A resonator array structure
By forming a stepped ring or cross-shaped symmetrical pattern to connect the resonator sub-units in the resonator array structure, the problem of weak signal caused by the reduction of sensing area is solved, and the sensing area and signal strength are improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- MST MICROELECTRONICS (SHENZHEN) CO LTD
- Filing Date
- 2022-11-30
- Publication Date
- 2026-06-26
AI Technical Summary
The sensing area of existing resonator array structures decreases significantly when their size is reduced, resulting in a weaker sensing signal.
By connecting multiple resonator sub-units sequentially to form a stepped ring or cross-shaped symmetrical pattern, the number of resonator sub-units is increased, the sensing area is improved, and the sensing signal is enhanced.
Within a limited area, the number of resonator sub-units can be effectively increased, the sensing area can be enlarged, the dynamic impedance can be improved, and the sensing signal strength can be enhanced.
Smart Images
Figure CN115765674B_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the field of microelectromechanical systems (MEMS) technology, and particularly relates to a resonator array structure. Background Technology
[0002] In the realm of high-frequency MEMS resonators (Micro-Electro-Mechanical Systems, also known as microelectromechanical systems, microsystems, micromechanical systems, etc.), the design size and mass of resonator array structures must be limited to a small range to meet the requirements of high resonant frequencies. Furthermore, since existing resonator array structures mainly use rectangular ring arrays, a maximum of four resonator sub-units can be connected within the same array structure. This means that as the size of the resonator array structure shrinks, its sensing area also decreases significantly, resulting in a weaker sensed signal strength. Summary of the Invention
[0003] This application provides a resonator array structure, which aims to improve the problem that as the size of existing resonator array structures decreases, the sensing area also decreases significantly, resulting in a weakening of the sensing signal strength.
[0004] In a first aspect, embodiments of this application provide a resonator array structure, including multiple resonator sub-units. Each resonator sub-unit includes an oscillator and at least one elastic coupling beam. The first end of the elastic coupling beam is connected to the oscillator of the same resonator sub-unit, and the second end of the elastic coupling beam is connected to the oscillator of another resonator sub-unit or the second end of the elastic coupling beam, so as to connect the multiple resonator sub-units together in sequence and form a preset geometric shape. The preset geometric shape is a stepped ring or a cross-connected symmetrical pattern.
[0005] Optionally, in some embodiments, the oscillator is an annular body with through holes, or the oscillator is a solid plate.
[0006] Optionally, in some embodiments, the oscillator and the elastic coupling beam of the same resonator subunit are configured as an integral structure, and / or the connection between the oscillator and the elastic coupling beam is a curved transition.
[0007] Optionally, in some embodiments, at least one of the oscillators and / or at least one of the elastic coupling beams are provided with a weight-reduction structure.
[0008] Optionally, in some embodiments, the oscillator includes at least one serrated surface.
[0009] Optionally, in some embodiments, the serrated surface includes a plurality of serrations, each of which has a rounded top surface.
[0010] Optionally, in some embodiments, the resonator array structure includes twelve resonator sub-units, each of the resonator sub-units including an elastic coupling beam, the first end of the elastic coupling beam being connected to the oscillator of the same resonator sub-unit, the second end of the elastic coupling beam being connected to the oscillator of another resonator sub-unit, and being arranged perpendicular to each other with the elastic coupling beam of another resonator sub-unit, so as to connect the twelve resonator sub-units together in sequence to form a cross-shaped stepped ring;
[0011] Alternatively, the resonator array structure includes twelve resonator sub-units, each of which includes two elastic coupling beams arranged perpendicularly to each other. The first end of each elastic coupling beam is connected to the oscillator of the same resonator sub-unit, and the second end of each elastic coupling beam is connected to the second end of the elastic coupling beam of another resonator sub-unit, so as to connect the twelve resonator sub-units together in sequence to form a cross-shaped stepped ring.
[0012] Optionally, in some embodiments, each of the resonator subunits includes one of the elastic coupling beams, and the second ends of the elastic coupling beams of the four resonator subunits are connected at the same node to form a cross-shaped assembly. The plurality of cross-shaped assemblies are connected laterally and / or longitudinally to form the cross-connected symmetrical pattern.
[0013] Optionally, in some embodiments, two adjacent cross-shaped components are connected by an elastic coupling beam to connect two adjacent oscillators, or two adjacent resonator subunits are connected by sharing an oscillator, or an elastic coupling beam is used to replace two adjacent resonator subunits at the nodes of two adjacent cross-shaped components to connect them.
[0014] Optionally, in some embodiments, at least one anchor is provided at the connection between two connected resonator subunits for fixing the resonator array structure to the substrate.
[0015] Optionally, in some embodiments, when the preset geometry is a stepped ring, the resonator array structure further includes at least one anchor connection block, the anchor connection block is located inside the stepped ring, and the anchor connection block is connected to a plurality of anchors respectively.
[0016] Optionally, in some embodiments, at least one driving electrode and at least one sensing electrode are further included, the driving electrode and the sensing electrode being disposed opposite each other on two opposite sides of at least one of the resonator sub-units.
[0017] In this application, the resonator array structure includes an oscillator and at least one elastic coupling beam in each resonator sub-unit. The first end of the elastic coupling beam is connected to the oscillator of the same resonator sub-unit, and the second end of the elastic coupling beam is connected to the oscillator of another resonator sub-unit or the second end of the elastic coupling beam, thereby sequentially connecting multiple resonator sub-units to form a predetermined geometric shape, which is a stepped ring or cross-shaped symmetrical pattern. In this way, the technical solution of this application, by sequentially connecting multiple resonator sub-units to form a stepped ring or cross-shaped symmetrical pattern, can maximize the number of resonator sub-units in the resonator array structure within a limited area, effectively increasing the sensing area of the resonator array structure, improving dynamic impedance, and thus helping to enhance the sensing signal of the resonator array structure. Attached Figure Description
[0018] The technical solution and its beneficial effects will become apparent from the following detailed description of specific embodiments of this application, in conjunction with the accompanying drawings.
[0019] Figure 1 This is a schematic diagram of the first structure of the resonator array provided in the embodiments of this application.
[0020] Figure 2 This is a schematic diagram of the second structure of the resonator array provided in the embodiments of this application.
[0021] Figure 3 yes Figure 1 Another schematic diagram of the resonator sub-unit of the resonator array structure shown.
[0022] Figure 4 yes Figure 1 This is another schematic diagram of a resonator subunit in the resonator array structure shown.
[0023] Figure 5 yes Figure 1 The diagram shows another structural schematic of the resonator sub-unit of the resonator array structure.
[0024] Figure 6 This is a schematic diagram of the second structure of the resonator array provided in the embodiments of this application.
[0025] Figure 7 This is a schematic diagram of the third structure of the resonator array provided in the embodiments of this application.
[0026] Figure 8 This is a schematic diagram of the fourth structure of the resonator array provided in the embodiments of this application.
[0027] Figure 9This is a schematic diagram of the fifth type of resonator array structure provided in the embodiments of this application.
[0028] Figure 10 This is a schematic diagram of the sixth structure of the resonator array provided in the embodiments of this application.
[0029] Figure 11 This is a schematic diagram of the seventh structure of the resonator array provided in the embodiments of this application.
[0030] Figure 12 This is a schematic diagram of the eighth structure of the resonator array provided in the embodiments of this application. Detailed Implementation
[0031] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. In the absence of conflict, the following embodiments and their technical features can be combined with each other.
[0032] In the realm of high-frequency MEMS resonators (generally referring to frequencies of 48MHz and above), the design size and mass of resonator array structures must be limited to a small range to meet the requirements of high resonant frequencies. Furthermore, since existing resonator array structures primarily employ rectangular ring arrays, a maximum of four resonator sub-units can be connected within the same array structure. This results in a significant reduction in the sensing area as the size of the resonator array structure decreases, leading to a weakening of the sensed signal strength.
[0033] Therefore, it is necessary to provide a new layout scheme for the resonator array structure to improve the problem that the sensing area of the existing resonator array structure will be greatly reduced as the size decreases, resulting in a weakening of the sensing signal strength.
[0034] like Figure 1 and Figure 2 As shown, in one embodiment, this application provides a resonator array structure 100, which includes multiple resonator sub-units 110. Each resonator sub-unit 110 includes an oscillator 111 and at least one elastic coupling beam 112. The first end of the elastic coupling beam 112 is connected to the oscillator 111 of the same resonator sub-unit 110, and the second end of the elastic coupling beam 112 is connected to the oscillator 111 of another resonator sub-unit 110 or the second end of the elastic coupling beam 112, so as to connect multiple resonator sub-units 110 together in sequence and form a preset geometry. The preset geometry may specifically be... Figure 1 The stepped ring or Figure 2 The cross-shaped symmetrical pattern shown.
[0035] It should be noted that the resonator array structure 100 can be manufactured using known techniques and known materials. For example, the resonator array structure 100 can be made of known semiconductor materials, specifically including: 1. materials composed of one or more of the elements in column IV of the periodic table, such as silicon, germanium, carbon, silicon-germanium, or silicon carbide; 2. III-V compounds, such as gallium phosphide, aluminum gallium phosphide, etc.; 3. combinations of III, IV, V, or VI materials, such as silicon nitride, silicon oxide, aluminum carbide, aluminum nitride, and / or aluminum oxide; 4. metal silicides, germanides, and carbides, such as nickel silicide, cobalt silicide, tungsten carbide, or platinum-germanium silicide; 5. doped variants, such as phosphorus, arsenic, antimony, boron, or aluminum-doped silicon, germanium, carbon, or combinations thereof (e.g., silicon-germanium, silicon carbide, etc.); 6. the above five materials having various crystal structures, including any one or any combination of single crystal, polycrystalline, nanocrystalline, and amorphous, such as regions having single crystal and polycrystalline structures (whether doped or undoped). The resonator array structure 100 can also be formed in or on an insulator using known photolithography, etching, deposition and / or doping techniques, specifically a semiconductor (SOI) substrate.
[0036] It is understood that all techniques used to form or manufacture the resonator array structure 100 of the embodiments of this application (e.g., using standard or oversized (“thick”) wafers by known forming, photolithography, etching and / or deposition techniques and / or bonding techniques (i.e., bonding two standard wafers together, wherein the lower / bottom wafer includes a sacrificial layer (e.g., silicon oxide) disposed thereon, and the upper / top wafer is subsequently thinned (ground down or back) and polished to receive mechanical structures therein or on it)) whether now known or developed hereafter, are intended to fall within the protection scope of this application.
[0037] In this way, the technical solution of this application, by connecting multiple resonator sub-units 110 together in sequence to form a stepped ring or cross-shaped symmetrical pattern, can increase the number of resonator sub-units 110 in the resonator array structure 100 as much as possible within a limited area, thereby effectively increasing the sensing area of the resonator array structure 100, improving the dynamic impedance, and thus helping to enhance the sensing signal of the resonator array structure 100.
[0038] In some examples, such as Figure 1 and Figure 2As shown, the oscillator 111 can specifically be a ring-shaped body with a through hole, including any one of the circular ring shown in the figure, or an elliptical ring, a rectangular ring, or a rounded rectangular ring not shown in the figure. In this case, when the first end of the elastic coupling beam 112 is connected to an oscillator 111, it can be specifically connected to the outer surface of the ring-shaped body.
[0039] In some examples, such as Figure 3 and Figure 4 As shown, the oscillator 111 can also be a solid plate, including a solid circular or rectangular body as shown in the figure, or a solid elliptical or rounded rectangular body or other arbitrary solid shape not shown in the figure. In this case, when the first end of the elastic coupling beam 112 is connected to an oscillator 111, it can be specifically connected to the outer surface of the plate.
[0040] In some examples, such as Figures 1 to 4 As shown, the oscillator 111 and the elastic coupling beam 112 of the same resonator subunit 110 can be configured as an integral structure to effectively enhance the connection between them. Furthermore, the connection between the oscillator 111 and the elastic coupling beam 112 can be a curved transition, which can effectively reduce the accumulation of internal stress at the connection. Simultaneously, to improve the strength of the connection between the second end of the elastic coupling beam 112 and the second end of the oscillator 111 or the second end of the elastic coupling beam 112 of another resonator subunit 110, the width of the second end of the elastic coupling beam 112 can be greater than the width of the other parts of the elastic coupling beam 112 except for the second end.
[0041] In some examples, at least one oscillator 111 and / or at least one elastic coupling beam 112 are provided with a weight-reduction structure. Specifically, the weight-reduction structure may be a weight-reduction hole or a weight-reduction groove, which can reduce the overall mass of the resonator array structure 100 of this application embodiment while ensuring the vibration frequency of the resonator subunit 110.
[0042] In some examples, such as Figure 5 As shown, the oscillator 111 may specifically include at least one sawtooth surface 1111. For example, the oscillator 111 may be rectangular as shown in the figure, with two mutually perpendicular sides being sawtooth surfaces 1111, and the other two mutually perpendicular sides being fixedly connected to an elastic coupling beam 112 in the middle. In this way, the oscillator 111 can adapt to a wide range of driving voltage amplitudes by the arrangement of the sawtooth surface 1111. Preferably, the sawtooth surface 1111 includes multiple sawtooths, and the top surface of each sawtooth is arc-shaped.
[0043] In some examples, such as Figure 6As shown, the resonator array structure 100 may specifically include twelve resonator sub-units 110. Each resonator sub-unit 110 specifically includes an elastic coupling beam 112. The first end of the elastic coupling beam 112 is connected to the oscillator 111 of the same resonator sub-unit 110, and the second end of the elastic coupling beam 112 is connected to the oscillator 111 of another resonator sub-unit 110. The beam 112 is perpendicular to the elastic coupling beam 112 of the other resonator sub-unit 110, so that the twelve resonator sub-units 110 are connected sequentially to form a cross-shaped stepped ring. Or as... Figure 7 As shown, the resonator array structure 100 may specifically include twelve resonator sub-units 110. Each resonator sub-unit 110 specifically includes two elastic coupling beams 112 arranged perpendicularly to each other. The first end of the elastic coupling beam 112 is connected to the oscillator 111 of the same resonator sub-unit 110, and the second end of the elastic coupling beam 112 is connected to the second end of the elastic coupling beam 112 of another resonator sub-unit 110, so that the twelve resonator sub-units 110 are connected together in sequence to form a cross-shaped stepped ring. In this way, the resonator array structure 100 of this embodiment can effectively increase the number of resonator sub-units 110 to twelve through the cross-shaped stepped ring structure. Compared with the prior art, where the same array structure can only form a maximum of four resonator sub-units, it can effectively increase the sensing area of the resonator array structure 100, improve the dynamic impedance, and thus help to enhance the sensing signal of the resonator array structure 100. In addition, the outer ring of the resonator array structure 100 in this embodiment is a stepped ring, and the empty space inside can effectively reduce the energy density.
[0044] In some embodiments, such as Figure 2 and Figure 8 As shown, each resonator subunit 110 may specifically include an elastic coupling beam 112. The second ends of the elastic coupling beams 112 of the four resonator subunits 110 are connected to the same node 113 to form a cross-shaped assembly 10. Multiple cross-shaped assemblies 10 are connected laterally and / or longitudinally to form a cross-connected symmetrical pattern. This cross-connected symmetrical pattern may specifically be... Figure 2 The single-row, horizontally connected structure shown can also be Figure 8 The diagram shows a structure with multiple rows of horizontally and vertically connected elements. In this way, the resonator array structure 100 of this embodiment, through its cross-connected symmetrical pattern, can maximize the number of resonator sub-units 110 within a limited area, effectively increasing the sensing area of the resonator array structure 100, improving dynamic impedance, and thus helping to enhance the sensing signal of the resonator array structure 100. Furthermore, to better form... Figure 8The structure shown includes multiple rows of horizontal and vertical connections. Adjacent cross-shaped components 10 are connected to adjacent oscillators 111 by an elastic coupling beam 112 to achieve the connection between the two (i.e., Figure 8 The connection shown in the dashed box 11 can be achieved by either connecting two adjacent resonator subunits 110 by sharing a single oscillator 111 (i.e., ...). Figure 8 (as shown in the dashed box 12), or by replacing the connection of two adjacent resonator subunits 110 with a flexible coupling beam 112 at the nodes 113 of two adjacent cross-shaped assemblies 10 to achieve the connection between the two (i.e., Figure 8 The connection shown in the dashed box 11 has one less resonator sub-unit 110 on each of the left and right sides of the cross-shaped component 10, and the nodes 113 of the two cross-shaped components 10 are connected together at the original positions of these resonator sub-units 110 by an elastic coupling beam 112. In this way, when the resonator array structure 100 of this embodiment forms a cross-connected symmetrical pattern, the common ends of some oscillators 111 and / or some elastic coupling beams 112 facilitate the configuration of differential electrodes. At the same time, the resonator array structure 100 is symmetrical about the left and right sides with respect to a certain common end. The oscillators 111 of each resonator sub-unit 110 vibrate in a breathing mode. When the oscillators 111 of each resonator sub-unit 110 on the left side contract (positive phase mode), the oscillators 111 of each resonator sub-unit 110 on the right side expand (anti-phase mode). This allows each of the included resonator sub-units 110 to have both positive and anti-phase modes at the same time, so as to achieve a differential effect.
[0045] In some embodiments, such as Figures 6 to 8 As shown, at least one anchor 120 is provided at the connection point between two connected resonator subunits 110 to achieve a fixed connection between the resonator array structure 100 and the substrate (not shown). Specifically, the anchor 120 can be a rod-shaped structure, such as... Figure 7 As mentioned above, the connection point between the two elastic coupling beams 112 can also be as follows: Figure 8 As shown, the anchors 120 are positioned at the connection between the elastic coupling beam 112 and the node 113. It is understood that the number, position, and angle of the anchors 120 can be arbitrarily adjusted according to the actual fixing requirements of the resonator array structure 100. Furthermore, to better achieve the placement of the anchors 120, such as... Figure 6 and Figure 9As shown, when the aforementioned preset geometric shape is a stepped annular shape, the resonator array structure 100 further includes at least one anchor connection block 130. The anchor connection block 130 is located on the inner side of the stepped annular shape, and the anchor connection block 130 is connected to multiple anchors 120 respectively. It is understood that the number and shape of the anchor connection blocks 130 can be arbitrarily adjusted according to the actual fixing needs of the resonator array structure 100. This includes, but is not limited to, […]. Figure 9 The stepped annular structure shown has only one large cross-shaped anchor block 130 on its inner side. All anchors 120 are connected to this anchor block 130, or... Figure 6 The inner side of the stepped ring shown is provided with a plurality of small rectangular anchor connection blocks 130, each anchor connection block 130 being connected to a plurality of adjacent anchors 120.
[0046] In some embodiments, such as Figures 10 to 12 As shown, to achieve normal operation of the resonator array structure 100 according to the embodiments of this application, the resonator array structure 100 may further include at least one driving electrode 140 and at least one sensing electrode 150, with the driving electrode 140 and sensing electrode 150 disposed opposite each other on two opposite sides of at least one resonator sub-unit 110. Specifically, as Figure 10 and Figure 11 As shown, when the resonator array structure 100 is in a stepped ring shape, multiple driving electrodes 140 can be specifically located on the outer side of the stepped ring, while multiple sensing electrodes 150 can be specifically located on the inner side of the stepped ring, and arranged around one or more anchor connecting blocks 130 in the middle. For those skilled in the art, the positions of the multiple driving electrodes 140 and the multiple sensing electrodes 150 can also be interchanged, as long as the positions of the multiple driving electrodes 140 and the multiple sensing electrodes 150 are aligned. Preferably, the gap between each driving electrode 140 and each sensing electrode 150 and the adjacent oscillator 111 is 0.5 μm, and the gap between each driving electrode 140 and each sensing electrode 150 and the adjacent elastic coupling beam 112 is 3 μm. During operation, the multiple driving electrodes 140 and the multiple sensing electrodes 150 are connected to induce the oscillator 111 of each resonator subunit 110 to oscillate or vibrate, wherein the oscillation or vibration has one or more resonant frequencies. Multiple sensing electrodes 150 are connected to a sensing circuit (not shown) to sense, sample, and / or detect signals having one or more resonant frequencies as shown. Figure 12As shown, when the resonator array structure 100 is arranged in a cross-shaped symmetrical pattern, multiple driving electrodes 140 and multiple sensing electrodes 150 are respectively arranged around the corresponding oscillator 111. Each driving electrode 140 and each sensing electrode 150 has a gap between itself and the outer surface of the adjacent oscillator 111. Some driving electrodes 140 are driving electrodes D+, and some sensing electrodes 150 are sensing electrodes S+, with driving electrodes D+ and sensing electrodes S+ facing each other; some driving electrodes 140 are driving electrodes D-, and some sensing electrodes 150 are sensing electrodes S-, with driving electrodes D- and sensing electrodes S- facing each other. The driving electrodes 140 serving as driving electrodes D+ and D- are located on the same side, while the sensing electrodes 150 serving as sensing electrodes S+ and S- are located on the other side. When the oscillators 111 of each resonator subunit 110 vibrate in a breathing mode, the driving electrode D+ and the sensing electrode S+ pair up, causing the oscillators 111 of each resonator subunit 110 on the left to contract (positive phase mode), and the driving electrode D- and the sensing electrode S- pair up, causing the oscillators 111 of each resonator subunit 110 on the right to expand (anti-phase mode). Thus, the electrode combination of the driving electrode D+ and the sensing electrode S+, and the electrode combination of the driving electrode D- and the sensing electrode S-, are configured as differential electrodes, enabling the oscillators 111 of each resonator subunit 110 to simultaneously possess both positive and anti-phase modes, achieving a differential effect.
[0047] To those skilled in the art, the aforementioned driving electrode 140, sensing electrode 150, driving circuit, and sensing circuit can be of conventional, well-known types, or can be of any type now known or developed in the future.
[0048] In some examples, such as Figure 1 As shown, the resonator array structure 100 may specifically include twenty resonator sub-units 110. Each resonator sub-unit 110 specifically includes two elastic coupling beams 112 arranged perpendicularly to each other. The first end of the elastic coupling beam 112 is connected to the oscillator 111 of the same resonator sub-unit 110, and the second end of the elastic coupling beam 112 is connected to the second end of the elastic coupling beam 112 of another resonator sub-unit 110, so that the twenty resonator sub-units 110 are connected together in sequence, so that the resonator array structure 100 forms a stepped ring with a protruding rectangle at the middle position of the four sides. That is, the outer ring of the resonator array structure 100 is a stepped ring.
[0049] Following the above embodiments, the number of resonator sub-units 110 is N, N = 12 + (n-1) * 8, where n = 1, 2, 3, 4... natural numbers, to ensure that the outer ring of the resonator array structure 100 is a stepped ring.
[0050] In some examples, when the resonator array structure 100 is a stepped ring, and the oscillator 111 of each resonator sub-unit 110 is specifically a circular ring, the inner circumference of the oscillator 111 is 60 μm, and the outer circumference of the oscillator 111 is 90 μm. When the number of resonator sub-units 110 is twelve, the array area of the resonator array structure 100 is 0.75 mm²; when the number of resonator sub-units 110 is twenty, the array area of the resonator array structure 100 is 1.1255 mm²; and when the number of resonator sub-units 110 is N, the array area of the resonator array structure 100 is N * 0.0625 mm². As can be seen, the array area of the resonator array structure 100 is related to the number of resonator sub-units 110 and the area of a single resonator sub-unit 110. When the array area of the resonator array structure 100 is limited, the number of resonator sub-units 110 can be effectively increased by reducing the area of a single resonator sub-unit 110. Multiple resonator sub-units 110 can be connected together in a stepped ring manner as shown in the figure to effectively increase the sensing area of the resonator array structure 100, improve the dynamic impedance, and thus help enhance the sensing signal of the resonator array structure 100.
[0051] It should be noted that the impurity contamination monitoring device embodiment of the present invention and the above method embodiment belong to the same concept. The specific implementation process can be found in the above method embodiment. Furthermore, the technical features in the above method embodiment are all applicable to this impurity contamination monitoring device embodiment, and will not be repeated here.
[0052] Although this application has been shown and described with respect to one or more implementations, equivalent variations and modifications will occur to those skilled in the art based on a reading and understanding of this specification and drawings. This application includes all such modifications and variations and is limited only by the scope of the appended claims. In particular, with respect to the various functions performed by the aforementioned components, the terminology used to describe such components is intended to correspond to any component (unless otherwise indicated) that performs the specified function of said component (e.g., is functionally equivalent to it), even if structurally not equivalent to the disclosed structure performing the functions in the exemplary implementations of this specification shown herein.
[0053] That is, the above description is only an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural changes made using the content of this application’s specification and drawings, such as the combination of technical features between different embodiments, or direct or indirect application in other related technical fields, are similarly included within the patent protection scope of this application.
[0054] Furthermore, it should be understood that in the description of this application, the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Additionally, for structural elements with the same or similar characteristics, this application may use the same or different reference numerals for identification. Moreover, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.
[0055] In this application, the term "exemplary" is used to mean "serving as an example, illustration, or description." Any embodiment described as "exemplary" in this application is not necessarily to be construed as more preferred or advantageous than other embodiments. This application has been provided above to enable any person skilled in the art to implement and use it. Various details have been set forth in the above description for purposes of explanation. It should be understood that those skilled in the art will recognize that this application can be implemented without using these specific details. In other embodiments, well-known structures and processes will not be described in detail to avoid obscuring the description of this application with unnecessary detail. Therefore, this application is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed herein.
Claims
1. A resonator array structure, characterized in that, It includes multiple resonator sub-units, each of which includes an oscillator and at least one elastic coupling beam. The first end of the elastic coupling beam is connected to the oscillator of the same resonator sub-unit, and the second end of the elastic coupling beam is connected to the oscillator of another resonator sub-unit or the second end of the elastic coupling beam, so as to connect the multiple resonator sub-units together in sequence and form a preset geometric shape, which is a stepped ring or a cross-shaped symmetrical pattern. At least one anchor is provided at the connection point between two connected resonator subunits to fix the resonator array structure to the substrate; When the preset geometry is a stepped ring, the resonator array structure further includes at least one anchor connection block, which is located inside the stepped ring and connects to multiple anchors respectively.
2. The resonator array structure according to claim 1, characterized in that, The oscillator is a ring-shaped body with a through hole, or the oscillator is a solid plate-shaped body.
3. The resonator array structure according to claim 1, characterized in that, The oscillator and elastic coupling beam of the same resonator subunit are configured as an integral structure, and / or the connection between the oscillator and the elastic coupling beam is through an arc transition.
4. The resonator array structure according to claim 1, characterized in that, The oscillator includes at least one serrated surface.
5. The resonator array structure according to any one of claims 1-4, characterized in that, The resonator array structure includes twelve resonator sub-units, each of which includes an elastic coupling beam. The first end of the elastic coupling beam is connected to the oscillator of the same resonator sub-unit, and the second end of the elastic coupling beam is connected to the oscillator of another resonator sub-unit. The elastic coupling beam is perpendicular to the elastic coupling beam of the other resonator sub-unit, so that the twelve resonator sub-units are connected together in sequence to form a cross-shaped stepped ring. Alternatively, the resonator array structure includes twelve resonator sub-units, each of which includes two elastic coupling beams arranged perpendicularly to each other. The first end of each elastic coupling beam is connected to the oscillator of the same resonator sub-unit, and the second end of each elastic coupling beam is connected to the second end of the elastic coupling beam of another resonator sub-unit, so as to connect the twelve resonator sub-units together in sequence to form a cross-shaped stepped ring.
6. The resonator array structure according to any one of claims 1-4, characterized in that, Each of the resonator subunits includes one of the elastic coupling beams, and the second ends of the elastic coupling beams of the four resonator subunits are connected at the same node to form a cross-shaped assembly. The multiple cross-shaped assemblies are connected laterally and / or longitudinally to form the cross-connected symmetrical pattern.
7. The resonator array structure according to claim 6, characterized in that, The two adjacent cross-shaped components are connected by an elastic coupling beam to connect the two adjacent oscillators, or by two adjacent resonator subunits sharing an oscillator, or by an elastic coupling beam replacing the two adjacent resonator subunits at the nodes of the two adjacent cross-shaped components to connect them.
8. The resonator array structure according to any one of claims 1-4, characterized in that, It also includes at least one driving electrode and at least one sensing electrode, the driving electrode and the sensing electrode being disposed opposite each other on two opposite sides of at least one of the resonator sub-units.