Optical monitoring mechanism and coating device

Abstract

The present application relates to a kind of optical monitoring mechanism and coating equipment, the optical monitoring mechanism includes: monitoring board and pivot, the monitoring board is equipped with first monitoring hole and second monitoring hole, the first monitoring hole and the second monitoring hole are spaced apart on the monitoring board, and the distance from the first monitoring hole to the center of the monitoring board and the distance from the second monitoring hole to the center of the monitoring board are not equal, the first monitoring hole and the second monitoring hole are used for light to pass through;The pivot is connected with the center of the monitoring board, and the pivot is used to drive the monitoring board to rotate.By two light rays, the light intensity change of the coating substrate at different radius positions can be detected, so that the thickness change of the two positions is obtained, so that double-path monitoring is realized, and by setting multiple monitoring holes, multiple light paths can be realized to monitor the coating, the monitoring board and the coating substrate are coaxially rotated, the stability and repeatability of the optical control sampling signal can be ensured, so that the coating quality is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical coating equipment, in particular to an optical monitoring mechanism and a coating device. BACKGROUND

[0002] Optical thin films play an extremely important role in the development of modern optics. In the existing coating equipment, including electron gun evaporation coating equipment, ion sputtering coating equipment and magnetron sputtering coating equipment, the real-time monitoring method of film thickness in the coating process mainly includes time control, crystal control and optical monitoring. For some products such as optical communication and biological medicine which require high monitoring accuracy, optical monitoring is an essential requirement in the film thickness monitoring system.

[0003] In the conventional technology, the optical monitoring method is mainly single light path monitoring, which can only read the light control signal change of one position in real time, and can only reflect the film thickness change under the same radius of the monitoring position, which will lead to the fact that the whole coating process cannot understand the unknown film thickness change. For some products with multiple coating layers and thick total thickness, due to the long single furnace coating time, the film thickness uniformity in the coating area cannot be completely guaranteed during the whole coating process for both evaporation equipment and sputtering equipment, especially for ion sputtering coating equipment, as the coating time increases, a thick film layer will be deposited on the grid, causing the grid to deform, thus leading to uncontrolled qualified area of the product, and further leading to uncontrolled coating productivity. SUMMARY

[0004] Therefore, it is necessary to provide an optical monitoring mechanism and a coating device, which can effectively realize multi-light path monitoring and improve the coating quality.

[0005] The technical scheme is as follows: an optical monitoring mechanism, comprising: a monitoring plate, the monitoring plate is provided with a first monitoring hole and a second monitoring hole, the first monitoring hole and the second monitoring hole are arranged at intervals on the monitoring plate, and the distance R1 from the first monitoring hole to the center of the monitoring plate is not equal to the distance R2 from the second monitoring hole to the center of the monitoring plate, and the first monitoring hole and the second monitoring hole are used for passing light; a rotating shaft, the rotating shaft is connected with the center of the monitoring plate, and the rotating shaft is used to drive the monitoring plate to rotate.

[0006] In one embodiment, the monitoring plate is further provided with a third monitoring hole, the third monitoring hole is arranged at intervals with the first monitoring hole and the second monitoring hole, and the distance R3 from the third monitoring hole to the center of the monitoring plate is not equal to the distance R1 from the first monitoring hole to the center of the monitoring plate and the distance R2 from the second monitoring hole to the center of the monitoring plate, and the third monitoring hole is used for passing light.

[0007] In one of the embodiments, a first cross section of the first monitoring hole is obtained along an axial direction of the first monitoring hole, the first cross section is rectangular, and the first monitoring hole is perpendicular to opposite sides of the monitoring plate in the height direction.

[0008] In one of the embodiments, a second cross section and a third cross section of the second monitoring hole and the third monitoring hole are obtained along a radial direction of the monitoring plate, the second cross section and the third cross section are both rectangular, and an area of the second cross section is greater than an area of the third cross section.

[0009] In one of the embodiments, a hole wall of the second monitoring hole is provided with a first reflecting surface and a second reflecting surface, the first reflecting surface is arranged at an angle α1 with respect to the monitoring plate, the second reflecting surface is arranged at an angle α2 with respect to the monitoring plate, and the first reflecting surface and the second reflecting surface are both used for reflecting light.

[0010] In one of the embodiments, the first reflecting surface is parallel to the second reflecting surface, a fourth cross section of the second monitoring hole is obtained along the height direction of the monitoring plate, the fourth cross section is a parallelogram, and α1=α2 or α1+α2=180°.

[0011] In one of the embodiments, a hole wall of the third monitoring hole is provided with a third reflecting surface and a fourth reflecting surface, the third reflecting surface and the fourth reflecting surface are parallel and arranged at an angle with respect to the monitoring plate, and along the radial direction of the monitoring plate, a distance D1 between the first reflecting surface and the second reflecting surface is greater than a distance D2 between the third reflecting surface and the fourth reflecting surface.

[0012] In one of the embodiments, the optical monitoring mechanism further comprises a cooperating member, the cooperating member is arranged in the second monitoring hole and abuts against an inner wall of the second monitoring hole, and the cooperating member is provided with a cooperating hole, the cooperating hole is used for passing light.

[0013] In one of the embodiments, the monitoring plate is provided with a mounting hole, the mounting hole is arranged at a center of the monitoring plate, and the rotating shaft is detachably connected to the monitoring plate through the mounting hole.

[0014] The optical monitoring mechanism is installed on the rotating shaft together with the monitoring plate during installation, so that the coated substrate and the monitoring plate are arranged in parallel and coaxially. During coating, the coated substrate and the monitoring plate rotate coaxially, and during one rotation, the light passes through the first monitoring hole and the second monitoring hole to the coated substrate. Because the first monitoring hole and the second monitoring hole are different in distance to the center, and the different monitoring holes have different inclination angles, the same light beam can be divided into multiple light beams, and the multiple light beams can detect the light intensity changes at different radius positions of the coated substrate through different monitoring holes, so as to obtain the film thickness changes at multiple positions, realize the monitoring of the coating by multiple light paths, and ensure the stability and repeatability of the optical control sampling signal by coaxial rotation of the monitoring plate and the coated substrate, thereby improving the coating quality. Moreover, the multiple light path monitoring can be realized without multiple light sources, and the effect of the multiple light path monitoring can be realized by using the same light source, so the application is not limited to laser light sources with particularly small light spots, and is also applicable to white light sources.

[0015] A coating device includes a light source, a coated substrate, and the optical monitoring mechanism according to any one of the preceding claims, wherein the coated substrate is connected to the rotating shaft, and the coated substrate and the monitoring plate are coaxially arranged, and the light source is arranged on the side of the monitoring plate away from the coated substrate.

[0016] The coating device is installed on the rotating shaft together with the monitoring plate during installation, so that the coated substrate and the monitoring plate are arranged in parallel and coaxially. During coating, the coated substrate and the monitoring plate rotate coaxially, and during one rotation, the light passes through the first monitoring hole and the second monitoring hole to the coated substrate. Because the first monitoring hole and the second monitoring hole are different in distance to the center, and the different monitoring holes have different inclination angles, the same light beam can be divided into multiple light beams, and the multiple light beams can detect the light intensity changes at different radius positions of the coated substrate through different monitoring holes, so as to obtain the film thickness changes at multiple positions, realize the monitoring of the coating by multiple light paths, and ensure the stability and repeatability of the optical control sampling signal by coaxial rotation of the monitoring plate and the coated substrate, thereby improving the coating quality. Moreover, the multiple light path monitoring can be realized without multiple light sources, and the effect of the multiple light path monitoring can be realized by using the same light source, so the application is not limited to laser light sources with particularly small light spots, and is also applicable to white light sources. BRIEF DESCRIPTION OF DRAWINGS

[0017] The accompanying drawings, which form a part of this application, are included to provide a further understanding of the application, and are incorporated in and constitute a part of this application. The embodiments of the application illustrated in the drawings are provided to explain the present application and are not meant to limit the present application.

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed in the embodiment description. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative effort.

[0019] Figure 1 The schematic diagram of the overall structure of the optical monitoring mechanism described in an embodiment;

[0020] Figure 2 The schematic diagram of the internal structure of the optical monitoring mechanism described in an embodiment Figure 1 ;

[0021] Figure 3 The schematic diagram of the internal structure of the optical monitoring mechanism described in an embodiment Figure 2 ;

[0022] Figure 4 The schematic diagram of the installation position of the optical monitoring mechanism described in an embodiment.

[0023] Explanation of reference signs:

[0024] 100, optical monitoring mechanism; 110, monitoring plate; 111, first monitoring hole; 112, second monitoring hole; 113, third monitoring hole; 114, mounting hole; 115, first reflecting surface; 116, second reflecting surface; 120, rotating shaft; 200, coated substrate. DETAILED DESCRIPTION

[0025] In order to make the above objectives, characteristics and advantages of the present application more apparent, the following will make a detailed description of the specific embodiments of the present application in combination with the drawings. In the following description, a lot of specific details are set forth in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0026] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0027] In addition, the terms "first", "second", etc. are used herein only to describe different instances, and are not used to denote or imply relative importance or a number of indicated technical features. Thus, features defined with "first", "second", etc. can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly and specifically limited.

[0028] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0029] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "under" and "under" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0030] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there can be a middle element. When an element is referred to as "connected to" another element, it can be directly connected to the other element or there can be a middle element. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and are not the only embodiment.

[0031] Please refer to Figure 1 With Figure 4 , Figure 1 The overall structure of the optical monitoring mechanism 100 described in an embodiment of the present application is shown in the schematic diagram; Figure 4The installation position of the optical monitoring mechanism 100 is shown in the embodiment of the present application. The optical monitoring mechanism 100 provided by the embodiment of the present application comprises a monitoring plate 110 and a rotating shaft 120. The monitoring plate 110 is provided with a first monitoring hole 111 and a second monitoring hole 112. The first monitoring hole 111 and the second monitoring hole 112 are arranged at intervals on the monitoring plate 110. The distance R1 from the first monitoring hole 111 to the center of the monitoring plate 110 is not equal to the distance R2 from the second monitoring hole 112 to the center of the monitoring plate 110. The first monitoring hole 111 and the second monitoring hole 112 are used for allowing light to pass through. The rotating shaft 120 is connected with the center of the monitoring plate 110. The rotating shaft 120 is used for driving the monitoring plate 110 to rotate.

[0032] Specifically, the coating substrate 200 is made of glass. The material of the monitoring plate 110 can be stainless steel, aluminum plate, ceramic plate, wood or other materials.

[0033] In an embodiment, as shown in Figure 1 , the material of the monitoring plate 110 is aluminum alloy. In this way, the structure is stable, the quality is light, and the processing of each monitoring hole is facilitated. The embodiment only provides a material selection of the monitoring plate 110, but is not limited thereto.

[0034] Further, as shown in Figure 1 and Figure 4 , the monitoring plate 110 is further provided with a third monitoring hole 113. The third monitoring hole 113 is arranged at intervals with the first monitoring hole 111 and the second monitoring hole 112. The distance R3 from the third monitoring hole 113 to the center of the monitoring plate 110 is not equal to the distance R1 from the first monitoring hole 111 to the center of the monitoring plate 110 and the distance R2 from the second monitoring hole 112 to the center of the monitoring plate 110. The third monitoring hole 113 is used for allowing light to pass through. In this way, by arranging three monitoring holes at different positions on the monitoring plate 110, a plurality of light paths can be arranged, a multi-light-path monitoring system can be realized, the thickness changes of a plurality of radii can be reflected in real time, and the uniformity changes of the entire radial thickness can be reflected. Furthermore, by arranging a plurality of light paths, full light signals and dark current signals can be read to obtain more stable light signals.

[0035] Further, the monitoring plate 110 can be further provided with a fourth monitoring hole, a fifth monitoring hole, a sixth monitoring hole and the like, so as to monitor the light paths of different positions and different radius positions of the coating substrate 200.

[0036] Optionally, the spatial profile shape of the first monitoring hole 111 can be cylindrical, rectangular columnar, circular truncated cone type, curved type, ladder type or other shapes.

[0037] As shown in Figure 3 and Figure 4In one embodiment, a first cross section of the first monitoring hole 111 is obtained along an axial direction of the first monitoring hole 111, the first cross section is rectangular, and the first monitoring hole 111 is arranged perpendicularly to opposite sides of the monitoring plate 110 in the height direction. In this way, the processing is facilitated, and the monitoring position of the light can be changed by changing the light incidence position in the first cross section. The embodiment only provides a specific shape selection of the first monitoring hole 111, but is not limited thereto.

[0038] In order to further understand and illustrate the axial direction of the first monitoring hole 111, for example, the axial direction of the first monitoring hole 111 is the direction of any arrow on the straight line S1. Figure 2 Figure 2 In order to further understand and illustrate the axial direction of the first monitoring hole 111, for example, the axial direction of the first monitoring hole 111 is the direction of any arrow on the straight line S1.

[0039] Alternatively, the spatial profile shape of the second monitoring hole 112 can be cylindrical, rectangular columnar, circular truncated cone type, curved type, ladder type, or other shapes.

[0040] Specifically, a second cross section and a third cross section of the second monitoring hole 112 and the third monitoring hole 113 are obtained along the radial direction of the monitoring plate 110, the second cross section and the third cross section are both rectangular, and the area of the second cross section is greater than that of the third cross section. In this way, by arranging monitoring holes of different sizes, the interval of different light paths can be adjusted conveniently, so as to change the monitoring effect of the light path.

[0041] Further, the third monitoring hole 113 and the fourth monitoring hole can also be cylindrical holes, rectangular columnar holes, circular truncated cone type holes, curved type holes, ladder type holes, or other shape holes of different sizes.

[0042] In one embodiment, referring to Figure 1 and Figure 2 , the hole wall of the second monitoring hole 112 is provided with a first reflecting surface 115 and a second reflecting surface 116. The first reflecting surface 115 is arranged at an angle α1 with the monitoring plate 110, the second reflecting surface 116 is arranged at an angle α2 with the monitoring plate 110, and the first reflecting surface 115 and the second reflecting surface 116 are both used for reflecting light. Further, the first reflecting surface 115 and the second reflecting surface 116 are both mirrors. In this way, the light can be reflected by the first reflecting surface 115 and the second reflecting surface 116, so that the monitoring position of the light path reflected to the coated substrate 200 can be changed by changing the incidence angle, thereby facilitating the adjustment of the light monitoring range, and further reflecting the change of the film thickness uniformity in the coating process.

[0043] Among them, because only one beam of light is used, each monitoring hole with an inclination angle must have a reflecting surface at the position of the radius of the light to ensure that the light can be deflected at the position of the reflecting surface.

[0044] ​Optionally, the first reflecting surface 115 and the second reflecting surface 116 are arranged in an angle, or the first reflecting surface 115 and the second reflecting surface 116 are arranged in parallel.

[0045] In one embodiment, referring to Figure 2 With Figure 4 , the straight line L1 is the deflection direction of the light, and the first reflecting surface 115 and the second reflecting surface 116 are parallel. A fourth cross section is obtained by cutting the second monitoring hole 112 along the height direction of the monitoring plate 110, and the profile of the fourth cross section is a parallelogram, and α1=α2 or α1+α2=180°. In this way, the processing is convenient, the light deflection is stable, and the working reliability of the light monitoring is improved.

[0046] In one embodiment, the hole wall of the third monitoring hole 113 is provided with a third reflecting surface and a fourth reflecting surface, the third reflecting surface and the fourth reflecting surface are arranged in an angle with the monitoring plate 110 and are parallel, and along the radial direction of the monitoring plate 110, the distance D1 between the first reflecting surface 115 and the second reflecting surface 116 is greater than the distance D2 between the third reflecting surface and the fourth reflecting surface. For example, the cross-sectional shape of the third monitoring hole 113 is a parallelogram. Therefore, the number of light paths can be further increased, and the light path monitoring of different radius positions of the coated substrate 200 can be performed, thereby improving the coating quality.

[0047] In addition, by replacing different monitoring plates 110, monitoring holes of different shapes and different positions can be processed on different monitoring plates 110, so that multi-light-path monitoring in different coating scenarios can be conveniently met, different monitoring positions can be set, and the product qualified area can be expanded and stabilized.

[0048] In one embodiment, the optical monitoring mechanism 100 further comprises a fitting piece (not shown in the figure), the fitting piece is arranged in the second monitoring hole 112 and is in abutting fit with the inner wall of the second monitoring hole 112, and the fitting piece is provided with a fitting hole for the light to pass through. In this way, by installing the fitting piece in the original second monitoring hole 112, not only the shape of the second monitoring hole 112 can be changed, but also the size of the second monitoring hole 112 can be changed, so that by replacing the fitting piece, the light path monitoring position can be conveniently adjusted.

[0049] Specifically, the outer profile of the fitting piece matches the inner profile of the second monitoring hole 112. Optionally, the shape of the fitting hole can be cylindrical, rectangular column, conical, circular truncated cone, ladder platform or other irregular shape.

[0050] In one embodiment, the monitoring plate 110 is provided with a mounting hole 114, which is arranged at the center of the monitoring plate 110, and the rotating shaft 120 is detachably connected with the monitoring plate 110 through the mounting hole 114. In this way, the installation and removal of different monitoring plates 110 on the rotating shaft 120 are facilitated, thereby improving the convenience of the monitoring plate 110 and improving the work efficiency.

[0051] In the above optical monitoring mechanism 100, during the installation process, the coated substrate 200 is installed on the rotating shaft 120 together with the monitoring plate 110, so that the coated substrate 200 and the monitoring plate 110 are arranged in parallel and coaxially. During the coating process, the coated substrate 200 and the monitoring plate 110 rotate coaxially, and during one rotation, the light respectively passes through the first monitoring hole 111 and the second monitoring hole 112 to reach the coated substrate 200. Since the distances from the first monitoring hole 111 and the second monitoring hole 112 to the center are different, and the different monitoring holes have different inclination angles, the same light beam can be divided into multiple light beams, and the multiple light beams can detect the light intensity changes at different radius positions of the coated substrate 200 through different monitoring holes, thereby realizing multi-path monitoring. The coaxial rotation of the monitoring plate 110 and the coated substrate 200 can ensure the stability and repeatability of the light control sampling signal, thereby improving the coating quality. Moreover, multi-path monitoring can be realized without multiple light sources, and only one light source is needed to achieve the effect of multi-path monitoring, so it is not limited to laser light sources with particularly small light spots, and is also applicable to white light sources.

[0052] In one embodiment, a coating device (not shown in the figure) includes a light source, a coated substrate 200, and the optical monitoring mechanism 100 of any one of the above embodiments. The coated substrate 200 is connected with the rotating shaft 120, and the coated substrate 200 and the monitoring plate 110 are coaxially arranged. The light source is arranged on the side of the monitoring plate 110 away from the coated substrate 200.

[0053] The coating device is used for installing the monitoring plate 110 and the coating substrate 200 on the rotating shaft 120, so that the monitoring plate 110 and the coating substrate 200 are arranged in parallel and coaxially. During the coating, the monitoring plate 110 and the coating substrate 200 rotate coaxially, and during one rotation, light passes through the first monitoring hole 111 and the second monitoring hole 112 to the coating substrate 200. Because the first monitoring hole 111 and the second monitoring hole 112 have different distances to the center and different monitoring holes have different inclination angles, the same light can be divided into multiple light beams, and the multiple light beams can detect the light intensity changes of the coating substrate 200 at different radius positions through different monitoring holes, so that multiple monitoring is realized. The monitoring plate 110 and the coating substrate 200 rotate coaxially, which can ensure the stability and repeatability of the light control sampling signal, thereby improving the coating quality. Moreover, multiple light monitoring can be realized without multiple light sources, and the same light source can realize the effect of multiple light monitoring, so it is not limited to laser light source with special small spot, and is also suitable for white light source.

[0054] In other embodiments, different types of light sources or multiple light sources can also be used to monitor the coating substrate 200 through the first monitoring hole 111, the second monitoring hole 112 and the third monitoring hole 113, respectively.

[0055] The technical features of the above embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, but as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0056] The above embodiments only express several embodiments of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the patent. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are within the scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. An optical monitoring mechanism, characterized in that, The optical monitoring mechanism includes: The monitoring board has a first monitoring hole and a second monitoring hole, which are spaced apart on the monitoring board. The distance R1 from the first monitoring hole to the center of the monitoring board is not equal to the distance R2 from the second monitoring hole to the center of the monitoring board. The first monitoring hole and the second monitoring hole are used to allow light to pass through. A rotating shaft is connected to the center of the monitoring board, and the rotating shaft is used to drive the monitoring board to rotate. The second monitoring hole has a first reflective surface and a second reflective surface on its hole wall. The first reflective surface is set at an angle α1 with the monitoring board, and the second reflective surface is set at an angle α2 with the monitoring board. Both the first reflective surface and the second reflective surface are used to reflect light.

2. The optical monitoring mechanism according to claim 1, characterized in that, The monitoring board also has a third monitoring hole, which is spaced apart from the first monitoring hole and the second monitoring hole. The distance R3 from the third monitoring hole to the center of the monitoring board is not equal to the distance R1 from the first monitoring hole to the center of the monitoring board and the distance R2 from the second monitoring hole to the center of the monitoring board. The third monitoring hole is used to allow light to pass through.

3. The optical monitoring mechanism according to claim 1, characterized in that, A first cross section is obtained by making a cross section along the axial direction of the first monitoring hole. The outline of the first cross section is rectangular, and the first monitoring hole is respectively set perpendicular to the two opposite sides of the monitoring board in the height direction.

4. The optical monitoring mechanism according to claim 2, characterized in that, A second cross-section and a third cross-section are obtained by making cross-sections of the second monitoring hole and the third monitoring hole along the radial direction of the monitoring board, respectively. Both the second cross-section and the third cross-section are rectangular, and the area of ​​the second cross-section is larger than the area of ​​the third cross-section.

5. The optical monitoring mechanism according to claim 1, characterized in that, The monitoring board is made of aluminum alloy.

6. The optical monitoring mechanism according to claim 1, characterized in that, The first reflective surface is parallel to the second reflective surface. A fourth cross section is obtained by making a cross section of the second monitoring hole along the height direction of the monitoring board. The outline of the fourth cross section is a parallelogram, where α1=α2 or α1+α2=180°.

7. The optical monitoring mechanism according to claim 2, characterized in that, The third monitoring hole has a third reflective surface and a fourth reflective surface on its wall. The third reflective surface and the fourth reflective surface are parallel and set at an angle to the monitoring plate. Along the radial direction of the monitoring plate, the distance D1 between the first reflective surface and the second reflective surface is greater than the distance D2 between the third reflective surface and the fourth reflective surface.

8. The optical monitoring mechanism according to claim 1, characterized in that, The optical monitoring mechanism further includes a mating component, which passes through the second monitoring hole and abuts against the inner wall of the second monitoring hole. The mating component has a mating hole for light to pass through.

9. The optical monitoring mechanism according to any one of claims 1-8, characterized in that, The monitoring board is provided with mounting holes, which are located at the center of the monitoring board. The rotating shaft is detachably connected to the monitoring board through the mounting holes.

10. A coating apparatus, characterized in that, The coating apparatus includes a light source, a coating substrate, and an optical monitoring mechanism as described in any one of claims 1-9. The coating substrate is connected to the rotating shaft, and the coating substrate and the monitoring board are coaxially arranged. The light source is located on the side of the monitoring board facing away from the coating substrate.

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