An anti-oxidation system and a horizontal continuous electroplating production line

Abstract

This invention provides an antioxidant system and a horizontal continuous electroplating production line, belonging to the field of electroplating technology. The system includes: a solution tank containing an antioxidant solution; charged rollers positioned before the inlet of the solution tank, through which the substrate horizontally enters the solution tank; and an anode titanium mesh spanning the solution tank, with at least one set positioned above and below the substrate. The antioxidant system provided by this invention uses charged rollers positioned before the inlet of the solution tank. These charged rollers contact the substrate, causing it to become charged before entering the solution tank. This charging process forms a protective layer within the antioxidant solution, completing the antioxidant process. This process eliminates the need to heat the antioxidant solution, thus reducing energy consumption.

Description

Technical Field

[0001] The invention relates to the technical field of electroplating, and in particular to an anti-oxidation system and a horizontal continuous electroplating production line. Background Art

[0002] After copper plating on the substrate, the copper layer on the substrate needs to be treated for anti-oxidation.

[0003] In the prior art, the method for anti-oxidation is: in a special anti-oxidation system, an organic solvent is used to perform an anti-oxidation treatment on the substrate, and then water washing and blow drying are performed.

[0004] However, when using existing technical solutions for antioxidant treatment, the need to heat the organic solvent leads to a serious problem of energy waste. Summary of the invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the problem of large energy waste when the antioxidant system in the prior art performs antioxidant treatment, thereby providing an antioxidant system and a horizontal continuous electroplating production line.

[0006] In order to solve the above technical problems, the present invention provides an antioxidant system, comprising:

[0007] A solution tank having an antioxidant solution therein;

[0008] A charged roller is arranged before the inlet of the solution tank, and the substrate enters the solution tank horizontally after passing through the charged roller;

[0009] An anode titanium mesh is arranged across the solution tank, and at least one group is arranged above and below the substrate respectively;

[0010] An upper rubber-coated roller is arranged inside the solution tank, and its contact surface is located above the substrate;

[0011] A lower rubber-coated roller is arranged inside the solution tank, and its contact surface is located below the substrate;

[0012] The water squeezing wheel group is arranged behind the outlet of the solution tank, and the squeezing surface of the water squeezing wheel group is higher than the height of the contact surface between the upper rubber-coated roller and the lower rubber-coated roller.

[0013] Optionally, a first upper rubber-coated roller and a first lower rubber-coated roller are arranged adjacent to each other at the inlet of the solution tank.

[0014] Optionally, a second upper rubber-coated roller and a second lower rubber-coated roller are arranged adjacent to each other at the outlet of the solution tank.

[0015] Optionally, the water squeezing wheel assembly comprises: a rigid wheel and a flexible wheel located above the rigid wheel, and an extrusion surface for extruding the substrate is formed between the rigid wheel and the flexible wheel.

[0016] Optionally, at least one set of a third upper rubber-coated roller and a third lower rubber-coated roller adjacent to each other are arranged inside the solution tank between the inlet and the outlet.

[0017] Optionally, a support roller is arranged between the first upper rubber-coated roller and the first lower rubber-coated roller, and a contact surface of the support roller is located above a contact surface of the first upper rubber-coated roller and the first lower rubber-coated roller.

[0018] Optionally, the supporting roller is a rubber-coated roller.

[0019] Optionally, the charged rollers have two groups arranged in sequence, wherein the contact surface of the first charged roller is located above the substrate, the second charged roller is located between the first charged roller and the support roller, the contact surface of the second charged roller is located below the substrate, and the contact surface of the second charged roller is located above the line between the contact surfaces of the first charged roller and the support roller.

[0020] The present invention also provides a horizontal continuous electroplating production line, comprising: a copper plating system, a water washing system, an anti-oxidation system described in any one of the above schemes, and an air drying system, which are arranged in sequence.

[0021] Optionally, it further comprises: a pre-plating system, which is arranged before the copper plating system and is used to pre-plating a layer of copper on the substrate.

[0022] The technical solution of the present invention has the following advantages:

[0023] 1. The antioxidant system provided by the present invention is provided with a charged roller before the inlet of the solution tank. The charged roller contacts the substrate, so that the substrate is charged and enters the solution tank, thereby forming a protective layer after being charged in the antioxidant solution to complete the antioxidant process. Through this process, there is no need to heat the antioxidant solution, thereby reducing energy consumption.

[0024] 2. In the antioxidant system provided by the present invention, the anode titanium mesh is arranged across the solution tank, which can fully charge the upper and lower surfaces of the substrate, thereby fully protecting the substrate.

[0025] 3. The horizontal continuous electroplating production line provided by the present invention includes a pre-plating system, through which a thin copper layer can be pre-plated on the surface of the substrate before the substrate is formally electroplated, thereby protecting the substrate.

[0026] 4. In the horizontal continuous electroplating production line provided by the present invention, the substrate enters the copper plating system after passing through the anti-oxidation system. In the anti-oxidation system, a thicker layer of copper base is plated on both sides of the substrate. In the copper plating system, both sides of the substrate are respectively connected to the electroplating clamps for horizontal transportation. The electroplating clamps are clamped on the thicker copper base of the substrate to avoid damage to the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 This is a front view of an implementation manner of the antioxidant system provided in an embodiment of the present invention.

[0029] Description of reference numerals:

[0030] 1. Solution tank; 2. First upper rubber-coated roller; 3. First lower rubber-coated roller; 4. Support roller; 5. First charged roller; 6. Second charged roller; 7. Base material; 8. Anode titanium mesh; 10. Second upper rubber-coated roller; 11. Second lower rubber-coated roller; 12. Rigid wheel; 13. Silicone wheel; 14. Third upper rubber-coated roller; 15. Third lower rubber-coated roller. DETAILED DESCRIPTION

[0031] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0035] This embodiment provides an anti-oxidation system for performing anti-oxidation protection on the copper-plated substrate 7. Specifically, the solution tank is charged to perform anti-oxidation protection in the solution tank.

[0036] like Figure 1 As shown, a specific implementation of the antioxidant system provided in this embodiment includes: a solution tank 1, wherein the solution tank 1 has an antioxidant solution inside, which can be used to perform antioxidant treatment on the copper-plated substrate 7. A charging roller is provided before the inlet of the solution tank 1, and the substrate 7 enters the solution tank 1 horizontally after passing through the charging roller, so that the substrate 7 is charged before entering the solution tank 1, and antioxidant treatment is performed in the antioxidant solution by charging.

[0037] like Figure 1 As shown, an anode titanium mesh 8 is arranged across the solution tank 1, and at least one group of the anode titanium mesh 8 is respectively arranged above and below the substrate 7. The anode titanium mesh 8 is used to cooperate with the upper and lower sides of the substrate respectively, thereby achieving anti-oxidation of both the upper and lower sides of the substrate.

[0038] like Figure 1 As shown, an upper rubber-coated roller and a lower rubber-coated roller are provided inside the solution tank 1, and the contact surface of the upper rubber-coated roller is located above the substrate 7, and the contact surface of the lower rubber-coated roller is located below the substrate 7. The upper rubber-coated roller and the lower rubber-coated roller are provided so that the substrate can be flattened in the solution tank 1; a water squeezing wheel group is provided after the outlet of the solution tank 1, and the extrusion surface of the water squeezing wheel group is higher than the height of the contact surface between the upper rubber-coated roller and the lower rubber-coated roller. The water squeezing wheel group is used to remove residual water from the substrate. In addition, the extrusion surface of the water squeezing wheel group is set higher, which can improve the rubber coating of the substrate on the water squeezing wheel group, thereby improving the water squeezing effect.

[0039] The antioxidant system provided in this embodiment is equipped with a charged roller before the inlet of the solution tank. The charged roller contacts the substrate, so that the substrate is charged and enters the solution tank, thereby forming a protective layer after being charged in the antioxidant solution to complete the antioxidant process. Through this process, there is no need to heat the antioxidant solution, thereby reducing energy consumption.

[0040] like Figure 1 As shown, in the antioxidant system provided in this embodiment, the interior of the solution tank 1 is provided with a first upper rubber-coated roller 2 and a first lower rubber-coated roller 3 adjacent to each other up and down at the inlet. The cooperation of the first upper rubber-coated roller 2 and the first lower rubber-coated roller 3 is used to tension the substrate to prevent the substrate from falling in the middle, thereby ensuring the indirect connection between the substrate and the upper anode titanium mesh 8 and the lower anode titanium mesh 8, respectively, to ensure the antioxidant effect.

[0041] like Figure 1 As shown, in the antioxidant system provided in this embodiment, a second upper rubber-coated roller 10 and a second lower rubber-coated roller 11 are arranged at the outlet of the solution tank 1. The cooperation of the second upper rubber-coated roller 10 and the second lower rubber-coated roller 11 is used to tension the substrate to prevent the substrate from falling in the middle, thereby ensuring the indirect connection between the substrate and the upper anode titanium mesh 8 and the lower anode titanium mesh 8, respectively, to ensure the antioxidant effect.

[0042] like Figure 1 As shown, the antioxidant system provided in this embodiment also includes: a water squeezing wheel group, the water squeezing wheel group is arranged after the outlet of the solution tank 1, and the extrusion surface of the water squeezing wheel group is higher than the height of the contact surface between the second upper rubber-coated roller 10 and the second lower rubber-coated roller 11. Specifically, the water squeezing wheel group includes: a rigid wheel 12 with a larger diameter and a silicone wheel 13 that is extruded and matched above the rigid wheel 12, the diameter of the silicone wheel 13 is smaller than the diameter of the rigid wheel 12, and when the substrate passes between the silicone wheel 13 and the rigid wheel 12, the residual water on the substrate is squeezed out by the extrusion of the silicone wheel 13, thereby improving the efficiency of subsequent air drying. In addition, the cooperation of the rigid wheel 12 and the silicone wheel 13 can avoid the problem of fine lines on the substrate.

[0043] like Figure 1 As shown, in the antioxidant system provided in this embodiment, at least one group of third upper rubber-coated rollers 14 and third lower rubber-coated rollers 15 adjacent to each other are arranged inside the solution tank 1 between the inlet and the outlet. The third upper rubber-coated rollers 14 and the third lower rubber-coated rollers 15 are used to further tension the substrate to prevent the substrate from falling in the middle, thereby ensuring the indirect connection between the substrate and the upper anode titanium mesh 8 and the lower anode titanium mesh 8, respectively, to ensure the antioxidant effect.

[0044] like Figure 1As shown, in the anti-oxidation system provided by this embodiment, a support roller 4 is arranged between the first upper rubber-coated roller 2 and the first lower rubber-coated roller 3, and the contact surface of the support roller 4 is located above the contact surface of the first upper rubber-coated roller 2 and the first lower rubber-coated roller 3; through the arrangement of the support roller 4, the substrate can be raised, thereby increasing the contact surface between the substrate and the silicone wheel 13, and increasing the friction between the substrate and the silicone wheel 13. Furthermore, the support roller 4 can also be arranged as a rubber-coated roller, thereby increasing the friction with the substrate.

[0045] like Figure 1 As shown, in the antioxidant system provided by this embodiment, the charged rollers have two groups arranged in sequence, wherein the contact surface of the first charged roller 5 is located above the substrate 7, the second charged roller 6 is located between the first charged roller 5 and the support roller 4, the contact surface of the second charged roller 6 is located below the substrate 7, and the contact surface of the second charged roller 6 is located above the line between the contact surfaces of the first charged roller 5 and the support roller 4. By arranging the first charged roller 5 and the second charged roller 6, both the upper and lower surfaces of the substrate 7 are charged, so that both the upper and lower surfaces of the substrate 7 can be antioxidant in the antioxidant liquid. In addition, by arranging the first charged roller 5 and the second charged roller 6 in an upper and lower staggered manner, the friction between the substrate 7 and the rollers can be increased, the tension of the substrate 7 can be increased, and the surface of the substrate 7 can be smoother.

[0046] This embodiment also provides a horizontal continuous electroplating production line, including: a copper plating system, a water washing system, an anti-oxidation system and an air drying system arranged in sequence. The substrate is copper plated by the copper plating system, then the surface is washed by water by the water washing system, then anti-oxidation is performed by the anti-oxidation system, and finally the surface of the substrate is air dried by the air drying system; because the anti-oxidation is charged in the anti-oxidation system, the water washing after the anti-oxidation is omitted, thereby saving the process flow.

[0047] In addition, the horizontal continuous electroplating production line provided in this embodiment also includes: a pre-plating system, which is arranged before the copper plating system, and is used to pre-plating a layer of copper base on the substrate 7. Specifically, the pre-plating system is provided with a plating solution, and after the substrate is charged, it passes through the plating solution in the pre-plating system, and a copper layer can be formed on the surface of the substrate. In addition, the substrate can be charged before the pre-plating system, so that the substrate can be electroplated after entering the plating solution, avoiding the problem of corrosion of the non-charged substrate by the plating solution.

[0048] Obviously, the above embodiments are merely examples for clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the present invention.

Claims

1. An antioxidant system, characterized in that: include: A solution tank (1) having an antioxidant solution therein; A charged roller is arranged before the inlet of the solution tank (1), and the substrate (7) enters the solution tank (1) horizontally after passing through the charged roller; An anode titanium mesh is arranged across the solution tank (1), and at least one group is arranged above and below the substrate (7); An upper rubber-coated roller is arranged inside the solution tank (1), and its contact surface is located above the substrate (7); A lower rubber-coated roller, arranged inside the solution tank (1), with its contact surface located below the substrate (7); A water squeezing wheel group is arranged behind the outlet of the solution tank (1), and the squeezing surface of the water squeezing wheel group is higher than the height of the contact surface between the upper rubber-coated roller and the lower rubber-coated roller; The water squeezing wheel group comprises: a rigid wheel (13) and a flexible wheel located above the rigid wheel (13); an extrusion surface for extruding a base material (7) is formed between the rigid wheel (13) and the flexible wheel.

2. The antioxidant system according to claim 1, characterized in that: Inside the solution tank (1), a first upper rubber-coated roller (2) and a first lower rubber-coated roller (3) are arranged at the inlet, adjacent to each other vertically.

3. The antioxidant system according to claim 2, characterized in that: A second upper rubber-coated roller and a second lower rubber-coated roller are arranged adjacent to each other at the outlet of the solution tank (1).

4. The antioxidant system according to claim 3, characterized in that: At least one set of a third upper rubber-coated roller and a third lower rubber-coated roller are arranged vertically and closely together inside the solution tank (1) between the inlet and the outlet.

5. The antioxidant system according to claim 2, characterized in that: A support roller (4) is arranged between the first upper rubber-coated roller (2) and the first lower rubber-coated roller (3), and a contact surface of the support roller (4) is located above the contact surface of the first upper rubber-coated roller (2) and the first lower rubber-coated roller (3).

6. The antioxidant system according to claim 5, characterized in that: The supporting roller (4) is a rubber-coated roller.

7. The antioxidant system according to claim 5 or 6, characterized in that: The charged rollers have two groups arranged in sequence, wherein the contact surface of the first charged roller (5) is located above the substrate (7), the second charged roller (6) is located between the first charged roller (5) and the supporting roller (4), the contact surface of the second charged roller (6) is located below the substrate (7), and the contact surface of the second charged roller (6) is located above the line connecting the contact surfaces of the first charged roller (5) and the supporting roller (4).

8. A horizontal continuous electroplating production line, characterized in that: The invention comprises: a copper plating system, a water washing system, an anti-oxidation system according to any one of claims 1 to 7, and an air drying system which are arranged in sequence.

9. The horizontal continuous electroplating production line according to claim 8, characterized in that: Also includes: A pre-plating system is provided before the copper plating system, and is used to pre-plating a layer of copper base on the substrate (7).

Images