Thickness measurement system, thickness measurement method, and computer-readable storage medium

Abstract

The application relates to a thickness measuring system, a thickness measuring method and a computer readable storage medium. The thickness measuring system comprises a generator and a detector, is used for measuring the thickness of a target piece to obtain a measured thickness value, a displacement detector is used for detecting the displacement change between the generator and the detector and obtaining a corresponding detection signal, and a controller is connected with the generator, the detector and the displacement detector in communication and is used for calculating a compensation amount according to the detection signal so that the measured thickness value is closer to the actual thickness value. Through the compensation amount, the measured thickness value of the target piece measured by the generator and the detector can be compensated, and the measured thickness value is closer to the actual thickness value of the target piece. Therefore, the displacement change between the generator and the detector can be detected in real time, and the measured thickness can be compensated, and therefore, the thickness detection precision is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of measurement, in particular to a thickness measurement system, a thickness measurement method and a computer readable storage medium. BACKGROUND

[0002] The thickness measurement of thin film products is a problem that needs to be frequently faced in industrial production and manufacturing processes. For example, the thickness of the pole piece needs to be measured in the coating section of a lithium ion battery to ensure the accuracy and consistency of the film coating.

[0003] At present, a thickness gauge can be used to measure the thickness of thin film products. The thickness gauge can utilize the absorption and backscattering effect of the rays when the generator generates rays to penetrate the material, which is then received by the ray sensor, to achieve non-contact measurement of the thickness of thin film materials.

[0004] However, due to the instability of the structure of the bearing mechanism that bears the generator and the ray detection sensor, the distance between the bearing generator and the ray detection sensor will change, thereby affecting the thickness measurement accuracy. SUMMARY

[0005] In view of the above problems, the present application provides a thickness measurement system and a compensation method, which can alleviate the problem of affecting the thickness measurement accuracy due to the change of the gap between the bearing generator and the ray detection sensor.

[0006] In a first aspect, the present application provides a thickness measurement system, comprising:

[0007] A generator and a detector are used to measure the thickness of a target piece to obtain a measured thickness value.

[0008] A displacement detector is used to detect the displacement change between the generator and the detector and obtain a corresponding detection signal.

[0009] A controller is connected in communication with the generator, the detector and the displacement detector, and is used to calculate a compensation amount according to the detection signal, so that the measured thickness value is closer to the actual thickness value. The displacement detector detects the displacement change between the generator and the detector and obtains a corresponding detection signal which is transmitted to the controller. The controller calculates a compensation amount according to the detection signal. Through the compensation amount, the measured thickness value of the target piece measured by the generator and the detector can be compensated, and the measured thickness value is closer to the actual thickness value of the target piece. Therefore, the thickness measurement system of the present application can detect the displacement change between the generator and the detector in real time and compensate the measured thickness, thereby improving the thickness detection accuracy.

[0010] In some embodiments, the generator comprises a ray source generator, the detector comprises a ray detector, and the compensation quantity is a compensation quantity of an absorption coefficient of the target piece. By setting the compensation quantity as the compensation quantity of the absorption coefficient of the target piece, that is, a constant in the thickness calculation process is compensated, the compensation method is simple, has no influence on other parameters, and thus the compensation result is reliable.

[0011] In some embodiments, the detection signal comprises a current detection signal. By setting the detection signal as the current detection signal, the controller can calculate a compensation quantity based on the current detection signal, and the current signal can more directly reflect the intensity change of rays or laser light, and thus the calculation process of the compensation quantity is simplified.

[0012] In some embodiments, the displacement detector comprises an eddy current sensor. By setting the eddy current sensor, corresponding current detection signals can be output when displacement changes occur between the generator and the detector, and static and dynamic non-contact, high linearity and high resolution detection can be achieved, and the detection sensitivity is high.

[0013] In some embodiments, the eddy current sensor comprises a transmitting coil and a receiving coil arranged at intervals from each other, and the transmitting coil and the receiving coil can induct each other to detect displacement changes between the generator and the detector and obtain corresponding detection signals. By setting the transmitting coil and the receiving coil to induct each other to jointly detect displacement changes between the generator and the detector, the detection method is simple and direct, and the detection sensitivity is high, and the detection accuracy is further improved.

[0014] In some embodiments, the generator and the detector are arranged at intervals along a first direction, the receiving coil comprises a first receiving coil, the first receiving coil and the transmitting coil are arranged at intervals from each other along the first direction, and an axis of the first receiving coil coincides with an axis of the transmitting coil.

[0015] The detection signal comprises a first detection signal, and the transmitting coil and the first receiving coil can induct each other to detect displacement changes between the generator and the detector along the first direction and obtain corresponding first detection signals. By setting the first receiving coil and the transmitting coil to induct each other, and the axes of the first receiving coil and the transmitting coil to coincide, the first receiving coil can accurately cut the reverse magnetic field in the first direction, and thus the first receiving coil generates corresponding self-induced current when the generator and the detector produce displacement changes in the first direction, and the detection accuracy is improved.

[0016] In some embodiments, the generator and the detector are arranged at intervals along a first direction, the receiving coil comprises a second receiving coil, the second receiving coil and the transmitting coil are arranged at intervals from each other along the first direction, and an axis of the second receiving coil does not coincide with an axis of the transmitting coil.

[0017] The detection signal includes a second detection signal, and the transmitting coil and the second receiving coil can sense each other to detect the displacement change between the generator and the detector along the second direction and obtain a corresponding second detection signal;

[0018] The first direction is perpendicular to the second direction. By arranging the second receiving coil and the transmitting coil in a spaced relationship along the first direction, and with the axis of the second receiving coil not overlapping the axis of the transmitting coil, the second receiving coil can accurately cut the reverse magnetic field in the second direction. Consequently, when the generator and detector undergo displacement changes in the second direction, the second receiving coil generates a corresponding self-inductance current, thereby improving detection accuracy.

[0019] In some embodiments, the second receiving coils include at least two, all of which are spaced apart along the second direction, and two of which are symmetrically arranged along the second direction relative to the axis of the transmitting coil. By providing multiple second receiving coils, with two of the second receiving coils symmetrically arranged along the second direction relative to the axis of the transmitting coil, the specific direction of displacement changes generated by the generator and detector can be clearly detected, allowing compensation to be performed in the corresponding direction. This improves the detection range and accuracy.

[0020] In some embodiments, the receiving coil includes a third receiving coil, the third receiving coil is spaced apart from the transmitting coil along the first direction, and the axis of the third receiving coil does not coincide with the axes of the transmitting coil and the second receiving coil;

[0021] The detection signal includes a third detection signal, and the transmitting coil and the third receiving coil can sense each other to detect the displacement change between the generator and the detector along the third direction and obtain a corresponding third detection signal;

[0022] The first, second, and third directions are perpendicular to each other. By arranging the third receiving coil and the transmitting coil in the first direction with an axis that does not coincide with either the axis of the transmitting coil or the axis of the second receiving coil, the third receiving coil can accurately cut the reverse magnetic field in the third direction. Consequently, when the generator and detector undergo displacement changes in the third direction, the third receiving coil generates a corresponding self-inductance current, thereby improving detection accuracy.

[0023] In some embodiments, the third receiving coil includes at least two, all of the third receiving coils are spaced from each other along the third direction, and two of the third receiving coils are symmetrically arranged along the third direction relative to the axis of the transmitting coil. By arranging multiple third receiving coils and symmetrically arranging two of the third receiving coils along the third direction relative to the axis of the transmitting coil, the specific direction of displacement change of the generator and the detector can be clearly detected, and compensation can be performed in the corresponding direction, so that the detection range and detection accuracy can be improved.

[0024] In a second aspect, the application provides a thickness measurement method, including the steps of:

[0025] Measuring the thickness of the target object by the generator and the detector to obtain a measured thickness value;

[0026] Detecting the displacement change between the generator and the detector and obtaining a corresponding detection signal; wherein the generator and the detector are used to measure the thickness of the target object;

[0027] According to the detection signal, a compensation amount is calculated to make the measured thickness value more close to the actual thickness value.

[0028] By detecting the displacement change between the generator and the detector and obtaining a corresponding detection signal, and then calculating a compensation amount according to the detection signal, the measured thickness value of the target object measured by the generator and the detector can be compensated by the compensation amount, and then the measured thickness value is close to the actual thickness value of the target object. Therefore, the thickness measurement method of the application can detect the displacement change between the generator and the detector in real time and compensate the measured thickness, so as to improve the thickness detection accuracy.

[0029] In some embodiments, the generator includes a radiation source generator, and the detector includes a radiation detector.

[0030] The compensation amount calculated according to the detection signal specifically includes:

[0031] The compensation amount of the absorption coefficient of the target object is calculated according to the detection signal. By setting the compensation amount as the compensation amount of the absorption coefficient of the target object, that is, a constant in the thickness calculation process is compensated. This compensation method is simple and has no effect on other parameters, so that the compensation result is reliable.

[0032] In some embodiments, the generator and the detector are spaced apart along the first direction, and the detection signal includes a first detection signal.

[0033] The displacement change between the generator and the detector specifically includes:

[0034] The displacement change between the generator and the detector in the first direction is detected, and a corresponding first detection signal is obtained.

[0035] In some embodiments, the generator and the detector are arranged apart in the first direction, and the detection signal further comprises a second detection signal.

[0036] The displacement change between the generator and the detector comprises:

[0037] The displacement change between the generator and the detector in the second direction is detected, and a corresponding second detection signal is obtained.

[0038] The first direction is perpendicular to the second direction. The displacement change between the generator and the detector in the second direction is detected when the displacement change in the second direction is generated by the generator and the detector, which improves the accuracy of the detection.

[0039] In some embodiments, the detection signal further comprises a third detection signal.

[0040] The displacement change between the generator and the detector further comprises:

[0041] The displacement change between the generator and the detector in the third direction is detected, and a corresponding third detection signal is obtained.

[0042] The first direction, the second direction and the third direction are perpendicular to each other. The displacement change between the generator and the detector in the third direction is detected when the displacement change in the third direction is generated by the generator and the detector, which improves the accuracy of the detection.

[0043] In a third aspect, the present application also provides a computer readable storage medium storing a computer program, which, when executed by a processor, implements the steps of the thickness measurement method of the above embodiments.

[0044] The above description is only a summary of the technical solutions of the present application. In order to enable one skilled in the art to better understand the technical means of the present application, the contents of the specification can be implemented, and in order to enable the above and other purposes, features and advantages of the present application to be more obvious and easy to understand, the following specific embodiments of the present application are described. BRIEF DESCRIPTION OF DRAWINGS

[0045] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The accompanying drawings are intended to only illustrate preferred embodiments and are not considered limiting of the present application. Moreover, like reference numerals designate like parts throughout the several views in the drawings. In the drawings:

[0046] Figure 1 Schematic diagram of the structure of a thickness measurement system in one embodiment of the present application;

[0047] Figure 2 This is a structural diagram of an application scenario of a thickness measurement system in one embodiment of the present application;

[0048] Figure 3 Schematic diagram of the cross-sectional structure of an eddy current sensor in one embodiment of the present application;

[0049] Figure 4 for Figure 3 A schematic diagram of the top view of the eddy current sensor shown;

[0050] Figure 5 1 is a flowchart of the thickness measurement method in one embodiment of the present application.

[0051] Reference numerals:

[0052] Thickness measurement system 100;

[0053] Generator 10;

[0054] Detector 20;

[0055] displacement detector 30;

[0056] Eddy current sensor 31, transmitting coil 311, receiving coil 312, first receiving coil 312a, second receiving coil 312b, third receiving coil 312c, core 313, metal wire 314;

[0057] Controller 40;

[0058] a first signal amplifier 50;

[0059] A second signal amplifier 60;

[0060] Target part 200;

[0061] Scanning frame 300;

[0062] a first crossbeam 310;

[0063] The second beam 320 . DETAILED DESCRIPTION

[0064] The following embodiments of the technical solution of the present application will be described in detail with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application and are therefore only examples and are not intended to limit the scope of protection of the present application.

[0065] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned figure descriptions are intended to cover non-exclusive inclusions.

[0066] In the description of the embodiments of this application, the technical terms "first" and "second" are used only to distinguish different objects and should not be understood to indicate or imply relative importance or implicitly specify the quantity, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, the meaning of "plurality" is more than two, unless otherwise clearly and specifically defined.

[0067] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0068] In the description of the embodiments of this application, the term "and / or" is simply a description of the association relationship between associated objects, indicating that three relationships can exist. For example, A and / or B can represent the following three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this document generally indicates that the associated objects are in an "or" relationship.

[0069] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0070] In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0071] In the description of the embodiments of the present application, unless otherwise expressly specified or limited, technical terms such as "installed," "connected," "connected," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; internal connections between two components or interactions between two components. Those skilled in the art can understand the specific meanings of the above terms in the embodiments of the present application based on specific circumstances.

[0072] As the global energy and environmental situation becomes increasingly tense, batteries are becoming increasingly popular as a power source. Lithium-ion batteries have become the preferred choice for power battery development due to their high energy density, light volume, low weight, and environmental friendliness.

[0073] In the production of lithium-ion batteries, coating is one of the most important processes. Coating involves evenly applying the positive or negative electrode slurry required for lithium-ion battery manufacturing to the substrate. The most critical aspect of the coating process is ensuring the accuracy and consistency of the coating, which directly affects the uniformity of the electrode after coating, and thus the capacity and safety of the lithium-ion battery.

[0074] In order to improve the accuracy and consistency of coatings, two common detection methods for thin film products have emerged in traditional technologies:

[0075] One method is to measure the thickness of thin film products using a traditional micrometer. This method requires high operator skill and strength, and the micrometer needs to be constantly zeroed. As a result, the test results are not accurate. Different operators often test the thickness of thin film products with large deviations. Moreover, if the film product is continuously moving during thickness measurement, the tape may break due to the difficulty of operation. In addition, this measurement method cannot continuously measure the thickness of thin film products in real time.

[0076] Another method is to use a professional thickness gauge to measure the thickness of thin film products. Currently, the most common methods are to use X-rays or lasers for thickness measurement. Compared with traditional micrometer measurement methods, professional thickness gauges have higher test accuracy.

[0077] Taking the X-ray thickness gauge as an example, it specifically includes a generator and a detector. The generator emits X-rays or beta rays to irradiate the thin film product. After the rays pass through the thin film product, they are partially absorbed, causing a certain attenuation of the ray intensity. After reaching the detector, they are converted into electrical signals, and then the controller calculates the corresponding film product thickness.

[0078] Researchers have discovered that the generator and detector are typically mounted on opposing beams of a scanning gantry. When measuring the thickness of a dried electrode, the heat carried by the oven-dried electrode can cause the scanning gantry to expand and deform, causing the gap between the generator and detector to change in real time. Furthermore, the scanning gantry's inherent structural instability, such as loosening of fixing screws or deformation from long-term load bearing, can also cause the gap between the generator and detector to change. This change can directly affect the thickness gauge's measurement accuracy for thin film products.

[0079] In order to improve the measurement accuracy of the thickness gauge, the applicant designed a thickness measurement system that detects the displacement change between the generator and the detector through a displacement detector and transmits the detected signal to the controller. The controller can calculate a compensation amount based on the signal to make the measured thickness value of the target part closer to the actual thickness value.

[0080] The embodiment of the present application provides a thickness measurement system that can measure the thickness of coated electrodes, and can also measure the thickness of other thin film products, such as metal foils, etc., without limitation here.

[0081] According to some embodiments of this application, please refer to Figure 1 and Figure 2 , Figure 1 is a schematic structural diagram of a thickness measurement system according to some embodiments of the present application. Figure 2 Schematic diagram of the structure of the application scenario of the thickness measurement system in one embodiment of the present application. The present application provides a thickness measurement system 100, including a generator 10 and a detector 20, a displacement detector 30 and a controller 40. The generator 10 and the detector 20 are used to measure the thickness of the target part 200 to obtain a measured thickness value. The displacement detector 30 is used to detect the displacement change between the generator 10 and the detector 20 and obtain a corresponding detection signal. The controller 40 is connected to the generator 10, the detector 20 and the displacement detector 30 for communication and is used to calculate a compensation amount based on the detection signal to make the measured thickness value closer to the actual thickness value.

[0082] The generator 10 refers to a device that can generate and emit radiation or laser, etc., wherein the radiation may include X-rays or β-rays, etc., which are not limited here.

[0083] The detector 20 is a device that can detect the radiation or laser emitted from the generator 10 and convert it into an output such as a current signal or a voltage signal.

[0084] It can be understood that the generator 10 and the detector 20 should be located on opposite sides of the target part 200. The rays or lasers emitted by the generator 10 irradiate the target part 200, then penetrate the target part 200, and are then detected by the detector 20. Since the rays or lasers will be partially absorbed by the target part 200 after passing through the target part 200, their intensity will be attenuated to a certain extent. Therefore, when the detector 20 receives the attenuated rays or lasers, it can generate a current signal or voltage signal corresponding to the intensity change.

[0085] Specifically, the generator 10 and the detector 20 can be placed on a scanning frame 300, which includes a first beam 310 and a second beam 320 that are opposite and spaced apart. One of the generators 10 is arranged on the first beam 310, and the other is arranged on the second beam 320. A measuring space for measuring the thickness of the target part 300 is formed between the generator 10 and the detector 20.

[0086] The displacement detector 30 is used to detect the displacement change between the generator 10 and the detector 20. This detection method can reflect the change of light flux, magnetic flux, etc., and then convert it into a detection signal output such as a current signal or a voltage signal.

[0087] The controller 40 can be the nerve center and command center of the electronic device. Based on the instruction opcode and timing signals, the controller can generate operation control signals to control instruction fetching and execution. Specifically, the controller 40 can be a CPU controller or a PLC controller, etc., without limitation.

[0088] The controller 40 calculates a compensation amount according to the detection signal. The compensation amount can be a direct compensation amount for the thickness or a compensation amount for a certain parameter in the thickness calculation process, which is not limited here.

[0089] The actual thickness value refers to the real thickness value of the target part 200 .

[0090] The displacement detector 30 detects the displacement change between the generator 10 and the probe 20, and obtains a corresponding detection signal, which is transmitted to the controller 40. The controller 40 calculates a compensation amount based on the detection signal. With this compensation amount, the thickness value of the target part measured by the generator 10 and the probe 20 can be compensated, thereby making the measured thickness value approach the actual thickness value of the target part 200. Therefore, the thickness measurement system 100 of the present application can detect the displacement change between the generator 10 and the probe 20 in real time and compensate for the measured thickness, thereby improving the thickness detection accuracy.

[0091] According to some embodiments of this application, optionally, please continue to refer to Figure 1The generator 10 includes a ray source generator, the detector 20 includes a ray detector, and the compensation amount is the compensation amount of the absorption coefficient of the target part 200.

[0092] The ray source generator refers to a device that can generate and emit rays, wherein the rays may include X-rays or β-rays, etc., which are not limited here.

[0093] A radiation detector is a device that can detect radiation emitted by a radiation source generator.

[0094] The absorption coefficient refers to the absorbance of an absorbing substance at unit concentration and unit thickness.

[0095] In order to better understand this embodiment, the thickness measurement calculation principle of the X-ray thickness gauge is first described in detail.

[0096] As the radiation emitted by the radiation source generator passes through the target part 200, it is partially absorbed by the target part 200, causing its intensity to attenuate to a certain extent before being detected by the detector 20. The change in the radiation signal intensity has a certain relationship with the weight of the target part 200. According to Bell's law, its attenuation ratio has a negative exponential relationship with the weight or surface density of the target part 200. By measuring the radiation intensity before and after passing through the target part 200, the weight or surface density of the target part 200 can be calculated. The specific formula is as follows:

[0097]

[0098] in:

[0099] I0: current signal obtained when penetrating the air;

[0100] I: current signal obtained when penetrating the material;

[0101] λ: absorption coefficient;

[0102] m: surface density of the substance.

[0103] Thus, according to the above formula, we can get:

[0104]

[0105] Typically, before the X-ray thickness gauge performs measurement, a preset absorption coefficient of the target part 200 is set first. Then, during the thickness measurement process, the corresponding I0 value and I value can be obtained through the X-ray source generator and the X-ray detector, and then the surface density of the target part 200 can be obtained. The surface density can then be calculated to obtain the corresponding measured thickness of the target part 200.

[0106] When the displacement detector 30 detects the displacement change between the radiation source generator and the radiation detector, a corresponding detection signal can be obtained. The controller calculates the compensation amount △λ of the absorption coefficient of the target part 200 based on the detection signal, and then compensates for λ in the above formula, thereby changing the surface density value and thus changing the measured thickness.

[0107] The specific formula is as follows:

[0108]

[0109] By setting the compensation amount to the compensation amount of the absorption coefficient of the target part 200, a constant in the thickness calculation process is compensated. This compensation method is simple and has no effect on other parameters, thereby making the compensation result reliable.

[0110] In other embodiments, the generator 10 may also include a laser source generator, the detector may include a laser detector, and the compensation amount may be the compensation amount of a certain parameter in the laser thickness measurement calculation process, or it may be a combination of compensation amounts of multiple parameters, which is not limited here.

[0111] According to some embodiments of the present application, the controller may optionally be loaded with an APC prediction integral operation, so that the controller can calculate the compensation amount based on the detection signal.

[0112] According to some embodiments of the present application, optionally, the detection signal is a current detection signal.

[0113] The current detection signal refers to a current signal that can be fed back to the controller by the displacement detector and represents the displacement change between the generator 10 and the detector 20 .

[0114] By making the detection signal a current detection signal, the controller can calculate a compensation amount based on the current detection signal, and the current signal can more directly reflect the intensity change of the ray or laser, thereby simplifying the calculation process of the compensation amount.

[0115] In other implementations, the detection signal may also be a voltage detection signal, etc., which is not limited here.

[0116] In some embodiments, the thickness measurement system 100 further includes a first signal amplifier 50 . The first signal amplifier 50 is communicatively connected to the displacement detector 30 . The displacement detector 30 is communicatively connected to the controller 40 via the first signal amplifier 50 .

[0117] In this way, the first signal amplifier 50 can filter and reduce noise on the detection signal to improve the signal-to-noise ratio.

[0118] In some embodiments, the thickness measurement system 100 further includes a second signal amplifier 60 . The second signal amplifier 60 is communicatively connected to the detector 20 . The detector 20 is communicatively connected to the controller 40 via the second signal amplifier 60 .

[0119] In this way, the second signal amplifier 60 can filter and reduce noise on the detection signal to improve the signal-to-noise ratio.

[0120] According to some embodiments of the present application, optionally, the displacement detector 30 includes an eddy current sensor 31 .

[0121] The eddy current sensor 31 is a device that can generate eddy current effect. The eddy current effect is a phenomenon in which a metal conductor is placed in an alternating magnetic field to generate an induced current, thereby forming self-closed eddy current lines in the metal conductor.

[0122] During the specific detection process, the eddy current sensor 31 is first connected to a high-frequency oscillating current, and an alternating magnetic field is generated around it. The alternating magnetic field can generate an induced current on the surface of the target part 200, thereby forming a self-closed eddy current line in the target part 200, and then generating a reverse magnetic field. When a displacement change occurs between the generator 10 and the detector 20, the eddy current sensor 31 will self-induct and generate a self-induced current due to cutting the reverse magnetic field. The self-induced current is the corresponding detection signal.

[0123] It should be pointed out that the alternating magnetic field can generate an induced current on the surface of the target part 200, so the target part 200 must be a metal conductor. The pole piece in the embodiment of the present application is a metal conductor. In other embodiments, an additional metal part can also be provided to generate a reverse magnetic field, which is not limited here.

[0124] By setting up the eddy current sensor 131, when the displacement between the generator 10 and the detector 20 changes, a corresponding current detection signal can be output, and static and dynamic non-contact, high linearity and high resolution detection can be performed, so that the detection sensitivity is high.

[0125] According to some embodiments of the present application, optionally, please refer to Figure 3 and Figure 4 The eddy current sensor 31 includes a transmitting coil 311 and a receiving coil 312 that are spaced apart from each other. The transmitting coil 311 and the receiving coil 312 can sense each other to detect the displacement change between the generator 10 and the detector 20 and obtain a corresponding detection signal.

[0126] The transmitting coil 311 and the receiving coil 312 can sense each other, which means that the transmitting coil 311 and the receiving coil 312 can sense each other's position changes, signal changes, etc.

[0127] Specifically, the transmitting coil 311 can be connected to a high-frequency oscillating current to generate an alternating magnetic field around it. When the position of the transmitting coil 311 or the receiving coil 312 changes, the receiving coil 312 will generate a self-inductance current due to cutting the reverse magnetic field.

[0128] By setting the transmitting coil 311 and the receiving coil 312 to induct each other, the displacement change between the generator 10 and the detector 20 can be detected together. The detection method is simple and direct, and the detection sensitivity is high, which further improves the detection accuracy.

[0129] Specifically, the transmitting coil 311 and receiving coil 312 each include a core 313 and a metal conductor 314 wound around the core. The transmitting coil 311 can be connected to a high-frequency oscillating current through the metal conductor 314, and the metal conductor 314 can interact with the core 313 to generate an alternating magnetic field. The alternating magnetic field can generate an induced current on the surface of the target part 200 or the metal part, thereby generating an opposing magnetic field. When the position of the transmitting coil 311 or the receiving coil 312 changes, this opposing magnetic field enables the core of the receiving coil 312 and the metal conductor 314 to jointly cut the opposing magnetic field, thereby causing the metal conductor 314 to output a self-induced current. Optionally, the core 313 can be shaped like a rod, a ring, an E-shape, etc., and can be made of a paste or other magnetically sensitive material. In the embodiment of the present application, the core 313 is shaped like a rod and is made of iron.

[0130] In some embodiments, the transmitting coil 311 is connected to one of the generator 10 and the detector 20 , and the receiving coil 312 is connected to the other of the generator 10 and the detector 20 .

[0131] In this way, the displacement change between the generator 10 and the detector 20 can be detected in time, thereby improving the detection response speed.

[0132] In other embodiments, the transmitting coil 311 may also be disposed on one of the first beam 310 and the second beam 320 , and the receiving coil 312 may be disposed on the other of the first beam 310 and the second beam 320 .

[0133] According to some embodiments of this application, optionally, please continue to refer to Figure 3 and Figure 4, the generator 10 and the detector 20 are arranged along a first direction, the receiving coil 312 includes a first receiving coil 312a, the first receiving coil 312a is arranged opposite to the transmitting coil 311 along the first direction, an axis of the first receiving coil 312a coincides with an axis of the transmitting coil 311, the detection signal includes a first detection signal, and the transmitting coil 311 and the first receiving coil 312a can induct each other to detect a displacement change between the generator 10 and the detector 20 along the first direction and obtain a corresponding first detection signal.

[0134] Specifically, the first direction is the Z direction shown in Figure 3 .

[0135] The axis of the first receiving coil 312a refers to a central axis of the first receiving coil 312a, which can be a central axis of the core 313 or a central axis of a spiral structure formed after the metal wire 314 is wound.

[0136] By arranging the first receiving coil 312a and the transmitting coil 311 to be inductively coupled to each other and the axes of the first receiving coil 312a and the transmitting coil 311 to coincide, the first receiving coil 312a can accurately cut the reverse magnetic field in the first direction, so that the first receiving coil 312a generates a corresponding self-induced current when the generator 10 and the detector 20 produce a displacement change in the first direction, thereby improving the detection accuracy.

[0137] Specifically, the first receiving coil 312a also includes the core 313 and the metal wire 314 described above, which will not be described in detail here.

[0138] According to some embodiments of the present application, please continue to refer to Figure 3 and Figure 4 , the generator 10 and the detector 20 are arranged along a first direction, the receiving coil 312 includes a second receiving coil 312b, the second receiving coil 312b is arranged opposite to the transmitting coil 311 along the first direction, and an axis of the second receiving coil 312b does not coincide with an axis of the transmitting coil 311, the detection signal includes a second detection signal, and the transmitting coil 311 and the second receiving coil 312b can induct each other to detect a displacement change between the generator 10 and the detector 20 along a second direction to obtain a corresponding second detection signal, wherein the first direction is perpendicular to the second direction.

[0139] Specifically, the second direction is the X direction shown in Figure 3 .

[0140] By arranging the second receiving coil 312b and the transmitting coil 311 to be spaced apart along the first direction, and the axis of the second receiving coil 312b does not coincide with the axis of the transmitting coil 311, the second receiving coil 312b can accurately cut the reverse magnetic field in the second direction. When the generator 10 and the detector 20 are caused to change in displacement in the second direction, the second receiving coil 312b generates a corresponding self-inductance current, thereby improving the accuracy of detection.

[0141] Specifically, the axis of the second receiving coil 312b is arranged parallel to the axis of the transmitting coil 311. More specifically, the plane formed by the axis of the second receiving coil 312b and the axis of the transmitting coil 311 is parallel to both the first direction and the second direction.

[0142] In this way, the second receiving coil 312b can more stably cut the alternating magnetic field in a direction parallel to the second direction, further improving the detection accuracy.

[0143] Specifically, the second receiving coil 312b also includes the aforementioned core and metal wire, which will not be described in detail here.

[0144] According to some embodiments of this application, optionally, please continue to refer to Figure 3 and Figure 4 The second receiving coils 312b include at least two, all of the second receiving coils 312b are spaced apart from each other along the second direction, and the two second receiving coils 312b are symmetrically arranged along the second direction relative to the axis of the transmitting coil 311.

[0145] By providing a plurality of second receiving coils 312b, and symmetrically disposing two of the second receiving coils 312b along the second direction relative to the axis of the transmitting coil 311, the specific direction in which the displacement change of the generator 10 and the detector 20 occurs can be clearly detected, for example Figure 3 The horizontal direction in the image is moved to the left or right, and then compensation is performed in the corresponding direction, so that the detection range and detection accuracy can be improved.

[0146] Optionally, the second receiving coil 312 b includes two second receiving coils 312 b, and the two second receiving coils 312 b are symmetrically arranged along the second direction relative to the axis of the transmitting coil 311.

[0147] In some other embodiments, the second receiving coils 312 b include more than two, which can further increase the detection range.

[0148] According to some embodiments of this application, optionally, please continue to refer to Figure 3 and Figure 4The receiving coil 312 includes a third receiving coil 312c, which is spaced apart from the transmitting coil 311 along the first direction, and the axis of the third receiving coil 312c does not coincide with the axis of the transmitting coil 311 and the axis of the second receiving coil 312b. The detection signal includes a third detection signal. The transmitting coil 311 and the third receiving coil 312 can sense each other to detect the displacement change of the generator 10 and the detector 20 along the third direction and obtain a corresponding third detection signal. The first direction, the second direction, and the third direction are perpendicular to each other.

[0149] Specifically, the third direction is Figure 4 Y direction shown.

[0150] By arranging the third receiving coil 312c and the transmitting coil 311 to be spaced apart along the first direction, and the axis of the third receiving coil 312c not coinciding with the axis of the transmitting coil 311 and the axis of the second receiving coil 312b, the third receiving coil 312c can accurately cut the reverse magnetic field in the third direction. When the generator 10 and the detector 20 are displaced in the third direction, the third receiving coil 312c generates a corresponding self-inductance current, thereby improving the accuracy of detection.

[0151] Specifically, the axis of the third receiving coil 312c is arranged parallel to the axis of the transmitting coil 311. More specifically, the plane formed by the axis of the third receiving coil 312c and the axis of the transmitting coil 311 is parallel to both the first direction and the third direction.

[0152] In this way, the third receiving coil 312c can more stably cut the alternating magnetic field in a direction parallel to the third direction, thereby further improving the detection accuracy.

[0153] Specifically, the third receiving coil 312 c also includes the aforementioned core 313 and metal wire 314 , which will not be described in detail herein.

[0154] According to some embodiments of this application, optionally, please continue to refer to Figure 4 The third receiving coils 312c include at least two, all of the third receiving coils 312c are spaced apart from each other along the third direction, and two of the third receiving coils 312c are symmetrically arranged along the third direction relative to the axis of the transmitting coil 311.

[0155] By providing a plurality of third receiving coils 312c, and symmetrically disposing two of the third receiving coils 312c along the third direction relative to the axis of the transmitting coil 311, the specific direction in which the displacement change of the generator 10 and the detector 20 occurs can be clearly detected, for example Figure 4The vertical direction is upward or vertically downward, and then compensation is performed in the corresponding direction, so that the detection range and detection accuracy can be improved.

[0156] Optionally, the third receiving coil 312c includes two third receiving coils 312c, and the two third receiving coils 312c are symmetrically arranged along the third direction relative to the axis of the transmitting coil 311.

[0157] In some other embodiments, the third receiving coil 312c includes more than two, which can further increase the detection range.

[0158] Reference Figure 5 According to some embodiments of the present application, the present application further provides a thickness measurement method, comprising the steps of:

[0159] S110: measuring the thickness of the target part by using the generator 10 and the detector 20 to obtain a measured thickness value;

[0160] S120: Detect the displacement change between the generator 10 and the detector 20, and obtain a corresponding detection signal.

[0161] S130: Calculating a compensation amount according to the detection signal to make the measured thickness value closer to the actual thickness value.

[0162] The generator 10 refers to a device that can generate and emit radiation or laser, etc., wherein the radiation may include X-rays or β-rays, etc., which are not limited here.

[0163] The detector 20 is a device that can detect the radiation or laser emitted from the generator 10 and convert it into an output such as a current signal or a voltage signal.

[0164] Detecting the displacement change between the generator 10 and the detector 20 and obtaining a corresponding detection signal can be achieved by the displacement detector 30 mentioned above.

[0165] The controller 40 can calculate a compensation value according to the detection signal so as to make the measured thickness value of the target part 200 closer to the actual thickness value.

[0166] A compensation amount is calculated based on the detection signal. The compensation amount can be directly the compensation amount of the thickness, or the compensation amount of a certain parameter in the thickness calculation process, which is not limited here.

[0167] By detecting the displacement change between the generator 10 and the detector 20 and obtaining a corresponding detection signal, a compensation amount is calculated based on the detection signal. This compensation amount can be used to compensate for the thickness value of the target part measured by the generator 10 and the detector 20, thereby making the measured thickness value closer to the actual thickness value of the target part 200. Therefore, the thickness measurement method of the present application can detect the displacement change between the generator 10 and the detector 20 in real time and compensate for the measured thickness, thereby improving the thickness detection accuracy.

[0168] According to some embodiments of the present application, optionally, the generator 10 includes a ray source generator, and the detector 20 includes a ray detector, wherein step S130 specifically includes:

[0169] The compensation amount of the absorption coefficient of the target part 200 is calculated based on the detection signal.

[0170] The thickness measurement calculation principle of the X-ray source generator and X-ray detector has been introduced above and will not be described in detail here.

[0171] By setting the compensation amount to the compensation amount of the absorption coefficient of the target part 200, a constant in the thickness calculation process is compensated. This compensation method is simple and has no effect on other parameters, thereby making the compensation result reliable.

[0172] According to some embodiments of the present application, optionally, the generator 10 and the detector 20 are spaced apart along a first direction, and the detection signal includes a first detection signal, wherein step S120 specifically includes:

[0173] A displacement change between the generator 10 and the detector 20 along a first direction is detected, and a corresponding first detection signal is obtained.

[0174] Detecting the displacement change between the generator 10 and the detector 20 along the first direction and obtaining a corresponding first detection signal can be achieved through the transmitting coil 311 and the first receiving coil 312a. Specifically, the first receiving coil 312a and the transmitting coil 311 are arranged opposite and spaced apart along the first direction, and the axis of the first receiving coil 312a coincides with the axis of the transmitting coil 311.

[0175] In this way, when the displacement change in the first direction is generated by the generator 10 and the detector 20, the displacement change along the first direction between the generator 10 and the detector 20 can be detected, thereby improving the accuracy of the detection.

[0176] According to some embodiments of the present application, optionally, the generator 10 and the detector 20 are spaced apart along the first direction, and the detection signal includes a second detection signal, wherein step S120 specifically includes:

[0177] The displacement change between the generator 10 and the detector 20 along a second direction is detected, and a corresponding second detection signal is obtained. The second direction is perpendicular to the first direction.

[0178] Detecting the displacement change between the generator 10 and the detector 20 along the second direction and obtaining a corresponding second detection signal can be achieved using the transmitting coil 311 and the second receiving coil 312b. Specifically, the second receiving coil 312b is spaced apart from the transmitting coil 311 along the first direction, and the axis of the second receiving coil 312b does not coincide with the axis of the transmitting coil 311.

[0179] In this way, when the displacement change in the second direction is generated by the generator 10 and the detector 20, the displacement change between the generator 10 and the detector 20 along the second direction can be detected, thereby improving the accuracy of the detection.

[0180] According to some embodiments of the present application, optionally, the detection signal further includes a third detection signal, wherein the steps specifically further include:

[0181] The displacement change between the generator 10 and the detector 20 along the third direction is detected, and a corresponding third detection signal is obtained. The first direction, the second direction, and the third direction are perpendicular to each other.

[0182] Detecting the displacement change between the generator 10 and the detector 20 along the third direction and obtaining a corresponding third detection signal can be achieved using the transmitting coil 311 and the third receiving coil 312c. Specifically, the third receiving coil 312c is spaced apart from the transmitting coil 311 along the first direction, and the axis of the third receiving coil 312c does not coincide with the axis of the transmitting coil 311 or the axis of the second receiving coil 312b.

[0183] In this way, when the displacement change in the third direction is generated by the generator 10 and the detector 20, the displacement change between the generator 10 and the detector 20 along the third direction can be detected, thereby improving the accuracy of the detection.

[0184] According to some embodiments of the present application, the present application further provides a computer-readable storage medium storing a computer program, which implements the steps of the thickness measurement method in the above embodiment when executed by a processor.

[0185] According to some embodiments of this application, please refer to Figures 1 to 4The present application provides a thickness measurement system 100, including a radiation source generator and a radiation detector, a displacement detector 30 and a controller 40. The displacement detector 30 includes a transmitting coil 311, a first receiving coil 312a, a second receiving coil 312b and a third receiving coil 312c. The generator 10 and the detector 20 are used to measure the thickness of the target part 200 to obtain a measured thickness value. The first receiving coil 312a and the transmitting coil 311 are arranged opposite to each other and spaced apart along a first direction. The axis of the first receiving coil 312a coincides with the axis of the transmitting coil 311. The transmitting coil 311 and the first receiving coil 312a can sense each other to detect the displacement change between the generator 10 and the detector 20 along the first direction and obtain a corresponding first detection signal. The second receiving coil 312b is spaced apart from the transmitting coil 311 along the first direction, and the axis of the second receiving coil 312b does not coincide with the axis of the transmitting coil 311. The transmitting coil 311 and the second receiving coil 312b can mutually induct each other to detect the displacement change between the generator 10 and the detector 20 along the second direction, thereby generating a corresponding second detection signal. The second receiving coil 312b comprises two second receiving coils 312b, which are symmetrically arranged along the second direction with respect to the axis of the transmitting coil 311. The third receiving coil 312c is spaced apart from the transmitting coil 311 along the first direction, and the axis of the third receiving coil 312c does not coincide with the axis of either the transmitting coil 311 or the axis of the second receiving coil 312b. The transmitting coil 311 and the third receiving coil 312 can mutually induct each other to detect the displacement change between the generator 10 and the detector 20 along the third direction, thereby generating a corresponding third detection signal. The first, second, and third directions are perpendicular to each other. Two third receiving coils 312 are arranged symmetrically along the third direction relative to the axis of the transmitting coil 311. A controller 40 is communicatively coupled to the generator 10, the detector 20, and the displacement detector 30, and is configured to calculate a corresponding compensation amount for the absorption coefficient of the target part 200 based on the first, second, and third detection signals, thereby ensuring that the measured thickness of the target part 200 more closely approximates the actual thickness.

[0186] According to some embodiments of the present application, the present application provides a thickness measurement method, comprising the steps of:

[0187] S110: measuring the thickness of the target part by using the generator 10 and the detector 20 to obtain a measured thickness value;

[0188] S120: Detect the displacement change between the ray source generator and the ray detector along the first direction and obtain a corresponding first detection signal, detect the displacement change between the ray source generator and the ray detector along the second direction and obtain a corresponding second detection signal, detect the displacement change between the ray source generator and the ray detector along the third direction and obtain a corresponding third detection signal, the first direction, the second direction and the third direction are perpendicular to each other, wherein the generator 10 and the detector 20 are used to measure the thickness of the target part 200.

[0189] S130 : Calculating a compensation amount of an absorption coefficient of the target part 200 according to the first detection signal, the second detection signal, and the third detection signal, so as to make the measured thickness value closer to the actual thickness value.

[0190] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some or all of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application, and they should all be included in the scope of the claims and specification of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in the various embodiments can be combined in any way. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

Claims

1. A thickness measurement system, characterized in that: include: The generator and detector are used to measure the thickness of the target part to obtain the measured thickness value; a displacement detector, for detecting a displacement change between the generator and the detector and obtaining a corresponding detection signal; a controller, communicatively connected to the generator, the detector, and the displacement detector, for calculating a compensation amount based on the detection signal so as to make the measured thickness value closer to the actual thickness value; The compensation amount is a compensation amount of the absorption coefficient of the target part, and the compensation amount is used to compensate a constant in the thickness calculation process.

2. The thickness measurement system according to claim 1, characterized in that: The generator includes a ray source generator, and the detector includes a ray detector.

3. The thickness measurement system according to claim 1, characterized in that: The detection signal includes a current detection signal.

4. The thickness measurement system according to any one of claims 1 to 3, characterized in that: The displacement detector includes an eddy current sensor.

5. The thickness measurement system according to claim 4, characterized in that: The eddy current sensor includes a transmitting coil and a receiving coil that are spaced apart from each other. The transmitting coil and the receiving coil can sense each other to detect the displacement change between the generator and the detector and obtain the corresponding detection signal.

6. The thickness measurement system according to claim 5, characterized in that: The generator and the detector are spaced apart along a first direction, the receiving coil includes a first receiving coil, the first receiving coil and the transmitting coil are opposite and spaced apart along the first direction, and the axis of the first receiving coil coincides with the axis of the transmitting coil; The detection signal includes a first detection signal. The transmitting coil and the first receiving coil can sense each other to detect the displacement change between the generator and the detector along the first direction and obtain the corresponding first detection signal.

7. The thickness measurement system according to claim 5, characterized in that: The generator and the detector are spaced apart along a first direction, the receiving coil includes a second receiving coil, the second receiving coil and the transmitting coil are spaced apart along the first direction, and the axis of the second receiving coil does not coincide with the axis of the transmitting coil; The detection signal includes a second detection signal, and the transmitting coil and the second receiving coil can sense each other to detect the displacement change between the generator and the detector along the second direction and obtain the corresponding second detection signal; The first direction is perpendicular to the second direction.

8. The thickness measurement system according to claim 7, characterized in that: The second receiving coils include at least two, all of which are spaced apart from each other along the second direction, and the two second receiving coils are symmetrically arranged along the second direction relative to the axis of the transmitting coil.

9. The thickness measurement system according to claim 7, characterized in that: The receiving coil includes a third receiving coil, the third receiving coil is spaced apart from the transmitting coil along the first direction, and the axis of the third receiving coil does not coincide with the axes of the transmitting coil and the second receiving coil; The detection signal includes a third detection signal, and the transmitting coil and the third receiving coil can sense each other to detect the displacement change between the generator and the detector along the third direction and obtain the corresponding third detection signal; The first direction, the second direction and the third direction are perpendicular to each other.

10. The thickness measurement system according to claim 9, characterized in that: The third receiving coils include at least two, and all the third receiving coils are spaced apart from each other along a third direction, wherein the two third receiving coils are symmetrically arranged along the third direction relative to the axis of the transmitting coil.

11. A thickness measurement method, characterized in that: Including steps: The target part is measured by the generator and the detector to obtain the measured thickness value; detecting a displacement change between the generator and the detector and obtaining a corresponding detection signal; Calculating a compensation amount according to the detection signal to make the measured thickness value closer to the actual thickness value; The compensation amount is a compensation amount of the absorption coefficient of the target part, and the compensation amount is used to compensate a constant in the thickness calculation process.

12. The thickness measurement method according to claim 11, characterized in that: The generator includes a ray source generator, and the detector includes a ray detector; The step of calculating a compensation amount according to the detection signal specifically includes: A compensation amount of the absorption coefficient of the target part is calculated according to the detection signal.

13. The thickness measurement method according to claim 11, characterized in that: The generator and the detector are spaced apart along a first direction, and the detection signal includes a first detection signal; The detecting of the displacement change between the generator and the detector specifically includes: The displacement change between the generator and the detector along the first direction is detected, and the corresponding first detection signal is obtained.

14. The thickness measurement method according to claim 11, characterized in that: The generator and the detector are spaced apart along a first direction, and the detection signal further includes a second detection signal; The detecting of the displacement change between the generator and the detector specifically includes: detecting a displacement change between the generator and the detector along a second direction, and obtaining a corresponding second detection signal; The first direction is perpendicular to the second direction.

15. The thickness measurement method according to claim 14, characterized in that: The detection signal further includes a third detection signal; The detecting of the displacement change between the generator and the detector further comprises: detecting a displacement change between the generator and the detector along a third direction, and obtaining a corresponding third detection signal; The first direction, the second direction, and the third direction are perpendicular to each other.

16. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the steps of the thickness measurement method according to any one of claims 11 to 15 are implemented.

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