Filter Bucket Module, Polishing Liquid Filter, Polishing Liquid Purification System and Method

Abstract

The present invention relates to the field of polishing liquid purification equipment, and discloses a filter barrel module, a polishing liquid filter, a polishing liquid purification system and a method. Among them, the filter barrel module includes: a support seat; a filter barrel assembly, including a filter barrel rotatably connected to the support seat at both ends and a hollow rotating shaft coaxially arranged with the filter barrel; a liquid supply assembly; a chip suction assembly; a driving assembly; a first clutch; the hollow rotating shaft is rotatably connected to the support seat, and one end thereof is fixedly connected to the first clutch; the chip suction pipe passes through the hollow rotating shaft along the axis of the hollow rotating shaft and extends into the filter barrel; a vibrator is arranged on the filter barrel. Through the above technical solution, the filter barrel can be cleaned without stopping the machine, and continuous polishing liquid can be provided for the polishing machine table.

Description

Technical Field

[0001] The present invention relates to the field of polishing liquid purification equipment, and particularly to a filter barrel module, a polishing liquid filter, a polishing liquid purification system and a method. Background Art

[0002] During the processing, most of the polishing liquid is recycled. The impurities in the polishing liquid increase with the increase of processing time. The increase of impurities not only affects the processing quality of products, but also causes blockage of the liquid supply pipeline and shortens the service life of the liquid supply pump, which greatly increases the maintenance time of the polishing production line, and further affects the production efficiency of the polishing line and increases the maintenance labor. After analyzing the distribution of solids in the glass polishing liquid and filtering verification, most of the solids below 10um are the effective components of the polishing liquid itself, and even the dust below 10um containing glass dust has little impact on the processing quality. After filtering out the solids above 10um in the polishing liquid, the production yield of the polishing machine can be improved.

[0003] In terms of cleaning the impurities in the polishing liquid, the polishing liquid is usually cleaned by filtration to remove the impurities in the polishing liquid and reuse it. Specifically, the polishing liquid containing impurities is fed into the filter barrel, and after being filtered by the filter screen on the filter barrel, it flows out of the filter barrel, while the impurities are retained in the filter barrel.

[0004] For the cleaning of the filter barrel, it is usually necessary to stop the machine for cleaning, and even the filter barrel needs to be disassembled from the filter. Based on this, if the polishing machine requires a continuous supply of polishing liquid and the filter is in a stopped state at this time, the polishing operation cannot continue. That is to say, during the time of cleaning the filter barrel, the polishing operation also stops. Such a filter has a low filtration efficiency and cannot meet the requirements of continuous supply of polishing liquid in actual production. Summary of the Invention

[0005] The first object of the present invention is to provide a filter barrel module to solve the problem that the existing filter needs to disassemble the filter barrel before cleaning it, which reduces the filtration efficiency of the polishing liquid.

[0006] To achieve the above object, the first aspect of the present invention provides a filter barrel module, including:

[0007] A support seat;

[0008] A filter barrel assembly, including a filter barrel rotatably connected to the support seat at both ends and a hollow rotating shaft coaxially arranged with the filter barrel;

[0009] A liquid supply assembly for supplying liquid into the filter barrel;

[0010] The chip suction assembly includes a chip suction pipe that extends partially into the filter barrel along the axis of the filter barrel, a chip suction head located inside the filter barrel, communicating with the chip suction pipe and facing the filter net of the filter barrel, and a chip suction pump for pumping impurities inside the filter barrel out of the filter barrel.

[0011] The driving assembly is used to drive the filter barrel to rotate and drive the chip suction pipe to move back and forth along the axis of the filter barrel, so that the chip suction head can adsorb impurities located at various places on the filter net.

[0012] The first clutch is arranged between one end of the hollow rotating shaft facing the filter barrel and one end of the filter barrel facing the hollow rotating shaft; the first clutch is used to cut off or transmit the power output by the driving assembly to the filter barrel.

[0013] The hollow rotating shaft is rotatably connected to the support seat, and one end of it is fixedly connected to the first clutch; the chip suction pipe passes through the hollow rotating shaft along the axis of the hollow rotating shaft and extends into the filter barrel.

[0014] The vibrator is arranged on the outer wall of the filter barrel.

[0015] Through the above technical solutions, it is possible to clean the filter barrel without disassembling the filter barrel and maintain the flux of the filter barrel.

[0016] Preferably, a plurality of the chip suction heads are spaced apart in the axial and circumferential directions of the chip suction pipe.

[0017] Further preferably, the chip suction heads are arranged in two rows, and the two rows of chip suction pipes are arranged opposite to each other on the chip suction pipe.

[0018] Furthermore, the driving assembly includes:

[0019] A transmission motor;

[0020] A first gear, fixedly and coaxially sleeved on the motor rotating shaft of the transmission motor,

[0021] A second gear, fixedly and coaxially sleeved on the hollow rotating shaft, meshing with the first gear;

[0022] A lead screw nut, fixedly connected to the hollow rotating shaft or the second gear, sleeved outside the chip suction pipe and connected to a thread groove provided on the outer wall of the circumferential direction of the chip suction pipe; the lead screw nut and the chip suction pipe form a reciprocating lead screw.

[0023] Preferably, the transmission motor is a servo motor.

[0024] Furthermore, the first clutch includes:

[0025] The first main support disk is coaxially and fixedly sleeved on the hollow rotating shaft; a plurality of first guiding holes are arranged on the first main support disk at intervals along its circumferential direction;

[0026] The first chuck is coaxially arranged with the first main support disk; a plurality of first through holes are arranged on the first chuck at intervals along its circumferential direction and are aligned with the first guiding holes;

[0027] The first cover plate is provided with a first channel at its center for the chip suction pipe to pass through; the first cover plate is hermetically connected to the filter barrel, and a plurality of first pin holes capable of being aligned with the first through holes are arranged on the end surface facing the first chuck;

[0028] The first pin simultaneously penetrates through the first guiding hole and the first through hole, is slidably connected to the first guiding hole, and is fixedly connected to the first through hole;

[0029] The first driving part is used to drive the first chuck to move towards or away from the first cover plate so that the first pin can be inserted into or pulled out of the first pin hole; a first guiding limiting wheel is arranged on the telescopic end of the first driving part, and the first guiding limiting wheel is located on the two end surfaces of the first chuck and is in rolling connection with the two end surfaces;

[0030] Preferably, one end of the first pin facing the first cover plate is of a conical structure.

[0031] Further, the liquid supply assembly includes:

[0032] The liquid supply channel is fixedly connected to the support seat;

[0033] The valve is arranged at the liquid supply channel and is used to connect or cut off the liquid supply channel to allow or prohibit the liquid medium from entering the filter barrel.

[0034] Further, the filter barrel module further includes a second clutch arranged at the other end of the filter barrel; the second clutch is used to engage or cut off the rotation of the filter barrel and the support seat;

[0035] The second clutch includes:

[0036] The second main support disk is sleeved on the liquid supply channel and is rotatably connected to the liquid supply channel; a plurality of second guiding holes are arranged on the second main support disk at intervals along its circumferential direction;

[0037] The second chuck is coaxially arranged with the second main support disk; a plurality of second through holes are arranged on the second chuck at intervals along its circumferential direction and are aligned with the second guiding holes;

[0038] A second cover plate, which is hermetically connected to the filter barrel and has a second channel at its center; a plurality of second pin holes capable of aligning with the second through holes are provided on the end surface of the second cover plate facing the second chuck;

[0039] A second plug pin, which penetrates through the second guide hole and the second through hole at the same time, is slidably connected to the second guide hole, and is fixedly connected to the second through hole;

[0040] A second driving part, which is used to drive the second chuck to move towards or away from the second cover plate so that the second plug pin can be inserted into or pulled out of the second pin hole; second guiding and limiting wheels which are located on the end surfaces of both sides of the second chuck and are in rolling connection with the end surfaces on both sides are arranged on the telescopic end of the second driving part;

[0041] Preferably, one end of the second plug pin facing the second cover plate is of a conical structure.

[0042] Furthermore, the filter barrel module further includes a clamping mechanism; the clamping mechanism includes:

[0043] An arc-shaped clamping plate, the concave part of which faces the filter barrel and is adapted to the circumferential shape of the filter barrel;

[0044] A second driving part, the telescopic end of which is fixedly connected to the arc-shaped clamping plate, and is used to drive the arc-shaped clamping plate to move towards or away from the filter barrel so as to clamp or loosen the filter barrel.

[0045] The second object of the present invention is to provide a polishing liquid filter to solve the problem that the filter in the prior art needs to stop the machine to clean the filter barrel and cannot continuously supply the polishing liquid.

[0046] In order to achieve the above object, the present invention provides a polishing liquid filter, including:

[0047] At least two of the above-mentioned filter barrel modules;

[0048] A liquid inlet main pipe, which is simultaneously communicated with the liquid supply channels of at least two of the filter barrel modules;

[0049] A clean liquid temporary storage tank, which is arranged at the bottom of the filter barrel and is used for storing the liquid medium flowing out of the filter barrel;

[0050] A back-blowing module, which is used to generate high-pressure gas and blow towards the outer wall of the filter barrel;

[0051] A liquid supply pump, which is connected to the liquid inlet main pipe and is used to pump the liquid medium into the filter barrel.

[0052] Through the above technical solutions, it is possible to clean the filter barrel without stopping the machine and provide continuous polishing liquid for the polishing machine table.

[0053] Preferably, a stirrer is provided in the purified liquid temporary storage tank.

[0054] In an alternative specific embodiment, the backwashing module includes:

[0055] An air blowing channel formed on a cover body covering the upper part of the filter barrel module, extending along the axial direction of the filter barrel and having a length substantially the same as that of the filter barrel;

[0056] Slide rails distributed along the length direction of the air blowing channel;

[0057] A sliding seat adapted to the slide rails and capable of sliding on the slide rails;

[0058] A driving motor for driving the sliding seat to slide back and forth along the length direction of the slide rails;

[0059] An air blowing pipe, one end of which is connected to an air blowing pump and the other end is provided with a nozzle; the nozzle is arranged on the sliding seat and faces the air blowing channel;

[0060] Driven by the driving motor, it can drive the nozzle to slide back and forth along the length direction of the air blowing channel.

[0061] In another alternative specific embodiment, the backwashing module includes:

[0062] An air blowing channel formed on a cover body covering the upper part of the filter barrel module, extending along the axial direction of the filter barrel and having a length substantially the same as that of the filter barrel;

[0063] Slide rails distributed along the length direction of the air blowing channel;

[0064] A sliding seat adapted to the slide rails and capable of sliding on the slide rails;

[0065] A driving motor for driving the sliding seat to slide back and forth along the length direction of the slide rails;

[0066] A gear coaxially and fixedly connected to the output shaft of the driving motor;

[0067] A toothed belt meshing with the gear;

[0068] An air blowing pipe, one end of which is connected to an air blowing pump and the other end is provided with a nozzle; the nozzle is arranged on the sliding seat and faces the air blowing channel;

[0069] Driven by the driving motor, it can drive the nozzle to slide back and forth along the length direction of the air blowing channel.

[0070] The third object of the present invention is to provide a polishing liquid purification system, which on the one hand solves the problem in the prior art that the filter needs to disassemble the filter barrel for cleaning; on the other hand, it solves the problem that the filter in the prior art needs to stop the machine to clean the filter barrel and cannot continuously supply the polishing liquid.

[0071] To achieve the above object, the third aspect of the present invention provides a polishing liquid purification system, including:

[0072] A polishing liquid filter;

[0073] A polishing liquid temperature adjustment component for adjusting the temperature of the polishing liquid flowing to the purified liquid temporary storage tank or adjusting the temperature of the polishing liquid in the purified liquid temporary storage tank; the polishing liquid temperature adjustment component includes a temperature adjustment storage tank and an ice machine that circulates liquid with the temperature adjustment storage tank;

[0074] A temperature detector for detecting the temperature of the polishing liquid in the purified liquid temporary storage tank;

[0075] A concentration detector for detecting the concentration of the polishing liquid in the purified liquid temporary storage tank;

[0076] A liquid adding component, including a liquid adding pipeline and a liquid adding pump for pumping a liquid medium into the purified liquid temporary storage tank through the liquid adding pipeline to adjust the concentration of the polishing liquid in the purified liquid temporary storage tank;

[0077] Through the above technical solution, on the one hand, the problem in the prior art that the filter needs to disassemble the filter barrel for cleaning is solved; on the other hand, the problem that the filter in the prior art needs to stop the machine to clean the filter barrel and cannot continuously supply the polishing liquid is solved.

[0078] Preferably, the polishing liquid purification system further includes a constant pressure liquid supply pump for sending out the polishing liquid in the purified liquid temporary storage tank.

[0079] Preferably, the polishing liquid purification system further includes a polishing liquid return liquid pool for storing polishing waste liquid and a pneumatic diaphragm pump for sending the polishing waste liquid in the polishing liquid return liquid pool into the filter barrel.

[0080] The fourth object of the present invention is to provide a polishing liquid purification method to solve the problem that the polishing liquid purification method in the prior art needs to stop the machine to clean the filter barrel and cannot continuously supply the polishing liquid.

[0081] The fourth aspect of the present invention provides a polishing liquid purification method. The polishing liquid purification method includes: at least two filter barrel modules alternately performing polishing liquid filtration operation steps and performing impurity cleaning operation steps on the filter barrel in a non-operating state;

[0082] The polishing liquid filtration operation steps include:

[0083] Cut off the power output from the drive assembly to the filter barrel through the first clutch; the clamping mechanism clamps the filter barrel; send the polishing waste liquid into the filter barrel, start the vibrator to vibrate the filter barrel, and while vibrating and filtering, shake off the impurities in the filter mesh holes and on the surface of the filter mesh of the filter barrel;

[0084] The cleaning operation steps include:

[0085] Turn off the vibrator, loosen the filter barrel by the clamping mechanism, and resume the power transmission from the drive assembly to the filter barrel by the first clutch; intermittently drive the filter barrel to rotate, and at the same time drive the air nozzle to reciprocate along the air blowing channel and blow air towards the filter mesh through the air nozzle; drive the chip suction pipe to move back and forth along the axis of the filter barrel to extract the impurities in the filter barrel;

[0086] Preferably, within the time period when the filter barrel stops rotating, drive the air nozzle to reciprocate along the air blowing channel at least once.

[0087] Other features and advantages of the present invention will be described in detail in the subsequent specific implementation part. Brief Description of the Drawings

[0088] Figure 1 is a schematic structural diagram of an embodiment of the filter barrel module of the present invention;

[0089] Figure 2 is Figure 1 an exploded view of;

[0090] Figure 3 is Figure 2 an exploded view of the part except the cover body in;

[0091] Figure 4 is a schematic structural diagram of an embodiment of the chip suction pipe and the chip suction head;

[0092] Figure 5 is Figure 3 an enlarged view of part A in;

[0093] Figure 6 is a schematic structural diagram of an embodiment of the first clutch;

[0094] Figure 7 is a schematic structural diagram of an embodiment of the first pin;

[0095] Figure 8 is a schematic structural diagram of an embodiment of the first cover plate;

[0096] Figure 9 is Figure 8 a structural diagram from another angle of;

[0097] Figure 10It is a schematic structural diagram of an embodiment of the polishing liquid filter of the present invention;

[0098] Figure 11 is Figure 10 an enlarged view of part B in

[0099] Figure 12 It is a schematic structural diagram of another embodiment of the backflush module;

[0100] Figure 13 It is a schematic structural diagram of another embodiment of the polishing liquid filter of the present invention;

[0101] Figure 14 It is a schematic structural diagram of an embodiment of the second clutch;

[0102] Figure 15 It is a schematic diagram of an embodiment of the polishing liquid purification system of the present invention.

[0103] Explanation of reference numerals

[0104] 10 Support base; 20 Filter barrel assembly; 31 Chip suction pipe; 32 Chip suction head; 40 Driving assembly; 41 Transmission motor; 42 First gear; 43 Second gear; 50 First clutch; 51 First main support disk; 52 First chuck; 53 First guide hole; 54 First through hole; 55 First cover plate; 56 First bolt; 57 First driving part; 58 First guiding and limiting wheel; 60 Liquid supply assembly; 61 Liquid supply channel; 70 Clamping mechanism; 71 Arc-shaped clamping plate; 72 Second driving part; 80 Clean liquid temporary storage box; 91 Blowing channel; 92 Cover body; 93 Slide rail; 94 Slide block. Detailed implementation manners

[0105] The following details the specific implementation manners of the present invention. It should be understood that the specific implementation manners described herein are only for explaining and illustrating the present invention, and are not used to limit the present invention.

[0106] In the present invention, unless otherwise stated, the orientation terms such as "upper and lower" generally refer to the orientation in the assembled and used state. "Inner and outer" refer to the inner and outer relative to the contour of each component itself.

[0107] It should be noted that the terms "first", "second", etc. in the description, claims and above-mentioned drawings of the present invention are used to distinguish similar objects, and do not necessarily describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances, so as to implement the embodiments of the present invention described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily limit to those clearly listed steps or units, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0108] The first aspect of the present invention provides a filter barrel module, as Figures 1 - 3 shown, the filter barrel module includes a support base 10, a filter barrel assembly 20, a liquid supply assembly, a chip suction assembly, a drive assembly 40 and a first clutch 50.

[0109] The support base 10 is used to support various components such as the filter barrel assembly 20. Among them, the filter barrel assembly 20 includes a filter barrel 21 rotatably connected to the support base 10 at both ends and a hollow rotating shaft 22 coaxially arranged with the filter barrel 21 (as Figure 5 shown). It should be noted that the "rotatable connection" here can be specifically realized by installing bearings, that is, installing bearings between the support base 10 and the filter barrel 21 to achieve rotatable connection; the "hollow rotating shaft" here specifically refers to a cylindrical structure with a hollow interior and openings at both ends.

[0110] In an optional specific embodiment, the filter barrel 21 includes a barrel body and a filter net arranged on the circumference of the barrel body. The barrel body has the function of supporting the filter net to maintain the cylindrical shape of the filter net. Of course, the filter net itself also has a certain rigidity.

[0111] The liquid supply assembly is a component for supplying liquid into the filter barrel 21. The liquid here specifically refers to polishing waste liquid, that is, the polishing liquid used by the polishing machine and containing impurities. It should be noted that the filter barrel module of the present application can not only be used for filtering polishing liquid, but also for filtering other liquid media.

[0112] As Figure 3 and Figure 4 shown, the chip suction assembly includes a chip suction pipe 31 partially extending into the filter barrel 21 along the axis of the filter barrel 21, a chip suction head 32 located inside the filter barrel 21 and communicating with the chip suction pipe 31 and facing the filter net of the filter barrel 21, and a chip suction pump (not shown in the drawings) for pumping out impurities in the filter barrel 21. In an optional specific embodiment, a plurality of chip suction heads 32 are arranged on the chip suction pipe 31. The plurality of chip suction heads 32 are spaced apart in the axial and circumferential directions of the chip suction pipe 31.

[0113] In a preferred embodiment of the present invention, Figure 4 As shown, two rows of chip suction heads 32, A and B, are provided on the chip suction tube 31. The chip suction heads 32 in rows A and B are all located on the same straight line. The two rows of chip suction heads 32, A and B, are arranged opposite to each other on the chip suction tube 31, or in other words, the two rows of chip suction heads 32 are rotationally symmetrical with the axis of the chip suction tube 31 as the center. In the two rows of chip suction heads 32, A and B, the chip suction heads 32 are arranged at equal intervals. At the same time, the chip suction heads 32 in row B are located in the interval space between two adjacent chip suction heads 32 in row A, or in other words, the chip suction heads in rows A and B are staggered.

[0114] Through such a configuration, on the one hand, the filter barrel 21 only needs to rotate half a circle to clean the filter screen of the filter barrel 21. Another function needs to be explained in conjunction with the drive assembly 40, so this function will be explained later.

[0115] In an optional specific embodiment, the chip suction assembly further includes a chip guide tube and a waste residue collection bucket. One end of the chip guide tube is connected to the chip suction port, and the other end is connected to the waste residue collection bucket. The chip suction pump is used to suck the impurities in the filter barrel 21 into the waste residue collection bucket, so as to facilitate the centralized treatment of the impurities.

[0116] The driving assembly 40 is used to drive the filter barrel 21 to rotate and drive the debris suction pipe 31 to move back and forth along the axial direction of the filter barrel 21, so that the debris suction head 32 can absorb impurities located at various locations of the filter screen.

[0117] like Figure 2 and Figure 3 As shown, the first clutch 50 is disposed between one end of the hollow shaft 22 facing the filter barrel 21 and one end of the filter barrel 21 facing the hollow shaft 22, and its function is to cut off or transmit the power output by the drive assembly 40 to the filter barrel 21. When the filter barrel module is used in the polishing liquid filter described later, during the polishing liquid filtering operation, only one drive assembly 40 can be used to simultaneously drive the filter barrel 21 to rotate and drive the dust suction pipe 31 to move back and forth along the axis of the filter barrel 21 in cooperation with the first clutch 50.

[0118] like Figure 3 and Figure 5As shown, the "rotational connection" between the hollow rotating shaft 22 and the support base 10 can be specifically achieved by installing bearings. One end of the hollow rotating shaft 22 is fixedly connected to the first clutch 50. The chip suction pipe 31 passes through the hollow rotating shaft 22 along the axis of the hollow rotating shaft 22 and extends into the filter barrel 21. It should be noted that the hollow rotating shaft 22 does not extend into the filter barrel 21, and the chip suction pipe 31 does not contact the hollow rotating shaft 22, or the chip suction pipe 31 is connected to the hollow rotating shaft 22 through a piston, facilitating the axial reciprocating movement of the chip suction pipe 31 within the hollow rotating shaft 22. The chip suction pipe 31 passes through the hollow rotating shaft 22 from outside the filter barrel 21 and extends into the filter barrel 21, and the length of the chip suction pipe 31 extending into the filter barrel 21 can cover the length of the filter barrel 21. The purpose of this setting is that when cleaning the filter barrel 21, the chip suction pipe 31 reciprocates axially along the filter barrel 21. The chip suction pipe 31 can cover the filter barrel 21, ensuring that the chip suction head 32 can clean impurities at various locations on the filter mesh. Of course, the amplitude of the reciprocating movement of the chip suction pipe 31 is limited. Specifically, the movement range of a single chip suction head 32 is the horizontal distance between the chip suction head 32 in row A and the closest chip suction head 32 in row B.

[0119] The vibrator is installed on the outer wall of the filter barrel 21. There are two ways to use the vibrator. The first way: start when the filter barrel 21 is in the cleaning state (i.e., in the non-filtering state, no polishing waste liquid is introduced, and the filter barrel 21 rotates), shake off the impurities inside and on the surface of the filter mesh holes, and then clean the impurities through the chip suction assembly. Among them, the vibrator can be selected from a pneumatic vibrator or an electric vibrator.

[0120] The second way: start in the filtering state (i.e., in the non-cleaning state, polishing waste liquid is introduced, the filter barrel 21 does not rotate, and the chip suction pipe does not move). In this usage state, the main function of the vibrator is to shake off the impurities inside and on the surface of the filter mesh holes through vibration, maintain the flux of the filter barrel 21, improve the filtration efficiency, and extend the maintenance cycle of the filter barrel 21. However, since the chip suction assembly does not work under this working condition, the shaken-off impurities cannot be removed from the filter barrel 21.

[0121] During actual operation, the vibrator generally adopts the second usage method, that is, it starts in the filtering working condition and does not start in the cleaning working condition.

[0122] As Figure 5 shown, the drive assembly includes a drive motor 41, a first gear 42, a second gear 43, and a lead screw nut (not shown in the drawings). Preferably, the drive motor 41 is selected as a servo motor. The servo motor can achieve indexing rotation and will play an important role when cleaning the filter barrel 21. The detailed content will be introduced later.

[0123] In an alternative specific embodiment, in the drive assembly, the first gear 42 is fixed and coaxially sleeved on the motor shaft of the drive motor 41. The second gear 43 is fixed and coaxially sleeved on the hollow shaft 22 and meshes with the first gear 42. The lead screw nut is fixedly connected to the hollow shaft 22. Specifically, the lead screw nut is arranged inside the hollow shaft 22, and its circumferential outer wall is fixedly connected to the inner wall of the hollow shaft 22. At the same time, the lead screw nut is sleeved outside the chip suction pipe 31 and connected to the thread groove provided on the circumferential outer wall of the chip suction pipe 31. The lead screw nut and the chip suction pipe 31 actually form a lead screw mechanism, and it is a reciprocating lead screw mechanism. The reciprocating lead screw mechanism is a lead screw mechanism that can make the lead screw nut achieve reciprocating motion without changing the rotation direction of the main shaft. However, different from the traditional reciprocating lead screw mechanism, in the technical solution of the present application, the lead screw nut does not displace, and the chip suction pipe 31 displaces and the displacement direction is along the axis of the chip suction pipe / filter barrel 21.

[0124] In another alternative specific embodiment, in the drive assembly, the first gear 42 is fixed and coaxially sleeved on the motor shaft of the drive motor 41. The second gear 43 is fixed and coaxially sleeved on the hollow shaft 22 and meshes with the first gear 42. The lead screw nut is fixedly connected to the second gear 43, sleeved outside the chip suction pipe 31 and connected to the thread groove provided on the circumferential outer wall of the chip suction pipe 31. The lead screw nut and the chip suction pipe 31 form a reciprocating lead screw. It should be further noted that the lead screw nut is coaxially and fixedly connected to the second gear 43.

[0125] Based on the formation of the reciprocating lead screw mechanism, with the cooperation of the first clutch 50, the rotation of the filter barrel 21 and the reciprocating movement of the chip suction pipe 31 can be simultaneously achieved by one power source.

[0126] As Figure 6 shown, the first clutch 50 includes a first main support disk 51, a first chuck 52, a first cover plate 55, a first pin 56 and a first driving part 57. The first main support disk 51 is coaxially and fixedly sleeved on the hollow shaft 22. A plurality of first guide holes 53 are arranged on the first main support disk 51 at intervals along its circumference. The first chuck 52 is coaxially arranged with the first main support disk 51. A plurality of first through holes 54 are arranged on the first chuck 52 at intervals along its circumference and aligned with the first guide holes 53. At the same time, a through hole is also provided in the center of the first chuck 52 for the chip suction pipe 31 to pass through. As Figure 8As shown, a first channel 55a is provided at the center of the first cover plate 55, which is sealingly connected to the filter barrel 21. The first channel 55a is used for the chip suction pipe 31 to pass through. On the end face of the first cover plate 55 facing the first chuck 52, a plurality of first pin holes 55b capable of aligning with the first through holes 54 are provided. The first pin 56 penetrates through the first guide hole 53 and the first through hole 54 at the same time, is slidably connected to the first guide hole 53, and is fixedly connected to the first through hole 54.

[0127] In an alternative specific embodiment, as Figure 9 shown, a circular ring portion 55c is provided at the center of the end face of the first cover plate 55 on the side facing away from the first chuck 52. The circular ring portion 55c is coaxially arranged with the first channel 55a, and an annular groove 55d is provided on its circumferential outer wall. A sealing ring is provided in the annular groove 55d. The circular ring portion 55c extends into the filter barrel 21 and fits with the inner wall of the filter barrel 21. Through such a setting, a sealed connection between the first cover plate 55 and the filter barrel 21 can be achieved. It can be understood that from the above description, the positions of the filter holes on the filter net are restricted. In the state where the circular ring portion 55c is inserted into the filter barrel 21, no filter holes are provided in the overlapping portion of the circular ring portion 55c and the filter net, or rather, no filter holes are provided in the area where the sealing ring contacts the filter barrel 21 to prevent the polishing liquid from leaking.

[0128] The first driving portion 57 is used to drive the first chuck 52 to move towards or away from the first cover plate 55 so that the first pin 56 can be inserted into or pulled out of the first pin hole 55b. Among them, the first driving portion 57 can be any one of a pneumatic cylinder, a hydraulic cylinder or an electric push rod. A first guiding and limiting wheel 58 is provided on the telescopic end of the first driving portion 57. The first guiding and limiting wheel 58 is located on the two end faces of the first chuck 52 and is in rolling connection with the two end faces. Based on the setting of the first guiding and limiting wheel 58, on the one hand, the first chuck 52 can be allowed to rotate, and on the other hand, the first chuck 52 can be driven to drive the first pin 56 to move towards or away from the first pin hole 55b so that the first pin 56 can be inserted into the first pin hole 55b or pulled out of the first pin hole 55b.

[0129] When the first pin 56 is inserted into the first pin hole 55b, the driving assembly can drive the filter barrel 21 to rotate. When the first pin 56 is pulled out of the first pin hole 55b, the power of the driving assembly cannot be transmitted to the filter barrel 21, and even if the driving assembly is started, the filter barrel 21 cannot rotate.

[0130] In a preferred specific embodiment, as Figure 7As shown, one end of the first bolt 56 facing the first cover plate 55 is provided with a conical structure 56a. The first bolt 56 with one end being a conical structure can play a guiding role. Even if there is a certain deviation between the first bolt 56 and the first pin hole 55b, based on the setting of the conical structure, it can still be inserted into the first pin hole 55b, and finally the power transmission is achieved. Further, the first pin hole 55b is also provided with a conical structure.

[0131] As Figure 3 shown, the liquid supply assembly 60 includes a liquid supply channel 61 and a valve. The valve is arranged at the liquid supply channel 61 and is used to connect or cut off the liquid supply channel 61 to allow or prohibit the liquid medium from entering the filter barrel 21.

[0132] In an optional specific embodiment, as Figure 2 shown, the filter barrel module further includes a second clutch 100 arranged at the other end of the filter barrel 21. The second clutch 100 is used to engage or cut off the rotation of the filter barrel 21 and the support seat 10. The second clutch 100 has the same structure as the first clutch, but there are certain differences in terms of function and installation method. The second clutch 100 will be introduced in detail below.

[0133] As Figure 14 shown, the second clutch 100 includes a second main support disk 101, a second chuck 103, a second cover plate 105, a second bolt 106, and a second driving part 107. Among them, the second main support disk 101 is sleeved on the liquid supply channel 61 and is rotatably connected to the liquid supply channel 61. The "rotatable connection" can be specifically realized by installing a bearing between the second main support disk 101 and the liquid supply channel 61. A plurality of second guiding holes 102 are arranged on the second main support disk 101 at intervals along the circumferential direction of the second main support disk 101. The second chuck 103 is coaxially arranged with the second main support disk 101. A plurality of second through holes 104 are arranged on the second chuck 103 at intervals along its circumferential direction and are aligned with the second guiding holes 102. The second cover plate 105 is hermetically connected to the filter barrel 21, and a second channel is provided at its center. On the end surface of the second cover plate 105 facing the second chuck 103, a plurality of second pin holes capable of being aligned with the second through holes 104 are provided. The second bolt 106 penetrates through the second guiding hole 102 and the second through hole 104 at the same time, is slidably connected to the second guiding hole 102, and is fixedly connected to the second through hole 104. The second driving part 107 is used to drive the second chuck 103 to move towards or away from the second cover plate 105 so that the second bolt 106 can be inserted into or pulled out of the second pin hole. Second guiding and limiting wheels 108 are arranged on the telescopic end of the second driving part 107 and are in rolling connection with the two end surfaces on both sides of the second chuck 103.

[0134] It should be emphasized that in actual use, the operating conditions of the second clutch 100 are synchronized with those of the first clutch 50. Specifically, when the first driving part 57 of the first clutch 50 drives the first chuck 52 away from the first cover plate 55, the second driving part 107 of the second clutch 100 drives the second chuck 103 away from the second cover plate 105; when the first driving part 57 of the first clutch 50 drives the first chuck 52 close to the first cover plate 55, the second driving part 107 of the second clutch 100 drives the second chuck 103 close to the second cover plate 105.

[0135] In a specific embodiment of the present invention, three specific embodiments of the liquid supply channel 61 are provided.

[0136] Specific embodiment one: As Figure 14 shown, one end of the liquid supply channel 61 facing the filter barrel 21 is connected to the second channel of the second cover plate 105 through a connecting part. The inside of the connecting part is hollow and the two ends are respectively provided with a first opening and a second opening. The second channel is fixedly connected or rotatably connected through a bearing to the second opening, and the second main support plate 101 is rotatably connected to the liquid supply channel 61 through a bearing.

[0137] Specific embodiment two: The liquid supply channel 61 extends into the second channel and is rotatably connected to the second channel.

[0138] Specific embodiment three: An additional liquid delivery pipe is provided, which passes through the liquid supply channel 61 and the second channel and extends into the filter barrel 21.

[0139] As Figure 2 shown, the filter barrel module further includes a clamping mechanism 70, and the clamping mechanism 70 is used to clamp the filter barrel 21 during the filtering operation. As Figure 3 shown, the clamping mechanism 70 includes an arc-shaped clamping plate 71 and a second driving part 72. The concave part of the arc-shaped clamping plate 71 faces the filter barrel 21 and is adapted to the circumferential shape of the filter barrel 21. The telescopic end of the second driving part 72 is fixedly connected to the arc-shaped clamping plate 71 and is used to drive the arc-shaped clamping plate 71 to move towards or away from the filter barrel 21 to clamp or loosen the filter barrel 21. In the filtering operation state, the clamping mechanism 70 clamps the filter barrel 21, and in the cleaning state, the clamping mechanism 70 loosens the filter barrel 21. The second driving part 72 can be any one of a hydraulic cylinder, a pneumatic cylinder, and an electric push rod.

[0140] In addition, a shock absorber is provided on the support base 10, and the support base is installed with the shock absorber to prevent the overall equipment from generating resonance when the vibrator works.

[0141] In the second aspect of the present invention, a polishing liquid filter is provided. The polishing liquid filter is a specific application of the filter barrel module. Specifically, the polishing liquid filter includes a filter barrel module, a total liquid inlet pipe, a clean liquid temporary storage tank 80, a backwashing module, and a liquid supply pump.

[0142] Among them, the main liquid inlet pipe is simultaneously connected to the liquid supply channels 61 of at least two filter barrel modules. The purified liquid temporary storage tank 80 is arranged at the bottom of the filter barrel 21 for storing the liquid medium flowing out of the filter barrel 21. The back-blowing module is used to generate high-pressure gas and blow air towards the outer wall of the filter barrel 21. The liquid supply pump is connected to the main liquid inlet pipe for pumping the liquid medium into the filter barrel 21. Further, a stirrer is arranged in the purified liquid temporary storage tank 80.

[0143] The following provides two specific embodiments of the back-blowing module:

[0144] Specific Embodiment 1: As shown in Figure 10 and Figure 11 and Figure 12 The back-blowing module includes a blowing channel 91, a slide rail 93, a slide seat 94, a driving motor and a blowing pipe. The blowing channel 91 is formed on a cover body 92 covering above the filter barrel module, extends along the axial direction of the filter barrel 21 and is approximately the same length as the filter barrel 21. The slide rail 93 is distributed along the length direction of the blowing channel 91. The slide seat 94 is adapted to the slide rail 93 and can slide on the slide rail 93. The driving motor is used to drive the slide seat 94 to slide back and forth along the length direction of the slide rail 93. One end of the blowing pipe is connected to a blowing pump, and the other end is provided with a nozzle 95. The nozzle 95 is arranged on the slide seat 94 and faces the blowing channel 91. Driven by the driving motor, it can drive the nozzle 95 to slide back and forth along the length direction of the blowing channel 91.

[0145] In Specific Embodiment 1, since the nozzles 95 are installed on the same slide seat 94, two nozzles 95 can be driven to blow and clean two filter barrel modules simultaneously. However, in actual use, since the two filter barrel modules alternate between filtering and cleaning operations. Therefore, the working condition that requires two nozzles 95 to blow air simultaneously is very rare. For this reason, on the basis of Specific Embodiment 1, further, valves for opening and closing the blowing pipes are respectively arranged on the blowing pipes connecting the two nozzles 95, so that one valve can be controlled to open and the other valve to close to meet the requirements of the actual working conditions. Of course, the working condition where two nozzles 95 blow air simultaneously also exists, for example, after all the filtering work is completed, the two filter barrel modules are cleaned simultaneously.

[0146] Specific Embodiment 2: As shown in Figure 12 and Figure 13As shown, the backflush module includes a blowing channel 91, a slide rail 93, a slide block 94, a gear 96, a toothed belt 97, and a blowpipe. The blowing channel 91 is formed on a cover 92 covering above the filter barrel module, extends along the axis of the filter barrel 21, and is substantially the same length as the filter barrel 21. The slide rail 93 is distributed along the length direction of the blowing channel 91. The slide block 94 is adapted to the slide rail 93 and can slide on the slide rail 93. A driving motor is used to drive the slide block 94 to slide back and forth along the length direction of the slide rail 93. The gear 96 is coaxially and fixedly connected to the output shaft of the driving motor. The toothed belt 97 meshes with the gear 96. One end of the blowpipe is connected to a blowing pump, and the other end is provided with a nozzle 95; the nozzle 95 is arranged on the slide block 94 and faces the blowing channel 91. Driven by the driving motor, the nozzle 95 can be driven to slide back and forth along the length direction of the blowing channel 91.

[0147] The technical solution of the second specific embodiment does not have the problems of the technical solution of the first specific embodiment. Because each filter barrel module is equipped with a backflush module, and each backflush module can operate independently.

[0148] Taking the setting of two filter barrel modules as an example, during the filtering operation, only one filter barrel 21 is opened for filtering operation, and the other filter barrel 21 is in an idle standby state. Specifically, the transmission motor 41 is turned off, the power transmission of the driving assembly 40 to the filter barrel 21 is disconnected through the first clutch 50, the filter barrel 21 is clamped by the clamping mechanism 70, and the vibrator is started. The valve of the liquid supply channel 61 of the filter barrel 21 in the filtering operation state is opened, the valve of the liquid supply channel 61 of the other filter barrel 21 is closed, and liquid is supplied to the filter barrel 21. The filtered polishing liquid enters the clean liquid temporary storage tank 80. During the filtering process, the vibrator remains started, the filter barrel 21 is vibrated, and the impurities in the filter mesh holes and on the surface of the filter mesh are shaken off to prevent the filter barrel 21 from being blocked.

[0149] Before the filter barrel 21 is backwashed, first turn off the vibrator, then engage the first clutch, start the transmission motor 41, rotate the filter barrel 21, perform reciprocating backflushing on the filter barrel 21 with compressed air, the chip suction pipe 31 reciprocates along the axis of the filter barrel 21, the impurities are extracted from the filter barrel 21, and the impurities in the filter mesh holes are removed to restore the flux of the filter mesh.

[0150] When one filter barrel module is in the cleaning state, the other idle filter barrel module enters the filtering operation mode, and the two filter barrel modules alternate between filtering and cleaning operations.

[0151] In addition, in order to be able to observe the situation of the cover 92, in an optional specific embodiment, a transparent window 98 is provided on the observation cover 92.

[0152] The third aspect of the present invention provides a polishing liquid purification system, as Figure 14 shown, which includes a polishing liquid temperature adjustment component, a temperature detector, a concentration detector, a liquid adding component, and the aforementioned polishing liquid filter.

[0153] The polishing liquid temperature adjustment component is used to adjust the temperature of the polishing liquid flowing into the purified liquid temporary storage tank 80 or to adjust the temperature of the polishing liquid in the purified liquid temporary storage tank 80. The polishing liquid temperature adjustment component includes a temperature adjustment storage tank and an ice machine that circulates liquid with the temperature adjustment storage tank. The temperature detector is used to detect the temperature of the polishing liquid in the purified liquid temporary storage tank 80. The concentration detector is used to detect the concentration of the polishing liquid in the purified liquid temporary storage tank 80. The liquid adding component includes a liquid adding pipeline and a liquid adding pump that pumps a liquid medium into the purified liquid temporary storage tank 80 through the liquid adding pipeline to adjust the concentration of the polishing liquid in the purified liquid temporary storage tank 80.

[0154] The polishing liquid purification system further includes a constant pressure liquid supply pump for sending out the polishing liquid in the purified liquid temporary storage tank 80, a polishing liquid return liquid pool for storing polishing waste liquid, and a pneumatic diaphragm pump for sending the polishing waste liquid in the polishing liquid return liquid pool into the filter barrel 21.

[0155] Through the above polishing liquid purification system, the reuse of the polishing liquid can be realized. Specifically, the polishing waste liquid flowing out of the polishing machine platform flows into the polishing liquid return liquid pool, and the diaphragm pump is started to send the polishing waste liquid to the polishing liquid filter for filtration. The filtered polishing liquid flows into the temperature adjustment storage tank, and the temperature of the polishing liquid is adjusted under the action of the ice machine and then flows into the purified liquid temporary storage tank. Under the action of the temperature detector, the concentration detector, and the liquid adding component, the temperature and concentration of the polishing liquid in the purified liquid temporary storage tank are adjusted to meet the use standards of the polishing machine platform. Then, the polishing liquid in the purified liquid temporary storage tank 80 is sent to the polishing machine platform through the constant pressure liquid supply pump. Such a cycle is repeated to provide continuous polishing liquid for the polishing machine platform.

[0156] The fourth aspect of the present invention provides a polishing liquid purification method. Specifically, at least two filter barrel modules alternately perform the polishing liquid filtration operation step, and perform the impurity cleaning operation step on the filter barrel 21 in the non-operation state;

[0157] The polishing liquid filtration operation step includes:

[0158] The power output from the driving component 40 to the filter barrel 21 is cut off by the first clutch 50. The clamping mechanism 70 clamps the filter barrel 21. The polishing waste liquid is fed into the filter barrel 21, the vibrator is started to vibrate the filter barrel 21, and while vibrating and filtering, the impurities in the filter mesh holes and on the surface of the filter mesh of the filter barrel 21 are shaken off.

[0159] The cleaning operation step includes:

[0160] The vibrator is turned off, the clamping mechanism 70 releases the filter barrel 21, and the first clutch 50 is restored to transmit the power output by the drive assembly 40 to the filter barrel 21; the filter barrel 21 is driven to rotate intermittently, and the air nozzle 95 is driven to move back and forth along the blowing channel 91 and blow air toward the filter net through the air nozzle 95; the chip suction pipe 31 is driven to move back and forth along the axial direction of the filter barrel 21 to extract impurities in the filter barrel 21.

[0161] In an optional specific embodiment, during the time period when the filter barrel 21 stops rotating, the driving air nozzle moves back and forth at least once along the blowing channel. More specifically, after the filter barrel 21 rotates at an angle a, it stops for a time t. During the time t, the driving air nozzle moves back and forth at least once along the blowing channel. The specific angle value of a and the specific time length value of t can be set according to actual needs.

[0162] The above technical solution can be used to clean all parts of the filter barrel 21.

[0163] It should be emphasized here that the operating condition of the second clutch 100 is the same as the operating condition of the first clutch 50 .

[0164] The polishing liquid purification method also includes a temperature adjustment step and a concentration adjustment step. Specifically, the filtered polishing liquid is sent to a temperature adjustment liquid storage tank, the temperature of the polishing liquid is adjusted by an ice machine, and then sent to a clean liquid temporary storage tank, the concentration of the polishing liquid in the clean liquid temporary storage tank is detected by a concentration detector, and the concentration of the polishing liquid in the clean liquid temporary storage tank is adjusted by the liquid adding component, and the polishing liquid is sent to the workbench when the temperature and concentration meet the standards.

[0165] If the temperature of the polishing liquid does not meet the standard, it will be adjusted by the ice machine. If the concentration of the polishing liquid does not meet the standard, water or high-concentration polishing liquid will be injected into the clean liquid temporary storage tank.

[0166] The preferred embodiments of the present invention are described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, a variety of simple modifications can be made to the technical solution of the present invention, and these simple modifications all belong to the protection scope of the present invention.

[0167] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.

[0168] In addition, various embodiments of the present invention may be arbitrarily combined, and as long as they do not violate the concept of the present invention, they should also be regarded as the contents disclosed by the present invention.

Claims

1. A filter bucket module, characterized in that, The filter bucket module includes: a support base (10); a filter bucket assembly (20), including a filter bucket (21) rotatably connected to the support base (10) at both ends and a hollow rotating shaft (22) coaxially arranged with the filter bucket (21); a liquid supply assembly for supplying liquid into the filter bucket (21); a chip suction assembly, including a chip suction pipe (31) partially extending into the filter bucket (21) along the axis of the filter bucket (21), a chip suction head (32) located inside the filter bucket (21) and communicating with the chip suction pipe (31) and facing the filter net of the filter bucket (21), and a chip suction pump for extracting impurities in the filter bucket (21) out of the filter bucket (21); a driving assembly (40) for driving the filter bucket (21) to rotate and driving the chip suction pipe (31) to move back and forth along the axis of the filter bucket (21), so that the chip suction head (32) can adsorb impurities located at various places of the filter net; a first clutch (50) arranged between one end of the hollow rotating shaft (22) facing the filter bucket (21) and one end of the filter bucket (21) facing the hollow rotating shaft (22); the first clutch (50) is used to cut off or transmit the power output by the driving assembly (40) to the filter bucket (21); the hollow rotating shaft (22) is rotatably connected to the support base (10), and one end thereof is fixedly connected to the first clutch (50); the chip suction pipe (31) passes through the hollow rotating shaft (22) along the axis of the hollow rotating shaft (22) and extends into the filter bucket (21); a vibrator arranged on the outer wall of the filter bucket (21); a plurality of the chip suction heads (32) are spaced apart in the axial and circumferential directions of the chip suction pipe (31); the chip suction heads (32) are arranged in two rows, and the two rows of chip suction pipes (31) are oppositely arranged on the chip suction pipe (31); the first clutch (50) includes: a first main support disc (51) coaxially and fixedly sleeved on the hollow rotating shaft (22); a plurality of first guide holes (53) spaced apart along its circumferential direction are arranged on the first main support disc (51); a first chuck (52) coaxially arranged with the first main support disc (51); a plurality of first through holes (54) spaced apart along its circumferential direction and aligned with the first guide holes (53) are arranged on the first chuck (52); a first cover plate (55) with a first channel (55a) provided at its center for the chip suction pipe (31) to pass through; the first cover plate (55) is hermetically connected to the filter bucket (21), and a plurality of first pin holes (55b) capable of being aligned with the first through holes (54) are arranged on the end surface of the first cover plate (55) facing the first chuck (52); a first plug pin (56) simultaneously passing through the first guide hole (53) and the first through hole (54), slidably connected to the first guide hole (53), and fixedly connected to the first through hole (54); The first driving part (57) is used to drive the first chuck (52) to move towards or away from the first cover plate (55), so that the first bolt (56) can be inserted into or pulled out of the first pin hole (55b); a first guiding and limiting wheel (58) is arranged on the telescopic end of the first driving part (57), and the first guiding and limiting wheel (58) is located on the two end faces of the first chuck (52) and is in rolling connection with the two end faces.

2. The filter bucket module according to claim 1, characterized in that, The driving assembly includes: A transmission motor (41); A first gear (42), fixedly and coaxially sleeved on the motor rotating shaft of the transmission motor (41), A second gear (43), fixedly and coaxially sleeved on the hollow rotating shaft (22), and meshed with the first gear (42); A lead screw nut, fixedly connected with the hollow rotating shaft (22) or the second gear (43), sleeved outside the chip suction pipe (31) and connected with a thread groove arranged on the outer circumferential wall of the chip suction pipe (31); the lead screw nut and the chip suction pipe (31) form a reciprocating lead screw.

3. The filter bucket module according to claim 2, characterized in that, The transmission motor (41) is a servo motor.

4. The filter bucket module according to claim 1, characterized in that, One end of the first bolt (56) facing the first cover plate (55) is of a conical structure.

5. The filter bucket module according to claim 1, characterized in that, The liquid supply assembly (60) includes: A liquid supply channel (61), fixedly connected with the support seat (10); A valve, arranged at the liquid supply channel (61) and used to connect or cut off the liquid supply channel (61) to allow or prohibit a liquid medium from entering the filter barrel (21).

6. The filter bucket module according to claim 5, characterized in that, The filter barrel module further includes a second clutch (100) arranged at the other end of the filter barrel (21); the second clutch (100) is used to engage or cut off the rotation of the filter barrel (21) and the support seat (10); The second clutch (100) includes: A second main support disk (101), sleeved on the liquid supply channel (61) and rotatably connected with the liquid supply channel (61); A plurality of second guiding holes (102) are arranged on the second main support disk (101) at intervals along its circumference; A second chuck (103), coaxially arranged with the second main support disk (101); a plurality of second through holes (104) are arranged on the second chuck (103) at intervals along its circumference and aligned with the second guiding holes (102); A second cover plate (105), hermetically connected with the filter barrel (21), and a second channel is arranged at its center; a plurality of second pin holes capable of being aligned with the second through holes (104) are arranged on the end face of the second cover plate (105) facing the second chuck (103); A second bolt (106), passing through the second guiding holes (102) and the second through holes (104) at the same time, slidably connected with the second guiding holes (102) and fixedly connected with the second through holes (104); A second driving part (107) for driving the second chuck (103) to move towards or away from the second cover plate (105) so that the second plug pin (106) can be inserted into or pulled out of the second pin hole; second guiding and limiting wheels (108) which are arranged on the telescopic end of the second driving part (107) and are in rolling connection with the two side end faces of the second chuck (103).

7. The filter barrel module according to claim 6, wherein One end of the second plug pin facing the second cover plate (105) is of a conical structure.

8. The filter barrel module according to claim 1, wherein: The filter barrel module further includes a clamping mechanism (70); the clamping mechanism (70) includes: An arc-shaped clamping plate (71) whose concave part faces the filter barrel (21) and is adapted to the circumferential shape of the filter barrel (21); A second driving part whose telescopic end is fixedly connected with the arc-shaped clamping plate (71) and is used for driving the arc-shaped clamping plate (71) to move towards or away from the filter barrel (21) so as to clamp or loosen the filter barrel (21).

9. A polishing liquid filter, characterized in that The polishing liquid filter includes: At least two filter barrel modules as described in claim 8; A liquid inlet main pipe which is simultaneously communicated with the liquid supply channels (61) of at least two filter barrel modules; A clean liquid temporary storage tank (80) which is arranged at the bottom of the filter barrel (21) and is used for storing the liquid medium flowing out of the filter barrel (21); A back blowing module for generating high-pressure gas and blowing air towards the outer wall of the filter barrel (21); A liquid supply pump which is connected with the liquid inlet main pipe and is used for pumping the liquid medium into the filter barrel (21).

10. The polishing liquid filter according to claim 9, wherein A stirrer is arranged in the clean liquid temporary storage tank (80).

11. The polishing liquid filter according to claim 9, wherein The back blowing module includes: A blowing channel (91) which is formed on a cover body (92) covering the filter barrel module, extends along the axial direction of the filter barrel (21) and is substantially the same as the length of the filter barrel (21); Slide rails (93) which are distributed along the length direction of the blowing channel (91); A slide seat (94) which is adapted to the slide rails (93) and can slide on the slide rails (93); A driving motor for driving the slide seat (94) to slide back and forth along the length direction of the slide rails (93); A blow pipe whose one end is connected with a blowing pump and the other end is provided with a nozzle (95); the nozzle (95) is arranged on the slide seat (94) and faces the blowing channel (91); Driven by the driving motor, the nozzle (95) can be driven to slide back and forth along the length direction of the blowing channel (91).

12. The polishing liquid filter according to claim 9, wherein The back blowing module includes: A blowing channel (91) which is formed on a cover body (92) covering the filter barrel module, extends along the axial direction of the filter barrel (21) and is substantially the same as the length of the filter barrel (21); Slide rails (93) which are distributed along the length direction of the blowing channel (91); A slide seat (94) which is adapted to the slide rails (93) and can slide on the slide rails (93); A driving motor for driving the slide seat (94) to slide back and forth along the length direction of the slide rails (93); A gear (96) which is coaxially and fixedly connected with the output shaft of the driving motor; A toothed belt (97) that meshes with the gear (96); A blowpipe, one end of which is connected to a blowing pump and the other end is provided with a nozzle (95); the nozzle (95) is arranged on the sliding seat (94) and faces the blowing channel (91); Driven by the driving motor, it can drive the nozzle (95) to slide back and forth along the length direction of the blowing channel (91).

13. A polishing liquid purification system, characterized in that The polishing liquid purification system includes: The polishing liquid filter as described in any one of claims 9 - 12; A polishing liquid temperature adjustment component for adjusting the temperature of the polishing liquid flowing into the purified liquid temporary storage tank (80) or adjusting the temperature of the polishing liquid in the purified liquid temporary storage tank (80); the polishing liquid temperature adjustment component includes a temperature adjustment storage tank and an ice machine that circulates liquid with the temperature adjustment storage tank; A temperature detector for detecting the temperature of the polishing liquid in the purified liquid temporary storage tank (80); A concentration detector for detecting the concentration of the polishing liquid in the purified liquid temporary storage tank (80); A liquid adding component, including a liquid adding pipeline and a liquid adding pump for pumping a liquid medium into the purified liquid temporary storage tank (80) through the liquid adding pipeline to adjust the concentration of the polishing liquid in the purified liquid temporary storage tank (80).

14. The polishing liquid purification system according to claim 13, wherein The polishing liquid purification system further includes a constant pressure liquid supply pump for sending out the polishing liquid in the purified liquid temporary storage tank (80).

15. The polishing liquid purification system according to claim 13, wherein The polishing liquid purification system further includes a polishing liquid return liquid pool for storing polishing waste liquid and a pneumatic diaphragm pump for sending the polishing waste liquid in the polishing liquid return liquid pool into the filter barrel (21).

16. A polishing liquid purification method based on the polishing liquid filter according to claim 11, wherein At least two filter barrel modules alternately perform the polishing liquid filtering operation steps and perform impurity cleaning operation steps on the filter barrel (21) in a non - operating state; The polishing liquid filtering operation steps include: Cut off the power output from the driving component (40) to the filter barrel (21) through the first clutch (50); the clamping mechanism (70) clamps the filter barrel (21); send polishing waste liquid into the filter barrel (21), start the vibrator to vibrate the filter barrel (21), and while vibrating and filtering, shake off the impurities in the filter mesh holes and on the surface of the filter mesh of the filter barrel (21); The cleaning operation steps include: Turn off the vibrator, the clamping mechanism (70) releases the filter barrel (21), and restore the first clutch (50) to transmit the power output from the driving component (40) to the filter barrel (21); intermittently drive the filter barrel (21) to rotate, at the same time drive the nozzle (95) to reciprocate along the blowing channel (91) and blow air towards the filter mesh through the nozzle (95); drive the chip suction pipe (31) to move back and forth along the axial direction of the filter barrel (21) to extract the impurities in the filter barrel (21).

17. The polishing liquid purification method according to claim 16, wherein During the period when the filter barrel (21) stops rotating, drive the nozzle (95) to reciprocate along the blowing channel (91) at least once.

Images