Ingot separation device, system and method

Abstract

The present invention provides a crystal bar separation device, system and method, relating to the technical field of silicon wafer management. The crystal bar separation device includes: a transfer table, a buffer area and a movable gripper; the transfer table is used for carrying a carrier or a carrier loaded with a crystal bar; the buffer area is disposed adjacent to one side of the transfer table; the movable gripper is disposed above the transfer table in the vertical direction and can move to the buffer area, and is used for separating the crystal bar from the carrier. The solution of the embodiment of the present invention provides a transfer bearing space for the crystal bar and the carrier before separation through the transfer table; the crystal bar is separated from the carrier by the movable gripper and clamped into the buffer area for storing the separated crystal bar. The crystal bar separation device of the embodiment of the present invention reduces the degree of manual participation, can automatically separate the crystal bar from the carrier carrying the crystal bar, improves the crystal bar separation efficiency, and ensures the safety of crystal bar separation.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer management, and particularly to a crystal bar separation device, system and method. Background Art

[0002] After the crystal bar goes through the cutting process, it is placed in a specific tray. Before entering the next process, the crystal bar needs to be separated from the tray and then put into the installation equipment by a trolley. The existing method is to manually pick up the crystal bar from the tray and transfer it to the trolley, resulting in low separation efficiency between the crystal bar and the tray and there are safety risks. Summary of the Invention

[0003] In order to solve the above technical problems, the present invention provides a crystal bar separation device, system and method, which can automatically separate the crystal bar from the carrier carrying the crystal bar, improve the separation efficiency of the crystal bar, and ensure the safety of crystal bar separation.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0005] An embodiment of the present invention provides a crystal bar separation device, including:

[0006] A transfer table, a buffer area and a movable gripper;

[0007] The transfer table is used to carry the carrier or the carrier loaded with the crystal bar;

[0008] The buffer area is disposed adjacent to one side of the transfer table;

[0009] The movable gripper is disposed above the transfer table in the vertical direction and can move to the buffer area for separating the crystal bar from the carrier.

[0010] Further, the buffer area includes a plurality of temporary storage tables for carrying the crystal bar separated from the carrier.

[0011] Further, the crystal bar separation device further includes:

[0012] A feeding table and a discharging table;

[0013] The feeding table is disposed on the side of the transfer table away from the buffer area;

[0014] The discharging table is used to carry the carrier after being separated from the crystal bar.

[0015] Further, the transfer table is a rotatable transfer table, and the rotatable transfer table is further used to transfer the carrier.

[0016] Further, the crystal bar separation device further includes:

[0017] Automated guided vehicle and stacker

[0018] The automated guided vehicle includes a first automated guided vehicle disposed on the feeding table and a second automated guided vehicle disposed on the discharging table. The first automated guided vehicle is configured to transfer a carrier loaded with a crystal bar from the stacker to the feeding table, and the second automated guided vehicle is configured to transfer the carrier on the discharging table to the stacker.

[0019] An embodiment of the present invention further provides a crystal bar separation system, including: a manufacturing execution unit, a device automation management unit, a material management unit, and the crystal bar separation device as described above;

[0020] The manufacturing execution unit is connected to the device automation management unit and the material management unit, and is configured to collect operation data of the crystal bar separation system;

[0021] The device automation management unit is connected to the crystal bar separation device and is configured to transfer a carrier loaded with the crystal bar;

[0022] The material management unit is connected to the crystal bar separation device and is configured to transfer a carrier loaded with the crystal bar, and / or transfer the carrier after separation from the crystal bar.

[0023] An embodiment of the present invention further provides a crystal bar separation method, which is applied to the crystal bar separation system as described above, and includes:

[0024] After detecting that there is a carrier loaded with a crystal bar on the transfer table, sending a separation instruction to the jaws of the crystal bar separation device;

[0025] The jaws separate the crystal bar from the carrier according to the separation instruction and clamp the crystal bar to the buffer area of the crystal bar separation device.

[0026] Further, before the jaws separate the crystal bar from the carrier, it further includes:

[0027] When it is detected that the buffer area does not carry a crystal bar, sending a feeding instruction to the device automation management unit or the material management unit;

[0028] The device automation management unit or the material management unit sends a first transfer instruction to the crystal bar separation device;

[0029] The crystal bar separation device transfers the carrier loaded with the crystal bar according to the first transfer instruction.

[0030] Further, after the jaws separate the crystal bar from the carrier, it further includes:

[0031] In the case where it is detected that the ingot is separated from the carrier, a second transfer instruction is sent to the transfer table;

[0032] The transfer table rotates according to the second transfer instruction to transfer the carrier to the discharge table of the ingot separation device;

[0033] After the carrier is placed on the discharge table, a discharge instruction is sent to the material management unit;

[0034] The material management unit sends a discharge instruction to the second automatic guided vehicle of the ingot separation device according to the discharge instruction;

[0035] The second automatic guided vehicle transfers the carrier to the stacker of the ingot separation device according to the discharge instruction.

[0036] The beneficial effects of the present invention are:

[0037] The ingot separation device according to the embodiment of the present invention provides a transfer bearing space for the ingot and the carrier before separation through the transfer table; the ingot is separated from the carrier by the movable gripper and clamped into the buffer area for storing the separated ingot. The ingot separation device according to the embodiment of the present invention reduces the manual participation degree, can automatically separate the ingot from the carrier carrying the ingot, improves the ingot separation efficiency, and ensures the safety of ingot separation. Description of the Drawings

[0038] Figure 1 It represents a schematic structural diagram of the ingot separation device according to the embodiment of the present invention;

[0039] Figure 2 It represents a schematic structural diagram of the ingot separation system according to the embodiment of the present invention. Detailed Embodiments

[0040] To make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will be described in detail with reference to the drawings and specific embodiments. In the following description, specific details such as specific configurations and components are provided only to help a comprehensive understanding of the embodiments of the present invention. Therefore, those skilled in the art should clearly understand that various changes and modifications can be made to the embodiments described here without departing from the scope and spirit of the present invention. In addition, descriptions of known functions and structures are omitted for clarity and conciseness.

[0041] It should be understood that the "one embodiment" or "an embodiment" mentioned throughout the specification means that the specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present invention. Therefore, the "in one embodiment" or "in an embodiment" that appears throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics can be combined in one or more embodiments in any suitable manner.

[0042] In view of the problem that the separation of the ingot and the tray in the prior art is carried out manually, with low separation efficiency and safety risks, the present invention provides an ingot separation device, system and method.

[0043] As Figure 1 shown, an embodiment of the present invention provides an ingot separation device, including:

[0044] A transfer table, a buffer area and a movable jaw;

[0045] The transfer table is used to carry a carrier or a carrier loaded with an ingot;

[0046] The buffer area is disposed adjacent to one side of the transfer table;

[0047] The movable jaw is disposed above the transfer table in the vertical direction and can move to the buffer area, and is used to separate the ingot from the carrier.

[0048] Optionally, the transfer table is a rotatable temporary storage table (TUCV); the jaw is a robotic arm.

[0049] The ingot separation device according to the embodiment of the present invention provides a transfer bearing space for separating the ingot and the carrier through the transfer table; the ingot is separated from the carrier by the movable jaw and clamped into the buffer area for storing the separated ingot. The ingot separation device according to the embodiment of the present invention reduces the degree of manual participation, can automatically separate the ingot from the carrier carrying the ingot, improves the ingot separation efficiency, and ensures the safety of ingot separation.

[0050] Optionally, the buffer area includes a plurality of temporary storage tables for carrying the ingots separated from the carrier.

[0051] The ingot separation device according to the embodiment of the present invention, by providing a plurality of temporary storage tables, as Figure 1 shown, the buffer area includes a plurality of temporary storage tables (CV03-CV06), stores the separated ingots, increases the number of ingots at the temporary storage table, and thus can improve the transfer efficiency of the ingots.

[0052] Optionally, the ingot separation device further includes:

[0053] The feeding table and the discharging table;

[0054] The feeding table is arranged on one side of the transfer table away from the buffer area;

[0055] The discharging table is used to carry the carrier after being separated from the ingot.

[0056] Optionally, both the feeding table and the discharging table are temporary storage tables. For example, the feeding table is CV01 and the discharging table is CV02.

[0057] By setting the feeding table, a transmission space is provided for the carrier loaded with the ingot, and the carrier loaded with the ingot together with the ingot is transported to the transfer table through the roller.

[0058] Optionally, the transfer table is a rotatable transfer table, and the rotatable transfer table is also used to transport the carrier.

[0059] In an embodiment of the present invention, after the feeding table connects the carrier loaded with the ingot and transports the ingot to the transfer table; the jaw grips the ingot and grips the ingot to the buffer area; after the ingot is separated from the carrier, the carrier is transported to the discharging table through the transfer table.

[0060] Optionally, after the ingot is separated from the carrier, the rotatable transfer table rotates in the direction of the discharging table, and the carrier is transported to the discharging table through the transmission mode of the roller.

[0061] In an alternative embodiment, the outlet of the roller structure of the transfer table is close to the temporary storage area. Relative to the transfer table, the setting direction of the discharging table forms a preset angle (such as 60 degrees, 90 degrees or 120 degrees) with the temporary storage area; when the ingot is separated to the temporary storage area, the transfer table receives the indication information and rotates a preset angle until the outlet of the roller structure corresponds to the discharging table, and the carrier is transported to the discharging table through the transmission mode of the roller.

[0062] In an alternative embodiment, relative to the transfer table, the setting direction of the discharging table forms a preset angle of 90 degrees with the temporary storage area; after receiving the second operation instruction, the transfer table rotates 90 degrees so that the outlet of the roller structure corresponds to the discharging table, and the carrier is transported to the discharging table through the transmission mode of the roller.

[0063] In an embodiment of the present invention, by setting the transfer table as the rotatable transfer table, the transfer speed of the carrier can be increased after the ingot is separated from the carrier, and the discharging efficiency of the ingot separation can be improved.

[0064] Optionally, the ingot separation device further includes:

[0065] Automated Guided Vehicle and Stacker

[0066] The Automated Guided Vehicle includes a first Automated Guided Vehicle disposed on the feeding table and a second Automated Guided Vehicle disposed on the discharging table. The first Automated Guided Vehicle is used to transfer the carrier loaded with the ingot from the stacker to the feeding table, and the second Automated Guided Vehicle is used to transfer the carrier on the discharging table to the stacker.

[0067] In an embodiment of the present invention, there are multiple Automated Guided Vehicles (AGVs), including at least one first Automated Guided Vehicle and at least one second Automated Guided Vehicle. The first Automated Guided Vehicle is disposed close to the feeding table, and the second Automated Guided Vehicle is disposed close to the discharging table.

[0068] In an embodiment of the present invention, the carrier loaded with the ingot is transferred from the stacker (Stocker, STK) to the feeding table by the first Automated Guided Vehicle, and the separated carrier is transferred from the discharging table to the stacker by the second Automated Guided Vehicle. It can realize the automation and intelligence of the feeding and discharging of the ingot and the carrier.

[0069] As Figure 2 shown, an embodiment of the present invention further provides an ingot separation system, including: a manufacturing execution unit, an equipment automation management unit, a material management unit, and the ingot separation device as described above;

[0070] The manufacturing execution unit is connected to the equipment automation management unit and the material management unit, and is used to collect the operation data of the ingot separation system;

[0071] The equipment automation management unit is connected to the ingot separation device and is used to transfer the carrier loaded with the ingot;

[0072] The material management unit is connected to the ingot separation device and is used to transfer the carrier loaded with the ingot, and / or transfer the carrier separated from the ingot.

[0073] Optionally, the manufacturing execution unit may be a Manufacturing Execution System (MES); the equipment automation management unit may be an Equipment Automation Platform (EAP); the material management unit may be a Material Control System (MCS).

[0074] Optionally, the manufacturing execution unit is connected to the equipment automation management unit and the material management unit. It can be understood that signal transmission can be carried out between the manufacturing execution unit and the equipment automation management unit, and between the manufacturing execution unit and the material management unit.

[0075] Optionally, the material management unit is connected to the automatic guided vehicle and the stacker of the ingot separation device.

[0076] The ingot separation system according to the embodiment of the present invention can control the ingot separation device through the manufacturing execution unit, the equipment automation management unit, and the material management unit, so that the ingot is automatically separated from the carrier, improving the ingot separation efficiency and safety, and realizing factory automation and intelligence at the same time.

[0077] The embodiment of the present invention also provides an ingot separation method, which is applied to the ingot separation system as described above, and includes:

[0078] After detecting that there is a carrier loaded with an ingot on the transfer table, send a separation instruction to the jaws of the ingot separation device;

[0079] The jaws separate the ingot from the carrier according to the separation instruction and clamp the ingot to the buffer area of the ingot separation device.

[0080] Optionally, for the detection of whether there is a carrier loaded with an ingot on the transfer table, it can be judged by the transfer table or the jaws of the ingot separation device. For example, a weight detection device is set on the transfer table, and according to the weight borne on the transfer table collected by the weight detection device, it is judged whether there is a carrier loaded with an ingot on the transfer table; or, a photoelectric sensor is set on the transfer table, and according to the detection result of the photoelectric sensor, it is judged whether there is a carrier loaded with an ingot on the transfer table; or, a distance detector is set on the jaws, and according to the distance collected by the distance detector, it is determined whether there is a carrier loaded with an ingot on the transfer table.

[0081] The solution of the present invention can detect the state of the transfer table, so as to automatically separate the ingot from the carrier through the jaws, thereby improving the ingot separation efficiency and ensuring the safety of ingot separation.

[0082] Optionally, before the jaws separate the ingot from the carrier, it further includes:

[0083] When it is detected that the buffer area does not carry an ingot, send a feeding instruction to the equipment automation management unit or the material management unit;

[0084] The device automation management unit or the material management unit sends a first transfer instruction to the ingot separation device;

[0085] The ingot separation device transfers the carrier loaded with ingots according to the first transfer instruction.

[0086] Optionally, the buffer detecting that there is no ingot carried thereon includes:

[0087] At least one staging table in the buffer detects that there is no ingot carried thereon.

[0088] Optionally, sending the first transfer instruction to the ingot separation device includes:

[0089] Sending the first transfer instruction to the first automated guided vehicle of the ingot separation device.

[0090] Optionally, the ingot separation device transferring the carrier loaded with ingots according to the first transfer instruction includes:

[0091] After receiving the first transfer instruction, the first automated guided vehicle of the ingot separation device transfers the carrier loaded with ingots from the stacker of the ingot separation device to the transfer table according to the first transfer instruction.

[0092] In an embodiment of the present invention, a photoelectric sensor is provided on each of the staging tables, and according to the detection result of the photoelectric sensor, it is determined whether there is an ingot carried on the staging table; alternatively, a weight detection device is provided on each of the staging tables, and based on the weight carried on the staging table collected by the weight detection device, it is determined whether there is an ingot carried on the staging table, and when it is determined that there is no ingot on at least one of the staging tables, a feeding instruction is sent to the device automation management unit or the material management unit.

[0093] The solution of the present invention can monitor the loading status of each staging table in the buffer in real time, and when there is no ingot on at least one of the staging tables, send a feeding instruction to the device automation management unit or the material management unit, so that through the device automation management unit or the material management unit, a first transfer instruction is sent to the first automated guided vehicle to transfer the carrier loaded with ingots from the stacker of the ingot separation device to the transfer table. Thus, the feeding automation of the ingots and the carriers is realized, and the overall efficiency of the ingot separation process is improved.

[0094] Optionally, after the gripper separates the ingot from the carrier, it further includes:

[0095] In the case where it is detected that the ingot is separated from the carrier, send a second transfer instruction to the transfer table;

[0096] The transfer table rotates according to the second transfer instruction and transfers the carrier to the discharge table of the ingot separation device;

[0097] After the carrier is placed on the discharge table, send a discharge instruction to the material management unit;

[0098] The material management unit sends a discharge instruction to the second automatic guided vehicle of the ingot separation device according to the discharge instruction;

[0099] The second automatic guided vehicle transfers the carrier to the stacker of the ingot separation device according to the discharge instruction. Optionally, for the detection of whether the ingot is separated from the carrier, it can be through the transfer table or the gripper of the ingot separation device. For example, a weight detection device is set on the transfer table, and according to the weight carried on the transfer table collected by the weight detection device, it is judged whether the ingot is separated from the carrier; or, a photoelectric sensor is set on the transfer table, and according to the detection result of the photoelectric sensor, it is judged whether the ingot is separated from the carrier; or, it is judged whether the ingot is separated from the carrier through the operation data of the gripper.

[0100] Optionally, in the case where it is detected that the ingot is separated from the carrier, send a second transfer instruction to the transfer table, and the transfer table rotates to the direction of the discharge table according to the second transfer instruction and transfers the carrier to the discharge table by the transmission mode of the roller.

[0101] In an alternative embodiment, the outlet of the roller structure of the transfer table is close to the temporary storage area. Relative to the transfer table, the setting direction of the discharge table forms a preset angle (such as 60 degrees, 90 degrees or 120 degrees) with the temporary storage area; in the case where the ingot is separated to the temporary storage area, the transfer table receives an indication message and rotates a preset angle so that the outlet of the roller structure corresponds to the discharge table, and transfers the carrier to the discharge table by the transmission mode of the roller.

[0102] In an alternative embodiment, relative to the transfer table, the setting direction of the discharge table forms a preset angle of 90 degrees with the temporary storage area; after receiving the second transfer instruction, the transfer table rotates 90 degrees so that the outlet of the roller structure corresponds to the discharge table, and transfers the carrier to the discharge table by the transmission mode of the roller.

[0103] The solution of the present invention can, after detecting the separation of the ingot bar from the carrier, send a second transfer instruction to the gripper to pick up the carrier from the transfer table to the discharge table, and can, after the carrier is transferred to the discharge table, send a discharge instruction to the second automatic guided vehicle to transfer the carrier to the stacker of the ingot bar separation device. Thus, the automation of the carrier discharging is realized, and the overall efficiency of the ingot bar separation process is improved.

[0104] It should be noted that the embodiments in this specification are all described in a progressive manner. For the same or similar parts among the embodiments, reference can be made to each other. Each embodiment focuses on the differences from other embodiments. In particular, for the method embodiment, since it is basically similar to the product embodiment, the description is relatively simple, and for the relevant parts, reference can be made to the partial description of the product embodiment.

[0105] Unless otherwise defined, the technical terms or scientific terms used in this disclosure should have the ordinary meanings understood by those of ordinary skill in the art to which this disclosure belongs. The "first", "second" and similar terms used in this disclosure do not denote any order, quantity or importance, but are only used to distinguish different components. The terms such as "including" or "comprising" mean that the elements or objects appearing before this term cover the elements or objects listed after this term and their equivalents, without excluding other elements or objects. The terms such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms such as "upper", "lower", "left" and "right" are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0106] It can be understood that when an element such as a layer, a film, a region or a substrate is referred to as being "on" or "under" another element, the element can be "directly" on or under the other element, or there may be intervening elements.

[0107] In the description of the above embodiments, the specific features, structures, materials or characteristics can be combined in a suitable manner in any one or more embodiments or examples.

[0108] The above is only the specific implementation manner of this disclosure, but the protection scope of this disclosure is not limited thereto. Any person skilled in the art within the technical scope disclosed by this disclosure can easily think of changes or substitutions, which should all be covered within the protection scope of this disclosure. Therefore, the protection scope of this disclosure should be subject to the protection scope of the claims.

Claims

1. A crystal bar separation device, characterized in that, Comprising: A transfer table, a buffer area, and a movable gripper; The transfer table is used to carry a vehicle or a vehicle loaded with a crystal bar; The buffer area is disposed adjacent to one side of the transfer table; The movable gripper is disposed above the transfer table in the vertical direction and can move to the buffer area, and is used to separate the crystal bar from the vehicle; A feeding table and a discharging table; The feeding table is disposed on one side of the transfer table away from the buffer area, and the discharging table is used to carry the vehicle after being separated from the crystal bar; The transfer table is a rotatable transfer table, and the rotatable transfer table is further used to transfer the vehicle; The transfer table includes: a roller structure, and the outlet of the roller structure is close to the buffer area; the discharging table and the buffer area are disposed at a preset angle, and by rotating the transfer table, the outlet of the roller structure corresponds to the discharging table; A detection device, which is used to detect whether the vehicle located on the transfer table carries the crystal bar; the detection device includes one of the following: A weight detection device disposed on the transfer table, a photoelectric sensor disposed on the transfer table, and a distance detector disposed on the movable gripper.

2. The crystal bar separation device according to claim 1, characterized in that, The buffer area includes a plurality of temporary storage tables, which are used to carry the crystal bar separated from the vehicle.

3. The crystal bar separation device according to claim 1, characterized in that, Further comprising: An automatic guided vehicle and a stacking machine; The automatic guided vehicle includes a first automatic guided vehicle disposed on the feeding table and a second automatic guided vehicle disposed on the discharging table. The first automatic guided vehicle is used to transfer the vehicle loaded with the crystal bar from the stacking machine to the feeding table, and the second automatic guided vehicle is used to transfer the vehicle on the discharging table to the stacking machine.

4. A crystal bar separation system, characterized in that, Comprising: A manufacturing execution unit, an equipment automation management unit, a material management unit, and a crystal bar separation device according to any one of claims 1 to 3; The manufacturing execution unit is connected to the equipment automation management unit and the material management unit, and is used to collect the operation data of the crystal bar separation system; The equipment automation management unit is connected to the crystal bar separation device, and is used to transfer the vehicle loaded with the crystal bar; The material management unit is connected to the crystal bar separation device, and is used to transfer the vehicle loaded with the crystal bar, and / or transfer the vehicle separated from the crystal bar.

5. A crystal bar separation method, applied to the crystal bar separation system according to claim 4, characterized in that, Comprising: After detecting that there is a vehicle loaded with a crystal bar on the transfer table, sending a separation instruction to the gripper of the crystal bar separation device; The gripper separates the crystal bar from the vehicle according to the separation instruction, and clamps the crystal bar to the buffer area of the crystal bar separation device.

6. The crystal bar separation method according to claim 5, characterized in that, Before the gripper separates the crystal bar from the vehicle, further comprising: When it is detected in the buffer area that there is no crystal bar carried, sending a feeding instruction to the equipment automation management unit or the material management unit; The equipment automation management unit or the material management unit sends a first transfer instruction to the crystal bar separation device; The crystal bar separation device transfers the vehicle loaded with the crystal bar according to the first transfer instruction.

7. The crystal bar separation method according to claim 5, characterized in that, After the gripper separates the crystal bar from the vehicle, further comprising: In the case of detecting that the ingot is separated from the carrier, send a second transfer instruction to the transfer table; The transfer table rotates according to the second transfer instruction and transfers the carrier to the discharge table of the ingot separation device; After the carrier is placed on the discharge table, send a discharge instruction to the material management unit; The material management unit sends a discharge instruction to the second automatic guided vehicle of the ingot separation device according to the discharge instruction; The second automatic guided vehicle transfers the carrier to the stacker of the ingot separation device according to the discharge instruction.

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