An inner wall roughness detection device for a steel cylinder

Abstract

The present invention belongs to the technical field of gas storage and transportation, and particularly relates to a device for detecting the inner wall roughness of a steel cylinder. The present invention includes a roughness meter and further includes a probe rod unit for installing the roughness meter. The roughness meter is extended into the gas cylinder through the probe rod, and then the probe rod is unfolded inside the steel cylinder in the manner of an umbrella so that the roughness meter is closely attached to the inner side surface of the steel cylinder, so as to achieve the purpose of detecting the inner wall roughness of the steel cylinder. The advantages of the present invention are as follows: after the roughness meter is extended into the steel cylinder, it can be in contact with the inner wall of the steel cylinder under the control of an external device to achieve the roughness test of the inner wall of the steel cylinder; a sliding frame is provided to support the steel cylinder and can drive the steel cylinder to move in the horizontal direction to achieve the function of detecting the roughness of different positions on the inner wall of the steel cylinder; a cylinder device is used to control the position adjustment of the roughness meter to achieve automatic control; a position indicating column is provided on the base on one side of the steel cylinder to display the position of the roughness meter in real time.

Description

Technical Field

[0001] The present invention belongs to the technical field of gas storage and transportation, and particularly relates to a device for detecting the inner wall roughness of a steel cylinder. Background Art

[0002] The electronics industry is a high-tech industry that promotes the development of science and technology. Due to the variety of gases used and high quality requirements, in order to distinguish the gases used in this field from those in other fields, the gases used in the electronics industry are collectively referred to as electronic special gases. It is a high-tech industry with high technical content, large investment, and high added value. The application fields of electronic special gases are mainly in the production and manufacturing of semiconductor integrated circuits, amorphous silicon solar cells, liquid crystal display devices, and optical fiber production, and are mainly used in the production and manufacturing of semiconductor integrated circuits. The inner surface of the gas cylinder is mainly filled with electronic gases with a purity of more than 99.9999%, such as sulfur hexafluoride (SF6), nitrogen trifluoride (NF3), nitrous oxide (N2O), helium (He), hydrogen chloride (HCl), silane (SiH4), etc. The inner surface roughness of an ordinary gas cylinder is Sa2.5, which is likely to leave impurities, making it difficult to meet the purity standard of the gas stored in the gas cylinder. Therefore, it is not possible to fill high-purity gases. Therefore, it is very necessary to detect the roughness of the inner surface of the gas cylinder before storing the gas.

[0003] However, due to the characteristics of the small opening and large internal volume of the gas cylinder itself, it is difficult for a conventional roughness meter to extend into the gas cylinder for detection. Therefore, there is an urgent need for a device that can extend a roughness meter into the gas cylinder for detection. Summary of the Invention

[0004] The purpose of the present invention is to provide a device for detecting the inner wall roughness of a steel cylinder, which extends a roughness meter into the gas cylinder through a probing rod, and then unfolds the probing rod inside the steel cylinder in the way of an umbrella so that the roughness meter is closely attached to the inner side surface of the steel cylinder to achieve the purpose of detecting the inner wall roughness of the steel cylinder.

[0005] The technical solution adopted by the present invention to solve the above problems is: a device for detecting the inner wall roughness of a steel cylinder, including a roughness meter, and further including a probing rod unit for installing the roughness meter; the probing rod unit includes a probing rod, a front movable rod provided at the front end of the probing rod and used for installing the roughness meter, a rear movable rod provided at the front end of the front movable rod, and a collar sleeved on the probing rod and used for installing the rear end of the rear movable rod.

[0006] A further preferred technical solution lies in that: the above device further includes a base unit for installing the probing rod unit, and a sliding frame provided on the base unit for carrying the steel cylinder; the base unit includes a vertical frame for installing the probing rod unit, a base for installing the vertical frame, and a sliding groove provided on the base and used for installing the sliding frame.

[0007] A further preferred technical solution is that: the probing rod unit further includes a translation rod disposed in the inner cavity of the probing rod, and a connecting rod disposed at the front end of the translation rod and used for connecting the inner side surface of the collar.

[0008] A further preferred technical solution is that: the base unit further includes a cylinder device connected to the rear end of the translation rod.

[0009] A further preferred technical solution is that: the base unit further includes a transmission rod connected to the air rod of the cylinder device, a lower translation rod disposed in the inner cavity of the base, a lower linkage rod transversely connecting the transmission rod and the lower translation rod, and a position indicating column portion disposed on the lower translation rod and aligned with the roughness meter.

[0010] A further preferred technical solution is that: the position indicating column portion includes a position indicating column disposed in the inner cavity of the base; the position indicating column is mounted on the lower translation rod and partially protrudes from the inner cavity.

[0011] A further preferred technical solution is that: the position indicating column portion further includes a speed regulating device connecting the position indicating column and the lower translation rod.

[0012] A further preferred technical solution is that: the speed regulating device includes a lower rack connected to the lower translation rod, an upper rack connected to the position indicating column, a lower gear meshing with the lower rack, a lower inner gear coaxially disposed with the lower gear, and an upper gear meshing with the lower inner gear and the upper rack.

[0013] A further preferred technical solution is that: the diameter ratio of the lower gear to the lower inner gear is 1:0.7 - 0.9.

[0014] A method for detecting the inner wall roughness of a steel cylinder, using the above-mentioned device for detecting the inner wall roughness of a steel cylinder.

[0015] The beneficial effects of the present invention are as follows:

[0016] First, after the roughness meter extends into the steel cylinder, it can contact the inner wall of the steel cylinder under the control of an external device to realize the roughness test of the inner wall of the steel cylinder;

[0017] Second, a sliding frame is provided to support the steel cylinder and can drive the steel cylinder to move in the horizontal direction to realize the function of detecting the roughness of different positions on the inner wall of the steel cylinder;

[0018] Third, a cylinder device is used to control the position adjustment of the roughness meter to achieve automatic control;

[0019] Fourth, a position indicating column is provided on the base on one side of the steel cylinder to display the position of the roughness meter in real time. Description of the Drawings

[0020] Figure 1 It is a schematic diagram of a device for detecting the inner wall roughness of a steel cylinder.

[0021] Figure 2 It is Figure 1 a schematic diagram showing the extension of the probing rod unit in

[0022] Figure 3 It is Figure 2 a schematic diagram of horizontally moving the position of the sliding carriage in

[0023] Figure 4 It is based on Figure 1 a schematic diagram of observing the steel cylinder from the right side under the

[0024] Figure 5 a schematic diagram of the structure of the probing rod unit.

[0025] Figure 6 a schematic diagram of the positions of the translation rod and the connecting rod.

[0026] Figure 7 a schematic diagram of the connection between the probing rod and the vertical frame.

[0027] Figure 8 a schematic diagram of the connection between the vertical frame and the base.

[0028] Figure 9 It is based on Figure 8 a schematic diagram of observing the transmission rod and the translation rod, and the lower linkage rod connecting the two from the right side under the

[0029] Figure 10 a schematic diagram of the installation position of the position indicating column part.

[0030] Figure 11 a schematic diagram of the structure of the position indicating column part.

[0031] In the drawings, the components represented by each reference numeral are as follows: steel cylinder A, roughness meter 1, probing rod unit 2, base unit 3, sliding carriage 4, probing rod 201, front movable rod 202, rear movable rod 203, collar 204, translation rod 205, connecting rod 206, vertical frame 301, base 302, sliding groove 303, cylinder device 304, transmission rod 305, translation rod 306, position indicating column part 307, lower linkage rod 308, position indicating column 307a, lower rack 307b, upper rack 307c, lower gear 307d, upper gear 307e, lower internal gear 307f. Detailed implementation manners

[0032] The present invention will be further described in detail below with reference to the accompanying drawings.

[0033] This specific embodiment is only an interpretation of the present invention and not a limitation thereof. After reading this specification, those skilled in the art may make modifications to this embodiment without creative contributions as needed, but as long as it is within the scope of the claims of the present invention, it is protected by the patent law.

[0034] Direction definition:

[0035] Front: refers to the direction close to the cylinder;

[0036] Rear: refers to the direction away from the cylinder;

[0037] Up: with the ground where the cylinder is located as the reference, the direction close to the ground;

[0038] Down: with the ground where the cylinder is located as the reference, the direction away from the ground;

[0039] Embodiment: Refer to Figure 1 , a device for detecting the inner wall roughness of a cylinder, including a roughness meter 1, and further including a probing rod unit 2 for installing the roughness meter 1; the probing rod unit 2 includes a probing rod 201, and a front movable rod 202 provided at the front end of the probing rod 201 for installing the roughness meter 1, a rear movable rod 203 provided at the front end on the front movable rod 202, and a collar 204 sleeved on the probing rod 201 and for installing the rear end of the rear movable rod 203. The roughness meter 1 is a commercially available model. Refer to Figure 5 , the method for operating the roughness meter 1 to enter the cylinder is as follows:

[0040] 1. Push the collar 204 to the frontmost end of the probing rod 201 so that the front and rear movable rods are in a straight line. At this time, the roughness meter 1 is basically in a straight line with the probing rod 201 and can easily penetrate into the cylinder;

[0041] 2. After the roughness meter 1 penetrates into the cylinder, pull the collar 204 backward so that the rear movable rod 203 drives the front movable rod 202 to extend downward until the roughness meter 1 touches the inner wall of the cylinder A.

[0042] In order to ensure the accuracy of the test results, it is necessary to measure the positions at different depths of the cylinder, so it is necessary to continuously move the position of the cylinder A during the measurement. Refer to Figures 2-3, the roughness detection device for the inner wall of the cylinder also includes a base unit 3 for installing the probing rod unit 2, and a sliding rack 4 provided on the base unit 3 for carrying the cylinder; the base unit 3 includes a vertical frame 301 for installing the probing rod unit 2, a base 302 for installing the vertical frame 301, and a sliding groove 303 provided on the base 302 and for installing the sliding rack 4. The cylinder A is placed in the placement groove above the sliding rack 4 by a forklift. When it is necessary to adjust the relative position between the cylinder A and the roughness meter 1, it is only necessary to move the sliding rack 4 along the extension direction of the sliding groove 303. The extension direction of the sliding groove 303 is always parallel to the axis of the probing rod 201.

[0043] <The moving mode of the collar 204 on the probing rod 201>

[0044] Reference Figures 1-3 , after the roughness meter 1 extends into the cylinder, it is very difficult to directly move the collar 204, so a device extending to the outside is needed to indirectly move the collar 204. The probing rod unit 2 further includes a translation rod 205 provided in the inner cavity of the probing rod 201, and a connecting rod 206 provided at the front end of the translation rod 205 and for connecting the inner side surface of the collar 204. Moving the translation rod 205 horizontally along the probing rod 201 can drive the collar 204 to move through the connecting rod 206.

[0045] In addition, in order to achieve the automatic movement effect of the translation rod 205, the base unit 3 further includes a cylinder device 304 connected to the rear end of the translation rod 205. The cylinder device 304 is a commercially available cylinder and is provided with a gas rod of a certain length. The opening, closing, and movement of the cylinder device 304 are controlled by an external program. The program is carried on a relevant control platform, and the control platform and the cylinder device 304 are connected together by an electrical connection method of the existing technology.

[0046] <The indicating method of the roughness meter 1>

[0047] Reference Figures 1-3, after the roughness meter 1 extends into the interior of the steel cylinder, since the steel cylinder itself is non-transparent, it becomes very difficult to confirm the specific position of the roughness meter 1 in the steel cylinder. And since the horizontal position of the roughness meter 1 will move during the process of approaching the inner wall of the steel cylinder, it is not feasible to set a position indicating mark at the same horizontal position as the roughness meter 1. Therefore, a position indicating device that can move together with the roughness meter 1 needs to be set. In this embodiment, the base unit 3 further includes a transmission rod 305 connected to the air rod of the cylinder device 304, a lower translation rod 306 arranged in the inner cavity of the base 302, a lower linkage rod 308 that laterally connects the transmission rod 305 and the lower translation rod 306, and a position indicating column part 307 arranged on the lower translation rod 306 and aligned with the roughness meter 1. When the air rod of the cylinder device 304 moves, it not only drives the translation rod 205 to move, but also drives the transmission rod 305 to move in the same direction as the translation rod 205. The transmission rod 305 then drives the position indicating column part 307 that plays a position indicating role to move in the same direction as the roughness meter 1 by transmitting force to the lower translation rod 306, so as to achieve the position indicating effect.

[0048] In addition, referring to Figure 8 , the lower linkage rod 308 is connected between the transmission rod 305 and the lower translation rod 306. The setting of the lower linkage rod 308 makes the position of the lower translation rod 306 on the side of the steel cylinder, so that the position indicating column part 307 is also arranged on the side of the steel cylinder, which is more convenient to observe than being arranged below the steel cylinder.

[0049] <Regarding the position indicating column part 307>

[0050] Referring to Figures 10-11 , the position indicating column part 307 includes a position indicating column 307a arranged in the inner cavity of the base 302; the position indicating column 307a is installed on the lower translation rod 306 and partially protrudes from the inner cavity.

[0051] However, due to the interlocking method of the front and rear movable rods, the horizontal movement distance of the roughness meter 1 is inconsistent with the horizontal movement distance of the air rod of the cylinder device 304. Specifically, the horizontal movement distance of the roughness meter 1 is less than the horizontal movement distance of the air rod of the cylinder device 304. This requires adjusting the movement of the position indicating column 307a so that it cannot be completely consistent with the movement distance of the lower translation rod 306. In this embodiment, the position indicating column part 307 further includes a speed regulating device that connects the position indicating column 307a and the lower translation rod 306. The speed regulating device is provided with a speed change mechanism, which can reduce the movement distance of the lower translation rod 306 and then transmit it to the position indicating column 307a, so that it can be accurately in the same position as the roughness meter 1.

[0052] Referring to Figure 11, the speed regulating device includes a lower rack 307b connected to the lower translation rod 306, an upper rack 307c connected to the position indicating column 307a, a lower gear 307d meshing with the lower rack 307b, a lower internal gear 307f coaxially arranged with the lower gear 307d, and an upper gear 307e meshing with the lower internal gear 307f and the upper rack 307c. The tooth sizes and pitches of the lower rack 307b, upper rack 307c, lower gear 307d, upper gear 307e, and lower internal gear 307f are the same. Among them, the diameter of the lower internal gear 307f is smaller than that of the lower gear 307d. In this way, after the lower rack 307b moves a certain distance, the distance transmitted to the upper rack 307c will be correspondingly shortened, so that the horizontal movement distance of the position indicating column 307a is consistent with that of the roughness meter 1, achieving an accurate positioning effect.

[0053] In addition, for gas cylinders of different specifications, the thickness of their inner walls is different, or there are differences in the installation positions of the front movable rod 202 and the rear movable rod 203 during installation, which will cause the position indicated by the position indicating column 307a to be different from the actual position of the roughness meter 1. At this time, fine adjustment needs to be carried out on the lower gear 307d and the lower internal gear 307f. A lower internal gear 307f with a larger or smaller diameter can be used to change the moving distance of the lower rack 307b driving the upper rack 307c, so as to achieve the effect of accurate regulation. In this embodiment, the diameter ratio of the lower gear 307d to the lower internal gear 307f is 1:0.7 - 0.9.

[0054] <Regarding the roughness meter>

[0055] The working principle of the roughness meter is the needle tracing method, also known as the stylus method. When the stylus directly glides gently over the measured surface of the workpiece, due to the undulation of the peaks and valleys of the measured surface profile, the stylus will move up and down in the direction perpendicular to the measured profile surface. This movement is amplified by an electronic device, and then relevant roughness data or graphics are output through a null indicator or other output devices.

[0056] The surface roughness measuring instrument adopting the principle of needle tracing method consists of a sensor, a driver, a null indicator, a recorder, and an inductive sensor which is one of the main components of the profilometer. At one end of the sensor probe, a diamond stylus is installed. The tip radius of curvature r of the stylus is very small. During measurement, the stylus is placed on the workpiece and contacts the measured surface vertically. The driver is used to drag the sensor at a certain speed. Due to the undulating peaks and valleys of the measured surface profile, when the stylus slides on the measured surface, it will move up and down. This movement causes the magnetic core to move up and down synchronously through the fulcrum, thereby changing the inductance of the two differential inductance coils surrounding the magnetic core. The coils of the sensor and the measuring circuit are directly connected to the balanced bridge. The change in the inductance of the coils causes the bridge to lose balance, so a signal proportional to the up and down displacement of the stylus is output. After the electronic device amplifies and phase-sensitive demodulates the change in this weak electric quantity, a signal representing the magnitude and direction of the stylus displacement is obtained. Thereafter, the signal is divided into three paths: one path is added to the null indicator to indicate the position of the stylus, one path is sent to the DC power amplifier, and after amplification, it drives the recorder to record; the other path, after being amplified by the filter and the average meter amplifier, enters the integral calculator for integral calculation, and the surface roughness Ra value can be directly read out by the indicating meter.

[0057] When the iron core is at the middle position of the differential inductance coil, the pointer of the null indicator indicates zero, that is, it is ensured to be within the linear range of inductance change. Therefore, before measurement, the null indicator must be adjusted to be at zero. After noise filtering and waviness filtering, what remains is the signal proportional to the measured surface roughness. After passing through the average meter amplifier, the output current I is proportional to the absolute value of the height y of each point on the measured surface profile deviating from the midline. Then, through the integral calculation completed by the integrator, the Ra value is obtained and displayed by the null indicator. This instrument is suitable for measuring Ra values of 0.02 - 10 μm. Among them, a few models of the instrument can also measure smaller parameter values. The instrument is equipped with various accessories to adapt to the inner cylindrical surface of the steel cylinder wall, as well as possible small holes, grooves and other shapes. The measurement is rapid and convenient, and the measured value accuracy is high.

[0058] In addition, the same or similar element symbols are used as much as possible in the drawings and the description to refer to the same or similar parts or steps. The drawings are presented in a simplified form and are not drawn to an exact scale. For convenience and clarity only, directional terms such as top, bottom, left, right, up, above, over, under, below, behind and in front may be used for the drawings. These and similar directional terms should not be construed as limiting the scope of the present disclosure in any way.

Claims

1. An inner wall roughness detection device for a steel cylinder, comprising a roughness meter (1), characterized in that, It further includes a probing rod unit (2) for installing the roughness meter (1); the probing rod unit (2) includes a probing rod (201), a front movable rod (202) provided at the front end of the probing rod (201) and for installing the roughness meter (1), a rear movable rod (203) with its front end provided on the front movable rod (202), and a collar (204) sleeved on the probing rod (201) and for installing the rear end of the rear movable rod (203); it further includes a base unit (3) for installing the probing rod unit (2), and a sliding rack (4) provided on the base unit (3) for carrying a steel cylinder; the base unit (3) includes a vertical frame (301) for installing the probing rod unit (2), a base (302) for installing the vertical frame (301), and a sliding groove (303) provided on the base (302) and for installing the sliding rack (4); the probing rod unit (2) further includes a translation rod (205) provided in the inner cavity of the probing rod (201), and a connecting rod (206) provided at the front end of the translation rod (205) and for connecting the inner side surface of the collar (204); the base unit (3) further includes a cylinder device (304) connected to the rear end of the translation rod (205); the base unit (3) further includes a transmission rod (305) connected to the air rod of the cylinder device (304), a lower translation rod (306) provided in the inner cavity of the base (302), a lower linkage rod (308) horizontally connecting the transmission rod (305) and the lower translation rod (306), and a position indicating column part (307) provided on the lower translation rod (306) and aligned with the roughness meter (1).

2. The inner wall roughness detection device for a steel cylinder according to claim 1, characterized in that, The position indicating column part (307) includes a position indicating column (307a) provided in the inner cavity of the base (302); the position indicating column (307a) is installed on the lower translation rod (306) and partially protrudes from the inner cavity.

3. The inner wall roughness detection device for a steel cylinder according to claim 2, characterized in that, The position indicating column part (307) further includes a speed regulating device connecting the position indicating column (307a) and the lower translation rod (306).

4. The inner wall roughness detection device for a steel cylinder according to claim 3, characterized in that, The speed regulating device includes a lower rack (307b) connected to the lower translation rod (306), an upper rack (307c) connected to the position indicating column (307a), a lower gear (307d) meshing with the lower rack (307b), a lower internal gear (307f) coaxially arranged with the lower gear (307d), and an upper gear (307e) meshing with the lower internal gear (307f) and the upper rack (307c).

5. The inner wall roughness detection device for a steel cylinder according to claim 4, characterized in that, The diameter ratio of the lower gear (307d) to the lower internal gear (307f) is 1:(0.7 - 0.9).

6. An inner wall roughness detection method for a steel cylinder, characterized in that, Use the inner wall roughness detection device for a steel cylinder according to any one of claims 1 - 5.

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