole 1101c and a fourth threaded hole 1102c, which are respectively fixed to the first countersunk hole 301a and the second countersunk hole 302a on the lens holder by screws.

[0027] like Figure 7 As shown, since the structures and working principles of the three hinges are the same, the first hinge is used as an example for explanation. The side includes seven fulcrums: the first fulcrum H1, the second fulcrum H2, the third fulcrum H3, the fourth fulcrum H4, the fifth fulcrum H5, the sixth fulcrum H6, and the seventh fulcrum H7. Among them, the first fulcrum H1 and the second fulcrum H2 are located in the same horizontal direction and are rigidly connected, the fourth fulcrum H4 and the fifth fulcrum H5 are located in the same horizontal direction and are rigidly connected, and the third fulcrum H3 is located vertically above the fourth fulcrum H4 and is rigidly connected to the second fulcrum H2 and the fourth fulcrum H4 respectively. The middle surface of the hinge is located between the second fulcrum H2 and the third fulcrum H3. The first fulcrum H1, the second fulcrum H2, and the third fulcrum H3 together constitute a labor-saving mechanism to amplify the driving force and reduce the driving displacement. The fourth fulcrum H4, the fifth fulcrum H5, the sixth fulcrum H6, and the seventh fulcrum H7 constitute a parallelogram mechanism, which guides the up and down movement of the upper end surface of the hinge.

[0028] like Figure 8 As shown, a schematic diagram of the mechanism motion is obtained according to the structure of hinge 1. Taking the first hinge as an example, it includes 1 fulcrum 101, 2 fulcrum 102, 3 fulcrum 103, 4 fulcrum 104, 5 fulcrum 105, 6 fulcrum 106 and 7 fulcrum 107. The connecting rod between 2 fulcrum 102 and 3 fulcrum 103 is driven to drive the slider 1.1 of hinge 1 to move. The 4 fulcrum 104, 5 fulcrum 105, 6 fulcrum 106 and 7 fulcrum 107 together form a parallelogram structure to guide the up and down movement of the slider 1.1 of hinge 1.

[0029] like Fig. 9 As shown, the eighth fulcrum H8 is set on the front side of the hinge. If the two ends of the hinge are unevenly stressed due to assembly errors, the eighth fulcrum H8 can be used for automatic leveling, while reducing the angular disturbance caused by the asynchronous driving of the three motors during the adjustment process.

Claims

1. A hinge-driven movable lens fine-tuning device, characterized in that: The invention comprises a hinge (1), an outer lens barrel (2), a lens seat (3), a lens (4), a motor mounting seat (5), a motor (6) and a ball head rod (7); the hinge (1) comprises a first hinge (11), a second hinge (12) and a third hinge (13); the motor (6) comprises a first motor (61), a second motor (62) and a third motor (63); the ball head rod (7) comprises a first ball head rod (71), a second ball head rod (72) and a third ball head rod (73); the lens (4) is provided with three steps, namely The first step (A), the second step (B) and the third step (C); the first hinge (11), the second hinge (12) and the third hinge (13) have the same structure and are all mounted on the outer lens barrel (2); the upper end surface (11a) of the first hinge (11), the upper end surface (12a) of the second hinge (12) and the upper end surface (13a) of the third hinge (13) are connected to the lower end surface (3a) of the lens holder (3); the lens (4) is mounted on the lens holder (3) via the first step (A), the second step (B) and the third step (C). The motor mounting seat (5) is fixed on the outer lens barrel (2); the first motor (61), the second motor (62) and the third motor (63) are all mounted on the motor mounting seat (5) and are connected to the first ball head rod (71), the second ball head rod (72) and the third ball head rod (73) at the front end thereof; the spherical surface (71a) of the first ball head rod (71), the spherical surface (72a) of the second ball head rod (72) and the spherical surface (73a) of the third ball head rod (73) are respectively connected to the first The middle surface (11b) of the hinge (11), the middle surface (12b) of the second hinge (12), and the middle surface (13b) of the third hinge (13) are in contact; the motor (6) drives the ball head rod (7) to move, and the generated driving force is transmitted to the lens seat (3) through the hinge (1), driving the lens seat (3) to move, thereby driving the lens (4) to move; when the three motors drive the corresponding hinges to move synchronously, the Z-direction displacement adjustment of the lens is achieved; when the three motors drive the corresponding hinges to move differentially, the θx and θy adjustments of the lens are achieved; The structures of the three hinges are exactly the same and are evenly distributed along the circumference; The side surface of the hinge includes seven fulcrums, namely, the first fulcrum H1, the second fulcrum H2, the third fulcrum H3, the fourth fulcrum H4, the fifth fulcrum H5, the sixth fulcrum H6 and the seventh fulcrum H7; wherein, the first fulcrum H1 and the second fulcrum H2 are located in the same horizontal direction and are rigidly connected, the fourth fulcrum H4 and the fifth fulcrum H5 are located in the same horizontal direction and are rigidly connected, the third fulcrum H3 is located vertically above the fourth fulcrum H4 and is rigidly connected to the second fulcrum H2 and the fourth fulcrum H4 respectively; the middle surface of the hinge is located between the second fulcrum H2 and the third fulcrum H3, the first fulcrum H1, the second fulcrum H2 and the third fulcrum H3 together constitute a labor-saving mechanism, which amplifies the driving force and reduces the driving displacement; the fourth fulcrum H4, the fifth fulcrum H5, the sixth fulcrum H6 and the seventh fulcrum H7 constitute a parallelogram mechanism, which guides the up and down movement of the upper end surface of the hinge.

2. The hinge-driven movable lens fine-tuning device according to claim 1, characterized in that: The three motors are evenly distributed along the circumference, and the driving direction of the motors is vertically downward.

3. The hinge-driven movable lens fine-tuning device according to claim 1, characterized in that: The eighth fulcrum H8 is arranged on the front side of the hinge, so that the hinge has an automatic leveling function and reduces the angular disturbance caused by asynchronous driving during the adjustment process.

4. The hinge-driven movable lens fine-tuning device according to claim 1, characterized in that: A positioning pin hole is provided at the installation position of the hinge and the outer lens barrel to ensure that the hinge is installed at a determined position on the outer lens barrel.

5. The hinge-driven movable lens fine-tuning device according to claim 1, characterized in that: The hinge is made of 9Cr18 metal material and is quenched.

6. The hinge-driven movable lens fine-tuning device according to claim 1, characterized in that: A step surface is arranged above the lens seat and is connected with three steps of the lens.

Images