Automatic polishing cloth brushing device and method

Abstract

The application discloses a kind of automatic polishing cloth washing device and method, it is related to polishing cloth washing technical field, including base, base is equipped with first mounting bracket, first mounting bracket is equipped with control box, first mounting bracket is equipped with hydraulic lifting rod, hydraulic lifting rod is equipped with telescopic column, fixed shaft is equipped with rotary seat, rotary seat is equipped with extension rod, extension rod is equipped with arc frame, telescopic column is equipped with first motor, first motor is equipped with with arc frame matched bevel gear, rotary seat is equipped with rotary groove, rotary groove is equipped with electric telescopic rod, electric telescopic rod is equipped with mechanical arm, electric telescopic rod outer wall is equipped with bevel gear ring, second motor is equipped with with bevel gear ring meshing bevel gear, mechanical arm is equipped with double-shaft motor, double-shaft motor is equipped with disc hard brush, abrasive wheel.The application realizes the cleaning function of automatic hard brush, can effectively improve cleaning effect, increase process stability, while, will not bring the growth of labor cost, is suitable for promotion.

Description

Technical Field

[0001] This invention belongs to the field of polishing cloth brushing technology, specifically relating to an automatic polishing cloth brushing device and method. Background Technology

[0002] Chemical mechanical polishing (CMP) involves applying a fixed flow rate of chemical solution while simultaneously applying pressure and rotation to the substrate to achieve both mechanical and chemical polishing effects. The polishing cloth, serving as the carrier material for the chemical solution, has a porous structure and roughness that are key factors influencing the amount of polishing achieved on the wafer substrate. The polishing cloth is typically attached to the surface of a circular disk and rotates around a fixed center. The wafer, pressed against the polishing cloth and subjected to rotation, achieves wafer thinning, removal of surface impurities and defects, and ultimately, low surface roughness and high planarization of the wafer surface.

[0003] Since the main component of the polishing slurry is nano-sized silica sol particles, it is prone to precipitation and crystallization during use, clogging the porous structure of the polishing cloth. This continuously reduces the cloth's liquid absorption and retention capacity. Furthermore, rapid crystallization on the surface makes the cloth smooth, gradually diminishing its surface roughness and significantly impacting the grinding output. Therefore, maintaining the roughness and stable, porous structure of the polishing cloth during the polishing process is a crucial factor that must be controlled in chemical mechanical polishing.

[0004] The two methods currently used are as follows:

[0005] 1. After polishing each batch of products, the integrated automatic cleaning water gun arm of the equipment swings back and forth on the polishing disc, while the disc rotates at a high speed. The water gun inside the arm uses high-pressure pure water with an adjustable pressure of 5Mpa~15Mpa to rinse the surface of the polishing cloth during the interval between the completion of each batch of products.

[0006] 2. The single-sided polishing equipment is equipped with a stiff-bristled disc brush of the same size as the polishing head. The disc brush needs to be manually loaded. By setting the corresponding brushing program, the polishing head is lowered and the disc brush is pressed with high pressure, which drives the brush itself to rotate. At the same time, the fixed disc rotates at a high speed to clean the disc surface. After cleaning, the disc brush is manually unloaded.

[0007] Due to design flaws in existing equipment, high-pressure water guns struggle to clean stubborn crystalline stains deep within the polishing cloth. Instead, the high pressure of the water gun often forces the crystalline material deeper into the cloth, causing further buildup. While stiff-bristled brushes offer powerful cleaning, they require manual loading and unloading, increasing workload and labor costs.

[0008] To address this problem, this invention designs an automatic polishing cloth brushing device, which realizes the automatic cleaning function of hard bristles, effectively improving the cleaning effect and increasing process stability without increasing labor costs. Summary of the Invention

[0009] The purpose of this invention is to provide an automatic polishing cloth brushing device and method, which realizes the cleaning function of automatic hard bristle brush, can effectively improve the cleaning effect, increase the stability of the process, and does not bring about an increase in labor costs, making it suitable for widespread application.

[0010] This invention provides the following technical solution: an automatic polishing cloth brushing device, comprising a base, a first mounting frame fixedly mounted on the upper end of the base by bolt connection, a control box fixedly mounted on the outside of the first mounting frame, a hydraulic lifting rod mounted inside the first mounting frame, a telescopic column fixedly mounted on the output end of the hydraulic lifting rod, a first clamping groove provided at the through-hole of the telescopic column on the first mounting frame, a fixed shaft fixedly mounted on the top end of the telescopic column; a rotating seat sleeved on the fixed shaft, an extension rod fixedly mounted on the rear end of the rotating seat, an arc-shaped frame fixedly mounted on the top end of the extension rod via a connecting frame, a second mounting frame fixedly mounted on the side of the telescopic column below the extension rod, a first motor fixedly mounted on the second mounting frame, and a matching arc-shaped frame fixedly mounted on the output end of the first motor. The rotating seat has a slanted gear; a rotating groove is fixedly provided at the front end of the rotating seat, and an electric telescopic rod is provided in the rotating groove through a retaining ring. The rotating seat has symmetrical second clamping grooves fixed on both sides of the rotating groove. A mechanical arm is fixedly provided at the output end of the electric telescopic rod. The clamping part of the second clamping groove is sleeved on the mechanical arm and slidably connected to it. A helical gear ring is fixedly provided on the outer wall of the electric telescopic rod. A second motor is fixedly provided below the rotating groove through a bracket. A helical gear that meshes with the helical gear ring is fixedly provided at the output end of the second motor. A third mounting bracket is fixedly provided at the end of the mechanical arm away from the electric telescopic rod. A dual-axis motor is fixedly provided on the third mounting bracket. A disc hard brush is fixedly provided on one output shaft of the dual-axis motor. A grinding wheel is fixedly provided on the other output shaft of the dual-axis motor.

[0011] Preferably, the third mounting bracket extends above the wafer polishing mechanism, a polishing cloth is fixedly provided on the polishing disc of the wafer polishing mechanism, the movement trajectory of the disc hard bristle brush and the grinding wheel satisfies the area covering the polishing cloth, the wafer polishing mechanism is fixedly provided with a retaining ring surrounding the grinding wheel, and the grinding wheel is fixedly connected to a lifting mechanism.

[0012] Preferably, the arc-shaped frame is a segment of a ring with a fixed shaft as the center point, and a drive tooth pattern is fixedly provided on the outer side of the arc-shaped frame, which meshes with a flat gear.

[0013] Preferably, the output end of the second motor has a locking mechanism that locks when the dual-axis motor is perpendicular to the polishing disc.

[0014] Preferably, the control box is equipped with an automatic control system, which controls a hydraulic lifting rod, an electric telescopic rod, a first motor, a second motor, and a dual-axis motor via electrical signals. The control box is connected to the processing machine via processing digital signals.

[0015] To further address the aforementioned technical problems, this invention also proposes an automatic brushing method for polishing cloths, comprising the following steps:

[0016] Step 1: When it is necessary to clean the polishing cloth, the control box sends a control signal, the hydraulic lifting rod operates, the robotic arm is lifted up, and the grinding wheel leaves the polishing disc;

[0017] Step 2: The locking mechanism on the second motor opens, the second motor runs, the helical gear rotates, and the helical gear ring rotates through the toothed drive, causing the electric telescopic rod, the entire robotic arm, and the third mounting frame to rotate. After rotating half a revolution, it stops, and the locking mechanism locks.

[0018] Step 3: The hydraulic lifting rod is pressed down until the disc hard brush contacts the polishing cloth, the dual-axis motor runs, and the disc hard brush rotates to brush the polishing cloth;

[0019] Step 4: The robotic arm starts from the edge of the polishing disc, and through the operation of the first motor, drives the arc frame to rotate around the fixed axis. The robotic arm swings around the radius of the arm length, swinging to the center of the polishing disc and then returning to the edge of the polishing disc. During this process, the electric telescopic rod extends and retracts according to the position cleaned by the hard brush on the disc, and the number of round-trip brushing cycles can be set as needed.

[0020] Step 5: After the brushing is completed, the robotic arm and hydraulic lifting rod return to their initial positions. The third mounting bracket rotates half a turn to align the grinding wheel with the polishing disc and sends a processing digital signal again, so that the processing machine can sense that the brushing is complete.

[0021] The beneficial effects of this invention are as follows: It enables automatic cleaning with stiff bristles, effectively improving cleaning results and increasing process stability without increasing labor costs.

[0022] (1) The present invention is equipped with a control box. When cleaning the polishing cloth, the control box controls the hydraulic lifting rod to raise the mechanical arm, the second motor controls the third mounting frame to flip, so that the polishing disc is switched to a disc hard brush. The mechanical arm swings through the first motor and the electric telescopic rod controls the length of the mechanical arm. The mechanical arm swings with the arm length as the radius. After swinging to the center position of the polishing disc, it returns to the edge position of the polishing disc. The number of back-and-forth brushing can be set as needed to achieve automatic brushing.

[0023] (2) The present invention is equipped with a dual-axis motor. The grinding wheel used for grinding wafers is driven by the dual-axis motor. When grinding is performed by the grinding wheel, one end of the mechanical arm that applies pressure is limited by the rotating groove. At the same time, it is tightly connected to the mechanical arm through the second clamping groove. The first clamping groove is tightly connected to the telescopic column, so that the whole structure remains stable and the grinding wheel does not shake. The dual-axis motor can drive the disc hard brush and the grinding wheel. When cleaning or grinding, the dual-axis motor can be flipped, thereby combining the driving mechanism for cleaning and the driving structure for grinding, making the structure simpler. Attached Figure Description

[0024] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0025] Figure 1 This is an overall schematic diagram of the present invention;

[0026] Figure 2 This is a cross-sectional view of the present invention;

[0027] Figure 3 This is an enlarged view of point A in the present invention;

[0028] Figure 4 This is an enlarged view of section B of the present invention;

[0029] Figure 5 This is a flowchart of the present invention;

[0030] The components in the diagram are labeled as follows: 1. Base; 2. First mounting bracket; 3. Control box; 4. Hydraulic lifting rod; 5. First clamping slot; 6. Telescopic column; 7. Rotating seat; 8. Extension rod; 9. Arc frame; 10. Second mounting bracket; 11. First motor; 12. Fixed shaft; 13. Electric telescopic rod; 14. Second clamping slot; 15. Robotic arm; 16. Second motor; 17. Third mounting bracket; 18. Dual-axis motor; 19. Disc hard brush; 20. Grinding wheel; 21. Wafer polishing mechanism; 22. Polishing disc; 23. Polishing cloth; 24. Flat gear; 25. Rotating slot; 26. Connecting frame; 27. Helical gear; 28. Drive tooth pattern; 29. ​​Helical gear ring; 30. Retaining ring. Detailed Implementation

[0031] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0032] In the description of this invention, it should be noted that the terms "upper," "lower," "inner," "outer," "top / bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "sleeved / connected," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0034] The structural features of the present invention will now be described in detail with reference to the accompanying drawings.

[0035] See Figure 1-2 An automatic polishing cloth brushing device includes a base 1. A first mounting frame 2 is fixedly mounted on the upper end of the base 1 by bolts. A control box 3 is fixedly mounted on the outside of the first mounting frame 2. A hydraulic lifting rod 4 is installed inside the first mounting frame 2. A telescopic column 6 is fixedly mounted on the output end of the hydraulic lifting rod 4. The telescopic column 6 is raised and lowered by the hydraulic lifting rod 4. A first clamping groove 5 is provided at the through-hole of the telescopic column 6 in the first mounting frame 2. The first clamping groove 5 is tightly connected to the telescopic column 6 to prevent the telescopic column 6 from tilting. A fixed shaft 12 is fixedly mounted on the top end of the telescopic column 6.

[0036] See Figure 1 , 3 A rotating seat 7 is fitted onto the fixed shaft 12. An extension rod 8 is fixedly mounted at the rear end of the rotating seat 7. An arc-shaped frame 9 is fixedly mounted at the top end of the extension rod 8 via a connecting frame 26. A second mounting frame 10 is fixedly mounted on the side of the telescopic column 6 below the extension rod 8. A first motor 11 is fixedly mounted on the second mounting frame 10. A spur gear 24 matching the arc-shaped frame 9 is fixedly mounted at the output end of the first motor 11. The first motor 11 drives the spur gear 24 to rotate, thereby driving the arc-shaped frame 9. The arc-shaped frame 9 is a segment of a ring with the fixed shaft 12 as the center point. A drive tooth 28 is fixedly mounted on the outer side of the arc-shaped frame 9. The drive tooth 28 meshes with the spur gear 24. When the arc-shaped frame 9 rotates around the fixed shaft 12, the robotic arm 15 at the other end can swing.

[0037] See Figure 2 ,4 The rotating seat 7 has a rotating groove 25 fixed at its front end. An electric telescopic rod 13 is installed in the rotating groove 25 through a retaining ring. The length of the robotic arm 15 is adjusted by the electric telescopic rod 13. The rotating seat 7 has symmetrical second clamping grooves 14 fixed on both sides of the rotating groove 25. The second clamping grooves 14 are tightly fitted with the robotic arm 15 to prevent it from shifting. The output end of the electric telescopic rod 13 is fixed with the robotic arm 15. The clamping part of the second clamping groove 14 is sleeved on the robotic arm 15 and slidably connected to it. A helical gear ring 29 is fixed on the outer wall of the electric telescopic rod 13. A second motor 16 is fixed below the rotating groove 25 through a bracket. The output end of the second motor 16 is fixed with a helical gear 27 that meshes with the helical gear ring 29. The helical gear ring 29 is driven by the helical gear 27. When the helical gear 27 rotates, the helical gear ring 29 rotates in the opposite direction to the helical gear 27. The output end of the second motor 16 has a locking mechanism. The locking mechanism locks when the dual-axis motor 18 is perpendicular to the polishing disc 22 to prevent the robotic arm 15 from deflecting during polishing and tilting.

[0038] See Figure 1-2 A third mounting bracket 17 is fixed at one end of the robotic arm 15 away from the electric telescopic rod 13. A dual-axis motor 18 is fixedly mounted on the third mounting bracket 17. A circular hard brush 19 is fixedly mounted on one output shaft of the dual-axis motor 18, and a grinding wheel 20 is fixedly mounted on the other output shaft of the dual-axis motor 18. The circular hard brush 19 and the grinding wheel 20 are driven by the dual-axis motor 18. The third mounting bracket 17 extends above the wafer polishing mechanism 21. A polishing cloth 23 is fixedly mounted on the polishing disc 22 of the wafer polishing mechanism 21. The movement trajectory of the circular hard brush 19 and the grinding wheel 20 is such that they cover the polishing cloth 23. A retaining ring 30 is fixedly mounted around the grinding wheel 20 to prevent liquid from splashing during cleaning or polishing. The grinding wheel 20 is fixedly connected to a lifting mechanism to lift the grinding wheel 20 and clean the inside of the retaining ring 30.

[0039] See Figure 1 The control box 3 is equipped with an automatic control system. The automatic control system controls the hydraulic lifting rod 4, the electric telescopic rod 13, the first motor 11, the second motor 16, and the dual-axis motor 18 via electrical signals. The control box 3 is connected to the processing machine via processing digital signals.

[0040] See Figure 5 To further illustrate this point, the present invention also proposes an automatic brushing method for polishing cloths, comprising the following steps:

[0041] Step 1: When it is necessary to clean the polishing cloth, the control box 3 sends a control signal, the hydraulic lifting rod 4 operates, the robotic arm 15 is lifted up, and the grinding wheel 20 leaves the polishing disc 22.

[0042] Step 2: The locking mechanism on the second motor 16 is opened, the second motor 16 runs, the helical gear 27 rotates, and the helical gear ring 29 is driven to rotate by the tooth pattern, so that the electric telescopic rod 13, the entire mechanical arm 15, and the third mounting frame 17 rotate. After rotating half a revolution, it stops and the locking mechanism locks.

[0043] Step 3: The hydraulic lifting rod 4 is pressed down until the disc hard brush 19 contacts the polishing cloth 23, the dual-axis motor 18 runs, and the disc hard brush 19 rotates to brush the polishing cloth 23.

[0044] Step 4: The robotic arm 15 moves from the edge of the polishing disc 22, driven by the operation of the first motor 11, to rotate the arc frame 9 around the fixed axis 12. The robotic arm 15 swings with its arm length as the radius, swinging to the center position of the polishing disc 22 and then returning to the edge position of the polishing disc 22. During this process, the electric telescopic rod 13 extends and retracts according to the cleaning position of the disc hard brush 19, and the number of reciprocating brushing cycles can be set as needed.

[0045] Step 5: After the brushing is completed, the robotic arm 15 and the hydraulic lifting rod 4 return to their initial positions. The third mounting bracket 17 rotates half a turn to align the grinding wheel 20 with the polishing disc 22 and sends a processing digital signal again, so that the processing machine can sense that the brushing is complete.

[0046] The automatic polishing cloth brushing device and method of the present invention realizes the cleaning function of automatic hard bristle brush, which can effectively improve the cleaning effect and increase the stability of the process without increasing labor costs, and is suitable for promotion.

[0047] For specific usage, please refer to... Figure 1-4 When polishing with the grinding wheel 20, one end of the robotic arm 15 applying pressure is limited by the rotating groove 25, and is tightly connected to the robotic arm 15 through the second clamping groove 14. The first clamping groove 5 is tightly connected to the telescopic column 6, so that the whole structure remains stable and the grinding wheel 20 does not shake. The dual-axis motor 18 can drive the disc hard brush 19 and the grinding wheel 20. When cleaning or polishing, the dual-axis motor 18 can be flipped. When cleaning the polishing cloth 23, the control box 3 controls the hydraulic lifting rod 4 to raise the robotic arm 15. The second motor 16 controls the third mounting bracket 17 to flip, so that the top of the polishing disc 22 is switched to the disc hard brush 19. The first motor 11 controls the robotic arm 15 to swing, and the electric telescopic rod 13 controls the length of the robotic arm 15. The robotic arm 15 swings with the arm length as the radius. After swinging to the center position of the polishing disc 22, it returns to the edge position of the polishing disc 22. The number of back-and-forth brushing can be set as needed for automatic cleaning.

[0048] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An automatic polishing cloth brushing device, comprising a base (1), characterized in that, The base (1) is fixedly provided with a first mounting bracket (2) by bolt connection at the upper end. A control box (3) is fixedly provided on the outside of the first mounting bracket (2). A hydraulic lifting rod (4) is installed inside the first mounting bracket (2). A telescopic column (6) is fixedly provided at the output end of the hydraulic lifting rod (4). A first clamping groove (5) is provided at the through-hole of the telescopic column (6) in the first mounting bracket (2). A fixed shaft (12) is fixedly provided at the top of the telescopic column (6). A rotating seat (7) is fitted on the fixed shaft (12). An extension rod (8) is fixedly mounted on the rear end of the rotating seat (7). An arc-shaped frame (9) is fixedly mounted on the top end of the extension rod (8) through a connecting frame (26). A second mounting frame (10) is fixedly mounted on the side of the telescopic column (6) below the extension rod (8). A first motor (11) is fixedly mounted on the second mounting frame (10). A flat gear (24) matching the arc-shaped frame (9) is fixedly mounted on the output end of the first motor (11). The front end of the rotating seat (7) is fixedly provided with a rotating groove (25). An electric telescopic rod (13) is provided in the rotating groove (25) through a retaining ring. The rotating seat (7) is fixedly provided with symmetrical second clamping grooves (14) on both sides of the rotating groove (25). A mechanical arm (15) is fixedly provided at the output end of the electric telescopic rod (13). The clamping part of the second clamping groove (14) is sleeved on the mechanical arm (15) and slidably connected to it. A helical gear ring (29) is fixedly provided on the outer wall of the electric telescopic rod (13). A second motor (16) is fixedly provided below the rotating groove (25) through a bracket. A helical gear (27) that meshes with the helical gear ring (29) is fixedly provided at the output end of the second motor (16). The robotic arm (15) is fixedly provided with a third mounting bracket (17) at one end away from the electric telescopic rod (13). The third mounting bracket (17) is fixedly provided with a dual-axis motor (18). A disc hard brush (19) is fixedly provided on one side of the output shaft of the dual-axis motor (18), and a grinding wheel (20) is fixedly provided on the other side of the output shaft of the dual-axis motor (18).

2. The automatic polishing cloth washing device according to claim 1, characterized in that, The third mounting bracket (17) extends above the wafer polishing mechanism (21). The wafer polishing mechanism (21) has a polishing cloth (23) fixedly mounted on the polishing disc (22). The movement trajectory of the disc hard brush (19) and the grinding wheel (20) satisfies the coverage of the polishing cloth (23). The wafer polishing mechanism (21) is fixedly equipped with a retaining ring (30) surrounding the grinding wheel (20). The grinding wheel (20) is fixedly connected to a lifting mechanism.

3. The automatic polishing cloth washing device according to claim 1, characterized in that, The arc frame (9) is a section of a ring with the fixed shaft (12) as the center point. The outer side of the arc frame (9) is fixed with a drive tooth pattern (28), which meshes with the flat gear (24).

4. The automatic polishing cloth washing device according to claim 1, characterized in that, The output end of the second motor (16) has a locking mechanism that locks when the dual-axis motor (18) is perpendicular to the polishing disc (22).

5. The automatic polishing cloth washing device according to claim 1, characterized in that, The control box (3) is equipped with an automatic control system. The automatic control system controls the hydraulic lifting rod (4), electric telescopic rod (13), first motor (11), second motor (16), and dual-axis motor (18) through electrical signals. The control box (3) is connected to the processing machine through processing digital signals.

6. An automatic polishing cloth washing method, using the automatic polishing cloth washing device according to any one of claims 1-5, characterized in that, Includes the following steps: Step 1: When it is necessary to brush the polishing cloth, the control box (3) sends a control signal, the hydraulic lifting rod (4) operates, the robotic arm (15) is lifted up, and the grinding wheel (20) leaves the polishing disc (22). Step 2: The locking mechanism on the second motor (16) is opened, the second motor (16) runs, the helical gear (27) rotates, and the helical gear ring (29) is driven to rotate by the tooth pattern, so that the electric telescopic rod (13) and the entire mechanical arm (15) and the third mounting frame (17) rotate. After rotating half a revolution, it stops and the locking mechanism locks. Step 3: The hydraulic lifting rod (4) is pressed down until the disc hard brush (19) contacts the polishing cloth (23), the dual-axis motor (18) runs, and the disc hard brush (19) rotates to brush the polishing cloth (23); Step 4: The robotic arm (15) drives the arc frame (9) to rotate around the fixed axis (12) from the edge of the polishing disc (22) through the operation of the first motor (11). The robotic arm (15) swings with the arm length as the radius. After swinging to the center position of the polishing disc (22), it returns to the edge position of the polishing disc (22). During this process, the electric telescopic rod (13) extends and retracts according to the cleaning position of the disc hard brush (19), and the number of back-and-forth brushing can be set as needed. Step 5: After the brushing is completed, the robotic arm (15) and the hydraulic lifting rod (4) return to the initial position. The third mounting bracket (17) rotates half a turn to align the grinding wheel (20) with the polishing disc (22) and sends a processing digital signal again to the processing machine to sense that the brushing is complete.

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